Vacuum pipe connection assembly and vacuum calibration device

Abstract

The present application relates to the technical field of pipeline connection, in particular to a vacuum pipeline connection assembly and a vacuum calibration device; comprising a connecting seat and a vacuum bellows arranged on the connecting seat, further comprising a locking and stabilizing assembly connected to the upper side of the vacuum bellows, the upper side of the locking and stabilizing assembly is connected with the metal bellows through a connecting elbow; the locking and stabilizing assembly is used for locking and supporting after the height adjustment of the vacuum bellows is completed; the side of the connecting seat is provided with a connecting port, which is used for connecting with the vacuum calibration device; a through cavity is arranged in the connecting seat, and the connecting port is communicated with the vacuum bellows through the through cavity; the present application solves the technical problem of how to connect the vacuumizing device and the vacuum calibration device with different heights.

Description

Technical Field

[0001] This invention relates to the field of pipeline connection technology, and specifically to a vacuum pipeline connection assembly and a vacuum calibration device. Background Technology

[0002] Many vacuum gauge users have requested on-site calibration of the vacuum gauges used on their production lines. This is partly because sending them for testing would interrupt production and result in economic losses, and partly because some organizations engaged in vacuum measurement and testing technologies also want on-site calibration of the vacuum gauges they use. The portable vacuum calibration device adopts a modular, split structure, with each functional module that can be disassembled and assembled to adapt to different on-site environmental characteristics and meet the calibration needs of vacuum gauges. When evacuating the calibration chamber, upstream chamber, and various pipelines, on-site vacuum pumping devices (mechanical pumps, diffusion pumps, Roots pumps) can be connected to the vacuum calibration device to achieve the evacuation function.

[0003] Chinese patent CN221569728U discloses a pipe connection assembly and vacuum equipment for connecting vacuum pipelines. However, when a vacuum pumping device and a vacuum calibration device are connected through a pipe, different vacuum pumping devices are at different heights from the ground, resulting in incompatible connections. Although the telescopic tube in the prior art can solve the height compatibility problem of the vacuum pumping device, its sliding fit with a rubber stopper results in insufficient sealing and makes it unsuitable for vacuum calibration. The corrugated pipe in the prior art can solve the height compatibility and airtightness problems, but its structural stability is limited. It is prone to bending deformation due to the impact of airflow inside the pipe, which reduces the accuracy of the test.

[0004] Therefore, the problem in the existing technology is: how to achieve a stable connection between vacuum pumping devices and vacuum calibration devices at different heights. Summary of the Invention

[0005] This invention provides a vacuum pipeline connection assembly and a vacuum calibration device, which solves at least the connection between vacuum pumping devices and vacuum calibration devices at different heights.

[0006] The technical solution used in this invention is as follows:

[0007] The first aspect of this application discloses a vacuum pipe connection assembly, including a connecting seat and a vacuum bellows disposed on the connecting seat, and a locking and stabilizing assembly connected to the upper side of the vacuum bellows. The upper side of the locking and stabilizing assembly is connected to the metal bellows via a connecting bend. The locking and stabilizing assembly is used to lock and support the vacuum bellows after its height adjustment is completed. The side of the connecting seat is provided with a connection port for connecting to a vacuum calibration device. A conductive cavity is provided inside the connecting seat, and the connection port is connected to the vacuum bellows through the conductive cavity. The locking and stabilizing assembly includes a locking mechanism and a stabilizing mechanism. The locking mechanism includes a locking mechanism and a stabilizing mechanism. The system includes a warning cavity between the vacuum bellows and the connecting bend, and a warning ball core rotatably fitted within the warning cavity. The warning ball core has a channel. Locking grooves are located at opposite ends of the upper side of the connecting seat, and locking sliders slide within these grooves. The locking sliders are fixed to both sides of the warning cavity via locking connecting plates. An installation cavity is provided on the locking slider, with a mating post in the center of the installation cavity. Warning shafts extend from both sides of the warning ball core, rotating outwards from the outside of the warning cavity and rotatably engaging with the mating post. A locking knob is located at the end of each warning shaft. Rotating the warning shaft locks the locking driven plate, connecting the warning ball core to the warning cavity.

[0008] Furthermore, the keyed shaft is connected to an elliptical protrusion located between two mating posts; the two sides of the mounting cavity are slidably fitted with first locking posts, the inner side of which is fixed to a locking drive plate, and the middle of the locking drive plate is rotatably fitted with a locking roller, which rolls with the side of the elliptical protrusion; a locking return spring is fitted on the first locking post between the locking drive plate and the mounting cavity, which forces the locking roller to contact the elliptical protrusion; a second locking post is slidably fitted on the outer side of the first locking post, a compression spring is provided in the constricted groove, and a locking driven plate is provided on the outer side of the second locking post, which contacts and presses against the locking groove.

[0009] Furthermore, the stabilizing mechanism includes several stabilizing sliders that slide on the locking groove. The inner side of the stabilizing slider is fixed to the support plate by a support column. The uppermost stabilizing slider is connected to the locking slider by a slider connecting plate. The uppermost and lowermost stabilizing sliders are provided with a first pull plate with an L-shaped cross section on their sides, and the middle stabilizing slider is provided with a second pull plate with a U-shaped cross section on its side. After the uppermost slider rises to a certain height, the end of the first pull plate hooks onto the second pull plate.

[0010] Furthermore, the locking slide and the side of the connecting seat are provided with mounting ears, on which the traction shaft slides and engages. The outer side of the traction shaft has an anti-detachment structure to prevent the traction shaft from coming off the mounting ears. The inner side of the traction shaft is fixed to the traction rail, and a traction spring passes through the traction shaft. The traction spring is locked between the traction rail and the mounting ears. An elliptical cross-section extrusion block is keyed to the indicator shaft. The extrusion block contacts and engages with the inner side of the traction rail, stabilizing the sliding engagement between the slider and the support column.

[0011] Furthermore, the side of the stabilizing slider has a constricted recovery groove, and the support column slides in conjunction with the recovery groove; a stabilizing spring is fitted on the support column between the support plate and the stabilizing slider, and the stabilizing spring is used to force the support plate to slide towards the vacuum bellows side; the side of the stabilizing slider has a traction base plate, and a traction channel is opened on the traction base plate, which is connected to the inside of the recovery groove; the end of the support column is fixed to one end of the traction rope, and the other end of the traction rope passes through the traction channel and is fixed to the traction head with an I-shaped cross section; the other side of the traction head slides in conjunction with the traction rail; guide posts are provided on both sides of the traction base plate, and the end of the traction head slides in conjunction with the guide posts.

[0012] Furthermore, the vacuum bellows adopts a double-layer bellows structure, with a liquid injection port on the lower side of the vacuum bellows communicating with the central cavity; a guide plate is provided between the locking slide grooves, and the connecting bend is slidably engaged with the guide plate via a linear bearing; a bellows return spring is sleeved on the outside of the connecting bend, and the bellows return spring is locked between the guide plate and the locking and stabilizing assembly; a fluid push rod is installed on the side of the connecting seat via a push rod bracket; a fluid column is provided on the side of the connecting seat, and a fluid piston is slidably engaged within the fluid column; the push head of the fluid push rod is fixed to the fluid piston; a fluid channel is provided on the connecting seat, one side of the fluid channel communicating with the fluid column, and the other side of the fluid channel connecting to the liquid injection port of the vacuum bellows via a fluid hose; the vacuum bellows, fluid hose, fluid channel, and fluid column are filled with magnetorheological fluid; a magnetic field emitting assembly is provided on the side of the locking slide groove.

[0013] A second aspect of this application provides a vacuum calibration device, including the vacuum pipe connection assembly of the above embodiments, and also includes a portable calibration device.

[0014] Furthermore, the portable calibration device includes a gas supply and sample injection module, a pressure attenuation module, a pressure measurement and calibration module, and a vacuum module. The gas supply and sample injection module provides compliant calibration gas to the pressure measurement and calibration module. The pressure attenuation module, located between the gas supply and sample injection module and the pressure measurement and calibration module, provides accurate pressure attenuation for range calibration. The pressure measurement and calibration module enables pressure monitoring and vacuum gauge calibration comparison. The baking module is used to bake the calibration chamber of the pressure measurement and calibration module when a high vacuum level is required for on-site calibration. The vacuum module is used to create a vacuum environment required for calibration.

[0015] Furthermore, the portable calibration device also includes a baking module, which is used to bake the calibration chamber of the pressure measurement and calibration module when a high vacuum level is required for on-site calibration.

[0016] The beneficial effects achieved by this invention are as follows: When one side of the major axis of the elliptical convex is in a vertical state, the locking slider can slide along the locking groove to adjust its height. At this time, the indicator ball core and the indicator cavity are closed. If the indicator shaft is not rotated to lock, the closed indicator cavity will prevent the vacuum calibration device from being evacuated for calibration. When the indicator shaft is rotated to make one side of the major axis of the elliptical convex horizontal, the locking driven plate presses the locking groove to lock, and the indicator ball core and the indicator cavity are connected, thereby preventing the vacuum calibration device from being evacuated for calibration without locking the locking slider. The locking detection component realizes an interlocking mechanism for evacuation after locking, and intuitively indicates to the operator whether the locking operation has been completed by the opening and closing of the channel, preventing the operator from starting the vacuum device for calibration without locking. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the vacuum pipe connection assembly structure of the present invention.

[0018] Figure 2 This is a schematic diagram of the connector structure of the present invention.

[0019] Figure 3 This is a schematic diagram of the locking mechanism structure of the present invention.

[0020] Figure 4 This is a schematic diagram of the cross-sectional structure of the locking slider of the present invention.

[0021] Figure 5 This is a schematic diagram of the first locking pin and the second locking pin of the present invention.

[0022] Figure 6 This is a schematic diagram of the locking mechanism operation of the present invention.

[0023] Figure 7 This is a schematic diagram of the stabilizing mechanism structure of the present invention.

[0024] Figure 8 This is a schematic diagram of the first and second tension plates of the present invention.

[0025] Figure 9 This is a schematic diagram of the stabilizing mechanism of the present invention.

[0026] Figure 10 This is a schematic diagram of the traction rail assembly of the present invention.

[0027] Figure 11 This is a schematic diagram of the stable slider and support column structure of the present invention.

[0028] Figure 12 Diagram showing the operation of the traction rail and support column.

[0029] Figure 13 A schematic diagram showing the relative positional relationship between the elliptical convex and the extrusion block.

[0030] Figure 14 A diagram showing the relative state of the elliptical convex bulge and the major axis of the extrusion block.

[0031] Figure 15 This is a schematic cross-sectional view of the vacuum bellows of the present invention.

[0032] Figure 16 This is a schematic diagram of the position of the push rod support and fluid push rod of the present invention.

[0033] Figure 17 This is a schematic diagram of the cross-sectional structure of the connecting seat and fluid column of the present invention.

[0034] Figure 18 This is a connection block diagram of a vacuum calibration device according to the present invention.

[0035] Figure 19 This is a schematic diagram of the vacuum calibration device of the present invention.

[0036] In the diagram, 1. Connecting seat; 2. Vacuum bellows; 3. Connecting bend; 4. Metal bellows; 5. Connecting port; 6. Conducting cavity; 7. Indicating cavity; 8. Indicating ball core; 9. Channel; 10. Locking groove; 11. Locking slider; 12. Locking connecting plate; 13. Mounting cavity; 14. Mating post; 15. Indicating shaft; 16. Locking knob; 17. Elliptical protrusion; 18. First locking post; 19. Locking drive plate; 20. Locking roller; 21. Locking return spring; 22. Narrowing groove; 23. Second locking pin; 24. Limiting protrusion; 25. Compression spring; 26. Locking driven plate; 27. Stabilizing slider; 28. Support column; 29. ​​Support plate; 30. Slider connecting plate; 31. First traction plate; 32. Second traction plate; 33. Mounting ear; 34. Traction shaft; 35. Traction rail; 36. Traction spring; 37. Extrusion block; 38. Recycling trough; 39. Stabilizing spring; 40. Traction base plate; 41. Traction channel; 42. Traction rope; 43. Traction head; 44. Guide post; 45. Injection port; 46. Guide plate; 47. Bellows return spring; 48. Push rod support; 49. Fluid push rod; 50. Fluid column; 51. Fluid piston; 52. Fluid channel; 53. Fluid hose; 54. Magnetorheological fluid; 55. Fine-tuning valve; 56. Gas supply valve; 57. High-pressure gas source; 58. Upstream chamber; 59. Small orifice chamber; 60. Attenuation valve; 61. Calibration chamber; 62. First cross-shaped connecting tube; 63. First capacitive thin-film vacuum gauge; 64. Second capacitive thin-film vacuum gauge 65. Vacuum gauge under calibration; 66. First calibration valve; 67. Second calibration valve; 68. Upstream monitoring valve; 69. Molecular pump; 70. Mechanical pump; 71. First evacuation branch; 72. First evacuation valve; 73. Second evacuation branch; 74. Second evacuation valve; 75. Third evacuation branch; 76. Third evacuation valve; 77. Fourth evacuation valve; 78. Second cross-connecting tube; 79. Compound vacuum gauge; 80. Magnetic levitation rotor vacuum gauge; 81. Third calibration valve. Detailed Implementation

[0037] To facilitate understanding of the present invention by those skilled in the art, specific embodiments of the present invention will be described below with reference to the accompanying drawings.

[0038] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this invention can be understood through the specific circumstances.

[0039] like Figure 1As shown, this invention provides a vacuum pipe connection assembly, including a connecting seat 1 and a vacuum bellows 2 (axially extendable) disposed on the connecting seat 1, and a locking and stabilizing assembly connected to the upper side of the vacuum bellows 2. The upper side of the locking and stabilizing assembly is connected to a metal bellows 4 (bendable and deformable, but not axially extendable) via a connecting bend 3; the other side of the metal bellows 4 is used to connect to an on-site vacuum pumping device (mechanical pump 70, diffusion pump, Roots pump, etc.); the locking and stabilizing assembly is used to lock and support the vacuum bellows 2 after the height adjustment is completed; as... Figure 2 As shown, the side of the connector 1 is provided with a connector 5, which is used to connect to the vacuum calibration device; the connector 1 is provided with an L-shaped cross-section conductive cavity 6, and the connector 5 is connected to the vacuum bellows 2 through the conductive cavity 6.

[0040] In this scheme, the connecting port 5 on the side of the connecting seat 1 is first sealed and connected to the corresponding interface of the vacuum calibration device. Then, according to the ground clearance of the interface of the on-site vacuum device, the vacuum bellows 2 is axially extended and retracted to make the overall height match the interface height of the vacuum device. After the height is adjusted to the correct position, the locking and stabilizing component is used to lock and support the vacuum bellows 2, fixing its extended and retracted length to maintain structural stability. Next, the free end of the metal bellows 4 is sealed and connected to the interface of the on-site vacuum device. After the overall assembly is completed, the on-site vacuum device is started. The negative pressure generated by the vacuum device is transmitted to the vacuum calibration device through the metal bellows 4, the connecting bend 3, the locking and stabilizing component, the vacuum bellows 2, and the conductive cavity 6 of the connecting seat 1, realizing the vacuum function of the internal pipeline of the vacuum calibration device and meeting the vacuum environment requirements of on-site calibration. This application combines the axial extension and retraction characteristics of the vacuum bellows 2 with the bendability of the metal bellows 4 to doubly adapt to on-site vacuum devices with different ground clearance and different installation angles.

[0041] like Figure 1 , Figure 3 As shown, the locking and stabilizing assembly includes a locking mechanism and a stabilizing mechanism. The locking mechanism includes a warning cavity 7 located between the vacuum bellows 2 and the connecting bend 3, and a warning ball core 8 rotatably fitted within the warning cavity 7. The warning ball core 8 has a channel 9 to achieve closure and communication with the warning cavity 7. Locking grooves 10 are provided at opposite ends of the upper side of the connecting seat 1. A locking slider 11 is slidably fitted within the locking groove 10, and the locking slider 11 is fixed to both sides of the warning cavity 7 via a locking connecting plate 12. Figure 3 , Figure 4As shown, the locking slider 11 has a mounting cavity 13, and a mating post 14 is provided in the middle of the mounting cavity 13; the two sides of the prompting ball core 8 are provided with prompting shafts 15, which extend out of the outer side of the prompting cavity 7 and rotate with the mating post 14; the end of the prompting shaft 15 is provided with a locking knob 16; an elliptical protrusion 17 is keyed to the prompting shaft 15, and the elliptical protrusion 17 is located between the two mating posts 14; the two sides of the mounting cavity 13 are slidably fitted with first locking posts 18, the inner side of the first locking post 18 is fixed with a locking drive plate 19, the middle of the locking drive plate 19 is rotatably fitted with a locking roller 20, and the locking roller 20 rolls with the side of the elliptical protrusion 17; a locking return spring 21 is sleeved on the first locking post 18 between the locking drive plate 19 and the mounting cavity 13, and the locking return spring 21 is used to force the locking roller 20 to contact and engage with the elliptical protrusion 17; as Figure 6 As shown, the outer side of the first locking pin 18 is a constricted groove 22, the second locking pin 23 is slidably engaged with the first locking pin 18, the inner side of the second locking pin 23 has a limiting protrusion 24, a compression spring 25 is provided in the constricted groove 22, the two sides of the compression spring 25 are in contact with the constricted groove 22 and the limiting protrusion 24, and a locking driven plate 26 is provided on the outer side of the second locking pin 23. The locking driven plate 26 is used to contact and press against the locking slide groove 10.

[0042] When the major axis of the elliptical protrusion 17 is in a vertical position, the locking slider 11 can slide along the locking groove 10 to adjust its height. At this time, the indicator ball core 8 and the indicator cavity 7 are closed. If the indicator shaft 15 is not rotated to lock, the closed indicator cavity 7 will prevent the vacuum calibration device from being evacuated for calibration. When the indicator shaft 15 is rotated to make the major axis of the elliptical protrusion 17 horizontal, the locking driven plate 26 presses the locking groove 10 to lock it, and the indicator ball core 8 and the indicator cavity 7 are connected, thereby preventing the vacuum calibration device from being evacuated for calibration without locking the locking slider 11. The locking detection component realizes the interlocking mechanism of evacuation after locking. The on / off state of the channel 9 intuitively indicates to the operator whether the locking operation has been completed, preventing the operator from starting the vacuum device for calibration without locking.

[0043] like Figure 7 As shown, the stabilizing mechanism is used to support the elongated vacuum bellows 2. The stabilizing mechanism includes several stabilizing sliders 27 (five are used as an example in this application) that are slidably fitted onto the locking groove 10. The inner side of the stabilizing sliders 27 is fixed to the support plate 29 by the support column 28. The support plate 29 is an arc-shaped structure corresponding to the vacuum bellows 2 and is used to support the vacuum bellows 2. The uppermost stabilizing slider 27 is connected to the locking slider 11 through the slider connecting plate 30. The locking slider 11 will drive the uppermost stabilizing slider 27 to move synchronously. Figures 7-8As shown, the uppermost and lowermost stabilizing sliders 27 are provided with L-shaped cross-section first traction plates 31, and the middle stabilizing slider 27 is provided with U-shaped cross-section second traction plates 32. After the uppermost slider rises to a certain height, the end of the first traction plate 31 hooks the second traction plate 32, thereby driving the middle locking slider 11 to rise.

[0044] like Figure 9 As shown, when the locking slider 11 slides along the locking groove 10 to adjust its height, the uppermost stabilizing slider 27 moves synchronously through the slider connecting plate 30. During the ascent of the uppermost stabilizing slider 27, the end of the first pulling plate 31 on its side hooks the end of the second pulling plate 32, thereby driving the middle stabilizing slider 27 to rise together. As the middle stabilizing slider 27 rises, the end on its other side hooks the second pulling plate 32 of the next middle stabilizing slider 27, forming a step-by-step pulling. During the ascent, the support column 28 and the arc-shaped support plate 29 on the inner side of each stabilizing slider 27 always fit against the outer wall of the vacuum bellows 2, forming multi-point continuous support for the elongated vacuum bellows 2. When the height adjustment is completed, the locking mechanism fixes the locking slider 11, and the stabilizing slider 27 is locked accordingly. The support plate 29 and the support column 28 maintain the supporting state of the vacuum bellows 2.

[0045] The stabilizing mechanism achieves the linkage lifting and lowering of multiple stabilizing sliders 27 through the direct connection between the locking slider 11 and the uppermost stabilizing slider 27, and the step-by-step interlocking structure between the first traction plate 31 and the second traction plate 32, ensuring that the vacuum bellows 2 can obtain continuous and uniform support at any length of extension.

[0046] The support plate 29 supports the vacuum bellows 2. If contact support is used, the side of the vacuum bellows 2 will rub against the support plate 29 during the elongation process. If there is a gap between the support plate 29 and the vacuum bellows 2, the support effect will be poor during testing. To solve this problem, such as... Figures 10-11As shown, the locking groove 10 and the side of the connecting seat 1 are provided with mounting ears 33. The mounting ears 33 are slidably fitted with the pull shaft 34. The outer side of the pull shaft 34 has an anti-detachment structure to prevent the pull shaft 34 from falling out of the mounting ears 33. The inner side of the pull shaft 34 is fixed to the pull rail 35. A pull spring 36 passes through the pull shaft 34 and is locked between the pull rail 35 and the mounting ears 33. An elliptical cross-section pressing block 37 is keyed to the pivot shaft 15. The pressing block 37 is connected to the pull rail. The inner side of the 35 contacts and engages; the stabilizing slider 27 slides and engages with the support column 28; the upper sliding engagement of the pull rail 35 is with the pull head 43; the pull head 43 is connected to the end of the support column 28 via the pull rope 42, and the pull head 43 can pull the support column 28 via the pull rope 42; when the long axis side of the extrusion block 37 is in a horizontal state, the indicator ball core 8 and the indicator cavity 7 are closed; the pull rail 35 moves laterally in the horizontal direction under the push of the extrusion block 37, and the pull rail 35 drives the pull through the sliding groove. Head 43 moves laterally in sync, pulling rope 42. Head 43 pulls support column 28 through rope 42, causing support column 28 to slide towards stabilizing slider 27, thereby causing arc-shaped support plate 29 to separate from the outer wall of vacuum bellows 2 and maintain a gap. In this state, locking slider 11 can drive stabilizing slider 27 and support plate 29 to move freely up and down along locking groove 10. Vacuum bellows 2 will not have any friction interference with support plate 29 during axial extension and contraction adjustment. When the height is adjusted to the target position, the rotating prompt shaft 15 turns the long axis side of the extrusion block 37 to a vertical state, the pushing force of the extrusion block 37 on the traction rail 35 is released, the traction rail 35 moves laterally back under the action of the traction spring 36 of the traction shaft 34, the support column 28 slides inward after losing the tension of the traction rail 35, the arc-shaped support plate 29 re-fits to the outer wall of the vacuum bellows 2, and then the locking mechanism completes the locking, the support plate 29 and the support column 28 maintain rigid support for the vacuum bellows 2.

[0047] Through the linkage mechanism between the squeezing block 37 and the traction rail 35, the automatic switching between the support state and the separation state of the pallet 29 is realized, which solves the dilemma of frictional interference caused by direct contact of the pallet 29 and poor support effect when there is a gap. The squeezing block 37 is connected to the indicator rotating shaft 15 key, which couples the locking operation and the separation action of the pallet 29 into one. When the indicator rotating shaft 15 is rotated to the unlocked position, the support contact is automatically released, and the support is automatically restored when locked.

[0048] like Figure 10 , 13As shown in Figure 14, the elliptical protrusion 17 and the pressing block 37 are arranged side by side along the axial direction of the prompting shaft 15. Both are fixed to the prompting shaft 15 by key connection, and there is a gap between them (the size of the gap does not affect their respective functions). The major axes of the elliptical protrusion 17 and the pressing block 37 are perpendicular to each other. In the initial state (unlocked, the vacuum bellows height is adjustable), the major axis of the elliptical protrusion 17 is vertical. At this time, the locking roller 20 is not pressed by the elliptical protrusion 17, the locking mechanism is not locked, and the prompting ball core 8 and the prompting cavity 7 are closed. The major axis of the pressing block 37 is horizontal. At this time, the pressing block 37 is horizontal. Block 37 presses against the pull rail 35, causing the pull rail 35 to move laterally and pull the support column 28 through the pull rope 42, separating the arc-shaped support plate 29 from the vacuum bellows 2; when the height adjustment is completed and locking is required, rotating the locking knob 16 drives the indicator shaft 15 to rotate 90°, and the major axis of the elliptical convex 17 turns to the horizontal direction, pressing the locking roller 20 to drive the locking driven plate 26 to lock; at the same time, the major axis of the pressing block 37 turns to the vertical direction, releasing the pressure on the pull rail 35, the pull rail 35 resets, the support plate 29 fits against the vacuum bellows 2 to achieve support, and the indicator ball core 8 and the indicator cavity 7 are connected.

[0049] like Figure 11 As shown, the side of the stabilizing slider 27 is provided with a narrowed recovery groove 38, and the support column 28 is slidably engaged with the recovery groove 38. The end of the support column 28 has an anti-detachment structure to prevent it from falling out of the recovery groove 38. A stabilizing spring 39 is sleeved on the support column 28 between the support plate 29 and the stabilizing slider 27. The stabilizing spring 39 is used to force the support plate 29 to slide towards the vacuum bellows 2. The side of the stabilizing slider 27 is provided with a traction base plate 40. The traction base plate 40 is provided with an L-shaped traction channel 41. The traction channel 41 is connected to the inside of the recovery groove 38. The end of the support column 28 is fixed to one end of the traction rope 42. The other end of the traction rope 42 passes through the traction channel 41 and is fixed to the I-shaped traction head 43. The other side of the traction head 43 is slidably engaged with the traction rail 35. Guide posts 44 are provided on both sides of the traction base plate 40. The end of the traction head 43 is slidably engaged with the guide post 44.

[0050] like Figures 15-17As shown, the vacuum bellows 2 adopts a double-layer bellows structure. The lower side of the vacuum bellows 2 has a liquid injection port 45 communicating with the central cavity. A guide plate 46 is provided between the locking grooves 10. The connecting bend 3 slides with the guide plate 46 via a linear bearing. A bellows return spring 47 is sleeved on the outside of the connecting bend 3, and the bellows return spring 47 is locked between the guide plate 46 and the locking and stabilizing assembly. A fluid push rod 49 (which can be an electric push rod) is installed on the side of the connecting seat 1 via a push rod bracket 48. A fluid column 50 is provided on the side of the connecting seat 1, through which the fluid... A fluid piston 51 is slidably fitted inside the column 50. The push head of the fluid push rod 49 is fixed to the fluid piston 51. A fluid channel 52 is provided on the connecting seat 1. One side of the fluid channel 52 is connected to the fluid column 50, and the other side of the fluid channel 52 is connected to the liquid injection port 45 of the vacuum bellows 2 through the fluid hose 53. The vacuum bellows 2, the fluid hose 53, the fluid channel 52, and the fluid column 50 are filled with magnetorheological fluid 54. A magnetic field emitting component (used to emit a magnetic field to the vacuum bellows 2, not shown in the figure) is provided on the side of the locking slide groove 10.

[0051] Before height adjustment, the magnetic field emitting component is in the off state, and the magnetorheological fluid 54 maintains a low viscosity flow state. The fluid push rod 49 pushes the fluid piston 51 to compress the magnetorheological fluid 54. The magnetorheological fluid 54 enters the middle cavity of the vacuum bellows 2 through the fluid hose 53 and the injection port 45. Under the action of internal pressure, the vacuum bellows 2 is axially elongated. After the height adjustment is completed, the magnetic field emitting component is activated and emits a magnetic field to the vacuum bellows 2. The magnetorheological fluid 54 solidifies rapidly under the action of the magnetic field. At this time, the magnetorheological fluid 54 forms a rigid support for the vacuum bellows 2, enhancing the stability after elongation. Then, the locking mechanism mechanically locks the locking slider 11.

[0052] The second aspect of this application proposes a vacuum calibration device, such as... Figures 18-19 As shown, the device includes the vacuum pipeline connection assembly of the above-described embodiments and a portable calibration device, which is an existing vacuum calibration device. One embodiment of the portable calibration device includes a gas supply and sample injection module, a pressure attenuation module, a pressure measurement and calibration module, a baking module, and a vacuum extraction module. The gas supply and sample injection module is used to provide compliant calibration gas to the pressure measurement and calibration module. The pressure attenuation module is located between the gas supply and sample injection module and the pressure measurement and calibration module, and is used to provide accurate pressure attenuation for range calibration. The pressure measurement and calibration module realizes pressure monitoring and vacuum gauge calibration comparison. The baking module is used to bake the calibration chamber 61 of the pressure measurement and calibration module when a high vacuum level is required for on-site calibration. The vacuum extraction module is used to evacuate the vacuum and construct the vacuum environment required for calibration.

[0053] The gas supply and sample injection module consists of a fine-tuning valve 55, a gas supply valve 56, and a high-pressure gas source 57 connected in sequence. The high-pressure gas source 57 can be a high-pressure gas cylinder or gas bag, or it can use the high-pressure gas already available at the work site for calibration. The calibration gas is generally high-purity nitrogen with a purity of 99.99%. Depending on the actual situation of the on-site calibration, the gas supply and sample injection module can be directly connected to the pressure measurement and calibration module without using the pressure attenuation module, or the pressure attenuation module can be used to attenuate the gas through the upstream chamber 58 and the small orifice chamber 59 before it is introduced into the pressure measurement and calibration module.

[0054] The pressure attenuation module includes an upstream chamber 58, a small orifice chamber 59, and an attenuation valve 60 connected in sequence. The pressure attenuation module can be easily disassembled and installed. One end of the upstream chamber 58 is used to connect to the fine-tuning valve 55, and the other end is used to connect to the input end of the attenuation valve 60 through the small orifice chamber 59. The output end of the attenuation valve 60 is used to connect to the calibration chamber 61 of the pressure measurement and calibration module to realize the introduction of attenuated gas.

[0055] The upstream chamber 58 is a 1L stainless steel cylindrical container, and the orifice chamber 59 is a 1mm thick laser orifice with a diameter of 45mm to ensure pressure stability in the upstream chamber 58 during calibration. This module is required when using the pressure attenuation method for calibration; otherwise, the pressure attenuation module is not required.

[0056] The pressure measurement and calibration module includes a spherical calibration chamber 61, which serves as the core connection node and is directly connected to the vacuum gauge 65 being calibrated. One side of the calibration chamber 61 is connected to a first capacitive thin-film vacuum gauge 63 and a second capacitive thin-film vacuum gauge 64 via a first cross-shaped connecting tube 62. The third end of the first cross-shaped connecting tube 62 is used to connect to the vacuum gauge 65 being calibrated (in the case of static comparison method). A first calibration valve 66 is provided between the first capacitive thin-film vacuum gauge 63 and the first cross-shaped connecting tube 62. A second calibration valve 67 is provided between the second capacitive thin-film vacuum gauge 64 and the first cross-shaped connecting tube 62. The first capacitive thin-film vacuum gauge 63 is connected to the upstream chamber 58 via an upstream monitoring valve 68.

[0057] The other side of the calibration chamber 61 is connected to the composite vacuum gauge 79, the magnetic levitation rotor vacuum gauge 80 or the secondary standard ionization vacuum gauge, and the vacuum gauge under calibration 65 (in the case of dynamic comparison method) via the second cross-shaped connecting pipe 78. The second cross-shaped connecting pipe 78 is connected to the magnetic levitation rotor vacuum gauge 80 (or the secondary standard ionization vacuum gauge) via the third calibration valve 81, which can realize pressure monitoring of the calibration chamber 61 and the upstream chamber 58 and calibration of the vacuum gauge under calibration 65. The composite vacuum gauge 79 is connected to the calibration chamber 61 via the second cross-shaped connecting pipe 78 to realize auxiliary pressure monitoring.

[0058] The calibration chamber 61 is a spherical structure made of SUS304L stainless steel with a diameter of approximately 200-300 mm. This structure is conducive to establishing a uniform and isotropic molecular flow field and is also easy to carry. Considering environmental factors such as working temperature and vibration, as well as the calibration range of the vacuum gauge 65 being calibrated, different types of vacuum gauges are selected as standard vacuum gauges. At the same time, a portable computer is provided to facilitate the recording and calculation of on-site calibration data.

[0059] The vacuum module consists of a molecular pump 69 and a mechanical pump 70, which can evacuate the calibration chamber 61, the upstream chamber 58, and various pipelines.

[0060] Mechanical pump 70 is connected to upstream chamber 58 via first evacuation branch 71. First evacuation branch 71 is equipped with first evacuation valve 72 and is used to evacuate upstream chamber 58. Mechanical pump 70 is connected to calibration chamber 61 via second evacuation branch 73. Second evacuation branch 73 is equipped with second evacuation valve 74 and is used to perform bypass rough evacuation of calibration chamber 61. Mechanical pump 70 is connected to calibration chamber 61 via third evacuation branch 75. Molecular pump 69 is equipped on third evacuation branch 75. Third evacuation valve 76 and fourth evacuation valve 77 are respectively provided on both sides of molecular pump 69.

[0061] To meet the requirements of small size, light weight, and high ultimate vacuum of the calibration device, small pumps are selected for mechanical pump 70 and molecular pump 69, with a total weight of approximately 15 kg. To facilitate the disassembly of the pumping system from the vacuum system, molecular pump 69 uses a KF flange interface for easy carrying and transportation. If there is a suitable pumping device at the work site, the mechanical pump 70 and molecular pump 69 accessories can be omitted, and the device can be connected to the large vacuum unit on site through a vacuum pipeline connection assembly.

[0062] The baking module consists of a vacuum container baking heating belt and a temperature control section. When a high vacuum level is required for on-site calibration, this module can be used to bake the calibration chamber 61. Under normal circumstances, it is not necessary to carry it with you.

[0063] When in use, considering the influence of different environmental conditions on the vacuum gauge calibration results and the usage conditions of the main standard, the on-site vacuum calibration device integrates three methods: static comparison method, dynamic comparison method, and pressure decay method, and can achieve a calibration range of 10. -5 -10 5 Online calibration of vacuum gauges or vacuum systems; different modules and methods are selected to calibrate vacuum gauges according to on-site calibration requirements and working environment conditions.

[0064] When the calibration range of the vacuum gauge is 10 -1 -10 5 When Pa, the static comparison method is used for calibration.

[0065] When using this method, a first capacitive thin-film vacuum gauge 63 with a full-scale range of 133.3 Pa (1 Torr) and a second capacitive thin-film vacuum gauge 64 with a full-scale range of 133333.3 Pa (1000 Torr) can be selected as standard vacuum gauges. The required components include a calibration chamber 61, the first capacitive thin-film vacuum gauge 63, the second capacitive thin-film vacuum gauge 64, as well as a gas supply and sample injection module and a gas extraction module. Other vacuum gauges, pressure attenuation modules and their related gas supply pipelines are not included. If a vacuum extraction unit is available at the calibration site, the gas extraction module can be omitted. At the same time, the influence of ambient temperature on the capacitive thin-film vacuum gauge must be considered. Before calibration, correction experiments of the capacitive thin-film vacuum gauge at different temperatures are completed in the laboratory to obtain its temperature correction curve for on-site temperature correction.

[0066] During calibration, sequentially open the mechanical pump 70, the fourth evacuation valve 77, the molecular pump 69, and the third evacuation valve 76 (if connected to a large vacuum unit in the field via a vacuum pipeline connection assembly, simply open the second evacuation valve 74). Then, evacuate the calibration chamber 61 to a temperature less than 10°C. 4 The background pressure of Pa (i.e., 10 Pa) -1 -10 4 After the target pressure (within the Pa range) is reached, the third extraction valve 76 is closed, and the fine-tuning valve 55 is opened to introduce calibration gas into the calibration chamber 61. When the calibration chamber 61 reaches the required static equilibrium calibration pressure, the fine-tuning valve 55 is closed, and the readings of the first capacitive thin-film vacuum gauge 63, the second capacitive thin-film vacuum gauge 64, and the vacuum gauge under calibration 65 are recorded respectively. The ratio of the two is the calibration factor of the vacuum gauge under calibration 65. The temperature change during the calibration process is recorded, and the calibration results are corrected using the laboratory correction curve.

[0067] When the calibration range of the vacuum gauge is 10 -5 -10 -1 When the voltage is Pa and there is no electromagnetic field or strong noise interference at the work site, especially when the vibration is small, the dynamic comparison method can be considered for calibration.

[0068] Generally, a secondary standard ionization vacuum gauge (or a magnetic levitation rotor vacuum gauge 80) is used as the standard vacuum gauge. In this case, no other vacuum gauge is carried. If a vacuum unit is available on site, the relevant gas supply and extraction pipelines are not required. Before calibration, correction experiments of the magnetic levitation rotor vacuum gauge 80 at different temperatures are completed in the laboratory to obtain its temperature correction curve.

[0069] During calibration, install the pressure decay module and sequentially open the mechanical pump 70, the fourth evacuation valve 77, the molecular pump 69, and the third evacuation valve 76 (if connected to a large vacuum unit in the field via a vacuum pipeline connection assembly, simply open and close the second evacuation valve 74) to evacuate the calibration chamber 61 to 10°C. -5 -10 -1The background pressure within the Pa range; with the fourth extraction valve 77 in the open state, adjust the fine-tuning valve 55 to inject gas of different flow rates into the upstream chamber 58 for pressurization and calibration. When the calibration chamber 61 reaches the required dynamic equilibrium calibration pressure, record the readings of the sub-standard ionization vacuum gauge (or magnetic levitation rotor vacuum gauge 80) and the vacuum gauge 65 under calibration, respectively. The ratio of the two is the calibration factor of the vacuum gauge 65 under calibration. At the same time, record the temperature change during the calibration process and use the correction curve to correct the calibration results.

[0070] The composite vacuum gauge 79 is used in parallel with the sub-standard ionization vacuum gauge (or magnetic levitation rotor vacuum gauge 80) in the dynamic comparison method. It is intended to supplement the measurement range. If the measurement range of the sub-standard ionization vacuum gauge (or magnetic levitation rotor vacuum gauge 80) is insufficient or the accuracy of a certain range is insufficient, the composite vacuum gauge 79 needs to be connected as a standard.

[0071] If there is strong vibration or strong magnetic field at the work site, the secondary standard ionization vacuum gauge (or magnetic levitation rotor vacuum gauge 80) cannot be used as the standard vacuum gauge for comparison and calibration with the vacuum gauge 65 under calibration. In this case, the pressure decay method can be considered for calibration.

[0072] Generally, the first capacitor thin-film vacuum gauge 63 is used as a reference standard to measure the pressure of the upstream chamber 58. During the calibration process, only the effect of temperature needs to be considered.

[0073] During calibration, the upstream chamber 58 is initially evacuated using mechanical pump 70 and the first evacuation valve 72 to eliminate gas interference within the chamber. After the initial evacuation, the first evacuation valve 72 is closed. The gas supply valve 56 is opened, and calibration gas is introduced into the upstream chamber 58 through the high-pressure gas source 57. A certain amount of calibration gas is introduced into the upstream chamber 58 by adjusting the fine-tuning valve 55. The upstream monitoring valve 68 is opened, and the gas pressure in the upstream chamber 58 is maintained at 10 kcal / kg by reading the first capacitive thin-film vacuum gauge 63. -1 Within the range of -100Pa; simultaneously open the fourth evacuation valve 77 to evacuate the calibration chamber 61 to the ultimate vacuum, and then close the fourth evacuation valve 77 (if connected to a large vacuum unit in the field via a vacuum pipeline connection assembly, simply open and close the second evacuation valve 74).

[0074] If the pressure attenuation ratio of the small chamber 59 is 1000, then a pressure of 10 can be formed in the calibration chamber 61. -4 -10 -1 The pressure range of Pa; record the readings of the first capacitive thin-film vacuum gauge 63 and the vacuum gauge under calibration 65 respectively, substitute the reading p of the first capacitive thin-film vacuum gauge 63 and the actual measured value of the pressure attenuation ratio K into the calculation, and the standard pressure value of the calibration chamber 61 can be calculated; the ratio of the standard pressure value to the reading of the vacuum gauge under calibration 65 is the calibration factor of the vacuum gauge under calibration 65.

[0075] The pressure in calibration chamber 61 meets the following requirements:

[0076] p = p1 / K, where p is the pressure in calibration chamber 61, p1 is the pressure measured in upstream chamber 58, and K is the pressure attenuation ratio. By measuring the pressure and temperature changes in upstream chamber 58 and combining the known attenuation ratio, the actual pressure value of calibration chamber 61 is calculated, and the indication error of the vacuum gauge 65 being calibrated is determined. Throughout the process, it is necessary to ensure that the system is well sealed to prevent external gas from seeping in and affecting the calibration accuracy.

[0077] Based on the method for determining the gas flow state, theoretical calculations show that when the gas pressure range in the upstream chamber 58 is 10... -1 At -100 Pa, gas molecules are in a molecular flow state; under these conditions, by measuring the standard pressures of calibration chamber 61 and upstream chamber 58 respectively, the pressure attenuation ratio of the orifice can be calculated using the formula p=p1 / K; since this method uses the vacuum level of upstream chamber 58 as the standard pressure, it can be applied when the ultimate vacuum level of calibration chamber 61 is 10... -6 In the case of Pa, the lower limit of calibration is extended to 10. -5 The order of magnitude is Pa.

[0078] Unless otherwise specified, the above methods of fixing all use common technical means employed by industry professionals, such as welding, nesting, or threaded fixing.

[0079] The following points need to be explained:

[0080] The accompanying drawings of the embodiments of the present invention only involve the structures involved in the embodiments of the present invention; other structures can refer to general designs.

[0081] For clarity, the thickness of layers or regions is enlarged or reduced in the accompanying drawings used to describe embodiments of the invention; that is, these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being “above” or “below” another element, the element may be “directly” located “above” or “below” the other element, or there may be intermediate elements present.

[0082] Where there is no conflict, the embodiments of the present invention and the features thereof can be combined with each other to obtain new embodiments.

[0083] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A vacuum pipe connection assembly, characterized in that, The device includes a connecting seat (1) and a vacuum bellows (2) disposed on the connecting seat (1), and also includes a locking and stabilizing assembly connected to the upper side of the vacuum bellows (2). The upper side of the locking and stabilizing assembly is connected to the metal bellows (4) through a connecting bend (3). The locking and stabilizing assembly is used to lock and support the vacuum bellows (2) after the height adjustment is completed. The side of the connecting seat (1) is provided with a connecting port (5), which is used to connect to a vacuum calibration device. The connecting seat (1) is provided with a conductive cavity (6), and the connecting port (5) is connected to the vacuum bellows (2) through the conductive cavity (6). The locking and stabilizing assembly includes a locking mechanism and a stabilizing mechanism. The locking mechanism includes a warning cavity (7) located between the vacuum bellows (2) and the connecting bend (3) and a warning ball core (8) rotatably fitted within the warning cavity (7). The warning ball core (8) has a channel (9). Locking grooves (10) are provided opposite to each other at the upper ends of the connecting seat (1). A locking slider (11) is slidably fitted within the locking grooves (10). The locking slider (11) is fixed to both sides of the warning cavity (7) by a locking connecting plate (12). An installation cavity (13) is provided on the locking slider (11). A mating post (14) is provided in the middle of the installation cavity (13). Warning rotating shafts are provided on both sides of the warning ball core (8). (15) The prompting shaft (15) extends out of the outside of the prompting cavity (7) and rotates with the mating post (14). The end of the prompting shaft (15) is provided with a locking knob (16). Rotating the prompting shaft (15) locks the locking driven plate (26), and the prompting ball core (8) is connected to the prompting cavity (7). An elliptical protrusion (17) is keyed on the prompting shaft (15), and the elliptical protrusion (17) is located between the two mating posts (14). The two sides of the mounting cavity (13) are slidably fitted with the first locking post (18). The inner side of the first locking post (18) is fixed with the locking drive plate (19), and the middle of the locking drive plate (19) is rotated. There is a locking roller (20), which rolls with the side of the elliptical protrusion (17); a locking return spring (21) is sleeved on the first locking post (18) between the locking drive plate (19) and the mounting cavity (13), which is used to force the locking roller (20) to contact with the elliptical protrusion (17); a second locking post (23) is slidably fitted on the outside of the first locking post (18); a compression spring (25) is provided in the constriction groove (22); a locking follower plate (26) is provided on the outside of the second locking post (23), which is used to contact and press with the locking slide groove (10);The stabilizing mechanism includes several stabilizing sliders (27) that slide on the locking groove (10). The inner side of the stabilizing slider (27) is fixed to the support plate (29) by the support column (28). The uppermost stabilizing slider (27) is connected to the locking slider (11) by the slider connecting plate (30). The uppermost and lowermost stabilizing sliders (27) are provided with L-shaped cross-section first pull plate (31) on their sides, and the middle stabilizing slider (27) is provided with U-shaped cross-section second pull plate (32) on its side. After the uppermost slider rises to a certain height, the end of the first pull plate (31) hooks onto the second pull plate (32). The side of the stabilizing slider (27) is provided with a narrowed recycling groove (38), and the support column (28) slides in conjunction with the recycling groove (38). The support plate (29) A stabilizing spring (39) is fitted on the support column (28) between the stabilizing slider (27) and the support column (28). The stabilizing spring (39) is used to force the support plate (29) to slide towards the vacuum bellows (2). A traction plate (40) is provided on the side of the stabilizing slider (27). A traction channel (41) is opened on the traction plate (40). The traction channel (41) is connected to the inside of the recovery tank (38). The end of the support column (28) is fixed to one end of the traction rope (42). The other end of the traction rope (42) passes through the traction channel (41) and is fixed to the traction head (43) with an I-shaped cross section. The other side of the traction head (43) is slidably engaged with the traction rail (35). Guide posts (44) are provided on both sides of the traction plate (40). The end of the traction head (43) is slidably engaged with the guide post (44).

2. The vacuum pipe connection assembly according to claim 1, characterized in that, The locking groove (10) and the connecting seat (1) are provided with mounting ears (33) on the side. The mounting ears (33) are slidably fitted with the traction shaft (34). The outer side of the traction shaft (34) has an anti-detachment structure to prevent the traction shaft (34) from coming out of the mounting ears (33). The inner side of the traction shaft (34) is fixed to the traction rail (35). A traction spring (36) is threaded on the traction shaft (34). The traction spring (36) is stuck between the traction rail (35) and the mounting ear (33). An elliptical cross-section extrusion block (37) is keyed to the prompting shaft (15). The extrusion block (37) is in contact with the inner side of the traction rail (35). The stabilizing slider (27) is slidably fitted with the support column (28).

3. A vacuum pipe connection assembly according to claim 1, characterized in that, The vacuum bellows (2) adopts a double-layer bellows structure. The lower side of the vacuum bellows (2) is provided with an injection port (45) communicating with the middle cavity. A guide plate (46) is provided between the locking slide grooves (10). The connecting bend (3) slides with the guide plate (46) through a linear bearing. A bellows return spring (47) is sleeved on the outside of the connecting bend (3). The bellows return spring (47) is stuck between the guide plate (46) and the locking and stabilizing component. A fluid push rod (49) is installed on the side of the connecting seat (1) through a push rod bracket (48). A fluid column (50) is provided on the side of the connecting seat (1). A fluid piston (51) is slidably fitted inside the fluid column (50). The push head of the fluid push rod (49) is fixed to the fluid piston (51). A fluid channel (52) is provided on the connecting seat (1). One side of the fluid channel (52) is connected to the fluid column (50), and the other side of the fluid channel (52) is connected to the injection port (45) of the vacuum bellows (2) through the fluid hose (53). The vacuum bellows (2), the fluid hose (53), the fluid channel (52), and the fluid column (50) are filled with magnetorheological fluid (54). A magnetic field emitting component is provided on the side of the locking slide groove (10).

4. A vacuum calibration device, characterized in that, It includes the vacuum pipe connection assembly as described in claim 1, and also includes a portable calibration device.

5. A vacuum calibration device according to claim 4, characterized in that, The portable calibration device includes a gas supply and sample injection module, a pressure attenuation module, a pressure measurement and calibration module, and a gas extraction module; the gas supply and sample injection module is used to provide compliant calibration gas to the pressure measurement and calibration module; The pressure attenuation module is located between the gas supply and sample injection module and the pressure measurement and calibration module, and is used to provide accurate pressure attenuation for range calibration; the pressure measurement and calibration module realizes pressure monitoring and vacuum gauge calibration comparison; the baking module is used to bake the calibration chamber (61) of the pressure measurement and calibration module when the vacuum level required for on-site calibration is high; the evacuation module is used to evacuate the vacuum and build the vacuum environment required for calibration.

6. A vacuum calibration device according to claim 5, characterized in that, The portable calibration device also includes a baking module, which is used to bake the calibration chamber (61) of the pressure measurement and calibration module when a high vacuum level is required for on-site calibration.

7. A vacuum calibration device according to claim 5, characterized in that, The gas supply and sample injection module consists of a fine-tuning valve (55), a gas supply valve (56), and a high-pressure gas source (57) connected in sequence; The pressure attenuation module includes an upstream chamber (58), a small orifice chamber (59), and an attenuation valve (60) connected in sequence. One end of the upstream chamber (58) is used to connect to the fine-tuning valve (55), and the other end is used to connect to the input end of the attenuation valve (60) through the small orifice chamber (59). The output end of the attenuation valve (60) is used to connect to the calibration chamber (61) of the pressure measurement and calibration module to realize the introduction of the attenuated gas. The pressure measurement and calibration module includes a spherical calibration chamber (61), which serves as the core connection node for direct connection to the vacuum gauge under test (65). One side of the calibration chamber (61) is connected to a first capacitive thin-film vacuum gauge (63) and a second capacitive thin-film vacuum gauge (64) via a first cross-shaped connecting tube (62). A first calibration valve (66) is provided between the first capacitive thin-film vacuum gauge (63) and the first cross-shaped connecting tube (62). A second calibration valve is provided between the second capacitive thin-film vacuum gauge (64) and the first cross-shaped connecting tube (62). (67); The first capacitive thin-film vacuum gauge (63) is connected to the upstream chamber (58) through the upstream monitoring valve (68); The other side of the calibration chamber (61) is connected to the composite vacuum gauge (79), the magnetic levitation rotor vacuum gauge (80) or the sub-standard ionization vacuum gauge and the vacuum gauge under calibration (65) through the second cross-connecting pipe (78); The second cross-connecting pipe (78) is connected to the magnetic levitation rotor vacuum gauge (80) through the second calibration valve (67), which can realize the pressure monitoring of the calibration chamber (61) and the upstream chamber (58) and the calibration of the vacuum gauge under calibration (65); The vacuum module consists of a molecular pump (69) and a mechanical pump (70), which can evacuate the calibration chamber (61), the upstream chamber (58), and various pipelines. The mechanical pump (70) is connected to the upstream chamber (58) through the first vacuum branch (71), and the first vacuum branch (71) is equipped with a first vacuum valve (72). The first vacuum branch (71) is used to evacuate the upstream chamber (58). The mechanical pump (70) is connected to the calibration chamber (61) through the second vacuum branch (73), and the second vacuum branch (73) is equipped with a second vacuum valve (74) for bypassing the calibration chamber (61). The mechanical pump (70) is connected to the calibration chamber (61) through the third vacuum branch (75), and the third vacuum branch (75) is equipped with a molecular pump (69). The molecular pump (69) is equipped with a third vacuum valve (76) and a fourth vacuum valve (77) on both sides.

Images