Anti-vibration linear guide rail device

Abstract

The invention relates to the technical field of mechanical engineering, and discloses an anti-vibration linear guide rail device which comprises a guide rail, a vertical vibration reduction sliding block structure, an objective table, a damping vibration reduction plate and a solid lubricating plate. The number of the vertical vibration reduction sliding block structures is at least two, the two vertical vibration reduction sliding block structures are arranged on the guide rail, the two vertical vibration reduction sliding block structures are connected through a damping vibration reduction plate, a solid lubricating plate is fixedly arranged below the damping vibration reduction plate, and an objective table is arranged above the damping vibration reduction plate; the damping vibration attenuation plate is made of a variable rigidity material; an electromagnetic coil in the vertical vibration attenuation sliding block structure is used for generating a changing magnetic field to change the rigidity of the damping vibration attenuation plate. The damping vibration attenuation plate is made of the magneto-rheological elastomer material, the variable magnetic field generated by the electromagnetic coil arranged in the guide rail is used for regulating and controlling the damping vibration attenuation plate in real time, the rigidity of the damping vibration attenuation plate is changed, and therefore the inherent frequency of a system is actively shifted, and the resonance condition is damaged.

Description

Technical Field

[0001] This invention belongs to the field of mechanical engineering technology, and specifically relates to an anti-vibration linear guide device. Background Technology

[0002] In modern industrial manufacturing and high-end equipment, guide rails, as core components for achieving linear motion, directly determine the operating accuracy, stability, and service life of equipment. With the deepening of industrial and intelligent manufacturing, the requirements for motion accuracy of equipment in fields such as precision machining, automated assembly, semiconductor manufacturing, and biomedicine have moved from the micrometer level to the nanometer level, placing unprecedentedly stringent demands on the vibration resistance, accuracy retention, and dynamic response characteristics of guide rails.

[0003] Currently widely used linear guides rely primarily on increasing structural rigidity or employing passive damping elements for vibration resistance design, which has significant limitations. Firstly, the structural stiffness and damping characteristics of these guides are fixed after manufacturing, resulting in one or more constant natural frequencies. When the equipment's operating speed changes or the processing load fluctuates, the periodic excitation frequencies generated by the motor and transmission system can easily coincide with the natural frequencies of the guide system, triggering structural resonance. Summary of the Invention

[0004] The purpose of this invention is to provide an anti-vibration linear guide device to solve the vibration, especially resonance, problem generated during the operation of linear guides.

[0005] Based on the above concept, the technical solution adopted by this invention is as follows: A vibration-resistant linear guide device is provided, characterized in that it includes a guide rail, a vertical vibration-damping slider structure, a platform, a damping plate, and a solid lubricating plate; The number of vertical vibration damping slider structures includes at least two, and the two vertical vibration damping slider structures are set on the guide rail. The two vertical vibration damping slider structures are connected by a damping plate. A solid lubricating plate is fixedly set below the damping plate, and a platform is set above the damping plate. The damping plate is made of a variable stiffness material; the electromagnetic coil in the vertical damping slider structure is used to generate a changing magnetic field to change the stiffness of the damping plate.

[0006] In some embodiments, the guide rail includes a guide rail body, a guide strip, a through hole, and an electromagnetic coil; Guide bars are provided on the upper sides of both sides of the guide rail body, and a through hole is provided in the middle of the guide rail body in the vertical direction. The electromagnetic coil is set inside the through hole.

[0007] Furthermore, the guide strip is made of a wear-resistant material.

[0008] Furthermore, the guide strip is made of wear-resistant ceramic material.

[0009] In some embodiments, the vertical damping slider includes a guide slider, a damping plate, and a connecting block; The inner surface of the guide slider has the same shape as the cross-sectional shape of the guide rail body. The guide slider is slidably mounted on the guide rail, and the damping plate is disposed between the connecting block and the guide slider.

[0010] In some embodiments, the inner surface of the guide slider is provided with a liquid storage tank and a lubricant nozzle; the lubricant nozzle is disposed inside the liquid storage tank.

[0011] Furthermore, the liquid storage tank contains lubricating fluid when the guide rail is in operation.

[0012] Furthermore, the lubricant nozzle injects lubricant into the reservoir at regular intervals.

[0013] In some embodiments, the length of the groove of the damping plate is the same as the length of the platform, and a solid lubricating plate is adhered to the bottom of the groove of the damping plate.

[0014] Furthermore, the solid lubricating plate is a graphene composite material.

[0015] Furthermore, the solid lubricating plate maintains contact with the top surface of the guide rail throughout its operation.

[0016] Furthermore, the guide rail operation includes both liquid lubrication and solid lubrication.

[0017] Furthermore, the particulate matter generated during solid lubrication is discharged through through holes in the guide rail.

[0018] In some embodiments, the material of the damping plate is a magnetorheological elastomer material used to change rigidity under a magnetic field.

[0019] In some embodiments, a vibration sensor is provided on the upper part of the stage.

[0020] In some embodiments, a control system is also included, which is electrically connected to the vibration sensor and the electromagnetic coil.

[0021] Furthermore, a first current is supplied to the electromagnetic coil to make the damping plate in a high stiffness state; a second current less than the first current or zero current is supplied to the electromagnetic coil to make the damping plate in a high damping state.

[0022] The beneficial effects of this invention are as follows: 1. The present invention sets the damping plate to be made of magnetorheological elastomer material and uses the changing magnetic field generated by the electromagnetic coil built into the guide rail to control it in real time, that is, to dynamically adjust the current of the electromagnetic coil and change the stiffness of the damping plate, thereby actively shifting the natural frequency of the system and destroying the resonance condition.

[0023] 2. The damping plate and the solid lubricating plate of the present invention constitute a damping-lubrication composite structure. The magnetorheological elastomer damping plate acts as a damper, responsible for absorbing and dissipating low- and medium-frequency vibration energy. The solid lubricating plate below it provides continuous lubrication, and its layered structure itself has excellent damping characteristics, which can effectively suppress high-frequency flutter. Attached Figure Description

[0024] Figure 1 This is an overall structural diagram of the linear guide device of the present invention.

[0025] Figure 2 This is a diagram of the guide rail structure of the present invention.

[0026] Figure 3 This is a schematic diagram of the vertical vibration damping slider structure of the present invention.

[0027] Figure 4 This is a partially enlarged view of the guide slider of the present invention.

[0028] Figure 5 This is a cross-sectional view of the damping plate of the present invention.

[0029] Figure 6 This is a structural diagram of the stage of the present invention.

[0030] Figure label: 1. Guide rail, 2. Vertical damping slider structure, 3. Platform, 4. Damping damping plate, 5. Solid lubricating plate, 6. Guide rail body, 7. Guide bar, 8. Through hole, 9. Electromagnetic coil, 10. Guide slider, 21. Damping plate, 22. Connecting block, 23. Liquid storage tank, 211. Lubricating fluid nozzle, 212. Vibration sensor, 31. and groove, 41. Detailed Implementation

[0031] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with some aspects of the invention as detailed in the appended claims.

[0032] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. Unless otherwise defined, the technical or scientific terms used in this application should be understood in their ordinary sense by one of ordinary skill in the art to which this invention pertains. The words “a” or “one” and similar terms used in this application specification and claims do not indicate a limitation of quantity, but rather indicate the presence of at least one. “A plurality” means two or more. The words “comprising” or “including” and similar terms mean that the element or object preceding “comprising” or “including” covers the element or object listed following “comprising” or “including” and its equivalents, and does not exclude other elements or objects. The words “connected” or “linked” and similar terms are not limited to physical or mechanical connections and can include electrical connections, whether direct or indirect. The words “above” and / or “below” and similar terms are for ease of description only and are not limited to a location or spatial orientation. The singular forms “a,” “the,” and “the” used in this application specification and appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0033] This application provides a vibration-resistant linear guide device, including a guide rail 1, a vertical vibration damping slider structure 2, a platform 3, a damping plate 4, and a solid lubrication plate 5; The number of vertical vibration damping slider structures 2 includes at least two, and the two vertical vibration damping slider structures 2 are set on the guide rail 1. The two vertical vibration damping slider structures 2 are connected by a damping damping plate 4. A solid lubricating plate 5 is fixedly set below the damping damping plate 4, and a platform 3 is set above the damping damping plate 4. The damping plate 4 is made of a variable stiffness material; the electromagnetic coil 14 in the vertical damping slider structure 2 is used to generate a changing magnetic field to change the stiffness of the damping plate 4.

[0034] When the system detects an intensification of vibration at a specific frequency, the natural frequency of the structure can be directly altered by increasing or decreasing the system stiffness in real time. This causes the structure to deviate from the dominant frequency of the external excitation, disrupting the phase condition for resonance. This "frequency shifting" effect prevents vibrational energy from accumulating within the system, thus effectively suppressing it. Simultaneously, in the non-resonance phase, appropriately reducing the stiffness allows for greater elastic deformation of the structure, enabling more effective dissipation of vibrational energy through internal friction of the material. Therefore, stiffness adjustment based on real-time vibration status achieves a synergistic vibration suppression mechanism that moves from "avoiding resonance" to "enhancing energy dissipation." This invention uses a magnetorheological elastomer material to make the damping plate 4, and uses a changing magnetic field generated by the electromagnetic coil 14 built into the guide rail 1 to adjust its stiffness in real time, thereby actively shifting the natural frequency of the system and breaking the resonance condition. The magnetorheological elastomer damping plate can also be used as a vibration damper to absorb and dissipate low- and medium-frequency vibration energy. The solid lubrication plate 5 below it provides continuous lubrication, and its layered structure itself has excellent damping characteristics, which can effectively suppress high-frequency flutter.

[0035] The following is in conjunction with the appendix Figures 1 to 6 This application provides a detailed description of an anti-vibration linear guide device.

[0036] like Figure 1 As shown, this application provides a vibration-resistant linear guide device, mainly comprising a guide rail 1, two vertical damping slider structures 2, a platform 3, a damping plate 4, and a solid lubricating plate 5. The two vertical damping slider structures 2 are respectively installed at both ends of the guide rail 1 and are connected to each other via the damping plate 4. The platform 3 is fixed to the upper surface of the damping plate 4, and the platform 3 is fixedly connected to the vertical damping slider structures 2 by bolts. The solid lubricating plate 5 is adhered to the lower surface, forming an integrated vibration-resistant structure of "slider-damping-platform".

[0037] In this embodiment, the guide rail 1 consists of a guide rail body 11, guide strips 12, through holes 13, and an electromagnetic coil 14. Guide strips 12 made of wear-resistant ceramic material are provided on both sides of the top of the guide rail body 11, effectively reducing sliding friction and wear. A through hole 13 is formed in the middle of the guide rail body 11 along its thickness direction, and an electromagnetic coil 14 is embedded inside to generate the magnetic field required to regulate the stiffness of the damping plate 4.

[0038] In this embodiment, the vertical vibration damping slider structure 2 consists of a guide slider 21, a damping plate 22, and a connecting block 23. The inner surface shape of the guide slider 21 matches the cross-section of the guide rail body 11 to ensure smooth sliding. The damping plate 22, made of nitrile rubber composite material, is disposed between the guide slider 21 and the connecting block 23 and provides initial buffering and vibration damping. The inner surface of the guide slider 21 is provided with a liquid storage tank 211 and a lubricating oil nozzle 212. The liquid storage tank 211 stores guide rail lubricating oil, and the lubricating oil nozzle 212 is connected to an external pipe, which can spray lubricating oil onto the guide rail 12 at regular intervals and in a measured amount, forming liquid-phase lubrication of the guide slider 21.

[0039] In this embodiment, the damping plate 4 is a plate-shaped structure with a groove 41 in its middle, the length of which is the same as that of the stage 3. A solid lubrication plate 5 is bonded to the bottom of the groove 41 using high-strength epoxy structural adhesive. The solid lubrication plate 5 is made of graphene composite material and remains in constant contact with the top surface of the guide rail 1 during device operation, achieving continuous solid lubrication. Together with the aforementioned liquid lubrication, it constitutes the solid and liquid lubrication system of the guide rail 1. Microparticles generated during lubrication can be discharged through the through-hole 13 on the guide rail 1, preventing a decrease in accuracy caused by chip accumulation.

[0040] In this embodiment, the core material of the damping plate 4 is a magnetorheological elastomer, which has a silicone rubber matrix and uniformly disperses micron-sized carbonyl iron powder. When the electromagnetic coil 14 inside the guide rail 1 is energized, a control magnetic field perpendicular to the damping plate 4 is generated. The magnetic particles in the magnetorheological elastomer are arranged in chains along the direction of the magnetic field lines, resulting in a significant increase in the macroscopic shear modulus of the material, realizing a reversible transition from a "high damping state" to a "high stiffness state".

[0041] In this embodiment, a vibration sensor 31 is embedded in the upper part of the stage 3. The sensor is electrically connected to an external control system, which is also connected to the drive module of the electromagnetic coil 14. The control system changes the state of the damping plate 4 in a timely manner based on the vibration frequency received by the vibration sensor 31 until the amplitude decreases.

[0042] Detailed implementation methods and principles: After the system is started, the lubricant nozzle 212 sprays lubricant into the reservoir 211 and guide bar 12 area at preset times according to a preset program, forming an oil film to reduce frictional vibration between the guide slider 21 and the guide rail 1. At the same time, the solid lubricating plate 5 is in continuous contact with the top surface of the guide rail, providing solid lubrication and playing a certain role in suppressing high-frequency chatter.

[0043] During operation, vibration sensor 31 collects vibration data of stage 3 in real time and transmits it to the control system. When vibration sensor 31 detects that the vibration amplitude at a specific frequency (such as close to the system's natural frequency) exceeds the safety threshold, the control system quickly controls the current change of electromagnetic coil 14. By changing the overall stiffness through the magnetic field, the system's natural frequency is actively shifted, effectively disrupting the resonance condition.

[0044] Other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the disclosure herein. The invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of the invention are indicated by the following claims.

[0045] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. An anti-vibration linear guide device characterized by comprising: The vertical damping slider structure (2), the damping damping plate (4) and the solid lubricating plate (5) are arranged on the guide rail (1). The vertical damping slider structure (2) is arranged on the guide rail (1), and the two vertical damping slider structures (2) are connected through the damping damping plate (4). The damping damping plate (4) is made of variable stiffness material; the electromagnetic coil (14) in the vertical damping slider structure (2) is used to generate a changing magnetic field to change the stiffness of the damping damping plate (4).

2. The anti-vibration linear guide device according to claim 1, characterized by The guide rail (1) comprises a guide rail body (11), a guide bar (12), a through hole (13) and an electromagnetic coil (14). The guide rail body (11) is provided with a guide bar (12) on both sides, and a through hole (13) is arranged in the middle of the guide rail body (11).

3. The anti-vibration linear guide rail device according to claim 1, wherein The vertical damping slider structure (2) comprises a guide slider (21), a damping piece (22) and a connecting block (23). The inner surface of the guide slider (21) is the same as the cross-sectional shape of the guide rail body (11), and the guide slider (21) is slidingly installed on the guide rail (1).

4. The anti-vibration linear guide rail device according to claim 3, wherein The inner surface of the guide slider (21) is provided with a liquid storage groove (211) and a lubricating liquid nozzle (212); the lubricating liquid nozzle (212) is arranged in the inside of the liquid storage groove (211).

5. The anti-vibration linear guide rail device according to claim 1, wherein The length of the groove (41) of the damping damping plate (4) is consistent with the length of the object table (3), and the bottom of the groove (41) of the damping damping plate (4) is bonded with the solid lubricating plate (5).

6. The anti-vibration linear guide rail device according to claim 1, wherein The variable stiffness material of the damping damping plate (4) is a magneto-rheological elastomer material used to change the stiffness under a magnetic field.

7. The anti-vibration linear guide rail device according to claim 1, wherein The upper part of the object table (3) is provided with a vibration sensor (31).

8. The anti-vibration linear guide rail device according to claim 1, wherein The control system is electrically connected with the vibration sensor (31) and the electromagnetic coil (14).

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