Groove type process system, scheduling method and device thereof and medium

Abstract

The invention discloses a slot type process system, a scheduling method and device thereof and a medium, and relates to the technical field of semiconductor processes. The groove type process system comprises a mechanical arm, a feeding and discharging port and a plurality of groove bodies, each groove body has a corresponding technological process, and the scheduling method of the groove type process system comprises the steps that when a to-be-machined part entering from the feeding and discharging port exists, the target technological process of the to-be-machined part and the operation working condition of each groove body are obtained in real time; according to the current target technological process of the to-be-machined part and the current operation working condition of each groove body, the current target groove body of the to-be-machined part is determined; and the mechanical arm is controlled to move the to-be-machined part into the current target groove body. According to the technical scheme, the machining path of the to-be-machined part is dynamically adjusted according to the target technological process of the to-be-machined part and the operation working condition of each groove body, and the scheduling flexibility and the machining efficiency of the groove type technology system are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor process technology, and in particular to a tank process system and its scheduling method, apparatus and medium. Background Technology

[0002] In the semiconductor and precision manufacturing industries, tank-type process systems are widely used for multi-stage processing of components. A tank-type process system typically consists of multiple independent tanks, each dedicated to a specific processing step. Robotic arms move components between the tanks to form a complete automated production line.

[0003] Currently, mainstream trough-type process systems typically employ a fixed-sequence robotic arm scheduling method. For example, the robotic arm sequentially transfers parts to pre-wetting tanks, process tanks, cleaning tanks, and drying tanks for processing. This scheduling method is suitable for applications with constant process flows and large production batches. However, existing scheduling methods cannot flexibly adjust the processing paths of parts according to different process requirements, resulting in poor flexibility of trough-type process systems in responding to process changes, thus limiting further improvements in their production efficiency. Summary of the Invention

[0004] This invention provides a trough-type process system and its scheduling method, device and medium. By dynamically adjusting the processing path of the parts to be processed according to the target process flow of the parts to be processed and the operating conditions of each trough, the scheduling flexibility and processing efficiency of the trough-type process system are improved.

[0005] The first aspect of this invention provides a scheduling method for a trough-type process system. The trough-type process system includes a robotic arm, inlet and outlet ports, and multiple troughs, each of which has a corresponding process flow. The scheduling method for the trough-type process system includes:

[0006] When there are parts to be processed entering through the inlet and outlet, the target process flow of the parts to be processed and the operating conditions of each tank are obtained in real time.

[0007] Based on the current target process flow of the part to be processed and the current operating conditions of each tank, determine the current target tank of the part to be processed;

[0008] The robotic arm is controlled to move the part to be processed into the current target tank.

[0009] Optionally, the trough-type process system further includes multiple feed buffer zones, and before acquiring the target process flow of the part to be processed and the operating conditions of each trough in real time, it further includes:

[0010] The robotic arm is controlled to move the workpiece to be processed, which enters through the inlet / outlet, to the feed buffer.

[0011] Optionally, when the inlet and outlet include multiple parts to be processed, before acquiring the target process flow of the parts to be processed and the operating conditions of each tank in real time, the method further includes:

[0012] The robotic arm is controlled to move the parts to be processed that enter through the inlet and outlet to the feed buffer in a first preset order;

[0013] Controlling the robotic arm to move the workpiece to be processed into the current target slot includes:

[0014] The robotic arm is controlled to move the parts to be processed from the feed buffer to the current target slot in a second preset order;

[0015] The first preset order is the opposite of the second preset order.

[0016] Optionally, in the trough process system, the same process flow corresponds to multiple troughs;

[0017] Based on the current target process flow of the part to be processed and the current operating conditions of each of the tanks, the current target tank for the part to be processed is determined, which further includes:

[0018] Based on the current target process flow of the part to be processed, determine a plurality of tanks corresponding to the current target process flow;

[0019] Based on the current operating conditions of each of the tanks, the duration of the idle state of each of the multiple tanks corresponding to the current target process flow is obtained, and the tank with the longest idle state duration is determined as the current target tank of the part to be processed.

[0020] Optionally, after controlling the robotic arm to move the workpiece to be processed into the current target slot, the method further includes:

[0021] The current target groove is controlled to process the part to be processed, and the duration of the current target groove processing the part to be processed is obtained in real time;

[0022] When the duration reaches a preset time threshold, it is determined that the part to be processed has been processed in the current target tank.

[0023] Optionally, the multiple tanks include at least one pre-wetting tank, at least one process tank, at least one cleaning tank, and at least one drying tank;

[0024] The scheduling method for the robotic arm also includes:

[0025] If the current target tank is the drying tank, and the part to be processed is processed in the drying tank, then it is determined that the entire process flow of the part to be processed has been completed.

[0026] Optionally, the trough-type process system further includes multiple discharge buffer zones, and after determining that the entire process flow of the part to be processed has been completed, it further includes:

[0027] The robotic arm is controlled to move the part to be processed from the drying tank to the discharge buffer zone, and the feeding information of the inlet and outlet is acquired in real time.

[0028] When the feed information of the feed inlet and outlet is used to determine that the feed inlet and outlet are in an idle state, the robotic arm is controlled to move the part to be processed from the discharge buffer to the feed inlet and outlet.

[0029] A second aspect of the present invention provides a scheduling device for a trough-type process system, the trough-type process system including a robotic arm, inlet and outlet ports, and multiple troughs, each trough having a corresponding process flow, the scheduling device for the trough-type process system comprising:

[0030] The parameter acquisition module is used to acquire the target process flow of the work-to-be-processed work-to-be and the operating conditions of each tank in real time when there is a work-to-be-processed work-to-be entering through the inlet and outlet.

[0031] The target tank determination module is used to determine the current target tank of the part to be processed based on the current target process flow of the part to be processed and the current operating conditions of each tank.

[0032] The process execution module is used to control the robotic arm to move the part to be processed into the current target tank.

[0033] A third aspect of the present invention provides a computer-readable storage medium, characterized in that the computer-readable storage medium stores computer-executable instructions, which, when executed by a processor, are used to implement the scheduling method of the slotted process system as described above.

[0034] A fourth aspect of the present invention provides a trough-type process system, characterized in that it includes: a robotic arm, an inlet and outlet, multiple troughs, and a controller;

[0035] Each of the aforementioned tanks has a corresponding process flow;

[0036] The controller is connected to the robotic arm, the inlet / outlet, and the multiple tanks, respectively, and is used to execute the scheduling method of the tank-type process system as described above.

[0037] The technical solution of this invention, when a part to be processed enters through the inlet / outlet, acquires in real time the target process flow of the part to be processed and the operating status of each tank. This allows the system to determine the tank corresponding to the current target process flow of the part, and, if the tank corresponding to the current target process flow is found to be idle, to designate that tank as the current target tank for the part to be processed. By controlling a robotic arm to move the part to be processed into the current target tank, the system ensures that the tank-type process system can complete the preset processing path of the part to be processed as needed. Compared to scheduling methods that rely on a fixed processing sequence, this method, by comprehensively determining the current target tank for the part to be processed based on the current target process flow of the part to be processed and the current operating status of each tank, achieves dynamic adjustment of the processing path of the part to be processed in the tank-type process system based on different process requirements. This allows the tank-type process system to flexibly adapt to different process requirements of the part to be processed, improving the scheduling flexibility and processing efficiency of the tank-type process system.

[0038] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of a trough-type process system provided in Embodiment 1 of the present invention;

[0041] Figure 2 This is a flowchart illustrating a scheduling method for a trough-type process system provided in Embodiment 2 of the present invention;

[0042] Figure 3 This is a flowchart illustrating a scheduling method for a trough-type process system provided in Embodiment 3 of the present invention;

[0043] Figure 4 This is a flowchart illustrating a scheduling method for a trough-type process system provided in Embodiment 4 of the present invention;

[0044] Figure 5 This is a flowchart illustrating a scheduling method for a trough-type process system provided in Embodiment 5 of the present invention;

[0045] Figure 6 This is a schematic diagram of the structure of a scheduling device for a trough-type process system provided in Embodiment Six of the present invention;

[0046] Figure 7 This is a schematic diagram of the structure of a controller for a trough-type process system provided in Embodiment 7 of the present invention. Detailed Implementation

[0047] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0048] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0049] Example 1

[0050] Figure 1 This is a schematic diagram of a trough-type process system provided in Embodiment 1 of the present invention. Figure 1 As shown, the trough process system includes: a robotic arm 1, an inlet / outlet 2, multiple troughs 3, and a controller 4; each trough 3 has a corresponding process flow; the controller 4 is connected to the robotic arm 1, the inlet / outlet 2, and the multiple troughs 3 respectively.

[0051] The inlet / outlet 2 is specifically used for material interaction between the operator and the trough-type process system, allowing the operator to load and unload materials into the system. The robotic arm 1 is specifically used to transport parts to be processed between the inlet / outlet 2 and multiple troughs 3. Each trough 3 has a corresponding process flow, enabling the robotic arm 1 to pick up parts from the inlet / outlet 2 and place them sequentially into the corresponding trough 3 for processing according to the target process flow. After all the process flows of the parts to be processed are completed, the robotic arm 1 can also return them to the inlet / outlet 2.

[0052] Optionally, the multiple tanks 3 include at least one pre-wetting tank 31, at least one process tank 32, at least one cleaning tank 33, and at least one drying tank 34 to enable different processing steps. Specifically, the pre-wetting tank 31 is used to close the tank cover and perform vacuum treatment after the robotic arm 1 places the part to be processed into the tank. Then, deionized water is sprayed and the part to be processed is cleaned by a vibration or shaking device to wet the surface of the part, preparing it for subsequent processes. The process tank 32 is used to perform the main process operations, such as electroplating. The chemical liquid in the process tank 32 is kept flowing by a circulating pump. After the robotic arm 1 places the part to be processed into the tank, electrodes are inserted to electroplat the part. A vibration mechanism is used to excite the part to be processed at a set frequency during electroplating to improve the uniformity and quality of the electroplating. The process flow of the cleaning tank 33 is similar to that of the pre-wetting tank 31. The cleaning tank 33 is used to clean the residual liquid and impurities on the surface of the part to be processed after electroplating to avoid cross-contamination. The drying tank 34 is used to dry the residual moisture on the surface of the parts after the robotic arm 1 places them in, thereby improving the cleanliness of the parts and their suitability for subsequent assembly. Optionally, multiple tanks 3 can be used for the same process flow in the tank-type process system, which helps the tank-type process system to work in parallel when processing multiple parts.

[0053] Optionally, the trough-type process system also includes multiple feed buffers 5 and multiple discharge buffers 6. The feed buffers 5 are used to temporarily store the parts to be processed after they have been loaded, allowing the robotic arm 1 to selectively transport the parts based on the availability of each trough 3, thus avoiding interruptions in the loading rhythm caused by trough 3 occupancy. The discharge buffers 6 are used to temporarily store the parts to be processed after processing, allowing the robotic arm 1 to send the parts to be processed to the discharge buffer 6 when the inlet / outlet 2 is idle, thereby reducing the probability of the robotic arm 1 being idle.

[0054] Understandably, in order to enable the trough process system to flexibly adapt to the different process requirements of the parts to be processed, the controller 4 is connected to the robotic arm 1, the inlet and outlet 2, and multiple troughs 3 respectively. This allows the controller 4 to determine the target trough for the parts to be processed based on the target process flow of the parts to be processed and the operating conditions of each trough 3. This enables the controller 4 to dynamically adjust the processing path of the parts to be processed, thereby helping to improve the scheduling flexibility and processing efficiency of the trough process system.

[0055] Controller 4 may include a microprocessor, such as a Central Processing Unit (CPU), and may also include other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It is also understood that controller 4 in the slot process system can execute the slot process system scheduling method provided in this embodiment of the invention, possessing the corresponding functional modules and beneficial effects of the execution method. Technical details not described in detail in this embodiment can be found in the slot process system scheduling method described in the following embodiments.

[0056] Example 2

[0057] Figure 2 This is a flowchart illustrating a scheduling method for a trough-type process system according to Embodiment 2 of the present invention. This embodiment can be used to schedule the trough-type process system described in the above embodiments. The method can be executed by a scheduling device for the trough-type process system. This device can be implemented in software and / or hardware, and is generally integrated into the controller of the trough-type process system. Correspondingly, as... Figure 2 As shown, the scheduling method for this trough-type process system may include:

[0058] S101. When there are parts to be processed entering through the inlet and outlet, the target process flow of the parts to be processed and the operating conditions of each tank are obtained in real time.

[0059] Specifically, during the scheduling of the trough process system, the controller can first obtain the feeding information of the inlet and outlet in real time. For example, the controller can determine whether there is feeding at the inlet and outlet based on the limit switches or photoelectric sensors set at the inlet and outlet.

[0060] When the controller detects the presence of a part to be processed entering through the inlet or outlet, it will further acquire the target process flow of the part and the operating status of each tank in real time. Understandably, operators can set the target process flow for the part through the touchscreen configured in the tank-type process system, allowing the controller to acquire the target process flow in real time based on the operator's settings. For example, the touchscreen of the tank-type process system may include a scheduling recipe page, which can preset ten process sequences. Operators can freely select the tank type corresponding to each process sequence via a drop-down menu, such as a pre-wetting tank, process tank, cleaning tank, or drying tank. Each process sequence represents a processing stage of the part to be processed; that is, each sequence corresponds to a target process flow for a part. If a process sequence is not selected, the controller will automatically skip that sequence. The tank-type process system allows operators to customize the target process flow for the part to be processed, enabling the system to flexibly adapt to different process requirements. Furthermore, since the scheduling formula is presented in a visual interface, operators can modify the process sequence of the parts to be processed through a touch screen, which improves the ease of operation of the trough process system.

[0061] Simultaneously, the controller can acquire the real-time operating status of each tank using photoelectric sensors and timers inside each tank, such as whether each tank is idle and the duration of its idle state. For example, the controller can use photoelectric sensors to detect whether a part to be processed is placed in the tank. If no part is detected, the tank is considered idle. When the controller determines that a tank is idle, it will start a timer configured within that tank to record the duration of the idle state until a part to be processed is placed in the tank again. By acquiring the target process flow of the part to be processed and the operating status of each tank in real time, a foundation is laid for subsequently determining the current target tank for the part to be processed.

[0062] S102. Based on the current target process flow of the part to be processed and the current operating conditions of each tank, determine the current target tank of the part to be processed.

[0063] Specifically, after the controller determines the current target process flow of the part to be processed and the current operating conditions of each tank, it will further determine the current target tank for the part to be processed based on the current target process flow of the part to be processed and the current operating conditions of each tank. For example, the controller can first determine the tank corresponding to the current target process flow set by the operator. After determining the tank corresponding to the current target process flow, the controller can also obtain the operating conditions of the tank corresponding to the current target process flow to determine whether the tank corresponding to the current target process flow is in an idle state. If the controller determines that the tank corresponding to the current target process flow is in an idle state, the controller can designate that tank as the current target tank for the part to be processed. Furthermore, if multiple tanks correspond to the current target process flow of the part to be processed, the controller can also determine the duration of the idle state of each tank corresponding to the current target process flow of the part to be processed, so that the controller can determine the tank with the longest idle time as the current target tank of the part to be processed, thereby avoiding the waste of resources caused by the tank running idle for a long time and making the scheduling of the tank process system more balanced.

[0064] Compared to scheduling methods that rely on a fixed processing sequence, the controller combines the current target process flow of the part to be processed with the current operating conditions of each tank to comprehensively determine the current target tank of the part to be processed. This enables dynamic adjustment of the processing path of the part to be processed based on different process requirements, thereby allowing the tank-type process system to flexibly adapt to different process requirements of the part to be processed, improving the scheduling flexibility and processing efficiency of the tank-type process system.

[0065] S103. Control the robotic arm to move the part to be processed into the current target tank.

[0066] Specifically, after the controller determines the current target tank for the part to be processed, it controls the robotic arm to grasp the part and move it into the target tank, allowing the corresponding current target process flow to be executed within the target tank. Alternatively, after the controller determines that the part has been processed in the current target tank, it will continue to acquire the target process flow corresponding to the next process sequence set by the operator. Based on the next target process flow and the current operating status of each tank, the controller can determine the next target tank for the part, enabling it to control the robotic arm to move the part to the next target tank for processing according to the next process sequence. This cycle continues until all processes for the part are completed. Afterward, the controller can control the robotic arm to move the part to the inlet / outlet. By controlling the robotic arm to flexibly schedule the movement of the part between tanks according to the user-preset process sequence, the trough-type process system can complete the preset processing path of the part as needed, thereby improving the scheduling flexibility and processing efficiency of the trough-type process system.

[0067] In this embodiment, by acquiring the target process flow of the workpiece and the operating status of each tank in real time when a workpiece enters through the inlet or outlet, the system can determine the tank corresponding to the current target process flow of the workpiece. Furthermore, if a tank corresponding to the current target process flow is found to be idle, it is designated as the current target tank for the workpiece. By controlling a robotic arm to move the workpiece into the current target tank, the system ensures that the trough-type process system can complete the preset processing path of the workpiece as needed. Compared to scheduling methods that rely on a fixed processing sequence, this method, by comprehensively determining the current target tank based on the current target process flow of the workpiece and the current operating status of each tank, enables dynamic adjustment of the processing path of the workpiece in the trough-type process system based on different process requirements. This allows the trough-type process system to flexibly adapt to different process requirements of the workpiece, improving the scheduling flexibility and processing efficiency of the trough-type process system.

[0068] Example 3

[0069] Figure 3 This is a flowchart illustrating a scheduling method for a trough-type process system according to Embodiment 3 of the present invention. This embodiment supplements the scheduling method for the trough-type process system based on the above embodiments. Correspondingly, as shown... Figure 3 As shown, the scheduling method for the tank-type process system in this embodiment may include:

[0070] S201. When there are parts to be processed entering through the inlet / outlet, control the robotic arm to move the parts to be processed from the inlet / outlet to the feed buffer zone.

[0071] Specifically, when the controller detects that there is material feeding at the inlet / outlet based on the limit switches or photoelectric sensors set at the inlet / outlet, it can first control the robotic arm to grab the part to be processed and move it to the feeding buffer for temporary storage. This feeding buffer serves as a transition area between the inlet / outlet and each tank, allowing the controller to control the robotic arm to move the part to be processed according to the availability of each tank. This avoids interruptions in the feeding rhythm caused by tank occupancy and improves the scheduling order and efficiency of the tank process system.

[0072] S202. Real-time acquisition of the target process flow of the parts to be processed and the operating conditions of each tank.

[0073] S203. Based on the current target process flow of the part to be processed and the current operating conditions of each tank, determine the current target tank of the part to be processed.

[0074] S204. Control the robotic arm to move the part to be processed into the current target tank.

[0075] Optionally, when the inlet and outlet include multiple parts to be processed, before acquiring the target process flow of the parts to be processed and the operating conditions of each tank in real time, the method further includes: controlling the robotic arm to move the parts to be processed entering from the inlet and outlet to the feeding buffer in a first preset order; controlling the robotic arm to move the parts to be processed to the current target tank, including: controlling the robotic arm to move the parts to be processed from the feeding buffer to the current target tank in a second preset order; wherein the first preset order and the second preset order are reversed.

[0076] Specifically, when the inlet and outlet contain multiple parts to be processed, the controller controls the robotic arm to grasp these parts and move them sequentially to the feed buffer for temporary storage. The parts entering from the inlet and outlet can be moved to the feed buffer in a first preset order. This first preset order may include an ascending sequence. For example, if the trough-type process system includes four feed buffers: a first feed buffer, a second feed buffer, a third feed buffer, and a fourth feed buffer, the controller can sequentially move the parts entering from the inlet and outlet to the first, second, third, and fourth feed buffers.

[0077] After determining the current target tank for each part to be processed, the controller can move the parts from the feed buffer to the current target tank in a second preset order, which is the reverse of the first preset order. The second preset order can include a reverse order; for example, the controller can sequentially move the parts temporarily stored in the fourth feed buffer, third feed buffer, second feed buffer, and first feed buffer to their corresponding current target tanks. By setting the insertion and removal order of the feed buffers to the reverse order, the standardization and orderliness of the feed scheduling in the tank-type process system are improved, avoiding process conflicts or incorrect identification of parts due to scheduling chaos, and enhancing the stability of the tank-type process system.

[0078] In this embodiment, when a part to be processed enters through the inlet / outlet, the robotic arm is controlled to move the part to the feed buffer. This feed buffer serves as a transition area between the inlet / outlet and each tank, improving the scheduling order and efficiency of the tank-type process system. Furthermore, by reversing the order in which parts are placed and removed from the feed buffer, the standardization and orderliness of the feed scheduling in the tank-type process system are enhanced, avoiding process conflicts or incorrect identification of parts due to scheduling chaos, thus improving the stability of the tank-type process system.

[0079] Example 4

[0080] Figure 4 This is a flowchart illustrating a scheduling method for a trough-type process system provided in Embodiment 4 of the present invention. Based on the above embodiments, this embodiment provides a detailed description of the method for determining the current target trough for the part to be processed based on the current target process flow of the part and the current operating conditions of each trough. Accordingly, as shown... Figure 4 As shown, the scheduling method for the tank-type process system in this embodiment may include:

[0081] S301. When there are parts to be processed entering through the inlet and outlet, the target process flow of the parts to be processed and the operating conditions of each tank are obtained in real time.

[0082] S302. Based on the current target process flow of the part to be processed, determine multiple tanks corresponding to the current target process flow.

[0083] Specifically, in a trough-type process system, the same process flow can correspond to multiple troughs, which facilitates parallel operation when processing multiple parts. Therefore, after the controller obtains the current target process flow of the parts to be processed, it can first determine the multiple troughs corresponding to the current target process flow, laying the foundation for subsequently determining the specific current target trough for the parts to be processed among the multiple troughs corresponding to the current target process flow.

[0084] S303. Based on the current operating conditions of each tank, obtain the duration of the idle state of each tank in the multiple tanks corresponding to the current target process flow, and determine the tank with the longest idle state duration as the current target tank for the part to be processed.

[0085] Specifically, after the controller acquires multiple tanks corresponding to the current target process flow, it further determines which tanks are currently idle based on their current operating conditions. Furthermore, the controller uses photoelectric sensors and timers installed in each idle tank to determine the duration of their idle state—that is, the cumulative idle time since the last processing cycle. For example, when the controller detects no part to be processed in a tank via a photoelectric sensor, it starts the timer configured in that tank to record the duration of its idle state until a part to be processed is placed in the tank again. After determining the duration of each idle tank, the controller compares these durations to identify the tank with the longest idle time as the current target tank for the part to be processed.

[0086] By prioritizing the tank with the longest idle time as the current target tank, the system avoids situations where some tanks remain idle for extended periods without being utilized. This enables the rotation of tank resources within the tank-type process system, helping to even out the operating load of each tank. Simultaneously, it prevents premature aging of some tanks due to frequent use and avoids resource waste caused by the aging and failure of chemical solutions in some tanks due to prolonged inactivity. This further enhances the scheduling flexibility and processing efficiency of the tank-type process system.

[0087] S304. Control the robotic arm to move the part to be processed into the current target tank.

[0088] In this embodiment, multiple tanks corresponding to the current target process flow of the part to be processed are determined. Based on the current operating conditions of each tank, the idle time of each tank corresponding to the current target process flow can be obtained. Therefore, the tank with the longest idle time can be selected as the current target tank for the part to be processed. By prioritizing the tank with the longest idle time as the current target tank, the tank resources in the tank-type process system are rotated, which helps to average the operating load of each tank. Simultaneously, it prevents premature aging of some tanks due to frequent use and avoids resource waste caused by the aging and failure of chemical solutions in some tanks due to prolonged inactivity, further improving the scheduling flexibility and processing efficiency of the tank-type process system.

[0089] Example 5

[0090] Figure 5 This is a flowchart illustrating a scheduling method for a trough-type process system according to Embodiment 5 of the present invention. This embodiment supplements the scheduling method for the trough-type process system based on the above embodiments. Correspondingly, as shown... Figure 5 As shown, the scheduling method for the tank-type process system in this embodiment may include:

[0091] S401. When there are parts to be processed entering through the inlet and outlet, the target process flow of the parts to be processed and the operating conditions of each tank are obtained in real time.

[0092] S402. Based on the current target process flow of the part to be processed and the current operating conditions of each tank, determine the current target tank of the part to be processed.

[0093] S403, Control the robotic arm to move the part to be processed into the current target tank.

[0094] S404. Control the current target tank to process the workpiece, and obtain the duration of the current target tank processing the workpiece in real time.

[0095] Specifically, after the controller moves the robotic arm to the target tank, it can further control the target tank to perform corresponding processing techniques, such as pre-wetting, electroplating, cleaning, and drying. Simultaneously, when the controller detects a part to be processed in the target tank via a photoelectric sensor, it starts a timer configured within the target tank. This allows for real-time acquisition of the processing duration of the part in the target tank, providing a data basis for determining when the processing of the part is complete.

[0096] S405. When the duration reaches the preset time threshold, it is determined that the part to be processed has been processed in the current target tank.

[0097] Specifically, when the controller determines that the processing time of the part to be processed in the current target tank has reached a preset time threshold, it will determine that the part to be processed has been completed in the current target tank. The preset time threshold can be set according to the specific process flow corresponding to the current target tank; different preset time thresholds may correspond to different process flows for the current target tank. Once the controller determines that the part to be processed has been completed in the current target tank, it can control the robotic arm to remove the part from the current target tank and continue executing the process flow corresponding to the next process sequence set by the operator. This avoids insufficient or excessive processing time for the part to be processed in the current target tank, improving the consistency and stability of the tank-type process system.

[0098] Optionally, the scheduling method for the robotic arm also includes: when the current target tank is a drying tank and the workpiece to be processed has been processed in the drying tank, determining to execute all the process flows to complete the workpiece to be processed.

[0099] It is understood that the multiple tanks in a tank-type process system may include at least one pre-wetting tank, at least one process tank, at least one cleaning tank, and at least one drying tank. Specifically, the pre-wetting tank is used after the robotic arm places the parts to be processed into the tank, the tank cover is closed, and a vacuum process is performed. Then, deionized water is sprayed, and the parts to be processed are cleaned using a vibration or shaking device to wet the surface of the parts, preparing them for subsequent processes. The process tank is used to perform the main process operations, such as electroplating. The chemical liquid in the process tank is kept flowing by a circulating pump. After the robotic arm places the parts to be processed into the tank, electrodes are inserted to electroplat the parts, and a vibration mechanism is used to excite the parts to be processed at a set frequency during electroplating to improve the uniformity and quality of the electroplating. The process flow of the cleaning tank is similar to that of the pre-wetting tank. The cleaning tank is specifically used to clean the residual liquid and impurities on the surface of the parts to be processed after electroplating to avoid cross-contamination. The drying tank is specifically used after the robotic arm places the parts to be processed into the tank to perform high-temperature air drying of the residual moisture on the surface of the parts to improve the cleanliness of the parts and their suitability for subsequent assembly.

[0100] It's also understandable that the drying tank is typically set as the final processing stage in the entire process flow of the part to be processed. Therefore, when the current target tank is the drying tank, and the part to be processed has been processed within the drying tank, the controller will determine that the entire process flow of the part to be processed has been completed. At this point, the controller can control the robotic arm to remove the part to be processed from the drying tank and return it to the inlet / outlet, completing the current processing schedule for the part to be processed. Using the drying tank as the endpoint identification marker of the process flow simplifies the control logic and improves the scheduling response speed of the tank-type process system.

[0101] Optionally, after determining that all the process flow of the parts to be processed has been completed, the method further includes: controlling the robotic arm to move the parts to be processed from the drying tank to the discharge buffer zone, and acquiring the feeding information of the inlet and outlet in real time; when determining that the inlet and outlet are in an idle state based on the feeding information of the inlet and outlet, controlling the robotic arm to move the parts to be processed from the discharge buffer zone to the inlet and outlet.

[0102] Specifically, after the controller determines that the trough-type process system has completed all the process flows for the part to be processed, it first controls the robotic arm to move the part from the drying tank to the discharge buffer zone, and acquires the feeding information of the inlet and outlet in real time. When the controller determines that the inlet and outlet are idle, for example, when the controller determines that there is no feeding at the inlet and outlet based on the limit switches or photoelectric sensors set at the inlet and outlet, it controls the robotic arm to move the part to be processed from the discharge buffer zone to the inlet and outlet, thereby completing the discharge process of the part to be processed.

[0103] Understandably, in the actual operation of a trough-type process system, multiple feeding and discharging requests may occur simultaneously at the inlet and outlet. If the discharging action of the parts to be processed is executed before the feeding process at the inlet and outlet is completed, it may cause path congestion or robotic arm scheduling conflicts, thereby affecting the stability of the trough-type process system. Therefore, to avoid scheduling conflicts, a discharge buffer is set up as an intermediate buffer between the drying tank and the inlet and outlet. The controller can first move the processed parts to be processed to the discharge buffer for temporary storage. After the inlet and outlet are free, the robotic arm will then send them out in an orderly manner, thereby ensuring the stability of the trough-type process system and improving its scheduling efficiency.

[0104] In this embodiment, by controlling the current target tank to process the part to be processed and acquiring the processing time of the part to be processed in the current target tank in real time, it is possible to determine that the part to be processed is completed in the current target tank when the processing time reaches a preset time threshold. This avoids insufficient or excessive processing time for the part to be processed in the current target tank, improving the consistency and stability of the tank-type process system. Furthermore, by determining that the entire process flow for the part to be processed has been completed after the current target tank is a drying tank and the part to be processed is completed in the drying tank, the robotic arm can be controlled to move the processed part from the drying tank to the discharge buffer after determining that the entire process flow for the part to be processed has been completed. Additionally, the robotic arm can be controlled to move the processed part from the discharge buffer to the discharge port when the inlet / outlet is determined to be in an idle state. This avoids scheduling conflicts caused by performing the discharge action of the part to be processed before the feeding process at the inlet / outlet is completed, ensuring the stability of the tank-type process system and improving its scheduling efficiency.

[0105] Example 6

[0106] Figure 6 This is a schematic diagram of the structure of a scheduling device for a trough-type process system provided in Embodiment Six of the present invention. This device can implement the scheduling method for the trough-type process system provided in this embodiment of the invention. The device can be implemented by software and / or hardware, and is generally integrated into the controller of the trough-type process system. Figure 6 As shown, the device includes: a parameter acquisition module 501, a target tank determination module 502, and a process execution module 503. The specific structure of the device is as follows:

[0107] The parameter acquisition module 501 is used to acquire the target process flow of the parts to be processed and the operating conditions of each tank in real time when there are parts to be processed entering through the inlet and outlet.

[0108] The target tank determination module 502 is used to determine the current target tank of the part to be processed based on the current target process flow of the part to be processed and the current operating conditions of each tank.

[0109] The process execution module 503 is used to control the robotic arm to move the part to be processed into the current target tank.

[0110] In an optional embodiment of the present invention, the parameter acquisition module 501 may also be used to: control the robotic arm to move the part to be processed from the inlet / outlet to the feed buffer before acquiring the target process flow of the part to be processed and the operating conditions of each tank in real time.

[0111] In an optional embodiment of the present invention, the parameter acquisition module 501 may further be used to: control the robotic arm to move the parts to be processed entering from the inlet / outlet to the feed buffer in a first preset order before acquiring the target process flow of the parts to be processed and the operating conditions of each tank in real time. The process execution module 503 may further be used to: control the robotic arm to move the parts to be processed from the feed buffer to the current target tank in a second preset order. The first preset order and the second preset order are reversed.

[0112] In an optional embodiment of the present invention, the target tank determination module 502 may also be used to: determine multiple tanks corresponding to the current target process flow according to the current target process flow of the part to be processed; obtain the duration of the idle state of each tank among the multiple tanks corresponding to the current target process flow according to the current operating conditions of each tank, and determine the tank with the longest duration of the idle state as the current target tank of the part to be processed.

[0113] In an optional embodiment of the present invention, the process execution module 503 may also be used to: after controlling the robotic arm to move the part to be processed into the current target tank, control the current target tank to process the part to be processed, and obtain the duration of the current target tank processing the part to be processed in real time; when the duration reaches a preset time threshold, determine that the part to be processed has been processed in the current target tank.

[0114] In an optional embodiment of the present invention, the process execution module 503 may also be used to: determine to execute all process flows of the parts to be processed after the current target tank is a drying tank and the parts to be processed have been processed in the drying tank.

[0115] In an optional embodiment of the present invention, the process execution module 503 may also be used to: after determining that all process flows of the part to be processed have been completed, control the robotic arm to move the processed part from the drying tank to the discharge buffer zone, and obtain the feeding information of the inlet and outlet in real time; when determining that the inlet and outlet are in an idle state based on the feeding information of the inlet and outlet, control the robotic arm to move the processed part from the discharge buffer zone to the inlet and outlet.

[0116] The scheduling device for the aforementioned trough-type process system can execute the scheduling method for the trough-type process system provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method. Technical details not described in detail in this embodiment can be found in the scheduling method for the trough-type process system provided in any embodiment of the present invention.

[0117] Since the scheduling device for the trough process system described above is capable of executing the scheduling method for the trough process system in the embodiments of the present invention, those skilled in the art can understand the specific implementation and various variations of the scheduling device for the trough process system in this embodiment based on the scheduling method for the trough process system described in the embodiments of the present invention. Therefore, how the scheduling device for the trough process system implements the scheduling method for the trough process system in the embodiments of the present invention will not be described in detail here. Any device used by those skilled in the art to implement the scheduling method for the trough process system in the embodiments of the present invention falls within the scope of protection of this application.

[0118] Example 7

[0119] Figure 7 A schematic diagram of a controller for a tank process system, which can be used to implement the scheduling method of the tank process system according to embodiments of the present invention, is shown. The controller can take various forms to suit the environment and requirements within the tank process system, such as microcontroller units, field-programmable gate arrays, application-specific integrated circuits (ASICs), embedded image processing units, and real-time control modules. These devices are specifically designed to determine the current target tank for the part to be processed based on the current target process flow and the current operating conditions of each tank, so as to control the robotic arm to move the part to be processed into the current target tank. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0120] like Figure 7 As shown, the controller 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded from storage unit 18 into the RAM 13. The RAM 13 can also store various programs and data required for the operation of the controller 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0121] Multiple components in the controller 10 are connected to the I / O interface 15, including: an input unit 16, such as control buttons, a touch screen scheduling interface, etc.; an output unit 17, such as a status display screen, a tank operation status indicator, etc.; a storage unit 18, such as embedded flash memory, SD card memory, etc.; and a communication unit 19, such as a medical device communication module, a wireless transmission module, etc. The communication unit 19 allows the controller 10 to exchange information / data with other relevant equipment through a supervisory management system such as a factory LAN and / or the tank process system.

[0122] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, digital signal processors (DSPs), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as scheduling methods for slotted process systems.

[0123] In some embodiments, the scheduling method for the slot process system can be implemented as a computer program tangibly contained in a computer-readable storage medium, such as a storage unit. In some embodiments, part or all of the computer program can be loaded and / or installed onto the slot process system of the above embodiments via ROM and / or a communication unit. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the scheduling method for the slot process system described above can be performed. Alternatively, in other embodiments, processor 11 can be configured to execute the scheduling method for the slot process system by any other suitable means (e.g., by means of firmware).

[0124] Optionally, a scheduling method for a trough-type process system may include: when there are parts to be processed entering through the inlet and outlet, acquiring in real time the target process flow of the parts to be processed and the operating conditions of each trough; determining the current target trough of the parts to be processed based on the current target process flow of the parts to be processed and the current operating conditions of each trough; and controlling a robotic arm to move the parts to be processed into the current target trough.

[0125] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0126] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0127] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0128] To provide interaction with the user, the systems and techniques described herein can be implemented on a controller having: a display device for displaying information to the user (e.g., a status display or user interface); and a keyboard and pointing device (e.g., control buttons or a touchscreen interface) through which the user can provide input to the controller. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or haptic feedback); and input from the user can be received in any form (including sound input, voice input, or haptic input).

[0129] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or middleware components (e.g., application servers), or frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0130] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0131] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this invention can be achieved, and this is not limited herein.

[0132] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A scheduling method for a trough-type process system, characterized in that, The trough-type process system includes a robotic arm, inlet and outlet ports, and multiple troughs, each trough having a corresponding process flow. The scheduling method of the trough-type process system includes: When there are parts to be processed entering through the inlet and outlet, the target process flow of the parts to be processed and the operating conditions of each tank are obtained in real time. Based on the current target process flow of the part to be processed and the current operating conditions of each tank, determine the current target tank of the part to be processed; The robotic arm is controlled to move the part to be processed into the current target tank.

2. The scheduling method for the trough-type process system according to claim 1, characterized in that, The trough-type process system also includes multiple feed buffer zones, and before acquiring the target process flow of the part to be processed and the operating conditions of each trough in real time, it further includes: The robotic arm is controlled to move the workpiece to be processed, which enters through the inlet / outlet, to the feed buffer.

3. The scheduling method for the trough-type process system according to claim 2, characterized in that, When the inlet and outlet include multiple parts to be processed, before acquiring the target process flow of the parts to be processed and the operating conditions of each tank in real time, the method further includes: The robotic arm is controlled to move the parts to be processed that enter through the inlet and outlet to the feed buffer in a first preset order; Controlling the robotic arm to move the workpiece to be processed into the current target slot includes: The robotic arm is controlled to move the parts to be processed from the feed buffer to the current target slot in a second preset order; The first preset order is the opposite of the second preset order.

4. The scheduling method for the trough-type process system according to claim 1, characterized in that, In the trough-type process system, the same process flow corresponds to multiple troughs; Based on the current target process flow of the part to be processed and the current operating conditions of each of the tanks, the current target tank for the part to be processed is determined, which further includes: Based on the current target process flow of the part to be processed, determine a plurality of tanks corresponding to the current target process flow; Based on the current operating conditions of each of the tanks, the duration of the idle state of each of the multiple tanks corresponding to the current target process flow is obtained, and the tank with the longest idle state duration is determined as the current target tank of the part to be processed.

5. The scheduling method for the trough-type process system according to claim 1, characterized in that, After controlling the robotic arm to move the workpiece to be processed into the current target slot, the process further includes: The current target groove is controlled to process the part to be processed, and the duration of the current target groove processing the part to be processed is obtained in real time; When the duration reaches a preset time threshold, it is determined that the part to be processed has been processed in the current target tank.

6. The scheduling method for a trough-type process system according to claim 5, characterized in that, The multiple tanks include at least one pre-wetting tank, at least one process tank, at least one cleaning tank, and at least one drying tank; The scheduling method for the robotic arm also includes: If the current target tank is the drying tank, and the part to be processed is processed in the drying tank, then it is determined that the entire process flow of the part to be processed has been completed.

7. The scheduling method for a trough-type process system according to claim 6, characterized in that, The trough-type process system also includes multiple discharge buffer zones, and after determining that all process flows for the part to be processed have been completed, it further includes: The robotic arm is controlled to move the part to be processed from the drying tank to the discharge buffer zone, and the feeding information of the inlet and outlet is acquired in real time. When the feed information of the feed inlet and outlet is used to determine that the feed inlet and outlet are in an idle state, the robotic arm is controlled to move the part to be processed from the discharge buffer to the feed inlet and outlet.

8. A scheduling device for a trough-type process system, characterized in that, The trough-type process system includes a robotic arm, inlet and outlet ports, and multiple troughs, each trough having a corresponding process flow. The scheduling device of the trough-type process system includes: The parameter acquisition module is used to acquire the target process flow of the part to be processed and the operating conditions of each tank in real time when there is a part to be processed entering through the inlet and outlet. The target tank determination module is used to determine the current target tank of the part to be processed based on the current target process flow of the part to be processed and the current operating conditions of each tank. The process execution module is used to control the robotic arm to move the part to be processed into the current target tank.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer-executable instructions, which, when executed by a processor, are used to implement the scheduling method for the tank process system as described in any one of claims 1-7.

10. A trough-type process system, characterized in that, include: Robotic arm, inlet and outlet, multiple tanks, and controller; Each of the aforementioned tanks has a corresponding process flow; The controller is connected to the robotic arm, the inlet / outlet, and the plurality of tanks respectively, and is used to execute the scheduling method of the tank process system as described in any one of claims 1-7.

Images