Power calibration method and system applicable to through-type radio frequency power monitoring equipment

Abstract

This invention discloses a power calibration method and system applicable to through-type radio frequency power monitoring equipment, relating to the field of radio frequency signal power calibration technology. The method includes: constructing a calibration test system comprising a signal source and a through-type radio frequency power monitoring equipment; fixing the center frequency of the signal source and adjusting the effective value of the output voltage, obtaining the effective value of the sampled signal and the ADC acquisition voltage value of the monitoring equipment under constant temperature, and constructing a first fitting formula; calculating the actual power of the sampled signal and the input power of the signal source, and determining the coupling degree; fixing the effective value of the signal source output voltage and adjusting the frequency, obtaining the ADC acquisition voltage value at different frequencies, and constructing a frequency compensation model; fixing the signal source output power and adjusting the temperature, obtaining the temperature and coupling degree, and constructing a second fitting formula; further adjusting the signal source output power to obtain a temperature-coupling degree fitting relationship across the entire power range; and calculating the corrected actual power based on the acquired real-time values, combined with the above formulas and models.

Description

Technical Field

[0001] This invention relates to the field of radio frequency signal power calibration technology, and in particular to a power calibration method and system suitable for through-type radio frequency power monitoring equipment. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] In semiconductor manufacturing and other fields, radio frequency (RF) power monitoring or measurement equipment is a key tool for ensuring process stability. RF power meters, as commonly used RF power measurement devices, can be divided into absorption power meters and pass-through power meters according to their testing methods. Among them, absorption power meters are one of the more common power measurement devices. They achieve measurement by absorbing the power being measured, but they can only measure low power. For high-power scenarios, they need to be paired with expensive attenuators, and they cannot monitor the overall operating status of the RF power supply process in real time. Pass-through power meters are connected in series in the RF transmission line and can directly monitor the high-power transmission process. However, high-power transmission will cause the equipment temperature to rise, causing temperature drift (hereinafter referred to as "temperature drift"), which in turn affects the accuracy and stability of power measurement.

[0004] To address the temperature drift issue in through-feed power meters when measuring high power, existing strategies include using low-temperature drift components. However, low-temperature drift is not absolute; it can only reduce the impact of temperature drift to a certain extent, but cannot completely eliminate the interference of temperature on the measurement results. Furthermore, high-precision low-temperature drift components are expensive. Another approach is to use component temperature drift offsetting, which involves matching components with opposite temperature drift characteristics, such as setting a resistor whose resistance increases with temperature and a resistor whose resistance decreases with temperature, to achieve dynamic balance. However, component aging and manufacturing errors can lead to matching difficulties and poor offsetting effects. Another approach is to directly fit the measured power to the temperature and calibrate the power based on the fitted curve. However, since temperature changes directly affect the electrical parameters of the components in the device, the power values ​​measured directly at different temperatures are not accurate. The measured value itself already contains the error introduced by temperature drift, and direct fitting calibration still cannot eliminate the original temperature drift error, and may even amplify the error. In addition, frequency fluctuations are also an important factor affecting measurement accuracy. Existing technologies often sacrifice accuracy while expanding the frequency range, or improve accuracy at the expense of narrowing the frequency range. In essence, they cannot meet the requirements of both wide bandwidth and high precision. Summary of the Invention

[0005] To address the shortcomings of the existing technology, this invention provides a power calibration method and system suitable for through-type radio frequency power monitoring equipment, which solves the problem of low accuracy caused by temperature drift and frequency drift in existing equipment, and can meet the wide bandwidth and high accuracy requirements of high-power through-type radio frequency power monitoring.

[0006] In a first aspect, the present invention provides a power calibration method suitable for through-type radio frequency power monitoring equipment.

[0007] A power calibration method for a through-type radio frequency power monitoring device, comprising:

[0008] Establish a calibration and testing system that includes a signal source and a through-type RF power monitoring device;

[0009] By fixing the center frequency of the signal source and adjusting the effective value of the output voltage, the effective value of the sampled signal of the monitoring device under constant temperature and the ADC acquisition voltage value are obtained, and the first fitting formula is constructed; according to the power calculation formula, the actual power of the sampled signal and the input power of the signal source are calculated to determine the coupling degree.

[0010] By fixing the effective value of the output voltage of the signal source and adjusting the frequency, the ADC acquisition voltage values ​​at different frequencies are obtained, and a frequency compensation model is constructed.

[0011] The signal source output power is fixed and the temperature is adjusted. The temperature and coupling degree are obtained and a second fitting equation is constructed. The signal source output power is then adjusted again to obtain the temperature-coupling degree fitting equation for the entire power range.

[0012] The frequency, temperature and ADC voltage of the current power node are collected in real time using monitoring equipment. The corrected actual power is calculated by using a frequency compensation model, a first fitting formula and a second fitting formula.

[0013] A further technical solution is that the through-type radio frequency power monitoring device includes a signal sampling section and a signal processing section. The signal sampling section is used to sample the signal transmitted by the signal source, and the signal processing section is used to process the sampled signal and convert it into a DC signal.

[0014] In the calibration and testing system, the output of the signal source is connected to the input of the signal processing section of the through-type radio frequency power monitoring device; the monitoring device has a built-in temperature sensor and frequency detection circuit, which are used to detect the ambient temperature and signal frequency, respectively; the monitoring device is connected to the test computer via serial communication, and the monitoring device is placed in a constant temperature test chamber.

[0015] A further technical solution involves calculating the actual power of the sampled signal and the input power of the signal source using the power calculation formula, and determining the coupling degree as follows:

[0016] Based on power calculation formula Based on the sampled signal voltage value and the PCB's conventional impedance, the actual power of the sampled signal is calculated and denoted as Prms; simultaneously, based on the input power of the signal source, the input power Psta of the signal source is calculated.

[0017] Based on the actual power of the sampled signal and the input power of the signal source, the coupling degree is calculated through difference operation and expressed as:

[0018] Kcou=Psta-Prms.

[0019] A further technical solution is that the first fitting formula is the relationship between the effective value of the sampled signal and the ADC acquisition voltage value obtained by fitting.

[0020] The second fitting equation is the temperature-coupling degree relationship obtained through fitting;

[0021] The frequency compensation model is a compensation model for the frequency-ADC acquired voltage value; wherein, the fluctuation range of the adjusted frequency is ±10% of the center frequency.

[0022] A further technical solution involves the temperature calibration process at different power nodes as follows:

[0023] Set the initial temperature of the constant temperature test chamber to 35°C, the normal operating temperature of the semiconductor workshop, and set at least 3 power test nodes.

[0024] The output power of a fixed signal source is used as one of the power test nodes to continuously transmit power while simultaneously collecting and monitoring the internal temperature and real-time coupling of the monitoring equipment.

[0025] Adjust the temperature of the constant temperature test chamber to simulate a wide-temperature working environment. Repeat the above steps to obtain multiple sets of temperature-coupling degree data for this power test node. The wide temperature range for temperature adjustment is -10℃ to 60℃.

[0026] Multiple sets of temperature-coupling degree data are fitted using a linear function or a higher-order polynomial to generate the temperature-coupling degree relationship curve of the power test node, and the second fitting formula is obtained by fitting.

[0027] Switch to other power test nodes and repeat the above test steps to obtain the temperature-coupling relationship curve and corresponding fitting formula for the full power range.

[0028] A further technical solution, the power calibration process is as follows:

[0029] The frequency, temperature, and ADC voltage values ​​of the current power node are collected in real time using monitoring equipment.

[0030] Based on the real-time collected frequency and ADC voltage value, the ADC voltage value after preliminary correction is obtained through the frequency compensation model;

[0031] Based on the initially corrected ADC voltage value, the effective value of the sampled signal is determined using the first fitting formula;

[0032] Based on the real-time temperature data, the coupling degree is determined using the second fitting formula. Then, by combining the effective values ​​of the sampled signals, the corrected actual power, i.e., the actual power of the power node, is calculated.

[0033] Secondly, the present invention provides a power calibration system suitable for through-type radio frequency power monitoring equipment.

[0034] A power calibration system for through-type radio frequency power monitoring equipment includes a pre-built calibration and testing system comprising a signal source and a through-type radio frequency power monitoring equipment, and:

[0035] The first fitting module is used to fix the center frequency of the signal source and adjust the effective value of the output voltage, obtain the effective value of the sampled signal of the monitoring equipment under constant temperature and the ADC acquisition voltage value, and construct the first fitting formula; according to the power calculation formula, it calculates the actual power of the sampled signal and the input power of the signal source, and determines the coupling degree.

[0036] The frequency compensation module is used to fix the effective value of the signal source output voltage and adjust the frequency, obtain the ADC acquisition voltage value at different frequencies, and build a frequency compensation model.

[0037] The second fitting module is used to fix the output power of the signal source and adjust the temperature, obtain the temperature and coupling degree and construct the second fitting formula, and then adjust the output power of the signal source to obtain the temperature-coupling degree fitting formula for the full power range.

[0038] The power calibration module is used to collect the frequency, temperature and ADC voltage value of the current power node in real time using monitoring equipment, and calculate the corrected actual power through the frequency compensation model, the first fitting formula and the second fitting formula.

[0039] Thirdly, the present invention also provides an electronic device, comprising: a memory for storing executable instructions; and a processor for implementing the power calibration method applicable to a pass-through radio frequency power monitoring device as described above when executing the executable instructions stored in the memory.

[0040] Fourthly, the present invention also provides a computer-readable storage medium storing executable instructions for causing a processor to execute the executable instructions to implement the above-described power calibration method applicable to a pass-through radio frequency power monitoring device.

[0041] Fifthly, the present invention also provides a computer program product comprising executable instructions stored in a computer-readable storage medium; wherein, when a processor of an electronic device reads the executable instructions from the computer-readable storage medium and executes the executable instructions, it implements the aforementioned power calibration method applicable to a pass-through radio frequency power monitoring device.

[0042] The above one or more technical solutions have the following beneficial effects:

[0043] 1. This invention provides a power calibration method and system suitable for through-type radio frequency power monitoring equipment. By treating the two parts of the through-type radio frequency power monitoring equipment that are significantly affected by temperature drift and frequency drift as a whole, it is not necessary to calibrate each component separately. Instead, by establishing a three-dimensional relationship between frequency-voltage, temperature-coupling degree, and power-calibration curves, dynamic error compensation of the monitored power is achieved, which meets the wide bandwidth and high precision requirements of high-power through-type radio frequency power monitoring.

[0044] 2. This invention ensures that the accuracy remains stable within 1% over a wide temperature, wide frequency, and full power range through three-dimensional coupling calibration. It can achieve higher measurement accuracy at each power node under large temperature changes and can completely solve the common temperature drift problem. The power node design covers multiple scenarios and does not require a separate calibration scheme, making it more applicable. The fitting method has low computational load and can meet the real-time needs of industry. The overall calibration does not require expensive components or complex matching, resulting in lower cost.

[0045] Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0046] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0047] Figure 1 This is a flowchart of a power calibration method for a through-type radio frequency power monitoring device proposed in an embodiment of the present invention;

[0048] Figure 2 This is a flowchart illustrating the signal change monitoring using a through-type radio frequency power monitoring device in an embodiment of the present invention.

[0049] Figure 3 This is a schematic diagram of the temperature-coupling degree fitting curve in an embodiment of the present invention. Detailed Implementation

[0050] It should be noted that the following detailed descriptions are exemplary and are intended only to describe specific embodiments and to provide further explanation of the invention, and are not intended to limit the scope of exemplary embodiments of the invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0051] Example 1

[0052] To address the drift issue in high-power through-type power measurement equipment, it's necessary to start with its structural components. Whether the drift is due to frequency or temperature, it's essentially caused by differences in the electrical parameters of internal components, leading to varying frequency and temperature responses. This results in different signals being acquired for the same power value. Considering that existing high-power through-type power measurement equipment uses signal acquisition methods based on VI (voltage and current) technology and coupling technology, both principles face the temperature drift problem. From an overall structural perspective, this signal acquisition can be divided into: a signal sampling section that acquires the main transmission line sample signal at a certain ratio; a signal processing section that performs signal transformation and processing on the sampled signal; and a signal calculation section that performs numerical calculations on the processed signal. The parts most affected by temperature and frequency changes are the signal sampling section and the signal processing section. Considering that different components respond differently to temperature and frequency, it is obviously impractical to create a calibration method for each component. Therefore, in this embodiment, the entire signal sampling section and the signal processing section are packaged into two "black boxes" according to the region. The temperature drift of all components in the entire section is regarded as a whole, and frequency and temperature calibrations are performed on the two parts respectively. On this basis, an intermediate quantity is introduced to connect the two parts, so as to achieve accurate calibration of the power monitored by the high-power through-type radio frequency power monitoring equipment.

[0053] like Figure 2 As shown, the signal undergoes sampling and processing throughout the process. Sampling is used to acquire a smaller signal with parameters consistent with the main circuit parameters according to a certain ratio. Processing is used to convert this high-frequency signal into a DC signal that can be acquired by the ADC (Analog to Digital Converter). Based on this, this embodiment proposes a power calibration method suitable for through-type RF power monitoring equipment, such as... Figure 1 As shown, the specific steps include:

[0054] Step S1: Build a calibration and testing system that includes a signal source and a through-type radio frequency power monitoring device.

[0055] Specifically, the through-type RF power monitoring equipment includes a signal sampling section and a signal processing section. The signal sampling section samples the signal transmitted from the signal source and extracts the effective value of the sampled signal. The signal processing section processes the sampled signal and converts it into a DC signal that can be acquired by the ADC. Based on this, the signal processing section is calibrated first. The specific calibration method requires setting up a calibration test system. In this system, the output terminal of the signal source is connected to the input terminal of the signal processing section of the through-type RF power monitoring equipment, and the entire system is connected to a test computer. A serial port assistant or similar software is used to open the serial port and read the real-time voltage acquisition value. It is important to note that the voltage acquisition value at this stage cannot be directly correlated with the input signal. Instead, it is a DC signal obtained by processing the corresponding RF signal through a series of filtering, detection, and voltage regulation circuits. This method adds an intermediate quantity to the overall signal testing and transformation process, serving as a connection between the two parts.

[0056] As one implementation method, the monitoring device also has a built-in temperature sensor and frequency detection circuit. The temperature sensor is used to detect the internal ambient temperature of the device, and the frequency detection circuit is used to monitor the radio frequency signal frequency. The monitoring device is placed in a constant temperature test chamber to provide a stable constant temperature environment for the monitoring device. By simulating a wide temperature working environment through the constant temperature test chamber, multiple sets of temperature-coupling degree data can be obtained by adjusting the temperature, laying the foundation for subsequent calibration.

[0057] Step S2: Fix the center frequency of the signal source and adjust the effective value of the output voltage to obtain the effective value of the sampling signal of the monitoring device under constant temperature and the ADC acquisition voltage value, and construct the first fitting formula.

[0058] Specifically, after the above connections are completed, the output signal of the signal source is set to a fixed frequency value at the center frequency of the corresponding RF power supply, for example, 13.56MHz. Then, its effective value is adjusted to 1mV-1000mV. Based on the measured range of the sampled signal, the upper limit of this voltage range can be appropriately adjusted to obtain a standard RF signal with precisely controllable output parameters from the signal source. Simultaneously, the voltage values ​​acquired by the ADC are recorded. This yields a set of comparative data between the effective value of the sampled signal and the ADC acquired voltage value. Based on this data, curve fitting is performed. In this embodiment, existing software such as MATLAB, Origin, 1stOpt, ELISACalc, and Python scientific computing tools (such as NumPy / SciPy) can be used for data processing to generate curves with the effective value of the sampled signal minus the ADC acquired voltage value as X and Y, along with corresponding formulas. The first fitting formula is then obtained, which is the relationship between the effective value of the sampled signal and the ADC acquired voltage value. Finally, the first fitted formula obtained above is burned into the overall code, so that every time the ADC acquires an ADC voltage acquisition value, the MCU will output the corresponding valid value of the sampled signal, which is recorded as Urms.

[0059] By using the above method, a conventional standard source is used to output radio frequency signals based on the effective voltage sampled by the signal sampling section of the monitoring equipment. This accurately reflects the signal status sampled by the monitoring equipment from the main line. Then, based on the voltage values ​​Urms of these sampled signals and the voltage values ​​acquired by the ADC, a direct connection is established between the coupling sampling end and the ADC receiving end, avoiding calculation deviations caused by data processing. Finally, when the ADC receiving end acquires a certain voltage value, the corresponding sampled signal voltage value Urms can be directly calculated in reverse based on this connection, laying the foundation for subsequent accurate power calculation.

[0060] Furthermore, the signal sampling section is calibrated, specifically by performing power conversion on the sampled signal. Based on the power calculation formula, the actual power of the sampled signal and the input power of the signal source are calculated to determine their coupling degree. Specifically, this is based on the power calculation formula... Based on the sampled signal voltage value (Urms) and the PCB's standard impedance (typically 50Ω), the actual power of the sampled signal is calculated, and then converted to a power value in dB using the following conversion formula: The power Prms is calculated. Similarly, the input power Psta of the signal source is calculated based on the input power of the signal source. Finally, based on the actual power of the sampled signal and the input power of the signal source, the coupling degree is calculated through difference operation, expressed as: Kcou = Psta - Prms. At this point, the basic calculation of the coupling degree is completed.

[0061] Step S3: Fix the effective value of the signal source output voltage and adjust the frequency to obtain the ADC acquisition voltage value at different frequencies and construct a frequency compensation model.

[0062] In this embodiment, frequency calibration of the waveform is performed as follows: For frequency, the higher the frequency of the signal, the higher the voltage after a series of signal processing. Therefore, when fitting the effective value of the sampled signal to the ADC acquisition voltage value, while maintaining the same effective voltage value, the frequency is adjusted (the fluctuation range of the adjusted frequency is ±10% of the center frequency point, such as when the center frequency point is 13.56MHz, the frequency range is 12.204~14.916MHz), so that the ADC acquisition value shows a corresponding change, and the ADC acquisition voltage value at different frequencies is recorded.

[0063] In an ideal state (without frequency drift), the ADC acquisition voltage corresponding to a fixed effective voltage value should be constant. However, in reality, due to the frequency characteristics of components (such as capacitors and inductors), the ADC voltage will shift with frequency. Based on the ADC sampling voltage values ​​recorded at different frequencies, considering that the influence of frequency drift on the ADC voltage is usually a continuous and smooth nonlinear relationship (such as the capacitance reactance decreasing as the frequency increases, leading to changes in the gain of the signal processing circuit), this embodiment uses a polynomial fitting to obtain a correction formula for the frequency-ADC voltage offset, thereby obtaining a frequency compensation model, i.e., a compensation model for the frequency-ADC acquisition voltage value. In subsequent real-time measurements, this model / fitting formula can be used to calibrate the ADC acquisition value within a certain range in the frequency dimension.

[0064] Step S4: Fix the output power of the signal source and adjust the temperature to obtain the temperature and coupling degree and construct the second fitting formula. Then adjust the output power of the signal source to obtain the fitting formula of temperature-coupling degree over the full power range.

[0065] In this embodiment, the coupling degree is calibrated by temperature. Specifically, the communication port of the standard source is connected to the host, and the communication port of the power measurement device is also connected to the host, set to the same transmission baud rate. This allows for the simultaneous acquisition of Prms and Psta, as well as the synchronous calculation of the Kcou value. Simultaneously, a temperature sensor is added inside the measurement device to synchronously acquire the internal temperature, denoted as T, with the same transmission baud rate as Prms and Psta. At this point, both the temperature T and the coupling degree K value can be obtained simultaneously.

[0066] Furthermore, considering that the temperature drift characteristics differ under different power nodes, the power nodes are first divided into certain ranges, such as 1000W, 3000W, 5000W, 8000W or higher nodes. The output of the standard source is fixed on the above test nodes, and then the test environment is kept at a constant temperature of 35°C in the semiconductor workshop to continuously capture the K value and real-time temperature.

[0067] Secondly, the output power of the fixed signal source is used as one of the power test nodes. The power is continuously transmitted, and the internal temperature T and real-time coupling degree K of the monitoring equipment are collected and monitored simultaneously. The temperature of the constant temperature test chamber is adjusted to simulate a wide-temperature working environment. The above steps are repeated to obtain multiple sets of temperature-coupling degree data under the power test node. The wide temperature range for temperature adjustment is -10℃ to 60℃.

[0068] When the standard source continuously transmits power, both the cables and the internal components of the measuring equipment will heat up. At this time, all data is collected and presented on a coordinate axis, such as... Figure 3 As shown, the K value is positively correlated with temperature, and can be approximated as a positive correlation of a linear function. Therefore, in this embodiment, temperature is represented by the X-axis and coupling degree by the Y-axis. A linear function or a higher-order polynomial is used to fit multiple sets of temperature-coupling degree data to generate the temperature-coupling degree relationship curve for the power test node. For example, the second fitted formula (i.e., the temperature-coupling degree relationship formula) is a linear function Y = aX + b, where a and b are both fitted fixed values. Furthermore, during test equipment operation, the X value (i.e., the temperature value) can be automatically captured. Simultaneously, the coupling degree Kcou at that temperature is calculated according to the fitted linear function. Then, Psta is calculated using Kcou and Prms, where Psta is the actual tested power value.

[0069] Finally, switch to other power test nodes and repeat the above test steps to obtain the temperature-coupling relationship curve and corresponding fitting formula for the full power range.

[0070] Step S5: Use monitoring equipment to collect the frequency, temperature and ADC voltage value of the current power node in real time, and calculate the corrected actual power through the frequency compensation model, the first fitting formula and the second fitting formula.

[0071] Specifically, the monitoring equipment is used to collect the frequency, temperature and ADC voltage value of the current power node in real time. Based on the real-time collected frequency and ADC voltage value, the ADC voltage value is obtained through a frequency compensation model. Then, based on the preliminarily corrected ADC voltage value, the effective value of the sampled signal is determined through a first fitting formula. Finally, based on the real-time collected temperature, the coupling degree is determined through a second fitting formula. Finally, the actual power after correction, i.e. the actual power of the power node, is calculated by combining the effective value of the sampled signal.

[0072] The above method can be used to calibrate existing power measurement equipment in terms of frequency and temperature, achieving 1% accuracy at each power node under large temperature variations, thus completely solving the common problem of temperature drift.

[0073] Example 2

[0074] This embodiment provides a power calibration system suitable for through-type radio frequency power monitoring equipment, including a pre-built calibration and testing system comprising a signal source and through-type radio frequency power monitoring equipment, and:

[0075] The first fitting module is used to fix the center frequency of the signal source and adjust the effective value of the output voltage, obtain the effective value of the sampled signal of the monitoring equipment under constant temperature and the ADC acquisition voltage value, and construct the first fitting formula; according to the power calculation formula, it calculates the actual power of the sampled signal and the input power of the signal source, and determines the coupling degree.

[0076] The frequency compensation module is used to fix the effective value of the signal source output voltage and adjust the frequency, obtain the ADC acquisition voltage value at different frequencies, and build a frequency compensation model.

[0077] The second fitting module is used to fix the output power of the signal source and adjust the temperature, obtain the temperature and coupling degree and construct the second fitting formula, and then adjust the output power of the signal source to obtain the temperature-coupling degree fitting formula for the full power range.

[0078] The power calibration module is used to collect the frequency, temperature and ADC voltage value of the current power node in real time using monitoring equipment, and calculate the corrected actual power through the frequency compensation model, the first fitting formula and the second fitting formula.

[0079] Example 3

[0080] This embodiment provides an electronic device, including: a memory for storing executable instructions; and a processor for executing the executable instructions stored in the memory to implement the method provided in this embodiment.

[0081] Example 4

[0082] This embodiment also provides a computer-readable storage medium storing executable instructions, which, when executed by a processor, will cause the processor to execute the method described above in this embodiment.

[0083] Example 5

[0084] This embodiment provides a computer program product including executable instructions, which are computer instructions; the executable instructions are stored in a computer-readable storage medium. When the processor of an electronic device reads the executable instructions from the computer-readable storage medium and executes the executable instructions, the electronic device performs the method described in this embodiment.

[0085] The steps and methods involved in Embodiments 2 to 5 above correspond to those in Embodiment 1. For specific implementation details, please refer to the relevant description section of Embodiment 1. The term "computer-readable storage medium" should be understood as a single medium or multiple media including one or more instruction sets; it should also be understood as including any medium capable of storing, encoding, or carrying an instruction set for execution by a processor and enabling the processor to perform any of the methods in this invention.

[0086] Those skilled in the art will understand that the modules or steps of the present invention described above can be implemented using general-purpose computer devices. Optionally, they can be implemented using computer-executable program code, thereby allowing them to be stored in a storage device for execution by a computer device, or they can be fabricated as separate integrated circuit modules, or multiple modules or steps can be fabricated as a single integrated circuit module. The present invention is not limited to any particular combination of hardware and software.

[0087] The above description is only a preferred embodiment of the present invention. Although the specific implementation of the present invention has been described in conjunction with the accompanying drawings, it is not intended to limit the scope of protection of the present invention. Those skilled in the art should understand that, based on the technical solution of the present invention, various modifications or variations that can be made by those skilled in the art without creative effort are still within the scope of protection of the present invention.

Claims

1. A method of power calibration suitable for use in a pass-through radio frequency power monitoring device, characterized by, The application relates to a calibration test system for a through-type radio frequency power monitoring device. The through-type radio frequency power monitoring device comprises a signal sampling part and a signal processing part, wherein the signal sampling part is used for sampling a signal transmitted by a signal source, and the signal processing part is used for processing the sampled signal and converting the sampled signal into a direct current signal. The signal processing part is calibrated by connecting the output end of the signal source to the input end of the signal processing part of the through-type radio frequency power monitoring device in the calibration test system. The central frequency point of the signal source is fixed, the output voltage effective value is adjusted, the sampling signal effective value and the ADC acquisition voltage value of the monitoring device under constant temperature are obtained, and a first fitting formula is constructed; the first fitting formula is a fitting relationship formula of the sampling signal effective value and the ADC acquisition voltage value. The signal sampling part is calibrated by inversely calculating the corresponding sampling signal voltage value according to the ADC acquisition voltage value and the first fitting formula, calculating the actual power of the sampling signal and the input power of the signal source according to a power calculation formula, and determining the coupling degree. The coupling degree is calculated by difference operation based on the actual power of the sampling signal and the input power of the signal source, and is expressed as Kcou=Psta-Prms. Based on the power calculation formula , according to the sampling signal voltage value and the PCB conventional impedance, the actual power of the sampling signal is calculated, recorded as Prms; at the same time, according to the input power of the signal source, the input power Psta of the signal source is calculated; The output voltage effective value of the signal source is fixed, the frequency is adjusted, the ADC acquisition voltage value under different frequencies is obtained, and a frequency compensation model is constructed; the frequency compensation model is a compensation model of frequency-ADC acquisition voltage value, wherein the fluctuation range of the adjusted frequency is plus or minus 10% of the central frequency point. The output power of the signal source is fixed, the temperature and the coupling degree are obtained, a second fitting formula is constructed, the output power of the signal source is adjusted again, and a fitting relationship formula of the temperature-coupling degree in the full power range is obtained; the second fitting formula is a fitting relationship formula of the temperature-coupling degree. The frequency, the temperature and the ADC voltage value of the current power node are collected in real time by using the monitoring device, and the corrected actual power is calculated through the frequency compensation model, the first fitting formula and the second fitting formula. The power calibration process is as follows: The frequency, the temperature and the ADC voltage value of the current power node are collected in real time by using the monitoring device; The preliminary corrected ADC voltage value is obtained through the frequency compensation model according to the collected frequency and ADC voltage value; The sampling signal effective value is determined through the first fitting formula according to the preliminary corrected ADC voltage value; The coupling degree is determined through the second fitting formula according to the collected temperature, and the corrected actual power, that is, the actual power of the power node, is calculated by combining the sampling signal effective value. The monitoring device is internally provided with a temperature sensor and a frequency detection circuit which are respectively used for detecting the environmental temperature and the signal frequency; the monitoring device is connected to a test computer through serial communication and is arranged in a constant-temperature test box.

2. The power calibration method suitable for a pass-through RF power monitor device as claimed in claim 1, wherein, The temperature calibration process under different power nodes is as follows:

3. The method for power calibration suitable for a pass-through RF power monitor device as claimed in claim 1, wherein, The initial temperature of the constant-temperature test box is set as the conventional working temperature 35 DEG C of a semiconductor workshop, at least three power test nodes are set, the output power of the signal source is fixed as one of the power test nodes, the power is continuously transmitted, and the temperature and the real-time coupling degree in the monitoring device are synchronously collected. ​ Adjust the temperature of the constant temperature test box to simulate a wide temperature working environment, repeat the above steps to obtain multiple sets of temperature-coupling degree data under the power test node; wherein, the wide temperature range of temperature adjustment is -10℃ to 60℃; Fit the multiple sets of temperature-coupling degree data using a linear function or a high-order polynomial to generate a temperature-coupling degree relationship curve for the power test node, and obtain a second fitting formula through fitting; Replace to other power test nodes, repeat the above test steps to obtain the temperature-coupling degree relationship curve and the corresponding fitting formula in the full power range.

4. A power calibration system suitable for use with a through-the-air radio frequency power monitoring device, characterized by, The power calibration method for the through-type radio frequency power monitoring device is realized as claimed in any one of claims 1-3, the power calibration system comprises a calibration test system including a signal source and a through-type radio frequency power monitoring device which is built in advance, and: The first fitting module is used to fix the center frequency point of the signal source and adjust the output voltage effective value, obtain the sampling signal effective value and ADC acquisition voltage value of the monitoring device under constant temperature, and construct a first fitting formula; According to the power calculation formula, the actual power of the sampling signal and the input power of the signal source are calculated to determine the coupling degree; The frequency compensation module construction module is used to fix the output voltage effective value of the signal source and adjust the frequency to obtain the ADC acquisition voltage value under different frequencies and construct a frequency compensation model; The second fitting module is used to fix the output power of the signal source and adjust the temperature to obtain the temperature and coupling degree and construct a second fitting formula, and then adjust the output power of the signal source to obtain the fitting relationship formula of temperature-coupling degree in the full power range; The power calibration module is used to use the monitoring device to collect the frequency, temperature and ADC voltage value of the current power node in real time, and calculate the corrected actual power through the frequency compensation model, the first fitting formula and the second fitting formula.

5. An electronic device, comprising: Comprise: A memory for storing executable instructions; A processor for executing the executable instructions stored in the memory to realize the power calibration method for the through-type radio frequency power monitoring device as claimed in any one of claims 1-3.

6. A computer-readable storage medium, characterized in that, The executable instructions are stored in the memory, and are used to cause the processor to execute the executable instructions to realize the power calibration method for the through-type radio frequency power monitoring device as claimed in any one of claims 1-3.

7. A computer program product, characterised in that, The computer program product comprises executable instructions stored in a computer readable storage medium; When the processor of the electronic device reads the executable instructions from the computer readable storage medium and executes the executable instructions, the power calibration method for the through-type radio frequency power monitoring device as claimed in any one of claims 1-3 is realized.

Images