Arsine synthesis reaction equipment with real-time leakage monitoring function

Abstract

The invention belongs to the technical field of chemical synthesis equipment, and particularly discloses arsine synthesis reaction equipment with a real-time leakage monitoring function, which comprises a synthesis reaction mechanism, a monitoring mechanism and a calibration mechanism, the synthesis reaction mechanism comprises a kettle body, the top of the kettle body is covered with a sealing cover, the top of the sealing cover is fixedly connected with a servo motor, a stirring frame is rotationally connected into the kettle body, a rotating shaft of the servo motor penetrates through the sealing cover and is in key connection with the stirring frame, and the bottom of the kettle body is fixedly communicated with an electric discharging valve. According to the arsine synthesis reaction equipment, the real-time monitoring unit is arranged, arsine gas leakage of the arsine synthesis reaction equipment can be found more accurately and timely, and when leakage occurs at the position, where arsine gas leakage occurs most easily, on the arsine synthesis reaction equipment, the leaked arsine gas can be prevented from being exposed in air to pollute the working environment.

Description

Technical Field

[0001] This invention belongs to the field of chemical synthesis equipment technology, specifically an arsine synthesis reaction device with real-time leakage monitoring function. Background Technology

[0002] Arsine, also known as arsine, trihydroarsine, and arsine, is the simplest arsenic compound with the chemical formula AsH3. It is a colorless gas and highly toxic. Arsine is used in the semiconductor industry, such as N-type doping of epitaxial silicon, N-type diffusion in silicon, ion implantation, growth of gallium arsenide and gallium arsenide phosphide, and the formation of compound semiconductors with certain elements. It is also used in organic synthesis, scientific research, or certain special experiments. Arsine is produced by reacting arsenic with zinc to generate zinc arsenide, which then reacts with sulfuric acid to obtain purified arsine. High-purity arsine products can be obtained through multi-stage adsorption purification. The arsine synthesis reaction equipment mainly consists of a reaction vessel, heating system, cooling system, gas metal inlet, stirring equipment, and metering pump, which can automatically complete the compound synthesis process from arsenic raw materials to arsine.

[0003] Currently, arsine synthesis reactors can only detect arsine leaks from the outside, at a height of 30 to 60 centimeters above the ground, using an AsH3 detector. By the time the AsH3 detector detects a leak, a significant amount of arsine gas has already leaked from the reactor. Therefore, by the time the AsH3 detector alarms, nearby workers have already inhaled the highly toxic gas, which can cause serious harm. This significantly impacts the safety and reliability of the arsine synthesis reactor, resulting in untimely leak detection and collection. Consequently, large amounts of leaked arsine gas diffuse into the air, polluting the working environment.

[0004] Combining the above issues, we find that existing arsine synthesis reaction equipment is difficult to avoid all of these problems during use. Even if the problems can be solved, they require external tools, which fails to achieve the desired effect. Therefore, we propose an arsine synthesis reaction equipment with real-time leak monitoring capabilities. Summary of the Invention

[0005] To address the above technical problems, this invention provides an arsine synthesis reaction apparatus with real-time leakage monitoring capabilities.

[0006] To solve the above technical problems, the technical solution adopted by the present invention is as follows: an arsine synthesis reaction device with real-time leakage monitoring function, comprising a synthesis reaction mechanism, a monitoring mechanism, and a calibration mechanism; the synthesis reaction mechanism includes a vessel body, the top of which is covered with a sealing cover, a servo motor is fixedly connected to the top of the sealing cover, a stirring rack is rotatably connected inside the vessel body, the shaft of the servo motor passes through the sealing cover and is keyed to the stirring rack, and an electric discharge valve is fixedly connected to the bottom of the vessel body; the monitoring mechanism includes a real-time monitoring unit and a collection and processing unit fixedly connected to the outer wall of the vessel body. The real-time monitoring unit includes two collection hoods, which are respectively installed on the top and bottom of the vessel body. The real-time monitoring unit also includes an arsine gas detector, the detection head of which is connected to the collection hoods. The collection and processing unit includes a storage tank, a filter tank, and a heating tank. The vessel body is connected to the filter tank, the heating tank, and the storage tank in sequence through pipes. Rubber tubes are connected to both sides of the storage tank. The calibration mechanism is fixedly connected to the outer wall of the vessel body. The calibration mechanism includes a detection cylinder, and an air jet pipe is installed inside the detection cylinder. The detection cylinder is connected to the arsine gas detector.

[0007] Furthermore, the real-time monitoring unit includes a protective cover, which is located outside the sealing cover. A connecting pipe is connected to both collection covers, and an air intake pump is connected to the end of the connecting pipe. A fixed housing is fixedly connected to the outlet of the air intake pump. An arsine gas detector is fixedly connected inside the fixed housing. An exhaust pipe is fixedly connected to the end of the fixed housing, and an electric three-way valve is fixedly connected to the end of the exhaust pipe. The electric three-way valve is electrically connected to the arsine gas detector via a wire. A fixed plate is fixedly connected to the bottom of the sealing cover, and a positioning plate is fixedly connected to the upper part of the vessel body. The protective cover is threadedly fixed to the fixed plate and the positioning plate using fixing bolts. An air inlet pipe is fixedly connected to the protective cover and the collection covers. A sealing ring is fixedly connected to the first end of the air inlet pipe, and a sealing plug is fixedly connected inside the sealing ring. A return spring is fixedly connected to the sealing plug, and a fixed ring is fixedly connected to the other end of the return spring. The fixed ring is fixedly connected to the air inlet pipe, and several ventilation holes are opened on the sealing plug.

[0008] Furthermore, a feed pipe is fixedly connected to the sealing cover, and an electric feed valve is fixedly connected to the feed pipe. Flanges are fixedly connected to both the bottom of the sealing cover and the top of the vessel body, and the flanges are fixedly connected by several fastening bolts.

[0009] Furthermore, a rubber sealing ring is fixedly connected inside each of the two collection hoods, with one rubber sealing ring in contact with the stirring frame and the other rubber sealing ring in contact with the electric discharge valve.

[0010] Furthermore, the liquid storage tank is fixedly connected to the side of the vessel body, and the filter box and heating box are fixedly connected to the top of the liquid storage tank. The filter box contains several activated carbon filter plates. A set of conveying pipes is fixedly connected to the side of the filter box, and the other end of the conveying pipes is connected to the heating box. Several heating wires are fixedly connected inside the heating box. An air supply pipe is fixedly connected to the other side of the heating box, and the end of the air supply pipe passes through the liquid storage tank and is fixedly connected to a discharge pipe. A positioning pipe is fixedly connected to the other side of the filter box, and the other end of the positioning pipe is connected to one passage of the electric three-way valve. Fixed pipes are fixedly connected to both sides of the liquid storage tank, and fixed plates are fixedly connected to both sides of the liquid storage tank. A limit frame is fixedly connected to the bottom of the fixed plate, and a pressure sensor is fixedly connected to the bottom of the limit frame. The bottom of the fixed plate is fixedly connected to the rubber cylinder, and a support plate is fixedly connected to the bottom surface of the rubber cylinder. The support plate is slidably connected inside the limit frame. Exhaust valves are fixedly connected to the upper surface of each fixed plate. The pressure sensor and the suction pump are electrically connected via wires.

[0011] Furthermore, a transparent plate is fixedly embedded in the side wall of the liquid storage tank, and scale lines are provided on the transparent plate. A sealing frame is provided at the top of the filter box, and the top of the activated carbon filter plate is fixedly connected to the bottom surface of the sealing frame.

[0012] Furthermore, the calibration mechanism includes a support frame, the top of which is fixedly connected to the bottom of the fixed housing. The detection cylinder is slidably connected to the inside of the support frame, and the top of the detection cylinder slides through into the inside of the fixed housing. A push plate is fixedly connected to the bottom of the detection cylinder. A screw is rotatably connected inside the support frame, and the push plate is threadedly connected to the screw. A limiting plate is fixedly connected inside the detection cylinder. The jet pipe passes through the limiting plate, and the top of the jet pipe passes through the detection cylinder and is threadedly connected to a sealing cap. A rubber plate is fixedly connected inside the sealing cap. Several dispersing plates are fixedly connected inside the fixed housing. A support plate is fitted onto the detection head of the arsine gas detector. An auxiliary spring is fixedly connected to the top of the support plate, and the top of the auxiliary spring is fixedly connected to the bottom of the fixed housing. A hollow rubber ring is fixedly connected to the bottom of the support plate and is fixedly connected to the outside of the detection head of the arsine gas detector.

[0013] Furthermore, auxiliary rods are fixedly connected between the support frames, and the push plate is slidably connected to the support frames.

[0014] Furthermore, an anti-detachment ring is rotatably connected inside the support frame at the top, and the top of the screw is rotatably connected to the anti-detachment ring.

[0015] Furthermore, each of the auxiliary springs is equipped with a telescopic rod inside, the bottom end of which is fixedly connected to the support plate and the top end of which is fixedly connected to the fixed shell.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] 1. This invention incorporates a real-time monitoring unit, enabling more accurate and timely detection of arsine gas leaks in arsine synthesis reaction equipment. When a leak occurs at the most vulnerable location on the equipment, it prevents the leaked arsine gas from contaminating the working environment. Furthermore, it ensures that by the time the arsine gas is detected by the arsine gas detector, workers have not already inhaled the gas. This effectively increases the safety of the arsine synthesis reaction equipment, improves the timeliness of leak detection and alarms, and reduces the hazards associated with arsine gas leaks.

[0018] 2. This invention includes a processing and collection unit that first adsorbs leaked arsine gas using activated carbon, then heats the arsine gas to convert it into harmless oxides, and finally mixes the leaked arsine gas with sodium hydroxide solution. The sodium hydroxide solution further absorbs the arsine gas and forms stable salts. The multi-processed arsine gas is then collected, making it less likely to diffuse further and rendering it harmless. This allows the arsine synthesis reaction equipment to promptly issue an arsine gas leak alarm, while simultaneously rendering and collecting the gas harmless, further preventing workers from inhaling the leaked gas, and facilitating subsequent centralized treatment of the leaked arsine gas.

[0019] 3. This invention includes a calibration mechanism that allows for the inspection and calibration of the arsine gas detector every three months. By injecting a small amount of arsine gas into the detection end of the arsine gas detector, the system checks whether the detector is functioning properly and simultaneously determines its detection accuracy. This prevents the accuracy of the arsine gas detector from decreasing over time, allowing staff to promptly detect any abnormalities in its operation and ensuring the accuracy and reliability of the arsine gas detection. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the present invention.

[0021] Figure 2 This is a schematic diagram of the internal structure of the vessel body of the present invention.

[0022] Figure 3 This is a schematic diagram of the internal structure of the fixed shell of the present invention.

[0023] Figure 4 This is a schematic diagram of the internal structure of the intake pipe of the present invention.

[0024] Figure 5 This is a schematic diagram of the connection relationship of the electric three-way valve of the present invention.

[0025] Figure 6 This is a schematic diagram of the internal structure of the liquid storage tank, heating tank, and filter tank of the present invention.

[0026] Figure 7 This is a schematic diagram of the connection relationship of the fixing plate of the present invention.

[0027] Figure 8 This is a schematic diagram of the connection relationship of the support frame of the present invention.

[0028] Figure 9 This is a schematic diagram of the internal structure of the support frame of the present invention.

[0029] The components include: 1. Synthesis reaction mechanism; 11. Kettle body; 12. Sealing cover; 13. Servo motor; 14. Stirring rack; 15. Electric discharge valve; 2. Monitoring mechanism; 21. Real-time monitoring unit; 2101. Protective cover; 2102. Fixing plate; 2103. Positioning plate; 2104. Fixing bolts; 2105. Collection cover; 2106. Connecting pipe; 2107. Connecting pipe; 2108. Air suction pump; 2109. 2110. Fixed housing; 2111. Arsine gas detector; 2111. Exhaust pipe; 2112. Electric three-way valve; 2113. Inlet pipe; 2114. Fixing ring; 2115. Return spring; 2116. Sealing ring; 2117. Sealing plug; 2118. Vent hole; 2119. Electric feed valve; 2120. Fastening bolt; 2121. Rubber sealing ring; 22. Processing and collection unit; 2201. Liquid storage tank; 2202, Filter box; 2203, Activated carbon filter plate; 2204, Heating box; 2205, Conveying pipe; 2206, Heating wire; 2207, Air supply pipe; 2208, Discharge pipe; 2209, Positioning pipe; 2210, Fixing pipe; 2211, Fixing plate; 2212, Limiting frame; 2213, Pressure sensor; 2214, Rubber cylinder; 2215, Support plate; 2216, Exhaust valve; 221 7. Transparent plate; 2218. Sealing frame; 3. Calibration mechanism; 301. Support frame; 302. Detection cylinder; 303. Push plate; 304. Screw; 305. Limiting plate; 306. Jet pipe; 307. Sealing cover; 308. Rubber plate; 309. Dispersing plate; 310. Support plate; 311. Auxiliary spring; 312. Hollow rubber ring; 313. Auxiliary rod; 314. Anti-detachment ring; 315. Telescopic rod. Detailed Implementation

[0030] The invention will now be further described with reference to the accompanying drawings.

[0031] like Figures 1-9 The apparatus shown includes an arsine synthesis reaction device with real-time leakage monitoring, comprising a synthesis reaction mechanism 1, a monitoring mechanism 2, and a calibration mechanism 3. The synthesis reaction mechanism 1 includes a vessel body 11, with a sealing cover 12 on top. A servo motor 13 is fixedly connected to the top of the sealing cover 12. A stirring rack 14 is rotatably connected inside the vessel body 11. The shaft of the servo motor 13 passes through the sealing cover 12 and is keyed to the stirring rack 14. An electric discharge valve 15 is fixedly connected to the bottom of the vessel body 11. The monitoring mechanism 2 includes a real-time monitoring unit 21 and a collection and processing unit 22 fixedly connected to the outer wall of the vessel body 11. The real-time monitoring unit includes two collection hoods 2105, which respectively cover… Located at the top and bottom of the vessel body 11, the real-time monitoring unit 21 also includes an arsine gas detector 2110. The detection head of the arsine gas detector 2110 is connected to the collection hood 2105. The collection and processing unit 22 includes a storage tank 2201, a filter box 2202, and a heating box 2204. The vessel body 11 is connected to the filter box 2202, the heating box 2204, and the storage tank 2201 in sequence through pipes. Rubber cylinders 2214 are connected to both sides of the storage tank 2201. The calibration mechanism 3 is fixedly connected to the outer wall of the vessel body 11. The calibration mechanism 3 includes a detection cylinder 302. An air jet pipe 306 is provided inside the detection cylinder 302. The detection cylinder 302 is connected to the arsine gas detector 2110.

[0032] For convenient real-time monitoring, the real-time monitoring unit 21 includes a protective cover 2101, which covers the outside of the sealing cover 12. A connecting pipe 2106 is connected to both collection covers 2105. An air intake pump 2108 is connected to the end of the connecting pipe 2106. A fixed housing 2109 is fixedly connected to the outlet of the air intake pump 2108. An arsine gas detector 2110 is fixedly connected inside the fixed housing 2109. An exhaust pipe 2111 is fixedly connected to the end of the fixed housing 2109. An electric three-way valve 2112 is fixedly connected to the end of the exhaust pipe 2111. The electric three-way valve 2112 is electrically connected to the arsine gas detector 2110 via a wire. The bottom of the sealing cover 12 is fixedly connected to... A fixed plate 2102 is provided, and a positioning plate 2103 is fixedly connected to the upper part of the vessel body 11. The protective cover 2101 is fixedly connected to the fixed plate 2102 and the positioning plate 2103 by fixing bolts 2104 respectively. An air inlet pipe 2113 is fixedly connected to the protective cover 2101 and the collection cover 2105. A sealing ring 2116 is fixedly connected to the first end of the air inlet pipe 2113. A sealing plug 2117 is fixedly connected inside the sealing ring 2116. A return spring 2115 is fixedly connected to the sealing plug 2117. A fixing ring 2114 is fixedly connected to the other end of the return spring 2115. The fixing ring 2114 is fixedly connected to the air inlet pipe 2113. Several vent holes 2118 are opened on the sealing plug 2117.

[0033] To facilitate feeding control, a feed pipe is fixedly connected to the sealing cover 12, and an electric feed valve 2119 is fixedly connected to the feed pipe. Flanges are fixedly connected to the bottom of the sealing cover 12 and the top of the vessel body 11, and the flanges are fixedly connected by several fastening bolts 2120.

[0034] To facilitate the prevention of gas leaks, rubber sealing rings 2121 are fixedly connected inside both collection hoods 2105. One rubber sealing ring 2121 is in contact with the stirring frame 14, and the other rubber sealing ring 2121 is in contact with the electric discharge valve 15.

[0035] To facilitate waste gas treatment, a liquid storage tank 2201 is fixedly connected to the side of the vessel body 11. A filter box 2202 and a heating box 2204 are fixedly connected to the top of the liquid storage tank 2201. The filter box 2202 contains several activated carbon filter plates 2203. A set of conveying pipes 2205 is fixedly connected to the side of the filter box 2202. The other end of the conveying pipes 2205 is connected to the heating box 2204. Several heating wires 2206 are fixedly connected inside the heating box 2204. An air supply pipe 2207 is fixedly connected to the other side of the heating box 2204. The end of the air supply pipe 2207 passes through the liquid storage tank 2201 and is fixedly connected to a discharge pipe 2208. A positioning pipe 2209 is fixedly connected to the other side of the filter box 2202. The other end of pipe 2209 is connected to one passage of electric three-way valve 2112. Fixed pipes 2210 are fixedly connected to both sides of liquid storage tank 2201. Fixed plates 2211 are fixedly connected to both sides of liquid storage tank 2201. Limiting frame 2212 is fixedly connected to the bottom of fixed plate 2211. Pressure sensor 2213 is fixedly connected to the bottom of limiting frame 2212. The bottom of fixed plate 2211 is fixedly connected to rubber cylinder 2214. Support plate 2215 is fixedly connected to the bottom surface of rubber cylinder 2214. Support plate 2215 is slidably connected to the inside of limiting frame 2212. Exhaust valves 2216 are fixedly connected to the upper surface of fixed plate 2211. Pressure sensor 2213 is electrically connected to suction pump 2108 through wires.

[0036] To facilitate observation of the liquid, a transparent plate 2217 is fixedly embedded in the side wall of the liquid storage tank 2201. The transparent plate 2217 is provided with scale lines. A sealing frame 2218 is provided at the top inside the filter box 2202. The top of the activated carbon filter plate 2203 is fixedly connected to the bottom surface of the sealing frame 2218.

[0037] For calibration, the calibration mechanism 3 includes a support frame 301, the top of which is fixedly connected to the bottom of a fixed housing 2109. A detection cylinder 302 is slidably connected inside the support frame 301, with its top extending through the fixed housing 2109. A push plate 303 is fixedly connected to the bottom of the detection cylinder 302. A screw 304 is rotatably connected inside the support frame 301, and the push plate 303 is threadedly connected to the screw 304. A limiting plate 305 is fixedly connected inside the detection cylinder 302, and an air jet pipe 306 passes through the limiting plate 305. The top of the air jet pipe 306... A sealing cap 307 is threaded through the detection cylinder 302. A rubber plate 308 is fixedly connected inside the sealing cap 307. Several dispersing plates 309 are fixedly connected inside the fixed shell 2109. A support plate 310 is fitted on the detection head of the arsine gas detector 2110. An auxiliary spring 311 is fixedly connected to the top of the support plate 310. The top of the auxiliary spring 311 is fixedly connected to the bottom of the fixed shell 2109. A hollow rubber ring 312 is fixedly connected to the bottom of the support plate 310. The hollow rubber ring 312 is fixedly connected to the outside of the detection head of the arsine gas detector 2110.

[0038] To facilitate support of the calibration mechanism 3, an auxiliary rod 313 is fixedly connected between the support frames 301, and the push plate 303 is slidably connected to the support frame 301.

[0039] To prevent the screw 304 from falling off, an anti-detachment ring 314 is rotatably connected inside the top support frame 301, and the top of the screw 304 is rotatably connected to the anti-detachment ring 314.

[0040] In order to extend and retract, each of the auxiliary springs 311 is equipped with a telescopic rod 315. The bottom end of the telescopic rod 315 is fixedly connected to the support plate 310, and the top end is fixedly connected to the fixed shell 2109.

[0041] The specific working process of this invention is as follows:

[0042] When in use, first connect each electrical device to the power supply and controller. At this time, the collection cover 2105 can cover the connection between the electric discharge valve 15 and the vessel body 11, which is most susceptible to corrosion by chemical solution. At the same time, it covers the connection between the stirring rack 14 and the sealing cover 12, which has greater friction. In addition, the protective cover 2101, together with the fixing plate 2102, the positioning plate 2103 and the fixing bolt 2104, can cover the connection between the sealing cover 12 and the vessel body 11, so that the positions most prone to arsine gas leakage can be protected.

[0043] In a typical reactor, there are three main points where leaks are likely to occur: the connection between the electric discharge valve and the reactor body, which is most susceptible to corrosion from chemical solutions; the connection between the stirrer and the sealing cap; and the connection between the sealing cap and the reactor body. In the existing technology, conventional detectors are placed between the protective shell and the reactor, requiring three detectors to detect gas leaks at the three locations. Alternatively, the detectors can be placed outside the reactor without any protective shell, which is costly and has poor accuracy.

[0044] Then, through the suction provided by the suction pump 2108, in conjunction with the connecting pipe 2106 and the connecting pipe 2107, the gas inside the two collection covers 2105 and the protective cover 2101 can be continuously sucked out and sent into the fixed shell 2109 to contact the detection end of the arsine gas detector 2110. The arsine gas detector 2110 can detect the content of arsine gas in the air passing through the fixed shell 2109 in real time. When the content of arsine gas exceeds the internal set value of the arsine gas detector 2110, the arsine gas detector 2110 can issue an alarm to the staff. At this time, even if the connection position of the stirring rack 14 and the sealing cover 12 is not correct, the alarm will still be triggered. Leakage occurs at the connection points of the discharge valve 15 and the vessel body 11, and the connection points of the sealing cover 12 and the vessel body 11. The leaked arsine gas will not directly diffuse into the working environment and be inhaled by the workers. Instead, it will be detected very quickly and promptly by the arsine gas detector 2110. This prevents the leaked arsine gas from being exposed to the air and polluting the working environment. When the arsine gas is detected by the arsine gas detector 2110, there will be no problem that the workers have already inhaled the arsine gas. This effectively increases the safety of the arsine synthesis reaction equipment, improves the timeliness of the leak monitoring and alarm of the arsine synthesis reaction equipment, and reduces the hazards of arsine gas leaks.

[0045] Existing arsine gas detectors have high detection accuracy, with a resolution of up to 0.01 ppm. As long as there is a gas leak, even if the outside air dilutes the leaked gas during the suction pump process, the 2110 arsine gas detector can still quickly detect arsine gas, ensuring the accuracy of the detection results.

[0046] Furthermore, through the air inlet pipe 2113, when the air inside the collection hood 2105 and the protective cover 2101 is continuously drawn away by the air pump 2108 to form a negative pressure environment and generate suction, the sealing plug 2117 can be forced to disengage from the sealing ring 2116, and at the same time, the return spring 2115 is forced to contract, allowing outside air to enter the collection hood 2105 and the protective cover 2101 through the gap between the sealing plug 2117 and the sealing ring 2116, as well as the vent 2118 and the air inlet pipe 2113. This ensures the air pressure balance inside the collection hood 2105 and the protective cover 2101, allowing the air pump 2108 to always deliver gas into the fixed shell 2109 for arsine gas leak detection.

[0047] When handling arsine gas, if the arsine gas detector 2110 does not detect arsine gas, the gas entering the fixed shell 2109 will be directly discharged to the outside through the exhaust pipe 2111 and the electric three-way valve 2112. However, when the arsine gas detector 2110 detects arsine gas and issues an alarm, the arsine gas detector 2110 can send an electrical signal to the electric three-way valve 2112 through a wire to activate it. This allows the gas inside the fixed shell 2109 to enter the filter box 2202 through the exhaust pipe 2111, the electric three-way valve 2112, and the positioning pipe 2209. By utilizing the activated carbon adsorption properties of multiple activated carbon filter plates 2203, the harmful substances in the arsine gas can be initially adsorbed and filtered.

[0048] Then, the arsine gas enters the heating chamber 2204 through the delivery pipe 2205 and is heated by the high temperature provided by the electric heating wire 2206, which converts the harmful substances in the arsine gas into harmless oxides. Then, the gas is discharged into the storage tank 2201 through the gas supply pipe 2207 and the discharge pipe 2208. The sodium hydroxide solution in the storage tank 2201, which has a higher liquid level than the discharge pipe 2208, comes into contact with the arsine gas discharged from the discharge pipe 2208. Through chemical reaction, the harmful substances in the arsine gas are further absorbed and stable salt substances are formed. Finally, the gas enters the rubber cylinder 2214 through the fixed pipe 2210 and the fixed plate 2211 for collection. As the gas is continuously injected into the rubber cylinder 2214, the rubber cylinder 2214 can gradually expand downward under the limit of the limit frame 2212. At this time, after the arsine gas detector 2110 sounds an alarm, it can buy valuable time for the staff to evacuate the site and shut down the equipment and implement other protective measures.

[0049] When the rubber cylinder 2214 expands downward until the support plate 2215 contacts the pressure sensor 2213, the pressure sensor 2213 receives a pressure signal and controls the suction pump 2108 to stop working through the wire, preventing the rubber cylinder 2214 from continuing to expand and exploding. At this time, the protective cover 2101 and the collection cover 2105 are used to prevent further leakage of arsine gas. Finally, the exhaust valve 2216 allows leakage maintenance personnel wearing protective equipment to easily extract the waste gas inside the rubber cylinder 2214 for further harmless treatment. This allows the arsine synthesis reaction equipment to issue an arsine gas leak alarm in a timely manner, while also harmlessly treating and collecting the arsine gas, further preventing the leaked arsine gas from being inhaled by the staff, and facilitating the subsequent centralized treatment of the leaked arsine gas.

[0050] To ensure the proper functioning of the arsine gas detector 2110, calibration and testing are required at least every three months. When testing the arsine gas detection accuracy of the arsine gas detector 2110, simply manually rotate the screw 304 in conjunction with the anti-detachment ring 314. This causes the push plate 303 and the detection cylinder 302 to move upwards with the assistance of the auxiliary rod 313. At this time, the detection cylinder 302 will cover the detection end of the arsine gas detector 2110, and as the detection cylinder 302 continues to move upwards, it will engage with the hollow rubber ring 312. The hollow rubber ring 312 is deformed by the contact with the support plate 310, and the auxiliary spring 311 is compressed and accumulates elastic force with the assistance of the telescopic rod 315. The deformation of the hollow rubber ring 312 seals the gap between the detection end of the arsine gas detector 2110 and the detection cylinder 302. At this time, the operator inserts the needle of the syringe containing a certain amount of arsine gas through the two rubber plates 308, and then pushes the syringe to spray the arsine gas directly from the jet pipe 306 to the detection end of the arsine gas detector 2110. At this time, it can be tested whether the arsine gas detector 2110 can work normally.

[0051] Simultaneously, the detection accuracy of the arsine gas detector 2110 is determined, preventing a decrease in accuracy due to prolonged use. This facilitates timely detection of any abnormal operating conditions of the arsine gas detector 2110, ensuring the accuracy and reliability of its arsine gas detection. After the arsine gas detector 2110 completes its detection, simply manually reverse the screw 304 to reset the detection cylinder 302. During the reset process, the gas extraction device continuously draws air out through the jet pipe 306 and the sealing cap 307, completely removing the arsine gas used for detection. Finally, the used sealing cap 307 is unscrewed and a new sealing cap 307 is installed. Finally, the dispersing plate 309 disperses the gas inside the fixed housing 2109 sent by the suction pump 2108, reducing the gas flow rate and further ensuring the arsine gas detection accuracy of the arsine gas detector 2110.

Claims

1. An arsine synthesis reaction apparatus with real-time leak monitoring function, characterized in that: Synthesis reaction mechanism (1), monitoring mechanism (2) and calibration mechanism (3) are included. The synthesis reaction mechanism (1) comprises a kettle body (11), a sealing cover (12) is arranged on the top of the kettle body (11), a servo motor (13) is fixedly connected to the top of the sealing cover (12), a stirring frame (14) is rotatably connected in the kettle body (11), the rotating shaft of the servo motor (13) penetrates through the sealing cover (12) and is keyed connected with the stirring frame (14), an electric discharge valve (15) is fixedly communicated with the bottom of the kettle body (11); The monitoring mechanism (2) comprises a real-time monitoring unit (21) and a collection processing unit (22) which are fixedly connected to the outer wall of the kettle body (11), the real-time monitoring unit comprises two collection covers (2105), the collection covers (2105) are respectively arranged on the top and the bottom of the kettle body (11), the real-time monitoring unit (21) further comprises a hydrogen arsenide gas detector (2110), the detection head of the hydrogen arsenide gas detector (2110) is communicated with the collection cover (2105), the collection processing unit (22) comprises a liquid storage tank (2201), a filter tank (2202) and a heating tank (2204), the kettle body (11) is communicated with the filter tank (2202), the heating tank (2204) and the liquid storage tank (2201) through pipes in sequence, rubber cylinders (2214) are communicated on the two sides of the liquid storage tank (2201); The calibration mechanism (3) is fixedly connected to the outer wall of the kettle body (11), the calibration mechanism (3) comprises a detection cylinder (302), a gas injection pipe (306) is arranged in the detection cylinder (302), the detection cylinder (302) is communicated with the hydrogen arsenide gas detector (2110).

2. The arsine synthesis reaction apparatus with a real-time leak monitoring function according to claim 1, characterized by: The real-time monitoring unit (21) includes a protective cover (2101) which is covered outside the sealing cover (12), two collecting covers (2105) are in common communication with a connecting pipe (2106), the end of the connecting pipe (2106) is connected with a suction pump (2108), the gas outlet of the suction pump (2108) is fixedly connected with a fixed shell (2109), the fixed shell (2109) is fixedly connected with an exhaust pipe (2111), the end of the exhaust pipe (2111) is fixedly connected with an electric three-way valve (2112), the electric three-way valve (2112) is electrically connected with the arsine gas detector (2110) through wires, the bottom of the sealing cover (12) is fixedly connected with a fixed disc (2102), the upper part of the kettle body (11) is fixedly connected with a positioning disc (2103), the protective cover (2101) is threadedly fixedly connected with the fixed disc (2102) and the positioning disc (2103) by fixed bolts (2104), the protective cover (2101) and the collecting cover (2105) are fixedly connected with an air inlet pipe (2113), the air inlet pipe (2113) is fixedly connected with a blocking ring (2116) at the first end, the blocking ring (2116) is fixedly connected with a blocking plug (2117) in the inside, the blocking plug (2117) is fixedly connected with a return spring (2115), the other end of the return spring (2115) is fixedly connected with a fixed ring (2114), the fixed ring (2114) is fixedly communicated with the air inlet pipe (2113), a plurality of air holes (2118) are formed in the blocking plug (2117).

3. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 2, characterized in that: The sealing cover (12) is fixedly connected with a feeding pipe, the feeding pipe is fixedly connected with an electric feeding valve (2119), the bottom of the sealing cover (12) and the top of the kettle body (11) are fixedly connected with flanges, and the flanges are fixedly connected by a plurality of fastening bolts (2120).

4. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 3, characterized in that: The rubber sealing rings (2121) are fixedly connected in the two collecting covers (2105), one of the rubber sealing rings (2121) is in contact with the stirring frame (14), and the other rubber sealing ring (2121) is in contact with the electric discharging valve (15).

5. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 4, characterized in that: The liquid storage tank (2201) is fixedly connected to the side of the kettle body (11), the filter tank (2202) and the heating tank (2204) are fixedly connected to the top of the liquid storage tank (2201), a plurality of activated carbon filter plates (2203) are arranged in the filter tank (2202), a group of conveying pipes (2205) are fixedly connected in communication with the side of the filter tank (2202), the other end of the conveying pipe (2205) is in communication with the heating tank (2204), a plurality of electric heating wires (2206) are fixedly connected in the heating tank (2204), a gas feeding pipe (2207) is fixedly connected to the other side of the heating tank (2204), the tail end of the gas feeding pipe (2207) penetrates into the liquid storage tank (2201) and is fixedly connected with a discharge pipe (2208), a positioning pipe (2209) is fixedly connected in communication with the other end of the filter tank (2202), the other end of the positioning pipe (2209) is in communication with one passage of the electric three-way valve (2112), fixed pipes (2210) are fixedly connected to the two sides of the liquid storage tank (2201), fixed plates (2211) are fixedly connected to the two sides of the liquid storage tank (2201), limit racks (2212) are fixedly connected to the bottom of the fixed plates (2211), pressure sensors (2213) are fixedly connected to the bottom of the limit racks (2212), the bottom of the fixed plates (2211) is fixedly connected with the rubber cylinder (2214), the bottom surface of the rubber cylinder (2214) is fixedly connected with a support disc (2215), the support disc (2215) is slidingly connected in the limit rack (2212), the upper surfaces of the fixed plates (2211) are fixedly connected with exhaust valves (2216), and the pressure sensor (2213) is electrically connected with the air suction pump (2108) through wires.

6. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 5, characterized in that: The side wall of the liquid storage tank (2201) is fixedly embedded with a transparent plate (2217), the transparent plate (2217) is provided with scale lines, a sealing frame (2218) is arranged at the top of the filter tank (2202), and the top of the activated carbon filter plate (2203) is fixedly connected with the bottom surface of the sealing frame (2218).

7. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 6, characterized in that: The calibration mechanism (3) comprises a support frame (301), the top of the support frame (301) is fixedly connected with the bottom of the fixed shell (2109), a detection cylinder (302) is slidably connected inside the support frame (301), the top of the detection cylinder (302) is slidably penetrated into the inside of the fixed shell (2109), the bottom of the detection cylinder (302) is fixedly connected with a push plate (303), a screw rod (304) is rotatably connected inside the support frame (301), the push plate (303) is threadedly connected with the screw rod (304), a limiting disc (305) is fixedly connected inside the detection cylinder (302), a jet pipe (306) penetrates the limiting disc (305), the top end of the jet pipe (306) penetrates the detection cylinder (302) and is threadedly connected with a blocking cover (307), the blocking cover (307) is fixedly connected with a rubber plate (308) inside, a plurality of dispersing plates (309) are fixedly connected inside the fixed shell (2109), a support plate (310) is sleeved on the detection head of the arsine gas detector (2110), an auxiliary spring (311) is fixedly connected at the top of the support plate (310), the top of the auxiliary spring (311) is fixedly connected with the bottom of the fixed shell (2109), a hollow rubber ring (312) is fixedly connected at the bottom of the support plate (310), and the hollow rubber ring (312) is fixedly connected outside the detection head of the arsine gas detector (2110).

8. The arsine synthesis reaction apparatus with real-time leak monitoring function according to claim 7, characterized in that: The support frame (301) is fixedly connected with an auxiliary rod (313), and the push plate (303) is slidably connected with the support frame (301).

9. The arsine synthesis reaction apparatus with real-time leak monitoring capability of claim 8, wherein: A anti-coming-off ring (314) is rotatably connected inside the support frame (301) at the top, and the top of the screw rod (304) is rotatably connected with the anti-coming-off ring (314).

10. The arsine synthesis reaction apparatus with a real-time leak monitoring function according to claim 9, characterized by: The auxiliary spring (311) is provided with an extension rod (315) inside, the bottom end of the extension rod (315) is fixedly connected with the support plate (310), and the top end is fixedly connected with the fixed shell (2109).

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