Light beam adjusting device, laser processing head, laser processing device and laser processing system

Abstract

The invention relates to the technical field of laser processing, and provides a light beam adjusting device, a laser processing head, a device and a system thereof. The light beam adjusting device comprises a lens module and a lens group rotation adjusting structure, and the lens module comprises a first prism, a reflector and a second prism and is used for forming an emergent light beam parallel to a primary optical axis of an incident light beam; the lens group rotation adjusting mechanism comprises a second adjusting assembly and a first adjusting assembly used for driving the lens module to rotate around a first rotating shaft, the first rotating shaft is parallel to or coincides with the primary optical axis of the incident light beam, and the second adjusting assembly comprises a driving part to drive the second prism to rotate around the first rotating shaft. Therefore, the distance between the laser spot and the first rotating shaft is adjustable, when the two prisms and the reflecting mirror rotate around the first rotating shaft, revolution can be formed, and the revolution radius is controllable.

Description

[Technical Field]

[0001] This application relates to the field of laser processing technology, and in particular to a beam adjustment device, a laser processing head, a laser processing apparatus, and a laser processing system. [Background Technology]

[0002] In practical processing scenarios such as laser cutting and welding, to ensure that the laser spot moves along the processing path to process the workpiece, a CNC control system is typically used to control the entire processing head to move along a preset processing path. To improve processing quality and flexibility, the industry has developed laser spots that can form various directional shapes such as rectangles, arcs, and triangles, and these shapes can be achieved by combining multiple point spots or controlling the emission timing of an array of optical fibers. However, this type of technology can only control the shape of a specific laser spot and cannot achieve the "revolution" of the spot center around another geometric center.

[0003] On the other hand, some existing technologies do indeed possess the ability to achieve beam rotation, such as optical designs based on rotating prisms or oscillating mirrors, which generate a fixed eccentricity in the beam, thereby forming a beam that moves in a circle on the processing plane. However, these solutions have a significant limitation: the beam's radius of rotation is fixed and cannot be adjusted during the rotation process. The radius of rotation is determined during the optical design phase, fixed by the inherent characteristics of the optical components. When processing requirements change, it is necessary to stop the machine to replace the optical module or make adjustments through external mechanical mechanisms, resulting in low processing efficiency and increased system complexity.

[0004] Therefore, there is a need to provide an optical path scheme that can realize the orbit of the light spot and flexibly adjust the orbit radius, so as to achieve flexible adjustment of the trajectory of the light spot and meet the needs of accurate adaptation and rapid adjustment when facing different processing trajectories in actual processing, thus solving the problems of the single light spot movement mode and insufficient processing flexibility. [Summary of the Invention]

[0005] In view of the shortcomings of the prior art described above, the purpose of this application is to provide a beam adjustment device, a laser processing head, a laser processing device and a laser processing system, and to provide an optical path scheme that can realize continuous orbital rotation of the beam spot with flexible adjustable orbital radius, so as to realize flexible adjustment of the beam spot and meet the needs of precise adaptation and rapid adjustment when facing different processing trajectories in actual processing, thereby solving the problems of single beam spot movement mode and insufficient processing flexibility.

[0006] To achieve the above and other related objectives, this application provides a beam adjustment device, comprising:

[0007] A lens module includes a first prism, a reflector, and a second prism arranged sequentially along the optical path. The lens module allows an incident light beam to pass through, forming an outgoing light beam parallel to the principal optical axis of the incident light beam.

[0008] The lens assembly rotation adjustment mechanism includes:

[0009] A first adjustment component is connected to the lens module to drive the lens module to rotate around a first rotating axis, the first rotating axis being parallel to or coincident with the main optical axis of the incident beam;

[0010] A second adjustment component is connected to the second prism. The second adjustment component includes a drive unit for driving the second prism to rotate around the first axis.

[0011] As a preferred embodiment, the light-transmitting surface of the first prism includes a first right-angled surface and a first inclined surface, wherein the first right-angled surface and the first inclined surface intersect.

[0012] The light-transmitting surface of the second prism includes a second right-angled surface and a second inclined surface, which intersect.

[0013] As a preferred embodiment, the incident beam is incident perpendicularly to the first right-angled surface, and after being refracted by the first prism and reflected by the mirror, it is incident from the second inclined surface of the second prism and refracted thereafter, and finally exits parallel to the principal optical axis of the incident beam.

[0014] As a preferred embodiment, the incident beam enters from the first inclined plane, is refracted by the first prism and reflected by the mirror, and then enters from the second right-angled surface of the second prism and is refracted thereby, finally exiting parallel to the principal optical axis of the incident beam, wherein the direction of the incident beam is perpendicular to the first right-angled surface.

[0015] As a preferred embodiment, the second adjustment component further includes a locking part, which is used to selectively lock the second prism in the rotated position.

[0016] As a preferred embodiment, the second prism rotates around the first axis in an angle range of 0°-12°.

[0017] As a preferred embodiment, the shortest distance L between the first inclined surface of the first prism and the second inclined surface of the second prism is:

[0018]

[0019] Wherein, d is the distance between the principal optical axis of the incident beam and the reflecting mirror, β is the angle between the incident beam and the outgoing beam of the first prism, α is the angle formed by the intersection of the first right-angled surface and the first inclined surface, and h is the height of the right-angled side of the angle α.

[0020] As a preferred embodiment, the intersection of the first right-angled surface and the first inclined surface includes the intersection of the first right-angled surface and the first inclined surface, or the intersection of the extended surfaces of one surface with the extended surfaces of the other surface, or the intersection of the extended surfaces of the two surfaces.

[0021] As a preferred embodiment, the intersection of the second right-angled surface and the second inclined surface includes the intersection of the second right-angled surface and the second inclined surface in solid form, or the intersection of the extension surface of one surface with the other surface, or the intersection of the extension surfaces of the two surfaces.

[0022] As a preferred embodiment, the reflector uses fused silica as a substrate, and its surface is coated with a high-reflectivity film to form a reflective surface. For the incident light beam, the reflectivity of the reflective surface is higher than 99.9%.

[0023] As another aspect of this application, a laser processing head is also proposed, comprising the beam adjustment device and lens group described in any of the above claims, wherein the lens group is used to shape the beam output by the beam adjustment device and form a laser spot at the processing position.

[0024] As a preferred embodiment, the lens group includes a collimating lens and a focusing lens, with the collimating lens disposed at the input end of the first prism and the focusing lens disposed at the output end of the second prism.

[0025] As a preferred embodiment, the focusing lens is fixed.

[0026] As a preferred embodiment, the focusing lens is configured to rotate synchronously with the lens module.

[0027] As another aspect of this application, a laser processing apparatus is also proposed, including the beam adjustment device described in any of the above claims, and further including a laser source that emits the incident beam.

[0028] As a preferred embodiment, the laser source is a laser output head.

[0029] As another aspect of this application, a laser processing system is also proposed, including the aforementioned laser processing apparatus.

[0030] Compared with the prior art, the technical solution of this application will have the following beneficial effects:

[0031] 1. By setting up a lens module consisting of a first prism, a reflector, and a second prism, and using a lens module rotation adjustment mechanism to drive the entire lens module to rotate around a first axis, on the one hand, the outgoing beam after refraction by the second prism can move in a circle around the principal optical axis of the incident beam, thereby realizing the continuous revolution of the laser spot, effectively avoiding the drawback of needing to drive a bulky processing head to perform trajectory movement in traditional processing; on the other hand, the overall rotation of the module can make the direction of the asymmetric incident spot adaptively adjusted according to the direction of the processing curve, which is beneficial to cover a larger processing range, improve processing efficiency, and optimize the uniformity of energy distribution during the processing, significantly improving processing quality.

[0032] 2. This application also drives the second prism to rotate around the first axis through the second adjustment component, thereby adjusting the parallel offset of the outgoing beam relative to the incident beam, realizing flexible adjustment of the beam's orbital radius. Only the angle of the second prism needs to be simply adjusted to adapt to the process requirements of different trajectories, without the need to replace optical components or adjust the overall structure, which greatly improves the processing flexibility and ease of operation. [Attached Image Description]

[0033] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0034] Figure 1 This is a schematic diagram of the optical path of the lens module in a beam adjustment device according to an embodiment of this application;

[0035] Figure 2 This is a schematic diagram of the beam adjustment device in the beam adjustment device;

[0036] Figure 3 This is a schematic diagram of the lens module in a beam adjustment device according to another embodiment of this application;

[0037] Figure 4 This is a schematic diagram of the structure of a laser processing head in one embodiment of this application;

[0038] Figure 5 This is a schematic diagram illustrating the relationship between the prism angle and the beam projection length on the mirror surface under two beam incidence methods in one embodiment of this application, when the incident beam spot diameter is fixed at 20mm.

[0039] Figure 6 for Figure 5 The following is a schematic diagram illustrating the relationship between the prism angle and the magnification of the light spot on the reflecting mirror under the two beam incident methods of this application;

[0040] Figure 7 This is a schematic diagram of the rotation state of the "F"-shaped laser spot at the processing position in one embodiment.

[0041] Among them, 100 is the lens module; 11 is the first prism; 12 is the reflecting mirror; 13 is the second prism; 21 is the collimating mirror; and 22 is the focusing mirror.

Detailed Implementation Methods

[0042] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0043] In the description of this application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0044] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0045] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0046] This application provides a beam adjustment device, including a lens module 100 and a lens module rotation adjustment mechanism. Please refer to... Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the optical path of the lens module 100 in a beam adjustment device according to an embodiment of this application. Figure 2This is a schematic diagram of the beam adjustment device in the beam adjustment apparatus. The lens module 100 includes a first prism 11, a reflector 12, and a second prism 13 arranged sequentially along the optical path. The lens module 100 allows the incident beam to pass through, forming an outgoing beam parallel to the principal optical axis of the incident beam. The lens module rotation adjustment mechanism (not shown) includes a first adjustment component and a second adjustment component. The first adjustment component is connected to the lens module 100 to drive the lens module to rotate around a first rotation axis m, which is parallel to or coincident with the principal optical axis of the incident beam. The second adjustment component is connected to the second prism 13 and includes a driving part for driving the second prism 13 to rotate around the first rotation axis m. When the reflector and the two prisms rotate around the first rotation axis, they can revolve, and the radius of revolution is controllable.

[0047] It is understood that in this application, "revolution" refers to the circular motion of the laser beam emitted from the lens module 100 around a central point. This is achieved by driving the entire lens module to rotate through the first adjustment component. When the lens module 100 rotates, the direction of the emitted beam changes, but it remains parallel to the principal optical axis of the incident beam. Thus, with the focusing lens fixed, the laser beam spot on the focal plane will rotate around a central point, i.e., revolve. The principle of the laser beam spot's revolution is that the overall rotation of the module causes a change in the beam direction, which in turn causes a movement in the position of the laser beam spot.

[0048] When the second adjustment component drives the second prism 13 to rotate around the first axis m to another angle, the first adjustment component then drives the lens module 100 to rotate as a whole. At this time, the emitted beam will move in a circle around the first axis m, and the radius of this circle is determined by the rotation angle of the second prism 13, thus achieving flexible adjustment of the beam's orbital radius. By adjusting the rotation angle of the second prism 13, different orbital radii can be set according to different process requirements to achieve the desired processing effect.

[0049] In some embodiments, the cross-sectional shape of the incident beam is F-shaped, T-shaped, rectangular, arc-shaped, or triangular.

[0050] Compared to existing technologies, the technical solution of this application has the following beneficial effects: This application sets up a lens module composed of a first prism, a reflector, and a second prism, and uses a lens module rotation adjustment mechanism to drive the entire lens module to rotate around a first axis. On the one hand, this allows the outgoing beam, after being refracted by the second prism, to move in a circular motion around the principal optical axis of the incident beam, thereby achieving continuous revolution of the laser spot. This effectively avoids the drawback of traditional processing requiring a heavy processing head to perform trajectory movement. On the other hand, the overall rotation of the module allows the direction of the asymmetric incident spot to adaptively adjust with the direction of the processing curve, which is beneficial for covering a larger processing range, improving processing efficiency, and optimizing the uniformity of energy distribution during processing, significantly improving processing quality. This application also uses a second adjustment component to drive the second prism to rotate around the first axis, which can adjust the parallel offset of the outgoing beam relative to the incident beam, thereby achieving flexible adjustment of the spot's revolution radius. Only a simple adjustment of the second prism angle is needed to adapt to different trajectory process requirements, without replacing optical components or adjusting the overall structure, greatly improving processing flexibility and operational convenience.

[0051] In one embodiment, the light-transmitting surface of the first prism 11 includes a first right-angled surface and a first inclined surface, the first right-angled surface intersecting the first inclined surface; the light-transmitting surface of the second prism 13 includes a second right-angled surface and a second inclined surface, the second right-angled surface and the second inclined surface intersecting. It is understood that the first prism 11 and the second prism 13 can preferably be wedge-shaped prisms.

[0052] Please continue to refer to Figure 1 This illustrates one implementation of the present application. An incident light beam enters from the first inclined surface of the first prism 11, is refracted by the first prism 11 and reflected by the mirror 12, then enters from the second right-angled surface of the second prism 13 and is refracted thereafter, finally exiting parallel to the principal optical axis of the incident beam. In this embodiment, the first inclined surface of the first prism 11 serves as the first incident interface of the incident beam. The angle formed between the first inclined surface and the first right-angled surface (which can be the wedge angle of a wedge prism) allows the incident beam to undergo a certain refracted deflection relative to its original principal optical axis. This deflection is sufficient to ensure that the beam, after refraction by the mirror, still accurately enters the second prism 13. If the deflection is too large, the beam will fall outside the reflection range.

[0053] In the above embodiment, the shortest distance L between the first inclined surface of the first prism 11 and the second inclined surface of the second prism 13 is:

[0054]

[0055] Where d is the distance between the principal axis of the incident beam and the reflecting mirror, β is the angle between the incident beam and the outgoing beam of the first prism, α is the angle formed by the intersection of the first right-angled surface and the first inclined surface, and h is the length of the right-angled side of the angle α. It should be noted that this formula is specifically derived based on the reflection principle of the reflecting mirror 12. The reflecting mirror 12 has the characteristic that "the angle of incidence equals the angle of reflection" for the beam. When the incident beam is refracted by the first prism 11 and then strikes the reflecting mirror 12 at an angle β, the reflecting mirror 12 deflects the beam according to the principle of equal angle reflection, so that the beam can accurately enter the second prism 13 after deflection. By rationally designing the structure of the first prism 11, the propagation path of the beam can be precisely controlled, thereby causing a controllable offset of the outgoing beam relative to the incident beam.

[0056] Please refer to Figure 3 This illustrates another implementation of the present application, where the incident light beam enters from the first inclined surface of the first prism 11, is refracted by it in sequence, reflected by the reflecting mirror 12, and then enters from the second right-angled surface of the second prism 13 and is refracted by it, finally exiting parallel to the principal optical axis of the incident light beam, wherein the direction of the incident light beam is perpendicular to the first right-angled surface of the first prism 11. Compared to the above... Figure 1 In terms of the implementation method, this embodiment adopts a different optical path scheme. By changing the placement of the first prism 11 and the second prism 13, the incident beam first enters from the first inclined surface of the first prism 11, then exits from the first right-angled surface, reaches the reflector 12 and is reflected to the second right-angled surface of the second prism 13, and finally exits from the second inclined surface. Similarly, the output beam can be adjusted to be parallel to the main optical axis of the incident beam. With the first adjustment component that can drive the lens module 100 to rotate around the first rotation axis m, the continuous direction change of the output beam can be realized, thereby forming the revolution motion of the light spot. When the incident beam is a non-axisymmetric beam, its light spot direction can be adaptively adjusted according to the forward direction of the processing curve, which is beneficial to cover a larger processing range and greatly improves processing efficiency.

[0057] It is understood that, in both of the above embodiments, the lens module can achieve the function of adjusting the emitted beam based on the refraction principle of the first prism 11 and the second prism 13 and the reflection principle of the reflector 12.

[0058] In some embodiments, the intersection of the first right-angled face and the first inclined face includes the intersection of the first right-angled face and the first inclined face entity, or the intersection of the extension surfaces of one face and the other face, or the intersection of the extension surfaces of the two faces.

[0059] The intersection of the second right-angled plane and the second inclined plane includes the intersection of the second right-angled plane and the second inclined plane solids, or the intersection of the extension surface of one of the planes with the other plane, or the intersection of the extension surfaces of the two planes.

[0060] It is understood that the adjustment principle of the beam adjustment device of this application is as follows: the incident beam is refracted by the first prism 11 (first redirection) and then directed towards the reflecting mirror 12. After being reflected by the reflecting mirror 12 (second redirection), it reaches the second prism 13 and finally refracts out of the device, forming an outgoing beam parallel to the principal optical axis of the incident beam. Because the beam undergoes two refractions and one reflection during propagation, the spatial position of the outgoing beam relative to the incident beam will change.

[0061] When the first adjustment component drives the lens module 100 to rotate around the first axis m, the first prism 11, the reflector 12, and the second prism 13 rotate synchronously around this axis. This causes the direction of the emitted beam after three turns to change with the rotation angle of the module, forming a circular motion around the center point on the focal plane (i.e., the beam spot revolves). If the second adjustment component first drives the second prism 13 to rotate around the first axis m to a certain angle (i.e., the refraction offset of the second prism is changed), and then the first adjustment component drives the lens module 100 to rotate, the radius of the emitted beam's revolution can be flexibly adjusted according to the locking angle of the second prism. At the same time, the rotation of the lens module will also synchronously change the spatial orientation of the emitted beam's cross-section, causing the beam spot's pattern to undergo continuous angular deflection. Because the beam undergoes three turns (two refractions and one reflection) through this optical path, and with the overall rotation of the module and the variable angle of the second prism, the laser spot finally formed at the processing position can revolve around a preset radius, thereby achieving flexible adjustment of the laser spot.

[0062] It should be noted that, in order to make the output beam parallel to the principal axis of the incident beam, the first prism 11 and the second prism 13 have the same structure.

[0063] Specifically, when the structures of the first prism 11 and the second prism 13 are the same (for example, the wedge angles of the two prisms are the same and the refractive indices of the materials are also the same), due to the symmetry of their refraction laws, the offset of the incident beam refracted by the first prism 11 and the offset of the incident beam refracted by the second prism 13 are completely canceled out by the equal angle reflection of the reflecting mirror 12, so that the outgoing beam is naturally parallel to the principal optical axis of the incident beam.

[0064] Please refer to again Figure 5 and Figure 6 , Figure 5 This is a schematic diagram illustrating the relationship between the prism angle and the beam projection length on the mirror surface under two beam incidence methods in one embodiment of this application, when the incident beam spot diameter is fixed at 20mm. Figure 6 for Figure 5 The following is a schematic diagram illustrating the relationship between the prism angle and the magnification of the light spot on the reflecting mirror under two beam incidence methods according to this application. It should be noted that... Figure 5 and Figure 6 The test data are all based on the condition that the first prism 11 and the second prism 13 have the same structure. The "prism angle" in the horizontal axis refers to the angle parameter of the two prisms under the premise of the same structure. As mentioned above, by setting the structure of the two prisms to be the same, their refraction laws are symmetrical, so that the output beam can be parallel to the principal axis of the incident beam.

[0065] In the figure, the red curve represents the case when the incident beam is incident from a right-angled plane (plane), while the blue curve represents the case when the incident beam is incident from an inclined plane. It can be observed that as the prism angle increases, the projection length (spot magnification) decreases in both incident methods, and the projection length (spot magnification) of the inclined plane incident (blue curve) is always greater than that of the right-angled plane incident (red curve).

[0066] This difference indicates that the two incident methods are suitable for different processing scenarios. For the right-angle incident method (red curve), the smaller magnification and shorter projection length of the light spot on the mirror surface result in higher energy concentration, making it more suitable for scenarios requiring high processing accuracy and energy density. The smaller magnification reduces energy dispersion, ensuring energy focus in the processing area and improving dimensional accuracy. Conversely, the inclined plane incident method (blue curve), with its larger magnification and projection length, results in a more uniform energy distribution on the mirror surface, making it more suitable for scenarios requiring high flatness and energy uniformity in the processing area.

[0067] In some embodiments, the second adjustment component further includes a locking part for selectively locking the second prism 13 in the rotated position. By providing the locking part, it is possible to ensure that the second prism 13 can stably maintain its posture after being adjusted to the target angle, avoiding positional displacement of the second prism caused by rotation of the lens module or vibration during processing, thereby ensuring the stability of the light spot's orbital radius.

[0068] In some embodiments, the rotation angle of the second prism around the first axis m ranges from 0° to 12°, including two endpoints: 0° and 12°. When the rotation angle of the second prism is 0°, the outgoing beam and the incident beam are coaxial, and the orbital radius of the light spot is zero. When the rotation angle of the second prism is 12°, the outgoing beam has the maximum offset relative to the incident beam, corresponding to the maximum orbital radius of the light spot (tested to be 20mm at this angle). By continuously adjusting the rotation angle of the second prism within this angle range, the orbital radius can be continuously adjusted from zero to its maximum value, meeting the requirements of different sized annular machining trajectories.

[0069] It is understandable that when the second prism 13 is not rotating, the emitted light spot of the beam adjustment device coincides with the first rotating axis m; when the first prism 11, the second prism 13 and the reflector 12 rotate simultaneously, when the incident light spot is asymmetrical, its light spot can change with the direction of the processing curve, thereby improving processing efficiency.

[0070] In this application, the reflector uses fused silica as a substrate, and its surface is coated with a high-reflectivity film to form a reflecting surface. For the incident beam, the reflectivity of the reflecting surface is higher than 99.9%. Fused silica has excellent optical homogeneity and an extremely low coefficient of thermal expansion, which not only ensures that the reflector does not introduce additional optical path difference during beam transmission, but also prevents the reflector from deforming due to excessive heat during operation. The high reflectivity of the reflecting surface aims to minimize beam energy loss and reduce the absorption or transmission of energy by the film, thereby ensuring the quality and energy density of the emitted beam. Simultaneously, this high-reflectivity film also possesses good laser damage threshold and wear resistance.

[0071] Please refer to Figure 7 , Figure 7 This is a schematic diagram illustrating the rotation state of the "F"-shaped laser spot at the processing position in one embodiment. When the incident beam's spot shape is "F," as the lens module rotates around the first axis m driven by the lens assembly rotation adjustment mechanism, the emitted beam's spot moves along... Figure 7 The circular arrow trajectory continuously revolves around the center of rotation (i.e., Figure 7 The black dots marked in the image represent the light spot, and the direction of the light spot will synchronously adapt to the direction of movement during processing according to the orbital trajectory. Furthermore, Figure 7 In this case, the first rotation axis m coincides with the principal optical axis 1 of the incident beam.

[0072] Please continue to refer to Figure 7 The laser spot at the processing position is "F"-shaped. By rotating the beam adjustment device clockwise (with the direction of light entering the device as the observation direction), the "F"-shaped laser spot can be continuously rotated in a stepless manner. It should be noted that rotating the beam adjustment device counterclockwise can also produce the opposite "F"-shaped laser spot continuous rotation pattern. Furthermore, the process can be repeatedly performed in both clockwise and counterclockwise directions, which can be adjusted as needed according to processing requirements.

[0073] In some other embodiments, the laser spot can be a digital spot structure with a dot-array structure. The digital spot can be continuously rotated using a rotating beam adjustment device. Furthermore, the shape of the digital spot is not limited here. It is understood that the aforementioned digital spot supports customized designs for both one-dimensional and two-dimensional arrays, thereby meeting the needs of all scenarios from standardization to deep customization, further improving the accuracy and efficiency of laser processing, and facilitating adaptation to various application scenarios.

[0074] As another aspect of this application, please refer to Figure 4 Furthermore, a laser processing head is proposed for laser processing of a workpiece. It includes a beam adjustment device and a lens group as described in any of the above embodiments. The lens group is used to shape the emitted beam and form a laser spot at the processing position. The lens group includes a collimating lens 21 and a focusing lens 22. The collimating lens 21 is located upstream of the beam adjustment device to collimate the incident beam. The focusing lens 22 is located at the output end of the third reflecting surface to focus the emitted beam into a processing beam.

[0075] In one embodiment, the focusing lens 22 is fixed, meaning that it remains stationary while the lens module rotates. This simplifies the overall structure of the laser processing head, reduces the number of moving parts, and ensures the stability of the laser spot at the processing position. It is suitable for applications requiring high precision in the processing trajectory and where the processing environment is relatively fixed. Preferably, the focusing lens 22 is coaxially aligned with the principal optical axis of the incident beam.

[0076] In other embodiments, the first adjustment component is also used to drive the focusing lens 22 and the lens module 100 to rotate synchronously. Synchronous rotation can ensure that the relative position between the focusing lens 22 and the lens module 100 is stable, avoid the beam transmission path deviation caused by relative motion, and ensure that the shape, size and energy distribution of the laser spot always meet the processing requirements. It is suitable for scenarios with high requirements for beam flexibility.

[0077] It is understood that this laser processing head is used in fields including but not limited to cutting and welding.

[0078] As another aspect of this application, a laser processing apparatus is also proposed, comprising a beam adjustment device and a laser source as described in any of the above embodiments, the laser source being used to emit an incident beam (not shown in the figures). In one embodiment, the laser source is a laser output head.

[0079] As another aspect of this application, a laser processing system is also proposed, the laser processing apparatus comprising the laser processing apparatus as described in any of the above embodiments.

[0080] It should be noted that the above-described beam adjustment device embodiment and the laser processing head / laser processing device / laser processing system embodiment belong to the same concept. For details of its implementation process, please refer to the embodiment of the beam adjustment device. Furthermore, the technical features in the embodiment of the beam adjustment device are applicable to the above-described embodiments of the beam adjustment device and system, and will not be repeated here.

[0081] In summary, this application, by setting up a lens module composed of a first prism, a reflector, and a second prism, and using a lens module rotation adjustment mechanism to drive the entire lens module to rotate around a first axis, achieves two main advantages. Firstly, it enables the outgoing beam, refracted by the second prism, to move in a circular motion around the principal optical axis of the incident beam, thus realizing continuous revolution of the laser spot. This effectively avoids the drawback of traditional processing methods that require driving a bulky processing head to perform trajectory movements. Secondly, the overall rotation of the module allows the direction of the asymmetric incident spot to adaptively adjust with the direction of the processing curve, facilitating coverage of a larger processing range, improving processing efficiency, and optimizing the uniformity of energy distribution during processing, significantly improving processing quality. Furthermore, this application uses a second adjustment component to drive the second prism to rotate around the first axis, which can adjust the parallel offset of the outgoing beam relative to the incident beam, achieving flexible adjustment of the spot's revolution radius. Only a simple adjustment of the second prism angle is needed to adapt to different trajectory process requirements, without replacing optical components or adjusting the overall structure, greatly improving processing flexibility and operational convenience.

[0082] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A beam adjustment device, characterized in that, include: The lens module includes a first prism, a reflector, and a second prism arranged sequentially along the optical path. The lens module is used to allow an incident light beam to pass through, so as to form an outgoing light beam parallel to the principal optical axis of the incident light beam. and The lens assembly rotation adjustment mechanism includes: A first adjustment component is connected to the lens module to drive the lens module to rotate around a first rotating axis, the first rotating axis being parallel to or coincident with the main optical axis of the incident beam; A second adjustment component is connected to the second prism. The second adjustment component includes a drive unit for driving the second prism to rotate around the first axis.

2. The beam adjustment device according to claim 1, characterized in that, The light-transmitting surface of the first prism includes a first right-angled surface and a first inclined surface, and the first right-angled surface and the first inclined surface intersect. The light-transmitting surface of the second prism includes a second right-angled surface and a second inclined surface, which intersect.

3. The beam adjustment device according to claim 2, characterized in that, The incident beam is perpendicular to the first right-angled surface, and after being refracted by the first prism and reflected by the mirror, it enters from the second inclined surface of the second prism and is refracted thereafter, and finally exits parallel to the principal optical axis of the incident beam.

4. The beam adjustment device according to claim 2, characterized in that, The incident beam enters from the first inclined plane, is refracted by the first prism and reflected by the mirror, and then enters from the second right-angled surface of the second prism and is refracted thereby, finally exiting parallel to the principal optical axis of the incident beam, wherein the direction of the incident beam is perpendicular to the first right-angled surface.

5. The beam adjustment device according to claim 1, characterized in that, The second adjustment component further includes a locking part for selectively locking the second prism in the rotated position.

6. The beam adjustment device according to claim 1, characterized in that, The second prism rotates around the first axis in an angle range of 0°-12°.

7. The beam adjustment device according to claim 3, characterized in that, The shortest distance L between the first inclined surface of the first prism and the second inclined surface of the second prism is: Wherein, d is the distance between the principal optical axis of the incident beam and the reflecting mirror, β is the angle between the incident beam and the outgoing beam of the first prism, α is the angle formed by the intersection of the first right-angled surface and the first inclined surface, and h is the length of the right-angled side of the angle α.

8. The beam adjustment device according to claim 2, characterized in that, The intersection of the first right-angled surface and the first inclined surface includes the intersection of the first right-angled surface and the first inclined surface, or the intersection of the extended surfaces of one surface with the extended surfaces of the other surface, or the intersection of the extended surfaces of the two surfaces.

9. The beam adjustment device according to claim 2, characterized in that, The intersection of the second right-angled surface and the second inclined surface includes the intersection of the second right-angled surface and the second inclined surface solidly, or the intersection of the extension surface of one surface with the other surface, or the intersection of the extension surfaces of the two surfaces.

10. The beam adjustment device according to claim 1, characterized in that, The reflector uses fused silica as a substrate, and its surface is coated with a high-reflectivity film to form a reflective surface. For the incident light beam, the reflectivity of the reflective surface is higher than 99.9%.

11. A laser processing head, characterized in that, Includes the beam adjustment device and lens group as described in any one of claims 1-10, wherein the lens group is used to shape the beam output by the beam adjustment device and form a laser spot at the processing position.

12. The laser processing head according to claim 11, characterized in that, The lens group includes a collimating lens and a focusing lens. The collimating lens is located at the input end of the first prism, and the focusing lens is located at the output end of the second prism.

13. The laser processing head according to claim 12, characterized in that, The focusing lens is fixed.

14. The laser processing head according to claim 13, characterized in that, The focusing lens is configured to rotate synchronously with the lens module.

15. A laser processing apparatus, characterized in that, The device includes the beam adjustment apparatus as described in any one of claims 1-10, and further includes a laser source that emits the incident beam.

16. The laser processing apparatus as described in claim 15, characterized in that, The laser source is a laser output head.

17. A laser processing system, characterized in that, Includes the laser processing apparatus as described in claim 15.

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