An automated sample loading method for a side-mounted sample stage in an electron microscope

Abstract

This invention provides an automated sample loading method for a side-insertion sample stage in electron microscopy, belonging to the field of automated loading and intelligent control technology for transmission electron microscopy. After coaxially aligning the sample rod and the injection port, a first, second, and third advance are sequentially performed. When a preset first-stage limit condition is met after the first advance, the vacuum state is checked; if it is, a second advance is performed. When a preset second-stage limit condition is met after the second advance, a stable connection is determined; if stable connection is achieved, a third advance is performed. When a preset third-stage limit condition is met after the third advance, the sample loading is complete. This method decomposes the sample loading process into multi-stage advances, using axial contact force, torque, and preset target positions for each stage to determine the state, achieving step-by-step sample loading control. Simultaneously, vacuum state monitoring is used to evaluate the connectivity of the transmission channel, thereby dynamically adjusting the sample loading accuracy and significantly improving sample loading efficiency while ensuring reliability.

Description

Technical Field

[0001] This invention relates to the field of automated loading and intelligent control technology for transmission electron microscopy, and in particular to an automated sample loading method for a side-insertion sample stage in an electron microscope. Background Technology

[0002] Transmission electron microscopy (TEM) is a high-resolution microscopic analytical instrument that uses a high-energy electron beam as an illumination source. Its core principle is to focus and image the electron beam that penetrates the sample rod through an electromagnetic lens system. Because electron beams are strongly scattered in air, TEM must operate in a high vacuum environment above 10^-3 Pa. To ensure the safe transfer of the sample rod between the vacuum and atmospheric environments, TEM commonly employs a side-mounted sample rod stage structure. This structure consists of key components such as the sample rod, a vacuum sealing valve, and a sample inlet channel. Loading and sealing of the sample rod are achieved through its axial translation and rotational movements.

[0003] There are two main approaches to sample rod loading technology in transmission electron microscopes (TEM): one is the integrated automatic sample loading system found in a few high-end models. While these systems offer partial automation, manual pre-positioning of the sample rod to the designated area is still required. Furthermore, their mechanical structure and control system are deeply embedded in the TEM main unit, leading to high model specificity and high modification costs. The other approach is the currently mainstream purely manual operation mode, where the operator must strictly follow a "insertion-rotation-locking" mechanical sequence in conjunction with the opening and closing of the vacuum valve. This manual operation method has three significant drawbacks: First, the operation relies on individual experience, with significant differences in the force, speed, and timing of actions among different operators, resulting in unstable sample loading quality. Second, the sample rod and sealing structure are prone to non-axial loads under repeated mechanical forces, accelerating the wear of O-rings and other seals. Finally, manual operation makes it difficult to precisely control the vacuum transition timing, easily causing vacuum fluctuations that affect imaging stability and increase the risk of sample rod contamination. These technical defects severely restrict the operational efficiency and safety of TEM. Summary of the Invention

[0004] In view of this, the present invention provides an automated sample insertion method for a side-insertion sample stage in electron microscopes. This method achieves a universal and configurable sample stage insertion and removal control process compatible with multiple electron microscope models without altering the main electron microscope structure and vacuum system. Based on the fusion of mechanical data, pose, and vacuum signals, this method can adaptively adjust the insertion and removal posture, significantly improving consistency, safety, and scalability.

[0005] Therefore, the present invention provides the following technical solution:

[0006] An automated sample loading method for a side-insertion sample stage of an electron microscope is provided, which is achieved through an automated sample loading system for a side-insertion sample stage of an electron microscope; the automated sample loading system for a side-insertion sample stage of an electron microscope includes:

[0007] The system includes a robotic arm controlled by a host computer, a clamp at the end of the robotic arm for holding the sample rod, a mechanical sensing unit for collecting mechanical data from the clamp, a vacuum signal acquisition module for collecting the vacuum state of the electron microscope, and a center positioning device for aligning the sample rod.

[0008] The automatic sample loading method for the side-insertion sample stage of the electron microscope includes:

[0009] After aligning the sample rod and the injection port coaxially, perform the first, second, and third advances in sequence;

[0010] If the preset limit condition is met after one push, it is determined whether the qualified vacuum state is met. If the qualified vacuum state is met, a second push is performed; if the qualified vacuum state is not met, the push is repeated until the preset number of pushes is reached, and then the current sample injection is terminated.

[0011] If the preset limit condition is not met after one push, the push is repeated until the preset number of pushes is reached, at which point the current sample injection is terminated.

[0012] If the preset second-stage limit condition is met after the second-stage push is performed, it is determined whether the connection is stable. If the connection is stable, the third-stage push is performed. If the connection is unstable, the second-stage push is repeated until the preset number of second-stage pushes is reached, and then the current sample injection is terminated.

[0013] If the preset second-stage limit condition is not met after the second-stage push, the second-stage push will be repeated until the preset number of second-stage pushes is reached, at which point the current sample injection will be terminated.

[0014] If the preset three-stage limit condition is met after three propulsions, the sample injection is complete.

[0015] If the preset three-step limit condition is not met after three pushes, the three pushes will be repeated until the preset number of pushes is reached, at which point the current sample injection will be terminated.

[0016] Furthermore:

[0017] The one-time limiting condition is that the sample rod is pushed to a preset target position and the axial contact force between the sample rod and the injection port meets a preset threshold.

[0018] The secondary limiting condition is that the torque between the sample rod and the injection port meets a preset secondary threshold.

[0019] The three limiting conditions are that the sample rod is advanced to the preset three target positions and the axial contact force between the sample rod and the injection port meets the preset three thresholds.

[0020] Furthermore, the central positioning device includes:

[0021] Electron microscope side calibration fixture, robotic arm side calibration fixture, and laser displacement ranging sensor;

[0022] The electron microscope side calibration fixture is mounted on the electron microscope goniometer stage, the robotic arm side calibration fixture is mounted on the end of the robotic arm, and the laser displacement distance sensor is mounted on the robotic arm side calibration fixture.

[0023] Furthermore, the sample rod and the injection port are coaxially aligned, including:

[0024] The electron microscope side calibration fixture and the robotic arm side calibration fixture achieve self-centering alignment through coaxial cones arranged in opposite directions.

[0025] While keeping the tip of the cone aligned, the robotic arm side calibration fixture is driven to rotate around its axis, and the laser displacement ranging sensor is used to measure the distance to the annular target surface of the electron microscope side calibration fixture and collect distance values ​​at different rotation angles.

[0026] Based on the distance value, the parallelism of the two calibration fixture end faces is calculated, the attitude correction amount is determined, and the position of the robotic arm end is corrected so that the sample rod axis is coaxial with the sample inlet channel axis.

[0027] Furthermore, the aforementioned one-step advancement includes:

[0028] The safe zone is defined as 10-30 mm outside the injection port, and the contact zone is defined as 0-10 mm outside the injection port. The advance speed of the sample rod is determined by admittance control based on the axial contact force between the sample rod and the injection port.

[0029] Within the safe zone, the propulsion speed is constrained to a range of 5–20 mm / s; within the contact zone, the propulsion speed is constrained to a range of 0.5–5 mm / s.

[0030] Furthermore, the secondary propulsion includes:

[0031] The angle and direction of the first twist and the angle and direction of the second twist are determined based on the structure of the electron microscope inlet.

[0032] The first twist:

[0033] The sample rod is twisted around the axis in a preset direction by a preset angle, and the torque is detected in real time; if the torque and angle change curve successively shows the characteristics of rising, falling and plateau, and the torque meets the preset constraint, then one twist is completed;

[0034] If an abnormal torsion occurs, the position will be retracted to the target position if the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required.

[0035] After the first twist is completed, a second twist is performed:

[0036] The sample rod is twisted around the axis in a predetermined torsional direction by a predetermined angle, and the torque is detected in real time;

[0037] If the torque between the sample rod and the injection port after twisting meets the preset secondary threshold, then the secondary twisting is complete.

[0038] If an abnormal torsion occurs, the system will retract to the target position once, provided that the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required.

[0039] Furthermore, the torsional anomaly includes:

[0040] If the torque continues to rise and exceeds the normal threshold, it indicates an abnormal interference.

[0041] If the torque is consistently below the preset threshold, it indicates an idling abnormality.

[0042] Furthermore, the three advancements include:

[0043] The axial contact force between the sample rod and the injection port is collected in real time, and the advance speed of the sample rod is determined by admittance control; the constraint range of the advance speed is 0.2 to 2 mm / s.

[0044] Furthermore, the determination of whether a qualified vacuum state is met includes:

[0045] The system determines whether the air extraction permit status is met within a preset time. If it is, the air extraction operation is performed for the preset time. During the air extraction process, the vacuum indicator signal is read through the vacuum signal acquisition module.

[0046] If the vacuum indication signal enters the target state and remains stable within a preset time, or if the vacuum pressure drops to the target threshold and the rate of decrease is within a preset range, then it is determined that a qualified vacuum state has been reached.

[0047] Furthermore, the criteria for determining stable connectivity include:

[0048] The vacuum signal is within the target range, the torque is within the target range, and the position of the sample rod reaches the target tolerance with respect to the preset secondary target position.

[0049] Advantages and positive effects of the present invention:

[0050] The automatic sample feeding method using the side-insertion sample stage of the electron microscope, which is deployed on the host computer, controls the robotic arm to complete the automatic sample feeding without modifying the main structure and vacuum system. It can be adapted to various models of electron microscopes.

[0051] This method decomposes the sample introduction process into multiple stages, and judges the state based on axial contact force, torque and preset target positions of each stage to achieve precise step-by-step sample introduction control. At the same time, it combines vacuum state monitoring to evaluate the connectivity of the transmission channel, thereby dynamically adjusting the sample introduction accuracy, and ultimately significantly improving the sample introduction efficiency while ensuring reliability. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0053] Figure 1 This is a schematic diagram of the center positioning device in an automated sample loading system for a side-insertion sample stage in an electron microscope.

[0054] Figure 2 This is a flowchart of an automated sample loading method for a side-mounted sample stage in an electron microscope. Detailed Implementation

[0055] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0056] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0057] An automated sample loading method for a side-insertion sample stage of an electron microscope is achieved through an automated sample loading system for a side-insertion sample stage of an electron microscope.

[0058] An automated sample loading system for side-mounted sample stages in electron microscopy includes:

[0059] The system consists of a robotic arm controlled by a host computer, a clamp at the end of the robotic arm for holding the sample rod, a mechanical sensing unit for collecting mechanical data from the clamp, a vacuum signal acquisition module for collecting the vacuum state of the electron microscope, and a center positioning device for aligning the sample rod.

[0060] The clamp includes multiple jaws, and the inner side of the jaws is provided with a V-shaped groove or arc surface structure that matches the shape of the sample rod tail end, which is used to automatically limit the radial position and rotation angle of the sample rod during the clamping process.

[0061] Combination Figure 1 As shown, the center positioning device includes:

[0062] Electron microscope side calibration fixture, robotic arm side calibration fixture, and laser displacement ranging sensor;

[0063] The electron microscope side calibration fixture is mounted on the electron microscope goniometer stage, the robotic arm side calibration fixture is mounted on the end of the robotic arm, and the laser displacement distance sensor is mounted on the robotic arm side calibration fixture.

[0064] Combination Figure 2 As shown, the automatic sample loading method for a side-insertion sample stage in an electron microscope includes:

[0065] After aligning the sample rod and the injection port coaxially, perform the first, second, and third advances in sequence;

[0066] If the preset limit condition is met after one push, the system checks whether the qualified vacuum state is met. If the qualified vacuum state is met, a second push is performed. If the qualified vacuum state is not met, the push is repeated until the preset number of pushes is reached, at which point the current injection is terminated.

[0067] If the preset limit condition is not met after one push, the push is repeated until the preset number of pushes is reached, at which point the current sample injection is terminated.

[0068] If the preset second-stage limit condition is met after the second-stage push is performed, it is determined whether the connection is stable. If the connection is stable, the third-stage push is performed. If the connection is unstable, the second-stage push is repeated until the preset number of second-stage pushes is reached, and then the current sample injection is terminated.

[0069] If the preset second-stage limit condition is not met after the second-stage push, the second-stage push will be repeated until the preset number of second-stage pushes is reached, at which point the current sample injection will be terminated.

[0070] If the preset three-stage limit condition is met after three propulsions, the sample injection is complete.

[0071] If the preset three-step limit condition is not met after three pushes, the three pushes will be repeated until the preset number of pushes is reached, at which point the current sample injection will be terminated.

[0072] 1. The sample holder and injection port are coaxially aligned:

[0073] The electron microscope side calibration fixture and the robotic arm side calibration fixture achieve self-centering alignment through coaxial cones set in opposite directions.

[0074] While keeping the tip of the cone aligned, the calibration fixture on the side of the driven robotic arm is rotated around its axis. A laser displacement rangefinder is used to measure the distance to the annular target surface of the electron microscope calibration fixture and collect distance values ​​at different rotation angles.

[0075] The parallelism of the two calibration fixture end faces is calculated based on the distance value, the attitude correction amount is determined, and the position of the robotic arm end is corrected to make the sample rod axis coaxial with the sample inlet channel axis.

[0076] 2. One-time advancement, including:

[0077] The limiting condition for one step is that the sample rod is advanced to the preset target position and the axial contact force between the sample rod and the injection port meets the preset threshold.

[0078] The safe zone is defined as 10-30 mm outside the injection port, and the contact zone is defined as 0-10 mm outside the injection port. The advance speed of the sample rod is determined by admittance control based on the axial contact force between the sample rod and the injection port.

[0079] Within the safe zone, the propulsion speed is constrained to a range of 5–20 mm / s; within the contact zone, the propulsion speed is constrained to a range of 0.5–5 mm / s.

[0080] 3. Vacuum state judgment:

[0081] The system determines whether the air extraction permit status is met within a preset time. If it is, the air extraction operation is performed for the preset time. During the air extraction process, the vacuum indicator signal is read through the vacuum signal acquisition module.

[0082] If the vacuum indicator signal enters the target state and remains stable within a preset time, or if the vacuum pressure drops to the target threshold and the descent rate is within a preset range, then it is determined that a qualified vacuum state has been reached.

[0083] If the vacuum qualification criteria are not met after the preset time, the vacuum is judged to be abnormal.

[0084] For vacuum anomalies, if the qualified vacuum state is still not met after the preset time.

[0085] 4. Secondary advancement, including:

[0086] The angle and direction of the first twist and the angle and direction of the second twist are determined based on the structure of the electron microscope inlet.

[0087] A turnaround:

[0088] The sample rod is twisted around the axis in a preset direction by a preset angle, and the torque is detected in real time; if the torque and angle change curve successively shows the characteristics of rising, falling and plateau, and the torque meets the preset constraint, then one twist is completed;

[0089] If an abnormal torsion occurs, the position will be retracted to the target position if the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required.

[0090] After the first twist is completed, a second twist is performed:

[0091] The sample rod is twisted around the axis in a predetermined torsional direction by a predetermined angle, and the torque is detected in real time;

[0092] If the torque between the sample rod and the injection port after twisting meets the preset secondary threshold, then the secondary propulsion is completed;

[0093] If an abnormal torsion occurs, the system will retract to the target position once, provided that the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required.

[0094] Torsion anomalies include:

[0095] If the torque continues to rise and exceeds the normal threshold, it indicates an abnormal interference.

[0096] If the torque is consistently below the preset threshold, it indicates an idling abnormality.

[0097] Each existing electron microscope brand has a predetermined sample inlet structure:

[0098] For Thermo Fisher Scientific, no secondary torsion is performed;

[0099] For Nippon Electronics, the first and second twists are in the same direction;

[0100] For Hitachi, the first and second torsions are in opposite directions.

[0101] 5. Stable connectivity determination:

[0102] Stable connection is achieved when the vacuum signal and torque are within the target range, and the position of the sample rod reaches the target tolerance with respect to the preset secondary target position.

[0103] 6. Three phases of advancement, including:

[0104] The three-stage limiting condition is that the sample rod is advanced to the preset target position three times and the axial contact force between the sample rod and the injection port meets the preset three-stage threshold.

[0105] The axial contact force between the sample rod and the injection port is collected in real time, and the advance speed of the sample rod is determined by admittance control; the constraint range of the advance speed is 0.2 to 2 mm / s.

[0106] Example 1

[0107] The automatic sample introduction method based on the side-insertion sample stage for electron microscopy also includes:

[0108] The clamp holds the target sample rod with a preset clamping force;

[0109] The self-check process of clamping-releasing-re-clamping is completed by the built-in mechanical sensing unit or clamping force estimation module to determine whether the opening and closing of the gripper is normal and whether the clamping force is within the preset range. If insufficient clamping force or gripper jamming is detected, the subsequent automatic sample injection process is prohibited and manual inspection is prompted.

[0110] Record the fixture number, sample rod number, and batch information for this operation in the host computer.

[0111] Record the types and frequency of anomalies that occur during the sample injection process.

[0112] Data recording, scheme management, and safety interlocking;

[0113] The host computer synchronously records the end-effector mechanical force, sample rod rotation angle, displacement, vacuum indication status, and event timestamps using a unified time reference. It also generates operation records associated with the fixture number, sample rod number, and batch number for quality traceability and lifespan assessment. Parameters used at each stage, such as torsion angle, propulsion stroke, speed and acceleration limits, mechanical force limits, vacuum criteria, and the number of abnormal retry attempts, are stored and retrieved in a scheme format to adapt to different electron microscope models and operating conditions. If critical quantities exceed limits consecutively or the number of abnormal handling attempts reaches the limit in any step, the system uses both software and hardware interlocks to put the electromechanical device into a safe state, requiring manual confirmation before operation can resume or terminate.

[0114] Example 2

[0115] The automatic sample feeding method of the side-insertion sample rod stage for electron microscopes is applied to Thermo Fisher brand electron microscopes. It is necessary to pre-tighten the sample rod axially after one advance and before evacuation to compress the O-ring or equivalent seal.

[0116] Add a sealing pre-tightening sub-step before the evacuation step after one propulsion operation:

[0117] After one push-through and before the axial contact force safety limit is reached, the sample rod gradually increases the axial contact force until the preset axial contact force threshold is met, indicating that the injection port seal has been established, and subsequent gas extraction permission is determined.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An automated sample loading method for a side-insertion sample stage in an electron microscope, characterized in that, This is achieved through an automated sample loading system using a side-mounted sample stage for electron microscopy; the automated sample loading system includes: The system includes a robotic arm controlled by a host computer, a clamp at the end of the robotic arm for holding the sample rod, a mechanical sensing unit for collecting mechanical data from the clamp, a vacuum signal acquisition module for collecting the vacuum state of the electron microscope, and a center positioning device for aligning the sample rod. The automatic sample loading method for the side-insertion sample stage of the electron microscope includes: After aligning the sample rod and the injection port coaxially, perform the first, second, and third advances in sequence; If the preset limit condition is met after one push, it is determined whether the qualified vacuum state is met. If the qualified vacuum state is met, a second push is performed; if the qualified vacuum state is not met, the push is repeated until the preset number of pushes is reached, and then the current sample injection is terminated. If the preset limit condition is not met after one push, the push is repeated until the preset number of pushes is reached, at which point the current sample injection is terminated. If the preset second-stage limit condition is met after the second-stage push is performed, it is determined whether the connection is stable. If the connection is stable, the third-stage push is performed. If the connection is unstable, the second-stage push is repeated until the preset number of second-stage pushes is reached, and then the current sample injection is terminated. If the preset second-stage limit condition is not met after the second-stage push, the second-stage push will be repeated until the preset number of second-stage pushes is reached, at which point the current sample injection will be terminated. If the preset three-stage limit condition is met after three propulsions, the sample injection is complete. If the preset three-step limit condition is not met after three pushes, the three pushes will be repeated until the preset number of pushes is reached, at which point the current sample injection will be terminated.

2. The method according to claim 1, characterized in that: The one-time limiting condition is that the sample rod is pushed to a preset target position and the axial contact force between the sample rod and the injection port meets a preset threshold. The secondary limiting condition is that the torque between the sample rod and the injection port meets a preset secondary threshold. The three limiting conditions are that the sample rod is advanced to the preset three target positions and the axial contact force between the sample rod and the injection port meets the preset three thresholds.

3. The method according to claim 1, characterized in that, The central positioning device includes: Electron microscope side calibration fixture, robotic arm side calibration fixture, and laser displacement ranging sensor; The electron microscope side calibration fixture is mounted on the electron microscope goniometer stage, the robotic arm side calibration fixture is mounted on the end of the robotic arm, and the laser displacement distance sensor is mounted on the robotic arm side calibration fixture.

4. The method according to claim 3, characterized in that, The sample rod and the injection port are coaxially aligned, including: The electron microscope side calibration fixture and the robotic arm side calibration fixture achieve self-centering alignment through coaxial cones arranged in opposite directions. While keeping the tip of the cone aligned, the robotic arm side calibration fixture is driven to rotate around its axis, and the laser displacement ranging sensor is used to measure the distance to the annular target surface of the electron microscope side calibration fixture and collect distance values ​​at different rotation angles. Based on the distance value, the parallelism of the two calibration fixture end faces is calculated, the attitude correction amount is determined, and the position of the robotic arm end is corrected so that the sample rod axis is coaxial with the sample inlet channel axis.

5. The method according to claim 1, characterized in that, The aforementioned advancement includes: The safe zone is defined as 10-30 mm outside the injection port, and the contact zone is defined as 0-10 mm outside the injection port. The advance speed of the sample rod is determined by admittance control based on the axial contact force between the sample rod and the injection port. Within the safe zone, the propulsion speed is constrained to a range of 5–20 mm / s; within the contact zone, the propulsion speed is constrained to a range of 0.5–5 mm / s.

6. The method according to claim 1, characterized in that, The secondary propulsion includes: The angle and direction of the first twist and the angle and direction of the second twist are determined based on the structure of the electron microscope inlet. The first twist: The sample rod is twisted around the axis in a preset direction by a preset angle, and the torque is detected in real time; if the torque and angle change curve successively shows the characteristics of rising, falling and plateau, and the torque meets the preset constraint, then one twist is completed; If an abnormal torsion occurs, the position will be retracted to the target position if the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required. After the first twist is completed, a second twist is performed: The sample rod is twisted around the axis in a predetermined torsional direction by a predetermined angle, and the torque is detected in real time; If the torque between the sample rod and the injection port after twisting meets the preset secondary threshold, then the secondary twisting is complete. If an abnormal torsion occurs, the system will retract to the target position once, provided that the torsion does not exceed the safety threshold; if the torque exceeds the safety threshold, manual intervention will be required.

7. The method according to claim 6, characterized in that, The torsional anomaly includes: If the torque continues to rise and exceeds the normal threshold, it indicates an abnormal interference. If the torque is consistently below the preset threshold, it indicates an idling abnormality.

8. The method according to claim 1, characterized in that, The three advancements include: The axial contact force between the sample rod and the injection port is collected in real time, and the advance speed of the sample rod is determined by admittance control; the constraint range of the advance speed is 0.2 to 2 mm / s.

9. The method according to claim 1, characterized in that, The determination of whether a qualified vacuum state is met includes: The system determines whether the air extraction permit status is met within a preset time. If it is, the air extraction operation is performed for the preset time. During the air extraction process, the vacuum indicator signal is read through the vacuum signal acquisition module. If the vacuum indication signal enters the target state and remains stable within a preset time, or if the vacuum pressure drops to the target threshold and the rate of decrease is within a preset range, then it is determined that a qualified vacuum state has been reached.

10. The method according to claim 1, characterized in that, The criteria for determining stable connectivity include: The vacuum signal is within the target range, the torque is within the target range, and the position of the sample rod reaches the target tolerance with respect to the preset secondary target position.

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