Multi-degree-of-freedom staggered active vibration absorption method, system, lithographic apparatus, and storage medium
By using a multi-degree-of-freedom staggered active vibration absorption method, the problems of resource competition and high energy consumption in traditional control systems are solved, achieving more stable and efficient vibration suppression and improving the system's adaptability and robustness.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING IC-EAST SEMICONDUCTOR TECHNOLOGY CO LTD
- Filing Date
- 2026-02-12
- Publication Date
- 2026-06-05
Smart Images
Figure CN121680504B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a multi-degree-of-freedom staggered active vibration absorption method, system, lithography equipment, and storage medium, belonging to the field of lithography machine vibration isolation technology. Background Technology
[0002] In high-end equipment such as lithography machines and precision measurement systems, multi-degree-of-freedom active vibration absorption technology of micro-stages is crucial for ensuring their ultra-precision performance. Existing technologies can already achieve parallel vibration suppression of multiple degrees of freedom.
[0003] However, such traditional control schemes have inherent defects: First, the system's computing resources and actuator output are limited, and when multiple degrees of freedom vibrations occur simultaneously, resource competition is likely to occur, leading to a decline in control performance or even instability; Second, the actuator's continuous full-time working mode has high energy consumption and low efficiency, which exacerbates equipment wear and tear; Third, the fixed parameter control strategy is difficult to adapt to complex time-varying disturbances and lacks robustness.
[0004] Therefore, there is an urgent need in this field for a new method that can achieve intelligent scheduling of control resources and optimization of energy efficiency while ensuring vibration suppression, so as to improve the overall stability and economy of the system. Summary of the Invention
[0005] In view of this, the present invention proposes a multi-degree-of-freedom staggered active vibration absorption method, system, lithography equipment and storage medium, which aims to overcome the technical defects of traditional multi-degree-of-freedom active vibration control systems, such as potential instability, high energy consumption and poor adaptability to time-varying disturbances caused by competition for control resources, thereby achieving a more stable, efficient and adaptive vibration suppression.
[0006] The first objective of this invention is to provide a multi-degree-of-freedom staggered active vibration absorption system.
[0007] The second objective of this invention is to provide a multi-degree-of-freedom staggered active vibration absorption method.
[0008] The third objective of this invention is to provide a photolithography apparatus.
[0009] A fourth objective of this invention is to provide a computer-readable storage medium.
[0010] The first objective of this invention can be achieved by adopting the following technical solution:
[0011] A multi-degree-of-freedom staggered active vibration absorption system, the system comprising:
[0012] An actuator unit includes multiple actuators, each corresponding to multiple degrees of freedom;
[0013] A sensor unit is used to detect vibration data of the multiple degrees of freedom in real time;
[0014] The control unit, connected to the actuator unit and the sensor unit, is configured to:
[0015] Based on the vibration data, determine the vibration state parameters of each degree of freedom at the current moment;
[0016] Based on the vibration state parameters, control commands are generated for the multiple actuator units according to a preset interleaved control strategy.
[0017] Based on the control command, the actuator unit is driven to generate a corresponding active damping force.
[0018] Furthermore, determining the vibration state parameters of each degree of freedom at the current moment based on the vibration data includes:
[0019] Based on the first vibration data, the high-frequency band vibration region and discrete peak vibration frequency are determined.
[0020] The high-frequency band vibration region and the discrete peak vibration frequency are processed according to a hierarchical filtering strategy to obtain the filtering result. The hierarchical filtering strategy includes a low-pass filter and a notch filter and their filtering parameters.
[0021] When the filtering result matches the simulation result, the third vibration data is obtained based on the second vibration data and according to the hierarchical filtering strategy.
[0022] Based on the third vibration data, determine the vibration state parameters of each degree of freedom at the current moment;
[0023] The filtering parameters include a center frequency, a depth, and a width, wherein the depth is configured to be 0.018~0.022 and the width is configured to be 0.18~0.22.
[0024] Furthermore, after driving the actuator unit to generate a corresponding active damping force based on the control command, the method further includes:
[0025] The first set of sensor units is used to collect fourth vibration data, and the first set of sensor units is set on the equipment base of the lithography machine.
[0026] The second set of sensor units is used to collect the fifth vibration data, and the second set of sensor units is set on the motion stage base of the lithography machine.
[0027] Based on the fourth and fifth vibration data, dual vibration isolation curves are generated, and the vibration isolation effect is evaluated through comparative analysis and quantitative assessment.
[0028] Among the quantitative evaluation indicators are the decibel values of vibration attenuation at a specific frequency point.
[0029] Furthermore, the vibration state parameters include vibration force values, and the generation of control commands for the plurality of actuator units based on the vibration state parameters and according to a preset interleaved control strategy includes:
[0030] The control cycle is divided into K consecutive time slots, where K is an integer greater than 1;
[0031] At the beginning of each time slot, the vibration force values of multiple degrees of freedom are acquired in real time, and the vibration force value of each degree of freedom is compared with a preset first threshold and a second threshold, wherein the first threshold is greater than the second threshold.
[0032] Based on the comparison results, control commands are assigned to the actuators corresponding to each degree of freedom.
[0033] Within the current control cycle, comparison operations and instruction allocation operations are performed sequentially for each time slot.
[0034] Furthermore, the step of assigning control commands to the actuator corresponding to each degree of freedom based on the comparison results includes:
[0035] If the vibration force value is greater than or equal to the first threshold, a first control command with a first priority flag is generated for the corresponding degree of freedom. The first control command is used to control the corresponding actuator to work with a first gain.
[0036] If the vibration force value is less than the first threshold and greater than or equal to the second threshold, a second control command with a second priority flag is generated for the corresponding degree of freedom. The second control command is used to control the corresponding actuator to work with a second gain, where the first gain is greater than the second gain.
[0037] The controller is configured to, within the current time slot, prioritize executing all control instructions carrying the first priority flag, and then execute all control instructions carrying the second priority flag.
[0038] If the vibration force value is less than the second threshold, no active control command will be generated for the corresponding degree of freedom within the time slot.
[0039] Furthermore, the high-frequency band vibration region is determined to be a frequency range greater than 100Hz.
[0040] Further, vibration isolation testing begins, and sinusoidal frequency sweep is initiated, sweeping once in each of the six degrees of freedom, with a frequency range of 1Hz to 200Hz.
[0041] The second objective of this invention can be achieved by adopting the following technical solution:
[0042] A multi-degree-of-freedom staggered active vibration absorption method, the method comprising:
[0043] Acquire vibration data;
[0044] Based on the vibration data, determine the vibration state parameters of each degree of freedom at the current moment;
[0045] Based on the vibration state parameters, control commands for multiple actuator units are generated according to a preset interleaved control strategy.
[0046] Based on the control command, the actuator unit is driven to generate a corresponding active damping force.
[0047] The third objective of this invention can be achieved by adopting the following technical solution:
[0048] A photolithography apparatus includes a processor and a memory for storing a processor-executable program. When the processor executes the program stored in the memory, it implements the above-described multi-degree-of-freedom interleaved active vibration absorption method.
[0049] The fourth objective of this invention can be achieved by adopting the following technical solution:
[0050] A computer-readable storage medium storing a program that, when executed by a processor, implements the above-described multi-degree-of-freedom staggered active vibration absorption method.
[0051] The embodiments of the present invention have the following beneficial effects compared with the prior art:
[0052] 1. It solved the problem of controlling resource competition and significantly improved system stability.
[0053] Traditional multi-degree-of-freedom control schemes are prone to saturation of computational resources and actuator output, leading to a comprehensive performance degradation when multiple degrees of freedom experience concurrent and severe vibrations. This invention introduces a time-sharing threshold control and priority scheduling mechanism, discretizing continuous control tasks into different time slots and assigning different execution priorities to tasks with different vibration energy levels. This enables the system to intelligently avoid resource conflicts, and when faced with complex disturbances, it can always systematically and prioritize suppressing the most violent degrees of freedom, fundamentally avoiding the risk of system instability caused by resource competition and greatly enhancing the reliability and stability of the control.
[0054] 2. It has achieved precise energy efficiency management, significantly reducing system energy consumption and losses.
[0055] This invention constructs a three-level control response mechanism of "strong gain / weak gain / standby" by setting a first threshold and a second threshold. When the vibration energy of a certain degree of freedom is lower than the second threshold, the system does not generate active control commands for it during that time slot, causing the corresponding actuator to enter a "standby" state. This "on-demand supply" control mode significantly reduces ineffective energy consumption compared to traditional continuous full-time operation schemes, while effectively reducing mechanical wear and heat loss of actuators, thus helping to extend the service life of the entire system. It is particularly suitable for high-end precision equipment that requires long-term continuous operation.
[0056] 3. The system's adaptive capability has been enhanced, and its robustness in suppressing time-varying disturbances has been improved.
[0057] The control decisions of this invention rely on vibration state parameters (such as vibration force values) acquired in real time for each time slot, rather than fixed controller parameters. This enables the system to dynamically sense changes in the vibration energy levels of each degree of freedom and automatically adjust the allocation strategy of control resources. Therefore, the system possesses rapid response and adaptive suppression capabilities to time-varying and uncertain disturbance sources, maintaining excellent vibration isolation performance and exhibiting stronger robustness even under complex operating conditions where the main vibration modes and energy distribution change dynamically.
[0058] 4. The response time of the control system has been optimized.
[0059] By performing rapid threshold determination and priority sorting at the beginning of each time slot, the system can respond to vibration states within a defined period and prioritize the most urgent tasks. This mechanism ensures less delay and faster response in suppressing critical vibration modes, which is particularly beneficial for suppressing high-frequency or impact disturbances, further improving the system's dynamic performance. Attached Figure Description
[0060] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.
[0061] Figure 1 This is a flowchart of a multi-degree-of-freedom staggered active vibration absorption method according to an embodiment of the present invention.
[0062] Figure 2 This is a structural diagram of a multi-degree-of-freedom staggered active vibration absorption system according to an embodiment of the present invention.
[0063] Figure 3 This is a structural diagram of a multi-degree-of-freedom staggered active vibration absorption device according to an embodiment of the present invention. Detailed Implementation
[0064] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.
[0065] Example 1:
[0066] Figure 1 This is a flowchart illustrating a multi-degree-of-freedom staggered active vibration absorption method according to an embodiment of this application. Figure 1 As shown, the method includes: S101. Acquiring vibration data. S102. Determining the vibration state parameters of each degree of freedom at the current moment based on the vibration data. S103. Generating control commands for multiple actuator units based on the vibration state parameters and according to a preset staggered control strategy. S104. Driving the actuator units to generate corresponding active damping forces based on the control commands.
[0067] Figure 2 This is a structural diagram of a multi-degree-of-freedom staggered active vibration absorption system according to an embodiment of this application. Figure 2 As shown, the system includes: an actuator unit 100, comprising multiple actuators (the number of actuators is greater than or equal to 2 and less than or equal to 6), each corresponding to multiple degrees of freedom; a sensor unit 200, used to detect vibration data of the multiple degrees of freedom in real time; and a control unit 300, connected to the actuator unit and the sensor unit, configured to execute steps S101 to S104, i.e., the multi-degree-of-freedom staggered active vibration absorption method.
[0068] In some embodiments, determining the vibration state parameters of each degree of freedom at the current moment based on the vibration data includes: S1021. Determining the high-frequency band vibration region and discrete peak vibration frequency based on the first vibration data. S1022. Processing the high-frequency band vibration region and the discrete peak vibration frequency according to a hierarchical filtering strategy to obtain a filtering result, wherein the hierarchical filtering strategy includes a low-pass filter and a notch filter and their filtering parameters. S1023. When the filtering result matches the simulation result, obtaining the third vibration data based on the second vibration data and according to the hierarchical filtering strategy. S1024. Determining the vibration state parameters of each degree of freedom at the current moment based on the third vibration data.
[0069] In the above embodiments, the filtering parameters include center frequency, depth, and width, wherein the depth is configured to be 0.018~0.022, and the width is configured to be 0.18~0.22.
[0070] In the above embodiments, the high-frequency band vibration region is determined to be a frequency range greater than 100Hz.
[0071] In the above embodiment, vibration isolation testing begins with a sinusoidal frequency sweep, sweeping once in each of the six degrees of freedom, with a frequency range of 1Hz to 200Hz. The purpose is to stimulate performance under passive vibration isolation. The data is viewed in logarithmic coordinates, with the horizontal axis representing frequency and the vertical axis representing vibration acceleration, i.e., vibration level.
[0072] Specifically, a sweep frequency range is determined. Excitation within the sweep frequency range is applied in multiple motion degrees of freedom directions to obtain an initial vibration response spectrum characterizing the dynamics of the lithography machine. Based on the initial vibration response spectrum, a high-frequency band vibration region and at least one discrete peak vibration frequency that have a critical impact on lithography accuracy are identified. The high-frequency band vibration region and the discrete peak vibration frequency are then processed using a hierarchical filtering strategy.
[0073] As an optional implementation, a low-pass filter is first configured to suppress the overall vibration energy of the high-frequency band vibration region, and then a notch filter is configured to precisely cancel the discrete peak vibration frequencies. For example, a notch filter and a low-pass filter are mainly used for coordinated processing. The low-pass filter is used to suppress the overall high-frequency band over a wide bandwidth. For instance, when vibrations above 120Hz are generally large, this filter can be applied to suppress the overall response peak. Subsequently, based on the peak values appearing at specific frequency points (such as 15Hz, 40Hz, etc.) on the vibration curve, a notch filter is applied specifically to achieve precise suppression of local resonant frequencies, thereby gradually reducing the vibration amplitude. After each filter application, the suppression effect must be confirmed through simulation, and then the corresponding filter parameters, including frequency (F), depth (Q, generally set to 0.02), and bandwidth (Z, generally set to 0.2), are input into the debugging software.
[0074] It is worth noting that this embodiment provides a standardized debugging process and optimized key parameters (such as notch depth and bandwidth), reducing reliance on operator experience and ensuring consistency and high reproducibility of the technology application. By using simulation as a preliminary verification step, the filtering effect is pre-verified in the software, avoiding system risks that may arise during on-site debugging and ensuring debugging safety and final performance.
[0075] In some embodiments, after driving the actuator unit to generate a corresponding active damping force based on the control command, the method further includes: S105. Collecting fourth vibration data through a first set of sensor units and setting the first set of sensor units on the equipment base of the lithography machine. S106. Collecting fifth vibration data through a second set of sensor units and setting the second set of sensor units on the motion stage base of the lithography machine. S107. Generating a dual vibration isolation curve based on the fourth and fifth vibration data and evaluating the vibration isolation effect through comparative analysis and quantification. The quantification evaluation index includes the decibel value of vibration attenuation at a specific frequency point. For example, the vibration level attenuation at 10Hz can reach -20dB. The horizontal axis of the dual vibration isolation curve represents frequency, and the vertical axis represents vibration acceleration, i.e., vibration level.
[0076] It should be noted that the equipment base is installed below the vibration damper, and its vibration is in an unisolated state; the marble base of the motion table is installed above the vibration damper, and active control force is applied through the actuator to achieve active vibration isolation in this area. For example, when the sensor detects a 5N disturbance force in the positive X-axis direction, the control system instructs the actuator to generate an equal and opposite control force (5N in the negative X-axis direction) to achieve real-time vibration cancellation. It should also be noted that different components of the vibration damping system have specialized functions for the two forms of energy transmitted by vibration—force and acceleration. The filter acts on the vibration acceleration signal, handling its filtering; while the actuator acts on the vibration force, canceling it out through its output force. This division of labor achieves synergistic vibration suppression.
[0077] In some embodiments, the vibration state parameters include vibration force values, and the generation of control commands for the plurality of actuator units based on the vibration state parameters and according to a preset interleaved control strategy includes:
[0078] S1031. Divide the control cycle into K consecutive time slots, where K is an integer greater than 1.
[0079] In this step, the time slot length of the control cycle is determined based on the shortest time required to complete one full control operation. The full control operation includes: calculation and comparison of vibration state parameters based on sensor signals, generation and allocation of corresponding control commands, and output and activation of the actuator driving force. The time slot length must be greater than or equal to the sum of the time delays of the above steps to ensure the correctness of the control timing.
[0080] S1032. At the beginning of each time slot, the vibration force values of multiple degrees of freedom are acquired in real time, and the vibration force value of each degree of freedom is compared with a preset first threshold and a second threshold, wherein the first threshold (e.g., 10N) is greater than the second threshold (e.g., 4N).
[0081] In this step, the vibration force value is calculated based on the vibration acceleration.
[0082] For example, the vibration force value is estimated using an observer based on a system dynamics model. Specifically, based on the load vibration acceleration signal measured by the sensor unit, combined with the pre-identified system mass matrix M, damping matrix C, and stiffness matrix K, F is calculated. estimated = M a + C v + K x, the generalized vibrational force vector F acting on the load is estimated in real time. estimated , where a is the generalized acceleration vector, and v and x are the generalized velocity vector and generalized displacement vector obtained by integrating a, respectively.
[0083] Alternatively, a force sensor can be used to measure directly.
[0084] S1033. Based on the comparison results, assign control commands to the actuators corresponding to each degree of freedom.
[0085] In some embodiments, assigning control instructions to the actuator corresponding to each degree of freedom based on the comparison result includes: S10331. If the vibration force value is greater than or equal to the first threshold, a first control instruction with a first priority flag is generated for the corresponding degree of freedom. The first control instruction is used to control the corresponding actuator to operate at a first gain. S10332. If the vibration force value is less than the first threshold but greater than or equal to the second threshold, a second control instruction with a second priority flag is generated for the corresponding degree of freedom. The second control instruction is used to control the corresponding actuator to operate at a second gain, where the first gain is greater than the second gain. The controller is configured to, within the current time slot, prioritize executing all control instructions carrying the first priority flag, and then execute all control instructions carrying the second priority flag. S10333. If the vibration force value is less than the second threshold, no active control instruction is generated for the corresponding degree of freedom within the time slot.
[0086] In the above embodiments, the specific values of the first gain and the second gain are determined through simulation and experiment. For example, the value of the first gain ranges from 1.23 to 1.33, and the second gain is typically set to 1.05 to 1.1.
[0087] In other embodiments, the specific values of the first and second gains are determined by control theory calculations based on the dynamic model of the controlled object. The first gain is configured to provide strong vibration damping capability to quickly suppress large-amplitude vibrations; the second gain, which is smaller than the first gain, is configured to provide smooth sustaining control to achieve a balance between stability and energy efficiency. All gain values are subject to simulation verification and experimental fine-tuning.
[0088] S1034. Within the current control cycle, perform comparison operations and instruction allocation operations sequentially for each time slot.
[0089] Example 2:
[0090] Figure 3 This is a structural diagram of a multi-degree-of-freedom staggered active vibration absorption device according to an embodiment of this application. Figure 3 As shown, the device includes:
[0091] The acquisition module 301 is used to acquire vibration data.
[0092] The determination module 302 is used to determine the vibration state parameters of each degree of freedom at the current moment based on the vibration data.
[0093] The generation module 303 is used to generate control commands for multiple actuator units based on the vibration state parameters and according to a preset interleaved control strategy.
[0094] The drive module 304 is used to drive the actuator unit to generate a corresponding active damping force based on the control command.
[0095] Example 3:
[0096] Embodiments of this application also provide a photolithography apparatus, including: a memory storing an executable program; and a processor for running the program, wherein the program executes the methods in various embodiments of the present invention during runtime.
[0097] The aforementioned memory can refer to devices inside a computer used to store data and programs, including RAM, hard disks, etc. RAM can be used to temporarily store running programs and data, while hard disks can be used to store programs and data long-term. Memory enables the computer to read and write data and execute programs. The aforementioned processor is responsible for executing instructions in computer programs and performing data processing. It can also be responsible for controlling and executing various operations, including arithmetic operations, logical operations, and data transmission.
[0098] Example 4:
[0099] Embodiments of this application also provide a computer-readable storage medium including a stored executable program, wherein, when the executable program is running, it controls the device where the computer-readable storage medium is located to perform the methods of various embodiments of the present invention.
[0100] The aforementioned computer storage media can refer to the media used in computer memory to store certain discontinuous physical quantities. Computer storage media mainly include semiconductors, magnetic cores, magnetic drums, magnetic tapes, laser discs, etc. Computer-readable storage media include stored programs, which can be a set of instructions that a computer can recognize and execute, running on an electronic computer to meet certain information needs.
[0101] Example 5:
[0102] Embodiments of this application also provide a computer program product, including a computer program that, when executed by a processor, implements the methods of various embodiments of the present invention.
[0103] The aforementioned computer program products can refer to software programs that have been written, tested, and released, and can run on computers or other devices. Computer program products can include application programs, operating systems, utility software, etc., used to achieve specific functions or solve specific problems.
[0104] Example 6:
[0105] Embodiments of this application also provide a computer program product, including a non-volatile computer-readable storage medium for storing a computer program that, when executed by a processor, implements the methods in various embodiments of the present invention.
[0106] The aforementioned non-volatile computer-readable storage medium can refer to a medium for storing data. Non-volatile computer-readable storage media can retain data without loss when power is off and can be used to store long-term data, such as operating systems, applications, and user files. Non-volatile storage media can include hard disk drives, solid-state drives, optical disks, and flash memory storage devices, etc.
[0107] Example 7:
[0108] Embodiments of this application also provide a computer program that, when executed by a processor, implements the methods described in the various embodiments of the present invention.
[0109] The aforementioned computer program can refer to a set of instructions used to tell the computer to perform specific tasks or operations. Computer programs can be written by programmers using specific programming languages and can include algorithms, data structures, logic, and control flow. Computer programs can be used for a variety of purposes, including application software, operating systems, etc.
[0110] In the above embodiments of the present invention, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.
[0111] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units can be a logical functional division, and in actual implementation, there may be other division methods. For instance, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling, direct coupling, or communication connection may be through some interfaces; the indirect coupling or communication connection between units or modules may be electrical or other forms.
[0112] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0113] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.
[0114] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, read-only memory (ROM), random access memory (RAM), portable hard drives, magnetic disks, or optical disks.
[0115] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.
Claims
1. A multi-degree-of-freedom staggered active vibration absorption system, characterized in that, include: An actuator unit includes multiple actuators, each corresponding to multiple degrees of freedom; A sensor unit is used to detect vibration data of the multiple degrees of freedom in real time; The control unit, connected to the actuator unit and the sensor unit, is configured to: Based on the vibration data, determine the vibration state parameters of each degree of freedom at the current moment; Based on the vibration state parameters, control commands are generated for the multiple actuator units according to a preset interleaved control strategy. Based on the control command, the actuator unit is driven to generate a corresponding active damping force; The vibration state parameters include vibration force values. Based on the vibration state parameters, and according to a preset interleaved control strategy, control commands are generated for the multiple actuator units, including: The control cycle is divided into K consecutive time slots, where K is an integer greater than 1; At the beginning of each time slot, the vibration force values of multiple degrees of freedom are acquired in real time, and the vibration force value of each degree of freedom is compared with a preset first threshold and a second threshold, wherein the first threshold is greater than the second threshold. Based on the comparison results, control commands are assigned to the actuators corresponding to each degree of freedom. Within the current control cycle, comparison operations and instruction allocation operations are performed sequentially for each time slot; The step of assigning control commands to the actuator corresponding to each degree of freedom based on the comparison results includes: If the vibration force value is greater than or equal to the first threshold, a first control command with a first priority flag is generated for the corresponding degree of freedom. The first control command is used to control the corresponding actuator to work with a first gain. If the vibration force value is less than the first threshold and greater than or equal to the second threshold, a second control command with a second priority flag is generated for the corresponding degree of freedom. The second control command is used to control the corresponding actuator to work with a second gain, where the first gain is greater than the second gain. The controller is configured to, within the current time slot, prioritize the execution of all control instructions carrying the first priority flag, and then execute all control instructions carrying the second priority flag. If the vibration force value is less than the second threshold, no active control command will be generated for the corresponding degree of freedom within the time slot.
2. The multi-degree-of-freedom staggered active vibration absorption system according to claim 1, characterized in that, The determination of the vibration state parameters of each degree of freedom at the current moment based on the vibration data includes: Based on the first vibration data, the high-frequency band vibration region and discrete peak vibration frequency are determined. The high-frequency band vibration region and the discrete peak vibration frequency are processed according to a hierarchical filtering strategy to obtain the filtering result. The hierarchical filtering strategy includes a low-pass filter and a notch filter and their filtering parameters. When the filtering result matches the simulation result, the third vibration data is obtained based on the second vibration data and according to the hierarchical filtering strategy. Based on the third vibration data, determine the vibration state parameters of each degree of freedom at the current moment; The filtering parameters include a center frequency, a depth, and a width, wherein the depth is configured to be 0.018~0.022 and the width is configured to be 0.18~0.
22.
3. The multi-degree-of-freedom staggered active vibration absorption system according to claim 1, characterized in that, After driving the actuator unit to generate a corresponding active damping force based on the control command, the method further includes: The first set of sensor units is used to collect fourth vibration data, and the first set of sensor units is set on the equipment base of the lithography machine. The second set of sensor units is used to collect the fifth vibration data, and the second set of sensor units is set on the motion stage base of the lithography machine. Based on the fourth and fifth vibration data, dual vibration isolation curves are generated, and the vibration isolation effect is evaluated through comparative analysis and quantitative assessment. Among the quantitative evaluation indicators are the decibel values of vibration attenuation at a specific frequency point.
4. The multi-degree-of-freedom staggered active vibration absorption system according to claim 2, characterized in that, The high-frequency band vibration region is defined as the frequency range greater than 100Hz.
5. The multi-degree-of-freedom staggered active vibration absorption system according to any one of claims 1-4, characterized in that, Vibration isolation testing begins. Start sinusoidal frequency sweep, sweeping once in each of the six degrees of freedom, with a frequency range of 1Hz to 200Hz.
6. A multi-degree-of-freedom staggered active vibration absorption method, characterized in that, include: Acquire vibration data; Based on the vibration data, determine the vibration state parameters of each degree of freedom at the current moment; Based on the vibration state parameters, control commands for multiple actuator units are generated according to a preset interleaved control strategy. Based on the control command, the actuator unit is driven to generate a corresponding active damping force; The vibration state parameters include vibration force values. Based on the vibration state parameters, and according to a preset interleaved control strategy, control commands are generated for the multiple actuator units, including: The control cycle is divided into K consecutive time slots, where K is an integer greater than 1; At the beginning of each time slot, the vibration force values of multiple degrees of freedom are acquired in real time, and the vibration force value of each degree of freedom is compared with a preset first threshold and a second threshold, wherein the first threshold is greater than the second threshold. Based on the comparison results, control commands are assigned to the actuators corresponding to each degree of freedom. Within the current control cycle, comparison operations and instruction allocation operations are performed sequentially for each time slot; The step of assigning control commands to the actuator corresponding to each degree of freedom based on the comparison results includes: If the vibration force value is greater than or equal to the first threshold, a first control command with a first priority flag is generated for the corresponding degree of freedom. The first control command is used to control the corresponding actuator to work with a first gain. If the vibration force value is less than the first threshold and greater than or equal to the second threshold, a second control command with a second priority flag is generated for the corresponding degree of freedom. The second control command is used to control the corresponding actuator to work with a second gain, where the first gain is greater than the second gain. The controller is configured to, within the current time slot, prioritize the execution of all control instructions carrying the first priority flag, and then execute all control instructions carrying the second priority flag. If the vibration force value is less than the second threshold, no active control command will be generated for the corresponding degree of freedom within the time slot.
7. A photolithography apparatus, comprising a processor and a memory for storing a processor-executable program, characterized in that, When the processor executes the program stored in the memory, it implements the multi-degree-of-freedom interlaced active vibration absorption system as described in any one of claims 1 to 5.
8. A computer-readable storage medium storing a program, characterized in that, When the program is executed by the processor, it implements the multi-degree-of-freedom staggered active vibration absorption method as described in claim 6.