Galvanometer thermal deformation precision compensation method and system based on high-power laser processing

Abstract

The application discloses a galvanometer thermal deformation precision compensation method and system based on high-power laser processing, relates to the technical field of galvanometer control, and comprises the following steps: extracting all continuous laser processing path segments according to laser processing data, constructing a path characteristic parameter set, and obtaining a motor first power consumption coefficient and a motor second power consumption coefficient based on galvanometer motor parameter analysis according to galvanometer equipment parameter data. The application divides the processing path unit by combining the motor power consumption coefficient with the mirror body thermal characteristic parameter through characteristic parameters such as the curvature radius and the path length, provides a spatial basis for differentiated precision compensation, realizes accurate quantification of the motor power consumption by introducing an energy consumption correction coefficient based on the reference steady-state average energy consumption, realizes dynamic matching of the heat generation and heat dissipation of the galvanometer system by solving the steady-state temperature through the heat balance principle, and realizes real-time representation of the galvanometer thermal deformation by dynamically correcting the basic angular deformation amount through the thermal time constant in combination with the processing time.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of galvanometer control, in particular to a galvanometer thermal deformation precision compensation method and system based on high-power laser processing. BACKGROUND

[0002] High-power laser processing technology has become the core process of high-end manufacturing industries such as aerospace, automobile manufacturing, and precision electronics due to its high precision, high efficiency, and high flexibility. The positioning accuracy of the galvanometer, as the core component of laser beam deflection control, directly determines the accuracy of the processing trajectory and the quality of the product. In high-power laser processing scenarios, factors such as heat generation from galvanometer motor operation, partial absorption of laser energy, and environmental temperature fluctuations can cause significant thermal deformation. Therefore, precise compensation for galvanometer thermal deformation in high-power laser processing can not only offset thermal errors and restore galvanometer positioning accuracy, but also improve the stability and long-term reliability of the processing process, making it of great engineering application value and industrial significance.

[0003] Currently, there are still problems in galvanometer thermal deformation precision compensation, such as the inability to accurately analyze the processing path based on processing parameters, the inability to timely correct thermal deformation based on galvanometer parameters, the use of static strategies with fixed thermal expansion coefficients or preset compensation values, the lack of consideration of dynamic thermal deformation caused by factors such as processing power changes and operation time, the lack of integration of motor operation parameters, environmental temperature and humidity, and processing trajectory, and the reliance on single temperature sensor data modeling, which leads to a large deviation between the compensation model and the actual thermal deformation law, the division of processing trajectories with fixed length thresholds, the use of uniform compensation logic, and the inability to correct thermal errors, resulting in reduced galvanometer precision and affecting the stability and accuracy of laser processing. SUMMARY

[0004] To solve the above technical problems, the galvanometer thermal deformation precision compensation method and system based on high-power laser processing are provided, which solves the problems of the inability to accurately analyze the processing path based on processing parameters, the inability to timely correct thermal deformation based on galvanometer parameters, the use of static strategies with fixed thermal expansion coefficients or preset compensation values, the lack of consideration of dynamic thermal deformation caused by factors such as processing power changes and operation time, the lack of integration of motor operation parameters, environmental temperature and humidity, and processing trajectory, and the reliance on single temperature sensor data modeling, which leads to a large deviation between the compensation model and the actual thermal deformation law, the division of processing trajectories with fixed length thresholds, the use of uniform compensation logic, and the inability to correct thermal errors, resulting in reduced galvanometer precision and affecting the stability and accuracy of laser processing.

[0005] To achieve the above purposes, the technical solution adopted by the present application is as follows:

[0006] The mirror thermal deformation precision compensation method based on high-power laser processing comprises:

[0007] Obtain laser processing data, the laser processing data comprising laser processing path and corresponding laser power parameter;

[0008] According to the laser processing data, all continuous laser processing path segments are extracted, and a path characteristic parameter set is constructed;

[0009] According to the mirror device parameter data, based on the mirror motor parameter analysis, the first motor power consumption coefficient and the second motor power consumption coefficient are obtained, the first motor power consumption coefficient represents the correlation coefficient of the instantaneous power consumption rate of the motor and the instantaneous angular velocity of the motor, and the second motor power consumption coefficient represents the correlation coefficient of the instantaneous power consumption rate of the motor and the instantaneous angular acceleration of the motor;

[0010] According to the mirror device parameter data, based on the mirror mirror body material parameter, the mirror body emissivity and the laser absorption efficiency are obtained;

[0011] According to the path characteristic parameter set, the first motor power consumption coefficient, the second motor power consumption coefficient, the mirror body emissivity and the laser absorption efficiency, the continuous laser processing path is segmented and divided, and the continuous processing path unit is obtained;

[0012] Based on the continuous processing path unit, combined with the inherent electrical parameters of the mirror motor, the corresponding reference steady-state average energy consumption of each continuous processing path unit is calculated;

[0013] According to the reference steady-state average energy consumption, the mirror angular deformation variable is obtained;

[0014] According to the corresponding mirror angular deformation variable of each continuous processing path unit, the corresponding mirror precision compensation amount is obtained;

[0015] According to the mirror precision compensation amount, the mirror thermal deformation precision compensation is realized.

[0016] Preferably, according to the laser processing data, all continuous laser processing path segments are extracted, and a path characteristic parameter set is constructed, which specifically comprises:

[0017] Based on the laser processing data, the total processing path data is obtained, the total processing path data comprising path coordinate sequence, laser power sequence and scanning speed sequence;

[0018] Obtain mirror device parameter data, the mirror device parameter data comprising numerical control system interpolation period;

[0019] The product of the numerical control system interpolation period and the scanning speed is taken as the path continuity threshold;

[0020] According to the path coordinate sequence and the path continuity threshold, the continuous laser processing path segment is obtained;

[0021] wherein, if the distance between any two adjacent path points in the path coordinate sequence does not exceed the path continuity threshold, the laser processing path is continuous, and if the distance between any two adjacent path points in the path coordinate sequence exceeds the path continuity threshold, the laser processing path is discontinuous, and the two path points are the separation points of the laser processing path;

[0022] Based on the continuous laser processing path segment, the curvature radius and the path length of each path segment are extracted to construct a path feature parameter set.

[0023] Preferably, the continuous laser processing path is segmented and divided according to the path feature parameter set, the motor first power consumption coefficient, the motor second power consumption coefficient, the mirror emissivity and the laser absorption efficiency to obtain a continuous processing path unit, specifically including:

[0024] S100: taking the product of the mirror emissivity and the laser absorption efficiency as a thermal radiation absorption coefficient;

[0025] S200: taking the starting point of each continuous laser processing path segment as a path reference point according to the path feature parameter set;

[0026] S300: obtaining a deviation coefficient of any position on the continuous laser processing path segment from the path reference point according to the path reference point;

[0027] S400: obtaining a precision deviation threshold based on the vibration mirror thermal deformation precision compensation requirement, the precision deviation threshold representing the maximum angular variable allowed;

[0028] S500: traversing the positions on the continuous laser processing path segment along the laser processing path until the deviation coefficient exceeds the precision deviation threshold, and taking the position at this time as a new path reference point;

[0029] S600: repeating steps S300-S500 until the entire continuous laser processing path segment is traversed to obtain the path reference point corresponding to each continuous laser processing path segment;

[0030] S700: dividing the continuous laser processing path segment based on the path reference point corresponding to each continuous laser processing path segment to form a plurality of continuous processing path units.

[0031] Preferably, based on the continuous processing path unit and the inherent electrical parameters of the vibration mirror motor, the reference steady-state average energy consumption corresponding to each continuous processing path unit is calculated, specifically including:

[0032] According to the continuous processing path unit, the average scanning speed and the swing angle range of each continuous processing path unit are obtained;

[0033] According to the galvanometer device parameter data, the inherent electrical parameters of the galvanometer motor are obtained, including motor winding resistance, motor efficiency and motor back electromotive force coefficient;

[0034] Based on the ratio of the average scanning speed and the curvature radius, the instantaneous angular velocity of the galvanometer motor is obtained;

[0035] The product of the instantaneous angular velocity and the motor back electromotive force coefficient is taken as the back electromotive force of the motor;

[0036] Based on the galvanometer device parameter data, the armature voltage of the galvanometer motor is obtained;

[0037] The difference between the armature voltage and the back electromotive force of the galvanometer motor is taken as the reference voltage;

[0038] Based on Ohm's law, the ratio of the reference voltage and the motor winding resistance is taken as the instantaneous working current of the motor;

[0039] Based on the instantaneous working current and the winding resistance, the real-time energy consumption of the galvanometer motor is calculated;

[0040] According to the actual processing time of each continuous processing path unit, the real-time energy consumption is integrated to obtain the total energy consumption of the motor during the processing of the path unit;

[0041] Based on the total energy consumption of the motor and the processing time, the steady-state average energy consumption of the galvanometer motor is calculated;

[0042] According to the galvanometer device parameter data, the motor rated swing angle and the rated scanning speed are obtained;

[0043] According to the average scanning speed, the swing angle range, the motor rated swing angle and the rated scanning speed of each continuous processing path unit, the energy consumption correction coefficient is obtained;

[0044] The product of the energy consumption correction coefficient and the steady-state average energy consumption is taken as the reference steady-state average energy consumption.

[0045] Preferably, the energy consumption correction coefficient is obtained according to the average scanning speed, the swing angle range, the motor rated swing angle and the rated scanning speed of each continuous processing path unit, specifically including:

[0046] According to the average scanning speed of each continuous processing path unit, the ratio of the average scanning speed and the rated scanning speed is taken as the scanning deviation coefficient;

[0047] According to the continuous processing path unit, the path reference point corresponding to each continuous processing path unit is obtained;

[0048] Among them, the path reference point corresponding to the starting point of each continuous processing path unit is taken as the first path reference point, and the path reference point corresponding to the end point of each continuous processing path unit is taken as the second path reference point;

[0049] Based on the path coordinate sequence in the total machining path data, a path coordinate sequence corresponding to each continuous machining path unit is obtained;

[0050] The path point closest to the first path reference point in the continuous machining path unit is taken as the first feature path point, and the path point closest to the second path reference point is taken as the second feature path point;

[0051] Based on the first path reference point and the first feature path point, a start point tangent direction vector is obtained;

[0052] Based on the second path reference point and the second feature path point, an end point tangent direction vector is obtained;

[0053] According to the start point tangent direction vector and the end point tangent direction vector, based on normalization processing, corresponding start point tangent unit direction vector and end point tangent unit direction vector are obtained;

[0054] Based on the start point tangent unit direction vector and the end point tangent unit direction vector, the included angle between the start point tangent and the end point tangent is obtained;

[0055] According to the start point tangent unit direction vector, a start point feature swing angle is obtained;

[0056] According to the included angle between the start point tangent and the end point tangent and the start point feature swing angle, a double tangent feature swing angle is obtained;

[0057] Based on the double tangent feature swing angle, combined with the curvature radius of the continuous machining path unit, a swing angle deviation coefficient is obtained;

[0058] The product of the swing angle deviation coefficient and the scanning deviation coefficient is taken as the energy consumption correction coefficient.

[0059] Preferably, the mirror angle variable is obtained according to the reference steady-state average energy consumption, specifically including:

[0060] According to the laser power sequence in the total machining path data, the laser power corresponding to each continuous machining path unit is obtained;

[0061] According to the mirror device parameter data, the inherent thermal characteristic parameters of the mirror system are obtained, including the linear expansion coefficient of the mirror body material, the mirror body heat capacity and the motor heat capacity;

[0062] Based on the laser power corresponding to each continuous machining path unit, the product of the laser power and the thermal radiation absorption coefficient is taken as the laser thermal radiation absorption power;

[0063] The sum of the reference steady-state average energy consumption and the mirror laser thermal radiation absorption power is taken as the total steady-state heat generation rate;

[0064] According to the galvanometer equipment parameter data, a galvanometer heat dissipation parameter is acquired, the galvanometer heat dissipation parameter including a total convective heat transfer coefficient, an effective heat dissipation area, an active heat dissipation coefficient and a cooling medium flow rate;

[0065] According to the galvanometer heat dissipation parameter, a total steady-state heat dissipation rate is acquired;

[0066] Based on the heat balance principle, the total steady-state heat generation rate is equal to the total steady-state heat dissipation rate, and the steady-state temperature of the galvanometer system is solved;

[0067] According to the mirror body linear expansion coefficient, the difference between the steady-state temperature and the initial temperature, and the reference swing angle of the path unit, the basic angle deformation amount of the galvanometer is calculated through the thermal expansion law;

[0068] Based on the thermal time constant of the galvanometer system, the basic angle deformation amount is dynamically corrected in combination with the machining time, and the galvanometer angle deformation amount during machining of each continuous machining path unit is obtained;

[0069] The angle deformation amount is specifically:

[0070] ;

[0071] In the formula, is the galvanometer angle deformation amount, is the basic angle deformation amount, is the machining time, is the thermal time constant, is the mirror body heat capacity, is the motor heat capacity, is the total convective heat transfer coefficient, is the effective heat dissipation area, is the active heat dissipation coefficient, is the cooling medium flow rate, is the linear expansion coefficient, is the temperature difference, is the swing angle of the continuous machining path unit, is the steady-state temperature, is the initial temperature.

[0072] Further, a galvanometer thermal deformation precision compensation system based on high-power laser machining is proposed, which is used to realize the compensation method as described above, and includes:

[0073] A main control module is configured to calculate reference steady-state average energy consumption corresponding to each continuous machining path unit based on the number of continuous machining path units and inherent electrical parameters of the galvanometer motor, take the sum of the reference steady-state average energy consumption and mirror laser thermal radiation absorption power as total steady-state heat generation rate, obtain total steady-state heat dissipation rate according to galvanometer heat dissipation parameters, make the total steady-state heat generation rate equal to the total steady-state heat dissipation rate based on the heat balance principle, and solve the steady-state temperature of the galvanometer system according to the difference between the mirror linear expansion coefficient and the difference between the initial temperature and the steady-state temperature.

[0074] An information acquisition module is configured to acquire laser machining data, obtain inherent thermal characteristic parameters and galvanometer heat dissipation parameters of the galvanometer system according to galvanometer equipment parameter data, obtain total machining path data based on the laser machining data, extract all continuous laser machining path segments according to the total machining path data, and construct a path characteristic parameter set.

[0075] A machining path analysis module is configured to segmentally divide the continuous laser machining path according to the path characteristic parameter set, the motor first power consumption coefficient, the motor second power consumption coefficient, the mirror emissivity and the laser absorption efficiency, obtain continuous machining path units, and obtain an energy consumption correction coefficient according to the average scanning speed, the swing angle range, the motor rated swing angle and the rated scanning speed of each continuous machining path unit.

[0076] Optionally, the main control module specifically comprises:

[0077] A control unit is configured to take the sum of the reference steady-state average energy consumption and mirror laser thermal radiation absorption power as total steady-state heat generation rate, obtain total steady-state heat dissipation rate according to galvanometer heat dissipation parameters, make the total steady-state heat generation rate equal to the total steady-state heat dissipation rate based on the heat balance principle, solve the steady-state temperature of the galvanometer system, and obtain the galvanometer angular deformation according to the difference between the mirror linear expansion coefficient and the difference between the initial temperature and the steady-state temperature.

[0078] An information receiving unit is configured to interact with the information acquisition module and the machining path analysis module, receive data and transmit the data to a path energy consumption evaluation unit.

[0079] The path energy consumption evaluation unit is configured to calculate reference steady-state average energy consumption corresponding to each continuous machining path unit based on the number of continuous machining path units and inherent electrical parameters of the galvanometer motor.

[0080] Optionally, the information acquisition module specifically comprises:

[0081] The first acquisition unit is configured to acquire laser processing data, acquire inherent thermal characteristic parameters and mirror heat dissipation parameters of the mirror system according to the mirror device parameter data;

[0082] The second acquisition unit is configured to acquire total processing path data based on the laser processing data, extract all continuous laser processing path segments from the total processing path data, and construct a path characteristic parameter set.

[0083] Optionally, the processing path analysis module specifically comprises:

[0084] The path division unit is configured to segment and divide the continuous laser processing path according to the path characteristic parameter set, the motor first power consumption coefficient, the motor second power consumption coefficient, the mirror emissivity and the laser absorption efficiency, and acquire a continuous processing path unit.

[0085] The energy consumption correction analysis unit is configured to acquire an energy consumption correction coefficient according to the average scanning speed, the swing angle range, the motor rated swing angle and the rated scanning speed of each continuous processing path unit.

[0086] Compared with the prior art, the method has the advantages that:

[0087] The mirror thermal deformation precision compensation method and system based on high-power laser processing are proposed, the processing path unit is divided by combining the motor power consumption coefficient and the mirror thermal characteristic parameter according to the characteristic parameters such as the curvature radius and the path length, space foundation is provided for differential precision compensation, the motor energy consumption is accurately quantified by the reference steady-state average energy consumption and the introduction of the energy consumption correction coefficient, the dynamic matching of the mirror system heat generation and heat dissipation is realized by solving the steady-state temperature according to the heat balance principle, and the real-time representation of the mirror thermal deformation is realized by dynamically correcting the basic angular deformation amount according to the thermal time constant and the processing time. BRIEF DESCRIPTION OF DRAWINGS

[0088] Figure 1 The mirror thermal deformation precision compensation method based on high-power laser processing is proposed.

[0089] Figure 2 The path characteristic parameter set acquisition flowchart in the present application is provided.

[0090] Figure 3 The continuous processing path unit acquisition flowchart in the present application is provided.

[0091] Figure 4 The reference steady-state average energy consumption acquisition flowchart in the present application is provided.

[0092] Figure 5 The mirror thermal deformation precision compensation system structure block diagram based on high-power laser processing is proposed. Detailed Implementation

[0093] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0094] Reference Figure 1 - Figure 4 As shown, the galvanometer thermal deformation accuracy compensation method based on high-power laser processing in this embodiment of the invention includes:

[0095] Acquire laser processing data, which includes the laser processing path and the corresponding laser power parameters;

[0096] Based on the laser processing data, extract all continuous laser processing path segments and construct a path feature parameter set;

[0097] Specifically, based on laser processing data, all continuous laser processing path segments are extracted, and a path feature parameter set is constructed, including:

[0098] Based on laser processing data, total processing path data is obtained, which includes path coordinate sequence, laser power sequence, and scanning speed sequence.

[0099] Acquire galvanometer equipment parameter data, wherein the galvanometer equipment parameter data includes the CNC system interpolation cycle;

[0100] The product of the CNC system's interpolation cycle and scanning speed is used as the path continuity threshold;

[0101] Based on the path coordinate sequence and the path continuity threshold, obtain continuous laser processing path segments;

[0102] If the distance between any two adjacent path points in the path coordinate sequence does not exceed the path continuity threshold, then the laser processing path is continuous; if the distance between any two adjacent path points in the path coordinate sequence exceeds the path continuity threshold, then the laser processing path is discontinuous. These two path points are the dividing points of the laser processing path.

[0103] Based on continuous laser processing path segments, the radius of curvature and path length of each segment are extracted to construct a path feature parameter set.

[0104] In this scheme, the path continuity threshold is determined by multiplying the interpolation cycle and scanning speed of the CNC system. This tightly binds the judgment criteria to the inherent parameters of the equipment and the actual processing conditions, ensuring the objectivity and consistency of the continuous / discontinuous path segment division results. This provides a reliable basis for the subsequent unit division of thermal deformation compensation. The laser processing path is split into independent continuous processing path segments. It is understood that thermal deformation largely stems from energy accumulation during continuous processing. This division avoids confusion regarding the thermal state of discontinuous paths (with cooling intervals), allowing subsequent compensation to focus on units of "continuous heat generation – continuous deformation." The radius of curvature is directly related to the motor's angular velocity and angular acceleration (affecting motor energy consumption and heat generation), while the path length is related to the processing time (affecting the degree of heat accumulation). These two parameters are key factors influencing galvanometer thermal deformation. The radius of curvature and path length of each continuous path segment are extracted to construct a structured set of path feature parameters, providing accurate data support for subsequent energy consumption calculations and angular deformation derivation.

[0105] Based on the galvanometer equipment parameter data and the galvanometer motor parameter analysis, the first power consumption coefficient and the second power consumption coefficient of the motor are obtained. The first power consumption coefficient represents the correlation coefficient between the instantaneous power consumption rate of the motor and the instantaneous angular velocity of the motor, and the second power consumption coefficient represents the correlation coefficient between the instantaneous power consumption rate of the motor and the instantaneous angular acceleration of the motor.

[0106] Based on the galvanometer equipment parameter data and the galvanometer body material parameters, the emissivity and laser absorption efficiency of the galvanometer body are obtained.

[0107] Based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, the continuous laser processing path is segmented to obtain continuous processing path units.

[0108] Specifically, based on the path characteristic parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror, and the laser absorption efficiency, the continuous laser processing path is segmented to obtain continuous processing path units, including:

[0109] S100: The product of the mirror emissivity and the laser absorption efficiency is used as the thermal radiation absorption coefficient.

[0110] S200: Based on the path feature parameter set, the starting point of any continuous laser processing path segment is taken as the path reference point;

[0111] S300: Based on the path reference point, obtain the deviation coefficient between any position of the continuous laser processing path segment and the path reference point;

[0112] S400: Based on the accuracy compensation requirements for thermal deformation of the galvanometer, obtain the accuracy deviation threshold, which represents the maximum allowable angular deformation.

[0113] S500: Traverse the position on the continuous laser processing path segment along the laser processing path until the deviation coefficient exceeds the accuracy deviation threshold, and take the position at this time as the new path reference point.

[0114] S600: Repeat steps S300-S500 until the entire continuous laser processing path segment is traversed, and obtain the path reference point corresponding to each continuous laser processing path segment.

[0115] S700: Based on the path reference point corresponding to each continuous laser processing path segment, the continuous laser processing path segment is divided into several continuous processing path units.

[0116] Specifically, the deviation coefficient is:

[0117] ;

[0118] In the formula, Position on the continuous laser processing path segment Deviation coefficient from the path reference point The first power consumption coefficient of the motor, The angular velocity of the path reference point. For position angular velocity, This is the second power consumption coefficient of the motor. The angular velocity acceleration of the path reference point. For position angular velocity acceleration, The thermal radiation absorption coefficient, The laser power at the path reference point, For position laser power, The scan density of the path reference points, For position scan density, For scanning speed, Let be the radius of curvature. is the focal length of the galvanometer.

[0119] This scheme integrates path characteristic parameters (radius of curvature, path length), motor power consumption coefficient (angular velocity / angular acceleration correlation), and mirror thermal radiation absorption coefficient (emissivity × absorption efficiency). It incorporates the core influencing factors of thermal deformation into the segmentation logic, ensuring that path unit division aligns with the multi-physics coupling characteristics generated by thermal deformation. By calculating the deviation coefficient along the path, and using "exceeding the accuracy deviation threshold" as the node to update the reference point, it achieves dynamic division of continuous processing paths. Thermal deformation accumulates during processing; fixed-length or fixed-node divisions cannot accommodate this pattern. This dynamic mechanism ensures that the accumulated thermal deformation of each path unit is controlled within an allowable range, avoiding untimely compensation due to excessively large units and computational redundancy due to excessively small units. Using the starting point of each continuous path segment as the initial reference point, subsequent reference points are dynamically generated based on the actual deviation coefficient, forming an iteratively optimized division logic.

[0120] It is understandable that the instantaneous power consumption of a motor is proportional to the square of its instantaneous angular velocity and its instantaneous angular acceleration, that is:

[0121] ;

[0122] In the formula, Instantaneous power consumption The first power consumption coefficient of the motor, This is the second power consumption coefficient of the motor, which is determined by the motor model.

[0123] Based on the continuous processing path unit and combined with the inherent electrical parameters of the galvanometer motor, the reference steady-state average energy consumption corresponding to each continuous processing path unit is calculated.

[0124] Specifically, based on the continuous processing path unit and combined with the inherent electrical parameters of the galvanometer motor, the baseline steady-state average energy consumption corresponding to each continuous processing path unit is calculated, including:

[0125] Based on the continuous processing path units, obtain the average scanning speed and swing angle range of each continuous processing path unit;

[0126] Based on the galvanometer equipment parameter data, obtain the inherent electrical parameters of the galvanometer motor, including motor winding resistance, motor efficiency, and motor back electromotive force coefficient;

[0127] The instantaneous angular velocity of the galvanometer motor is obtained based on the ratio of the average scanning speed to the radius of curvature.

[0128] The product of the instantaneous angular velocity and the back electromotive force coefficient of the motor is taken as the back electromotive force of the motor.

[0129] Based on the parameter data of the galvanometer device, obtain the armature voltage of the galvanometer motor;

[0130] The difference between the armature voltage and the back electromotive force of the galvanometer motor is used as the reference voltage.

[0131] Based on Ohm's law, the ratio of the reference voltage to the motor winding resistance is taken as the instantaneous operating current of the motor.

[0132] The real-time energy consumption of the galvanometer motor is calculated based on the instantaneous operating current and winding resistance.

[0133] Based on the actual processing time of each continuous processing path unit, the real-time energy consumption is integrated to obtain the total motor energy consumption during the processing of the path unit.

[0134] Based on the total energy consumption of the motor and the processing time, the steady-state average energy consumption of the galvanometer motor is calculated.

[0135] Based on the galvanometer equipment parameter data, obtain the motor's rated swing angle and rated scanning speed;

[0136] The energy consumption correction coefficient is obtained based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit;

[0137] The product of the energy consumption correction factor and the steady-state average energy consumption is used as the benchmark steady-state average energy consumption.

[0138] Specifically, the steady-state average energy consumption is as follows:

[0139] ;

[0140] In the formula, For steady-state average energy consumption, Indicates time The corresponding real-time energy consumption, Indicates time The corresponding instantaneous operating current, For winding resistance, For motor efficiency.

[0141] This solution combines the inherent electrical parameters of the galvanometer motor (winding resistance, back EMF coefficient, etc.) with the parameters of the continuous processing path unit (average scanning speed, radius of curvature). Instantaneous angular velocity, operating current, and real-time energy consumption are derived step-by-step using physical formulas. This ensures that the energy consumption calculation closely matches the equipment hardware characteristics and the processing state of the path, providing accurate data support for the analysis of thermal deformation sources (energy consumption and heat generation). Energy consumption is calculated separately for each continuous processing path unit, directly linking energy consumption data to the thermal deformation risk of the path unit (e.g., higher scanning speed and larger swing angle units correspond to higher energy consumption). This provides accurate energy consumption basis for subsequent differentiated thermal deformation compensation for different path units. Based on the ratio of the average scanning speed and swing angle range of the path unit to the motor's rated parameters, an energy consumption correction coefficient is generated to dynamically calibrate the steady-state average energy consumption, making the benchmark steady-state average energy consumption more closely match the actual processing load and improving the adaptability of thermal deformation calculation.

[0142] Specifically, based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit, an energy consumption correction coefficient is obtained, including:

[0143] The ratio of the average scanning speed to the rated scanning speed is used as the scanning deviation coefficient based on the average scanning speed of each continuous processing path unit.

[0144] Based on the continuous processing path unit, obtain the path reference point corresponding to each continuous processing path unit;

[0145] Specifically, the path reference point corresponding to the starting point of each continuous processing path unit is taken as the first path reference point, and the path reference point corresponding to the ending point of each continuous processing path unit is taken as the second path reference point.

[0146] Based on the path coordinate sequence in the total processing path data, obtain the path coordinate sequence corresponding to each continuous processing path unit;

[0147] The path point closest to the first path reference point in the continuous processing path unit is taken as the first feature path point, and the path point closest to the second path reference point is taken as the second feature path point.

[0148] Based on the first path reference point and the first feature path point, obtain the starting point tangent direction vector;

[0149] Based on the second path reference point and the second feature path point, obtain the endpoint tangent direction vector;

[0150] Based on the starting point tangent direction vector and the ending point tangent direction vector, and using normalization processing, obtain the corresponding starting point tangent unit direction vector and ending point tangent unit direction vector;

[0151] Based on the unit direction vector of the tangent at the starting point and the unit direction vector of the tangent at the ending point, obtain the angle between the tangents at the starting point and the ending point.

[0152] Based on the unit direction vector of the starting point tangent, obtain the starting point characteristic swing angle;

[0153] Based on the angle between the tangents at the starting point and the ending point, and the characteristic swing angle at the starting point, obtain the characteristic swing angle of the double tangents;

[0154] Based on the double tangent feature swing angle, combined with the radius of curvature of the continuous processing path unit, the swing angle deviation coefficient is obtained;

[0155] The product of the swing angle deviation coefficient and the scanning deviation coefficient is used as the energy consumption correction coefficient;

[0156] Specifically, the starting point tangent direction vector and the ending point tangent direction vector are:

[0157] ;

[0158] In the formula, Let the tangent direction vector be the starting point. The direction vector of the tangent at the endpoint. The coordinates of the first path reference point. The coordinates of the first feature path point. The coordinates of the second path reference point. The coordinates of the second feature path point;

[0159] The swing angle deviation coefficient is specifically:

[0160] ;

[0161] In the formula, This is the swing angle deviation coefficient. It is a double-tangent characteristic swing angle. For the rated scanning speed, Let be the radius of curvature. The characteristic swing angle of a single tangent line. The magnitude of the tangent direction vector at the starting point. The angle between the tangents at the starting and ending points. Let the unit direction vector of the tangent at the starting point be . The unit direction vector of the tangent at the endpoint. It is the dot product of vectors.

[0162] In this solution, the ratio of the average scanning speed to the rated scanning speed is used as the scanning deviation coefficient to accurately capture the difference between the actual processing speed and the rated state of the equipment. This allows the energy consumption correction to fit the speed requirements of different processing tasks, improving the adaptability of energy consumption calculations to different operating conditions. The tangent direction vector is determined by the path reference point and the nearest characteristic path point. After normalization and angle calculation, the double tangent characteristic swing angle is obtained. Then, the swing angle deviation coefficient is derived by combining the radius of curvature, realizing the quantitative characterization of the swing angle's influence. This provides reliable data support for the swing angle-related energy consumption correction. The scanning deviation coefficient (speed factor) and the swing angle deviation coefficient (swing angle + geometric factor) are multiplied to integrate the three key energy consumption influencing factors: speed fluctuation, swing angle characteristics, and path curvature. This allows the correction coefficient to comprehensively reflect the core load differences in the processing process.

[0163] The galvanometer angle variable is obtained based on the baseline steady-state average energy consumption;

[0164] Specifically, the galvanometer angular deformation is obtained based on the baseline steady-state average energy consumption, including:

[0165] Based on the laser power sequence in the total processing path data, obtain the laser power corresponding to each continuous processing path unit;

[0166] Based on the galvanometer equipment parameter data, obtain the inherent thermal characteristic parameters of the galvanometer system, including the linear expansion coefficient of the mirror material, the mirror heat capacity, and the motor heat capacity;

[0167] Based on the laser power corresponding to each continuous processing path unit, the product of the laser power and the thermal radiation absorption coefficient is taken as the laser thermal radiation absorption power.

[0168] The sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror is taken as the total steady-state heat generation rate.

[0169] Based on the galvanometer device parameter data, obtain the galvanometer heat dissipation parameters, which include the total convective heat transfer coefficient, effective heat dissipation area, active heat dissipation coefficient, and cooling medium flow rate.

[0170] The total steady-state heat dissipation rate is obtained based on the galvanometer's heat dissipation parameters;

[0171] Based on the principle of thermal balance, the steady-state heat generation rate is made equal to the steady-state heat dissipation rate, and the steady-state temperature of the galvanometer system is obtained by solving the problem.

[0172] The basic angular deformation of the galvanometer is calculated using the thermal expansion law based on the linear expansion coefficient of the mirror body, the difference between the steady-state temperature and the initial temperature, and the reference swing angle of the path element.

[0173] Based on the thermal time constant of the galvanometer system and combined with the processing time, the basic angular deformation is dynamically corrected to obtain the galvanometer angular deformation during the processing of each continuous processing path unit.

[0174] Specifically, the angular deformation amount is:

[0175] ;

[0176] In the formula, This is the angular distortion of the galvanometer. The basic angular deformation amount, For processing time, The thermal time constant, For the heat capacity of the mirror body, For the motor's heat capacity, The total convective heat transfer coefficient is . For effective heat dissipation area, For active heat dissipation coefficient, For the cooling medium flow rate, The coefficient of linear expansion is 1 / 3. This is the temperature difference value. The swing angle of the continuous processing path unit. For steady-state temperature, The initial temperature is the temperature before each continuous processing path unit is processed.

[0177] The total steady-state heat dissipation rate is specifically as follows:

[0178] ;

[0179] In the formula, This is the total steady-state heat dissipation rate. For ambient temperature, This is the inlet temperature of the cooling medium.

[0180] This solution integrates the benchmark steady-state average energy consumption of the galvanometer motor (heat generated by mechanical motion) and the laser thermal radiation absorption power (heat generated by laser irradiation), using the sum of the two as the total steady-state heat generation rate. This comprehensively covers the core heat generation sources of the galvanometer in high-power laser processing, providing comprehensive heat generation data support for angular deformation calculation. The total steady-state heat dissipation rate is calculated by combining the galvanometer's heat dissipation parameters (total convective heat transfer coefficient, effective heat dissipation area, etc.). The steady-state temperature is solved based on the thermal balance principle of "heat generation = heat dissipation," making the steady-state temperature more consistent with the actual heat exchange state of the galvanometer during operation. This lays a precise temperature foundation for deformation calculation. The basic angular deformation is calculated by coupling the mirror body linear expansion coefficient, the difference between steady-state and initial temperatures, and the swing angle of the path unit. This provides clear physical principle support for deformation calculation, improving the reliability and accuracy of the basic deformation and enhancing the consistency and accuracy of full-path compensation.

[0181] Based on the galvanometer angle variable corresponding to each continuous processing path unit, obtain the corresponding galvanometer accuracy compensation amount;

[0182] Based on the galvanometer accuracy compensation amount, the thermal deformation accuracy compensation of the galvanometer is achieved.

[0183] Reference Figure 5 As shown, further, combining the above-mentioned method for compensating the thermal deformation accuracy of galvanometers based on high-power laser processing, a system for compensating the thermal deformation accuracy of galvanometers based on high-power laser processing is proposed, including:

[0184] The main control module is used to calculate the reference steady-state average energy consumption corresponding to each continuous processing path unit based on the number of continuous processing path units and the inherent electrical parameters of the galvanometer motor. The sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror body is used as the total steady-state heat generation rate. According to the galvanometer heat dissipation parameters, the total steady-state heat dissipation rate is obtained. Based on the principle of thermal balance, the total steady-state heat generation rate is made equal to the total steady-state heat dissipation rate to obtain the steady-state temperature of the galvanometer system. The angular deformation of the galvanometer is obtained according to the linear expansion coefficient of the mirror body and the difference between the steady-state temperature and the initial temperature.

[0185] The information acquisition module is used to acquire laser processing data, acquire the inherent thermal characteristic parameters of the galvanometer system and the heat dissipation parameters of the galvanometer based on the galvanometer equipment parameter data, acquire the total processing path data based on the laser processing data, extract all continuous laser processing path segments based on the total processing path data, and construct a path feature parameter set.

[0186] The processing path analysis module is used to divide the continuous laser processing path into segments based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, to obtain continuous processing path units, and to obtain energy consumption correction coefficients based on the average scanning speed, swing angle range, rated swing angle and rated scanning speed of the motor for each continuous processing path unit.

[0187] The main control module specifically includes:

[0188] The control unit is used to take the sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror body as the total steady-state heat generation rate, obtain the total steady-state heat dissipation rate according to the galvanometer heat dissipation parameters, make the total steady-state heat generation rate equal to the total steady-state heat dissipation rate based on the thermal balance principle, solve for the steady-state temperature of the galvanometer system, and obtain the galvanometer angular deformation amount according to the mirror body linear expansion coefficient and the difference between the steady-state temperature and the initial temperature.

[0189] An information receiving unit interacts with an information acquisition module and a processing path analysis module to receive data and transmit it to a path energy consumption assessment unit.

[0190] The path energy consumption assessment unit is used to calculate the baseline steady-state average energy consumption corresponding to each continuous processing path unit based on the number of continuous processing path units and the inherent electrical parameters of the galvanometer motor.

[0191] The information acquisition module specifically includes:

[0192] The first acquisition unit is used to acquire laser processing data and, based on the galvanometer equipment parameter data, acquire the inherent thermal characteristic parameters of the galvanometer system and the galvanometer heat dissipation parameters.

[0193] The second acquisition unit is used to acquire total processing path data based on laser processing data, extract all continuous laser processing path segments based on the total processing path data, and construct a path feature parameter set.

[0194] The processing path analysis module specifically includes:

[0195] A path segmentation unit is used to divide the continuous laser processing path into segments based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, and to obtain continuous processing path units.

[0196] An energy consumption correction analysis unit is used to obtain energy consumption correction coefficients based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit.

[0197] In summary, the advantages of this invention are as follows: by dividing the processing path units using characteristic parameters such as radius of curvature and path length, combined with the motor power consumption coefficient and mirror thermal characteristic parameters, a spatial basis for differentiated precision compensation is provided; by using the benchmark steady-state average energy consumption and introducing an energy consumption correction coefficient, the precise quantification of motor energy consumption is achieved; by solving the steady-state temperature using the thermal balance principle, the dynamic matching of heat generation and heat dissipation of the galvanometer system is realized; and by dynamically correcting the basic angular deformation by combining the thermal time constant with the processing time, the real-time characterization of the galvanometer's thermal deformation is achieved.

[0198] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.

Claims

1. A method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing, characterized in that, include: Acquire laser processing data, which includes the laser processing path and the corresponding laser power parameters; Based on the laser processing data, extract all continuous laser processing path segments and construct a path feature parameter set; Based on the galvanometer equipment parameter data and the galvanometer motor parameter analysis, the first power consumption coefficient and the second power consumption coefficient of the motor are obtained. The first power consumption coefficient represents the correlation coefficient between the instantaneous power consumption rate of the motor and the instantaneous angular velocity of the motor, and the second power consumption coefficient represents the correlation coefficient between the instantaneous power consumption rate of the motor and the instantaneous angular acceleration of the motor. Based on the galvanometer equipment parameter data and the galvanometer body material parameters, the emissivity and laser absorption efficiency of the galvanometer body are obtained. Based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, the continuous laser processing path is segmented to obtain continuous processing path units. Based on the continuous processing path unit and combined with the inherent electrical parameters of the galvanometer motor, the reference steady-state average energy consumption corresponding to each continuous processing path unit is calculated. The galvanometer angle variable is obtained based on the baseline steady-state average energy consumption; Based on the galvanometer angle variable corresponding to each continuous processing path unit, obtain the corresponding galvanometer accuracy compensation amount; Based on the galvanometer accuracy compensation amount, the thermal deformation accuracy compensation of the galvanometer is achieved.

2. The method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing according to claim 1, characterized in that, The step of extracting all continuous laser processing path segments based on laser processing data and constructing a path feature parameter set specifically includes: Based on laser processing data, total processing path data is obtained, which includes path coordinate sequence, laser power sequence, and scanning speed sequence. Acquire galvanometer equipment parameter data, wherein the galvanometer equipment parameter data includes the CNC system interpolation cycle; The product of the CNC system's interpolation cycle and scanning speed is used as the path continuity threshold; Based on the path coordinate sequence and the path continuity threshold, obtain continuous laser processing path segments; If the distance between any two adjacent path points in the path coordinate sequence does not exceed the path continuity threshold, then the laser processing path is continuous; if the distance between any two adjacent path points in the path coordinate sequence exceeds the path continuity threshold, then the laser processing path is discontinuous. These two path points are the dividing points of the laser processing path. Based on continuous laser processing path segments, the radius of curvature and path length of each segment are extracted to construct a path feature parameter set.

3. The method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing according to claim 2, characterized in that, The step of segmenting the continuous laser processing path based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror, and the laser absorption efficiency to obtain continuous processing path units specifically includes: S100: The product of the mirror emissivity and the laser absorption efficiency is used as the thermal radiation absorption coefficient. S200: Based on the path feature parameter set, the starting point of any continuous laser processing path segment is taken as the path reference point; S300: Based on the path reference point, obtain the deviation coefficient between any position of the continuous laser processing path segment and the path reference point; S400: Based on the accuracy compensation requirements for thermal deformation of the galvanometer, obtain the accuracy deviation threshold, which represents the maximum allowable angular deformation. S500: Traverse the position on the continuous laser processing path segment along the laser processing path until the deviation coefficient exceeds the accuracy deviation threshold, and take the position at this time as the new path reference point. S600: Repeat steps S300-S500 until the entire continuous laser processing path segment is traversed, and obtain the path reference point corresponding to each continuous laser processing path segment. S700: Based on the path reference point corresponding to each continuous laser processing path segment, the continuous laser processing path segment is divided into several continuous processing path units.

4. The method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing according to claim 3, characterized in that, The calculation of the baseline steady-state average energy consumption for each continuous processing path unit, based on the inherent electrical parameters of the galvanometer motor, specifically includes: Based on the continuous processing path units, obtain the average scanning speed and swing angle range of each continuous processing path unit; Based on the galvanometer equipment parameter data, obtain the inherent electrical parameters of the galvanometer motor, including motor winding resistance, motor efficiency, and motor back electromotive force coefficient; The instantaneous angular velocity of the galvanometer motor is obtained based on the ratio of the average scanning speed to the radius of curvature. The product of the instantaneous angular velocity and the back electromotive force coefficient of the motor is taken as the back electromotive force of the motor. Based on the parameter data of the galvanometer device, obtain the armature voltage of the galvanometer motor; The difference between the armature voltage and the back electromotive force of the galvanometer motor is used as the reference voltage. Based on Ohm's law, the ratio of the reference voltage to the motor winding resistance is used as the instantaneous operating current of the motor. The real-time energy consumption of the galvanometer motor is calculated based on the instantaneous operating current and winding resistance. Based on the actual processing time of each continuous processing path unit, the real-time energy consumption is integrated to obtain the total motor energy consumption during the processing of the path unit. Based on the total energy consumption of the motor and the processing time, the steady-state average energy consumption of the galvanometer motor is calculated. Based on the galvanometer equipment parameter data, obtain the motor's rated swing angle and rated scanning speed; The energy consumption correction coefficient is obtained based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit; The product of the energy consumption correction factor and the steady-state average energy consumption is used as the benchmark steady-state average energy consumption.

5. The method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing according to claim 4, characterized in that, The process of obtaining the energy consumption correction coefficient based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit specifically includes: The ratio of the average scanning speed to the rated scanning speed is used as the scanning deviation coefficient based on the average scanning speed of each continuous processing path unit. Based on the continuous processing path unit, obtain the path reference point corresponding to each continuous processing path unit; Specifically, the path reference point corresponding to the starting point of each continuous processing path unit is taken as the first path reference point, and the path reference point corresponding to the ending point of each continuous processing path unit is taken as the second path reference point. Based on the path coordinate sequence in the total processing path data, obtain the path coordinate sequence corresponding to each continuous processing path unit; The path point closest to the first path reference point in the continuous processing path unit is taken as the first feature path point, and the path point closest to the second path reference point is taken as the second feature path point. Based on the first path reference point and the first feature path point, obtain the starting point tangent direction vector; Based on the second path reference point and the second feature path point, obtain the endpoint tangent direction vector; Based on the starting point tangent direction vector and the ending point tangent direction vector, and using normalization processing, obtain the corresponding starting point tangent unit direction vector and ending point tangent unit direction vector; Based on the unit direction vector of the tangent at the starting point and the unit direction vector of the tangent at the ending point, obtain the angle between the tangents at the starting point and the ending point. Based on the unit direction vector of the starting point tangent, obtain the starting point characteristic swing angle; Based on the angle between the tangents at the starting point and the ending point, and the characteristic swing angle at the starting point, obtain the characteristic swing angle of the double tangents; Based on the double tangent feature swing angle, combined with the radius of curvature of the continuous processing path unit, the swing angle deviation coefficient is obtained; The product of the swing angle deviation coefficient and the scanning deviation coefficient is used as the energy consumption correction coefficient.

6. The method for compensating the thermal deformation accuracy of a galvanometer based on high-power laser processing according to claim 5, characterized in that, The step of obtaining the galvanometer angular deformation variable based on the benchmark steady-state average energy consumption specifically includes: Based on the laser power sequence in the total processing path data, obtain the laser power corresponding to each continuous processing path unit; Based on the galvanometer equipment parameter data, obtain the inherent thermal characteristic parameters of the galvanometer system, including the linear expansion coefficient of the mirror material, the mirror heat capacity, and the motor heat capacity; Based on the laser power corresponding to each continuous processing path unit, the product of the laser power and the thermal radiation absorption coefficient is taken as the laser thermal radiation absorption power. The sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror is taken as the total steady-state heat generation rate. Based on the galvanometer device parameter data, obtain the galvanometer heat dissipation parameters, which include the total convective heat transfer coefficient, effective heat dissipation area, active heat dissipation coefficient, and cooling medium flow rate. The total steady-state heat dissipation rate is obtained based on the galvanometer's heat dissipation parameters; Based on the principle of thermal balance, the steady-state heat generation rate is made equal to the steady-state heat dissipation rate, and the steady-state temperature of the galvanometer system is obtained by solving the problem. The basic angular deformation of the galvanometer is calculated using the thermal expansion law based on the linear expansion coefficient of the mirror body, the difference between the steady-state temperature and the initial temperature, and the reference swing angle of the path element. Based on the thermal time constant of the galvanometer system and combined with the processing time, the basic angular deformation is dynamically corrected to obtain the galvanometer angular deformation during the processing of each continuous processing path unit. Specifically, the angular deformation amount is: ； In the formula, This is the angular distortion of the galvanometer. The basic angular deformation amount, For processing time, The thermal time constant, For the heat capacity of the mirror body, For the motor's heat capacity, The total convective heat transfer coefficient is . For effective heat dissipation area, For active heat dissipation coefficient, For the cooling medium flow rate, The coefficient of linear expansion is 1 / 3. This is the temperature difference value. The swing angle of the continuous processing path unit. For steady-state temperature, This is the initial temperature.

7. A galvanometer thermal deformation accuracy compensation system based on high-power laser processing, used to implement the compensation method as described in any one of claims 1-6, characterized in that, include: The main control module is used to calculate the reference steady-state average energy consumption corresponding to each continuous processing path unit based on the number of continuous processing path units and the inherent electrical parameters of the galvanometer motor. The sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror body is used as the total steady-state heat generation rate. According to the galvanometer heat dissipation parameters, the total steady-state heat dissipation rate is obtained. Based on the principle of thermal balance, the total steady-state heat generation rate is made equal to the total steady-state heat dissipation rate to obtain the steady-state temperature of the galvanometer system. The angular deformation of the galvanometer is obtained according to the linear expansion coefficient of the mirror body and the difference between the steady-state temperature and the initial temperature. The information acquisition module is used to acquire laser processing data, acquire the inherent thermal characteristic parameters of the galvanometer system and the heat dissipation parameters of the galvanometer based on the galvanometer equipment parameter data, acquire the total processing path data based on the laser processing data, extract all continuous laser processing path segments based on the total processing path data, and construct a path feature parameter set. The processing path analysis module is used to divide the continuous laser processing path into segments based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, to obtain continuous processing path units, and to obtain energy consumption correction coefficients based on the average scanning speed, swing angle range, rated swing angle and rated scanning speed of the motor for each continuous processing path unit.

8. The galvanometer thermal deformation accuracy compensation system based on high-power laser processing according to claim 7, characterized in that, The main control module specifically includes: The control unit is used to take the sum of the reference steady-state average energy consumption and the laser thermal radiation absorption power of the mirror body as the total steady-state heat generation rate, obtain the total steady-state heat dissipation rate according to the galvanometer heat dissipation parameters, make the total steady-state heat generation rate equal to the total steady-state heat dissipation rate based on the thermal balance principle, solve for the steady-state temperature of the galvanometer system, and obtain the galvanometer angular deformation amount according to the mirror body linear expansion coefficient and the difference between the steady-state temperature and the initial temperature. An information receiving unit interacts with an information acquisition module and a processing path analysis module to receive data and transmit it to a path energy consumption assessment unit. The path energy consumption assessment unit is used to calculate the baseline steady-state average energy consumption corresponding to each continuous processing path unit based on the number of continuous processing path units and the inherent electrical parameters of the galvanometer motor.

9. The galvanometer thermal deformation accuracy compensation system based on high-power laser processing according to claim 7, characterized in that, The information acquisition module specifically includes: The first acquisition unit is used to acquire laser processing data and, based on the galvanometer equipment parameter data, acquire the inherent thermal characteristic parameters of the galvanometer system and the galvanometer heat dissipation parameters. The second acquisition unit is used to acquire total processing path data based on laser processing data, extract all continuous laser processing path segments based on the total processing path data, and construct a path feature parameter set.

10. The galvanometer thermal deformation accuracy compensation system based on high-power laser processing according to claim 7, characterized in that, The processing path analysis module specifically includes: A path segmentation unit is used to divide the continuous laser processing path into segments based on the path feature parameter set, the first power consumption coefficient of the motor, the second power consumption coefficient of the motor, the emissivity of the mirror and the laser absorption efficiency, and to obtain continuous processing path units. An energy consumption correction analysis unit is used to obtain energy consumption correction coefficients based on the average scanning speed, swing angle range, rated swing angle of the motor, and rated scanning speed of each continuous processing path unit.

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