Electric heating water washing type tail gas treatment machine

Abstract

The invention relates to the field of tail gas treatment, in particular to an electric heating washing type tail gas treatment machine which comprises a reaction tower, the bottom of the reaction tower is communicated with a conical water collector, the bottom of the conical water collector is communicated with a circulating water tank, the bottom of the reaction tower is further communicated with a first water pipe, and the first water pipe introduces water into the conical water collector; one side of the conical water collector is communicated with a transverse pipe, and a plurality of atomizing nozzles are distributed in the transverse pipe; according to the electric heating water washing type tail gas treatment machine, firstly, tail gas is subjected to high-temperature combustion, oxidation reaction is completed, harmless substances are produced, then water spraying dust removal is conducted, smoke dust and particulate matter in the gas are separated out and washed into the circulating water tank, and the problem that oxide substances are deposited on the inner side walls of the reaction tower and the conical water collector, and consequently blockage is caused is solved; and then through multi-stage water spraying cooling, the temperature of the gas is reduced to the emission standard, so that high-temperature damage to the electric heating water washing type tail gas treatment machine due to emission of high-temperature gas is avoided, and meanwhile, secondary pollution to the environment is reduced.

Description

Technical Field

[0001] This invention relates to the field of exhaust gas treatment, specifically an electrically heated water-washing exhaust gas treatment machine. Background Technology

[0002] In the manufacturing processes of semiconductors, optoelectronics, photovoltaics, solar energy, and battery anode materials, a large amount of acids, alkalis, organic solvents, and various special gases are used. The entire production process generates a large amount of exhaust gas, such as SiH4, H2, CH4, C2H4, etc. There are many types of these gases. Not only are they volatile, but they also cause great damage to the natural environment when they flow into it. They are also flammable and can cause fires if not handled properly.

[0003] Therefore, during the production process, exhaust gas needs to be centrally treated and purified to meet standards before being discharged into the natural environment. Currently, the treatment methods for this exhaust gas generally include combustion, electrothermal, plasma, and adsorption types. Among them, the electrothermal method uses electrical energy to heat the exhaust gas to between 800-1400℃, achieving the effect of combustion and causing the exhaust gas to undergo an oxidation reaction, generating a series of oxides and water vapor, which are then discharged into the natural environment. Before being discharged into the natural environment, the gas still has residual heat, reaching a temperature of up to 300℃. If directly discharged, the high-temperature gas will accelerate the corrosion of equipment when it comes into contact with water, especially at the gas outlet. At the same time, the gas also contains a large amount of soot, and direct discharge will cause secondary pollution.

[0004] Therefore, an electrically heated water-washing exhaust gas treatment machine is proposed to address the above problems. Summary of the Invention

[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0006] The technical solution adopted by the present invention to solve its technical problem is as follows: The electric heating water washing type exhaust gas treatment machine of the present invention includes a reaction tower, multiple heating rods are arranged in a circular array at the top of the reaction tower, multiple gas supply pipes are connected to the top of the reaction tower, a conical water collector is connected to the bottom of the reaction tower, a circulating water tank is connected to the bottom of the conical water collector, and a No. 1 water pipe is also connected to the bottom of the reaction tower, which introduces water into the conical water collector. The conical water collector is connected to a horizontal pipe on one side, and multiple atomizing nozzles are distributed inside the horizontal pipe. The atomizing nozzles are connected to a second water pipe installed on the horizontal pipe. The end of the horizontal pipe is connected to a spray tower, and the bottom of the spray tower is connected to a circulating water tank. Multiple hollow rings are installed inside the spray tower, and the outer ring of each hollow ring is connected to a branch pipe. The branch pipes extend to the outside of the spray tower and are connected to a main pipe. The main pipe is connected to the circulating water tank through a water pump. Spray holes are opened in the inner ring of the hollow ring.

[0007] Preferably, the outer wall of the reaction tower is provided with a protective shell, which overlaps with the effective heating part of the heating rod. The protective shell and the reaction tower form a cooling chamber, with an inlet pipe connected to the bottom of the cooling chamber and an outlet pipe connected to the top of the cooling chamber.

[0008] Preferably, the reaction tower is provided with multiple air inlet pipes on its outer side, the air inlet pipes penetrate the protective shell and communicate with the reaction tower, and the axis of the air inlet pipes is tangent to the inner wall of the reaction tower.

[0009] Preferably, multiple scrapers are provided between the reaction tower and the conical water collector. The surface of each scraper is attached to the surface of the reaction tower and the conical water collector. The bottom of the multiple scrapers is rotatably connected to a rotating shaft, which is supported inside the conical water collector by a crossbar.

[0010] Preferably, the inner surface of the horizontal tube is provided with a spiral tube body, which is connected to the No. 2 water pipe, and the surface of the tube body is provided with multiple atomizing nozzles, the water spraying direction of the atomizing nozzles being the same as the gas flow direction inside the horizontal tube.

[0011] Preferably, the spray tower is provided with a hollow spiral blade, with multiple water spray holes on the outer ring of the spiral blade, and multiple hollow connecting rods fixed to the inner ring of the spiral blade. The ends of the multiple connecting rods are fixed to a hollow rotating rod, and the ends of the rotating rods are rotatably connected to the inside of the spray tower through a support rod. The top of the rotating rod is rotatably connected to a rotating ring, and the rotating ring is connected to a water supply pipe, which is connected to the main pipe.

[0012] Preferably, the water spray direction of each of the spray holes is inclined, and the reaction force of the water spray from the spray holes drives the spiral blade to rotate.

[0013] Preferably, the spray tower is also equipped with a demisting screen inside the top, which is located above the spiral blades.

[0014] Preferably, each mesh of the defogging mesh is provided with an extension tube extending downwards, and the surface of the extension tube is provided with a plurality of capture plates arranged in a circumferential array.

[0015] Preferably, each scraper surface is provided with a rubber strip, which is attached to the surface of the reaction tower and the conical water collector and rotates.

[0016] The advantages of this invention are: 1. In this invention, the electrically heated water-washing exhaust gas treatment machine first performs high-temperature combustion on the exhaust gas to complete the oxidation reaction and produce harmless substances. Then, it performs water spraying to remove dust, separating the smoke and particulate matter in the gas and flushing them into the circulating water tank to prevent oxide substances from depositing on the inner wall of the reaction tower and the conical water collector, causing blockage problems. Then, it performs multi-stage water spraying to cool down the gas temperature to the emission standard, avoiding the emission of high-temperature gas and causing high-temperature damage to the electrically heated water-washing exhaust gas treatment machine, while reducing secondary pollution to the environment.

[0017] 2. In this invention, the intake pipe is used to supplement oxygen for the combustion of exhaust gas, thereby improving the combustion effect and oxidation reaction efficiency. It can also accelerate the supply of exhaust gas and supplement oxygen, which can improve the exhaust gas treatment efficiency and allow the exhaust gas to undergo a full oxidation reaction, thus improving the exhaust gas treatment effect. Furthermore, the axis of the intake pipe is tangentially set to the inner wall of the reaction tower. When oxygen is injected into the reaction tower, the oxygen flows along the surface of the inner wall of the reaction tower and pushes the exhaust gas to rotate around the heating rod. This can improve the contact effect between the exhaust gas and the surface of the heating rod, and also improve the mixing degree of oxygen and exhaust gas, which is also one of the specific ways to improve the combustion effect and oxidation reaction efficiency. Attached Figure Description

[0018] Figure 1 This is a perspective view of the electrically heated water-washing exhaust gas treatment machine of the present invention; Figure 2 This is a front view of the electrically heated water-washing exhaust gas treatment machine of the present invention; Figure 3 This is a perspective view of the heating rod in this invention; Figure 4 This is a cross-sectional view of the reaction tower in this invention; Figure 5 This is a perspective view of the combination of the reaction tower and the conical water collector in this invention; Figure 6 This is a perspective view of the cooperation between the scraper and the reaction tower in this invention; Figure 7 This is a perspective view of the scraper in this invention; Figure 8 This is a schematic diagram of the internal structure of the horizontal tube in this invention; Figure 9 This is a perspective view of the spray tower in this invention; Figure 10 This is a schematic diagram of the internal structure of the spray tower in this invention; Figure 11 This is a first-view perspective perspective view of the defogging mesh in this invention; Figure 12 This is a second-view perspective perspective view of the defogging mesh in this invention; Figure 13 for Figure 12 A magnified view of a portion of point A in the middle.

[0019] In the diagram: 1. Reaction tower; 2. Heating rod; 3. Air supply pipe; 4. Conical water collector; 5. Circulating water tank; 6. No. 1 water pipe; 7. Horizontal pipe; 8. Atomizing nozzle; 9. No. 2 water pipe; 10. Spray tower; 11. Hollow ring; 12. Branch pipe; 13. Main pipe; 14. Protective shell; 15. Cooling chamber; 16. Water inlet pipe; 17. Water outlet pipe; 18. Air inlet pipe; 19. Scraper; 20. Rotating shaft; 21. Pipe body; 22. Spiral blade; 23. Connecting rod; 24. Rotating rod; 25. Support rod; 26. Rotating ring; 27. Water supply pipe; 28. Demisting net; 29. ​​Extension pipe; 30. Capturing plate. Detailed Implementation

[0020] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0021] Reference Figure 1 - Figure 5 An electrically heated water-washing exhaust gas treatment machine includes a reaction tower 1, with multiple heating rods 2 arranged in a circular array at the top of the reaction tower 1, multiple gas supply pipes 3 connected to the top of the reaction tower 1, a conical water collector 4 connected to the bottom of the reaction tower 1, a circulating water tank 5 connected to the bottom of the conical water collector 4, and a No. 1 water pipe 6 connected to the bottom of the reaction tower 1, which introduces water into the conical water collector 4. The conical water collector 4 is connected to a horizontal pipe 7 on one side. Multiple atomizing nozzles 8 are distributed inside the horizontal pipe 7. The atomizing nozzles 8 are connected to a second water pipe 9 installed on the horizontal pipe 7. The end of the horizontal pipe 7 is connected to a spray tower 10. The bottom of the spray tower 10 is connected to a circulating water tank 5. Multiple hollow rings 11 are installed inside the spray tower 10. Each hollow ring 11 is connected to a branch pipe 12 on its outer ring. The branch pipe 12 extends to the outside of the spray tower 10 and is connected to a main pipe 13. The main pipe 13 is connected to the circulating water tank 5 through a water pump. Spray holes are opened on the inner ring of the hollow ring 11. The exhaust gas is injected into the reaction tower 1 through the gas supply pipe 3, simultaneously driving the heating rod 2 to operate. The heating rod 2 can operate at 3-5... The gas is heated to 900-1200℃. The exhaust gas comes into contact with the heating rod 2 and undergoes an oxidation reaction. The generated gas and dust move downward along the reaction tower 1. Water pipe 6 introduces water into the conical water collector 4 and sprays it in an atomized state, which comes into contact with the gas and dust. The conical water collector 4 quickly gathers and guides the dispersed droplets, quickly flushing the dust and particulate matter into the circulating water tank 5, so that the gas is separated from the dust and particulate matter. At the same time, the high-temperature gas moves along the horizontal pipe 7, and the atomizing nozzle 8 in the horizontal bar sprays water to cool it down, which can reduce the gas temperature to between 45-60℃. Then it flows upward along the spray tower 10. The water pump injects water into the main pipe 13. The water flows in multiple directions along the branch pipe 12 and finally sprays out from the spray hole on the hollow ring 11 to cool the gas again. At this time, the gas temperature can be reduced to between 30-35℃. The gas temperature is reduced to the preset temperature and then discharged from the top of the spray tower 10. This electrically heated water-washing exhaust gas treatment machine first performs high-temperature combustion on the exhaust gas to complete the oxidation reaction and produce harmless substances. Then, it sprays water to remove dust, separating the smoke and particulate matter in the gas and flushing them into the circulating water tank 5. This prevents oxides from depositing on the inner walls of the reaction tower 1 and the conical water collector 4, which could cause blockages. Next, the gas temperature is reduced to the emission standard through multi-stage water spraying, avoiding the emission of high-temperature gas that could damage the electrically heated water-washing exhaust gas treatment machine and reducing secondary pollution to the environment.

[0022] Reference Figure 1 - Figure 5 The outer wall of the reaction tower 1 is provided with a protective shell 14, which overlaps with the effective heating part of the heating rod 2. The protective shell 14 and the reaction tower 1 form a cooling chamber 15. The bottom of the cooling chamber 15 is connected to a water inlet pipe 16, and the top of the cooling chamber 15 is connected to a water outlet pipe 17. The heat generated by heating rod 2 will radiate to the side wall of reaction tower 1. Due to prolonged heating, the side wall of reaction tower 1 will be damaged by high temperature and its strength will be compromised. In particular, the temperature of the part of reaction tower 1 that overlaps with heating rod 2 can reach 700-900℃. Therefore, it is necessary to cool down reaction tower 1, and the cooling part only needs to be the part that overlaps with heating rod 2. Specifically, a protective shell 14 is set up. The protective shell 14 and the side wall of reaction tower 1 form a cooling chamber 15. Cooling water flows in from the inlet pipe 16 and is discharged from the outlet pipe 17, continuously exchanging heat with the surface of the side wall of reaction tower 1 to reduce the temperature of the side wall of reaction tower 1 to a preset temperature, thereby protecting reaction tower 1 and extending its service life.

[0023] Reference Figure 1 - Figure 7The reaction tower 1 is provided with multiple air inlet pipes 18 on its outer side. The air inlet pipes 18 penetrate the protective shell 14 and communicate with the reaction tower 1. The axis of the air inlet pipes 18 is tangent to the inner wall of the reaction tower 1. The intake pipe 18 is used to supplement oxygen for the combustion of exhaust gas, improve combustion efficiency and oxidation reaction efficiency, and accelerate the supply of exhaust gas. By supplementing oxygen, it can improve exhaust gas treatment efficiency and ensure that the exhaust gas undergoes a full oxidation reaction, thereby improving the exhaust gas treatment effect. Furthermore, the axis of the intake pipe 18 is tangentially set to the inner wall of the reaction tower 1. When oxygen is injected into the reaction tower 1, the oxygen flows along the inner wall surface of the reaction tower 1 and pushes the exhaust gas to rotate around the heating rod 2. This can improve the contact effect between the exhaust gas and the surface of the heating rod 2, and also improve the mixing degree of oxygen and exhaust gas, which is also one of the specific ways to improve combustion efficiency and oxidation reaction efficiency.

[0024] Reference Figure 1 - Figure 7 Multiple scrapers 19 are provided between the reaction tower 1 and the conical water collector 4. The surface of each scraper 19 is attached to the surface of the reaction tower 1 and the conical water collector 4. The bottom of the multiple scrapers 19 is rotatably connected to a rotating shaft 20. The rotating shaft 20 is mounted inside the conical water collector 4 by a crossbar. Multiple scrapers 19 are rotatably connected to the conical water collector 4 via a rotating shaft 20. During the process of oxygen injection into the reaction tower 1, the oxygen generates a thrust on the scrapers 19, and multiple air inlet pipes 18 supply oxygen simultaneously, which can drive the scrapers 19 to rotate within the reaction tower 1 and the conical water collector 4. During the rotation, the scrapers 19 scrape off the dust particles attached to the inner walls of the reaction tower 1 and the conical water collector 4, allowing the combustion products to fall quickly into the circulating water tank 5. The scrapers mainly clean the inner walls of the reaction tower 1 to prevent dust particles from adhering layer by layer for a long time and causing blockage inside the reaction tower 1. The inner walls of the conical water collector 4 can be cleaned by spraying cooling water through the No. 1 water pipe 6.

[0025] Reference Figure 1 and Figure 8 The inner surface of the horizontal pipe 7 is provided with a spiral tube body 21, which is connected to the second water pipe 9. The surface of the tube body 21 is provided with multiple atomizing nozzles 8, and the water spraying direction of the atomizing nozzles 8 is the same as the gas flow direction inside the horizontal pipe 7. The spiral tube 21, along with multiple atomizing nozzles 8, allows the water sprayed from the atomizing nozzles 8 to not only cool the gas after it flows into the horizontal tube 7, but also to promote gas flow and increase the flow speed of the gas in the horizontal tube 7. Furthermore, the cooling water sprayed by the spirally arranged atomizing nozzles 8 can fully contact the gas, thereby improving the cooling effect.

[0026] Reference Figure 1 , Figure 9 and Figure 10The spray tower 10 is provided with a hollow spiral blade 22. Multiple water spray holes are opened on the outer ring of the spiral blade 22. Multiple hollow connecting rods 23 are fixedly connected to the inner ring of the spiral blade 22. The ends of the multiple connecting rods 23 are fixedly connected to a hollow rotating rod 24. The end of the rotating rod 24 is rotatably connected to the inside of the spray tower 10 through a support rod 25. The top of the rotating rod 24 is rotatably connected to a rotating ring 26. The rotating ring 26 is connected to a water supply pipe 27, and the water supply pipe 27 is connected to the main pipe 13. The rotating ring 26 has an outlet on its inner ring and an inlet on the overlapping part of the rotating rod 24. The inner ring of the rotating ring 26 is rotatably connected to the rotating rod 24, and the outlet and inlet are connected. Cooling water flows sequentially along the water supply pipe 27, the rotating ring 26, the outlet and the inlet into the hollow rotating rod 24, and then along the hollow connecting rod 23 into the hollow spiral blade 22, and is discharged from the spray holes on the surface of the spiral blade 22. This design allows the sprayed water to not only cool the gas, but also to thoroughly flush and clean the inner wall of the spray tower 10, keeping the inner wall of the spray tower 10 clean at all times.

[0027] Reference Figure 1 , Figure 9 and Figure 10 Each of the spray holes is inclined in the direction of water spraying, and the reaction force of the water spraying from the spray hole drives the spiral blade 22 to rotate. The setting of the water spray direction of the spray holes will generate an opposite thrust during the water spraying process. That is, the thrust is opposite to the water spray direction, which will generate a rotational driving force on the spiral blade 22. Multiple spray holes spray water simultaneously, pushing the spiral blade 22 to rotate. As the spiral blade 22 rotates, the spraying direction of the water holes increases further. At the same time, the rotation of the spiral blade 22 will also generate an upward thrust on the gas, increasing the gas flow speed. Because the spray angle and volume are increased, it can cope with the cooling of high-speed flowing gas and improve the gas cooling efficiency.

[0028] Reference Figure 2 and Figure 11 The spray tower 10 is also equipped with a demisting net 28 inside the top, which is located above the spiral blade 22; After the gas is cooled by water washing, it carries a large amount of liquid water mist. The mist droplets collide with the demisting net 28 and then coalesce into a liquid film, separating the gas and the liquid water mist. The liquid water mist coalesces into a liquid film and flows back into the circulating water tank 5 by gravity, realizing the recycling of cooling water and protecting downstream equipment, such as fans, from operating with water.

[0029] Reference Figure 11 - Figure 13 Each mesh of the defogging mesh 28 is provided with an extension tube 29 extending downwards, and a plurality of capture plates 30 are arranged in a circumferential array on the surface of the extension tube 29. The extension tube 29 provided in the demisting net 28 extends the contact path between the gas and the demisting net 28, improving the liquid water mist collection effect. The capture plate 30 provided on the surface of the extension tube 29 increases the contact area between the demisting net 28 and the gas, which is also a specific way to improve the liquid water mist collection effect.

[0030] Reference Figure 7 Each scraper 19 is provided with a rubber strip on its surface, and the rubber strip is attached to the surface of the reaction tower 1 and the conical water collector 4 and rotates. Rubber strips are provided on the surface of scraper 19, and scraper 19 is in soft contact with the inner wall of reaction tower 1, which improves the scraping and cleaning effect of scraper 19 on dust particles.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electrically heated water-washing exhaust gas treatment machine, characterized in that: The system includes a reaction tower, with multiple heating rods arranged in a circular array at the top of the reaction tower. The top of the reaction tower is connected to multiple gas supply pipes, and the bottom of the reaction tower is connected to a conical water collector. The bottom of the conical water collector is connected to a circulating water tank, and the bottom of the reaction tower is also connected to a No. 1 water pipe, which introduces water into the conical water collector. The conical water collector is connected to a horizontal pipe on one side, and multiple atomizing nozzles are distributed inside the horizontal pipe. The atomizing nozzles are connected to a second water pipe installed on the horizontal pipe. The end of the horizontal pipe is connected to a spray tower, and the bottom of the spray tower is connected to a circulating water tank. Multiple hollow rings are installed inside the spray tower, and the outer ring of each hollow ring is connected to a branch pipe. The branch pipes extend to the outside of the spray tower and are connected to a main pipe. The main pipe is connected to the circulating water tank through a water pump. Spray holes are opened in the inner ring of the hollow ring.

2. The electrically heated water-washing exhaust gas treatment machine according to claim 1, characterized in that: The outer wall of the reaction tower is provided with a protective shell, which overlaps with the effective heating part of the heating rod. The protective shell and the reaction tower form a cooling chamber. The bottom of the cooling chamber is connected to a water inlet pipe, and the top of the cooling chamber is connected to a water outlet pipe.

3. The electrically heated water-washing exhaust gas treatment machine according to claim 2, characterized in that: The reaction tower is equipped with multiple air inlet pipes on its outer side. The air inlet pipes penetrate the protective shell and communicate with the reaction tower, and the axis of the air inlet pipes is tangent to the inner wall of the reaction tower.

4. The electrically heated water-washing exhaust gas treatment machine according to claim 3, characterized in that: Multiple scrapers are provided between the reaction tower and the conical water collector. The surface of each scraper is attached to the surface of the reaction tower and the conical water collector. The bottom of the multiple scrapers is rotatably connected to a rotating shaft, which is supported inside the conical water collector by a crossbar.

5. The electrically heated water-washing exhaust gas treatment machine according to claim 1, characterized in that: The inner surface of the horizontal tube is provided with a spiral tube body, which is connected to the No. 2 water pipe. The surface of the tube body is provided with multiple atomizing nozzles, and the water spraying direction of the atomizing nozzles is the same as the gas flow direction inside the horizontal tube.

6. The electrically heated water-washing exhaust gas treatment machine according to claim 1, characterized in that: The spray tower is equipped with hollow spiral blades. Multiple water spray holes are opened on the outer ring of the spiral blades. Multiple hollow connecting rods are fixed to the inner ring of the spiral blades. The ends of the multiple connecting rods are fixed to hollow rotating rods. The ends of the rotating rods are rotatably connected to the inside of the spray tower through support rods. A rotating ring is rotatably connected to the top of the rotating rod. The rotating ring is connected to a water supply pipe, which is connected to the main pipe.

7. The electrically heated water-washing exhaust gas treatment machine according to claim 6, characterized in that: Each of the water spray holes is inclined in the direction of water spraying, and the reaction force of the water spray from the water spray holes drives the spiral blade to rotate.

8. The electrically heated water-washing exhaust gas treatment machine according to claim 6, characterized in that: The spray tower is also equipped with a demisting screen inside the top, which is located above the spiral blades.

9. The electrically heated water-washing exhaust gas treatment machine according to claim 8, characterized in that: Each mesh of the defogging mesh has an extension tube extending downwards, and multiple capture plates are arranged in a circumferential array on the surface of the extension tube.

10. The electrically heated water-washing exhaust gas treatment machine according to claim 4, characterized in that: Each scraper surface is provided with a rubber strip, which is attached to the surface of the reaction tower and the conical water collector and rotates.

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