Display panel, preparation method thereof and display device

Abstract

The embodiment of the invention provides a display panel, a preparation method thereof and a display device, relates to the technical field of display, and is used for improving the film thickness uniformity of a second electrode at different positions. The display panel comprises a substrate, a plurality of first electrodes located on one side of the substrate, a pixel definition layer located on the sides, away from the substrate, of the first electrodes, and a second electrode located on the side, away from the substrate, of the pixel definition layer. The pixel definition layer comprises a plurality of pixel openings; each pixel opening exposes at least part of the corresponding first electrode, the included angle theta between the side wall of each pixel opening and the side, deviating from the corresponding pixel opening, of the plane where the substrate is located is larger than 0 degree and smaller than 90 degrees; the second electrode is located on the side, away from the substrate, of the pixel defining layer, the display panel further comprises at least one compensation layer, the compensation layer is located on the side, away from the substrate, of the second electrode, and the compensation layer and the side wall of the corresponding pixel opening are at least partially overlapped in the direction perpendicular to the plane where the substrate is located.

Description

Technical Field

[0001] This application relates to the field of display technology, specifically to a display panel and its manufacturing method, and a display device. Background Technology

[0002] Organic light-emitting diodes (OLEDs) have advantages such as self-illumination, no need for backlight, wide color gamut, high contrast, thinness, wide viewing angle, and fast response speed. As a current-driven light-emitting device, OLED display panels are increasingly being used in high-performance displays.

[0003] The performance of OLED display panels still needs improvement. Summary of the Invention

[0004] This invention provides a display panel and its preparation method, as well as a display device, which improves the uniformity of film thickness of the second electrode at different locations, enhances the reliability of the display panel, and improves the display effect.

[0005] In a first aspect, embodiments of the present invention provide a display panel, comprising: Multiple first electrodes are located on one side of the substrate; A pixel definition layer is located on the side of the first electrode away from the substrate. The pixel definition layer includes a plurality of pixel openings. The pixel openings expose at least a portion of the corresponding first electrode. The angle between the sidewall of the pixel opening and the plane of the substrate on the side away from the pixel opening is θ, where 0° < θ < 90°. The second electrode is located on the side of the pixel definition layer away from the substrate; At least one compensation layer is located on the side of the second electrode away from the substrate, and in a direction perpendicular to the plane of the substrate, the compensation layer and the sidewall of the corresponding pixel opening at least partially overlap.

[0006] Secondly, embodiments of the present invention provide a method for manufacturing a display panel, comprising: Provide substrate; Multiple first electrodes are formed on one side of the substrate; A pixel definition layer is formed on the side of the first electrode away from the substrate. The pixel definition layer includes a plurality of pixel openings. The pixel openings expose at least a portion of the corresponding first electrode. The angle between the sidewall of the pixel opening and the plane of the substrate on the side away from the pixel opening is θ, where 0° < θ < 90°. A second electrode is formed on the side of the pixel definition layer away from the substrate; At least one compensation layer is formed on the side of the second electrode away from the substrate, and the compensation layer and the sidewall of the corresponding pixel opening at least partially overlap in a direction perpendicular to the plane of the substrate.

[0007] Thirdly, embodiments of the present invention provide a display device including the display panel described above.

[0008] The display panel, its fabrication method, and display device provided in this invention compensate for the thickness of the weak portion of the second electrode by providing a compensation layer corresponding to at least one pixel opening in the display panel. The compensation layer and the sidewall of the corresponding pixel opening at least partially overlap in a direction perpendicular to the plane of the substrate. That is, the compensation layer and the thinner portion of the second electrode at least partially overlap, thereby compensating for the thickness of the thinner portion of the second electrode. When the thickness of the second electrode is too thin at the sidewall of the pixel opening, for example, in the case of a break, the compensation layer can fill the break location, reducing the risk of water and oxygen intrusion caused by uneven film thickness of the second electrode at the sidewall of the pixel opening. This reduces the risk of edge material aging in the pixel definition layer, prevents darkening of the light emitted from the edge of the light-emitting area, and ensures the normal transmission of signals transmitted by the second electrode. Attached Figure Description

[0009] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0010] Figure 1 A top view schematic diagram of a display panel provided in an embodiment of the present invention; Figure 2 for Figure 1 An enlarged schematic diagram of the region containing a single sub-pixel; Figure 3 for Figure 2 A schematic diagram of a cross-section along BB'; Figure 4 for Figure 1 The diagram shows a top view of the compensation layer in the display panel. Figure 5 An enlarged schematic diagram of the area where a single sub-pixel is located in another display panel provided in an embodiment of the present invention; Figure 6 This is a top view of a first mask template provided in an embodiment of the present invention; Figure 7 for Figure 6 An enlarged schematic diagram of region Q in the middle region; Figure 8 An enlarged schematic diagram of the area where a single sub-pixel is located in another display panel provided in an embodiment of the present invention; Figure 9A top view schematic diagram of another first mask template provided in an embodiment of the present invention; Figure 10 A top view schematic diagram of yet another first mask template provided in an embodiment of the present invention; Figure 11 A top view schematic diagram of another first mask template provided in an embodiment of the present invention; Figure 12 This is a schematic diagram illustrating a method for manufacturing a display panel according to an embodiment of the present invention; Figure 13 This is a schematic diagram illustrating a method for preparing a pixel definition layer according to an embodiment of the present invention; Figure 14 This is a top view of a second mask template provided in an embodiment of the present invention; Figure 15 This is a schematic diagram of a display device provided in an embodiment of the present invention. Detailed Implementation

[0011] To better understand the technical solution of the present invention, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0012] It should be understood that the described embodiments are merely some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0013] The terminology used in the embodiments of this invention is for the purpose of describing particular embodiments only and is not intended to limit the invention. The singular forms “a,” “the,” and “the” as used in the embodiments of this invention and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0014] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0015] This invention provides a display panel, such as... Figure 1 As shown, Figure 1 This is a top view schematic diagram of a display panel provided in an embodiment of the present invention. The display panel includes a substrate 11 and a plurality of sub-pixels 2 located on the same side of the substrate 11.

[0016] For example, the multiple sub-pixels 2 include multiple sub-pixels that emit different colors. Figure 1The display panel includes a first sub-pixel 201, a second sub-pixel 202, and a third sub-pixel 203 as an example. Optionally, the first sub-pixel 201, the second sub-pixel 202, and the third sub-pixel 203 can emit red light, green light, and blue light, respectively.

[0017] For example, sub-pixel 2 includes an electrically connected light-emitting unit and a pixel driving circuit, the pixel driving circuit being used to provide driving current to the light-emitting unit. For example, the light-emitting unit and the pixel driving circuit are located on the same side of the substrate 11.

[0018] Optionally, the light-emitting unit includes, but is not limited to, organic light-emitting diodes (OLEDs), quantum dot light-emitting diodes (QLEDs), micro light-emitting diodes (Micro LEDs), and submillimeter light-emitting diodes (Mini LEDs). The embodiments of the present invention do not impose specific limitations on the type of light-emitting unit.

[0019] like Figure 2 and Figure 3 As shown, Figure 2 for Figure 1 An enlarged schematic diagram of the region containing a single sub-pixel. Figure 3 for Figure 2 A schematic cross-sectional view along BB' shows that the light-emitting unit 20 includes a first electrode 21, a second electrode 22, and a light-emitting functional layer 23 located on the same side of the substrate 11. Along a direction h1 perpendicular to the plane of the substrate 11, the light-emitting functional layer 23 is located between the first electrode 21 and the second electrode 22.

[0020] For example, the first electrode 21 includes an anode, and the second electrode 22 includes a cathode. The light-emitting functional layer 23 includes a hole transport layer, a light-emitting layer, and an electron transport layer, etc.

[0021] When the display panel is working, the first electrode 21 and the second electrode 22 receive electrical signals. Holes and electrons are injected from the first electrode 21 and the second electrode 22 into the hole transport layer and the electron transport layer, respectively, and then migrate to the light-emitting layer through the hole transport layer and the electron transport layer, respectively. Holes and electrons recombine in the light-emitting layer to emit light, thereby realizing the self-emissive characteristic of the OLED device. The light emitted from the light-emitting layer in the light-emitting unit 20 of different colors is of different colors.

[0022] For example, such as Figure 3 As shown, the display panel also includes a driving circuit layer 12, which may include the aforementioned pixel driving circuit.

[0023] Optional, such as Figure 1 , Figure 2 and Figure 3 As shown, the display panel also includes a pixel definition layer 3, which includes pixel openings 30.

[0024] like Figure 3 As shown, at least a portion of the pixel defining layer 3 is located on the side of the first electrode 21 away from the substrate 11, and at least a portion of the pixel defining layer 3 is located on the side of the second electrode 22 close to the substrate 11. That is, along the direction h1 perpendicular to the plane of the substrate 11, the pixel defining layer 3 is located between the first electrode 21 and the second electrode 22. The pixel opening 30 exposes at least a portion of the first electrode 21, and the angle between the sidewall S1 of the pixel opening 30 and the plane of the substrate 11 on the side away from the pixel opening 30 is θ, where 0° < θ < 90°. At least a portion of the light-emitting functional layer 23 is located within the pixel opening 30. The pixel opening 30 defines the light-emitting area of ​​the sub-pixel 2.

[0025] like Figure 1 , Figure 2 and Figure 3 As shown, the display panel also includes a compensation layer 4 disposed corresponding to at least one sub-pixel 2. Figure 1 The illustration shows a display panel comprising multiple compensation layers 4, each corresponding to a plurality of sub-pixels 2.

[0026] For example, such as Figure 3 As shown, the compensation layer 4 is located on the side of the second electrode 22 away from the substrate 11, and along the direction h1 perpendicular to the plane of the substrate 11, the compensation layer 4 and the sidewall S1 of the pixel opening 30 at least partially overlap.

[0027] like Figure 3 As shown, along the direction h1 perpendicular to the plane where the substrate 11 is located, the second electrode 22 and the sidewall S1 of the pixel opening 30 also overlap at least partially.

[0028] In implementing the embodiments of the present invention, the inventors discovered that, due to the inclined arrangement of the sidewall S1 of the pixel opening 30, when preparing the film layer formed after the pixel opening 30, such as the second electrode 22 described above, uneven film thickness occurs at different locations. Specifically, the thickness of the second electrode 22 at the sidewall S1 of the pixel opening 30 is reduced, resulting in a thickness at this location being less than that at other locations. This location is defined below as the thinnest part 220 of the second electrode 22. In related technologies, the second electrode 22 may even break at the sidewall S1. Film layer breakage can lead to water and oxygen from the external environment easily penetrating into the pixel definition layer 3 from the break point, i.e., the break point easily becomes a water and oxygen permeation channel, causing material aging at the edge of the pixel definition layer 3 and increasing reliability risks; on the other hand, it can also cause the light emission from the edge of the light-emitting area to darken, affecting the display; furthermore, it can easily affect the signal transmitted by the second electrode 22, such as the transmission of the cathode signal, affecting the display.

[0029] In this embodiment of the invention, a compensation layer 4 corresponding to at least one pixel opening 30 is provided in the display panel. Along a direction h1 perpendicular to the plane of the substrate 11, the compensation layer 4 and the sidewall S1 of the pixel opening 30 at least partially overlap. That is, the compensation layer 4 and the thin portion 220 of the second electrode 22 at least partially overlap, thereby achieving thickness compensation for the thin portion 220 of the second electrode 22. When the thickness of the second electrode 22 is too thin at the sidewall S1 of the pixel opening 30, for example, in the case of a break, the compensation layer 4 can fill the break location, reducing the risk of water and oxygen intrusion caused by uneven film thickness of the second electrode 22 at the sidewall S1 of the pixel opening 30. This reduces the risk of edge material aging of the pixel definition layer 3, prevents darkening of the light emission edge of the light-emitting area, and ensures the normal transmission of the signal transmitted by the second electrode 22.

[0030] Optionally, the thickness of the compensation layer 4 is less than or equal to the thickness of the second electrode 22 at other locations. For example, the sum of the thickness of the compensation layer 4 and the thickness of the thin portion 220 may be greater than or equal to the thickness of the second electrode 22 at other locations.

[0031] For example, the compensation layer 4 includes a conductive material. Optionally, the material of the compensation layer 4 is the same as the material of the second electrode 22.

[0032] When setting multiple subpixels in the display panel, for example, such as Figure 1As shown, the display panel may include multiple pixel rows 200 arranged along a second direction h22. Each pixel row 200 includes a first sub-pixel 201, a third sub-pixel 203, and a second sub-pixel 202 arranged along a first direction h21. Adjacent pixel rows 200 are staggered. Furthermore, in two adjacent pixel rows 200, along the first direction h21, the second sub-pixel 202 of one pixel row 200 is located between the first sub-pixel 201 and the third sub-pixel 203 of the other pixel row 200. For example, odd-numbered pixel rows 200 are aligned along the second direction h22, and even-numbered pixel rows 200 are aligned along the second direction h22.

[0033] Alternatively, in this embodiment of the invention, the first sub-pixel 201, the second sub-pixel 202, and the third sub-pixel 203 may be set according to other rules, and this embodiment of the invention does not limit this.

[0034] also, Figure 1 The shapes and areas of the first sub-pixel 201, the second sub-pixel 202, and the third sub-pixel 203 are also schematic and are not limited in this embodiment of the present invention.

[0035] For example, the included angle θ between the sidewall S1 of the pixel opening 30 and the plane of the substrate 11 facing away from the pixel opening 30 satisfies 0° < θ < 50°, so as to avoid setting the tilt of the sidewall S1 of the pixel opening 30 too large, which is beneficial to increase the thickness of subsequent film layers, such as the second electrode 22 at the sidewall S1, and improve the thickness uniformity of subsequent film layers at different positions.

[0036] For example, such as Figure 3 As shown, the compensation layer 4 is in contact with the second electrode 22. The contact between the compensation layer 4 and the second electrode 22 is to prevent the formation of voids between them that could serve as pathways for water and oxygen intrusion.

[0037] Optional, such as Figure 2 and Figure 3 As shown, the compensation layer 4 includes a first edge 41 and a second edge 42.

[0038] like Figure 2 As shown, the first edge 41 is located on the side of the second edge 42 away from the centroid O of the pixel opening 30. That is, the compensation layer 4 is a ring structure that at least partially surrounds the centroid O of the pixel opening 30, wherein the first edge 41 is the outer edge of the compensation layer 4 and the second edge 42 is the inner edge of the compensation layer 4.

[0039] By using this arrangement, the centroid O of the compensation layer 4 and the pixel opening 30 can be offset along a direction perpendicular to the plane of the substrate 11, thus avoiding making the area of ​​the compensation layer 4 too large. For example, the coverage area of ​​the compensation layer 4 over the central region of the pixel opening 30 can be reduced. The central region includes the centroid O of the pixel opening 30.

[0040] like Figure 3 As shown, the film thickness at the position corresponding to the center region of the pixel opening 30 in the second electrode 22 is relatively large, and the thickness is relatively uniform at different positions. In this embodiment of the invention, by setting the compensation layer 4 away from the center region of the pixel opening 30, the compensation layer 4 compensates for the thickness of the thinner parts of the second electrode 22 (corresponding to the sidewall S1 of the pixel opening 30) while avoiding setting the compensation layer 4 at the thickest part of the second electrode 22. This avoids increasing the film thickness at the position corresponding to the pixel opening 30 in the second electrode 22, thereby avoiding affecting the light transmittance of the display panel. Furthermore, it can also reduce the loss of small-angle light emitted from the light-emitting functional layer 23 during the emission process and ensure the light transmittance of the display panel.

[0041] For example, the orthographic projection of the pixel opening 30 onto the plane of the substrate 11 can be a regular shape. Alternatively, it can be an irregular shape. The regular shapes (regular geometric shapes) in this invention satisfy at least one of the following conditions: 1) centrally symmetric shapes; 2) axially symmetric shapes with two or more axes of symmetry. Examples of regular shapes include ellipses, parallelograms (neither rectangles nor rhombuses), circles, rounded rectangles, regular polygons, rectangles, and rhombuses.

[0042] For a centrally symmetric figure, its central point of symmetry is the centroid; for an axially symmetric figure with two or more axes of symmetry, the intersection of the two axes of symmetry is the centroid. Figures other than those classified as regular are considered irregular figures. If the geometry of a pixel opening is asymmetrical and irregular, its centroid can be determined using relevant techniques.

[0043] For example, such as Figure 3 As shown, along direction h1 perpendicular to the plane of substrate 11, the first electrode 21 at least partially overlaps with the first edge 41 and the second edge 42. Exemplarily, the orthographic projections of the first edge 41 and the second edge 42 onto the plane of substrate 11 can lie within the orthographic projection of the first electrode 21 onto the plane of substrate 11. That is, the orthographic projection of the first electrode 21 onto the plane of substrate 11 covers the orthographic projections of the first edge 41 and the second edge 42 onto the plane of substrate 11.

[0044] Optional, such as Figure 3 As shown, along the direction h1 perpendicular to the plane where the substrate 11 is located, the first edge 41 and the edge of the first electrode 21 are flush.

[0045] The film thickness is greater at the non-overlapping locations of the second electrode 22 with the first electrode 21, and the thickness is relatively uniform across different locations. This embodiment of the invention avoids placing the compensation layer 4 in areas other than the first electrode 21. While compensating for the thinner areas of the second electrode 22 using the compensation layer 4, it avoids placing the compensation layer 4 at areas with greater thickness in the second electrode 22, thus avoiding increasing the film thickness at the non-overlapping locations of the second electrode 22 and preventing any impact on the light transmittance of the display panel.

[0046] It should be noted that, depending on the equipment's process capabilities, a certain amount of process error is allowed during the manufacturing process of the display panel. The above-mentioned first edge 41 and first electrode 21 being flush means that they are flush within the allowable range of process error.

[0047] Optional, such as Figure 3 As shown, along a direction parallel to the plane of the substrate 11, the shortest distance between the second edge 42 and the edge of the pixel opening 30 is d1, where 0.5μm < d1 < 1.5μm. By setting d1 > 0.5μm in this embodiment of the invention, it is ensured that the compensation layer 4 can cover the sidewall S1 of the pixel opening 30, thereby ensuring thickness compensation at the thinnest point of the second electrode 22. Simultaneously, by setting d1 < 1.5μm, this embodiment of the invention ensures that the compensation layer 4 compensates for the thinnest point of the second electrode 22 while avoiding placing the compensation layer 4 at a larger thickness point of the second electrode 22, thus avoiding increasing the film thickness at the position corresponding to the pixel opening 30 in the second electrode 22 and avoiding affecting the light transmittance of the display panel.

[0048] For example, d1 = 1 μm.

[0049] It is understood that the phrase "at least partially surrounds" in the context of the aforementioned compensation layer 4 being a ring structure that at least partially surrounds the center of gravity O of the pixel opening 30 includes both "partially surrounds" and "surrounds". "Surrounds" refers to a closed surround. That is, the compensation layer 4 is a closed ring structure, and the center of gravity O of the surrounded pixel opening 30 is located within the ring structure enclosed by the compensation layer 4. "Partially surrounds" refers to an open surround. For example, the compensation layer 4 may include a notch.

[0050] Figure 2 The illustration shows the case where the compensation layer 4 is configured as a closed ring structure. In the fabrication of structures with such... Figure 2For example, when constructing the compensation layer 4 of the closed ring structure shown, a complete compensation material layer can be formed on the surface of the second electrode 22 first, and then the part of the compensation material layer corresponding to the central region of the pixel opening 30 can be removed by a patterning process, as well as the part that does not overlap with the first electrode 21, to obtain the compensation layer 4 that only covers the sidewall S1 of the pixel opening 30.

[0051] In another alternative implementation, such as Figure 5 As shown, Figure 5 This is an enlarged schematic diagram of the area where a single sub-pixel is located in another display panel provided by an embodiment of the present invention. In this embodiment, the compensation layer 4 corresponding to the same pixel opening 30 can also be configured to include a notch 401. That is, the compensation layer 4 is configured as a non-closed pattern partially surrounding the centroid O of the pixel opening 30.

[0052] For example, such as Figure 5 As shown, the compensation layer 4 includes at least two sub-compensation parts 402, with adjacent sub-compensation parts 402 spaced apart. The notch 401 corresponds to the gap between adjacent sub-compensation parts 402, that is, adjacent sub-compensation parts 402 are separated by the notch 401. Figure 5 The compensation layer 4 corresponding to the same pixel opening 30 includes four notches 401 and four sub-compensation parts 402 as an example.

[0053] For example, in making a product with such Figure 5 When the compensation layer 4, including the notch 401, is shown, it can be used... Figure 6 The first mask template 51 shown, Figure 6 This is a top view of a first mask template provided in an embodiment of the present invention. The first mask template 51 includes a plurality of first mask openings 510. Specifically, an evaporation source for forming a compensation layer 4 can be provided, so that the vapor deposition material generated by the evaporation source is deposited through the first mask openings 510 onto the surface of the second electrode 22 corresponding to the sidewall S1 of the pixel opening 30, that is, deposited on the surface of the thin part 220 of the second electrode 22, thereby forming the aforementioned compensation layer 4 on the surface of the thin part 220, and obtaining a layer having the following properties: Figure 5 The compensation layer 4 for the gap 401 shown.

[0054] In embodiments of the present invention, such as Figure 6 As shown, the first mask template 51 includes multiple openings for different pixels ( Figure 6 (Not shown) Corresponding mask opening group 5100. Combined with Figure 7 As shown, Figure 7 for Figure 6An enlarged schematic diagram of the central region Q shows that the same mask opening group 5100 includes at least two first mask openings 510 corresponding to the same pixel opening. Two adjacent first mask openings 5100 in the same mask opening group 5100 are spaced apart along the direction surrounding the first light-shielding portion 511. That is, the first mask opening 510 is a partially open structure surrounding the first light-shielding portion 511. Figure 6 and Figure 7 As illustrated, the same mask opening group 5100 in the first mask template 51 includes four first mask openings 510 corresponding to a single pixel opening, such as... Figure 6 and Figure 7 As shown, two adjacent first mask openings 510 are spaced apart.

[0055] When fabricating the compensation layer 4, in this embodiment of the invention, the first mask opening 510 can be aligned with the sidewall S1 of the pixel opening 30. Since the thin portion 220 in the second electrode 22 is provided corresponding to the sidewall S1 of the pixel opening 30, and the sidewall S1 of the pixel opening 30 surrounds the pixel opening 30, in this embodiment of the invention, by arranging at least two first mask openings 510 in the same mask opening group 5100 along the direction surrounding the geometric center of the pixel opening 30, the thin portions 220 in the second electrode 22 located at different positions along the direction surrounding the geometric center of the pixel opening 30 can be covered by the compensation layer 4 as much as possible.

[0056] Furthermore, the width of the first mask opening 510 can be greater than or equal to the width of the orthographic projection of the sidewall S1 of the pixel opening 30 onto the plane of the substrate 11. During alignment, aligning the first mask opening 510 and the sidewall S1 of the pixel opening 30 can ensure that the prepared compensation layer 4 can cover the thin part 220 as much as possible at different positions in the width direction of the sidewall S1.

[0057] like Figure 6 and Figure 7 As shown, the first mask template 51 also includes a plurality of first light-blocking portions 511, second light-blocking portions 512, and third light-blocking portions 513 corresponding to different pixel openings. The second light-blocking portion 512 is located on the side of the first mask opening 510 away from the first light-blocking portion 511. The third light-blocking portion 513 is located between two adjacent first mask openings 510 in the same mask opening group 5100.

[0058] For example, during the fabrication of the compensation layer 4, in this embodiment of the invention, the orthographic projection of the first light-shielding portion 511 onto the plane of the substrate 11 can cover the centroid O of the corresponding pixel opening 30. The provision of the first light-shielding portion 511 can prevent the vapor-deposited material layer used to form the compensation layer 4 from being deposited in the central region of the pixel opening 30.

[0059] In this embodiment of the invention, the third light-shielding part 513 can be connected to the first light-shielding part 511 and the second light-shielding part 512. The provision of the third light-shielding part 513 can improve the stability of the first mask template 51, which includes the first light-shielding part 511 and the first mask opening 510.

[0060] During the fabrication of the compensation layer, while the vapor-deposited material layer is deposited on the surface of the second electrode through the first mask opening 510 to form the compensation layer, the third light-shielding portion 513 can prevent the vapor-deposited material layer from depositing on the surface of the second electrode 22, thereby achieving the desired result. Figure 5 The compensation layer 4 shown has a notch 401. The notch 401 corresponds to the third light-shielding part 513.

[0061] For example, such as Figure 5 As shown, the shape of the orthographic projection of the pixel opening 30 onto the plane of the substrate 11 includes a polygon, and the notch 401 in the compensation layer 4 corresponds to the vertex A of the polygon. Compared to the location of the edges of the polygon, the space at the vertex of the polygon is relatively small. By making the notch 401 in the compensation layer 4 correspond to the vertex A of the polygon, this embodiment of the invention ensures that the first light-blocking part 511 and the second light-blocking part 512 in the first mask template 51 can be connected, while reducing the distance between two adjacent first mask openings 510 in the same mask opening group 5100. This avoids setting the area of ​​the notch 401 in the compensation layer 4 to be too large, and the freed-up space can be used to set the sub-compensation part 402, which is beneficial to increase the area of ​​the sub-compensation part 402 and improve the thickness compensation effect on the thin parts 220 distributed at different positions in the second electrode 22.

[0062] It should be noted that the aforementioned polygon can be a polygon including chamfers. The chamfer setting can prevent sharp angles from forming at the edges of the pixel opening. When the geometry of the pixel opening is set to a polygon including chamfers, the aforementioned notch 401 corresponds to the vertex setting of the pixel opening 30, including the chamfer setting of the pixel opening 30.

[0063] like Figure 8 As shown, Figure 8 This is an enlarged schematic diagram of the area where a single sub-pixel is located in another display panel provided by an embodiment of the present invention, wherein the shape of the pixel opening 30 is a polygon including a chamfer C as an illustration, and the notch 401 is set to correspond to the chamfer C of the pixel opening 30.

[0064] For example, such as Figure 5 and Figure 8As shown, the compensation layer 4 includes at least two notches 401, and the shape of the orthographic projection of the pixel opening 30 onto the plane of the substrate 11 includes an axisymmetric pattern, with the at least two notches 401 being symmetrical about the axisymmetric pattern. This arrangement helps to improve the symmetry of the pattern of the compensation layer 4, as well as the pattern symmetry of the first mask opening 510 in the first mask template 51.

[0065] It should be noted that, Figure 6 and Figure 7 The pattern of the first mask template 51 shown is only schematic. In this embodiment of the invention, the first mask opening 510 in the first mask template 51 can be set in other ways, such as... Figure 9 , Figure 10 and Figure 11 As shown, Figure 9 , Figure 10 and Figure 11 Top view schematic diagrams of three other first mask templates provided in embodiments of the present invention, in Figure 9 , Figure 10 and Figure 11 In the same mask opening group 5100, each includes two first mask openings 510 corresponding to the same pixel opening. Figure 9 and Figure 11 In the same mask opening group 5100, two first mask openings 510 are arranged along the first direction h21. Figure 10 In the same mask opening group 5100, two first mask openings 510 are arranged along the second direction h22.

[0066] For example, such as Figure 9 and Figure 10 As shown, in this embodiment of the invention, the first mask opening 510 can have a apex angle F1, or, as... Figure 11 As shown, in this embodiment of the invention, the first mask opening 510 can also have a chamfer F2. For example, Figure 11 The distance between two first mask openings 510 in the same mask opening group 5100 can be less than Figure 9 and Figure 10 The distance between two first mask openings 510 in the same mask opening group 5100.

[0067] When the display panel is configured to include multiple compensation layers 4, for example, combined with Figure 1 and Figure 4 As shown, Figure 4 for Figure 1 The diagram shows a top view of the compensation layers in the display panel, with different compensation layers 4 and different pixel openings. Figure 4(Not shown) Corresponding to; the compensation layer 4 is spaced apart from the openings of two adjacent pixels. By adopting this arrangement, while using the compensation layer 4 to compensate for the thin areas of the second electrode 22, the coverage area of ​​the compensation layer 4 in the display panel can be reduced, thus avoiding affecting the light transmittance of the display panel.

[0068] Based on the same inventive concept, embodiments of the present invention also provide a method for manufacturing a display panel, such as... Figure 12 As shown, Figure 12 This is a schematic diagram of a method for manufacturing a display panel according to an embodiment of the present invention. The method includes: Step S1: Provide substrate 11; Step S2: Form a plurality of first electrodes 21 on one side of the substrate 11; Figure 12 Taking one of the first electrodes 21 as an example; exemplarily, the fabrication method further includes the process of forming a driving circuit layer 12. The driving circuit layer 12 includes a pixel driving circuit. The pixel driving circuit is electrically connected to the light-emitting unit and provides driving current to the light-emitting unit. Exemplarily, the pixel driving circuit includes a thin-film transistor and a storage capacitor.

[0069] Step S3: A pixel definition layer 3 is formed on the side of the first electrode 21 away from the substrate 11. The pixel definition layer 3 includes a plurality of pixel openings 30. Figure 12 Take one of the pixel openings 30 as an example; the pixel opening 30 exposes at least a portion of the corresponding first electrode 21, and the angle between the sidewall S1 of the pixel opening 30 and the plane of the substrate 11 facing away from the pixel opening 30 is θ, where 0° < θ < 90°. Step S4: Form a second electrode 22 on the side of the pixel definition layer 3 away from the substrate 11. For example, as shown... Figure 12 As shown, before forming the second electrode 22, the fabrication method further includes the step of forming a light-emitting functional layer 23. Because the sidewall S1 of the pixel opening 30 is tilted, the subsequently formed second electrode 22 will exhibit uneven film thickness, such as... Figure 12 As shown, the second electrode 22 has a thin portion 220, and the orthographic projection of the thin portion 220 on the plane of the substrate 11 at least partially overlaps with the orthographic projection of the sidewall S1 of the pixel opening 30 on the plane of the substrate 11.

[0070] Step S5: At least one compensation layer 4 is formed on the side of the second electrode 22 away from the substrate 11, and the compensation layer 4 and the sidewall S1 of the corresponding pixel opening 30 at least partially overlap along the direction h1 perpendicular to the plane of the substrate 11.

[0071] In this embodiment of the invention, a compensation layer 4 corresponding to at least one pixel opening 30 is provided in the display panel. Along a direction h1 perpendicular to the plane of the substrate 11, the compensation layer 4 and the sidewall S1 of the pixel opening 30 at least partially overlap. That is, the compensation layer 4 and the thin portion 220 of the second electrode 22 at least partially overlap, thereby achieving thickness compensation for the thin portion 220 of the second electrode 22. When the thickness of the second electrode 22 is too thin at the sidewall S1 of the pixel opening 30, for example, in the case of a break, the compensation layer 4 can fill the break location, reducing the risk of water and oxygen intrusion caused by uneven film thickness of the second electrode 22 at the sidewall S1 of the pixel opening 30. This reduces the risk of edge material aging of the pixel definition layer 3, prevents darkening of the light emission edge of the light-emitting area, and ensures the normal transmission of the signal transmitted by the second electrode 22.

[0072] Optionally, the method for forming the compensation layer 4 on the side of the second electrode 22 away from the substrate 11 in step S5 above includes: Step S41: Provide, for example Figure 6 , Figure 7 , Figure 9 , Figure 10 or Figure 11 The first mask template 51 shown includes a first light-shielding portion 511 corresponding to a single pixel opening 30 and a mask opening group 5100. The mask opening group 5100 includes at least two first mask openings 510, and the at least two first mask openings 510 are arranged along the direction surrounding the first light-shielding portion 511, with adjacent first mask openings 510 spaced apart. In other words, the first mask openings 510 are non-closed structures that partially surround the first light-shielding portion 511.

[0073] Step S42: Prepare compensation layer 4 using the first mask template 51.

[0074] For example, during the preparation of the compensation layer 4, the first mask 51 can be aligned with the pre-prepared second electrode 22. Specifically, the first light-shielding part 511 of the first mask 51 is projected onto the plane of the substrate 11 to cover the centroid O of the corresponding pixel opening 30. Also, along the direction h1 perpendicular to the plane of the substrate, the sidewalls S1 of the first mask opening 510 and the pixel opening 30 at least partially overlap.

[0075] For example, the compensation layer 4 can be prepared by vapor deposition.

[0076] Optional, such as Figure 13 As shown, Figure 13 This is a schematic diagram of a method for preparing a pixel definition layer 3 according to an embodiment of the present invention. The method for forming the pixel definition layer 3 on the side of the first electrode 21 away from the substrate 11 in step S3 includes: Step S31: Form an initial film layer 300 on the side of the first electrode 21 away from the substrate 11; Step S32: Provide the second mask template 52; Step S33: Pattern the initial film layer 300 using the second mask template 52, and remove the region in the initial film layer 300 corresponding to the first portion A1 of the second mask template 52 to obtain a pixel definition layer 3 including a pixel opening 30. The pixel opening 30 penetrates the pixel definition layer 3, exposing at least a portion of the first electrode 21.

[0077] For example, such as Figure 14 As shown, Figure 14 This is a top view schematic diagram of a second photomask provided in an embodiment of the present invention. The second photomask 52 includes multiple first portions A1 and second portions A2, with the second portions A2 surrounding the first portions A1. The light transmittance of the first portions A1 and the second portions A2 is different. When using the second photomask 52 to form the pixel definition layer 3, the first portions A1 can be aligned with the area in the initial film layer 300 where the pixel opening 30 is to be formed, and the second portions A2 can correspond to other positions.

[0078] For example, the initial film layer 300 includes a positively or negatively photosensitive material. The light transmittance of the first portion A1 and the second portion A2 can be determined according to the material of the selected initial film layer 300. Taking the initial film layer 300 as an example that includes a negatively photosensitive material, the second mask 52 can be set to have a lower light transmittance for the first portion A1 and a higher light transmittance for the second portion A2. For example, the first portion A1 can be a non-transparent area, and the second portion A2 can be a transparent area. In this way, after exposure and development processes, the position in the initial film layer 300 corresponding to the first portion A1 can be removed to form a pixel opening 30, while the position corresponding to the second portion A2 can be retained to form the non-opening portion of the pixel definition layer 3.

[0079] For example, such as Figure 14 As shown, the edge of the first part A1 includes serrations; when the initial film layer 300 is exposed through the second mask 52, the serrated part of the edge of the first part A1 can reduce the image edge shrinkage caused by optical diffraction, thereby improving the perpendicularity of the sidewall S1 of the pixel opening 30. This is beneficial to reduce the angle θ between the sidewall S1 of the pixel opening 30 and the plane of the substrate 11 away from the pixel opening 30. As a result, when preparing subsequent film layers, the thickness of subsequent film layers, such as the second electrode 22 on the sidewall S1 of the pixel opening 30, can be increased, improving the uniformity of the film thickness of the second electrode 22 at different positions.

[0080] For example, in combination Figure 1 and Figure 14As shown, the first part A1 includes a first sub-part A11, a second sub-part A12, and a third sub-part A13. The first sub-part A11 corresponds to the first sub-pixel 201, the second sub-part A12 corresponds to the second sub-pixel 202, and the third sub-part A13 corresponds to the third sub-pixel 203.

[0081] For example, such as Figure 14 As shown, the edge of the first part A1 includes multiple serrations 500; at least some of the serrations 500 are arranged at equal intervals to improve the exposure consistency corresponding to different positions of the edge of the first part A1, which is beneficial to improve the morphological consistency of the sidewall S1 of the formed pixel opening 30 at different positions around the centroid of the pixel opening 30, thereby improving the thickness uniformity of subsequent film layers, such as the second electrode 22 at different positions of the sidewall S1 of the pixel opening 30.

[0082] Based on the same inventive concept, embodiments of the present invention also provide a display device, such as... Figure 15 As shown, Figure 15 This is a schematic diagram of a display device provided in an embodiment of the present invention. The display device includes the aforementioned display panel 100. The specific structure of the display panel 100 has been described in detail in the above embodiments and will not be repeated here. Figure 15 The display device shown is for illustrative purposes only. The display device can be any electronic device with display function, such as a mobile phone, tablet computer, laptop computer, e-reader, in-vehicle display screen or television.

[0083] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A display panel, characterized in that, include: Substrate; Multiple first electrodes are located on one side of the substrate; A pixel definition layer is located on the side of the first electrode away from the substrate, and the pixel definition layer includes a plurality of pixel openings; The pixel opening exposes at least a portion of the corresponding first electrode, and the angle between the sidewall of the pixel opening and the plane of the substrate facing away from the pixel opening is θ, where 0° < θ < 90°. The second electrode is located on the side of the pixel definition layer away from the substrate; At least one compensation layer is located on the side of the second electrode away from the substrate, in a direction perpendicular to the plane of the substrate, and the compensation layer and the sidewall of the corresponding pixel opening at least partially overlap.

2. The display panel according to claim 1, characterized in that, The compensation layer is in contact with the second electrode.

3. The display panel according to claim 2, characterized in that, The compensation layer includes a first edge and a second edge, the first edge being located on the side of the second edge away from the centroid of the pixel opening; the first electrode and the first edge at least partially overlap in a direction perpendicular to the plane of the substrate.

4. The display panel according to claim 3, characterized in that, Along a direction perpendicular to the plane of the substrate, the first edge and the edge of the first electrode are flush.

5. The display panel according to claim 3, characterized in that, Along a direction parallel to the plane of the substrate, the shortest distance between the second edge and the edge of the pixel opening is d1, where 0.5μm < d1 < 1.5μm.

6. The display panel according to claim 1, characterized in that, The compensation layer is at least partially centered around the pixel opening.

7. The display panel according to claim 1, characterized in that, The compensation layer includes a notch.

8. The display panel according to claim 7, characterized in that, The shape of the pixel opening in the orthographic projection onto the plane of the substrate includes a polygon, and the notch corresponds to the vertex of the polygon.

9. The display panel according to claim 7, characterized in that, The compensation layer includes at least two of the notches, and the shape of the pixel opening in the orthographic projection of the plane on the substrate includes an axisymmetric pattern, wherein at least two of the notches are symmetrical about the axisymmetric pattern.

10. The display panel according to claim 1, characterized in that, 0° < θ < 50°.

11. The display panel according to claim 1, characterized in that, The display panel also includes multiple compensation layers, with different compensation layers corresponding to different pixel openings; the compensation layers corresponding to two adjacent pixel openings are spaced apart.

12. A method for manufacturing a display panel, characterized in that, include: Provide substrate; A plurality of first electrodes are formed on one side of the substrate; A pixel definition layer is formed on the side of the first electrode away from the substrate, the pixel definition layer including a plurality of pixel openings; The pixel opening exposes at least a portion of the corresponding first electrode, and the angle between the sidewall of the pixel opening and the plane of the substrate facing away from the pixel opening is θ, where 0° < θ < 90°. A second electrode is formed on the side of the pixel definition layer away from the substrate; At least one compensation layer is formed on the side of the second electrode away from the substrate, and the compensation layer and the sidewall of the corresponding pixel opening at least partially overlap in a direction perpendicular to the plane of the substrate.

13. The preparation method according to claim 12, characterized in that, The method of forming the compensation layer on the side of the second electrode away from the substrate includes: A first mask template is provided; the first mask template includes a plurality of mask opening groups corresponding to different pixel openings, a first light-shielding part and a second light-shielding part, the same mask opening group includes at least two first mask openings corresponding to the same pixel opening, two adjacent first mask openings are spaced apart along the direction surrounding the first light-shielding part, and at least a portion of the second light-shielding part is located on the side of the first mask opening away from the first light-shielding part. The compensation layer is prepared using the first photomask.

14. The preparation method according to claim 12, characterized in that, The method of forming the pixel definition layer on the side of the first electrode away from the substrate includes: An initial film layer is formed on the side of the first electrode away from the substrate; A second mask template is provided, the second mask template including a first portion, the edges of the first portion including serrations; The initial film layer is patterned using the second mask template, and the region in the initial film layer corresponding to the first part is removed to form the pixel opening.

15. The preparation method according to claim 14, characterized in that, The edge of the first portion includes a plurality of the serrations; at least some of the serrations are arranged at equal intervals.

16. A display device, characterized in that, Includes the display panel as described in any one of claims 1-11.

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