Piezoelectric inkjet head and its flow channel components and flow channel structure

Abstract

This invention provides a piezoelectric inkjet head and its flow channel components and structure. The flow channel components include a nozzle layer, a flow channel layer, and a connecting layer stacked sequentially. The connecting layer includes a connecting structure, on which ink cavity inlets, ink inlets, and ink outlets are sequentially arranged along a first preset direction. The ink cavity inlet, the ink cavity unit of the flow channel layer, the ink inlet, the ink outlet, the flow channel unit of the flow channel layer, and the nozzle unit of the nozzle layer form a connecting channel. The ink inlet, ink outlet, and flow channel unit are all oblong. This invention reduces the impact of the connecting flow channel components on the performance of key flow channel components, effectively reduces turbulence to improve fluid stability, ensures printing quality, and effectively reduces chip cracking caused by external forces and stress, thereby improving product reliability.

Description

Technical Field

[0001] This invention relates to the field of microfluidics, and in particular to a piezoelectric inkjet head and its flow channel components and flow channel structure. Background Technology

[0002] In piezoelectric inkjet printing, inkjet heads fabricated using Micro-Electro-Mechanical Systems (MEMS) technology offer advantages such as high nozzle density, fine droplet size, and low cost. To further reduce costs, MEMS piezoelectric printheads are typically composed of chip components of varying sizes packaged on a surface. The flow channel components serve to seal the flow path and connect the fluid system.

[0003] However, existing flow channel components cannot effectively cope with the unsteady pressure changes caused by piezoelectric drive, and are prone to generating turbulence at the corners, affecting the stability of the fluid, thereby degrading the printing effect and even causing inkjet failure. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the defect that the flow channel components in the prior art are prone to generating turbulence and affecting the stability of the fluid, and to provide a piezoelectric inkjet head and its flow channel components and flow channel structure.

[0005] The present invention solves the above-mentioned technical problems through the following technical solution:

[0006] In a first aspect, the present invention provides a flow channel component for an inkjet head, the flow channel component comprising a nozzle layer, a flow channel layer and a connecting layer stacked sequentially;

[0007] The connecting layer includes a connecting structure, which includes an ink cavity inlet, an ink inlet hole, and an ink outlet hole arranged sequentially along a first preset direction.

[0008] The ink cavity inlet, the ink cavity unit of the flow channel layer, the ink inlet hole, the ink outlet hole, the flow channel unit of the flow channel layer, and the nozzle unit of the nozzle layer form a connecting channel;

[0009] The ink inlet, ink outlet, and flow channel unit are all oblong.

[0010] Optionally, the connecting structure is provided with a plurality of ink inlet holes and a plurality of ink outlet holes arranged along a second preset direction, wherein the ink inlet holes and the ink outlet holes correspond one-to-one, and the second preset direction is perpendicular to the first preset direction;

[0011] The nozzle layer is provided with a plurality of nozzle units arranged along the second preset direction;

[0012] The flow channel layer is provided with a plurality of flow channel units arranged along the second preset direction;

[0013] All of the aforementioned ink inlet holes are connected to the ink cavity unit;

[0014] The ink outlet, the flow channel unit, and the nozzle unit are aligned and connected at their centers in the third preset direction, and the third preset direction is perpendicular to the first preset direction and the second preset direction.

[0015] Optionally, the length of the oblong shape is greater than or equal to twice the width of the oblong shape.

[0016] In a second aspect, the present invention provides a flow channel structure for an inkjet head, the flow channel structure including a first flow channel component and a second flow channel component arranged in a preset manner;

[0017] Both the first flow channel component and the second flow channel component are flow channel components of the inkjet head described in the first aspect of the present invention.

[0018] Optionally, the first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively corresponding to and connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component.

[0019] Wherein, the first ink outlet hole of the first connecting layer is adjacent to the second ink outlet hole of the second connecting layer; the first flow channel component is independently supplied with ink by the first ink cavity unit of the first flow channel layer, and the second flow channel component is independently supplied with ink by the second ink cavity unit of the second flow channel layer.

[0020] Optionally, the first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively corresponding to and connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component.

[0021] The first ink cavity unit of the first flow channel layer is connected to the second ink cavity unit of the second flow channel layer;

[0022] or,

[0023] The first flow channel component and the second flow channel layer share the same ink cavity unit.

[0024] Optionally, the first center position of the first ink outlet hole of the first connecting layer is aligned with the second center position of the second ink outlet hole of the second connecting layer.

[0025] or,

[0026] The first center position of the first ink outlet hole in the first connected layer is offset from the second center position of the second ink outlet hole in the second connected layer.

[0027] A third aspect of the present invention provides a microelectromechanical system (MEMS) device, the MEMS device comprising the flow channel component of the inkjet head as described in the first aspect of the present invention, or the flow channel structure of the inkjet head as described in the second aspect of the present invention.

[0028] In a fourth aspect, the present invention provides an inkjet unit comprising the microelectromechanical system device described in the third aspect of the present invention.

[0029] In a fifth aspect, the present invention provides a piezoelectric inkjet head, the piezoelectric inkjet head comprising the inkjet unit described in the fourth aspect of the present invention.

[0030] Based on common knowledge in the field, the above optional conditions can be combined arbitrarily to obtain various optional examples of the present invention.

[0031] The positive and progressive effects of this invention are as follows: By using an elongated oval flow channel component, it achieves lower flow resistance compared to a rectangular structure while maintaining the same length and width. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively reduces turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval structure effectively reduce chip cracking caused by stress and other factors, improving product reliability. Attached Figure Description

[0032] Figure 1 This is a first structural schematic diagram of the flow channel component of the inkjet head of the present invention;

[0033] Figure 2 This is a top view of the first structural schematic diagram of the flow channel component of the inkjet head of the present invention;

[0034] Figure 3 This is a schematic diagram of the second structure of the flow channel component of the inkjet head of the present invention;

[0035] Figure 4 For flow channel components of different shapes;

[0036] Figure 5 This is a comparison chart of the nominal flow resistance of flow channel components with different shapes under laminar flow conditions;

[0037] Figure 6 Comparison of turbulence for flow channel components of different shapes;

[0038] Figure 7 This is a first three-dimensional schematic diagram of the elongated oval flow channel of the present invention;

[0039] Figure 8 This is a second three-dimensional schematic diagram of the elongated oval flow channel of the present invention;

[0040] Figure 9This is a schematic diagram of the third structure of the flow channel component of the inkjet head of the present invention;

[0041] Figure 10 This is a schematic diagram of the fourth structure of the flow channel component of the inkjet head of the present invention;

[0042] Figure 11 This is a fifth structural schematic diagram of the flow channel component of the inkjet head of the present invention;

[0043] Figure 12 A top view of the flow channel component of the inkjet head of the present invention having multiple nozzle units;

[0044] Figure 13 This is a first structural schematic diagram of the flow channel structure of the inkjet head of the present invention;

[0045] Figure 14 This is a first top view of the flow channel structure of the inkjet head of the present invention, in the state of having multiple nozzle units.

[0046] Figure 15 The first structural schematic diagram of the flow channel structure of the inkjet head of the present invention is shown in the second top view in the state of having multiple nozzle units.

[0047] Figure 16 This is a second structural schematic diagram of the flow channel structure of the inkjet head of the present invention;

[0048] Figure 17 This is a second structural schematic diagram of the flow channel structure of the inkjet head of the present invention, and a first top view of the state in which multiple nozzle units are provided.

[0049] Figure 18 This is a second top view of the flow channel structure of the inkjet head of the present invention, in the state of having multiple nozzle units. Detailed Implementation

[0050] The present invention will be further illustrated by way of embodiments below, but the present invention is not limited to the scope of the embodiments described herein.

[0051] In this embodiment of the invention, prefixes such as "first" and "second" are used merely to distinguish different descriptive objects and do not limit the position, order, priority, quantity, or content of the described objects. The use of ordinal numbers and other prefixes to distinguish descriptive objects in this embodiment of the invention does not constitute a limitation on the described objects; the description of the described objects is given in the context of the embodiments, and the use of such prefixes should not constitute unnecessary restrictions. Furthermore, in the description of this embodiment, unless otherwise stated, "multiple" means two or more.

[0052] Example 1

[0053] In one specific embodiment, a flow channel component for an inkjet head is provided, such as... Figure 1-2 As shown, the flow channel component includes a nozzle layer, a flow channel layer, and a connecting layer stacked sequentially.

[0054] The connecting layer includes a connecting structure, which includes an ink cavity inlet 1, an ink inlet hole 2, and an ink outlet hole 3 arranged sequentially along a first preset direction.

[0055] The ink cavity inlet 1, the ink cavity unit of the flow channel layer, the ink inlet hole 2, the ink outlet hole 3, the flow channel unit 4 of the flow channel layer, and the nozzle unit 5 of the nozzle layer form a connecting channel;

[0056] Among them, ink inlet hole 2, ink outlet hole 3 and flow channel unit 4 are all oblong.

[0057] Specifically, the inkjet head's flow channel components, from bottom to top, consist of an orifice layer, a flow layer, and a connecting layer. The connecting layer, horizontally from left to right, has an ink cavity inlet 1, an ink inlet 2, and an ink outlet 3. In the flow channel layer, corresponding areas to the ink cavity inlet 1 and the ink inlet 2 are provided with ink cavity units. In the flow channel layer, corresponding areas to the ink outlet 3 are provided with flow channel units 4, which correspond to the orifice units 5 in the orifice layer, thus forming a connecting channel between the ink cavity inlet 1, ink cavity units, ink inlet 2, ink outlet 3, flow channel units 4, and orifice units 5. The size of the ink outlet 3 is greater than the size of the flow channel unit 4, which is greater than the size of the orifice unit 5. The ink inlet 2 and the ink outlet 3 can be connected by a preset structure, such as a narrow flow channel 6 in the actuator structure and a vibrating cavity (e.g.,...). Figure 3 (As shown).

[0058] When the inkjet head is working, ink can enter the ink chamber unit from the ink chamber inlet 1. When the vibration cavity in the actuator structure is under negative pressure, more ink in the ink chamber unit flows into the vibration cavity from the ink inlet hole 2. When the vibration cavity in the actuator structure is under positive pressure, more ink in the vibration cavity flows out from the ink outlet hole 3 and flows through the flow channel unit 4 to the nozzle unit 5 for inkjet printing, thereby realizing inkjet printing.

[0059] In inkjet devices, the width W of the inlet and outlet is typically limited by the nozzle density. The higher the nozzle density, the smaller the width W of the inlet and outlet. Therefore, the adjustment of the flow channel mainly focuses on the length L of the inlet and outlet. For example... Figure 4-5 As shown, for flow channel components of different shapes, under laminar flow conditions, when W / L is less than 1 / 2, the nominal flow resistance R of the elliptical orifice is... 椭圆形 >Nominal flow resistance R of rectangular orifice 矩形 >Nominal flow resistance R of the oblong orifice 长圆形 ; and, as Figure 6As shown, turbulence is more likely to occur at the corners of a rectangular flow channel than at the rounded corners of an oblong channel, which leads to a further increase in flow resistance, and the generation of turbulence will seriously affect the stability of inkjet printing.

[0060] Therefore, in this specific embodiment, the ink inlet 2, the ink outlet 3, and the flow channel unit 4 are all set as elongated ovals with a length greater than or equal to twice the width (L≥2W), such as... Figure 7-8 As shown, the oblong shape has a certain thickness, which results in lower flow resistance compared to a rectangular structure while maintaining the same length and width. Furthermore, the rounded corners of the oblong shape effectively reduce turbulence, thus ensuring inkjet stability. The oblong shape can be a circle inscribed in a rectangle, where the width of the rectangle is equal to the diameter of the circle.

[0061] The material used to fabricate the flow channel component can be any one of silicon, injection-molded plastic, or stainless steel / aluminum alloy. When silicon is used, it can be processed by dry etching to obtain a flow channel component including an oblong ink inlet 2, an ink outlet 3, and a flow channel unit 4. When metal is used, the flow channel component can be fabricated by etching or machining methods (e.g., stamping). When plastic is used, the flow channel component can be fabricated by injection molding.

[0062] Preferably, high-precision, high-density flow channel components can be prepared by dry etching using silicon material wafers. An oxide passivation film can be formed on the surface of the silicon material, and the thickness t of the oxide passivation film satisfies 0nm (nanometer) < t ≤ 1000nm, so as to achieve multiple effects such as electrical insulation isolation, physical and chemical protection, mechanical property control and process adaptation support, ensuring the accuracy of inkjet head driving, structural stability and processing feasibility.

[0063] It should be noted that the nozzle layer, flow channel layer, and connecting layer of the flow channel component can be fabricated using different chips, such as... Figure 3 As shown, flow channel components are obtained by stacking each chip layer sequentially; alternatively, the flow channel layer and the connecting layer can be fabricated together on one chip, while the nozzle layer can be fabricated on another chip, as shown. Figure 9 As shown, two chips are stacked to obtain a flow channel component; or a nozzle unit 5 with only a nozzle layer fabricated in one chip is stacked with a chip that has both a flow channel layer and a connecting layer fabricated, as shown. Figure 10 As shown, the ink cavity is sealed using a metal frame 8 and a resin film 7 to obtain the flow channel component; alternatively, the connecting layer can be fabricated on one chip, and the nozzle layer and flow channel layer can be combined and fabricated on another chip, as shown. Figure 11 As shown, two chips are stacked to obtain the flow channel component.

[0064] This specific embodiment, by using an elongated oval flow channel component, offers lower flow resistance compared to a rectangular structure while maintaining consistent length and width. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively reduces turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval structure effectively reduce chip cracking caused by stress and other factors, improving product reliability.

[0065] In one specific implementation, such as Figure 12 As shown, the connecting structure is provided with a plurality of ink inlet holes 2 and a plurality of ink outlet holes 3 arranged along the second preset direction, with each ink inlet hole 2 corresponding to one ink outlet hole 3, and the second preset direction being perpendicular to the first preset direction.

[0066] The nozzle layer is provided with multiple nozzle units 5 arranged along the second preset direction;

[0067] Multiple flow channel units 4 are provided on the flow channel layer along the second preset direction;

[0068] Multiple ink inlet holes 2 are all connected to the ink cavity unit;

[0069] The ink outlet 3, flow channel unit 4, and nozzle unit 5 in the third preset direction are aligned and connected at their centers, and the third preset direction is perpendicular to the first preset direction and the second preset direction.

[0070] Specifically, the nozzle density of the inkjet head can be determined based on the microfabrication technology of the inkjet head chip, thereby obtaining the number of nozzle units 5. By setting elongated oval ink inlet holes 2, ink outlet holes 3, and flow channel units 4 that match the number of nozzle units 5, the ink inlet holes 2, ink outlet holes 3, flow channel units 4, and nozzle units 5 are arranged and used to form a communication channel between each nozzle unit 5 and the ink cavity unit. For example, when the resolution of the nozzles is 300 dpi / column (dots per inch / column), the center distance of the nozzle units 5 is 84.7 μm (micrometers). Then, the spacing d between adjacent ink inlet holes 2, ink outlet holes 3, flow channel units 4, or nozzle units 5 can be set to 0 μm < d ≤ 84.7 μm.

[0071] like Figure 12 As shown, on the connecting layer, multiple ink inlets 2 and multiple ink outlets 3 are arranged along a second preset direction perpendicular to the horizontal direction. Similarly, multiple nozzle units 5 are arranged along the second preset direction on the nozzle layer, and multiple flow channel units 4 are arranged along the second preset direction on the flow channel layer. Each ink inlet 2 corresponds to one ink outlet 3, one flow channel unit 4, and one nozzle unit 5, thereby forming a connecting channel between each nozzle unit 5 and the ink cavity unit. Preferably, the centers of the ink inlets 2 and ink outlets 3 in the same row in the second preset direction are aligned; the centers of the ink outlets 3, flow channel units 4, and nozzle units 5 in the same column in the third preset direction are aligned, forming a vertical connecting channel.

[0072] This embodiment utilizes an elongated oval flow channel component, which, compared to a rectangular structure with consistent length and width, exhibits lower flow resistance. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively mitigates turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval shape effectively reduce chip cracking caused by stress and other factors, enhancing product reliability.

[0073] Example 2

[0074] In one specific embodiment, a flow channel structure for an inkjet head is provided, the flow channel structure including a first flow channel component and a second flow channel component arranged in a preset manner;

[0075] The first flow channel component and the second flow channel component are both flow channel components of the inkjet head described in Example 1.

[0076] Specifically, since the minimum spacing between the nozzle units 5 is limited by the physical thickness of the actuator and cannot be reduced indefinitely, a multi-row nozzle unit arrangement can be adopted to effectively increase the nozzle density. For example, two flow channel components can be arranged in a preset layout to form a flow channel structure with a multi-row nozzle unit arrangement 5.

[0077] In one specific implementation, such as Figure 13 As shown, the first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component.

[0078] The first ink outlet 13 of the first connecting layer is adjacent to the second ink outlet 23 of the second connecting layer; the first flow channel component is independently supplied with ink by the first ink cavity unit of the first flow channel layer, and the second flow channel component is independently supplied with ink by the second ink cavity unit of the second flow channel layer.

[0079] Specifically, when connecting the first flow channel component and the second flow channel component, the first ink outlet 13 of the first flow channel component and the second ink outlet 23 of the second flow channel component can be arranged adjacently, forming the first ink cavity inlet 11, the first ink inlet 12, the first ink outlet 13, the second ink outlet 23, the second ink inlet 22, and the second ink cavity inlet 21 of the second flow channel component arranged sequentially. The flow channel formed by the first ink outlet 13, the first flow channel unit 14, and the first nozzle unit 15 of the first flow channel component, and the second flow channel component... The parallel flow channel structure formed by the second ink outlet 23, the second flow channel unit 24, and the second nozzle unit 25 of the flow channel component allows the first ink cavity unit of the first flow channel component and the second ink cavity unit of the second flow channel component to be positioned far apart. The first flow channel component and the second flow channel component are respectively supplied with ink by independent ink cavity units, thereby forming a dual-channel flow channel structure. Two different colors of ink or the same color of ink can be placed in the first ink cavity unit and the second ink cavity unit for printing, so as to meet different printing needs and improve the versatility of the flow channel structure.

[0080] In one specific implementation, such as Figure 14 As shown, the first center position of the first ink outlet hole 13 of the first connected layer is aligned with the second center position of the second ink outlet hole 23 of the second connected layer.

[0081] Specifically, by aligning the center positions of the first ink outlet 13 and the second ink outlet 23, the first nozzle unit 15 connected to the first ink outlet 13 and the second nozzle unit 25 connected to the second ink outlet 23 are also aligned at their center positions. This allows the first nozzle unit 15 and the second nozzle unit 25 in the same row to spray ink onto the same target point, thereby achieving precise control of the ink droplet volume at the same target point and effectively improving printing quality and stability.

[0082] In another specific implementation, such as Figure 15 As shown, the first center position of the first ink outlet hole 13 of the first connected layer is offset from the second center position of the second ink outlet hole 23 of the second connected layer.

[0083] Specifically, by staggering the arrangement of the first ink outlet 13 and the second ink outlet 23, the first nozzle unit 15 connected to the first ink outlet 13 and the second nozzle unit 25 connected to the second ink outlet 23 will also be staggered, so that the staggered first nozzle unit 15 and the second nozzle unit 25 spray ink onto different target points, thereby achieving fast printing and meeting the needs of high-precision printing.

[0084] In one specific implementation, such as Figure 16As shown, the first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component.

[0085] The first ink cavity unit of the first flow channel layer is connected to the second ink cavity unit of the second flow channel layer, or the first flow channel component and the second flow channel layer may share the same ink cavity unit.

[0086] Specifically, the first ink cavity unit can be connected to the second ink cavity unit, or only one ink cavity unit can be set up, with the first flow channel component and the second flow channel component sharing the ink cavity unit, which simplifies the structure and reduces costs while ensuring consistent ink supply.

[0087] Among them, such as Figure 17 As shown, the first center position of the first ink outlet hole 13 of the first connected layer is aligned with the second center position of the second ink outlet hole 23 of the second connected layer, or, as... Figure 18 As shown, the first center position of the first ink outlet hole 13 of the first connected layer is offset from the second center position of the second ink outlet hole 23 of the second connected layer.

[0088] This embodiment utilizes an elongated oval flow channel component, achieving lower flow resistance while maintaining consistent length and width. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively mitigates turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval shape effectively reduce chip cracking caused by stress and other factors, enhancing product reliability.

[0089] Example 3

[0090] In one specific embodiment, a microelectromechanical system (MEMS) device is provided, the MEMS device including the flow channel component in embodiment 1, or the flow channel structure in embodiment 2.

[0091] Specifically, MEMS devices achieve miniaturization and integration of flow channels through microfabrication processes. The flow channel components or flow channel structures set in them serve as physical channels for fluid transmission in the MEMS system, ensuring that the MEMS devices can achieve complex functions such as sensing, driving, and controlling fluids.

[0092] This embodiment utilizes an elongated oval flow channel component, which, compared to a rectangular structure with consistent length and width, exhibits lower flow resistance. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively mitigates turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval shape effectively reduce chip cracking caused by stress and other factors, enhancing product reliability.

[0093] Example 4

[0094] In one specific embodiment, an inkjet unit is provided, which includes the microelectromechanical system device of embodiment 3.

[0095] Specifically, by embedding MEMS devices into the inkjet unit, the inkjet unit can achieve intelligent control requirements such as precise fluid driving and rapid control through micron-level functional structures.

[0096] This embodiment utilizes an elongated oval flow channel component, which, compared to a rectangular structure with consistent length and width, exhibits lower flow resistance. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively mitigates turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval shape effectively reduce chip cracking caused by stress and other factors, enhancing product reliability.

[0097] Example 5

[0098] In one specific embodiment, a piezoelectric inkjet head is provided, which includes the inkjet unit in embodiment 4.

[0099] Specifically, the piezoelectric inkjet head integrates an inkjet unit, which can eject ink droplets at high speed from multiple selected nozzles. The voltage can be adjusted to control the size of the ink droplets, ensuring high-quality printing by the piezoelectric inkjet head.

[0100] This embodiment utilizes an elongated oval flow channel component, which, compared to a rectangular structure with consistent length and width, exhibits lower flow resistance. This not only reduces the impact of connecting flow channel components on the performance of critical flow channel components but also effectively mitigates turbulence to improve fluid stability and ensure printing quality. Furthermore, the rounded corners of the elongated oval shape effectively reduce chip cracking caused by stress and other factors, enhancing product reliability.

[0101] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A flow channel component for an inkjet head, characterized in that, The flow channel component includes a nozzle layer, a flow channel layer, and a connecting layer stacked sequentially. The connecting layer includes a connecting structure, which includes an ink cavity inlet, an ink inlet hole, and an ink outlet hole arranged sequentially along a first preset direction. The ink cavity inlet, the ink cavity unit of the flow channel layer, the ink inlet hole, the ink outlet hole, the flow channel unit of the flow channel layer, and the nozzle unit of the nozzle layer form a connecting channel; Both the ink cavity inlet and the ink inlet hole are connected to the ink cavity unit. The ink outlet, the flow channel unit, and the nozzle unit are aligned and connected at their centers in the third preset direction, and the third preset direction is perpendicular to the first preset direction. The ink inlet, ink outlet, and flow channel unit are all oblong, and the length of the oblong is greater than or equal to twice the width of the oblong.

2. The flow channel component according to claim 1, characterized in that, The connecting structure is provided with a plurality of ink inlet holes and a plurality of ink outlet holes arranged along a second preset direction, wherein the ink inlet holes and the ink outlet holes correspond one-to-one, and the second preset direction is perpendicular to the first preset direction; The nozzle layer is provided with a plurality of nozzle units arranged along the second preset direction; The flow channel layer is provided with a plurality of flow channel units arranged along the second preset direction; All of the aforementioned ink inlet holes are connected to the ink cavity unit; The third preset direction is perpendicular to the second preset direction.

3. A flow channel structure for an inkjet head, characterized in that, The flow channel structure includes a first flow channel component and a second flow channel component arranged in a preset manner; Both the first flow channel component and the second flow channel component are flow channel components of the inkjet head as described in claim 1 or 2.

4. The flow channel structure according to claim 3, characterized in that, The first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively corresponding to and connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component. Wherein, the first ink outlet hole of the first connecting layer is adjacent to the second ink outlet hole of the second connecting layer; the first flow channel component is independently supplied with ink by the first ink cavity unit of the first flow channel layer, and the second flow channel component is independently supplied with ink by the second ink cavity unit of the second flow channel layer.

5. The flow channel structure according to claim 3, characterized in that, The first nozzle layer, the first flow channel layer, and the first connecting layer of the first flow channel component are respectively corresponding to and connected to the second nozzle layer, the second flow channel layer, and the second connecting layer of the second flow channel component. The first ink cavity unit of the first flow channel layer is connected to the second ink cavity unit of the second flow channel layer; or, The first flow channel component and the second flow channel layer share the same ink cavity unit.

6. The flow channel structure according to claim 4 or 5, characterized in that, The first center position of the first ink outlet hole of the first connecting layer is aligned with the second center position of the second ink outlet hole of the second connecting layer. or, The first center position of the first ink outlet hole in the first connected layer is offset from the second center position of the second ink outlet hole in the second connected layer.

7. A microelectromechanical system (MEMS) device, characterized in that, The microelectromechanical system device includes the flow channel component of the inkjet head as described in claim 1 or 2, or the flow channel structure of the inkjet head as described in any one of claims 3 to 6.

8. An inkjet unit, characterized in that, The inkjet unit includes the microelectromechanical system device as described in claim 7.

9. A piezoelectric inkjet head, characterized in that, The piezoelectric inkjet head includes the inkjet unit as described in claim 8.

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