Mask detection device and detection method

Abstract

The invention provides a mask plate detection device and method, and relates to the field of optical detection.The device comprises a bearing structure and at least two pairs of clamping assemblies, the bearing structure is used for bearing a mask plate and can be installed on a moving table to move along with the moving table, and the at least two pairs of clamping assemblies are arranged at the opposite side ends of the bearing structure; any pair of clamping assemblies comprises a first clamping assembly and a second clamping assembly which are opposite to each other, the first clamping assembly comprises a first driving assembly and a first supporting arm, the first supporting arm is provided with two contact parts, the second clamping assembly comprises a second driving assembly and a second supporting arm, the second supporting arm is provided with a contact part, and the contact parts are arranged on the first driving assembly and the second supporting arm. And when the mask plate is clamped, the contact parts on the corresponding support arms are in contact with the mask plate to form three-point positioning. The side end of the mask plate is clamped and positioned, damage caused by the fact that the surface of the mask plate is clamped by a mechanical clamping jaw can be relieved, rapid edge changing detection can be achieved by rotating the bearing structure and opening and closing the corresponding clamping assemblies, and the detection efficiency is relatively high.

Description

Technical Field

[0001] This application belongs to the field of optical inspection technology, and in particular relates to a mask inspection device and inspection method. Background Technology

[0002] Photomasks are critical components in semiconductor manufacturing and photolithography processes. Defects on their surface and edges can affect the accuracy and yield of pattern transfer. To achieve high-precision inspection, it is usually necessary to inspect and analyze the edges and multiple sides of the photomask. Existing inspection devices mostly use a fixed stage with mechanical grippers to hold the front and back sides of the photomask, or use vacuum adsorption to position and fix the photomask.

[0003] However, this type of clamping method can easily generate mechanical stress or friction on the edges of the mask when clamping or releasing it, increasing the risk of scratches and particle contamination. In addition, existing equipment does not support rapid mask edge switching inspection, resulting in low inspection efficiency.

[0004] It should be noted that the above content is not necessarily prior art, nor is it intended to limit the scope of patent protection of this application. Summary of the Invention

[0005] This application provides a mask detection device and detection method to solve or alleviate one or more technical problems in the prior art.

[0006] The first aspect of this application provides a mask detection device, comprising: A support structure for supporting a mask, the support structure being mounted on a motion table and moving with the motion table; At least two pairs of clamping assemblies are disposed on opposite sides of the support structure; each clamping assembly includes: The drive component is fixed below the supporting structure; The support arm has a first end connected to the drive assembly and a second end provided with a contact portion for abutting against the edge of the mask. Each pair of clamping components includes: The first clamping assembly includes a first driving assembly and a first support arm. The first driving assembly is used to drive the first support arm to rotate. The first support arm is provided with two contact portions. The second clamping assembly includes a second drive assembly and a second arm, the second drive assembly being used to drive the second arm to rotate, and the second arm having a contact portion; In this pair of clamping components, the corresponding drive components are located on opposite sides of the bearing structure. Each drive component is used to drive the corresponding support arm to rotate so that the contact part on the corresponding support arm contacts the mask to form a three-point positioning, or moves away from the edge of the mask so that it is in an open or closed state during the detection stage, thereby giving up the detection field of view.

[0007] Optionally, the contact portion is rotatably mounted on the corresponding support arm, and the contact portion is covered with a soft rubber layer.

[0008] Optionally, the first arm includes: The first rod is connected at one end to the first drive assembly; The first forked rod is connected to the end of the first rod away from the first drive assembly, and the first forked rod has two spaced-apart contact portions.

[0009] Optionally, when the mask is held by a pair of clamping components, the corresponding contact portion of the pair of clamping components abuts against the edge above the side end of the mask.

[0010] Optionally, the supporting structure is further provided with four supporting structures at the corners, the supporting structures are fixed to the supporting structure, and the top of the supporting structure is a spherical or arc transition surface, wherein the supporting structure forms point contact with the mask plate above it.

[0011] Optionally, the driving component includes: Drive cylinder; The rotating shaft is coupled to the drive cylinder at one end via a coupling. A bearing housing is fixed below the load-bearing structure, and the bearing housing has a through hole for the rotating shaft to pass through; The outrigger is sleeved on a corresponding rotating shaft, and the drive cylinder is used to drive the rotating shaft to rotate around the axis so that the outrigger swings with the rotating shaft.

[0012] Optionally, the same pair of clamping components is controlled by a set of solenoid valves to achieve synchronous opening and closing, while different pairs of clamping components are independently controlled by different sets of solenoid valves.

[0013] Optionally, the clamping assembly further includes a speed control valve coupled to the drive assembly; the speed control valve is used to adjust the rotational speed of the drive assembly.

[0014] Optionally, it also includes a mask detection component, fixed to the support structure, for issuing a corresponding detection signal based on whether a mask is present on the support structure.

[0015] A second aspect of this application provides a mask detection method, including: Place the mask to be tested on the supporting structure; The mask is pre-positioned by simultaneously clamping it with at least two pairs of clamping components in a polygonal manner. The pair of clamping components corresponding to the optical detection component will open and close to make way; The load-bearing structure is positioned to the detection coordinates along a preset trajectory, and side end detection is performed. While keeping at least one pair of clamping components clamped, switch the other pair of clamping components to the open / closed state and rotate the bearing structure to inspect the other sides; After all side-end inspections are completed, the mask is released by having at least two pairs of clamping components in the open / closed state.

[0016] The embodiments of this application employing the above-described technical solution may have the following advantages: By using a support structure to support the mask and employing clamping components to hold and position the mask's sides, the risks of mask damage caused by mechanical grippers or particle contamination caused by vacuum adsorption can be mitigated. This application also allows for rapid edge-changing inspection by rotating the support structure and opening / closing the corresponding clamping components, resulting in relatively high inspection efficiency.

[0017] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of this application will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0018] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0019] Figure 1 This is a side view of the mask detection device provided in an embodiment of this application. Figure 2 A bottom view of the mask detection device provided in the embodiments of this application; Figure 3 A schematic diagram of the structure of the mask detection device provided in the embodiments of this application; Figure 4 Another schematic diagram of the mask detection device provided in the embodiments of this application; Figure 5 This is another schematic diagram of the mask detection device provided in the embodiments of this application.

[0020] Explanation of reference numerals in the attached figures: Bearing structure 10; clamping assembly 20; speed regulating valve 30; mask plate detection assembly 40; optical detection assembly 90; planar support platform 11; mounting part 12; photoelectric switch 14; support structure 111; support part 113; top block 115; drive assembly 21; drive cylinder 215; rotating shaft 216; bearing seat 217; coupling 218; support arm 22; first drive assembly 211; first support arm 221; first rod body 223; first forked rod body 224; contact part 228. Detailed Implementation

[0021] The embodiments of this application are described in detail below, examples of which are illustrated in the accompanying drawings. In the drawings, for clarity, the dimensions of layers, regions, elements, and their relative dimensions may be exaggerated. The same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0022] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion. And the discussion of a second element, component, area, layer, or portion does not imply that the first element, component, area, layer, or portion necessarily exists in this application.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0025] In this application, when numerical intervals (i.e., numerical ranges) are involved, unless otherwise specified, the distribution of selectable numerical values ​​within the numerical interval is considered continuous, and includes the two endpoints of the numerical interval (i.e., the minimum and maximum values), as well as every numerical value between these two endpoints. Unless otherwise specified, when a numerical interval refers only to integers within that numerical interval, it includes the two endpoint integers of the numerical range, as well as every integer between the two endpoints, which is equivalent to directly listing every integer. When multiple numerical ranges are provided to describe features or characteristics, these numerical ranges can be merged. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all subranges included therein. The "numerical value" in the numerical interval can be any quantitative value, such as a number, percentage, ratio, etc. The term "numerical interval" can be broadly included to include percentage intervals, ratio intervals, proportion intervals, etc.

[0026] This application provides a mask inspection device and method. Based on this, it aims to alleviate problems such as increased risk of scratches and particulate contamination, and low inspection efficiency during mask inspection. Details are provided below.

[0027] Exemplary embodiments according to this application will now be described in more detail with reference to the accompanying drawings. It should be understood that these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0028] Please see Figure 1 As for Figure 5 This application provides a mask detection device, which includes a support structure 10 and at least two pairs of clamping assemblies 20. The following is a detailed description: The support structure 10 is used to support the mask plate. The support structure 10 can be mounted on a motion table and moves with the motion table. The motion table can drive the support structure 10 to move horizontally and vertically to achieve three-dimensional movement.

[0029] Specifically, the support structure 10 may include a planar support platform 11 for placing the mask and a mounting part 12 for connecting the motion stage. The mounting part 12 is detachably connected to the motion stage by bolts or locating pins. When inspecting the mask, the motion stage drives the support structure 10 to move along a preset path, thereby moving the mask into the inspection position. This enables multi-area scanning inspection of the mask edge. When inspecting different sides of the mask, the same preset path can be used to move the mask to the inspection position, thereby improving the repeatability of the inspection position and the overall inspection stability.

[0030] At least two pairs of clamping components are disposed on opposite sides of the support structure. In this embodiment, two pairs are used as an example. Two clamping components 20 in one pair of clamping components 20 correspond to opposite sides of the support structure 10, and two clamping components 20 in the other pair of clamping components correspond to the other opposite sides of the support structure 10.

[0031] Specifically, each clamping assembly 20 includes a drive assembly 21 and a support arm 22, wherein the drive assembly 21 is fixed below the support structure 10. The first end of the support arm 22 is connected to the corresponding drive assembly 21, and the second end of the support arm 22 is provided with a contact portion for abutting against the edge of the mask.

[0032] The following description is based on a pair of clamping components, which may include: The first clamping assembly includes a first driving assembly and a first support arm. The first driving assembly is used to drive the first support arm to rotate. The first support arm is provided with two contact portions.

[0033] The second clamping assembly includes a second drive assembly and a second arm, the second drive assembly being used to drive the second arm to rotate, and the second arm having a contact portion.

[0034] The first clamping component and the second clamping component correspond to the two parallel edges of the mask, respectively, to achieve bidirectional stable support for the edges of the mask.

[0035] In this embodiment, the two pairs of clamping components 20 are arranged in a rectangular pattern on the four sides of the supporting structure 10, thereby limiting and fixing the mask in the horizontal direction. The position of each clamping component 20 can be adjusted according to the size of the mask to accommodate masks of different specifications.

[0036] For example, please refer to the following: Figures 1 to 4 See Figure 5 The first clamping assembly includes a first driving assembly 211 and a first support arm 221. The first driving assembly 211 is used to drive the first support arm 221 to rotate. The first support arm 221 is provided with at least two contact portions 228, and the two contact portions 228 on the first support arm 221 are used to abut against the edge of the first side end of the mask.

[0037] The second clamping assembly includes a second driving assembly and a second arm. The second driving assembly is used to drive the second arm to rotate. The second arm is provided with at least one contact portion 228, which is used to abut against the corner of the second side end of the mask. The second side end is disposed opposite to the first side end.

[0038] The first arm 221 has two contact parts 228, and the second arm has one contact part 228. The three contact parts 228 abut against different corner positions on the side of the mask, so that the mask can be stably limited by three points in the clamping state. This three-point limiting method can ensure that the mask is firmly clamped while preventing the mask from rotating or shifting.

[0039] In some embodiments, two contact portions 228 may also be provided on the second arm.

[0040] Furthermore, such as Figure 1 As shown, when the mask is held by a pair of clamping components, the corresponding contact portion 228 of the pair of clamping components abuts against the edge above the side end of the mask.

[0041] Since the contact points of the contact portion 228 and the mask are distributed at different corner positions, a stable support force distribution can be formed in space, thereby providing a certain downward clamping force to the mask during the clamping process, ensuring the stable positioning of the mask on the carrier platform, and preventing displacement or shaking during the movement.

[0042] Furthermore, the contact portion 228 and the corner of the mask are actually point-contact structures. Compared with surface contact or line contact, point contact can significantly reduce the actual contact area between the two, thereby effectively reducing the probability of particle or dust accumulation in the contact area, reducing the risk of contamination, and preventing particulate contamination of the mask surface.

[0043] In this embodiment, since the support arm 22 needs to rotate upward from below the support structure 10 to abut against the mask plate on the support structure 10, in order to avoid interference between the support arm 22 and the support structure 10, the support arm 22 can be bent away from the support structure 10, so that it will not interfere with the support structure 10 when it swings to the position of abutting the mask plate.

[0044] The corresponding drive components 21 in the same pair of clamping components 20 are located on opposite sides of the support structure 10. Each drive component 21 is used to drive the corresponding support arm 22 to rotate so that the contact portion 228 on the corresponding support arm 22 contacts the mask to form a three-point positioning, or moves away from the edge of the mask so that the pair of clamping components is in an open or closed state during the detection stage, thereby giving up the detection field of view.

[0045] When inspecting the side of the mask, a pair of clamping components 20 corresponding to the optical inspection component 90 can be opened to prevent the clamping components 20 from remaining on the inspection path and causing obstruction or interference.

[0046] In practical applications, after placing the mask on the support structure 10, the two pairs of clamping components 20 can be rotated to the clamping state simultaneously to apply force to the four sides of the mask and pre-position it on the support structure 10. After the mask is pre-positioned, the support structure 10 can be moved to the detection coordinate by the motion table, and the pair of clamping components 20 corresponding to the optical detection component 90 can be opened. After the detection of one side of the mask is completed, the mask can be rotated 180° to detect the other side of the mask. After the detection of the two opposite ends of the mask is completed, the clamping state of the two pairs of clamping components 20 can be switched, that is, the clamping component 20 that is currently in the clamping state can be opened, and the clamping component 20 in the open state can be clamped to expose the other two opposite sides of the mask that have not been detected. At this time, the above detection process can be repeated to complete the detection of the four sides of the mask.

[0047] In this application, the mask is supported by the bearing structure 10, and the side ends of the mask are clamped and positioned by the clamping assembly 20. This can mitigate the risks of mask damage caused by mechanical grippers or particle contamination caused by vacuum adsorption. Furthermore, this application can achieve rapid edge-changing inspection by rotating the bearing structure 10 and opening / closing the corresponding clamping assembly 20, resulting in relatively high inspection efficiency.

[0048] In an optional embodiment, the contact portion 228 is rotatably mounted on the corresponding support arm, and the contact portion 228 is covered with a soft rubber layer.

[0049] The contact part 228 can be rotatably connected to the support arm via a pivot or rolling structure, so that it can automatically adjust its contact posture according to the contact angle when clamping the mask, thereby achieving flexible fit with the edge of the mask.

[0050] The soft rubber layer forms a buffer interface when the mask is clamped, reducing the hard contact force between the contact portion 228 and the edges of the mask, preventing micro-scratches or chipping at the mask edges due to hard contact, and further reducing the risk of particle shedding or electrostatic adsorption caused by friction. The soft rubber layer can also absorb minor vibrations during clamping to a certain extent, improving the stability and repeatability of the mask during testing, thereby ensuring the consistency and reliability of the test results. Specifically, the soft rubber layer can be made of flexible materials such as silicone, fluororubber, or polyurethane.

[0051] In an optional embodiment, the load-bearing structure 10 is further provided with a plurality of support structures 111.

[0052] Specifically, the supporting structure 10 has four supporting structures 111 at its corners. The supporting structures 111 are fixed to the supporting structure 10, and the top of the supporting structure 111 is a spherical or arc transition surface. The mask above the top of the supporting structure 111 forms a point contact.

[0053] In an optional embodiment, each of the support structures 111 includes a support portion 113 and a top block 115, wherein one end of the support portion 113 is fixed to the bearing structure 10, and the top block 115 is fixed to the other end of the support portion 113 for supporting the mask plate, and the side of the top block 115 away from the support portion 113 is a spherical or arc transition surface.

[0054] Specifically, in this embodiment, the planar support platform 11 of the bearing structure 10 is rectangular, and four support structures 111 are provided on the planar support platform 11 of the bearing structure 10. The four support structures 111 are respectively distributed on the four corners of the bearing structure 10 to support the corresponding four corners of the mask plate on it.

[0055] Since the side of the top block 115 that contacts the mask is a spherical or arc-shaped transition surface, the top block 115 and the mask form a point contact, which significantly reduces the contact area between the mask and the top block 115. This effectively reduces the risk of particulate contamination or electrostatic adsorption caused by contact, while maintaining the stable positioning of the mask and improving the cleanliness and reliability of the detection.

[0056] The top block 115 can be made of a flexible material to alleviate the problem of hidden cracks caused by the rigid contact between the top block 115 and the mask.

[0057] In an optional embodiment, the drive assembly 21 includes a drive cylinder 215, a rotating shaft 216, and a bearing housing 217.

[0058] The drive cylinder 215 is coupled to the solenoid valve, and the solenoid valve switches the intake and exhaust channels of the cylinder, thereby controlling the rotation direction of the drive cylinder 215 to drive the rotating shaft 216 to achieve the clamping or releasing action of the mask.

[0059] One end of the rotating shaft 216 is coupled to the drive cylinder 215 via a coupling 218. The drive cylinder 215 is used to drive the rotating shaft 216 to rotate around the axis.

[0060] A bearing housing 217 is fixed below the supporting structure 10, and a through hole is provided on the bearing housing 217 for the rotating shaft 216 to pass through. In one embodiment, the bearing housing 217 is provided with a ball bearing or a sliding bearing to support the rotating shaft 216 and reduce its rotational friction resistance. The bearing housing 217 can be made of high-rigidity aluminum alloy or stainless steel to improve structural strength and vibration resistance.

[0061] In this embodiment, the support arm 22 is sleeved on the corresponding rotating shaft 216 so that the support arm 22 can swing with the rotating shaft 216, thereby realizing the swing and synchronous control of the support arm 22, so that the mask can be clamped or released under automated operation.

[0062] In one embodiment, the supporting structure 10 is further provided with a photoelectric switch 14. The photoelectric switch 14 is used to detect the swing position of the support arm 22. For example, when the photoelectric switch 14 detects that the support arm 22 has swung to the 0° position (i.e., the position where the mask is clamped) or the 180° position (i.e., the open / closed state where the mask is not clamped), the photoelectric switch 14 can send a corresponding signal to indicate that the swing action of the support arm 22 has been completed, thereby executing the next detection step. In one embodiment, the photoelectric switch 14 detects that the support arm is in the clamping position (0°) and the open / closed position (180°) and outputs a status signal. This signal can serve as an interlock condition for the movement and clamping / opening / closing of the supporting structure 10. For example, movement or rotation is allowed only when the support arm on the non-detection side of the mask is in the clamping position and the support arm on the detection side of the mask is in the open / closed position.

[0063] In this embodiment, the first support arm 221 includes a first rod body 223 and a first forked rod body 224, wherein one end of the first rod body 223 is connected to the first drive assembly 211, and the first forked rod body 224 is connected to the end of the first rod body 223 away from the first drive assembly 211. The first forked rod body 224 is provided with two spaced-apart contact portions 228.

[0064] Specifically, the first forked rod 224 can be Y-shaped or V-shaped, so that the two contact parts 228 are located at adjacent corners of the first side end of the mask, so that the two contact parts 228 can form a double-point positioning support on one side of the mask, and cooperate with the single-point contact of the clamping component on the other side, thereby forming a three-point clamping structure as a whole, and realizing stable clamping of the mask.

[0065] In one optional embodiment, the same pair of clamping components is controlled by a set of solenoid valves to achieve synchronous opening and closing. Different pairs of clamping components are independently controlled by different sets of solenoid valves, ensuring that the pair of clamping components responds synchronously during operation, achieving coordinated opening and closing of the two side arms, thereby ensuring that the mask always maintains its centered position during clamping or release. If different pairs of clamping components are controlled by independent solenoid valves, they can be opened and closed separately according to detection requirements, facilitating side-by-side clamping or single-side release operations, thus enabling rapid side-switching detection.

[0066] In an optional embodiment, the clamping assembly further includes a speed control valve 30 coupled to the drive assembly; the speed control valve 30 is used to adjust the rotational speed of the drive assembly.

[0067] When the arms of the same pair of clamping components gradually contact the edge of the mask at different time periods, the swing speed of the arms on both sides can be adjusted by the speed regulating valve 30 so that the arms on both sides can contact the mask synchronously, thereby preventing the mask from being misaligned or shifting in posture due to sequential contact.

[0068] Specifically, the speed control valve 30 can be connected to the air outlet of the drive cylinder 215 of the drive assembly to control the swing speed of the support arm by adjusting the air flow. In addition, when the cylinder pushes the support arm to rotate to clamp the mask, the speed control valve 30 can effectively reduce the gas flow rate to achieve a slow start or slow stop, thereby avoiding the support arm from impacting the mask due to excessively fast movement.

[0069] In this embodiment, the mask detection device further includes a mask detection component 40, which is fixed to the support structure 10 and is used to send a corresponding detection signal according to whether there is a mask on the support structure 10.

[0070] The mask detection component 40 is used to determine in real time whether a mask is placed on the support structure 10. The system will only start the subsequent clamping and detection steps when the detection component confirms that the mask exists. Otherwise, it will remain in standby mode. This can avoid performing clamping or detection actions when the support structure 10 is unloaded or the mask is not placed correctly, reduce the risk of misoperation, protect the safety of the mask and equipment, and automate the detection process.

[0071] Specifically, the mask detection component 40 may include an optical fiber amplifier for receiving and amplifying optical signals to enhance the strength and identifiability of the sensing signal. When detecting whether a mask is located on the support structure 10, a laser can be used to illuminate the area of ​​the support structure 10 that carries the mask. If a mask is present, the optical signal will be blocked or reflected and transmitted through the optical fiber to the optical fiber amplifier. The optical fiber amplifier amplifies the optical signal, thereby identifying the presence of a mask on the support structure 10.

[0072] This application also provides a mask detection method for detecting a mask using the aforementioned mask detection device, the detection method comprising the following steps: Place the mask to be tested on the supporting structure; The mask is pre-positioned by simultaneously clamping it with at least two pairs of clamping components in a polygonal manner. The pair of clamping components corresponding to the optical detection component will open and close to make way; The load-bearing structure is positioned to the detection coordinates along a preset trajectory, and side end detection is performed. While keeping at least one pair of clamping components clamped, switch the other pair of clamping components to the open / closed state and rotate the bearing structure to inspect the other sides; After all side-end inspections are completed, the mask is released by having at least two pairs of clamping components in the open / closed state.

[0073] To facilitate understanding, the following detailed operation example will be provided using two pairs of clamping components as an example.

[0074] Step S100: Place the mask to be tested on the supporting structure.

[0075] Step S102: Rotate the support structure so that the first side of the mask plate corresponds to the optical detection component.

[0076] The motion table rotates the supporting structure, turning the mask to a predetermined angle so that its first side end aligns with the optical detection assembly. This ensures that the optical detection assembly accurately covers the target area to be detected, reducing detection errors caused by angular deviations.

[0077] Step S104: The mask is simultaneously clamped by two pairs of clamping components, with the two pairs of clamping components simultaneously abutting against the four sides of the mask to pre-position the mask.

[0078] Two pairs of clamping components simultaneously clamp the four sides of the mask, forming a stable four-end limit, thereby maintaining the mask's planar orientation while achieving initial positioning and preventing the mask from shifting during movement or rotation. Step S106: Swing the first pair of clamping components corresponding to the optical detection component to the open / closed state.

[0079] The opening and closing clamping component ensures that it does not obstruct the detection area during optical inspection, while maintaining support for the remaining edges of the mask.

[0080] Step S108: Move the supporting structure to the preset detection coordinates and perform optical detection on the first side of the mask.

[0081] Step S110: Move the bearing structure to the machine position and adjust the coordinates. After swinging the first pair of clamping components to the clamping state, swing the second pair of clamping components to the opening and closing state.

[0082] By adjusting the position of the supporting structure and the state of the corresponding clamping components, the mask is stably supported before the second side is detected, while providing operating space for the movement of the second pair of clamping components, thereby achieving safe switching of multi-angle detection and avoiding displacement or vibration of the mask during the conversion process.

[0083] Step S112: Rotate the support structure so that the second side of the mask plate corresponds to the optical detection component.

[0084] Step S114: Move the supporting structure to the preset detection coordinates and perform optical detection on the second side of the mask.

[0085] Step S116: Move the supporting structure to the part removal coordinate and swing both pairs of clamping components to the open / closed state in order to remove the mask.

[0086] In an optional embodiment, after step S108 and before step S110, the mask detection method of this application further includes: Step S200: Rotate the supporting structure so that the third side of the mask aligns with the optical detection component, and perform optical detection on the third side of the mask. The third side is positioned opposite to the first side.

[0087] Accordingly, in this embodiment, after step S114 and before step S116, the method may further include: Step S300: Rotate the supporting structure so that the fourth side end of the mask aligns with the optical detection component, and perform optical detection on the fourth side end of the mask. The fourth side end is positioned opposite to the second side end.

[0088] Steps S200 and S300 enable continuous detection of the opposite sides of the mask. After detecting one side of the mask, it is rotated 180° and the other side is detected. Since the corresponding clamping components are in the open or closed state, they will not block the detection of the other side, thus enabling rapid side-changing detection.

[0089] It should be noted that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The directional terms "inner" and "outer" refer to the inside or outside relative to the outline of the component itself. For example, if a device in the drawings is inverted, a device described as "above" or "on top of" other devices or structures will subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0090] It should also be noted that the terms "one embodiment," "another embodiment," and "embodiment" used in this application refer to specific features, structures, or characteristics described in connection with that embodiment, which are included in at least one embodiment described in the general description of this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in connection with any embodiment, the intention is to suggest that implementing such a feature, structure, or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0091] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0092] It should also be noted that the above are merely preferred embodiments of this application and do not limit the scope of patent protection of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A mask detection device, characterized in that, include: A support structure for supporting a mask, the support structure being mounted on a motion table and moving with the motion table; At least two pairs of clamping components are disposed on opposite sides of the supporting structure; Each clamping component includes: The drive component is fixed below the supporting structure; The support arm has a first end connected to the drive assembly and a second end provided with a contact portion for abutting against the edge of the mask. Each pair of clamping components includes: The first clamping assembly includes a first driving assembly and a first support arm. The first driving assembly is used to drive the first support arm to rotate. The first support arm is provided with two contact portions. The second clamping assembly includes a second drive assembly and a second arm, the second drive assembly being used to drive the second arm to rotate, and the second arm having a contact portion; In this pair of clamping components, the corresponding drive components are located on opposite sides of the bearing structure. Each drive component is used to drive the corresponding support arm to rotate so that the contact part on the corresponding support arm contacts the mask to form a three-point positioning, or moves away from the edge of the mask so that it is in an open or closed state during the detection stage, thereby giving up the detection field of view.

2. The mask detection device according to claim 1, characterized in that, The contact portion is rotatably mounted on the corresponding support arm, and the contact portion is covered with a soft rubber layer.

3. The mask detection device according to claim 2, characterized in that, The first arm includes: The first rod is connected at one end to the first drive assembly; The first forked rod is connected to the end of the first rod away from the first drive assembly, and the first forked rod has two spaced-apart contact portions.

4. The mask detection device according to claim 3, characterized in that, When the mask is held by a pair of clamping components, the corresponding contact portion of the pair of clamping components abuts against the edge above the side end of the mask.

5. The mask detection device according to claim 1, characterized in that, The load-bearing structure is also provided with four support structures at the corners. The support structures are fixed to the load-bearing structure, and the top of the support structure is a spherical or arc transition surface. The support structure forms point contact with the mask plate above it.

6. The mask detection device according to claim 1, characterized in that, The driving component includes: Drive cylinder; The rotating shaft is coupled to the drive cylinder at one end via a coupling. A bearing housing is fixed below the load-bearing structure, and the bearing housing has a through hole for the rotating shaft to pass through; The outrigger is sleeved on a corresponding rotating shaft, and the drive cylinder is used to drive the rotating shaft to rotate around the axis so that the outrigger swings with the rotating shaft.

7. The mask detection apparatus according to any one of claims 1 to 6, characterized in that, The same pair of clamping components are controlled by a set of solenoid valves to achieve synchronous opening and closing, while different pairs of clamping components are independently controlled by different sets of solenoid valves.

8. The mask detection apparatus according to any one of claims 1 to 6, characterized in that, The clamping assembly also includes a speed control valve coupled to the drive assembly; the speed control valve is used to adjust the rotational speed of the drive assembly.

9. The mask detection apparatus according to any one of claims 1 to 6, characterized in that, It also includes a mask detection component, fixed to the support structure, for issuing a corresponding detection signal based on whether a mask is present on the support structure.

10. A mask detection method, characterized in that, include: Place the mask to be tested on the supporting structure; The mask is pre-positioned by simultaneously clamping the mask with at least two pairs of clamping components in a polygonal manner. The pair of clamping components corresponding to the optical detection component will open and close to make way; The load-bearing structure is positioned to the detection coordinates along a preset trajectory, and side end detection is performed. While keeping at least one pair of clamping components clamped, switch the other pair of clamping components to the open / closed state and rotate the bearing structure to inspect the other sides; After all side-end inspections are completed, the mask is released by having at least two pairs of clamping components in the open / closed state.

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