FMM with handheld area and predetermined fracture structure and rear section processing method thereof

Abstract

The invention discloses an FMM with a handheld area and a predetermined fracture structure and a rear section processing method of the FMM, and belongs to the field of OLED display panel manufacturing. The structure comprises a product area and handheld areas located on the two sides of the product area. A predetermined fracture structure is arranged at the boundary position of the handheld area and the product area, the predetermined fracture structure comprises a rectangular wire groove located in the A face and a plurality of round holes which are located in the B face, right face the rectangular wire groove and are distributed at equal intervals, and the rectangular wire groove and the round holes are all distributed along the boundary line of the handheld area and the product area; in the post-treatment process, the holding width is equal to the holding width of the handheld area for testing, checking and feeding and discharging operation, and it is guaranteed that complete products on the inner side are not contacted; and after the product is tested to be qualified, holding the handheld area by hand, and bending up and down for multiple times along the preset fracture structure, so that the handheld area is tidily fractured along a preset path and is separated from the product area on the inner side.

Description

Technical Field

[0001] This invention belongs to the field of OLED display panel manufacturing, specifically relating to an FMM with a handheld area and a predetermined fracture structure and its subsequent processing method. Background Technology

[0002] After all pattern processing is completed, the precision metal mask (FMM) presents a sheet-like product form containing effective areas and surrounding ineffective areas. In the subsequent processes, the product needs to undergo multiple tests, inspections, and loading / unloading operations before finally being packaged and shipped.

[0003] Currently, operators face two major challenges in this process: First, during testing and loading / unloading, without a dedicated handheld area, operators can only contact the vicinity of the product's effective area, which can easily lead to plastic damage to the FMM or contamination due to hand contact. Second, before final shipment, the peripheral ineffective area needs to be separated from the effective area. Traditional separation methods, such as cutting or breaking, pose a risk of stress concentration damaging the effective area or introducing contamination, which seriously affects the product's factory quality and yield. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide an FMM with a handheld area and a predetermined fracture structure, as well as a subsequent processing method thereon, thereby solving the problems in the prior art.

[0005] The objective of this invention can be achieved through the following technical solutions: An FMM with a handheld area and a predetermined fracture structure includes a product area and handheld areas located on both sides of the product area; a predetermined fracture structure is provided at the junction of the handheld area and the product area, the predetermined fracture structure includes a rectangular groove on surface A and a plurality of circular holes on surface B and opposite to the rectangular groove, which are distributed at equal intervals, and the rectangular groove and the circular holes are distributed along the junction of the handheld area and the product area.

[0006] Furthermore, the width of the handheld area is 10-30mm.

[0007] Furthermore, the width of the rectangular groove is 15-30μm, and the length of the rectangular groove extends through the entire handheld area.

[0008] Furthermore, the depth of the rectangular groove is 1 / 2 of the thickness of the FMM product.

[0009] Furthermore, the diameter of the circular hole is 10-50 μm, and the spacing between adjacent circular holes is 80-120 μm.

[0010] Furthermore, the depth of the circular hole is 1 / 3 of the thickness of the FMM product.

[0011] Furthermore, the circular holes and rectangular grooves are formed by a double-sided photolithography etching process.

[0012] Furthermore, the product area is rectangular; the handheld area is located on both sides of the short side of the product area and is also rectangular, with the length of the handheld area being equal to the width of the product area.

[0013] Furthermore, the rectangular groove has a width of 20 μm and a depth of 12 μm; the circular hole has a diameter of 30 μm and a depth of 8 μm.

[0014] The above-mentioned post-processing method for an FMM with a handhold area and a predetermined fracture structure includes the following steps: S1, the grip width is for testing, inspection and loading / unloading operations in the hand area, without touching the complete product inside; S2, after the product passes the test, hold the hand area and bend it up and down several times along the predetermined fracture structure, so that the hand area breaks neatly along the predetermined path and separates from the product area inside.

[0015] The beneficial effects of this invention are: 1. This invention innovatively sets up a 10-30 mm wide peripheral invalid area as a handhold area outside the customer-defined complete product, and designs a set of predetermined fracture structures on the inner edge of this handhold area. This structure clearly separates the complete product from the handhold area, providing both a stable grip during testing and a clean separation during shipment.

[0016] 2. This invention, through the asymmetric collaborative design of rectangular array on side A and circular hole array on side B, ensures sufficient strength of the handheld area during testing and achieves neat breakage and rapid separation of the handheld area along a predetermined path during shipment; moreover, the area to be separated can be neatly and smoothly separated along the predetermined path without additional tools, without generating macroscopic stress, thus ensuring the edge quality and geometric integrity of the product.

[0017] 3. The post-processing method of the present invention integrates damage prevention operation and non-destructive separation into one unit. The integrated design simplifies the post-processing, reduces the requirements for operating skills and the scrap rate caused by improper processing, and improves production efficiency and economic benefits. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the FMM structure in Example 1. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] An FMM with a handheld area and a predetermined fracture structure includes a product area and handheld areas located on both sides of the product area; a predetermined fracture structure is provided at the junction of the handheld area and the product area, the predetermined fracture structure includes a rectangular groove on surface A and a plurality of circular holes (blind holes) distributed at equal intervals on surface B and opposite to the rectangular groove, the rectangular groove and the circular holes are distributed along the junction line of the handheld area and the product area. It should be noted that in this embodiment, the rectangular groove and the round hole can intersect with both the handheld area and the product area. Although the edge integrity of the product area is affected after the handheld area is broken off, this integrity does not affect the final quality of the FMM product or its downstream applications. Of course, in other embodiments, the rectangular groove and the round hole can also be set on the handheld area near the edge of the product area, so that the edge integrity of the product area is better after breaking off.

[0022] The product area can be in various shapes, such as rectangles; the width of the handheld area is 10-30mm, meaning the distance between the end of the handheld area furthest from the product area and the product area is 10-30mm. The width of the rectangular groove is 15-30μm, and the length of the rectangular groove runs through the entire handheld area; the depth of the rectangular groove is 1 / 2 the thickness of the FMM product. The diameter of the circular holes is 10-50μm, the spacing between adjacent circular holes is 80μm, and the depth of the circular holes is 1 / 3 of the thickness of the FMM product.

[0023] The positional relationship between the width of the rectangular groove and the circular hole is as follows: the center of the circular hole is located on the central axis of the groove width.

[0024] The circular holes and rectangular grooves can be formed by double-sided photolithography etching process. Specifically, photoresist is coated on both sides A and B of the substrate, and a photomask with circular holes and rectangular grooves is used to perform lamination, exposure and development on both sides A and B respectively.

[0025] A post-processing method for the aforementioned precision metal photomask includes the following steps: S1, Test grip: During the testing, inspection and loading / unloading of FMM products, operators shall hold the hand area with a width of 15-30 mm for all operations to ensure that they do not touch the intact product inside. S2, Shipping Separation: When the product is qualified and ready for packaging and shipment, the operator holds the holding area and bends it up and down several times along the predetermined fracture structure, so that the holding area breaks neatly along the predetermined path and separates from the complete product inside.

[0026] S3, Packaging and Shipment: The complete product, after the handle area has been separated, and conforming to the customer's definition, is packaged and shipped out.

[0027] Example 1 In this embodiment, the FMM product structure of the present invention is illustrated through a specific example; like Figure 1 As shown, the FMM product includes a product area and a handheld area, and the thickness of the FMM product is 24μm; The product area is a rectangle with a length of 1200mm and a width of 75mm; the handheld area is located on both sides of the short side of the product area, and is also a rectangle with a length of 75mm and a width of 20mm. At the junction of the product area and the handheld area, a predetermined fracture structure is fabricated using a double-sided photolithography etching process. The predetermined fracture structure includes a rectangular groove on surface A, with a width of 20 μm and a length of 75 mm. The predetermined fracture structure also includes multiple circular holes on surface B, which are equidistant from the rectangular groove. The diameter of the circular holes is 30 μm and the center distance between adjacent circular holes is 80 μm. In this embodiment, the depth of the rectangular groove is 12μm and the depth of the circular hole is 8μm.

[0028] Example 2 In this embodiment, the post-processing flow of the FMM product in Example 1 is described; The post-processing workflow includes: Testing phase: The operator firmly holds the 20 mm wide handheld area and places the plate with a total size of 1240 (1200+20+20) mm × 75 mm into the testing machine. Throughout the process, the fingers do not make any contact with the complete 1200 mm × 75 mm product.

[0029] Shipping stage: After passing the test, the operator holds the holding area and repeatedly bends it along the predetermined fracture structure at the junction to completely separate the holding area from the product area, obtaining the final product of 1200 mm × 75 mm required by the customer, which is then packaged and shipped out of the factory.

[0030] To verify the advantages of the FMM product structure in Example 1, in this example, the above post-processing operation was performed on 123 FMM products. After the operation, the number of qualified final products (products after removing the hand-held area) was counted. The results showed that: 1 product had a defective cutting line, with a defect rate of less than 1%, and 5 products had broken parts, with a defect rate of less than 5%.

[0031] The criteria for judging the final product to be qualified are as follows: the inspector conducts a visual inspection, places the product on an optical inspection table to observe whether the cutting line is offset or missing, and whether the product is damaged.

[0032] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. An FMM with a handheld area and a predetermined fracture structure, characterized in that, It includes a product area and handheld areas on both sides of the product area; a predetermined fracture structure is provided at the junction of the handheld area and the product area. The predetermined fracture structure includes a rectangular groove on surface A and multiple circular holes on surface B that are equidistant from the rectangular groove. The rectangular groove and the circular holes are distributed along the junction of the handheld area and the product area.

2. The FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The width of the handheld area is 10-30mm.

3. The FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The width of the rectangular groove is 15-30μm, and the length of the rectangular groove extends through the entire handheld area.

4. The FMM with a handheld area and a predetermined fracture structure according to claim 3, characterized in that, The depth of the rectangular groove is 1 / 2 of the thickness of the FMM product.

5. An FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The diameter of the circular hole is 10-50 μm, and the distance between adjacent circular holes is 80-120 μm.

6. The FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The depth of the circular hole is 1 / 3 of the thickness of the FMM product.

7. An FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The circular holes and rectangular grooves are formed by double-sided photolithography etching.

8. An FMM with a handheld area and a predetermined fracture structure according to claim 1, characterized in that, The product area is rectangular; the handheld area is located on both sides of the short side of the product area and is also rectangular, with the length of the handheld area being equal to the width of the product area.

9. An FMM with a handheld area and a predetermined fracture structure according to claim 8, characterized in that, The rectangular groove has a width of 20 μm and a depth of 12 μm; the circular hole has a diameter of 30 μm and a depth of 8 μm.

10. A post-processing method for an FMM with a handheld area and a predetermined fracture structure as described in any one of claims 1-9, characterized in that, Includes the following steps: S1, the grip width is for testing, inspection and loading / unloading operations in the hand area, without touching the complete product inside; S2, after the product passes the test, hold the hand area and bend it up and down several times along the predetermined fracture structure, so that the hand area breaks neatly along the predetermined path and separates from the product area inside.

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