Optical waveguide sensor and spectral analysis element

Abstract

The optical waveguide sensor includes, for example, a core extending in a predetermined direction and guiding inspection light; a cladding layer having a lower refractive index than the core and surrounding at least a portion of the outer periphery of the core; and a groove portion which is located in a first direction of the core so as to leak out an exudation component of the inspection light guided by the core, the groove portion having an end surface located further toward a second direction side than an end portion of the core, the second direction side being orthogonal to the first direction. In the optical waveguide sensor, the groove portion may have an inspection region in which the distance between the core and a surface located on the first direction side of the core is equal to or less than a threshold value. This makes it possible, for example, to provide a newly improved optical waveguide sensor and spectral analysis element that can further improve production accuracy.

Description

Technical Field

[0001] This invention relates to optical waveguide sensors and spectral analysis elements. Background Technology

[0002] Previously, sensors that utilize attenuated total reflection (ATR) to determine the composition, concentration, etc., of a substance are known (e.g., Patent Document 1). When infrared light is totally reflected in the ATR crystal prism, the sensor can use the light (evanescent light) that slightly seeps out from the outside of the prism in contact with the sample to examine the sample.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2005-61904 Summary of the Invention

[0006] -The problem the invention aims to solve-

[0007] In such sensors, it would be beneficial, for example, to further improve the manufacturing precision of the device.

[0008] Therefore, one of the objectives of this invention is, for example, to obtain a newly improved optical waveguide sensor and spectral analysis element that can further improve manufacturing accuracy.

[0009] -Methods for solving problems-

[0010] The optical waveguide sensor of the present invention includes, for example: a fiber core extending in a given direction for guiding inspection light; a cladding having a lower refractive index than the fiber core and surrounding at least a portion of the outer periphery of the fiber core; and a groove located in a first direction of the fiber core to allow leakage of the percolation component of the inspection light guided by the fiber core, with its end face located on a second direction side orthogonal to the first direction than the end of the fiber core.

[0011] In the optical waveguide sensor, the groove may have an inspection area where the distance between the fiber core and the surface located on the first direction side of the fiber core is below a threshold.

[0012] In the optical waveguide sensor, the threshold value can also be 5 μm.

[0013] In the optical waveguide sensor, the inspection area may also extend along the fiber core.

[0014] In the optical waveguide sensor, the groove may also be a microfluidic channel for conveying fluid containing the object being inspected.

[0015] In the optical waveguide sensor, the cladding may also include: a first cladding layer located further along the second direction than the fiber core; and a second cladding layer stacked on the first cladding layer, with a step formed between the first cladding layer and the second cladding layer.

[0016] The optical waveguide sensor may also include: an optical branch, which branches the inspection light.

[0017] In the optical waveguide type sensor, the optical branch can also be a power divider, WDM, polarization beam splitter, variable divider, or optical switch.

[0018] In the optical waveguide sensor, the optical branch may be a polarization beam splitter that branches the inspection light into TE polarization components and TM polarization components. The slot may include: a first slot located in the first direction of the fiber core that guides the TE polarization component; and a second slot having the same or a linearly symmetrical shape as the first slot and located in the first direction of the fiber core that guides the TM polarization component.

[0019] In the optical waveguide sensor, the fiber core may be formed in a bent manner such that the surface on which the inspection light is input and the surface on which the inspection light is output are the same.

[0020] The optical waveguide sensor may also include a mode filter to remove higher-order mode components from the inspection light.

[0021] In the optical waveguide sensor, the groove may also include: a first groove located in the first direction of the fiber core; and a second groove located on the side of the fiber core opposite to the first groove.

[0022] In the optical waveguide sensor, the fiber core may also include: a first fiber core extending in a given direction to guide a first inspection light; and a second fiber core extending in a given direction on the side of the slot opposite to the first fiber core to guide a second inspection light.

[0023] In the optical waveguide type sensor, a sensing film may also be formed in the inspection area.

[0024] In the optical waveguide type sensor, the inspection area may also include a curved portion.

[0025] In the optical waveguide type sensor, the angle of the tangent of the curved portion may change by more than 360 degrees.

[0026] In the optical waveguide sensor, the first fiber core may be formed in a bent manner such that the surface into which the inspection light is input and the surface into which the inspection light is output are the same first surface, and the second fiber core may be formed in a bent manner such that the surface into which the inspection light is input and the surface into which the inspection light is output are the same second surface, and the first surface and the second surface are opposite surfaces.

[0027] In the optical waveguide sensor, the fiber core and the cladding may also be made of any material comprising SiO2, Si, SiN, InP, GaAs, or GaN.

[0028] Furthermore, the spectral analysis element of the present invention includes an optical waveguide type sensor.

[0029] -Invention Effects-

[0030] According to the present invention, for example, it is possible to obtain newly improved optical waveguide sensors and spectral analysis elements that can further improve manufacturing accuracy. Attached Figure Description

[0031] Figure 1 This is an illustrative and schematic top view of the optical waveguide type sensor according to the first embodiment.

[0032] Figure 2 yes Figure 1 A cross-sectional view of the waveguide-type sensor at position II-II.

[0033] Figure 3 This is an illustrative and schematic top view of the optical waveguide type sensor according to the second embodiment.

[0034] Figure 4 This is an illustrative and schematic top view of the optical waveguide type sensor according to the third embodiment.

[0035] Figure 5 This is an illustrative and schematic top view of the optical waveguide type sensor according to the fourth embodiment.

[0036] Figure 6 This is an illustrative and schematic top view of the optical waveguide type sensor according to the fifth embodiment.

[0037] Figure 7 yes Figure 6 A cross-sectional view of the optical waveguide sensor at position III-III.

[0038] Figure 8 This is an illustrative and schematic top view of the optical waveguide type sensor according to the sixth embodiment.

[0039] Figure 9 yes Figure 8A cross-sectional view of the waveguide-type sensor at position IV-IV.

[0040] Figure 10 This is an illustrative and schematic top view of the optical waveguide type sensor according to the seventh embodiment.

[0041] Figure 11 yes Figure 10 A cross-sectional view of the waveguide-type sensor at position VV.

[0042] Figure 12 This is an illustrative and schematic top view of the optical waveguide type sensor according to the eighth embodiment.

[0043] Figure 13 yes Figure 12 A cross-sectional view of the optical waveguide sensor at position VI-VI.

[0044] Figure 14 This is an illustrative and schematic top view of the optical waveguide type sensor according to the ninth embodiment.

[0045] Figure 15 yes Figure 14 A cross-sectional view of the optical waveguide sensor at position VII-VII.

[0046] Figure 16 This is an illustrative and schematic top view of the optical waveguide type sensor according to the 10th embodiment.

[0047] Figure 17 yes Figure 16 A cross-sectional view of the waveguide-type sensor at position VIII-VIII.

[0048] Figure 18 This is an exemplary and schematic top view of the optical waveguide type sensor according to the 11th embodiment. Detailed Implementation

[0049] Hereinafter, several exemplary embodiments of the present invention are disclosed. The structure of the embodiments shown below, as well as the effects and results (effects) resulting from such structures, are examples. The present invention can also be implemented using structures other than those disclosed in the embodiments below. Furthermore, according to the present invention, at least one of various effects (including derived effects) obtained through the structure can be obtained.

[0050] The various embodiments shown below have the same structure. Therefore, based on the structure of each embodiment, the same function and effect can be obtained based on this same structure. Furthermore, the same reference numerals are used for these same structures below, and repeated descriptions are sometimes omitted.

[0051] Furthermore, all figures are schematic diagrams, and the dimensions shown may differ from the actual dimensions of the objects. In each figure, arrow X represents the X direction, arrow Y represents the Y direction, and arrow Z represents the Z direction. The X, Y, and Z directions intersect and are orthogonal to each other. In this specification, the top view is a line of sight viewed in the opposite direction to the Z direction; a top view refers to the accompanying figure viewed from this top perspective.

[0052] [First Implementation]

[0053] Figure 1 This is a top view of the optical waveguide sensor 10A (10) according to the first embodiment. The optical waveguide sensor 10 has, for example, a flat cuboid shape that is relatively thin in the Z direction. The optical waveguide sensor 10 can be used, for example, as a spectral analysis element for an object to be inspected. Hereinafter, in this specification, the positive Z direction will be described as "up" and the negative Z direction as "down". However, when the optical waveguide sensor 10 is used with the whole or part of it upright (for example, rotated 90 degrees so that the X or Y direction is up), the up-down positional relationship in the specification may sometimes differ from the positional relationship in use.

[0054] The optical waveguide sensor 10 can be configured, for example, as a known planar lightwave circuit (PLC). In this case, the optical waveguide sensor 10 integrally has a substrate extending intersecting the Z-direction, and a structure stacked on the substrate along the Z-direction. The substrate is a glass substrate or a silicon substrate. The structure on the substrate has a core 12 and a cladding 11 surrounding the outer periphery of the core 12. The cladding 11 and the core 12 are, for example, made of a material comprising any of SiO2, Si, SiN, InP, GaAs, or GaN. Furthermore, the cladding 11 has a refractive index lower than that of the core 12. In addition, the cladding 11 only needs to have the effect of surrounding at least a portion of the outer periphery of the core 12 and blocking the inspection light for waveguided testing on the core 12, and may not necessarily surround the entire periphery of the core 12 (for example, see reference). Figure 7 ).

[0055] In the optical waveguide sensor 10, the fiber core 12 extends in a given direction to guide the inspection light. Furthermore, along with the transmission of the inspection light, a component of the inspection light that leaks out, i.e., evanescent light, is distributed in the cladding 11 near the fiber core 12. To detect this evanescent light, the relative refractive index difference between the fiber core 12 and the cladding 11 is preferably, for example, 0.2% or more and 15% or less. Moreover, the inspection light can be either single-mode or multi-mode.

[0056] like Figure 1As shown, the optical waveguide sensor 10 extends along a virtual surface intersecting the Z direction. Inspection light input to the incident end of the fiber core 12 is transmitted along the fiber core 12 and output from the exit end of the fiber core 12.

[0057] Figure 2 yes Figure 1 A cross-sectional view of the waveguide-type sensor 10A at position II-II. (See image.) Figure 2 As shown, cladding 11 includes a lower cladding 11a (first cladding) stacked on substrate 14 and an upper cladding 11b (second cladding) stacked on the lower cladding 11a. The lower cladding 11a is located below the fiber core 12, and a step (not shown) is formed between the lower cladding 11a and the upper cladding 11b. The lower cladding 11a and the upper cladding 11b may be made of the same material and have the same refractive index, but they may also be made of different materials and have different refractive indices.

[0058] The waveguide-type sensor 10 includes a groove 13 located to the side of the fiber core 12 (in the first direction, here the negative Y direction), allowing leakage of the percolation component of the inspection light guided by the fiber core 12. The bottom surface (end face) of the groove 13 is located further below the end of the fiber core 12 (in the second direction, orthogonal to the first direction, here the negative Z direction). The groove 13 has an inspection area 13a located approximately in the center and liquid reservoirs 13b located at both ends. The inspection area 13a extends along the fiber core 12 for a given length, and the distance L1 between the fiber core 12 and the side surface of the groove 13 (the surface located in the first direction of the fiber core 12) is set below a threshold. The threshold is, for example, 5 μm, but can be appropriately selected depending on the object being inspected. The groove containing the inspection area 13a between the liquid reservoirs 13b extends, for example, throughout the entire interval, to... Figure 2 The cross-sectional shape shown indicates a generally fixed width and a generally fixed depth. The groove 13 functions as a microfluidic channel for conveying the injected fluid by injecting a fluid containing the object being inspected into the reservoir 13b. The fluid can be, for example, a liquid or gas, but can also be a viscoelastic material, a soft solid, etc. Furthermore, if the fluid is a viscoelastic material or a solid, the optical waveguide sensor 10 can be used in a vertical position.

[0059] As described above, evanescent light of the inspection light is distributed around the core 12 within the cladding 11. Here, when the distance L1 between the core 12 and the side surface of the groove 13 is relatively small, for example, 5 μm or less, the evanescent light of the inspection light leaks from the side surface of the groove 13 and is absorbed by the object being inspected within the groove 13. In other words, the mode field of the inspection light extends further into the groove 13 than the side surface of the groove 13 on the core 12 side. That is, the mode field diameter of the inspection light is greater than the distance from the center of the core 12 to the side surface of the groove 13 on the core 12 side. In this case, the intensity of the emitted light decreases relative to the incident light intensity, resulting in an amount of inspection light absorbed by the object being inspected. The amount of decrease in intensity of the emitted light relative to the incident light (loss intensity), i.e., the amount of absorption, varies depending on the object being inspected. Therefore, by measuring this loss intensity, the object being inspected can be determined. In addition, outside the inspection area 13a of the groove 13, the cladding 11 around the fiber core 12 is thicker, so no evanescent light leakage occurs.

[0060] Here, the manufacturing method of the optical waveguide type sensor 10 will be described. First, a lower cladding layer and a glass film forming the fiber core are sequentially formed on a substrate 14. Then, the fiber core layer is processed into a waveguide shape by photolithography and etching, and a glass film forming the upper cladding layer is formed on it. Afterward, a groove 13 is formed on the side of the fiber core 12 by photolithography and etching.

[0061] As described above, the optical waveguide sensor 10A (10) has a groove 13 located on the side of the fiber core 12. As a result, in the optical waveguide sensor 10, the distance L1 between the side surface of the fiber core 12 and the groove 13 can be processed with photolithographic precision, which can further improve the manufacturing accuracy.

[0062] Furthermore, in this embodiment, the optical waveguide sensor 10 is provided with a groove 13 that contains fluid including the object being inspected, and the side surface of the groove 13 becomes the contact surface for elapsed light leakage. With this structure, compared to a structure without the groove 13, it becomes easier and more stable to keep the object being inspected in a measurable state.

[0063] [Second Implementation]

[0064] Figure 3 This is a top view of the optical waveguide type sensor 10B (10) according to the second embodiment. Figure 3 As shown, in this embodiment, the inspection light input from the input section 15, which serves as a light source or optical fiber, is coupled to the fiber core 12 via the fiber array 16a. The fiber core 12 is branched into fiber core 12a and fiber core 12b by the light branch section 17. Subsequently, the inspection light, which has been guided in the fiber cores 12a and 12b, is coupled to the output section 18, which serves as a detector or optical fiber, via the fiber array 16b.

[0065] The optical branch 17 can be any structure that is inspected, such as a power divider, a WDM (wavelength division multiplexing) divider, a polarization beam splitter, or a variable divider.

[0066] In the case where the optical branch 17 is a power distributor, the distributor distributes the inspection light to each fiber core 12a, 12b at a set intensity ratio (e.g., 1:1).

[0067] When the optical branch 17 is a WDM distributor, the WDM distributor distributes the inspection light to each fiber core 12a, 12b according to each different wavelength band. In this case, the absorption characteristics of the object under inspection in each wavelength band can be checked by measuring the loss intensity in each fiber core 12a, 12b.

[0068] The case where the optical branch 17 is a polarizing beam splitter will be explained through the third embodiment.

[0069] When the optical branch 17 is a variable beam splitter, the variable beam splitter can variably set the intensity ratio of the inspection light distributed to each fiber core 12a, 12b.

[0070] Furthermore, the optical branch 17 can be configured as an optical switch, for example. In this case, the optical branch 17 can selectively input inspection light to either fiber core 12a, 12b in a time-division manner. An optical switch is an example of an optical branch.

[0071] In either case, the optical waveguide type sensor 10B (10) has an optical branch 17, thereby reducing the number of light sources compared to the case without the optical branch 17. In addition, various inspections can be performed with a relatively simple structure.

[0072] Furthermore, the input unit 15 or the output unit 18 may also include a mode filter to remove higher-order mode components from the inspection light. In this case, unwanted higher-order mode components during inspection can be removed, thereby further improving inspection accuracy. The mode filter can also be applied to structures in other embodiments. Furthermore, the location of the mode filter is not limited to the input unit 15 or the output unit 18.

[0073] [Third Implementation]

[0074] Figure 4This is a top view of the optical waveguide sensor 10C (10) according to the third embodiment. In the optical waveguide sensor 10C of this embodiment, the optical branch 17A is a polarization beam splitter that splits the inspection light into TE (transverse electric) polarized light components and TM (transverse magnetic) polarized light components. The slot includes: a first slot 13A, located to the side of the fiber core 12a that guides the TE polarized light component; and a second slot 13B, which has the same shape as the first slot 13A or is symmetrical with the fiber core 12, located to the side of the fiber core 12b that guides the TM polarized light component.

[0075] Similar to the first embodiment, the first groove 13A and the second groove 13B each have an inspection area 13Aa and 13Ba located approximately in the center, and liquid storage areas 13Ab and 13Bb located at both ends. The inspection areas 13Aa and 13Ba extend a given length along the fiber cores 12a and 12b, and the distance between the fiber cores 12a and 12b and the side surfaces is set to below a threshold value.

[0076] When the optical branch 17A is a polarized beam splitter, it distributes the inspection light into TE-polarized and TM-polarized components. In this case, the absorption characteristics of each polarized component of the object under inspection can be checked by measuring the loss intensity in each fiber core 12a, 12b.

[0077] [Fourth Implementation]

[0078] Figure 5 This is a top view of the optical waveguide sensor 10D (10) according to the fourth embodiment. In the optical waveguide sensor 10D of this embodiment, the fiber cores 12a and 12b are formed in a bent manner, such that the surface of the input inspection light and the surface of the output inspection light are the same. The optical circuit 19 can be appropriately selected according to the object being measured, for example, it is an optical interference circuit.

[0079] According to this embodiment, the input section 15 and the output section 18 can be arranged on the same surface, which can further reduce the time and cost required to manufacture the optical waveguide sensor 10D.

[0080] [Fifth Implementation]

[0081] Figure 6 This is a top view of the optical waveguide type sensor 10E (10) of the fifth embodiment. Figure 7 yes Figure 6 A cross-sectional view at position III-III of the optical waveguide sensor. (See image.) Figure 7 As shown, in this embodiment, the slot 13 of the optical waveguide sensor 10E is in the inspection area 13a, and the fiber core 12 is connected to the slot 13.

[0082] According to this embodiment, the fiber core 12 is connected to the groove portion 13. As a result, the amount of elapsed light of the inspection light absorbed by the object being inspected can be maximized, enabling further high-precision inspection of the object being inspected.

[0083] [Sixth Implementation]

[0084] Figure 8 This is a top view of the optical waveguide type sensor 10F (10) of the sixth embodiment. Figure 9 yes Figure 8 A cross-sectional view of the waveguide-type sensor at position IV-IV. In the waveguide-type sensor 10F of this embodiment, a cover portion 20 is disposed on the upper cladding 11b. In the cover portion 20, a hole 20a is formed corresponding to the liquid storage portion 13b.

[0085] The cover portion 20 is made of resins including COP (cyclic olefin polymer), PC (polycarbonate), PET, PS (polystyrene), PDMS, SU-8, etc., or Si wafers, glass materials, etc. The cover portion 20 is fixed to the upper cladding layer 11b by direct bonding based on plasma surface treatment or by curing of adhesives.

[0086] According to this embodiment, fluid pressurized by the cover 20 can be processed. Furthermore, the cover 20 prevents foreign matter from contaminating the object being inspected during inspection and prevents fluid injected into the tank 13 from overflowing.

[0087] Furthermore, in the first to fifth embodiments described above and in the seventh to eleventh embodiments described below, the cover portion may also be provided in the same manner as in this embodiment. In other embodiments, it is also possible to process fluid that has been pressurized by the cover portion. Moreover, the cover portion can prevent foreign matter from being mixed into the object being inspected during inspection, and can also prevent the fluid injected into the tank from overflowing.

[0088] [Seventh Implementation]

[0089] Figure 10 This is a top view of a portion of the optical waveguide sensor 10G (10) of the seventh embodiment. In the optical waveguide sensor 10G of this embodiment, the groove includes a first groove 13A located on the side of the fiber core 12 and a second groove 13B located on the side of the fiber core 12 opposite to the first groove 13A.

[0090] Figure 11 yes Figure 10 A cross-sectional view of the waveguide-type sensor at position VV. (See image.) Figure 11As shown, the distance L21 between the fiber core 12 and the side surface of the inspection area 13Aa of the first groove 13A can be the same as or different from the distance L22 between the fiber core 12 and the side surface of the inspection area 13Ba of the second groove 13B. As an example where the distances L21 and L22 are different, the distance L22 can be set to 1.1 times the distance L21 to adjust the amount of evanescent light leakage.

[0091] In this embodiment, the optical waveguide sensor 10 is provided with a first groove 13A and a second groove 13B. With this structure, for example, different inspection objects can be accommodated in the first groove 13A and the second groove 13B, and inspection of these different inspection objects can be performed.

[0092] [Eighth Implementation]

[0093] Figure 12 This is a top view of the optical waveguide type sensor 10H (10) according to the eighth embodiment. Figure 12 As shown, in the optical waveguide type sensor 10H of this embodiment, the fiber core includes: a first fiber core 12A, which extends in a given direction to guide a first inspection light; and a second fiber core 12B, which extends in a given direction on the side of the clamping groove 13 opposite to the first fiber core 12A to guide a second inspection light.

[0094] The length of the inspection area 13aa of the groove 13 relative to the first fiber core 12A and the length of the inspection area 13ab of the groove 13 relative to the second fiber core 12B can be the same or different.

[0095] Figure 13 yes Figure 12 A cross-sectional view of the optical waveguide sensor at position VI-VI. In this embodiment, the distance L31 between the first fiber core 12A and the side surface of the inspection area 13aa of the groove 13 is smaller than the distance L32 between the second fiber core 12B and the side surface of the inspection area 13ab of the groove 13. Therefore, the leakage of evanescent light from the first fiber core 12A is greater than the leakage of evanescent light from the second fiber core 12B. That is, in this embodiment, the optical waveguide sensor 10H (10) also has two fiber cores with different leakage amounts of evanescent light from the side surfaces.

[0096] In this embodiment, the optical waveguide sensor 10 includes two fiber cores (first fiber core 12A and second fiber core 12B) with different amounts of evanescent light leakage from the side surface depending on the length of the inspection area and the distance between the fiber core and the side surface. According to this embodiment, by measuring the loss intensity in the two fiber cores with different amounts of evanescent light leakage, the inspection of the object can be performed with higher accuracy compared to measuring the loss intensity in a single fiber core.

[0097] Alternatively, distances L31 and L32 can be the same. In this case, by introducing first and second inspection lights of different wavelengths into the first fiber core 12A and the second fiber core 12B respectively, the absorption characteristics of the object under inspection can be checked for each wavelength based on the loss intensity in the first fiber core 12A and the second fiber core 12B. Furthermore, distances L31 and L32 can also be different. As an example of different distances L31 and L32, distance L32 can be set to twice the distance L31 to adjust the leakage of evanescent light.

[0098] [Ninth Implementation]

[0099] Figure 14 This is a top view of the optical waveguide type sensor 10I (10) of the 9th embodiment. Figure 15 yes Figure 14 A cross-sectional view of the optical waveguide sensor at position VII-VII. (See image.) Figure 15 As shown, in the optical waveguide sensor 10I of this embodiment, the detection sensitivity of the first fiber core 12A and the second fiber core 12B can be improved by removing the upper cladding 11b from the side surfaces and the top surface. However, in order to adjust the leakage of the inspection light, the upper cladding 11b can also be left with a given thickness on the side surfaces and the top surface of the first fiber core 12A and the second fiber core 12B.

[0100] Furthermore, by positioning the upper surface of the groove 13 above the upper surfaces of the first fiber core 12A and the second fiber core 12B, the fluid contained in the groove 13 can pass over the first fiber core 12A and the second fiber core 12B, thus improving convenience when measuring the same inspection object multiple times.

[0101] [10th Implementation]

[0102] Figure 16 This is a top view of the optical waveguide type sensor 10J (10) of the 10th embodiment. Figure 17 yes Figure 16 A cross-sectional view of the optical waveguide sensor at position VIII-VIII. (See image.) Figure 17 As shown, in the optical waveguide type sensor 10J of this embodiment, a sensing film 21 is formed on the side surface or bottom surface of the groove 13 containing the inspection area 13a.

[0103] The sensing membrane 21 is a membrane that adsorbs ligands and acceptors of proteins, and its refractive index varies depending on the object being detected. The sensing membrane 21 is formed by flowing fluid into the tank 13 using a sol-gel method, causing ethanol to evaporate and adsorb onto the side and bottom surfaces. Alternatively, the sensing membrane 21 can also be formed by sputtering.

[0104] In this embodiment, the optical waveguide sensor 10 increases the refractive index change through the sensing film 21, thereby improving the detection sensitivity.

[0105] [11th Implementation]

[0106] Figure 18 This is a top view of the optical waveguide type sensor 10K (10) according to the 11th embodiment. Figure 18 As shown, in the optical waveguide type sensor 10K of this embodiment, the inspection area 13a includes four curved sections 13ac. The angle of each tangent of the curved section 13ac changes by 90 degrees, and when these are summed up, the angle of the tangent changes by 360 degrees.

[0107] The fiber core includes: a first fiber core 12A extending in a given direction to guide a first inspection light; and a second fiber core 12B extending in a given direction on the side of the clamping groove 13 opposite to the first fiber core 12A to guide a second inspection light. The first fiber core 12A is formed in a bent manner such that the surface of the input inspection light and the surface of the output inspection light are the same first surface. Similarly, the second fiber core 12B is formed in a bent manner such that the surface of the input inspection light and the surface of the output inspection light are the same second surface. Furthermore, the first surface and the second surface are opposite surfaces.

[0108] In this embodiment, the waveguide sensor 10 includes a curved portion 13ac in the inspection area 13a, which allows the inspection area 13a to be set to be longer, thereby improving detection sensitivity. Furthermore, by setting a large change in the angle of the tangent in the curved portion 13ac (for example, more than 360 degrees), the inspection area 13a can be set to be longer. In addition, by setting the first surface and the second surface to be opposite surfaces, the manufacturing time and cost required for the waveguide sensor 10 can sometimes be further reduced.

[0109] The embodiments of the present invention have been illustrated above, but these embodiments are merely examples and are not intended to limit the scope of the invention. The above embodiments can be implemented in various other ways, and various omissions, substitutions, combinations, and modifications can be made without departing from the spirit of the invention. Furthermore, the specifications of various structures, shapes, etc. (construction, type, orientation, model, size, length, width, thickness, height, quantity, configuration, position, material, etc.) can be appropriately modified for implementation.

[0110] For example, the number of fiber cores and slots can be three or more. Furthermore, optical waveguide sensors can also have multiple fiber cores with the same leakage rate. In this case, one of the fiber cores can be used as a reference waveguide for referencing the loss intensity of the object being inspected, whose characteristics are known.

[0111] -Symbol Explanation-

[0112] 10, 10A~10J… Optical waveguide type sensor

[0113] 11…cladding

[0114] 11a…lower cladding

[0115] 11b… Upper cladding

[0116] 12, 12A, 12B... fiber core

[0117] 12A, 12a… First fiber core

[0118] 12B, 12b… Second fiber core

[0119] 13, 13A, 13B... slots

[0120] 13a, 13Aa, 13Ba, 13aa, 13ab… Inspection area

[0121] 13ac…curved section

[0122] 13b, 13Ab, 13Bb… Liquid storage section

[0123] 14...Substrate

[0124] 15… Input Section

[0125] 16, 16a, 16b… Fiber optic arrays

[0126] 17, 17A… Optical Branch Section

[0127] 18… Output Department

[0128] 19… Optical Circuits

[0129] 20…cover

[0130] 20a…hole

[0131] 21…sensor membrane

[0132] L1, L21, L22, L31, L32… Distance

[0133] X…direction

[0134] Y...direction

[0135] Z… direction.

Claims

1. An optical waveguide type sensor, comprising: The fiber core, extending in a given direction, guides the inspection light. A cladding layer, with a lower refractive index than the core, surrounds at least a portion of the outer periphery of the core; and The groove is located in the first direction of the fiber core to allow the exudate components of the inspection light guided by the fiber core to leak out, and the end face is located on the second direction side that is orthogonal to the first direction, which is closer to the end of the fiber core.

2. The optical waveguide sensor according to claim 1, wherein, The groove portion has an inspection area, wherein the distance between the fiber core and the surface located on the first direction side of the fiber core is below a threshold value.

3. The optical waveguide sensor according to claim 2, wherein, The threshold is 5 μm.

4. The optical waveguide sensor according to claim 2, wherein, The inspection area extends along the fiber core.

5. The optical waveguide sensor according to claim 1, wherein, The groove is a microfluidic channel for conveying fluid containing the object being inspected.

6. The optical waveguide sensor according to claim 1, wherein, The cladding layer includes: The first cladding layer is located further along the second direction than the fiber core; and the second cladding layer is stacked on top of the first cladding layer, with a step formed between the first cladding layer and the second cladding layer.

7. The optical waveguide sensor according to claim 1, wherein, The optical waveguide sensor includes: an optical branch, which branches the inspection light.

8. The optical waveguide sensor according to claim 7, wherein, The optical branch is a power divider, WDM, polarization beam splitter, variable divider, or optical switch.

9. The optical waveguide sensor according to claim 7, wherein, The optical branch is a polarization beam splitter that splits the inspection light into TE polarization components and TM polarization components. The groove includes: The first groove is located in the first direction of the fiber core that guides the TE-polarized light component; and The second groove is configured to have the same or a linearly symmetrical shape as the first groove and is located in the first direction of the fiber core that guides the light of the TM polarized light component.

10. The optical waveguide sensor according to claim 1, wherein, The fiber core is formed in a bent manner such that the surface on which the inspection light is input and the surface on which the inspection light is output are the same.

11. The optical waveguide sensor according to claim 1, wherein, The optical waveguide sensor includes a mode filter that removes higher-order mode components from the inspection light.

12. The optical waveguide sensor according to claim 1, wherein, The groove includes: The first groove is located in the first direction of the fiber core; and The second groove is located on the side of the fiber core opposite to the first groove.

13. The optical waveguide sensor according to claim 1, wherein, The fiber core comprises: The first fiber core, extending in a given direction, guides the first inspection light; and The second fiber core extends in a given direction on the side of the first fiber core that is opposite to the groove, and guides the second inspection light.

14. The optical waveguide sensor according to claim 2, wherein, A sensing film is formed in the inspection area.

15. The optical waveguide sensor according to claim 2, wherein, The inspection area includes curved sections.

16. The optical waveguide sensor according to claim 15, wherein, The angle of the tangent in the curved section changes by more than 360 degrees.

17. The optical waveguide sensor according to claim 13, wherein, The first fiber core is formed by bending such that the surface on which the inspection light is input and the surface on which the inspection light is output are the same first surface. The second fiber core is formed by bending such that the surface on which the inspection light is input and the surface on which the inspection light is output are the same second surface. The first surface and the second surface are opposite surfaces.

18. The optical waveguide sensor according to claim 1, wherein, The core and the cladding are made of a material comprising any one of SiO2, Si, SiN, InP, GaAs, or GaN.

19. A spectral analysis element comprising the optical waveguide sensor of claim 1.

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