Film plating instrument magnetic attraction support suitable for samples of multiple sizes

Abstract

The invention relates to the technical field of wafer coating tools, in particular to a coating instrument magnetic attraction support suitable for samples of multiple sizes, which comprises a support body with a built-in magnetic attraction mechanism, two transverse moving parts are symmetrically arranged on the outer side of the support body, the two transverse moving parts jointly support an inclined support, and the two transverse moving parts are arranged on the support body. The inclination angle of the inclined support can be adjusted through relative movement of the inclined support. Wherein a floating pressing piece is further arranged at the tail end of the inclined support, the floating pressing piece moves along with the inclined support so that the edge of the sample can be pressed and fixed, through cooperation of the inclined support with the adjustable angle and the floating pressing piece, lossless and stable pressing of the sample is achieved, and the accuracy of the sample is improved. Pollution and damage risks caused by a traditional adhesive tape fixing mode are thoroughly overcome; meanwhile, the support body adopts the magnetic attraction design of the magnetic attraction mechanism, so that the whole support has extremely high position flexibility, and the support can be conveniently adapted to samples with various sizes and irregular shapes.

Description

Technical Field

[0001] This invention relates to the field of wafer coating equipment technology, and in particular to a magnetic holder for a coating instrument suitable for samples of various sizes. Background Technology

[0002] In precision machining fields such as semiconductor manufacturing and optical coating, securing samples firmly is a crucial prerequisite for ensuring coating quality. For standard-sized wafers, there are usually dedicated fixtures for fixing them; however, in scientific research and actual production, it is often necessary to handle irregular wafers such as those smaller than 4 inches, such as quarter-circular wafers or rectangular samples.

[0003] Currently, the industry commonly uses high-temperature resistant tape to directly adhere these irregularly shaped small samples to the sample stage of the coating equipment. However, this method is cumbersome, requires precise manual alignment, and is inefficient and inconsistent. Secondly, the uncertainty of the tape's adhesive strength may cause the sample to shift or even fall off under the high vacuum or temperature change environment during the coating process, affecting the uniformity of the coating. In addition, the tape can easily damage the sample edges when removed, and its residue can also contaminate the sample and sample stage surfaces, adversely affecting subsequent processes.

[0004] Therefore, in order to achieve both convenience and reliability in fixing such irregular wafers, we propose a magnetic holder for a coating instrument suitable for samples of various sizes. Summary of the Invention

[0005] The purpose of this invention is to solve the shortcomings of the existing technology, such as the cumbersome operation process of directly adhering wafers to the sample stage of the coating equipment with tape, the need for precise manual alignment, and the low efficiency. The invention proposes a magnetic suction holder for coating instruments suitable for samples of various sizes.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: Design a magnetic support for a coating instrument suitable for samples of various sizes, including a support body with a built-in magnetic attraction mechanism. Two transverse moving parts are symmetrically arranged on the outer side of the support body. The two transverse moving parts jointly support an inclined support and can adjust the tilt angle of the inclined support through their relative movement. The inclined support is further provided with a floating pressure member at the end, which moves with the inclined support to press and fix the edge of the sample.

[0007] Furthermore, the lateral movement component includes; A mounting plate fixedly connected to the outside of the support body; A fixing rod is fixedly installed on the end face of the mounting plate, and a sleeve is fixedly installed at the end of the fixing rod; An adjusting screw is threaded inside the sleeve, and a rotating sleeve is rotatably connected to the outside of the adjusting screw.

[0008] Furthermore, the support body has a frustum-shaped structure, and a flat portion is provided on the outer side of the support body. The mounting plate is fixedly installed on the flat portion by fasteners.

[0009] Furthermore, one end of the inclined bracket is pinned to the outside of one of the rotating sleeves, and a guide shaft is fixedly installed on the outside of the other rotating sleeve. A guide groove is provided on the end face of the inclined bracket, and the guide shaft slides inside the guide groove.

[0010] Furthermore, the floating pressure member includes a tubular portion and a pressure foot fixedly installed at the lower end of the tubular portion; A plug-in part is fixedly installed at the bottom end of the inclined bracket. The plug-in part and the tubular part are movably plugged into each other, and a spring is fixedly connected between them.

[0011] Furthermore, the upper end of the presser foot has a rotating ball head, and the bottom of the tubular part has a rotating cavity, in which the rotating ball head is rotatably connected.

[0012] Furthermore, the magnetic attraction mechanism includes; A lifting rod is movably inserted into the support body, and a compression spring is movably connected between the lifting rod and the inner wall of the support body; An upper magnetic plate is fixedly installed at the bottom of the lifting rod, and a lower magnetic plate is embedded at the bottom of the support body. Two magnets are arranged below the upper magnetic plate by a flipping assembly.

[0013] Furthermore, the flipping component includes; A fixing sleeve is fixedly installed on the outside of the two magnets. A rotating shaft is fixedly installed on the opposite side of the two fixing sleeves. The ends of the two rotating shafts are rotatably connected. A first bevel gear is fitted on the outside of one rotating shaft, and a second bevel gear is rotatably connected to the outside of the other rotating shaft. The first bevel gear and the second bevel gear mesh and drive each other.

[0014] Furthermore, two guide plates are fixedly installed at the bottom of the upper magnetic sheet, and a waist groove adapted to the rotating shaft is opened on the end face of the guide plate. A drive shaft sleeve is fixedly installed at the bottom of the upper magnetic sheet, and a prism rod that is movably inserted into the drive shaft sleeve is fixedly installed at the upper end of the second bevel gear.

[0015] Furthermore, a guide block is fixedly installed on the outside of the fixed sleeve on which the second bevel gear is installed, and a sliding groove is fixedly installed inside the support body, with the guide block slidably connected in the sliding groove.

[0016] The present invention proposes a magnetic support for a coating instrument suitable for samples of various sizes. The advantages are as follows: The present invention achieves non-destructive and stable clamping of samples through the cooperation of an adjustable-angle tilting support and a floating pressure component, completely overcoming the risks of contamination and damage caused by traditional tape fixing methods; at the same time, the magnetic design of the support body, with the help of the magnetic attraction mechanism, gives the entire support a high degree of positional flexibility, making it easy to adapt to samples of various sizes and irregular shapes. This not only simplifies the operation process, but also significantly improves the efficiency and versatility of coating preparation. Attached Figure Description

[0017] Figure 1 The three-dimensional representation of the present invention Figure 1 ; Figure 2 The three-dimensional representation of the present invention Figure 2 ; Figure 3 This is a schematic diagram of the floating pressure component structure of the present invention; Figure 4 This is a schematic cross-sectional view of the support structure of the present invention; Figure 5 This is a schematic diagram of the magnetic attraction mechanism of the present invention; Figure 6 This is a schematic diagram of the flip component structure of the present invention; Figure 7 This is a schematic diagram of the magnetic attraction mechanism of the present invention when it is flipped. Figure 8 This is a diagram showing the state of the support for fixing the wafer according to the present invention.

[0018] In the diagram: 1. Support body; 10. Flat part; 11. Slide groove; 2. Magnetic attraction mechanism; 20. Compression spring; 21. Lifting rod; 22. Upper magnetic plate; 23. Lower magnetic plate; 24. Flip assembly; 241. Fixing sleeve; 242. Rotating shaft; 243. First bevel gear; 244. Second bevel gear; 245. Guide plate; 246. Drive shaft sleeve; 247. Rib; 248. Guide block; 25. Magnet; 3. Lateral movement component; 31. Mounting plate; 32. Fixing rod; 33. Sleeve; 34. Adjusting screw; 35. Rotating sleeve; 36. Guide shaft; 4. Inclined bracket; 41. Guide groove; 42. Insertion part; 5. Floating pressure component; 51. Tubular part; 52. Pressure foot; 53. Spring; 54. Rotating ball head; 55. Rotating cavity. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] Reference Figure 1-8As an embodiment of the present invention, a magnetic support for a coating instrument suitable for samples of multiple sizes is disclosed. The support described in the present invention is mainly used to solve the problem that it is inconvenient to operate when non-regular wafers smaller than 4 inches, such as 1 / 4 circle or rectangular samples, need to be glued to the sample stage during coating. Reference Figure 1 , Figure 2 Specifically, the magnetic support includes a support body 1 with a built-in magnetic attraction mechanism 2. Of course, the support body 1 described in this invention is magnetically fixed to the iron sample stage by the magnetic attraction mechanism 2 to achieve convenient fixation. Two transverse moving parts 3 are symmetrically arranged on the outer side of the support body 1. The two transverse moving parts 3 jointly support an inclined bracket 4 and can adjust the tilt angle of the inclined bracket 4 through their relative movement. The inclined support 4 is further provided with a floating pressure member 5 at its end. The floating pressure member 5 moves with the inclined support 4 to press and fix the edge of the sample.

[0021] In other words, the present invention achieves non-destructive and stable clamping of samples through the cooperation of the adjustable angle tilting bracket 4 and the floating pressure component 5, completely overcoming the risks of contamination and damage caused by traditional tape fixing methods; at the same time, the support body 1, with the help of the magnetic attraction mechanism 2, gives the entire support a high degree of positional flexibility, making it easy to adapt to samples of various sizes and irregular shapes. This not only simplifies the operation process, but also significantly improves the efficiency and versatility of coating preparation.

[0022] Reference Figure 2 In some embodiments, the lateral movement component 3 of the present invention includes; A mounting plate 31 is fixedly connected to the outside of the support body 1; A fixing rod 32 is fixedly installed on the end face of the mounting plate 31, and a sleeve 33 is fixedly installed on the end of the fixing rod 32; An adjusting screw 34 is threadedly connected inside the sleeve 33, and a rotating sleeve 35 is rotatably connected to the outside of the adjusting screw 34.

[0023] Optionally, a knob is also fixedly installed at the end of the adjusting screw 34 in this invention. The knob can improve the ease of operation of the adjusting screw 34. Specifically, in this embodiment, a threaded pair consisting of two adjusting screws 34 and sleeve 33 is used. When the two adjusting screws 34 are adjusted separately, the lateral position between the outer rotating sleeves 35 can be changed to achieve the purpose of adjusting the tilt angle of the subsequent tilting bracket 4.

[0024] Reference Figure 2In an optional embodiment, the support body 1 of the present invention has a frustum structure, and a flat portion 10 is provided on the outer side of the support body 1. The mounting plate 31 is fixedly mounted on the flat portion 10 by fasteners.

[0025] Specifically, the support 1 described in this embodiment adopts a frustum structure design, which can provide good structural stability. The flat part 10 provides a precise positioning reference for the installation of the mounting plate 31. The mounting plate 31 is firmly fixed on the flat part 10 by fasteners, thereby ensuring the stability of the two transverse moving parts 3. Optionally, the fasteners described in this invention are set as bolt assemblies.

[0026] Reference Figure 3 Based on the above embodiments, in this invention, one end of the inclined bracket 4 is pinned to rotate on the outside of one of the rotating sleeves 35, and a guide shaft 36 is fixedly installed on the outside of the other rotating sleeve 35. A guide groove 41 is provided on the end face of the inclined bracket 4, and the guide shaft 36 slides inside the guide groove 41.

[0027] Specifically, one end of the tilting bracket 4 is pinned to the outer side of one of the rotating sleeves 35 to form a rotatable connection. A guide shaft 36 is fixedly installed on the outer side of the other rotating sleeve 35. The guide shaft 36 cooperates with the guide groove 41 opened on the end face of the tilting bracket 4. When the operator adjusts the adjusting screws 34 of the two transverse moving parts 3, the relative distance between the two rotating sleeves 35 changes. At this time, one end of the tilting bracket 4 rotates around the pin connection point, while the other end is forced to rise or fall through the sliding cooperation between the guide groove 41 and the guide shaft 36, thereby accurately realizing the rapid adjustment of its tilt angle.

[0028] Reference Figure 3 In an optional embodiment, the floating pressure member 5 of the present invention includes a tubular portion 51 and a pressure foot 52 fixedly installed at the lower end of the tubular portion 51. A plug-in part 42 is fixedly installed at the bottom end of the inclined bracket 4. The plug-in part 42 and the tubular part 51 are movably plugged into each other, and a spring 53 is fixedly connected between them. Of course, the plug-in part 42 and the tubular part 51 in this invention can also adopt a circumferential locking structure design.

[0029] In other words, by employing the design of spring 53 in this invention, the pressure foot 52 can produce a certain elastic yield when in contact with the sample, thereby automatically adapting to the slight height difference on the sample surface, ensuring that the applied pressure is flexible and avoiding rigid damage to the sample.

[0030] Reference Figure 3Furthermore, based on the above embodiments, the upper end of the presser foot 52 has a rotating ball head 54, and the bottom of the tubular part 51 is provided with a rotating cavity 55. The rotating ball head 54 is rotatably connected in the rotating cavity 55. It should be noted that the presser foot 52 in this invention is configured as a triangular structure, and it is preferably configured as a heat-resistant rubber.

[0031] By employing a design that accommodates and rotatably connects the rotating ball head 54 within the rotating cavity 55, a universal joint structure is formed. In this way, the pressure foot 52 can not only float axially but also swing freely within a certain range. When the pressure foot 52 contacts the edge of an irregular sample, it can adjust its bottom surface to perfectly conform to the contour of the sample through universal adjustment, achieving adaptive clamping of point contact or surface contact. This ensures uniform pressure distribution and further enhances the stability of the clamping.

[0032] Reference Figure 5 In some embodiments, the magnetic attraction mechanism 2 of the present invention includes; A lifting rod 21 is movably inserted into the support body 1, and a compression spring 20 is movably connected between the lifting rod 21 and the inner wall of the support body 1; An upper magnetic sheet 22 is fixedly installed at the bottom of the lifting rod 21, and a lower magnetic sheet 23 is embedded at the bottom of the support body 1. Two magnets 25 are arranged below the upper magnetic sheet 22 through a flipping assembly 24.

[0033] Specifically, in this embodiment, two cylindrical magnets 25 are arranged below the upper magnetic sheet 22 by means of a flipping assembly 24, and the two magnets 25 are cleverly arranged and their polarity is reversed. like Figure 7 As shown, by operating the flipping component 24, the adjacent ends of the two magnets 25 exhibit the same magnetism, such as being N poles. At this time, the magnetic field lines of the two magnets 25 will be emitted from their respective N poles, forming a closed internal magnetic circuit through the upper magnetic plate 22 and the lower magnetic plate 23, and then returning to their respective S poles. Since the magnetic field lines are effectively constrained inside, there is almost no magnetic field leakage to the outside. Therefore, no magnetic attraction is generated between the support 1 and the iron sample stage, and it can be easily picked up and put down. When the flipping component 24 is operated again, one of the magnets 25 is flipped so that the adjacent ends of the two magnets 25 exhibit opposite magnetism, such as one end being the N pole and the other end being the S pole. At this time, the magnetic field lines will start from the N pole of one magnet 25, pass through the lower magnetic sheet 23 and the iron sample stage, and then return to the S pole of the other magnet 25 through the air gap, forming an open external magnetic circuit. At this time, the external magnetic field firmly attracts the support 1 to the sample stage, achieving stable fixation.

[0034] This design allows for switching between two states: internally closed and externally open magnetic field lines, making the installation and disassembly of support 1 extremely convenient.

[0035] Reference Figure 6 In an optional embodiment, the flipping component 24 of the present invention includes; Fixed sleeves 241 are fixedly installed on the outside of the two magnets 25. Rotating shafts 242 are fixedly installed on opposite sides of the two fixed sleeves 241. The ends of the two rotating shafts 242 are rotatably connected. A first bevel gear 243 is fitted on the outside of one rotating shaft 242, and a second bevel gear 244 is rotatably connected to the outside of the other rotating shaft 242. The first bevel gear 243 and the second bevel gear 244 mesh and drive each other.

[0036] Furthermore, in this invention, two guide plates 245 are fixedly installed at the bottom of the upper magnetic sheet 22. The end face of the guide plate 245 is provided with a waist groove that matches the rotating shaft 242. A drive shaft sleeve 246 is fixedly installed at the bottom of the upper magnetic sheet 22. A rib 247 that is movably inserted into the drive shaft sleeve 246 is fixedly installed at the upper end of the second bevel gear 244. The rib 247 and the drive shaft sleeve 246 are circumferentially locked and remain movably inserted. Thus, when the upper magnetic sheet 22 moves upward, it can still drive the second bevel gear 244 to rotate.

[0037] Of course, in order to limit the upward movement of the magnet 25, in this embodiment of the invention, a guide block 248 is fixedly installed on the outside of the fixed sleeve 241 on which the second bevel gear 244 is installed, and a slide groove 11 is fixedly installed inside the support body 1. The guide block 248 is slidably connected in the slide groove 11. That is, by means of the sliding limit of the guide block 248 and the slide groove 11, the upward movement of the magnet 25 is limited. In this way, it can be ensured that the magnet 25 and the upper magnetic sheet 22 above are separated to meet the subsequent rotation of the magnet 25.

[0038] Meanwhile, since the fixed sleeve 241 is coordinated with the guide block 248 and the slide groove 11, the corresponding magnet 25 will only move up and down and will not rotate. Thus, only one magnet 25 can be rotated during a single drive.

[0039] In other words, when flipping and switching a magnet 25, first pull the lifting rod 21 upward. When the lifting rod 21 moves upward, it will pull the upper magnetic plate 22 upward. If the upper magnetic plate 22 and the magnet 25 do not separate, the upper magnetic plate 22 will drive the magnet 25 upward together. With the help of the guide block 248 and the slide groove 11, the upward movement of the magnet 25 is limited. When the guide block 248 moves to the maximum position, the magnet 25 will no longer move, and the upper magnetic plate 22 and the magnet 25 will separate. If the upper magnetic sheet 22 and the magnet 25 are directly separated, the waist groove on the guide plate 245 will pull the rotating shaft 242 upward, so as to force the magnet 25 to move upward and separate from the lower magnetic sheet 23. This design is to ensure that the magnet 25 is separated between the upper magnetic sheet 22 and the lower magnetic sheet 23, so as to facilitate subsequent flipping. After separation, the lifting rod 21 can be rotated. When the lifting rod 21 rotates, it will drive the corresponding magnet 25 to flip through the cooperation of the first bevel gear 243 and the second bevel gear 244, thus realizing the switching between magnetic and non-magnetic states.

[0040] After the switching is completed, release the pressure on the lifting rod 21. Under the action of the compression spring 20, the lifting rod 21 returns to its original position downwards. At this time, the lower magnetic plate 23 moves down and the magnet 25 moves down to its original position, completing the switching operation.

[0041] Of course, the magnetic conductive sheet described in this invention can be made of iron, and the other parts can be made of high-temperature resistant plastic parts to avoid magnetic interference.

[0042] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A magnetic holder for a coating instrument suitable for samples of multiple sizes, characterized in that; The support (1) includes a built-in magnetic attraction mechanism (2). Two transverse components (3) are symmetrically arranged on the outer side of the support (1). The two transverse components (3) jointly support an inclined bracket (4) and can adjust the tilt angle of the inclined bracket (4) through their relative movement. Among them, a floating pressure member (5) is provided at the end of the inclined bracket (4). The floating pressure member (5) moves with the inclined bracket (4) to achieve pressing and fixing of the sample edge.

2. The magnetic holder for a coating instrument suitable for multi-size samples according to claim 1, characterized in that: The lateral movement component (3) includes; A mounting plate (31) is fixedly connected to the outside of the support (1); A fixing rod (32) is fixedly installed on the end face of the mounting plate (31), and a sleeve (33) is fixedly installed at the end of the fixing rod (32). An adjusting screw (34) is threaded inside the sleeve (33), and a rotating sleeve (35) is rotatably connected to the outside of the adjusting screw (34).

3. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 2, characterized in that: The support body (1) has a frustum structure, and a flat part (10) is provided on the outer side of the support body (1). The mounting plate (31) is fixedly installed on the flat part (10) by fasteners.

4. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 2, characterized in that: One end of the inclined bracket (4) is pinned to rotate on the outside of one of the rotating sleeves (35), and a guide shaft (36) is fixedly installed on the outside of the other rotating sleeve (35). A guide groove (41) is provided on the end face of the inclined bracket (4), and the guide shaft (36) slides inside the guide groove (41).

5. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 1, characterized in that: The floating pressure member (5) includes a tubular part (51) and a pressure foot (52) fixedly installed at the lower end of the tubular part (51). A plug-in part (42) is fixedly installed at the bottom end of the inclined bracket (4), and the plug-in part (42) and the tubular part (51) are movably plugged in, and a spring (53) is fixedly connected between them.

6. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 5, characterized in that: The upper end of the presser foot (52) has a rotating ball head (54), and the bottom of the tubular part (51) is provided with a rotating cavity (55). The rotating ball head (54) is rotatably connected in the rotating cavity (55).

7. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 1, characterized in that: The magnetic attraction mechanism (2) includes; A lifting rod (21) is movably inserted into the support (1), and a compression spring (20) is movably connected between the lifting rod (21) and the inner wall of the support (1). An upper magnetic plate (22) is fixedly installed at the bottom of the lifting rod (21), and a lower magnetic plate (23) is embedded at the bottom of the support body (1). Two magnets (25) are provided below the upper magnetic plate (22) through a flipping assembly (24).

8. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 7, characterized in that: The flipping component (24) includes; A fixing sleeve (241) is fixedly installed on the outside of the two magnets (25). A rotating shaft (242) is fixedly installed on the opposite side of the two fixing sleeves (241). The ends of the two rotating shafts (242) are rotatably connected. A first bevel gear (243) is fitted on the outside of one rotating shaft (242), and a second bevel gear (244) is rotatably connected on the outside of the other rotating shaft (242). The first bevel gear (243) and the second bevel gear (244) mesh and drive each other.

9. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 8, characterized in that: Two guide plates (245) are fixedly installed at the bottom of the upper magnetic sheet (22). The end face of the guide plate (245) is provided with a waist groove that is compatible with the rotating shaft (242). A drive shaft sleeve (246) is fixedly installed at the bottom of the upper magnetic sheet (22). A rib (247) that is movably inserted into the drive shaft sleeve (246) is fixedly installed at the upper end of the second bevel gear (244).

10. A magnetic holder for a coating instrument suitable for multi-size samples according to claim 8, characterized in that: A guide block (248) is fixedly installed on the outside of the fixed sleeve (241) on which the second bevel gear (244) is installed, and a slide groove (11) is fixedly installed inside the support body (1), and the guide block (248) is slidably connected in the slide groove (11).

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