Plasma washing equipment for POU tail gas treatment

Abstract

The invention relates to the technical field of POU tail gas treatment, and discloses plasma washing equipment for POU tail gas treatment, which comprises a box body, a water tank is fixed on the inner wall of the bottom of the box body through bolts, a communicating pipe is fixed above the water tank through bolts, a washing pipe is welded on one side of the communicating pipe, and a liquid supply pipe is welded on the top of the washing pipe. An ionization pipe is welded to the upper portion of the liquid supply pipe, and the top of the ionization pipe is provided with a gas inlet pipe and a plasma spray head which are connected with an external POU tail gas pipe. Through cooperation of a plurality of assemblies, the problem that particulate matter blocks a vent hole of the breather pipe is effectively solved, the internal gas pressure of equipment is prevented from abnormally rising, and continuous and efficient operation of tail gas treatment is guaranteed; meanwhile, through the blocking and delaying effects of the filter cloth, the high-activity particles have more sufficient reaction time before entering the washing link, the possibility that the high-activity particles and water generate side reaction to generate new pollutants is reduced, the tail gas purification effect is improved, and the follow-up water treatment difficulty is also reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of POU tail gas treatment, in particular to a plasma water washing equipment for POU tail gas treatment. BACKGROUND

[0002] POU tail gas treatment is a kind of fine and source "flue gas treatment" for special process waste gas, which is essentially a professional branch in the field of flue gas treatment, and generally refers to the key technology for on-site and efficient purification of toxic and harmful waste gas generated in the production process in the semiconductor industry, which is usually installed near the process equipment. Common treatment methods include thermal treatment (high temperature oxidation), wet treatment (spray washing), dry adsorption, catalytic oxidation or combined process.

[0003] At present, there is also a POU tail gas treatment on the market, which uses plasma water washing method, that is, through the synergistic effect of plasma and water, the tail gas is deeply purified. Plasma can produce a large number of high activity particles, which can quickly oxidize and decompose organic pollutants and odor substances in the tail gas. At the same time, the water washing process can effectively absorb dust, acid gas and part of the soluble pollutants in the tail gas, realizing the dual purification effect of physical absorption and chemical oxidation.

[0004] However, in the process of plasma ionization, acid gas is easily converted into salt particles. If these particles directly enter the air pipe, they are easy to block the exhaust hole of the air pipe, causing the internal gas pressure of the equipment to rise, affecting the tail gas treatment efficiency and even causing safety hazards. In addition, the water washing unit and the plasma generating unit of the traditional plasma water washing equipment are mostly in series structure. After the tail gas is treated by plasma, it directly enters the water washing link. Part of the high activity particles that have not fully reacted may have side reactions with water to generate new pollutants, reducing the purification effect and increasing the difficulty of subsequent water treatment. Therefore, a plasma water washing equipment for POU tail gas treatment with high integration and stable purification efficiency is provided. SUMMARY

[0005] In view of the defects in the prior art, the present application provides a plasma water washing equipment for POU tail gas treatment, which mainly solves the problems that particles directly enter the air pipe, easily block the exhaust hole of the air pipe, cause the internal gas pressure of the equipment to rise, affect the tail gas treatment efficiency and even cause safety hazards, and that high activity particles that have not fully reacted may have side reactions with water to generate new pollutants, reduce the purification effect and increase the difficulty of subsequent water treatment.

[0006] To achieve the above purpose, the present application provides the following technical scheme:

[0007] The utility model provides a kind of plasma water washing equipment for POU tail gas treatment, including box, the inner wall of the bottom of box is fixed with water tank by bolt, the upper of water tank is fixed with communicating pipe by bolt, the side of communicating pipe is welded with water washing pipe, the top of water washing pipe is welded with liquid supply pipe, the upper of liquid supply pipe is welded with ionization pipe, the top of ionization pipe is equipped with the air inlet pipe connected with outside POU tail gas pipe and plasma jet, the upper of communicating pipe is welded with water bath pipe, the top of water bath pipe is welded with air outlet pipe for discharging tail gas of processing completion;

[0008] The end of the air inlet pipe inserted into ionization pipe is equipped with air outlet head, air outlet head is towards the "flame" of plasma jet, the bottom of ionization pipe is welded with air pipe inside, air pipe is used to connect ionization pipe and liquid supply pipe, the top of air pipe is equipped with filter cloth, filter cloth is used to block particulate matter and delay gas into air pipe, the ionization pipe is equipped with cleaning assembly for cleaning the surface of filter cloth, the side of box is equipped with liquid supply assembly for driving water flow in water tank to water washing pipe and communicating pipe, the bottom of air pipe is equipped with air outlet assembly for uniformly dispersing gas, the side of water washing pipe is equipped with water washing assembly for secondary water washing of gas.

[0009] Further, the cleaning assembly includes a rotating scraper that rotates on the circumferential outer wall of the air pipe, the inner wall of the rotating scraper is in contact with the filter cloth, the top of the air pipe is welded with a mounting cover, the filter cloth is located between the mounting cover and the air pipe, the outer wall of the ionization pipe is fixed with an electric push rod by bolts on one side, the movable end of the electric push rod is fixed with a push frame by bolts, one end of the push frame is rotatably connected with a force arm, the force arm is rotatably connected with the rotating scraper, and the force arm is located on one side of the rotating center of the rotating scraper.

[0010] On the basis of the foregoing scheme, the liquid supply assembly includes a water pump fixed to the inner wall of one side of the box, the water inlet end of the water pump is provided with a water inlet pipe, and the water outlet end is provided with a water outlet pipe, the water inlet pipe is inserted into the bottom of the water tank, and the water outlet pipe is inserted into the bottom of the communicating pipe.

[0011] As a further scheme of the present application, the air outlet assembly includes a spiral pipe fixed to the bottom of the air pipe, and the spiral part of the spiral pipe is located in the water washing pipe, a plurality of air outlet holes are formed in the top of the spiral pipe.

[0012] Further, the water washing assembly includes a water passing pipe fixed to one side of the water washing pipe, one end of the water passing pipe is inserted into the water bath pipe, the water passing pipe located in the water bath pipe is provided with a liquid distribution pipe, a plurality of atomizing nozzles are arranged on the bottom of the liquid distribution pipe, a mesh frame is fixed in the water bath pipe below the atomizing nozzles, and the mesh frame is in a conical structure.

[0013] On the basis of the foregoing scheme, the middle part of the water pipe is provided with a variable-diameter tee, the other end of the variable-diameter tee is provided with a one-way valve, the other end of the one-way valve is provided with a elbow pipe inserted into the liquid supply pipe, a gas guide plate is welded in the liquid supply pipe, a partition plate is arranged in the water washing pipe, the partition plate is used for separating the water in the water washing pipe into two parts, the bottom of the partition plate is provided with a drain pipe for draining the solution in the upper part.

[0014] As a further scheme of the present application, a connecting pipe is arranged between the liquid supply pipe and the water bath pipe, and the connecting pipe is arranged obliquely, the gas guide plate is arranged above the connecting position of the connecting pipe and the liquid supply pipe, and the screen plate frame is arranged above the connecting position of the connecting pipe and the water bath pipe.

[0015] Further, a plurality of air permeation holes are arranged on the circumferential outer wall of the upper end of the liquid supply pipe, and the air permeation holes are arranged above the gas guide plate.

[0016] On the basis of the foregoing scheme, the bottom end of the ionization pipe is provided with a drain port, and a plug is inserted into the drain port.

[0017] As a further scheme of the present application, the front side of the box body is provided with a door plate, a plurality of heat dissipation holes are arranged on one side of the box body, and a plasma generator is fixed on the box body above the water pump.

[0018] Compared with the prior art, the present application provides a plasma water washing equipment for POU tail gas treatment, which has the following beneficial effects:

[0019] 1. The present application effectively avoids the problem of particle blocking the air vent of the vent pipe through the cooperation of multiple components, prevents the abnormal increase of the internal gas pressure of the equipment, and ensures the continuous and efficient operation of the tail gas treatment. At the same time, through the blocking and delaying effect of the filter cloth, the high-activity particles have more sufficient reaction time before entering the water washing link, reducing the possibility of generating new pollutants through side reactions with water, improving the tail gas purification effect, and reducing the difficulty of subsequent water treatment.

[0020] 2. The present application can realize automatic cleaning of the particles on the surface of the filter cloth without affecting the normal flow of the gas, has the characteristics of simple structure and reliable operation, provides a strong guarantee for the stable operation of the entire plasma water washing equipment, and further improves the efficiency and safety of the equipment in treating POU tail gas.

[0021] 3. The present application can divide the gas into a large number of small bubbles through the arrangement of multiple air outlets at different positions of the spiral pipe, increase the contact area between the gas and the water, improve the water washing efficiency, and make the soluble pollutants and unreacted active particles in the gas more fully contact with the water and be absorbed.

[0022] 4. The application builds an efficient secondary water washing system through the cooperation of the water pipe, the liquid distribution pipe, the atomizing nozzle and the screen frame, forms progressive purification with the preliminary water washing link, significantly reduces the residual amount of pollutants in the tail gas, and provides a key guarantee for the final clean tail gas.

[0023] 5. The application realizes the cleanliness control of the secondary water washing water through the cooperation of the variable diameter tee, the check valve, the air guide plate, the partition plate and the like, avoids the negative influence of the preliminary washed sewage in the washing pipe on the secondary water washing effect, and ensures that the secondary water washing can continuously and efficiently deeply purify the tail gas. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a three-dimensional structure schematic diagram of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0025] Figure 2 It is a right side internal structure schematic diagram of a shell of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0026] Figure 3 It is a left side internal structure schematic diagram of a shell of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0027] Figure 4 It is an ionization tube amplification structure schematic diagram of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0028] Figure 5 It is a cross-sectional structure schematic diagram of an ionization tube of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0029] Figure 6 It is a cross-sectional structure schematic diagram of a gas passing pipe of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0030] Figure 7 It is a cross-sectional structure schematic diagram of a liquid supply pipe of a POU tail gas treatment plasma water washing equipment proposed by the application;

[0031] Figure 8 It is a cross-sectional structure schematic diagram of a water bath pipe of a POU tail gas treatment plasma water washing equipment proposed by the application.

[0032] In the figure: 1, box; 2, air inlet pipe; 3, air outlet pipe; 4, door plate; 5, heat dissipation hole; 6, water tank; 7, ionization pipe; 8, water bath pipe; 9, water pump; 10, water inlet pipe; 11, water outlet pipe; 12, plasma generator; 13, plasma nozzle; 14, liquid supply pipe; 15, air permeable hole; 16, connecting pipe; 17, water washing pipe; 18, communication pipe; 19, air outlet head; 20, air passing pipe; 21, electric push rod; 22, push frame; 23, force arm; 24, rotary scraping frame; 25, filter cloth; 26, mounting cover; 27, plug; 28, water passing pipe; 29, reducing tee; 30, check valve; 31, air guide plate; 32, partition plate; 33, spiral pipe; 34, air outlet hole; 35, drain pipe; 36, liquid separation pipe; 37, atomizing nozzle; 38, screen frame. DETAILED DESCRIPTION

[0033] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the embodiments and in conjunction with the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0034] The serial numbers of components in this paper, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequence or technical meaning. The "connection" and "coupling" of the present application include direct and indirect connection (coupling) unless otherwise specified. In the description of the present application, it should be understood that the orientation or position relationship indicated by the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the device or element indicated to have a specific orientation, to be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present application.

[0035] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0036] Please refer to Figures 1-8As shown, a kind of plasma water washing equipment for POU exhaust treatment includes box 1, the inner wall of the bottom of box 1 is fixed with water tank 6 by bolt, the upper side of water tank 6 is fixed with communication pipe 18 by bolt, the side of communication pipe 18 is welded with water washing pipe 17, the top of water washing pipe 17 is welded with liquid supply pipe 14, the upper side of liquid supply pipe 14 is welded with ionization pipe 7, the top of ionization pipe 7 is equipped with the air inlet pipe 2 connected with external POU exhaust pipe and the plasma jet head 13, the upper side of communication pipe 18 is welded with water bath pipe 8, the top of water bath pipe 8 is welded with the air outlet pipe 3 for discharging exhaust gas after treatment;

[0037] The end of air inlet pipe 2 inserted into ionization pipe 7 is equipped with air outlet head 19, air outlet head 19 is directed to the "flame" (plasma flame or plasma jet) sprayed by plasma jet head 13, the bottom of ionization pipe 7 is welded with air passing pipe 20, air passing pipe 20 is used for connecting ionization pipe 7 and liquid supply pipe 14, the top of air passing pipe 20 is equipped with filter cloth 25, filter cloth 25 is used for blocking particulate matter and delaying gas into air passing pipe 20, ionization pipe 7 is equipped with cleaning assembly for cleaning the surface of filter cloth 25, one side of box 1 is equipped with liquid supply assembly for driving water flow in water tank 6 to water washing pipe 17 and communication pipe 18, the bottom of air passing pipe 20 is equipped with air outlet assembly for uniformly dispersing gas, one side of water washing pipe 17 is equipped with water washing assembly for secondary water washing of gas;

[0038] Through the above content, the simple use method of plasma water washing equipment for POU exhaust treatment is as follows:

[0039] Firstly, fill clean water in water tank 6, then guide POU exhaust gas into ionization pipe 7 through air inlet pipe 2, air outlet head 19 directs exhaust gas to the "flame" area sprayed by plasma jet head 13, so that pollutants in exhaust gas are decomposed under the action of plasma;

[0040] After reaction, the gas carrying a small amount of particulate matter moves downward, when passing through filter cloth 25, particulate matter is blocked on the surface of filter cloth 25, and at the same time, the flow rate of gas is slowed down due to the obstruction of filter cloth 25, so as to provide more sufficient time for subsequent reaction;

[0041] The cleaning assembly regularly cleans the particulate matter accumulated on the surface of filter cloth 25, so as to prevent filter cloth 25 from being blocked and affecting gas flow;

[0042] Subsequently, the gas enters liquid supply pipe 14 through air passing pipe 20, the air outlet assembly uniformly disperses the gas and then enters the water in water washing pipe 17, the water in water washing pipe 17 preliminarily washes the gas, so as to remove part of soluble pollutants and unreacted active particles;

[0043] Then, the gas enters water bath pipe 8 through communication pipe 18, the atomized water in water bath pipe 8 further secondary washes the gas, so as to deeply purify residual pollutants;

[0044] Finally, the processed clean exhaust gas is discharged from the device through the exhaust pipe 3;

[0045] The water supply assembly continuously transports the water in the water tank 6 to the water washing pipe 17 and the communication pipe 18, ensuring the stable progress of the water washing process;

[0046] Through the cooperation of multiple components, the problem of particulate matter blocking the exhaust hole of the air pipe is effectively avoided, preventing the abnormal increase of the internal air pressure of the device and ensuring the continuous and efficient operation of the exhaust gas treatment; at the same time, through the blocking and delaying effect of the filter cloth 25, the high-activity particles have more sufficient reaction time before entering the water washing link, reducing the possibility of generating new pollutants through side reactions with water, improving the exhaust gas purification effect, and reducing the difficulty of subsequent water treatment, achieving safe and efficient treatment of POU exhaust gas.

[0047] In order to clean the surface of the filter cloth 25;

[0048] The cleaning assembly includes a rotating scraping frame 24 rotating on the outer wall of the air pipe 20, the inner wall of the rotating scraping frame 24 is in contact with the filter cloth 25, the top of the air pipe 20 is welded with a mounting cover 26, the filter cloth 25 is located between the mounting cover 26 and the air pipe 20, one side of the ionization pipe 7 is fixed with an electric push rod 21 through bolts, the movable end of the electric push rod 21 is fixed with a push frame 22 through bolts, one end of the push frame 22 is rotatably connected with a force arm 23, the force arm 23 is rotatably connected with the rotating scraping frame 24, and the force arm 23 is located on one side of the rotating center of the rotating scraping frame 24, and the bottom end of the ionization pipe 7 is provided with a discharge port, and the discharge port is inserted with a plug 27;

[0049] When the movable end of the electric push rod 21 is extended, the push frame 22 will make linear reciprocating motion, and the push frame 22 converts the linear motion into the rotating motion of the rotating scraping frame 24 through the force arm 23, so that the rotating scraping frame 24 rotates along the surface of the filter cloth 25, thereby scraping off the particulate matter accumulated on the filter cloth 25, ensuring the air permeability of the filter cloth 25 and avoiding the obstruction of gas flow;

[0050] The mounting cover 26 plays a fixing role on the filter cloth 25, preventing the filter cloth 25 from being displaced under the impact of the gas and the scraping of the rotating scraping frame 24, and ensuring that the cleaning assembly can clean the filter cloth 25 stably for a long time;

[0051] The cleaning assembly can realize the automatic cleaning of the particulate matter on the surface of the filter cloth 25 without affecting the normal flow of the gas, has the characteristics of simple structure and reliable operation, provides a strong guarantee for the stable operation of the entire plasma water washing device, and further improves the efficiency and safety of the device in treating POU exhaust gas;

[0052] When it is necessary to clean the internally accumulated particles, the accumulated particles can be discharged through the discharge port by opening the plug 27 at the bottom end of the ionization tube 7, so that the particles are quickly cleaned without the need to disassemble complex components, greatly simplifying the maintenance process of the equipment, reducing the working strength of the operating personnel, and ensuring that the equipment can maintain a high-efficiency operating state for a long time.

[0053] It should be noted that the electric push rod 21 is a prior art that cooperates with a magnetic switch, a proximity switch or a photoelectric switch to achieve precise control of the extension and retraction displacement of the push rod. Those skilled in the art can set it according to actual needs.

[0054] In order to drive the water flow in the water tank 6 into the water washing pipe 17 and the communication pipe 18;

[0055] The liquid supply assembly includes a water pump 9 fixed to the inner wall of one side of the box body 1. The water inlet end of the water pump 9 is provided with a water inlet pipe 10, and the water outlet end is provided with a water outlet pipe 11. The water inlet pipe 10 is inserted into the bottom of the water tank 6, and the water outlet pipe 11 is inserted into the bottom of the communication pipe 18.

[0056] When water supply is needed, the water pump 9 is started, and the water in the water tank 6 is sucked into the water pump 9 through the water inlet pipe 10, and after being pressurized by the water pump 9, it is delivered to the communication pipe 18 through the water outlet pipe 11. The water in the communication pipe 18 directly enters the water washing pipe 17, providing a water source for the preliminary washing process in the water washing pipe 17;

[0057] The stable operation of the liquid supply assembly through the water pump 9 realizes the continuous water supply to the water washing pipe 17, ensures that there is sufficient water for the removal of pollutants in the water washing process, and guarantees the coherence and stability of the entire water washing process, providing reliable hydraulic support for the purification of tail gas.

[0058] In order to uniformly disperse the gas entering the water washing pipe 17;

[0059] The gas outlet assembly includes a spiral pipe 33 fixed to the bottom of the gas passing pipe 20, and the spiral part of the spiral pipe 33 is located in the water washing pipe 17. A plurality of gas outlets 34 are formed in the top of the spiral pipe 33.

[0060] The gas after plasma treatment enters the spiral pipe 33 from the gas passing pipe 20 and flows through the spiral structure of the spiral pipe 33. The flow path of the gas in the spiral pipe 33 is lengthened, so that the gas is uniformly dispersed into the water in the water washing pipe 17 through the plurality of gas outlets 34;

[0061] The plurality of gas outlets 34 are distributed at different positions of the spiral pipe 33, which can divide the gas into a large number of small bubbles, increase the contact area between the gas and the water, improve the washing efficiency, and make the soluble pollutants and unreacted active particles in the gas more fully contact and be absorbed by the water;

[0062] Meanwhile, the spiral tube 33 can also play a certain buffering effect, avoiding the gas directly rushing into the water washing pipe 17 in large quantities to cause the water surface to fluctuate violently, maintaining the stability of the water washing environment and ensuring the smooth progress of the preliminary washing process.

[0063] In order to perform secondary water washing on the gas;

[0064] The water washing assembly includes a water passing pipe 28 fixed on one side of the water washing pipe 17, and one end of the water passing pipe 28 is inserted into the water bath pipe 8. The water passing pipe 28 located in the water bath pipe 8 is provided with a liquid distribution pipe 36, the bottom of the liquid distribution pipe 36 is provided with a plurality of atomizing nozzles 37, and the lower side of the atomizing nozzles 37 is provided with a screen plate frame 38 fixed in the water bath pipe 8. The screen plate frame 38 is in a conical structure.

[0065] The water in the water washing pipe 17 will flow into the liquid distribution pipe 36 through the water passing pipe 28, the liquid distribution pipe 36 will distribute the water to the plurality of atomizing nozzles 37, and the atomizing nozzles 37 will atomize the water into fine droplets and spray them downward.

[0066] When the gas enters the water bath pipe 8 from the communication pipe 18, it will flow upward and fully contact with the atomized droplets. The screen plate frame 38 in a conical structure can guide and disperse the rising gas, prolong the residence time of the gas in the water bath pipe 8, and make the gas contact with the atomized droplets more uniformly.

[0067] The residual pollutants in the gas are captured by the atomized droplets and fall on the screen plate frame 38 along with the droplets, and finally flow back into the communication pipe 18 along the water bath pipe 8, realizing deep purification of the gas.

[0068] The atomizing nozzles 37 convert the water into fine droplets distributed in a large area. Compared with the traditional spraying method, the gas-liquid contact area is greatly increased, so that the residual pollutant molecules have more opportunities to combine with water and be removed.

[0069] The conical screen plate frame 38 not only guides the uniform distribution of the gas through its special structure, avoiding the local gas flow rate being too fast to cause insufficient purification, but also can intercept the falling droplets to some extent, so that the droplets form a water film on the screen plate surface, further enhancing the adsorption effect of trace pollutants in the gas.

[0070] The water washing assembly cooperates with the water passing pipe 28, the liquid distribution pipe 36, the atomizing nozzles 37 and the screen plate frame 38 to build an efficient secondary water washing system, which forms a progressive purification with the preliminary water washing link, significantly reduces the residual amount of pollutants in the tail gas, and provides a key guarantee for finally discharging clean tail gas.

[0071] In order to realize the purpose that the water for secondary water washing is clean water;

[0072] The middle part of the water pipe 28 is provided with a variable diameter tee 29, the other end of the variable diameter tee 29 is provided with a one-way valve 30, and the other end of the one-way valve 30 is provided with a bend inserted into the liquid supply pipe 14, and the liquid supply pipe 14 is welded with a gas guide plate 31, the gas guide plate 31 is inclined, the water washing pipe 17 is provided with a partition plate 32, the partition plate 32 is used to separate the water in the water washing pipe 17 into two parts, the bottom of the partition plate 32 is provided with a drain pipe 35 for discharging the solution above, the liquid supply pipe 14 and the water bath pipe 8 are provided with a connecting pipe 16, and the connecting pipe 16 is inclined, the gas guide plate 31 is located above the connecting pipe 16 and the liquid supply pipe 14, and the net plate frame 38 is located above the connecting pipe 16 and the water bath pipe 8;

[0073] When the gas enters the water washing pipe 17 from the spiral pipe 33, part of the gas will enter the liquid supply pipe 14, the gas guide plate 31 can guide the gas to flow into the connecting pipe 16, so as to enter the water bath pipe 8, and at the same time, prevent the gas from accumulating in the liquid supply pipe 14 to form a local high pressure;

[0074] The one-way valve 30 ensures that the water in the water pipe 28 can only flow in one direction, avoids the water in the liquid supply pipe 14 from flowing back to the liquid supply pipe 14 due to pressure change, and ensures that the water entering the distribution pipe 36 is always relatively clean new water below the partition plate 32;

[0075] The partition plate 32 separates the water in the water washing pipe 17 into two layers, the lower layer is the water that has not been washed, and the upper layer is the water that is washed by supplementing through the water pipe 28, the drain pipe 35 can periodically discharge the water containing more pollutants in the upper layer to prevent the accumulation of the water in the upper layer;

[0076] The inclined connecting pipe 16 facilitates the smooth entry of gas into the water bath pipe 8, the gas guide plate 31 is located above the connecting pipe 16 interface, which can effectively guide the gas into the connecting pipe 16, and the layout of the net plate frame 38 above the connecting pipe 16 interface makes the gas entering the water bath pipe 8 pass through the washing area of the atomized liquid droplets during the rising process, thereby improving the reliability of the secondary water washing;

[0077] Through the cooperation of the variable diameter tee 29, the one-way valve 30, the gas guide plate 31, the partition plate 32 and other components, the cleanliness control of the water used for secondary water washing is realized, the negative influence of the sewage after preliminary washing in the water washing pipe 17 on the secondary water washing effect is avoided, and it is ensured that the secondary water washing can continuously and efficiently purify the tail gas.

[0078] In order to ensure that the temperature of the gas is at room temperature;

[0079] A plurality of air permeation holes 15 are formed in the circumferential outer wall of the upper end of the liquid supply pipe 14, and the air permeation holes 15 are located above the air guide plate 31, and the air permeation holes 15 are used to adjust the temperature of the gas in the air passing pipe 20, so as to avoid the gas with too high temperature entering the water washing area, and when the gas enters the liquid supply pipe 14 from the air passing pipe 20, due to the temperature rise in the plasma treatment process, if the high-temperature gas directly enters the water washing link, it may cause the water vaporization to be intensified, the water washing effect is affected, and even the water washing assembly is damaged;

[0080] The high-temperature gas in the liquid supply pipe 14 exchanges heat with the external environment through the natural exchange with the external air, so as to reduce the temperature of the gas to close to room temperature, and the temperature adjustment can be realized by relying on natural ventilation, the structure is simple, the energy consumption is low, the temperature stability of the gas entering the water washing area is effectively ensured, and suitable environmental conditions are created for the efficient subsequent water washing process;

[0081] Meanwhile, the air guide plate 31 is located below the air permeation hole 15, which does not affect the heat dissipation function of the air permeation hole 15, and can guide the gas to flow to the connecting pipe 16, so as to ensure that the gas after heat dissipation smoothly enters the water bath pipe 8 for secondary water washing.

[0082] Wherein, the front side of the box body 1 is provided with a door plate 4, a plurality of heat dissipation holes 5 are formed in one side of the box body 1, the upper side of the water pump 9 is provided with a plasma generator 12 fixed on the box body 1, the plasma nozzle 13 is the discharge end of the plasma generator 12, and the plasma generator 12 is connected with the plasma nozzle 13 through wires to provide high-voltage electric energy for the plasma nozzle 13 to generate plasma flame;

[0083] The door plate 4 is used for opening and closing when the internal elements are overhauled, so that the operator can quickly open the box body 1 when the equipment fails or needs to be maintained, and check, replace or maintain the core components such as the ionization tube 7, the plasma nozzle 13 and the water washing pipe 17, without disassembling the whole equipment, so that the maintenance time is significantly shortened;

[0084] The heat dissipation hole 5 is used for dissipating heat in the box body 1, so as to prevent the electrical elements such as the plasma generator 12 from affecting the performance or service life due to too high temperature in a long time running, and ensure the safety and stability of the whole equipment.

[0085] It should be noted that the plasma generator 12 and the plasma nozzle 13 are prior art, which are combined to form a plasma torch, and the structure and principle thereof can be known by the technical personnel in the art through a technical manual, and will not be described in detail here.

[0086] The application is divided into the following steps when in use:

[0087] S1: Fill the water tank 6 with clean water, start the water pump 9, the water in the water tank 6 is sucked into the water pump 9 through the water inlet pipe 10, and is transported to the communication pipe 18 by the water pump 9 after being pressurized, and the water in the communication pipe 18 directly enters the lower part of the baffle 32 in the water washing pipe 17, and then flows into the upper part of the baffle 32 and the distribution pipe 36 through the water passing pipe 28;

[0088] S2: The distribution pipe 36 divides the water into multiple atomizing nozzles 37, and the atomizing nozzles 37 atomize the water into fine droplets and spray them downward;

[0089] S3: At the same time, the POU tail gas is introduced into the ionization pipe 7 through the air inlet pipe 2, and the air outlet head 19 guides the tail gas to the "flame" area sprayed by the plasma nozzle 13, so that the pollutants in the tail gas are decomposed under the action of the plasma;

[0090] S4: The reacted gas carrying a small amount of particulate matter moves downward, and when passing through the filter cloth 25, the particulate matter is blocked on the surface of the filter cloth 25, and at the same time, the gas flow rate is slowed down due to the obstruction of the filter cloth 25, providing more sufficient time for subsequent reactions;

[0091] S5: The gas enters the spiral pipe 33 through the gas passing pipe 20, and flows through the spiral structure of the spiral pipe 33, the flow path of the gas in the spiral pipe 33 is lengthened, so that the gas is uniformly dispersed into the water in the water washing pipe 17 through multiple gas outlet holes 34;

[0092] S6: The multiple gas outlet holes 34 are distributed at different positions of the spiral pipe 33, which can divide the gas into a large number of fine bubbles, increase the contact area between the gas and the water, improve the washing efficiency, and make the soluble pollutants and unreacted active particles in the gas more fully contact and be absorbed by the water;

[0093] S7: The gas after one treatment enters the water bath pipe 8 through the communication pipe 18 and the connecting pipe 16, and will fully contact with the atomized droplets, the conical structure of the screen frame 38 can guide and disperse the rising gas, prolong the residence time of the gas in the water bath pipe 8, and make the gas and the atomized droplets more uniformly contact;

[0094] S8: At the same time, the residual pollutants in the gas are captured by the atomized droplets and fall on the screen frame 38 along with the droplets, and finally flow back into the communication pipe 18 along the water bath pipe 8, realizing deep purification of the gas;

[0095] S9: Finally, the clean tail gas after treatment is discharged from the equipment through the air outlet pipe 3.

[0096] Any combination of the technical features in the above embodiments can be made, and for the sake of brevity, not all possible combinations are described above. However, any combination of the technical features is deemed to be within the scope of the present disclosure as long as such a combination does not result in an inconsistency.

[0097] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but should not be understood as a limitation on the scope of the present application. It should be noted that, for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A plasma water washing device for POU exhaust gas treatment, comprising a box (1), characterized in that, The bottom inner wall of the box (1) is fixedly connected with a water tank (6), the upper portion of the water tank (6) is fixedly connected with a communicating pipe (18), one side of the communicating pipe (18) is welded with a water washing pipe (17), the top of the water washing pipe (17) is welded with a liquid supply pipe (14), the upper portion of the liquid supply pipe (14) is welded with an ionization pipe (7), the top of the ionization pipe (7) is provided with an air inlet pipe (2) connected with an external POU tail gas pipe and a plasma nozzle (13), the upper portion of the communicating pipe (18) is welded with a water bath pipe (8), the top of the water bath pipe (8) is welded with an air outlet pipe (3) for discharging the tail gas after treatment. The end of the air inlet pipe (2) inserted into the ionization pipe (7) is provided with an air outlet head (19), the air outlet head (19) faces the "flame" sprayed by the plasma nozzle (13), the bottom inner wall of the ionization pipe (7) is welded with a gas passing pipe (20), the gas passing pipe (20) is used for connecting the ionization pipe (7) with the liquid supply pipe (14), the top of the gas passing pipe (20) is provided with a filter cloth (25), the filter cloth (25) is used for blocking particulate matters and delaying the gas entering into the gas passing pipe (20), the ionization pipe (7) is provided with a cleaning assembly for cleaning the surface of the filter cloth (25), one side of the box (1) is provided with a liquid supply assembly for driving the water flow in the water tank (6) to the liquid supply pipe (17) and the communicating pipe (18), the bottom of the gas passing pipe (20) is provided with an air outlet assembly for uniformly dispersing the gas, one side of the water washing pipe (17) is provided with a water washing assembly for secondarily washing the gas.

2. The plasma water scrubber for POU exhaust treatment according to claim 1, wherein, The cleaning assembly comprises a rotating scraping frame (24) rotating on the circumferential outer wall of the gas passing pipe (20), the inner wall of the rotating scraping frame (24) is in contact with the filter cloth (25), the top of the gas passing pipe (20) is welded with a mounting cover (26), the filter cloth (25) is located between the mounting cover (26) and the gas passing pipe (20), one side outer wall of the ionization pipe (7) is fixedly connected with an electric push rod (21), the movable end of the electric push rod (21) is fixedly connected with a pushing frame (22), one end of the pushing frame (22) is rotatably connected with a force arm (23), the force arm (23) is rotatably connected with the rotating scraping frame (24), and the force arm (23) is located on one side of the rotating center of the rotating scraping frame (24).

3. The plasma water scrubber for POU exhaust treatment according to claim 1, wherein, The liquid supply assembly comprises a water pump (9) fixed to the inner wall of one side of the box (1), the water inlet end of the water pump (9) is provided with a water inlet pipe (10), the water outlet end is provided with a water outlet pipe (11), the water inlet pipe (10) is inserted into the bottom of the water tank (6), and the water outlet pipe (11) is inserted into the bottom of the communicating pipe (18).

4. The plasma water scrubber for POU exhaust treatment according to claim 1, wherein, The air outlet assembly comprises a spiral pipe (33) fixed to the bottom of the gas passing pipe (20), the spiral part of the spiral pipe (33) is located in the water washing pipe (17), and a plurality of air outlet holes (34) are formed in the top of the spiral pipe (33).

5. The plasma water scrubber for POU exhaust treatment according to claim 4, characterized in that, The water washing assembly comprises a water passing pipe (28) fixed on one side of the water washing pipe (17), one end of the water passing pipe (28) is inserted into the water bath pipe (8), the water passing pipe (28) in the water bath pipe (8) is provided with a liquid distribution pipe (36), the bottom of the liquid distribution pipe (36) is provided with a plurality of atomizing nozzles (37), the lower part of the atomizing nozzles (37) is provided with a screen plate frame (38) fixed in the water bath pipe (8), and the screen plate frame (38) is in a conical structure.

6. The plasma water scrubber for POU exhaust treatment according to claim 5, wherein, The middle part of the water passing pipe (28) is provided with a variable diameter tee (29), the other end of the variable diameter tee (29) is provided with a one-way valve (30), the other end of the one-way valve (30) is provided with a bent pipe inserted into the liquid supply pipe (14), the liquid supply pipe (14) is welded with a gas guide plate (31), the water washing pipe (17) is provided with a partition plate (32), the partition plate (32) is used for separating the water in the water washing pipe (17) into two parts, the bottom of the partition plate (32) is provided with a drain pipe (35) for discharging the solution above.

7. The plasma water scrubber for POU exhaust treatment according to claim 6, characterized in that, The liquid supply pipe (14) and the water bath pipe (8) are provided with a connecting pipe (16), and the connecting pipe (16) is inclined, the gas guide plate (31) is located above the connecting part of the connecting pipe (16) and the liquid supply pipe (14), and the screen plate frame (38) is located above the connecting part of the connecting pipe (16) and the water bath pipe (8).

8. The plasma water scrubber for POU exhaust treatment according to claim 6, wherein, A plurality of air holes (15) are formed in the circumferential outer wall of the upper end of the liquid supply pipe (14), and the air holes (15) are located above the gas guide plate (31).

9. The plasma water scrubber for POU exhaust treatment according to claim 2, wherein, The bottom end of the ionization pipe (7) is provided with a discharge port, and the discharge port is inserted with a plug (27).

10. The plasma water scrubber for POU exhaust treatment according to claim 3, wherein, The front side of the box body (1) is provided with a door plate (4), one side of the box body (1) is provided with a plurality of heat dissipation holes (5), and the upper part of the water pump (9) is provided with a plasma generator (12) fixed on the box body (1).

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