Observation assistance device

Abstract

A specimen observation assistance device is provided with an observation position display unit, a display processing unit, a representative image registration processing unit, a coordinate conversion processing unit, an input device monitoring processing unit, and a condition control unit. The input device monitoring processing unit acquires the position of the cursor, acquires stage coordinates associated with the representative image on the basis of the position of the cursor, and displays the stage coordinates on an observation position display unit while controlling the representative image to a size that is easily visible. The condition control unit performs processing so as to move the stage of the charged particle beam device to stage coordinates associated with the representative image.

Description

TECHNICAL FIELD

[0001] The present application relates to an observation assisting apparatus. BACKGROUND

[0002] A charged particle beam device is a device that operates a sample surface with a charged particle beam that is contracted to be thin in a vacuum, detects a signal from the sample, and produces a two-dimensional distribution image of the sample surface. Since observation is performed in a vacuum, it is not possible to confirm the observation sample by visual observation. An observation assisting function is known in which, in order to determine an observation position on a sample, an image captured at a lower magnification than an observation magnification is displayed, and an observation position is prompted on the captured low magnification image.

[0003] As prior art documents in the technical field, Patent Document 1 and Patent Document 2 are known.

[0004] In Patent Document 1, it is described that “according to the magnification at the time of acquiring an observation image and coordinates, a plurality of observation position display images at different magnifications are superimposed and displayed on an observation position display section, whereby even if the magnification of the observation image and the magnification of the image displaying the observation position are greatly different, the observation position can be prompted”.

[0005] In Patent Document 2, it is described that “in a wide area image, with respect to an observation image being displayed and a predetermined number of history images being displayed, a predetermined pattern indicating a relative position, a range, and an orientation in the wide area image based on each observation condition is displayed, and a user can intuitively recognize the relationship between the entire sample and each observation site”.

[0006] PRIOR ART DOCUMENTS

[0007] PATENT DOCUMENTS

[0008] Patent Document 1: International Publication No. 2017 / 090100

[0009] Patent Document 2: Japanese Patent Application Publication No. 2014-229587 SUMMARY

[0010] PROBLEMS TO BE SOLVED BY THE INVENTION

[0011] In the device of Patent Document 1, according to the magnification at the time of acquiring an observation image and coordinates, a plurality of observation position display images at different magnifications are superimposed and displayed on an observation position display section, whereby even if the magnification of the observation image and the magnification of the image displaying the observation position are greatly different, the observation position can be prompted.

[0012] However, in the method of Patent Document 1, in a case where the magnification of the observation position display section and the magnification of the image being displayed are greatly different, the image being displayed is easily lost from view, and it is difficult to determine the observation position of the image.

[0013] In the apparatus of Patent Literature 2, in order to be able to visually recognize the relationship of the entire sample and each observation site, each observation image photographed during observation of the sample is stored as a history image in association with the corresponding observation condition, a wide-area image that is one of the history images is displayed on the display section, and in the corresponding wide-area image, a predetermined pattern that indicates the relative position, range, and orientation in the wide-area image based on each observation condition is displayed with respect to the observation image being displayed and a predetermined number of history images being displayed.

[0014] However, in the method of Patent Literature 2, the history images are not displayed superimposed on the wide-area image region, so although it is possible to visually grasp the relationship of the sample and each observation site in terms of direction, position, size, and the like, it is not possible to visually perform confirmation and comparison related to the pattern and structure of the sample and each site.

[0015] In addition, Patent Literature 1 and Patent Literature 2 each display an observation position display image and an observation position display pattern on the display section, but do not control the stage of the charged particle beam device that utilizes the observation position display image and the observation position display pattern. That is, there is a problem in that navigation utilizing the representative image cannot be performed.

[0016] The present application was made in order to solve the above problem, and has an object to provide an observation assisting apparatus that does not miss the position of an observation position display image even if the current magnification of an observation position display section is greatly different from the magnification of the observation position display image.

[0017] In addition, an object of the present application is to provide an observation assisting apparatus that can use the observation position display image for sample navigation of a charged particle beam device.

[0018] Means for solving the problem

[0019] An example of an observation assisting apparatus for a sample according to the present application includes:

[0020] an observation position display section that displays the positions of a plurality of photographed images obtained by photographing a sample by a charged particle beam device in association with an image display section;

[0021] a display processing section that controls the observation position display section;

[0022] a representative image registration processing section that registers a representative image based on the plurality of photographed images;

[0023] a coordinate conversion processing section that processes mutual conversion of the coordinate system of the observation position display section and the stage coordinate system of the charged particle beam device;

[0024] The input device monitoring and processing unit monitors input operations via an input device using a cursor; and

[0025] The condition control unit changes the observation conditions and stage coordinates of the charged particle beam device.

[0026] The display processing unit controls the representative image to a size that is easily visually recognizable and displays it on the viewing position display unit according to the magnification of the image display unit.

[0027] The input device monitoring and processing unit obtains the position of the cursor and, based on the cursor position, obtains the stage coordinates associated with the representative image.

[0028] The condition control unit processes the data in a manner that moves the stage of the charged particle beam device to stage coordinates associated with the representative image.

[0029] Invention Effects

[0030] According to the present invention, even if the current magnification of the observation position display unit is significantly different from the magnification of the observation position display image, the observation position display image can be displayed at a size that is easily visually recognizable, so that the position of the observation position display image is not missed.

[0031] Furthermore, according to the present invention, regardless of the current magnification of the observation position display unit, it is possible to navigate the sample and set the shooting area based on the observation position display image displayed at an easily visually recognizable size.

[0032] Furthermore, further features related to the present invention become apparent from the description in this specification and the accompanying drawings. Additionally, issues, structures, and effects other than those described above become clear through the following description of embodiments. Attached Figure Description

[0033] Figure 1 This is an example of a schematic diagram of a charged particle beam device according to Embodiment 1 of the present invention.

[0034] Figure 2A This is a schematic diagram illustrating the registration and display of images in Embodiment 1 of the present invention.

[0035] Figure 2B This is a schematic diagram illustrating the registration and display of images in Embodiment 1 of the present invention.

[0036] Figure 3 This is a flowchart illustrating the navigation processing of a representative image in Embodiment 2 of the present invention.

[0037] Figure 4AThis is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0038] Figure 4B This is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0039] Figure 4C This is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0040] Figure 4D This is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0041] Figure 4E This is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0042] Figure 4F This is a schematic diagram illustrating the use of image-based navigation processing in Embodiment 2 of the present invention.

[0043] Figure 5 This is a flowchart illustrating the navigation processing within the display area representing an image in Embodiment 3 of the present invention.

[0044] Figure 6A This is a schematic diagram illustrating the navigation processing within the display area representing the image in Embodiment 3 of the present invention.

[0045] Figure 6B This is a schematic diagram illustrating the navigation processing within the display area representing the image in Embodiment 3 of the present invention.

[0046] Figure 6C This is a schematic diagram illustrating the navigation processing within the display area representing the image in Embodiment 3 of the present invention.

[0047] Figure 6D This is a schematic diagram illustrating the navigation processing within the display area representing the image in Embodiment 3 of the present invention.

[0048] Figure 7A This is a schematic diagram illustrating a control method for navigation processing within a display area representing an image in Embodiment 3 of the present invention.

[0049] Figure 7B This is a schematic diagram illustrating a control method for navigation processing within a display area representing an image in Embodiment 3 of the present invention.

[0050] Figure 7C This is a schematic diagram illustrating a control method for navigation processing within a display area representing an image in Embodiment 3 of the present invention.

[0051] Figure 8A This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage in Embodiment 4 of the present invention.

[0052] Figure 8B This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage in Embodiment 4 of the present invention.

[0053] Figure 8C This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage in Embodiment 4 of the present invention.

[0054] Figure 9A This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage (outside the origin) in Embodiment 4 of the present invention.

[0055] Figure 9B This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage (outside the origin) in Embodiment 4 of the present invention.

[0056] Figure 10 This is a flowchart illustrating the process of eliminating the magnified display size of an image in Embodiment 5 of the present invention.

[0057] Figure 11A This is a schematic diagram illustrating the process of eliminating the magnified display size of an image in Embodiment 5 of the present invention.

[0058] Figure 11B This is a schematic diagram illustrating the process of eliminating the magnified display size of an image in Embodiment 5 of the present invention.

[0059] Figure 12 This is a flowchart illustrating the navigation process performed within a display area representing an image by dragging a mouse in Embodiment 6 of the present invention.

[0060] Figure 13A This is a schematic diagram illustrating the navigation process performed within a display area representing an image by dragging a mouse in Embodiment 6 of the present invention.

[0061] Figure 13B This is a schematic diagram illustrating the navigation process performed within a display area representing an image by dragging a mouse in Embodiment 6 of the present invention.

[0062] Figure 14 This is a flowchart illustrating the navigation process performed by digital scaling operations within a display area representing an image, as described in Embodiment 7 of the present invention.

[0063] Figure 15A This is a schematic diagram illustrating the navigation process performed by digital scaling operations within a display area representing an image, as described in Embodiment 7 of the present invention.

[0064] Figure 15B This is a schematic diagram illustrating the navigation process performed by digital scaling operations within a display area representing an image, as described in Embodiment 7 of the present invention.

[0065] Figure 15C This is a schematic diagram illustrating the navigation process performed by digital scaling operations within a display area representing an image, as described in Embodiment 7 of the present invention.

[0066] Figure 15D This is a schematic diagram illustrating the navigation process performed by digital scaling operations within a display area representing an image, as described in Embodiment 7 of the present invention.

[0067] Figure 16A This is a schematic diagram illustrating the change in the magnification of the viewing position display unit in Embodiment 8 of the present invention.

[0068] Figure 16B This is a schematic diagram illustrating the change in the magnification of the viewing position display unit in Embodiment 8 of the present invention.

[0069] Figure 17 This is a flowchart illustrating the process of changing the observation conditions of the charged particle beam device in Embodiment 9 of the present invention.

[0070] Figure 18A This is a schematic diagram illustrating the change in observation conditions of the charged particle beam device in Embodiment 9 of the present invention.

[0071] Figure 18B This is a schematic diagram illustrating the change in observation conditions of the charged particle beam device in Embodiment 9 of the present invention.

[0072] Figure 18C This is a schematic diagram illustrating the change in observation conditions of the charged particle beam device in Embodiment 9 of the present invention.

[0073] Figure 19 This is a schematic diagram illustrating the settings for navigation operations in Embodiment 9 of the present invention.

[0074] Figure 20 This is a flowchart illustrating the continuous shooting setting steps based on coordinates specified within a display area representing an image, in Embodiment 10 of the present invention.

[0075] Figure 21A This is a schematic diagram illustrating the continuous shooting setting steps based on coordinates specified within a display area representing an image in Embodiment 10 of the present invention.

[0076] Figure 21BThis is a schematic diagram illustrating the continuous shooting setting steps based on coordinates specified within a display area representing an image in Embodiment 10 of the present invention.

[0077] Figure 22 This is a flowchart illustrating the continuous image capture setting step (range specification) in Embodiment 11 of the present invention.

[0078] Figure 23A This is a schematic diagram illustrating the continuous shooting setting step (range specification) of representative images in Embodiment 11 of the present invention.

[0079] Figure 23B This is a schematic diagram illustrating the continuous shooting setting step (range specification) of representative images in Embodiment 11 of the present invention.

[0080] Figure 23C This is a schematic diagram illustrating the continuous shooting setting step (range specification) of representative images in Embodiment 11 of the present invention.

[0081] Figure 23D This is a schematic diagram illustrating the continuous shooting setting step (range specification) of representative images in Embodiment 11 of the present invention.

[0082] Figure 23E This is a schematic diagram illustrating the continuous shooting setting step (range specification) of representative images in Embodiment 11 of the present invention.

[0083] Figure 24A This is a schematic diagram illustrating the rotation process of a polygon of arbitrary shape in Embodiment 11 of the present invention.

[0084] Figure 24B This is a schematic diagram illustrating the rotation process of a polygon of arbitrary shape in Embodiment 11 of the present invention.

[0085] Figure 24C This is a schematic diagram illustrating the rotation process of a polygon of arbitrary shape in Embodiment 11 of the present invention.

[0086] Figure 25 This is a schematic diagram illustrating the continuous shooting of a set screen (coordinates specified) in Embodiment 10 of the present invention.

[0087] Figure 26 This is a schematic diagram illustrating the continuous shooting of a set screen (range specified) in Embodiment 11 of the present invention. Detailed Implementation

[0088] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, functionally identical elements are sometimes shown with the same or corresponding numbers. Furthermore, the drawings illustrate embodiments and installation examples that follow the principles of this disclosure, but they are used to understand this disclosure and are in no way intended to limit its interpretation. The descriptions in this specification are merely typical illustrations and do not limit the scope of patent protection or application of this disclosure in any sense.

[0089] In this specification, the description has been provided in sufficient detail for those skilled in the art to implement this disclosure. However, other installations and methods are also possible, and it should be understood that structural and constructional changes and various element substitutions can be made without departing from the scope and spirit of the technical concept of this disclosure. Therefore, the following description is not intended to be limited thereto.

[0090] A charged particle beam apparatus is a device that uses an electric field to accelerate charged particles such as electrons and cations and irradiate them onto a sample. Charged particle beam apparatuses utilize the interaction between the sample and the charged particles for sample observation, analysis, and processing. The examples described below can be applied to various charged particle beam apparatuses (electron microscopes, electron beam plotting devices, ion processing devices, ion microscopes, and observation / inspection devices using them, etc.).

[0091] [Example 1]

[0092] Main references: Figure 1 , Figure 2A , Figure 2B

[0093] Main content: Explanation of system structure and control of representative images.

[0094] Reference Figure 1 The overall structure of the charged particle beam device 100 according to Embodiment 1 of the present invention will be described. As an example, the charged particle beam device 100 includes a sample chamber 101, a charged particle beam optical system 102, a sample stage 103, a stage 104, a detector 105, a vacuum pump 107, a charged particle beam imaging device 110, a computational control unit 120, a stage control device 130, an optical imaging device 150, a vacuum control device 140, and an optical system control device 170.

[0095] The sample chamber 101 is configured to maintain its interior in a vacuum state to prevent the scattering of charged particle beams and to accommodate a sample. The vacuuming operation of the sample chamber 101 can be performed by controlling the vacuum pump 107 via a vacuum control device 140. The vacuum control device 140 is equipped with a memory 141 for storing various parameters related to vacuum control.

[0096] The charged particle beam optical system 102 includes a charged particle source 161 that generates an electron beam, a converging lens 162 that focuses the electron beam emitted from the charged particle source 161 to a finer size, a deflector 163 that deflects the electron beam, and an objective lens 164 that converges the electron beam.

[0097] The optical system control device 170 includes a memory 171 for storing various parameters related to the control of the charged particle beam optical system 102, and has the following functions: to control the generation of an electron beam from the charged particle source 161, to converge the electron beam through a converging lens 162, to deflect / converge the electron beam through a deflector 163 and an objective lens 164, and to irradiate the sample 108 mounted on the sample stage 103.

[0098] Figure 1 The structure shown is one example. In addition to the elements shown, the charged particle beam optical system 102 may also include other lenses or electrodes, and a portion of the elements may be replaced with other similar elements. The details of the structure are not limited to those shown.

[0099] The sample stage 103 is mounted on the stage 104. The stage 104 allows the sample stage 103 to move within the sample chamber 101 along the XY directions (e.g., longitudinal and transverse). The sample stage 103 can rotate about a rotation axis (e.g., parallel to the Z-axis). The sample stage 103 holds the sample in a tilting position about the X or Y direction. The stage 104 is controlled by the stage control device 130 according to the calculation results in the calculation control unit 120, etc.

[0100] The detector 105 has the function of detecting reflected electrons, secondary electrons, backscattered electrons (electrons based on EBSD: Electron Back Scattered Diffraction Pattern, etc.), inelastic scattered electrons (electrons based on EELS: Electron Energy Loss Spectroscopy, etc.), Auger electrons, cathodoluminescence (CL: Cathodoluminescence), X-rays (EDS: Energy Dispersive X-ray Spectroscopy or WDS: Wavelength Dispersive X-ray Spectroscopy, etc.) emitted from the sample 108.

[0101] In addition, Figure 1Only one detector 105 is shown in the figure, but the number and position of detectors 105 are not limited to a specific number or position. By moving the stage 104 relative to the shooting range (field of view) of the optical camera 106, an overall image of the sample 108 for navigation purposes is obtained.

[0102] The charged particle beam imaging device 110 has the function of converting the signal detected by the detector 105 into an image, and internally includes a memory 111 for storing signal information. Additionally, the optical imaging device 150 has the function of capturing an optical image of the sample 108 inside the sample chamber 101 using an optical camera 106 and converting the captured signal into an optical image. The optical imaging device 150 internally includes a memory 151 for storing optical images.

[0103] The computational control unit 120 is a control unit that controls various components of the charged particle beam device 100 according to observation conditions input by the user, and controls the display of observation results. The computational control unit 120 is composed of an information processing device such as a computer. As an example, the computational control unit 120 internally includes a CPU 121 (processor), a main storage device 122 such as a memory, and a secondary storage device 123 such as a hard disk drive (HDD) or a solid-state drive (SSD).

[0104] In addition, the arithmetic control unit 120 includes an input unit 124 such as a keyboard, mouse, and touch monitor, a display unit 125 such as a liquid crystal display (including an image display unit 1251 and an observation position display unit 1252), and a communication unit (not shown) that communicates with each component of the charged particle beam device 100.

[0105] The arithmetic control unit 120 and the display unit 125 constitute the sample observation aid device of this embodiment, assisting in the observation of images obtained by the charged particle beam device 100 capturing images of the sample. In this embodiment, the observation aid device is configured as part of the charged particle beam device 100, but in a modified example, the observation aid device may also be configured independently of the charged particle beam device 100. In this case, for example, images output from the charged particle beam device 100 may also be acquired to assist in the observation of the images.

[0106] The main storage device 122 stores a computer program that controls the overall operation of the charged particle beam device 100. The computer program is executed by the CPU 121 and, as a function block, provides an information processing unit 1221, a representative image registration processing unit 1222, a display processing unit 1223, an input device monitoring processing unit 1224, a coordinate transformation processing unit 1225, and a condition control unit 1226, etc.

[0107] The information processing unit 1221 processes the control information of the charged particle beam device 100. For example, it is a processing unit that summarizes and processes (including numerical calculations) information such as accelerating voltage, emission current, magnification, beam point or working distance obtained from the optical system control device 170, signal, image name, image resolution, field of view, shooting time, and shooting time obtained from the charged particle beam imaging device 110, optical image name, optical image resolution, field of view, shooting time, and shooting time obtained from the optical imaging device 150, stage coordinates obtained from the stage control device 130, and vacuum degree obtained from the vacuum control device 140. It can also output the processed information as image attribute information.

[0108] The representative image registration processing unit 1222 is a control unit for registering the acquired optical image of the sample 108 or the image after signal transformation (observation image) as a representative image displayed at a size that is easy to visually recognize, or for deregistering the representative image. The representative image registration processing unit 1222 registers representative images based on multiple captured images.

[0109] The display processing unit 1223 is a processing unit that displays optical images of the acquired sample 108 or images obtained through signal transformation (observation images) based on information such as stage coordinates, stage rotation angle, magnification (field of view), and grating rotation (attribute information during imaging). Here, "grating rotation" is defined as rotation in the scanning direction of the charged particle beam. Furthermore, the display processing unit 1223 controls the observation position display unit 1252. For example, processing is performed so that even if the field of view of the image registered as a representative image is significantly different from the field of view of the observation position display unit 1252, the representative image is always displayed at a size that is easily visually recognizable.

[0110] The input device monitoring and processing unit 1224 continuously monitors the input operations of the input device (mouse, touch monitor, etc.) via the cursor in the observation position display unit 1252, and is, for example, a processing unit that determines whether the position specified by the mouse cursor is within the area representing the image.

[0111] The coordinate transformation processing unit 1225 is a processing unit that processes the mutual transformation between various types of coordinate systems, including the stage coordinate system of the charged particle beam device 100, the coordinate system of the image (observation image) transformed from the optical image or signal of the obtained sample 108, the coordinate system of the image registered as a representative image, and the coordinate system of the observation position display unit 1252.

[0112] The condition control unit 1226 is a control unit that, when using an image registered as a representative image for sample navigation, controls the reproduction processing of the observation conditions and coordinate information of the representative image in the charged particle beam device 100, and performs processing to switch the display field of view of the observation position display unit 1252 to an appropriate field of view. In this way, the condition control unit 1226 changes the observation conditions of the charged particle beam device 100 and the stage coordinates.

[0113] In this embodiment, the representative image refers to the image selected from the image group displayed on the observation position display unit 1252 based on a certain determined condition. To ensure that the display position of the representative image is not overlooked, the display scale or display size is constantly controlled to make the representative image an easily visually recognizable size. However, the meaning of "representative image" is not limited to this interpretation.

[0114] The stage control device 130 includes a coordinate storage unit 131, a control unit 132, and a drive unit 133. The coordinate storage unit 131 stores the coordinates of the stage 104. The control unit 132 controls the overall operation of the stage control device 130. The drive unit 133 generates drive signals to drive the stage 104. The control unit 132 obtains the stage coordinate information from the coordinate storage unit 131 and sends it to the calculation control unit 120. Thus, the calculation control unit 120 can determine the coordinate position of the captured image. Furthermore, the stage coordinates can be stored either by the stage control device 130 or by the calculation control unit 120.

[0115] Figure 2A-2B This is an example of a display screen showing the observation position of the charged particle beam device 100 in Embodiment 1. Figure 2A This is an example of the screen shown on the observation position display unit 1252.

[0116] The observation position display screen 2A01 is an image display unit that displays the acquired image based on information such as the shooting magnification, stage coordinates, and raster rotation (image attribute information at the time of image acquisition). This observation position display screen 2A01 can, for example, be configured as a virtual drawing canvas. Furthermore, the image attribute information in this embodiment includes inherent information associated with the image, such as the image name at the time of acquisition, the shooting time, the shooting time required, the magnification, the signal strength, and the image resolution.

[0117] The observation position display screen 2A01 serves as a reference point for the position, displaying images of the sample taken by the charged particle beam device 100. The displayed images include a background image and an image taken that shows the position of the sample in relation to the observation position display screen 2A01.

[0118] The observation position display screen 2A01 is aligned (correlated) with the stage coordinates of the charged particle beam device 100, and the position within the observation position display screen 2A01 corresponding to each part of the sample can be appropriately determined. As a more specific example, when (Xs, Ys) represents the stage coordinates and (Xp, Yp) represents the coordinates (pixel coordinates) of the observation position display screen 2A01, functions for determining Xp and Yp based on Xs and Ys, and / or functions for determining Xs and Ys based on Xp and Yp, are determined.

[0119] The method for implementing such alignment can be appropriately designed by those skilled in the art based on known techniques, but as an example, a three-point alignment process can be used, or a dedicated sample holder can be used.

[0120] The background image displayed on the observation position display screen 2A01 is, for example, an image obtained by the charged particle beam device 100 capturing a wide area of ​​the sample, but is not limited thereto. The background image is, for example, an image displayed according to the size of the observation position display screen 2A01. Alternatively, the background image may not be displayed (in this case, the background of the observation position display screen 2A01 may be set to blank, or other predetermined displays may be performed).

[0121] The captured image is an image obtained by the charged particle beam device 100 capturing the sample, such as display image 2A06. The observation position display screen 2A01 displays the positions of multiple display images 2A06 as multiple captured images. For example, the image captured by the charged particle beam device 100 is displayed on the observation position display screen 2A01, which is aligned with the stage coordinates of the charged particle beam device 100. In this way, the observation position display screen 2A01 displays the positions of multiple captured images obtained by the charged particle beam device 100 capturing the sample in correspondence with the image display section of the observation position display screen 2A01.

[0122] The magnification of the observation position display screen 2A01 is variable. The magnification of the observation position display screen 2A01 can be calculated based on the ratio of the size of the observation position display screen 2A01 to the field of view. Furthermore, the observation position display screen 2A01 can be aligned with the stage coordinates of the charged particle beam device 100 through affine transformation. For example, since the background image and the captured image, such as the displayed image 2A06, each have their own magnification at the time of acquisition, when the magnification of the observation position display screen 2A01 is increased, a portion of the background image and the captured image are scaled for display (i.e., the number of pixels on one side of the displayed image is variable).

[0123] Since the observation position display screen 2A01 and the background image and captured image displayed in the observation position display screen 2A01 have a screen magnification and an image magnification, respectively, they can be displayed at a size ratio corresponding to each magnification. For example, if the screen magnification of the observation position display screen 2A01 is 5000x, the magnification of the captured image is 20000x, and the number of pixels in the observation position display screen 2A01 is the same as the number of pixels when the captured image was captured, the captured image can be displayed in a scaled-down manner, with the size of the captured image on the screen becoming 1 / 4 of the size of the observation position display screen 2A01.

[0124] The following example illustrates this more specifically. Observe that the number of pixels in position display 2A01 is 1280. 960 pixels, initially displayed at a magnification of 20,000. Additionally, the captured image had a resolution of 1280 pixels. 960 pixels, with a magnification of 20,000x during shooting. In this case, the size of the captured image is the same as the size of the viewing position display screen 2A01 (i.e., the resolution (field of view to pixel ratio) of the viewing position display screen 2A01 is the same as that of the captured image), and the initially captured image is directly at 1280... The display size is 960 pixels. The display size of the captured image is determined based on the magnification or pixel count during shooting.

[0125] If the magnification of the viewing position display screen 2A01 is reduced (i.e., the field of view is expanded), the size of the captured image needs to be reduced according to the reduced magnification. For example, if the magnification of the viewing position display screen 2A01 is set to half of the original, i.e., 10,000 times, the size of the captured image is also set to half of the original (at the time of shooting), i.e., 640. 480 pixels. Additionally, with the magnification of the viewing position display screen 2A01 set to 1 / 4 of the initial value (5000x), the size of the captured image is also set to 1 / 4 of the initial value (at the time of shooting), i.e., 320. 240 pixels.

[0126] Conversely, if the magnification of the viewing position display screen 2A01 is increased (i.e., the field of view is narrowed), the size of the captured image needs to be enlarged according to the increased magnification. For example, if the magnification of the viewing position display screen 2A01 is set to twice the initial magnification, i.e., 40,000 times, the size of the captured image is also set to twice the initial (at the time of shooting), i.e., 2560. 1920 pixels.

[0127] In the example above, the size S1 of the captured image is changed so that the changed size S1 becomes the original size S0 of the captured image multiplied by the ratio (X1 / X0) of the changed magnification X1 of the viewing position display screen 2A01 to the original magnification X0 of the viewing position display screen 2A01. This results in S1 = S0. X1 / X0.

[0128] Furthermore, those skilled in the art can appropriately design methods for determining the display content when the size of the captured image is altered, based on known techniques. For example, when the size is reduced, a portion of the pixels can be removed; when the size is enlarged, a portion of the pixels can be generated through interpolation.

[0129] Next, we will explain the case where the magnification of the viewing position display screen 2A01 is extremely low compared to the magnification of the captured image (e.g., displayed image 2A06). For example, if the magnification of the viewing position display screen 2A01 is 5000x and a captured image with a magnification higher than 5000x is obtained, such as... Figure 2A The image is displayed as shown.

[0130] The observation position display screen 2A01 displays the magnification zoom button 2A02, the magnification zoom button 2A03, the magnification reset button 2A04, and the magnification display section 2A05.

[0131] The system allows selection of the display image 2A06 shown on the observation position display screen 2A01, and registration of that image as a representative image via a registration button (not shown) or similar means. Here, "registering an image as a representative image" or "registering a representative image" refers to the process of selecting a specific image from candidates for representative images (e.g., captured images) and determining the selected image as the representative image. It may also include processing that stores information indicating that the selected image is a representative image.

[0132] Here, the magnification of the observation position display screen 2A01 can be reduced by using the zoom-out button 2A03 or the mouse wheel, or the magnification of the observation position display screen 2A01 can be reset to the minimum magnification by using the zoom-reset button 2A04. The magnification of the observation position display screen 2A01 becomes extremely low compared to the image magnification of the display image 2A06 registered as the representative image (e.g., switching to 30x).

[0133] In this case, according to this embodiment, such as Figure 2BAs shown in the example, the display image 2A06, which is registered as the representative image, is controlled to a size that is always easily visually recognizable, and is displayed as the representative image 2B01 surrounded by a conversation balloon frame. In this way, the display processing unit 1223 controls the representative image 2B01 to a size that is easily visually recognizable and displays it on the observation position display screen 2A01 of the observation position display unit 1252, depending on whether the magnification of the image display unit of the observation position display screen 2A01 is changed.

[0134] Furthermore, the representative image registration processing unit 1222 registers the designated captured image as representative image 2B01. The specific registration process can be appropriately designed; for example, images can be manually specified, or representative image 2B01 can be automatically registered according to specific rules.

[0135] Furthermore, the base of the conversation balloon frame is displayed in a manner that indicates the coordinates at the time of observation or acquisition of the representative image 2B01 in the background image of the displayed specimen. Figure 2B In the example, the background image of the sample is shown, but it is also possible to omit the background image of the sample, or to show an image other than the background image of the sample. Additionally, a session balloon box is used to represent image 2B01, but other shapes of boxes can also be used, or no box may be used at all.

[0136] In addition, in this embodiment, the root of the conversation balloon frame is used to represent the shooting coordinates of image 2B01, but other shapes such as arrows can also be used, or the image can be cropped without arrows.

[0137] When the representative image 2B01 is positioned at the observation location for display, arrows or similar symbols may not be displayed. However, if the position of the representative image is changed by dragging the mouse or other means, arrows or similar symbols may be displayed to indicate the original position of the image.

[0138] In this embodiment, the image size refers to the size of the image when it is displayed on the screen (e.g., expressed in pixels), and does not necessarily correspond to the image data volume (e.g., the number of pixels when the image was captured). That is, by enlarging or reducing the same image, it can be displayed at various sizes.

[0139] Furthermore, in this embodiment, "controlling the representative image 2B01 to a size that is easily visually recognizable" includes, for example, controlling the representative image 2B01 to a specific size. A "specific size" could be, for example, a fixed size independent of the magnification of the display screen 2A01 at the viewing position. Alternatively, the size of the representative image 2B01 could be varied at a rate disproportionate to changes in the magnification of the display screen 2A01 at the viewing position.

[0140] The specific processing to achieve such size changes can be appropriately designed by those skilled in the art based on known techniques, as illustrated below. For example, if the virtual size (field of view) corresponding to the viewing position display screen 2A01 is 254mm, and the virtual size (field of view) representing image 2B01 is 127mm, then image 2B01 is displayed at half the size of the viewing position display screen 2A01.

[0141] Here, we assume the magnification of the viewing position display screen 2A01 is reduced to half of its original value. In this case, the field of view of the viewing position display screen 2A01 becomes twice its original value, i.e., 508mm. Assuming the field of view of the representative image 2B01 remains constant at 127mm, the field of view of the representative image 2B01 becomes 1 / 4 of the field of view of the viewing position display screen 2A01. Therefore, the size of the representative image 2B01 also becomes 1 / 4 of the size of the viewing position display screen 2A01. Thus, the size of the representative image 2B01 changes and does not become a fixed size.

[0142] In this embodiment, to fix the size of the representative image 2B01, the field of view of the display screen 2A01 at the observation position is changed. For example, if the field of view of the display screen 2A01 at the observation position is twice the original size, i.e., 508 mm, then if the field of view of the representative image 2B01 is also set to twice the original size, i.e., 254 mm, the size of the representative image 2B01 can be displayed fixedly. Similarly, if the field of view of the display screen 2A01 at the observation position is four times the original size, i.e., 1016 mm, then the field of view of the representative image 2B01 can also be set to four times the original size, i.e., 508 mm.

[0143] The specific processing described above can also be implemented using control of the display layer. The virtual size of the display layer corresponding to the observation position display screen 2A01 is used as the field of view of the observation position display screen 2A01. Additionally, the overlay display includes a representative image display layer for image 2B01, which has a different virtual size than the layer corresponding to the observation position display screen 2A01, and the field of view of the representative image 2B01 is determined based on the representative image display layer. In this case, according to the magnification change of the observation position display screen 2A01, the virtual size of the display layer changes, and the display position and display size of the sample background image and the captured image displayed in the display layer also change.

[0144] Here, by flexibly utilizing the changing display position, displaying the representative image 2B01 in the changing display position using a display layer with a representative image of a different virtual size, or changing the position pointed to by the root of the conversation balloon frame of the representative image 2B01, the representative image 2B01 can be continuously displayed at a size that is easy to visually recognize, regardless of the magnification change of the display screen 2A01 at the observation position.

[0145] The aforementioned "easily visually recognizable size" can also be a size that varies according to the magnification of the display screen 2A01 at the observation position. However, it is a size that is not simply proportional to the magnification of the display screen 2A01 at the observation position (for example, the changed size of the captured image is calculated as a size different from the aforementioned S1. That is, as a size different from size S1, this size S1 is obtained by multiplying the original size S0 of the captured image by the ratio (X1 / X0) of the changed magnification X1 of the display screen 2A01 at the observation position to the original magnification X0 of the display screen 2A01 at the observation position). (X1 / X0). For example, as the magnification of the display screen 2A01 decreases with the viewing position, the size of the representative image 2B01 can gradually decrease at a rate slower than the rate at which its magnification decreases.

[0146] (Effect)

[0147] As described above, when the magnification of the display screen 2A01 at the observation position is significantly different from that of the representative image 2B01, the representative image 2B01 can be controlled to a size that is easily visually recognizable, or displayed in the auxiliary display 2E01 at a size that is easily visually recognizable, so that the representative image 2B01 will not be missed and the observation position can be easily determined.

[0148] [Example 2]

[0149] Main references: Figure 3 , Figure 4A-4F

[0150] Main content: Explanation of the movement towards the position representing the center of the image.

[0151] Hereinafter, Embodiment 2 of the present invention will be described. Parts common to Embodiment 1 will sometimes be omitted from the description.

[0152] Reference Figure 3 The flowchart illustrates the navigation of the sample in the charged particle beam apparatus 100 using representative image 4A01.

[0153] First, in step S301, the input device monitoring and processing unit 1224 continuously monitors the position of the mouse cursor in the observation position display screen 2A01.

[0154] In step S302, when the user double-clicks any position on the observation display screen 2A01 with the left mouse button, the input device monitoring and processing unit 1224 obtains the screen coordinates, and in step S303, it determines whether the screen coordinates are within the display area representing the image 4A01.

[0155] If the screen coordinates are within the display area representing image 4A01, then as shown in step S304, the information processing unit 1221 obtains the stage coordinates (x, y) representing image 4A01 from an accompanying information file generated simultaneously during the capture of image 4A01, which contains information such as shooting conditions and stage coordinates. In this embodiment, only the coordinates (x, y) are described, but the X and Y coordinates can be substituted, or coordinates including R, Z, and T coordinates can be processed based on them.

[0156] Next, in step S305, the information processing unit 1221 generates a control signal based on the acquired stage coordinates and outputs it to the stage control device 130. The stage control device 130 drives the stage 104 to the movement position indicated by the stage control signal.

[0157] Next, in step S306, the information processing unit 1221 obtains the magnification of the image representing image 4A01 from an accompanying information file that was generated simultaneously during the capture of the image representing image 4A01 and contains information such as the capture conditions and stage coordinates. Based on the obtained magnification, the information processing unit 1221 generates an optical control signal and outputs it to the optical system control device 170. The optical system control device 170 controls the scanning range of the electron beam in a manner that reproduces the magnification shown in the optical control signal.

[0158] In this way, the condition control unit 1226 causes the charged particle beam device 100 to reproduce the magnification at which the representative image 4A01 was captured. As a result, the magnification is automatically reproduced, and the work efficiency is improved.

[0159] If the screen coordinates are outside the display area representing image 4A01 in step S303, the coordinate transformation processing unit 1225 obtains the screen coordinates in step S307, and transforms them into stage coordinates through affine transformation processing in step S308. The following shows the parallel translation transformation matrix of coordinates based on affine transformation.

[0160] [Formula 1]

[0161]

[0162] T x And T yThese represent the parallel translation amount (offset). If a parallel translation transformation matrix is ​​applied to the screen coordinates, they can be transformed into stage coordinates. In this embodiment, only parallel translation transformation is used, but rotation transformation, scaling, rotation and / or skew transformation can also be used depending on the application, and this embodiment is not limited to this one.

[0163] In step S309, the coordinate transformation processing unit 1225 outputs the transformed stage coordinates to the information processing unit 1221. The information processing unit 1221 generates a stage control signal and outputs it to the stage control device 130. The stage control device 130 drives the stage 104 to the movement position indicated by the stage control signal.

[0164] Figure 4A-4D This section explains the navigation operations for the respective samples in the observation position display screen 2A01 and the representative image 4A01.

[0165] Figure 4A This is an example of an observation position display screen 2A01. Such a screen displays a central dashed crosshair 4A05, indicating the center of the observation position display screen 2A01, so that even at extremely high magnification, the position coordinates can be easily determined based on the sample background image, etc.

[0166] In addition, in order to determine the field of view of the current magnification (the ratio of a predetermined reference size to the field of view) of the observation image display unit 1251 of the charged particle beam device 100, the coordinate transformation processing unit 1225 calculates the field of view in the observation image display unit 1251 based on the current magnification of the observed image in the display, and creates a rectangular dashed frame with the same size as the field of view in the display processing unit 1223, and displays it as the observation field of view dashed frame 4A06 in the observation position display screen 2A01.

[0167] Regarding the position of the observation field dashed frame 4A06, the coordinate transformation processing unit 1225 transforms the current stage coordinates into screen coordinates and configures the observation field dashed frame 4A06 accordingly. However, in the display, the observation field dashed frame 4A06 is always located in the center of the screen, and the position of the sample background image 4A02 in the display is changed.

[0168] In this embodiment, the observation field dashed frame 4A06 is fixed at the center of the screen according to the current stage coordinates, while the background image 4A02 of the displayed sample is moved. However, the background image 4A02 of the displayed sample can also be fixed while the observation field dashed frame 4A06 is moved; this embodiment is not limited to this one. The observation image corresponding to the observation field dashed frame 4A06 is displayed by the observation image display unit 1251 (see reference 1251). Figure 1 The image is shown in screen 4A07, which is an example of this screen and shows polygonal and crescent-shaped structures.

[0169] like Figure 4A As shown, when a double-click is performed at the position of the mouse cursor 4A04 (cursor) on the observation position display screen 2A01 using the left mouse button, the screen coordinates of that position are obtained to determine whether it is within the display area of ​​the representative image 4A01. Additionally, the representative image 4A01 is displayed together with the conversation balloon frame 4A03.

[0170] exist Figure 4A In one embodiment, since the double-click location is outside the display area representing image 4A01, the screen coordinates of that location are transformed into stage coordinates, and the stage 104 is moved to those stage coordinates.

[0171] As the stage 104 moves, such as Figure 4B As shown, the display processing unit 1223 moves, causing the position of the sample background image 4A02 in the double-click display to be at the center of the observation position display screen 2A01. At this time, the observation image display screen 4A07 changes the range of the sample under observation according to the movement of the stage 104, and therefore the observation image also changes.

[0172] exist Figure 4C In this case, when the left mouse button is double-clicked at the location of the mouse cursor 4A04 in the observation position display screen 2A01, it is determined that the acquired screen coordinates are within the display area representing image 4A01. In this case, the accompanying information file 4D01 (refer to...) generated simultaneously when image 4A01 was captured is used... Figure 4D Obtain the stage coordinates and shooting magnification, such as Figure 4D As shown, the stage 104 is moved to apply the shooting magnification to reproduce the field of view representing image 4A01 in the observation image display screen 4A07.

[0173] In this way, the input device monitoring and processing unit 1224 obtains the position of the mouse cursor 4A04 and obtains the stage coordinates associated with the representative image 4A01 based on the position of the mouse cursor 4A04. Then, the condition control unit 1226 processes the device to move the stage 104 of the charged particle beam device 100 to the stage coordinates associated with the representative image 4A01.

[0174] In particular, when the input device monitoring and processing unit 1224 determines that the position of the mouse cursor 4A04 is within the display area of ​​the representative image 4A01, the condition control unit 1226 processes the process by moving the stage 104 of the charged particle beam device 100 to the stage coordinates associated with the representative image 4A01. Thus, the stage coordinates are appropriately changed based on a double-click on the representative image 4A01.

[0175] In addition, at the same time, the display processing unit 1223 moves the display screen 2A01 to the center of the observation position display screen by double-clicking the position of the background image 4A02 of the sample in the display screen, and the size of the observation field dotted frame 4A06 also changes according to the magnification.

[0176] exist Figure 4A-4D In the example, it is described that the input device monitoring and processing unit 1224 monitors the input position of the input device, and performs transformation processing to the corresponding stage coordinates after determining whether the input position is within the display area representing the image 4A01, but this is not limited to the interpretation of this embodiment.

[0177] For example, such as Figure 4E As shown, if the display area representing image 4A01 within the viewing position display screen 2A01 comprises all pixels (the so-called attention screen coordinate region 4E01), the information of the stage coordinates representing image 4A01 is pre-embedded in the coordinate system of the attention screen coordinate region 4E01 (for example, if the attention screen coordinates 4E02 (X... i画面坐标 Y i画面坐标 The corresponding stage coordinates (X') i载物台坐标 Y' i载物台坐标 If the coordinates are stored as a coordinate array 4E03, then even without determining whether the input position of the input device is within the display area representing the image 4A01, the corresponding stage coordinates can still be obtained.

[0178] Or, such as Figure 4F As shown, if a table 4F01 is generated in advance to correspond the information of the stage coordinates representing the image 4A01 to the coordinate system of the field of interest coordinate area 4E01 for all pixels occupied by the display area representing the image 4A01 within the display area 2A01 of the observation position (the so-called field of interest coordinate area 4E01), then the corresponding stage coordinates can be obtained even without determining whether the input position of the input device is within the display area representing the image 4A01.

[0179] In addition, the location is described as being specified by double-clicking the left mouse button, but it can also be a single click, or an operation based on an input device other than a mouse, such as touch input. It should not be interpreted as limited to this embodiment.

[0180] (Effect)

[0181] In the case of conventional charged particle beam devices, if the display area of ​​the image 4A01 is represented by double-clicking the mouse cursor 4A04, the screen coordinates of the double-click are directly transformed into stage coordinates, and the stage 104 is moved to these stage coordinates. Therefore, it is impossible to reproduce the intended location of the image 4A01.

[0182] However, according to the charged particle beam device 100 of Embodiment 2, even if the magnification of the viewing position display screen 2A01 is extremely different, by determining whether it is the display area range of the representative image 4A01 that is always displayed at a size that is easy to visually recognize, the viewing field of the representative image 4A01 can be easily reproduced without operating the magnification and position of the viewing position display screen 2A01, which helps to improve operability.

[0183] [Example 3]

[0184] Main references: Figure 5 , Figure 6A-6D , Figure 7A-7C

[0185] Main content: Explains the control method for navigation processing based on the display area representing the image.

[0186] Hereinafter, Embodiment 3 of the present invention will be described. Parts common to Embodiments 1-2 will sometimes be omitted from the description.

[0187] Reference Figure 5 The flowchart illustrates the navigation processing within the display area representing the image in the charged particle beam device 100.

[0188] First, in step S501, the input device monitoring and processing unit 1224 continuously monitors the position of the mouse cursor in the observation position display screen 2A01.

[0189] In step S502, after the user arbitrarily changes the position of the mouse cursor 4A04 on the observation position display screen 2A01, the input device monitoring and processing unit 1224 obtains the screen coordinates of the position of the mouse cursor 4A04 and determines whether it is within the display area representing the image. If the screen coordinates are within the display area representing the image, the input device monitoring and processing unit 1224 continues to monitor the position of the mouse cursor 4A04.

[0190] In step S503, the input device monitoring processing unit 1224 determines whether the position of the mouse cursor 4A04 has remained within the display area of ​​the representative image for a predetermined time or longer. If it is determined that the mouse cursor 4A04 has remained for a predetermined time, then in step S504, the display processing unit 1223 enlarges and displays the representative image using a predetermined scale.

[0191] Thus, when the input device monitoring and processing unit 1224 detects that the position of the mouse cursor 4A04 has stayed within the display area of ​​the representative image for a predetermined time or more, the display processing unit 1223 enlarges and displays the representative image with a predetermined scale.

[0192] "Enlarge by a predetermined scale" includes, for example, enlarging to a predetermined display size larger than the original display size, but is not limited to this.

[0193] Next, in step S505, when the user double-clicks any position within the display area of ​​the enlarged representative image, in step S506, the input device monitoring and processing unit 1224 obtains the screen coordinates of that position.

[0194] Next, in step S507, the information processing unit 1221 obtains the stage coordinates (x, y) and magnification of the representative image from an accompanying information file generated simultaneously during the capture of the representative image, which contains information such as shooting conditions and stage coordinates. In this embodiment, only the coordinates (x, y) are described, but the X and Y coordinates may be substituted, or coordinates including R, Z, and T coordinates may be processed based on them.

[0195] In step S508, the screen coordinates obtained by the coordinate transformation processing unit 1225 are subjected to a parallel translation affine transformation, thereby transforming them into stage coordinates. Details of this coordinate transformation process will be described later (see Figure 7). Furthermore, in this embodiment, only a parallel translation transformation is used, but rotation transformations, scaling, rotation, skew transformations, etc., may also be used depending on the application, and this embodiment is not limited to this one.

[0196] In step S509, the coordinate transformation processing unit 1225 outputs the transformed stage coordinates to the information processing unit 1221, which generates a stage control signal and outputs it to the stage control device 130. The stage control device 130 drives the stage 104 to the movement position indicated by the stage control signal.

[0197] In step S510, the information processing unit 1221 generates an optical control signal based on the magnification obtained from the accompanying information file representing the image, and outputs the optical control signal to the optical system control device 170. The optical system control device 170 controls the scanning range of the electron beam in a manner that reproduces the magnification shown by the optical control signal.

[0198] In step S502, the input device monitoring and processing unit 1224 obtains the screen coordinates of the position of the mouse cursor 4A04. If it is determined that the screen coordinates are outside the display area representing the image, the processing steps S503 to S510 are omitted.

[0199] In step S503, if the input device monitoring and processing unit 1224 determines that the position of the mouse cursor 4A04 has not been within the display area representing the image for a certain period of time, then the processing steps S504 to S510 are omitted.

[0200] Figure 6A-6D It is a schematic diagram illustrating the navigation processing within the display area representing the image.

[0201] like Figure 6A As shown, if the input device monitoring and processing unit 1224 determines that the mouse cursor 4A04 in the viewing position display screen 2A01 has remained within the display area representing the image 4A01 for a preset time or longer, then as follows... Figure 6B As shown, the representative image 4A01 is magnified by the display processing unit 1223 using a predetermined scale and displayed as a magnified representative image 6B01. Details of the magnification process for the representative image will be described later (see [link to documentation]). Figure 7A ).

[0202] Next, in Figure 6C In the example, the enlarged representative image 6B01 shows two circular structures. As an example, when the mouse cursor 4A04 is moved to the center of the upper left circular structure, and the center is double-clicked with the left mouse button, a selection marker 6C01 appears at the clicked location (the center of the circular structure in this example). Figure 6C In this example, the location marker is selected using a cross-shaped marker, but other shapes such as circles, quadrilaterals, and triangles can also be used, and it is not limited to this embodiment.

[0203] The input device monitoring and processing unit 1224 obtains the screen coordinates of the selection position mark 6C01, and the information processing unit 1221 obtains the stage coordinates (x, y) and shooting magnification of the image from the accompanying information file generated simultaneously during the capture of the image, which contains information such as shooting conditions and stage coordinates.

[0204] Next, the coordinate transformation processing unit 1225 transforms the screen coordinates of the selected position mark 6C01 into the corresponding stage coordinates. Detailed processing of the coordinate transformation will be described later (see [link to documentation]). Figure 7B ).like Figure 6D As shown, the stage 104 is moved to the stage coordinates obtained through transformation processing, changing it to an appropriate magnification. In the observation image display unit 1251, the observation image of the sample corresponding to the screen coordinates of the selected position mark 6C01 is reproduced at an appropriate magnification, so that the circular structure is centered.

[0205] Here, the method for calculating the “appropriate magnification” can be appropriately determined by those skilled in the art. For example, it can be set to a magnification equal to the magnification of the representative image, a magnification close to the magnification of the representative image, or a magnification calculated as a result of image processing of the magnified representative image 6B01 (e.g., a magnification corresponding to the size of the smallest rectangle surrounding the region of the circular structure obtained by binarization processing and structure extraction processing of the magnified representative image 6B01).

[0206] In addition, the display processing unit 1223 moves the display sample background image 4A02 to the center of the observation position display screen 2A01 by selecting the screen coordinates of the position mark 6C01, and the size of the observation field dashed frame 4A06 also changes according to the applied magnification.

[0207] Figure 7A-7C This is a schematic diagram illustrating the control method for navigation processing within the display area representing the image.

[0208] Figure 7A This is a schematic diagram illustrating the affine transformation processing of the observation image and stage coordinate region captured by the charged particle beam device 100. Figure 7A In the example, for ease of calculation, both the X-axis to the right and the Y-axis below are set to positive in the coordinate systems of the observed image coordinate region 7A01 and the stage coordinate region 7A02, and the upper left vertex is set to the origin. In this case, if the width and height of the observed image coordinate region are set to ImgWidth and ImgHeight respectively, then as shown by the dashed line 7A03 of the image coordinate / stage coordinate transformation, the center position of the observed image coordinate region (ImgWidth / 2, ImgHeight / 2) can be associated with the actual stage coordinates (X, Y) through the following affine transformation.

[0209] [Formula 2]

[0210]

[0211] However, by using the above formula, the image coordinate region 7A01 and the stage coordinate region 7A02 are associated at a ratio of 1:1. Therefore, when the image coordinate region 7A01 is displayed in the observation position display screen 2A01, if the field of view of the image coordinate region 7A01 is extremely far from the field of view of the observation position display screen 2A01, the image region becomes too small and cannot be seen.

[0212] To prevent this, a scale control matrix is ​​applied, independent of the magnification of the display screen 2A01 at the observation position, so that the representative image is always displayed at a size that is easily visually recognizable. Thus, as... Figure 7B As shown, if the display size representing the image is changed by a scale control matrix (magnification: Scale) along with the change in the field of view of the display screen 2A01 at the observation position, it can always be displayed at a size that is easy to visually recognize.

[0213] [Formula 3]

[0214] Image coordinates / stage coordinates transformation matrix =

[0215]

[0216] In addition, such as Figure 6B As shown, in order to magnify the representative image with a predetermined scale when the mouse cursor 4A04 hovers for more than a predetermined time, the predetermined scale control matrix (magnification: SetScale) needs to be applied to the above transformation matrix.

[0217] [Formula 4]

[0218]

[0219] Thus, by using the above formula, the observed image coordinate region 7A01 can be used as the representative image display region 7B01, and a transformation to the stage coordinate region 7A02 can be performed.

[0220] Figure 7C This is a schematic diagram illustrating the affine transformation process from the image display area 7B01 to the viewpoint's coordinate area 7C02. Figure 7C In the example, for ease of calculation, the coordinate area 7C02 of the observation position display screen is the same as the coordinate area 7A01 of the observation image and the coordinate area 7A02 of the stage. Regarding the coordinate system, the right side of the X-axis and the bottom of the Y-axis are set as positive, and the upper left vertex is set as the origin.

[0221] In order to display the representative image display area 7B01 in the stage coordinate area 7A02 within the viewing position coordinate area 7C02, the pixel resolution of the two must first be made consistent. Therefore, scaling (display scale) needs to be applied to the representative image display area 7B01.

[0222] Next, the display position in the observation position display screen 2A01 needs to be used as the offset value. Figure 7C In the example, since the magnified representative image 6B01 is displayed at the coordinates (a, b) of the viewing position display screen coordinate area 7C02, the association can be established through the following affine transformation process.

[0223] [Formula 5]

[0224]

[0225] Additionally, the root of the conversation balloon frame surrounding the magnified representative image 6B01 refers to the actual shooting position (c, d) of the magnified representative image 6B01, which can be determined by the following method along the stage coordinate / screen coordinate transformation dashed line 7C01.

[0226] [Formula 6]

[0227]

[0228] Here, when double-clicking the position of the magnified representative image 6B01 displayed on the viewing position display screen 2A01, the corresponding stage coordinates can be obtained by applying the inverse transformation matrix of equation (4) to the screen coordinates (ClickX, ClickY) of the double-click.

[0229] [Formula 7]

[0230]

[0231] Figure 7A-7C The example illustrates an affine transformation process related to the x and y coordinates of the stage 104, but these coordinates can be substituted, or transformations can be performed on the R, Z, T coordinates, rotation direction coordinates of the observation position display screen 2A01, etc., based on these coordinates, and are not limited to this embodiment. Furthermore, the transformation process may also include the displacement in the x and y coordinates of the charged particle beam and the rotation of the scanning direction (grating rotation), etc., via an optical system control device.

[0232] (Effect)

[0233] As described above, when any position is specified within the display area of ​​the magnified representative image 6B01 displayed on the observation position display screen 2A01, the position is transformed into stage coordinates in a manner that allows for accurate movement to the specified position, and the stage 104 moves to those stage coordinates. In this embodiment, the operation is described for the display area of ​​the representative image magnified by mouse hover; however, the transformation of the stage coordinates can be performed even without magnifying the representative image, and is not limited to this embodiment.

[0234] [Example 4]

[0235] Main references: Figure 8A-8C , Figure 9A-9B

[0236] Main content: Explains the navigation processing that takes into account the rotation of the stage.

[0237] Hereinafter, Embodiment 4 of the present invention will be described. Parts common to Embodiments 1 through 3 will sometimes be omitted from the description.

[0238] Figure 8A-8C This is a schematic diagram illustrating the navigation process that takes into account the rotation of the stage 104. Figure 8A The operation unit 8A01 and the rotating bar 8A10 of the display screen 2A01 indicate the observation position.

[0239] The stage coordinate input unit 8A02 can operate on the X, Y, and R coordinates of the stage 104. The rotation origin input unit 8A03 can set the rotation origin of the stage 104. The area setting unit 8A04 is a setting unit for setting the imaging area for the sample, and can specify points and ranges (in... Figure 21A-26 (To be continued later).

[0240] Control setting button 8A09 calls up control setting screen 1900 (see reference). Figure 19 This refers to various settings used when operating the charged particle beam device 100. The rotation bar 8A10 is a marker used to display the rotation angle of the sample background image 4A02 in the display, and the display angle varies according to the rotation angle of the stage 104.

[0241] When displaying representative images of observations taken at different rotation angles of the stage 104, such as... Figure 8A As shown, each observation image is displayed according to its respective rotation angle. In this case, to account for the rotation of the stage, the rotation transformation matrix is ​​applied to equations (3) and (4) as follows. Here, θ represents the R coordinate of stage 104.

[0242] [Formula 8]

[0243]

[0244] [Formula 9]

[0245]

[0246] exist Figure 8B In the middle, the R coordinate is set to - by the stage coordinate input unit 8A02. In this case, observe the content displayed on screen 2A01, which rotates counterclockwise relative to the screen. Therefore, the representative image 8A11 taken at this angle is displayed vertically.

[0247] In this way, the coordinate transformation processing unit 1225 performs the above-mentioned mutual transformation of the coordinate system based on the rotation angle of the stage and the rotation center of the charged particle beam device 100.

[0248] Here, when the mouse cursor 4A04 hovers over the display area representing image 8A11 for a certain period of time, such as Figure 8CAs shown, the representative image 8A11 is magnified. When any position within the display area of ​​the magnified representative image 8C01 is specified, a selection position marker 6C01 is displayed at the specified position, and the screen coordinates of that position are obtained. In this case, according to equation (9) obtained by substituting equation (8) into equation (6), the obtained screen coordinates can be transformed into stage coordinates, enabling the stage 104 to move accurately.

[0249] [Formula 10]

[0250]

[0251] Figure 9A-9B This is a schematic diagram illustrating the navigation process for the rotation of the stage 104, taking into account cases other than the origin of rotation. (See diagram for example.) Figure 9A As shown, if the rotation origin center 9A01 of the stage 104 is located outside the center of the stage coordinate region 7A02, for example at (20, 10), and if the transformation matrix of equations (3) and (4) takes into account the rotation origin, representative images taken at different rotation angles can be displayed.

[0252] Here, when the stage 104 is rotated, as... Figure 9B As shown, the observation position display screen 2A01 rotates around the rotation origin center 9A01. Similarly, if equation (6) considering the rotation origin is used, the screen coordinates of any position in the display area representing the magnified image 8C01 can be transformed into stage coordinates, enabling the stage 104 to move accurately.

[0253] (Effect)

[0254] As described above, by applying a rotation transformation matrix to representative images captured by the stage 104 at different rotation angles, the stage 104 can be moved to any position within the display area of ​​the representative image displayed on the observation position display screen 2A01, just as in Embodiment 3, thus enabling sample navigation. Furthermore, even when the rotation origin of the stage 104 is other than (0, 0), sample navigation can still be performed if a transformation formula considering this rotation origin is generated.

[0255] [Example 5]

[0256] Main references: Figure 10~Figure 11B

[0257] Main content: Explanation of the process for eliminating the magnified display size of an image.

[0258] Hereinafter, Embodiment 5 of the present invention will be described. Parts common to Embodiments 1 through 4 will sometimes be omitted from the description.

[0259] Reference Figure 10 The flowchart illustrates the process of eliminating the magnified display representing an image by hovering the mouse over it.

[0260] First, in step S1001, when the mouse cursor 4A04 is moved within the display area of ​​the magnified representative image 6B01 on the viewing position display screen 2A01 using a predetermined scale, in step S1002, the input device monitoring and processing unit 1224 obtains the screen coordinates of the position of the mouse cursor 4A04 and determines whether it is within the display area of ​​the magnified representative image 6B01.

[0261] If the screen coordinates are within the display area of ​​the magnified representative image 6B01, then the magnified display of the magnified representative image 6B01 is maintained in step 1004.

[0262] If it is determined in step S1002 that the mouse cursor 4A04 has moved outside the display area of ​​the magnified representative image, then in step S1003, the display processing unit 1223 cancels the magnified display of the magnified representative image 6B01, that is, the display size of the magnified representative image 6B01 returns to the original display size of the representative image.

[0263] Figure 11A~11B This is a schematic diagram illustrating the elimination process of magnifying a representative image based on mouse hover.

[0264] like Figure 11A As shown, in the observation position display screen 2A01, when the mouse cursor 4A04 moves outside the display area of ​​the magnified representative image 6B01, as... Figure 11B As shown, the display processing unit 1223 eliminates the magnified display of the representative image 6B01 and restores the display size to become the representative image 4A01.

[0265] Thus, when the input device monitoring processing unit 1224 detects that the position of the mouse cursor 4A04 is outside the display area of ​​the magnified representative image 6B01, the display processing unit 1223 re-displays the magnified representative image 6B01, which was magnified and displayed with a predetermined scale, using the original scale.

[0266] (Effect)

[0267] As described above, by hovering the mouse over the display area of ​​the representative image 4A01 for a certain period of time, the magnified representative image 6B01, displayed with a predetermined scale, occupies a large amount of display space in the observation position display screen 2A01, thus sometimes hindering the confirmation of information about different areas of the sample. To prevent this, when the mouse cursor 4A04 is moved from the display area of ​​the magnified representative image 6B01, the magnified display of the representative image 6B01 is eliminated, increasing the amount of information that can be confirmed in the observation position display screen 2A01.

[0268] [Example 6]

[0269] Main references: Figure 12~Figure 13B

[0270] Main content: Navigation processing based on mouse drag operations within a display area representing an image.

[0271] Hereinafter, Embodiment 6 of the present invention will be described. Parts common to Embodiments 1 through 5 will sometimes be omitted from the description.

[0272] Reference Figure 12 The flowchart illustrates the navigation processing based on mouse dragging operations within the display area of ​​the magnified representative image 6B01.

[0273] Steps S1201 to S1204 can be the same as in Example 3 (refer to Example 3). Figure 5 Since they are the same, repeated descriptions are omitted.

[0274] In step S1205, the user sets any position within the display area of ​​the magnified representative image 6B01 as the starting point and drags the mouse from that position. In step S1206, if the position where the mouse drag operation ends is set as the ending point, the input device monitoring processing unit 1224 obtains the screen coordinates of the starting and ending points of the mouse drag and passes them to the display processing unit 1223. The display processing unit 1223 uses the screen coordinates of the starting and ending points to draw a rectangular mark within the display area of ​​the magnified representative image 6B01.

[0275] In step S1207, the display processing unit 1223 obtains the screen coordinates of the center position of the rectangular mark. In step S1208, the coordinate transformation processing unit 1225 transforms the coordinates into the corresponding stage coordinates through affine transformation processing and sends them to the information processing unit 1221.

[0276] Next, in step S1209, the information processing unit 1221 generates a stage control signal based on the acquired stage coordinates and outputs it to the stage control device 130. The stage control device 130 drives the stage 104 to the movement position indicated by the stage control signal.

[0277] In step S1210, the display processing unit 1223 obtains the screen coordinates of the upper left and upper right vertices of the rectangular marker, the coordinate transformation processing unit 1225 converts them into the corresponding stage coordinates through affine transformation processing, and sends them to the information processing unit 1221.

[0278] In step S1211, the information processing unit 1221 calculates the difference between the stage coordinates of the upper left and upper right vertices, and then calculates the magnification by measuring the ratio of a predetermined reference size to the difference. In step S1212, the information processing unit 1221 generates an optical control signal based on the calculated magnification and outputs it to the optical system control device 170. The optical system control device 170 controls the scanning range of the electron beam in a manner that reproduces the magnification shown by the optical control signal.

[0279] In this way, the coordinate transformation processing unit 1225 converts the screen coordinates of the upper left and upper right vertex positions, as well as the center position representing the magnified image 6B01, into the stage coordinate system, and calculates the magnification based on the ratio of the difference between the predetermined reference size and the stage coordinates of the upper left and upper right vertex positions. Then, the coordinate transformation processing unit 1225 enables the observation aid device to reproduce the stage coordinates of the center position and the magnification.

[0280] Figure 13A~13B This is a schematic diagram illustrating the navigation processing based on mouse drag operations within the display area of ​​the magnified representative image 6B01.

[0281] exist Figure 13A In the example, within the display area representing the magnified image 6B01, when the mouse is dragged with the lower right circular structure as the center, the starting position of the mouse drag is set to the drag start coordinate 13A01 of the mouse cursor 4A04, and the ending position of the mouse drag is set to the drag end coordinate 13A02. In this case, a rectangular marker 13A03 is drawn within the display area of ​​the magnified image 6B01 based on the drag start coordinate 13A01 and the drag end coordinate 13A02.

[0282] like Figure 13B As shown, the screen coordinates of the center position of the rectangular marker 13A03 are transformed into stage coordinates through an affine transformation, and the stage 104 is controlled to move to these stage coordinates. Similarly, after transforming the screen coordinates of the upper left and upper right vertices of the rectangular marker into their corresponding stage coordinates through an affine transformation, the difference between the stage coordinates is calculated.

[0283] When the ratio of the predetermined reference size to this difference is determined, the magnification is calculated and applied to the magnification of the observed image display screen 4A07. In this way, the field of view is reproduced in the observed image display screen 4A07 at the position and magnification corresponding to the rectangular mark 13A03.

[0284] In this way, the input device monitoring and processing unit 1224 obtains the start position and end position of the input operation within the display area of ​​the magnified representative image 6B01, and the display processing unit 1223 displays rectangular marks corresponding to the start position and end position in the display area of ​​the magnified representative image 6B01.

[0285] (Effect)

[0286] As described above, since the field of view corresponding to the position and magnification of the rectangular markers generated by any drag start position and drag end position can be reproduced within the display area of ​​the magnified representative image 6B01 displayed on the observation position display screen 2A01, the target field of view can be navigated to through intuitive and easy operation.

[0287] In this embodiment, a rectangular area is generated by dragging the mouse. However, as long as there is a means to obtain the coordinates of the start and end points other than dragging the mouse, the same function can be achieved. Therefore, the method is not limited to that of this embodiment.

[0288] [Example 7]

[0289] Main references: Figure 14~Figure 15D

[0290] Main content: Navigation processing based on digital scaling operations for representing the display area of ​​an image.

[0291] Hereinafter, Embodiment 7 of the present invention will be described. Descriptions of parts common to Embodiments 1-6 are sometimes omitted.

[0292] Reference Figure 14 The flowchart illustrates the navigation processing based on digital scaling operations within the display area representing image 6B01.

[0293] Input devices (such as mice) have rotating parts (hereinafter, for example, a mouse wheel).

[0294] In step S1401, the user performs a mouse wheel rotation operation within the display area of ​​the magnified representative image 6B01. The input device monitoring processing unit 1224 then obtains the rotation direction and amount of the mouse wheel and outputs them to the coordinate transformation processing unit 1225. In the coordinate transformation processing unit 1225, an appropriate scale transformation matrix is ​​generated based on the mouse wheel's rotation direction and amount.

[0295] Thus, when the mouse cursor 4A04 is within the display area of ​​the magnified representative image 6B01, the input device monitoring and processing unit 1224 obtains the rotation direction and amount of the mouse wheel. Then, the coordinate transformation processing unit 1225 generates a scale transformation matrix based on the rotation direction and amount of the mouse wheel.

[0296] In step S1402, the display processing unit 1223 applies the ruler transformation matrix to perform digital zoom-in / zoom-out within the display area of ​​the magnified representative image 6B01, centered on the mouse cursor 4A04, and thus zooms in / out of the display area. In this way, the display processing unit 1223 digitally scales the magnified representative image 6B01 by applying the ruler transformation matrix centered on the position of the mouse cursor 4A04.

[0297] Next, in step S1403, when the user double-clicks with the mouse cursor 4A04 to zoom in on any position within the display area representing the digital scaling of image 6B01, in step S1404, the input device monitoring processing unit 1224 obtains the screen coordinates of that position and outputs them to the coordinate transformation processing unit 1225.

[0298] In step S1405, the coordinate transformation processing unit 1225 transforms the screen coordinates into corresponding stage coordinates and sends them to the information processing unit 1221. Next, in step S1406, the information processing unit 1221 generates a stage control signal based on the acquired stage coordinates and outputs it to the stage control device 130. The stage control device 130 drives the stage 104 to the movement position indicated by the stage control signal.

[0299] Next, in step S1407, the display processing unit 1223 obtains the screen coordinates of the upper left and upper right vertices of the digitally scaled display area representing the magnified image 6B01 and outputs them to the coordinate transformation processing unit 1225. These screen coordinates are transformed into corresponding stage coordinates through affine transformation and sent to the information processing unit 1221.

[0300] In step S1408, the information processing unit 1221 calculates the difference between the stage coordinates of the upper left and upper right vertices, and then calculates the magnification based on the ratio of a predetermined reference size to the difference. In step S1409, the information processing unit 1221 generates an optical control signal based on the calculated magnification and outputs it to the optical system control device 170. The optical system control device 170 controls the scanning range of the electron beam in a manner that reproduces the magnification shown by the optical control signal.

[0301] Thus, the input device monitoring and processing unit 1224 obtains the position of the mouse cursor 4A04 within the display area of ​​the digitally scaled magnified representative image 6B01. The coordinate transformation processing unit 1225 transforms the position of the mouse cursor 4A04 into the stage coordinate system, converts the screen coordinates of the upper left and upper right vertices within the display area of ​​the digitally scaled magnified representative image 6B01 into the corresponding stage coordinate systems, calculates the difference between the stage coordinates of the upper left and upper right vertices, and then calculates the magnification based on the ratio of a predetermined reference size to this difference. The condition control unit 1226 moves the stage 104 of the charged particle beam device 100 to the position of the mouse cursor 4A04 transformed into the stage coordinate system and reproduces the calculated magnification.

[0302] Figure 15A~15D This is a schematic diagram illustrating the navigation processing based on digital scaling operations within the display area of ​​the magnified representation image 6B01.

[0303] exist Figure 15A In the example, within the display area of ​​the magnified representative image 6B01, digital scaling is performed with the mouse cursor as the center by rotating the mouse wheel, etc. In addition, in order to know the digital scaling scale of the magnified representative image 6B01, a digital scaling scale bar 15A01 is displayed on its left, and the digital scaling rate is set from the original display scale (min: minimum) to the predetermined maximum digital scaling scale (max: maximum).

[0304] exist Figure 15B In the example, the mouse wheel rotates between two circular structures, and the display area representing image 6B01 is digitally scaled according to the amount of rotation. Simultaneously, the slider on the digital scaling ruler 15A01 moves to the corresponding digital scaling rate.

[0305] In this way, the display processing unit 1223 displays a digital scaling ruler bar on the left side of the digitally scaled magnified representative image 6B01, and changes the position of the slider of the digital scaling ruler bar according to the digital scaling rate. Therefore, the user can easily change the digital scaling rate.

[0306] In addition, such as Figure 15C As shown, the user moves the mouse cursor 4A04 upwards within the display area of ​​the magnified representative image 6B01, which is in digital zoom mode, and double-clicks. The screen coordinates of the clicked location are then transformed into stage coordinates, and the stage 104 is moved to that position.

[0307] In addition, the screen coordinates of the upper left and upper right vertices in the digitally scaled display area representing image 6B01 are transformed into the corresponding stage coordinates. The magnification is obtained by calculating the ratio of the difference between the predetermined reference size and the stage coordinates, and then applied to the screen magnification of the observed image display screen 4A07.

[0308] Finally, as Figure 15D As shown, a rectangular marker 13B01 is drawn within the display area representing the image, corresponding to the digitally scaled area.

[0309] (Effect)

[0310] As described above, by further digitally scaling the display area of ​​the magnified representative image 6B01 displayed in the observation position display screen 2A01, sample navigation can be performed with higher precision.

[0311] Furthermore, since a magnification corresponding to the scaled range is applied, consistency with the user's operational intent can be maintained, allowing for intuitive operation.

[0312] In this embodiment, digital scaling based on mouse wheel rotation is described. However, the same function can be achieved by changing the digital scaling scale, except for mouse wheel rotation. Therefore, the method is not limited to that of this embodiment.

[0313] [Example 8]

[0314] Main references: Figure 16A~16B

[0315] Main content: Explanation of the change in magnification of the observation position display.

[0316] Hereinafter, Embodiment 8 of the present invention will be described. Descriptions of parts common to Embodiments 1-7 are sometimes omitted.

[0317] Figure 16A~16B This is the description and observation position display unit 1252 (see reference). Figure 1 A schematic diagram of the processing related to changes in the field ratio of the image.

[0318] exist Figure 16A In the example, in the observation position display screen 2A01, which is an example of the observation position display unit 1252, the user double-clicks the center of the upper left circular structure among two circular structures displayed within the magnified display area representing the image 6B01. Thus, in Figure 16BIn the same manner as described in Embodiments 2 to 7 above, the center of the image coordinates is transformed into stage coordinates through an affine transformation, and the stage 104 is controlled to move to these stage coordinates. Furthermore, the magnification is obtained from the accompanying information file of the magnified representative image 6B01 and applied to the magnification of the image display screen 4A07.

[0319] Here, the display position of the observation position display screen 2A01 is moved to match the coordinates of the double-clicked screen, and the screen scale is transformed so that the screen magnification also matches the shooting magnification of the magnified representative image 6B01. Figure 16B In the example, the center of the circular structure in the upper left corner becomes the center of the observation position display screen 2A01, and the screen magnification is switched to the shooting magnification representing the image, such as 5000x.

[0320] Thus, when the position of the mouse cursor 4A04 is within the display area of ​​the digitally scaled magnified representative image 6B01, the display processing unit 1223 switches the range in the magnified representative image 6B01 corresponding to the display area range to the range centered on the position of the mouse cursor 4A04, and uses the magnification of the magnified representative image 6B01 when it is captured as the magnification of the observation position display unit 1252.

[0321] (Effect)

[0322] As described above, when the user specifies any position within the display area of ​​the magnified representative image 6B01 displayed in the observation position display screen 2A01, the observation position display screen 2A01 switches to that position or an appropriate screen magnification, thus eliminating the hassle of operating the observation position display screen 2A01 and improving operability.

[0323] However, depending on usage, sometimes the automatic switching of the observation position display screen 2A01 actually worsens operability. Therefore, the control setting button 8A09 (see reference) can be used instead. Figure 8A The control settings screen 1900 (refer to) is accessed. Figure 19 The screen display control unit 1903 can switch the linkage between screen magnification and screen position.

[0324] In addition, in this embodiment, it is described as switching the magnification of the viewing position display screen 2A01 to the magnification of the representative image 6B01, but it can also be switched to other appropriate magnifications, and is not limited to this embodiment.

[0325] [Example 9]

[0326] Main reference image: Figure 17~19

[0327] Main content: Explanation of how to handle changes in observation conditions for charged particle beam devices.

[0328] Hereinafter, Embodiment 9 of the present invention will be described. Descriptions of parts common to Embodiments 1-8 are sometimes omitted.

[0329] Reference Figure 17 The flowchart describes how to handle changes in the observation conditions of the charged particle beam device 100.

[0330] In step S1701, for example, it is assumed that the current position of the stage 104 is within the display area representing image A, and the field of view is observed under observation condition A. In step S1702, the user manually operates the stage 104, or uses the navigation processing of embodiments 2-8, to move the stage 104 from the display area representing image A to the display area representing image B.

[0331] In step S1703, the information processing unit always manages the current coordinates of the stage 104. Therefore, when it detects that the stage 104 has entered the display area of ​​the image B, it obtains the observation condition B from the accompanying information file of the image B. In step S1704, the observation condition is applied to the charged particle beam device 100, and the observation condition is switched from observation condition A to observation condition B.

[0332] In this way, the condition control unit 1226 enables the charged particle beam device 100 to reproduce the observation conditions representing image B.

[0333] In addition, the "observation conditions" described in this embodiment include at least one of the accelerating voltage of the charged particle beam, beam intensity (intensity of the current flowing through the capacitor), beam scanning range (magnification), beam working distance (WD), image quality (contrast, brightness), and the type of signal detected from the sample (reflected electrons, secondary electrons, backscattered electrons, inelastic scattered electrons, Auger electrons, cathodoluminescence, X-rays).

[0334] Figure 18A~18C This is a schematic diagram illustrating the handling of changes in the observation conditions of the charged particle beam device 100.

[0335] exist Figure 18A In the example, the current position of the stage 104 is within the display area representing image A18A01. When observation condition A18A03 is applied in the charged particle beam device 100, a field of view as shown in the observation image display screen 4A07 is projected.

[0336] Here, when the mouse cursor 4A04 is hovered over the image representing B18A02 for a certain period of time, as... Figure 18BAs shown, the representative image B18A02 is magnified and displayed with a predetermined scale. If the vertex of the upper right protrusion of the star-shaped structure displayed in the magnified representative image 18B01 is double-clicked, the stage 104 moves to the clicked position through the navigation processing of Embodiment 3.

[0337] If the current position of the stage 104 is detected to have entered the display area of ​​representative image B18A02 or magnified the display area of ​​representative image 18B01, then... Figure 18C As shown, when the observation conditions of the charged particle beam device 100 are switched from observation condition A18A03 to observation condition B18C01, as shown in the observation image display screen 4A07, the appearance of the field of view changes.

[0338] (Effect)

[0339] As mentioned above, when navigating a sample, the observation conditions can be automatically switched according to the observation location, eliminating the hassle of manually adjusting the observation conditions and thus improving operability.

[0340] However, sometimes the automatic switching of observation conditions can actually worsen operability depending on the usage situation. Therefore, the control setting screen 1900 (refer to the control setting button 8A09) is accessed from the control setting button. Figure 19 The observation condition setting unit 1901 allows switching between the type of detection signal, acceleration voltage, intensity, working distance, and magnification for reproduction. Additionally, the coordinate condition setting unit 1902 allows switching between coordinate reproduction conditions.

[0341] In addition, in this embodiment, it is described as switching from the observation conditions of the observation position display screen 2A01 to the observation conditions of the representative image containing the current position of the stage 104. However, it can also be switched to conditions other than the observation conditions defined in this embodiment, and should not be interpreted as limited to this embodiment.

[0342] [Example 10]

[0343] Main references: Figure 20~Figure 21B , Figure 25

[0344] Main content: Explanation of the setup steps for continuous shooting using representative images (point specification).

[0345] Hereinafter, Embodiment 10 of the present invention will be described. Descriptions of parts common to Embodiments 1-9 are sometimes omitted.

[0346] Reference Figure 20 The flowchart illustrates the continuous shooting setup steps based on coordinates specified within the display area representing the image.

[0347] In step S2001, when the user clicks any position within the display area of ​​the magnified representative image, the input device monitoring processing unit 1224 obtains the screen coordinates of the clicked position and outputs them to the display processing unit 1223. In step S2002, the display processing unit 1223 displays a selection position marker 6C01 at the corresponding position within the display area of ​​the magnified representative image 6B01 based on the received screen coordinates.

[0348] In step S2003, the magnification of the continuously captured image group, the repetition between images, and the number of shots in the X and Y directions are set, centered on the screen coordinates of the selected position mark 6C01. In step S2004, the information processing unit 1221 outputs these setting information to the display processing unit 1223. Based on the setting information, the display processing unit 1223 represents each of the continuously captured images as a rectangular symbol, and displays them side-by-side in the display area of ​​the magnified representative image 6B01, while partially overlapping them in the X and Y directions, according to the number of shots.

[0349] Figure 21A~21B This is a schematic diagram illustrating the steps for setting up continuous shooting based on coordinates specified within the display area representing the image.

[0350] exist Figure 21A In the example, when the user clicks the coordinate assignment execution button 8A05 on the area setting unit 8A04, the observation position display screen 2A01 switches to a mode that allows setting a continuous shooting area based on coordinate assignment. In this mode, within the display area of ​​the magnified representative image 6B01, if the user specifies the center of the upper left circular structure among the two circular structures using the mouse cursor 4A04, a selection position marker 6C01 is displayed at that location.

[0351] Next, by clicking the coordinate assignment setting button 8A06, the following function is invoked: Figure 25 The coordinate setting screen 2500 is shown. In the coordinate setting screen 2500, the magnification of the continuously captured image group can be set by the magnification setting unit 2501 with the selected position mark 6C01 as the center, the repetition amount setting unit 2502 can set the repetition amount between images, and the number of shots in the X and Y directions can be set by the number of shots setting unit 2503.

[0352] like Figure 21B As shown, based on these setting information, the display processing unit 1223 sets the images continuously captured centered on the selected position mark 6C01 as rectangular symbols, and displays them in real time in the display area of ​​the magnified representative image 6B01 in the X and Y directions with a set number of images.

[0353] Thus, the display processing unit 1223 displays the designated position specified by the mouse cursor 4A04 within the display area of ​​the magnified representative image 6B01 using position markers. The information processing unit 1221 generates continuous shooting setting information based on the designated position. The setting information includes magnification, the amount of repetition between images, the number of shots in the X direction, and the number of shots in the Y direction. Based on the setting information, the display processing unit 1223 displays the image group involved in continuous shooting as a group of rectangular symbols.

[0354] Specifically, the display processing unit 1223 displays a designated center position specified by the mouse cursor 4A04 within the display area of ​​the magnified representative image 6B01 using a position marker. The information processing unit 1221 generates setting information centered on this designated center position.

[0355] exist Figure 21B In the example, a rectangular and semi-transparent symbol is used to represent continuously captured images, but non-rectangular or opaque symbols can also be used, and it should not be interpreted as limited to this embodiment.

[0356] In addition, in this embodiment, it is described that the continuous image group 21B01 is set with a specified coordinate as the center, but the specified coordinate can also be set as the center coordinate of the top leftmost image of the continuous image group 21B01, and is not limited to this embodiment for interpretation.

[0357] (Effect)

[0358] As described above, by implementing the setting of continuously shooting area using magnified representative image 6B01, even if the field of view of observation position display screen 2A01 (calculated based on the ratio of the size of observation position display screen 2A01 to the screen magnification) is extremely separated from the field of view of the sample object area to be continuously shot, the hassle of manually switching the field of view and position of observation position display screen 2A01 to search for the object area can be eliminated, which helps to improve operability.

[0359] Furthermore, since the set continuous shooting area is visualized as a rectangular symbol relative to the specified coordinates, the target area of ​​the sample can be set intuitively, thereby improving operability.

[0360] [Example 11]

[0361] Main references: Figure 22~Figure 23E , Figure 26

[0362] Main content: Explanation of the setup steps (range specification) for continuous shooting using representative images.

[0363] Hereinafter, Embodiment 11 of the present invention will be described. Descriptions of parts common to Embodiments 1-10 will sometimes be omitted.

[0364] Reference Figure 22 The flowchart illustrates the steps for setting up continuous shooting within a specified range that represents the display area of ​​the image.

[0365] In step S2201, when the user clicks on multiple arbitrary locations within the display area of ​​the magnified representative image 6B01, the input device monitoring processing unit 1224 obtains the screen coordinates of each clicked location and outputs them to the display processing unit 1223. Based on the received screen coordinates, the display processing unit 1223 displays a selection location marker 6C01 at each location.

[0366] In step S2202, upon completion of the click operation, the display processing unit 1223 sequentially connects multiple selection position markers 6C01, ultimately generating polygons with each position as a vertex, and displaying them within the display area of ​​the magnified representative image 6B01. This allows the user to create polygons of arbitrary shapes.

[0367] In step S2203, the display processing unit 1223 generates the smallest rectangle (the rectangle with the shortest diagonal length) that includes the entire polygon. Additionally, it calculates the screen coordinates of the four vertices of this rectangle and outputs them to the information processing unit 1221.

[0368] Next, in step S2204, the user sets the shooting magnification and the amount of repetition between images. The information processing unit 1221 calculates the number of shots to fill the rectangular area surrounding the polygon and displays the continuously captured images as rectangular symbols. Furthermore, by setting the shooting magnification and the amount of repetition between images, the field of view of a single image can be calculated.

[0369] Furthermore, if we transform the image coordinates of any two vertices of the rectangle enclosing the polygon (e.g., the top-left and top-right vertices, but also the top-left and bottom-right, bottom-left and bottom-right, top-left and bottom-left, etc.) into stage coordinates using an affine transformation, and then calculate the difference between the stage coordinates of the two vertices, we can determine the size of the rectangle enclosing the polygon. In this way, we can calculate the number of shots needed to fill the rectangular area enclosing the polygon.

[0370] In step S2205, the overlap determination of the continuously captured image group and the polygon is performed one by one from the top left to the bottom right. Furthermore, to improve the accuracy of the overlap determination between the continuously captured image group and the polygon, it is not performed in the screen coordinate system, but rather after transforming the region of the arbitrarily shaped polygon into the stage coordinate system.

[0371] In step S2206, the information processing unit 1221 performs a process to determine whether there is an overlapping area between the polygon and the captured image. If it is determined that there is an overlapping area between the two, in step S2207, the information processing unit 1221 sets the image as the continuously captured object image and repeats the overlap determination with the next image.

[0372] In step S2206, if it is determined that there is no overlapping area between the two, the information processing unit 1221 sets the image as an object image that is not continuously captured, and repeats the overlap determination with the next image.

[0373] Figure 23A~23E It is a schematic diagram illustrating the steps for setting up continuous shooting within a specified range of the display area representing the image.

[0374] exist Figure 23A In the example, when the range specification execution button 8A07 of the area setting unit 8A04 is clicked, the observation position display screen 2A01 switches to a mode that allows setting a continuous shooting area based on range specification. In this mode, within the display area of ​​the magnified representative image 6B01, when multiple arbitrary positions are sequentially specified around the periphery of the upper left circular structure among the two circular structures, selection position markers 6C01 are displayed at each position.

[0375] exist Figure 23B When the user indicates that the click operation is complete, the display processing unit 1223 sequentially connects multiple selection position markers 6C01 to generate a polygon 23B01, which is then displayed in the display area of ​​the magnified representative image 6B01.

[0376] In this way, the display processing unit 1223 connects the designated positions with lines to display the polygon. As a result, the user can easily specify the shape of the polygon.

[0377] Next, specify the range setting button 8A08, as shown below. Figure 26 The indicated call range setting screen 2600. In the range setting screen 2600, if the magnification of a group of images captured in succession is set by the magnification setting unit 2501 and the repetition amount between images is set by the repetition amount setting unit 2502, the field of view of an image can be calculated.

[0378] In addition, such as Figure 23D As shown, if the screen coordinates of the vertices of the rectangle 23D01 that encloses the polygon 23B01 (e.g., the two vertices in the X direction, or the two vertices located at opposite corners) are transformed into stage coordinates through affine transformation, and the difference between the stage coordinates of the two vertices is calculated, then the size of the rectangle enclosing the polygon can be obtained.

[0379] Next, if a determination process is performed to determine whether there is an overlapping region between the polygon and the captured image, automatic setting of continuously captured object images can be achieved. In this embodiment, the setting... Figure 23E The number of images captured in a continuous shooting image group 23C01 is displayed on the total number of images display unit 2601 of the range specification setting screen 2600.

[0380] In this way, the display processing unit 1223 displays two or more designated positions specified by the mouse cursor 4A04 within the display area of ​​the magnified representative image 6B01 using position markers. The information processing unit 1221 generates continuous shooting setting information based on each designated position. Based on the setting information, the display processing unit 1223 displays the image group involved in the continuous shooting as a group of rectangular symbols.

[0381] Furthermore, the information processing unit 1221 calculates the field of view of an image based on the magnification included in the setting information and the amount of repetition between images. Next, the information processing unit 1221 calculates the size of the rectangle surrounding the polygon based on the difference between the stage coordinates of the two vertices of the rectangle surrounding the polygon. Then, the information processing unit 1221 calculates the number of images based on the field of view of an image and the size of the rectangle, thus filling the rectangular area. Next, the information processing unit 1221 selects one or more images from the image group related to continuous shooting as the images to be captured based on the overlap determination result between the image group and the polygon. According to this processing, it is possible to efficiently capture only the required area.

[0382] Next, when the continuously captured image group 23C01 is transformed to the screen coordinate system through affine transformation, as follows: Figure 23C As shown, the object image is displayed as a rectangular symbol within the enlarged display area representing image 6B01.

[0383] exist Figure 23C In the 23D example, a rectangular and semi-transparent symbol is used to represent continuously captured images, but non-rectangular or opaque symbols can also be used, and should not be interpreted as limited to this embodiment.

[0384] In addition, in this embodiment, the overlap determination of the region between the polygon of arbitrary shape and the rectangular symbol representing the image is performed in the stage coordinate system. However, the determination can also be performed in the screen coordinate system in the viewing position display screen 2A01. This is not limited to the interpretation in this embodiment.

[0385] In addition, in this embodiment, the setting of the continuous shooting area of ​​X and Y coordinates is described, but the rotation angle of the set area can also be changed, and it should not be interpreted as limited to this embodiment.

[0386] For example, such asFigure 24A As shown, when the user selects polygon 23B01, a region bounding rectangle 24A01 is displayed as the rectangle enclosing the polygon. The region bounding rectangle 24A01 has a rotation operation unit 24A02. If the user performs a rotation operation (e.g., clockwise) while holding the rotation operation unit 24A02 of the region bounding rectangle 24A01, then... Figure 24B As shown, polygon 23B01 rotates clockwise. That is, when the rotation operation unit 24A02 is operated via the mouse cursor 4A04, the polygon rotates accordingly. This processing allows the user to more freely specify the area to be photographed.

[0387] Finally, as Figure 24C As shown, the image rectangle symbol representing the continuously captured image group 22A03 is set in a rotated state.

[0388] This embodiment describes rotating a polygon, but it can also involve changing the size and position of the polygon, and should not be interpreted as limited to this embodiment.

[0389] (Effect)

[0390] As described above, by implementing the setting of a continuously captured area of ​​arbitrary shape representing the magnified image 6B01, even if the field of view of the observation position display screen 2A01 (calculated based on the ratio of the size of the observation position display screen 2A01 to the screen magnification) is extremely different from the field of view of the sample object area to be continuously captured, the effort of manually switching the field of view and position of the observation position display screen 2A01 to search for the object area can be omitted, which helps to improve operability.

[0391] Furthermore, since the continuous shooting area is visualized as a rectangular symbol relative to the specified coordinates, the target area of ​​the sample can be set intuitively, which further improves operability.

[0392] Symbol Explanation

[0393] 100…charged particle beam device

[0394] 101…Sample Chamber

[0395] 102… Charged Particle Beam Optical System

[0396] 103…sample stage

[0397] 104…Stage

[0398] 105… detector

[0399] 106… Optical Camera

[0400] 107…vacuum pump

[0401] 108…sample

[0402] 110… Charged Particle Beam Imaging Device

[0403] 111…memory

[0404] 120…Computation and Control Department

[0405] 121…CPU

[0406] 122…Main storage device

[0407] 1221…Information Processing Department

[0408] 1222… represents the Image Registration and Processing Department.

[0409] 1223… Display Processing Unit

[0410] 1224…Input Device Monitoring and Processing Unit

[0411] 1225… Coordinate Transformation Processing Department

[0412] 1226…Condition Control Department

[0413] 123…Secondary storage device

[0414] 124… Input Section

[0415] 125… Display Section

[0416] 1251…Observe the image display section

[0417] 1252…Observation position display unit

[0418] 130…Stage control device

[0419] 131… Coordinate Storage Department

[0420] 132…Control Department

[0421] 133…Drive Department

[0422] 140…Vacuum control device

[0423] 141… Memory

[0424] 150… Optical imaging device

[0425] 151… Memory

[0426] 161…charged particle source

[0427] 162… Converging Lens

[0428] 163… Deflector

[0429] 164…objective lens

[0430] 170…Optical System Control Device

[0431] 171… Memory

[0432] 2A01…Observe the position display screen

[0433] 2A02…Magnification button

[0434] 2A03…Magnification reduction button

[0435] 2A04…Rate Reset Button

[0436] 2A05…Magnification Display Section

[0437] 2A06… Displaying image

[0438] 2B01… represents an image

[0439] 2E01…Auxiliary Display

[0440] 4A01… represents an image

[0441] 4A02… displays the background image of the sample.

[0442] 4A03…Conversation Balloon Frame

[0443] 4A04…Mouse cursor (cursor)

[0444] 4A05… Dotted crosshair in the center

[0445] 4A06…Observational field of view (dashed box)

[0446] 4A07…Observe the image display screen

[0447] 4D01… Attached Information File

[0448] 4E01…Focus on the screen coordinate area

[0449] 4E02…Focus on screen coordinates

[0450] 4E03… Coordinate Array

[0451] 4F01… Correspondence Table

[0452] 6B01… Enlarged representation image

[0453] 6C01…Select Location Marker

[0454] 7A01…Observe the coordinate region of the image

[0455] 7A02…Stage coordinate area

[0456] 7A03… Image coordinate / stage coordinate transformation dashed line

[0457] 7B01… represents the image display area.

[0458] 7C01… Dashed line representing the transformation of stage coordinates / screen coordinates

[0459] 7C02…Observe the coordinate area displayed on the screen.

[0460] 8A01…Operations Department

[0461] 8A02…Stage coordinate input section

[0462] 8A03… Rotating Origin Input Section

[0463] 8A04…Regional Setting Department

[0464] 8A05… Coordinates specified for execution button

[0465] 8A06… Coordinate Assignment Setting Button

[0466] 8A07… Scope specifies the execution button

[0467] 8A08… Range specification setting button

[0468] 8A09…Control Setting Button

[0469] 8A10…Spinning bar

[0470] 8A11… represents an image

[0471] 8C01…Magnified representation of the image

[0472] 9A01… Center of rotation origin

[0473] 13A01… Drag the starting coordinates

[0474] 13A02… Drag the endpoint coordinates

[0475] 13A03… Rectangular mark

[0476] 13B01…Rectangular Marker

[0477] 15A01… Digital scaling ruler bar

[0478] 18A01… represents image A

[0479] 18A02… represents image B

[0480] 18A03…Observation Condition A

[0481] 18B01… Enlarged Representative Image

[0482] 18C01…Observation Condition B

[0483] 1900…Control Settings Screen

[0484] 1901…Observation Condition Setting Department

[0485] 1902… Coordinate Condition Setting Department

[0486] 1903… Screen display control unit

[0487] 21B01…Continuous Image Group

[0488] 22A03…Continuous Image Group

[0489] 23B01…Polygon

[0490] 23C01…Continuous Image Group

[0491] 23D01… Rectangle enclosing a polygon

[0492] 24A01… Area range rectangle

[0493] 24A02… Rotary Operating Unit

[0494] 2500… Coordinate specification settings screen

[0495] 2501… Multiplier Setting Department

[0496] 2502…Repetition Setting Department

[0497] 2503… Number of Sheets Setting Department

[0498] 2600… Range specification setting screen

[0499] 2601… Total number of sheets displayed.

Claims

1. An observation assisting device for a specimen, characterized by comprising: Possessing: an observation position display section that displays positions of a plurality of captured images obtained by capturing a sample with a charged particle beam device in correspondence with an image display section; a display processing section that controls the observation position display section; a representative image registration processing section that registers a representative image from the plurality of captured images; a coordinate conversion processing section that processes mutual conversion of a coordinate system of the observation position display section and a stage coordinate system of the charged particle beam device; an input device monitoring processing section that monitors input operations of an input device via a cursor; and a condition control section that changes an observation condition and a stage coordinate of the charged particle beam device, the display processing section controls the representative image to a size that is easy to visually recognize and displays it in the observation position display section according to a change in magnification of the image display section, the input device monitoring processing section acquires a position of the cursor and acquires a stage coordinate associated with the representative image from the position of the cursor, the condition control section processes so that the stage of the charged particle beam device moves to the stage coordinate associated with the representative image.

2. The observation assisting apparatus according to claim 1, wherein the condition control section processes so that the stage of the charged particle beam device moves to the stage coordinate associated with the representative image according to a determination by the input device monitoring processing section that the position of the cursor is within a display area range of the representative image.

3. The observation assisting apparatus according to claim 2, wherein the condition control section causes the charged particle beam device to reproduce an observation condition of the representative image.

4. The observation assisting apparatus according to claim 3, wherein the condition control section causes the charged particle beam device to reproduce a magnification at the time of capturing the representative image.

5. The observation assisting apparatus according to claim 1, wherein the coordinate conversion processing section performs the mutual conversion based on a stage rotation angle and a rotation center of the charged particle beam device.

6. The observation assisting apparatus according to claim 1, wherein the display processing section displays the representative image with a predetermined scale magnification when the input device monitoring processing section detects that the position of the cursor stays within a display area range of the representative image for a predetermined time or more.

7. The observation assisting apparatus according to claim 6, wherein the display processing section displays the representative image displayed with the predetermined scale magnification with the original scale again when the input device monitoring processing section detects that the position of the cursor is outside the display area range of the representative image.

8. The observation assisting apparatus according to claim 1, wherein the input device monitoring processing section acquires a start position and an end position of an input operation within a display area range of the representative image, the display processing section displays a rectangular mark corresponding to the start position and the end position in the display area of the representative image.

9. The observation assisting apparatus according to claim 8, wherein ​ The coordinate conversion processing section also processes mutual conversion of coordinate systems of the representative image, The coordinate conversion processing section processes the following: The upper left and upper right vertices of the rectangular mark are converted to stage coordinates of the center position of the representative image, and a magnification is calculated from a ratio of a difference between stage coordinates of the upper left and upper right vertices with respect to a predetermined reference size. And The observation assisting device reproduces the stage coordinates of the center position and the magnification.

10. The observation assisting device according to claim 1, wherein The input device has a rotation member, The input device monitoring processing section acquires a rotation direction and a rotation amount of the rotation member when the position of the cursor is within the display area range of the representative image, The coordinate conversion processing section generates a scale conversion matrix from the rotation direction and the rotation amount of the rotation member, The display processing section applies the scale conversion matrix with the position of the cursor as the center, thereby digitally zooming the representative image.

11. The observation assisting device according to claim 10, wherein The input device monitoring processing section acquires the position of the cursor within the display area range of the digitally zoomed representative image, The coordinate conversion processing section converts the position of the cursor to stage coordinates, and converts the upper left and upper right vertices of the display area range of the digitally zoomed representative image to corresponding stage coordinates, and calculates a magnification from a ratio of a difference between the stage coordinates of the upper left and upper right vertices with respect to a predetermined reference size after the difference is found, The condition control section moves the stage of the charged particle beam device to the position of the cursor converted to stage coordinates, and reproduces the calculated magnification.

12. The observation assisting device according to claim 11, wherein The display processing section displays a digital zoom scale bar on the left side of the digitally zoomed representative image, and changes the position of a slider of the digital zoom scale bar according to a digital zoom ratio.

13. The observation assisting device according to claim 12, wherein When the position of the cursor is within the display area range of the digitally zoomed representative image, the display processing section switches a range of the representative image corresponding to the display area range to a range with the position of the cursor as the center, and applies a magnification at the time of photographing of the representative image as a magnification of the observation position display section.

14. The observation assisting device according to claim 1, wherein The observation assisting device also has an information processing section that processes control information of the charged particle beam device, The display processing section displays one or more specified positions specified via the cursor with position markers within the display area range of the representative image, The information processing section generates setting information for continuous photographing according to each of the specified positions, The display processing section further displays the image group involved in the continuous photographing as a group of rectangular symbols based on the setting information.

15. The observation assisting apparatus according to claim 14, wherein The display processing section displays the specified center position designated via the cursor using a position marker within the display area range of the representative image, The information processing section generates the setting information including a magnification, an amount of overlap between images, a number of shots in the X direction, and a number of shots in the Y direction, with the specified center position as the center.

16. The observation assisting apparatus according to claim 15, wherein The display processing section displays a polygon by connecting the respective specified positions with lines.

17. The observation assisting apparatus according to claim 16, wherein The information processing section calculates a field of view of one image in accordance with the magnification and the amount of overlap between images included in the setting information, The display processing section calculates a size of a rectangle that encloses the polygon in accordance with a difference between stage coordinates of two vertices of the rectangle that encloses the polygon, The display processing section calculates a number of images to fill an area of the rectangle that encloses the polygon in accordance with the field of view of the one image and the size of the rectangle that encloses the polygon, Further, the display processing section selects one or more images from the image group involved in the continuous photographing in accordance with a result of overlap determination between the image group involved in the continuous photographing and the polygon.

18. The observation assisting apparatus according to claim 17, wherein The rectangle that encloses the polygon has a rotation operation section, When an operation via the cursor is performed on the rotation operation section, the polygon is rotated in accordance with the operation.

Images