Cooling system of laser processing device and laser processing device

Abstract

The invention relates to a laser processing device cooling system and a laser processing device, and relates to the field of laser processing equipment.The laser processing device cooling system comprises an upper connecting base water path, a main cavity water path, an in-mirror water path and a lower connecting base water path; the upper connecting seat water way and the lower connecting seat water way are arranged in the side walls of the upper connecting seat and the lower connecting seat respectively and connected with an upper circulating water connector and a lower circulating water connector respectively, the main cavity water way is arranged in the side wall of the main cavity, and the two ends of the main cavity water way are connected with the upper connecting seat water way and the lower connecting seat water way respectively. The in-mirror water path is arranged in the metal reflecting mirror and connected with the main cavity water path, so that cooling water can circulate through the upper circulating water connector, the upper connecting base water path, the main cavity water path, the in-mirror water path, the lower connecting base water path and the lower circulating water connector, water cooling is conducted on the optical assembly, a cooling water connecting pipeline can be simplified, and the cooling effect of the mirror body is guaranteed.

Description

Technical Field

[0001] This application relates to the field of laser processing equipment, and in particular to a cooling system for a laser processing apparatus. In addition, this application also relates to a laser processing apparatus. Background Technology

[0002] Laser processing is a non-contact processing method that uses a laser beam to irradiate the material, creating a high-power-density laser spot, to perform operations such as cutting, surface treatment, welding, marking, and drilling. Laser processing offers advantages such as tool-free operation, high processing speed, minimal surface deformation, and the ability to process a wide variety of materials, leading to its widespread application in the materials processing field.

[0003] The laser beam used in laser processing needs to be shaped by multiple optical components to adjust the shape of the laser spot and the energy distribution in different parts of the spot. However, the laser beam used in laser processing has very high energy, which generates a lot of heat when it hits the optical components. If the heat cannot be dissipated in time, the temperature of the optical components will rise, causing thermal deformation of the lenses. This can lead to problems such as optical path deviation and decreased focusing accuracy, seriously affecting the quality of laser processing. Therefore, uniform and effective cooling of the lenses of the optical components has become a crucial factor determining the processing accuracy and efficiency of the laser processing equipment, as well as affecting its service life.

[0004] Existing laser processing equipment typically incorporates cooling water channels within the mirror body of the optical component, with cooling water interfaces located on the equipment housing near the mirror. Circulating cooling water is injected into the cooling water channels through these interfaces to cool the mirror body. Since laser processing equipment usually contains multiple mirror bodies, this necessitates multiple cooling water interfaces and complex cooling water connection piping, affecting the neatness and stability of the piping. Existing mirror bodies often employ channel-type cooling structures, using the tortuous extension of the cooling water channels within the mirror body to improve cooling efficiency. However, the tortuous piping makes it difficult to ensure a uniform distribution density within the mirror body, compromising the uniformity and consistency of heat dissipation. Summary of the Invention

[0005] To simplify the cooling water connection pipeline and ensure the cooling effect of the mirror body, this application provides a cooling system for a laser processing device and a laser processing device.

[0006] The cooling system for the laser processing apparatus provided in this application adopts the following technical solution: A cooling system for a laser processing apparatus includes an upper connecting seat water channel, a main chamber water channel, a mirror water channel, and a lower connecting seat water channel. The upper and lower connecting seat water channels are respectively disposed within the side walls of the upper and lower connecting seats and are respectively connected to an upper circulating water interface and a lower circulating water interface. The main chamber water channel is disposed within the side wall of the main chamber and is connected at both ends to the upper and lower connecting seat water channels, respectively. The mirror water channel is disposed within a metal mirror and is connected to the main chamber water channel, allowing cooling water to circulate through the upper circulating water interface, the upper connecting seat water channel, the main chamber water channel, the mirror water channel, the lower connecting seat water channel, and the lower circulating water interface to provide water cooling for the optical components.

[0007] By adopting the above technical solution, the water channels of the upper connecting seat, main chamber, internal chamber, and lower connecting seat, respectively located in the upper connecting seat, main chamber, metal reflector, and lower connecting seat, can be connected to each other through the connection between the upper connecting seat and the main chamber, the connection between the internal chamber and the main chamber through the connection between the metal reflector and the main chamber, and the connection between the lower connecting seat and the main chamber through the connection between the lower connecting seat and the main chamber. This allows for simultaneous water cooling of the upper connecting seat, main chamber, metal reflector, and lower connecting seat by circulating cooling water between the upper and lower circulating water interfaces. This effectively simplifies the external cooling water connection pipelines of the laser processing device, ensures the stability of the cooling water channels, and guarantees the cooling effect of the optical components in the laser processing device.

[0008] In one specific implementation, the metal reflector includes a collimating lens and a focusing lens, the internal water path includes a collimating lens water path and a focusing lens water path, the main chamber water path includes a first chamber water path, a second chamber water path and a third chamber water path, the first chamber water path is connected to the upper connecting seat water path, the collimating lens water path is connected between the first chamber water path and the second chamber water path, the focusing lens water path is connected between the second chamber water path and the third chamber water path, and the third chamber water path is connected to the lower connecting seat water path.

[0009] By adopting the above technical solution, using the collimating lens water channel connected between the first chamber water channel and the second chamber water channel, and the focusing lens water channel connected between the second chamber water channel and the third chamber water channel, the water flow in the main chamber water channel can be introduced into the collimating lens water channel and the focusing lens water channel in turn, so as to cool the collimating lens and the focusing lens respectively. Thus, the collimating lens and the focusing lens can be cooled simultaneously in the same main chamber water channel, while ensuring the cooling effect of the collimating lens and the focusing lens.

[0010] In one specific implementation scheme, a collimating lens end cap and a focusing lens end cap are provided on the main chamber. The collimating lens end cap is detachably connected to one side of the main chamber, and the collimating lens is mounted on the collimating lens end cap. The collimating lens end cap has a first collimating end cap water channel and a second collimating end cap water channel inside. The first collimating end cap water channel is connected between the first chamber water channel and the collimating lens water channel, and the second collimating end cap water channel is connected between the collimating lens water channel and the second chamber water channel. The focusing lens end cap is detachably connected to the other side of the main chamber, and the focusing lens is mounted on the focusing lens end cap. The focusing lens end cap has a first focusing end cap water channel and a second focusing end cap water channel inside. The first focusing end cap water channel is connected between the second chamber water channel and the focusing lens water channel, and the second focusing end cap water channel is connected between the focusing lens water channel and the third chamber water channel.

[0011] By adopting the above technical solution, using the collimating lens mounted on the collimating lens end cap, which is detachably connected to one side of the main chamber, and the focusing lens mounted on the focusing lens end cap, which is detachably connected to the other side of the main chamber, the collimating lens water passage in the first collimating end cap is connected to the first chamber water passage and the collimating lens water passage, and the collimating lens water passage in the second collimating end cap is connected to the second chamber water passage, and the focusing lens water passage in the first focusing end cap is connected to the second chamber water passage and the focusing lens water passage, and the focusing lens water passage in the second focusing end cap is connected to the focusing lens water passage and the third chamber water passage, the collimating lens and the focusing lens can be easily disassembled from the main chamber while ensuring a reliable connection between the water passage in the collimating lens and the main chamber water passage.

[0012] In one specific implementation, the collimator includes a collimator body and a collimator cover plate. The collimator body is cylindrical, with an inclined collimating surface at one end and a circular cavity inside, such that the sidewall of the collimator body and the collimating surface each have a predetermined thickness. A collimator partition is disposed inside the collimator body, abutting against the sidewall of the collimator body and having a gap between it and the collimating surface. The collimator cover plate is connected to the end of the collimator body opposite to the collimating surface and is connected to the collimator partition plate. The collimator partition plate divides the cavity inside the collimator body to form the collimator water channel. A first collimator through hole and a second collimator through hole are respectively provided on both sides of the collimator partition plate on the collimator cover plate. The first collimator through hole and the second collimator through hole are respectively connected to the first collimator end cover water channel and the second collimator end cover water channel. The focusing lens is connected to the water channel. The focusing lens includes a focusing lens body and a focusing lens cover plate. The focusing lens body is cylindrical with an inclined focusing surface at one end and a circular cavity inside, so that the side wall of the focusing lens body and the focusing surface each have a set thickness. A focusing lens partition plate is provided inside the focusing lens body. The focusing lens partition plate abuts against the side wall of the focusing lens body and has a gap with the focusing surface. The focusing lens cover plate is connected to the end of the focusing lens body opposite to the focusing surface and is connected to the focusing lens partition plate. The focusing lens partition plate divides the cavity inside the focusing lens body to form the focusing lens water channel. A first focusing lens through hole and a second focusing lens through hole are respectively provided on both sides of the focusing lens partition plate on the focusing lens cover plate. The first focusing lens through hole and the second focusing lens through hole are respectively connected to the first focusing end cover water channel and the second focusing end cover water channel.

[0013] By employing the above technical solution, and utilizing the collimator body sidewall and collimation surface of a predetermined thickness formed by a circular cavity within the collimator body, the capacity of the cooling water inside the collimator can be increased, and the uniformity of the cooling effect on the collimator body sidewall and collimation surface can be ensured. This reduces thermal deformation of the collimator during use and guarantees the collimation effect of the laser beam. Similarly, by utilizing the focusing lens body sidewall and focusing surface of a predetermined thickness formed by a circular cavity within the focusing lens, the capacity of the cooling water inside the focusing lens can be increased, and the uniformity of the cooling effect on the focusing lens sidewall and focusing surface can be ensured. This reduces thermal deformation of the focusing lens during use and guarantees the focusing effect of the laser beam. By using a collimating mirror partition that is located inside the collimating mirror body cavity, in contact with the collimating mirror body sidewall and collimating mirror cover plate, and with a gap between it and the collimating surface, and a focusing mirror partition that is located inside the focusing mirror body cavity, in contact with the focusing mirror body sidewall and focusing mirror cover plate, and with a gap between it and the focusing surface, cooling water can flow along the inner sidewalls of the collimating surface and the focusing surface, respectively, thereby improving the cooling effect of the cooling water on the collimating surface and the focusing surface.

[0014] In one specific implementation scheme, an upper protective mirror is provided inside the upper connecting seat. The water circuit of the upper connecting seat includes an upper connecting seat annular water circuit and an upper connecting seat descending water circuit. The upper connecting seat annular water circuit is arranged adjacent to the periphery of the upper protective mirror. One end of the upper connecting seat annular water circuit is connected to the upper circulating water interface, and the other end is connected to the upper connecting seat descending water circuit. The other end of the upper connecting seat descending water circuit is connected to the main chamber water circuit.

[0015] By adopting the above technical solution, and utilizing the annular water channel of the upper connecting seat located near the upper protective mirror, the cooling water can flow in an annular manner inside the side wall of the upper connecting seat around the upper protective mirror, thus ensuring the cooling effect of the cooling water on the upper protective mirror.

[0016] In one specific implementation scheme, a lower protective mirror is provided inside the lower connecting seat. The water circuit of the lower connecting seat includes a lower connecting seat connecting water circuit and a lower protective mirror lower loop circuit. One end of the lower connecting seat connecting water circuit is connected to the main chamber water circuit, and the other end is connected to the lower protective mirror lower loop circuit. The lower protective mirror lower loop circuit is arranged near the periphery of the lower protective mirror and is connected to the lower circulating water interface.

[0017] By adopting the above technical solution, and utilizing the lower loop of the lower protective mirror set near the periphery, the cooling water can flow in a ring inside the side wall of the lower connecting seat around the lower protective mirror, thereby improving the cooling effect of the cooling water on the lower protective mirror.

[0018] In one specific implementation scheme, a lower protective mirror upper loop is provided inside the side wall of the main chamber connected to the lower connecting seat. The lower protective mirror upper loop is located at the corresponding position of the lower connecting seat. One side of the lower protective mirror upper loop is connected to the water passage of the third chamber, and the other side is connected to the water passage of the lower connecting seat.

[0019] By adopting the above technical solution, the lower protective mirror upper loop, which is set at the corresponding position of the lower connecting seat inside the side wall of the main chamber, can better cool the end of the main chamber with water, and cool the end of the lower connecting seat above the lower protective mirror and the lower protective mirror through the main chamber. Thus, water cooling can be carried out simultaneously from the upper and lower sides of the lower protective mirror, further improving the cooling effect of the lower protective mirror.

[0020] In one specific implementation, a protective gas port is also provided on the water line of the lower connecting seat, and the protective gas port is located below the lower protective mirror and adjacent to the lower protective mirror.

[0021] By adopting the above technical solution, and utilizing the protective gas interface located below and adjacent to the lower protective mirror, it is possible to supply protective gas to the laser processing position while simultaneously using the protective gas to air-cool the mirror surface of the lower protective mirror. This also prevents dust generated during laser processing from splashing along the laser output channel and adhering to the surface of the lower protective mirror, thus affecting the passage of laser light.

[0022] In one specific implementation, the lower connecting seat is further provided with an air guide ring, and an air guide groove is provided on the outer peripheral surface of the air guide ring. The bottom of the air guide groove is provided with a plurality of air guide holes on one side end face. The air guide ring is installed in the lower connecting seat such that the wall of the lower connecting seat closes the opening of the air guide groove, and the air guide holes face the lower protective mirror. The protective air interface is connected to the air guide groove.

[0023] By adopting the above technical solution, and utilizing multiple air guide holes extending towards one side of the bottom of the air guide groove, the protective gas input into the air guide groove through the protective gas interface can be evenly sprayed downwards onto the lower protective mirror through the multiple air guide holes, forming a uniform scouring effect on the lower protective mirror and improving the cooling and dust removal effect on the lower protective mirror.

[0024] The laser processing apparatus provided in this application uses the laser processing apparatus cooling system provided in this application and also has the advantages of the laser processing apparatus cooling system provided in this application.

[0025] In summary, this application includes at least one of the following beneficial technical effects: By setting an upper connecting seat water channel in the side wall of the upper connecting seat, a main chamber water channel in the side wall of the main chamber, an inner water channel in the interior of the metal reflector, and a lower connecting seat water channel in the side wall of the lower connecting seat, the upper and lower connecting seats can be connected to the main chamber, as well as the metal reflector and the main chamber, to form an integrated cooling water channel. Cooling water can be input through the upper circulating water interface on the upper connecting seat and output through the lower circulating water interface on the lower connecting seat, thus forming water cooling for the upper connecting seat, the main chamber, the metal reflector, and the lower connecting seat. This avoids setting separate cooling water interfaces or cooling water connection pipes at different cooling objects, simplifies the cooling water connection pipeline, and ensures the cooling effect of different optical components. By setting cylindrical cavities inside the collimating lens and the focusing lens, both the collimating lens and the focusing lens form hollow structures with uniform wall thickness. This increases the capacity of cooling water inside the lens body, improves the cooling effect of different parts around the lens body, ensures the temperature uniformity of different parts of the lens body, and reduces the thermal deformation of the lens body structure. By setting collimator end caps and focusing lens end caps on the main chamber respectively, and setting end cap water channels in the collimator end caps and focusing lens end caps that are connected to the water channels in the main chamber and the water channels in the interior respectively, it is possible to form a convenient and reliable connection between the water channels in the interior and the water channels in the main chamber while ensuring the ease of disassembly and reassembly of the collimator and focusing lens, thus facilitating the maintenance and repair of the collimator and focusing lens. By using the annular water channel on the upper connecting seat, the lower loop on the lower protective mirror and the upper loop at the end of the main chamber, the upper connecting seat around the upper protective mirror and the lower connecting seat around the lower protective mirror can be cooled better, resulting in a better cooling effect for the upper and lower protective mirrors. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of one embodiment of the laser processing apparatus of this application.

[0027] Figure 2 This is a cross-sectional view of one embodiment of the laser processing apparatus of this application.

[0028] Figure 3 This is a top view of one embodiment of the laser processing apparatus of this application.

[0029] Figure 4 for Figure 3 Central BB orientation sectional view.

[0030] Figure 5 This is a rear view of one embodiment of the laser processing apparatus of this application.

[0031] Figure 6 for Figure 5 Central CC orientation sectional view.

[0032] Figure 7 for Figure 5 Cross-sectional view of the center DD direction.

[0033] Figure 8 for Figure 5 Central EE orientation sectional view.

[0034] Figure 9 This is a schematic diagram of a collimating lens in one embodiment of the laser processing apparatus of this application.

[0035] Figure 10 This is a cross-sectional view of the collimating lens in one embodiment of the laser processing apparatus of this application.

[0036] Figure 11 This is a longitudinal sectional view of the collimating lens in one embodiment of the laser processing apparatus of this application.

[0037] Figure 12This is a cross-sectional view of a focusing lens in one embodiment of the laser processing apparatus of this application.

[0038] Figure 13 for Figure 5 Central FF orientation sectional view.

[0039] Figure 14 for Figure 5 Central GG orientation sectional view.

[0040] Figure 15 for Figure 5 Cross-sectional view of the HH orientation.

[0041] Figure 16 This is a schematic diagram of the gas guide ring in one embodiment of the laser processing apparatus of this application.

[0042] Figure 17 for Figure 2 Enlarged view of part A in the middle.

[0043] Explanation of reference numerals in the attached diagram: 1. Upper connecting seat water channel; 11. Upper connecting seat annular water channel; 12. Upper connecting seat descending water channel; 2. Main chamber water channel; 21. First chamber water channel; 22. Second chamber water channel; 23. Third chamber water channel; 24. Lower protective mirror upper annular channel; 3. Internal water channel; 31. Collimating mirror water channel; 32. Focusing mirror water channel; 4. Lower connecting seat water channel; 41. Lower connecting seat connecting water channel; 42. Lower protective mirror lower annular channel; 5. Upper connecting seat; 51. Upper circulating water interface; 52. Upper protective mirror; 6. Lower connecting seat; 61. Lower circulating water interface; 62. Lower protective mirror; 63. Protective gas interface; 64. Gas guide ring; 641. Gas guide groove; 642. Gas guide hole; 7. Main chamber; 7 1. Collimating lens end cap; 711. First collimating end cap water channel; 712. Second collimating end cap water channel; 72. Focusing lens end cap; 721. First focusing end cap water channel; 722. Second focusing end cap water channel; 8. Metal reflector; 81. Collimating lens; 811. Collimating lens body; 812. Collimating lens cover plate; 813. Collimating surface; 814. Collimating lens partition; 815. First collimating lens through hole; 816. Second collimating lens through hole; 82. Focusing lens; 821. Focusing lens body; 822. Focusing lens cover plate; 823. Focusing surface; 824. Focusing lens partition; 825. First focusing lens through hole; 826. Second focusing lens through hole; 91. Fiber optic head; 92. Dust removal chamber; 93. Laser processing head. Detailed Implementation

[0044] The specific embodiments of this application will now be described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0045] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0046] The terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or more of the stated features.

[0047] One embodiment of the cooling system for the laser processing apparatus of this application, such as Figures 1 to 15 As shown, the system includes an upper connecting seat water channel 1, a main chamber water channel 2, an internal mirror water channel 3, and a lower connecting seat water channel 4. The upper connecting seat water channel 1 is located inside the side wall of the upper connecting seat 5 of the laser processing device. An upper circulating water interface 51 is provided on the side wall of the upper connecting seat 5, and the upper circulating water interface 51 is connected to the upper connecting seat water channel 1. The lower connecting seat water channel 4 is located inside the side wall of the lower connecting seat 6 of the laser processing device. A lower circulating water interface 61 is provided on the side wall of the lower connecting seat 6, and the lower circulating water interface 61 is connected to the lower connecting seat water channel 4.

[0048] The main chamber water channel 2 is located inside the side wall of the main chamber 7 of the laser processing device. The upper connecting seat 5 and the lower connecting seat 6 are installed at different positions on the upper and lower sides of the main chamber 7, respectively, so that the upper connecting seat water channel 1 is connected to one end of the main chamber water channel 2, and the lower connecting seat water channel 4 is connected to one end of the main chamber water channel 2. The mirror water channel 3 is located inside the metal reflector 8 of the laser processing device. Two or more metal reflectors 8 can be configured inside the laser processing device, and each metal reflector 8 has an internal water channel 3. The metal reflectors 8 are fixed to the inner side wall of the main chamber 7, so that the internal water channel 3 connects to the main chamber water channels 2, allowing cooling water flowing from the main chamber water channels 2 to pass through the internal water channel 3.

[0049] In this way, a cooling water channel can be formed on the laser processing device, consisting of an upper circulating water interface 51, an upper connecting seat water channel 1, a main chamber water channel 2, a mirror water channel 3, a lower connecting seat water channel 4, and a lower circulating water interface 61. By inputting cooling water from either the upper circulating water interface 51 or the lower circulating water interface 61 and outputting cooling water from the other, the upper connecting seat 5, the main chamber 7, the metal mirror 8, and the lower connecting seat 6 can be cooled simultaneously. This ensures the heat dissipation effect of the metal mirror 8, allowing it to maintain a stable temperature under long-term irradiation by high-power lasers and preventing thermal deformation. At the same time, it also cools the upper connecting seat 5, the main chamber 7, and the lower connecting seat 6, reducing the internal temperature of these components and improving the thermal stability of other optical components installed within them under laser irradiation. By setting the upper connecting seat water passage 1, the main chamber water passage 2, and the lower connecting seat water passage 4 inside the side walls of the upper connecting seat 5, the main chamber 7, and the lower connecting seat 6 respectively, the cooling water pipelines located outside the laser processing device can be simplified, which is beneficial to improving the stability of the cooling water pipelines.

[0050] In some embodiments of the cooling system of the laser processing apparatus of this application, such as Figures 6 to 8 As shown, the metal reflector 8 disposed in the main chamber 7 includes a collimating lens 81 and a focusing lens 82. The collimating lens 81 is installed in the main chamber 7 on the side adjacent to the upper connecting seat 5, and the focusing lens 82 is installed in the main chamber 7 on the side adjacent to the lower connecting seat 6, with the collimating lens 81 and the focusing lens 82 arranged opposite to each other.

[0051] Correspondingly, the internal water channel 3 within the metal reflector 8 also includes a collimating mirror water channel 31 within the collimating mirror 81 and a focusing mirror water channel 32 within the focusing mirror 82. The main chamber water channel 2, located within the side wall of the main chamber 7, includes a segmented first chamber water channel 21, a second chamber water channel 22, and a third chamber water channel 23. One end of the first chamber water channel 21 is connected to the upper connecting seat water channel 1, and the other end extends to one side of the main chamber 7. The second chamber water channel 22 extends from one side of the main chamber 7 to the other side, and the third chamber water channel 23 extends from the other side of the main chamber towards the lower connecting seat 6, connecting to the lower connecting seat water channel 4.

[0052] The collimating lens 81 is mounted on the inner wall of one side of the main chamber 7. It reflects the laser beam from the direction of the upper connecting seat 5 towards the focusing lens 82, while simultaneously connecting the collimating lens water channel 31 between the first chamber water channel 21 and the second chamber water channel 22. The focusing lens 82 is mounted on the inner wall of the main chamber 7 on the side opposite to the collimating lens 81. It reflects the laser beam from the collimating lens 81 towards the downward connecting seat 6, while simultaneously connecting the focusing lens water channel 32 between the second chamber water channel 22 and the third chamber water channel 23.

[0053] The cooling water flowing between the upper connecting seat water passage 1 and the lower connecting seat water passage 4 can flow through the first chamber water passage 21, the collimating lens water passage 31, the second chamber water passage 22, the focusing lens water passage 32 and the third chamber water passage 23 respectively, so that the collimating lens 81 and the focusing lens 82 can be cooled by water at the same time without the external connecting pipes.

[0054] In a preferred embodiment of the cooling system of the laser processing apparatus of this application, such as Figures 5 to 8 As shown, a collimating lens end cap 71 and a focusing lens end cap 72 are respectively provided on the side walls of opposite sides of the main chamber 7. The collimating lens end cap 71 is detachably installed on one side of the main chamber 7, and the focusing lens end cap 72 is detachably installed on the other side of the main chamber 7 opposite to the collimating lens end cap 71.

[0055] Inside the collimator end cap 71, a first collimator end cap water channel 711 and a second collimator end cap water channel 712 are respectively provided. After the collimator end cap 71 is installed on the main chamber 7, the first collimator end cap water channel 711 is connected to the first chamber water channel 21, and the second collimator end cap water channel 712 is connected to the second chamber water channel 22. The collimator 81 is installed on the inner side of the collimator end cap 71, so that the collimator water channel 31 is connected between the first collimator end cap water channel 711 and the second collimator end cap water channel 712.

[0056] Inside the focusing lens end cap 72, a first focusing end cap water channel 721 and a second focusing end cap water channel 722 are respectively provided. After the focusing lens end cap 72 is installed on the main chamber 7, the first focusing end cap water channel 721 is connected to the second chamber water channel 22, and the second focusing end cap water channel 722 is connected to the third chamber water channel 23. The focusing lens 82 is installed on the inner side of the focusing lens end cap 72, so that the focusing lens water channel 32 is connected between the first focusing end cap water channel 721 and the second focusing end cap water channel 722.

[0057] The collimating lens end cap 71 and the focusing lens end cap 72 are designed to facilitate the removal of the collimating lens 81 and the focusing lens 82 from the inside of the main chamber 7, making it convenient to repair and maintain the collimating lens 81 and the focusing lens 82. For example, after long-term use, the reflective surfaces of the collimating lens 81 and the focusing lens 82 can be re-polished to restore their reflective performance and focusing accuracy.

[0058] As one specific embodiment of the cooling system of the laser processing apparatus of this application, such as Figures 9 to 12As shown, the collimating lens 81 includes a collimating lens body 811 and a collimating lens cover plate 812. The collimating lens body 811 is typically a cylinder made of copper. One end of the collimating lens body 811 is set as a plane perpendicular to the central axis, and the other end is set as a collimating surface 813 that intersects the central axis at an angle. The collimating surface 813 is set as a concave surface according to the requirements for collimating the laser beam, and the surface is polished to improve the reflection performance. The collimating mirror 811 has a circular cavity inside, which creates a uniform sidewall around its perimeter. The collimating surface 813 is also plate-shaped with a similar thickness. This creates a large-volume hollow structure inside the collimating mirror 811, increasing the amount of cooling water it can hold. This helps reduce temperature fluctuations under high-power laser irradiation. It also makes the cooling effect more uniform in different parts of the collimating mirror 811, ensuring consistent temperature and preventing deformation caused by temperature differences. This also prevents the collimating surface 813 from deflecting the reflected light path or reducing the accuracy of the laser beam collimation.

[0059] A collimating lens partition 814 is disposed within the cavity of the collimating lens body 811, and the collimating lens partition 814 is typically perpendicular to the collimating plane 813. The opposite sides of the collimating lens partition 814 abut against the inner wall of the collimating lens body 811, and a gap is provided between the collimating lens partition 814 and the collimating plane 813, dividing the cavity within the collimating lens body 811 into two interconnected parts on the inner wall of the collimating plane 813. Cooling water flowing through the cavity within the collimating lens body 811 flows through the gap between the collimating lens partition 814 and the collimating plane 813, allowing the cooling water to flow over the area adjacent to the collimating plane 813, thereby improving the cooling effect of the cooling water on the collimating plane 813.

[0060] The collimator cover plate 812 is connected to the open end of the collimator body 811, which is the end opposite to the collimating surface 813. The collimator cover plate 812 is connected to the end of the collimator partition plate 814. The collimator cover plate 812 can be fixed to the end face of the collimator partition plate 814 by screws, or the collimator cover plate 812 and the collimator partition plate 814 can be made into an integral structure from the same material. On the collimator cover plate 812, on both sides of the collimator partition plate 814 at opposite positions, there are respectively a first collimator through hole 815 and a second collimator through hole 816. The first collimator through hole 815 and the second collimator through hole 816 are respectively connected to the cavities on both sides of the collimator partition plate 814 inside the collimator body 811, and together with the cavities inside the collimator body 811, they form the collimator water channel 31. The collimator 81 is fixed to the collimator end cap 71 by the collimator cover plate 812, so that the first collimator through hole 815 is connected to the first collimator end cap water channel 711, and the second collimator through hole 816 is connected to the second collimator end cap water channel 712.

[0061] Similarly, the focusing lens 82 includes a focusing lens body 821 and a focusing lens cover plate 822. The focusing lens body 821 is also a cylinder made of copper. One end of the focusing lens body 821 is set as a plane perpendicular to the central axis, and the other end is set as a focusing surface 823 that intersects the central axis at an angle. The focusing surface 823 is set as a surface shape of different shapes according to the spot shape requirements of laser processing, such as a concave parabolic surface formed by arranging multiple strip-shaped concave cylindrical surfaces. The surface of the focusing surface 823 is polished to improve the reflectivity of the laser beam. The planar end of the focusing lens 821 is set as a circular cavity, which makes the sidewalls of the focusing lens 821 uniform in thickness. The end where the focusing surface 823 is located is also set as a plate of similar thickness. A hollow structure with a large volume is formed inside the focusing lens 821, which reduces the temperature fluctuation of the focusing lens 821 and makes the cooling effect of different parts of the focusing lens 821 more uniform. It prevents deformation caused by temperature difference in different parts of the focusing lens 821, improves the accuracy of the reflected light path of the focusing surface 823 and the focusing accuracy of the laser beam.

[0062] A focusing lens partition 824 is disposed within the cavity of the focusing lens body 821, and the focusing lens partition 824 is typically positioned perpendicular to the focusing surface 823. The opposite sides of the focusing lens partition 824 abut against the inner wall of the focusing lens body 821, and a gap is provided between the focusing lens partition 824 and the focusing surface 823, dividing the cavity within the focusing lens body 821 into two interconnected parts on the inner wall of the focusing surface 823. Cooling water flowing through the cavity within the focusing lens body 821 flows through the gap between the focusing lens partition 824 and the focusing surface 823, allowing the cooling water to flow over the adjacent area of ​​the focusing surface 823, thereby improving the cooling effect of the cooling water on the focusing surface 823.

[0063] The focusing lens cover plate 822 is connected to the open end of the focusing lens body 821, which is the end opposite to the focusing surface 823. The focusing lens cover plate 822 is connected to the end of the focusing lens partition 824. The focusing lens cover plate 822 can be fixed to the end face of the focusing lens partition 824 by screws, or the focusing lens cover plate 822 and the focusing lens partition 824 can be made into an integral structure from the same material. On the focusing lens cover plate 822, on both sides of the focusing lens partition 824 at opposite positions, there are respectively a first focusing lens through hole 825 and a second focusing lens through hole 826. The first focusing lens through hole 825 and the second focusing lens through hole 826 are respectively connected to the cavities on both sides of the focusing lens partition 824 inside the focusing lens body 821, and together with the cavities inside the focusing lens body 821, they form the focusing lens water channel 32. The focusing lens 82 is fixed to the focusing lens end cap 72 by the focusing lens cover plate 822, so that the first focusing lens through hole 825 is connected to the first focusing end cap water channel 721, and the second focusing lens through hole 826 is connected to the second focusing end cap water channel 722.

[0064] In some embodiments of the cooling system of the laser processing apparatus of this application, such as Figure 3 , Figure 4 and Figure 13 As shown, an upper protective mirror 52 is provided inside the upper connecting seat 5. The upper protective mirror 52 isolates the laser path inside the upper connecting seat 5, forming an isolation between the internal space of the main chamber 7 and the external space of the upper connecting seat 5, preventing external dust from entering the space inside the main chamber 7 and causing contamination to the alignment mirror 81 and the focusing mirror 82.

[0065] The upper connecting seat water passage 1 includes an upper connecting seat annular water passage 11 and an upper connecting seat descending water passage 12. The upper connecting seat annular water passage 11 is located within the upper connecting seat 5 on the side of the upper protective mirror 52 away from the main chamber 7, and is annular with its two ends not connected, surrounding the periphery of the upper connecting seat 5 near the upper protective mirror 52. The upper circulating water interface 51 is fixed to the side wall of the upper connecting seat 5 and connected to one end of the upper connecting seat annular water passage 11. The other end of the upper connecting seat annular water passage 11 is connected to the upper connecting seat descending water passage 12. The upper connecting seat descending water passage 12 extends towards the main chamber 7 within the side wall of the upper connecting seat 5 and connects to the main chamber water passage 2.

[0066] The annular water passage 11 of the upper connecting seat allows cooling water to flow a longer distance along the circumference of the upper protective mirror 52 from a position adjacent to the upper protective mirror 52, thus fully cooling the side wall of the upper connecting seat 5 around the upper protective mirror 52 and cooling the upper protective mirror 52 through the side wall of the upper connecting seat 5, thereby improving the cooling effect of the upper protective mirror 52.

[0067] In some embodiments of the cooling system of the laser processing apparatus of this application, such as Figure 7 and Figure 14As shown, a lower protective mirror 62 is provided inside the lower connecting seat 6. The lower protective mirror 62 isolates the space inside the lower connecting seat 6, forming an isolation between the internal space of the main chamber 7 and the external space of the lower connecting seat 6. This prevents external processing dust from entering the internal space of the main chamber 7 through the dust removal chamber 92 and the laser processing head 93 connected to the lower connecting seat 6, thus preventing contamination of the alignment mirror 81 and the focusing mirror 82.

[0068] The lower connecting seat water passage 4 includes a lower connecting seat connecting water passage 41 and a lower protective mirror lower loop passage 42. One end of the lower connecting seat connecting water passage 41 is connected to the main chamber water passage 2, and the other end extends downward towards the lower protective mirror 62 inside the side wall of the lower connecting seat 6, reaching the side of the lower protective mirror 62 away from the main chamber 7. The lower protective mirror lower loop passage 42 is located on the side of the lower protective mirror 62 away from the main chamber 7, adjacent to the lower protective mirror 62 and located inside the side wall of the lower connecting seat 6 around the lower protective mirror 62. The lower protective mirror lower loop passage 42 is configured as a ring with its two ends not connected. The lower circulating water interface 61 is located on the side wall of the lower connecting seat 6 and is connected to one end of the lower protective mirror lower loop passage 42. The other end of the lower protective mirror lower loop passage 42 is connected to the lower connecting seat connecting water passage 41.

[0069] Similarly, the lower loop 42 of the lower protective mirror allows cooling water to flow a longer distance along the circumference of the lower protective mirror 62 from a position adjacent to the lower protective mirror 62, thus fully cooling the side wall of the lower connecting seat 6 around the lower protective mirror 62, and cooling the lower protective mirror 62 through the side wall of the lower connecting seat 6, thereby improving the prevention of excessive temperature rise of the lower protective mirror 62 under high-power laser beam irradiation.

[0070] In a preferred embodiment of the cooling system of the laser processing apparatus of this application, such as Figure 7 and Figure 15 As shown, a lower protective mirror upper loop 24 is provided inside the side wall of the end where the main chamber 7 connects to the lower connecting seat 6. The lower protective mirror upper loop 24 is located on the main chamber 7 at a position corresponding to the end face of the lower connecting seat 6. Specifically, an annular groove can be provided on the end face of the main chamber 7 at a position corresponding to the lower connecting seat 6. When the lower connecting seat 6 is installed on the main chamber 7, the side wall end face of the lower connecting seat 6 closes the opening of the annular groove on the main chamber 7, forming the lower protective mirror upper loop 24.

[0071] The third chamber water passage 23 connects to one side of the upper ring passage 24 of the lower protective mirror from inside the side wall of the main chamber 7. The other side of the upper ring passage 24 of the lower protective mirror connects to the lower connecting seat connecting water passage 41, which opens onto the end face of the lower connecting seat 6. This allows cooling water to enter one side of the upper ring passage 24 of the lower protective mirror from the third chamber water passage 23, then flow through the ring passages on both sides of the circumference to the other side of the upper ring passage 24 of the lower protective mirror, and finally flow out through the lower connecting seat connecting water passage 41, thus improving the cooling effect on the side wall of the lower connecting seat 6 above the lower protective mirror 62.

[0072] In another preferred embodiment of the cooling system of the laser processing apparatus of this application, such as Figure 2 As shown, a protective gas interface 63 is also provided on the side wall of the lower connecting seat 6. The inner end of the protective gas interface 63 passes through the side wall of the lower connecting seat 6 and opens onto the outer side of the lower protective mirror 62, that is, at a position adjacent to the side away from the main chamber 7. When protective gas is introduced into the laser processing device through the protective gas interface 63, the protective gas can be blown onto the outer surface of the lower protective mirror 62, which can not only cool the lower protective mirror 62 with air, but also remove the dust adhering to the outer surface of the lower protective mirror 62. In addition, the protective gas flows outward from the lower connecting seat 6, flows through the dust removal chamber 92 and the laser processing head 93 to the laser processing area, and the outward airflow can also prevent the dust in the laser processing area from moving towards the lower protective mirror 62.

[0073] In some embodiments of the cooling system of the laser processing apparatus of this application, such as Figure 16 and Figure 17 As shown, a gas guide ring 64 is also provided in the lower connecting seat 6, and a gas guide groove 641 is provided on the outer circumferential surface of the gas guide ring 64. When the gas guide ring 64 is installed in the lower connecting seat 6, the side wall of the lower connecting seat 6 closes the opening of the gas guide groove 641, forming an annular gas guide channel. The inner opening of the protective gas interface 63 is located at the opposite position of the gas guide groove 641, so that the protective gas interface 63 is connected to the gas guide channel.

[0074] Multiple air guide holes 642 are provided on one side of the bottom of the air guide groove 641, and the multiple air guide holes 642 are evenly distributed in the circumferential direction of the air guide ring 64. When the air guide ring 64 is installed in the lower connecting seat 6, the end face of the opening side of the air guide holes 642 faces the lower protective mirror 62. The protective gas input through the protective gas interface 63 can be sprayed towards the lower protective mirror 62 at a faster speed through the multiple air guide holes 642, increasing the flow rate of the protective gas sprayed onto the lower protective mirror 62 and improving the cooling and dust removal effect of the protective gas on the lower protective mirror 62.

[0075] The laser processing apparatus of this application uses the laser processing apparatus cooling system of any embodiment of this application and also has the advantages of the laser processing apparatus cooling system of the corresponding embodiment.

[0076] In the description of this invention, the terms "one embodiment," "specific embodiment," "preferred embodiment," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this invention, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0077] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A cooling system for a laser processing apparatus, characterized in that, The system includes an upper connecting seat water channel (1), a main chamber water channel (2), an internal mirror water channel (3), and a lower connecting seat water channel (4). The upper connecting seat water channel (1) and the lower connecting seat water channel (4) are respectively located in the side walls of the upper connecting seat (5) and the lower connecting seat (6), and are respectively connected to an upper circulating water interface (51) and a lower circulating water interface (61). The main chamber water channel (2) is located in the side wall of the main chamber (7), and its two ends are respectively connected to the upper connecting seat water channel (1) and the lower connecting seat water channel (4). The internal mirror water channel (3) is located in the metal mirror (8) and is connected to the main chamber water channel (2), so that cooling water can circulate through the upper circulating water interface (51), the upper connecting seat water channel (1), the main chamber water channel (2), the internal mirror water channel (3), the lower connecting seat water channel (4), and the lower circulating water interface (61) to perform water cooling on the optical components.

2. The cooling system of the laser processing apparatus according to claim 1, characterized in that, The metal mirror (8) includes a collimating mirror (81) and a focusing mirror (82). The internal water channel (3) includes a collimating mirror water channel (31) and a focusing mirror water channel (32). The main chamber water channel (2) includes a first chamber water channel (21), a second chamber water channel (22), and a third chamber water channel (23). The first chamber water channel (21) is connected to the upper connecting seat water channel (1). The collimating mirror water channel (31) is connected between the first chamber water channel (21) and the second chamber water channel (22). The focusing mirror water channel (32) is connected between the second chamber water channel (22) and the third chamber water channel (23). The third chamber water channel (23) is connected to the lower connecting seat water channel (4).

3. The cooling system of the laser processing apparatus according to claim 2, characterized in that, The main chamber (7) is provided with a collimating lens end cap (71) and a focusing lens end cap (72). The collimating lens end cap (71) is detachably connected to one side of the main chamber (7). The collimating lens (81) is mounted on the collimating lens end cap (71). The collimating lens end cap (71) is provided with a first collimating end cap water channel (711) and a second collimating end cap water channel (712). The first collimating end cap water channel (711) is connected between the first chamber water channel (21) and the collimating lens water channel (31). The second collimating end cap water channel (712) is connected to the collimating lens water channel (31). Between the second chamber water passage (22); the focusing lens end cap (72) is detachably connected to the other side of the main chamber (7), the focusing lens (82) is mounted on the focusing lens end cap (72), the focusing lens end cap (72) is provided with a first focusing end cap water passage (721) and a second focusing end cap water passage (722) inside the focusing lens end cap (721), the first focusing end cap water passage (721) is connected between the second chamber water passage (22) and the focusing lens water passage (32), and the second focusing end cap water passage (722) is connected between the focusing lens water passage (32) and the third chamber water passage (23).

4. The cooling system of the laser processing apparatus according to claim 3, characterized in that, The collimating lens (81) includes a collimating lens body (811) and a collimating lens cover plate (812). The collimating lens body (811) is cylindrical, with an inclined collimating surface (813) at one end. A circular cavity is provided inside, such that the sidewall of the collimating lens body (811) and the collimating surface (813) each form a predetermined thickness. A collimating lens partition (814) is provided inside the collimating lens body (811), abutting against the sidewall of the collimating lens body (811) and having a gap between it and the collimating surface (813). The collimating lens cover plate (812) is connected to the collimating lens body (811). One end of the collimator body (811) opposite to the collimating surface (813) is connected to the collimator partition (814). The collimator partition (814) divides the cavity inside the collimator body (811) to form the collimator water channel (31). The collimator cover plate (812) has a first collimator through hole (815) and a second collimator through hole (816) on both sides of the collimator partition (814). The first collimator through hole (815) and the second collimator through hole (816) are respectively connected to the first collimator end cover water channel (711) and the second collimator end cover water channel (712). The focusing lens (82) includes a focusing lens body (821) and a focusing lens cover plate (822). The focusing lens body (821) is cylindrical, with an inclined focusing surface (823) at one end. A circular cavity is provided inside, such that the sidewall of the focusing lens body (821) and the focusing surface (823) each have a predetermined thickness. A focusing lens partition (824) is provided inside the focusing lens body (821), abutting against the sidewall of the focusing lens body (821) and having a gap between it and the focusing surface (823). The focusing lens cover plate (822) is connected to the focusing lens body (821). One end of the focusing lens body (821) opposite to the focusing surface (823) is connected to the focusing lens partition (824). The focusing lens partition (824) divides the cavity inside the focusing lens body (821) to form the focusing lens water channel (32). The focusing lens cover plate (822) has a first focusing lens through hole (825) and a second focusing lens through hole (826) on both sides of the focusing lens partition (824). The first focusing lens through hole (825) and the second focusing lens through hole (826) are respectively connected to the first focusing end cover water channel (721) and the second focusing end cover water channel (722).

5. The cooling system of the laser processing apparatus according to claim 1, characterized in that, The upper connecting seat (5) is provided with an upper protective mirror (52). The upper connecting seat water passage (1) includes an upper connecting seat annular water passage (11) and an upper connecting seat descending water passage (12). The upper connecting seat annular water passage (11) is arranged near the periphery of the upper protective mirror (52). One end of the upper connecting seat annular water passage (11) is connected to the upper circulating water interface (51), and the other end is connected to the upper connecting seat descending water passage (12). The other end of the upper connecting seat descending water passage (12) is connected to the main chamber water passage (2).

6. The cooling system of the laser processing apparatus according to claim 2, characterized in that, The lower connecting seat (6) is provided with a lower protective mirror (62). The lower connecting seat water passage (4) includes a lower connecting seat connecting water passage (41) and a lower protective mirror lower loop (42). One end of the lower connecting seat connecting water passage (41) is connected to the main chamber water passage (2), and the other end is connected to the lower protective mirror lower loop (42). The lower protective mirror lower loop (42) is arranged near the periphery of the lower protective mirror (62) and is connected to the lower circulating water interface (61).

7. The cooling system of the laser processing apparatus according to claim 6, characterized in that, The main chamber (7) is connected to the lower connecting seat (6) by a lower protective mirror upper loop (24) inside the side wall. The lower protective mirror upper loop (24) is located at the corresponding position of the lower connecting seat (6). One side of the lower protective mirror upper loop (24) is connected to the third chamber water passage (23), and the other side is connected to the lower connecting seat connecting water passage (41).

8. The cooling system of the laser processing apparatus according to claim 6, characterized in that, The lower connector (6) is also provided with a protective gas port (63), which is located below the lower protective mirror (62) and adjacent to the lower protective mirror (62).

9. The cooling system of the laser processing apparatus according to claim 8, characterized in that, The lower connecting seat (6) is also provided with an air guide ring (64). An air guide groove (641) is provided on the outer circumferential surface of the air guide ring (64). A plurality of air guide holes (642) are provided on the bottom of the air guide groove (641) facing one side. The air guide ring (64) is installed in the lower connecting seat (6) so that the wall of the lower connecting seat (6) closes the opening of the air guide groove (641), and the air guide holes (642) face the lower protective mirror (62). The protective air interface (63) is connected to the air guide groove (641).

10. A laser processing apparatus, characterized in that, Includes a cooling system for a laser processing apparatus according to any one of claims 1-9.

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