Maintenance operation system

Abstract

According to the invention, the safety of operators during maintenance work based on a robot can be improved. This maintenance work system is a maintenance work system in a substrate processing plant, and is provided with a device space in which a substrate processing system is provided, and a travel space which is located above or below the device space and in which a work body relating to the maintenance work of the substrate processing system travels, the maintenance work system having the work body and a lifting mechanism, and a lifting means for lifting the work body, which travels in the travel space to a position above or below the work target substrate processing system, between the travel space and the device space.

Description

Technical Field

[0001] This invention relates to a maintenance operation system. Background Technology

[0002] Currently, maintenance of the substrate processing system (consumable replacement, cleaning, etc.) is carried out manually by maintenance personnel.

[0003] In response, the development of a maintenance system that allows robots to perform maintenance tasks is underway. This system envisions robots autonomously performing maintenance operations.

[0004] On the other hand, even when maintenance is performed by robots, other tasks may sometimes be performed during the maintenance period. In such cases, personnel performing tasks other than maintenance may enter the vicinity of the robot performing the maintenance or enter the robot's path as it moves toward the device being maintained.

[0005] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2021-136359 Patent Document 2: Japanese Patent Application Publication No. 2020-161827 Patent Document 3: International Publication No. 2021 / 178458 Patent Document 4: U.S. Patent Application Publication No. 2018 / 032062 Patent Document 5: U.S. Patent Application Publication No. 2020 / 103756 Summary of the Invention The problem that the invention aims to solve This invention aims to improve the safety of operators when robots are performing maintenance tasks.

[0006] Methods for solving problems According to one aspect of the present invention, a maintenance operation system has, for example, the following configuration. That is, it is a maintenance operation system in a substrate processing plant, comprising: The device space is equipped with a substrate processing system, and Located above or below the device space, this is the travel space for the workpiece involved in maintenance operations of the substrate processing system. The system has the aforementioned working body, and A lifting mechanism is used to lift the workpiece, which is traveling in the travel space to a position above or below the workpiece substrate processing system, between the travel space and the device space.

[0007] The effects of the invention According to the present invention, the safety of operators can be improved when robots perform maintenance operations. Attached Figure Description

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[0062] Hereinafter, various embodiments will be described with reference to the accompanying drawings. Furthermore, in this specification and the accompanying drawings, constituent elements that have substantially the same functional configuration are labeled with the same symbols, thereby omitting redundant descriptions.

[0063] [First Embodiment] <Application Examples of Maintenance Operation Systems> First, an application example of the maintenance operation system according to the first embodiment will be described.

[0064] (1) Explanation of the No. 1 substrate processing plant Figure 1A The first image shows the first substrate processing plant as viewed from the side, representing the application maintenance system.

[0065] like Figure 1A As shown, the first substrate processing plant 100, which applies the maintenance operation system according to the first embodiment, has two spaces, one above the other. Specifically, the first substrate processing plant 100 has a travel space 110 above and a device space 120 below. In addition, a portion of the upper travel space 110 can be used as a preparation space 111, and a portion of the lower device space 120 can be used as a preparation space 121.

[0066] The device space 120 is the space where the substrate processing systems 141, 142, ... are installed. The travel space 110 is the space where workpieces related to maintenance operations of the substrate processing systems 141, 142, ... travel on the track 170.

[0067] In the first embodiment, the work unit related to the maintenance operation includes: • A "replacement unit" that replaces a portion of the units in the substrate processing systems 141, 142, ..., etc. • A “work robot” that performs maintenance work on substrate processing systems 141, 142, etc., or assists in installing units onto substrate processing systems 141, 142, etc., or disassembling units from substrate processing systems 141, 142, etc. • Inspect the "inspection robot" laid on track 170 in the travel space 110; • A "lifting robot" that lifts and lowers a unit from a vertically above position in order to replace a portion of the substrate processing systems 141, 142, ... etc.

[0068] Figure 1A The example shows how the replacement unit 160, 160' and the lifting robot 150 are in operation within the work unit, which includes the replacement unit, the work robot, the inspection robot, and the lifting robot.

[0069] Replacement units 160 are configured in various sections of the substrate processing system 142 (in Figure 1A In the example, there are 3 segments) any detachable unit (in Figure 1A In this example, the replacement unit 160 is a detachable unit located in the middle of the substrate processing system 142. During maintenance, if the replacement unit 160 is detached from the substrate processing system 142, it autonomously travels to the travel space 110 via the lifting rail 180, and then autonomously travels to the preparation space 111 via the rail 170 within the travel space 110. Furthermore, the replacement unit 160 in the substrate processing system 142 can be, for example, a detachable unit based on a chamber, a detachable unit based on a machine, or a detachable unit based on a component.

[0070] A new replacement unit 160' is prepared in advance in the preparation space 111. After autonomously traveling on the track 170 in the travel space 110, the new replacement unit 160' descends to the device space 120 via the lifting track 180. Thereby, the new replacement unit 160' is attached to the position where the replacement unit 160 in the substrate processing system 142 was previously attached.

[0071] The lifting robot 150 is configured in the substrate processing system (in Figure 1AIn the example of the substrate processing system 141), a detachable unit that can be detached from a vertically upward position (in...) Figure 1A In this example, the robot 150 is used to lift and lower units 190 and 190'. During maintenance, the lifting robot 150 autonomously travels along the track 170 within the travel space 110 to a position above the vertical direction of unit 190. Furthermore, the lifting robot 150 lifts unit 190, which can be detached from the vertically upper position, into the travel space 110, and transports unit 190 to the preparation space 111 by autonomously traveling along the track 170 within the travel space 110.

[0072] A new unit 190' is pre-prepared in the preparation space 111. The lifting robot 150 autonomously travels on the track 170 within the travel space 110 to a position above the substrate processing system 141 in the vertical direction. Furthermore, the lifting robot 150 lowers the new unit 190' onto the substrate processing system 141 and installs it onto the substrate processing system 141.

[0073] Alternatively, a maintenance robot (not shown) is waiting in the preparation space 111 to perform maintenance on the transported unit 190. This maintenance robot can also perform maintenance on the unit 190 within the preparation space 111. In this case, the lifting robot 150 autonomously travels along the track 170 within the travel space 110 to a position vertically above the substrate processing system 141. Furthermore, the lifting robot 150 lowers the maintained unit 190 onto the substrate processing system 141 and mounts it onto the substrate processing system 141.

[0074] (2) Explanation of the first substrate processing plant (Part 2) Figure 1B The second image shows the first substrate processing plant as viewed from the side, representing the application maintenance system.

[0075] Figure 1B The example shows how the work robot 161 is operating within the work unit, which includes a replacement unit, a work robot, an inspection robot, and a lifting robot.

[0076] The 161 robot is for the substrate processing system (in Figure 1BIn this example, a robot is used to perform maintenance on the substrate processing system 142. The robot 161 autonomously travels along track 170 within the travel space 110, then descends to the device space 120 via lifting track 180. Thereafter, the robot 161 autonomously travels within the device space 120 to the location of the substrate processing system 142 to perform maintenance. After the maintenance is completed, the robot 161 autonomously travels within the device space 120, then autonomously travels back to the travel space 110 via lifting track 180, and further autonomously travels along track 170 within the travel space 110 to return to the preparation space 111.

[0077] Alternatively, the work robot 161 can also assist the lifting robot 150 in the substrate processing system (e.g. Figure 1A The substrate processing system 141) is an installation unit or a disassembly unit.

[0078] (3) Explanation of the first substrate processing plant (Part 3) Figure 1C The third image shows the first substrate processing plant as viewed from the side, representing the application maintenance system.

[0079] Figure 1C The example shows what it looks like to configure the crane mechanism 151 on the ceiling surface of the installation space 120.

[0080] The crane mechanism 151, like the lifting robot 150, is configured in the substrate processing system (in Figure 1C In the example, the robot is a detachable unit of the substrate processing system 141, which can be detached from a vertically upward position and is used for lifting. Specifically, in Figure 1C In this example, a robot is used to lift and lower units 190 and 190'. During maintenance, the crane mechanism 151 travels along the track 171 within the device space 120 to a position above the vertical direction of unit 190. Furthermore, the crane mechanism 151 lifts unit 190, which can be detached from the vertically above position, and transports unit 190 to the preparation space 121 by traveling along the track 171 within the device space 120.

[0081] A new unit 190' is pre-prepared in the preparation space 121. The crane mechanism 151 moves the new unit 190' to a position above the substrate processing system 141 in the vertical direction by traveling on the track 171 within the device space 120. In addition, the crane mechanism 151 lowers the new unit 190' onto the substrate processing system 141 and installs it onto the substrate processing system 141.

[0082] Alternatively, a maintenance robot (not shown) may be waiting in the preparation space 121 to perform maintenance on the transported unit 190. This robot can also perform maintenance on the unit 190 within the preparation space 121. In this case, the crane mechanism 151 travels along the track 171 within the device space 120 to a position vertically above the substrate processing system 141. Furthermore, the crane mechanism 151 lowers the maintained unit 190 onto the substrate processing system 141.

[0083] In addition, the work robot 161 can also assist in removing the unit 190 from the substrate processing system 141 and installing a new unit 190' (or a unit 190 that has been maintained) into the substrate processing system 141.

[0084] (4) Explanation of the first substrate processing plant (Part 4) Figure 1D This diagram shows the first substrate processing plant as viewed from above, primarily showing the tracks laid in the travel space 110 and the cover that opens the floor of the travel space 110. However, in Figure 1D In order to clarify the positional relationship with the substrate processing system within the device space 120, substrate processing systems 141_1, 142_1, 141_2, and 142_2 are also shown.

[0085] like Figure 1D As shown in the example, in the travel space 110, a track group GR1 is arranged above the substrate processing systems 141_1 and 142_1, along the configuration direction of the substrate processing systems 141_1 and 142_1. Similarly, in the travel space 110, a track group GR2 is arranged above the substrate processing systems 141_2 and 142_2, along the configuration direction of the substrate processing systems 141_2 and 142_2.

[0086] The track group GR1 includes three sets of tracks for the replacement units, the operation robot, and the inspection robot to autonomously move within the travel space 110. Furthermore, the number of track sets included in the track group GR1 can be determined, for example, based on the number of replacement units (the number of replacement units in the width direction) of the substrate processing systems 141_1 and 142_1 located at corresponding positions within the device space 120. In this embodiment, both substrate processing systems 141_1 and 142_1 have three replacement units in the width direction; therefore, the track group GR1 has three sets of tracks.

[0087] Furthermore, the positions of these three sets of tracks are changed by a modification mechanism (not shown). This modification mechanism may change the track positions based on, for example, the lifting position of the work robot. Additionally, the modification mechanism may change the track positions based on, for example, the size of the autonomous lifting robot, the changing unit, the work robot, and the inspection robot.

[0088] Similarly, the track group GR2 includes three sets of tracks for the replacement units, the operation robot, and the inspection robot to autonomously move within the travel space 110. Furthermore, the number of track sets included in the track group GR2 can be determined, for example, based on the number of replacement units (the number of replacement units in the width direction) of the substrate processing systems 141_2 and 142_2 located at corresponding positions within the device space 120. In this embodiment, both substrate processing systems 141_2 and 142_2 have three replacement units in the width direction; therefore, the track group GR2 has three sets of tracks.

[0089] Furthermore, the positions of these three sets of tracks are changed by a modification mechanism (not shown). This modification mechanism may change the track positions based on, for example, the lifting position of the work robot. Additionally, the modification mechanism may change the track positions based on, for example, the size of the autonomous lifting robot, the changing unit, the work robot, and the inspection robot.

[0090] In addition, Figure 1D In the example, the orbits contained in orbital group GR1 and orbital group GR2 are shown as straight orbits. However, the orbits contained in orbital group GR1 and orbital group GR2 are not limited to straight orbits; they may also include orbits other than straight orbits.

[0091] In addition, such as Figure 1D As shown in the example, the driving space 110 is provided with covers 172_1, 172_2, 172_3, and 172_4 that open to the ground.

[0092] The covers 172_1 and 172_3 operate when the lifting robot 150 lifts and lowers the units of the substrate processing system 141_1 and 142_1 that can be detached from the vertical position.

[0093] Furthermore, covers 172_2 and 172_4 operate when the replacement unit, which is installed in or removed from the substrate processing system 141_1 and 142_1, moves up and down between the travel space 110 and the device space 120. Alternatively, covers 172_2 and 172_4 operate when the work robot moves up and down between the travel space 110 and the device space 120.

[0094] Similarly, as Figure 1DAs shown in the example, the driving space 110 is provided with covers 173_1, 173_2, 173_3, and 173_4 that open to the ground.

[0095] The covers 173_1 and 173_3 operate when the lifting robot 150 lifts and lowers the units of the substrate processing systems 141_2 and 142_2 that can be detached from the vertical position.

[0096] Furthermore, covers 173_2 and 173_4 operate when the replacement unit, which is installed in or removed from the substrate processing systems 141_2 and 142_2, moves up and down between the travel space 110 and the device space 120. Alternatively, covers 173_2 and 173_4 operate when the work robot moves up and down between the travel space 110 and the device space 120.

[0097] (5) Explanation of the second substrate processing plant Figure 2A The first image shows the second substrate processing plant as viewed from the side, representing the application maintenance system.

[0098] like Figure 2A As shown, the second substrate processing plant 200, which applies the maintenance operation system according to the first embodiment, has two spaces, one above the other. Specifically, the second substrate processing plant 200 has a device space 210 above and a travel space 220 below. In addition, a portion of the upper device space 210 can be used as a preparation space 211, and a portion of the lower travel space 220 can be used as a preparation space 221.

[0099] The device space 210 is the space where the substrate processing systems 241, 242, ... are installed. The travel space 220 is the space where workpieces related to maintenance operations of the substrate processing systems 241, 242, ... travel on the track 270.

[0100] Furthermore, the maintenance operation system applied to the second substrate processing plant 200 has largely the same operation units related to maintenance operations as those applied to the maintenance operation system applied to the first substrate processing plant 100. Therefore, the explanation here focuses on the differences.

[0101] Figure 2A The example shows a case of replacement units 260, 260' and lifting robot 250 among the replacement units, operation robots, inspection robots and lifting robots included in the work body.

[0102] If the replacement unit 260 is separated from the substrate processing system 242 during maintenance, it will autonomously travel to the travel space 220 via the lifting track 280, and then autonomously travel on the track 270 within the travel space 220 to the preparation space 221.

[0103] A new replacement unit 260' is prepared in advance in the preparation space 221. After autonomously traveling on the track 270 in the travel space 220, the new replacement unit 260' is raised to the device space 210 via the lifting track 280. Thereby, the new replacement unit 260' is attached to the position where the replacement unit 260 in the substrate processing system 242 was attached.

[0104] The lifting robot 250 is configured in the substrate processing system (in Figure 2A In the example of the substrate processing system 241), a detachable unit that can be detached from a vertically downward position (in...) Figure 2A In this example, the robot 250 is used to lift and lower units 290 and 290'. During maintenance, the lifting robot 250 autonomously travels along the track 270 within the travel space 220 to a position below the vertical direction of unit 290. Furthermore, the lifting robot 250 lowers unit 290, which can be detached from the vertically lower position, into the travel space 220, and transports unit 290 to the preparation space 221 by autonomously traveling along the track 270 within the travel space 220.

[0105] A new unit 290' is pre-prepared in the preparation space 221. The lifting robot 250 autonomously travels on the track 270 within the travel space 220 to a position below the substrate processing system 241 in the vertical direction. Furthermore, the lifting robot 250 lifts the new unit 290' onto the substrate processing system 241 and installs it onto the substrate processing system 241.

[0106] Alternatively, a maintenance robot (not shown) is waiting in the preparation space 221 to perform maintenance on the transported unit 290. This maintenance robot can also perform maintenance on the unit 290 within the preparation space 221. In this case, the lifting robot 250 autonomously travels along the track 270 within the travel space 220 to a position below the substrate processing system 241 in the vertical direction. Furthermore, the lifting robot 250 lifts the maintenance-performed unit 290 onto the substrate processing system 241 and mounts it onto the substrate processing system 241.

[0107] In addition, although Figure 2AWhile the details are omitted, it is also envisioned that interference with the auxiliary equipment of the substrate processing system 241 may occur when the lifting robot 250 lifts and lowers units 290 and 290'. Alternatively, it is also envisioned that interference with the auxiliary equipment of the substrate processing system 242 may occur when units 260 and 260' are lifted and lowered via the lifting track 280.

[0108] In this regard, the maintenance system according to the first embodiment may also include a retraction mechanism for retracting, for example, the auxiliary equipment of the substrate processing system 241 or 242 in the horizontal direction. The position at which the retraction mechanism retracts the auxiliary equipment can be determined, for example, according to the size of the lifting robot 250 or the size of the replacement units 260, 260'.

[0109] (6) Explanation of the second substrate processing plant (Part 2) Figure 2B The second image shows the second substrate processing plant as viewed from the side, representing the application maintenance system.

[0110] Figure 2B The example shows how the work robot 261 is operating within the work unit, which includes a replacement unit, a work robot, an inspection robot, and a lifting robot.

[0111] The 261st operation robot is for the substrate processing system (in Figure 2B In this example, a robot is used to perform maintenance on the substrate processing system 242. The robot 261 autonomously travels along track 270 within the travel space 220, then rises to the device space 210 via lifting track 280. Thereafter, the robot 261 autonomously travels within the device space 210 to the location of the substrate processing system 242 to perform maintenance. After the maintenance is completed, the robot 261 autonomously travels within the device space 210, then autonomously travels back to the travel space 220 via lifting track 280, and further autonomously travels along track 270 within the travel space 220 to return to the preparation space 221.

[0112] Alternatively, the work robot 261 can also assist the lifting robot 250 in the substrate processing system (e.g. Figure 2A 241) Substrate processing system (installation unit or disassembly unit).

[0113] (7) Explanation of the second substrate processing plant, part three Figure 2C This diagram shows the second substrate processing plant as viewed from above, primarily highlighting the cover that opens the floor to the equipment space 210 and the tracks laid in the travel space 220. However, in Figure 2CIn order to clarify the positional relationship with the cover and the track, the substrate processing systems 241_1, 242_1, 241_2, and 242_2 are also shown.

[0114] like Figure 2C As shown in the example, in the travel space 220, a track group GR1 is arranged below the substrate processing systems 241_1 and 242_1, along the configuration direction of the substrate processing systems 241_1 and 242_1. Similarly, in the travel space 220, a track group GR2 is arranged below the substrate processing systems 241_2 and 242_2, along the configuration direction of the substrate processing systems 241_2 and 242_2.

[0115] In addition, detailed information on orbital groups GR1 and GR2 has been utilized. Figure 1D The explanation has already been provided, so it will be omitted here.

[0116] In addition, such as Figure 2C As shown in the example, the device space 210 is provided with covers 272_1, 272_2, 272_3, and 272_4 that open to the ground.

[0117] The covers 272_1 and 272_3 operate when the lifting robot 250 lifts and lowers the units of the substrate processing system 241_1 and 242_1 that can be detached from the vertical position below.

[0118] Furthermore, covers 272_2 and 272_4 operate when the replacement unit, which is attached to or removed from the substrate processing system 241_1 and 242_1, moves up and down between the device space 210 and the travel space 220. Alternatively, covers 272_2 and 272_4 operate when the work robot moves up and down between the device space 210 and the travel space 220.

[0119] Similarly, as Figure 2C As shown in the example, the device space 210 is provided with covers 273_1, 273_2, 273_3, and 273_4 that open to the ground.

[0120] The covers 273_1 and 273_3 operate when the lifting robot 250 lifts and lowers the units of the substrate processing systems 241_2 and 242_2 that can be detached from the vertical position below.

[0121] Furthermore, covers 273_2 and 273_4 operate when the replacement unit, which is attached to or removed from the substrate processing system 241_2 and 242_2, moves up and down between the device space 210 and the travel space 220. Alternatively, covers 273_2 and 273_4 operate when the work robot moves up and down between the device space 210 and the travel space 220.

[0122] <Layout within the installation space> Next, the layout within the equipment space (mainly the mechanisms set up within the equipment space for the operation of the work robots) will be explained. Furthermore, the following explanation primarily focuses on the application of the maintenance operation system to the first substrate processing plant 100, but the same applies to its application to the second substrate processing plant 200.

[0123] (1) One of the layouts within the device space Figure 3A Figure 1 is an example of the layout of the installation space, showing what the installation space 120 looks like from above. (See Figure 1.) Figure 3A As shown, a light-emitting part 310 is provided on the ground of the device space 120.

[0124] The light-emitting unit 310 illuminates when the work robot travels within the device space 120, guiding the work robot to a predetermined travel path. Multiple light-emitting units 310 are arranged at predetermined intervals along the travel paths surrounding the substrate processing systems 141_1, 142_1, 141_2, and 142_2. Furthermore, multiple light-emitting units 310 are arranged at predetermined intervals along the travel paths extending from the substrate processing systems 141_1, 142_1, 141_2, and 142_2.

[0125] (2) Layout within the device space (Part 2) Figure 3B Figure 2, which illustrates an example of the layout of the device space, shows the interior of the device space 120 as viewed from above. As an alternative to installing the light-emitting unit 310 on the floor of the device space 120, such as... Figure 3B As shown, markings 321 to 329 are provided on the ceiling surface of the device space 120.

[0126] Markers 321 to 329 are captured by the robot while it is autonomously moving within the device space 120. The position coordinates of the markers 321 to 329 within the device space 120 have been pre-identified by the robot. The robot then analyzes the image data captured from any one or more of the markers 321 to 329. Based on this, the robot calculates its current position within the autonomously moving device space 120.

[0127] also, Figure 3B The example shows that the marks 321 to 329 are set at the vertices of the rectangular areas that respectively surround the substrate processing systems 141_1, 142_1, 141_2, and 142_2, but the setting positions of the marks 321 to 329 are not limited to this.

[0128] Furthermore, the method by which the robot calculates its current position within the device space 120 during autonomous driving is not limited to this. For example, a transmitter may also be installed on each of the units in the substrate processing systems 141_1, 142_1, 141_2, and 142_2.

[0129] The position coordinates of the transmitters within the device space 120 have been pre-identified by the working robot. The working robot calculates its current position within the device space 120 while autonomously moving by analyzing signals from any one or more transmitters.

[0130] <System Composition of Maintenance Operation System> Next, the system configuration of the maintenance operation system according to the first embodiment will be described. Figure 4 This is a diagram illustrating an example of the system configuration of a maintenance operation system.

[0131] like Figure 4 As shown, the maintenance operation system 400 according to the first embodiment includes: ·Work item 410, • Driving mechanism 420 Crane mechanism 431 Management System 440 • Lifting mechanism 450 • Light-emitting part 433 or mark 434 or transmitter 435, • Portable terminal 460.

[0132] In the maintenance operation system 400, the management system 440 is communicatively connected to the work body 410, the traveling mechanism 420, the crane mechanism 431, the lifting mechanism 450, the light-emitting unit 433, and the portable terminal 460 via the network 470.

[0133] Furthermore, the management system 440 and the maintenance operation system 400 are connected communicatively via the baseboard processing systems 141_1 to 142_2, which are the objects of maintenance operations, via the network 470.

[0134] Furthermore, in the work unit 410, at least the replacement unit 411, the work robot 412, the lifting robot 413, and the baseboard processing system 141_1 to 142_2 are connected via short-range wireless communication.

[0135] exist Figure 4 Of the various elements possessed by the maintenance operation system 400 shown, regarding the maintenance operation system 400... Figures 1A to 3B The elements already described in the application examples shown are explained in conjunction with... Figure 4 The correspondence is omitted here.

[0136] like Figure 4As shown, the work body 410 includes a replacement unit 411, a work robot 412, a lifting robot 413, and an inspection robot 414.

[0137] in, Figure 4 A specific example of the replacement unit 411 included in the working body 410 is: Figure 1A The replacement unit 160 shown is... Figure 4 A specific example of the work robot 412 included in the work body 410 is Figure 1B The work robot 161 shown.

[0138] also, Figure 4 A specific example of the lifting robot 413 included in the working body 410 is Figure 1A The lifting robot 150 shown.

[0139] like Figure 4 As shown, the travel mechanism 420 has a change mechanism 421, a track 422, an opening mechanism 423, and a cover 424.

[0140] The alteration mechanism 421 changes the position of track 422. A specific example of track 422 is... Figure 1A Orbit 170 or Figure 1D The orbital groups GR1 and GR2 are shown.

[0141] The opening mechanism 423 opens and closes the floor of the driving space 110 by changing the position of the cover 424. A specific example of the cover 424 is... Figure 1D The cover part 172_1~173_4.

[0142] Figure 4 A specific example of crane mechanism 431 is Figure 1C The crane mechanism 151 shown.

[0143] like Figure 4 As shown, the lifting mechanism 450 includes a setting mechanism 451 and a lifting rail 452. The setting mechanism 451 sets the lifting rail 452 in a predetermined position. A specific example of the lifting rail 452 is... Figure 1B The lifting track 180 is shown.

[0144] also, Figure 4 A specific example of the light-emitting part 433 or the mark 434 is Figure 3A The light-emitting part 310 or Figure 3B Marked 321-329.

[0145] To perform maintenance operations on the substrate processing systems 141_1 to 142_2, the management system 440 acquires information from the work body 410, the traveling mechanism 420, and the crane mechanism 431. Furthermore, to perform maintenance operations on the substrate processing systems 141_1 to 142_2, the management system 440 acquires information from the lifting mechanism 450, the substrate processing systems 141_1 to 142_2, and the portable terminal 460. Moreover, under the supervision of the manager 481, the management system 440, based on the acquired information, issues various instructions to the work body 410, the traveling mechanism 420, the crane mechanism 431, the lifting mechanism 450, the substrate processing systems 141_1 to 142_2, the light-emitting unit 433, and the portable terminal 460.

[0146] Portable terminal 460 is a portable terminal held by personnel 482 (an example of a device manager who manages the board processing systems 141_1 to 142_2) performing prescribed tasks within the device space 120. Furthermore, the portable terminal 460 mentioned here includes any portable information terminal. Examples of portable information terminals include laptop PCs (Personal Computers), tablets, smartphones, smartwatches, and HMDs (Head Mounted Displays).

[0147] <Modes in Maintenance Operation Systems> Next, the mode switching in the maintenance operation system 400 will be explained. Figure 5 This diagram illustrates an example of mode switching in a baseboard processing system within a maintenance operation system. (For example...) Figure 5 As shown, the substrate processing systems 141_1 to 142_2 switch between normal mode, maintenance mode and independent maintenance mode, and perform their respective processing in any mode.

[0148] Normal mode refers to the state in which the substrate processing systems 141_1 to 142_2 are performing substrate processing normally. In normal mode, the maintenance operation system 400 obtains information from the substrate processing systems 141_1 to 142_2 to determine the necessity of maintenance operations. If maintenance operations are determined to be necessary, the maintenance operation system 400, as part of the maintenance schedule, decides: • Substrate processing systems and units that are the targets of maintenance operations; Maintenance work content; • When to perform maintenance operations; wait.

[0149] The maintenance mode refers to a mode in which substrate processing is stopped by any one or more substrate processing systems 141_1 to 142_2, and maintenance is performed on the substrate processing system that has stopped substrate processing.

[0150] Independent maintenance mode refers to a mode in which substrate processing of any of the substrate processing systems 141_1 to 142_2 is temporarily stopped for maintenance.

[0151] <An example of the functional composition of a management system> Next, the functional composition of the management system 440 will be explained. Figure 6 This diagram illustrates an example of the functional configuration of a management system. A management program is installed in the management system 440. By executing this program, the management system 440 functions as the work unit management department 610, the travel mechanism management department 620, and the crane mechanism management department 630. Furthermore, by executing this program, the management system 440 functions as the lifting mechanism management department 640, the board processing system management department 650, the light-emitting unit management department 660, and the portable terminal management department 670.

[0152] The Operations Management Department 610 manages the operation of Operations Unit 410. Specifically, the Operations Management Department 610 addresses: • Maintenance operations in maintenance mode or independent maintenance mode; or • Inspection operations in normal mode; At a predetermined time, instructions based on the work content are sent to any one of the work units 410. These instructions based on the work content include information based on the maintenance schedule, such as: • Information used to determine the substrate processing system and unit to be maintained; • Information used to determine the track of the object to be inspected during the inspection operation; • The travel route (outbound route, return route) to the maintenance target unit; • The travel path when inspecting the track of the object being inspected; • The operational steps for maintenance of the unit being maintained; • The operational steps for inspecting the track of the object being inspected; wait.

[0153] In addition, the work unit management department 610 sends a driving start instruction to the work unit 410. Furthermore, the work unit management department 610 receives work history records of maintenance operations or inspection results of inspection operations performed by the work unit 410. Additionally, the work unit management department 610 receives various information from the work unit 410, such as separation or combination completion, driving completion, maintenance operation completion, and detection of work personnel.

[0154] The travel mechanism management department 620 manages the operation of the travel mechanism 420. Specifically, the travel mechanism management department 620 addresses: • Maintenance operations in maintenance mode or independent maintenance mode; or • Inspection operations in normal mode; At the designated time, instructions based on the work content are sent to the operating mechanism management department 620. These instructions based on the work content include information based on the maintenance schedule, such as: • Information used to determine the operating body 410 traveling in the driving space 110; • The travel path of the workpiece 410 within the travel space 110; • The location of the opening in the driving space 110; • Information used to determine the track of the object being inspected; • Information used to determine the substrate processing system and unit to be maintained; wait.

[0155] The crane mechanism management department 630 manages the operation of the crane mechanism 431. Specifically, the crane mechanism management department 630 addresses: • Maintenance operations in maintenance mode or independent maintenance mode; At the designated time, instructions based on the work content are sent to the crane mechanism 431. These instructions based on the work content include information based on the maintenance schedule, such as: • Information used to determine the substrate processing system and unit to be maintained; wait.

[0156] The lifting mechanism management unit 640 manages the operation of the lifting mechanism 450. Specifically, the lifting mechanism management unit 640 addresses: • Maintenance operations in maintenance mode or independent maintenance mode; At a predetermined time, instructions based on the work content are sent to the lifting mechanism 450. These instructions based on the work content include information based on the maintenance schedule, such as: • Information used to determine the lifting and lowering operation body 410; • The location of the opening in the driving space 110; • Information used to determine the connection points at both ends of the lifting track; wait.

[0157] In addition, the lifting mechanism management department 640 sends a storage instruction to the lifting mechanism 450.

[0158] The substrate processing system management unit 650 manages the status of the substrate processing systems 141_1 to 142_2. Specifically, the substrate processing system management unit 650 performs the following processing: • In normal mode, information about component consumption or components that need to be replaced is received from the substrate processing systems 141_1 to 142_2, and the integrated control unit 680 is notified. • In normal mode, based on the information already notified to the integrated control unit 680, the determination result of the necessity of replacement is received from the integrated control unit 680, and the substrate processing system 141_1 to 142_2 is notified. • In normal mode, the maintenance schedule notified from the integrated control unit 680 will be sent to the board processing systems 141_1 to 142_2; • In normal mode, the system receives a determination result from the substrate processing system 141_1 to 142_2 regarding whether the switch to maintenance mode or independent maintenance mode is possible, and notifies the integrated control unit 680. • In normal mode, the conversion instruction notified from the integrated control unit 680 will be sent to the board processing systems 141_1 to 142_2; • In maintenance mode or independent maintenance mode, the notification information for the operator 482 is received from the integrated control unit 680 and sent to the board processing system 141_1 to 142_2. wait.

[0159] The Light Emitting Department Management Unit 660 manages the operation of the Light Emitting Department 433. Specifically, the Light Emitting Department Management Unit 660 addresses: Maintenance operations in maintenance mode; Based on instructions related to the work content, a light emission start instruction and a light emission stop instruction are sent to the light emission unit 433. The instructions based on the work content include information based on the maintenance schedule, such as: • The travel path of the workpiece 410 within the travel space 110; wait.

[0160] The portable terminal management unit 670 and the portable terminal 460 exchange various types of information. This various types of information include, for example: • Maintenance schedule; • Notification information to operator 482 who is carrying portable terminal 460; • Instructions (including voice instructions) from operator 482 who is holding a portable terminal 460. wait.

[0161] The integrated control unit 680 manages the entire management system 440. Specifically, the integrated control unit 680 performs the following processes: • In normal mode, when information about component consumption or components that need to be replaced is received from the substrate processing system management unit 650, the necessity of replacement is determined and the substrate processing system management unit 650 is notified. • In normal mode, a maintenance schedule is generated based on the determined necessity of replacement, and the Work Unit Management Department 610, Travel Mechanism Management Department 620, and Crane Mechanism Management Department 630 are notified. • In normal mode, a maintenance schedule is generated based on the determined replacement necessity, and the lifting mechanism management department 640, the substrate processing system management department 650, the light-emitting part management department 660, and the portable terminal management department 670 are notified. • In normal mode, determine the parts needed for maintenance work, and based on the maintenance schedule, order the parts needed for maintenance work by checking the parts inventory (accessible from either internal or external sources). • When it is possible to switch to maintenance mode or independent maintenance mode, the board processing system management department 650 shall be notified of the switch instruction; • In maintenance mode, when the operator is notified of the inspection information from the operation management unit 610, the notification information is sent to the board processing system management unit 650, and the corresponding operator is identified and the notification information is sent to the portable terminal management unit 670. wait.

[0162] <Hardware Components of the Management System> Next, the hardware configuration of the management system 440 will be described. Figure 7 This is a diagram illustrating an example of the hardware configuration of a management system.

[0163] like Figure 7 As shown, the management system 440 includes a processor 701, a memory 702, an auxiliary storage device 703, an I / F (Interface) device 704, a communication device 705, and a drive device 706. Furthermore, the various hardware components included in the management system 440 are interconnected via a bus 707.

[0164] The processor 701 has various computing devices such as a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor 701 reads various programs (such as management programs) into the memory 702 and executes them.

[0165] The memory 702 includes main storage devices such as ROM (Read Only Memory) and RAM (Random Access Memory). The processor 701 and the memory 702 constitute a computer. The processor 701 executes various programs read from the memory 702, and the computer performs various functions.

[0166] The auxiliary storage device 703 stores various programs and various information used by the processor 701 when the various programs are executed.

[0167] The I / F device 704 is a connection device that connects to external devices (operating device 711, display device 712, etc.). The I / F device 704 receives operations from the administrator 481 on the management system 440 via the operating device 711. The operating device 711 includes a keyboard, mouse, touchscreen, etc. Furthermore, the I / F device 704 outputs the processing results of the management system 440 to the administrator 481 via the display device 712.

[0168] The communication device 705 is a communication device used to communicate with an external device 720 via a network 470. The external device 720 includes a work body 410, a travel mechanism 420, a crane mechanism 431, a lifting mechanism 450, a substrate processing system 141_1 to 142_2, a light-emitting part 433, a portable terminal 460, etc.

[0169] The drive unit 706 is a device for mounting the recording medium 730. The recording medium 730 mentioned here includes media that record information optically, electrically, or magnetically, such as CD-ROMs, floppy disks, and magneto-optical disks. Alternatively, the recording medium 730 may also include semiconductor memories that record information electrically, such as ROMs or flash memory.

[0170] Furthermore, various programs installed on the auxiliary storage device 703 can be installed, for example, by installing the distributed recording medium 730 onto the drive device 706, whereby the drive device 706 reads the various programs recorded on the recording medium 730. Alternatively, various programs installed on the auxiliary storage device 703 can be installed by downloading them from the network 470 via the communication device 705.

[0171] <Example 1 of operation of the driving mechanism, etc. in maintenance mode> Next, the operation of the lifting robot 413 during its travel will be explained, taking into account the operation of the driving mechanism 420 and the like in maintenance mode. Figures 8A to 8C Figures 1 to 3 are examples of the operation of the driving mechanism, etc., in maintenance mode.

[0172] As instructions based on the work content, the traveling mechanism 420 receives from the traveling mechanism management department 620: • Information used to determine the working body 410 moving in the travel space 110: lifting robot 413; • The travel path of the workpiece 410 traveling in the travel space 110: on the track determined by R3 in the track 422, the travel path from the preparation space 111 to the cover determined by S1 in the cover 424. • The opening position of the driving space 110: the cover portion determined by S1 in the cover portion 424 (the cover portion located above the vertical direction of unit 802). • Information used to determine the substrate processing system and unit to be maintained: substrate processing system 141_1, unit 802; wait.

[0173] Therefore, in order to form a track width that is compatible with the size of the lifting robot 413, the changing mechanism 421 of the traveling mechanism 420 changes the track width of the track determined by R3 in the track 422. At this time, if the changed track position interferes with the position of the adjacent track, the changing mechanism 421 of the traveling mechanism 420 also changes the position of the adjacent track.

[0174] Figure 8A This demonstrates how the track width, determined by R3, is widened to create a track width that adapts to the dimensions of the lifting robot 413. Additionally, in Figure 8A In the diagram, the dashed line represents the position of the track determined by R3, indicating the track position before the track width was widened.

[0175] also, Figure 8A This shows how the position of the adjacent orbit (determined by R2) changes because the changed orbit position interferes with the position of the adjacent orbit (determined by R2).

[0176] Next, in order to form an opening size that is compatible with the size of the unit 802, the opening mechanism 423 of the travel mechanism 420 opens the ground of the travel space 110 through the cover portion determined by S1 in the sliding cover portion 424.

[0177] Figure 8B The image shows how the floor of the driving space 110 is opened to form an opening size that is compatible with the size of the unit 802.

[0178] Next, as instructions based on the work content, the lifting robot 413 receives from the work unit management department 610: • Information used to determine the substrate processing system and unit to be maintained: substrate processing system 141_1, unit 802; • Travel path (outbound and return path) to the maintenance target unit: On the track determined by R3 in track 422, the travel path from the preparation space 111 to the cover determined by S1, and the travel path from the cover determined by S1 to the preparation space 111. • The maintenance procedure for the unit to be maintained is as follows: the procedure from removing unit 802 from the substrate processing system 141_1 until a new unit 802' (not shown) is installed into the substrate processing system 141_1. wait.

[0179] Figure 8C The image shows the lifting robot 413 autonomously traveling from the preparation space 111 to the cover determined by S1 on the track determined by R3 in order to disassemble the unit 802 of the substrate processing system 141_1.

[0180] <Example 2 of operation of the driving mechanism, etc. in maintenance mode> Next, the operation of the work robot 412 during autonomous driving will be explained, taking into account the operation of the driving mechanism 420 and the like in maintenance mode. Figures 9A to 9C Figures 4 through 6 illustrate an example of the operation of a driving mechanism, etc., in maintenance mode.

[0181] As instructions based on the work content, the traveling mechanism 420 receives from the traveling mechanism management department 620: • Information used to determine the workpiece 410 moving within the travel space 110: work robot 412; • The travel path of the workpiece 410 traveling in the travel space 110: on the track determined by R6 in the track 422, the travel path from the preparation space 111 to the cover determined by S8 in the cover 424. • Opening position of the travel space 110: The cover portion defined by S8 in the cover portion 424 (in the device space 120, the cover portion located directly above the travel path extending from the substrate processing system 142_2). • Information used to determine the substrate processing system and unit to be maintained: substrate processing system 142_2, unit; wait.

[0182] Therefore, in order to form a track width adapted to the size of the work robot 412, the changing mechanism 421 of the travel mechanism 420 changes the track width of the track determined by R6 in the track 422. Furthermore, the changing mechanism 421 of the travel mechanism 420 moves the track from the preparation space 111 to the cover portion determined by S8 in the cover portion 424 within the track determined by R6 to the opening position. Then, the opening mechanism 423 of the travel mechanism 420 opens the ground of the travel space 110 by sliding the cover portion determined by S8 in the cover portion 424 (the cover portion located directly above the travel path extending from the substrate processing system 142_2 in the device space 120).

[0183] Figure 9A This demonstrates how the track, defined by R6, extending from the preparation space 111 to the cover defined by S8, is moved to the opening position. Furthermore, Figure 9A This demonstrates how the track width, determined by R6, is adjusted to create a track width that is compatible with the dimensions of the work robot 412. Furthermore, Figure 9A It shows the cover, defined by S8, being slid open, creating an opening in the floor of the driving space 110.

[0184] Next, as instructions based on the work content, the lifting mechanism 450 receives from the lifting mechanism management department 640: • Information used to determine the lifting and lowering workpiece 410: work robot 412; • Opening position of the travel space 110: The cover portion defined by S8 in the cover portion 424 (in the device space 120, the cover portion located directly above the travel path extending from the substrate processing system 142_2). • Information used to determine the connection points at both ends of the lifting track: the track defined by R6 in track 422, and the travel path extending from the substrate processing system 142_2 in the device space 120; wait.

[0185] Therefore, the lifting mechanism 450 adjusts the width of the lifting track 452, determined by R7, to a width that is compatible with the dimensions of the working robot 412. Based on this, • The track within the range defined by R6, from the preparation space 111 to the cover defined by S8, and the track that has been moved to the opening position; and • A travel path extending from the substrate processing system 142_2; Connect them.

[0186] Figure 9BThe image shows how the lifting track, determined by R7, is used to connect the track moving to the opening position with the travel path within the device space 120 by adjusting the track width to be adapted to the size of the working robot 412.

[0187] Figure 9C The image shows the work robot 412 autonomously traveling from the preparation space 111 toward the device space 120 on the track defined by R6 and the lifting track defined by R7 within the device space 120.

[0188] <Operating Examples of Travel Mechanisms, etc., in Independent Maintenance Mode> Next, the operation of the driving mechanism 420, etc., in the independent maintenance mode will be explained, and the operation of the replacement unit 411 during driving will be described. Figures 10A to 10C Figures 1 to 3 are examples of the operation of the driving mechanism, etc., in independent maintenance mode.

[0189] As instructions based on the work content, the traveling mechanism 420 receives from the traveling mechanism management department 620: • Information used to determine the workpiece 410 traveling in the travel space 110: the replacement unit determined by RP2 in the replacement unit 411; • The travel path of the workpiece 410 traveling in the travel space 110: on the track determined by R6 in the track 422, the travel path from the preparation space 111 to the cover determined by S8 in the cover 424. • Opening position of the driving space 110: The cover portion 424 is defined by S8 (in the device space 120, the position of the replacement unit 411 connected to the substrate processing system 142_2 is defined by RP2). • Information used to determine the substrate processing system and unit to be maintained: the replacement unit determined by RP2 in the replacement unit 411 of the substrate processing system 142_2; wait.

[0190] Therefore, the changing mechanism 421 of the travel mechanism 420 changes the track width determined by R6 in order to form a track width that adapts to the size of the replacement unit 411. Furthermore, the changing mechanism 421 of the travel mechanism 420 moves the track outside the range determined by R6, from the preparation space 111 to the cover determined by S8, to a position outside the opening position. Then, the opening mechanism 423 of the travel mechanism 420 opens the ground of the travel space 110 by sliding the cover determined by S8 in the cover portion 424.

[0191] Figure 10AThis demonstrates how the track, defined by R6, extending from the preparation space 111 to the cover defined by S8, is moved to a position outside the opening. Furthermore, Figure 10A This demonstrates how the track width, determined by R6, is adjusted to create a track width compatible with the dimensions of the replacement unit 411. Furthermore, Figure 10A It shows the cover, defined by S8, being slid open, creating an opening in the floor of the driving space 110.

[0192] Next, as instructions based on the work content, the lifting mechanism 450 receives from the lifting mechanism management department 640: • Information used to determine the working body 410 to be lifted: the replacement unit determined by RP2 in the replacement unit 411; • Opening position of the driving space 110: The cover portion 424 is defined by S8 (in the device space 120, the position of the replacement unit 411 connected to the substrate processing system 142_2 is defined by RP2). • Information used to determine the connection points at both ends of the lifting track: the track determined by R6 in track 422, and the support track r2 of the replacement unit determined by RP2 in the replacement unit 411 of the support substrate processing system 142_2 in the device space 120; wait.

[0193] Therefore, the lifting mechanism 450 adjusts the track width of the lifting track, determined by R8, to a track width that is compatible with the dimensions of the replacement unit 411. Based on this, • The track defined by R6, extending from the preparation space 111 to the cover defined by S8; and • The support track r2 of the replacement unit determined by RP2 in the replacement unit 411 of the support substrate processing system 142_2; Connect them.

[0194] Figure 10B This demonstrates how a lifting track, defined by R8, with a track width adjusted to fit the dimensions of the replacement unit 411, can be used to lift... • The track extending from the section defined by R6 to the cover section defined by S8; and • Support rail r2 that supports the replacement unit as determined by RP2; This is what it looks like when connected.

[0195] Figure 10C The image shows the replacement unit, defined by RP2, separating from the substrate processing system 142_2 in the device space 120 and autonomously moving towards the preparation space 111 on the lifting track defined by R8 and the track defined by R6.

[0196] <Example of the operation of the driving mechanism in normal mode> Next, the operation of the inspection robot 414 during its operation will be explained, based on the operation of the driving mechanism 420 in normal mode. Figure 11 This is a diagram illustrating an example of how the driving mechanism operates in normal mode.

[0197] As instructions based on the work content, the traveling mechanism 420 receives from the traveling mechanism management department 620: • Information used to determine the track of the object being inspected: the track defined by R1 to R6 in track 422; wait.

[0198] Therefore, in order to form a track width that is compatible with the size of the inspection robot 414, the changing mechanism 421 of the traveling mechanism 420 changes the track width of each track determined by R1 to R6.

[0199] Next, as instructions based on the task content, the inspection robot 414 receives instructions from the task management department 610: • Information used to determine the track for which the inspection operation will be carried out: the track determined by R1 to R6 in track 422; • The travel path when inspecting the track of the object being inspected is: R1→R2→R3→R4→R5→R6; • The procedure for inspecting the track of the object being inspected is as follows: while taking pictures of the track of the object being inspected, the vehicle travels back and forth, and checks for any abnormalities based on the image data. wait.

[0200] Thus, the inspection robot 414 starts from the track 422 determined by R1 and travels back and forth in sequence to check for any abnormalities in each track determined by R1 to R6.

[0201] Figure 11 The demonstration showed that after the tracks defined by R1 to R6 were changed to track widths adapted to the size of the inspection robot 414, the inspection robot 414 moved back and forth along the tracks in sequence starting from R1, thereby checking for any abnormalities based on the image data.

[0202] <Example of Lifting Mechanism Operation in Independent Maintenance Mode> Next, the operation of the lifting mechanism 450 in the independent maintenance mode will be explained, as well as the operation of the replacement unit 411 when it is autonomously driven. Figures 12A-12D Figures 1 through 4 illustrate an example of the operation of the lifting mechanism in independent maintenance mode.

[0203] As instructions based on the work content, the lifting mechanism 450 receives from the lifting mechanism management department 640: • Information used to determine the working body 410 to be lifted: the replacement unit determined by RP2 in the replacement unit 411; • Opening position of the driving space 110: The cover portion 424 is defined by S8 (in the device space 120, the position of the replacement unit 411 connected to the substrate processing system 142_2 is defined by RP2). • Information used to determine the connection points at both ends of the lifting track: the track determined by R6 in track 422, and the support track r2 of the replacement unit determined by RP2 in the replacement unit 411 of the support substrate processing system 142_2 in the device space 120; wait.

[0204] Therefore, the lifting mechanism 450 moves to the position of the cover determined by S8, and after removing the lifting rail 452, the rail width is adjusted to match the size of the replacement unit 411. Based on this, it is extended... • The track R6_1, defined by R6, extends from the preparation space 111 to the cover defined by S8; and • Support rail r2 that supports the replacement unit as determined by RP2; Connect them.

[0205] Figure 12A The image shows the lifting mechanism 450 responding to an instruction based on the work content, with the setting mechanism 451 of the lifting mechanism 450 moving to the position of the cover determined by S8, and then taking out the stored lifting rail 452.

[0206] Furthermore, assuming that the setting mechanism 451 is configured as follows: Figure 12A It can move along the depth direction of the paper. In addition, it is assumed that the lifting track 452 is stored in the setting mechanism 451 in a folded state.

[0207] also, Figure 12B The image shows the lifting track 452, which has been removed from the setting mechanism 451, being adjusted to a track width that is compatible with the size of the replacement unit 411.

[0208] also, Figure 12C The lifting track 452 was shown to be extended and adjusted to fit the connection. • Track R6_1, defined by R6, extends from the preparation space 111 to the cover defined by S8; and • Support rail r2 that supports the replacement unit as determined by RP2; The length of the object.

[0209] also, Figure 12C This demonstrates that the position and attitude of the lifting track 452 are controlled, enabling... One end of the lifting track 452 is connected to track R6_1, which extends from the preparation space 111 to the cover portion defined by S8, within the track defined by R6. The other end of the lifting track 452 is connected to the support track r2 that supports the replacement unit determined by RP2. It looks like that.

[0210] and then, Figure 12D Demonstrated through One end of the lifting track 452 is connected to track R6_1, which extends from the preparation space 111 to the cover portion defined by S8, within the track defined by R6. The other end of the lifting track 452 is connected to the support track r2 that supports the replacement unit determined by RP2. This makes it possible for the replacement unit 411 to drive autonomously.

[0211] <Example of Lifting Mechanism Operation in Maintenance Mode> Next, the operation of the lifting mechanism 450 in maintenance mode will be explained when the work robot 412 is in motion. Figures 13A-13B Figures 1 and 2 show an example of the operation of the lifting mechanism in maintenance mode.

[0212] As instructions based on the work content, the lifting mechanism 450 receives from the lifting mechanism management department 640: • Information used to determine the lifting and lowering workpiece 410: work robot 412; • Opening position of the travel space 110: The cover portion defined by S8 in the cover portion 424 (in the device space 120, the cover portion located directly above the travel path extending from the substrate processing system 142_2). • Information used to determine the connection points at both ends of the lifting track: the track defined by R6 in track 422, and the travel path extending from the substrate processing system 142_2 in the device space 120; wait.

[0213] Therefore, the lifting mechanism 450 moves to the position of the cover determined by S8, and adjusts the width of the lifting track 452 to a width that is compatible with the size of the working robot 412. Based on this, it extends... • The track R6_1, defined by R6, extends from the preparation space 111 to the cover defined by S8; and • A travel path extending from the substrate processing system 142_2; Connect them.

[0214] Figure 13AThis demonstrates how, in response to receiving an instruction based on the work content, the setting mechanism 451 of the lifting mechanism 450 moves to the position of the cover determined by S8. Furthermore, Figure 13A The image shows the lifting mechanism 450's setting mechanism 451 taking out and storing the lifting track 452, and adjusting the track width as it extends.

[0215] also, Figure 13B The lifting track 452 was displayed. • The length of track R6_1, which is adjusted to fit the range from the preparation space 111 to the cover portion defined by S8, within the track defined by R6, and the length of the travel path extending from the substrate processing system 142_2. • The track width was adjusted to fit the dimensions of the 412-operation robot. • One end of the lifting track 452 is connected to track R6_1, which extends from the preparation space 111 to the cover portion defined by S8, within the track defined by R6. The other end of the lifting track 452 is connected to a travel path extending from the substrate processing system 142_2. It looks like that.

[0216] <Example of crane mechanism operation in maintenance mode> Next, the operation of the crane mechanism 431 in maintenance mode will be described when it is a unit of the transfer substrate processing system 141_2 that can be disassembled from a vertically upward position. Figures 14A to 14D Figures 1 through 4 show an example of the operation of a crane mechanism in maintenance mode.

[0217] As instructions based on the work content, crane mechanism 431 receives from crane mechanism management department 630: • Information used to determine the substrate processing system and unit to be maintained: In the substrate processing system 141_2, the unit determined by U1 among the units that can be removed from the upper position in the vertical direction; wait.

[0218] As a result, the crane mechanism 431 moves to the substrate processing system 141_2 at the transport destination, and removes the unit determined by U1 from the unit that can be removed from the vertically upward position from the substrate processing system 141_2.

[0219] Figure 14A The image shows the unit, determined by U1, being removed from the substrate processing system 141_2 and then lifted upwards by the crane mechanism 431.

[0220] Next, the crane mechanism 431 transports the unit determined by U1 to the preparation space 121. Figure 14B The image shows the unit defined by U1 being moved to the preparation space 121 by the crane mechanism 431 and placed inside the preparation space 121.

[0221] Next, the crane mechanism 431 transports the newly installed unit, which is detachable from the vertically upward position, to the substrate processing system 141_2.

[0222] Figure 14C The image shows a unit, defined by U1', being lifted by a crane mechanism 431 and transported to the substrate processing system 141_2 as a newly installed unit on the substrate processing system 141_2.

[0223] Next, the crane mechanism 431 transports the unit determined by U1' to the position of the substrate processing system 141_2, and lowers it vertically from directly above the substrate processing system 141_2. Thus, the unit determined by U1' is installed onto the substrate processing system 141_2.

[0224] Figure 14D The image shows the unit, determined by U1', being transported by the crane mechanism 431 and mounted onto the substrate processing system 141_2.

[0225] <Processing flow under normal operating mode of maintenance system> Next, the processing flow of the maintenance operation system 400 according to the first embodiment will be described. Figure 15 It is a sequence diagram that represents the processing flow related to maintenance tasks in the normal mode of the maintenance operation system.

[0226] In step S1501, the substrate processing systems 141_1 to 142_2 measure the component consumption at a predetermined cycle and send the measured information on component consumption or information on components that need to be replaced to the management system 440.

[0227] In step S1502, the management system 440 determines the necessity of replacement based on the received information about consumption levels, etc.

[0228] In step S1503, the management system 440 formulates a maintenance schedule for the substrate processing systems whose components are determined to require replacement. As part of the maintenance schedule, the management system 440 determines: • Substrate processing systems and units that are the targets of maintenance operations; Maintenance work content; • Regarding the timing of maintenance work for each type of maintenance task; wait.

[0229] In step S1504, the management system 440 manages the inventory of spare parts for maintenance operations and orders spare parts for maintenance operations based on the maintenance schedule.

[0230] In step S1505, the management system 440 sends the determination result from step S1502 to the substrate processing systems 141_1 to 142_2.

[0231] In step S1506, the management system 440 sends a maintenance schedule to the substrate processing system that is determined to require replacement of components.

[0232] In step S1507, the management system 440 sends a maintenance schedule to the work entity 410 related to the maintenance operation.

[0233] In step S1508, the management system 440 sends a maintenance schedule to the portable terminal 460.

[0234] In step S1509, the management system 440 sends an instruction to the travel mechanism 420 based on the work content regarding the inspection of track 422.

[0235] In step S1510, the management system 440 sends an instruction based on the job content to the inspection robot 414 of the work body 410 regarding the inspection of track 422.

[0236] In step S1511, the inspection robot 414 of the work body 410 inspects the track 422.

[0237] In step S1512, the inspection robot 414 of the work body 410 sends the inspection results of the track 422 to the management system 440.

[0238] In addition, Figure 15 In the example, as a normal mode process, it is explained that track 422 is checked in steps S1509 to S1512, but track 422 does not need to be checked every time in normal mode. For example, it can also be configured to be performed only when it is determined to be necessary.

[0239] <Processing flow in the stand-alone maintenance mode of the maintenance operation system> Next, the processing flow of the maintenance operation system 400 according to the first embodiment in the independent maintenance mode will be described. Figure 16 It is a sequence diagram representing the processing flow related to maintenance operations in the independent maintenance mode of the maintenance operation system.

[0240] In step S1601, the management system 440 queries the substrate processing systems 141_1 to 142_2 to see if it can switch to independent maintenance mode.

[0241] In step S1602, the substrate processing systems 141_1 to 142_2 determine whether they can switch to independent maintenance mode and send the determination result to the management system 440.

[0242] In step S1603, the management system 440 receives the result of whether the switch to independent maintenance mode is possible and sends an independent maintenance mode switch instruction to the switchable substrate processing system.

[0243] In step S1604, the substrate processing system that received the conversion instruction switches to independent maintenance mode and notifies the management system 440 that the conversion is complete.

[0244] In step S1605, the management system 440 sends an instruction based on the work content for the maintenance work determined in the maintenance schedule to the driving mechanism 420.

[0245] In step S1606, the changing mechanism 421 and the opening mechanism 423 of the traveling mechanism 420 control the track 422 and the cover 424 according to the instructions based on the work content.

[0246] In step S1607, the management system 440 sends instructions based on the job content to the replacement unit determined by RP2 and the replacement unit determined by RP2' in the replacement unit 411 of the work body 410.

[0247] In step S1608, the management system 440 sends instructions based on the work content to the lifting mechanism 450.

[0248] In step S1609, after the setting mechanism 451 of the lifting mechanism 450 moves according to the instructions based on the work content, it controls the lifting track 452.

[0249] In step S1610, the management system 440 sends a driving start instruction (separation) to the replacement unit determined by RP2 in the replacement unit 411 of the work body 410.

[0250] In step S1611, the replacement unit determined by RP2 (the replacement unit of the substrate processing system 142_2 that has been switched to independent maintenance mode) in the replacement unit 411 of the work body 410 is separated from the substrate processing system 142_2. Then, the replacement unit determined by RP2 arrives at the preparation space by starting to autonomously travel towards the preparation space 111.

[0251] In step S1612, the replacement unit determined by RP2 in the replacement unit 411 of the work body 410 sends a message to the management system 440 that the separation has been completed.

[0252] In step S1613, the management system 440 sends a driving start instruction (connection) to the replacement unit determined by RP2 in the replacement unit 411 of the work body 410, which is newly connected to the substrate processing system.

[0253] In step S1614, the replacement unit determined by RP2 in the replacement unit 411 of the work body 410 begins autonomous driving, moving from the preparation space 111 to the travel space 110, and after traveling within the travel space 110, it moves to the device space 120. Furthermore, the replacement unit determined by RP2 in the replacement unit 411 of the work body 410 is integrated into the substrate processing system 142_2, which has been switched to independent maintenance mode, in the device space 120.

[0254] In step S1615, when the replacement unit determined by RP2 in the replacement unit 411 of the work body 410 has completed its connection with the substrate processing system 142_2 which has been switched to independent maintenance mode, it sends the connection completion message to the management system 440.

[0255] In step S1616, the management system 440 instructs the lifting mechanism 450 to restore the state before sending the instruction based on the job content.

[0256] In step S1617, the setting mechanism 451 of the lifting mechanism 450 returns to the state before sending instructions based on the work content by storing the lifting rail 452.

[0257] In step S1618, the replacement unit in the replacement unit 411 of the work body 410, determined by RP2, generates work history information.

[0258] In step S1619, the replacement unit determined by RP2 in the replacement unit 411 of the work body 410 sends the work history information to the management system 440.

[0259] In addition, Figure 16 The example illustrates a scenario where the transition to independent maintenance mode is triggered by an inquiry from the management system 440, but the transition to independent maintenance mode can also be triggered by a request from the baseboard processing systems 141_1 to 142_2.

[0260] Examples of cases where a switch to maintenance mode is triggered by a request from the substrate processing systems 141_1 to 142_2 include: • Situations that change as a result of a fault; • Situations arising from the operation of autonomous devices; • Situations requiring conversion due to the need for coordinated operation with the work robot; wait.

[0261] <Processing flow under maintenance mode of maintenance operation system (1)> Next, the processing flow in the maintenance mode of the maintenance operation system 400 according to the first embodiment will be described. Figure 17A This is the first sequence diagram representing the processing flow related to maintenance operations in the maintenance mode of the maintenance operation system.

[0262] In step S1701, the management system 440 queries the substrate processing systems 141_1 to 142_2 to see if it can switch to maintenance mode.

[0263] In step S1702, the substrate processing systems 141_1 to 142_2 determine whether they can switch to maintenance mode and send the determination result to the management system 440.

[0264] In step S1703, the management system 440 receives the result of whether the switch to maintenance mode is possible and sends a maintenance mode switch instruction to the switchable substrate processing system.

[0265] In step S1704, the substrate processing system that received the conversion instruction switches to maintenance mode and notifies the management system 440 that the conversion is complete.

[0266] In step S1705, the management system 440 sends an instruction based on the work content for the maintenance work determined in the maintenance schedule to the driving mechanism 420.

[0267] In step S1706, the changing mechanism 421 and the opening mechanism 423 of the traveling mechanism 420 control the track 422 and the cover 424 according to the instructions based on the work content.

[0268] In step S1707, the management system 440 sends instructions based on the task content to the task robot 412 of the task body 410.

[0269] In step S1708, the management system 440 sends a light-emitting start instruction to the light-emitting unit 433. The light-emitting start instruction sent to the light-emitting unit 433 includes information about the travel path of the work robot 412 within the travel space 110.

[0270] In step S1709, the light-emitting unit 433 emits light according to the travel path of the work robot 412 within the travel space 110. Thus, the light-emitting unit 433 can guide the work robot 412 towards the substrate processing system, which is the object of maintenance work, within the device space 120.

[0271] In step S1710, the management system 440 sends instructions based on the work content to the lifting mechanism 450.

[0272] In step S1711, after the setting mechanism 451 of the lifting mechanism 450 moves according to the instructions based on the work content, it controls the lifting track 452.

[0273] In step S1712, the management system 440 sends a driving start instruction (path) to the working robot 412 of the working body 410.

[0274] In step S1713, the work robot 412 of the work body 410 autonomously travels within the travel space 110 and moves to the device space 120 via the lifting track 452. Furthermore, the work robot 412, which has moved to the device space 120, travels within the device space 120 guided by the light-emitting part 433, and moves to the position of the substrate processing system, which is the target of the maintenance work.

[0275] In step S1714, the working robot 412 notifies the management system 440 that autonomous driving has been completed.

[0276] In step S1715, the work robot 412 of the work unit 410 performs maintenance work on the substrate processing system, which is the object of maintenance work. After the maintenance work on the substrate processing system is completed, the process proceeds to step S1716.

[0277] In step S1716, the management system 440 sends a driving start instruction (return route) to the working robot 412 of the working body 410.

[0278] In step S1717, the work robot 412 of the work body 410, guided by the light-emitting part 433 in the device space 120, travels within the device space 120 and moves to the position of the lifting track 452. Furthermore, the work robot 412 moves to the travel space 110 via the lifting track 452, and then moves autonomously within the travel space 110 to the preparation space 111.

[0279] In step S1718, the work robot 412 of the work body 410 sends the message that the maintenance work has been completed to the management system 440.

[0280] In step S1719, the management system 440 sends a light emission stop instruction to the light-emitting unit 433.

[0281] In step S1720, the light-emitting unit 433 stops emitting light according to the light-emitting stop instruction from the management system 440.

[0282] In step S1721, the management system 440 instructs the lifting mechanism 450 to restore the state before sending the instruction based on the job content.

[0283] In step S1722, the setting mechanism 451 of the lifting mechanism 450 returns to the state before sending instructions based on the work content by storing the lifting rail 452.

[0284] In step S1723, the work robot 412 of the work body 410 generates work history information.

[0285] In step S1724, the work robot 412 of the work body 410 sends the work history information to the management system 440.

[0286] In addition, Figure 17A The example illustrates a case where the transition to maintenance mode is triggered by an inquiry from the management system 440, but the transition to maintenance mode can also be triggered by a request from the baseboard processing systems 141_1 to 142_2.

[0287] <Processing flow under maintenance mode of maintenance operation system (2)> Next, other processing flows under the maintenance mode of the maintenance operation system 400 according to the first embodiment will be described. Here, the case where the operation robot 412 moves autonomously within the device space 120 based on the marker 434 or on the signal from the transmitter 435 of the board processing systems 141_1 to 142_2 will be described. In addition, the case where the operation robot 412 communicates with the board processing system that is the object of the maintenance operation before the maintenance operation will be described. In addition, the case where the operator 482 approaches the operation robot 412 during the maintenance operation will be notified will be described.

[0288] Figure 17B This is the second sequence diagram representing the processing flow related to maintenance tasks in the maintenance mode of the maintenance operation system. Additionally, because... Figure 17A The processing outside the shaded areas is common, therefore in Figure 17B In the middle, only those corresponding to Figure 17A Treatment of shaded areas.

[0289] In step S1731, the management system 440 sends instructions based on the task content to the task robot 412 of the task body 410.

[0290] In step S1732, the management system 440 sends instructions based on the work content to the lifting mechanism 450.

[0291] In step S1733, after the setting mechanism 451 of the lifting mechanism 450 moves according to the instructions based on the work content, it controls the lifting track 452.

[0292] In step S1734, the management system 440 sends a driving start instruction (path) to the working robot 412 of the working body 410.

[0293] In step S1735, the work robot 412 of the work body 410 autonomously travels within the travel space 110 and moves to the device space 120 via the lifting track 452. Furthermore, the work robot 412, having moved to the device space 120, calculates its current position while autonomously traveling within the device space 120 by capturing a marker 434 or by receiving a signal from a transmitter 435. Thus, the work robot 412 moves to the location of the substrate processing system, the object of the maintenance work.

[0294] In step S1736, the robot 412 notifies the management system 440 that autonomous driving has been completed.

[0295] In step S1737, the work robot 412 of the work body 410 communicates with the baseboard processing system, which is the object of the maintenance work, to inquire whether the current mode of the baseboard processing system, which is the object of the maintenance work, has been switched to the maintenance mode.

[0296] In step S1738, the substrate processing system, which is the object of the maintenance operation, notifies the operation robot 412 that the current mode has been switched to maintenance mode in response to the inquiry.

[0297] In step S1739, the work robot 412 of the work unit 410 performs maintenance work on the substrate processing system, which is the object of maintenance work. During the maintenance work, the work robot 412 of the work unit 410 monitors whether there are workers 482 in the work area.

[0298] In step S1740, the work robot 412 of the work body 410 detects the work personnel 482 in the work area.

[0299] In step S1741, the working robot 412 of the working body 410 sends the detection results to the management system 440.

[0300] In step S1742, the management system 440 determines that the work robot 412 of the work body 410 is performing maintenance work on the baseboard processing system, and sends a detection result indicating that there are workers in the work area of ​​the work robot 412 to the determined baseboard processing system.

[0301] In step S1743, the substrate processing system, based on the detection results sent from the management system 440, for example by lighting up an LED, notifies the operator 482 that they have entered the work area of ​​the work robot 412, thereby attracting their attention.

[0302] In step S1744, the management system 440 identifies the operator 482 within the working area of ​​the robot 412 and sends a detection result indicating that the operator 482 has entered the working area of ​​the robot 412 to the portable terminal 460 of the identified operator 482.

[0303] In step S1745, the portable terminal 460, based on the detection results sent from the management system 440, notifies the operator 482 that they have entered the working area of ​​the work robot 412 of the work body 410, thereby drawing their attention.

[0304] After the maintenance work on the substrate processing system, which is the object of the maintenance work, is completed, step S1746 is entered.

[0305] In step S1746, the management system 440 sends a driving start instruction (return route) to the working robot 412 of the working body 410.

[0306] In step S1747, the work robot 412 of the work body 410 autonomously travels within the device space 120 and moves to the position of the lifting track 452. In addition, the work robot 412 moves to the travel space 110 via the lifting track 452, and moves to the preparation space 111 by autonomously traveling within the travel space 110.

[0307] In step S1748, the work robot 412 of the work body 410 sends the message that the maintenance work has been completed to the management system 440.

[0308] In step S1749, the work robot 412 instructs the lifting mechanism 450 to return to the state before sending the instruction based on the work content.

[0309] In step S1750, the setting mechanism 451 of the lifting mechanism 450 returns to the state before sending instructions based on the work content by storing the lifting rail 452.

[0310] In step S1751, the work robot 412 of the work body 410 generates work history information.

[0311] In step S1752, the work robot 412 of the work body 410 sends the work history information to the management system 440.

[0312] <Processing flow under maintenance mode of maintenance operation system (3)> Next, other processing flows in the maintenance mode of the maintenance operation system 400 according to the first embodiment will be described. Here, we will describe the situation where the operation robot 412 communicates with the portable terminal 460 of the operator 482 and receives voice instructions from the operator 482 during maintenance operations.

[0313] Figure 17C This is the third sequence diagram, representing the processing flow related to maintenance tasks in the maintenance mode of the maintenance operation system. Additionally, in Figure 17C In China, due to Figure 17A The processing outside the shaded areas is common, therefore in Figure 17C In the middle, only those corresponding to Figure 17A The treatment of shadowed areas. Furthermore, in Figure 17C In the processing shown, for the case of... Figure 17B The processes shown are the same, marked with the same symbols and the descriptions are omitted. Figure 17C In the processing shown, with Figure 17B The different processing steps are S1761 to S1763.

[0314] In the maintenance work of the work robot 412, if the operator 482 changes the work content of the work robot 412 (for example, including stopping the maintenance work), the operator 482 gives voice instructions to the portable terminal 460.

[0315] In step S1761, the portable terminal 460 receives a voice instruction from the operator 482.

[0316] In step S1762, the portable terminal 460 sends voice instructions from the operator 482 to the work robot 412 of the work body 410.

[0317] In step S1763, the work robot 412 changes the work content of the maintenance work according to the voice instructions from the operator 482, and performs the maintenance work with the changed work content.

[0318] <Instructions for replacing the unit> Next, the replacement unit 411 will be explained.

[0319] (1) Overview of unit replacement First, a summary of the replacement unit 411 will be given. Figure 18A Figure 1, which is used to illustrate the outline of the replacement unit, shows a scenario where the replacement unit 411, which is integrated with the substrate processing system 142_2, is separated.

[0320] in, Figure 18A (a-1) shows a side view of the state in which the replacement unit 411, as determined by RP2, is integrated with the substrate processing system 142_2. Furthermore, Figure 18A (b-1) shows a front view of the state in which the replacement unit 411, as determined by RP2, is integrated with the substrate processing system 142_2.

[0321] like Figure 18AAs shown in (a-1) or (b-1), in the state of being combined with the substrate processing system 142_2, the replacement unit in the replacement unit 411, which is determined by RP2, is supported by the support track r2.

[0322] Figure 18A (a-2) shows a side view of the state in which the lifting track 452 is connected to the support track r2 of the replacement unit, which is defined by RP2, in the support replacement unit 411. Furthermore, Figure 18A (b-2) shows a front view of the state of the lifting track 452 connected to the support track r2 of the replacement unit determined by RP2 in the support replacement unit 411.

[0323] like Figure 18A As shown in (a-2) or (b-2), the replacement unit in the replacement unit 411, determined by RP2, is separated from the substrate processing system 142_2 by connecting the lifting track 452.

[0324] Figure 18A (a-3) shows a side view of the replacement unit 411, determined by RP2, in which it begins autonomous driving and moves towards the travel space 110 via the lifting track 452. Furthermore, Figure 18A (b-3) shows a front view of the state in which the replacement unit 411, determined by RP2, begins to move autonomously and moves to the travel space 110 via the lifting track 452.

[0325] like Figure 18A As shown in (a-3) or (b-3), since the replacement unit determined by RP2 in replacement unit 411 begins autonomous operation, the back wall 1830 within the substrate processing system 142_2 is exposed. Additionally, as... Figure 18A As shown in (b-3), a mounting part for fixing the replacement unit determined by RP2 in the replacement unit 411 is provided on the back wall 1830.

[0326] Figure 18B This is Figure 2, used to illustrate the overview of the replacement unit. Figure 18B The example illustrates a scenario where, in a substrate processing system 142_2 where the replacement units determined by RP2 in replacement unit 411 have been separated, the replacement units determined by RP2' are combined as a new replacement unit 411.

[0327] in, Figure 18B (a-1) shows a side view of the replacement unit 411, determined by RP2', descending from the travel space 110 along the lifting track 452, with the lifting track 452 connected. Furthermore, Figure 18B(b-1) shows a front view of the state before the replacement unit 411, determined by RP2', descends from the travel space 110 along the lifting track 452, with the lifting track 452 connected.

[0328] Figure 18B (a-2) shows a side view of the replacement unit 411, determined by RP2', after it has moved along the support rail r2 and is fixed to the mounting parts 1831-1834. Furthermore, Figure 18B (b-2) shows a front view of the state in which the replacement unit 411, determined by RP2', is fixed to the mounting parts 1831-1834 after moving along the support rail r2.

[0329] Figure 18B (a-3) shows a side view of the substrate processing system 142_2, which incorporates a replacement unit defined by RP2' as a replacement unit 411, after the lifting track 452 has been removed. Furthermore, Figure 18B (b-3) shows a front view of the state after the lifting track 452 has been removed from the substrate processing system 142_2, which incorporates the replacement unit determined by RP2' as the replacement unit 411.

[0330] (2) Functional configuration of the replacement unit Next, the functional configuration of the replacement unit 411 will be explained. Figure 19 This diagram illustrates an example of the functional configuration of a unit that can be replaced. For example... Figure 19 As shown, the replacement unit 411 includes a processing device 1910, a control device 1920, a sensor 1941, a driving device 1942, a sensor 1943, and a loading / unloading device 1944.

[0331] When the processing device 1910 is in a state where the replacement unit 411 is, for example, combined with the substrate processing system 142_2, it performs a part of the substrate processing while communicating with the substrate processing system 142_2 during the substrate processing in normal mode.

[0332] The control device 1920 functions when the replacement unit 411 is separated from the substrate processing system 142_2, or when it autonomously travels from the substrate processing system 142_2 to the preparation space 111 after separation. Furthermore, the control device 1920 functions when the replacement unit 411 autonomously travels from the preparation space 111 to the substrate processing system 142_2 before being attached to the substrate processing system 142_2, or when it is attached to the substrate processing system 142_2.

[0333] Sensor 1941 consists of various sensors (such as cameras, laser rangefinders, etc.) used by the replacement unit 411 during autonomous driving, which transmit the measured sensor data (such as image data, distance data, etc.) to the control unit 1920. The driving unit 1942 moves the replacement unit 411 based on the control instructions from the control unit 1920.

[0334] Sensor 1943 is a variety of sensors used by the replacement unit 411 when it is attached to or detached from the substrate processing system 142_2, and sends sensor data indicating whether it has been attached or detached to the control device 1920. The loading / unloading device 1944, based on control instructions from the control device 1920, either detaches the replacement unit 411 from the substrate processing system 142_2 or attaches the replacement unit 411 to the substrate processing system 142_2.

[0335] A control program is installed in the control device 1920. By executing this program, the control device 1920 functions as the main control unit 1930, the autonomous driving control unit 1931, the sensor data processing unit 1932, the loading and unloading control unit 1933, and the sensor data processing unit 1934.

[0336] The main control unit 1930 communicates with the management system 440 while controlling the entire control device 1920.

[0337] When the main control unit 1930 receives an instruction based on the task content from the management system 440, the autonomous driving control unit 1931, based on: • Information notified from the sensor data processing unit in 1932; and • Layout information of the first substrate processing plant 100 stored in the layout information storage unit 1935; Control instructions are generated to enable the replacement unit 411 to drive autonomously. Furthermore, the autonomous driving control unit 1931 sends the generated control instructions to the driving device 1942. Additionally, upon completion of autonomous driving, the autonomous driving control unit 1931 sends a notification of separation completion to the management system 440 via the main control unit 1930.

[0338] The sensor data processing unit 1932 processes sensor data (such as image data, distance data, etc.) received from the sensor 1941 to determine the moving track 422 (or the lifting track 452) and notifies the autonomous driving control unit 1931. Furthermore, the sensor data processing unit 1932 processes sensor data (such as image data, distance data, etc.) received from the sensor 1941 to determine its position on the moving track 422 (or the lifting track 452) and notifies the autonomous driving control unit 1931.

[0339] The loading and unloading control unit 1933 sends a control instruction to the loading and unloading device 1944 to separate the replacement unit 411 from the substrate processing system 142_2. In addition, in response to the transmission of the control instruction for separation, the loading and unloading control unit 1933 identifies that the replacement unit 411 has been separated from the substrate processing system 142_2 based on the information notified from the sensor data processing unit 1934.

[0340] Furthermore, the loading / unloading control unit 1933 sends a control instruction to the loading / unloading device 1944 to engage the replacement unit 411 with the substrate processing system 142_2. In response to the control instruction for engagement, the loading / unloading control unit 1933 identifies that the replacement unit 411 has been engaged with the substrate processing system 142_2 based on information received from the sensor data processing unit 1934. Then, the loading / unloading control unit 1933 sends a notification to the management system 440 via the main control unit 1930 that engagement has been completed.

[0341] The sensor data processing unit 1934 processes the sensor data notified from the sensor 1943, for example, detecting the loading and unloading status of the mounting units 1831 to 1834 for the substrate processing system 142_2, and notifies the loading and unloading control unit 1933.

[0342] (3) Separation process for replacement unit Next, the process of the replacement unit 411 being separated from the substrate processing system 142_2 and autonomously moving to the preparation space 111 will be described. Figure 20A This is a flowchart illustrating the separation process for replacing units in independent maintenance mode.

[0343] In step S2001, the replacement unit 411 receives instructions based on the job content from the management system 440.

[0344] In step S2002, the replacement unit 411 determines whether the substrate processing system 142_2 has been switched to independent maintenance mode. If, in step S2002, it is determined that the system has not been switched to independent maintenance mode (if step S2002 is negative), the system waits until it is switched to independent maintenance mode. On the other hand, if, in step S2002, it is determined that the system has been switched to independent maintenance mode (if step S2002 is positive), the process proceeds to step S2003.

[0345] In step S2003, the replacement unit 411 determines whether it has received a driving start instruction (separation) from the management system 440. If, in step S2003, it is determined that no driving start instruction (separation) has been received (if step S2003 is negative), it waits until a driving start instruction (separation) is received. On the other hand, if, in step S2003, it is determined that a driving start instruction (separation) has been received (if step S2003 is positive), it proceeds to step S2004.

[0346] In step S2004, the replacement unit 411 is disconnected from the mounting parts 1831 to 1834 and separated from the substrate processing system 142_2.

[0347] In step S2005, the replacement unit 411 moves autonomously on the lifting track 452 and track 422 to the preparation space 111.

[0348] In step S2006, the replacement unit 411 notifies the management system 440 that the separation has been completed.

[0349] (4) Replacing unit assembly process Next, the process of replacing unit 411 until it is integrated into the substrate processing system 142_2 will be described. Figure 20B This is a flowchart illustrating the combined processing flow of unit replacement in independent maintenance mode.

[0350] In step S2011, the replacement unit 411 receives instructions based on the job content from the management system 440.

[0351] In step S2012, the replacement unit 411 determines whether a driving start instruction (connection) has been received from the management system 440. If, in step S2012, it is determined that a driving start instruction (connection) has not been received (if step S2012 is negative), then it waits until a driving start instruction (connection) is received. On the other hand, if, in step S2012, it is determined that a driving start instruction (connection) has been received (if step S2012 is positive), then it proceeds to step S2013.

[0352] In step S2013, the replacement unit 411 moves autonomously on the track 422 and the lifting track 452, moving from the preparation space 111 to the substrate processing system 142_2.

[0353] In step S2014, the replacement unit 411 is attached to the mounting portions 1831 to 1834 of the substrate processing system 142_2. Thus, the replacement unit 411 is fixed to the substrate processing system 142_2.

[0354] In step S2015, the replacement unit 411 notifies the management system 440 that the combination has been completed.

[0355] <Description of the Operation Robot> Next, we will explain the work robot 412.

[0356] (1) The composition of maintenance work of the robot First, the composition of the 412 maintenance robot will be explained. Figure 21AThis is the first figure used to illustrate the details of the work robot. (For example...) Figure 21A As shown, the work robot 412 has a manipulator 2100a and a moving body 2100b.

[0357] The mobile body 2100b is a mobile operation robot 412, which controls the overall position and posture of the operation robot 412. The mobile body 2100b has a support base 2101, a moving part 2102, and a control device 2103.

[0358] The support pedestal 2101 serves as the base for supporting the robotic arm 2100a. The moving part 2102 is controlled based on image and distance data from a camera device (not shown) and a laser rangefinder mounted on the support pedestal 2101. Thus, the moving part 2102 enables the work robot 412 to move to any position (e.g., the position of the substrate processing system 142_2). The control device 2103 controls the operation of the robotic arm 2100a and the moving part 2102.

[0359] In the maintenance work of the substrate processing systems 141_1 to 142_2, the robot arm 2100a mainly performs consumable replacement and cleaning. In addition, after the consumable replacement and cleaning, the robot arm 2100a performs work quality measurement.

[0360] like Figure 21A As shown, the robotic arm 2100a has multiple connecting parts (connecting parts 2111 to 2119).

[0361] One end of the connecting part 2111 is mounted to the moving body 2100b via a rotating part 2121 that rotates in the direction of arrow 2171. In addition, the connecting part 2111 has a lifting mechanism that moves up and down in the direction of arrow 2172, and the other end is mounted with one end of the connecting part 2112 via a rotating part 2122 that rotates in the direction of arrow 2173.

[0362] A branch portion 2130 is formed at the other end of the connecting portion 2112. A first arm, mainly used for replacing consumables and cleaning, and a second arm, used for measuring the quality of work after replacing consumables and cleaning, are installed on the branch portion 2130.

[0363] In the first arm, one end of the connecting portion 2113 is mounted to the branch portion 2130 via a rotating portion 2123 that rotates in the direction of arrow 2174, and the other end is mounted to the connecting portion 2114 via a rotating portion 2124 that rotates in the direction of arrow 2175. Furthermore, at the other end of the connecting portion 2114, one end of the connecting portion 2115 is mounted via a rotating portion 2125 that rotates in the direction of arrow 2176. And furthermore, at the other end of the connecting portion 2115, an end effector 2140 is mounted via a rotating portion 2126 that rotates in the direction of arrow 2177.

[0364] The end effector 2140 has a sensor (e.g., camera device 2127) to determine the orientation of the front end of the end effector 2140. As a result, the attitude of the first arm is controlled, and the operation of the end effector 2140 is controlled to perform consumable replacement and cleaning.

[0365] In addition, Figure 21A The example shown depicts a 5-finger type end effector as end effector 2140, but the type of end effector 2140 is not limited to this; it can be replaced with an appropriate type of end effector depending on the task. Specifically, the work robot 412 selects the end effector corresponding to the task from its own stored variety of end effectors. The end effector 2140 is detachably mounted at the rotating part 2126.

[0366] In the second arm, one end of the connecting portion 2116 is mounted to the branch portion 2130 via a rotating portion 2151 that rotates in the direction of arrow 2178, and the other end is mounted to the connecting portion 2117 via a rotating portion 2152 that rotates in the direction of arrow 2179. Furthermore, at the other end of the connecting portion 2117, one end of the connecting portion 2118 is mounted via a rotating portion 2153 that rotates in the direction of arrow 2180. Furthermore, at the other end of the connecting portion 2118, one end of the connecting portion 2119 is mounted via a rotating portion 2154 that rotates in the direction of arrow 2181. Finally, at the other end of the connecting portion 2119, a multi-sensor unit 2160 is mounted via a rotating portion 2155 that rotates in the direction of arrow 2182.

[0367] The multi-sensor unit 2160 is an example of a measuring unit, and it has various sensors (such as a camera device and a laser rangefinder). As a result, the attitude of the second arm is controlled, and the quality of consumable replacement and cleaning operations performed by the end effector 2140 is measured.

[0368] (2) Composition of the robot during operation Next, the configuration of the working robot 412 during operation will be explained. Figure 21B This is the second figure, used to illustrate the details of the work robot. For example... Figure 21B As shown, the work robot 412 has a storage section 2190 for storing the robotic arm 2100a. Before driving, the work robot 412 stores the robotic arm 2100a in the storage section 2190 and drives with the robotic arm 2100a stored in the storage section 2190.

[0369] The storage section 2190 is configured to be openable and closable. When the work robot 412 arrives at the position of the substrate processing system, which is the object of maintenance work, it sets the storage section 2190 to the open state, so that the robot arm 2100a can run.

[0370] (3) Functional composition of the operation robot Next, the functional configuration of the control device 2103 of the work robot 412 will be explained. Figure 22 This diagram illustrates an example of the functional configuration of a work robot. As described above, the work robot 412 has a robotic arm 2100a and a moving body 2100b, with a control device 2103 disposed within the moving body 2100b. Figure 22 In the example, for ease of explanation, it is shown on the outside of the moving body 2100b. Therefore, Figure 22 In the example, the moving body 2100b refers to the moving body excluding the control device 2103.

[0371] A control program is installed in the control device 2103. By executing this control program, the control device 2103 functions as follows: Figure 22 As shown, it functions as the main control unit 2210, the autonomous driving control unit 2211, the sensor data processing unit 2212, the maintenance operation control unit 2213, and the sensor data processing unit 2214.

[0372] The main control unit 2210 communicates with the management system 440, the substrate processing system 141_1 to 142_2, and the portable terminal 460, and controls the operation robot 412 as a whole.

[0373] For example, the main control unit 2210 communicates with the board processing system, which is the target of the maintenance operation, to determine whether the maintenance operation can be started. If it is determined that the operation can be started, it instructs the maintenance operation control unit 2213 to start the maintenance operation.

[0374] In addition, the main control unit 2210 communicates with the portable terminal 460 and, when it receives a voice instruction from the operator during maintenance work, instructs the maintenance operation control unit 2213 to perform maintenance work based on the voice instruction.

[0375] Autonomous Driving Control Unit 2211 is based on: • The main control unit 2210 receives instructions based on the work content from the management system 440; • Sensor data notified from the sensor data processing unit 2212; and • Layout information of the first substrate processing plant 100 stored in the layout information storage unit 2215; The autonomous driving control unit 2211 generates control instructions to enable the work robot 412 to autonomously travel to the location of the substrate processing system, which is the object of maintenance work (or to travel along the light-emitting unit 433). In addition, the autonomous driving control unit 2211 sends the generated control instructions to the mobile body 2100b.

[0376] In addition, the autonomous driving control unit 2211 sends the message that autonomous driving has been completed to the management system 440 via the main control unit 1930.

[0377] The sensor data processing unit 2212 processes sensor data received from sensors on the mobile body 2100b, such as determining the current position or detecting the light-emitting unit 433, and notifies the autonomous driving control unit 2211. Furthermore, the sensor data processing unit 2212 processes sensor data received from sensors on the mobile body 2100b, such as acquiring obstacle information, and notifies the autonomous driving control unit 2211. The sensors on the mobile body 2100b are, for example, camera devices (not shown) and laser rangefinders mounted on the support pedestal 2101, and the sensor data received from these sensors includes image data and distance data.

[0378] Maintenance Operation Control Department 2213 is based on: • Instructions based on the work content received by the main control unit 2210 from the management system 440; and • Information such as maintenance operation status notified from the sensor data processing unit 2214; The maintenance operation control unit 2213 generates control instructions for the robot 412 to perform maintenance operations. Furthermore, the maintenance operation control unit 2213 sends the generated control instructions to the robotic arm 2100a. Next, the maintenance operation control unit 2213 sends information on the completion of maintenance operations and operation history to the management system 440 via the main control unit 1930. Additionally, the maintenance operation control unit 2213 generates operation history information based on the sensor data from the generated control instructions and notifications for performing maintenance operations.

[0379] The sensor data processing unit 2214 processes the sensor data received from the sensors on the robot arm 2100a, generates information indicating the maintenance operation status of the robot arm 2100a, and notifies the maintenance operation control unit 2213.

[0380] (4) Movement processing of the operation robot Next, the processing flow of the work robot 412 until it moves to the position of the substrate processing system 142_2, which is the object of the maintenance work, will be described. Furthermore, the processing of the work robot 412 until it moves to the position of the substrate processing system 142_2, which is the object of the maintenance work, can be roughly divided into the following steps within the device space 120: • The work robot 412 moves according to the guidance of the light-emitting unit 433; • The operation robot 412 calculates its current position and moves autonomously.

[0381] Therefore, the movement processing for the two cases will be explained below.

[0382] (4-1) Movement processing when guided by the light-emitting part Figure 23A This is the first flowchart showing the movement process of the work robot in maintenance mode. It is the first flowchart showing the movement process when the robot moves from the preparation space 111 to the baseboard processing system 142_2, which is the object of maintenance work.

[0383] In step S2301, the work robot 412 receives instructions based on the work content from the management system 440.

[0384] In step S2302, the robot 412 determines whether it has received a driving start instruction (pathway) from the management system 440. If, in step S2302, it is determined that no driving start instruction (pathway) has been received (if step S2302 is negative), it waits until a driving start instruction (pathway) is received. On the other hand, if, in step S2302, it is determined that a driving start instruction (pathway) has been received (if step S2302 is positive), it proceeds to step S2303.

[0385] In step S2303, the work robot 412 autonomously travels on the track 422 within the travel space 110 and moves to the device space 120 via the lifting track 452.

[0386] In step S2304, the robot 412 determines whether it has reached the device space 120. If it is determined in step S2304 that it has not reached the device space 120 (if step S2304 is negative), it continues to drive autonomously. On the other hand, if it is determined in step S2304 that it has reached the device space 120 (if step S2304 is positive), it proceeds to step S2305.

[0387] In step S2305, the work robot 412 detects the light-emitting part 310 that is set on the ground of the device space 120 and is currently lit. Furthermore, the work robot 412 begins to move along the lit light-emitting part 310.

[0388] In step S2306, the robot 412 determines whether there are obstacles on its travel path. If it is determined that there are no obstacles (if step S2306 is negative), the robot continues to travel and proceeds to step S2309.

[0389] On the other hand, in step S2306, if it is determined that an obstacle is placed (if step S2306 is yes), then proceed to step S2307.

[0390] In step S2307, the work robot 412 avoids obstacles while driving.

[0391] In step S2308, the work robot 412 detects the illuminated light-emitting part 310 located behind the obstacle after avoidance. Then, the work robot 412 resumes its journey along the illuminated light-emitting part 310.

[0392] In step S2309, the robot 412 determines whether it has reached the target location. If, in step S2309, it is determined that the target location has not been reached (if step S2309 is negative), it returns to step S2306 and continues to travel along the light-emitting part 310. On the other hand, if, in step S2309, it is determined that the target location has been reached (if step S2309 is positive), it proceeds to step S2310.

[0393] Furthermore, when the robot 412 detects the endpoint of the illuminated light-emitting part 310, it determines that it has reached the destination position. Additionally, the endpoint of the illuminated light-emitting part 310 corresponds to the position of the substrate processing system 142_2, which is the target of the maintenance work. However, if the substrate processing system 142_2, which is the target of the maintenance work, is included within the work area of ​​the operator 482, the endpoint of the illuminated light-emitting part 310 is located in front of that work area.

[0394] In step S2310, the work robot 412 stops moving at the target position indicated by the light-emitting unit 310. Furthermore, the work robot 412 sends a notification to the management system 440 that the journey is complete.

[0395] Figure 23B This is the second flowchart showing the movement process of the work robot in maintenance mode. It is a flowchart showing the movement process when the robot returns from the baseboard processing system 142_2, which is the object of maintenance work, to the preparation space 111.

[0396] In step S2321, the robot 412 determines whether it has received a driving start instruction (return route) from the management system 440. If it is determined in step S2321 that a driving start instruction (return route) has not been received (if step S2321 is negative), it waits until a driving start instruction (return route) is received. On the other hand, if it is determined in step S2321 that a driving start instruction (return route) has been received (if step S2321 is positive), it proceeds to step S2322.

[0397] In step S2322, the work robot 412 detects the light-emitting part 310 that is lit up in the light-emitting part 310 set on the ground of the device space 120. In addition, the work robot 412 begins to move along the lit light-emitting part 310.

[0398] In step S2323, the robot 412 determines whether there are obstacles on its travel path. If, in step S2323, it is determined that there are no obstacles (if step S2323 is negative), it continues to travel and proceeds to step S2326.

[0399] On the other hand, in step S2323, if it is determined that an obstacle is placed (if step S2323 is yes), then proceed to step S2324.

[0400] In step S2324, the work robot 412 avoids obstacles while driving.

[0401] In step S2325, the work robot 412 detects the illuminated light-emitting part 310 behind the obstacle after avoidance. Then, the work robot 412 resumes its journey along the illuminated light-emitting part 310.

[0402] In step S2326, the robot 412 determines whether cleaning is required on or around its travel path. If cleaning is deemed unnecessary in step S2326 (if step S2326 is negative), the process proceeds to step S2328.

[0403] On the other hand, in step S2327, if it is determined that cleaning is required (if step S2326 is yes), then step S2327 is entered.

[0404] In step S2327, the work robot 412 moves along the path guided by the light-emitting unit 310, cleaning and moving along the path and its surroundings. Thus, on its way back to the preparation space 111 after the maintenance work is completed, the work robot 412 cleans within the device space 120 while moving, removing debris and dirt generated during the maintenance work.

[0405] In step S2328, the robot 412 determines whether it has reached the position of the lifting track 452. If, in step S2328, it is determined that the position of the lifting track 452 has not been reached (if step S2329 is negative), then the process returns to step S2323. On the other hand, if, in step S2328, it is determined that the position of the lifting track 452 has been reached (if step S2328 is positive), then the process proceeds to step S2329.

[0406] In step S2329, after the work robot 412 moves to the driving space 110 via the lifting track 452, it moves to the preparation space 111 by autonomously driving on the track 422 within the driving space 110.

[0407] In step S2330, the robot 412 determines whether it has reached the preparation space 111. If, in step S2330, it is determined that the preparation space 111 has not been reached (if step S2330 is negative), the robot continues to drive autonomously.

[0408] On the other hand, in step S2330, if it is determined that the preparation space 111 has been reached (if step S2330 is yes), then step S2331 is entered.

[0409] In step S2331, the work robot 412 sends the message that the maintenance work has been completed to the management system 440.

[0410] (4-2) Calculating the current position while driving Figure 24A This is the third flowchart showing the movement process of the work robot in maintenance mode. It is a flowchart showing the movement process when the robot moves from the preparation space 111 to the baseboard processing system 142_2, which is the object of maintenance work.

[0411] In step S2401, the work robot 412 receives instructions based on the work content from the management system 440.

[0412] In step S2402, the work robot 412 obtains information about the work area of ​​the worker 482 from the instruction based on the work content. Additionally, the instruction based on the work content received by the work robot 412 in step S2401 includes a travel path (outbound route) to the board processing system 142_2, which is the target of the maintenance work. Furthermore, as an incidental state, this travel path (outbound route) also includes information about the work area of ​​the worker 482.

[0413] In step S2403, the work robot 412 optimizes its travel path within the device space 120. Specifically, it explores the path that minimizes the travel time required while avoiding the work area of ​​the worker 482, from its position descending to the device space 120 via the lifting track 452 to the position of the substrate processing system, which is the object of maintenance work. Furthermore, when exploring the travel path, assuming that multiple travel path candidates have been pre-sent from the management system 440, the work robot 412 selects from these candidates. Additionally, regarding the required time, it refers to the travel time of each past travel path recorded in its past movement history.

[0414] In step S2404, the robot 412 determines whether it has received a driving start instruction (pathway) from the management system 440. If it is determined in step S2404 that a driving start instruction (pathway) has not been received (if step S2404 is negative), it waits until a driving start instruction (pathway) is received. On the other hand, if it is determined in step S2404 that a driving start instruction (pathway) has been received (if step S2404 is positive), it proceeds to step S2405.

[0415] In step S2405, the work robot 412 autonomously travels on the track 422 within the travel space 110 and moves to the device space 120 via the lifting track 452.

[0416] In step S2406, the robot 412 determines whether it has reached the device space 120. If it is determined in step S2406 that it has not reached the device space 120 (if step S2406 is negative), it continues to drive autonomously. On the other hand, if it is determined in step S2406 that it has reached the device space 120 (if step S2406 is positive), it proceeds to step S2407.

[0417] In step S2407, the work robot 412 calculates its current position based on a signal from the transmitter 435 of the nearby substrate processing system, or by means of a mark 434 on the ceiling surface of the imaging device space 120. Furthermore, based on its calculated current position, the work robot 412 begins autonomous driving along a path (the optimized path in step S2403) to the substrate processing system 142_2, the object of the maintenance work.

[0418] In step S2408, the robot 412 determines whether there are obstacles on its travel path. If, in step S2408, it is determined that there are no obstacles (if step S2408 is negative), it continues to travel autonomously and proceeds to step S2410.

[0419] On the other hand, in step S2408, if it is determined that an obstacle is placed (if step S2408 is yes), then proceed to step S2409.

[0420] In step S2409, the work robot 412 performs autonomous driving to avoid obstacles. After avoiding obstacles, the work robot 412 calculates its current position again and resumes autonomous driving along the path to the baseboard processing system 142_2, the object of the maintenance work.

[0421] In step S2410, the work robot 412 determines whether the area surrounding the substrate processing system 142_2, which is the object of the maintenance work, is included in the work area of ​​the worker 482. If it is determined in step S2410 that it is included in the work area of ​​the worker 482 (if step S2410 is yes), then proceed to step S2411.

[0422] In step S2411, regardless of the location of the substrate processing system 142_2, which is the object of the maintenance operation, the work robot 412 stops in front of the work area and sends a message to the management system 440 indicating that autonomous driving has been completed.

[0423] On the other hand, in step S2411, if it is determined that the work area is not included in the work area of ​​operator 482 (if step S2411 is negative), then proceed to step S2412.

[0424] In step S2412, the work robot 412 continues to autonomously travel to the location of the substrate processing system 142_2, which is the target of the maintenance work, and stops after moving to the location of the substrate processing system 142_2, which is the target of the maintenance work. In addition, the work robot 412 sends a message to the management system 440 indicating that the autonomous travel has been completed.

[0425] Figure 24B This is the fourth flowchart showing the movement process of the work robot in maintenance mode. It is a flowchart showing the movement process when returning from the baseboard processing system 142_2, which is the object of maintenance work, to the preparation space 111.

[0426] In step S2421, the work robot 412 receives instructions based on the work content from the management system 440.

[0427] In step S2422, the work robot 412 obtains information about the work area of ​​the worker 482 from the instruction based on the work content. At this time, the information about the work area of ​​the worker 482 refers to the work area where the worker 482 is still performing work when the work robot 412 completes its maintenance work. Additionally, the instruction based on the work content received by the work robot 412 in step S2421 includes a travel path (return path) to the board processing system 142_2, which is the target of the maintenance work. Furthermore, as an incidental state, this travel path (return path) also includes information about the work area of ​​the worker 482.

[0428] In step S2423, the work robot 412 optimizes the travel path within the device space 120. Specifically, it explores the path with the shortest time required while avoiding the work area of ​​the worker 482, from the location of the substrate processing system 142_2 where maintenance work has been completed to the location of the lifting track 452.

[0429] In step S2424, the robot 412 determines whether it has received a driving start instruction (return route) from the management system 440. If it is determined in step S2424 that a driving start instruction (return route) has not been received (if step S2424 is negative), it waits until a driving start instruction (return route) is received. On the other hand, if it is determined in step S2424 that a driving start instruction (return route) has been received (if step S2424 is positive), it proceeds to step S2425.

[0430] In step S2425, the work robot 412 calculates its current position based on a signal from the transmitter 435 of the nearby substrate processing system, or by means of a mark 434 on the ceiling surface of the imaging device space 120. Furthermore, based on its calculated current position, the work robot 412 begins autonomous driving along a path to the lifting track 452 (the path optimized in step S2423).

[0431] In step S2426, the robot 412 determines whether there are obstacles on its travel path. If, in step S2426, it is determined that there are no obstacles (if step S2426 is negative), the robot continues to travel autonomously and proceeds to step S2428.

[0432] On the other hand, in step S2426, if it is determined that an obstacle is placed (if step S2426 is yes), then proceed to step S2427.

[0433] In step S2427, the work robot 412 performs autonomous driving to avoid obstacles. After avoiding obstacles, the work robot 412 recalculates its current position and restarts its autonomous driving to the lifting track 452.

[0434] In step S2428, the robot 412 determines whether cleaning is required on or around its travel path. If cleaning is deemed unnecessary in step S2428 (if step S2428 is negative), the process proceeds to step S2430.

[0435] On the other hand, in step S2428, if it is determined that cleaning is required (if step S2428 is yes), then proceed to step S2429.

[0436] In step S2429, the work robot 412 autonomously travels along the optimized path while cleaning and moving along or around the path. Thus, on its way back to the preparation space 111 after maintenance, the work robot 412 cleans within the device space 120, removing debris and dirt generated during the maintenance work.

[0437] In step S2430, the robot 412 determines whether it has reached the position of the lifting track 452. If, in step S2430, it is determined that the position of the lifting track 452 has not been reached (if step S2430 is negative), then the process returns to step S2426. On the other hand, if, in step S2430, it is determined that the position of the lifting track 452 has been reached (if step S2430 is positive), then the process proceeds to step S2431.

[0438] In step S2431, after the work robot 412 moves to the driving space 110 via the lifting track 452, it moves to the preparation space 111 by autonomously driving on the track 422 within the driving space 110.

[0439] In step S2432, the robot 412 determines whether it has reached the preparation space 111. If it is determined in step S2432 that it has not reached the preparation space 111 (if step S2432 is negative), it continues to drive autonomously.

[0440] On the other hand, in step S2432, if it is determined that the preparation space 111 has been reached (if step S2432 is yes), then proceed to step S2433.

[0441] In step S2433, the work robot 412 sends the message that the maintenance work has been completed to the management system 440.

[0442] (5) Maintenance of the robot Next, the process of the work robot 412 performing maintenance work on the baseboard processing system 142_2, which is the object of maintenance work, will be described. Figure 25 This is a flowchart illustrating the maintenance operation process of the robot in maintenance mode.

[0443] In step S2501, the work robot 412 communicates with the baseboard processing system 142_2, which is the object of the maintenance operation, to confirm that the baseboard processing system 142_2, which is the object of the maintenance operation, has switched to maintenance mode.

[0444] In step S2502, the work robot 412 begins maintenance work.

[0445] In step S2503, the working robot 412 begins to monitor its surroundings.

[0446] In step S2504, the robot 412 determines whether there is a worker 482 within a specified distance of its own robot. If it is determined that there is a worker 482 in step S2504 (if step S2504 is yes), then proceed to step S2505.

[0447] In step S2505, the work robot 412 suspends the maintenance operation. Alternatively, the work robot 412 slows down the operation speed of the maintenance operation.

[0448] In step S2506, the work robot 412 sends the location information of the worker 482, which is within a specified distance of its own robot, to the management system 440.

[0449] On the other hand, if in step S2504 it is determined that there is no operator 482 (if step S2504 is negative) and maintenance work is being performed, the maintenance work continues. Furthermore, if it is determined that there is no operator 482 (if step S2504 is negative) and maintenance work has been paused or slowed down, the normal maintenance work restarts.

[0450] In step S2508, the work robot 412 determines whether it has received a voice instruction from the worker 482 via the portable terminal 460.

[0451] In step S2508, if it is determined that no voice instruction has been received (if step S2508 is negative), then proceed to step S2509. On the other hand, in step S2508, if it is determined that a voice instruction has been received (if step S2508 is positive), then proceed to step S2510.

[0452] In step S2509, the robot 412 determines whether to end the maintenance operation. If, in step S2509, it is determined that the maintenance operation has not yet ended (if step S2509 is negative), then the process returns to step S2504.

[0453] On the other hand, in step S2509, if it is determined that the maintenance operation has been completed (if step S2509 is yes), the maintenance operation processing is terminated, and the maintenance operation completion is sent to the management system 440.

[0454] In step S2510, the work robot 412 stops the maintenance work and ends the maintenance process.

[0455] <Instructions for inspecting the robot> Next, the configuration of the inspection robot 414 will be described. It is assumed that the inspection robot 414 has a moving body 2100b (refer to...) that is connected to the working robot 412. Figure 21AIt has the same configuration, but with a sensor for inspecting the track 422 mounted on the moving body 2100b.

[0456] (1) Inspect the functional composition of the robot First, the functional configuration of the control device 2103 of the inspection robot 414 will be explained as part of the functional configuration of the inspection robot 414. Figure 26 This diagram illustrates an example of the functional configuration of an inspection robot. Furthermore, similar to the work robot 412, the control device 2103 is located within the moving body 2100b, but... Figure 26 In the example, for ease of explanation, it is shown on the outside of the moving body 2100b. Therefore, Figure 26 The moving body 2100b shown refers to the moving body excluding the control device 2103.

[0457] A control program is installed in the control device 2103. By executing this control program, the control device 2103 functions as follows: Figure 26 As shown, it functions as the main control unit 2601, the autonomous driving control unit 2602, the sensor data processing unit 2603, the inspection unit 2604, and the sensor data processing unit 2605.

[0458] The main control unit 2601 communicates with the management system 440 while controlling the inspection robot 414 as a whole.

[0459] Autonomous Driving Control Unit 2602 is based on: • The main control unit 2601 receives instructions based on the work content from the management system 440; • Sensor data notified from the sensor data processing unit 2603; and • Layout information of the first substrate processing plant 100 stored in the layout information storage unit 2606; Control instructions are generated to enable the inspection robot 414 to autonomously move along the track 422 of the object being inspected. Furthermore, the autonomous movement control unit 2602 sends the generated control instructions to the moving body 2100b.

[0460] The sensor data processing unit 2603 processes sensor data received from sensors on the mobile body 2100b, such as determining the current position, and notifies the autonomous driving control unit 2602. The sensors on the mobile body 2100b mentioned here are, for example, camera devices and laser rangefinders (not shown) mounted on the support pedestal 2101, and the sensor data received from these sensors refers to image data or distance data, etc.

[0461] Based on the sensor data notified from the sensor data processing unit 2605, the inspection unit 2604 determines whether the track 422 has a fault, and sends the inspection results, including whether there is a fault, to the management system 440 via the main control unit 2601.

[0462] The sensor data processing unit 2605 detects defects in the track 422 by processing sensor data received from sensors on the moving body 2100b and notifies the inspection unit 2604. The sensors on the moving body 2100b are, for example, camera devices mounted on the support pedestal 2101, i.e., camera devices that capture images of the moving track. The sensor data received from these sensors refers to image data, etc.

[0463] (2) Inspection and processing of inspection robots Next, the process of inspection robot 414 inspecting track 422 in travel space 110 will be explained. Figure 27 This is a flowchart illustrating the inspection and processing flow of the inspection robot in normal mode.

[0464] In step S2701, the inspection robot 414 receives instructions based on the task content from the management system 440.

[0465] In step S2702, the inspection robot 414 determines whether it has received an inspection start instruction from the management system 440. If, in step S2702, it is determined that no inspection start instruction has been received (if step S2702 is negative), it waits until an inspection start instruction is received. On the other hand, if, in step S2702, it is determined that an inspection start instruction has been received (if step S2702 is positive), it proceeds to step S2703.

[0466] In step S2703, the inspection robot 414 moves to the position of the inspection object track in track 422 within the driving space 110 and begins autonomous driving.

[0467] In step S2704, the inspection robot 414 begins to inspect the track of the object to be inspected.

[0468] In step S2705, the inspection robot 414 determines whether all tracks have been inspected. If, in step S2705, it is determined that there are tracks that have not been inspected (if step S2705 is negative), then autonomous driving and inspection continue. On the other hand, if, in step S2705, it is determined that all tracks have been inspected (if step S2705 is positive), then the process proceeds to step S2706.

[0469] In step S2706, the inspection robot 414 sends the inspection results to the management system 440.

[0470] <Hardware Composition of the Control Device> Next, the hardware configuration of the control device 1920 in the replacement unit 411, the control device 2103 in the work robot 412, and the control device 2103 in the inspection robot 414 will be described. Furthermore, since these control devices all have the same hardware configuration, they will be used... Figure 28 This will be explained together.

[0471] Figure 28 This is a diagram illustrating an example of the hardware configuration of a control device. For example... Figure 28 As shown, control devices 1920 and 2103 include a processor 2801, a memory 2802, an auxiliary storage device 2803, an I / F (Interface) device 2804, and a communication device 2805. The hardware components included in control devices 1920 and 2103 are interconnected via a bus 2806.

[0472] The processor 2801 has various computing devices such as a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor 2801 reads various programs (such as control programs) into the memory 2802 and executes them.

[0473] The memory 2802 includes main storage devices such as ROM (Read Only Memory) and RAM (Random Access Memory). The processor 2801 and the memory 2802 constitute a so-called computer. The processor 2801 executes various programs read from the memory 2802, and the computer performs various functions.

[0474] The auxiliary storage device 2803 stores various programs and various information used when the various programs are executed by the processor 2801.

[0475] I / F device 2804 is a connection device that connects to external devices (operating device 2811, drive control device 2812, sensor 2813, etc.). I / F device 2804 receives operations from the replacement unit 411, the work robot 412, and the inspection robot 414 via the operating device 2811. Furthermore, the operating device 2811 includes power ON / OFF operation switches and emergency stop operation switches for the replacement unit 411, the work robot 412, and the inspection robot 414.

[0476] Furthermore, the I / F device 2804 outputs control instructions from the control devices 1920 and 2103 to the drive control device 2812. Additionally, the drive control device 2812 includes a device that controls operation based on control instructions from the replacement unit 411, the work robot 412, the inspection robot 414's movement processing, and the work robot 412's maintenance operation processing.

[0477] Furthermore, the I / F device 2804 receives sensor data from the sensor 2813. Additionally, the sensor 2813 mentioned herein includes any sensor possessed by the replacement unit 411, the work robot 412, and the inspection robot 414.

[0478] The communication device 2805 is a communication device used to communicate with an external device 2814 (such as a management system 440) via a network 470.

[0479] In addition, various programs installed in the auxiliary storage device 2803 are installed, for example, by downloading from the network 470 via the communication device 2805.

[0480] <Summary> As can be seen from the above description, the maintenance operation system 400 involved in the first embodiment is: This design is suitable for creating a substrate processing plant where the travel space 110 of the workpiece 410 and the equipment space 120 where the substrate processing system is installed and the operator 482 performs operations are separate spaces. This reduces the chance of contact between the traveling workpiece 410 and the operator 482.

[0481] It has a replacement unit 411, which allows for autonomous replacement on a unit-by-unit basis. As a result, the chances of the replacement unit 411 coming into contact with the operator 482 within the device space 120 can be reduced.

[0482] The system includes a function to prevent the work robot 412 from entering the work area of ​​the operator 482 when it is moving within the device space 120. Furthermore, it has a function to notify the operator 482 or pause the maintenance work when the work robot 412 approaches it while performing maintenance work within the device space 120. Additionally, it has a function to stop the maintenance work when the operator 482 gives a voice instruction. Therefore, within the device space 120, the chances of contact between the work robot 412 and the operator 482 can be reduced, while ensuring the safety of the operator 482.

[0483] Thus, the maintenance operation system 400 according to the first embodiment can improve the safety of the operator 482 when the operation body 410 performs maintenance operations.

[0484] [Second Embodiment] In the first embodiment described above, it was shown that the replacement unit 411 autonomously separates and joins. However, the separation of the replacement unit 411 from the substrate processing system 142_2 and its joining to the substrate processing system 142_2 can also be performed with the assistance of the work robot 412.

[0485] For example, the work robot 412 can assist in the separation of the replacement unit 411 in the substrate processing system, which is the object of maintenance work, or in the combination of the replacement unit 411.

[0486] Furthermore, in the first embodiment described above, the timing of the inspection of the track 422 by the inspection robot 414 is not mentioned. As long as it is in normal mode, the inspection can be performed at any time. Alternatively, it can be performed periodically on predetermined dates and times, such as once a day, once a week, or once a month.

[0487] Furthermore, in the first embodiment described above, the method for notifying the portable terminal 460 of the worker 482 when the worker 482 detects the presence of the worker 482 in the work area during maintenance work by the worker 412 is not mentioned in detail. However, the method for notifying the portable terminal 460 of the worker 482 is arbitrary.

[0488] For example, the management system 440 can obtain the location information of each worker in advance through the location detection and location information transmission functions of the portable terminals 460 carried by each worker. Then, the management system 440 can determine the worker 482 detected by the work robot 412 based on the location information of the work robot 412, and notify the determined worker 482's portable terminal 460.

[0489] Alternatively, based on image data captured by the camera device of the work robot 412, the worker 482 can be identified, and the identified worker 482 can be notified to the management system 440. Then, the management system 440 can also notify the identified worker 482's portable terminal 460.

[0490] Furthermore, in the first embodiment described above, it was explained that when the work robot 412 detects an obstacle or the like while moving within the device space 120, the work robot 412 avoids the obstacle or the like. However, the handling of the work robot 412 when an obstacle or the like is detected is not limited to this. For example, it could also be configured to stop moving when an obstacle or the like is detected.

[0491] Furthermore, in the first embodiment described above, it was explained that the substrate processing system was in an atmospheric state when the work robot 412 accessed it. However, a configuration in which the work robot 412 is housed within a frame can also be adopted, allowing the work robot 412 to access the substrate processing system even when it is in a vacuum state.

[0492] Furthermore, in the first embodiment described above, each work unit 410 is described as one unit, but there may also be multiple work units 410. For example, when performing unit replacement work instead of maintenance work inside the substrate processing system, the replacement work may be performed by coordinating and controlling the multiple work units.

[0493] Furthermore, the present invention is not limited to the configurations listed in the above embodiments, or combinations thereof with other elements. Changes can be made to these aspects without departing from the spirit of the invention, and may be appropriately determined according to its application.

[0494] This application asserts priority based on Japanese Patent Application No. 2023-146842, filed on September 11, 2023, and incorporates the entire contents of that Japanese Patent Application hereof.

[0495] Explanation of reference numerals in the attached figures 100: No. 1 substrate processing plant 110: Driving space 111: Preparation Space 120: Device Space 121: Preparation Space 400: Maintenance Operating System 410: Work Entries 411: Replace the unit 412: Work Robot 413: Lifting Robot 414: Inspect the robot 420: Driving mechanism 421: Change of Organization 422: Track 423: Opening mechanism 424: Cover 431: Crane Mechanism 433: Light-emitting part 434: Marker 435: Transmitter 440: Management System 450: Lifting mechanism 451: Setting up an organization 452: Lifting rail 460: Portable Terminal 610: Operations Management Department 620: Driving Mechanism Management Department 630: Crane Mechanism Management Department 640: Lifting Mechanism Management Department 650: Substrate Processing System Management Department 660: Lighting Department Management Department 670: Portable Terminal Management Department 680: Integrated Control Department 801: Cover 1811: Supporting Orbit 1831–1834: Installation Department

Claims

1. A maintenance operation system, which is a maintenance operation system in a substrate processing plant, comprising a device space for assembling a substrate processing system, and Located above or below the device space, this is the travel space for the workpiece involved in maintenance operations of the substrate processing system. The system includes the aforementioned operating body, and A lifting mechanism is used to lift the workpiece, which is traveling in the travel space to a position above or below the workpiece substrate processing system, between the travel space and the device space.

2. The maintenance system according to claim 1, wherein the operating body includes a replacement unit for replacing a portion of the unit of the substrate processing system. The replacement unit has the function of autonomously moving in the driving space and is raised and lowered by the lifting mechanism, so that it can be combined with the substrate processing system at the position after the part of the unit has been removed.

3. The maintenance operation system according to claim 2, wherein the operation body includes an operation robot. The operating robot: It has the function of autonomously driving in the driving space, and is raised and lowered by the lifting mechanism to perform maintenance work on the substrate processing system located in the device space, or... The replacement unit, which is assisted by the lifting mechanism, is combined with the substrate processing system in the position after the partial unit has been removed.

4. The maintenance system according to claim 3, wherein the robot performs maintenance on the unit removed from the substrate processing system, thereby generating the replacement unit. The substrate processing plant has a preparation space that is used when the replacement unit is generated by the work robot.

5. The maintenance operation system according to claim 3 further includes a driving mechanism disposed in the driving space for the working body to autonomously drive to a position above or below the substrate processing system of the work object.

6. The maintenance operation system according to claim 5, wherein the substrate processing plant is provided with a management system that outputs instructions relating to maintenance operations based on information from the substrate processing system and information from the operation unit. The processing in the substrate processing system is controlled based on instructions from the management system, as well as the operation of the work body, the travel mechanism, and the lifting mechanism.

7. The maintenance operation system according to claim 5, wherein the traveling mechanism includes a track, and The mechanism changes the position of the track based on the position of the lifting mechanism. The workpiece moves autonomously on the track within the travel space.

8. The maintenance system according to claim 2 further comprises a crane mechanism disposed in the device space to transport the replacement unit to a position above the work object substrate processing system. The replacement unit is lifted and lowered by the crane mechanism, thereby combining with the substrate processing system at the position where the partial unit has been removed.

9. The maintenance operation system according to claim 6, wherein the operation robot moves in the driving space or the device space according to a path indicated by the management system.

10. The maintenance operation system according to claim 6, wherein after the operation robot rises and falls into the device space, it monitors whether there are any operators around, and when it detects that there are operators, it notifies the management system that can notify the operators.

11. In the maintenance operation system according to claim 10, when the operation robot detects the presence of the operator, it stops moving, slows down the operation speed of the maintenance operation, stops the maintenance operation, or alerts the operator.

12. The maintenance system according to claim 9, wherein the ceiling or floor of the device space is marked. The robot calculates the position of the device in space by photographing the marker.

13. The maintenance operation system according to claim 9, wherein the operation robot calculates its position in the device space by communicating with the base plate processing system.

14. The maintenance operation system according to claim 9, wherein when the operation robot moves in the device space, it selects a path based on the past movement time and path recorded in the movement history.

15. The maintenance operation system according to claim 6, wherein the substrate processing system switches to maintenance mode triggered by an inquiry from the management system or by a request from the substrate processing system.

16. The maintenance operation system according to claim 15, wherein the operation body communicates with the baseboard processing system to determine whether the conversion to the maintenance mode is completed, and when the conversion to the maintenance mode is completed, the maintenance operation begins.

17. The maintenance system of claim 6, wherein the substrate processing system receives a determination result from the management system as to whether to replace the component in response to the transmission of information relating to component wear.

18. The maintenance system of claim 17, wherein the substrate processing system receives a determination result regarding the replacement unit from the management system in response to the transmission of information about a component that needs to be replaced.

19. The maintenance operation system of claim 15, wherein the management system manages the inventory of parts for maintenance operations and orders them based on maintenance plans.

20. The maintenance system according to claim 6 further comprises a terminal carried by a device manager who manages the substrate processing system and communicates with the management system.

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