Tool damage detection mechanism for scribing machine

Abstract

The cutter damage detection mechanism for the scribing machine comprises a machine body, a scribing cutter is installed in the machine body through a scribing base, a detection base is fixed to the front end of the scribing base, and the detection base is located at the upper left corner of the scribing cutter; the device further comprises a hydraulic rod, the hydraulic rod is fixed to the top of the inner cavity of the detection base, the output end of the bottom of the hydraulic rod is connected with a mounting base, the two sides of the mounting base are connected with L-shaped rods through damping assemblies, and a laser transmitter and a laser receiver are oppositely fixed to the inner sides of the vertical areas of the two L-shaped rods correspondingly. The bottom of the mounting base is connected with a stop lever through a second elastic telescopic rod, and a movable assembly is arranged between the interior of the mounting base and the stop lever and used for pushing the stop lever to move up and down. According to the cutter damage detection mechanism for the scribing machine, a cutter with heat dissipation holes is stably detected, and meanwhile long-acting detection can be kept.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field, in particular to a kind of cutter breakage detection mechanism for scriber. BACKGROUND

[0002] Scriber is the core equipment in the field of semiconductor, electronic components and precision material processing, mainly used to "cut and separate" wafer, ceramic, glass and other substrates into single chip or functional unit, which is mainly cut by high-speed rotating cutter, and the "external load", "thermal stress" and "chemical erosion" of cutter exceed its structural strength or wear limit, finally showing edge collapse, crack, particle drop or even fracture, in order to ensure the safety and quality of processing, cutter breakage detection mechanism is usually equipped, but the existing cutter breakage detection mechanism has the following problems when in use: The publication number (CN112589675A) relates to a scriber online real-time cutter wear detection device, which mainly installs light barrier and light barrier on the main shaft, and cooperates with laser detection equipment to detect breakage, which is not convenient to ensure the stability during detection, on the one hand, the light barrier changes the existing scriber main shaft structure, on the other hand, the high-speed rotating light barrier and other components aggravate the generation of vibration, resulting in the decrease of detection accuracy, at the same time, a large amount of impurities are generated during scriber cutting, the existing cutter breakage detection mechanism has narrow detection area, and it is not convenient to clean the laser detection mechanism, so that the laser emission and reception are easily blocked by the adhered impurities, which is also an important factor affecting the accuracy.

[0003] In view of the above problems, it is urgent to make innovative design on the basis of the original. SUMMARY

[0004] The purpose of the present application is to provide a kind of cutter breakage detection mechanism for scriber, to solve the problems raised in the above background art, the present application technical scheme provides a solution significantly different from the prior art.

[0005] To achieve the above purpose, the present application provides the following technical scheme: a kind of cutter breakage detection mechanism for scriber, including machine body, the scriber knife is installed in the machine body through scriber seat, the detection seat is fixed at the front end of scriber seat, and the detection seat is located at the upper left corner position of scriber knife; It also includes hydraulic rod, the hydraulic rod is fixed at the top of the internal cavity of detection seat, the output end of the bottom of the hydraulic rod is connected with mounting seat, the mounting seat is connected with L-shaped rod through damping assembly on both sides, the inner side of vertical area of two L-shaped rods is respectively fixed with laser emitter and laser receiver, the bottom of mounting seat is connected with blocking rod through second elastic expansion rod, and the internal cavity of mounting seat and blocking rod are provided with movable assembly for pushing blocking rod up and down; A cleaning assembly is arranged in the lower half of the L-shaped rod, and is used to clean the laser transmitter and the laser receiver.

[0006] Preferably, the damping assembly comprises a first elastic telescopic rod fixed between the mounting base and the L-shaped rod, and a first magnet and a second magnet are fixed to the outer end surface of the mounting base and the inner end surface of the lateral region of the L-shaped rod, respectively.

[0007] Preferably, the first magnet and the second magnet are symmetrically arranged about the central axis of the first elastic telescopic rod, and the first magnet and the second magnet repel each other magnetically.

[0008] Preferably, the blocking rod is designed as a door-shaped structure, and the vertical regions at both ends of the blocking rod correspond to the distribution positions of the laser transmitter and the laser receiver.

[0009] Preferably, the movable assembly comprises a guide disc rotatably embedded in the mounting base by a micro motor, a guide rod rotatably mounted on the eccentric protruding column on the outer side of the guide disc, a movable rod rotatably mounted on the protruding column at the bottom of the guide rod, and the movable rod is rotatably mounted on the top of the blocking rod.

[0010] Preferably, the cleaning assembly comprises a cleaning base rotatably embedded in the bottom of the vertical region of the L-shaped rod by a torsion spring and a bearing, the cleaning base is designed as an "L"-shaped structure, a horizontal column is embeddedly mounted in the lateral region of the cleaning base, the horizontal column is limitedly slid in the L-shaped rod, a push plate is abutted at the outer end of the horizontal column, the push plate is fixed to the inner side wall of the detection base, a cleaning roller is rotatably embedded at the top of the vertical region of the cleaning base by a bearing, a vertical column is embeddedly mounted at the bottom of the cleaning roller, the vertical column is connected to the bottom of the cleaning roller by a spring at the annular protruding part in the middle of the vertical column, a bottom plate is arranged at the bottom of the vertical column, the bottom plate is fixed horizontally at the bottom edge of the L-shaped rod, and a push head is fixed to the middle of the top of the bottom plate.

[0011] Preferably, the protruding part at the inner end of the horizontal column is slidably fitted in the internal spiral cavity of the cleaning base, the push plate at the outer end of the horizontal column is designed as an inclined surface structure, and the horizontal movement of the horizontal column is used to drive the rotation of the cleaning base.

[0012] Preferably, the protruding part at the top of the vertical column is slidably fitted in the internal spiral cavity of the cleaning roller, and the movement of the vertical column is used to drive the rotation of the cleaning roller.

[0013] Preferably, the push head at the bottom of the vertical column is designed as a hemispherical structure, the bottom plate at the bottom of the push head is designed as an arc-shaped structure, and the arc center of the bottom plate corresponds to the rotation center of the cleaning base.

[0014] Compared with the prior art, the present application has the following advantages: This invention features a gate-shaped stop bar. A movable component allows the stop bar to reciprocate up and down, intermittently blocking the laser emitter and receiver to accommodate the heat dissipation holes on the cutting tool, thus improving detection accuracy. During this process, the vibration generated by the movable component is transmitted to the first elastic telescopic rod, where its elastic extension and contraction partially offset the vibration. Simultaneously, non-contact buffering is achieved through the magnetic repulsion of the first and second magnets, greatly eliminating detection vibration and improving the detection stability of the laser emitter and receiver. Furthermore, no modifications to components such as the spindle are required, thus preserving the high-precision scribing effect of the spindle. This invention includes a cleaning component. When the mounting base and L-shaped rod extend, the cleaning seat rotates via the horizontal column and push plate, while the cleaning roller rotates via the vertical column and push head. This allows the cleaning roller to swing and rotate, cleaning the lenses of the laser emitter and laser receiver, preventing the adhesion of scratches and impurities, reducing interference, and enabling automatic cleaning during detection and deployment in confined spaces where manual cleaning is inconvenient. This further improves detection accuracy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the side of the detection seat of the present invention; Figure 3 For the present invention Figure 2 Enlarged structural diagram at point A in the middle; Figure 4 For the present invention Figure 2 Enlarged structural diagram at point B; Figure 5 This is a schematic diagram of the front mounting structure of the guide rod of the present invention; Figure 6 This is a schematic diagram of the internal structure of the cleaning seat of the present invention; Figure 7 This is a schematic diagram of the front structure of the pusher head of the present invention.

[0016] In the diagram: 1. Machine body; 2. Dicing plate holder; 3. Dicing blade; 4. Detection seat; 5. Hydraulic rod; 6. Mounting seat; 71. First elastic telescopic rod; 72. First magnet; 73. Second magnet; 8. L-shaped rod; 9. Laser emitter; 10. Laser receiver; 11. Second elastic telescopic rod; 12. Stop bar; 131. Guide plate; 132. Guide rod; 133. Movable rod; 141. Cleaning seat; 142. Horizontal column; 143. Push plate; 144. Cleaning roller; 145. Vertical column; 146. Base plate; 147. Push head. Detailed Implementation

[0017] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0018] Please refer to Figures 1-7 The present application provides a technical solution: a cutter damage detection mechanism for a scriber, comprising a machine body 1, a scriber blade 3 being installed in the machine body 1 through a scriber seat 2, a detection seat 4 being fixed at the front end of the scriber seat 2, the detection seat 4 being located at the upper left corner of the scriber blade 3; a hydraulic rod 5 being fixed at the top of the internal cavity of the detection seat 4, an installation seat 6 being connected to the bottom output end of the hydraulic rod 5, two L-shaped rods 8 being connected to the two sides of the installation seat 6 through damping components, and a laser emitter 9 and a laser receiver 10 being respectively fixed at the inner sides of the vertical areas of the two L-shaped rods 8. When the scriber blade 3 is fixed on the scriber seat 2 and a scribbling operation is performed, the installation seat 6 is moved to the direction of the scriber blade 3 through the hydraulic rod 5, the L-shaped rods 8 drive the laser emitter 9 and the laser receiver 10 to move to the outer edge of the scriber blade 3 according to the specifications of the scriber blade 3, and the outer edge of the rotating scriber blade 3 is damaged detected through the laser emitter 9 and the laser receiver 10.

[0019] As an embodiment of the present application, the bottom of the installation seat 6 is connected with a blocking rod 12 through a second elastic expansion rod 11, and a movable component is arranged between the inside of the installation seat 6 and the blocking rod 12 for pushing the blocking rod 12 to move up and down; The movable component comprises a guide disc 131, the guide disc 131 being rotatably installed in the installation seat 6 through a micro motor embedded type, a guide rod 132 being rotatably installed on the eccentric protruding column on the outside of the guide disc 131, a movable rod 133 being rotatably installed on the protruding column at the bottom of the guide rod 132, and the movable rod 133 being rotatably installed at the top of the blocking rod 12; the blocking rod 12 is designed as a door type structure, and the vertical areas at the two ends of the blocking rod 12 correspond to the distribution positions of the laser emitter 9 and the laser receiver 10. In the detection process, the built-in micro motor drives the guide disc 131 to rotate, the guide disc 131 drives the blocking rod 12 to move up and down through the guide rod 132 and the movable rod 133 under the limiting action of the second elastic expansion rod 11, so that the blocking rod 12 shields the heat dissipation holes on the scriber blade 3, avoiding affecting the judgment of the laser emitter 9 and the laser receiver 10.

[0020] As an embodiment of the present application, the damping assembly comprises a first elastic telescopic rod 71 fixed between the mounting base 6 and the L-shaped rod 8, the outer end surface of the mounting base 6 and the inner end surface of the transverse region of the L-shaped rod 8 are respectively fixed with a first magnet 72 and a second magnet 73; the first magnet 72 and the second magnet 73 are symmetrically arranged about the central axis of the first elastic telescopic rod 71, and the first magnet 72 and the second magnet 73 repel each other magnetically. The reciprocating movement of the blocking rod 12 causes the mounting base 6 to vibrate, and the vibration force is transmitted to the first elastic telescopic rod 71 and the first magnet 72 and the second magnet 73, which are buffered by the elastic buffer of the first elastic telescopic rod 71 and the repulsive force of the first magnet 72 and the second magnet 73, thereby reducing the vibration of the L-shaped rod 8.

[0021] As an embodiment of the present application, the cleaning assembly is arranged in the lower half region of the L-shaped rod 8, and is used for cleaning the laser emitter 9 and the laser receiver 10; the cleaning assembly comprises a cleaning seat 141 rotatably embedded in the bottom of the vertical region of the L-shaped rod 8 through a torsion spring and a bearing, the cleaning seat 141 has an "L" shape structure, a horizontal column 142 is embeddedly installed in the transverse region of the cleaning seat 141, the horizontal column 142 is limitedly slid in the L-shaped rod 8, a push plate 143 is arranged at the outer end of the horizontal column 142, the push plate 143 is fixed on the inner side wall of the detection seat 4, a cleaning roller 144 is rotatably embeddedly installed at the top of the vertical region of the cleaning seat 141 through a bearing, a vertical column 145 is embeddedly installed at the bottom of the cleaning roller 144, the vertical column 145 is connected to the bottom of the cleaning roller 144 through a spring at the annular protrusion of the middle part, a bottom plate 146 is arranged at the bottom of the vertical column 145, the bottom plate 146 is transversely fixed at the bottom edge of the L-shaped rod 8, and a push head 147 is fixed at the middle part of the top of the bottom plate 146. The inner end protrusion of the horizontal column 142 is slidably fitted in the internal spiral cavity of the cleaning seat 141, the push plate 143 at the outer end of the horizontal column 142 is designed as an inclined surface structure, and the transverse movement of the horizontal column 142 is used to drive the rotation of the cleaning seat 141; the top protrusion of the vertical column 145 is slidably fitted in the internal spiral cavity of the cleaning roller 144, and the movement of the vertical column 145 is used to drive the rotation of the cleaning roller 144; the push head 147 at the bottom of the vertical column 145 is designed as a hemispherical structure, and the bottom plate 146 at the bottom of the push head 147 is designed as an arc structure, and the arc center of the bottom plate 146 corresponds to the rotation center of the cleaning seat 141. Mounting base 6 moves L-shaped rod 8 via first elastic telescopic rod 71, causing horizontal column 142 to move and contact the inclined surface of push plate 143. This causes horizontal column 142 to move laterally under force, and slides in the spiral cavity inside cleaning seat 141 through the protrusion at its end, causing cleaning seat 141 to rotate inside L-shaped rod 8, which in turn causes cleaning roller 144 to swing. At the same time, the rotation of cleaning seat 141 causes vertical column 145 to move on base plate 146. Through contact between vertical column 145 and push head 147, vertical column 145 is pushed to move vertically. The protrusion at the end of vertical column 145 slides in the spiral cavity inside cleaning roller 144, causing cleaning roller 144 to rotate. Thus, through the deflection and rotation of cleaning roller 144, laser emitter 9 and laser receiver 10 are cleaned.

[0022] Working principle: First, the dicing blade 3 is fixed on the dicing base 2. When the dicing operation is performed, the hydraulic rod 5 drives the mounting base 6 to move towards the dicing blade 3. According to the specifications of the dicing blade 3, the L-shaped rod 8 drives the laser emitter 9 and the laser receiver 10 to move to the outer edge of the dicing blade 3. The laser emitter 9 and the laser receiver 10 perform damage detection on the outer edge of the rotating dicing blade 3. Mounting base 6 moves L-shaped rod 8 via first elastic telescopic rod 71, causing horizontal column 142 to move accordingly and contact the inclined surface of push plate 143. This causes horizontal column 142 to move laterally under force, sliding within the spiral cavity of cleaning seat 141 through its end protrusion, thus rotating cleaning seat 141 within L-shaped rod 8. This, in turn, causes cleaning roller 144 to oscillate. Simultaneously, the rotation of cleaning seat 141 causes vertical column 145 to move on base plate 146. Through contact between vertical column 145 and push head 147, vertical column 145 is pushed to move vertically. The vertical column 145 slides within the spiral cavity of the cleaning roller 144, causing the cleaning roller 144 to rotate. Through the deflection and rotation of the cleaning roller 144, the laser emitter 9 and the laser receiver 10 are cleaned to avoid affecting accuracy. The initial position of the cleaning roller 144 is offset relative to the laser emitter 9 and the laser receiver 10, so that when the laser emitter 9 and the laser receiver 10 extend and retract with the L-shaped rod 8, the cleaning roller 144, in conjunction with the elastic reset of the cleaning seat 141, can swing back and forth for cleaning. During the testing process, the built-in micro motor drives the guide plate 131 to rotate. Under the restriction of the second elastic telescopic rod 11, the guide plate 131 drives the stop rod 12 to move up and down through the guide rod 132 and the movable rod 133. This causes the stop rod 12 to block the heat dissipation holes on the dicing blade 3, avoiding affecting the judgment of the laser emitter 9 and the laser receiver 10. The movement pattern of the stop rod 12 is adjusted according to the rotation speed of the dicing blade 3, so that when the heat dissipation holes of the dicing blade 3 rotate to the position of the laser emitter 9 and the laser receiver 10, the stop rod 12 can just block the heat dissipation holes. The reciprocating movement of the stop rod 12 will cause the mounting base 6 to vibrate. The vibration force is transmitted to the first elastic telescopic rod 71, the first magnet 72 and the second magnet 73. The elastic buffer of the first elastic telescopic rod 71 and the repulsive buffer of the first magnet 72 and the second magnet 73 reduce the vibration of the L-shaped rod 8 and improve the testing accuracy.

[0023] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A blade damage detection mechanism for a dicing machine, comprising a body (1), wherein a dicing blade (3) is installed inside the body (1) via a dicing seat (2), and a detection seat (4) is fixed at the front end of the dicing seat (2), wherein the detection seat (4) is located at the upper left corner of the dicing blade (3); Its features are: It also includes a hydraulic rod (5), which is fixed to the top of the cavity inside the detection seat (4). The bottom output end of the hydraulic rod (5) is connected to a mounting seat (6). The mounting seat (6) is connected to L-shaped rods (8) on both sides through shock-absorbing components. The laser emitter (9) and laser receiver (10) are fixed to each other on the inner side of the vertical area of ​​the two L-shaped rods (8). The bottom of the mounting seat (6) is connected to a stop bar (12) through a second elastic telescopic rod (11). A movable component is provided between the inside of the mounting seat (6) and the stop bar (12) for pushing the stop bar (12) to move up and down. A cleaning assembly is disposed in the lower half of the L-shaped rod (8) and is used to clean the laser emitter (9) and the laser receiver (10).

2. The blade damage detection mechanism for a dicing machine according to claim 1, characterized in that: The shock absorption assembly includes a first elastic telescopic rod (71), which is fixed between the mounting base (6) and the L-shaped rod (8). The outer end face of the mounting base (6) and the inner end face of the transverse region of the L-shaped rod (8) are respectively fixed with a first magnet (72) and a second magnet (73).

3. The blade breakage detection mechanism for a dicing machine according to claim 2, characterized in that: The first magnet (72) and the second magnet (73) are symmetrically arranged about the central axis of the first elastic telescopic rod (71), and the first magnet (72) and the second magnet (73) are magnetically repulsive.

4. The blade breakage detection mechanism for a dicing machine according to claim 3, characterized in that: The baffle (12) is designed as a gate-shaped structure, and the vertical areas at both ends of the baffle (12) correspond to the distribution positions of the laser emitter (9) and the laser receiver (10).

5. The blade breakage detection mechanism for a dicing machine according to claim 4, characterized in that: The movable component includes a guide plate (131), which is mounted in the mounting base (6) by a micro motor. A guide rod (132) is rotatably mounted on the eccentric protrusion on the outer side of the guide plate (131). A movable rod (133) is rotatably mounted on the bottom protrusion of the guide rod (132). The movable rod (133) is rotatably mounted on the top of the stop bar (12).

6. The blade breakage detection mechanism for a dicing machine according to claim 5, characterized in that: The cleaning assembly includes a cleaning seat (141), which is rotatably mounted at the bottom of the vertical region of an L-shaped rod (8) via a torsion spring and bearing. The cleaning seat (141) has an "L"-shaped structure. A horizontal column (142) is embedded in the horizontal region of the cleaning seat (141). The horizontal column (142) slides within the L-shaped rod (8). The outer end of the horizontal column (142) abuts against a push plate (143). The push plate (143) is fixed to the inner wall of the detection seat (4). (141) A cleaning roller (144) is mounted on the top of the vertical area by means of a bearing. A vertical column (145) is mounted on the bottom of the cleaning roller (144). The annular protrusion in the middle of the vertical column (145) is connected to the bottom of the cleaning roller (144) by a spring. A base plate (146) is provided at the bottom of the vertical column (145). The base plate (146) is fixed laterally at the bottom edge of the L-shaped rod (8). A pusher (147) is fixed at the middle of the top of the base plate (146).

7. The blade damage detection mechanism for a dicing machine according to claim 6, characterized in that: The inner end protrusion of the horizontal column (142) slides in contact with the spiral cavity inside the cleaning seat (141). The push plate (143) at the outer end of the horizontal column (142) is designed as an inclined structure. The lateral movement of the horizontal column (142) is used to drive the cleaning seat (141) to rotate.

8. The blade damage detection mechanism for a dicing machine according to claim 7, characterized in that: The protrusion at the top of the vertical column (145) slides and fits inside the spiral cavity of the cleaning roller (144), and the movement of the vertical column (145) is used to drive the cleaning roller (144) to rotate.

9. The blade breakage detection mechanism for a dicing machine according to claim 8, characterized in that: The pusher (147) at the bottom of the vertical column (145) is designed as a hemispherical structure, and the base plate (146) at the bottom of the pusher (147) is designed as an arc structure. The center of the arc of the base plate (146) corresponds to the rotation center of the cleaning seat (141).

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