Detection device and detection equipment

Abstract

The invention relates to a detection device and detection equipment, the detection device comprises a base, a transfer structure and a detection assembly, the transfer structure comprises a connecting table, a first driver, a first supporting table and a second supporting table, the first supporting table and the second supporting table are sequentially arranged in the first direction, and the first driver is connected between the first supporting table and the connecting table; the second supporting table is arranged on the connecting table, and a part of the second supporting table extends out of the connecting table and is suspended relative to the base to form an accommodating space; the detection assembly is arranged on the base and comprises a first detection group and a second detection group, the first detection group and the second detection group are sequentially arranged in a second direction, the second direction intersects with the first direction, and the first detection group comprises a first detection module which can move in the first direction; wherein the transfer structure is movably arranged on the base along the second direction so as to move to a position aligned with the first detection group and the second detection group, and the accommodating space is used for arranging partial structures of the first detection group and / or partial structures of the second detection group.

Description

Technical Field

[0001] This application relates to the field of appearance inspection technology, and in particular to an inspection device and inspection equipment. Background Technology

[0002] As electronic devices become increasingly integrated and precise, the testing procedures for products are also becoming more numerous and complex. Different testing procedures typically have different structural configuration requirements, making it difficult for traditional testing devices to integrate multiple testing procedures into a single station. Therefore, different testing configurations need to be set up at multiple testing stations to meet diverse testing needs.

[0003] However, in current testing equipment, each testing station is dedicated to a specific testing method, resulting in redundant setup of testing modules and other functional modules, which increases the cost of the testing equipment and occupies a large space. Summary of the Invention

[0004] Therefore, it is necessary to provide a detection device and detection equipment to address the above problems.

[0005] This application provides a detection device, which includes a base, a transfer structure, and a detection component. The transfer structure includes a connecting platform, a first driver, and a first support platform and a second support platform arranged sequentially in a first direction. The first driver is connected between the first support platform and the connecting platform to drive the first support platform to move relative to the connecting platform. The second support platform is disposed on the connecting platform and a portion of it extends out of the connecting platform, thus forming an accommodating space relative to the base. The detection component is disposed on the base and includes a first detection group and a second detection group, which are arranged sequentially in a second direction intersecting the first direction. The first detection group includes a first detection module movable along the first direction. The transfer structure is movably disposed on the base along the second direction to move to a position aligned with the first and second detection groups. The accommodating space is for arranging a portion of the structure of the first detection group and / or a portion of the structure of the second detection group.

[0006] This application also provides a testing device, which includes a conveying device as described above, the conveying device being used to convey a workpiece between a first tray and a second tray.

[0007] In the aforementioned testing device, the first support of the transfer structure can be driven by a first actuator to move, causing the workpiece supported by the first support to move accordingly. A portion of the second support of the transfer structure is suspended relative to the base, allowing the optical components of the testing assembly to be arranged within the accommodating space to provide optical processing for the workpiece supported by the second support from the bottom. Furthermore, compared to conventional technologies that separately configure functional modules at different workstations to perform functional operations on the workpiece, the transfer structure provided in this application combines the functions of moving the workpiece relative to the connecting platform and supporting the workpiece in mid-air, enabling the transfer structure to meet the testing requirements at different workstations. Therefore, the transfer structure can be used as a carrier for moving the workpiece along the second direction to positions aligned with the first testing group and with the second testing group, respectively, eliminating the need to separately configure functional modules at different workstations, simplifying the structure of the testing device and reducing its space occupation. Furthermore, firstly, when the transfer structure is aligned with the first detection group, since the first detection module of the first detection group is movable along the first direction, when the first detection module moves to align with the first support, it can cooperate with the moving first support to perform comprehensive detection on different areas of the workpiece. When the first detection module moves to align with the second support, it can cooperate with the optical components within the accommodating space to perform different types of detection processing on the workpiece compared to the first support. Thus, compared to the conventional technology where multiple detection elements are configured to correspond one-to-one with multiple detection stations, this application's arrangement, while meeting different types of detection needs, can reduce the number of detection elements and lower the overall space occupation of the device. Secondly, similarly to the first detection group, when the transfer structure is aligned with the second detection group, the second detection group can also cooperate with the first and second supports to achieve multiple detections, further meeting different detection needs, reducing the number of detection elements, and lowering the overall space occupation of the device. Attached Figure Description

[0008] Figure 1 This is an isometric schematic diagram of a detection device provided in an embodiment of this application.

[0009] Figure 2 for Figure 1 The front view of the transfer structure in the detection device shown.

[0010] Figure 3 for Figure 1 Top view of the detection device shown.

[0011] Figure 4 for Figure 1 Axonometric schematic diagram of the first detection component in the detection assembly of the detection device shown.

[0012] Figure 5 for Figure 1 Side view of the detection device shown.

[0013] Figure 6 for Figure 5 Axonometric schematic diagram of the second detection component in the detection assembly of the detection device shown.

[0014] Figure 7 for Figure 1 Axonometric schematic diagram of the third detection component in the detection assembly of the detection device shown.

[0015] Figure 8 for Figure 5 Axonometric schematic diagram of the lighting component of the detection assembly in the detection device shown.

[0016] Figure 9 for Figure 1 Axonometric schematic diagram of the fourth detection component in the detection assembly of the detection device shown.

[0017] Figure 10 for Figure 2 Axonometric schematic diagram of the transfer structure shown.

[0018] Figure 11 for Figure 10 Axonometric schematic diagram of the first support platform and the first positioning component of the transfer structure shown.

[0019] Reference numerals: 10, Detection device; 100, Base; 200, Transfer structure; 201, Accommodation space; 202, Light-transmitting hole; 203, Adsorption hole; 210, First support platform; 220, Second support platform; 221, Connecting part; 222, Extended part; 230, Connecting platform; 240, First driver; 250, First positioning assembly; 251, First positioning element; 251a, First connecting plate; 251b, First positioning part; 252, Second positioning element; 252a, Second connecting plate; 252 b. Second positioning part; 253. First reference member; 254. First positioning driver; 255. Second positioning driver; 260. Second positioning assembly; 261. Third positioning member; 262. Fourth positioning member; 263. Second reference member; 264. Third positioning driver; 265. Fourth positioning driver; 300. Detection assembly; 301. First detection group; 302. Second detection group; 303. Optical component; 310. First detection part; 311. First detection module; 312. First displacement 313. Second shift module; 314. Second driver; 315. Third driver; 316. Rotating frame; 317. First support; 318. Second support; 320. Second detection component; 321. Second detection module; 322. Third detection module; 323. Third shift module; 324. Fourth shift module; 325. Third support; 326. Fourth support; 330. Third detection component; 331. Fourth detection module; 332. Fifth shift module; 333. First Fine-tuning structure; 340, fourth detection component; 341, fifth detection module; 342, sixth detection module; 343, sixth shifting module; 344, second fine-tuning structure; 350, lighting component; 400, transfer module; 500, gantry frame; O1, first axis; O2, second axis; O3, third axis; S1, first direction; S2, second direction; S3, third direction; K1, first positioning direction; K2, second positioning direction; K3, third positioning direction; K4, fourth positioning direction. Detailed Implementation

[0020] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0021] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0022] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0025] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0026] Current inspection devices typically include inspection modules, functional modules, and conveying components. These devices are used to inspect workpieces. Furthermore, they are often required to perform multiple inspection processes, such as rotational inspection, backlight inspection, and through-beam inspection. Therefore, traditional inspection devices usually have multiple inspection stations, each equipped with an inspection module and functional modules. The conveying components transport the workpieces to each inspection station, and the functional modules perform functional operations on the workpieces at their respective inspection stations.

[0027] Rotational detection refers to a functional module that can rotate the workpiece, exposing different areas of the workpiece around its circumference in the detection module's field of view for comprehensive inspection. Backlight detection refers to a functional module supporting the workpiece, placing it in a relatively suspended state, allowing a backlight source to provide illumination for inspection. Similarly, through-beam detection involves a functional module supporting the workpiece, placing it in a relatively suspended state, allowing two detectors to simultaneously project light from above and below the workpiece to measure its thickness. Because the driving element of the functional module is typically located at the bottom of the workpiece (or at least occupies part of the space at the bottom) during rotational detection, the functional module used for rotational detection cannot be integrated with the functional modules used for backlight and through-beam detection; they are mutually exclusive.

[0028] As mentioned above, at different inspection stations, different functional modules need to perform different functional operations on the workpiece (such as the aforementioned rotary drive operation and suspended support operation), making it difficult to integrate multiple inspection processes into a single station for centralized inspection. Currently, multiple functional modules and multiple inspection modules are typically arranged at different stations, and the workpiece is transported to each inspection station using a conveyor assembly to achieve different inspections. However, this inspection method has several drawbacks. First, the number of inspection modules must correspond one-to-one with the number of inspection stations, increasing inspection costs and space requirements. Second, as mentioned above, the functional modules at different inspection stations have different structural forms, making it difficult to integrate different functional modules into a carrier for moving the workpiece. Furthermore, even if some functional modules have similarities, multiple functional modules can only be fixed one-to-one at multiple inspection stations, with the workpiece being transported to each inspection station by a conveyor assembly for the functional modules to perform their functional operations, resulting in a large overall space requirement for the inspection device.

[0029] To address the aforementioned problems, this application provides a detection device comprising a transfer structure and detection components. The transfer structure includes a first platform and a second platform, each with different structural configurations to meet different detection requirements. For example, a first driver can be configured on the first platform to rotate the workpiece, providing a structural basis for rotational detection. The second platform can support the workpiece in mid-air for backlight and through-beam detection. Furthermore, since the transfer structure integrates two different structural configurations, it can adapt to the detection requirements of different detection stations. Therefore, the transfer structure can be used as a carrier to move workpieces to different detection stations. This eliminates the need to configure functional modules at multiple detection stations, simplifying the structure and reducing space requirements.

[0030] Furthermore, the detection component includes a first detection module, which can switch between a position aligned with the first support platform and a position aligned with the second support platform. That is, the workpiece supported by the first support platform and the workpiece supported by the second support platform can be detected by the same detection module. This arrangement reduces the number of detection modules compared to separately configuring different detection modules to detect the two support platforms, thereby reducing costs, simplifying the structure of the detection device, and reducing space occupation. The detection device provided in this application will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Please see Figures 1 to 3 , Figure 1 This paper shows an isometric schematic diagram of a detection device provided in an embodiment of the present application. Figure 2 for Figure 1 The front view of the transfer structure in the detection device shown. Figure 3 for Figure 1 The diagram shows a top view of the inspection device. An embodiment of this application provides an inspection device 10 for performing on workpieces, including but not limited to appearance inspection and dimensional measurement. The various processes performed on the workpiece by the inspection device 10 will be referred to as inspection processes.

[0032] The detection device 10 includes a base 100, a transfer structure 200, and a detection component 300. Both the transfer structure 200 and the detection component 300 are located on the base 100. The transfer structure 200 is used to transport the workpiece, and the detection component 300 is used to perform detection processing on the workpiece. The transfer structure 200 includes a first support platform 210, a second support platform 220, a connecting platform 230, and a first driver 240. The first support platform 210 and the second support platform 220 are located on the connecting platform 230 and arranged sequentially in the first direction S1. The first driver 240 is connected between the first support platform 210 and the connecting platform 230 to drive the first support platform 210 to move relative to the connecting platform 230. That is, the first support platform 210 can be driven to move by the first driver 240, causing the workpiece carried by the first support platform 210 to move accordingly. The form in which the workpiece moves with the first support platform 210 can include various types such as translation and rotation, and is not limited here; it can be configured according to the detection requirements. A portion of the second support platform 220 extends beyond the connecting platform 230 and is suspended relative to the base 100, forming an accommodating space 201. That is, a portion of the second support platform 220 of the transfer structure 200 is suspended relative to the base 100. Therefore, the optical component 303 of the detection assembly 300 can be arranged within the accommodating space 201 to provide optical processing for the workpiece supported by the second support platform 220 from the bottom. Compared to conventional technologies that separately configure functional modules at different workstations to perform functional operations on the workpiece, the transfer structure 200 provided in this application has both the function of moving the workpiece relative to the connecting platform 230 and the function of supporting the workpiece in mid-air, enabling the transfer structure 200 to meet the detection needs at different workstations. Thus, the transfer structure 200 can be used as a carrier for moving workpieces, eliminating the need to separately configure functional modules at different workstations, simplifying the structure of the detection device 10 and reducing its space occupation.

[0033] See Figure 3 Combined Figure 1The detection assembly 300 includes a first detection group 301 and a second detection group 302, which are arranged sequentially along a second direction S2, intersecting with the first direction S1. The first detection group 301 includes a first detection module 311, which is movably disposed along the first direction S1. The transfer structure 200 is movably disposed on the base 100 along the second direction S2 to move to a position aligned with the first detection group 301 and the second detection group 302. The accommodating space 201 provides space for a portion of the structure of the first detection group 301 (i.e., the optical component 303 mentioned below) and / or a portion of the structure of the second detection group 302 (i.e., the optical component 303 mentioned below). Firstly, when the transfer structure 200 is aligned with the first detection group 301, since the first detection module 311 of the first detection group 301 is movable along the first direction S1, when the first detection module 311 moves to align with the first support platform 210, the first detection module 311 can cooperate with the moving first support platform 210 to perform comprehensive detection on different areas of the workpiece. When the first detection module 311 moves to align with the second support platform 220, the first detection module 311 can cooperate with the optical component 303 in the accommodating space 201 to perform different types of detection processing on the workpiece compared to the first support platform 210. Therefore, compared with the conventional technology of configuring multiple detection elements and multiple detection stations one-to-one, the arrangement of this application can reduce the number of detection elements and reduce the space occupation of the overall device while meeting different types of detection needs. Secondly, when the transfer structure 200 is aligned with the second detection group 302, similar to the first detection group 301, the second detection group 302 can also cooperate with the first support platform 210 and the second support platform 220 to achieve a variety of detections, so as to further meet different detection needs, reduce the number of detection elements and reduce the space occupied by the overall device.

[0034] For ease of explanation, the position where the transfer structure 200 aligns with the first detection group 301 during its movement along the second direction S2 is referred to as the first station, and the position where the transfer structure 200 aligns with the second detection group 302 is referred to as the second station. The workpieces in the first and second detection groups 301 that can be arranged within the accommodating space 201 when the transfer structure 200 is in a specific station are all referred to as optical components 303; that is, both the first and second detection groups 301 include optical components 303. The optical component 303 can be configured as an image capturing element or an element for assisting image capturing (e.g., a light source). Within the accommodating space 201, the optical component 303 can independently or in conjunction with other elements perform optical processing on the workpiece to meet detection requirements.

[0035] The transfer structure 200 provided in the embodiments of this application has the functions of both driving the workpiece to move relative to the connecting table 230 and supporting the workpiece in mid-air. Therefore, the transfer structure 200 can be combined with the detection component 300 to achieve at least two different forms of detection. Furthermore, the transfer structure 200 and the detection component 300 can move relative to each other in two different directions to achieve the functions of sharing a detection module and switching detection stations. With this configuration, the detection device 10 can achieve comprehensive detection of the workpiece with a simple and integrated structure.

[0036] like Figure 3 In one embodiment, along the first direction S1, the optical component 303 may be located away from the second support 220 relative to the first support 210 to provide optical processing for the workpiece supported by the second support 220 without interfering with the movement of the transfer structure 200. A portion of the structure of the second support 220 may extend outward relative to the connecting platform 230 along the first direction S1 in a direction away from the first support 210, such that the accommodating space 201 is formed in a region relatively away from the first support 210.

[0037] Furthermore, a portion of the second support platform 220 is suspended relative to the base 100 in the third direction S3, thus forming the aforementioned accommodating space 201. When the detection device 10 is in normal detection processing, the third direction S3 can be parallel to the direction of gravity, that is, a portion of the second support platform 220 is suspended above the base 100.

[0038] In one embodiment, the third direction S3 intersects both the second direction S2 and the first direction S1. Further, the first direction S1 may be perpendicular to the second direction S2. The third direction S3 may be perpendicular to both the first direction S1 and the second direction S2.

[0039] Please see Figure 1 and Figure 3 In one embodiment, the detection device 10 includes a gantry 500, which is mounted on a base 100. A first detection group 301 and a second detection group 302 are respectively located on opposite sides of the gantry 500 in a second direction S2. The gantry 500 allows the first detection group 301 and the second detection group 302 to be conveniently arranged sequentially in the second direction S2. It is understood that the first detection group 301 and the second detection group 302 are supported by the gantry 500 and are located above the transfer structure 200 in the third direction S3, so as to detect the workpiece transported by the transfer structure 200.

[0040] Please continue reading. Figure 1 and Figure 3In one embodiment, the detection device 10 further includes a transfer module 400, which is disposed on the base 100 and connected to the transfer structure 200 to drive the transfer structure 200 to move along the second direction S2. The transfer module 400 can be configured as a linear drive module such as a linear motor module, a cylinder, or a hydraulic cylinder, and this application does not limit it.

[0041] As mentioned above, in the various embodiments of this application, when the transfer structure 200 is at the same workstation, the detection module and optical component 303 that perform optical processing on the workpiece it carries constitute a detection group. That is, the first detection group 301 detects the workpiece carried by the transfer structure 200 at the first workstation, and the second detection group 302 detects the workpiece carried by the transfer structure 200 at the second workstation. Each detection group may include multiple detection components, each detection component has at least one detection module, and the detection component also has a driving element to drive the corresponding detection module to move, thereby improving the detection effect. The components included in the detection components in each embodiment are also the components included in the corresponding detection group, and will not be described in detail below.

[0042] Please see Figure 4 As one example, the first detection group 301 includes a first detection component 310, and the components included in the first detection component 310 are also the components included in the first detection group 301. The first detection component 310 includes a first shift module 312, a second shift module 313, a second driver 314, and a first detection module 311 as described above. The second driver 314, the first shift module 312, and the second shift module 313 are respectively used to drive the first detection module 311 to move, so that the first detection module 311 can not only move along the first direction S1 between the positions aligned with the first support 210 and the second support 220, but also has degrees of freedom of movement in other directions, improving the flexibility of detection.

[0043] Please see Figure 4 Combined Figure 1 and Figure 2In one embodiment, the first driver 240 may be disposed at the bottom of the first support 210. The first driver 240 can drive the first support 210 to rotate around the first axis O1, causing the workpiece to rotate accordingly around the first axis O1. Different side surfaces of the workpiece can be exposed to the first detection module 311 for detection. The second driver 314 is connected to the first detection module 311 to drive the first detection module 311 to rotate around an axis that intersects with or is not in plane with the axis of rotation of the first support 210 (i.e., the first axis O1). For example, the second driver 314 drives the first detection module 311 to rotate around a second axis O2, which is either an intersecting axis or an unplanar axis with the first axis O1. Thus, controlling the rotation of the first detection module 311 allows the first detection module 311 to have a certain pitch angle relative to the workpiece, facilitating the imaging of slots and inner walls of the workpiece.

[0044] Furthermore, the first shift module 312 is connected to the second driver 314 to drive the second driver 314 to move along a third direction S3. Figure 1 The second shifting module 313 is connected to the first shifting module 312 to drive the first shifting module 312 to move along the first direction S1, causing the first detection module 311 to switch between a position aligned with the first support 210 and a position aligned with the second support 220. In various embodiments, the position where the first detection module 311 is aligned with the two supports refers to the position where the first detection module 311 is aligned with the first support 210 and the second support 220 along the third direction S3, respectively.

[0045] Please continue reading. Figure 4 In one embodiment, the first detection group 301 further includes a third driver 315, which is also used to drive the first detection module 311 to move; that is, the first detection component 310 includes the third driver 315. The third driver 315 is connected to the first detection module 311 and is used to drive the first detection module 311 to rotate around the third axis O3. The second driver 314 is connected to the third driver 315 to drive the first detection module 311 to rotate around the second axis O2. The third axis O3 intersects with or is not parallel to the second axis O2. As one example, the third driver 315 can drive the first detection module 311 to rotate around the third axis O3, and the second driver 314 can drive the first detection module 311 to revolve around the third axis O3 via the third driver 315. This enriches the rotational freedom of the first detection module 311 and increases the shooting angle of the first detection module 311, enabling multi-angle detection of the workpiece.

[0046] Furthermore, the second axis O2 can be set to be perpendicular to the first axis O1. It should be noted that this perpendicularity includes spatial perpendicularity. Even further, the third axis O3 can be configured to be parallel to the first axis O1.

[0047] Please continue reading. Figure 4 Combined Figure 1 In one embodiment, the first detection component 310 further includes a rotating frame 316, a first support 317, and a second support 318. A third driver 315 is disposed on the rotating frame 316, and a second driver 314 is connected to the rotating frame 316 to drive the third driver 315 and the first detection module 311 to revolve via the rotating frame 316. The second driver 314 is disposed on the first support 317, and a first shifting module 312 is connected to the first support 317 to drive the first support 317 to move along a third direction S3. The first shifting module 312 is disposed on the second support 318, and a second shifting module 313 is connected to the second support 318 to drive the first shifting module 312 to move along a first direction S1.

[0048] Please see Figure 3 , Figure 5 and Figure 6 Combined Figure 1 As mentioned above, the second detection group 302 can also cooperate with the first support 210 and the second support 220 to achieve various detections. The second detection group 302 can be configured not only to have an optical component 303, but also to have a detection module movable along the first direction S1. In one embodiment, the second detection group 302 includes a second detection component 320, which includes a second detection module 321, movable along the first direction S1. Thus, by driving the second detection module 321 along the first direction S1, the second detection module 321 can be moved to a position aligned with the first support 210 and the second support 220, to independently or in conjunction with the optical component 303 to detect the workpiece.

[0049] Please see Figure 6 Combined Figure 5 In one embodiment, the second detection component 320 includes a third shift module 323 and a fourth shift module 324. The third shift module 323 is connected to the second detection module 321 to drive the second detection module 321 to move along a third direction S3, facilitating the second detection module 321 to move closer to and further away from the plane where the transfer structure 200 is located, and adjusting the detection distance. The fourth shift module 324 is connected to the third shift module 323 to drive the third shift module 323 and the second detection module 321 to move along a first direction S1 to a position aligned with the two support platforms.

[0050] Furthermore, the second detection component 320 also includes a third support 325 and a fourth support 326. The second detection module 321 is disposed on the third support 325, and the third shifting module 323 is connected to the third support 325 to drive the third support 325 to move along the third direction S3. The third shifting module 323 is disposed on the fourth support 326, and the fourth shifting module 324 is connected to the fourth support 326 to drive the fourth support 326 to move along the first direction S1.

[0051] Please continue reading. Figure 6 In another embodiment, the second detection component 320 may be configured to include a second detection module 321 and a third detection module 322, meaning the second detection component 320 has multiple detection modules. The second detection module 321 and the third detection module 322 are arranged at intervals along the first direction S1, and the interval is adapted to the interval between the first support platform 210 and the second support platform 220. Thus, when the second detection module 321 aligns along the third direction S3 with the workpiece carried by one of the support platforms (e.g., the first support platform 210), the third detection module 322 aligns along the third direction S3 with the workpiece carried by the other support platform (e.g., the second support platform 220). The second detection module 321 and the third detection module 322 can respectively detect the workpieces carried by the two support platforms. This configuration improves detection efficiency. In this embodiment, since the second detection module 321 and the third detection module 322 can correspond to the two supports respectively, they can be configured not to move along the first direction S1. They are fixed in the first direction S1 at positions corresponding to the first support 210 and the second support 220 respectively. It should be noted that the distance between the second detection module 321 and the third detection module 322, and the distance between the first support 210 and the second support 220, are all distances along the first direction S1.

[0052] Of course, in another embodiment, both the second detection module 321 and the third detection module 322 can be configured to be movably arranged along the first direction S1. In this case, the second detection module 321 and the third detection module 322 can be configured to perform different types of detection on the workpiece, respectively. As one example, the second detection module 321 can be driven to move along the first direction S1 to a position aligned with the first support 210 and the second support 220 to perform a first type of detection on the workpieces on the two supports; the third detection module 322 can be driven to move along the first direction S1 to a position aligned with the first support 210 and the second support 220 to perform a second type of detection on the workpieces on the two supports, thereby improving the comprehensiveness of the detection. Further, the second detection module 321 and the third detection module 322 can move independently along the first direction S1. Alternatively, the second detection module 321 and the third detection module 322 can both be arranged on the third support 325 to move synchronously along the first direction S1. The movement patterns of the second detection module 321 and the third detection module 322 along the first direction S1 can be configured according to actual needs, and this application does not limit them.

[0053] Please see Figure 7 Combined Figures 1 to 3 In one embodiment, the first detection group 301 further includes a third detection component 330, which includes a fourth detection module 331. The fourth detection module 331 is movable along the first direction S1. When the transfer structure 200 is in the first station, at least one position of the fourth detection module 331 during its movement is within the accommodating space 201. That is, the fourth detection module 331 is the optical component 303 of the first detection group 301, and at this time, the optical component 303 of the first detection group 301 has the function of detecting the workpiece. Further, the fourth detection module 331 is located below the first detection module 311 in the third direction S3. As one example, the first detection module 311 and the fourth detection module 331 can move synchronously along the first direction S1 to detect the thickness of the workpiece in the third direction S3 by means of mutual shooting in the third direction S3.

[0054] Furthermore, the third detection component 330 also includes a fifth shifting module 332, which is disposed on the base 100 and connected to the fourth detection module 331 to drive the fourth detection module 331 to move along the first direction S1. Further still, the third detection module 322 also includes a first fine-tuning structure 333, which is connected between the fifth shifting module 332 and the fourth detection module 331 to drive the fourth detection module 331 to move along the third direction S3. The first fine-tuning structure 333 can adjust the position of the fourth detection module 331 in the third direction S3, facilitating accurate detection of the workpiece thickness in the third direction S3.

[0055] Please see Figure 8 In one embodiment, the second detection group 302 further includes an illumination component 350. When the transfer structure 200 is in the second station, the illumination component 350 is located within the accommodating space 201 and its light emission direction is towards the second support platform 220. That is, the illumination component 350 is the optical component 303 of the second detection group 302. The transfer structure 200 can move along the second direction S2 to a position where a portion of the second support platform 220 is suspended above the illumination component 350. At this time, the illumination component 350 can provide backlight illumination for the workpiece on the second support platform 220 to cooperate with other detection modules for detection processing. Further, when the transfer structure 200 is in the second station, the second detection component 320 can be driven to move along the first direction S1 to a position aligned with the illumination component 350 (along the third direction S3), so that the second detection module 321 and / or the third detection module 322 can detect the workpiece under the backlight illumination effect of the illumination component 350, thereby improving the contrast of the acquired image.

[0056] Please see Figure 3 In one embodiment, along the first direction S1, the fourth detection module 331 and the lighting component 350 can be arranged in the area of ​​the second support 220 away from the first support 210, so that the transfer structure 200 can switch between the position aligned with the fourth detection module 331 and the position aligned with the lighting component 350 along the second direction S2.

[0057] Please see Figure 10 In one embodiment, the second support platform 220 has multiple light-transmitting holes 202 extending along a third direction S3, and the light-transmitting holes 202 communicate with the accommodating space 201. Thus, the fourth detection module 331 can detect the workpiece supported by the second support platform 220 through the light-transmitting holes 202. The lighting component 350 can provide backlight illumination to the workpiece supported by the second support platform 220 through the light-transmitting holes 202. Furthermore, the number of light-transmitting holes 202 is multiple, which can fully meet the detection and lighting requirements.

[0058] Of course, in another embodiment, the material of the second support 220 can also be configured to be a light-transmitting material so that the fourth detection module 331 can detect the workpiece supported by the second support 220 through the second support 220, and so that the lighting component 350 can provide backlight illumination to the workpiece through the second support 220.

[0059] Please see Figure 9 Combined Figure 3When the transfer structure 200 is in the first station, the detection of the workpiece supported by the first platform 210 is not limited to relying solely on the first detection module 311 aligned with the first platform 210. In one embodiment, the first detection group 301 further includes a fourth detection component 340, which includes a fifth detection module 341. The fifth detection module 341 is located on the side of the first platform 210 away from the second platform 220 in the first direction S1, so as to acquire an image of the workpiece supported by the first platform 210 along the first direction S1. It can be understood that the first driver 240 can drive the workpiece to rotate around the first axis O1, so that all circumferential areas of the workpiece are exposed within the field of view of the fifth detection module 341, so that the fifth detection module 341 can detect the workpiece. As one example, the workpiece can be a hollow shell-like product. During the rotation of the workpiece driven by the first driver 240, the first detection module 311 can detect the bottom wall and the peripheral wall of the inner cavity of the workpiece from top to bottom, and the fifth detection module 341 can detect the outer circumferential surface of the workpiece from the side to achieve comprehensive detection of the workpiece.

[0060] Furthermore, the fifth detection module 341 is movably configured along the first direction S1. It is understood that when the workpiece has a shape that is not rotationally symmetrical about the first axis O1, the distance from the workpiece to the fifth detection module 341 along the first direction S1 (approximately the detection direction of the fifth detection module 341) will change as the workpiece rotates around the first axis O1. In this embodiment, the fifth detection module 341 is configured to have the ability to move along the first direction S1, and can move accordingly during the workpiece's rotation, adapting to changes in the workpiece's rotational posture to obtain a clear image.

[0061] Please see Figure 9 In one embodiment, the fourth detection component 340 further includes a sixth shift module 343, which is connected to the fifth detection module 341 to drive the fifth detection module 341 to move along the first direction S1.

[0062] Please continue reading. Figure 9 In one embodiment, the fourth detection component 340 further includes a sixth detection module 342, which is also located on the side of the first support 210 away from the second support 220. The sixth detection module 342 may have a different detection type than the fifth detection module 341. As one example, the fifth detection module 341 may be configured as a two-dimensional detection module, and the sixth detection module 342 may be configured as a 3D detector. Further, the first detection module 311 may also be configured as a 3D detector. In this case, the first detection module 311 and the sixth detection module 342 can jointly scan the workpiece to obtain point cloud data of the workpiece surface, which facilitates the construction of the workpiece's 3D contour.

[0063] In one embodiment, the first support 210 and / or the second support 220 may be provided with a plurality of spaced markers so that the image data acquired by the first detection module 311 and the sixth detection module 342 can be stitched together later according to the position of the markers.

[0064] Please continue reading. Figure 9 In one embodiment, the fourth detection component 340 further includes a second fine-tuning structure 344, which is disposed on the base 100 and connected to the sixth detection module 342 to adjust the detection angle of the sixth detection module 342.

[0065] Please see Figure 10 and Figure 11 Combined Figure 2 In one embodiment, the transfer structure 200 further includes positioning components, with at least two positioning components. These two positioning components can be respectively disposed on the first support 210 and the second support 220 to position the workpiece supported by the first support 210 and the second support 220, thereby improving the positional accuracy of the workpiece and facilitating high-precision detection. Figure 10 Furthermore, the first support platform 210 and / or the second support platform 220 have adsorption holes 203. One end of the adsorption hole 203 is connected to a negative pressure generator (not shown in the figure, the same below), and the other end is used to connect the side (i.e., top) of the first support platform 210 and / or the second support platform 220 for supporting the workpiece. Thus, the workpiece positioned by the positioning component can be fixed to the first support platform 210 and / or the second support platform 220 under the adsorption of the adsorption hole 203, which facilitates the first support platform 210 to drive the workpiece to rotate stably, and facilitates the transfer structure 200 to stably drive the workpiece to switch positions along the second direction S2.

[0066] Please see Figure 10 and Figure 11 Combined Figure 2 In one embodiment, positioning components may be disposed at both the first support platform 210 and the second support platform 220. In this case, at least two positioning components include a first positioning component 250 and a second positioning component 260. The first positioning component 250 is used to position the workpiece supported by the first support platform 210; the second positioning component 260 is used to position the workpiece supported by the second support platform 220. That is, the transfer structure 200 also includes the first positioning component 250 and the second positioning component 260.

[0067] The first positioning assembly 250 includes a first positioning member 251, a second positioning member 252, a first reference member 253, a first positioning driver 254, and a second positioning driver 255. At least two first reference members 253 are disposed on different sides of the first support 210. At the top of the first support 210, at least a portion of the structure of the first positioning member 251 is disposed facing one of the first reference members 253 along a first positioning direction K1, and the first positioning member 251 is movable along the first positioning direction K1. Thus, the first positioning member 251, in conjunction with one of the first reference members 253, can position the workpiece in the first positioning direction K1. At the top of the first support 210, at least a portion of the structure of the second positioning member 252 is disposed facing another first reference member 253 along a second positioning direction K2, and the second positioning member 252 is movable along the second positioning direction K2. Thus, the second positioning member 252, in conjunction with the other first reference member 253, can position the workpiece in the second positioning direction K2. The first positioning direction K1 and the second positioning direction K2 intersect. In this way, the workpiece is completely positioned within the plane defined by the first positioning direction K1 and the second positioning direction K2. The first positioning actuator 254 and the second positioning actuator 255 are both located at the bottom of the first support 210 and are connected to the first positioning member 251 and the second positioning member 252, respectively. In this embodiment, since the first positioning actuator 254 and the second positioning actuator 255 are both located at the bottom of the first support 210, the risk of the two positioning actuators obstructing the workpiece supported on the top of the first support 210 is reduced, facilitating inspection.

[0068] Furthermore, the first positioning direction K1 can be configured to be perpendicular to the second positioning direction K2. It is understood that the plane defined by the first positioning direction K1 and the second positioning direction K2 can be parallel to or coincide with the plane defined by the first direction S1 and the second direction S2. However, the embodiments of this application do not limit the first positioning direction K1 and the second positioning direction K2 to have a corresponding relationship with the first direction S1 and the second direction S2.

[0069] Please see Figure 10 and Figure 11 In one embodiment, the first positioning member 251 includes a first connecting plate 251a and a first positioning part 251b. The first connecting plate 251a is located on the side periphery of the first support 210, and the first positioning part 251b is located on the top of the first support 210. The first connecting plate 251a connects the first positioning part 251b and the first positioning driver 254, so as to drive the first positioning part 251b to move along the first positioning direction K1 under the drive of the first positioning driver 254. It can be understood that the first positioning part 251b is disposed facing one of the first reference members 253 along the first positioning direction K1.

[0070] The second positioning member 252 includes a second connecting plate 252a and a second positioning part 252b. The second connecting plate 252a is located on the other side of the periphery of the first support 210, and the second positioning part 252b is located on the top of the first support 210. The second connecting plate 252a connects the second positioning part 252b and the second positioning driver 255, so that the second positioning part 252b moves along the second positioning direction K2 under the drive of the second positioning driver 255. It can be understood that the second positioning part 252b is arranged facing another first reference member 253 along the second positioning direction K2.

[0071] In one embodiment, the number of the first positioning part 251b, the second positioning part 252b, and the first reference member 253 can be multiple.

[0072] Please see Figure 2 In one embodiment, the second positioning component 260 is disposed on top of the second support 220 to reduce the risk of obstructing the optical component 303 within the accommodating space 201. The second support 220 includes a connecting portion 221 and an extension portion 222. The connecting portion 221 is connected to the connecting platform 230, and the extension portion 222 extends outward relative to the connecting platform 230, that is, the extension portion 222 is suspended relative to the base 100 in the third direction S3 to form the accommodating space 201. As mentioned above, the extension portion 222 can extend outward relative to the connecting platform 230 in the first direction S1 away from the first support 210.

[0073] The second positioning assembly 260 includes a third positioning member 261, a fourth positioning member 262, a second reference member 263, a third positioning actuator 264, and a fourth positioning actuator 265. At least two second reference members 263 are disposed on different sides of the extension 222. The third positioning member 261 is disposed facing one of the second reference members 263 along a third positioning direction K3, and the third positioning member 261 is movable along the third positioning direction K3. Thus, the third positioning member 261, in conjunction with one of the second reference members 263, can position the workpiece in the third positioning direction K3. The fourth positioning member 262 is disposed facing another second reference member 263 along a fourth positioning direction K4, and the fourth positioning member 262 is movable along the fourth positioning direction K4. Thus, the fourth positioning member 262, in conjunction with the other second reference member 263, can position the workpiece in the fourth positioning direction K4. The third positioning direction K3 intersects the fourth positioning direction K4. In this way, the workpiece is completely positioned in the plane defined by the third positioning direction K3 and the fourth positioning direction K4.

[0074] The third positioning actuator 264 is disposed on the connecting portion 221 and connected to the third positioning member 261, and the fourth positioning actuator 265 is disposed on the extension portion 222 and connected to the fourth positioning member 262. In this embodiment, the extension portion 222 is a structure in the second support 220 used to form the accommodating space 201, so the workpiece will be mainly supported on the extension portion 222 so that the optical member 303 can provide optical processing to the workpiece. Therefore, by configuring the third positioning actuator 264 on the connecting portion 221, the occupation of the extension portion 222 can be reduced, which facilitates the arrangement of the workpiece; and by configuring the second reference member 263 and the fourth positioning member 262 on the extension portion 222, the workpiece can be effectively positioned.

[0075] In one embodiment, the shifting modules 312, 313, 323, 324, 332, and 343 can be configured as linear drive modules such as linear motor modules, cylinders, and hydraulic cylinders, and this application does not limit their configuration. The first driver 240, second driver 314, and third driver 315 can be configured as various rotary drivers, and this application also does not limit their configuration in the embodiments.

[0076] The detection modules 311, 321, 322, 331, 341, and 342 can be configured as integrated detection modules, such as 3D detectors. Alternatively, each detection module can be configured as a separate detection module including a camera, lens, and light source.

[0077] One embodiment of this application also includes a detection device, which may include the detection apparatus 10 as described in the various embodiments. The detection device has all the features of the detection apparatus 10, and therefore also has all the beneficial effects of the detection apparatus 10.

[0078] In one embodiment, the testing equipment further includes a conveying device (not shown, the same below) for conveying the workpiece between the first support 210 and the second support 220, so that the same workpiece is subjected to different testing processes at the first support 210 and the second support 220 respectively.

[0079] In one embodiment, the conveying device can be configured as a robotic arm or other device with material handling capabilities. It is understood that when the inspection device 10 inspects a workpiece, the first platform 210 and the second platform 220 can each support different workpieces, and the conveying device is used to switch the positions of the workpieces on the two platforms to ensure that both workpieces undergo comprehensive inspection. Alternatively, when the inspection device 10 inspects a workpiece, only one of the first platform 210 and the second platform 220 may be used to carry a workpiece at any given time. In this case, after one platform has completed its inspection of a workpiece, the conveying device can move the workpiece to the other platform for further inspection.

[0080] Please see Figure 3 In one embodiment, the conveying device may also be located on the base 100. As one example, the conveying device may be located at the same position as the lighting component 350 in the second direction S2. That is, the conveying device is aligned with the transfer structure 200 at the second workstation, and when the transfer structure 200 is at the second workstation, the conveying device can perform transfer and repositioning processing on the workpiece carried by the transfer structure 200. In short, the conveying device can be arranged as follows: Figure 3 The upper left corner area of ​​the base 100 shown.

[0081] Of course, in other embodiments, the conveying device may also be located in other positions.

[0082] Furthermore, in another embodiment, the testing equipment may not have a handling device, in which case the workpiece can be manually repositioned.

[0083] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0084] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A detection device, characterized in that, The detection device includes: Base; The transfer structure includes a connecting platform, a first driver, and a first support platform and a second support platform arranged sequentially in a first direction. The first driver is connected between the first support platform and the connecting platform to drive the first support platform to move relative to the connecting platform. The second support platform is disposed on the connecting platform and a portion of it extends out of the connecting platform and is suspended relative to the base to form an accommodating space. A detection component is disposed on the base. The detection component includes a first detection group and a second detection group. The first detection group and the second detection group are arranged sequentially in a second direction, which intersects with the first direction. The first detection group includes a first detection module that is movable along the first direction. The transfer structure is movably disposed on the base along the second direction to move to a position aligned with the first detection group and the second detection group, and the accommodating space is for arranging a portion of the structure of the first detection group and / or a portion of the structure of the second detection group.

2. The detection device according to claim 1, characterized in that, The second detection group includes a second detection module, which is movable along the first direction.

3. The detection device according to claim 1, characterized in that, The second detection group further includes a second detection module and a third detection module. The second detection module and the third detection module are arranged at intervals along the first direction, and the interval is adapted to the interval between the first support and the second support.

4. The detection device according to claim 3, characterized in that, Both the second detection module and the third detection module are movably arranged along the first direction.

5. The detection device according to claim 1, characterized in that, The transfer structure can move along the second direction to a first station that is aligned with the first detection group. The first detection group includes a fourth detection module, which is movable along the first direction. When the transfer structure is in the first work station, at least one position of the fourth detection module during its movement is within the accommodating space.

6. The detection device according to claim 1, characterized in that, The transfer structure can move along the second direction to a second station aligned with the second detection group, and the second detection group also includes a lighting component; When the transfer structure is in the second work position, the lighting component is located within the accommodating space and the light emission direction is towards the second support.

7. The detection device according to claim 1, characterized in that, The detection device includes a gantry frame mounted on the base, and the first detection group and the second detection group are respectively located on opposite sides of the gantry frame in the second direction.

8. The detection device according to claim 1, characterized in that, The first detection group includes: The second driver is connected to the first detection module to drive the first detection module to rotate about an axis that intersects or is not in the same plane as the rotation axis of the first platform. A first shift module is connected to a second driver to drive the second driver to move along a third direction, which intersects the first direction and the second direction respectively. A second shift module is connected to the first shift module to drive the first shift module to move along the first direction.

9. The detection device according to claim 1, characterized in that, The first detection group further includes a fifth detection module, which is located on the side of the first support platform away from the second support platform in the first direction and is movably arranged along the first direction.

10. The detection device according to claim 1, characterized in that, The transfer structure further includes a first positioning component, which includes a first reference element, a first positioning element, a second positioning element, a first positioning driver, and a second positioning driver, with at least two of the first reference elements disposed on different sides of the first support platform. At the top of the first support, at least a portion of the structure of the first positioning member is disposed facing one of the first reference members along the first positioning direction and is movable along the first positioning direction; at least a portion of the structure of the second positioning member is disposed facing the other first reference member along the second positioning direction and is movable along the second positioning direction; the first positioning direction and the second positioning direction intersect. The first positioning driver and the second positioning driver are both located at the bottom of the first support and are connected to the first positioning member and the second positioning member, respectively.

11. The detection device according to claim 1, characterized in that, The transfer structure further includes a second positioning component, which is disposed on the top of the second support platform. The second support platform includes a connecting part and an extension part. The connecting part is connected to the connecting platform, and the extension part extends outward relative to the connecting platform. The second positioning component includes a second reference member, a third positioning member, a fourth positioning member, a third positioning driver, and a fourth positioning driver. At least two second reference members are disposed on different sides of the extension. The third positioning member is disposed facing one of the second reference members along a third positioning direction and is movable along the third positioning direction. The fourth positioning member is disposed facing the other second reference member along a fourth positioning direction and is movable along the fourth positioning direction. The third positioning direction and the fourth positioning direction intersect. The third positioning driver is located on the connecting part and connected to the third positioning member, and the fourth positioning driver is located on the extension part and connected to the fourth positioning member.

12. The detection device according to claim 1, characterized in that, The second support is suspended relative to the base in a third direction to form the accommodating space. The third direction intersects with the second direction and the first direction respectively. The second support has a plurality of light-transmitting holes that are arranged through the third direction and are connected to the accommodating space. and / or The first support and / or the second support has an adsorption hole, one end of which is connected to a negative pressure generator, and the other end is used to connect to the side of the first support and / or the second support used to support the workpiece; and / or The detection device further includes a transfer module, which is disposed on the base and connected to the transfer structure to drive the transfer structure to move along the second direction.

13. A testing device, characterized in that, The testing equipment includes a conveying device as described in any one of claims 1 to 12, the conveying device being used to convey the workpiece between the first support platform and the second support platform.

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