Ultraviolet light electron spectrometer

Abstract

The invention discloses an ultraviolet light electron spectrometer which comprises a vacuum cavity and a magnetic shielding layer. A barrel lens type electron energy analyzer is arranged in the magnetic shielding layer, and the barrel lens type electron energy analyzer comprises a lens system and an electron multiplication detector; the lens system comprises two coaxially arranged annular lenses, a uniform annular channel is formed between the two annular lenses, and an ultraviolet light beam incidence channel is formed in the middle of the annular lens on the inner side; the electron multiplication detector is arranged on the upper portion of the inner side face of the inner side annular lens. The ultraviolet light source is arranged at the top of the ultraviolet light beam incidence channel; the sample table is arranged at the bottom of the ultraviolet light beam incidence channel and is arranged opposite to the ultraviolet light source emitting end; according to the invention, the ultraviolet light beam is combined with the barrel lens type electron energy analyzer, so that the miniaturization of the ultraviolet light electron energy spectrometer is realized.

Description

Technical Field

[0001] This invention relates to the field of ultraviolet photoelectron spectroscopy equipment, and more specifically to an ultraviolet photoelectron spectrometer. Background Technology

[0002] An ultraviolet photoelectron spectrometer is a device that uses ultraviolet light to excite photoelectrons in a sample and then uses a specific detector to receive them to obtain the electron energy spectrum.

[0003] Currently, the mainstream technology for ultraviolet photoelectron spectrometers consists of a hemispherical energy analyzer and an obliquely incident monochromatic ultraviolet light source. The incident beam of the ultraviolet light source and the lens of the hemispherical electron energy analyzer form a certain angle. The angle is commonly between 30° and 90°, with 54.7° being the most frequently used.

[0004] However, the current oblique incidence method of ultraviolet photoelectron spectrometer has the following drawbacks: 1) Large size and complicated installation: The ultraviolet light source (monochromatic or non-monochromatic) and the hemispherical energy analyzer are both large in size, and because of the certain installation angle between them, the system is too large and complicated to install. It is not suitable for situations with limited space and simple use.

[0005] 2) Low receiving efficiency: Existing structures can usually only receive electrons within a solid angle range of about ±15°, resulting in low detection efficiency. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this application proposes an ultraviolet photoelectron spectrometer that combines an ultraviolet beam with a tube-lens type electron energy analyzer to achieve miniaturization of the ultraviolet photoelectron spectrometer.

[0007] The technical solution adopted in this invention is as follows: An ultraviolet photoelectron spectrometer, comprising: Vacuum cavity; A magnetic shielding layer located inside the vacuum cavity; A telescope-type electron energy analyzer is installed inside the magnetic shielding layer. The telescope-type electron energy analyzer includes a lens system and an electron multiplier detector. The lens system consists of two sets of coaxially arranged annular lenses. The two sets of annular lenses are arranged coaxially and form a uniform annular channel between them. The middle of the inner annular lens is the ultraviolet beam incident channel. The electron multiplier detector is located on the upper part of the inner side of the inner annular lens. The ultraviolet light source is located at the top of the ultraviolet beam incident channel; The sample stage is located at the bottom of the ultraviolet beam incident channel and is arranged opposite to the ultraviolet light source emitting end; Furthermore, a light-transmitting window is provided on the entrance side of the ultraviolet beam incident channel.

[0008] Furthermore, in the lens system, different voltages are applied to different lenses to control the trajectory of electrons entering the annular channel.

[0009] Furthermore, the electron multiplier detector is connected to a computer via a data cable, and the computer analyzes the data to obtain the complete photoelectron spectrum.

[0010] Furthermore, ultraviolet light sources include, but are not limited to, monochromatic ultraviolet light sources and non-monochromatic ultraviolet light sources.

[0011] Furthermore, the vacuum cavity is a magnetically shielded vacuum cavity.

[0012] Furthermore, the sample stage is equipped with a position adjustment device.

[0013] The beneficial effects of this invention are: Miniaturization: Compared with the hemispherical energy analyzer, the telescope-type electron energy analyzer used in this application has a smaller volume, a larger receiving angle range, and higher detection efficiency.

[0014] Meanwhile, the ultraviolet light source and electron energy analyzer of this application adopt a coaxial structure design, which can be concentrated on a mounting flange in a single direction, making the overall structure smaller and more convenient for more application scenarios.

[0015] Figure 1 This is a schematic diagram of the ultraviolet photoelectron spectrometer structure of this application; In the figure, 1. Sample to be tested; 2. Lens system; 4. Electron multiplier detector; 5. Vacuum cavity; 6. Photoelectron trajectory; 7. Ultraviolet light source; 8. Ultraviolet beam; 9. Magnetic shielding layer; 10. Transparent window. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention. Example

[0017] Combined with appendix Figure 1 The ultraviolet photoelectron spectrometer designed in this application includes: Vacuum cavity 5, which is a cylindrical structure, is used to provide a vacuum environment.

[0018] A magnetic shielding layer 9 is installed inside the vacuum cavity 5. The magnetic shielding layer 9 surrounds the inner wall and bottom surface of the vacuum cavity 5, forming an extremely low magnetic field environment inside the vacuum cavity 5, ensuring that the emitted electrons fly along the lens system 2.

[0019] A cylindrical lens-type electron energy analyzer is installed inside the magnetic shielding layer 9. The cylindrical lens-type electron energy analyzer includes a lens system 2 and an electron multiplier detector 4 installed within the lens system 2. The lens system 2 consists of two sets of annular lenses. The upper ends of both sets of annular lenses are fixed to the inner wall of the top of the vacuum cavity 5, and the two sets of annular lenses are arranged coaxially. The lower ends of the two sets of annular lenses are open, thus forming a uniform annular channel between the two sets of annular lenses.

[0020] The lower ends of both sets of annular lenses are suspended above the sample stage, and there is a certain distance between the lower ends of the two sets of annular lenses and the upper surface of the sample stage. The lower ends of the two sets of annular lenses are deflected at a certain angle towards the central axis, and their openings are arranged facing the sample stage.

[0021] The electron multiplier detector 4 is located on the upper part of the inner ring lens.

[0022] The inner ring lens has a cylindrical channel in the middle, which is the ultraviolet beam incident channel. The ultraviolet light source 7 is located outside the vacuum cavity 5 and at the top of the ultraviolet beam incident channel. The sample stage is located at the bottom of the ultraviolet beam incident channel. Therefore, the emitting end of the ultraviolet light source 7 emits an ultraviolet beam 8 towards the ultraviolet beam incident channel. The ultraviolet beam 8 enters the ultraviolet beam incident channel along the central axis of the ring lens and is perpendicular to the upper surface of the sample stage.

[0023] In this embodiment, a light-transmitting window or film 10 is provided in the ultraviolet beam incident channel.

[0024] In this embodiment, the sample stage is located at the bottom of the vacuum chamber 5 and is used to place the sample 1 to be tested; the sample stage is positioned opposite to the ultraviolet beam inlet of the vacuum chamber 5; ultraviolet light is perpendicularly incident on the upper surface of the sample stage through the ultraviolet beam inlet.

[0025] In this embodiment, the lens system 2 is composed of multiple lenses. By applying different voltages to different lenses, an electro-optical lens is formed; similar to the concave / convex lens combination of visible light, the electronic trajectory can be controlled.

[0026] During operation, the ultraviolet light source 7 emits an ultraviolet beam 8, which is directed perpendicularly to the upper surface of the sample stage through the ultraviolet beam incident channel. After the ultraviolet beam 8 irradiates the surface of the sample 1, it excites a large number of photoelectrons. The excited photoelectrons are controlled by the lens system 2 and follow the designated photoelectron trajectory 6 to bombard the electron multiplier detector 4. The electron multiplier detector 4 is connected to a computer via a data cable, and the computer analyzes the data to obtain the complete photoelectron spectrum.

[0027] In this embodiment, the ultraviolet light source 8 is non-monochromatic ultraviolet light, preferably helium plasma. Example

[0028] When monochromatic ultraviolet light is required, based on Example 1, an ultraviolet monochromator is set between the ultraviolet light source 7 and the ultraviolet beam entrance, and finally the ultraviolet beam is perpendicularly incident on the upper surface of the sample stage through the ultraviolet beam entrance.

[0029] Everything else is the same as in Example 1. Example

[0030] Combined with appendix Figure 1 Based on Examples 1 and 2, in addition to using non-monochromatic ultraviolet light sources and monochromatic ultraviolet light sources, this application may also use other forms of ultraviolet light sources, such as synchrotron radiation sources and laser sources. Example

[0031] The vacuum cavity 5 can be a magnetically shielded vacuum cavity, which can shield the Earth's magnetic field and obtain a low magnetic field working environment. Everything else is the same as in Example 1.

[0032] More preferably, the sample stage in this application can be equipped with a position adjustment device, such as a combination of a drive motor and a motion guide rail, which can adjust the position of the sample stage. Example

[0033] The transparent window 10 can be an optional device. For light sources such as helium plasma light (21 eV), the transparent window 10 is not configured, and the light passes through a vacuum. For Kr plasma light (below approximately 10 eV), a transparent window can be configured to reduce the influence of gases on the sample. Other light sources can also be selected to have or not configure the transparent window 10. Alternatively, a transparent film can be used to replace the transparent window 10.

[0034] The above embodiments are only used to illustrate the design concept and features of the present invention, and their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. The protection scope of the present invention is not limited to the above embodiments. Therefore, all equivalent changes or modifications made based on the principles and design ideas disclosed in the present invention are within the protection scope of the present invention.

Claims

1. An ultraviolet photoelectron spectrometer, characterized by, The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer.

2. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer.

3. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer.

4. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer.

5. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer.

6. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer.

7. The ultraviolet photoelectron spectrometer of claim 1, wherein, The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a vacuum ultraviolet photoelectron spectrometer. The application relates to a

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