Large-load active vibration isolator structure driven by high-thrust voice coil motor

Abstract

The invention provides a large-load active vibration isolator structure driven by a high-thrust voice coil motor, and belongs to the technical field of vibration suppression and isolation. The problems that in the existing active vibration reduction field, the thrust output and response speed of an actuating unit is insufficient, strong interference vibration under a large load is difficult to counteract, meanwhile, the structural adaptability is poor, and application of the actuating unit in a high-end precise instrument is limited are solved. A composite passive vibration isolation system integrating a low-frequency air spring in the vertical direction and a swing mechanism in the horizontal direction is adopted, an independently-designed high-thrust voice coil motor is carried on the core to serve as an active actuation unit, a high-precision sensor is matched, and cooperative work of large-load bearing, low-frequency passive vibration isolation and high-precision active vibration suppression is achieved. Through the structural optimization design of the voice coil motor, the driving force output and response speed is remarkably improved, the precise sensing and control logic is matched, low-frequency micro-vibration can be effectively isolated, and the nanoscale precision working requirement of a large precise instrument is met.

Description

Technical Field

[0001] This invention belongs to the field of vibration isolation and control technology, and in particular relates to a high-thrust voice coil motor driven large-load active vibration isolator structure. Background Technology

[0002] In modern high-tech industries and precision experimental fields, the working precision of large-scale precision instruments (such as particle accelerators, ultra-high precision laser interferometers, and semiconductor lithography machines) directly determines technological breakthroughs and product quality, with precision requirements generally reaching the nanometer or even picometer level. However, low-frequency micro-vibrations in the environment can severely interfere with the operation of the instrument's core components, leading to increased measurement errors, decreased processing accuracy, and even the invalidation of experimental data, becoming a key bottleneck restricting the performance of high-precision equipment.

[0003] As a core approach to solving this problem, vibration isolation technology must simultaneously meet the dual requirements of high load bearing and low-frequency micro-vibration suppression. While traditional passive vibration reduction systems can effectively attenuate ground vibrations in the mid-to-high frequency range, they often suffer from decreased vibration reduction performance and resonance amplification in the low-frequency range. Furthermore, their fixed stiffness and damping parameters cannot adapt to environmental changes, resulting in poor robustness. Active vibration reduction technology has become an important solution to low-frequency vibration problems. This technology uses sensors to monitor the ground or platform's motion in real time and applies reverse control forces using actuators to achieve active vibration compensation. However, in the current field of active vibration reduction, the thrust output and response speed of the actuators are insufficient to counteract strong interference vibrations under heavy loads. Additionally, poor structural adaptability limits its application in high-precision instruments. Summary of the Invention

[0004] In view of this, in order to solve the problems mentioned in the background technology, the present invention proposes a high-thrust voice coil motor driven large-load active vibration isolator structure, which is a vibration isolator structure that has both large load carrying capacity and low natural frequency passive vibration isolation characteristics, as well as high thrust and fast response active control capability. It has become a key direction to break through the limitations of existing technology and meet the vibration isolation requirements of high-end precision instruments.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a high-thrust voice coil motor driven large-load active vibration isolator structure, comprising a top plate, a push rod, an air spring mechanism, a lower piston, a push rod head, a main air chamber, a bottom plate, an isolator housing, and two high-thrust voice coil motors. The main air chamber is located inside the isolator housing. The upper end of the main air chamber is connected to the top plate via the air spring mechanism, and the lower end is connected to the bottom plate. A lower piston is axially installed inside the main air chamber. The upper end of the push rod is connected to the top plate, and the lower end of the push rod extends into the lower piston and is movably connected via the push rod head. The two high-thrust voice coil motors are perpendicular to each other. The moving parts of the two high-thrust voice coil motors are connected to the top plate, and the stators of the two high-thrust voice coil motors are fixed to the isolator housing or the bottom plate.

[0006] Furthermore, the main air chamber is provided with a main air chamber vent, and during operation, clean gas continuously enters the main air chamber through the main air chamber vent, keeping the air spring mechanism suspended at the specified working height.

[0007] Furthermore, the air spring mechanism includes a pressure ring, an upper piston, and a rubber diaphragm. The pressure ring is disposed on the outer periphery of the upper piston, and the rubber diaphragm is installed between the two.

[0008] Furthermore, the upper piston and the lower piston are sealed and flexibly connected by a rubber diaphragm.

[0009] Furthermore, the high-thrust voice coil motor includes a mover assembly and a stator assembly. The mover assembly includes two magnetic frame side plates, two end plates, a middle partition plate, two long-side magnets, and two partition plate magnets. The mover assembly includes two rectangular coil units and a base. The two magnetic frame side plates and two end plates are alternately arranged to form a rectangle. A middle partition plate is provided in the middle of the rectangle. Rectangular coil units are symmetrically arranged on both sides of the middle partition plate. Partition plate magnets are provided between the rectangular coil units and the middle partition plate. Long-side magnets are provided between the rectangular coil units and the magnetic frame side plates. The two rectangular coil units are respectively fastened to the base.

[0010] Furthermore, both magnetic frame side plates and both end plates are made of high-permeability electrical pure iron, and one of the end plates has a through hole in the center to form a cooling medium flow channel.

[0011] Furthermore, the two long-side magnets are N52 grade neodymium iron boron permanent magnets with the same polarity, both having the N pole on the non-mounting surface.

[0012] Furthermore, the two separator magnets have the same polarity, which is opposite to the polarity of the two long-side magnets.

[0013] Furthermore, the first long-side magnet and the first partition plate magnet are located on both sides of the first rectangular coil unit, and the second long-side magnet and the second partition plate magnet are located on both sides of the second rectangular coil unit.

[0014] Furthermore, two pairs of magnetic field air gaps are formed between the first long-side magnet and the first partition plate magnet, and between the second long-side magnet and the second partition plate magnet, respectively. The two sets of magnetic structures are symmetrical, providing a uniform high-intensity magnetic field for the first rectangular coil unit and the second rectangular coil unit. Furthermore, the high-thrust voice coil motor-driven high-load active vibration isolator structure also includes sensors, including a horizontal velocity sensor, a vertical velocity sensor, a vertical eddy current sensor, and a horizontal eddy current sensor. The horizontal and vertical eddy current sensors are used to measure the horizontal and vertical position signals of the vibration isolator in real time, and feed them back to the control system to drive the horizontal and vertical high-thrust voice coil motors to achieve precise positioning. The horizontal and vertical velocity sensors are used to collect the horizontal and vertical vibration velocity signals of the vibration isolator in real time, providing data support for driving the horizontal and vertical high-thrust voice coil motors to perform active vibration suppression. The sensors are fixed to the outer wall or top plate of the vibration isolator housing to ensure accurate measurement signals.

[0015] Compared with the prior art, the beneficial effects of the high-thrust voice coil motor driven large-load active vibration isolator structure described in this invention are: 1. This invention breaks through the thrust bottleneck of traditional active vibration isolators, achieving effective compensation under strong disturbances. Addressing the technical challenge of existing voice coil motor actuators having low thrust and difficulty in counteracting strong interference vibrations under heavy loads, this invention utilizes a self-designed dual-magnetic circuit and dual-coil symmetrical layout structure, employing the principle of magnetic field superposition to achieve linear thrust superposition. This increases the output thrust of the motor unit to several times that of traditional single-coil structures. This fundamental improvement enables the active control force to match the inertial and interference forces generated by heavy loads ranging from hundreds of kilograms to tons, achieving effective and rapid cancellation of strong low-frequency vibrations.

[0016] 2. This invention constructs a high-performance composite vibration isolation system based on "passive foundation building and active precision control." The system innovatively integrates a composite passive vibration isolation foundation combining a vertical low-frequency air spring and a horizontal pendulum mechanism, achieving bidirectional passive isolation of low natural frequencies in both vertical and horizontal directions, providing a stable low-frequency vibration isolation platform for heavy loads. Based on this, a high-thrust voice coil motor is used for active precision control. The passive system isolates mid-to-high frequency vibrations and bears the main load, while the active control achieves low-frequency micro-vibration compensation. The two work together to significantly broaden the effective vibration isolation frequency band, especially enhancing the suppression capability in the low-frequency range.

[0017] 3. This invention employs a composite passive vibration isolation system of "vertical low-frequency air spring and horizontal pendulum mechanism" combined with active control methods to achieve significant low-frequency vibration reduction while suppressing resonance peaks and improving the overall stability of the system. Secondly, the actuator is driven by a high-thrust voice coil motor, which significantly improves the driving force output and response speed, further enhancing the ability to counteract strong load disturbances.

[0018] 4. This invention innovatively integrates a composite passive vibration isolation system combining a vertical low-frequency air spring and a horizontal pendulum mechanism. The core of the system utilizes a self-designed high-thrust voice coil motor as the active actuation unit, coupled with high-precision sensors, enabling coordinated operation of high load bearing, low-frequency passive vibration isolation, and high-precision active vibration suppression. Through optimized structural design of the voice coil motor, the driving force output and response speed are significantly improved. Combined with precise sensing and control logic, it can effectively isolate low-frequency micro-vibrations, meeting the nanometer-level precision requirements of large-scale precision instruments in fields such as aerospace, semiconductor manufacturing, and laser interferometry.

[0019] 5. This invention has broad prospects for high-end industrial and scientific research applications. This structure effectively solves the contradiction between large load and ultra-high precision vibration isolation, and can be directly applied to cutting-edge fields such as semiconductor manufacturing (e.g., EUV lithography machines), precision optical measurement, spacecraft gravity compensation devices, synchrotron radiation devices, and gravitational wave detection. Attached Figure Description

[0020] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a schematic diagram of the internal structure of the high-thrust voice coil motor driven large-load active vibration isolator described in this invention. Figure 2 This is a schematic diagram of the overall structure of a high-thrust voice coil motor. Figure 3 A schematic diagram of the overall structure of a high-load active vibration isolator driven by a high-thrust voice coil motor. In the diagram: Top plate 1, Top rod 2, Upper piston 3, Rubber diaphragm 4, Pressure ring 5, Lower piston 6, Top rod head 7, Main air chamber 8, Bottom plate 9, Main air chamber vent 10, No. 1 magnetic frame side plate 11, No. 1 end plate 12, Middle partition plate 13, No. 2 magnetic frame side plate 14, No. 1 long side magnet 15, No. 1 rectangular coil unit 16, No. 1 partition plate magnet 17, No. 2 partition plate magnet 18, No. 2 end plate 19, No. 2 rectangular coil unit 20, No. 2 long side magnet 21, Base 22, Vibration isolator housing 23, Horizontal velocity sensor 24, Horizontal high-thrust voice coil motor 25, Vertical velocity sensor 26, Vertical eddy current sensor 27, Horizontal eddy current sensor 28, Vertical high-thrust voice coil motor 29. Detailed Implementation

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the drawings, and not all of them. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing specific embodiments only and is not intended to limit the invention.

[0022] See Figure 1-3 This embodiment describes a high-thrust voice coil motor driven high-load active vibration isolator structure, including a top plate 1, a push rod 2, an air spring mechanism, a lower piston 6, a push rod head 7, a main air chamber 8, a base plate 9, an isolator housing 23, and two high-thrust voice coil motors. The main air chamber 8 is located inside the isolator housing 23. The upper end of the main air chamber 8 is connected to the top plate 1 via the air spring mechanism, and the lower end is connected to the base plate 9. The lower piston 6 is axially installed inside the main air chamber 8. The upper end of the push rod 2 is connected to the top plate 1, and the lower end of the push rod 2 extends into the lower piston 6 and is movably connected via the push rod head 7. The two high-thrust voice coil motors are perpendicular to each other. The moving parts of the two high-thrust voice coil motors are connected to the top plate 1, and the stators of the two high-thrust voice coil motors are fixed to the isolator housing 23 or the base plate 9 to ensure that the driving force is directly transmitted to the isolated platform.

[0023] The top plate 1 of the vibration isolation structure is connected to the vibration-isolated platform by bolts, and the bottom plate 9 is fixed to the foundation frame by bolts to form a stable installation foundation. The upper end of the top rod 2 is rigidly connected to the top plate 1, and the vibration isolation platform is connected to the foundation frame by a composite structure of air spring mechanism and horizontal pendulum mechanism to achieve comprehensive isolation of vertical and horizontal vibrations.

[0024] During operation, clean gas continuously enters the main air chamber 8 through the main air chamber vent 10, keeping the air spring mechanism suspended at the specified working height. Utilizing the low stiffness characteristics of the air spring mechanism, it achieves large load vertical bearing and low natural frequency passive vibration isolation. The top plate 1 is connected to the main air chamber 8 through an air spring mechanism. The air spring mechanism includes a pressure ring 5, an upper piston 3, and a rubber diaphragm 4. The pressure ring 5 is provided on the outer periphery of the upper piston 3, and the rubber diaphragm 4 is installed between the two.

[0025] The push rod head 7 is bent into an arc shape to ensure the vertical load-bearing capacity and horizontal freedom of the lower piston 6 and the push rod 2, which can be achieved using a ball-and-socket bearing. The air spring mechanism, push rod 2, and lower piston 6 together form a horizontal pendulum mechanism with positive stiffness and low natural frequency, achieving low-frequency passive vibration isolation in the horizontal direction.

[0026] Furthermore, a rubber diaphragm 4 provides a sealed and flexible connection between the upper piston 3 and the lower piston 6, allowing for slight relative displacement and oscillation without affecting the sealing performance. A pressure ring 5 is used to fix the edge of the rubber diaphragm 4, ensuring the cavity's sealing performance and gas pressure stability. The flexibility of the rubber diaphragm 4 not only serves a sealing function but also provides additional minor elastic support and damping to the system, helping to suppress high-frequency vibrations and prevent mechanical impacts between metal components. The stiffness and thickness of the rubber diaphragm 4 have a significant impact on the system's high-frequency response characteristics.

[0027] The two high-thrust voice coil motors are a horizontal high-thrust voice coil motor 25 and a vertical high-thrust voice coil motor 29, respectively. They have the same structure and are both actuators, providing horizontal and vertical motion power respectively. The surrounding part of the high-thrust voice coil motor (first magnetic frame side plate 11, first end plate 12, middle partition plate 13, second magnetic frame side plate 14, first long side magnet 15, first partition plate magnet 17, second partition plate magnet 18, second end plate 19, second long side magnet 21) is the mover assembly, and the first rectangular coil unit 16, the second rectangular coil unit 20 and the base 22 are the stator assembly. The base 22 is fixed to the vibration isolator housing 23.

[0028] The high-thrust voice coil motor includes two magnetic frame side plates, two end plates, a central partition plate 13, two long-side magnets, two rectangular coil units, two partition plate magnets, and a base 22. The two magnetic frame side plates and two end plates are alternately arranged to form a rectangle. A central partition plate 13 is located in the middle of the rectangle. Rectangular coil units are symmetrically arranged on both sides of the central partition plate 13. Partition plate magnets are placed between the rectangular coil units and the central partition plate 13. Long-side magnets are placed between the rectangular coil units and the magnetic frame side plates. The two rectangular coil units are respectively fastened to the base 22 with bolts. All these structures work together to achieve high thrust output, precise guidance, and efficient heat dissipation. The specific structural design is as follows: The first magnetic frame side plate 11 and the second magnetic frame side plate 14 have rectangular cross sections and are arranged opposite each other. The first end plate 12 and the second end plate 19 have rectangular cross sections and are arranged opposite each other. The two magnetic frame side plates 11 and 14 and the two end plates 12 and 19 are all made of high-permeability electrical pure iron.

[0029] A through hole is reserved at the center of end plate 12 to form a flow channel for the cooling medium.

[0030] The first magnetic frame side plate 11 is connected to the first end plate 12, the first end plate 12 is connected to the second magnetic frame side plate 14, the second magnetic frame side plate 14 is connected to the second end plate 19, and the second end plate 19 is connected to the first magnetic frame side plate 11 at 90° to each other by threaded fastening. The whole structure is a hollow rectangular frame structure, which provides an installation reference and magnetic circuit for each magnet.

[0031] The first long-side magnet 15 and the second long-side magnet 21 are N52 grade neodymium iron boron permanent magnets, with identical dimensions and polarities (both have the N pole on the non-mounting surface).

[0032] The middle partition plate 13 has a rectangular cross-section and is located on the long side axis of the rectangular frame, parallel to the first magnetic frame side plate 11 and the second magnetic frame side plate 14. Its two ends are fixed to the first end plate 12 and the second end plate 19. The material is the same as that of the first magnetic frame side plate 11 and the second magnetic frame side plate 14. The first partition plate magnet 17 and the second partition plate magnet 18 are symmetrically embedded on its two sides. The two magnets have the same polarity and are opposite to the first long side magnet 15 and the second long side magnet 21 (both of which are S poles on the non-installation surface).

[0033] Two pairs of magnetic field air gaps are formed between the first long-side magnet 15 and the first partition plate magnet 17, and between the second long-side magnet 21 and the second partition plate magnet 18. The two sets of magnetic structures are symmetrical, providing a uniform high-intensity magnetic field for the first rectangular coil unit 16 and the second rectangular coil unit 20.

[0034] The first rectangular coil unit 16 and the second rectangular coil unit 20 are fastened to the base 22 by bolts to form a synchronously moving sub-unit, ensuring that the two coils move in a consistent manner in the rectangular magnetic field air gap and that the thrust is superimposed without deviation.

[0035] The leads of rectangular coil unit 16 and rectangular coil unit 20 are led out through the connector and connected in series to ensure that the thrust of the two coils is in the same direction and superimposed when current is applied; when the red lead is connected to the positive terminal (+) of the power supply, the base 22 drives rectangular coil unit 16 and rectangular coil unit 20 to move in the positive direction to ensure control accuracy.

[0036] The present invention also includes sensors, including a horizontal velocity sensor 24, a vertical velocity sensor 26, a vertical eddy current sensor 27, and a horizontal eddy current sensor 28.

[0037] Horizontal eddy current sensor 28 and vertical eddy current sensor 27 are used to measure the horizontal and vertical position signals of the vibration isolator in real time, and feed them back to the control system to drive the horizontal high-thrust voice coil motor 25 and the vertical high-thrust voice coil motor 29 to achieve precise positioning. Horizontal velocity sensor 24 and vertical velocity sensor 26 are used to collect the horizontal and vertical vibration velocity signals of the vibration isolator in real time, providing data support for driving the horizontal high-thrust voice coil motor 25 and the vertical high-thrust voice coil motor 29 to perform active vibration suppression. The sensor assembly is fixed to the outer wall of the vibration isolator housing 23 or the inside of the top plate 1 by a special bracket to ensure accurate measurement signals.

[0038] The working principle of the high-thrust voice coil motor driven large-load active vibration isolator structure described in this invention is as follows: The high-thrust voice coil motor of this invention is based on the principle of electromagnetic induction and magnetic field superposition. It achieves high thrust output in a small volume through the synergistic effect of the magnetic circuit and the coil. The specific working principle is as follows: The closed magnetic circuit formed by the first magnetic frame side plate 11 and the second magnetic frame side plate 14, along with the first end plate 12 and the second end plate 19, provides a low magnetic resistance magnetic path for the first long-side magnet 15 and the second long-side magnet 21, as well as the first partition plate magnet 17 and the second partition plate magnet 18. Utilizing the magnetic adsorption effect of opposite pole magnets, magnetic lines of force converge synchronously from the first long-side magnet 15 and the second long-side magnet 21 on both sides towards the first partition plate magnet 17 and the second partition plate magnet 18 in the middle, forming two sets of symmetrically distributed, high-intensity magnetic field air gaps with uniform magnetic flux density. The closed magnetic structure significantly reduces leakage magnetic loss and ensures concentrated magnetic field energy in the air gap region.

[0039] Rectangular coil unit 16 and rectangular coil unit 20 are embedded in two sets of magnetic field air gaps, respectively. When current flows through the coils, the current-carrying coils are subjected to electromagnetic force in the magnetic field, and the force follows the Ampere force principle. Although the magnetic field lines of the two sets of magnetic fields converge towards the middle, the matching design of the coil winding direction and wiring method ensures that the electromagnetic thrust of rectangular coil unit 16 and rectangular coil unit 20 is in the same direction, achieving a thrust superposition effect and forming the total output thrust of the motor. By adjusting the current magnitude, the total thrust can be linearly adjusted to meet the power requirements under different operating conditions.

[0040] The integrated mover unit, consisting of rectangular coil unit 16 and rectangular coil unit 20, and base 22, moves linearly along the magnetic field air gap axis under the action of superimposed electromagnetic thrust. The external control system is connected to the coils via lead connectors. The mover's direction can be switched by precisely controlling the current direction, and the required thrust output can be matched by adjusting the current magnitude. The rigid connection between rectangular coil unit 16 and rectangular coil unit 20 and base 22 ensures consistent motion, avoids thrust superposition deviations, and guarantees control accuracy.

[0041] The through-hole in the center of end plate 12 forms a cooling medium flow channel. When the cooling medium flows through the channel, it exchanges heat with the heat-generating components inside the motor, quickly dissipating the Joule heat generated when the coil is working, effectively controlling the coil temperature within a safe threshold, avoiding insulation aging and magnet attenuation, and ensuring continuous and stable operation of the motor.

[0042] The vibration isolation process of this invention is divided into two stages: passive vibration isolation and active vibration isolation, which work together to achieve efficient vibration isolation. 1. Passive vibration isolation stage: Clean gas enters the air spring mechanism through the air hole 10 of the main air chamber, forming a stable air pressure to support the large load of the vibration isolation platform. The low stiffness characteristics of the air spring are used to isolate micro vibrations in the vertical direction that are higher than the natural frequency. The horizontal swing mechanism provides low stiffness support in the horizontal direction through the ball bearing-like design of the lower piston 6 and the push rod head 7, isolating micro vibrations in the horizontal direction that are higher than the natural frequency, laying the foundation for active vibration isolation.

[0043] 2. Active vibration isolation stage: High-precision sensors collect the position and vibration velocity signals of the vibration isolator in real time and feed them back to the control system; the control system analyzes the amplitude, phase and direction of the vibration interference through algorithms and outputs control commands to the high-thrust voice coil motors 25 and 29; the Halbach permanent magnet array of the motor stator generates a highly uniform axial magnetic field, and the coil winding is driven by electromagnetic thrust in the magnetic field to move the mover, generating a driving force that is opposite in direction and equal in magnitude to the vibration interference, which quickly cancels out low-frequency micro-vibrations. In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating orientation and positional relationships are based on the orientation and positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0044] The embodiments of the present invention disclosed above are merely illustrative of the invention. These embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention.

Claims

1. A high-thrust voice coil motor driven large-load active vibration isolator structure, characterized in that: The device includes a top plate (1), a top rod (2), an air spring mechanism, a lower piston (6), a top rod head (7), a main air chamber (8), a bottom plate (9), a vibration isolator housing (23), and two high-thrust voice coil motors. The vibration isolator housing (23) contains the main air chamber (8). The upper end of the main air chamber (8) is connected to the top plate (1) through the air spring mechanism, and the lower end is connected to the bottom plate (9). The lower piston (6) is axially installed in the main air chamber (8). The upper end of the top rod (2) is connected to the top plate (1), and the lower end of the top rod (2) extends into the lower piston (6) and is movably connected through the top rod head (7). The two high-thrust voice coil motors are perpendicular to each other. The moving parts of the two high-thrust voice coil motors are connected to the top plate (1), and the stators of the two high-thrust voice coil motors are fixed to the vibration isolator housing (23) or the bottom plate (9).

2. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 1, characterized in that: The main air chamber (8) is provided with a main air chamber vent (10). During operation, clean gas continuously enters the main air chamber (8) through the main air chamber vent (10), keeping the air spring mechanism suspended at the specified working height.

3. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 1 or 2, characterized in that: The air spring mechanism includes a pressure ring (5), an upper piston (3) and a rubber diaphragm (4). The pressure ring (5) is provided on the outer periphery of the upper piston (3), and the rubber diaphragm (4) is installed between the two.

4. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 3, characterized in that: The upper piston (3) and the lower piston (6) are sealed and flexibly connected by a rubber diaphragm (4).

5. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 1, characterized in that: The high-thrust voice coil motor includes a mover assembly and a stator assembly. The mover assembly includes two magnetic frame side plates, two end plates, a middle partition plate (13), two long-side magnets, and two partition plate magnets. The mover assembly includes two rectangular coil units and a base (22). The two magnetic frame side plates and two end plates are alternately arranged to form a rectangle. A middle partition plate (13) is set in the middle of the rectangle. Rectangular coil units are symmetrically arranged on both sides of the middle partition plate (13). A partition plate magnet is set between the rectangular coil units and the middle partition plate (13). A long-side magnet is set between the rectangular coil units and the magnetic frame side plates. The two rectangular coil units are respectively fastened to the base (22).

6. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 5, characterized in that: The two magnetic frame side plates and the two end plates are all made of high magnetic permeability electrical pure iron. One of the end plates has a through hole in the center to form a cooling medium flow channel.

7. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 5, characterized in that: The two long-side magnets are N52 grade neodymium iron boron permanent magnets with the same polarity, both having the N pole on the non-mounting surface.

8. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 7, characterized in that: The two separator magnets have the same polarity, but the polarity is opposite to that of the two long-side magnets.

9. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 7, characterized in that: The first long-side magnet (15) and the first partition plate magnet (17) are located on both sides of the first rectangular coil unit (16), and the second long-side magnet (21) and the second partition plate magnet (18) are located on both sides of the second rectangular coil unit (20). Two pairs of magnetic field air gaps are formed between the first long-side magnet (15) and the first partition plate magnet (17) and the second long-side magnet (21) and the second partition plate magnet (18), respectively. The two sets of magnetic structures are symmetrical, providing a uniform high-intensity magnetic field for the first rectangular coil unit (16) and the second rectangular coil unit (20).

10. The high-thrust voice coil motor driven large-load active vibration isolator structure according to claim 7, characterized in that: The high-thrust voice coil motor driven high-load active vibration isolator structure also includes sensors, including a horizontal velocity sensor (24), a vertical velocity sensor (26), a vertical eddy current sensor (27), and a horizontal eddy current sensor (28). The horizontal eddy current sensor (28) and the vertical eddy current sensor (27) are used to measure the horizontal and vertical position signals of the vibration isolator in real time, and feed them back to the control system to drive the horizontal high-thrust voice coil motor (25) and the vertical high-thrust voice coil motor (29) to achieve precise positioning. The horizontal velocity sensor (24) and the vertical velocity sensor (26) are used to collect the horizontal and vertical vibration velocity signals of the vibration isolator in real time, and provide data support for driving the horizontal high-thrust voice coil motor (25) and the vertical high-thrust voice coil motor (29) to perform active vibration suppression. The sensors are fixed to the outer wall of the vibration isolator shell (23) or inside the top plate (1) to ensure accurate measurement signals.

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