Semiconductor gas path valve group

Abstract

The invention discloses a semiconductor gas path valve group. The semiconductor gas path valve group comprises a base block, a pneumatic valve unit arranged on the base block and a baffle mechanism, an air inlet and an air outlet corresponding to the pneumatic valve unit are formed in the base block; wherein the pneumatic valve unit at least comprises a first pneumatic valve and a second pneumatic valve; the first pneumatic valve and the second pneumatic valve are correspondingly provided with a first adjusting nut and a second adjusting nut respectively, the first adjusting nut is used for adjusting the first air outlet, and the second adjusting nut is used for adjusting the second air outlet; the first pneumatic valve and the second pneumatic valve control the baffle mechanism to achieve adjustment opening and adjustment closing of the first adjusting nut and / or the second adjusting nut. By arranging the baffle mechanism and the connecting rod, the air flow of the air outlets corresponding to the different valves can be controlled respectively.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically, to a component for semiconductor manufacturing, and particularly to a semiconductor pneumatic valve assembly. Background Technology

[0002] In semiconductor gas and liquid circuits, valve groups are needed to regulate the distribution of input and output.

[0003] The existing air circuit valve assembly is in the form of one inlet and three outlets. The opening and closing of the three outlets of the base block are adjusted by three valves on the base block to configure different air circuits under different operating conditions.

[0004] Specifically, the base unit has one air inlet and three air outlets. (Reference) Figure 12 The yellow and green air passages are controlled by the first pneumatic valve 200 and the second pneumatic valve 300, respectively. The yellow air passage is adjusted by the first adjusting nut 210 to regulate the airflow at the first outlet 120. The green air passage is adjusted by the second adjusting nut 310 to regulate the airflow at the second outlet 130.

[0005] The first adjusting nut 210 and the second adjusting nut 310 can only be adjusted when the corresponding air passage is open. If adjustment is performed when the passage is closed, problems such as leakage and sudden excessive or insufficient airflow may occur. The corresponding air passage depends on the opening and closing of the first pneumatic valve 200 and the second pneumatic valve 300, that is, on the lifting and lowering position of the valve stems of the first pneumatic valve 200 and the second pneumatic valve 300.

[0006] Furthermore, the first air outlet 120 is located upstream of the second air outlet 130, meaning the yellow air path is upstream of the green air path. If the yellow air path is broken, i.e., the first pneumatic valve 200 is broken, the second pneumatic valve 300 will inevitably be broken as well.

[0007] Therefore, the control logic of the existing valve group must be implemented so that the first pneumatic valve 200 is open and the second pneumatic valve 300 can be opened or closed; the first pneumatic valve 200 is closed and the second pneumatic valve 300 must be closed. In this way, the first adjusting nut 210 and / or the second adjusting nut 310 can be adjusted when the first pneumatic valve 200 and / or the second pneumatic valve 300 are in the passage.

[0008] Therefore, a valve assembly that can meet the above control logic is currently needed. Summary of the Invention

[0009] In order to achieve separate control of the airflow at the outlet of different valves, the present invention provides a semiconductor gas circuit valve assembly.

[0010] To achieve the above objectives, the present invention provides the following technical solution: A semiconductor pneumatic valve assembly includes: a base block 100, a pneumatic valve unit disposed on the base block 100, and a baffle mechanism 400. The base block 100 is provided with an air inlet 110 and an air outlet corresponding to the pneumatic valve unit; The pneumatic valve unit includes at least a first pneumatic valve 200 and a second pneumatic valve 300. The first pneumatic valve 200 and the second pneumatic valve 300 are respectively provided with a first adjusting nut 210 and a second adjusting nut 310. The first adjusting nut 210 is used to adjust the first air outlet 120, and the second adjusting nut 310 is used to adjust the second air outlet 130. The first pneumatic valve 200 and the second pneumatic valve 300 control the baffle mechanism 400 to adjust and open the first adjusting nut 210 and / or the second adjusting nut 310.

[0011] In an alternative embodiment, the first pneumatic valve 200 is provided with a first connecting rod 220, one end of which is connected to the top of the valve stem 600 of the first pneumatic valve 200, and the other end is connected to the first pressure block 230. The second pneumatic valve 300 is provided with a second connecting rod 320. One end of the second connecting rod 320 is connected to the top of the valve stem 600 of the second pneumatic valve 300, and the other end is connected to the second pressure block 330. The first pressing block 230 and the second pressing block 330 are interlocked.

[0012] In an alternative embodiment, one end of the first pressing block 230 is provided with a first limiting block 231 protruding, and the other end is provided with a first slot 232; one end of the second pressing block 330 is provided with a second limiting block 331 protruding, and the other end is provided with a second slot 332. The first limiting block 231 is accommodated in the second slot 332, and the second limiting block 331 is accommodated in the first slot 232; The first limiting block 231 and the second limiting block 331 move up and down with the valve stem 600 within the first slot 232 and the second slot 332, respectively.

[0013] In an alternative embodiment, the first limiting block 231 and the first slot 232, as well as the second limiting block 331 and the second slot 332, are respectively disposed on the mutual contact surfaces of the first pressing block 230 and the second pressing block 330.

[0014] In an alternative embodiment, the first limiting block 231 protrudes from the upper end of the first pressing block 230, and the first slot 232 is recessed from the lower end of the first pressing block 230. The second limiting block 331 protrudes from the lower end of the second pressing block 330, and the second slot 332 is recessed from the upper end of the second pressing block 230.

[0015] In an alternative embodiment, the baffle mechanism 400 includes a baffle 410, a guide rail 420, a first spring 430, and a second spring 440; The guide rail 420 is disposed on the upper surface of the base block 100, the baffle 410 is movably fixed on the guide rail 420, the first spring 430 and the second spring 440 are respectively fixed at both ends of the baffle 410, and the other end of the first spring 430 is fixedly connected to the first pressure block 230, and the other end of the second spring 440 is fixedly connected to the second pressure block 330.

[0016] In an alternative embodiment, the baffle 410 is further provided with a through hole, the through hole including a first operating hole 411 and a second operating hole 412; The diameters of the first operating hole 411 and the second operating hole 412 are both larger than the first internal hexagonal hole 211 of the first adjusting nut 210.

[0017] In an alternative embodiment, the guide rail 420 is laterally disposed between the first adjusting nut 210 and the second adjusting nut 310.

[0018] In an alternative embodiment, the spring constant of the first spring 430 is less than that of the second spring 440.

[0019] In an alternative embodiment, the first valve 200 is closed, the first pressure block 230 restricts the movement of the second pressure block 330, the second valve 300 is closed at the same time, and the baffle 410 blocks the first internal hexagonal hole 211 of the first adjusting nut 210 and the second internal hexagonal hole 311 of the second adjusting nut 310, thereby achieving the adjustment and closure of the first adjusting nut 210 and the second adjusting nut 310. Alternatively, the first valve 200 and the second valve 300 are opened. The first spring 430 and the second spring 440 drive the baffle 410 to move along the guide rail 420. The second operating hole 412 is concentric with the first internal hexagonal hole 211, and the baffle 410 does not block the second internal hexagonal hole 311, thereby realizing the adjustment and opening of the first adjusting nut 210 and the second adjusting nut 310. Alternatively, the first valve 200 is opened and the second valve 300 is closed. The first spring 430 drives the baffle 410 to move along the guide rail 420. The first operating hole 411 is concentric with the first internal hexagonal hole 211. The baffle 410 blocks the second internal hexagonal hole 311 of the second adjusting nut 310, thereby realizing the adjustment opening of the first adjusting nut 210 and the adjustment closing of the second adjusting nut 310.

[0020] The beneficial effects of this invention are: By setting up a baffle mechanism and connecting rods, the airflow size of the outlet corresponding to different valves can be controlled according to the operation logic.

[0021] By strictly adhering to the control logic that the second pneumatic valve may or may not be opened when the first pneumatic valve is open, and the second pneumatic valve must be closed when the first pneumatic valve is closed, misoperation can be prevented.

[0022] At the same time, the baffle mechanism strictly follows the control requirements that the first adjusting nut can only be adjusted when the first pneumatic valve is open; and the second adjusting nut can only be adjusted when the first pneumatic valve and the second pneumatic valve are open. Attached Figure Description

[0023] Figure 1 This is a front view of the semiconductor gas valve assembly of the present invention in its first state; Figure 2 This is a front view of the second state of the semiconductor gas valve assembly of the present invention; Figure 3 This is a front view of the semiconductor gas valve assembly of the present invention in its third state; Figure 4 This is a top view of the semiconductor gas valve assembly of the present invention in its first state; Figure 5 This is a top view of the second state of the semiconductor gas valve assembly of the present invention; Figure 6 This is a top view of the semiconductor gas valve assembly of the present invention in its third state; Figure 7 This is a cross-sectional view of the semiconductor gas valve assembly of the present invention in its first state; Figure 8 This is a cross-sectional view of the semiconductor gas valve assembly of the present invention in its second state; Figure 9 This is a cross-sectional view of the semiconductor gas valve assembly of the present invention in its third state; Figure 10 This is a three-dimensional structural diagram of the semiconductor gas valve assembly of the present invention in its first state; Figure 11 This is a perspective cross-sectional view of the semiconductor gas valve assembly of the present invention in its first state; Figure 12 This is a schematic diagram of the gas path of the semiconductor gas path valve assembly of the present invention.

[0024] Reference numerals: 100-Base block, 110-Air inlet, 120-First air outlet, 130-Second air outlet, 140-Third air outlet, 200-First pneumatic valve, 210-First adjusting nut, 211-First internal hexagonal hole, 220-First connecting rod, 230-First pressure block, 231-First limiting block, 232-First slot, 300-Second pneumatic valve, 310-Second adjusting nut, 311-Second internal hexagonal hole, 320-Second connecting rod, 330-Second pressure block, 331-Second limiting block, 332-Second slot, 400-Baffle mechanism, 410-Baffle, 411-First operating hole, 412-Second operating hole, 420-Guide rail, 430-First spring, 440-Second spring, 500-Third pneumatic valve, 600-Valve stem. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] Embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The terms "first," "second," "third," etc., in the specification, claims, and drawings of the present invention (if present) are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such described objects can be interchanged where appropriate. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. Directional terms used in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only for reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. Furthermore, the present invention repeats reference numerals and / or reference letters in different examples; this repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0027] like Figures 1-12As shown, the present invention provides a semiconductor pneumatic valve assembly, which includes: a base block 100, a pneumatic valve unit disposed on the base block 100, and a baffle mechanism 400.

[0028] The base block 100 is provided with an air inlet 110 and an air outlet corresponding to the pneumatic valve unit.

[0029] The pneumatic valve unit includes at least a first pneumatic valve 200 and a second pneumatic valve 300.

[0030] In one specific embodiment, the pneumatic valve assembly of the present invention is a three-way valve assembly, and the pneumatic valve unit includes three pneumatic valves, namely a first pneumatic valve 200, a second pneumatic valve 300 and a third pneumatic valve 500.

[0031] The third pneumatic valve 500 does not have a corresponding adjusting nut, while the first pneumatic valve 200 and the second pneumatic valve 300 both have corresponding adjusting nuts.

[0032] Meanwhile, the base block 100 is also provided with air outlets corresponding to the first pneumatic valve 200, the second pneumatic valve 300 and the third pneumatic valve 500.

[0033] Each pneumatic valve is mounted on base block 100.

[0034] Specifically, the first pneumatic valve 200 and the second pneumatic valve 300 are respectively provided with a first adjusting nut 210 and a second adjusting nut 310. The first adjusting nut 210 is used to adjust the first air outlet 120, and the second adjusting nut 310 is used to adjust the second air outlet 130.

[0035] Furthermore, the third pneumatic valve 500 has a corresponding third air outlet 140.

[0036] The first pneumatic valve 200 and the second pneumatic valve 300 control the baffle mechanism 400 to adjust and open the first adjusting nut 210 and / or the second adjusting nut 310.

[0037] Furthermore, when the first pneumatic valve 200 is open, the second pneumatic valve 300 can be closed or opened. When the first pneumatic valve 200 is closed, the second pneumatic valve 300 must be closed.

[0038] like Figure 8 As shown, when the first pneumatic valve 200 is open, that is, when the valve stem 600 of the first pneumatic valve 200 is on the upper side, the first adjusting nut 210 can be adjusted to adjust the airflow size of the first air outlet 120.

[0039] like Figure 9As shown, when the first pneumatic valve 200 and the second pneumatic valve 300 are opened simultaneously, that is, when the valve stems 600 of the first pneumatic valve 200 and the second pneumatic valve 300 are both located on the upper side, the second adjusting nut 310 can be adjusted to adjust the airflow size of the second air outlet 130.

[0040] Furthermore, the first pneumatic valve 200 is provided with a first connecting rod 220, one end of which is fixedly connected to the top of the valve stem 600 of the first pneumatic valve 200, and the other end is fixedly connected to the first pressure block 230.

[0041] The second pneumatic valve 300 is provided with a second connecting rod 320. One end of the second connecting rod 320 is fixedly connected to the top of the valve stem 600 of the second pneumatic valve 300, and the other end is fixedly connected to the second pressure block 330.

[0042] Preferably, the first link 220 and the second link 320 have a U-shaped structure.

[0043] The first pressing block 230 and the second pressing block 330 are interlocked.

[0044] Specifically, the first pressing block 230 has a first limiting block 231 protruding from one end and a first slot 232 recessed from the other end. The second pressing block 330 has a second limiting block 331 protruding from one end and a second slot 332 recessed from the other end.

[0045] Preferably, the first limiting block 231 protrudes from the upper end of the first pressing block 230, and the first slot 232 is recessed from the lower end of the first pressing block 230.

[0046] The second limiting block 331 protrudes from the lower end of the second pressing block 330, and the second slot 332 is recessed from the upper end of the second pressing block 230.

[0047] The first limiting block 231 is accommodated in the second slot 332, and the second limiting block 331 is accommodated in the first slot 232.

[0048] The first limiting block 231 and the second limiting block 331 move up and down with the valve stem within the first slot 232 and the second slot 332, respectively.

[0049] Preferably, both the first card slot 232 and the second card slot 332 are slots with two open sides.

[0050] Preferably, the first limiting block 231 and the first slot 232, as well as the second limiting block 331 and the second slot 332, are respectively disposed on the mutual contact surfaces of the first pressing block 230 and the second pressing block 330.

[0051] Because the first limiting block 231 and the second locking slot 332 are engaged, the second pneumatic valve 300 can be closed or opened when the first pneumatic valve 200 is open. When the first pneumatic valve 200 is closed, the second pneumatic valve 300 must be closed.

[0052] The baffle mechanism 400 has a specific structure including a baffle 410, a guide rail 420, a first spring 430, and a second spring 440.

[0053] The guide rail 420 is set on the upper surface of the base block 100, and the baffle 410 is movably fixed on the guide rail 420.

[0054] Preferably, the guide rail 420 is laterally disposed between the first adjusting nut 210 and the second adjusting nut 310. This allows the baffle 410 to move laterally along the guide rail 420.

[0055] The first spring 430 and the second spring 440 are respectively fixed at both ends of the baffle 410, and the other end of the first spring 430 is fixedly connected to the lower end of the first pressure block 230, and the other end of the second spring 440 is fixedly connected to the lower end of the second pressure block 330.

[0056] Preferably, the lower ends of the first pressure block 230 and the second pressure block 330 are provided with protruding connecting structures, and the first spring 430 and the second spring 440 are respectively fixed to the connecting structures.

[0057] Preferably, the two ends of the first spring 430 and the second spring 440 are fixed by hinge or hook connection.

[0058] Preferably, the free end of the connecting structure of the second pressure block 330 protrudes further outward than the free end of the connecting structure of the first pressure block 230, and the first spring 430 and the second spring 440 are respectively fixed to the free end of the connecting structure, so that the two springs can be staggered and space is saved.

[0059] Preferably, the first spring 430 is fixed to one end of the inner side of the baffle 410, and the second spring 440 is fixed to one end of the outer side of the baffle 410.

[0060] Furthermore, the spring constant of the first spring 430 is smaller than that of the second spring 440. That is, the second spring 440 is stiffer.

[0061] By setting up a baffle 410, a first spring 430, and a second spring 440 to form a triangle, and because the second spring 440 is stiffer, the lateral position of the baffle 410 can be controlled under different working conditions. This allows the baffle 410 to change position under different conditions.

[0062] Furthermore, the combination of a first spring 430 and a second spring 440 with the baffle 410 facilitates disassembly and assembly. If both springs were rigid connecting rods, disassembly and assembly would be inconvenient, and the positional change of the baffle 410 of this invention could not be achieved.

[0063] Furthermore, the baffle 410 is also provided with through holes, including a first operating hole 411 and a second operating hole 412.

[0064] The diameters of the first operating hole 411 and the second operating hole 412 are both larger than the first internal hexagonal hole 211 of the first adjusting nut 210.

[0065] By providing a first operating hole 411 and a second operating hole 412 on the baffle 410 and limiting the lateral length of the baffle 410, the adjustment of the first adjusting nut 210 and the second adjusting nut 310 can be realized.

[0066] When the baffle 410 does not block the first internal hexagonal hole 211 of the first adjusting nut 210 and / or the second internal hexagonal hole 311 of the second adjusting nut 310, a passage is achieved, thereby enabling adjustment of the first adjusting nut 210 and the second adjusting nut 310.

[0067] When the baffle 410 blocks the first internal hexagonal hole 211 of the first adjusting nut 210 and / or the second internal hexagonal hole 311 of the second adjusting nut 310, a non-circuit is achieved, thus preventing the adjustment of the first adjusting nut 210 and the second adjusting nut 310.

[0068] Furthermore, the pneumatic valve assembly of the present invention has the following three operating states.

[0069] The first type of work situation is as follows: Figure 1 , Figure 4 and Figure 7 As shown, when the first valve 200 is closed, the first pressure block 230 restricts the movement of the second pressure block 330, and the second valve 300 is closed at the same time. The baffle 410 blocks the first internal hexagonal hole 211 of the first adjusting nut 210 and the second internal hexagonal hole 311 of the second adjusting nut 310, thereby realizing the adjustment and closure of the first adjusting nut 210 and the second adjusting nut 310.

[0070] At this time, the first internal hexagonal hole 211 is located between the first operating hole 411 and the second operating hole 412.

[0071] The second type of work situation is as follows: Figure 2 , Figure 5 and Figure 8As shown, when the first valve 200 and the second valve 300 are opened, the first spring 430 and the second spring 440 drive the baffle 410 to move along the guide rail 420. The second operating hole 412 is concentric with the first internal hexagonal hole 211, and the baffle 410 does not block the second internal hexagonal hole 311, thereby realizing the adjustment and opening of the first adjusting nut 210 and the second adjusting nut 310.

[0072] The third type of work situation is as follows: Figure 4 , Figure 6 and Figure 9 As shown, the first valve 200 is opened and the second valve 300 is closed. The first spring 430 drives the baffle 410 to move along the guide rail 420. The first operating hole 411 is concentric with the first internal hexagonal hole 211. The baffle 410 blocks the second internal hexagonal hole 311 of the second adjusting nut 310, thereby realizing the adjustment opening of the first adjusting nut 210 and the adjustment closing of the second adjusting nut 310.

[0073] The semiconductor gas valve assembly provided by this invention can control the airflow size of the outlet corresponding to different valves by setting a baffle mechanism and a connecting rod.

[0074] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A semiconductor pneumatic valve assembly, characterized in that, The semiconductor pneumatic valve assembly includes: a base block (100), a pneumatic valve unit disposed on the base block (100), and a baffle mechanism (400). The base block (100) is provided with an air inlet (110) and an air outlet corresponding to the pneumatic valve unit; The pneumatic valve unit includes at least a first pneumatic valve (200) and a second pneumatic valve (300). The first pneumatic valve (200) and the second pneumatic valve (300) are respectively provided with a first adjusting nut (210) and a second adjusting nut (310). The first adjusting nut (210) is used to adjust the first air outlet (120), and the second adjusting nut (310) is used to adjust the second air outlet (130). The first pneumatic valve (200) and the second pneumatic valve (300) control the baffle mechanism (400) to adjust the opening and closing of the first adjusting nut (210) and / or the second adjusting nut (310).

2. The semiconductor gas valve assembly according to claim 1, characterized in that, The first pneumatic valve (200) is provided with a first connecting rod (220), one end of the first connecting rod (220) is connected to the top of the valve stem (600) of the first pneumatic valve (200), and the other end is connected to the first pressure block (230). The second pneumatic valve (300) is provided with a second connecting rod (320), one end of the second connecting rod (320) is connected to the top of the valve stem (600) of the second pneumatic valve (300), and the other end is connected to the second pressure block (330). The first pressing block (230) and the second pressing block (330) are interlocked.

3. The semiconductor pneumatic valve assembly according to claim 2, characterized in that, The first pressing block (230) has a first limiting block (231) protruding at one end and a first slot (232) recessed at the other end; the second pressing block (330) has a second limiting block (331) protruding at one end and a second slot (332) recessed at the other end. The first limiting block (231) is accommodated in the second slot (332), and the second limiting block (331) is accommodated in the first slot (232); The first limiting block (231) and the second limiting block (331) move up and down with the valve stem (600) in the first slot (232) and the second slot (332), respectively.

4. The semiconductor pneumatic valve assembly according to claim 3, characterized in that, The first limiting block (231) and the first slot (232), as well as the second limiting block (331) and the second slot (332), are respectively disposed on the mutual contact surfaces of the first pressing block (230) and the second pressing block (330).

5. The semiconductor pneumatic valve assembly according to claim 4, characterized in that, The first limiting block (231) protrudes from the upper end of the first pressing block (230), and the first slot (232) is recessed from the lower end of the first pressing block (230); The second limiting block (331) protrudes from the lower end of the second pressing block (330), and the second slot (332) is recessed from the upper end of the second pressing block (230).

6. The semiconductor pneumatic valve assembly according to claim 2, characterized in that, The baffle mechanism (400) includes a baffle (410), a guide rail (420), a first spring (430), and a second spring (440). The guide rail (420) is set on the upper surface of the base block (100), the baffle (410) is movably fixed on the guide rail (420), the first spring (430) and the second spring (440) are respectively fixed at both ends of the baffle (410), and the other end of the first spring (430) is fixedly connected to the first pressure block (230), and the other end of the second spring (440) is fixedly connected to the second pressure block (330).

7. The semiconductor pneumatic valve assembly according to claim 6, characterized in that, The baffle (410) is also provided with through holes, including a first operating hole (411) and a second operating hole (412). The diameters of the first operating hole (411) and the second operating hole (412) are both larger than the first internal hexagonal hole (211) of the first adjusting nut (210).

8. The semiconductor pneumatic valve assembly according to claim 7, characterized in that, The guide rail (420) is laterally positioned between the first adjusting nut (210) and the second adjusting nut (310).

9. The semiconductor pneumatic valve assembly according to claim 8, characterized in that, The elastic coefficient of the first spring (430) is less than that of the second spring (440).

10. The semiconductor pneumatic valve assembly according to claim 9, characterized in that, When the first valve (200) is closed, the first pressure block (230) restricts the movement of the second pressure block (330), and the second valve (300) is closed at the same time. The baffle (410) blocks the first internal hexagonal hole (211) of the first adjusting nut (210) and the second internal hexagonal hole (311) of the second adjusting nut (310), thereby achieving the adjustment and closure of the first adjusting nut (210) and the second adjusting nut (310). Alternatively, the first valve (200) and the second valve (300) are opened. The first spring (430) and the second spring (440) drive the baffle (410) to move along the guide rail (420). The second operating hole (412) is concentric with the first internal hexagonal hole (211), and the baffle (410) does not block the second internal hexagonal hole (311), thereby realizing the adjustment and opening of the first adjusting nut (210) and the second adjusting nut (310). Alternatively, the first valve (200) can be opened and the second valve (300) can be closed. The first spring (430) can drive the baffle (410) to move along the guide rail (420). The first operating hole (411) is concentric with the first internal hexagonal hole (211). The baffle (410) blocks the second internal hexagonal hole (311) of the second adjusting nut (310), thereby realizing the adjustment opening of the first adjusting nut (210) and the adjustment closing of the second adjusting nut (310).

Images