Preparation method of pyramid microstructure interdigital electrode pressure sensor
By employing a three-layer structure design consisting of a pyramidal microstructure PDMS-MXene membrane, a TPU@MXene-MWCNT sensing layer, and interdigitated electrodes, combined with PI film encapsulation, the shortcomings of flexible pressure sensors in terms of sensitivity, stability, and durability have been overcome, enabling the application of fast-response and high-sensitivity sensors in wearable devices.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-01
- Publication Date
- 2026-03-10
AI Technical Summary
Existing flexible pressure sensors have shortcomings in terms of sensitivity, stability and durability, making it difficult for them to perform well in complex application scenarios.
The sensor employs a three-layer structure design consisting of a pyramidal microstructure PDMS-MXene film, a TPU@MXene-MWCNT sensing layer, and interdigitated electrodes. It is encapsulated with a PI film and combined with a polyimide film to enhance sensor performance.
This pressure sensor achieves rapid response, high sensitivity, and good stability, and is suitable for wearable physiological signal monitoring, pulse detection, and low-frequency acoustic signal recognition, with broad application prospects.
Smart Images
Figure CN121632402A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of flexible pressure sensors, in particular to a preparation method of a pyramid microstructure interdigital electrode pressure sensor. BACKGROUND
[0002] Wearable flexible pressure sensors mainly include four types of piezoresistive, piezoelectric, capacitive and triboelectric. Among them, piezoresistive sensors are widely concerned due to their simple structure, low cost and easy preparation. Existing researches are mainly focused on metal nanomaterials, conductive polymers and carbon-based materials, especially carbon nanotubes, graphene and MXene nanosheets emerging in recent years. However, it is difficult to simultaneously consider sensitivity, stability and durability by relying on the intrinsic structure and electrical properties of a single nanomaterial, which limits the performance of flexible piezoresistive sensors in complex application scenarios. In order to solve this problem, a method combining microstructure flexible matrix, carbon nanocoating film and interdigital electrode is adopted. The biomimetic microstructure can effectively enhance the interface contact change and improve the sensing performance, and the interdigital electrode microstructure can optimize the electric field distribution and increase the effective sensing area, thereby improving the signal acquisition sensitivity and stability of the sensor.
[0003] The present application relates to a preparation method of a pyramid microstructure PDMS-MXene film / TPU@MXene-MWCNT film / interdigital electrode pressure sensor packaged by a polyimide (PI) film and application thereof. The sensor realizes excellent pressure response performance through the synergistic effect of the pyramid microstructure PDMS / MXene film, the TPU@MXene-MWCNT sensing layer and the interdigital electrode. Further, the durability of the sensor can be significantly improved by packaging with the PI film. The sensor has compact structure, good flexibility and is easy to integrate, and can be widely applied in fields of wearable physiological signal monitoring, pulse detection, low-frequency acoustic signal recognition (such as piano note recognition) and human-computer interaction. SUMMARY
[0004] (I) Technical problem
[0005] In view of the deficiencies of the prior art, the present application provides a preparation method of a pyramid microstructure interdigital electrode pressure sensor, aiming to solve the problem of how to prepare a pressure sensor with high sensitivity, good stability and rapid response.
[0006] (II) Technical content
[0007] The present application provides a preparation method of a pyramid microstructure interdigital electrode pressure sensor, comprising the following steps:
[0008] Step 1, preparation of PDMS with pyramid microstructure and preparation and surface modification of MXene:
[0009] A single-side polished silicon wafer was used as the mold substrate. The silicon wafer was sequentially subjected to ultrasonic cleaning in acetone, ethanol and deionized water for 10 minutes each, and then dried with nitrogen. A positive photoresist was spin-coated on the wafer surface, and a periodic square array pattern was formed by a standard photolithography process. Subsequently, a SiO2 film was deposited on the wafer surface by plasma-enhanced chemical vapor deposition (PECVD) as an etching mask. After removing the photoresist with acetone, patterned SiO2 features were formed on the silicon surface. The wafer was immersed in a KOH / isopropyl alcohol aqueous solution for anisotropic etching, and after etching was completed, the SiO2 mask was removed using a buffered HF solution to obtain a final patterned silicon template. To facilitate PDMS demolding, a 1% PVA aqueous solution was spin-coated on the surface of the silicon template at a speed of 3000-4000 rpm for 30 seconds, and dried at 60°C for 30 minutes to form a uniform and peelable sacrificial layer. Subsequently, the PDMS prepolymer was mixed with the curing agent at a mass ratio of 10:1, spin-coated on the silicon template, and bubbles were removed in a vacuum drying oven, followed by curing at 50°C for 12 hours. After cooling to room temperature, a PDMS film with pyramid microstructures was obtained;
[0010] The preparation method of MXene and surface modification is as follows:
[0011] Ti3C2T X (MXene) nanosheets were synthesized by selectively etching the Al layer from Ti3AlC2 using a LiF / HCl solution. 2 g of Ti3AlC2 powder was gradually added to a mixed solution containing LiF (2 g) and HCl (40 mL), and the mixture was stirred at 35°C for 24 hours. The resulting suspension was repeatedly washed with deionized water and centrifuged at 3500-4500 rpm until the supernatant PH reached 6-7. The washed product was then redispersed in deionized water and ultrasonically treated in an ice bath under inert gas protection for 1 hour. After centrifugation, layered Ti3C2T X MXene dispersion. The dispersion was redispersed in 30 mL of deionized water and gently stirred at room temperature for 24 h. The washed MXene product was redispersed in deionized water to prepare a uniform MXene dispersion with a concentration of 2 mg / mL. The MXene dispersion was uniformly sprayed onto the surface of the pyramid microstructure PDMS film, and after drying at room temperature, a PDMS-MXene pyramid microstructure film was obtained;
[0012] Step 2, preparation of TPU@MXene-MWCNT sensing layer:
[0013] 10 mg of MWCNT was dispersed in 5 mL of deionized water and sonicated at 200 W for 20 minutes in pulse mode until uniform dispersion was achieved. The prepared 2 mg / mL, 5 mL MXene suspension was placed on a magnetic stirrer and stirred at 500-800 rpm for 1 hour to ensure thorough homogeneity. The MWCNT dispersion was then added dropwise to the MXene suspension, and the resulting mixture was further sonicated at 100 W for 30 minutes to ensure uniform mixing and prevent phase separation. The well-dispersed MXene-MWCNT hybrid solution was loaded into a spray gun system and uniformly deposited onto the surface of a TPU film. The spraying process was carried out at a working distance of 10 cm. Under conditions of a carrier gas pressure of 0.15 MPa and a stable scanning speed, multiple films were deposited sequentially at 30-second intervals to precisely control the film thickness and prevent substrate oversaturation. The sprayed TMM composite film was dried at 60 °C for 1 hour to promote interfacial adhesion and ensure complete solvent evaporation, yielding a TPU@MXene-MWCNT film.
[0014] Step 3: Fabrication of pyramidal microstructure PDMS-MXene membrane / TPU@MXene-MWCNT membrane / interdigital electrode pressure sensor:
[0015] The PET-based interdigitated electrodes have a size of 4.2*9.2mm and an interdigital spacing of 0.1mm; they are covered with the TPU@MXene-MWCNT film prepared above.
[0016] The positive and negative terminals of the interdigital electrodes are connected to an external circuit using copper foil. Then, conductive silver paste is applied to the electrode contact points and thermally cured at 80°C for 2 hours to fully solidify the conductive silver paste layer. Finally, a flexible pressure sensor with a pyramidal microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode three-layer structure is obtained.
[0017] Preferred technical solution 1: When MWCNT and MXene dispersion are mixed in step 2, the solid mass ratio of the two is one of MWCNT to MXene: 1:1, 1:2 and 2:1 respectively.
[0018] Preferred technical solution 2: When the pyramidal microstructure PDMS film is sprayed with MXene, the final performance of the film is significantly affected by the natural drying at room temperature for 12-24 hours or the drying in a 50°C oven for 4 hours. These conditions need to be strictly controlled to ensure the uniformity and stability of the PMDS-MXene film.
[0019] Preferred technical solution three: After uniformly spraying the prepared MXene-MWCNT suspension onto the TPU film surface in step 2, it is dried naturally at room temperature or in a 50°C oven for 4 hours to ensure that MXene-MWCNT is uniformly loaded onto the TPU film surface. The number of spray layers and drying conditions can be adjusted to obtain ideal sensing sensitivity, response speed, and durability.
[0020] This method is simple to operate and highly controllable. The prepared pyramid microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode sensor is compact, fast-responding, and flexible. It can be widely used in wearable physiological signal monitoring, pulse detection, low-frequency acoustic signal recognition, and human-computer interaction, and has significant scientific value and practical prospects.
[0021] (III) Technical Effects
[0022] The above structure gives this solution the following advantages:
[0023] 1. This sensor adopts a three-layer structure design with a pyramidal microstructure PDMS-MXene membrane / TPU@MXene-MWCNT sensing layer and PET-based interdigital electrodes. It has fast response, high sensitivity, good stability and flexibility. At the same time, it realizes wearable physiological signal monitoring (such as pulse detection), low-frequency acoustic signal recognition (such as piano note recognition) and human-computer interaction functions. It has guiding significance for the research and development of high-performance flexible pressure sensors and the development of smart materials.
[0024] 2. This preparation method is simple to operate, highly controllable, requires low equipment, uses readily available materials, is environmentally friendly and economical, and can be mass-produced, thus having broad application prospects. Attached Figure Description
[0025] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:
[0026] Figure 1 This is a physical image of the sensor from Embodiment 1 of the method for fabricating the pyramid microstructure interdigitated electrode pressure sensor of the present invention.
[0027] Figure 2 The image shows the SEM image of PDMS-MXene, representing the pyramidal microstructure of the interdigitated electrode pressure sensor fabrication method of the present invention, in Example 1, illustrating the morphology of the PDMS-MXene microstructure.
[0028] Figure 3The FTIR spectra of the PDMS-MXene film / TPU@MXene-MWCNT film in Examples 1 and 2 of the fabrication method of the pyramid microstructure interdigitated electrode pressure sensor of the present invention are shown.
[0029] Figure 4 This is a resistance variation curve of the sensor under different pressures in Example 1 of the fabrication method of the pyramid microstructure interdigitated electrode pressure sensor of the present invention, which is an example of the fabrication method of the pyramid microstructure interdigitated electrode pressure sensor of the present invention.
[0030] Figure 5 The image shows the durability test results of the sensor in Example 1 of the fabrication method of the pyramid microstructure interdigital electrode pressure sensor of the present invention. Detailed Implementation
[0031] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0032] Example 1:
[0033] This embodiment provides a method for fabricating a pyramidal microstructure interdigitated electrode pressure sensor, specifically including the following steps:
[0034] Step 1: Use a single-sided polished silicon wafer as the mold substrate. The silicon wafer is sequentially ultrasonically cleaned in acetone, ethanol, and deionized water for 10 minutes each, followed by drying with nitrogen. Positive photoresist is spin-coated onto the wafer surface, and a periodic square array pattern is formed using standard photolithography. Subsequently, a SiO2 thin film is deposited on the wafer surface using plasma-enhanced chemical vapor deposition (PECVD) as an etching mask. After removing the photoresist with acetone, patterned SiO2 features are formed on the silicon surface. The wafer is immersed in a KOH / isopropanol aqueous solution for anisotropic etching. After etching, the SiO2 mask is removed using a buffered HF solution to obtain the final patterned silicon template. To facilitate PDMS release, a 1% PVA aqueous solution is spin-coated onto the silicon template surface at 3000-4000 rpm for 30 seconds, and then dried at 60°C for 30 minutes to form a uniform, peelable sacrificial layer. Subsequently, the PDMS prepolymer and curing agent were mixed at a mass ratio of 10:1, spin-coated onto a silicon template, and bubble-removed in a vacuum drying oven. Then, the mixture was cured at 50°C for 12 hours and cooled to room temperature to obtain a PDMS film with a pyramidal microstructure.
[0035] The preparation and surface modification of MXene are as follows: Ti3C2T is synthesized by selectively etching the Al layer from Ti3AlC2 using LiF / HCl solution. X (MXene) nanosheets. 2g of Ti3AlC2 powder was gradually added to a mixed solution containing 2g LiF and 40mL HCl, and the mixture was stirred at 35°C for 24 hours. The resulting suspension was repeatedly washed with deionized water and centrifuged at 3500-4500 rpm until the pH of the supernatant reached 6-7. The washed product was then redispersed in deionized water and sonicated in an ice bath under inert gas protection for 1 hour. After centrifugation, layered Ti3C2T nanosheets were obtained. x MXene dispersion. The dispersion was redistributed in 30 mL of deionized water and gently stirred at room temperature for 24 h to obtain a uniform dispersion of monolayer or multilayer MXene nanosheets. The MXene dispersion was uniformly sprayed onto the surface of a pyramidal microstructured PDMS membrane and dried at room temperature to obtain a PDMS-MXene pyramidal microstructured membrane.
[0036] Step 2: Disperse 10 mg MWCNT in 5 mL of deionized water and sonicate at 200 W in pulse mode for 20 minutes until uniform dispersion is achieved. Place the prepared 2 mg / mL, 5 mL MXene suspension on a magnetic stirrer and stir at 500-800 rpm for 1 hour to ensure thorough homogeneity. Then, add the MWCNT dispersion dropwise to the MXene suspension and sonicate the resulting mixture at 100 W for 30 minutes to ensure uniform mixing and prevent phase separation. Load the well-dispersed MXene-MWCNT hybrid solution into the spray gun system and uniformly deposit it onto the surface of the TPU film. The spraying process is carried out at a working distance of 10 cm. Under the conditions of a carrier gas pressure of 0.15 MPa and a stable scanning speed, multiple films are deposited sequentially at 30-second intervals to precisely control the film thickness and prevent substrate oversaturation. The sprayed TMM composite film is dried at 60 °C for 1 hour to promote interfacial adhesion and ensure complete solvent evaporation, resulting in a TPU@MXene-MWCNT film.
[0037] Step 3: The PET-based interdigital electrodes have a size of 4.2*9.2mm and an interdigital spacing of 0.1mm; they are covered with the TPU@MXene-MWCNT film prepared above. The positive and negative electrodes of the interdigital electrodes are connected to an external circuit using copper foil; subsequently, conductive silver paste is applied to the electrode contact points and thermally cured at 80℃ for 2 hours to fully solidify the conductive silver paste layer; finally, a flexible pressure sensor with a pyramidal microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode three-layer structure is obtained, such as... Figure 1 As shown:
[0038] Step 4: Characterize the chemical functional groups of the pyramidal microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode sensor using Fourier transform infrared spectroscopy (FTIR), such as... Figure 2 As shown; by applying different pressures and measuring the resistance changes, the electromechanical behavior of the sensor is evaluated, such as... Figure 3 As shown, this demonstrates the stable resistance change characteristics of the sensor under different pressures; for example... Figure 4 As shown; Figure 5 As shown, the packaged sensor exhibits durability of over 13,000 pressure cycles at 1.6 kPa and 1.6 Hz, demonstrating the sensor's stability.
[0039] Example 2:
[0040] This embodiment provides a method for fabricating a pyramidal microstructure interdigitated electrode pressure sensor, specifically including the following steps:
[0041] Step 1: Use a single-sided polished silicon wafer as the mold substrate. The silicon wafer is sequentially ultrasonically cleaned in acetone, ethanol, and deionized water for 10 minutes each, followed by drying with nitrogen. Positive photoresist is spin-coated onto the wafer surface, and a periodic square array pattern is formed using standard photolithography. Subsequently, a SiO2 thin film is deposited on the wafer surface using plasma-enhanced chemical vapor deposition (PECVD) as an etching mask. After removing the photoresist with acetone, patterned SiO2 features are formed on the silicon surface. The wafer is immersed in a KOH / isopropanol aqueous solution for anisotropic etching. After etching, the SiO2 mask is removed using a buffered HF solution to obtain the final patterned silicon template. To facilitate PDMS release, a 1% PVA aqueous solution is spin-coated onto the silicon template surface at 3000-4000 rpm for 30 seconds, and then dried at 60°C for 30 minutes to form a uniform, peelable sacrificial layer. Subsequently, the PDMS prepolymer and curing agent were mixed at a mass ratio of 10:1, spin-coated onto a silicon template, and bubble-removed in a vacuum drying oven. Then, the mixture was cured at 50°C for 12 hours and cooled to room temperature to obtain a PDMS film with a pyramidal microstructure.
[0042] The preparation and surface modification methods of MXene are as follows: Ti3C2T is synthesized by selectively etching the Al layer from Ti3AlC2 using LiF / HCl solution. x(MXene) nanosheets. 2g of Ti3AlC2 powder was gradually added to a mixed solution containing 2g LiF and 40mL HCl, and the mixture was stirred at 35°C for 24 hours. The resulting suspension was repeatedly washed with deionized water and centrifuged at 3500-4500rpm until the pH of the supernatant reached 6-7. The washed product was then redispersed in deionized water and sonicated in an ice bath under inert gas protection for 1 hour. After centrifugation, layered Ti3C2T nanosheets were obtained. x MXene dispersion. The dispersion was redistributed in 30 mL of deionized water and gently stirred at room temperature for 24 h to obtain a uniform dispersion of monolayer or multilayer MXene nanosheets. The MXene dispersion was uniformly sprayed onto the surface of a pyramidal microstructured PDMS membrane and dried at room temperature to obtain a PDMS-MXene pyramidal microstructured membrane.
[0043] Step 2: Disperse 10 mg MWCNT in 5 mL of deionized water and sonicate at 200 W in pulse mode for 20 minutes until uniform dispersion is achieved. Place the prepared 2 mg / mL, 10 mL MXene suspension on a magnetic stirrer and stir at 500-800 rpm for 1 hour to ensure thorough uniformity of the dispersion. Then, add the MWCNT dispersion dropwise to the MXene suspension and sonicate the resulting mixture at 100 W for 30 minutes to ensure uniform mixing and prevent phase separation. Load the well-dispersed MXene-MWCNT hybrid solution into the spray gun system and uniformly deposit it onto the surface of the TPU film. The spraying process is carried out at a working distance of 10 cm. Under the conditions of a carrier gas pressure of 0.15 MPa and a stable scanning speed, multiple films are deposited sequentially at 30-second intervals to precisely control the film thickness and prevent substrate oversaturation. The sprayed TMM composite film is dried at 60 °C for 1 hour to promote interfacial adhesion and ensure complete solvent evaporation, resulting in a TPU@MXene-MWCNT film.
[0044] Step 3: The PET-based interdigital electrodes have a size of 4.2*9.2mm and an interdigital spacing of 0.1mm; they are covered with the TPU@MXene-MWCNT film prepared above. The positive and negative electrodes of the interdigital electrodes are connected to an external circuit using copper foil; subsequently, conductive silver paste is applied to the electrode contact points and thermally cured at 80℃ for 2 hours to fully solidify the conductive silver paste layer; finally, a flexible pressure sensor with a pyramidal microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode three-layer structure is obtained, such as... Figure 1 As shown:
[0045] Step 4: Characterize the chemical functional groups of the pyramidal microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode sensor using Fourier transform infrared spectroscopy (FTIR), such as... Figure 2 As shown; Figure 5 As shown, the packaged sensor exhibits durability of over 13,000 pressure cycles at 1.6 kPa and 1.6 Hz, demonstrating the sensor's stability.
[0046] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A method for preparing a pyramid microstructure interdigital electrode pressure sensor, characterized by comprising the following steps: Step 1, preparation of a pyramid microstructure PDMS and preparation and surface modification of MXene; A single-side polished silicon wafer is used as a mold substrate: the silicon wafer is sequentially subjected to ultrasonic cleaning in acetone, ethanol and deionized water for 10 minutes each time, and then dried with nitrogen; A positive photoresist is spin-coated on the wafer surface, and a periodic square array pattern is formed by a standard photolithography process; Subsequently, a SiO2 thin film is deposited on the wafer surface by plasma enhanced chemical vapor deposition (PECVD) as an etching mask; After removing the photoresist with acetone, a patterned SiO2 feature is formed on the silicon surface; the wafer is immersed in a KOH / isopropyl alcohol aqueous solution for anisotropic etching, and after etching is completed, a buffer HF solution is used to remove the SiO2 mask to obtain a final patterned silicon template; To facilitate the release of the PDMS film, a 1% PVA aqueous solution is spin-coated on the surface of the silicon template at a speed of 3000-4000 rpm for 30 seconds, and dried at 60°C for 30 minutes to form a uniform and peelable sacrificial layer; then, the PDMS prepolymer is mixed with the curing agent at a mass ratio of 10:1, spin-coated on the silicon template, and bubbles are removed in a vacuum drying oven, then cured at 50°C for 12 hours, and cooled to room temperature to obtain a PDMS film with a pyramid microstructure; The preparation method of the preparation and surface modification of MXene is as follows: Synthesis of Ti3C2T by selective etching of Al layer from Ti3AlC2 using LiF / HCl solution X (MXene) nanosheets: 2 g of Ti3AlC2 powder was gradually added into a mixed solution containing LiF (2 g) and HCl (40 mL), and the mixture was stirred at 35°C for 24 hours; the obtained suspension was repeatedly washed with deionized water and centrifuged at 3500-4500 rpm until the supernatant PH reached 6-7; then the washed product was redispersed in deionized water and ultrasonically treated in an ice bath under inert gas protection for 1 hour; after centrifugation, layered Ti3C2T X MXene dispersion, the dispersion was redispersed in 30 mL of deionized water and gently stirred at room temperature for 24 h, the washed MXene product was redispersed in deionized water to prepare a uniform MXene dispersion with a concentration of 2 mg / mL, the MXene dispersion was uniformly sprayed on the surface of the pyramid microstructure PDMS film, and after drying at room temperature, a PDMS-MXene pyramid microstructure film was obtained; Step 2, preparation of a TPU@MXene-MWCNT sensing layer 10 mg of MWCNT is dispersed in 5 mL of deionized water, and ultrasonic treatment is performed in pulse mode at a power of 200 W for 20 minutes until uniform dispersion is achieved; 2 mg / mL of the prepared MXene suspension is placed on a magnetic stirrer and stirred at 500-800 rpm for 1 hour to make the dispersion uniform; then the MWCNT dispersion is added dropwise to the MXene suspension, and the resulting mixed dispersion is further ultrasonically treated at 100 W for 30 minutes to ensure uniform mixing and prevent phase separation; the well-dispersed MXene-MWCNT hybrid solution is loaded into a spray gun system and uniformly deposited onto the surface of the TPU film; the spraying process is carried out at a working distance of 10 cm, and under the conditions of a carrier gas pressure of 0.15 MPa and a stable scanning speed, multiple layers of film are deposited at intervals of 30 s to accurately control the film thickness and prevent the substrate from being oversaturated; the sprayed TMM composite film is dried at 60°C for 1 hour to promote interface adhesion and ensure complete solvent evaporation, and a TPU@MXene-MWCNT film is obtained; Step 3, preparation of a pyramid microstructure PDMS-MXene film / TPU@MXene-MWCNT film / interdigital electrode pressure sensor: The size of the PET-based interdigital electrode is 4.2*9.2 mm, and the interdigital distance is 0.1 mm; the TPU@MXene-MWCNT film prepared above is used for covering; The positive and negative electrodes of the interdigital electrode were connected to the external circuit using copper foil; then, the electrode contact points were covered with conductive silver paste, and the conductive silver paste layer was completely cured by heat curing at 80°C for 2 hours; Finally, a flexible pressure sensor with a pyramid microstructure PDMS-MXene / TPU@MXene-MWCNT / interdigital electrode three-layer structure was obtained.
2. The method of claim 1, wherein: In step 1, after the PDMS prepolymer was spin-coated on the silicon template, the bubbles were removed by vacuum and cured at 50°C for 12 hours.
3. The method of claim 1, wherein the method further comprises: In step 2, when the MWCNT and MXene dispersion were mixed, the solid mass ratio of the two was one of 1:1, 1:2 and 2:1 for MWCNT and MXene respectively.
4. The method of claim 1, wherein: In step 2, after the pyramid microstructure PDMS film was sprayed with MXene, the drying conditions were 24 hours at room temperature and 4 hours in a 50°C oven.