Electronic device groove side wall flatness repairing and passivating treatment device
By combining a base, a three-axis motion platform, and negative pressure adsorption, the deposition deviation and visual positioning error problems of existing trench sidewall repair equipment have been solved, realizing high-precision repair and passivation treatment of electronic device trenches, and improving repair quality and reliability.
Patent Information
- Application Number
- CN202511750103.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-26
- Publication Date
- 2026-02-24
AI Technical Summary
In existing electronic device trenching equipment, the movement trajectory of the repair tool and the material deposition direction cannot match the actual inclination angle of the trench sidewall, resulting in large deviations in material deposition thickness, deposition blind spots at sidewall corners, and visual positioning errors, which affect the repair yield and processing reliability.
The device employs a combination of a base, a three-axis motion platform, a nozzle, and a camera. Combined with an angle adjustment mechanism and a rotation mechanism, it uses a triple mechanism of tilt compensation, rigid positioning, and negative pressure adsorption to precisely match the posture of the trench sidewall, ensuring the accuracy and positional stability of material deposition.
It significantly improves the repair quality and processing reliability of electronic device grooves, solves the problems of spray blind spots and visual obstruction during vertical operations, and achieves three-dimensional structure repair with micron-level precision.
Smart Images
Figure CN121568564A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of electronic device trench treatment equipment technology, specifically to an electronic device trench sidewall flatness repair and passivation treatment device. Background Technology
[0002] The device for repairing and passivating the sidewalls of electronic devices is a key piece of equipment in semiconductor manufacturing for optimizing defects after trench etching. It is mainly used to repair lattice damage and surface roughness caused by dry etching on the sidewalls of power device trenches, and to build a protective passivation layer, which directly affects the core electrical performance of the device, such as breakdown voltage and conduction current.
[0003] This device typically integrates multiple process units and a precise control system. During the repair stage, the damaged layer can be selectively removed by wet etching, or the etching defects can be eliminated by combining a sacrificial oxide layer growth-stripping process. Some advanced equipment uses dry processes such as pulsed laser deposition to avoid the instability of wet processing. During the passivation stage, a dielectric layer is prepared on the repaired sidewalls and the bottom of the trench using techniques such as atomic layer deposition, chemical vapor deposition, or thermal oxidation growth. The materials can be ferroelectric materials such as hafnium zirconium oxide, silicon nitride, or a combination of oxide layers. This can alleviate the electron trapping effect through a nonlinear polarized electric field and enhance the reliability of the gate oxide layer, avoiding the risk of breakdown caused by the concentration of electric field at the bottom of the trench.
[0004] The device is equipped with a high-precision gas / liquid delivery system, temperature control module, and online monitoring components, which can accurately control parameters such as corrosion time and deposition thickness. It is compatible with various semiconductor materials such as silicon, silicon carbide, and gallium oxide, and is widely used in the manufacturing of high-end power devices in fields such as new energy vehicles and aerospace. It is a core piece of equipment for improving the interface quality and long-term stability of devices.
[0005] In existing equipment for repairing the sidewalls of electronic device trenches, the existing architecture, with the working end at a 90° vertical angle to the trench sidewall, causes the movement trajectory of the repair tools (such as ion beam nozzles and deposition nozzles) and the material deposition direction to be mismatched with the actual tilt angle of the trench sidewall (usually 5°-15°). This results in a material deposition thickness deviation of ±15%-20% (fluctuating by ±8-20nm when the target thickness is 50-100nm), deposition blind spots with only 60%-70% coverage at the corners of the sidewall, and a defect identification error of ±3μm at the bottom of the trench due to vertical viewing angle obstruction in the visual positioning system. Actual test data shows that this design reduces the yield rate of repairing 10μm deep trenches from 90% to 65%-75%, and increases the rework rate by 2-3 times due to secondary processing in the repair of trenches with a high aspect ratio (≥3:1). Essentially, this exposes the structural contradiction between the "vertical working architecture" and the "three-dimensional precision repair requirements." To address this, we propose a device for repairing and passivating the flatness of the sidewalls of electronic device trenches. Summary of the Invention
[0006] (a) Technical problems to be solved To address the shortcomings of existing technologies, this invention provides an electronic device trench sidewall smoothness repair and passivation treatment device. It solves the problem that the movement trajectory and material deposition direction of the repair tools in existing electronic device trench treatment equipment cannot match the actual inclination angle of the trench sidewall, resulting in a material deposition thickness deviation of ±15%-20% and a deposition blind zone with a coverage of only 60%-70% at the sidewall corners.
[0007] (II) Technical Solution To achieve the above objectives, the present invention is implemented through the following technical solution: an electronic device for repairing and passivating the flatness of the sidewall of a trench, comprising a base, a three-axis motion platform, a nozzle, and a camera. The three-axis motion platform is installed on the upper surface of the base, the nozzle is fixed to the moving end of the three-axis motion platform, the camera is installed on the moving end of the three-axis motion platform, and a workpiece placement device is provided on the upper surface of the base. The workpiece placement device includes an angle adjustment mechanism, which includes a base. The base is fixedly connected to the upper surface of a base. A housing is fixedly connected to the upper surface of the base. A guide rail is fixedly connected inside the housing. A moving stage is slidably connected to the surface of the guide rail. An arc-shaped rack is fixedly connected to the outer arc surface of the moving stage. A servo motor is fixedly connected to the inclined surface of the housing. A rotating shaft is fixedly connected to the drive shaft of the servo motor. A worm gear adapted to the arc-shaped rack is fixedly connected to the surface of the rotating shaft. The workpiece placement device also includes a rotating mechanism, which consists of a servo motor, a transmission shaft, a worm gear, a linkage, a positioning plate, and a turntable.
[0008] Preferably, the rotating mechanism includes a second servo motor, which is fixedly connected to the side surface of the moving table. A transmission shaft is fixedly connected to the drive shaft of the second servo motor via a coupling. A second worm gear is fixedly connected to the surface of the transmission shaft. A positioning plate is fixedly connected to the inner wall of the moving table. A rotating hole is formed on the surface of the positioning plate. A linkage adapted to the second worm gear is rotatably connected to the inner wall of the rotating hole. A turntable is fixedly connected to the upper surface of the linkage. By utilizing the cooperation between the second worm gear and the linkage, the turntable can be driven to rotate, thereby moving the workpiece to a fixed area or a material handling area in conjunction with the positioning plate, facilitating the loading and unloading of materials by the equipment.
[0009] Preferably, the guide rails are arranged in an isosceles trapezoidal shape, and there are two guide rails. The two guide rails are mirror images of each other with the vertical axis of the outer shell as the mirror axis. The moving stage is in movable contact with the inner wall of the outer shell. The guide rails can guide the movement direction of the moving stage, ensuring that the moving stage remains stable during movement and does not deviate or shake. At the same time, the movable contact design between the moving stage and the inner wall of the outer shell further enhances the stability of the moving stage during movement and effectively reduces errors caused by vibration.
[0010] Preferably, the rotating shaft is rotatably connected to the inner wall of the housing, the worm gear is located on the inner wall of the housing, and the worm gear meshes with the tooth groove of the arc-shaped rack. By utilizing the cooperation between the worm gear and the arc-shaped rack, the moving table can be pushed along a specified direction while the servo motor drives the rotating shaft, thereby adjusting the angle of the moving table and realizing the precise adjustment of the workpiece placement angle to meet the processing requirements of the groove.
[0011] Preferably, the drive shaft is rotatably connected to the inner wall of the moving table, the drive shaft is stepped, and a key block is provided on the surface of the drive shaft. The second worm gear is located on the inner wall of the moving table, and a keyway adapted to the key block is opened on the inner wall of the second worm gear. The turntable is movably abutted against the upper surface of the positioning plate, and a placement cavity for placing the workpiece is opened on the surface of the turntable. The drive shaft can connect the second servo motor and the second worm gear, so that the second servo motor drives the worm gear to rotate, ensuring no relative slippage during power transmission and improving transmission efficiency and torque transmission accuracy.
[0012] Preferably, the surface of the base is provided with an assisting device, the assisting device includes a restraining mechanism, the restraining mechanism includes an air pump, the air pump is fixedly connected to the upper surface of the base, the side interface of the air pump is internally threaded with a connecting pipe, the inner wall of the moving platform is fixedly connected with a rotary joint, the connecting pipe is fixedly connected to the lower interface of the rotary joint, the lower surface of the linkage is provided with a connecting cavity, and the rotary joint is fixedly connected to the inner wall of the connecting cavity. The positioning plate has an installation groove on its inner wall. A sealing ring is fixedly connected to the inner wall of the positioning plate in the installation groove. The sealing ring is sleeved on the surface of the linkage. The positioning plate has an annular cavity and a connecting cavity on its inner wall. The positioning plate has a suction hole on its upper surface. A limit frame is fixedly connected to the inner wall of the outer shell. The limit frame is fixedly connected to the surface of the connecting tube. The assisting device also includes a feeding mechanism. The upper surface of the moving table is provided with a storage cavity for installing the feeding mechanism. A rotating joint can be used to connect the connecting pipe to the connecting cavity, so that the air pump can deliver airflow to the actuator through the connecting pipe, and then generate suction force through the suction holes on the positioning plate to achieve a stable binding of the workpiece.
[0013] Preferably, the feeding mechanism includes a three-way connector, which is fixedly connected to the upper interface of the air pump. A conduit is fixedly connected to the upper surface of the three-way connector. A lower sealing plate is fixedly connected to the side of the conduit away from the three-way connector. The lower sealing plate is fixedly connected to the inner wall of the receiving cavity. A cylinder is fixedly connected to the upper surface of the lower sealing plate. The cylinder is fixedly connected to the inner wall of the receiving cavity. An upper sealing plate is fixedly connected to the upper surface of the cylinder. A top column is slidably connected to the inner wall of the upper sealing plate. A piston is fixedly connected to the surface of the top column. A rubber ring is fixedly connected to the surface of the piston. A top block is fixedly connected to the upper surface of the top column. A fixing bracket is fixedly connected to the surface of the conduit. The fixing bracket is fixedly connected to the inner wall of the outer shell. The air pump and the conduit can be connected using the three-way connector, so that the gas pumped by the air pump can be sent into the cylinder to push the piston in the cylinder to move, thereby pushing the top column to rise.
[0014] Preferably, the connecting pipe is connected to the interior of the rotary joint, the rotary joint is connected to the interior of the connecting cavity, the annular cavity is connected to the interior of the connecting cavity, the connecting cavity is connected to the interior of the annular cavity, and the suction hole is connected to the interior of the connecting cavity. By utilizing the cooperation between the annular cavity and the connecting cavity, the connecting cavity and the suction hole can be connected, so that the gas at the suction hole can be pumped out by the air pump, thereby generating suction at the suction hole.
[0015] Preferably, the piston is located on the inner wall of the cylinder, the rubber ring is slidably connected to the inner wall of the cylinder, the left and right sides of the top block are arc-shaped, the surface of the positioning plate is provided with a square hole, the top block is located inside the square hole, and the top block can be moved upward under the action of the top column to push out the workpiece that has moved above it. At the same time, the arc-shaped surfaces on both sides of the top block can push it back into the square hole during the rotation of the turntable.
[0016] In summary, the technical effects and advantages of this invention are as follows: 1. In this invention, by setting up a workpiece placement device, the triple mechanism of "tilt angle compensation - rigid positioning - negative pressure adsorption" is used to effectively solve the problems of spray blind zone, material accumulation and visual obstruction during vertical operation. This provides a hardware foundation of "precise posture matching and stable and controllable process" for the repair of grooves in electronic devices with micron-level precision requirements, and significantly improves the repair quality and processing reliability of complex three-dimensional structures.
[0017] 2. In this invention, by setting up an assisting device, the triple mechanism of "negative pressure adsorption to ensure positional stability - sealed design to maintain adsorption efficiency - hidden structure to eliminate interference" is used to provide ideal processing conditions of "zero displacement, low vibration, and no stress" for high-precision repair operations. It solves the stability problem of complex three-dimensional structure repair from the basic positioning level and significantly improves the processing reliability of the equipment under micron-level precision requirements. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of an electronic device trench sidewall flatness repair and passivation treatment device according to the present invention; Figure 2 This is a front view of an electronic device trench sidewall flatness repair and passivation treatment device according to the present invention; Figure 3 This is a side view of an electronic device trench sidewall flatness repair and passivation treatment device according to the present invention; Figure 4 This is a schematic diagram of the tilted structure of the device for repairing and passivating the flatness of the trench sidewall of an electronic device according to the present invention. Figure 5 This is a partial structural schematic diagram of an electronic device trench sidewall flatness repair and passivation treatment device according to the present invention; Figure 6 This is a schematic diagram of the workpiece placement device structure of the electronic device trench sidewall flatness repair and passivation treatment apparatus of the present invention; Figure 7 This is a cross-sectional view of the workpiece placement device of the electronic device trench sidewall flatness repair and passivation treatment apparatus of the present invention; Figure 8 This is a partial structural diagram of the rotating mechanism of an electronic device trench sidewall flatness repair and passivation treatment device according to the present invention; Figure 9 This is a schematic diagram of the auxiliary device structure of the electronic device trench sidewall flatness repair and passivation treatment apparatus of the present invention; Figure 10 This invention relates to an apparatus for repairing and passivating the flatness of the sidewalls of electronic device trenches. Figure 9 Schematic diagram of the structure at point A in the middle; Figure 11 This is a schematic diagram of the auxiliary device of the device for repairing and passivating the smoothness of the trench sidewall of an electronic device according to the present invention. Figure 12 This invention relates to an apparatus for repairing and passivating the flatness of the sidewalls of electronic device trenches. Figure 11 Schematic diagram of the structure at point B.
[0019] In the diagram: 1. Base; 2. Three-axis motion platform; 3. Nozzle; 4. Camera; 5. Workpiece placement device; 51. Angle adjustment mechanism; 511. Base; 512. Housing; 513. Guide rail; 514. Moving stage; 515. Arc rack; 516. Servo motor 1; 517. Rotating shaft; 518. Worm gear 1; 52. Rotating mechanism; 521. Servo motor II; 522. Drive shaft; 523. Worm gear II; 524. Linkage device; 525. Positioning plate; 526. Turntable; 6. Assisting devices; 61. Restraint mechanism; 611. Air pump; 612. Connecting pipe; 613. Rotary joint; 614. Connecting cavity; 615. Sealing ring; 616. Annular cavity; 617. Connecting cavity; 618. Suction hole; 619. Limiting frame; 62. Feeding mechanism; 621. T-joint; 622. Guide tube; 623. Lower sealing plate; 624. Cylinder body; 625. Top column; 626. Piston; 627. Rubber ring; 628. Upper sealing plate; 629. Top block; 6210. Fixing frame. Detailed Implementation
[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0021] refer to Figures 1-12 The device shown is an electronic device for repairing and passivating the flatness of the sidewall of the trench. It includes a base 1, a three-axis motion platform 2, a nozzle 3, and a camera 4. The three-axis motion platform 2 is installed on the upper surface of the base 1, the nozzle 3 is fixed on the moving end of the three-axis motion platform 2, the camera 4 is installed on the moving end of the three-axis motion platform 2, and a workpiece placement device 5 is provided on the upper surface of the base 1. The workpiece placement device 5 includes an angle adjustment mechanism 51, which includes a base 511. The base 511 is fixedly connected to the upper surface of the base 1. A housing 512 is fixedly connected to the upper surface of the base 511. A guide rail 513 is fixedly connected inside the housing 512. A moving stage 514 is slidably connected to the surface of the guide rail 513. An arc-shaped rack 515 is fixedly connected to the outer arc surface of the moving stage 514. A servo motor 516 is fixedly connected to the inclined surface of the housing 512. A rotating shaft 517 is fixedly connected to the drive shaft of the servo motor 516. A worm gear 518 adapted to the arc-shaped rack 515 is fixedly connected to the surface of the rotating shaft 517. The workpiece placement device 5 also includes a rotating mechanism 52, which consists of a servo motor 521, a transmission shaft 522, a worm gear 523, a linkage 524, a positioning plate 525, and a turntable 526.
[0022] The rotating mechanism 52 includes a second servo motor 521, which is fixedly connected to the side surface of the moving table 514. A transmission shaft 522 is fixedly connected to the drive shaft of the second servo motor 521 via a coupling. A second worm gear 523 is fixedly connected to the surface of the transmission shaft 522. A positioning plate 525 is fixedly connected to the inner wall of the moving table 514. A rotating hole is opened on the surface of the positioning plate 525. A linkage 524 adapted to the second worm gear 523 is rotatably connected to the inner wall of the rotating hole. A turntable 526 is fixedly connected to the upper surface of the linkage 524. By utilizing the cooperation between the second worm gear 523 and the linkage 524, the turntable 526 can be driven to rotate, so as to move the workpiece to the fixed area or the picking area in conjunction with the positioning plate 525, which facilitates the loading and unloading of the equipment.
[0023] The guide rail 513 is arranged in an isosceles trapezoidal shape, and there are two guide rails 513. The two guide rails 513 are mirrored about the vertical axis of the outer shell 512. The moving stage 514 is in movable contact with the inner wall of the outer shell 512. The guide rail 513 can guide the movement direction of the moving stage 514, ensuring that the moving stage 514 remains stable during movement and will not deviate or shake. At the same time, the movable contact design between the moving stage 514 and the inner wall of the outer shell 512 further enhances the stability of the moving stage 514 during movement and effectively reduces the error caused by vibration.
[0024] The rotating shaft 517 is rotatably connected to the inner wall of the housing 512. The worm gear 518 is located on the inner wall of the housing 512. The worm gear 518 meshes with the tooth groove of the arc-shaped rack 515. By utilizing the cooperation between the worm gear 518 and the arc-shaped rack 515, the moving table 514 can be pushed along a specified direction while the servo motor drives the rotating shaft 517, thereby adjusting the angle of the moving table 514 and realizing the precise adjustment of the workpiece placement angle to meet the processing requirements of the groove.
[0025] The drive shaft 522 is rotatably connected to the inner wall of the moving table 514. The drive shaft 522 is stepped and has a key block on its surface. The worm gear 523 is located on the inner wall of the moving table 514. The inner wall of the worm gear 523 has a keyway that matches the key block. The turntable 526 is in movable contact with the upper surface of the positioning plate 525. The surface of the turntable 526 has a placement cavity for placing workpieces. The drive shaft 522 can be used to connect the servo motor 521 and the worm gear 523, so that the servo motor 521 drives the worm gear to rotate, ensuring no relative slippage during power transmission and improving transmission efficiency and torque transmission accuracy.
[0026] The base 1 is provided with an assisting device 6, which includes a restraining mechanism 61. The restraining mechanism 61 includes an air pump 611, which is fixedly connected to the upper surface of the base 1. The side interface of the air pump 611 is internally threaded with a connecting pipe 612. The inner wall of the moving platform 514 is fixedly connected with a rotary joint 613. The connecting pipe 612 is fixedly connected to the lower interface of the rotary joint 613. The lower surface of the linkage 524 is provided with a connecting cavity 614, and the rotary joint 613 is fixedly connected to the inner wall of the connecting cavity 614. The inner wall of the positioning plate 525 is provided with an installation groove. A sealing ring 615 is fixedly connected to the inner wall of the positioning plate 525 in the installation groove. The sealing ring 615 is sleeved on the surface of the linkage 524. An annular cavity 616 is provided in the inner wall of the positioning plate 525. A connecting cavity 617 is provided in the inner wall of the positioning plate 525. A suction hole 618 is provided on the upper surface of the positioning plate 525. A limit frame 619 is fixedly connected to the inner wall of the outer shell 512. The limit frame 619 is fixedly connected to the surface of the connecting pipe 612. The assisting device 6 also includes a feeding mechanism 62. The upper surface of the moving table 514 is provided with a storage cavity for installing the feeding mechanism 62. The connecting pipe 612 and the connecting cavity 614 can be connected by a rotary joint 613, so that the air pump 611 can deliver airflow to the linkage 524 through the connecting pipe 612, and then generate suction force through the suction hole 618 on the positioning plate 525 to achieve a stable binding of the workpiece.
[0027] The feeding mechanism 62 includes a three-way connector 621, which is fixedly connected to the upper interface of the air pump 611. A conduit 622 is fixedly connected to the upper surface of the three-way connector 621. A lower sealing disc 623 is fixedly connected to the side of the conduit 622 away from the three-way connector 621. The lower sealing disc 623 is fixedly connected to the inner wall of the receiving cavity. A cylinder 624 is fixedly connected to the upper surface of the lower sealing disc 623. The cylinder 624 is fixedly connected to the inner wall of the receiving cavity. An upper sealing disc 628 is fixedly connected to the upper surface of the cylinder 624. The inner wall of the upper sealing disc 628 is slidably connected. A top post 625 is connected to a piston 626, and a rubber ring 627 is fixedly connected to the surface of the piston 626. A top block 629 is fixedly connected to the upper surface of the top post 625. A fixing bracket 6210 is fixedly connected to the surface of the conduit 622. The fixing bracket 6210 is fixedly connected to the inner wall of the outer shell 512. An air pump 611 and a conduit 622 can be connected by a three-way connector 621, so that the gas pumped by the air pump 611 can be sent into the cylinder 624 to push the piston 626 in the cylinder 624 to move, thereby pushing the top post 625 to rise.
[0028] The connecting pipe 612 is connected to the interior of the rotary joint 613, the rotary joint 613 is connected to the interior of the connecting cavity 614, the annular cavity 616 is connected to the interior of the connecting cavity 614, the connecting cavity 617 is connected to the interior of the annular cavity 616, and the suction hole 618 is connected to the interior of the connecting cavity 617. By utilizing the cooperation between the annular cavity 616 and the connecting cavity 617, the connecting cavity 614 and the suction hole 618 can be connected, so that the gas at the suction hole 618 can be pumped out by the air pump 611, thereby generating suction at the suction hole 618.
[0029] The piston 626 is located on the inner wall of the cylinder 624, the rubber ring 627 is slidably connected to the inner wall of the cylinder 624, the top block 629 is arc-shaped on both the left and right sides, the positioning plate 525 has a square hole on its surface, and the top block 629 is located inside the square hole. The top block 629 can move upward under the action of the top column 625 to push out the workpiece that has moved above it. At the same time, the arc-shaped surfaces on both sides of the top block 629 can push the turntable 526 back into the square hole during the rotation process.
[0030] Working principle of the invention: When using the equipment for processing, connect all the power supplies and cables of the equipment to the designated interface. After completing the installation and preparation of the equipment, turn on the switch of the equipment. At this time, the equipment is powered on and in standby mode. When the feeding mechanism located on the side of the equipment places the workpiece into the placement cavity, the equipment starts to work. At this time, servo motor 521, in conjunction with drive shaft 522, rotates worm gear 523. Worm gear 523 meshes with linkage 524. Under the action of worm gear 523, linkage 524 rotates turntable 526 counterclockwise. Turntable 526 rotates 90° and synchronously pushes the workpiece located in the placement cavity. The workpiece moves towards suction hole 618. When the workpiece moves directly above suction hole 618, servo motor 521 stops working. When the workpiece moves to suction hole 618, air pump 611 is powered on. Air pump 611, in conjunction with connecting pipe 612 and rotary joint 613, draws air from connecting cavity 614. At this time, connecting cavity 614, in conjunction with annular cavity 616 and connecting cavity 617, draws air from suction hole 618. When air is drawn from suction hole 618, due to being blocked by workpiece, suction hole 618 gradually generates negative pressure and adsorbs workpiece. After the workpiece is attracted by the suction hole 618, the servo motor 516, in conjunction with the rotating shaft 517, rotates the worm gear 518. The worm gear 518 meshes with the arc rack 515. Under the action of the worm gear 518, the arc rack 515 pushes the moving stage 514. Guided by the housing 512 and the guide rail 513, the moving stage 514 rotates along the specified direction and gradually tilts. When the moving stage 514 rotates to the maximum angle, i.e., +45° or -45°, the servo motor 516 and the rotating shaft 517 stop driving the worm gear 518. The worm gear 518 stops rotating and, in conjunction with the arc rack 515, locks the position of the moving stage 514. At this time, the moving stage 514 in the locked state adjusts the workpiece placed on the positioning plate 525 to an inclined state, so that the workpiece is aligned with the nozzle 3 at a 45° angle. When the workpiece is tilted, the three-axis motion platform 2 works to move the nozzle 3 above the workpiece. The nozzle 3, together with the image captured by the camera 4, gradually repairs the workpiece. After the nozzle 3 completes the repair, the curing device integrated on the nozzle 3 works to cure the repaired area. After curing is completed, the nozzle 3 is controlled to change its working mode to passivate the repaired groove. After the workpiece is repaired and passivated, the three-axis motion platform 2 controls the nozzle 3 to leave the workpiece processing area. After the nozzle 3 leaves, the moving table 514 is driven to reset, moving the workpiece to a horizontal position. When the workpiece is moved to a horizontal position, the air pump 611 stops working, and the suction hole 618 loses suction and stops adsorbing the workpiece. At this time, the servo motor 521 restarts, cooperating with the transmission shaft 522, the worm gear 523, and the linkage 524 to rotate the turntable 526. The turntable 526 rotates again, rotating 180° counterclockwise, pushing the workpiece to the top. Directly above block 629; when the workpiece moves directly above block 629, servo motor 521 stops working, air pump 611 starts working, and part of the air pumped out by air pump 611 is injected into conduit 622 through three-way connector 621. Conduit 622 sends the gas into cylinder 624, causing the air pressure in cylinder 624 to rise. At the same time, piston 626 located in cylinder 624 is pushed by the gas and lifts top column 625. Top column 625 pushes top block 629, and top block 629 moves upward to push the workpiece out of the placement cavity, so that the unloading mechanism 62 can pick up the workpiece. After the workpiece is removed, the air pump 611 stops working, and the servo motor 521 starts working again, rotating the turntable 526 90° counterclockwise, so that the placement cavity of the turntable 526 moves back to the loading position. Then, the above steps are followed to repair the next electronic device. By setting up the workpiece placement device 5, and utilizing the triple mechanism of "tilt angle compensation - rigid positioning - negative pressure adsorption", the problems of spray blind zone, material accumulation and visual obstruction during vertical operation are effectively solved. This provides a hardware foundation of "precise posture matching - stable and controllable process" for the repair of grooves in electronic devices with micron-level precision requirements, and significantly improves the repair quality and processing reliability of complex three-dimensional structures. In addition, by setting up the assistance device 6, the triple mechanism of "negative pressure adsorption to ensure positional stability - sealed design to maintain adsorption efficiency - hidden structure to eliminate interference" provides ideal processing conditions of "zero displacement, low vibration and no stress" for high-precision repair operations. It solves the stability problem of complex three-dimensional structure repair from the basic positioning level and significantly improves the processing reliability of the equipment under micron-level precision requirements.
[0031] All electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional, known device such as a computer. Furthermore, the repair steps and principles for electronic devices described in the article can all be achieved using conventional, known technical methods.
[0032] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A device for repairing and passivating the flatness of the sidewalls of electronic device trenches, comprising a base (1), a three-axis motion platform (2), a nozzle (3), and a camera (4), characterized in that: The three-axis motion platform (2) is installed on the upper surface of the base (1), the nozzle (3) is fixed on the moving end of the three-axis motion platform (2), the camera (4) is installed on the moving end of the three-axis motion platform (2), and a workpiece placement device (5) is provided on the upper surface of the base (1). The workpiece placement device (5) includes an angle adjustment mechanism (51), which includes a base (511). The base (511) is fixedly connected to the upper surface of the base (1). A shell (512) is fixedly connected to the upper surface of the base (511). A guide rail (513) is fixedly connected inside the shell (512). A moving stage (514) is slidably connected to the surface of the guide rail (513). An arc-shaped rack (515) is fixedly connected to the outer arc surface of the moving stage (514). A servo motor (516) is fixedly connected to the inclined surface of the shell (512). A rotating shaft (517) is fixedly connected to the drive shaft of the servo motor (516). A worm gear (518) adapted to the arc-shaped rack (515) is fixedly connected to the surface of the rotating shaft (517). The workpiece placement device (5) also includes a rotating mechanism (52), which consists of a servo motor (521), a transmission shaft (522), a worm gear (523), a linkage (524), a positioning plate (525), and a turntable (526).
2. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 1, characterized in that: The rotating mechanism (52) includes a second servo motor (521), which is fixedly connected to the side surface of the moving stage (514). A transmission shaft (522) is fixedly connected to the drive shaft of the second servo motor (521) via a coupling. A second worm gear (523) is fixedly connected to the surface of the transmission shaft (522). A positioning plate (525) is fixedly connected to the inner wall of the moving stage (514). A rotating hole is opened on the surface of the positioning plate (525). A linkage (524) adapted to the second worm gear (523) is rotatably connected to the inner wall of the rotating hole of the positioning plate (525). A turntable (526) is fixedly connected to the upper surface of the linkage (524).
3. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 1, characterized in that: The guide rail (513) is arranged in an isosceles trapezoidal shape. There are two guide rails (513). The two guide rails (513) are arranged in a mirror image with the vertical axis of the outer shell (512) as the mirror axis. The moving stage (514) is in movable contact with the inner wall of the outer shell (512).
4. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 1, characterized in that: The rotating shaft (517) is rotatably connected to the inner wall of the outer shell (512), the worm gear (518) is located on the inner wall of the outer shell (512), and the worm gear (518) meshes with the tooth groove of the arc-shaped rack (515).
5. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 1, characterized in that: The drive shaft (522) is rotatably connected to the inner wall of the moving table (514). The drive shaft (522) is arranged in a stepped manner. A key block is provided on the surface of the drive shaft (522). The second worm gear (523) is located on the inner wall of the moving table (514). A keyway adapted to the key block is opened on the inner wall of the second worm gear (523). The turntable (526) is in movable contact with the upper surface of the positioning plate (525). A placement cavity for placing workpieces is opened on the surface of the turntable (526).
6. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 1, characterized in that: The base (1) is provided with an assisting device (6), which includes a restraining mechanism (61) and an air pump (611). The air pump (611) is fixedly connected to the upper surface of the base (1). The side interface of the air pump (611) is internally threaded with a connecting pipe (612). The inner wall of the moving platform (514) is fixedly connected with a rotary joint (613). The connecting pipe (612) is fixedly connected to the lower interface of the rotary joint (613). The lower surface of the linkage (524) is provided with a connecting cavity (614). The rotary joint (613) is fixedly connected to the inner wall of the connecting cavity (614). The inner wall of the positioning plate (525) is provided with an installation groove. A sealing ring (615) is fixedly connected to the inner wall of the positioning plate (525) in the installation groove. The sealing ring (615) is sleeved on the surface of the linkage (524). An annular cavity (616) is provided on the inner wall of the positioning plate (525). A connecting cavity (617) is provided on the inner wall of the positioning plate (525). A suction hole (618) is provided on the upper surface of the positioning plate (525). A limit frame (619) is fixedly connected to the inner wall of the outer shell (512). The limit frame (619) is fixedly connected to the surface of the connecting pipe (612). The assisting device (6) also includes a feeding mechanism (62), and the upper surface of the moving platform (514) is provided with a storage cavity for installing the feeding mechanism (62).
7. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 6, characterized in that: The feeding mechanism (62) includes a three-way connector (621), which is fixedly connected to the upper interface of the air pump (611). A conduit (622) is fixedly connected to the upper surface of the three-way connector (621). A lower sealing plate (623) is fixedly connected to the side of the conduit (622) away from the three-way connector (621). The lower sealing plate (623) is fixedly connected to the inner wall of the receiving cavity. A cylinder (624) is fixedly connected to the upper surface of the lower sealing plate (623). The cylinder (624) is fixedly connected to the inner wall of the receiving cavity. Next, an upper sealing disc (628) is fixedly connected to the upper surface of the cylinder (624), a top column (625) is slidably connected to the inner wall of the upper sealing disc (628), a piston (626) is fixedly connected to the surface of the top column (625), a rubber ring (627) is fixedly connected to the surface of the piston (626), a top block (629) is fixedly connected to the upper surface of the top column (625), and a fixing bracket (6210) is fixedly connected to the surface of the guide tube (622). The fixing bracket (6210) is fixedly connected to the inner wall of the outer shell (512).
8. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 6, characterized in that: The connecting pipe (612) is connected to the interior of the rotary joint (613), the rotary joint (613) is connected to the interior of the connecting cavity (614), the annular cavity (616) is connected to the interior of the connecting cavity (614), the connecting cavity (617) is connected to the interior of the annular cavity (616), and the suction hole (618) is connected to the interior of the connecting cavity (617).
9. The device for repairing and passivating the flatness of the sidewall of an electronic device trench according to claim 7, characterized in that: The piston (626) is located on the inner wall of the cylinder (624), the rubber ring (627) is slidably connected to the inner wall of the cylinder (624), the top block (629) is arc-shaped on both the left and right sides, the surface of the positioning plate (525) is provided with a square hole, and the top block (629) is located inside the square hole.