Template preparation method based on modular micro-nano optical structure and template

Abstract

The invention discloses a template preparation method based on a modularized micro-nano optical structure, and the method comprises the following steps: providing a primitive library which comprises a plurality of basic texture modules; target image design: forming a target image through an image forming mechanism; the target image is analyzed and segmented, a plurality of sub-image modules are obtained, and parameters of at least two sub-image modules are different; generating a target image template, combining the sub-image modules, and calculating a texture structure corresponding to each sub-image module; and according to the texture structure corresponding to each sub-image module, selecting a basic texture module corresponding to the texture structure in the sub-image module from the primitive library, and combining the basic texture modules into a target image template. According to the method, the dependence on high-end photoetching equipment and customized masks is eliminated, the masks do not need to be repeatedly manufactured, and the plate-making cost is greatly reduced; the template preparation period is shortened from tens of hours to several hours, and small-batch and personalized order requirements can be quickly responded.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro-nano structure plate making, and in particular to a preparation method of a modular micro-nano optical structure template and the template. BACKGROUND

[0002] In the field of micro-nano optical packaging anti-counterfeiting manufacturing, plate making is a core process link for realizing optical graphics (such as diffractive color, three-dimensional dynamic, alignment target, and tracking line identification, etc.). Traditional plate making methods mainly rely on photolithography technology, or multi-mask plate making technology, which requires complex processes such as photoresist coating, exposure, and development.

[0003] Firstly, the equipment cost of traditional photolithography plate making is extremely high. The purchase and maintenance cost of high-end photolithography equipment is in the hundreds of millions, which is difficult for small enterprises or research and development teams to bear. Secondly, mask plate making is complex and time-consuming: each pattern needs to be customized with a special mask plate, and the design and production of the mask plate involve high-precision electron beam lithography technology, which not only has a complicated process, but also generates a large amount of material waste (such as chromium plate and photoresist), further increasing the cost.

[0004] From the efficiency point of view, traditional photolithography is a "point-by-point / region-by-region" processing method. For complex pattern design, multiple etching and alignment are required, and the single plate making process takes several hours or even several days. For example, to make an optical pattern containing multiple colors and geometric elements, the traditional method may require 3-5 photolithography processes, with a total cycle of up to one week, which seriously restricts the product manufacturing speed. Once the pattern design is changed, the mask plate needs to be re-made, and there is almost no possibility of modification and adjustment, which cannot quickly respond to the market demand for individualization and small batch production.

[0005] In addition, traditional photolithography has a large environmental pressure: the chemical reagents such as developing solution and etching solution used in the photolithography process can pollute water and soil if not properly handled, increasing the cost of environmental governance. In summary, the traditional plate making method has obvious defects in cost, efficiency, precision, flexibility, and environmental protection, and a more efficient, low-cost, and flexible plate making technology is urgently needed. SUMMARY

[0006] Therefore, it is necessary to provide a preparation method of a modular micro-nano optical structure template and the template to solve the above technical problems.

[0007] One technical solution of the present application is: A preparation method of a modular micro-nano optical structure template, comprising the following steps: providing a primitive library, wherein the primitive library includes a plurality of basic texture modules; The target image is designed, and a target image is formed by an image forming mechanism; the target image is analyzed and segmented to obtain a plurality of sub-image modules, wherein at least two sub-image modules have different parameters; A target image template is generated, the sub-image modules are combined, and the texture structure corresponding to each sub-image module is calculated; according to the texture structure corresponding to each sub-image module, a basic texture module corresponding to the texture structure in the sub-image module is selected from a primitive library to combine the target image template.

[0008] As one of the specific embodiments, a primitive library is established, different texture structures are prefabricated by micro-nano processing technology, the different texture structures are copied to the surface of a substrate to form different basic texture modules, wherein different texture structures correspond to different diffraction effects.

[0009] As one of the specific embodiments, the texture structure includes one of a grating, an achromatic spot, a diffraction lens, a dynamic diffraction grating, a Fresnel lens, a cylindrical grating, and a DOE element device.

[0010] As one of the specific embodiments, the sub-image modules are analyzed to obtain the parameters of the texture structure corresponding to each sub-image module.

[0011] As one of the specific embodiments, the parameters include one or more of a texture structure, a spatial position, a rotation angle, and a basic texture module size.

[0012] As one of the specific embodiments, the method for combining the target image template includes the following steps: according to the sub-image module to be copied, a corresponding basic texture module is selected from the primitive library, the basic texture module is adjusted to match the texture structure in the sub-image module to be copied, the texture structure on the basic texture module is transferred and copied to the transfer template, the above steps are repeated until the texture structures of all sub-image modules are transferred and copied to the transfer template to form the final target image template.

[0013] As one of the specific embodiments, the combination of the target image template is carried out by a control system, and the control method of the control system is as follows: the central control system sends an instruction to control the transfer adhesive coating control unit to coat the transfer adhesive on the surface of the transfer template, the central control system controls the base texture module motion control unit and the transfer template motion control unit, the base texture module motion control unit controls the motion of the base texture module, the transfer template motion control unit controls the motion of the transfer template, after adjusting the positions of the base texture module and the transfer template corresponding to each other, the graphical control unit determines the area shape to be exposed of the base texture module through the shape of the sub-image module, wherein the area shape to be exposed is the same as the shape of the sub-image module; and the transfer adhesive is subjected to regional exposure and curing through the exposure and curing control unit, at this time, the texture structure of the base texture module is copied to the surface of the transfer template, and until the graphical copying of all the sub-image modules is completed, the target image template is formed.

[0014] As one of the specific embodiments, the motion direction of the base texture module controlled by the base texture module motion control unit is X direction, Y direction, Z direction and R, wherein R is a rotation angle; and the motion direction of the transfer template controlled by the transfer template motion control unit is X direction and Y direction.

[0015] As one of the specific embodiments, the substrate is a transparent material, wherein the substrate is one or a combination of two of PET, PC, PMMA, PE, PI, glass, PET-G and PVC.

[0016] A template, characterized in that it comprises the texture structure formed by any of the preparation methods described above.

[0017] The modular micro-nano optical structure template preparation method provided by the present application has many advantages: 1. Cost advantage: The dependence on high-end photoetching equipment and customized mask is eliminated, the equipment procurement and maintenance cost is reduced by more than 60%, and the material loss is reduced by 70% without repeated production of mask, which greatly compresses the mask production cost and improves the market competitiveness; 2. Efficiency advantage: The template preparation period is shortened from the traditional "several tens of hours" to "several hours". For example, for the production of a pattern containing more than 5 optical elements, the traditional photoetching needs 1-2 days, and the present method only needs 2-4 hours, which can quickly respond to small-batch and personalized order demands; 3. Precision and flexibility advantage: The cooperation of high-precision servo motor and digital display seat makes the precision of the combined template reach the micron level, and the restoration degree of complex patterns is improved to more than 95%; the "element library" of pre-prepared multiple different frequency gratings can flexibly combine thousands of optical patterns without re-production, which adapts to diversified design demands; 4. Environmental advantage: reduce the pollution process of traditional photoetching, development, etc., reduce the amount of chemical waste liquid by 95%, more in line with the concept of green manufacturing, and reduce the cost of environmental governance. BRIEF DESCRIPTION OF DRAWINGS

[0018] Other features, objects, and advantages of the present application will become more apparent from the following detailed description of reference examples, when read in conjunction with the accompanying drawings.

[0019] Figure 1 A schematic diagram of the main steps of the preparation method of a modular micro-nano optical structure template according to the present application is shown in the figure. Figure 2 A schematic diagram of the process of copying micro-nano structures in the preparation method of a modular micro-nano optical structure template according to the present application is shown in the figure. Figure 3 A schematic diagram of a partial basic texture module in the preparation method of a modular micro-nano optical structure template according to the present application is shown in the figure. Figure 4 A schematic diagram of a target image structure in the preparation method of a modular micro-nano optical structure template according to the present application is shown in the figure. Figure 5 A schematic diagram of the process of combining a target image template in the preparation method of a modular micro-nano optical structure template according to the present application is shown in the figure. DETAILED DESCRIPTION

[0020] In order to facilitate the understanding of the present application, the present application will be described in detail below in conjunction with the drawings. The preferred embodiments of the present application are shown in the drawings, but the implementation of the present application is not limited thereto. The purpose of providing these embodiments is to more fully and thoroughly understand the disclosure of the present application.

[0021] The same reference signs in the drawings represent the same or similar structures, and thus no further description will be repeated. It should be noted that directional terms such as "upper", "lower", "between" and the like may be used in the present specification, and these expressions are only for the purpose of describing the orientation shown in the drawings, and do not limit the actual direction of the present application. In addition, the terms "first", "second", etc. are used in the text only for distinguishing different features, and do not constitute a limitation on quantity or importance.

[0022] Unless otherwise explicitly stated, the meanings of technical and scientific terms used herein are consistent with the meanings commonly understood by those skilled in the art to which the present application belongs. The terms used herein are only used to describe the specific embodiments, and do not constitute a limitation on the present application. The term "and / or" should be interpreted as including any and all combinations of one or more related listed items.

[0023] As Figure 1 And Figure 2As shown, the main process of the template preparation method is given, and the process steps can be adjusted according to the actual situation; a template preparation method based on modular micro-nano optical structure includes the following steps: A primitive library is provided, and the primitive library includes a plurality of basic texture modules; as many different structure basic texture modules as possible are prepared, and the basic texture modules can be made on a photoetching plate by a photoetching process to produce a plurality of different diffraction effect texture structures. The texture structures are transferred and copied to the PET substrate by nano-imprinting to form different basic texture modules to constitute the primitive library. When the texture structure is photoetched, the exposure time, dose and scanning path are strictly controlled to ensure that each texture structure diffraction unit meets the preset position arrangement. Different texture structures correspond to different optical diffraction characteristics (such as diffraction angle, color, dynamic, etc.), which provide a primitive library for subsequent diversified pattern combination; Target image design, forming a target image through an image forming mechanism; analyzing the target image and segmenting to obtain a plurality of sub-image modules, at least two of which have different parameters; the image forming mechanism can be a professional CAD software, CDR, AI, PS, etc., inputting the parameters (shape, size, optical effect requirement) of the target image (such as geometric body, line, animal, etc.) to obtain the light characteristics of different sub-image modules; Generating a target image template, combining the sub-image modules, calculating the corresponding texture structure of each sub-image module, selecting the corresponding basic texture module from the primitive library according to the corresponding texture structure of each sub-image module, and combining the basic texture module into a target image template; for example, selecting a basic texture module from the primitive library based on the optical characteristics of the sub-image module, simulating the effect of different design combinations, automatically planning the optimal combination scheme, and clearly indicating the basic texture modules to be used, the spatial position and rotation angle of each module. For example Figure 4 As shown, when designing the "color butterfly" pattern, the software will calculate how many sub-image modules, which basic texture modules, and at what angle to combine to most accurately present the color and shape of the butterfly wings.

[0024] As one of the specific embodiments, a primitive library is established, different texture structures are prefabricated by micro-nano processing technology, and different texture structures are copied to the surface of the substrate to form different basic texture modules, wherein different texture structures correspond to different diffraction effects. For example Figure 3As shown, by micro-nano processing technology (such as electron beam lithography) regional prefabrication of a variety of different frequency texture structure, texture structure contains grating, dispersion spot, diffractive lens, dynamic diffraction grating, special structure, Fresnel lens, cylindrical lens grating, DOE element device. By nano-imprinting replication to transparent PET, these texture structures as the basic texture module, covering a variety of optical diffraction effect required basic texture module, for subsequent modular combination to provide the base element library.

[0025] As one of the specific embodiments, the sub-image module is analyzed to obtain the parameters of the texture structure corresponding to each sub-image module. The parameters include one or more of the texture structure, spatial position, rotation angle, and basic texture module size. The texture structure in each sub-image module is different, and the parameters of the texture structure are different, including period, height, width, duty cycle, etc. Different texture structures will diffract different color effects, so as to meet the different color requirements of the target image.

[0026] As shown in Figure 4 A butterfly image is given, and from the figure it can be seen that the image has been analyzed and processed. The butterfly image includes five sub-image modules, each of which has a different color (as can be seen from Figure 4 ). Thus, the five sub-image modules will correspond to different texture structures, and different texture structures will be used to display the effects required by different sub-image modules. Finally, the corresponding texture structure is selected from the base element library, and the five sub-image modules are combined by the device to form the butterfly image.

[0027] As one of the specific embodiments, as shown in Figure 2 The main process of combining the target image is given, and the method of combining the target image template includes the following steps: according to the sub-image module to be copied, selecting the corresponding basic texture module from the base element library, adjusting the basic texture module to match the texture structure in the sub-image module to be copied, transferring and copying the texture structure on the basic texture module to the template to be transferred, repeating the above steps until the texture structures of all sub-image modules are transferred and copied to the template to be transferred, and forming the final target image template.

[0028] As one of the specific embodiments, as shown in Figure 5As shown, the combination of the target image template is carried out by a control system, and the control method of the control system is: the central control system sends an instruction to control the transferable glue coating control unit to coat the transferable glue on the surface of the template to be transferred, the central control system controls the basic texture module motion control unit and the template to be transferred motion control unit, controls the basic texture module motion through the basic texture module motion control unit, controls the template to be transferred motion through the template to be transferred motion control unit, adjusts the position of the basic texture module corresponding to the template to be transferred, and then the graphical control unit determines the area shape to be exposed of the basic texture module through the shape of the sub-image module, wherein the area shape to be exposed is the same as the shape of the sub-image module; the transferable glue is exposed and cured in the area through the exposure and curing control unit, at this time, the texture structure of the basic texture module is copied to the surface of the template to be transferred, and until the graphical copying of all sub-image modules is completed, the target image template is formed. For example, the basic texture module combination is designed according to the corresponding sub-image module design scheme analyzed by the target image, and high-precision multi-axis servo motor is used to control the position and rotation of the required basic texture module, and the combination is carried out at the specified position. The high-precision multi-axis servo motor has very high positioning accuracy and response speed, its control system is real-time interconnected with multiple axes, and receives accurate coordinate and angle instructions; through the transmission mechanism such as screw rod and guide rail, the basic texture module is driven to translate in the plane and adjust the rotation angle. After accurate positioning, the UV exposure copying process is implemented. During the assembly process, the high-precision digital display seat of the equipment displays the information of the basic texture module in real time, and the operator or automatic system can accurately adjust the position of the basic texture module according to the digital display feedback, so as to ensure that the splicing accuracy reaches micrometer level and the optical effect of the final target image is guaranteed; the cooperation of the high-precision servo motor and the digital display seat makes the precision of the combined template reach micrometer level, and the restoration degree of complex patterns is improved to more than 95%; the "modular library" of multiple prefabricated gratings with different frequencies can flexibly combine thousands of optical patterns without the need of re-preparation, and is suitable for diversified design requirements.

[0029] As one of the specific embodiments, the texture structure of the basic texture module is copied and transferred to the surface of the template to be transferred, which can be transferred to the surface of the template according to the shape of the sub-image module through a traditional mask; the sub-image module transfer copying mode that can be used by the present application directly transfers and copies the shape and texture structure according to the sub-image module through laser, or the device can generate a virtual mask structure consistent with the sub-image module, that is, only the place irradiated by the laser can be copied and transferred, and the place not irradiated will not be copied and transferred, so that the mask can be saved; the dependence on customized mask is eliminated, and the cost of device purchase and maintenance is reduced by more than 60%; without repeatedly preparing the mask, the material loss is reduced by 70%, the preparation cost is greatly compressed, and the market competitiveness is improved.

[0030] As one of the specific embodiments, the base texture module motion control unit controls the motion direction of the base texture module to be X direction, Y direction, Z direction and R, wherein R is a rotation angle; the motion control unit of the to-be-transferred template controls the motion direction of the to-be-transferred template to be X direction and Y direction.

[0031] As one of the specific embodiments, the substrate is transparent material, wherein the substrate is one or a combination of two of PET, PC, PMMA, PE, PI, glass, PET-G and PVC.

[0032] A template, characterized by comprising the texture structure prepared by any of the preparation methods. The template comprises a carrier layer and a texture structure layer, the surface of the texture structure layer away from the carrier layer is provided with a plurality of regions, the texture structure is arranged in the regions, and the texture structure parameters in at least two regions are different.

[0033] For the purpose of more clearly illustrating the objects, features and advantages of the present application, the above detailed description of the specific embodiments of the present application has been made in conjunction with the accompanying drawings, and a large number of specific details have been set forth in order to be understood. However, the present application can be implemented in many other forms different from the described manner, and those skilled in the art can make various modifications, changes or improvements without departing from the core idea of the present application. In addition, the technical features in each of the above embodiments can be combined arbitrarily, as long as there is no contradiction in the combination, and it should be regarded as the scope of the present application.

[0034] The above embodiments are only specific descriptions of several embodiments of the present application, and the description should not be understood as limiting the scope of patent protection of the present application. The actual protection scope of the present application should be subject to the contents of the appended claims.

Claims

1. A method for fabricating a modular micro / nano optical structure template, comprising the following steps: A primitive library is provided, which includes several basic texture modules; The target image is designed by forming a target image through an image forming mechanism; the target image is analyzed and segmented to obtain several sub-image modules, wherein at least two sub-image modules have different parameters; Generate a target image template, combine the sub-image modules, and calculate the texture structure corresponding to each sub-image module; based on the texture structure corresponding to each sub-image module, select the basic texture module corresponding to the texture structure in the sub-image module from the primitive library, and combine them into a target image template.

2. The method for fabricating a modular micro / nano optical structure template according to claim 1, characterized in that, A primitive library is established, and different texture structures are prefabricated using micro-nano fabrication technology. These different texture structures are then copied onto the substrate surface to form different basic texture modules, where different texture structures correspond to different diffraction effects.

3. The method for fabricating a modular micro / nano optical structure template according to claim 2, characterized in that, The texture structure includes one of the following: grating, achromatic speckle, diffraction lens, dynamic diffraction grating, Fresnel lens, cylindrical grating, and DOE electronic device.

4. The method for fabricating a modular micro / nano optical structure template according to claim 1, characterized in that, The sub-image modules are analyzed to obtain the parameters of the texture structure corresponding to each sub-image module.

5. The method for fabricating a modular micro / nano optical structure template according to claim 4, characterized in that, The parameters include one or more of the following: texture structure, spatial position, rotation angle, and size of the basic texture module.

6. The method for fabricating a modular micro / nano optical structure template according to claim 1, characterized in that, The method for combining target image templates includes the following steps: based on the sub-image modules to be copied, select the corresponding basic texture module from the primitive library, adjust the basic texture module to match the texture structure in the sub-image modules to be copied, transfer and copy the texture structure on the basic texture module to the template to be transferred, and repeat the above steps until the texture structure of all sub-image modules has been transferred and copied to the template to be transferred, thus forming the final target image template.

7. The method for fabricating a modular micro / nano optical structure template according to claim 6, characterized in that, The combination of the target image templates is performed by a control system. The control method of the control system is as follows: the central control system issues a command to control the transfer adhesive coating control unit to coat the transfer adhesive on the surface of the transfer template. The central control system controls the motion control unit of the basic texture module and the motion control unit of the transfer template. The motion control unit of the basic texture module controls the movement of the basic texture module, and the motion control unit of the transfer template controls the movement of the transfer template. After adjusting the corresponding positions of the basic texture module and the transfer template, the graphic control unit determines the shape of the area to be exposed of the basic texture module based on the shape of the sub-image module. The shape of the exposed area is the same as the shape of the sub-image module. The exposure curing control unit performs regional exposure curing of the transfer adhesive. At this time, the texture structure of the basic texture module is copied to the surface of the transfer template until all sub-image modules are graphically copied to form the target image template.

8. The method for fabricating a modular micro / nano optical structure template according to claim 7, characterized in that, The motion control unit of the basic texture module controls the movement direction of the basic texture module in the X, Y, Z and R directions, where R is the rotation angle; the motion control unit of the template to be transferred controls the movement direction of the template to be transferred in the X and Y directions.

9. The method for fabricating a modular micro / nano optical structure template according to claim 2, characterized in that, The substrate is made of a transparent material, wherein the substrate is one or a combination of two of PET, PC, PMMA, PE, PI, glass, PET-G, and PVC.

10. A template, characterized in that, The texture structure prepared by any of the preparation methods of claims 1 to 9 above includes the texture structure.

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