Vacuum coating equipment

Abstract

The invention belongs to the technical field of vacuum coating, and discloses vacuum coating equipment. The vacuum coating equipment comprises a coating mechanism and a carrying mechanism, the coating mechanism comprises a first shell, a first moving assembly, a placing piece, a sealing assembly and a plurality of workpiece clamps, the workpiece clamps are connected with the placing piece, the first shell comprises a plurality of cavities, and the first moving assembly and the sealing assembly are arranged on the first shell. During working, the first moving assembly enables each workpiece to orderly pass through each chamber so as to coat the workpiece with a film. When any cavity is subjected to vacuum coating, the sealing assembly can enable the workpiece clamp to abut against the inner surface of the first shell to form a closed cavity, the workpiece is located in the closed cavity, the air tightness of the cavity can be guaranteed, the sealing assembly, the workpiece clamp and the inner surface of the first shell are in stable contact, the sealing performance is stable, and reliability is good. After film coating, the carrying mechanism moves the workpiece out of the first shell and moves the workpiece which is not coated into the first shell, and continuous film coating can be achieved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to a vacuum coating apparatus. Background Technology

[0002] Vacuum coating is a technique for forming thin film materials on the surface of a workpiece. It has been widely used in many fields, such as electronics, where semiconductors, displays, and other electronic components are coated to improve their performance and durability; and optics, where mirrors, lenses, and filters are manufactured. With the expanding applications of thin films, the demand for continuously depositing multiple types of thin films onto workpieces is increasing.

[0003] Existing vacuum coating equipment includes a workpiece conveying mechanism and multiple chambers. The workpiece conveying mechanism comprises a drive assembly and a rotating disk, on which multiple workpieces are placed. The conveying mechanism sequentially passes each workpiece through different chambers to coat various types of thin films. Because the rotating disk needs to rotate, gaps exist between the disk and the inner walls of the chambers. Therefore, a sealing mechanism is required to maintain the airtightness of each chamber during vacuum coating. However, existing sealing mechanisms primarily involve placing deformable components on the inner walls of the chambers. By filling the cavities of these components with liquid or gas, the components expand to the surface of the rotating disk, achieving a seal. However, sealing via gas or liquid filling can lead to unstable contact between the deformable components and the rotating disk surface, resulting in unstable sealing performance and poor reliability. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum coating equipment that can ensure the airtightness of the chamber when performing vacuum coating in any chamber, and has stable sealing performance and good reliability. In addition, it can achieve continuous coating.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A vacuum coating apparatus, comprising:

[0007] A coating mechanism includes a first housing, a first moving component, a placement component, a sealing component, and multiple workpiece clamps. Each workpiece clamp is connected to the placement component and is used to place a workpiece. The first housing includes multiple chambers. The first moving component is disposed within the first housing, and its output end drives the placement component to move, thereby moving the workpiece clamps between the multiple chambers. The sealing component is disposed within the first housing and can press the workpiece clamps against the inner surface of the first housing to form a closed chamber, thereby placing the workpiece within the closed chamber.

[0008] A conveying mechanism is used to move the coated workpiece out of the first housing and to move the uncoated workpiece into the first housing.

[0009] In some possible implementations, the top of the workpiece fixture is provided with a receiving cavity for receiving the workpiece; the bottom wall of the receiving cavity is provided with a coating hole, and the cavity is located on the side of the workpiece fixture away from the sealing assembly; the output end of the sealing assembly is provided with a sealing element, and the sealing assembly can cover and press the workpiece fixture against the inner surface of the first housing, and make the sealing element press against the surface of the workpiece fixture to form the closed cavity.

[0010] In some possible implementations, the workpiece fixture includes a fixture body and an elastic element, the placement element has a first through hole, the fixture body passes through the first through hole, and the elastic element is disposed between the fixture body and the placement element.

[0011] In some possible implementations, the placement member is provided with a limiting groove, the elastic member is disposed in the limiting groove, one end of the elastic member abuts or connects to the placement member, and the other end of the elastic member abuts or connects to the clamp body, and the clamp body can abut against the groove wall of the limiting groove.

[0012] In some possible implementations, the bottom of the placement member is provided with at least one second guide member, and the inner surface of the first housing is provided with at least one guide groove, and the second guide member is slidably or rollingly connected to the guide groove.

[0013] In some possible implementations, the placement component includes a placement body and a first connecting member. The first connecting member is slidably connected to the placement body in a vertical direction and is located near the first moving component. A second guide member is disposed on the first connecting member, and the guide groove is correspondingly disposed on the inner surface of the first housing. The coating mechanism further includes a height adjustment component, which includes a clamp and a locking component. The clamp is slidably sleeved on the outside of the first connecting member and fixed to the placement body. The locking component can lock the clamp to the first connecting member.

[0014] In some possible implementations, the height adjustment assembly further includes an adjustment member and a second connector, the adjustment member being vertically inserted through the first connector and threadedly connected to the second connector; the second connector abuts the clamp against the placement body, and the second connector passes through the clamp and is threadedly connected to the placement body.

[0015] In some possible implementations, the output end of the sealing assembly can move vertically to press the workpiece clamp against the inner surface of the first housing.

[0016] In some possible implementations, the sealing assembly includes a synchronization component and two sets of drive components spaced apart. Both sets of drive components are disposed on the first housing. The synchronization component includes a third connector, gears, and racks. The third connector is rotatably connected to the first housing. The two gears are respectively fixed to both ends of the third connector. The two racks are correspondingly fixed to the output ends of the two sets of drive components in the vertical direction. The gears and racks are respectively meshed.

[0017] In some possible implementations, of the plurality of chambers, at least one chamber is used for chemical vapor deposition (CVD) coating, and at least one chamber is used for physical vapor deposition (PVD) coating; of the chambers used for PVD coating, at least one chamber is used for vacuum evaporation coating, and at least one chamber is used for vacuum sputtering coating; and / or,

[0018] Of the plurality of chambers, one chamber is used for preheating, and the workpiece is vacuum coated after passing through the chamber used for preheating.

[0019] In some possible implementations, at least seven chambers are provided, and the first moving assembly drives the workpiece fixture through the seven chambers in sequence. The seven chambers are, in sequence, a preheating chamber, a first coating chamber, a second coating chamber, a third coating chamber, a fourth coating chamber, a fifth coating chamber, and a sixth coating chamber. The preheating chamber is used to preheat the workpiece. The first coating chamber is used for chemical vapor deposition (CVD) coating. The second coating chamber is used for vacuum sputtering coating. The third coating chamber is used for CVD or vacuum sputtering coating. The fourth coating chamber is used for vacuum sputtering coating. The fifth coating chamber is used for CVD or vacuum sputtering coating. The sixth coating chamber is used for vacuum evaporation coating.

[0020] In some possible implementations, the conveying mechanism includes a second housing and a second moving component, and the vacuum coating equipment further includes a first valve and a second valve. The first valve is used to connect or disconnect the inner cavity of the first housing and the inner cavity of the second housing. The second housing has an opening at a position away from the first housing, and the second valve is disposed at the opening. The second moving component is used to move the workpiece.

[0021] In some possible implementations, one of the multiple chambers is a transport chamber, and the second moving component is used to remove the workpiece from the first housing in the transport chamber; the transport chamber is provided with a third moving component; the workpiece clamp is provided with a through hole, and the output end of the third moving component can pass through the through hole and lift the workpiece in a vertical direction; the output end of the second moving component is used to move the workpiece in a first direction, which is perpendicular to the vertical direction.

[0022] In some possible implementations, the output end of the first moving component is used to drive the placement member to rotate, a plurality of workpiece clamps are circumferentially spaced on the placement member, and a plurality of chambers are correspondingly arranged with a plurality of workpiece clamps.

[0023] The beneficial effects of this invention are:

[0024] The vacuum coating equipment provided by this invention includes a coating mechanism and a transport mechanism. The coating mechanism includes a first housing, a first moving component, a placement component, a sealing component, and multiple workpiece clamps. During operation, the first moving component transports each workpiece sequentially through various chambers to coat the workpieces with various types of thin films. When vacuum coating is performed in any chamber, the sealing component presses the workpiece clamp against the inner surface of the first housing to form a closed chamber, ensuring the workpiece is located within the closed chamber and guaranteeing the airtightness of the chamber. This meets the vacuum requirements for vacuum coating, and the contact between the sealing component, the workpiece clamp, and the inner surface of the first housing is stable, resulting in stable sealing performance and good reliability. After coating, the transport mechanism removes the coated workpiece from the first housing and places uncoated workpieces into it, enabling continuous coating. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the vacuum coating equipment provided by the present invention;

[0026] Figure 2 This is a top view of the vacuum coating equipment provided by the present invention;

[0027] Figure 3 yes Figure 1 Enlarged view of point A in the middle;

[0028] Figure 4 This is a schematic diagram of the first part of the vacuum coating equipment provided by the present invention;

[0029] Figure 5 yes Figure 4 Enlarged view of point B in the middle;

[0030] Figure 6 This is a schematic diagram of the second part of the vacuum coating equipment provided by the present invention;

[0031] Figure 7 This is a schematic diagram of the height adjustment component involved in the present invention.

[0032] In the picture:

[0033] 1. Coating mechanism; 11. First housing; 111. Adjusting column; 12. First moving component; 121. Motor; 122. Rotating shaft; 123. Magnetofluid component; 13. Placement component; 131. Limiting groove; 132. Placement body; 1321. First placement part; 1322. Second placement part; 133. First connecting component; 134. Limiting component; 135. First through hole; 14. Sealing component; 141. Sealing component; 142. Synchronization component; 421. Third connecting member; 1422. Gear; 1423. Rack; 143. Drive assembly; 144. First sealing ring; 15. Workpiece clamp; 151. Receiving cavity; 152. Clamp body; 153. Elastic element; 154. First guide element; 155. Bushing; 16. Second guide element; 17. Height adjustment assembly; 171. Clamp; 1711. Horizontal groove; 1712. Second through hole; 172. Adjusting element; 173. Second connecting member;

[0034] 2. Handling mechanism; 21. Second housing; 22. Second moving component;

[0035] 3. First valve; 4. Second valve; 5. Third moving assembly; 51. Lifting drive component; 52. Lifting component; 53. Third guide component; 54. Sleeve; 6. Fourth moving assembly; 7. High vacuum pump; 8. Workpiece;

[0036] 100. Transfer chamber; 200. Preheating chamber; 300. First coating chamber; 400. Second coating chamber; 500. Third coating chamber; 600. Fourth coating chamber; 700. Fifth coating chamber; 800. Sixth coating chamber. Detailed Implementation

[0037] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0038] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0041] like Figures 1 to 7As shown, the present invention provides a vacuum coating apparatus, including a coating mechanism 1 and a conveying mechanism 2. The coating mechanism 1 includes a first housing 11, a first moving component 12, a placement component 13, a sealing component 14, and multiple workpiece clamps 15. Each workpiece clamp 15 is connected to the placement component 13 and is used to place a workpiece 8. The first housing 11 includes multiple chambers. The first moving component 12 is disposed on the first housing 11, and its output end is used to drive the placement component 13 to move, thereby moving the workpiece clamps 15 between the multiple chambers. The sealing component 14 is disposed on the first housing 11 and can press the workpiece clamps 15 against the inner surface of the first housing 11 to form a closed chamber, placing the workpiece 8 within the closed chamber. The conveying mechanism 2 is used to remove the coated workpiece 8 from the first housing 11 and to move uncoated workpieces 8 into the first housing 11. During operation, the first moving component 12 sequentially passes each workpiece 8 through the various chambers to coat the workpiece 8 with various types of thin films. When vacuum coating is performed in any chamber, the sealing assembly 14 can press the workpiece clamp 15 against the inner surface of the first housing 11 to form a closed chamber, and place the workpiece 8 in the closed chamber, ensuring the airtightness of the chamber and meeting the vacuum requirements during vacuum coating. Furthermore, the contact between the sealing assembly 14, the workpiece clamp 15, and the inner surface of the first housing 11 is stable, resulting in stable sealing performance and good reliability. When the workpiece 8 is not being vacuum coated in the chamber, the chamber is in an open state. After coating is completed on the workpiece 8, the coated workpiece 8 is removed from the first housing 11 by the conveying mechanism 2, and an uncoated workpiece 8 is moved into the first housing 11, enabling continuous coating of the workpiece 8.

[0042] Optionally, in this embodiment, as Figure 4As shown, the top of the workpiece fixture 15 is provided with a receiving cavity 151 for receiving the workpiece 8; the bottom wall of the receiving cavity 151 is provided with a coating hole, and the cavity is located on the side of the workpiece fixture 15 away from the sealing assembly 14; the output end of the sealing assembly 14 is provided with a sealing element 141, which can press the workpiece fixture 15 against the inner surface of the first housing 11, and make the sealing element 141 cover and press against the surface of the workpiece fixture 15 to form a closed cavity. The receiving cavity 151 is provided at the top of the workpiece fixture 15 to place the workpiece 8, which facilitates the placement of the workpiece 8 by the handling mechanism 2; through the action of the sealing assembly 14, during vacuum coating, the workpiece 8 is located in the closed cavity formed by the sealing element 141, the side wall of the workpiece fixture 15, and part of the first housing 11. In this embodiment, the workpiece 8 is placed on top of the workpiece fixture 15, and the bottom surface of the workpiece 8 is coated through the coating holes. After vacuum coating is completed, the sealing assembly 14 disengages the workpiece fixture 15 from the inner surface of the first housing 11, allowing the workpiece fixture 15 to move to other chambers. Furthermore, to further ensure the airtightness of the sealed chambers during coating, a first sealing ring 144 is provided on the bottom surface of the sealing member 141 and the top surface of the workpiece fixture 15, and the other can abut against the first sealing ring 144. Additionally, a first sealing ring 144 is provided on the bottom surface of the workpiece fixture 15 and the inner surface of the first housing 11, and the other can abut against the first sealing ring 144.

[0043] In other embodiments, the workpiece 8 can also be placed at the bottom of the workpiece fixture 15, without the need for the sealing member 141 to cover the workpiece fixture 15. Specifically, a mounting member is provided at the bottom of the workpiece fixture 15. The mounting member can be a U-shaped mounting plate. The top two ends of the U-shaped mounting plate are fixed to the bottom of the workpiece fixture 15. The bottom of the U-shaped mounting plate has a coating hole. The U-shaped mounting plate and the workpiece fixture 15 together form a receiving cavity 151 for accommodating the workpiece 8. The bottom of the sealing member 141 can contact the top of the workpiece fixture 15 and press the workpiece fixture 15 against the inner surface of the first housing 11 to form a closed cavity, so that the workpiece 8 is located in the closed cavity. The contact method between the bottom of the sealing member 141 and the workpiece fixture 15 can be point contact, line contact, or surface contact. During vacuum coating, the workpiece 8 is located in the closed cavity formed by the workpiece fixture 15 and part of the first housing 11. During transportation, the transportation mechanism 2 can put the workpiece 8 into the receiving cavity 151 from the opening on one side of the U-shaped mounting plate.

[0044] Optionally, in this embodiment, as Figure 3 and Figure 5As shown, the workpiece fixture 15 includes a fixture body 152 and an elastic element 153. The placement member 13 has a first through hole 135, through which the fixture body 152 passes, and the elastic element 153 is disposed between the fixture body 152 and the placement member 13. By providing the elastic element 153 between the fixture body 152 and the placement member 13, the fixture body 152 can be reset after the sealing member 141 moves upward and disengages from contact with the fixture body 152.

[0045] Furthermore, the placement member 13 is provided with a limiting groove 131, and the elastic member 153 is disposed within the limiting groove 131. One end of the elastic member 153 abuts or connects to the placement member 13, and the other end of the elastic member 153 abuts or connects to the clamp body 152. The clamp body 152 can abut against the groove wall of the limiting groove 131. This arrangement can limit the vertical movement of the clamp body 152, prevent the clamp body 152 from dislodging, and improve the reliability of the clamp body 152. Optionally, in this embodiment, the elastic member 153 is a spring, which has a simple structure. In other embodiments, the elastic member 153 can be a spring sheet. Furthermore, in this embodiment, the workpiece clamp 15 also includes a first guide member 154. The first guide member 154 is connected to the clamp body 152, and the elastic member 153 is sleeved outside the first guide member 154. The first guide member 154 is slidably connected to the placement member 13. By providing the first guide member 154, the vertical movement of the clamp body 152 is guided. Optionally, in this embodiment, the workpiece fixture 15 further includes a bushing 155, which is fixed to the placement member 13, and the first guide member 154 is slidably connected to the bushing 155.

[0046] Optionally, the placement component 13 includes a placement body 132 and a limiting component 134. The limiting component 134 and the placement body 132 together form a limiting groove 131, and the limiting component 134 and the placement body 132 are detachably connected. During installation, the first guide component 154 is connected to the clamp body 152, then the elastic component 153 is sleeved on the first guide component 154, then the first guide component 154 is inserted into the bushing 155, and finally the limiting component 134 is installed on the placement body 132 for easy assembly and disassembly.

[0047] Optionally, the placement body 132 includes a first placement portion 1321 and a plurality of second placement portions 1322, with the plurality of second placement portions 1322 spaced apart from the first placement portion 1321. The output end of the first moving component 12 is connected to the first placement portion 1321, and the plurality of second placement portions 1322 are correspondingly connected to a plurality of workpiece clamps 15. Specifically, in this embodiment, the first placement portion 1321 and the plurality of second placement portions 1322 are an integrated structure, which is simple in structure and easy to install. In other embodiments, the plurality of second placement portions 1322 and the first placement portion 1321 can be detachably connected for easy storage.

[0048] Optionally, such as Figure 3 As shown, the bottom of the placement component 13 is provided with at least one second guide member 16, and the inner surface of the first housing 11 is provided with at least one guide groove. The second guide member 16 is slidably or rollingly connected to the guide groove. This arrangement ensures the smooth movement of the placement body 132 when the first moving component 12 drives it, and also provides guidance. Furthermore, to ensure flexibility of movement, the second guide member 16 is a roller, which is rollingly connected to the guide groove.

[0049] Optionally, such as Figure 7 As shown, the placement component 13 includes a placement body 132 and a first connecting component 133. The first connecting component 133 is slidably connected to the placement body 132 in the vertical direction and is located near the first moving component 12. A second guide component 16 is disposed on the first connecting component 133, and a guide groove is correspondingly disposed on the inner surface of the first housing 11. The coating mechanism 1 also includes a height adjustment component 17, which includes a clamp 171 and a locking component. The clamp 171 is slidably sleeved on the outside of the first connecting component 133 and fixed to the placement body 132. The locking component can lock the clamp 171 to the first connecting component 133. When it is necessary to raise the height of the placement body 132, the clamp 171 or the placement body 132 is moved upward, and the clamp 171 or the placement body 132 slides upward relative to the first connecting component 133. After adjusting to the specified height, the clamp 171 is locked to the first connecting component 133 by the locking component, thereby locking the placement body 132. When it is necessary to lower the height of the placement body 132, the operation is the reverse of raising it. This design is simple and easy to operate. Furthermore, another second guide member 16 is located on the placement body 132 away from the first moving component 12, and an adjusting post 111 is provided on the inner surface of the first housing 11, with a guide groove provided on the upper surface of the adjusting post 111. By replacing the adjusting post 111 with one of different thicknesses to match the placement body 132, the height can be adjusted synchronously.

[0050] Optionally, the height adjustment assembly 17 further includes an adjusting member 172 and a second connecting member 173. The adjusting member 172 passes vertically through the first connecting member 133 and is threadedly connected to the second connecting member 173. The second connecting member 173 presses the clamp 171 against the placement body 132, and the second connecting member 173 passes through the clamp 171 and is threadedly connected to the placement body 132. By rotating the adjusting member 172, the second connecting member 173 can move up and down vertically, thereby driving the placement body 132 to move up and down vertically, and facilitating the assembly and disassembly of the second connecting member 173, the clamp 171, and the placement body 132. Optionally, in this embodiment, the two second connecting members 173 are arranged opposite to the clamp 171. This arrangement makes the adjustment more stable, and ensures that the placement body 132 remains horizontal after adjustment.

[0051] Optionally, in this embodiment, the outer wall of the clamp 171 is provided with a horizontal groove 1711 and a vertical groove, both of which communicate with the inner cavity of the clamp 171. The horizontal groove 1711 and the vertical groove are interconnected, and the vertical groove passes through the upper surface of the clamp 171. The outer wall of the clamp 171 is provided with a second through hole 1712, which passes through the two opposite groove walls of the vertical groove. The locking assembly consists of a bolt and a nut, with the bolt passing through the second through hole 1712 and threadedly connected to the nut. After adjusting the height of the placement body 132, the clamp 171 is locked to the first connecting member 133 by the bolt and nut. This configuration is convenient for operation.

[0052] Optionally, the output end of the sealing assembly 14 can move vertically to press the workpiece clamp 15 against the inner surface of the first housing 11. This configuration simplifies operation and shortens the travel path. In other embodiments, the sealing assembly 14 can be a robotic arm, capable of pressing the workpiece clamp 15 against the inner surface of the first housing 11; this is not limited to this embodiment. Optionally, in this embodiment, as... Figure 4 As shown, the sealing assembly 14 includes a synchronization assembly 142 and two sets of drive assemblies 143. Both sets of drive assemblies 143 are disposed on the first housing 11. The synchronization assembly 142 includes a third connector 1421, gears 1422, and racks 1423. The third connector 1421 is rotatably connected to the first housing 11. Two gears 1422 are respectively fixed to both ends of the third connector 1421, and two racks 1423 are vertically fixed to the output ends of the two sets of drive assemblies 143. The gears 1422 and racks 1423 mesh accordingly. The two sets of drive assemblies 143 provide better clamping effect against the inner surface of the first housing 11, ensuring better airtightness of the chamber during vacuum coating. The synchronization assembly 142 ensures the synchronous operation of the two sets of drive assemblies 143, and the meshing of the gears 1422 and racks 1423 further enhances the synchronization accuracy of the two sets of drive assemblies 143. In this embodiment, the drive component 143 is a cylinder; in other embodiments, the drive component 143 may be a hydraulic cylinder or an electric actuator.

[0053] Optionally, the conveying mechanism 2 includes a second housing 21 and a second moving component 22. The vacuum coating equipment also includes a first valve 3 and a second valve 4. The first valve 3 is used to connect or disconnect the inner cavity of the first housing 11 and the inner cavity of the second housing 21. The second housing 21 has an opening away from the first housing 11, and the second valve 4 is located at the opening. The second moving component 22 is used to move the workpiece 8. When vacuum coating is performed on the workpiece 8 inside the first housing 11, the first valve 3 is in a closed state, and the first valve 3 disconnects the inner cavity of the first housing 11 and the inner cavity of the second housing 21. The second moving component 22 can move the workpiece 8 to the outside of the second housing 21 or to the inside of the first housing 11. When the second moving component 22 needs to move the workpiece 8 to the outside of the second housing 21, the second valve 4 is opened and the first valve 3 is closed to ensure the vacuum level inside the first housing 11. When the second moving component 22 needs to move the workpiece 8 to the inside of the first housing 11, the first valve 3 is opened and the second valve 4 is closed to ensure the vacuum level inside the first housing 11 and the second housing 21. By controlling the opening and closing of the first valve 3 and the second valve 4, and the movement of the second moving component 22 on the workpiece 8, continuous vacuum handling of the workpiece 8 can be achieved.

[0054] Optionally, in this embodiment, as Figure 1 and Figure 2 As shown, among the multiple chambers, one chamber is a transport chamber 100. The second moving component 22 is used to move the workpiece 8 from the transport chamber 100 out of the first housing 11. A third moving component 5 is provided inside the transport chamber 100. The workpiece clamp 15 has a through hole, and the output end of the third moving component 5 can pass through the through hole and lift the workpiece 8 vertically. The output end of the second moving component 22 is used to move the workpiece 8 along a first direction, which is perpendicular to the vertical direction. In this embodiment, the first direction is the length direction of the second housing 21. This configuration results in a short movement path, saves time, and increases work efficiency. After the coated workpiece 8 is moved to the transport chamber 100 by the first moving component 12, the output end of the third moving component 5 passes through the through hole and lifts the workpiece 8, bringing it to the position to be translated by the second moving component 22. Then, the output end of the second moving component 22 moves the workpiece 8 along the first direction to remove it from the first housing 11. It is understood that in some embodiments, the through hole and the coating hole can be shared.

[0055] Optionally, in this embodiment, the output end of the second moving component 22 is provided with an overlapping member. Moving the overlapping member along the first direction allows the overlapping member to surround the workpiece 8, and moving the output end of the third moving component 5 downwards allows the workpiece 8 to overlap with the overlapping member. This configuration is simple and convenient to operate. When the first moving component 12 moves the coated workpiece 8 to the transport chamber 100, the output end of the third moving component 5 moves upwards to lift the workpiece 8. Then, the second moving component 22 moves the overlapping member along the first direction to surround the workpiece 8. Afterwards, the output end of the third moving component 5 moves downwards to allow the workpiece 8 to overlap with the overlapping member. When the second moving component 22 moves the uncoated workpiece 8 above the third moving component 5, the output end of the third moving component 5 passes through the through hole and lifts the workpiece 8, causing the workpiece 8 to detach from the overlapping member. Then, the second moving component 22 moves the overlapping member along the first direction to move the overlapping member away from the workpiece 8. Afterwards, the output end of the third moving component 5 moves downwards to allow the workpiece 8 to overlap with the workpiece clamp 15.

[0056] Furthermore, in this embodiment, the vacuum coating equipment also includes a fourth moving component 6, which is disposed outside the second housing 21. The output end of the fourth moving component 6 can move the workpiece 8 vertically, and the downward movement of the output end of the fourth moving component 6 allows the workpiece 8 to overlap with the overlapping component. When the second valve 4 is opened and the workpiece 8 is moved outside the second housing 21 and above the output end of the fourth moving component 6, the output end of the fourth moving component 6 moves upward to support the coated workpiece 8, causing the workpiece 8 to detach from the overlapping component. Then, the workpiece 8 is replaced, and the uncoated workpiece 8 is placed at the output end of the fourth moving component 6. Afterward, the second moving component 22 moves the overlapping component along the first direction so that the overlapping component surrounds the workpiece 8. Finally, the output end of the fourth moving component 6 moves downward to allow the workpiece 8 to overlap with the overlapping component. Optionally, in this embodiment, the overlapping component is provided with a positioning protrusion for insertion into the positioning groove of the workpiece 8. The positioning groove of the workpiece 8 is inserted into the positioning protrusion of the overlapping component, which plays a positioning role when the second moving component 22 moves the workpiece 8 along the first direction, preventing the workpiece 8 from slipping.

[0057] Optionally, such as Figure 1As shown, the third moving component 5 includes a lifting drive 51, a lifting member 52, and a third guide 53. The lifting drive 51 is disposed on the first housing 11, and the lifting member 52 is disposed at the output end of the lifting drive 51. The lifting member 52 can pass through the through hole of the workpiece clamp 15 and lift the workpiece 8 vertically. The third guide 53 is fixedly connected to the lifting member 52 and slidably connected to the first housing 11 vertically. This configuration is simple in structure and convenient in operation. To ensure the airtightness of the inner cavity of the first housing 11, optionally, in this embodiment, the third moving component 5 also includes a sleeve 54 and a second sealing ring. The sleeve 54 is fixed to the first housing 11, the third guide 53 is slidably connected to the sleeve 54 vertically, and the second sealing ring is disposed between the third guide 53 and the sleeve 54. Further, the lifting drive 51 is a cylinder; in other embodiments, the lifting drive 51 is a hydraulic cylinder or an electric actuator.

[0058] Optionally, the fourth moving component 6 has the same structure as the third moving component 5, but is installed in a different position. The vacuum coating equipment also includes an external platform. In the fourth moving component 6, the lifting drive 51 is located on the external platform, and the sleeve 54 is fixed to the external platform.

[0059] Optionally, the second moving component 22 can be a timing belt, lead screw, or rack and pinion structure, or a combination of these structures, which can enable the workpiece 8 to move along the first direction.

[0060] Optionally, the output end of the first moving component 12 is used to drive the placement member 13 to rotate, and multiple workpiece clamps 15 are circumferentially spaced on the placement member 13, with multiple chambers corresponding to the multiple workpiece clamps 15. This configuration allows the first housing 11 to be made smaller overall, saving space and resulting in a compact structure. Optionally, as... Figure 1 As shown, the first moving component 12 includes a motor 121, a rotating shaft 122, and a magnetofluid assembly 123. The motor 121 is disposed outside the first housing 11. One end of the rotating shaft 122 is connected to the motor 121 for transmission, and the other end of the rotating shaft 122 is fixedly connected to the placement member 13. The magnetofluid assembly 123 is fixed to the outer surface of the first housing 11 and sleeved outside the rotating shaft 122. By providing the magnetofluid assembly 123, the airtightness of the inner cavity of the first housing 11 is ensured when the rotating shaft 122 rotates. The magnetofluid assembly 123 is a mature technology in related fields, and will not be described in detail in this embodiment. In other embodiments, the output end of the first moving component 12 is used to drive the placement member 13 to reciprocate.

[0061] Optionally, in the plurality of chambers, at least one chamber is used for chemical vapor deposition (CVD) coating, and at least one chamber is used for physical vapor deposition (PVD) coating. Combining CVD and PVD coating can improve the deposition effect of the thin film. In the chamber used for PVD coating, at least one chamber is used for vacuum evaporation coating, and at least one chamber is used for vacuum sputtering coating, resulting in good coating effect. Optionally, in the plurality of chambers, one chamber is used for preheating, and the workpiece 8 is vacuum coated after passing through the preheating chamber. Preheating the workpiece 8 before vacuum coating can remove moisture.

[0062] Optionally, in this embodiment, at least seven chambers are provided. The first moving component 12 drives the workpiece fixture 15 through the seven chambers in sequence. The seven chambers are, in sequence, a preheating chamber 200, a first coating chamber 300, a second coating chamber 400, a third coating chamber 500, a fourth coating chamber 600, a fifth coating chamber 700, and a sixth coating chamber 800. The preheating chamber 200 is used to preheat the workpiece 8. The first coating chamber 300 is used for chemical vapor deposition coating. The second coating chamber 400 is used for vacuum sputtering coating. The third coating chamber 500 is used for chemical vapor deposition coating or vacuum sputtering coating. The fourth coating chamber 600 is used for vacuum sputtering coating. The fifth coating chamber 700 is used for chemical vapor deposition coating or vacuum sputtering coating. The sixth coating chamber 800 is used for vacuum evaporation coating. Optionally, the first coating chamber 300, the second coating chamber 400, the third coating chamber 500, the fourth coating chamber 600, the fifth coating chamber 700, and the sixth coating chamber 800 are each equipped with a corresponding vacuum treatment source according to actual process requirements. High-vacuum pumps 7 are installed in the coating chambers used for vacuum sputtering coating and vacuum evaporation coating; low-vacuum pumps are installed in the coating chambers used for chemical vapor deposition coating. This arrangement ensures that the vacuum level of each chamber remains within the process requirements during vacuum treatment. Simultaneously, when the placement body 132 moves, multiple vacuum pumps operate simultaneously, ensuring the vacuum level within the first housing 11 and shortening the vacuuming time before vacuum treatment of the chambers after sealing by the sealing assembly 14.

[0063] In this embodiment, workpiece 8 is a PC resin substrate, and the steps for vacuum coating workpiece 8 are as follows:

[0064] Step 1: Preheat the resin substrate through the preheating chamber 200 to remove moisture.

[0065] Step 2: Chemical vapor deposition (CVD) is performed on the workpiece 8 through the first coating chamber 300. The coating material is silicon dioxide. The CVD method helps to reduce film stress, improve film adhesion, and the coated film can block water vapor and prevent metal film degradation.

[0066] Step 3: Vacuum sputtering coating (SPT) is performed on the workpiece 8 through the second coating chamber 400. The coating material is aluminum. This chamber can also be plated with other metals such as silver and indium to achieve other functions. The reflectivity is increased by plating metal films.

[0067] Step 4: Perform CVD or SPT coating on workpiece 8 through the third coating chamber 500. The coating material is silicon dioxide, or other low refractive index materials, to increase reflectivity.

[0068] Step 5: Apply SPT coating to workpiece 8 through the fourth coating chamber 600. The coating material is niobium pentoxide, or other high refractive index materials, to increase reflectivity.

[0069] Step Six: Perform CVD or SPT coating on workpiece 8 through the fifth coating chamber 700. The coating material is silicon dioxide, which serves as the bonding layer for the AS material in the next step, blocking moisture and preventing the metal film from deteriorating.

[0070] Step Seven: Vacuum evaporation coating is performed on workpiece 8 through the sixth coating chamber 800, using AS material. Steps Six and Seven improve the environmental properties of the outer film layer. It is understood that AS material is an anti-fingerprint coating material.

[0071] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A vacuum coating equipment, characterized in that, include: The coating mechanism (1) includes a first housing (11), a first moving component (12), a placement component (13), a sealing component (14), and a plurality of workpiece clamps (15). The plurality of workpiece clamps (15) are all connected to the placement component (13), and the workpiece clamps (15) are used to place workpieces (8). The first housing (11) includes a plurality of chambers. The first moving component (12) is disposed in the first housing (11). The output end of the first moving component (12) is used to drive the placement component (13) to move, so as to drive the workpiece clamps (15) to move between the plurality of chambers. The sealing component (14) is disposed in the first housing (11). The sealing component (14) can press the workpiece clamps (15) against the inner surface of the first housing (11) to form a closed chamber, and make the workpiece (8) located in the closed chamber. The conveying mechanism (2) is used to move the coated workpiece (8) out of the first housing (11) and move the uncoated workpiece (8) into the first housing (11).

2. The vacuum coating equipment according to claim 1, characterized in that, The top of the workpiece clamp (15) is provided with a receiving cavity (151) for receiving the workpiece (8); the bottom wall of the receiving cavity (151) is provided with a coating hole, and the cavity is located on the side of the workpiece clamp (15) away from the sealing assembly (14); the output end of the sealing assembly (14) is provided with a sealing element (141), and the sealing assembly (14) can cover the workpiece clamp (15) and press it against the inner surface of the first housing (11), and make the sealing element (141) press against the surface of the workpiece clamp (15) to form the closed cavity.

3. The vacuum coating equipment according to claim 2, characterized in that, The workpiece fixture (15) includes a fixture body (152) and an elastic element (153). The placement element (13) is provided with a first through hole (135). The fixture body (152) passes through the first through hole (135), and the elastic element (153) is disposed between the fixture body (152) and the placement element (13).

4. The vacuum coating equipment according to claim 3, characterized in that, The placement member (13) is provided with a limiting groove (131), and the elastic member (153) is disposed in the limiting groove (131). One end of the elastic member (153) abuts or connects with the placement member (13), and the other end of the elastic member (153) abuts or connects with the clamp body (152). The clamp body (152) can abut against the groove wall of the limiting groove (131).

5. The vacuum coating equipment according to claim 1, characterized in that, The bottom of the placement member (13) is provided with at least one second guide member (16), and the inner surface of the first housing (11) is provided with at least one guide groove. The second guide member (16) is slidably or rollingly connected to the guide groove.

6. The vacuum coating equipment according to claim 5, characterized in that, The placement component (13) includes a placement body (132) and a first connecting component (133). The first connecting component (133) is slidably connected to the placement body (132) in the vertical direction and is located near the first moving component (12) of the placement body (132). A second guide component (16) is disposed on the first connecting component (133), and the guide groove is correspondingly disposed on the inner surface of the first housing (11). The coating mechanism (1) further includes a height adjustment component (17). The height adjustment component (17) includes a clamp (171) and a locking component. The clamp (171) is slidably sleeved on the outside of the first connecting component (133) and fixed to the placement body (132). The locking component can lock the clamp (171) to the first connecting component (133).

7. The vacuum coating equipment according to claim 6, characterized in that, The height adjustment assembly (17) further includes an adjustment member (172) and a second connector (173). The adjustment member (172) passes through the first connector (133) in a vertical direction and is threadedly connected to the second connector (173). The second connector (173) presses the clamp (171) against the placement body (132), and the second connector (173) passes through the clamp (171) and is threadedly connected to the placement body (132).

8. The vacuum coating equipment according to claim 1, characterized in that, The output end of the sealing assembly (14) can move vertically to press the workpiece clamp (15) against the inner surface of the first housing (11).

9. The vacuum coating equipment according to claim 8, characterized in that, The sealing assembly (14) includes a synchronization assembly (142) and two sets of drive assemblies (143) arranged at intervals. Both sets of drive assemblies (143) are disposed in the first housing (11). The synchronization assembly (142) includes a third connector (1421), a gear (1422) and a rack (1423). The third connector (1421) is rotatably connected to the first housing (11). The two gears (1422) are respectively fixed at both ends of the third connector (1421). The two racks (1423) are correspondingly fixed in the vertical direction at the output ends of the two sets of drive assemblies (143). The gears (1422) and the racks (1423) are respectively meshed.

10. The vacuum coating equipment according to claim 1, characterized in that, Of the plurality of chambers, at least one chamber is used for chemical vapor deposition (CVD) coating, and at least one chamber is used for physical vapor deposition (PVD) coating; of the chambers used for PVD coating, at least one chamber is used for vacuum evaporation coating, and at least one chamber is used for vacuum sputtering coating; and / or, Of the plurality of chambers, one chamber is used for preheating, and the workpiece (8) is vacuum coated after passing through the chamber used for preheating.

11. The vacuum coating equipment according to claim 10, characterized in that, The chambers are provided at least seven. The first moving component (12) drives the workpiece fixture (15) through the seven chambers in sequence. The seven chambers are, in sequence, a preheating chamber (200), a first coating chamber (300), a second coating chamber (400), a third coating chamber (500), a fourth coating chamber (600), a fifth coating chamber (700), and a sixth coating chamber (800). The preheating chamber (200) is used to preheat the workpiece (8). The first coating chamber (300) is used for chemical vapor deposition coating. The second coating chamber (400) is used for vacuum sputtering coating. The third coating chamber (500) is used for chemical vapor deposition coating or vacuum sputtering coating. The fourth coating chamber (600) is used for vacuum sputtering coating. The fifth coating chamber (700) is used for chemical vapor deposition coating or vacuum sputtering coating. The sixth coating chamber (800) is used for vacuum evaporation coating.

12. The vacuum coating equipment according to any one of claims 1-11, characterized in that, The conveying mechanism (2) includes a second housing (21) and a second moving component (22). The vacuum coating equipment also includes a first valve (3) and a second valve (4). The first valve (3) is used to connect or disconnect the inner cavity of the first housing (11) and the inner cavity of the second housing (21). The second housing (21) has an opening at a position away from the first housing (11), and the second valve (4) is located at the opening. The second moving component (22) is used to move the workpiece (8).

13. The vacuum coating equipment according to claim 12, characterized in that, Of the plurality of chambers, one of the chambers is a transport chamber (100), and the second moving component (22) is used to move the workpiece (8) in the transport chamber (100) out of the first housing (11); the transport chamber (100) is provided with a third moving component (5); the workpiece clamp (15) is provided with a through hole, and the output end of the third moving component (5) can pass through the through hole and lift the workpiece (8) in the vertical direction; the output end of the second moving component (22) is used to move the workpiece (8) in a first direction, which is perpendicular to the vertical direction.

14. The vacuum coating equipment according to any one of claims 1-11, characterized in that, The output end of the first moving component (12) is used to drive the placement component (13) to rotate. A plurality of workpiece clamps (15) are circumferentially spaced on the placement component (13), and a plurality of chambers are correspondingly arranged with a plurality of workpiece clamps (15).

Images