Piezoelectric air pump, piezoelectric air pump system and air pump control method

Abstract

The invention provides a piezoelectric air pump, a piezoelectric air pump system and an air pump control method, the piezoelectric air pump comprises a double-vibrating-diaphragm structure, the double-vibrating-diaphragm structure comprises a first vibrating diaphragm, a cavity plate and a second vibrating diaphragm, the second vibrating diaphragm is provided with a first vent hole, and the cavity plate is provided with a through hole; the first vibrating diaphragm covers one side of the through hole, and the second vibrating diaphragm covers the other side of the through hole to form a first accommodating cavity; the shell comprises a side wall and a bottom shell provided with a second vent hole, the side wall is enclosed to form a second accommodating cavity, and the double-diaphragm structure is connected with the side wall through a connecting piece and is suspended in the second accommodating cavity; the second vent hole is positioned below the second vibrating diaphragm; the piezoelectric driving part is attached to the surface of the first vibrating diaphragm or / and the surface of the second vibrating diaphragm, and the piezoelectric driving part is used for driving the first vibrating diaphragm and the second vibrating diaphragm to move in opposite directions. According to the piezoelectric air pump, the air pumping efficiency of the piezoelectric air pump can be improved, and the service life of the piezoelectric air pump can be prolonged.

Description

Technical Field

[0001] This application belongs to the field of air pump technology, and more specifically, relates to a piezoelectric pump, a piezoelectric pump system, and an air pump control method. Background Technology

[0002] Traditional piezoelectric pumps typically consist of a piezoelectric ceramic plate and a diaphragm. They utilize the inverse piezoelectric effect of the ceramic plate to deform the diaphragm and thus deliver gas. Piezoelectric pumps are widely used in medical devices, laboratory instruments, consumer electronics, and other electronic equipment.

[0003] However, traditional piezoelectric pumps still have shortcomings that need to be addressed. For example, areas of large deformation in the piezoelectric ceramic sheet are prone to severe stress concentration, which accelerates material fatigue and significantly shortens the lifespan of the piezoelectric pump. Furthermore, traditional piezoelectric pumps have low efficiency in transporting gas. Summary of the Invention

[0004] To improve or solve the technical problems of short lifespan and low gas delivery efficiency of pneumatic electric pumps in related technologies, embodiments of this application provide a pneumatic electric pump, a pneumatic electric pump system, and a pump control method.

[0005] In a first aspect, embodiments of this application provide a piezoelectric pump, comprising: a dual-diaphragm structure, wherein the dual-diaphragm structure comprises at least two diaphragms, the dual-diaphragm structure comprising a first diaphragm, a cavity plate, and a second diaphragm, the cavity plate having a through hole, and the second diaphragm having a first vent hole; wherein the first diaphragm covers one side of the through hole, and the second diaphragm covers the other side of the through hole to form a first receiving cavity; a housing, the housing comprising a side wall and a bottom shell, the side wall enclosing to form a second receiving cavity, the dual-diaphragm structure being connected to the side wall via a connector, the dual-diaphragm structure being suspended within the second receiving cavity; the bottom shell having a second vent hole located below the second diaphragm, the first receiving cavity, the first vent hole, the second receiving cavity, and the second vent hole being interconnected; and a piezoelectric actuator, the piezoelectric actuator being attached to the surface of the first diaphragm and / or the surface of the second diaphragm, the piezoelectric actuator being used to drive the first diaphragm and the second diaphragm to move in opposite directions.

[0006] Furthermore, the piezoelectric drive component attached to the surface of the second diaphragm is provided with a third vent hole, which is provided in correspondence with the first vent hole.

[0007] Furthermore, the inner diameter of the target vent gradually decreases along a specified direction, or the inner diameter of the target vent gradually increases along a specified direction, or the inner diameter of the target vent first gradually decreases and then gradually increases along a specified direction; wherein, the specified direction is: the direction from the piezoelectric drive to the bottom shell on the central axis of the piezoelectric drive, and the target vent includes at least one of the following: the first vent, the second vent, and the third vent.

[0008] Furthermore, the inner diameter of the first vent is less than or equal to the inner diameter of the third vent, the inner diameter of the first vent is less than or equal to the inner diameter of the second vent, and the inner diameter of the third vent is less than or equal to the inner diameter of the second vent.

[0009] Furthermore, the second diaphragm is connected to the sidewall via a flexible connector, which includes a cantilever beam structure.

[0010] Furthermore, the outer contour of the first diaphragm is connected to the upper surface of the cavity plate, and the outer contour of the second diaphragm is connected to the lower surface of the cavity plate. The upper surface area, lower surface area, upper surface area, and lower surface area of ​​the first diaphragm are the same, and the upper surface shape, lower surface shape, upper surface shape, and lower surface shape of the second diaphragm are the same. The central axis of the piezoelectric drive, the central axis of the first diaphragm, the central axis of the second diaphragm, and the central axis of the housing coincide.

[0011] Furthermore, the piezoelectric driving element includes a circular piezoelectric ceramic sheet or an annular piezoelectric ceramic sheet.

[0012] Furthermore, the pneumatic pump has at least one of the following features: a. The number of the piezoelectric driving element is 1, the piezoelectric driving element is attached to the surface of the first diaphragm, and the thickness of the first diaphragm is 60%-100% of the thickness of the second diaphragm; b. The number of the piezoelectric driving element is 1, the piezoelectric driving element is attached to the surface of the second diaphragm, and the thickness of the second diaphragm is 60%-100% of the thickness of the first diaphragm; c. The piezoelectric drive component includes a piezoelectric ceramic sheet, the thickness of which is 40%-90% of the thickness of the first diaphragm. d. The piezoelectric drive component includes a piezoelectric ceramic sheet, the thickness of which is 40%-90% of the thickness of the second diaphragm. e. The piezoelectric drive component includes a circular piezoelectric ceramic sheet, the first diaphragm is a circular diaphragm, and the diameter of the circular piezoelectric ceramic sheet is 70%-90% of the diameter of the first diaphragm; f. The first diaphragm is a circular diaphragm, the diameter of the through hole is 70%-95% of the diameter of the first diaphragm, and the thickness of the cavity plate is 70%-120% of the thickness of the first diaphragm; g. The piezoelectric drive includes an annular piezoelectric ceramic sheet, wherein the inner diameter of the annular piezoelectric ceramic sheet is less than or equal to 50% of the outer diameter of the annular piezoelectric ceramic sheet.

[0013] Secondly, embodiments of this application provide a piezoelectric pump system, the piezoelectric pump system including at least two adjacent piezoelectric pumps, the adjacent sidewalls between the two adjacent piezoelectric pumps being integrally formed, or the adjacent sidewalls between the two adjacent piezoelectric pumps forming a Type II parallel structure.

[0014] Thirdly, embodiments of this application provide a method for controlling an air pump, comprising: acquiring a trigger command, the trigger command being a command for triggering the operation of a pneumatic electric pump system, the pneumatic electric pump system including two adjacent pneumatic electric pumps; controlling a designated power source to output an electric drive signal according to the trigger command, the electric drive signal being capable of driving two adjacent pneumatic electric pumps in the pneumatic electric pump system to operate, wherein the pneumatic electric pump system is electrically connected to the designated power source.

[0015] The piezoelectric pump of this application includes: a dual-diaphragm structure, a piezoelectric drive, and a housing. The dual-diaphragm structure comprises at least two diaphragms, including a first diaphragm, a cavity plate, and a second diaphragm. The cavity plate has a through hole, and the second diaphragm has a first vent hole. The first diaphragm covers one side of the through hole, and the second diaphragm covers the other side of the through hole to form a first receiving cavity. The housing includes a sidewall and a bottom shell. The sidewall encloses a second receiving cavity, and the dual-diaphragm structure is connected to the sidewall via a connector, suspending within the second receiving cavity. The bottom shell has a second vent hole. Two vents are located below the second diaphragm. The first receiving cavity, the first vent, the second receiving cavity, and the second vent are interconnected, forming a ventilation channel. A piezoelectric actuator is attached to the surface of the first diaphragm and / or the surface of the second diaphragm. The piezoelectric actuator drives the first and second diaphragms to move in opposite directions simultaneously, changing the volume of the first receiving cavity and allowing gas to flow in the ventilation channel, thus realizing the function of the piezoelectric pump in delivering gas. The piezoelectric pump in this application can drive a dual-diaphragm structure with lower input power consumption to deliver a larger volume of gas, thereby improving the efficiency of the piezoelectric pump in pumping gas and significantly reducing the working stress of the piezoelectric actuator, extending the service life of the piezoelectric pump. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is an exploded structural diagram of a pneumatic pump provided in one embodiment of this application; Figure 2 This is a schematic cross-sectional view of a pneumatic pump provided in an embodiment of this application.

[0018] Figure 3 This is a longitudinal cross-sectional view of a pneumatic pump provided in an embodiment of this application.

[0019] Figure 4 This is a longitudinal cross-sectional view of a high-pressure electric pump in the intake state.

[0020] Figure 5 This is a longitudinal cross-sectional view of the high-pressure electric pump in the exhaust state.

[0021] Figure 6 This is an exploded structural diagram of a pneumatic pump provided in another embodiment of this application.

[0022] Figure 7 This is a cross-sectional structural schematic diagram of a pneumatic pump provided in another embodiment of this application.

[0023] Figure 8 This is a schematic diagram of the structure of a pneumatic-electric pump system provided in an embodiment of this application.

[0024] Figure 9 This is a schematic diagram of the structure of a pneumatic-electric pump system provided in another embodiment of this application.

[0025] The attached figures are labeled as follows: Piezoelectric pump 10, dual-diaphragm structure 101, housing 102, piezoelectric drive 103, first diaphragm 1011, cavity plate 1012, second diaphragm 1013, through hole 10121, first vent hole 10131, side wall 1021, bottom shell 1022, connector 104, second vent hole 10221, third vent hole 1031, first piezoelectric pump 11, second piezoelectric pump 12, first side wall 111, second side wall 122, first side wall connector 105, third side wall 113, fourth side wall 124, inner wall surface of side wall 10211, side surface of connector 1041, side surface of dual-diaphragm structure 1014. Detailed Implementation

[0026] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0028] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0029] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0031] In the description of the embodiments in this application, the term "or / and" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0032] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0033] To improve or solve the technical problems of short lifespan and low gas delivery efficiency of traditional piezoelectric pumps in related technologies, in a first aspect, embodiments of this application provide a piezoelectric pump, see reference. Figures 1-3 As shown, the piezoelectric pump 10 includes: a dual-diaphragm structure 101, a housing 102, and a piezoelectric drive 103.

[0034] The dual-diaphragm structure 101 is a structure that includes at least two diaphragms. The dual-diaphragm structure 101 includes a first diaphragm 1011, a cavity plate 1012, and a second diaphragm 1013. The cavity plate 1012 is provided with a through hole 10121, and the second diaphragm 1013 is provided with a first vent hole 10131. The first diaphragm 1011 covers one side of the through hole 10121, and the second diaphragm 1013 covers the other side of the through hole 10121 to form a first receiving cavity.

[0035] The housing 102 includes a side wall 1021 and a bottom shell 1022. The side wall 1021 encloses and forms a second receiving cavity. The dual diaphragm structure 101 is connected to the side wall 1021 through a connector 104 and is suspended in the second receiving cavity. The bottom shell 1022 is provided with a second vent 10221, which is located below the second diaphragm 1013. The first receiving cavity, the first vent 10131, the second receiving cavity, and the second vent 10221 are connected.

[0036] The piezoelectric drive 103 is attached to the surface of the first diaphragm 1011 and / or the surface of the second diaphragm 1013. The piezoelectric drive 103 is used to drive the first diaphragm 1011 and the second diaphragm 1013 to move in opposite directions.

[0037] The first diaphragm 1011 is rigidly connected to the cavity plate 1012, and the second diaphragm 1013 is rigidly connected to the cavity plate 1012. The first diaphragm 1011, the cavity plate 1012, and the second diaphragm 1013 are stacked in sequence. The first diaphragm 1011 is located on the side of the cavity plate 1012 away from the bottom shell 1022, and the second diaphragm 1013 is located on the side of the cavity plate 1012 close to the bottom shell 1022. The cavity plate 1012 is used to provide a rigid frame to form a first receiving cavity. The first vent 10131 and the second vent 10221 are correspondingly arranged.

[0038] This dual-diaphragm structure achieves reverse motion by matching antisymmetric resonance modes. The vibration of the piezoelectric actuator synchronously and symmetrically drives the first and second diaphragms to vibrate in opposite phases through the cavity plate. When the first diaphragm vibrates downward to compress the first receiving cavity, the second diaphragm vibrates synchronously upward to compress the first receiving cavity; when the first diaphragm vibrates upward to expand the first receiving cavity, the second diaphragm vibrates synchronously downward to expand the first receiving cavity. The bidirectional coordinated vibration of the first and second diaphragms causes a volume change in the first receiving cavity.

[0039] In addition, since the housing includes a side wall 1021 and a bottom shell 1022, the side wall 1021 encloses and forms a second receiving cavity. The dual diaphragm structure 101 is connected to the side wall 1021 through the connector 104. The dual diaphragm structure 101 is suspended in the second receiving cavity. Therefore, the inner wall surface 10211 of the side wall, the side surface 1041 of the connector, and the side surface 1014 of the dual diaphragm structure can form multiple air inlets.

[0040] By way of example and not limitation, the cavity plate 1012 may be a first frame. The shape of the outer contour of the first frame, the shape of the outer contour of the first diaphragm 1011, and the shape of the outer contour of the second diaphragm 1013 may be the same. The first diaphragm 1011 and the second diaphragm 1013 are symmetrically distributed on the upper and lower sides of the first frame. The piezoelectric drive 103 is attached to the upper surface of the first diaphragm 1011 or the lower surface of the second diaphragm 1013. The outer contour of the first diaphragm 1011 is rigidly connected to the first frame, and the first frame is rigidly connected to the outer contour of the second diaphragm 1013. The sidewall 1021 and the bottom shell 1022 are integrally formed into a shell 102. Alternatively, the shell 102 includes a second frame and a bottom shell 1022, which are connected together. The sidewall of the second frame encloses a second receiving cavity, and the sidewall of the second frame is the sidewall 1021 of the shell 102. The second diaphragm 1013 is provided with a plurality of first vent holes 10131, and the bottom shell 1022 is provided with a plurality of second vent holes 10221. Each first vent hole 10131 may have at least one corresponding second vent hole 10221. Specifically, each first vent hole 10131 may have at least one second vent hole 10221 below it.

[0041] By way of example, and not limitation, the piezoelectric actuator may be made of a single-crystal piezoelectric material, a ceramic piezoelectric material, a thin-film piezoelectric material, or a polymeric piezoelectric material; no restrictions are placed on the material of the piezoelectric actuator. Specifically, the single-crystal piezoelectric material may be quartz, the ceramic piezoelectric material may be barium titanate or lead zirconate titanate, the thin-film piezoelectric material may be zinc oxide or polyvinylidene fluoride, and the polymeric piezoelectric material may be a natural or synthetic polymeric piezoelectric material.

[0042] In this embodiment, please refer to Figure 4 and Figure 5 The working principle of this piezoelectric pump is as follows: When energized, the piezoelectric actuator undergoes mechanical deformation, driving the dual-diaphragm structure to vibrate. When the first diaphragm is stretched upwards (away from the bottom shell 1022) and the second diaphragm is stretched downwards (closer to the bottom shell 1022), the volume of the first receiving cavity increases, the pressure inside the first receiving cavity decreases, and external gas can flow into the first receiving cavity through the air inlet, the second receiving cavity, and the first vent 10131. When the first diaphragm is stretched downwards and the second diaphragm is stretched upwards, the volume of the first receiving cavity decreases, the pressure inside the first receiving cavity increases, and gas inside the first receiving cavity can flow out through the first vent 10131, the second receiving cavity, and the second vent. Through the continuous action of alternating voltage, continuous gas pumping function can be achieved.

[0043] Traditional single-diaphragm piezoelectric pumps rely solely on the unidirectional bending of a single diaphragm for volume change, resulting in asymmetrical unidirectional pumping with limited gas delivery per unit time and poor dynamic stability. In contrast, the dual-diaphragm structure of this application achieves a doubling of the volume change amplitude of the first receiving cavity through the bidirectional coordinated vibration of the first and second diaphragms. Driven by a specified voltage and frequency, it generates a larger intracavity pressure difference, significantly increasing the volume of fluid drawn in and expelled per unit time, thus substantially increasing the gas delivery capacity. Furthermore, in the resonant state, the piezoelectric actuator requires only a small driving force to excite large-amplitude vibrations of both the first and second diaphragms, effectively reducing system power consumption. When the two diaphragms move in opposite directions, the fluid in the first receiving cavity is subjected to "bidirectional compression / stretching," resulting in higher stability of the output fluid.

[0044] Optionally, the number of piezoelectric actuators in a single piezoelectric pump is 1, and the piezoelectric actuator 103 is attached to the surface of the first diaphragm 1011 or the surface of the second diaphragm 1013.

[0045] In some embodiments, the piezoelectric drive 103 is attached to the surface of the first diaphragm 1011, and the thickness of the first diaphragm 1011 is less than the thickness of the second diaphragm 1013.

[0046] In some embodiments, the piezoelectric drive member 103 is attached to the surface of the second diaphragm 1013, and the thickness of the second diaphragm 1013 is less than the thickness of the first diaphragm 1011.

[0047] As can be seen from the above, the thickness of the diaphragm with the piezoelectric actuator attached can be less than the thickness of the diaphragm without the piezoelectric actuator attached, thus ensuring effective structural coupling and driving efficiency.

[0048] Optionally, the piezoelectric pump 10 includes a first electrode and a second electrode. The first electrode is disposed on the surface of the piezoelectric drive 103 opposite to the dual diaphragm structure 101, and the second electrode is electrically connected to the dual diaphragm structure 101.

[0049] By way of example and not limitation, the dual-diaphragm structure is made of metal, and the electrical connection between the second electrode and the dual-diaphragm structure 101 may include: the second electrode being electrically connected to any position of the dual-diaphragm structure 101, i.e., the second electrode being directly connected to the dual-diaphragm structure 101; or, the dual-diaphragm structure 101 and the connector are both made of metal, and the second electrode is connected to the connector, i.e., the second electrode is indirectly connected to the dual-diaphragm structure 101; or, the dual-diaphragm structure, the connector, and the side wall 1021 of the housing are all made of metal, and the second electrode is connected to the side wall 1021 of the housing 102, i.e., the second electrode is indirectly connected to the dual-diaphragm structure 101.

[0050] By way of example and not limitation, the piezoelectric actuator 103 is attached to the upper surface of the first diaphragm 1011, that is, the lower surface of the piezoelectric actuator 103 is connected to the upper surface of the first diaphragm 1011, the first electrode is disposed on the upper surface of the piezoelectric actuator, and the second electrode is disposed on the upper surface of the first diaphragm 1011.

[0051] In this embodiment, the piezoelectric pump can be connected to a designated power source through the first electrode and the second electrode. The designated power source can apply an alternating sinusoidal voltage close to the system resonant frequency through the first electrode and the second electrode, thereby ensuring the maximum amplitude output and the highest energy conversion efficiency under the alternating sinusoidal voltage.

[0052] Optionally, the number of piezoelectric actuators in a single piezoelectric pump is two. For ease of description, the two piezoelectric actuators can be named the first actuator and the second actuator, respectively. The first actuator is the piezoelectric actuator attached to the surface of the first diaphragm 1011, and the second actuator is the piezoelectric actuator attached to the surface of the second diaphragm 1013. This is the case where the piezoelectric actuator 103 is attached to the surface of the first diaphragm 1011 and the surface of the second diaphragm 1013.

[0053] As an example, and not a limitation, the positive electrode of the first driving element is attached to the upper surface of the first diaphragm in the dual-diaphragm structure, and the positive electrode of the second driving element is attached to the lower surface of the second diaphragm in the dual-diaphragm structure. The negative electrodes of both the first and second driving elements are connected to the positive electrode of the same designated power supply, and the negative electrode of the designated power supply is electrically connected to the dual-diaphragm structure. In this way, the first and second diaphragms can be driven synchronously and symmetrically to vibrate in opposite phases. The positive and negative electrodes of the first and second driving elements are formed through polarization processing.

[0054] Optionally, the second diaphragm 1013 is connected to the side wall 1021 via a flexible connector, which includes a cantilever beam structure. This configuration significantly reduces mechanical stiffness, effectively concentrates vibration energy to the driving gas, effectively reduces useless energy dissipation to the housing, reduces power consumption, and helps to increase the cross-sectional area of ​​the air inlet, thereby reducing gas flow resistance and improving the energy conversion efficiency of the piezoelectric pump.

[0055] By way of example and not limitation, the cantilever beam structure is a sheet / strip cantilever beam, which provides good flexible support. The second diaphragm 1013 is connected to the sidewall 1021 via four cantilever beams. The first end of each cantilever beam is connected to the second diaphragm 1013, and the second end of each cantilever beam is connected to the sidewall 1021. Specifically, the connection of the second end of each cantilever beam to the sidewall 1021 includes: the second end of each cantilever beam is connected to the inner angle of the sidewall, where the inner angle is the inner angle formed at the junction of two adjacent inner wall surfaces in the sidewall 1021. This arrangement allows for a longer flexible connector, reducing vibration energy loss and ensuring that most of the input electrical energy is used to drive airflow, thus improving the working efficiency of the piezoelectric fan.

[0056] Optionally, the outer contour of the first diaphragm 1011 is connected to the upper surface of the cavity plate 1012, and the outer contour of the second diaphragm 1013 is connected to the lower surface of the cavity plate 1012. The upper surface area, lower surface area, upper surface area, and lower surface area of ​​the first diaphragm 1011 and second diaphragm 1013 are the same. The upper and lower surface shapes of the first diaphragm 1011 and second diaphragm 1013 are also the same. The central axis of the piezoelectric drive 103, the central axis of the first diaphragm 1011, the central axis of the second diaphragm, and the central axis of the housing 102 coincide. The geometric design of the dual-diaphragm structure in this embodiment ensures the symmetry and stability of the motion / vibration.

[0057] When not powered on, the surface of the piezoelectric actuator connected to the dual-diaphragm structure is perpendicular to the central axis of the piezoelectric actuator 103, the central axis of the first diaphragm 1011 is perpendicular to the upper / lower surface of the first diaphragm 1011, and the central axis of the second diaphragm 1013 is perpendicular to the upper / lower surface of the second diaphragm 1013.

[0058] By way of example and not limitation, the upper surface shape of the first diaphragm 1011, the lower surface shape of the first diaphragm 1011, the upper surface shape of the second diaphragm 1013, and the lower surface shape of the second diaphragm 1013 are all circular or rectangular. The outer contour of the first diaphragm 1011 is rigidly connected to the upper surface of the cavity plate 1012, and the outer contour of the second diaphragm is rigidly connected to the lower surface of the cavity plate 1012.

[0059] In some embodiments, the piezoelectric actuator 103 includes a rectangular piezoelectric ceramic sheet.

[0060] In some embodiments, the piezoelectric drive 103 includes a circular piezoelectric ceramic sheet or an annular piezoelectric ceramic sheet.

[0061] If the piezoelectric ceramic sheet is circular or annular, stress concentration can be avoided geometrically, achieving stress uniformity during vibration and effectively improving device lifespan.

[0062] As an example, and not a limitation, the piezoelectric ceramic sheet is made of lead zirconate titanate.

[0063] Optionally, the second diaphragm 1013 is provided with a plurality of first vent holes 10131, the density of the first vent holes 10131 near the center of the second diaphragm is greater than the density of the first vent holes 10131 far from the center of the second diaphragm, or / and, the inner diameter of the first vent holes 10131 near the center of the second diaphragm is greater than the inner diameter of the first vent holes 10131 far from the center of the second diaphragm. The center of the second diaphragm is the center of the second diaphragm 1013.

[0064] As an example and not a limitation, the density of the first vent 10131 near the center of the second diaphragm is greater than that of the first vent 10131 far from the center of the second diaphragm, including the following: the density of the first vent 10131 decreases in a gradient from the center of the second diaphragm to the outer contour of the second diaphragm.

[0065] Arranging denser or / and larger first vent holes 10131 in the antinode region where the vibration amplitude is largest can effectively enhance pumping efficiency.

[0066] Optionally, the second diaphragm 1013 is provided with a plurality of first vent holes 10131, the first vent holes 10131 being evenly distributed on the second diaphragm, and / or the inner diameter of each first vent hole 10131 being equal.

[0067] Optionally, see Figure 6 and Figure 7 The piezoelectric drive 103, which is attached to the surface of the second diaphragm 1013, is provided with a third vent 1031, which is correspondingly provided with the first vent 10131. That is, the piezoelectric drive 103 with the third vent 1031 is attached to the surface of the second diaphragm 1013.

[0068] By way of example and not limitation, the piezoelectric drive 103 includes a piezoelectric ceramic sheet, and the second diaphragm 1013 is provided with a plurality of first vent holes 10131. The piezoelectric ceramic sheet is provided with a plurality of third vent holes 1031, and each third vent hole 1031 corresponds to at least one first vent hole 10131. That is, at least one first vent hole 10131 is provided above each third vent hole 1031. Specifically, at least one first vent hole 10131 is provided directly above each third vent hole 1031.

[0069] In this embodiment, when energized, the piezoelectric actuator undergoes mechanical deformation and drives the dual-diaphragm structure to vibrate. When the first diaphragm is stretched upwards (away from the bottom shell 1022) and the second diaphragm is stretched downwards (inwards towards the bottom shell 1022), the volume of the first receiving cavity increases, the pressure inside the first receiving cavity decreases, and external gas can flow into the first receiving cavity through the air inlet, the second receiving cavity, the third vent 1031, and the first vent 10131. When the first diaphragm is stretched downwards and the second diaphragm is stretched upwards, the volume of the first receiving cavity decreases, the pressure inside the first receiving cavity increases, and gas inside the first receiving cavity can flow out through the first vent 10131, the third vent 1031, the second receiving cavity, and the second vent. Continuous gas pumping can be achieved through the continuous action of alternating voltage.

[0070] In some embodiments, the inner diameter of the target vent gradually decreases along a specified direction, or the inner diameter of the target vent gradually increases along a specified direction, or the inner diameter of the target vent first gradually decreases and then gradually increases along a specified direction.

[0071] The specified direction is: on the central axis of the piezoelectric drive 103, the direction from the piezoelectric drive 103 to the bottom shell 1022. The target vent includes at least one of the following: a first vent 10131, a second vent 10221, and a third vent 1031. The number of target vents is greater than or equal to two.

[0072] As an example and not a limitation, the target vent can be a circular or square hole, and the shape of the target vent is not limited herein. The inner diameter of the target vent gradually decreasing and then gradually increasing along a specified direction includes: the inner diameter of the target vent gradually decreasing from a first diameter to a second diameter along a specified direction, and then gradually increasing back to the first diameter, wherein the first diameter is larger than the second diameter.

[0073] If the inner diameter of the target vent gradually decreases along the specified direction, the gas injection speed can be increased; if the inner diameter of the target vent gradually increases along the specified direction, or if the inner diameter of the target vent first gradually decreases and then gradually increases along the specified direction, the noise can be reduced.

[0074] In some embodiments, the third vent 1031 is a straight hole, that is, the inner diameter of each hole of the third vent 1031 along a specified direction is the same.

[0075] In some embodiments, the inner diameter of the first vent 10131 is less than or equal to the inner diameter of the third vent 1031, the inner diameter of the first vent 10131 is less than or equal to the inner diameter of the second vent, and the inner diameter of the third vent 1031 is less than or equal to the inner diameter of the second vent 10221. This improves gas flow efficiency and reduces flow resistance.

[0076] Optionally, in order to optimize the vibration performance of the piezoelectric pump, the piezoelectric pump includes at least one of the following: a. The number of piezoelectric driving elements is 1, and the piezoelectric driving element 103 is attached to the surface of the first diaphragm 1011. The thickness of the first diaphragm 1011 is 60%-100% of the thickness of the second diaphragm 1013. b. The number of the piezoelectric driving element is 1, and the piezoelectric driving element 103 is attached to the surface of the second diaphragm 1013. The thickness of the second diaphragm 1013 is 60%-100% of the thickness of the first diaphragm 1011. c. The piezoelectric drive 103 includes a piezoelectric ceramic sheet, the thickness of which is 40%-90% of the thickness of the first diaphragm 1011. d. The piezoelectric drive 103 includes a piezoelectric ceramic sheet, the thickness of which is 40%-90% of the thickness of the second diaphragm 1013. e. The piezoelectric drive 103 includes a circular piezoelectric ceramic sheet, and the first diaphragm 1011 is a circular diaphragm. The diameter of the circular piezoelectric ceramic sheet is 70%-90% of the diameter of the first diaphragm 1011. f. The first diaphragm 1011 is a circular diaphragm, the diameter of the through hole 10121 is 70%-95% of the diameter of the first diaphragm 1011, and the thickness of the cavity plate 1012 is 70%-120% of the thickness of the first diaphragm 1011; g. The piezoelectric drive 103 includes an annular piezoelectric ceramic sheet, the inner diameter of which is less than or equal to 50% of the outer diameter of the annular piezoelectric ceramic sheet.

[0077] This application also provides a piezoelectric pump system, which includes at least two adjacent piezoelectric pumps as described in any of the above embodiments, wherein the adjacent sidewalls between the two adjacent piezoelectric pumps are integrally formed, or the adjacent sidewalls between the two adjacent piezoelectric pumps form a Type II parallel structure.

[0078] In this embodiment, the adjacent sidewalls between two adjacent piezoelectric pumps are integrated, or the adjacent sidewalls between two adjacent piezoelectric pumps form a Type II parallel structure. Both methods can achieve the parallel connection of at least two piezoelectric pumps, thus enabling a larger flow rate. For example, compared to a single piezoelectric pump, with the same total input electrical energy consumption, the parallel structure of at least two piezoelectric pumps can achieve the superposition or even amplification of gas flow rate (1+1>2 effect).

[0079] Specifically, the Type II parallel structure formed by the adjacent sidewalls between two adjacent piezoelectric pumps includes: the first end of the first sidewall and the first end of the second sidewall are connected by a first sidewall connector, and the second end of the first sidewall and the second end of the second sidewall are connected by a second sidewall connector. A gap exists between the first and second sidewalls, and the adjacent sidewalls include both the first and second sidewalls. This reduces vibration interference between adjacent piezoelectric pumps, thereby optimizing the overall operational stability of the piezoelectric pump system.

[0080] In some embodiments, such as Figure 8 As shown, the first electric pump 11 and the second electric pump 12 are two adjacent electric pumps. The first electric pump 11 includes a first sidewall 111, and the second electric pump 12 includes a second sidewall 122. The first sidewall 111 and the second sidewall 122 are adjacent sidewalls. The first end of the first sidewall 111 and the first end of the second sidewall 122 are connected by a first sidewall connector 105. The second end of the first sidewall 111 and the second end of the second sidewall 122 are connected by a second sidewall connector. There is a gap between the first sidewall 111 and the second sidewall 122.

[0081] In some embodiments, such as Figure 9 As shown, the first electric pump 11 and the second electric pump 12 are two electric pumps arranged adjacent to each other. The first electric pump 11 includes a third side wall 113, and the second electric pump 12 includes a fourth side wall 124. The third side wall 113 and the fourth side wall 124 are adjacent side walls and are integrated.

[0082] This application also provides an air pump control method, which includes steps S101 and S102.

[0083] Step S101: Obtain a trigger command. The trigger command is a command used to trigger the operation of the piezoelectric pump system. The piezoelectric pump system includes two adjacent piezoelectric pumps as described in any of the above embodiments.

[0084] Step S102: Control the designated power supply to output an electric drive signal according to the trigger command. The electric drive signal can drive two adjacent piezoelectric pumps in the piezoelectric pump system to work. The piezoelectric pump system is electrically connected to the designated power supply.

[0085] The phase of the alternating electric field corresponding to the electric drive signal is related to the positional relationship of the drive component in the piezoelectric pump system. The positional relationship of the drive component is the relative positional relationship between the piezoelectric drive component and the dual-diaphragm structure in the piezoelectric pump.

[0086] By way of example, and not limitation, the positional relationship of the driving components may include at least one of the following: the negative electrode of the piezoelectric driving component is attached to the upper surface of the first diaphragm in the dual-diaphragm structure; the positive electrode of the piezoelectric driving component is attached to the upper surface of the first diaphragm in the dual-diaphragm structure; the negative electrode of the piezoelectric driving component is attached to the lower surface of the second diaphragm in the dual-diaphragm structure; and the positive electrode of the piezoelectric driving component is attached to the lower surface of the second diaphragm in the dual-diaphragm structure. The positive and negative electrodes of the piezoelectric driving component are formed through polarization processing.

[0087] Optionally, the electric drive signal can drive two adjacent pneumatic pumps in the pneumatic pump system to be in the intake state and exhaust state, respectively.

[0088] In some embodiments, the two adjacent piezoelectric pumps include a first piezoelectric pump and a second piezoelectric pump. The positional relationship of the driving components corresponding to the first piezoelectric pump is the same as that of the driving components corresponding to the second piezoelectric pump. The designated power supply includes a first power supply and a second power supply. Correspondingly, step S102 includes: controlling the first power supply to output a first electric drive signal to the first piezoelectric pump according to the trigger command, and controlling the second power supply to output a second electric drive signal to the second piezoelectric pump according to the trigger command. The first electric drive signal and the second electric drive signal are out of phase, that is, the phase of the alternating electric field corresponding to the first electric drive signal is opposite to the phase of the alternating electric field corresponding to the second electric drive signal. In this way, the first piezoelectric pump and the second piezoelectric pump can be in the intake state and the exhaust state, respectively.

[0089] Optionally, the number of piezoelectric actuators in each piezoelectric pump is 1, and the piezoelectric actuator in each piezoelectric pump is attached to the surface of the first diaphragm or the surface of the second diaphragm.

[0090] As an example, and not a limitation, the positional relationship of the driving components corresponding to the first piezoelectric pump is the same as that of the driving components corresponding to the second piezoelectric pump, specifically in at least one of the following cases: (1) First case: the negative electrode of the piezoelectric driving component of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric driving component of the second piezoelectric pump is attached to the upper surface of the first diaphragm in the second piezoelectric pump; (2) Second case: the positive electrode of the piezoelectric driving component of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric driving component of the second piezoelectric pump is attached to the upper surface of the first diaphragm in the second piezoelectric pump; (3) Third case: The positive electrode of the piezoelectric drive of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the positive electrode of the piezoelectric drive of the second piezoelectric pump is attached to the lower surface of the second diaphragm in the second piezoelectric pump; (4) Fourth case: The negative electrode of the piezoelectric drive of the first piezoelectric pump is attached to the lower surface of the second diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric drive of the second piezoelectric pump is attached to the lower surface of the second diaphragm in the second piezoelectric pump.

[0091] As an example, and not a limitation, the negative electrode of the piezoelectric drive of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric drive of the second piezoelectric pump is attached to the upper surface of the first diaphragm in the second piezoelectric pump; the specified power supply includes a first power supply and a second power supply; since the negative electrode of the piezoelectric drive of the first piezoelectric pump is attached to the upper surface of the first diaphragm, the positive electrode of the piezoelectric drive of the first piezoelectric pump can be electrically connected to the positive electrode of the first power supply, the dual-diaphragm structure of the first piezoelectric pump can be electrically connected to the negative electrode of the first power supply, and the second piezoelectric pump can be electrically connected to the negative electrode of the first power supply. The positive terminal of the piezoelectric drive of the second piezoelectric pump is electrically connected to the positive terminal of the second power supply, and the dual-diaphragm structure of the second piezoelectric pump is electrically connected to the negative terminal of the second power supply. The first power supply is controlled to output a first electric drive signal to the first piezoelectric pump, and the second power supply is controlled to output a second electric drive signal to the second piezoelectric pump. The first electric drive signal and the second electric drive signal are out of phase, such as the phase difference between the first electric drive signal and the second electric drive signal being 180 degrees. In this way, the first piezoelectric pump and the second piezoelectric pump can be in the intake state and the exhaust state, respectively.

[0092] Optionally, each piezoelectric pump has two piezoelectric actuators, with the two actuators being a first actuator and a second actuator, respectively.

[0093] For ease of description, the first driving component and the second driving component in the first pneumatic pump can be referred to as the first driving component A1 and the second driving component B1, respectively; and the first driving component and the second driving component in the second pneumatic pump can be referred to as the first driving component A2 and the second driving component B2, respectively.

[0094] By way of example and not limitation, the positional relationship of the driving components corresponding to the first pneumatic pump is the same as that of the driving components corresponding to the second pneumatic pump, specifically in at least one of the following cases: Case c1, the negative electrode of the first driving component A1 is attached to the upper surface of the first diaphragm of the first pneumatic pump, the negative electrode of the second driving component B1 is attached to the lower surface of the second diaphragm of the first pneumatic pump, and the negative electrode of the first driving component A2 is attached to the upper surface of the first diaphragm of the second pneumatic pump, and the negative electrode of the second driving component B2 is attached to the lower surface of the second diaphragm of the second pneumatic pump; Case c2, the positive electrode of the first driving component A1 is attached to the upper surface of the first diaphragm of the first pneumatic pump, the positive electrode of the second driving component B1 is attached to the lower surface of the second diaphragm of the first pneumatic pump, and the positive electrode of the first driving component A2 is attached to the upper surface of the first diaphragm of the second pneumatic pump, and the positive electrode of the second driving component B2 is attached to the lower surface of the second diaphragm of the second pneumatic pump. In case c1, the positive terminals of the first driving component A1 and the second driving component B1 can be electrically connected together to the positive terminal of the first power supply, and the dual-diaphragm structure of the first piezoelectric pump can be electrically connected to the negative terminal of the first power supply. Similarly, the positive terminals of the first driving component A2 and the second driving component B2 can be electrically connected together to the positive terminal of the second power supply, and the dual-diaphragm structure of the second piezoelectric pump can be electrically connected to the negative terminal of the second power supply. This controls the first power supply to output a first electric drive signal to the first piezoelectric pump, and controls the second power supply to output a second electric drive signal to the second piezoelectric pump. The first and second electric drive signals are out of phase, for example, the phase difference between the first and second electric drive signals is 180 degrees. This allows the first and second piezoelectric pumps to be in intake and exhaust states, respectively. Case c2 follows the same principle.

[0095] In some embodiments, the two adjacent piezoelectric pumps include a first piezoelectric pump and a second piezoelectric pump. The positional relationship between the driving components of the first piezoelectric pump and the driving components of the second piezoelectric pump satisfies a specified condition. Correspondingly, step S102 includes: controlling a specified power supply to output the same electric drive signal to the first piezoelectric pump and the second piezoelectric pump according to the trigger command. The positional relationship between the driving components of the first piezoelectric pump and the driving components of the second piezoelectric pump satisfies the specified condition, including: the positional relationship between the driving components of the first piezoelectric pump and the driving components of the second piezoelectric pump includes any of the following cases: Case d1, the number of piezoelectric driving components of the first piezoelectric pump and the number of piezoelectric driving components of the second piezoelectric pump are both 1, the positive electrode of the piezoelectric driving component of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the piezoelectric driving component of the second piezoelectric pump... Case d1: The negative electrode of the first piezoelectric drive is attached to the upper surface of the first diaphragm in the second piezoelectric pump; Case d2: The number of piezoelectric drive components in both the first and second piezoelectric pumps is 1. The positive electrode of the piezoelectric drive component of the first piezoelectric pump is attached to the lower surface of the second diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric drive component of the second piezoelectric pump is attached to the lower surface of the second diaphragm in the second piezoelectric pump; Case d3: The first piezoelectric pump includes a first drive component A1 and a second drive component B1, and the second piezoelectric pump includes a first drive component A2 and a second drive component B2. The negative electrode of the first drive component A1 is attached to the upper surface of the first diaphragm of the first piezoelectric pump, and the negative electrode of the second drive component B1 is attached to the lower surface of the second diaphragm of the first piezoelectric pump. The positive electrode of the first drive component A2 is attached to the upper surface of the first diaphragm of the second piezoelectric pump, and the positive electrode of the second drive component B2 is attached to the lower surface of the second diaphragm of the second piezoelectric pump.

[0096] As an example, and not a limitation, the same electric drive signal can be the same electric drive signal. The positive terminal of the piezoelectric drive element of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the negative terminal of the piezoelectric drive element of the second piezoelectric pump is attached to the upper surface of the first diaphragm in the second piezoelectric pump. Both the dual-diaphragm structure of the first piezoelectric pump and the dual-diaphragm structure of the second piezoelectric pump are connected to the negative terminal of a designated power supply (e.g., ground). The negative terminal of the piezoelectric drive element of the first piezoelectric pump is electrically connected to the positive terminal of the designated power supply, and the positive terminal of the piezoelectric drive element of the second piezoelectric pump is electrically connected to the positive terminal of the same designated power supply. This allows the designated power supply to output the same electric drive signal to the first and second piezoelectric pumps, thereby enabling the two adjacent piezoelectric pumps to be in the intake and exhaust states, respectively.

[0097] In this embodiment, since two adjacent piezoelectric pumps in the piezoelectric pump system can be in the intake state and exhaust state respectively, the inertial impact inside the piezoelectric pump system can be effectively counteracted, the volume change rate of the first accommodating cavity in the piezoelectric pump system can be optimized, thereby significantly improving the gas pumping efficiency and pressure stability of the piezoelectric pump system.

[0098] Optionally, the electric drive signal can drive two adjacent pneumatic pumps in the pneumatic pump system to be in the intake state or in the exhaust state at the same time.

[0099] As an example, and not a limitation, the two adjacent piezoelectric pumps include a first piezoelectric pump and a second piezoelectric pump. The number of piezoelectric actuators in the first piezoelectric pump and the number of piezoelectric actuators in the second piezoelectric pump are both 1. The negative electrode of the piezoelectric actuator of the first piezoelectric pump is attached to the upper surface of the first diaphragm in the first piezoelectric pump, and the negative electrode of the piezoelectric actuator of the second piezoelectric pump is attached to the upper surface of the first diaphragm in the second piezoelectric pump. The positive electrode of the piezoelectric actuator of the first piezoelectric pump is electrically connected to the positive electrode of a designated power source, and the dual-diaphragm structure of the first piezoelectric pump is electrically connected to the negative electrode of the designated power source. The positive electrode of the piezoelectric actuator of the second piezoelectric pump is electrically connected to the positive electrode of the designated power source, and the dual-diaphragm structure of the second piezoelectric pump is electrically connected to the negative electrode of the designated power source. The designated power source is controlled to output an electric drive signal. In this way, the first piezoelectric pump and the second piezoelectric pump can be simultaneously in an intake state or simultaneously in an exhaust state.

[0100] In this embodiment, two adjacent piezoelectric pumps in the piezoelectric pump system are simultaneously in the intake state or simultaneously in the exhaust state. In this way, the piezoelectric pump system can generate greater static pressure, thereby overcoming greater resistance and improving gas pumping capacity (such as being able to pump further).

[0101] The functions and effects of the technical features in this technical solution that are similar to or related to the aforementioned technical solution are similar to those in the aforementioned technical solution, and the inventive concept and beneficial effects of this technical solution are similar to those in the aforementioned technical solution, so they will not be repeated here.

[0102] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A piezoelectric pump characterized by comprising: The application relates to a double-vibration-membrane structure, a shell, and a piezoelectric driving element. The double-vibration-membrane structure is a structure comprising at least two vibration membranes, and comprises a first vibration membrane, a cavity plate provided with a through hole, and a second vibration membrane provided with a first air hole. The first vibration membrane covers one side of the through hole, and the second vibration membrane covers the other side of the through hole to form a first accommodating cavity. The shell comprises a side wall and a bottom shell, the side wall is enclosed to form a second accommodating cavity, the double-vibration-membrane structure is connected to the side wall through a connecting element, and the double-vibration-membrane structure is suspended in the second accommodating cavity; the bottom shell is provided with a second air hole located below the second vibration membrane, and the first accommodating cavity, the first air hole, the second accommodating cavity and the second air hole are communicated. The piezoelectric driving element is attached to the surface of the first vibration membrane and / or the surface of the second vibration membrane, and is used for driving the first vibration membrane and the second vibration membrane to move reversely.

2. The piezoelectric pump of claim 1, wherein, The piezoelectric driving element attached to the surface of the second vibration membrane is provided with a third air hole corresponding to the first air hole.

3. The piezoelectric pump of claim 2, wherein, The inner diameter of the target air hole gradually decreases along a specified direction, or the inner diameter of the target air hole gradually increases along the specified direction, or the inner diameter of the target air hole gradually decreases and then gradually increases along the specified direction. The specified direction is a direction from the piezoelectric driving element to the bottom shell along the central axis of the piezoelectric driving element, and the target air hole comprises at least one of the first air hole, the second air hole and the third air hole.

4. The piezoelectric pump of claim 2, wherein, The inner diameter of the first air hole is less than or equal to the inner diameter of the third air hole, the inner diameter of the first air hole is less than or equal to the inner diameter of the second air hole, and the inner diameter of the third air hole is less than or equal to the inner diameter of the second air hole.

5. The piezoelectric pump of claim 1, wherein, The second vibration membrane is connected to the side wall through a flexible connecting element, and the flexible connecting element comprises a cantilever beam structure.

6. The piezoelectric pump of claim 1, wherein, The outer contour of the first vibration membrane is connected to the upper surface of the cavity plate, the outer contour of the second vibration membrane is connected to the lower surface of the cavity plate, the upper surface area of the first vibration membrane, the lower surface area of the first vibration membrane, the upper surface area of the second vibration membrane and the lower surface area of the second vibration membrane are the same, the upper surface shape of the first vibration membrane, the lower surface shape of the first vibration membrane, the upper surface shape of the second vibration membrane and the lower surface shape of the second vibration membrane are the same, and the central axis of the piezoelectric driving element, the central axis of the first vibration membrane, the central axis of the second vibration membrane and the central axis of the shell are coincident.

7. The piezoelectric pump of claim 1, wherein The piezoelectric driving element comprises a circular piezoelectric ceramic sheet or a ring-shaped piezoelectric ceramic sheet.

8. A piezoelectric pump according to any one of claims 1 to 6, wherein At least one of the following is provided: a. The number of piezoelectric driving elements is 1, the piezoelectric driving element is attached to the surface of the first vibration membrane, and the thickness of the first vibration membrane is 60%-100% of the thickness of the second vibration membrane. b. the number of the piezoelectric driving element is 1, the piezoelectric driving element is attached to the surface of the second diaphragm, and the thickness of the second diaphragm is 60%-100% of the thickness of the first diaphragm; c. the piezoelectric driving element comprises a piezoelectric ceramic sheet, the thickness of the piezoelectric ceramic sheet attached to the surface of the first diaphragm is 40%-90% of the thickness of the first diaphragm; d. the piezoelectric driving element comprises a piezoelectric ceramic sheet, the thickness of the piezoelectric ceramic sheet attached to the surface of the second diaphragm is 40%-90% of the thickness of the second diaphragm; e. the piezoelectric driving element comprises a circular piezoelectric ceramic sheet, the first diaphragm is a circular diaphragm, and the diameter of the circular piezoelectric ceramic sheet is 70%-90% of the diameter of the first diaphragm; f. the first diaphragm is a circular diaphragm, the aperture of the through hole is 70%-95% of the diameter of the first diaphragm, and the thickness of the cavity plate is 70%-120% of the thickness of the first diaphragm; g. the piezoelectric driving element comprises a ring-shaped piezoelectric ceramic sheet, and the inner diameter of the ring-shaped piezoelectric ceramic sheet is less than or equal to 50% of the outer diameter of the ring-shaped piezoelectric ceramic sheet.

9. A piezoelectric gas pump system, characterized by, The piezoelectric air pump system comprises at least two piezoelectric air pumps as claimed in any one of claims 1-8, which are arranged adjacently, and the adjacent side walls between the two adjacent piezoelectric air pumps are integrated, or the adjacent side walls between the two adjacent piezoelectric air pumps form a II type parallel structure.

10. A gas pump control method characterized by, The piezoelectric air pump system comprises at least two piezoelectric air pumps as claimed in any one of claims 1-8, which are arranged adjacently, and the adjacent side walls between the two adjacent piezoelectric air pumps are integrated, or the adjacent side walls between the two adjacent piezoelectric air pumps form a II type parallel structure. The piezoelectric air pump system comprises at least two piezoelectric air pumps as claimed in any one of claims 1-8, which are arranged adjacently, and the adjacent side walls between the two adjacent piezoelectric air pumps are integrated, or the adjacent side walls between the two adjacent piezoelectric air pumps form a II type parallel structure. The piezoelectric air pump system comprises at least two piezoelectric air pumps as claimed in any one of claims 1-8, which are arranged adjacently, and the adjacent side walls between the two adjacent piezoelectric air pumps are integrated, or the adjacent side walls between the two adjacent piezoelectric air pumps form a II type parallel structure. The piezoelectric air pump system comprises at least two piezoelectric air pumps as claimed in any one of claims 1-8, which are arranged adjacently, and the adjacent side walls between the two adjacent piezoelectric air pumps are integrated, or the adjacent side walls between the two adjacent piezoelectric air pumps form a II type parallel structure.

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