Electromagnetic induction ion pump

Abstract

The invention relates to the technical field of electromagnetic induction ion pumps, and discloses an electromagnetic induction ion pump which comprises a shell and a pump body, the pump body is arranged in the shell, a high-voltage feed-through is arranged on the pump body and fixedly connected with the pump body, an electromagnetic device is arranged in the shell and provides magnetic force for the pump body, and a power supply device provides power input for the electromagnetic device. According to the technical scheme, the electromagnetic device converts electric power provided by the power supply device into magnetic force to be provided for the pump body, and the pump body works to extract gas in instrument equipment to complete work. When the electromagnetic induction ion pump is installed, the power switch of the power supply device is switched off, the magnetic force of the electromagnetic device disappears, and no attractive force or repulsive force exists in the ion pump, so that the phenomena of hand clamping and collision are avoided, and the safety of workers is protected; and electromagnetic interference on instruments and equipment is avoided, so that the reliability and stability of the equipment and the equipment are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electromagnetic induction ion pump, and particularly relates to an electromagnetic induction ion pump. BACKGROUND

[0002] The electromagnetic induction ion pump is a vacuum obtaining device commonly used in high vacuum and ultra-high vacuum environment, which is internally provided with a cathode and an anode, and realizes the ultra-high vacuum pumping of gas by the Penning discharge process under the joint action of magnetic field and electric field to ionize the gas. The existing ion pumps at home and abroad all use permanent magnets to generate magnetic field to drive the internal electron movement. Since the magnetic force of the permanent magnet always exists, there are safety hazards such as pinch and bump when the permanent magnet is installed. After the vacuum pumping is completed, the magnetic field generated by the permanent magnet always exists, which causes electromagnetic interference to the equipment or instrument. The permanent magnet will produce demagnetization after high temperature or long-term work, which affects the working efficiency of the electromagnetic induction ion pump. SUMMARY

[0003] The present application provides an electromagnetic induction ion pump to solve the problems of pinch and demagnetization of the permanent magnet after high temperature or long-term work in the prior art.

[0004] In the first aspect, the present application provides an electromagnetic induction ion pump, which comprises a shell and a pump body, the pump body is arranged in the interior of the shell, a high-voltage feedthrough is arranged on the pump body and fixedly connected with the pump body, an electromagnetic device is arranged in the shell to provide magnetic force for the pump body, and a power supply device provides power input for the electromagnetic device.

[0005] Through the above technical scheme, the electromagnetic device converts the power provided by the power supply device into magnetic force and provides the magnetic force to the pump body, and the pump body works to extract the gas in the instrument and equipment to complete the work. When the electromagnetic induction ion pump is installed, the power switch of the power supply device is turned off, the magnetic force of the electromagnetic device disappears, there is no attractive force and repulsive force in the ion pump, and the magnetic field is only related to the size of the power. Therefore, the present application solves the technical problems of pinch and bump of the permanent magnet during installation of the ion pump in the prior art, the magnetic field of the permanent magnet always exists to generate magnetic field to affect the instrument and equipment, and the permanent magnet will produce demagnetization after high temperature or long-term work.

[0006] Optionally, the electromagnetic device comprises a soft magnetic structure arranged in the shell; An electromagnetic coil is arranged in the shell, the electromagnetic coil is sleeved on the soft magnetic structure, and the power supply device is connected with the electromagnetic coil.

[0007] Further, the soft magnetic structure comprises: Two first soft magnetic structures are symmetrically arranged at two ends of the pump body, and the electromagnetic coil is sleeved on the first soft magnetic structure. The second soft magnetic structure has an opening, the pump body is disposed inside the second soft magnetic structure, and the first soft magnetic structure is disposed between the outer wall of the pump body and the inner wall of the second soft magnetic structure.

[0008] Optionally, the electromagnetically induction ion pump also includes a cap disposed at the opening of the second soft magnetic structure to close the second soft magnetic structure, the second soft magnetic structure and the cap together forming a housing.

[0009] Further pump components include: The pump core is located inside the pump body and is fixedly connected to the pump body. The air inlet flange is located on top of the pump body and is fixedly connected to the pump body. The air inlet flange is connected to the pump core.

[0010] Optionally, the pump core includes multiple anode cylinders.

[0011] Furthermore, the electromagnetically induction ion pump also includes a conductive plate, the lower end of which is connected to the anode cylinder or anode, and the upper end of which is connected to the high-voltage feedthrough.

[0012] Optionally, the pump body also includes insulators disposed on both sides inside the pump core to provide support for the anode cylinder or anode.

[0013] Furthermore, the electromagnetic induction ion pump also includes a heating plate, which is located inside the housing, below the pump body, and is fixedly connected to the pump body.

[0014] Optionally, the electromagnetically induction ion pump also includes a vacuum measuring device for detecting the vacuum level within the chamber.

[0015] Beneficial effects: 1. Zero electromagnetic interference: After the instrument or equipment has been evacuated, the magnetic field can be shut off by turning off the power supply to the electromagnetic coil, thereby eliminating electromagnetic interference to the instrument or equipment.

[0016] 2. Low cost: The electromagnetic coil is made of enameled pure copper wire, which is cheaper and more stable in terms of market price and supply than neodymium iron boron and samarium cobalt, resulting in lower cost and higher cost performance.

[0017] 3. Stable magnetic field without demagnetization: After the electromagnetic device is manufactured, the magnitude of the magnetic field is only related to the magnitude of the current supplied by the power supply device and is not affected by the external temperature. The magnetic field is stable and will not demagnetize due to heat decay or long-term operation.

[0018] 4. Baking resistant: Made of high-temperature resistant enameled pure copper wire, it can withstand high-temperature baking.

[0019] 5. Easy installation: When installing the ion pump, since the electromagnetic coil is not energized, there is no attraction or repulsion. Therefore, during installation, you only need to put the electromagnetic coil on the soft magnetic structure. There are no safety hazards such as pinching or bumping, making installation convenient.

[0020] 6. Dynamically adjustable magnetic field: Through the power control system, users can flexibly adjust the current input according to actual working needs to adjust the magnetic field, so that the ion pump can adapt to different gas types and pressure ranges, thus expanding the application range of the ion pump. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a perspective view of an embodiment of the electromagnetically induced ion pump of the present invention; Figure 2 This is the front view of the present invention; Figure 3 This is a side view of the present invention; Figure 4 This is a cross-sectional view of an embodiment of the present invention; Figure 5 This is a cross-sectional view from another direction according to an embodiment of the present invention.

[0023] Explanation of reference numerals in the attached figures: 1. Outer shell; 2. Pump body; 201. Pump core; 2011. Anode cylinder; 202. Inlet flange; 203. Insulator; 3. High-voltage feeder; 4. Electromagnetic device; 401. Soft magnetic structure; 4011. First soft magnetic structure; 4012. Second soft magnetic structure; 402. Electromagnetic coil; 5. Seal the cap; 6. Conductive plate; 7. Heating plate. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Electromagnetic induction ion pumps are commonly used vacuum-generating devices in high-vacuum and ultra-high-vacuum environments. They contain a cathode and an anode, and achieve gas evacuation through a Penning discharge process under the combined influence of magnetic and electric fields. Currently, all existing electromagnetic induction ion pumps, both domestically and internationally, use permanent magnets to generate a magnetic field to drive the movement of charged particles inside. Because the attraction of permanent magnets is constant, there are safety hazards such as pinching or bumping during installation. Even after vacuuming is complete, the magnetic field generated by the permanent magnet persists, causing electromagnetic interference to equipment or instruments. Permanent magnets can demagnetize after high temperatures or prolonged operation. The permanent magnet materials are often neodymium iron boron (NdFeB) or samarium cobalt (SCo). NdFeB is prone to demagnetization during high-temperature baking, while SCo is a rare-earth material and therefore expensive.

[0026] like Figure 1 , Figure 4 As shown, according to an embodiment of an electromagnetic induction ion pump provided by the present invention, it includes a housing 1 and a pump body 2. The pump body 2 is disposed inside the housing 1. A high-voltage feeder 3 is disposed on the housing 1 and fixedly connected to the pump body 2. An electromagnetic device 4 is disposed inside the housing to provide magnetic force to the pump body 2. A power supply device provides power input to the electromagnetic device 4. Through the above technical solution, the electromagnetic device 4 converts the power provided by the power supply device into magnetic force, which is then provided to the pump body 2. The pump body 2 works to extract gas from the instrument to complete the work. By controlling the power switch of the power supply device and the magnitude of the current input, the magnetic force and its magnitude can be controlled. When the machine is installed or vacuuming is completed, the power is disconnected, the magnetic force disappears, and there is no electromagnetic interference to the equipment or instrument, nor is there a problem of fingers being pinched due to the magnetic force. In the embodiment of the present invention, since the magnitude of the magnetic field is only affected by the magnitude of the current input, the magnetic field of the electromagnetic induction ion pump of the present invention is stable, unaffected by temperature, and will not demagnetize due to long-term operation. Therefore, the present invention solves the technical problems of fingers being pinched during installation of permanent magnets and electromagnetic interference caused by the magnetic field generated by permanent magnets to equipment or instruments, and solves the problem of demagnetization of permanent magnets after high temperature or long-term operation.

[0027] like Figure 2 , Figure 3 , Figure 5 As shown, one embodiment of the present invention includes a housing 1 that covers the entire electromagnetically induced ion pump to prevent magnetic leakage within the electromagnetically induced ion pump.

[0028] The pump body 2 is located inside the outer casing 1 and is fixedly connected to the instrument or equipment that needs to be evacuated. When the pump body 2 is working, it removes the gas from the device that needs to be evacuated to achieve a vacuum effect.

[0029] The high-voltage feeder 3 is installed on the pump body 2. One end of the high-voltage feeder 3 is a flange structure that matches the flange structure of the pump body 2. The high-voltage feeder 3 is fixedly connected to the pump body 2 through the flange structure. One end of the high-voltage feeder 3 is connected to the power controller, and the other end is connected to the inside of the pump body 2. The controller provides the pump body 2 with the DC high voltage environment required for the operation of the pump body 2 by controlling the high-voltage feeder 3.

[0030] The electromagnetic device 4 is installed inside the outer casing 1 to provide the magnetic force required for the operation of the pump body 2.

[0031] The power supply unit is connected to the electromagnetic device 4 to provide power input. By controlling the power input of the power supply unit, the magnetic force and magnitude of the electromagnetic device 4 can be controlled at any time. When the electromagnetic induction ion pump needs to work, the power switch of the power supply unit is turned on. The electromagnetic device 4 converts the power provided by the power supply unit into the magnetic force required by the pump body 2, and the pump body 2 starts working, evacuating the gas inside the instrument to achieve a vacuum effect. When installing the electromagnetic induction ion pump, the power switch of the power supply unit is turned off. The magnetic force of the electromagnetic device 4 disappears, and there is no attraction or repulsion force inside the ion pump, so there will be no pinching or bumping, thus protecting the safety of the staff. Furthermore, after the power supply unit is turned off, the magnetic force of the electromagnetic device 4 disappears, so there will be no electromagnetic interference to the instrument, increasing the service life of the equipment.

[0032] Optional, such as Figure 5 As shown, the electromagnetic device 4 includes a soft magnetic structure 401 and an electromagnetic coil 402. The electromagnetic coil 402 is sleeved on the soft magnetic structure 401. The power supply device is connected to the electromagnetic coil 402. The electromagnetic coil 402 can be made of high-temperature resistant enameled pure copper wire, which can withstand high-temperature baking and will not demagnetize due to high temperature. Furthermore, the high-temperature resistant enameled pure copper wire can withstand high temperatures, increasing the service life of the ion pump. Moreover, the high-temperature resistant enameled pure copper wire is less expensive than neodymium iron boron and samarium cobalt. The electromagnetic coil 402 is wound in multiple turns on the soft magnetic structure 401. The electromagnetic coil 402 can be a multi-layered structure, which can provide higher magnetic force. After the electromagnetic coil 402 and the soft magnetic structure are installed, the magnitude of the magnetic field is only related to the current input and is not affected by the external temperature. The magnetic field is stable and will not experience thermal decay or demagnetization. The use of high-temperature resistant enameled pure copper wire for the electromagnetic coil 402 further increases its service life.

[0033] Furthermore, such as Figure 5As shown, the soft magnetic structure 401 includes a first soft magnetic structure 4011 and a second soft magnetic structure 4012. In this embodiment, the soft magnetic structure 401 can be soft iron. The first soft magnetic structure 4011 is a rectangular soft iron. The two first soft magnetic structures 4011 are disposed between the outer wall of the second soft magnetic structure 4012 and the inner wall of the pump body 2. The soft magnetic structures 401 are fixedly disposed on the inner wall of the second soft magnetic structure 4012. When energized, the first soft magnetic structure 4011 enhances the magnetic field strength generated by the electromagnetic coil 402. The second soft magnetic structure 4012 consists of three parts: a U-shaped plate and two sealing plates. The pump body 2 is placed inside the second soft magnetic structure. The U-shaped plate and the two sealing plates are combined together, with an opening at the top. A cover 5 is placed at the top opening. The cover 5 cooperates with the second soft magnetic structure 4012 to seal the entire magnetic field and reduce magnetic leakage. A circular through hole is opened at the top of the cover 5. The top of the pump body 2 protrudes through the hole outside the outer shell 1, and the bottom of the pump body 2 is sealed inside the outer shell 1. The second soft magnetic structure 4012 and the cover 5 together form the outer shell 1 of the ion pump. The outer shell 1 not only isolates external dust particles, keeping the inside of the electromagnetic induction ion pump clean and dust-free, but also prevents magnetic leakage of the electromagnetic device 4.

[0034] Optional, such as Figure 1 and Figure 5 As shown, the pump body 2 includes a pump core 201 and an inlet flange 202. The pump core 201 is disposed inside the pump body 2, which is T-shaped and housed within the outer casing 1. The pump core 201 is fixedly connected to the pump body 2 and communicates with the inlet flange 202. The inlet flange 202 is cylindrical, with a flange at the top for connection to instruments and equipment. A second cylinder integrally formed with the inlet flange 202 is provided on the side of the cylinder. In another embodiment, the inlet flange 202 is welded to the second cylinder. A second flange connected to the high-pressure feeder 3 is provided on the second cylinder, and the high-pressure feeder 3 is fixedly connected to the pump body 2 through the second flange. The T-shaped design of the pump body maximizes the use of the space structure of the outer casing 1, and the larger the pump core, the greater the pumping efficiency of the ion pump.

[0035] Furthermore, such as Figure 4 As shown, the pump core 201 also includes multiple anode cylinders 2011. The multiple anode cylinders 2011 together form the anode cylinder 2011 of the electromagnetic device 4. The anode cylinder 2011 is cylindrical and has a multi-layer structure. In one embodiment of the present invention, the anode cylinder 2011 has three layers. The multiple anode cylinders 2011 are arranged side by side in the pump core 2011. The opening direction of the anode cylinder is perpendicular to the direction of the first soft magnetic structure 4011 wound by the electromagnetic coil 402. The anode cylinder 2011 becomes the anode after being energized.

[0036] Furthermore, such as Figure 4 , Figure 5As shown, the electromagnetic induction ion pump also includes a conductive plate 6. The upper end of the conductive plate 6 is fixedly connected to the electrode rod of the high-voltage feeder 3, and the lower end is connected to the anode cylinder 2011. The conductive plate 6 is made of sheet metal and can be bent into an "L" shape. Multiple elongated holes are formed on the conductive plate 6. The valve core of the high-voltage feeder 3 passes through these holes and is fixedly connected to the conductive plate. The multiple vertical elongated holes can accommodate adjustments to the height of the high-voltage feeder 3. An arc-shaped structure is provided below the conductive plate 6, which fits against the surface of the anode cylinder 2011 to increase the contact area between the conductive plate 6 and the anode cylinder 2011, thereby increasing the conductivity of the conductive plate 6. The power controller transmits high-voltage DC power to the conductive plate 6 through the high-voltage feeder 3. The conductive plate 6 then transmits the high-voltage DC power to the anode cylinder 2011, which becomes the anode of the electromagnetic device 4 after being energized.

[0037] Optional, such as Figure 4 As shown, the pump body 2 also includes insulators 203. There can be multiple insulators 203, which are symmetrically arranged on both sides of the pump core 201. The insulators 203 are disc-shaped and provide support for the anode cylinder 2011. A mounting plate is provided between the inner wall of the pump core 201 and the anode cylinder 2011, which can be used to position and install the insulators 203 inside the pump core.

[0038] Furthermore, such as Figure Four As shown, the electromagnetic induction ion pump also includes a heating plate 7. The heating plate 7 is a square plate structure and is located inside the outer casing 1. The heating plate 7 is fixedly connected to the bottom of the pump body 2. In this embodiment, the heating plate 7 is fixed to the bottom of the pump body 2 by a threaded connection. The heating plate 7 is used to efficiently desorb water vapor and residual gas inside the electromagnetic induction ion pump, improve the pumping efficiency of the electromagnetic induction ion pump, and increase the vacuum level of the entire instrument system.

[0039] Optionally, embodiments of the present invention also include a vacuum measuring device that monitors the vacuum level in the electromagnetically induced ion pump and the device, and adjusts the magnetic field strength and electrode voltage of the entire electromagnetically induced ion pump based on the vacuum level, so that the electromagnetically induced ion pump is always in the optimal working state.

[0040] The working principle of this invention is as follows: The electromagnetic induction ion pump of this invention utilizes the combined effect of the magnetic field generated by the soft magnetic material and the electric field formed by the high voltage provided by the external high-voltage power supply to ionize gas molecules under a strong magnetic field. The ionized gas molecules are accelerated by the electric field and collide with the solid surface, capturing the gas molecules and depositing them into the capture area inside the pump, thereby achieving gas removal.

[0041] The specific work steps are as follows: Magnetic field generation: When the power supply device, a soft magnetic structure 401, is energized, a uniform and adjustable magnetic field is formed around the electromagnetic coil 402. The strength of this magnetic field can be controlled by adjusting the power input. This magnetic field acts on the particle motion region within the pump body 2 of the electromagnetically inductive ion pump, controlling the trajectory of the particles.

[0042] Gas ionization: Gas molecules in a vacuum chamber are efficiently ionized into positive ions and electrons under the combined action of an electric field and a magnetic field.

[0043] Ion acceleration and capture: Ions are accelerated towards the cathode under the action of electromagnetic field. The ions bombard the cathode, causing titanium atoms of the cathode material to be sputtered out and forming an ion titanium film on the anode cylinder 2011, the cathode surface and the inside of the pump body. The active gas molecules in the cavity react with the fresh titanium film to form compounds that are fixed and thus removed. Inert gases are mainly buried by the sputtered titanium film.

[0044] Vacuum monitoring: The vacuum level of the electromagnetic induction ion pump and equipment is monitored by a vacuum measuring device. The magnetic field strength and electrode voltage are adjusted by controlling the power input to ensure that the electromagnetic induction ion pump always operates in the best condition.

[0045] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. An electro-magnetic induction ion pump characterized by, The utility model relates to a kind of high-pressure pump, including: Housing (1); Pump body (2), it is arranged in the housing (1); High-pressure feedthrough (3), it is arranged on the pump body (2), and it is fixedly connected with the pump body (2); Electromagnetic device (4), it is arranged in the housing (1), and provides magnetic force for the pump body (2); Power supply device, it is connected with the electromagnetic device (4), and provides power input for the electromagnetic device (4).

2. The electromagnetically induced ion pump of claim 1, wherein, The electromagnetic device (4) includes: Soft magnetic structure (401), the soft magnetic structure (401) is arranged in housing (1); Electromagnetic coil (402), it is arranged in the housing (1), the electromagnetic coil (402) is set on the soft magnetic structure (401), and the power supply device is connected with the electromagnetic coil (402).

3. The electromagnetically induced ion pump of claim 2, wherein, The soft magnetic structure (401) includes: First soft magnetic structure (4011), two first soft magnetic structures (4011) are symmetrically arranged at the two ends of the pump body (2), and the electromagnetic coil (402) is set on the first soft magnetic structure (4011); Second soft magnetic structure (4012), second soft magnetic structure (4012) has opening, pump body (2) is arranged in the second soft magnetic structure (4012), and the first soft magnetic structure (4011) is arranged between the outer wall of the pump body (2) and the inner wall of the second soft magnetic structure (4012).

4. The electromagnetically induced ion pump of claim 3, wherein, It further includes cover (5), cover (5) is arranged at the opening of second soft magnetic structure (4012), to close second soft magnetic structure (4012), and second soft magnetic structure (4012) and the cover (5) form the housing (1) jointly.

5. The electromagnetically induced ion pump of claim 1, wherein, The pump body (2) includes: Pump core (201), it is arranged in pump body (2), and is fixedly connected with pump body (2); Inlet flange (202), it is arranged above the pump body (2), and is fixedly connected with pump body (2), and the inlet flange (202) communicates with the pump core (201).

6. The electromagnetically induced ion pump of claim 5, wherein, Pump core (201) includes a plurality of anode cylinders (2011).

7. The electromagnetically induced ion pump of claim 6, wherein, It further includes conducting plate (6), and the lower end of the conducting plate (6) is connected with anode cylinder (2011) or anode, and the upper end of the conducting plate (6) is connected with the high-pressure feedthrough (3).

8. The electromagnetically induced ion pump of claim 6, wherein, The pump body (2) further includes insulator (203), and the insulator (203) is arranged in the two sides of the pump core (201), to provide support for the anode cylinder (2011).

9. The electromagnetically induced ion pump according to any one of claims 1 to 8, characterized in that, It further includes heating plate (7), and the heating plate (7) is arranged in the housing (1), below the pump body (2), and is fixedly connected with the pump body (2).

10. The electromagnetically induced ion pump according to any one of claims 1 to 8, characterized in that, It further includes vacuum measuring device, and the vacuum measuring device is used to detect the vacuum degree in cavity.

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