Millimeter wave terahertz multi-parameter comprehensive rapid test system and test method
By designing a millimeter-wave terahertz multi-parameter integrated rapid testing system, and utilizing the coordinated control of the vector network analyzer host and modules, the problems of low testing efficiency and high cost are solved, and multi-parameter testing is completed efficiently.
Patent Information
- Application Number
- CN202511564089.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-30
- Publication Date
- 2026-02-06
AI Technical Summary
In the existing technology, the testing of millimeter-wave terahertz devices requires switching between different test instruments and architectures, resulting in low testing efficiency and high cost, which makes it difficult to meet the needs of device research and development and production.
Design a millimeter-wave terahertz multi-parameter integrated rapid test system. Utilize a vector network analyzer host, an intermodulation test frequency extension module, and an S-parameter test module, and achieve rapid switching and execution of multi-parameter tests through coordinated control of system software.
It enables multi-parameter testing to be completed with a single interconnection within a single system, significantly improving testing efficiency and reducing equipment procurement and management costs.
Smart Images

Figure CN121476761A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of electronic test and measurement technology, specifically relating to a millimeter-wave terahertz multi-parameter integrated rapid test system and test method. Background Technology
[0002] With the rapid development of applications such as 5G / 6G communication, high-resolution radar, and biological / pharmaceutical spectral analysis, the operating frequency bands required for testing and measurement have expanded to millimeter-wave and even terahertz bands. Considering the transmission loss in high-frequency bands, testing and measurement in the millimeter-wave and terahertz bands often adopts a host plus frequency extension module (device) approach to achieve higher frequency band expansion, making the test port as close as possible to the object under test and reducing transmission loss during the process.
[0003] Millimeter-wave terahertz devices, such as low-noise amplifiers and power amplifiers, play a crucial role in millimeter-wave terahertz systems, directly determining core indicators such as system transmit power and sensitivity. Therefore, before use, it is often necessary to test numerous parameters, including power parameters, spectrum parameters, intermodulation parameters, and S-parameters, to comprehensively evaluate their performance. Power parameter testing generally requires a signal source and a signal source spread spectrum device to provide drive, and a power meter is used for power measurement. Spectrum parameter testing generally requires a signal source and a signal source spread spectrum device to provide drive, and a spectrum analyzer and spectrum spread spectrum device are used for spectrum analysis of the corresponding frequency band. Intermodulation parameters require two sets of signal sources, signal source spread spectrum devices, combiners, etc., to provide two-tone signals, and a spectrum analyzer and spectrum analyzer spread spectrum device are used for intermodulation signal analysis. S-parameter testing requires a vector network analyzer and S-parameter test modules to perform network parameter testing. Different parameters require different test instruments. On the one hand, switching and interconnecting between instruments leads to low testing efficiency; on the other hand, testing costs are high, causing great inconvenience to the research and development and production of these devices.
[0004] Traditional millimeter-wave and terahertz devices under test require switching between different test instruments and architectures for different test parameters. Different test scenarios are shown in Figure 1. Scenario 1 shows a schematic diagram of a test system for the scattering parameters (S-parameters) of the device under test, which generally includes a vector network analyzer host and a scattering parameter test spread spectrum device. Scenario 2 shows a schematic diagram of a test system for the power of the device under test, which generally includes a signal source host, a signal source spread spectrum device, a mechanically adjustable attenuator for adjusting the power, a power probe, and a host. The signal source and spread spectrum device provide the required power to the device under test, the attenuator adjusts the input power, and the output is tested using a power probe. Scenario 3 presents a schematic diagram of a spectrum testing system for a device under test (DUT). This typically includes a signal source host, a signal source spread spectrum device, a mechanically adjustable attenuator for power adjustment, a spectrum analyzer, and a frequency expansion device. The signal source and spread spectrum device provide the required power to the DUT, and the spectrum analyzer at the output end performs spectrum analysis of the DUT's output signal. Scenario 4 presents a schematic diagram of an intermodulation parameter testing system for a DUT. This typically includes two sets of signal sources and frequency expansion devices, couplers, adjustable attenuators, etc., to generate the required two-tone signals for testing. The attenuators adjust the power of the two-tone signals, and the spectrum analyzer and frequency expansion device at the output end perform intermodulation signal analysis of the DUT's output signal.
[0005] Since S-parameters, spectral parameters, power parameters, and intermodulation parameters are all core parameters in the research, development, and production of millimeter-wave terahertz devices, sub-units, and application systems, especially in the development of power devices such as amplifiers, it is necessary to test all of these parameters to comprehensively evaluate device performance. In this case, it is necessary to follow... Figure 1 Different test systems are built and disassembled to meet the testing requirements of different parameters. As a result, on the one hand, the construction and disassembly of different test systems leads to low testing efficiency, and on the other hand, the large number of instrument requirements also results in expensive testing costs, which brings great inconvenience to the research and development and production of millimeter-wave terahertz devices, analysis and application systems. Summary of the Invention
[0006] In view of the above-mentioned technical problems in the prior art, the present invention proposes a millimeter-wave terahertz multi-parameter integrated rapid testing system and testing method, which is reasonably designed, overcomes the shortcomings of the prior art, and has good results.
[0007] To achieve the above objectives, the present invention adopts the following technical solution: A millimeter-wave terahertz multi-parameter integrated rapid testing system includes: The vector network analyzer host is configured to provide radio frequency excitation signals, receive measurement signals, and perform signal analysis and processing. The two-port external signal source is configured to provide additional RF input f to the intermodulation test frequency extension module during co-frequency testing. RF2 During inter-frequency testing, its two output ports provide f to the intermodulation test frequency extension module. RF1 and f RF2 Input signal; The intermodulation test frequency extension module, connected to the vector network analyzer host and signal source, is configured to receive at least two RF input signals provided by the host and generate a dual-tone millimeter wave / terahertz test signal with programmable frequency and power based on it. The S-parameter test module, connected to the vector network analyzer host, is configured to transmit and receive signals for S-parameter measurement and / or spectrum analysis. The vector network analyzer host, signal source, intermodulation test module, and S-parameter test module work together through system software. With a single hardware connection, they can perform comprehensive testing of multiple parameters, including S-parameters, power, spectrum, and intermodulation parameters of the device under test, through software configuration switching.
[0008] Preferably, the two-tone intermodulation test frequency extension module includes: The first signal generation unit is configured to generate a first output signal; The second signal generation unit is configured to generate a second output signal; The frequency interval between the first output signal and the second output signal can be programmed and together they form a two-tone signal.
[0009] Preferably, the first signal generation unit and / or the second signal generation unit integrate a voltage-controlled attenuator, and the digital-to-analog converter of the vector network analyzer host is used for programmable tuning to achieve programmable adjustment of output power and closed-loop amplitude stabilization.
[0010] Preferably, when used to test a device under test (DUT) whose input and output frequencies are the same: The output of the two-tone intermodulation test module is connected to the input of the device under test (DUT) to provide the test excitation signal; The connection end of the S-parameter test module is connected to the output end of the device under test (DUT) to receive the response signal of the DUT; During intermodulation testing, the S-parameter testing module works in conjunction with the vector network analyzer host to function as a spectrum analyzer.
[0011] Preferably, when used to test a device under test with different input and output frequencies: The output of the dual-tone intermodulation test module is connected to the RF port of the device under test (DUT) to provide a dual-tone RF input signal. The connection terminal of the S-parameter test module is connected to the local oscillator port of the device under test to provide the local oscillator excitation signal; The intermediate frequency output terminal of the device under test is connected to a receiving port of the vector network analyzer host; The vector network analyzer host performs spectrum analysis on the intermediate frequency output signal to calculate the intermodulation parameters.
[0012] Furthermore, this invention also mentions a rapid multi-parameter integrated testing method for millimeter-wave terahertz systems, which employs a rapid multi-parameter integrated testing system for millimeter-wave terahertz systems as described above, and includes the following steps: Step 1: System Connection and Calibration: Connect the device under test to the test system and perform system error calibration and power calibration; Step 2: Test mode selection and configuration: Select the type of parameter to be tested through the system software and configure the corresponding test parameters; Step 3: Signal excitation and measurement: The required test signals are generated by controlling the two-tone intermodulation test module and the S-parameter test module through system software, and the vector network analyzer host is controlled to acquire the signals; Step 4: Parameter Calculation and Display: The system software processes the collected data to calculate and display the corresponding S-parameters, power values, spectrum diagrams, or intermodulation parameters.
[0013] Preferably, in the test mode selection and configuration step, a specific signal channel of the dual-tone intermodulation test module is turned on or off by software commands to dynamically switch between the intermodulation test mode and the S-parameter / spectrum test mode.
[0014] The beneficial technical effects of this invention are as follows: 1. High testing efficiency: A single interconnection of one system allows for testing of multiple parameters, significantly improving testing efficiency; 2. Low testing cost: Only a vector network analyzer, cross-modulation test module, and S-parameter test module are needed to enable multi-parameter testing capabilities, significantly reducing equipment procurement and management costs.
[0015] This invention uses a single external two-port signal source in conjunction with the built-in signal source of a vector network analyzer (VNA) to accomplish this task. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of a testing system with different parameters in the prior art.
[0017] Figure 2 This is a diagram of the architecture of the synchronous multi-parameter comprehensive rapid testing system of the present invention.
[0018] Figure 3 This is a diagram of the architecture of the multi-parameter integrated rapid testing system for different frequencies according to the present invention. Detailed Implementation
[0019] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments: This invention proposes a millimeter-wave terahertz multi-parameter integrated rapid testing system. Its core is: based on a multi-port vector network analyzer host, it integrates a dual-tone intermodulation test frequency extension module and an S-parameter test frequency extension module, and realizes rapid switching and execution of multi-parameter test functions through coordinated control of system software.
[0020] Based on whether the input and output ports of the device under test operate at the same frequency, there are two main system architectures. One of them is the same-frequency multi-parameter comprehensive rapid testing system architecture, such as... Figure 2 As shown, the same-frequency testing system is mainly for devices, components, and systems such as low-noise amplifiers, power amplifiers, and filters that operate at the same input and output frequencies; the architecture of the multi-parameter integrated rapid testing system for different frequencies is as follows: Figure 3 As shown, the frequency conversion testing system is designed for devices, components, and systems that operate at different input and output frequencies, such as mixers and receivers.
[0021] Example 1: Multi-parameter test at the same frequency; The working principle and process of the synchronous multi-parameter comprehensive rapid testing system are explained below: like Figure 2 As shown, the system includes a four-port vector network analyzer host, a two-port external signal source, an intermodulation test frequency extension module, an S-parameter test module, and interconnecting cables.
[0022] The function of a two-port external signal source is as follows: In a co-frequency testing system: one port is utilized to provide an additional RF input f for the intermodulation test frequency extension module. RF2 ; In the frequency conversion testing system: its two ports are used simultaneously to generate f respectively. RF1 and f RF2 This provides two independent excitations for the intermodulation module to generate two-tone signals.
[0023] Key Connections: The vector network analyzer main unit connects to the intermodulation test module and the S-parameter test module via standard interconnects. One built-in or external signal source port of the vector network analyzer provides the first local oscillator signal to the intermodulation test module, while another signal source port is dedicated to providing RF input to the second signal channel within the intermodulation test frequency extension module to generate the required two-tone signal.
[0024] Two-tone signal generation: The intermodulation test frequency extension module contains two signal generation units. The first signal generation unit takes the input signal... Frequency multiplier The frequency of generation is times that of the previous generation. The second signal generation unit will generate the input signal. Frequency multiplier The frequency of generation is times that of the previous generation. The signal. Through precise control. and , causing and Satisfying the formula: ,in The dual-tone frequency interval (e.g., 1MHz to 50MHz) is set by the user.
[0025] Power control: The signal generation unit in the intermodulation test frequency extension module integrates a voltage-controlled attenuator. The attenuation is adjusted by the output voltage of the programmable digital-to-analog converter of the vector network analyzer host, and closed-loop amplitude stabilization is performed in combination with intermediate frequency detection, thereby achieving precise and programmable control of the output power.
[0026] Multi-parameter testing implementation: Intermodulation Test: The two-tone signal output of the intermodulation test frequency extension module is activated by the programmable controller. After being amplified by the device under test (DUT), the output signal and intermodulation products enter the test channel of the S-parameter test module. At this time, the S-parameter test module works in conjunction with the vector network analyzer host as a spectrum analyzer to perform spectrum analysis on the signal. The system software automatically calculates and displays parameters such as the third-order intermodulation rejection ratio (IRR), the fifth-order intermodulation rejection ratio (IRR), and the TOI.
[0027] S-parameter testing: The second signal generation unit of the intermodulation test frequency extension module is shut down by programmable control, causing the system to return to the standard S-parameter test mode. The vector network analyzer host drives the intermodulation test module and the S-parameter test module to complete the S-parameter measurement of the device under test.
[0028] Power test: Under S-parameter test or single-tone excitation, the output power is adjusted by programmable control, and the output power of the device under test is directly read by using the test channel of the S-parameter test module (which acts as a power detection device at this time) or the receiver power measurement function of the vector network analyzer, thus completing the power parameter test.
[0029] Spectrum testing: Similar to the S-parameter testing mode, the programmable intermodulation test frequency extension module outputs a single-tone signal, and the test channel of the S-parameter test module works with the vector network analyzer host to perform spectrum analysis and obtain the spectrum parameters of the device under test (such as harmonics, spurious signals, etc.).
[0030] The details are as follows: The vector network analyzer host is interconnected with the intermodulation test module and the S-parameter test module using the normal S-parameter test frequency extension interconnection method. At this time, the frequency of the S-parameter test module port and the output frequency of the first signal generation unit of the intermodulation test module are both f. O1 Its frequency is fRF1 *M, simultaneously, the vector network analyzer host programmable signal source port 1 provides an additional RF input f to the intermodulation test frequency extension module. RF2 This is used to excite the second signal generation unit in the intermodulation test module to generate a two-tone signal f. O2 Its frequency is f RF2 *N, in order to meet the requirements of cross-conversion testing, should satisfy the following formula (1), as follows: (1); Frequency interval of dual-tone signals Supports user-configurable settings, ranging from 1MHz to 50MHz. The amplitude of this two-tone signal is programmable. The programmable tuning method involves tuning the voltage-controlled attenuator built into the signal generation unit of the two-tone intermodulation test module by tuning the DAC output voltage to control the output power, while simultaneously achieving closed-loop amplitude stabilization based on the intermediate frequency. Power tuning ensures the amplitude of the two-tone signal meets the intermodulation test requirements. After passing through the device under test (DUT), the two-tone signal enters the test channel of the S-parameter test module. Here, the S-parameter test module acts as a spectrum analysis module, working with the vector network analyzer to perform spectrum analysis of the intermodulation signal, thereby calculating and displaying intermodulation parameters such as third-order intermodulation rejection ratio (DIR), fifth-order DIR, and TOI.
[0031] The system also possesses the capability to test parameters such as S-parameters, spectrum, and power. When testing S-parameters, the second signal generation unit of the intermodulation test spread spectrum module is programmably shut down. At this time, the module has S-parameter testing capabilities and can work with the 2-port S-parameter test module to complete the scattering parameter testing of the device under test (DUT). Since the output power of both the intermodulation test module and the S-parameter test module is programmably tuned, the output power of the DUT under different input powers can be tested, thus representing the DUT's power parameters. When testing spectrum parameters, similar to S-parameter testing, the second signal generation unit of the intermodulation test spread spectrum module is programmably shut down. The intermodulation test spread spectrum module then provides signal excitation to the DUT, and the 2-port S-parameter test module's test channel acts as a spectrum analysis module, working with the vector network analyzer host to complete the spectrum parameter analysis of the DUT. Thus, with this system, multiple parameters such as intermodulation, S-parameters, power, and spectrum can be tested with a single interconnect.
[0032] Example 2: Multi-parameter test at different frequencies; The system composition is similar to that of the same frequency system, but the connection method and function allocation have been optimized for frequency conversion devices. Take the test of the down-frequency mixer (receiver) as an example.
[0033] Key Connection: The vector network analyzer host maintains a standard S-parameter test connection with the S-parameter test module, which provides the excitation signal f to the local oscillator (LO) port of the mixer. O3 (f)O3 = f RF3 * L). The two signal source ports of the vector network analyzer host (or the two ports of an external signal source) provide input f to the two signal channels of the intermodulation test module. RF1 and f RF2 This generates a radio frequency (RF) input dual-tone signal f. O1 and f O2 .
[0034] Test procedure: Dual-tone radio frequency signal f O1 and f O2 The local oscillator signal f is input to the RF port of the mixer. O3 Input to the LO port. The intermediate frequency (IF) signal generated by the mixer is output to the receive port (e.g., port 1) of the vector network analyzer host.
[0035] Multi-parameter testing implementation: Intermodulation test: The vector network analyzer host performs spectrum analysis on the received intermediate frequency signal, identifies the intermodulation products after frequency mixing transformation, and calculates the intermodulation parameters under mixer conditions.
[0036] S-parameter test: With the two-tone signal of the intermodulation test module turned off, or it operating in single-tone mode, the system can test the standing wave (SWR) of the mixer at different ports (e.g., S-parameters). 11 , S 22 And frequency conversion loss (as a transmission parameter).
[0037] Specific details are as follows Figure 3 As shown, this system adds an independent two-port signal source to the system based on Embodiment 1.
[0038] The working principle and process of the multi-parameter integrated rapid testing system for different frequencies are explained below: Considering that most transceivers in the terahertz band are superheterodyne type, this patent focuses on multi-parameter testing of the receiver, primarily down-mixing frequency conversion mode. The system composition is as follows: Figure 3 As shown, and Figure 2 The difference lies in the altered interconnection method. The vector network analyzer host still connects to the S-parameter test module using the normal S-parameter test frequency expansion interconnection method. Port 2 of the vector network analyzer provides f to the signal generation unit in the S-parameter test module. RF3 Input signal, generate f O3 The output signal has a frequency of f. RF3 * L should meet the mixer's local oscillator (LO) frequency and power requirements, ensuring the mixer operates in normal mode; the two output ports of the signal source provide f to the intermodulation test module. RF1 and f RF2The input signal, at this time the frequency output of the first signal generating unit of the intermodulation test module is still f. O1 Its frequency is f RF1 *M, the second signal generation unit generates a two-tone signal f. O2 Its frequency is f RF2 *N, to meet the requirements of intermodulation testing, still satisfy the frequency difference requirement of Formula 1, f O1 and f O2 It can provide the input RF dual-tone signal for the mixer. The intermediate frequency signal output by the mixer is returned to port 1 of the vector network analyzer to complete the intermodulation spectrum analysis, thereby calculating and displaying the third-order intermodulation rejection ratio, fifth-order intermodulation rejection ratio, TOI, etc. in the mixer's down-mixing state.
[0039] Different mixer cycles require replacing the S-parameter test module connected to the local oscillator (LO) port with a module corresponding to the frequency band. Taking a mixer test in the 110GHz–170GHz range as an example, if it's fundamental frequency mixing, the intermodulation test module operates at 110GHz–170GHz, and the S-parameter test module also operates at 110GHz–170GHz. If it's second harmonic mixing, the intermodulation test module's operating frequency remains unchanged at 110GHz–170GHz, but the S-parameter test module's operating frequency needs to be changed to 60GHz–90GHz to drive the mixer in the 120GHz–170GHz band. During S-parameter testing, the signal source PORT1 is turned off to return to normal S-parameter test mode. At this time, the power of the first signal generation unit of the intermodulation test module or the S-parameter test module can be programmed and tuned to test the changes in device characteristics under different RF and LO input powers. This allows testing of the mixer's down-conversion loss and RF port VSWR at different power levels. 11 Local oscillator port standing wave S 22 , intermediate frequency port standing waves, etc.
[0040] The key point of this invention is the proposal of a millimeter-wave terahertz multi-parameter integrated rapid testing system. This system enables a single interconnection of multiple parameters, including device power, spectrum, S-parameters, and intermodulation parameters, significantly improving testing efficiency and reducing testing costs. The invention has the following two protection points: 1. Overall test architecture: The proposed multi-parameter test system architecture is simple and efficient, and can perform multi-parameter testing of test objects operating at the same frequency and different frequencies. 2. Multi-parameter testing implementation method: By combining software algorithms with power tunable intermodulation testing modules, multiple parameters such as intermodulation, spectrum, S-parameters, and power can be rapidly tested and analyzed through software control within a single system architecture.
[0041] Of course, the above description is not intended to limit the present invention, and the present invention is not limited to the examples given above. Any changes, modifications, additions or substitutions made by those skilled in the art within the scope of the present invention should also fall within the protection scope of the present invention.
Claims
1. A millimeter-wave terahertz multi-parameter integrated rapid testing system, characterized in that, include: The vector network analyzer host is configured to provide radio frequency excitation signals, receive measurement signals, and perform signal analysis and processing. The two-port external signal source is configured to provide additional RF input to the intermodulation test frequency extension module during co-frequency testing. f RF2 During inter-frequency testing, its two output ports provide frequency extension for the intermodulation test module. f RF1 and f RF2 Input signal; The intermodulation test frequency extension module is connected to the vector network analyzer host and a two-port external signal source. It is configured to receive at least two RF input signals provided by the host and generate a dual-tone millimeter wave / terahertz test signal with programmable frequency and power based on these signals. The S-parameter test module, connected to the vector network analyzer host, is configured to transmit and receive signals for S-parameter measurement and / or spectrum analysis. The vector network analyzer host, two-port external signal source, intermodulation test module, and S-parameter test module work together through system software. With a single hardware connection, they can perform comprehensive testing of multiple parameters, including S-parameters, power, spectrum, and intermodulation parameters of the device under test, through software configuration switching.
2. The millimeter-wave terahertz multi-parameter integrated rapid testing system according to claim 1, characterized in that, The two-tone intermodulation test frequency extension module includes: The first signal generation unit is configured to generate a first output signal; The second signal generation unit is configured to generate a second output signal; The frequency interval between the first output signal and the second output signal can be programmed and together they form a two-tone signal.
3. The millimeter-wave terahertz multi-parameter integrated rapid testing system according to claim 2, characterized in that, The first signal generation unit and / or the second signal generation unit integrate a voltage-controlled attenuator, which is then tuned by the digital-to-analog converter of the vector network analyzer host to achieve programmable adjustment of output power and closed-loop amplitude stabilization.
4. The millimeter-wave terahertz multi-parameter integrated rapid testing system according to claim 2, characterized in that, When used to test a device under test (DUT) with input and output frequencies in sync: The output of the two-tone intermodulation test module is connected to the input of the device under test (DUT) to provide the test excitation signal; The connection end of the S-parameter test module is connected to the output end of the device under test (DUT) to receive the response signal of the DUT; During intermodulation testing, the S-parameter testing module works in conjunction with the vector network analyzer host to function as a spectrum analyzer.
5. The millimeter-wave terahertz multi-parameter integrated rapid testing system according to claim 1, characterized in that, When used to test a device under test with different input and output frequencies: The output of the dual-tone intermodulation test module is connected to the RF port of the device under test (DUT) to provide a dual-tone RF input signal. The connection terminal of the S-parameter test module is connected to the local oscillator port of the device under test to provide the local oscillator excitation signal; The intermediate frequency output terminal of the device under test is connected to a receiving port of the vector network analyzer host; The vector network analyzer host performs spectrum analysis on the intermediate frequency output signal to calculate the intermodulation parameters.
6. A rapid multi-parameter integrated testing method for millimeter-wave terahertz waves, characterized in that, The millimeter-wave terahertz multi-parameter integrated rapid testing system as described in claim 1 includes the following steps: Step 1: System Connection and Calibration: Connect the device under test to the test system and perform system error calibration and power calibration; Step 2: Test mode selection and configuration: Select the type of parameter to be tested through the system software and configure the corresponding test parameters; Step 3: Signal excitation and measurement: The required test signals are generated by controlling the two-tone intermodulation test module and the S-parameter test module through system software, and the vector network analyzer host is controlled to acquire the signals; Step 4: Parameter Calculation and Display: The system software processes the collected data to calculate and display the corresponding S-parameters, power values, spectrum diagrams, or intermodulation parameters.
7. The rapid multi-parameter integrated testing method for millimeter-wave terahertz waves according to claim 6, characterized in that, In the test mode selection and configuration steps, specific signal channels of the dual-tone intermodulation test module are turned on or off via software commands to dynamically switch between intermodulation test mode and S-parameter / spectrum test mode.