Batch hanging jig for electrolytic polishing in ventilation base hole and working method of batch hanging jig

Abstract

The invention relates to the technical field of surface treatment electrolytic polishing, in particular to a batch hanging jig for electrolytic polishing in ventilation base holes and a working method of the batch hanging jig. The upper hanging jig comprises a main frame and an auxiliary cathode assembly. The main frame comprises an anode hook, an anode hanging rod, a cathode hook, a cathode hanging rod, a connecting rod, an anode connecting plate, a cathode frame A and a cathode frame B. The auxiliary cathode assembly comprises a cathode top plate, a cathode side plate, an insulating bush, an insulating plate, a conical nut, a conical bolt, a transverse cathode needle, a vertical cathode needle and a conductive connecting block. According to the frame type bearing structure, a workpiece is in a suspended state, dead-corner-free contact between an inner cavity channel and electrolyte is achieved, and infiltration uniformity is guaranteed; and through a main and auxiliary double-cathode system (cathode plate global electric field regulation and control and cathode needle local current compensation), the current density gradient of a complex molded surface is inhibited, the polarization phenomena of deep holes and narrow slits are precisely controlled, and ultra-precision polishing with high surface smoothness is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of surface treatment electrolytic polishing, and particularly relates to a batch hanging jig for electrolytic polishing of a vented base hole and a working method thereof. BACKGROUND

[0002] In a semiconductor device process, the inner wall surface of a vented base needs to be subjected to electrolytic polishing treatment due to the requirements of smoothness and corrosion resistance. The smoothness and corrosion resistance of the inner wall directly affect the reliability and performance of the device. Although traditional mechanical polishing can achieve global planarization, it is difficult to effectively process burrs, residues and micro defects on the inner wall of a deep hole. Electrolytic polishing technology can efficiently remove impurities on the inner wall of a micro hole and improve the surface smoothness through electrochemical dissolution. However, the existing electrolytic polishing jig has the following significant limitations: (1) Low efficiency of single-piece operation: The conventional jig only supports single-piece or small-batch clamping, and cannot meet the large-scale production line requirements; (2) Inadequate uniformity of hole polishing: uneven distribution of electric field in a deep hole leads to inconsistent polishing effect, especially for high aspect ratio micro holes, which is prone to local over-corrosion or polishing blind area.

[0003] (3) Poor clamping stability: the base is prone to shift or loosen during clamping, which affects the accurate alignment of the cathode and the anode and aggravates the turbulence of the electrolyte flow field in the hole. SUMMARY

[0004] To solve the above technical problems, the present application provides a batch hanging jig for electrolytic polishing of a semiconductor vented base hole and a working method thereof.

[0005] The specific technical solutions are as follows: A batch hanging jig for electrolytic polishing of a vented base hole is used for electrolytic polishing of a vented base part, and the jig comprises a main frame and an auxiliary cathode assembly; The main frame comprises an anode hook, an anode rod, a cathode hook, a cathode rod, a connecting rod, a cathode frame A, a cathode frame B, an anode connecting plate, an insulating bushing and an insulating plate; a threaded hole is formed in each of the anode rod and the cathode rod, and the threaded holes are threadedly connected with the two ends of the connecting rod; the top of the anode rod is connected with the anode hook, and the top of the cathode rod is connected with the cathode hook; a threaded hole is formed in the bottom of the anode rod, and the threaded hole is connected with the L-shaped anode connecting plate to form an anode conductive structure; The auxiliary cathode assembly comprises a cathode top plate, a cathode side plate, an insulating bushing, an insulating plate, a horizontal cathode needle, a vertical cathode needle, a conductive connecting block A and a conductive connecting block B; the vertical cathode needle is fixed on the cathode top plate through the conductive connecting block A to polish the upper end surface of the part; and the horizontal cathode needle is fixed on the cathode side plate through the conductive connecting block B to polish the internal passage of the part; The two ends of the anode connecting plate are respectively connected with the cathode frame A and the cathode frame B through the insulating bushing and the insulating plate to form insulation between the anode and the cathode.

[0006] The transverse cathode needle is a cylindrical structure, which is adjusted according to the inner diameter size of the channel to be polished of the part, and is connected with the cathode side plate through the fixed screw A side top; the vertical cathode needle is a cylindrical structure, which is adjusted according to the inner diameter size of the channel to be polished of the part, and is connected with the cathode top plate through the fixed screw A side top.

[0007] The insulating plate has two rectangular structures, and two through holes are formed; the insulating bushing has four center hole variable diameter cylindrical structures, and the fixed screw B passes through the center hole and the through hole; the insulating bushing and the anode connecting plate, the cathode frame A and the cathode frame B are in interference fit.

[0008] Sixteen mounting holes are formed on the anode connecting plate, the shank of the locking screw passes through the part hole, and the tapered nut is fixed on the anode connecting plate through the tapered bolt.

[0009] The cathode top plate, the cathode side plate, the cathode frame A and the cathode frame B are fixed by the butterfly screw.

[0010] The materials of the insulating bushing, the insulating plate and the connecting rod are PP, the materials of the anode hook and the cathode hook are red copper; the materials of the anode hanging rod, the cathode hanging rod, the cathode frame A, the cathode frame B, the anode connecting plate, the cathode top plate, the cathode side plate, the vertical cathode needle and the transverse cathode needle are pure titanium.

[0011] The working of the electrolytic polishing batch hanging tool in the vented base hole includes the following steps: (1) First, the front end shank of the locking screw passes through the through hole of the part, and the locking screw is connected with the part by using the locking nut; the tail end of the locking screw is placed into the mounting hole of the anode connecting plate, and the locking screw tail end is fixed by using the tapered nut and the tapered bolt, so that the part and the anode connecting plate are fixed to form an anode conduction structure; (2) The cathode top plate is placed on the cathode frame A and the cathode frame B, the position of the cathode top plate is adjusted, the U-shaped grooves at both ends of the cathode top plate are aligned with the threaded holes on the cathode frame, a hexagonal screw is used for fixation, and the cathode top plate and the cathode frame A and the cathode frame B form a conduction structure; (3) The cathode side plate is placed on the side end of the cathode frame A and the cathode frame B, the position of the cathode side plate is adjusted, the U-shaped grooves at both ends of the cathode side plate are aligned with the threaded holes below the cathode frame A and the cathode frame B, and the cathode side plate is fixed on the side of the cathode frame A and the cathode frame B by using the screw, so that the cathode side plate and the cathode frame A and the cathode frame B form a conduction structure; (4) The vertical cathode needle passes through the through hole on the cathode top plate, the distance between the front end of the vertical cathode needle and the part to be polished is adjusted, the side top screw is tightened after being adjusted to the appropriate distance, and the vertical cathode needle is fixed on the cathode top plate; (5) The horizontal cathode needle passes through the through hole on the cathode side plate, the distance between the front end of the horizontal cathode needle and the part to be polished is adjusted, the side top screw is tightened after being adjusted to the appropriate distance, and the horizontal cathode needle is fixed on the cathode side plate; (6) After the connection is completed, the whole is detected by using a current detection instrument, one end is lapped to the anode hook, the other end is lapped to the cathode hook, if the value displayed by the needle is zero, the jig can be hung on the flybar and put into the bath for electrolytic polishing operation.

[0012] Compared with the prior art, the present application has the following beneficial technical effects: The present application provides a kind of semiconductor ventilation base hole electrolytic polishing batch hanging jig and its working method, can hang a plurality of ventilation bases at a time, realize batch electrolytic polishing, realize the quick, safe batch hanging of ventilation base, improve polishing efficiency and yield.

[0013] Through the modular main frame design, the anode connecting plate, the cathode frame structure and the auxiliary cathode assembly are integrated, the synchronous fixing and power supply of multiple ventilation base workpieces are realized.Compared with single polishing, the tool can carry 8 workpieces at the same time, significantly shortening the clamping time and reducing the intensity of manual intervention.At the same time, the distance between the auxiliary cathode structure and the inner wall of the base hole is accurately controllable (±0.5mm), which ensures the uniform flow of electrolyte in the deep hole, eliminates the polishing dead angle, and reduces the surface roughness (Ra) from 0.8μm to below 0.2μm. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a planar structure schematic diagram of the hanging jig of the present application; Figure 2 It is Figure 1 the sectional view of A-A section; Figure 3 It is Figure 1 the sectional view of B-B section; Figure 4 It is a three-dimensional structure schematic diagram of the hanging jig of the present application; In the figure, 1 is an anode hook; 2 is an anode hanging rod; 3 is a cathode hook; 4 is a cathode hanging rod; 5 is a connecting rod; 6 is a cathode top plate; 7 is a cathode frame A; 8 is a cathode frame B; 9 is an anode connecting plate; 10 is a vertical cathode needle; 11 is a part; 12 is a horizontal cathode needle; 13 is a cathode side plate; 14 is a conductive connecting block A; 15 is a conductive connecting block B; 16 is a butterfly screw; 17 is a fixed screw A; 18 is a fixed screw B; 19 is an insulating bushing; 20 is a conical nut; 21 is a conical bolt; 22 is an insulating plate; 23 is a through hole. DETAILED DESCRIPTION

[0015] The application will be described in detail below with reference to the drawings, but the scope of protection of the application is not limited by the drawings.

[0016] Figure 1 A schematic view of the planar structure of the hanging jig of the application is shown in the figure, Figure 2 A schematic view of the planar structure of the hanging jig of the application is shown in the figure, Figure 1 A sectional view along section A-A, Figure 3 A schematic view of the planar structure of the hanging jig of the application is shown in the figure, Figure 1 A sectional view along section B-B, Figure 4 A schematic view of the planar structure of the hanging jig of the application is shown in the figure: The batch hanging jig for electrolytic polishing in the hole of the vent base is used for electrolytic polishing of the vent base part 11, and the jig comprises a main frame and an auxiliary cathode assembly. The main frame comprises an anode hook 1, an anode hanging rod 2, a cathode hook 3, a cathode hanging rod 4, a connecting rod 5, a cathode frame A 7, a cathode frame B 8, an anode connecting plate 9, an insulating bushing 19 and an insulating plate 22; a threaded hole is formed in each of the anode hanging rod 2 and the cathode hanging rod 4, and the two ends of the connecting rod 5 are threadedly connected with the threaded holes, respectively; the top of the anode hanging rod 2 is connected with the anode hook 1, and the top of the cathode hanging rod 4 is connected with the cathode hook 3; a threaded hole is formed in the bottom of the anode hanging rod 2, and the L-shaped anode connecting plate 9 is connected with the threaded hole, thereby forming an anode conductive structure. The auxiliary cathode assembly comprises a cathode top plate 6, a cathode side plate 13, an insulating bushing 19, an insulating plate 22, a horizontal cathode needle 12, a vertical cathode needle 10, a conductive connecting block A 14 and a conductive connecting block B 15; the vertical cathode needle 10 is fixed on the cathode top plate 6 through the conductive connecting block A 14, and is used for polishing the upper end surface of the part 11; the horizontal cathode needle 12 is fixed on the cathode side plate 13 through the conductive connecting block B 15, and is used for polishing the internal passage of the part 11. The two ends of the anode connecting plate 9 are respectively matched with the cathode frame A 7 and the cathode frame B 8 through the insulating bushing 19 and the insulating plate 22, thereby forming insulation between the anode and the cathode; the cathode top plate 6, the cathode side plate 13 and the anode connecting plate 9 are insulated through the insulating bushing 19.

[0017] The horizontal cathode needle 12 has a cylindrical structure, which is adjusted according to the inner diameter size of the to-be-polished passage of the part 11, and is connected with the cathode side plate 13 through a fixing screw A 17 on one side of the top; the vertical cathode needle 10 has a cylindrical structure, which is adjusted according to the inner diameter size of the to-be-polished passage of the part 11, and is connected with the cathode top plate 6 through a fixing screw A 17 on one side of the top.

[0018] The insulating plate 22 has two rectangular structures and two through holes 23; the insulating bushing 19 has four center hole variable diameter cylindrical structures, and the fixing screw B18 passes through the center hole and the through hole 23; the insulating bushing 19 is in interference fit with the opening of the anode connecting plate 9, the cathode frame A7 and the cathode frame B8.

[0019] Sixteen mounting holes are formed on the anode connecting plate 9, the shank of the locking screw passes through the opening of the part 11, and the anode connecting plate 9 is fixed on the anode connecting plate 9 through the cooperation of the conical nut 20 and the conical bolt 21.

[0020] The cathode top plate 6 and the cathode side plate 13 are fixed with the cathode frame A7 and the cathode frame B8 through the butterfly screw 16.

[0021] The materials of the insulating bushing 19, the insulating plate 22 and the connecting rod 5 are PP, the materials of the anode hook 1 and the cathode hook 3 are red copper, and the materials of the anode hanging rod 2, the cathode hanging rod 4, the cathode frame A7, the cathode frame B8, the anode connecting plate 9, the cathode top plate 6, the cathode side plate 13, the vertical cathode needle 10 and the horizontal cathode needle 12 are pure titanium.

[0022] The working of the electrolytic polishing batch hanging tool in the vent base hole of the application, specifically includes the following steps: (1) First, the shank of the locking screw passes through the through hole of the part 11, and the locking screw is connected with the part 11 by using the locking nut; the tail end of the locking screw is placed into the mounting hole of the anode connecting plate 9, and the tail end of the locking screw is fixed by using the conical nut 20 and the conical bolt 21, so that the part 11 is fixed with the anode connecting plate 9, forming an anode conduction structure; (2) The cathode top plate 6 is placed on the cathode frame A7 and the cathode frame B8, the position of the cathode top plate 6 is adjusted, the U-shaped grooves at both ends of the cathode top plate 6 are aligned with the threaded holes on the cathode frame, and the hexagonal screw is used to fix the cathode top plate 6, so that the cathode top plate 6 forms a conduction structure with the cathode frame A7 and the cathode frame B8; (3) The cathode side plate 13 is placed at the side end of the cathode frame A7 and the cathode frame B8, the position of the cathode side plate 13 is adjusted, the U-shaped grooves at both ends of the cathode side plate 13 are aligned with the threaded holes below the cathode frame A7 and the cathode frame B8, and the cathode side plate is fixed on the side surface of the cathode frame A7 and the cathode frame B8 by using the screw, so that the cathode side plate 13 forms a conduction structure with the cathode frame A7 and the cathode frame B8; (4) The vertical cathode needle 10 passes through the through hole of the cathode top plate 6, the distance between the front end of the vertical cathode needle 10 and the part 11 to be polished is adjusted, and after the distance is adjusted to a suitable distance, the side top screw is tightened to fix the vertical cathode needle 10 on the cathode top plate 6; (5) The front end of the transverse cathode needle 12 is adjusted to a distance from the part 11 to be polished through the through hole on the cathode side plate 13, and the side top screw is tightened after the distance is adjusted to the appropriate distance, so that the transverse cathode needle 12 is fixed on the cathode side plate 13; (6) After the connection is completed, the whole is detected by using a current detection instrument, one end is lapped to the anode hook 1, and the other end is lapped to the cathode hook 3, if the value displayed by the needle is zero, the jig can be hung on the fly handle and put into the bath for electrolytic polishing operation.

Claims

1. A batch mounting fixture for electrolytic polishing inside the hole of a ventilated base, characterized in that: The fixture is used for electropolishing of ventilated base parts, and includes a main frame and an auxiliary cathode assembly. The main frame includes an anode hook, an anode hanging rod, a cathode hook, a cathode hanging rod, a connecting rod, a cathode frame A, a cathode frame B, an anode connecting plate, an insulating bushing, and an insulating plate. Each of the anode and cathode hanging rods has a threaded hole for threaded connection to both ends of the connecting rod. The tops of the anode and cathode hanging rods are connected to the anode hook and cathode hook, respectively. The bottom of the anode hanging rod has a threaded hole for connection to the L-shaped anode connecting plate, forming an anode conductive structure. The auxiliary cathode assembly includes a cathode top plate, a cathode side plate, an insulating bushing, an insulating plate, a transverse cathode pin, a vertical cathode pin, a conductive connecting block A, and a conductive connecting block B; the vertical cathode pin is fixed to the cathode top plate via conductive connecting block A and polishes the upper surface of the part; the transverse cathode pin is fixed to the cathode side plate via conductive connecting block B and polishes the internal channels of the part. The two ends of the anode connecting plate are respectively connected to the cathode frame A and the cathode frame B through insulating bushings and insulating plates to form insulation between the anode and cathode; the cathode top plate, the cathode side plate and the anode connecting plate are insulated from each other through insulating bushings.

2. The mass mounting fixture for electrolytic polishing inside the ventilated base hole according to claim 1, characterized in that: The transverse cathode needle is a cylindrical structure, which is adjusted according to the inner diameter of the polishing channel of the part, and is connected to the cathode side plate by fixing screw A on the side top; the vertical cathode needle is a cylindrical structure, which is adjusted according to the inner diameter of the polishing channel of the part, and is connected to the cathode top plate by fixing screw A on the side top.

3. The mass mounting fixture for electrolytic polishing inside the ventilated base hole according to claim 1, characterized in that: There are two insulating plates, both rectangular in structure, with two through holes; there are four insulating bushings, all of which are variable-diameter cylindrical structures with a central opening, and the fixing screw B passes through the central opening and the through hole; the insulating bushings are interference-fitted with the openings of the anode connecting plate, cathode frame A, and cathode frame B.

4. The mass mounting fixture for electrolytic polishing inside the ventilated base hole according to claim 1, characterized in that: The anode connecting plate has 16 mounting holes. The screw of the locking screw passes through the hole and is fixed to the anode connecting plate by the cooperation of the tapered nut and the tapered bolt.

5. The mass mounting fixture for electrolytic polishing inside the ventilated base hole according to claim 1, characterized in that: The cathode top plate, cathode side plate, cathode frame A, and cathode frame B are fixed with wing screws.

6. The mass mounting fixture for electrolytic polishing inside the ventilated base hole according to claim 1, characterized in that: The insulating bushing, insulating plate, and connecting rod are made of PP, and the anode hook and cathode hook are made of red copper; the anode hanging rod, cathode hanging rod, cathode frame A, cathode frame B, anode connecting plate, cathode top plate, cathode side plate, vertical cathode needle, and horizontal cathode needle are all made of pure titanium.

7. A method for batch mounting fixtures on an ventilated base hole via electrolytic polishing, characterized in that... Specifically, the steps include the following: (1) First, pass the front end of the locking screw through the through hole of the part, and use the locking nut to connect the locking screw to the part; place the tail end of the locking screw into the mounting hole of the anode connecting plate, and use the tapered nut and tapered bolt to fix the tail end of the locking screw, thereby fixing the part to the anode connecting plate and forming an anode conductive structure. (2) Place the cathode top plate on the cathode frame A and cathode frame B, adjust the position of the cathode top plate so that the U-shaped grooves at both ends of the cathode top plate are aligned with the threaded holes on the cathode frame, and fix them with hexagonal screws so that the cathode top plate forms a conductive structure with the cathode frame A and cathode frame B. (3) Place the cathode side plate on the side of cathode frame A and cathode frame B, adjust the position of the cathode side plate so that the U-shaped grooves at both ends of the cathode side plate are aligned with the threaded holes under cathode frame A and cathode frame B, and use screws to fix the cathode side plate to the side of cathode frame A and cathode frame B so that the cathode side plate forms a conductive structure with cathode frame A and cathode frame B. (4) The vertical cathode needle passes through the through hole on the cathode top plate. Adjust the distance between the front end of the vertical cathode needle and the part to be polished. After adjusting to a suitable distance, tighten the side screw to fix the vertical cathode needle on the cathode top plate. (5) The transverse cathode needle passes through the through hole on the cathode side plate. Adjust the distance between the front end of the transverse cathode needle and the part to be polished. After adjusting to a suitable distance, tighten the side screw to fix the transverse cathode needle on the cathode side plate. (6) After the connection is completed, use a current detection instrument to test the whole. One end is connected to the anode hook and the other end is connected to the cathode hook. If the value displayed by the meter needle is zero, the fixture can be hung on the fly handle and placed in the tank for electrolytic polishing.

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