Double-coil induction PVT crystal growth device and use method

Abstract

The invention belongs to the technical field of crystal growth, and particularly discloses a double-coil induction PVT crystal growth device and a use method.The double-coil induction PVT crystal growth device comprises a shell, a heat preservation cylinder is fixedly installed in the shell, a crucible and a crucible cover are arranged in the heat preservation cylinder, and the crucible cover is arranged at the top of the crucible; the control assembly is used for accurately adjusting the internal temperature of the crucible and the crucible cover, and the control assembly is connected with the shell and the heat preservation cylinder; the feeding and discharging assembly is used for assisting a worker to disassemble and assemble the crucible and the crucible cover, and the feeding and discharging assembly is connected with the shell, the heat preservation cylinder, the crucible and the crucible cover. By arranging the adjusting assembly, the two heating coils can be used for heating the upper temperature area and the lower temperature area of the crucible respectively, so that the temperatures of the raw material area and the seed crystal area are effectively and independently controlled, the axial temperature gradient distribution during crystal growth is better controlled, the crystal growth rate is increased, and the crystal growth efficiency is improved. The crystal can be independently annealed, the stress in the crystal is reduced, and the crystal quality is improved.

Description

Technical Field

[0001] This invention belongs to the field of crystal growth technology, specifically relating to a dual-coil induction PVT crystal growth device and its usage method. Background Technology

[0002] Crystal growth technology is a technical system for preparing single crystals by controlling the crystallization process of melt, solution or gas phase. It mainly includes three categories: melt method, solution method and gas phase method. The physical vapor transport method in the gas phase method is a material preparation technology that grows crystals on seed crystals through physical sublimation. It is widely used in semiconductor, microelectronics and other fields. Its basic principle is that the raw material sublimates into a gas phase in the high temperature region. The gas phase material is transported to the surface of the seed crystal in the low temperature region through the temperature gradient and condenses, thereby realizing single crystal growth.

[0003] In the existing physical vapor transport (PVT) crystal growth process, single-coil induction heating cannot independently control the upper and lower temperature zones, nor can it effectively control the temperature gradient, affecting the quality and speed of crystal growth. Furthermore, after crystal growth is complete, it is inconvenient for workers to remove the crucible and crucible lid from the growth apparatus, hindering the cleaning of the crucible's interior and the removal of the finished crystal from the crucible lid, thus reducing crystal production efficiency. Therefore, designing a dual-coil induction PVT crystal growth apparatus and its usage method is a problem we currently need to solve. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a dual-coil induction PVT crystal growth device and its usage method.

[0005] To achieve the above objectives, the present invention provides a dual-coil induction PVT crystal growth apparatus and a method of use, comprising an outer shell, an insulation cylinder fixedly installed inside the outer shell, a crucible and a crucible lid disposed inside the insulation cylinder, and the crucible lid being disposed on the top of the crucible; A control component for precisely adjusting the internal temperature of the crucible and crucible lid, the control component being connected to the outer shell and the insulation cylinder; The loading and unloading assembly is used to assist workers in assembling and disassembling the crucible and crucible lid. The loading and unloading assembly is connected to the outer shell, the insulation cylinder, the crucible, and the crucible lid.

[0006] In the above technical solution, the control component further includes two heating coils sleeved on the outer wall of the insulation cylinder. The outer walls of the two heating coils are fixedly connected to a support frame. The upper and lower ends of the support frame are fixedly connected to arc-shaped baffles. The arc-shaped baffles are disposed between the outer shell and the insulation cylinder.

[0007] In the above technical solution, further, an arc rod is fixedly connected to the outer wall of the support frame, an inner rod of an electric push rod is fixedly connected to the end of the arc rod away from the support frame, a support plate is fixedly connected to the outer end of the electric push rod, and the support plate is fixedly installed on the outer wall of the outer shell.

[0008] In the above technical solution, the loading and unloading assembly further includes a protective shell fixedly installed on the outer wall of the outer shell, an air cylinder fixedly installed inside the protective shell, a piston rod slidably connected inside the air cylinder, a connector fixedly connected to the top of the piston rod through the protective shell, and an insulation board fixedly connected to the end of the connector away from the piston rod, the insulation board being inserted into the interior of the insulation cylinder.

[0009] In the above technical solution, the insulation board has a slot inside, a connecting block is slidably connected inside the slot, the connecting block is fixedly connected to the top of the crucible lid, a U-shaped spring is provided inside the insulation board, a limiting block is inserted inside the U-shaped spring, the limiting block is fixedly installed inside the insulation board, the U-shaped spring is inserted inside the slot, and the limiting block is sleeved on the outer wall of the connecting block.

[0010] In the above technical solution, further, an air pipe is fixedly connected to the outer wall of the air cylinder, the air pipe is inserted into the inside of the protective shell and the outer shell, a telescopic air rod is fixedly installed inside the outer shell, the air pipe is fixedly connected to the outer wall of the telescopic air rod, a heat preservation tray is fixedly connected to the top of the inner rod of the telescopic air rod, the heat preservation tray is inserted into the inside of the heat preservation cylinder, and the heat preservation tray is set at the bottom of the crucible.

[0011] A method of using a dual-coil induction PVT crystal growth apparatus includes the following steps: S1. Install the seed crystal inside the crucible lid, put the raw material into the inside of the crucible, and fix the crucible lid and crucible inside the heat preservation cylinder through the loading and unloading assembly; S2. Activate the regulating component to control the heating of the raw material area and seed crystal area inside the crucible and crucible lid separately, accelerate the crystal growth rate, and perform annealing treatment on the crystal after the crystal growth is completed to improve the crystal quality; S3. After crystal growth and annealing are completed, turn off the regulating component and control the loading and unloading component to separate and remove the crucible and crucible cover from the inside of the heat preservation cylinder. Remove the grown crystal from the crucible cover and clean the residual waste inside the crucible and crucible cover. Finally, check that there is no damage to each component and end the operation.

[0012] Compared with the prior art, the present invention has the following beneficial effects: By setting up the adjustment component, two heating coils can be used to heat the upper and lower temperature zones of the crucible separately, achieving the effect of adjusting the upper and lower temperature zones independently. This allows for effective individual temperature control of the raw material zone and the seed crystal zone, better control of the axial temperature gradient distribution during crystal growth, and acceleration of the crystal growth rate. After crystal growth is completed, the coil in the seed crystal zone can also be used to anneal the grown crystal separately, reducing internal stress and improving crystal quality. By incorporating loading and unloading components, the system facilitates the assembly and disassembly of crucibles and their lids. During assembly, the components automatically connect to form a sealed space, providing a secure environment for crystal growth. During disassembly, the components automatically separate, allowing workers to easily remove the crucible or lid individually. This facilitates the removal of the grown crystal from inside the lid and the cleaning of any remaining waste from the crucible and lid. The system eliminates the need for workers to manually remove and separate the crucible and lid from the insulation cylinder, improving the user experience and reducing the risk of burns. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure proposed in this invention; Figure 2 This is a first-view structural cross-sectional view of the loading and unloading assembly proposed in this invention; Figure 3 The present invention proposes Figure 2 Enlarged view of the A-section structure; Figure 4 This is a second-view structural cross-sectional view of the loading and unloading assembly proposed in this invention; Figure 5 This is a schematic diagram of the crucible structure proposed in this invention.

[0014] In the diagram: 1. Outer shell; 2. Insulation cylinder; 3. Crucible; 4. Crucible lid; 5. Heating coil; 6. Support frame; 7. Arc-shaped baffle; 8. Arc rod; 9. Electric push rod; 10. Support plate; 11. Protective shell; 12. Air cylinder; 13. Piston rod; 14. Connector; 15. Insulation board; 16. Slot; 17. Connecting block; 18. U-shaped spring; 19. Limiting block; 20. Air pipe; 21. Telescopic air rod; 22. Insulation tray. Detailed Implementation

[0015] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0016] like Figures 1 to 5The illustrated dual-coil induction PVT crystal growth apparatus and its usage method include a housing 1, an insulation cylinder 2 fixedly installed inside the housing 1, a crucible 3 and a crucible lid 4 disposed inside the insulation cylinder 2, the crucible lid 4 being positioned on top of the crucible 3; a control component for precisely adjusting the internal temperature of the crucible 3 and the crucible lid 4, the control component being connected to the housing 1 and the insulation cylinder 2; and a loading and unloading component for assisting operators in assembling and disassembling the crucible 3 and the crucible lid 4, the loading and unloading component being connected to the housing 1, the insulation cylinder 2, the crucible 3, and the crucible lid 4. The control components include two heating coils 5 sleeved on the outer wall of the insulation cylinder 2. The working process of the heating coils 5 is existing technology, so it will not be described in detail. The outer walls of the two heating coils 5 are fixedly connected to support frames 6. The upper and lower ends of the support frames 6 are fixedly connected to arc-shaped baffles 7. Through the cooperation of the support frames 6 and the arc-shaped baffles 7, the amount of heat radiated by the heating coils 5 to the non-heated area can be reduced, and heat radiation to the outside of the shell 1 can be avoided, which would create a bad working environment for the surrounding staff. The arc-shaped baffles 7 are set between the shell 1 and the insulation cylinder 2. The outer wall of the support frame 6 is fixedly connected to an arc rod 8. The end of the arc rod 8 away from the support frame 6 is fixedly connected to the inner rod of an electric push rod 9. The outer end of the electric push rod 9 is fixedly connected to a support plate 10. The support plate 10 is fixedly installed on the outer wall of the shell 1. The control component is used to control the position and temperature of crystal growth to ensure the quality of crystal growth. When crystal production is required, the control component is activated, causing two heating coils 5 to operate. The heating coils 5 heat the raw material inside the crucible 3 through the insulation cylinder 2. The two electric push rods 9 are activated, causing the corresponding arc rods 8 to move. The arc rods 8 move the heating coils 5 on the outer wall of the crucible 3 through the corresponding support frame 6. This allows the two heating coils 5 to heat the upper and lower temperature zones of the crucible 3 and the crucible cover 4 respectively, achieving the effect of adjusting the upper and lower temperature zones independently. This effectively enables separate temperature control of the raw material zone and the seed crystal zone, better control of the axial temperature gradient distribution during crystal growth, and accelerates the crystal growth rate. After crystal growth is completed, the coils in the seed crystal zone can also be used to anneal the grown crystal separately, reducing internal stress and improving crystal quality.

[0017] The loading and unloading assembly includes a protective shell 11 fixedly installed on the outer wall of the outer shell 1. An air cylinder 12 is fixedly installed inside the protective shell 11. A piston rod 13 is slidably connected inside the air cylinder 12. A connector 14 is fixedly connected to the top of the piston rod 13 through the protective shell 11. An insulation plate 15 is fixedly connected to the end of the connector 14 away from the piston rod 13. The insulation plate 15 is inserted into the interior of the insulation cylinder 2. A slot 16 is provided inside the insulation plate 15. A connecting block 17 is slidably connected inside the slot 16. The connecting block 17 is fixedly connected to the top of the crucible lid 4. A U-shaped spring 18 is provided inside the insulation plate 15. A limiting block 19 is inserted inside the U-shaped spring 18. The limiting block 19 is fixedly installed inside the insulation plate 15. The U-shaped spring 18 is inserted inside the slot 16. The limiting block 19 is sleeved on the outer wall of the connecting block 17. An air pipe 20 is fixedly connected to the outer wall of the air cylinder 12. The air pipe 20 is inserted into the protective shell 11 and the outer shell 1. A telescopic air rod 21 is fixedly installed inside the outer shell 1. The air pipe 20 is fixedly connected to the outer wall of the telescopic air rod 21. An insulation tray 22 is fixedly connected to the top of the inner rod of the telescopic air rod 21. The insulation tray 22 is inserted into the inside of the insulation cylinder 2. The insulation tray 22 is set at the bottom of the crucible 3. The loading and unloading assembly assists workers in assembling and disassembling the crucible 3 and crucible lid 4. This facilitates placing the crucible 3 and lid 4 inside the insulation cylinder 2 and removing them after crystal growth. When placing the crucible 3 and lid 4 into the insulation cylinder 2, the crucible 3 containing the raw material is first placed on top of the insulation tray 22. The crucible lid 4 containing the seed crystal is then inserted into the slot 16 via the connecting block 17. During this process, the connecting block 17 deforms the U-shaped spring 18 until it reaches the end of the slot 16, completing the positioning of the crucible lid 4. Afterward, the U-shaped spring 18 returns to its original position against the outer wall of the connecting block 17, limiting its movement and preventing the lid 4 from sliding inside the slot 16 and failing to align and insert into the insulation cylinder 2 when it descends. Once the crucible 3 and lid 4 are installed... An external air pump can be activated to extract gas from inside the air cylinder 12, causing the piston rod 13 inside the air cylinder 12 to descend. This piston rod 13 then drives the insulation plate 15 to descend via the connector 14. The insulation plate 15 then drives the crucible cover 4 to descend into the interior of the insulation cylinder 2 via the slot 16 and connecting block 17. As the piston rod 13 descends along the inside of the air cylinder 12, it extracts gas from inside the telescopic air rod 21 via the air pipe 20. This causes the telescopic air rod 21 to drive the crucible 3 to descend into the interior of the insulation cylinder 2 via the insulation tray 22. It should be noted that by setting the descending speed of the piston rod 13 to be greater than the retraction speed of the telescopic air rod 21, when the piston rod 13 slides down to the end of its stroke, the crucible cover 4, which is driven down by the insulation plate 15 via the slot 16 and connecting block 17, and the crucible 3, which is driven down by the telescopic air rod 21 via the insulation tray 22, are joined together, forming a sealed space between the crucible 3 and the crucible cover 4 to facilitate crystal growth. Furthermore, when staff need to remove crucible 3 and crucible lid 4 from the inside of the insulation cylinder 2, gas can be injected into the gas cylinder 12 through an external air pump, pushing the piston rod 13 inside the gas cylinder 12 to rise. The piston rod 13 then squeezes the gas drawn into the insulation cylinder 2 through the gas pipe 20 back into the telescopic gas rod 21. Finally, the insulation plate 15 lifts the crucible lid 4 through the slot 16 and connecting block 17. The telescopic gas rod 21 pushes the crucible 3 up through the insulation tray 22, and the crucible 3 and crucible lid 4 gradually separate during the ascent. This makes it convenient for staff to remove crucible 3 or crucible lid 4 separately, facilitates the removal of the crystals grown inside the crucible lid 4, and facilitates the cleaning of residual waste on crucible 3 and crucible lid 4. This eliminates the need for staff to manually remove and separate crucible 3 and crucible lid 4 from the inside of the insulation cylinder 2, improving the user experience and reducing the risk of burns.

[0018] A method of using a dual-coil induction PVT crystal growth apparatus includes the following steps: S1. Install the seed crystal inside the crucible cover 4, put the raw material into the inside of the crucible 3, and fix the crucible cover 4 and the crucible 3 inside the heat preservation cylinder 2 through the loading and unloading assembly; S2. Start the regulating component to control the regulating component to heat the raw material area and seed crystal area inside the crucible 3 and crucible cover 4 separately, accelerate the crystal growth rate, and perform annealing treatment on the crystal after the crystal growth is completed to improve the crystal quality; S3. After crystal growth and annealing are completed, turn off the regulating component and control the loading and unloading component to separate and remove the crucible 3 and crucible cover 4 from the inside of the heat preservation cylinder 2. Remove the crystal that has been grown on the crucible cover 4 and clean the residual waste inside the crucible 3 and crucible cover 4. Finally, check that there is no damage to each component and end the operation.

[0019] Working principle: When workers need to produce crystals, they first install the seed crystal inside the crucible lid 4, put the raw material inside the crucible 3, and fix the crucible lid 4 and crucible 3 inside the heat preservation cylinder 2 through the loading and unloading assembly. The regulating assembly is activated to control the heating of the raw material area and seed crystal area inside the crucible 3 and crucible lid 4 separately, and moves up and down on the outer wall of the crucible 3 to control the heating temperature of each area inside the crucible 3, thereby accelerating the crystal growth rate. After the crystal growth is completed, the crystal is annealed to improve the crystal quality. After the crystal growth and annealing are completed, the regulating assembly is turned off, and the loading and unloading assembly is controlled to separate and remove the crucible 3 and crucible lid 4 from the inside of the heat preservation cylinder 2. The crystal that has grown on the crucible lid 4 is removed, and the residual waste inside the crucible 3 and crucible lid 4 is cleaned. Finally, after checking that there is no damage to the components, the operation is completed.

[0020] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A dual-coil induction PVT crystal growth apparatus, comprising a housing (1), characterized in that, An insulation cylinder (2) is fixedly installed inside the outer shell (1). A crucible (3) and a crucible lid (4) are provided inside the insulation cylinder (2). The crucible lid (4) is located on the top of the crucible (3). A control component for precisely adjusting the internal temperature of the crucible (3) and the crucible lid (4), the control component being connected to the outer shell (1) and the insulation cylinder (2); The loading and unloading assembly is used to assist workers in disassembling and assembling the crucible (3) and the crucible cover (4). The loading and unloading assembly is connected to the outer shell (1), the insulation cylinder (2), the crucible (3) and the crucible cover (4).

2. The dual-coil induction PVT crystal growth apparatus according to claim 1, characterized in that, The control component includes two heating coils (5) sleeved on the outer wall of the heat insulation cylinder (2). The outer walls of the two heating coils (5) are fixedly connected to a support frame (6). The upper and lower ends of the support frame (6) are fixedly connected to arc-shaped baffles (7). The arc-shaped baffles (7) are arranged between the outer shell (1) and the heat insulation cylinder (2).

3. The dual-coil induction PVT crystal growth apparatus according to claim 2, characterized in that, An arc rod (8) is fixedly connected to the outer wall of the support frame (6). An inner rod of an electric push rod (9) is fixedly connected to one end of the arc rod (8) away from the support frame (6). A support plate (10) is fixedly connected to the outer end of the electric push rod (9). The support plate (10) is fixedly installed on the outer wall of the outer shell (1).

4. The dual-coil induction PVT crystal growth apparatus according to claim 1, characterized in that, The loading and unloading assembly includes a protective shell (11) fixedly installed on the outer wall of the outer shell (1). An air cylinder (12) is fixedly installed inside the protective shell (11). A piston rod (13) is slidably connected inside the air cylinder (12). A connector (14) is fixedly connected through the top of the piston rod (13) through the protective shell (11). An insulation board (15) is fixedly connected to one end of the connector (14) away from the piston rod (13). The insulation board (15) is inserted into the interior of the insulation cylinder (2).

5. The dual-coil induction PVT crystal growth apparatus according to claim 4, characterized in that, The insulation board (15) has a slot (16) inside, and a connecting block (17) is slidably connected inside the slot (16). The connecting block (17) is fixedly connected to the top of the crucible lid (4). The insulation board (15) has a U-shaped spring (18) inside, and a limiting block (19) is inserted inside the U-shaped spring (18). The limiting block (19) is fixedly installed inside the insulation board (15). The U-shaped spring (18) is inserted into the slot (16), and the limiting block (19) is sleeved on the outer wall of the connecting block (17).

6. The dual-coil induction PVT crystal growth apparatus according to claim 4, characterized in that, The outer wall of the air cylinder (12) is fixedly connected to an air pipe (20). The air pipe (20) is inserted into the inside of the protective shell (11) and the outer shell (1). The inside of the outer shell (1) is fixedly installed with a telescopic air rod (21). The air pipe (20) is fixedly connected to the outer wall of the telescopic air rod (21). The top of the inner rod of the telescopic air rod (21) is fixedly connected to a heat-insulating tray (22). The heat-insulating tray (22) is inserted into the inside of the heat-insulating cylinder (2). The heat-insulating tray (22) is set at the bottom of the crucible (3).

7. A method of using the dual-coil induction PVT crystal growth apparatus as described in any one of claims 1-6, characterized in that, Includes the following steps: S1. Install the seed crystal inside the crucible cover (4), put the raw material into the inside of the crucible (3), and fix the crucible cover (4) and the crucible (3) inside the heat preservation cylinder (2) through the loading and unloading assembly; S2. Start the adjustment component and control the adjustment component to heat the raw material area and seed crystal area inside the crucible (3) and crucible cover (4) separately to accelerate the crystal growth rate. After the crystal growth is completed, the crystal is annealed to improve the crystal quality. S3. After the crystal growth and annealing are completed, turn off the adjustment component and control the loading and unloading component to separate the crucible (3) and crucible cover (4) from the inside of the heat preservation cylinder (2) and take them out. Remove the crystal that has been grown on the crucible cover (4) and clean the residual waste inside the crucible (3) and crucible cover (4). Finally, check that there is no damage to each component and end the operation.

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