A CVD apparatus for preparing silicon-carbon anode materials

Abstract

This invention discloses a CVD (Continuous Chemical Vapor Deposition) device for preparing silicon-carbon anode materials, relating to the field of lithium-ion battery material preparation technology. The device includes an insulated outer shell, a conveyor belt, a chamber, a heating element, and a pressure relief pipe and valve located on the top of the outer shell. A pressure relief port is located on the top of the chamber and is automatically connected and disconnected from the pressure relief pipe via a connecting mechanism. The connecting mechanism includes a connecting pipe and a movable frame that slide laterally with the chamber, a positioning frame driven by a motor to fix the pressure relief port and the connecting pipe, and a baffle assembly controlled by the positioning frame to open or close the pressure relief port. This invention enables the automatic alignment, connection, pressure relief, and separation of the pressure relief port during continuous removal of the chamber from the equipment, without requiring machine downtime. This significantly improves production continuity and operational safety, effectively solving the problems of low efficiency, reliance on manual labor, and safety hazards in the material discharge and pressure relief stages of traditional CVD equipment.

Description

Technical Field

[0001] This invention relates to the field of lithium-ion battery material preparation technology, specifically a CVD device for preparing silicon-carbon anode materials. Background Technology

[0002] With the rapid development of industries such as consumer electronics, new energy vehicles, and electric low-altitude aircraft, the demand for high-energy-density, long-range lithium-ion batteries is becoming increasingly urgent. Traditional graphite anode materials have a relatively low theoretical specific capacity (approximately 372 mAh / g), which is insufficient to meet the development requirements of high-energy-density, long-cycle-performance lithium-ion secondary batteries. Therefore, developing next-generation high-specific-capacity anode materials has become a key focus for the industry.

[0003] Silicon-carbon anode materials have attracted much attention due to their high theoretical specific capacity (silicon can reach 4200 mAh / g) and good structural stability. Currently, chemical vapor deposition (CVD) is one of the mainstream processes for preparing high-performance silicon-carbon anode materials. This method typically uses porous carbon as a carrier, introduces silane gas under high temperature and certain pressure conditions, causing silicon to deposit on the carbon framework, and then uses hydrocarbon gas for surface coating, ultimately obtaining a structurally stable silicon-carbon composite material.

[0004] After the CVD process, the deposited chamber often retains high operating pressure or residual reaction gases. To ensure operational safety and facilitate subsequent material removal, it is essential to safely depressurize the chamber after it is removed from the high-temperature reaction zone and before proceeding to the next process or opening the lid. In existing technologies, pressure relief pipes are typically fixed to the main structure of the CVD equipment, while the chamber carrying the material is continuously or stepwise removed from the equipment via conveyor belt. This design makes it difficult to automatically, quickly, and reliably connect the pressure relief ports on the chamber with the fixed pressure relief pipes during removal. Currently, the common practice is to manually operate or use auxiliary mechanisms to perform depressurization after the chamber has completely stopped. This not only increases the production cycle time and reduces the efficiency of continuous equipment operation but also introduces human error and safety hazards. Furthermore, if the chamber is opened without sufficient depressurization, the sudden release of pressure or the escape of residual gases may lead to material oxidation, contamination, or even personnel safety risks.

[0005] Therefore, how to achieve automatic depressurization of the chamber during equipment removal, avoiding production interruptions caused by shutdowns during docking, and ensuring the safety, reliability, and automation of the depressurization process, has become a key bottleneck in improving the overall efficiency and operational safety of CVD preparation systems for silicon-carbon anode materials. Existing equipment has significant shortcomings in terms of automation and dynamic docking capabilities during the depressurization process. There is an urgent need for a mechanism that can automatically connect and disconnect the depressurization port from the fixed depressurization pipe during chamber movement, overcoming the shortcomings of existing technologies such as reliance on machine shutdown, low efficiency, and potential safety hazards.

[0006] To address the aforementioned problems, this invention provides a mechanism that can automatically dock and depressurize during the removal of the cabin, enabling continuous, safe, and reliable depressurization operations without shutdown, thus creating safe conditions for subsequent cabin opening and material retrieval, and improving overall production continuity and automation. Summary of the Invention

[0007] The purpose of this invention is to provide a CVD device for preparing silicon-carbon anode materials in order to facilitate depressurization of the chamber.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a CVD device for preparing silicon-carbon anode materials, comprising an insulated shell, a conveyor belt, a chamber, and a heating device. The heating device is installed in the inner cavity of the insulated shell. The chamber, containing silicon-carbon deposition carrier material, passes through the insulated shell via the conveyor belt. A pressure relief pipe is fixedly connected to the top of the insulated shell, and a pressure relief valve is installed on the outer wall of the pressure relief pipe. A pressure relief port is fixedly connected to the top of the chamber. The pressure relief pipe and the pressure relief port are docked through a connecting mechanism. The connecting mechanism includes a limiting seat, which is symmetrically fixedly connected to the outer wall of the pressure relief port. A connecting plate is fixedly connected to the inner wall of the pressure relief port. An mounting plate is fixedly connected to the inner wall of the pressure relief port below the connecting plate. A first spring is fixedly connected to the top of the mounting plate. A baffle is fixedly connected to the top of the first spring. The top of the baffle is slidably connected to the inner wall of the connecting plate. A Y-shaped frame is fixedly connected to the top of the baffle, and the limiting seat extends from both ends of the Y-shaped frame.

[0009] As a further embodiment of the present invention: the connecting mechanism further includes a movable groove, which is formed on the inner wall of the insulation shell and located below the pressure relief pipe. A movable frame is slidably connected to the inner wall of the movable groove. A connecting pipe is fixedly connected to the bottom end of the movable frame. A positioning frame is slidably connected to the outer wall of the connecting pipe. A horizontal plate is fixedly connected to one side of the outer wall of the connecting pipe. A displacement plate is fixedly connected to one side of the outer wall of the positioning frame. A first motor is installed at the top of the horizontal plate. A threaded rod is connected to the output end of the first motor. The threaded rod passes through the displacement plate. A rotating rod is rotatably connected to the other side of the outer wall of the connecting pipe. A positioning frame is fixedly connected to one end of the rotating rod. The rotating rod is driven by a rotating mechanism to perform rotation operation.

[0010] As a further embodiment of the present invention: the rotating mechanism includes a vertical plate, which is fixedly connected to the top of the insulation shell. A second motor is installed on the outer wall of the vertical plate, and a spur gear is connected to the output end of the second motor. A gear is fixedly connected to one end of the movable frame, and the gear is slidably connected to the inside of the insulation shell. The spur gear is in contact with the gear. A ratchet is fixedly connected to the outer wall of the rotating rod. A locking block is slidably connected inside the movable frame, and the bottom end of the locking block is in contact with the ratchet. A second spring is connected between the locking block and the movable frame. A pressing rod is slidably connected inside the movable frame to one side of the locking block, and the pressing rod extends out of the movable frame. A connecting seat is fixedly connected to the top of the positioning frame. A toothed plate is slidably connected to the inner wall of the connecting seat. A third spring is connected between the toothed plate and the connecting seat, and the toothed plate is in contact with the ratchet.

[0011] As a further embodiment of the present invention: the inner wall of the movable groove is in contact with the outer wall of the movable frame, the pressure relief pipe is connected to the movable groove, and the connecting pipe is connected to the movable frame.

[0012] As a further embodiment of the present invention: the outer wall of the displacement plate is provided with a threaded hole, and the threaded hole matches the threaded rod.

[0013] As a further embodiment of the present invention: the outer walls of the connecting pipe and the pressure relief port are both in contact with the inner wall of the positioning frame.

[0014] As a further embodiment of the present invention: the outer wall of the toothed plate is provided with ratchet teeth, the bottom end of the locking block engages with the ratchet, and the inner wall of the connecting seat is in contact with the outer wall of the toothed plate.

[0015] As a further embodiment of the present invention: the top end of the rack is provided with a tooth groove, which meshes with the spur gear.

[0016] As a further embodiment of the present invention: one side of the outer wall of the card block is provided with an inclined surface, and the pressing rod is in contact with the inclined surface.

[0017] Compared with existing technologies, the CVD equipment for preparing silicon-carbon anode materials provided by this invention, through the innovative coordinated operation of the connecting mechanism and the rotating mechanism, achieves automatic, reliable, and safe in-journey depressurization during the removal of the chamber from the equipment, resulting in the following significant beneficial effects:

[0018] 1. Achieved continuous pressure relief without stopping the machine, greatly improving production efficiency: By setting up a connection mechanism, when the cabin carrying the pressure relief port moves with the conveyor belt to below the fixed connecting pipe, the docking and connection actions can be automatically triggered. The first motor drives the positioning frame to move downward, firmly connecting the connecting pipe and the pressure relief port and simultaneously opening the baffle inside the pressure relief port, so that the internal and external pressure relief pipelines of the cabin are automatically connected, and the pressure relief valve opens to complete the pressure relief. The entire process is completed automatically while the cabin is moving continuously, without the need to stop and wait. This breaks through the bottleneck of traditional equipment relying on manual or semi-automatic docking after shutdown, making the production process truly continuous and significantly improving equipment utilization and overall production cycle time.

[0019] 2. Ensures safe operation before opening the chamber and reduces safety risks: After the chamber is removed from the high-temperature reaction zone and before the material unloading process begins, the device automatically depressurizes the system. Mechanical linkage ensures the pressure relief port opens reliably during docking and automatically closes after depressurization (relying on the first spring-loaded return plate). This effectively avoids safety risks such as pressure shocks and the escape of residual harmful gases that may occur due to premature opening of the chamber caused by human error or insufficient depressurization, providing safe operating conditions for subsequent processes and ensuring the safety of personnel and materials.

[0020] 3. Enhanced automation and reliability of pressure relief docking: The entire docking, connection, pressure relief, disconnection, and reset process is driven by a motor and controlled by a mechanical structure, ensuring precise and reliable operation. The tight fit between the positioning frame, pressure relief port, and connecting pipe ensures a tight seal during connection. The cooperation between the ratchet and locking block in the rotating mechanism, as well as the ingenious design of the squeezing rod during reset, allows the positioning frame to reliably unfold during docking (in a horizontal state to receive and guide the pressure relief port) and automatically reset and retract after disconnection (in a vertical state to avoid interfering with the passage of the compartment). The entire process requires no manual intervention, has a high degree of automation, reduces human error, and improves the stability and reliability of equipment operation.

[0021] 4. Optimized equipment layout and operating logic: The fixed parts of the pressure relief pipe (movable frame, connecting pipe) and the automatic actuators (positioning frame, rotating rod, etc.) are integrated into the equipment body, resulting in a compact structure. The movement of the chamber serves as a trigger signal, driving the movable frame to briefly follow suit, and then the first motor completes precise docking, demonstrating clear logic. After pressure relief is completed, each actuator automatically resets to its initial state, preparing for the next pressure relief operation. This enables cyclical operation of the equipment and facilitates integration into automated production lines.

[0022] In summary, this invention, through innovative mechanical structure design, successfully solves the key technical problems of CVD equipment, such as the need to stop the machine for depressurization operation during material discharge, low efficiency, and potential safety hazards. It achieves safe, efficient, and automated depressurization during travel, which is of positive significance for improving the continuity, safety, and automation level of silicon-carbon anode material preparation. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the cabin structure of the present invention;

[0025] Figure 3 This is a schematic diagram of the internal structure of the pressure relief port of the present invention;

[0026] Figure 4 This is a schematic diagram of the installation of the movable frame of the present invention;

[0027] Figure 5 This is a schematic diagram of the internal structure of the active frame of the present invention;

[0028] Figure 6 This is a schematic diagram of the positioning frame of the present invention;

[0029] Figure 7 This is a schematic diagram of the internal structure of the connector of the present invention.

[0030] In the diagram: 1. Insulated outer shell; 2. Conveyor belt; 3. Cabin; 4. Heating device; 5. Pressure relief pipe; 6. Pressure relief valve; 7. Pressure relief port; 8. Connecting mechanism; 801. Limiting seat; 802. Connecting plate; 803. Mounting plate; 804. First spring; 805. Baffle; 806. Y-shaped frame; 807. Movable groove; 808. Movable frame; 809. Connecting pipe; 810. Positioning frame; 811. Horizontal plate; 812. Displacement plate; 813. First motor; 814. Threaded rod; 815. Rotating rod; 816. Positioning frame; 9. Rotating mechanism; 901. Vertical plate; 902. Second motor; 903. Spur gear; 904. Gear; 905. Ratchet; 906. Locking block; 907. Second spring; 908. Pressing rod; 909. Connecting seat; 910. Gear plate; 911. Third spring. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this invention, it should be noted that unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," and "set up" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. The following describes embodiments of the invention based on its overall structure.

[0033] Please see Figures 1 to 7 In this embodiment of the invention, a CVD device for preparing silicon-carbon anode materials includes an insulating shell 1, a conveyor belt 2, a chamber 3, and a heating device 4. The heating device 4 is installed in the inner cavity of the insulating shell 1. The chamber 3, which contains silicon-carbon deposition carrier material, passes through the insulating shell 1 via the conveyor belt 2. A pressure relief pipe 5 is fixedly connected to the top of the insulating shell 1. A pressure relief valve 6 is installed on the outer wall of the pressure relief pipe 5. A pressure relief port 7 is fixedly connected to the top of the chamber 3. The pressure relief pipe 5 and the pressure relief port 7 are connected by a connecting mechanism 8.

[0034] The connecting mechanism 8 includes a limiting seat 801, which is symmetrically fixedly connected to the outer wall of the pressure relief port 7. A connecting plate 802 is fixedly connected to the inner wall of the pressure relief port 7. A mounting plate 803 is fixedly connected to the inner wall of the pressure relief port 7 below the connecting plate 802. A first spring 804 is fixedly connected to the top of the mounting plate 803. A baffle 805 is fixedly connected to the top of the first spring 804. The top of the baffle 805 is slidably connected to the inner wall of the connecting plate 802. A Y-shaped frame 806 is fixedly connected to the top of the baffle 805. The limiting seats 801 extend from both ends of the Y-shaped frame 806. The connecting mechanism 8 also includes a movable groove 807, which is opened on the inner wall of the insulation shell 1 and located below the pressure relief pipe 5. In this configuration, an active frame 808 is slidably connected to the inner wall of the active slot 807. A connecting pipe 809 is fixedly connected to the bottom end of the active frame 808. A positioning frame 810 is slidably connected to the outer wall of the connecting pipe 809. A horizontal plate 811 is fixedly connected to one side of the outer wall of the connecting pipe 809. A displacement plate 812 is fixedly connected to one side of the outer wall of the positioning frame 810. A first motor 813 is installed at the top of the horizontal plate 811. A threaded rod 814 is connected to the output end of the first motor 813. The threaded rod 814 passes through the displacement plate 812. A rotating rod 815 is rotatably connected to the other side of the outer wall of the connecting pipe 809. A positioning frame 816 is fixedly connected to one end of the rotating rod 815. The rotating rod 815 is driven by the rotating mechanism 9 to perform rotation operation.

[0035] In this embodiment: the heating device 4 is used to heat the inside of the heat insulation shell 1. The silicon carbon deposition carrier material is loaded into the chamber 3. The conveyor belt 2 drives the chamber 3 to move through the heat insulation shell 1. At this time, the pressure relief pipe 5 and the pressure relief port 7 are connected by the connecting mechanism 8 and the rotating mechanism 9. After the pressure relief valve 6 is opened, the pressure relief operation can be performed on the inside of the chamber 3.

[0036] Conveyor belt 2 moves cabin 3 through insulated outer shell 1; at this time, baffle 805 is engaged with the inner wall of connecting plate 802 by the elastic force of first spring 804, thereby closing pressure relief port 7. To ensure sealing effect, a high-temperature resistant sealing rubber ring can be installed on the outer wall of baffle 805.

[0037] When the cabin 3 is displaced, the pressure relief port 7 is displaced synchronously. When the pressure relief port 7 moves to the bottom of the connecting pipe 809, the outer wall of the pressure relief port 7 contacts the bottom of the positioning frame 816. The pressure relief port 7 pushes the connecting pipe 809 to be displaced synchronously through the positioning frame 816. The displacement of the connecting pipe 809 drives the movable frame 808 to be displaced. The movable frame 808 slides in the movable groove 807, so that the pressure relief port 7 and the connecting pipe 809 are displaced synchronously. This design ensures that the pressure relief process will not hinder the progress of the production line, avoid stagnation and affect production efficiency.

[0038] Then, the first motor 813 is started. The operation of the first motor 813 drives the threaded rod 814 to rotate. The rotation of the threaded rod 814 drives the displacement plate 812 to move. The displacement of the displacement plate 812 drives the positioning frame 810 to move. The positioning frame 810 moves downward and fits into the connection position of the connecting pipe 809 and the pressure relief port 7, and performs a docking and fixing operation between the connecting pipe 809 and the pressure relief port 7. The positioning frame 810 moves downward until it is in contact with the top of the limit seat 801. The positioning frame 810 moves and contacts the Y-shaped frame 806, pushing the Y-shaped frame 806 to move. The movement of the Y-shaped frame 806 drives the baffle 805 to move, which compresses the first spring 804. The baffle 805 moves out of the inner wall of the connecting plate 802 and opens the pressure relief port 7. At this time, the pressure relief port 7, the connecting pipe 809, the movable frame 808 and the pressure relief pipe 5 are connected. After the pressure relief valve 6 is opened, the internal pressure of the cabin 3 can be depressurized. After depressurization is completed, the first motor 813 is activated to move the positioning frame 810 upwards for resetting. The positioning frame 810 displaces, separating from the Y-shaped frame 806. The baffle 805, under the elastic force of the first spring 804, engages with the inner wall of the connecting plate 802, automatically closing the depressurization port 7. The positioning frame 810 continues to displace and separate from the depressurization port 7, thus disconnecting the docking and fixing of the connecting pipe 809 and the depressurization port 7. This design facilitates the docking and connection of the depressurization port 7 and the depressurization pipe 5 during the movement of the cabin 3, thereby enabling depressurization of the cabin 3 during travel.

[0039] Please refer to this carefully. Figures 4 to 7 The rotating mechanism 9 includes a vertical plate 901, which is fixedly connected to the top of the insulation shell 1. A second motor 902 is mounted on the outer wall of the vertical plate 901, and a spur gear 903 is connected to the output end of the second motor 902. A rack 904 is fixedly connected to one end of the movable frame 808, and the rack 904 is slidably connected to the inside of the insulation shell 1. The spur gear 903 is in contact with the rack 904. A ratchet 905 is fixedly connected to the outer wall of the rotating rod 815, and a locking block 906 is slidably connected inside the movable frame 808. The bottom end of block 906 contacts ratchet 905. A second spring 907 is connected between block 906 and movable frame 808. A pressing rod 908 is slidably connected inside movable frame 808 on one side of block 906. The pressing rod 908 extends out of movable frame 808. A connecting seat 909 is fixedly connected to the top of positioning frame 810. A toothed plate 910 is slidably connected to the inner wall of connecting seat 909. A third spring 911 is connected between toothed plate 910 and connecting seat 909. Toothed plate 910 contacts ratchet 905.

[0040] In this embodiment: when the positioning frame 810 moves downward, it can drive the connecting seat 909 to move downward. The displacement of the connecting seat 909 drives the ratchet 905 to rotate through the toothed plate 910. The rotation of the ratchet 905 drives the rotating rod 815 to rotate. The rotation of the rotating rod 815 drives the positioning frame 816 to rotate until the positioning frame 816 rotates from the vertical state to the horizontal state. At this time, the locking block 906 is engaged with the ratchet 905 by the elastic force of the second spring 907, thereby performing the positioning operation of the positioning frame 816.

[0041] When the positioning frame 810 moves upward, the locking block 906 engages with the ratchet 905, preventing the ratchet 905 from reversing. The toothed plate 910 slides on the inner wall of the connecting seat 909. After the positioning frame 810 moves upward to reset, the toothed plate 910 separates from the ratchet 905.

[0042] Then, the second motor 902 is started. The operation of the second motor 902 drives the spur gear 903 to rotate. The rotation of the spur gear 903 drives the rack 904 to move. The displacement of the rack 904 drives the movable frame 808 to move and reset. When the movable frame 808 moves to one end of the movable groove 807, the pressing rod 908 contacts one end of the movable groove 807. The pressing rod 908 is subjected to force and moves relative to the movable frame 808. The displacement of the pressing rod 908 pushes the locking block 906 to move. The locking block 906 moves and separates from the ratchet 905, thereby releasing the fixation of the positioning frame 816. The positioning frame 816 rotates downward under the action of gravity to complete the reset operation. This design facilitates the control of the rotation of the positioning frame 816, avoids the positioning frame 816 causing obstruction when the connecting pipe 809 separates from the pressure relief port 7, and at the same time controls the reset of the movable frame 808, which is convenient for the next pressure relief operation.

[0043] Please refer to this carefully. Figures 2 to 5 The inner wall of the movable groove 807 is in contact with the outer wall of the movable frame 808, the pressure relief pipe 5 is connected to the movable groove 807, and the connecting pipe 809 is connected to the movable frame 808.

[0044] In this embodiment: the movable frame 808 slides in the movable groove 807, the pressure relief pipe 5 is connected to the inner cavity of the movable frame 808, and the movable frame 808 is connected to the connecting pipe 809, thereby making the pressure relief pipe 5 connected to the connecting pipe 809.

[0045] Please refer to this carefully. Figures 2 to 5 The outer wall of the displacement plate 812 is provided with a threaded hole, which matches the threaded rod 814. The outer walls of the connecting pipe 809 and the pressure relief port 7 are both in contact with the inner wall of the positioning frame 810.

[0046] In this embodiment: the first motor 813 drives the threaded rod 814 to rotate, the rotation of the threaded rod 814 drives the displacement plate 812 to move, the displacement of the displacement plate 812 drives the positioning frame 810 to move, the positioning frame 810 moves downward and is sleeved at the connection position of the connecting pipe 809 and the pressure relief port 7, so as to perform the docking operation between the connecting pipe 809 and the pressure relief port 7.

[0047] Please refer to this carefully. Figures 4 to 7 The outer wall of the toothed plate 910 is provided with ratchet teeth, the bottom end of the locking block 906 engages with the ratchet 905, and the inner wall of the connecting seat 909 fits against the outer wall of the toothed plate 910.

[0048] In this embodiment: the positioning frame 810 moves downward, causing the connecting seat 909 to move downward. The displacement of the connecting seat 909 drives the ratchet 905 to rotate through the toothed plate 910. The rotation of the ratchet 905 drives the rotating rod 815 to rotate. The rotation of the rotating rod 815 drives the positioning frame 816 to rotate until the positioning frame 816 rotates from a vertical state to a horizontal state. At this time, the locking block 906 is engaged with the ratchet 905 by the elastic force of the second spring 907, thereby performing a positioning operation on the positioning frame 816.

[0049] Please refer to this carefully. Figures 4 to 7 The top of the rack 904 has a tooth groove, which meshes with the spur gear 903.

[0050] In this embodiment: the second motor 902 drives the spur gear 903 to rotate, the rotation of the spur gear 903 drives the rack 904 to move, and the displacement of the rack 904 drives the movable frame 808 to reset its displacement.

[0051] Please refer to this carefully. Figures 4 to 7 One side of the outer wall of the card block 906 is provided with an inclined surface, and the pressing rod 908 is in contact with the inclined surface.

[0052] In this embodiment: when the movable frame 808 is displaced to one end of the movable groove 807, the pressing rod 908 contacts one end of the movable groove 807. The pressing rod 908 is displaced relative to the movable frame 808 under force. The displacement of the pressing rod 908 pushes the locking block 906 to move. The locking block 906 is displaced and separates from the ratchet 905, thereby canceling the fixation of the positioning frame 816. The positioning frame 816 rotates downward under the action of gravity to perform a reset operation.

[0053] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A CVD apparatus for preparing silicon-carbon anode materials, characterized in that, The device includes an insulated outer shell (1), a conveyor belt (2), a cabin (3), and a heating device (4). The heating device (4) is installed inside the cavity of the insulated outer shell (1). The cabin (3), which contains silicon carbon deposition carrier material, passes through the insulated outer shell (1) via the conveyor belt (2). A pressure relief pipe (5) is fixedly connected to the top of the insulated outer shell (1). A pressure relief valve (6) is installed on the outer wall of the pressure relief pipe (5). A pressure relief port (7) is fixedly connected to the top of the cabin (3). The pressure relief pipe (5) and the pressure relief port (7) are connected by a connecting mechanism (8). The connecting mechanism (8) includes a limiting seat (801). 01) Symmetrically fixed to the outer wall of the pressure relief port (7), the inner wall of the pressure relief port (7) is fixedly connected to a connecting plate (802), the inner wall of the pressure relief port (7) is fixedly connected to a mounting plate (803) below the connecting plate (802), the top of the mounting plate (803) is fixedly connected to a first spring (804), the top of the first spring (804) is fixedly connected to a baffle (805), the top of the baffle (805) is slidably connected to the inner wall of the connecting plate (802), the top of the baffle (805) is fixedly connected to a Y-shaped frame (806), and the two ends of the Y-shaped frame (806) extend out of the limiting seat (801); The connecting mechanism (8) further includes a movable groove (807), which is located on the inner wall of the insulation shell (1) and below the pressure relief pipe (5). A movable frame (808) is slidably connected to the inner wall of the movable groove (807). A connecting pipe (809) is fixedly connected to the bottom end of the movable frame (808). A positioning frame (810) is slidably connected to the outer wall of the connecting pipe (809). A horizontal plate (811) is fixedly connected to one side of the outer wall of the connecting pipe (809). The positioning frame (810)... A displacement plate (812) is fixedly connected to one side of the outer wall of the cross plate (811). A first motor (813) is installed at the top of the cross plate (811). A threaded rod (814) is connected to the output end of the first motor (813). The threaded rod (814) passes through the displacement plate (812). A rotating rod (815) is rotatably connected to the other side of the outer wall of the connecting pipe (809). A positioning frame (816) is fixedly connected to one end of the rotating rod (815). The rotating rod (815) is driven by the rotating mechanism (9) to perform rotation operation.

2. The CVD equipment for preparing silicon-carbon anode materials according to claim 1, characterized in that, The rotating mechanism (9) includes a vertical plate (901), which is fixedly connected to the top of the heat-insulating shell (1). A second motor (902) is installed on the outer wall of the vertical plate (901). A spur gear (903) is connected to the output end of the second motor (902). A rack (904) is fixedly connected to one end of the movable frame (808). The rack (904) is slidably connected to the inside of the heat-insulating shell (1). The spur gear (903) is in contact with the rack (904). A ratchet (905) is fixedly connected to the outer wall of the rotating rod (815). A locking block (906) is slidably connected inside the movable frame (808). The bottom end of (906) is in contact with the ratchet (905). A second spring (907) is connected between the locking block (906) and the movable frame (808). A pressing rod (908) is slidably connected inside the movable frame (808) on one side of the locking block (906). The pressing rod (908) extends out of the movable frame (808). A connecting seat (909) is fixedly connected to the top of the positioning frame (810). A toothed plate (910) is slidably connected to the inner wall of the connecting seat (909). A third spring (911) is connected between the toothed plate (910) and the connecting seat (909). The toothed plate (910) is in contact with the ratchet (905).

3. The CVD equipment for preparing silicon-carbon anode materials according to claim 1, characterized in that, The inner wall of the movable groove (807) is in contact with the outer wall of the movable frame (808), the pressure relief pipe (5) is connected to the movable groove (807), and the connecting pipe (809) is connected to the movable frame (808).

4. The CVD equipment for preparing silicon-carbon anode materials according to claim 1, characterized in that, The outer wall of the displacement plate (812) is provided with a threaded hole, which is matched with the threaded rod (814).

5. The CVD equipment for preparing silicon-carbon anode materials according to claim 1, characterized in that, The outer walls of the connecting pipe (809) and the pressure relief port (7) are both in contact with the inner wall of the positioning frame (810).

6. The CVD equipment for preparing silicon-carbon anode materials according to claim 2, characterized in that, The outer wall of the toothed plate (910) is provided with ratchet teeth, the bottom end of the locking block (906) engages with the ratchet (905), and the inner wall of the connecting seat (909) is in contact with the outer wall of the toothed plate (910).

7. The CVD equipment for preparing silicon-carbon anode materials according to claim 2, characterized in that, The top end of the rack (904) is provided with a tooth groove, which meshes with the spur gear (903).

8. The CVD equipment for preparing silicon-carbon anode materials according to claim 2, characterized in that, The outer wall of one side of the card block (906) is provided with an inclined surface, and the pressing rod (908) is in contact with the inclined surface.

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