Transfer equipment of electronic component and control method of transfer equipment

Abstract

An electronic component transfer device comprises a base station (100), a first carrying platform (300) and a second carrying platform (400), after the second carrying platform (400) is replaced with a new one, the electronic component transfer device can obtain a first deflection deviation of a second bearing surface (P2) of the second carrying platform (400) relative to a first bearing surface (P1) of the base station (100) through a first detection module (900) installed on the first carrying platform (300), and the first deflection deviation is detected through a second detection module (900) installed on the second carrying platform (300). After the first deflection deviation is obtained, the second carrying table (400) can be corrected according to the first deflection deviation until the second bearing surface (P2) of the second carrying table (400) is parallel to the first bearing surface (P1) of the base table (100), so that the correction time of a newly replaced structure is shortened in the subsequent process that the second carrying table (400) is used for transferring the electronic component, and the correction efficiency is improved. Therefore, the downtime of the electronic component transfer equipment after a new structure is replaced is shortened, and the utilization rate of the electronic component transfer equipment is improved. The invention further provides a control method of the transfer equipment.

Description

Transfer apparatus for electronic components and control method of transfer apparatus

[0001] The present application claims priority from Chinese Patent Application No. 202411039654.5, filed on July 30, 2024, and entitled "Test Device and Transfer Apparatus for Electronic Components", the contents of which are incorporated herein by reference in its entirety. TECHNICAL FIELD

[0002] The present application relates to the field of automation, in particular to a transfer apparatus for electronic components and a control method of the transfer apparatus. BACKGROUND

[0003] With the development of the display technology field, light-emitting diode (LED) light-emitting elements have the advantages of high color purity, wide dynamic range, high brightness, high definition, low operating voltage, low power consumption, long service life, impact resistance, large viewing angle, and stable and reliable operation. Therefore, display substrates integrated with LED light-emitting elements will become the most advantageous new generation of display media and have been widely used.

[0004] Among them, the LED light-emitting element can be usually fixed on a driving backboard, and the LED light-emitting element fixed on the driving backboard can emit light under the driving action of the driving backboard. In general, a transfer apparatus is needed to fix the LED light-emitting element on the driving backboard.

[0005] However, after replacing the damaged structure in the transfer apparatus, the replaced structure still needs to be continuously corrected to ensure the positional accuracy of the replaced structure, which leads to a long downtime of the transfer apparatus, and thus reduces the utilization rate of the transfer apparatus. SUMMARY

[0006] The present application provides a transfer apparatus for electronic components. The technical solution can solve the problem of low utilization rate of the transfer apparatus for electronic components in the prior art, and is as follows:

[0007] In one aspect, a transfer apparatus for electronic components is provided, comprising a base, a first carrier, and a second carrier.

[0008] The base has a first bearing surface.

[0009] The first carrier is movably connected to the base, and the first carrier is configured to carry a first substrate, and the first substrate comprises a plurality of electronic components.

[0010] The second carrier is located on the first bearing surface, and the second carrier is configured to carry a second substrate, and the second substrate comprises a plurality of connecting portions.

[0011] The transfer device is configured to move the first detection module mounted on the first carrier by the first carrier before transferring the plurality of electronic components, and to obtain a first deflection deviation of a second bearing surface of the second carrier relative to the first bearing surface by the first detection module during the movement of the first carrier, so that the second bearing surface is parallel to the first bearing surface after correction according to the first deflection deviation.

[0012] Optionally, the first carrier is configured to move the first detection module in a first direction and a second direction, the first direction and the second direction are both parallel to the first bearing surface, and the first direction intersects the second direction.

[0013] The transfer device is configured to obtain a maximum distance difference between the first detection module and the second bearing surface by the first detection module during movement of the first detection module relative to the first bearing surface in the first direction by the first carrier, to obtain a first deflection degree of the second bearing surface relative to the first bearing surface around a first axis; and to obtain a maximum distance difference between the first detection module and the second bearing surface by the first detection module during movement of the first detection module relative to the first bearing surface in the second direction by the first carrier, to obtain a second deflection degree of the second bearing surface relative to the first bearing surface around a second axis.

[0014] The first axis is parallel to the second direction; and the second axis is parallel to the first direction.

[0015] Optionally, the second carrier includes a second carrier body and a first adjustment assembly, the second carrier body has a second bearing surface, and the second carrier body is connected to the base by the first adjustment assembly, and the first adjustment assembly is configured to correct the first deflection deviation.

[0016] Optionally, the first adjustment assembly includes a first adjustment screw, a second adjustment screw, and a third adjustment screw.

[0017] The first adjustment screw and the second adjustment screw are arranged in the second direction and distributed on both sides of the first axis; and the third adjustment screw is distributed on the first axis and located on a side of the second axis away from the first adjustment screw and the second adjustment screw.

[0018] The first adjustment screw and the second adjustment screw are configured to correct the first deflection degree, and the third adjustment screw is configured to correct the second deflection degree.

[0019] Optionally, the second carrier body comprises: a first plate body and a second plate body arranged oppositely and in parallel, and a plurality of connecting members between the first plate body and the second plate body;

[0020] The side of the first plate body away from the second plate body is the second bearing surface;

[0021] The first adjusting screw, the second adjusting screw and the third adjusting screw are distributed between the first plate body and the second plate body, and the second plate body is connected with the abutment through the first adjusting screw, the second adjusting screw and the third adjusting screw.

[0022] Optionally, the first detection module comprises a plurality of distance sensors; the first carrier has a third bearing surface, and the plurality of distance sensors are located on the third bearing surface;

[0023] The transfer device is configured to: in the movement of the first carrier, obtain a first deflection deviation of the second bearing surface of the second carrier relative to the first bearing surface through any one of the distance sensors.

[0024] Optionally, the transfer device is further configured to: in the case that the second bearing surface is parallel to the first bearing surface, and after the first carrier moves to a first specified position, obtain a second deflection deviation of the third bearing surface relative to the second bearing surface through the plurality of distance sensors, so that the third bearing surface is parallel to the second bearing surface after correction according to the second deflection deviation.

[0025] Wherein, after the first carrier moves to the first specified position, the orthographic projections of the plurality of distance sensors on the second bearing surface are located in the second bearing surface.

[0026] Optionally, the plurality of distance sensors are divided into: at least two first distance sensors arranged along the first direction, and at least two second distance sensors arranged along the second direction;

[0027] The transfer device is configured to: obtain the distance between each of the first distance sensors and the second bearing surface through the at least two first distance sensors, so as to obtain a third deflection degree of the third bearing surface relative to the second bearing surface around a third axis; and obtain the distance between each of the second distance sensors and the second bearing surface through the at least two second distance sensors, so as to obtain a fourth deflection degree of the third bearing surface relative to the second bearing surface around a fourth axis.

[0028] The third axis is parallel to the second direction; and the fourth axis is parallel to the first direction.

[0029] Optionally, the transfer device further comprises a movable member movably connected to the base and movable relative to the first bearing surface in the first direction and the second direction.

[0030] The first carrier comprises a first carrier body, an adapter frame, a second adjusting assembly and a third adjusting assembly.

[0031] The first carrier body has the third bearing surface, and the first carrier body is connected to the adapter frame through the second adjusting assembly, and the second adjusting assembly is used for correcting the third deflection degree.

[0032] The adapter frame is connected to the movable member through the third adjusting assembly, and the third adjusting assembly is used for correcting a fourth deflection degree.

[0033] Optionally, the second adjusting assembly comprises a first connecting shaft and a fourth adjusting screw.

[0034] The first connecting shaft is fixedly connected to the first carrier body and rotatably connected to the adapter frame, and an axis of the first connecting shaft coincides with the third axis.

[0035] The fourth adjusting screw is used for fixing the first carrier body and the adapter frame after the first carrier body is rotated relative to the adapter frame through the first connecting shaft, so as to correct the third deflection degree.

[0036] Optionally, the adapter frame comprises a mounting frame body and a third plate body connected to each other.

[0037] The third plate body is connected to the movable member through the third adjusting assembly.

[0038] The mounting frame body has a first opening and a first adjusting hole, at least part of the first connecting shaft is located in the first opening, and the fourth adjusting screw passes through the first adjusting hole to be connected to the first carrier body after the first carrier body is rotated relative to the adapter frame through the first connecting shaft.

[0039] Optionally, the third adjusting assembly comprises a second connecting shaft and a plurality of fifth adjusting screws.

[0040] The second connecting shaft is fixedly connected to the movable member and rotatably connected to the adapter frame, and an axis of the second connecting shaft coincides with the fourth axis.

[0041] The fifth adjusting screw is used for fixing the adapter frame and the movable element after the adapter frame rotates relative to the movable element through the second connecting shaft, so as to correct the fourth deflection degree.

[0042] Optionally, the adapter frame comprises a mounting frame body and a third plate body connected with each other.

[0043] The mounting frame body is connected with the first stage main body through the second adjusting assembly.

[0044] The third plate body has a second opening and a plurality of second adjusting holes; at least part of the second connecting shaft is located in the second opening; the plurality of second adjusting holes are distributed around the second opening, and the plurality of second adjusting holes correspond to the plurality of fifth adjusting screws one by one; after the adapter frame rotates relative to the movable element through the second connecting shaft, each fifth adjusting screw passes through the corresponding second adjusting hole to be connected with the movable element.

[0045] Optionally, the transfer device further comprises a feeding stage, and the feeding stage has a fourth bearing surface.

[0046] The transfer device is further configured to: when the third bearing surface is parallel to the second bearing surface, and after the first stage moves to a second specified position, acquire a third deflection deviation of the fourth bearing surface relative to the third bearing surface through the plurality of distance sensors, so that the fourth bearing surface is parallel to the third bearing surface after correction according to the third deflection deviation.

[0047] After the first stage moves to a second specified position, the orthographic projection of the plurality of distance sensors on the fourth bearing surface is located in the fourth bearing surface.

[0048] Optionally, the plurality of distance sensors are divided into: at least two first distance sensors arranged along the first direction, and at least two second distance sensors arranged along the second direction.

[0049] The transfer device is configured to: acquire the distance between each first distance sensor and the fourth bearing surface through the at least two first distance sensors, so as to acquire a fifth deflection degree of the fourth bearing surface relative to the third bearing surface around a fifth axis; acquire the distance between each second distance sensor and the fourth bearing surface through the at least two second distance sensors, so as to acquire a sixth deflection degree of the fourth bearing surface relative to the third bearing surface around a sixth axis.

[0050] The fifth axis is parallel to the second direction, and the sixth axis is parallel to the first direction.

[0051] Optionally, the feeding platform comprises a feeding platform body and the fourth adjusting assembly; the feeding platform body has the fourth bearing surface, and the feeding platform body is connected with the base platform through the fourth adjusting assembly; the fourth adjusting assembly is used for correcting the third deflection deviation.

[0052] Optionally, the fourth adjusting assembly comprises four sixth adjusting screws.

[0053] The four sixth adjusting screws are arranged in two rows along the first direction and in two columns along the second direction; two rows of the sixth adjusting screws are distributed on two sides of the fifth axis, and two columns of the sixth adjusting screws are distributed on two sides of the sixth axis.

[0054] At least one row of the sixth adjusting screws is used for correcting the fifth deflection degree, and at least one column of the sixth adjusting screws is used for correcting the sixth deflection degree.

[0055] Optionally, the feeding platform further has a first mounting surface intersecting with the fourth bearing surface; the first platform further has a first positioning surface intersecting with the third bearing surface.

[0056] The transfer device is further configured to: when the third bearing surface is parallel to the fourth bearing surface, and after the first platform moves to the third specified position, acquire, by a second detection module installed on the feeding platform, a fourth deflection deviation of the first mounting surface relative to the first positioning surface, so that the first positioning surface is parallel to the first mounting surface after correction according to the fourth deflection deviation.

[0057] After the first platform moves to the third specified position, the first positioning surface is arranged opposite to the first mounting surface in the first direction or the second direction.

[0058] Optionally, the second detection module comprises a plurality of third distance sensors, and arrangement directions of the plurality of third distance sensors are parallel to the first mounting surface.

[0059] The transfer device is configured to: acquire, by the plurality of third distance sensors, distances between each of the third distance sensors and the first positioning surface, so as to acquire a seventh deflection degree of the first mounting surface relative to the first positioning surface around a seventh axis.

[0060] The seventh axis intersects with the first direction and intersects with the second direction.

[0061] Optionally, the feeding platform comprises a feeding platform body, a fourth adjusting assembly, a fourth plate body, and a fifth adjusting assembly.

[0062] The feeding platform body has the fourth bearing surface, the feeding platform body is connected with the fourth plate body through the fourth adjusting assembly, and the fourth adjusting assembly is used for correcting the third deflection deviation; the fourth plate body is connected with the base through the fifth adjusting assembly, and the fifth adjusting assembly is used for correcting the fourth deflection deviation.

[0063] Optionally, the fourth plate body has a plurality of third adjusting holes distributed around the seventh axis.

[0064] The fifth adjusting assembly comprises a plurality of seventh adjusting screws corresponding to the third adjusting holes; after the fourth plate body rotates relative to the base around the seventh axis, each seventh adjusting screw is connected with the base through the corresponding third adjusting hole to correct the seventh deflection degree.

[0065] Optionally, the first base plate is a flexible base plate, and the transfer device further comprises a driving member, a needle and a force sensor; the transfer device is further used for testing a pressure curve corresponding to the needle; the needle comprises a needle sleeve and a needle rod, the needle sleeve is sleeved on the needle rod, and the needle sleeve and the needle rod are elastically connected in the axial direction; the tip of the needle rod can be extended from the needle sleeve.

[0066] The force sensor is located on the base, the driving member is movably connected with the base, and the driving member is detachably connected with the needle and used for driving the needle to move in a third direction (Z) parallel to the axial direction of the needle.

[0067] The transfer device is further configured to: drive the needle to move towards the force sensor by the driving member, and obtain the pressure curve corresponding to the needle by the force sensor after the tip of the needle rod contacts the force sensor.

[0068] The pressure curve is used to reflect the change relationship between the pressing force applied by the tip of the needle rod and the compression amount of the inward displacement of the needle rod relative to the needle sleeve.

[0069] Optionally, the transfer device is further configured to: after obtaining the pressure curve corresponding to the needle installed on the driving member, control the moving distance of the needle in the third direction (Z) according to the pressure curve, so that the needle applies an acting force to the side of the first base plate away from the second base plate, so as to transfer the electronic element to the connecting part.

[0070] In another aspect, a method for using a transfer device is provided. The method is applied to a transfer device for electronic components. The transfer device includes a base, a first carrier, and a second carrier. The base has a first bearing surface. The first carrier is movably connected to the base and is configured to carry a first substrate. The first substrate is a flexible substrate and includes a plurality of electronic components. The second carrier is disposed on the first bearing surface and is configured to carry a second substrate. The second substrate includes a plurality of connecting portions. The method includes:

[0071] Before the first carrier carries the first substrate and the second carrier carries the second substrate, moving the first carrier with a first detection module mounted on the first carrier in a direction parallel to the first bearing surface relative to the first bearing surface. During the movement of the first carrier, obtaining a first deflection deviation of a second bearing surface of the second carrier relative to the first bearing surface by the first detection module, so that the second bearing surface is parallel to the first bearing surface after correction according to the first deflection deviation.

[0072] Optionally, the transfer device further includes a feeding carrier. The method further includes:

[0073] After the second bearing surface is parallel to the first bearing surface, obtaining a second deflection deviation of a third bearing surface of the first carrier relative to the second bearing surface by the first detection module, so that the third bearing surface is parallel to the second bearing surface after correction according to the second deflection deviation.

[0074] After the third bearing surface is parallel to the second bearing surface, obtaining a third deflection deviation of a fourth bearing surface of the feeding carrier relative to the third bearing surface by the first detection module, so that the fourth bearing surface is parallel to the third bearing surface after correction according to the third deflection deviation.

[0075] After the fourth bearing surface is parallel to the third bearing surface, obtaining a fourth deflection deviation of a first mounting surface of the feeding carrier relative to a first positioning surface of the first carrier by a second detection module mounted on the feeding carrier, so that the first mounting surface is parallel to the first positioning surface after correction according to the fourth deflection deviation.

[0076] Optionally, the transfer device further comprises a transfer head and a force sensor, the transfer head comprises a driving member and a needle, the transfer head is movably connected with the base platform; the transfer device is further configured to test a pressure curve corresponding to the needle, the needle comprises a needle sleeve and a needle rod, the needle sleeve is sleeved on the needle rod, and the needle sleeve is elastically connected with the needle rod in the axial direction, and a tip of the needle rod can be extended from the needle sleeve; the force sensor is located on the base platform, the driving member is movably connected with the base platform, and the driving member is detachably connected with the needle, and is configured to drive the needle to move in a third direction, the third direction being parallel to the axial direction of the needle.

[0077] The use method further comprises the following steps: after the first mounting surface is parallel to the first positioning surface, driving the needle to move towards the force sensor by the driving member, and obtaining the pressure curve corresponding to the needle by the force sensor after the tip of the needle rod contacts the force sensor.

[0078] Optionally, the use method further comprises the following steps: after the pressure curve corresponding to the needle is obtained, and the first carrier platform carries the first substrate and the second carrier platform carries the second substrate, then controlling a moving distance of the needle in the third direction according to the pressure curve, so that the needle applies a force to a side of the first substrate away from the second substrate, to transfer the electronic component to the connecting portion.

[0079] The technical scheme provided by the embodiments of the present application has at least the following beneficial effects:

[0080] After the new second carrier platform is replaced, the transfer device of the electronic component can quickly obtain the first deflection deviation of the second carrying surface of the second carrier platform relative to the first carrying surface of the base platform through the first detection module installed on the first carrier platform, and then after the first deflection deviation is obtained, the worker can correct the second carrier platform according to the first deflection deviation, until the second carrying surface of the second carrier platform is parallel to the first carrying surface of the base platform, so that in the subsequent transfer process of the second carrier platform for the electronic component, the transfer precision of the electronic component can meet the requirements. In this way, the correction time of the newly replaced structure is shortened, and then the downtime of the electronic component transfer device after the new structure is replaced is shortened, and the utilization rate of the electronic component transfer device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0081] In order to more clearly illustrate the technical schemes in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creating laborious work.

[0082] FIG. 1 is a structural schematic diagram of a transfer device for electronic components according to an embodiment of the present application;

[0083] FIG. 2 is a structural schematic diagram of a first substrate according to an embodiment of the present application;

[0084] FIG. 3 is a schematic diagram of a transfer device for transferring electronic components according to an embodiment of the present application;

[0085] FIG. 4 is a schematic diagram of another transfer device for transferring electronic components according to an embodiment of the present application;

[0086] FIG. 5 is a structural schematic diagram of another transfer device for electronic components according to an embodiment of the present application;

[0087] FIG. 6 is a structural schematic diagram of a second carrier according to an embodiment of the present application;

[0088] FIG. 7 is a partial enlarged view of a transfer device for electronic components according to an embodiment of the present application;

[0089] FIG. 8 is a top view of a first carrier according to an embodiment of the present application;

[0090] FIG. 9 is a structural schematic diagram of a first carrier according to an embodiment of the present application;

[0091] FIG. 10 is a structural schematic diagram of another first carrier according to an embodiment of the present application;

[0092] FIG. 11 is a top view of another first carrier according to an embodiment of the present application;

[0093] FIG. 12 is a structural schematic diagram of yet another first carrier according to an embodiment of the present application;

[0094] FIG. 13 is a front view of a first carrier according to an embodiment of the present application;

[0095] FIG. 14 is a partial enlarged view of another transfer device for electronic components according to an embodiment of the present application;

[0096] FIG. 15 is a partial enlarged view of yet another transfer device for electronic components according to an embodiment of the present application;

[0097] FIG. 16 is a structural schematic diagram of a feeding carrier according to an embodiment of the present application;

[0098] FIG. 17 is an exploded view of a feeding carrier according to an embodiment of the present application;

[0099] FIG. 18 is a top view of a feeding carrier according to an embodiment of the present application;

[0100] FIG. 19 is a structural schematic diagram of still another feeding carrier according to an embodiment of the present application;

[0101] FIG. 20 is a structural schematic diagram of another electronic component transfer device according to an embodiment of the present application;

[0102] FIG. 21 is a structural schematic diagram of another electronic component transfer device according to an embodiment of the present application;

[0103] FIG. 22 is a schematic diagram of a pressure driving curve of a plurality of needles according to an embodiment of the present application;

[0104] FIG. 23 is a structural schematic diagram of another electronic component transfer device according to another embodiment of the present application;

[0105] FIG. 24 is a structural schematic diagram of another electronic component transfer device according to another embodiment of the present application;

[0106] FIG. 25 is a partial sectional view of an electronic component transfer device according to an embodiment of the present application. DETAILED DESCRIPTION

[0107] For the purpose, technical solutions and advantages of the present application to be clearer, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0108] Referring to FIG. 1, FIG. 1 is a structural schematic diagram of an electronic component transfer device according to an embodiment of the present application. The electronic component transfer device can include a base 100, a first carrier 300 and a second carrier 400. The base 100 in the electronic component transfer device can have a first bearing surface P1, and the first carrier 300 can be movably connected with the base 100. The first carrier 300 in the electronic component transfer device can be used to carry a first substrate 010. Here, the first substrate 010 can be a flexible substrate, and the first substrate 010 can include a plurality of electronic components 011.

[0109] It should be noted that, as shown in FIG. 2, FIG. 2 is a structural schematic diagram of a first substrate according to an embodiment of the present application. The first substrate 010 can include a bearing film 012 and a sub-mother ring 013 connected with an edge portion of the bearing film 012. A central portion of the bearing film 012 in the first substrate 010 can be provided with a setting area Q, and the plurality of electronic components 021 in the first substrate 010 can be distributed within the setting area Q. The bearing film 012 in the first substrate 010 can be a flexible bearing film, and thus the first substrate 010 can be a flexible substrate. Each position of the edge portion of the flexible bearing film 012 can be connected with the sub-mother ring 013. In this way, the sub-mother ring 013 can tension the flexible bearing film 012 as a whole, so that the electronic component transfer device can better perform die bonding on the electronic components 011 carried on the bearing film 012.

[0110] The second carrier 400 in the electronic component transfer device can be located on the first bearing surface P1 of the base 100, and the second carrier 400 can be used to carry the second substrate 020. Here, the second substrate 020 can include a plurality of connection portions 021.

[0111] As shown in FIG. 3 and FIG. 4, FIG. 3 is a schematic diagram of a transfer device for transferring electronic components according to an embodiment of the present application, and FIG. 4 is a schematic diagram of another transfer device for transferring electronic components according to an embodiment of the present application. The electronic component transfer device can be used to transfer a plurality of electronic components 011 in the first substrate 010 to a plurality of connection portions 021 in the second substrate 020, so that the electronic components 011 transferred to the second substrate 020 can be electrically connected with the corresponding connection portions 021. That is, the transfer of each electronic component 011 in the first substrate 010 can be completed by the electronic component transfer device.

[0112] Here, the electronic component transfer device can further include a needle 202, and the electronic component transfer device can transfer the electronic component 011 to the corresponding connection portion 021 through the needle 202. It should be noted that during the transfer of the electronic component 011, the electronic component transfer device can drive the first substrate 010 to move through the first carrier 300, so that after the needle 202, the electronic component 011 in the first substrate 010 that needs to be transferred, and the connection portion 021 in the second substrate 020 corresponding to the electronic component 011 coincide in the third direction Z, the electronic component transfer device can drive the needle 202 to apply a force to the side of the first substrate 011 away from the second substrate 020 in the third direction Z, so as to transfer the electronic component 011 in the first substrate 010 to the corresponding connection portion 021 in the second substrate 020. Here, the third direction Z is parallel to the axial direction of the needle 202.

[0113] It should be noted that during the transfer of a plurality of electronic components 011 by the electronic component transfer device, the electronic component transfer device needs to have high precision to ensure the transfer precision of the electronic components 011. Therefore, after the structure in the electronic component transfer device is replaced, the newly replaced structure needs to be corrected first to ensure that the installation precision of the newly replaced structure meets the requirements, and then to ensure that the transfer precision of the subsequent transfer of the electronic components 011 by the transfer device meets the requirements.

[0114] For example, after the new second carrier 400 is replaced, the second carrier 400 needs to be corrected so that the second bearing surface P2 in the second carrier 400 for carrying the second substrate 020 can be parallel to the first bearing surface P1 of the base 100, and then the transfer precision of the electronic components 011 in the subsequent transfer process of the electronic components 021 by the second carrier 400 can meet the requirements.

[0115] In the present application, the electronic component transfer device can drive the first detection module 900 mounted on the first carrier 300 to move before transferring the plurality of electronic components 011. And during the movement of the first carrier 300, the electronic component transfer device can obtain the first deflection deviation of the second bearing surface P2 of the second carrier 400 relative to the first bearing surface P1 of the base platform 100 through the first detection module 900, so that the second bearing surface P2 of the second carrier 400 can be parallel to the first bearing surface P1 after correction according to the first deflection deviation.

[0116] Therefore, after replacing the new second carrier 400, the electronic component transfer device can quickly obtain the first deflection deviation of the second bearing surface P2 of the second carrier 400 relative to the first bearing surface P1 of the base platform 100 through the first detection module 900 mounted on the first carrier 300, and then after obtaining the first deflection deviation, the worker can correct the second carrier 400 according to the first deflection deviation until the second bearing surface P2 of the second carrier 400 is parallel to the first bearing surface P1 of the base platform 100, so that the transfer accuracy of the electronic components 011 during the subsequent transfer process of the second carrier 400 can meet the requirements. In this way, the correction time of the newly replaced structure is shortened, and the downtime of the electronic component transfer device after replacing the new structure is shortened, and the utilization rate of the electronic component transfer device is improved.

[0117] In summary, the present application provides an electronic component transfer device, which includes a base platform, a first carrier and a second carrier. After replacing a new second carrier, the electronic component transfer device can quickly obtain the first deflection deviation of the second bearing surface of the second carrier relative to the first bearing surface of the base platform through the first detection module mounted on the first carrier, and then after obtaining the first deflection deviation, the worker can correct the second carrier according to the first deflection deviation until the second bearing surface of the second carrier is parallel to the first bearing surface of the base platform, so that the transfer accuracy of the electronic components during the subsequent transfer process of the second carrier can meet the requirements. In this way, the correction time of the newly replaced structure is shortened, and the downtime of the electronic component transfer device after replacing the new structure is shortened, and the utilization rate of the electronic component transfer device is improved.

[0118] Optionally, as shown in FIG. 5, FIG. 5 is a structural schematic diagram of another electronic component transfer device provided by the present application, and FIG. 6 is a structural schematic diagram of a second carrier provided by the present application. The first carrier 300 in the transfer device can be used to drive the first detection module 900 to move along the first direction X and the second direction Y. Here, the first direction X and the second direction Y can both be parallel to the first bearing surface P1 of the base platform 100, and the first direction X can intersect the second direction Y.

[0119] It should be noted that after the new second carrier 400 is replaced, the second carrier 400 can have a second deflection degree along the first direction X and a first deflection degree along the second direction Y relative to the base table 100. Thus, in the correction process of the second carrier 400, the second carrier 400 needs to be corrected along the first direction X and the second direction Y, so that the second bearing surface P2 of the second carrier 400 can be parallel to the first bearing surface P1 of the base table 100.

[0120] Optionally, the electronic component transfer device can obtain the maximum distance difference between the first detection module 900 and the second bearing surface P2 of the second carrier 400 through the first detection module 900 during the movement of the first detection module 900 relative to the first bearing surface P1 of the base table 100 along the first direction X by the first carrier 300, so as to obtain the first deflection degree of the second bearing surface P2 of the second carrier 400 around the first axis L1. Here, the first axis L1 is parallel to the second direction Y.

[0121] The electronic component transfer device can also obtain the maximum distance difference between the first detection module 900 and the second bearing surface P2 of the second carrier 400 through the first detection module 900 during the movement of the first detection module 900 relative to the first bearing surface P1 of the base table 100 along the second direction Y by the first carrier 300, so as to obtain the second deflection degree of the second bearing surface P2 of the second carrier 400 around the second axis L2 relative to the first bearing surface P1 of the base table 100. Here, the second axis L2 can be parallel to the first direction X.

[0122] In the present application, the first detection module 900 can include a plurality of distance sensors 900a, and the electronic component transfer device can obtain the first deflection deviation of the second bearing surface P2 of the second carrier 400 relative to the first bearing surface P1 of the base table 100 through any one distance sensor 900a during the movement of the first carrier 300.

[0123] It should be noted that during the transfer of the plurality of electronic components by the electronic component transfer device, the electronic component transfer device can drive the plurality of electronic components 011 in the first substrate 010 to move along the first direction X and the second direction Y by the first carrier 300. That is, the first direction X and the second direction Y are the XY movement plane of the electronic components 011 relative to the first bearing surface P1 of the base table 100.

[0124] Thus, in the process that the electronic component transfer device drives any one distance sensor 900a on the first carrier 300 to move, for any one distance sensor 900a, the distance sensor 900a moves in the XY movement plane relative to the first bearing surface P1 of the base 100, that is, the movement of the distance sensor 900a along the first direction X and the second direction Y is parallel to the first bearing surface P1 of the base 100.

[0125] Therefore, in the process that the electronic component transfer device drives the first detection module 900 to move along the first direction X, the maximum distance difference between any one distance sensor 900a in the first detection module 900 and the second bearing surface P2 of the second carrier 400 obtained by the distance sensor 900a can obtain the first deflection degree of the second bearing surface P2 of the second carrier 400 relative to the first bearing surface P1 of the base 100. Similarly, in the process that the electronic component transfer device drives the first detection module 900 to move along the second direction Y, the maximum distance difference between any one distance sensor 900a in the first detection module 900 and the second bearing surface P2 of the second carrier 400 obtained by the distance sensor 900a can obtain the second deflection degree of the second bearing surface P2 of the second carrier 400 relative to the first bearing surface P1 of the base 100.

[0126] It should be noted that since the second bearing surface P2 of the second carrier 400 is a plane, in the process that the electronic component transfer device drives the first detection module 900 to move along the first direction X, the maximum distance difference between any one distance sensor 900a in the first detection module 900 and the second bearing surface P2 of the second carrier 400 obtained by the distance sensor 900a can be the difference between the distance between the distance sensor 900a and the two ends of the second bearing surface P2 in the first direction X. Similarly, in the process that the electronic component transfer device drives the first detection module 900 to move along the second direction Y, the maximum distance difference between any one distance sensor 900a in the first detection module 900 and the second bearing surface P2 of the second carrier 400 obtained by the distance sensor 900a can be the difference between the distance between the distance sensor 900a and the two ends of the second bearing surface P2 in the second direction Y. Thus, the first deflection degree of the second bearing surface P2 of the second carrier 400 around the first axis L1 and the second deflection degree of the second bearing surface P2 of the second carrier 400 around the second axis L2 can be the deflection angle of the first bearing surface P2 relative to the first bearing surface P1 of the base 100.

[0127] It should be further noted that, in the process that the electronic component transfer device drives the first detection module 900 to move along the first direction X or the second direction Y through the first carrier 300, the orthographic projection of a distance sensor 900a for detecting distance, which is located on the first carrier 300, on the second bearing surface P2 of the second carrier 400 needs to be located in the second bearing surface P2, so as to ensure that the data obtained by the electronic component transfer device through the distance sensor 900a are all the distances between the distance sensor 900a and the second bearing surface P2.

[0128] Optionally, as shown in FIG. 6, the second carrier 400 can include a second carrier body 401 and a first adjusting assembly 402. The second carrier body 401 in the second carrier 400 can have a second bearing surface P2, and the second carrier body 401 can be connected with the base 100 through the first adjusting assembly 402. The first adjusting assembly 402 in the second carrier 300 can be used to correct the first deflection deviation.

[0129] Optionally, as shown in FIG. 6, the first adjusting assembly 402 can include a first adjusting screw 4021, a second adjusting screw 4022 and a third adjusting screw 4023. The first adjusting screw 4021 and the second adjusting screw 4022 can be arranged in the second direction Y, and can be distributed on both sides of the first axis L1. The third adjusting screw 4023 can be distributed on the first axis L1, and can be located on the side of the second axis L2 away from the first adjusting screw L1 and the second adjusting screw L2. For example, the orthographic projection of the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023 on the first bearing surface P1 of the base 100 can be arranged in an isosceles triangle. Here, the first adjusting screw 4021 and the second adjusting screw 4022 can be used to correct the first deflection degree, and the third adjusting screw 4023 can be used to correct the second deflection degree.

[0130] Here, the second carrier body 401 is connected with the base 100 through the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023. Therefore, by adjusting the tightness of the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023, the distance between the part of the second carrier body 401 and the base 100 connected through the adjusting screw can be adjusted, and then the first deflection degree and the second deflection degree can be corrected, so that the second bearing surface P2 of the second carrier body 401 can be parallel to the first bearing surface P1 of the base 100.

[0131] For example, if the first deflection degree is that the distance between the position corresponding to the first adjusting screw 4021 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 is less than the distance between the position corresponding to the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900, the first adjusting screw 4021 can be loosened and / or the second adjusting screw 4022 can be tightened to increase the distance between the position corresponding to the first adjusting screw 4021 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 and / or to decrease the distance between the position corresponding to the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 until the distance between the position corresponding to the first adjusting screw 4021 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 is equal to the distance between the position corresponding to the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900. In this way, the first deflection degree can be corrected.

[0132] For example, if the second deflection degree is that the distance between the side corresponding to the first adjusting screw 4021 and the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 is less than the distance between the side corresponding to the third adjusting screw 4023 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900, the first adjusting screw 4021 and the second adjusting screw 4022 can be loosened and / or the third adjusting screw 4023 can be tightened to increase the distance between the side corresponding to the first adjusting screw 4021 and the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 and / or to decrease the distance between the side corresponding to the third adjusting screw 4023 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 until the distance between the side corresponding to the first adjusting screw 4021 and the second adjusting screw 4022 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900 is equal to the distance between the side corresponding to the third adjusting screw 4023 on the second bearing surface P2 of the second stage main body 401 and the first detection module 900. In this way, the second deflection degree can be corrected.

[0133] Optionally, as shown in FIG. 6, the second stage main body 401 in the second stage 400 can include a first plate body 4011 and a second plate body 4012 arranged oppositely and in parallel, and a plurality of connecting members 4013 between the first plate body 4011 and the second plate body 4012. The side of the first plate body 401 in the second stage main body 401 facing away from the second plate body 402 can be the second bearing surface P2.

[0134] Here, the connecting piece 4013 can have a certain height in the direction perpendicular to the second bearing surface P2, so that the first plate body 4011 and the second plate body 4012 can have a certain distance, and thus the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023 in the first adjusting assembly 402 can be distributed between the first plate body 4011 and the second plate body 4012. And the second plate body 4012 can be connected with the base 100 through the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023. In this way, in the process of adjusting the second carrier 400 through the first adjusting screw 4021, the second adjusting screw 4022 and the third adjusting screw 4023, the distance between the second plate body 4012 and the first bearing surface P1 of the base 100 is adjusted, so as to correct the first deflection degree and the second deflection degree between the second bearing surface P2 and the first bearing surface P1.

[0135] Optionally, as shown in FIG. 5 and FIG. 7, the first carrier 300 can have a third bearing surface P3, and a plurality of distance sensors 900a can be located on the third bearing surface P3 of the first carrier 300. And in the process of transferring the electronic element 011 by the electronic element transfer device, the first substrate 010 can be located on the third bearing surface P3 of the first carrier 300.

[0136] After replacing the new first carrier 300, the first carrier 300 also needs to be corrected, so that the third bearing surface P3 in the first carrier 300 for bearing the first substrate 010 can be parallel to the second bearing surface P2 of the second carrier 400, and thus the transfer precision of the electronic element 011 in the subsequent transfer process of the electronic element 011 by the first carrier 300 can meet the requirements.

[0137] It should be noted that after the first carrier 300 is corrected, the third bearing surface P3 of the first carrier 300 needs to be parallel to the second bearing surface P2 of the second carrier 400. That is, the third bearing surface P3 of the first carrier 300 is corrected according to the second bearing surface P2 of the second carrier 400. Therefore, before the first carrier 300 is corrected, it is necessary to ensure that the second bearing surface P2 of the second carrier 400 is parallel to the first bearing surface P1 of the base 100. Therefore, in the case of replacing the new second carrier 400 but not replacing the first carrier 300, after the second carrier 400 is corrected to make the second bearing surface P2 parallel to the first bearing surface P1, the first carrier 300 also needs to be corrected to ensure that the third bearing surface P3 of the first carrier 300 can be parallel to the second bearing surface P2 of the second carrier 400.

[0138] Optionally, the electronic component transfer device can further acquire, when the second bearing surface P2 of the second carrier 400 is parallel to the first bearing surface P1 of the base platform 100 and after the first carrier 300 is moved to the first designated position, a second deflection deviation of the third bearing surface P3 of the first carrier 300 relative to the second bearing surface P2 of the second carrier 400 by the plurality of distance sensors 900a, so that the third bearing surface P3 is parallel to the second bearing surface P2 after correction according to the second deflection deviation.

[0139] Here, after the first carrier 300 is moved to the first designated position, the orthographic projections of the plurality of distance sensors 900a on the second bearing surface P2 of the second carrier 300 can all be located within the second bearing surface P2, so as to ensure that the second deflection deviation acquired by the electronic component transfer device through the plurality of distance sensors 900a is the deflection of the third bearing surface P3 of the first carrier 300 relative to the second bearing surface P2 of the second carrier 400.

[0140] It should be noted that after the new first carrier 300 is replaced, the first carrier 300 can have a third deflection degree along the second direction Y relative to the second carrier 400, and can have a fourth deflection degree along the first direction X. Thus, in the correction process of the first carrier 300, the first carrier 300 needs to be corrected along the first direction X and along the second direction Y, so that the third bearing surface P3 of the first carrier 300 can be parallel to the second bearing surface P2 of the second carrier 400.

[0141] Optionally, as shown in FIG. 7 and FIG. 8, the plurality of distance sensors 900a in the first detection module 900 can be divided into at least two first distance sensors 901 arranged along the first direction X and at least two second distance sensors 902 arranged along the second direction Y.

[0142] The electronic component transfer device can acquire the distance between each first distance sensor 901 and the second bearing surface P2 of the second carrier 400 through the at least two first distance sensors 901, so as to acquire the third deflection degree of the third bearing surface P3 relative to the second bearing surface P2 around the third axis L3. Here, the third axis L3 is parallel to the second direction Y.

[0143] The electronic component transfer device can further acquire the distance between each second distance sensor 902 and the second bearing surface P2 of the second carrier 400 through the at least two second distance sensors 902, so as to acquire the fourth deflection degree of the third bearing surface P3 relative to the second bearing surface P2 around the fourth axis L4. Here, the fourth axis L4 can be parallel to the first direction X.

[0144] Here, when the transfer apparatus of electronic components acquires, by each first distance sensor 901, that the distances between each first distance sensor 901 and the second bearing surface P2 are not the same, the third bearing surface P3 of the first stage 300 has a third deflection degree relative to the second bearing surface P2 of the second stage 400, that is, the third bearing surface P3 is not parallel to the second bearing surface P2. Similarly, when the transfer apparatus of electronic components acquires, by each second distance sensor 902, that the distances between each second distance sensor 902 and the second bearing surface P2 are not the same, the third bearing surface P3 of the first stage 300 has a fourth deflection degree relative to the second bearing surface P2 of the second stage 400, that is, the third bearing surface P3 is not parallel to the second bearing surface P2. Therefore, the third deflection degree and the fourth deflection degree need to be corrected until the distances between each first distance sensor 901 and the second bearing surface P2 are the same, and the distances between each second distance sensor 902 and the second bearing surface P2 are the same, and the third bearing surface P3 is parallel to the second bearing surface P2.

[0145] For example, the number of first distance sensors 901 arranged along the first direction X can be two, and the number of second distance sensors 902 arranged along the second direction Y can be two.

[0146] It should be noted that the third deflection degree of the third bearing surface P3 of the first stage 300 around the third axis L3, and the fourth deflection degree of the third bearing surface P3 of the first stage 300 around the fourth axis L4, can be the deflection angle of the third bearing surface P3 relative to the second bearing surface P2 of the second stage 400.

[0147] Optionally, please refer to FIG. 9, which is a structural schematic diagram of a first stage according to an embodiment of the present application. The transfer apparatus of electronic components can further include a movable member 1300, which can be movably connected to the base 100, and can move relative to the first bearing surface P1 of the base 100 along the first direction X and the second direction Y.

[0148] It should be noted that, as shown in FIG. 5 and FIG. 9, the transfer apparatus of electronic components can further include a first cross beam 1401, which can be parallel to the second direction Y in the extension direction, and can move relative to the base 100 along the first direction X. The movable member 1300 can be connected to the first cross beam 1401, and can move relative to the base 100 by moving relative to the first cross beam 1400 along the second direction Y. In this way, the transfer apparatus of electronic components can drive the movable member 1300 to move along the first direction X by driving the first cross beam 1401, and can drive the movable member 1300 to move relative to the first cross beam 1401 along the second direction Y.

[0149] As shown in FIG. 8, the first carrier 300 in the electronic component transfer device can include a first carrier body 301, an adapter 302, a second adjustment assembly 303, and a third adjustment assembly 304. The first carrier body 301 in the first carrier 300 can have a third bearing surface P3. The first carrier body 301 can be connected to the adapter 302 through the second adjustment assembly 303, and the second adjustment assembly can be used to correct a third deflection degree. The adapter 302 in the first carrier 300 can be connected to the movable element 1300 through the third adjustment assembly 304, and the third adjustment assembly 304 can be used to correct a fourth deflection degree.

[0150] It should be noted that the first carrier 300 can be connected together through the adapter 302 and the movable element 1300 and the first beam 1401. In this way, the electronic component transfer device can drive the first carrier 300 to move along the first direction X by driving the first beam 1401, and the electronic component transfer device can drive the first carrier 300 to move along the second direction Y relative to the first beam 1401 by driving the movable element 1300.

[0151] Optionally, please refer to FIG. 10 and FIG. 11, FIG. 10 is a structural schematic diagram of another first carrier provided by the embodiment of the present application, and FIG. 11 is a top view of another first carrier provided by the embodiment of the present application. The second adjustment assembly 303 can include a first connecting shaft 3031 and a fourth adjustment screw 3032. The first connecting shaft 3031 in the second adjustment assembly 303 can be fixedly connected with the first carrier body 301 and can be rotationally connected with the adapter 302, and the axis of the first connecting shaft 3031 can coincide with the third axis L3.

[0152] Here, the first connecting shaft 3031 can be located at the middle position of the first carrier body 301 in the first direction X. The first carrier body 301 can rotate relative to the adapter 302 by rotating around the first connecting shaft 3031. In this way, after the electronic component transfer device obtains the third deflection degree, the third deflection degree can be corrected by rotating the first carrier body 301 around the first connecting shaft 301.

[0153] The fourth adjustment screw 3032 in the second adjustment assembly 303 can be used to fix the first carrier body 301 and the adapter 302 after the first carrier body 301 rotates relative to the adapter 302 through the first connecting shaft 3031.

[0154] Optionally, as shown in FIG. 12, which is a structural schematic view of a first carrier provided by an embodiment of the present application, the adapter frame 302 in the first carrier 300 can include a mounting frame body 3021 and a third plate body 3022 connected with each other. The third plate body 3022 in the adapter frame 302 can be connected with the movable element 1300 through a third adjusting assembly 304. The mounting frame body 3021 in the adapter frame 302 can have a first opening K1 and a first adjusting hole K2. At least part of the first connecting shaft 3031 in the second adjusting assembly 303 can be located in the first opening K1. After the first carrier main body 301 is rotated relative to the adapter frame 302 through the first connecting shaft 3031, the fourth adjusting screw 3032 can pass through the first adjusting hole K2 to be connected with the first carrier main body 301.

[0155] It should be noted that during the rotation of the first carrier main body 301 around the first connecting shaft 3031 and relative to the adapter frame 302, the fourth adjusting screw 3032 can always be located in the first adjusting hole K2, and the first adjusting hole K2 can be an eccentric adjusting hole, so that the fourth adjusting screw 3032 does not interfere with the rotation of the first carrier main body 301 during the rotation of the first carrier main body 301 around the first connecting shaft 3031.

[0156] Optionally, as shown in FIG. 12, the third adjusting assembly 304 can include a second connecting shaft 3041 and a plurality of fifth adjusting screws 3042. The second connecting shaft 3041 in the third adjusting assembly 304 can be fixedly connected with the movable element 1300 and rotatably connected with the adapter frame 302, and the axis of the second connecting shaft 3041 can coincide with the fourth axis L4. Each of the fifth adjusting screws 3042 in the third adjusting assembly 304 can be used to fix the adapter frame 302 and the movable element 1300 after the adapter frame 302 is rotated relative to the movable element 1300 through the second connecting shaft 3032, so as to correct the fourth deflection degree.

[0157] Optionally, as shown in FIG. 12 and FIG. 13, which is a front view of a first carrier provided by an embodiment of the present application, the mounting frame body 3021 in the adapter frame 302 can be connected with the first carrier main body 301 through the second adjusting assembly 303. The third plate body 3022 can have a second opening K3 and a plurality of second adjusting holes K4, and at least part of the second connecting shaft 3041 can be located in the second opening K3. Here, since the second connecting shaft 3041 is fixedly connected with the movable element 1300, the adapter frame 302 can be rotated relative to the movable element 1300 through the rotation of the third plate body 3022 around the second connecting shaft 3041. After the adapter frame 302 is rotated relative to the movable element 1300 through the second connecting shaft 3041 in the third adjusting assembly 304, each of the fifth adjusting screws 3042 can pass through a corresponding second adjusting hole K4 to be connected with the movable element 1300.

[0158] It should be noted that during the rotation of the adapter frame 302 around the second connecting shaft 3041 and relative to the movable element 1300, each fifth adjusting screw 3042 can be located in the corresponding second adjusting hole K4 at all times. Here, the second adjusting hole K4 is also an eccentric adjusting hole, so that during the rotation of the adapter frame 302 around the second connecting shaft 3042, the fifth adjusting screw 3042 does not interfere with the rotation of the adapter frame 302.

[0159] As shown in FIG. 13, the third adjusting assembly 304 can include four fifth adjusting screws 3042, and correspondingly, the third plate body 3022 can have four second adjusting holes K4. Each second adjusting hole K4 in the third adjusting assembly 304 can be an arc-shaped opening, each second adjusting hole K4 can be distributed around the center of the second opening K3, and the center of each second adjusting hole K4 can be the center of the second opening K3. In this way, during the rotation of the third plate body 3022 around the second connecting shaft 3041, each second adjusting hole K4 can rotate relative to the corresponding fifth adjusting screw 3042 to ensure that the fifth adjusting screw 3042 does not interfere with the rotation of the third plate body 3022.

[0160] In the present application, as shown in FIG. 5 and FIG. 14, which is a partial enlarged view of another electronic component transfer device provided by the embodiments of the present application, the electronic component transfer device can further include a feeding support 1100. The feeding support 1100 in the electronic component transfer device has a fourth bearing surface P4, and the fourth bearing surface P4 of the feeding support 1100 is used to bear a new first substrate 010. After replacing the new feeding support 1100, the feeding support 1100 also needs to be corrected so that the position of the new first substrate 010 borne by the feeding support 1100 meets the requirements, so that the transfer precision of the subsequent electronic component transfer device to the electronic component can meet the requirements.

[0161] It should be noted that after the calibration of the loading table 1100, the fourth bearing surface P4 of the loading table 1100 needs to be parallel to the third bearing surface P3 of the first table 300, and the first mounting surface P5 of the loading table 1100 needs to be parallel to the first positioning surface P of the first table 300. That is, the loading table 1100 is calibrated according to the first table 300. Therefore, before the calibration of the loading table 1100, it is necessary to ensure that the third bearing surface P3 of the first table 300 is parallel to the fourth bearing surface P4 of the second table 400. Therefore, in the case of replacing the new first table 300 without replacing the loading table 1100, after the calibration of the first table 300 to make the third bearing surface P3 of the first table 300 parallel to the fourth bearing surface P4 of the second table 400, the loading table 1100 also needs to be calibrated to ensure that the fourth bearing surface P4 of the loading table 1100 is parallel to the third bearing surface P3 of the first table 300, and the first mounting surface P5 of the loading table 1100 is parallel to the first positioning surface P of the first table 300.

[0162] It should also be noted that in the case of replacing the new second table 400 without replacing the first table 300 and the loading table 1100, after the calibration of the second table 400 to make the second bearing surface P2 parallel to the first bearing surface P1, the first table 300 also needs to be calibrated to ensure that the third bearing surface P3 of the first table 300 is parallel to the second bearing surface P2 of the second table 400. And after the calibration of the first table 300 to make the third bearing surface P3 of the first table 300 parallel to the fourth bearing surface P4 of the second table 400, the loading table 1100 also needs to be calibrated to ensure that the fourth bearing surface P4 of the loading table 1100 is parallel to the third bearing surface P3 of the first table 300, and the first mounting surface P5 of the loading table 1100 is parallel to the first positioning surface P of the first table 300.

[0163] Optionally, as shown in FIG. 14, the electronic component transfer device can also acquire, when the third bearing surface P3 of the first table 300 is parallel to the second bearing surface P2 of the second table 400, and after the first table 300 moves to the second specified position, the third deflection deviation of the fourth bearing surface P4 of the loading table 1100 relative to the third bearing surface P3 of the first table 300 through the plurality of distance sensors 900a in the plurality of first detection modules 900, so that the fourth bearing surface P4 is parallel to the third bearing surface P3 after being calibrated according to the third deflection deviation.

[0164] Here, after the first carrier 300 moves to the second specified position, the projections of the plurality of distance sensors 900a on the fourth bearing surface P4 of the loading carrier 1100 can all be located within the fourth bearing surface P4, so as to ensure that the third deflection deviation of the electronic component transfer device obtained by the plurality of distance sensors 900a is the fifth deflection degree of the fourth bearing surface P4 of the loading carrier 1100 relative to the first carrier 300.

[0165] It should be noted that after the new loading carrier 1100 is replaced, the loading carrier 1100 can have a fifth deflection degree along the second direction Y relative to the first carrier 300, and can have a sixth deflection degree along the first direction X. Thus, in the correction process of the loading carrier 1100, the loading carrier 1100 needs to be corrected along the first direction X and along the second direction Y, so that the fourth bearing surface P4 of the loading carrier 1100 can be parallel to the third bearing surface P3 of the first carrier 300.

[0166] Optionally, as shown in FIG. 15, FIG. 15 is a partial enlarged view of another electronic component transfer device provided by the embodiment of the application. Similarly, the plurality of distance sensors 900a in the first detection module 900 can be divided into at least two first distance sensors 901 arranged along the first direction X, and at least two second distance sensors 902 arranged along the second direction Y.

[0167] The electronic component transfer device can obtain the distance between each first distance sensor 901 and the fourth bearing surface P4 of the loading carrier 1100 through the at least two first distance sensors 901, so as to obtain the fifth deflection degree of the fourth bearing surface P4 of the loading carrier 1100 relative to the third bearing surface P3 of the first carrier 300 around the fifth axis L5. Here, the fifth axis L5 is parallel to the second direction Y.

[0168] The electronic component transfer device can also obtain the distance between each second distance sensor 902 and the fourth bearing surface P4 of the loading carrier 1100 through the at least two second distance sensors 902, so as to obtain the sixth deflection degree of the fourth bearing surface P4 of the loading carrier 1100 relative to the third bearing surface P3 of the first carrier 300 around the sixth axis L6. Here, the sixth axis L6 is parallel to the first direction X.

[0169] Here, when the transfer device of the electronic component obtains different distances between each first distance sensor 901 and the fourth bearing surface P4 through each first distance sensor 901, the fourth bearing surface P4 of the loading platform 1100 has a fifth deflection degree relative to the third bearing surface P3 of the first platform 300, that is, the fourth bearing surface P4 is not parallel to the third bearing surface P3. Similarly, when the transfer device of the electronic component obtains different distances between each second distance sensor 902 and the fourth bearing surface P4 through each second distance sensor 902, the fourth bearing surface P4 of the loading platform 1100 has a sixth deflection degree relative to the third bearing surface P3 of the first platform 300, that is, the fourth bearing surface P4 is not parallel to the third bearing surface P3. Therefore, the fifth deflection degree and the sixth deflection degree need to be corrected until the distances between each first distance sensor 901 and the fourth bearing surface P4 are the same, and the distances between each second distance sensor 902 and the fourth bearing surface P4 are the same, and the fourth bearing surface P4 is parallel to the third bearing surface P3.

[0170] For example, the number of first distance sensors 901 arranged along the first direction X can be two, and the number of second distance sensors 902 arranged along the second direction Y can be two.

[0171] It should be noted that the fifth deflection degree of the fourth bearing surface P4 of the loading platform 1100 around the fifth axis L5, and the sixth deflection degree of the fourth bearing surface P4 of the loading platform 110 around the sixth axis L6, can be the deflection angle of the fourth bearing surface P4 relative to the third bearing surface P3.

[0172] Optionally, please refer to FIG. 16, which is a structural schematic diagram of a loading platform provided by an embodiment of the present application. The loading platform 1100 can include a loading carrier body 1110 and a fourth adjusting assembly 1120. The loading carrier body 1110 has a fourth bearing surface P4. The loading carrier body 1110 can be connected with the base platform 100 through the fourth adjusting assembly 1120, and the fourth adjusting assembly 1120 can be used to correct the third deflection deviation.

[0173] Optionally, as shown in FIG. 17, which is an exploded view of a loading platform provided by an embodiment of the present application, the fourth adjusting assembly 1120 can include four sixth adjusting screws 1121. The four sixth adjusting screws 1121 in the fourth adjusting assembly 1120 can be arranged as two rows along the first direction X and as two columns along the second direction Y. The two rows of sixth adjusting screws 1121 can be distributed on both sides of the fifth axis L5, and the two columns of sixth adjusting screws 1121 can be distributed on both sides of the sixth axis L6. At least one row of sixth adjusting screws 1121 can be used to correct the fifth deflection angle, and at least one column of sixth adjusting screws can be used to correct the sixth deflection degree.

[0174] Optionally, as shown in FIG. 14, the loading platform 1100 can further have a first mounting surface P5 intersecting the fourth bearing surface P4, and the first platform 300 can further have a first positioning surface P6 intersecting the third bearing surface P3. The electronic component transfer device can further obtain, by the second detection module 1200 mounted on the loading platform 1100, a fourth deflection deviation of the first mounting surface P5 relative to the first positioning surface P6 when the third bearing surface P3 of the first platform 300 is parallel to the fourth bearing surface P4 of the loading platform 1100, and after the first platform 300 moves to the third designated position, so that the first positioning surface P6 can be parallel to the first mounting surface P5 after correction according to the fourth deflection deviation.

[0175] Optionally, as shown in FIG. 15, the second detection module 1200 can include a plurality of third distance sensors 1201. After the first platform 300 moves to the third designated position, the first positioning surface P6 of the first platform 300 can be oppositely arranged with the first mounting surface P5 in the first direction X or the second direction Y, so that the third distance sensors 1201 in the second detection module 1200 can detect the distance between the third distance sensors 1201 and the first positioning surface P6.

[0176] Optionally, as shown in FIG. 15, the arrangement direction of the plurality of third distance sensors 1201 in the second detection module 1200 can be parallel to the first mounting surface P5 of the loading platform 1100. The electronic component transfer device can obtain, by the plurality of third distance sensors 1201, the distance between each third distance sensor 1201 and the first positioning surface P6 of the first platform 300, to obtain a seventh deflection degree of the first mounting surface P5 of the loading platform 1100 relative to the first positioning surface P6 of the first platform 300 around a seventh axis L7. Here, the seventh axis L7 can intersect the first direction X and can intersect the second direction Y.

[0177] Optionally, as shown in FIG. 16, the loading platform 1110 can include a loading platform body 1100, a fourth adjustment assembly 1120, and a fifth adjustment assembly 1130. The loading platform body 1110 can have a fourth bearing surface P4, and the loading platform body 1110 can be connected with a fourth plate body 1140 through the fourth adjustment assembly 1120, which is used to correct the third deflection deviation. The fourth plate body 1140 is connected with the base platform 100 through the fifth adjustment assembly 1130, which is used to correct the fourth deflection deviation.

[0178] Optionally, as shown in FIG. 15 and FIG. 17, FIG. 17 is a structural schematic diagram of another loading platform provided by the embodiment of the present application. The fourth plate body 1140 can have a plurality of third adjusting holes K5, which can be distributed around the seventh axis L7. The fifth adjusting assembly 1130 can include a plurality of seventh adjusting screws 1131, which can correspond to the plurality of third adjusting holes K5 one by one. After the fourth plate body 1140 rotates around the seventh axis L7 relative to the base 100, each seventh adjusting screw 1131 can pass through the corresponding third adjusting hole K5 and be connected with the base 1300 to correct the seventh deflection degree.

[0179] It should be noted that, as shown in FIG. 18, FIG. 18 is a top view of a loading platform provided by the embodiment of the present application. The fifth adjusting assembly 1130 can include four seventh adjusting screws 1131, and correspondingly, the fourth plate body 1140 can have four third adjusting holes K5. The four third adjusting holes K5 in the fourth plate body 1140 can be arc-shaped slots to ensure that the seventh adjusting screw 1131 does not interfere with the rotation of the fourth plate body 1140 during the rotation of the fourth plate body 1140 around the seventh axis L7.

[0180] In the present application, as shown in FIG. 19, FIG. 19 is a structural schematic diagram of still another loading platform provided by the embodiment of the present application. The loading platform body 1100 can include a bearing body 1111 and a guide rail plate body 1112. The bearing body 1111 has a fourth bearing surface P4, and the bearing body 1111 can slide relative to the guide rail plate body 1112 in a direction parallel to the seventh axis L7 to realize loading and unloading of the loading platform 1100.

[0181] As shown in FIG. 19, the side of the guide rail plate body 1112 away from the bearing body 1111 can be fixedly connected with the fourth plate body 1140. In this way, during the correction of the seventh deflection degree by the fifth adjusting assembly 1130, the rotation of the fourth plate body 1140 around the seventh axis L7 can drive the guide rail plate body 1112 and the bearing body 1111 to rotate, so that the seventh angular deflection can be corrected.

[0182] In the present application, as shown in FIG. 19, the loading platform body 1110 can further include a fifth plate body 1113. The fifth plate body 1113 can be located on the side of the fourth plate body 1130 away from the base 100 and can be fixedly connected with the guide rail plate body 1112. The fifth plate body 1113 can be fixedly connected with the fourth plate body 1130 by the fourth adjusting assembly 1120. In this way, during the correction of the fourth deflection deviation by the fourth adjusting assembly 1120, the fifth plate body 1113 can drive the guide rail plate body 1112 and the bearing body 1111 to move, so that the fourth deflection deviation can be corrected.

[0183] In summary, the electronic component transfer device provided in the embodiments of the present application includes a base, a first carrier and a second carrier. After a new second carrier is replaced, the electronic component transfer device can quickly obtain a first deflection deviation of a second bearing surface of the second carrier relative to a first bearing surface of the base through a first detection module installed on the first carrier. Then, after the first deflection deviation is obtained, the staff can correct the second carrier according to the first deflection deviation until the second bearing surface of the second carrier is parallel to the first bearing surface of the base, so that the transfer precision of the electronic component during the subsequent transfer of the second carrier can meet the requirements. In this way, the correction time of the newly replaced structure is shortened, and the downtime of the electronic component transfer device after the new structure is replaced is shortened, thereby improving the utilization rate of the electronic component transfer device.

[0184] Please refer to FIG. 20, which is a structural schematic diagram of another electronic component transfer device provided in the embodiments of the present application. The electronic component transfer device can further include a transfer head 200.

[0185] The transfer head 200 in the electronic component transfer device can be movably connected with the base 100. The transfer head 200 can include a driving member 201 and a needle 202 detachably connected with the driving member 201. The driving member 201 is used to drive the needle 202 to move in a first direction Z, where the first direction Z is parallel to the axial direction of the needle 202.

[0186] In the present application, as shown in FIGS. 3 and 4, after the electronic component transfer device drives the first substrate 010 to move through the first carrier 300, so that the needle 202, the electronic component 011 in the first substrate 010 that needs to be transferred and the connecting part 021 in the second substrate 020 corresponding to the electronic component 011 coincide in the first direction Z, the electronic component transfer device can drive the needle 202 to apply a force to the side of the first substrate 010 away from the second substrate 020 in the first direction Z through the driving member 201, so as to transfer the electronic component 011 in the first substrate 010 to the corresponding connecting part 021 in the second substrate 020, so that the electronic component 011 transferred to the second substrate 020 can be electrically connected with the corresponding connecting part 021. That is, the electronic component transfer device can complete the die bonding of each electronic component 011 in the first substrate 010.

[0187] As shown in FIGS. 3 and 4, the needle 202 in the electronic component transfer device can include a needle sleeve 2021 and a needle rod 2022. The needle sleeve 2021 in the needle 202 can be sleeved on the needle rod 2022, and the needle sleeve 2021 and the needle rod 2022 can be elastically connected in the axial direction of the needle 202. The tip of the needle rod 2022 can protrude from the needle sleeve 2021.

[0188] It should be noted that the needle sleeve 2021 and the needle rod 2022 elastically connected in the axial direction can move relative to each other in the axial direction, and the length of the tip of the needle rod 2022 extending out of the needle sleeve 2021 can change through the movement of the needle rod 2022 relative to the needle sleeve 2021 in the axial direction. For example, after the needle rod 2022 is displaced inward relative to the needle sleeve 2021 in the axial direction, the tip of the needle rod 2022 can move in a direction towards the needle sleeve 2021 to be retracted inward relative to the needle sleeve 2021 by a certain distance.

[0189] It should also be noted that the elastic connection of the needle sleeve 2021 and the needle rod 2022 in the axial direction can be achieved by an elastic element, for example, the elastic element can be a spring. The elastic element can also be sleeved on the needle rod 2022, and one end of the elastic element can abut against the needle sleeve 2021 and the other end can abut against the needle rod 2022. In this way, during the movement of the needle rod 2022 relative to the needle sleeve 2021 in the axial direction, the elastic element can be compressed or elongated.

[0190] In the present application, during the process of driving the ejector pin 202 to transfer the electronic component 011, the driving member 201 can drive the ejector pin 202 to move in the first direction Z towards the electronic component 011, so that the tip of the needle rod 2022 in the ejector pin 202 can move in the first direction Z towards the corresponding connecting portion 021 of the electronic component 011 until the electronic component 011 contacts the corresponding connecting portion 021. And during this process, the needle rod 2022 and the needle sleeve 2021 in the ejector pin 202 do not move relative to each other in the first direction Z.

[0191] In order to ensure the firmness of the fixed connection between the electronic component 011 and the corresponding connecting portion 021, after the electronic component 011 contacts the corresponding connecting portion 021, the driving member 201 can still drive the ejector pin 202 to move in the first direction Z towards the connecting portion 021, and during this process, the needle sleeve 2021 in the ejector pin 202 continues to move in the first direction Z, while the tip of the needle rod 2022 in the ejector pin 202 abuts against the electronic component 021 and does not change its position in the first direction Z. Therefore, during this process, the elastic element between the needle sleeve 2021 and the needle rod 2022 is continuously compressed, the elastic force of the end of the elastic element abutting against the needle rod 2022 is continuously increased, and the pressing force of the tip of the needle rod 2022 on the electronic component 011 is continuously increased, until the pressing force increases to a pressing force that can make the connection between the electronic component 011 and the corresponding connecting portion 021 firm, the needle sleeve 2021 no longer moves, and the electronic component 011 is connected to the corresponding connecting portion 021.

[0192] It should be noted that the pressing force needs to be adapted to the electronic component 011 so that the connection between the electronic component 011 and the corresponding connecting portion 021 is appropriate, so as to avoid the problem that the electronic component 011 is damaged due to the pressing force being too large, or the problem that the connection between the electronic component 011 and the corresponding connecting portion 021 is not firm enough due to the pressing force being too small. To this end, in order to ensure that the connection between the electronic component 011 and the corresponding connecting portion 021 is appropriate, the distance by which the ejector pin 202 continues to move in the first direction Z towards the connecting portion 021 after the electronic component 011 contacts the corresponding connecting portion 021 needs to be adapted to the electronic component 011.

[0193] It should also be noted that, in the use process of the ejector pin 202, the ejector pin 202 is prone to damage, and therefore the ejector pin 202 needs to be replaced frequently. After the new ejector pin 202 is replaced, the new ejector pin 202 usually needs to be debugged so that the debugged ejector pin 202 can normally transfer the electronic component 011, that is, so that the debugged ejector pin 202 can apply an appropriate pressing force to the electronic component 011 to ensure that the connection between the electronic component 011 and the corresponding connecting portion 021 is appropriate.

[0194] In the prior art, after the new ejector pin 202 is replaced, the ejector pin 202 is debugged by actually transferring the electronic component 011 until the connection between the electronic component 011 transferred by the ejector pin 202 and the corresponding connecting portion 021 is appropriate. It should be noted that, in the debugging process of the ejector pin 202, the pressing force of the tip of the needle rod 2022 in the ejector pin 202 on the electronic component 011 is adjusted by continuously adjusting the distance by which the ejector pin 202 moves in the first direction Z towards the connecting portion 021 until a suitable moving distance is adjusted, so that the pressing force of the tip of the needle rod 2022 in the ejector pin 202 on the electronic component 011 is adapted to the electronic component 011. In this way, after the new ejector pin 202 is replaced each time, the new ejector pin 202 needs to be debugged by actually transferring the electronic component 011 until the new replaced ejector pin 202 is adapted to the electronic component 011, which results in that the debugging time of the ejector pin 202 is relatively long after the new ejector pin 202 is replaced each time, and further results in that the transfer efficiency of the transfer device for the electronic component is relatively low.

[0195] To this end, the electronic component transfer device in the present application can also perform a pressing force test on the ejector pin 202 before the ejector pin 202 transfers the electronic component 011, i.e., during the commissioning phase of the ejector pin 202, to obtain a pressure curve corresponding to the ejector pin. Here, the pressure curve corresponding to the ejector pin 202 obtained by the electronic component transfer device is used to reflect the change relationship between the pressing force exerted by the tip of the needle shaft 2022 in the ejector pin 202 and the compression amount of the inward displacement of the needle shaft 2022 relative to the needle sleeve 2021. In this way, only by referring to the pressure curve of the ejector pin 202 and the pressing force required to be exerted by the tip of the needle shaft 2022 in the ejector pin 202, the corresponding compression amount can be selected.

[0196] In this way, according to the pressure curve corresponding to the ejector pin 202 and the pressing force required to be exerted by the tip of the needle shaft 2022 in the ejector pin 202 on the electronic component 011, the compression amount of the inward displacement of the needle shaft 2022 in the ejector pin 202 relative to the needle sleeve 2021 can be directly obtained. The compression amount is the distance that the needle sleeve 2021 in the ejector pin 100 needs to continue to move in the first direction Z towards the connecting part 021 after the electronic component 011 contacts the corresponding connecting part 021. Therefore, after replacing a new ejector pin 202, the ejector pin 202 does not need to be commissioned again by actually transferring the electronic component 011 to determine the distance that the ejector pin 202 needs to move in the first direction Z towards the connecting part 021. This greatly reduces the commissioning time of the new ejector pin 202 after replacing the new ejector pin 202, and further improves the transfer efficiency of the electronic component 011.

[0197] Please refer to FIG. 21, which is a structural schematic diagram of another electronic component transfer device provided by an embodiment of the present application. The electronic component transfer device can also include a force sensor 500. The force sensor 500 in the electronic component transfer device is located on the base 100.

[0198] In the present application, the electronic component transfer device is configured to drive the ejector pin 202 to move towards the force sensor 500 by the driving member 201, and obtain the pressure curve corresponding to the ejector pin 202 by the force sensor 500 after the tip of the needle shaft 2022 in the ejector pin 202 contacts the force sensor 500.

[0199] For example, referring to FIG. 22, FIG. 22 is a diagram of a pressure curve of a plurality of pogo pins. The horizontal axis of FIG. 22 represents the compression amount of the needle rod 2022 relative to the needle sleeve 2021, and the vertical axis represents the pressing force of the tip of the needle rod 2022 on the force sensor 500. Since the pogo pin 202 is easily damaged, before the pogo pin 202 is transferred to the electronic component 021, the plurality of pogo pins 202 can be tested by the electronic component transfer device to obtain the pressure curve corresponding to each pogo pin 202 through the force sensor 500. In this way, when a new pogo pin 202 needs to be replaced later, a new pogo pin 202 can be selected from the plurality of pogo pins 202 to replace the damaged pogo pin 202. Then, according to the pressure curve corresponding to the selected pogo pin 202 and the pressing force of the previous pogo pin 202 on the electronic component 011, the compression amount of the needle rod 2022 of the new pogo pin 202 relative to the needle sleeve 2021 can be obtained. In this way, the time required for debugging the new pogo pin 202 is further saved.

[0200] Optionally, after the pogo pin 202 is driven by the driving member 201 to move towards the force sensor 500 so that the tip of the needle rod 2022 of the pogo pin 202 is in a just-contact state with the force sensor 500, the electronic component transfer device can determine a first pressing force applied by the tip of the needle rod 2022 through the force sensor 500. It should be noted that the first pressing force is the pressing force that can be applied by the tip of the needle rod 2022 when the tip of the needle rod 2022 is in a just-contact state with the force sensor 500. As shown in FIG. 22, the pressing force corresponding to the compression amount of zero in the pressure curve of the pogo pin 202 is the first pressing force of the pogo pin 202.

[0201] Optionally, after the tip of the needle rod 2022 is in a just-contact state with the force sensor 500, the electronic component transfer device can drive the pogo pin 202 to move towards the force sensor 500 reciprocatingly or unidirectionally for multiple times through the driving member 201, and each movement can cause the needle rod 2022 of the pogo pin 202 to move inward relative to the needle sleeve 2021. After each movement of the needle rod 2022 relative to the needle sleeve 2021, the electronic component transfer device can determine a second pressing force applied by the tip of the needle rod 2022 through the force sensor 500. Then, the electronic component transfer device can determine the pressure curve corresponding to the pogo pin 202 through the first pressing force and the plurality of second pressing forces, and the distance of each movement of the needle rod 2022 relative to the needle sleeve 2021.

[0202] In the present application, the driving member 201 in the electronic component transfer device can include a driving motor and a transmission mechanism. The driving motor in the driving member 201 can be connected with the transmission mechanism, the transmission mechanism can be connected with the needle 202, and the driving motor can be used to drive the needle 202 to move through the transmission mechanism. It should be noted that the driving motor is a device that can convert electrical energy into mechanical energy. The mechanical energy of the driving motor can be output through the output shaft of the motor, and the mechanical energy output by the output shaft of the motor is rotary kinetic energy. The transmission mechanism in the driving member 201 is a device that can convert the rotary kinetic energy output by the motor into linear kinetic energy, so that the transmission mechanism can drive the needle 202 to move linearly in the first direction Z. For example, the transmission mechanism in the driving member 201 can be a gear and rack transmission mechanism, a worm and gear transmission mechanism, or a ball screw transmission mechanism, etc. The present application does not limit this.

[0203] Optionally, the electronic component transfer device can obtain the feedback current of the driving motor during the process that the driving motor in the driving member 201 drives the needle 202 to move towards the force sensor 500 through the transmission mechanism. And the electronic component transfer device can determine that the tip of the needle rod 2022 is in the state of just contacting the force sensor 500 after determining that the feedback current of the driving motor meets the preset condition. In this way, the electronic component transfer device can determine the first pressing force applied by the tip of the needle rod 2022 through the force sensor 500.

[0204] Here, it should be noted that the driving motor can include a driver, which can control the driving current of the driving motor, so that the driving motor can output corresponding mechanical energy under the action of the driving current, to drive the needle 202 to move through the transmission mechanism. During the process that the driving motor drives the needle 202 to move towards the force sensor 500 through the transmission mechanism until the tip of the needle rod 2022 contacts the force sensor 500, the driving current of the driving motor remains constant. And during the process that the driving motor continues to drive the needle 202 to move towards the force sensor 500 through the transmission mechanism after the tip of the needle rod 2022 contacts the force sensor 500, the driving current of the driving motor will change, and the change of the driving current can be fed back to the driver, so that the driver can detect the change of the driving current. It should also be noted that the above-mentioned preset condition is that the change value of the driving current of the driving motor is greater than the change threshold of the driving current. Therefore, the electronic component transfer device can determine that the tip of the needle rod 2022 is in the state of just contacting the force sensor 500 through the change of the driving current of the driving motor.

[0205] In a possible case, after the electronic component transfer device determines that the tip of the needle rod 202 is in contact with the force sensor 500, the electronic component transfer device drives the needle rod 202 to continue to move towards the force sensor 500 in a single direction for multiple times through the driving member 201. After the tip of the needle rod 2022 is in contact with the force sensor 500, the electronic component transfer device drives the needle rod 202 to continue to move towards the force sensor 500 in a single direction for multiple times through the driving member 201. In this case, the needle sleeve 2021 in the needle rod 202 continues to move towards the force sensor 500 in a single direction for multiple times, while the tip of the needle rod 2022 is always in contact with the force sensor 500 and does not move. In this way, each time the driving member 201 drives the needle rod 202 to continue to move towards the force sensor 500, the needle rod 2022 can be displaced inward relative to the needle sleeve 2021. In this case, for any two adjacent movements, the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 in the previous movement can be the same as the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 in the subsequent movement. That is, after the tip of the needle rod 2022 is in contact with the force sensor 500, the electronic component transfer device drives the needle rod 202 to move towards the force sensor 500 each time through the driving member 201 by the same distance. For example, after the tip of the needle rod 2022 is in contact with the force sensor 500, the electronic component transfer device drives the needle rod 202 to move towards the force sensor 500 each time through the driving member 201 by a distance of 5 microns.

[0206] In another possible case, after the electronic component transfer apparatus determines that the tip of the needle rod 202 is in contact with the force sensor 500, the electronic component transfer apparatus drives the needle rod 202 to continue to reciprocate towards the force sensor 500 for multiple times through the driving member 201. After the tip of the needle rod 2022 is in contact with the force sensor 500, the electronic component transfer apparatus drives the needle rod 202 to continue to reciprocate towards the force sensor 500 for multiple times through the driving member 201. In each movement, the driving member 201 can first drive the needle sleeve 201 to move away from the force sensor 500, so that the tip of the needle rod 2022 in the needle rod 202 is separated from the force sensor 500, and then the driving member 201 can drive the needle rod 202, that is, the needle sleeve 201 to move towards the force sensor 500 for the next movement, and it is necessary to ensure that each movement can make the needle rod 2022 inwardly displace relative to the needle sleeve 2021. In this case, the distance of each inward displacement of the needle rod 2022 relative to the needle sleeve 2021 can be in an arithmetic sequence. Here, for any two adjacent movements, the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 in the latter movement can be greater than the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 in the former movement. For example, for any two adjacent movements, the difference between the distances of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 can be 5 microns.

[0207] In the embodiment of the present application, after the electronic component transfer apparatus determines that the tip of the needle rod 202 is in contact with the force sensor 500, and the electronic component transfer apparatus drives the needle rod 202 to continue to move towards the force sensor 500 through the driving member 201, the needle rod 2022 in the needle rod 202 can inwardly displace relative to the needle sleeve 2021. Therefore, the distance of the electronic component transfer apparatus driving the needle rod 202 to continue to move towards the force sensor 500 through the driving member 201 is the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021.

[0208] In this way, after the electronic component transfer apparatus determines that the tip of the needle rod 202 is in contact with the force sensor 500, whether the electronic component transfer apparatus drives the needle rod 202 to continue to move towards the force sensor 500 for multiple times through the driving member 201 in one direction or reciprocate for multiple times, the electronic component transfer apparatus can determine the distance of the inward displacement of the needle rod 2022 relative to the needle sleeve 2021 by obtaining the distance of the needle rod 202 driven by the driving member 201 to continue to move towards the force sensor 500.

[0209] And, in the process of the electronic component transfer apparatus driving the driver 201 to continue moving the needle 202 reciprocally or unidirectionally towards the force sensor 500 for multiple times, after the tip of the needle shaft 2022 just contacts the force sensor 500, the electronic component transfer apparatus needs to continue driving the needle 202 to move towards the force sensor 500 by the driver 201 each time after the needle shaft 2022 is displaced inward relative to the needle sleeve 2021, so that the force sensor 500 measures the second pressing force exerted by the tip of the needle shaft 2022 thereon. In this way, the electronic component transfer apparatus can obtain the corresponding pressure curve based on the distance of the inward displacement of the needle shaft 2022 relative to the needle sleeve 2021 after each movement, the second pressing force obtained by the force sensor 500, and the first pressing force obtained by the force sensor 500 when the tip of the needle shaft 2022 just contacts the force sensor 500.

[0210] For example, since the inward displacement of the needle shaft 2022 relative to the needle sleeve 2021 is zero when the tip of the needle shaft 2022 just contacts the force sensor 500, the electronic component transfer apparatus can obtain the first pressing force in this state by the force sensor 500. And in the process of continuing to drive the needle 202 by the driver 201, the electronic component transfer apparatus can obtain the distance of the inward displacement of the needle shaft 2022 relative to the needle sleeve 2021 after each movement, and the corresponding second pressing force obtained by the force sensor 500 after each movement. Therefore, the electronic component transfer apparatus can obtain the pressure curve of the needle 202 by fitting the first pressing force and these second pressing forces and the corresponding distances of the inward displacement of the needle shaft 2022 relative to the needle sleeve 2021.

[0211] In the embodiment of the present application, after the tip of the needle shaft 2022 just contacts the force sensor 500, the electronic component transfer apparatus can periodically drive the driver 201 to continue moving towards the force sensor 500 for multiple times, and the force sensor 500 can periodically measure the corresponding second pressing force after each movement.

[0212] That is, after each time the driving member 201 is moved unidirectionally or reciprocally towards the force sensor 500, the electronic component transfer apparatus waits for a period of time before the electronic component transfer apparatus drives the driving member 201 to continue the process of moving unidirectionally or reciprocally towards the force sensor 500. In this way, after each time the driving member 201 is moved unidirectionally or reciprocally towards the force sensor 500, the needle rod 2022 is stopped from moving inward relative to the needle sleeve 2021, and the force sensor 500 can stably measure the second pressing force corresponding to this movement, the electronic component transfer apparatus drives the driving member 201 to continue the process of moving unidirectionally or reciprocally towards the force sensor 500. In this way, the second pressing force obtained by the force sensor 500 each time is more accurate, thereby improving the accuracy of the pressure curve obtained.

[0213] For example, during the process in which the electronic component transfer apparatus periodically drives the driving member 201 to move unidirectionally or reciprocally towards the force sensor 500 multiple times, the time interval of the termination time of the needle rod 2022 being stopped from moving inward relative to the needle sleeve 2021 is the same. Here, this time interval is related to the length of time during which the force sensor 500 can stably output the second pressing force in response. For example, this time interval needs to be greater than or equal to the length of time during which the force sensor 500 can stably output the second pressing force in response.

[0214] It should be noted that in the above embodiment, during the process in which the electronic component transfer apparatus obtains the pressure curve corresponding to the pogo pin 202 through the force sensor 500, the electronic component transfer apparatus drives the pogo pin 202 to move unidirectionally towards the force sensor 500 all the time, that is, the pogo pin 202 is always in the state of the needle rod 2022 moving inward relative to the needle sleeve 2021, and in this application, this process can be a static test process of the pogo pin 202. Through this static test process, it can be ensured that the needle rod 2022 in the pogo pin 202 can normally move inward relative to the needle sleeve 2021. However, when the pogo pin 202 is in the state of the needle rod 2022 moving inward relative to the needle sleeve 2021, after the tip of the needle rod 2022 is separated from the force sensor 500, it is uncertain whether the needle rod 2022 can normally move outward relative to the needle sleeve 2021. Therefore, the electronic component transfer apparatus can perform the following dynamic test on the pogo pin 202 to ensure that the needle rod 201 in the pogo pin 202 can normally move outward relative to the needle sleeve 2021. In this way, through the static test and the dynamic test of the pogo pin 202, it can be ensured that the pogo pin 202 can be normally used.

[0215] In the present application, the electronic component transfer device can determine the compression amount of the needle rod 2022 in the needle 202 relative to the needle sleeve 2021 to move inwardly based on the pressure curve of the needle 202 and the target pressing force after obtaining the pressure curve corresponding to the needle 202. Here, the target pressing force can be any one of the pressing forces recorded in the pressure curve of the needle 202, for example, the target pressing force can include any point on the pressure curve fitted by the first pressing force and the second pressing force.

[0216] The electronic component transfer device can control the driving member 201 to drive the needle 202 to reciprocate towards the force sensor multiple times according to the compression amount corresponding to the selected target pressing force, so as to press the force sensor 500 multiple times by the needle 202, and the displacement amount of the needle rod 2022 in the needle 202 relative to the needle sleeve 2021 to move inwardly after each pressing of the force sensor 500 by the needle 202 is the compression amount corresponding to the selected target pressing force. That is, after the electronic component transfer device controls the driving member 201 to drive the needle 202 to complete one pressing of the force sensor 500 by the needle 202 according to the compression amount, the electronic component transfer device drives the needle 202 to move away from the force sensor 500 by the driving member 201, so that the tip of the needle rod 2022 in the needle 202 is separated from the force sensor 500. Then, the electronic component transfer device can drive the needle 202 to move towards the force sensor 500 by the driving member 201 according to the compression amount again, so as to complete the next pressing of the force sensor 500 by the needle 202.

[0217] In this way, after the electronic component transfer device controls the driving member 201 to drive the needle 202 to complete the pressing of the force sensor 500 by the needle 202 based on the compression amount each time, the electronic component transfer device can obtain a measured pressing force by the force sensor 500. After the electronic component transfer device controls the driving member 201 to drive the needle 202 to complete multiple pressings of the force sensor 500 by the needle 202 according to the compression amount, the electronic component transfer device can record multiple measured pressing forces by the force sensor 500. For example, the electronic component transfer device can control the driving member 201 to complete 50 pressings of the force sensor 500 by the needle 202 according to the compression amount, and the electronic component transfer device can record 50 measured pressing forces by the force sensor 500. Then, the electronic component transfer device can determine whether the needle 202 meets the requirements based on the multiple measured pressing forces and the target pressing force.

[0218] Optionally, after the electronic component transfer device records the plurality of to-be-tested pressing forces, the electronic component transfer device can first determine that the absolute value of the difference between the extreme value (the maximum value and the minimum value) of the plurality of to-be-tested pressing forces and the target pressing force is less than a first preset difference threshold, and then the electronic component transfer device can take the average value of the plurality of to-be-tested pressing forces as the average pressing force corresponding to the to-be-tested compression amount. When the absolute value of the difference between the average pressing force and the target pressing force is less than a second preset difference threshold, the electronic component transfer device can determine that the top pin 202 meets the requirements. Here, the first preset difference threshold is greater than or equal to the second preset difference threshold. In this way, the needle rod 2022 in the top pin 202 that meets the requirements can be normally displaced inward relative to the needle sleeve 2021 and can be normally displaced outward relative to the needle sleeve 2021. For example, in the case where the elastic connection between the needle rod 2022 in the top pin 202 and the needle sleeve 2021 in the axial direction is achieved by an elastic element, the elastic element in the top pin 202 that meets the requirements can be normally compressed and can be normally elongated.

[0219] In the present application, the electronic component transfer device can further include a spraying member. The electronic component transfer device can generate an identification code corresponding to the pressure curve of the top pin 202 after determining the pressure curve of the top pin 202. Here, the electronic component transfer device can generate the identification code corresponding to the pressure curve of the top pin 202 after determining the pressure curve of the top pin 202 and determining that the top pin 202 meets the requirements, and can spray the identification code corresponding to the top pin 202 to the top pin 202 through the spraying member. In this way, when the subsequent top pin 202 that meets the requirements needs to be used, the pressure curve corresponding to the top pin 202 can be directly obtained through the identification code on the top pin 202.

[0220] Optionally, please refer to FIG. 23, which is a structural schematic diagram of an electronic component transfer device according to another embodiment of the present application. The electronic component transfer device can further include a first carrier 300. The first carrier 300 in the electronic component transfer device can be movably connected with the base 100. It should be noted that the first carrier 300 in the electronic component transfer device can be the same as the first carrier 300 in the above-described electronic component transfer device, or can be different from the first carrier 300 in the above-described electronic component transfer device. The embodiments of the present application do not limit the first carrier 300 in the electronic component transfer device. The following embodiments will be described by taking the first carrier 300 in the electronic component transfer device as the same as the first carrier 300 in the electronic component transfer device as an example.

[0221] The first carrier 300 in the electronic component transfer device is used to carry an auxiliary substrate. The auxiliary substrate is a flexible substrate, and the auxiliary substrate can include at least one auxiliary component, and the adhesion between the auxiliary substrate and the auxiliary component can be greater than a first preset adhesion threshold, that is, the adhesion between the auxiliary substrate and the auxiliary component is higher. Here, the auxiliary component in the auxiliary substrate can be the same as the electronic component 011 in the first substrate 010, or can be different from the electronic component 011 in the first substrate 010.

[0222] It should be noted that in the case where the auxiliary component in the auxiliary substrate is different from the electronic component in the first substrate 010, the electronic component transfer device can also simulate the actual transfer process of the electronic component by the pressing of the auxiliary component in the auxiliary substrate by the probe 202 during the dynamic test. That is, the auxiliary component in the auxiliary substrate can be another component specially used to simulate the actual transfer process of the electronic component by the probe 202 during the dynamic test. The following embodiments are all described by taking the auxiliary component in the auxiliary substrate as the same as the electronic component 011 in the first substrate 010 as an example.

[0223] It should be further noted that during the die bonding process of the electronic component 011, the adhesion between the carrier film 012 in the first substrate 010 and the electronic component 011 needs to be less than the adhesion between the electronic component 011 and the corresponding connecting portion 021 in the second substrate 020. In this way, after the probe 202 abuts against the carrier film 012 away from the electronic component 011 to make the electronic component 011 contact the corresponding connecting portion 021, the electronic component 011 can be fixedly connected with the corresponding connecting portion 021. For this reason, the first preset adhesion threshold in the above embodiment is that the adhesion between the carrier film 012 and the electronic component 011 can ensure that the electronic component 011 can be bonded with the corresponding connecting portion 021 after the electronic component 011 contacts the corresponding connecting portion 021, and the electronic component 011 can be separated from the carrier film 012.

[0224] For this reason, the adhesion between the carrier film 012 in the first substrate 010 and the electronic component 011 can be less than a second preset adhesion threshold, and here, the second preset adhesion threshold is less than or equal to the first preset adhesion threshold. That is, the adhesion between the auxiliary substrate and the auxiliary component is higher than the adhesion between the carrier film 012 in the first substrate 010 and the electronic component 011. Therefore, after the auxiliary component in the auxiliary substrate contacts the corresponding connecting portion, the auxiliary component will not be bonded to the corresponding connecting portion 021, and will still be bonded with the carrier film in the auxiliary substrate.

[0225] It should be noted that the auxiliary substrate can be the first substrate without being processed. In the actual die bonding process of the electronic element, the auxiliary substrate needs to be processed to change the adhesion between the carrier film and the electronic element 011, so that the adhesion between the carrier film 012 and the electronic element 011 can be less than the first preset adhesion threshold, so as to obtain the first substrate, and ensure that the electronic element 011 can be separated from the carrier film and fixed with the corresponding connecting part 021 in the subsequent actual transfer process of the electronic element 011.

[0226] Optionally, the electronic element transfer device can also control the first carrier 300 to drive the auxiliary substrate to move before the driving member 201 drives the probe 202 to reciprocate towards the force sensor 500 multiple times according to the to-be-tested compression amount, so that the at least one electronic element 011 is arranged opposite to the force sensor 500, that is, arranged opposite in the first direction Z, so that the probe 202 can press any one of the at least one auxiliary element after the driving member 201 drives the probe 202 to move towards the force sensor 500 each time.

[0227] In this case, the target pressing force applied by the probe 202 to the auxiliary element can be the theoretical pressing force required to be applied to the electronic element 011 on the first substrate 010 to be transferred to the connecting part 021 of the second substrate 020.

[0228] Therefore, the above process is a simulation of the actual transfer process of the electronic element 011 by the probe 202 in the dynamic test process of the probe 202. However, in this process, since the adhesion between the auxiliary substrate and the auxiliary element is greater than the first preset adhesion threshold, and the adhesion between the force sensor 500 and the auxiliary element is zero, the auxiliary element will not be adhered to the force sensor 500 after the probe 202 contacts the auxiliary element and the force sensor 500, but will return to the initial state with the auxiliary substrate after the probe 202 no longer abuts against the auxiliary element. In this way, the electronic element transfer device can directly compare the average of the plurality of to-be-tested pressing forces with the theoretical pressing force of the electronic element 011 by simulating the actual transfer process of the electronic element 011 by the probe 202 to dynamically test the probe 202, so as to ensure that the probe 202 can meet the requirements in the actual transfer process of the electronic element 011, thereby improving the yield of the subsequent actual transfer of the electronic element 011 by the probe 202.

[0229] It should be noted that during the process of the electronic component transfer device controlling the drive unit 201 to move the ejector pin 202 against the auxiliary component and reciprocate towards the force sensor 500 multiple times, the electronic component transfer device can control the ejector pin 202 to press the same auxiliary component multiple times, or it can control the ejector pin 202 to press different auxiliary components multiple times. This application embodiment does not limit this.

[0230] In this embodiment, since the pressure curve corresponding to the pin can be obtained in advance by the electronic component transfer device, after such a pin is mounted on the drive member 201 in the transfer device, the transfer device can obtain the pressure curve corresponding to the pin 202 mounted on the drive member 201. In this way, the transfer device can control the moving distance of the pin 202 in the first direction Z according to the pressure curve of the pin 202, so that the pin 202 can apply a force to the side of the first substrate 010 away from the second substrate 020, so as to transfer the electronic component 011 in the first substrate 010 to the corresponding connecting portion 021 in the second substrate 020.

[0231] In this way, after replacing the ejector pin 202 in the transfer device, the required movement distance of the ejector pin 202 in the first direction can be obtained directly from the pressure curve corresponding to the new ejector pin 202. Therefore, it is no longer necessary to adjust the ejector pin by actually transferring electronic components to determine the required movement distance in the first direction. This greatly reduces the adjustment time for the new ejector pin after replacement, thereby improving the transfer efficiency of the electronic components.

[0232] Optionally, the electronic component transfer device can acquire the theoretical pressing force required to be applied to the electronic component 011 when it is transferred to the connecting part 021. Then, based on the pressure curve of the ejector pin 202 and the theoretical pressing force required to be applied to the electronic component 011, the electronic component transfer device can determine the target compression amount by which the needle bar 2022 in the ejector pin 202 displaces inward relative to the needle sleeve 2021. Then, the transfer device can control the movement distance of the ejector pin 202 in the first direction Z based on this target compression amount.

[0233] It should be noted that the transfer device can obtain the theoretical pressing force that the ejector pin 202 needs to apply to the electronic component 011 based on the amount of compression of the needle bar 2022 relative to the needle sleeve 2021 during the transfer of the electronic component 011 by the previous ejector pin 202, and the pressure curve corresponding to the previous ejector pin 202.

[0234] Optionally, the ejector pin 202 may have an identification code corresponding to the corresponding pressure curve, and the identification code on the ejector pin 202 may be formed by the spraying component in the above embodiment. The transfer device may further include a scanning component. The transfer device is capable of acquiring the pressure curve corresponding to the ejector pin 202 by scanning the identification code through the scanning component when the ejector pin 202 is mounted between the drive components 201.

[0235] It should be noted that during the commissioning phase of the transfer equipment, the transfer equipment can obtain pressure curves of multiple ejector pins 202 based on the transfer equipment of electronic components, and the spraying component in the above embodiment can spray an identification code corresponding to the pressure curve onto the ejector pin 202. In this way, when the transfer equipment needs to use these ejector pins 202, it only needs to scan the identification code on the ejector pin 202 with a scanning component to obtain the pressure curve of the ejector pin 202.

[0236] Optionally, as shown in Figure 24, which is a schematic diagram of another electronic component transfer device provided in another embodiment of this application, the transfer device may further include a camera 600. After acquiring a detection image of the tip of the needle bar 2022 in the ejector pin 202 through the camera 600, the transfer device can determine the wear condition of the tip of the needle bar 2022 based on the detection image, thereby determining whether the ejector pin 202 needs to be replaced.

[0237] It should be noted that during the transfer of electronic components 011 by the transfer device, after all transfer sections 021 in the second substrate 020 are connected to electronic components 011, the second substrate 020 can be moved into the detection device. The detection device can detect the connection between the transfer sections 021 and electronic components 011 in the second substrate 020. When the detection device detects an increase in the failure rate of the connection between the transfer sections 021 and electronic components 011 in the second substrate 020, it needs to stop the transfer of electronic components 011 by the transfer device. The transfer device needs to control the ejector pin 202 to move to the camera 600 and control the camera 600 to take a picture of the ejector pin 202 to obtain a detection image including the tip of the pin bar 2022, and determine the wear condition of the tip of the pin bar 2022.

[0238] It should also be noted that after the transfer device transfers all the electronic components 011 in the first substrate 010, the transfer device needs to control the first stage 300 to remove the transferred first substrate 010 and replace it with a new first substrate 010. During the replacement of the first substrate 010, the transfer device can also control the ejector pin 202 to move to the camera 600 so that the camera 600 can check the wear condition of the tip of the pin bar 2022 in the ejector pin 202.

[0239] In this application, as shown in FIG24, the transfer device may further include a standard height section 700 fixed on the base 100. After the ejector pin 202 is mounted on the drive member 201, the transfer device can drive the ejector pin 202 toward the standard height section 700 by the drive member 201 until the tip of the needle bar 2022 in the ejector pin 202 is in a state of just contact with the standard height section. Then, the device can determine the movement distance of the tip of the needle bar 2022 in the first direction Z, and determine the coordinate of the tip of the needle bar 2022 in the first direction Z based on the movement distance of the tip of the needle bar 2022 in the first direction Z.

[0240] It should be noted that the transfer device can also obtain the feedback current of the drive motor in the drive unit 201, and after determining that the feedback current of the drive motor meets the preset conditions, determine that the tip of the needle bar 2022 and the standard height block 600 are in a state of just contact.

[0241] It should also be noted that the coordinate system in the electronic component transfer device is established using three mutually perpendicular coordinate axes, one of which is parallel to the first direction Z. The three-dimensional coordinates of each component in the transfer device are known within the device's coordinate system. Therefore, the transfer device can control the distance that a component needs to move based on its three-dimensional coordinates. After replacing the ejector pin 202, due to installation errors and other reasons, the coordinates of the tip of the newly replaced ejector pin 202's pin bar 202 in the transfer device's coordinate system may differ from those of the previously damaged ejector pin 202. This difference primarily lies in the error along the first direction Z. Therefore, the transfer device needs to determine the coordinates of the newly replaced ejector pin 202 along the first direction Z using the standard height block 600, so that the transfer device can subsequently accurately control the movement distance of the ejector pin 202.

[0242] Optionally, as shown in Figures 24 and 25, Figure 25 is a partial cross-sectional view of another electronic component transfer device according to another embodiment of this application. The electronic component transfer device may further include a support base 800 and a standard height portion 700. The support base 800 in the transfer device may be fixedly connected to the base 100, and the side of the support base 100 facing away from the base 100 may be a support surface S. The standard height portion 700 and the force sensor 500 may both be fixed on the support surface S of the support base 800.

[0243] In one possible implementation, the standard height section 700 and the force sensor 500 can be arranged adjacent to each other on the support surface S of the support base 100. In this way, after the transfer device replaces the ejector pin 202 with a new one, the transfer device, having obtained the coordinates of the tip of the needle bar 2022 in the ejector pin 202 through the standard height section 700, can move the ejector pin 202 to the force sensor 500 more quickly, further saving the debugging time of the new ejector pin 202.

[0244] Optionally, the side of the standard height section 700 in the transfer device that faces away from the support surface S of the support base 100 can be flush with the side of the force sensor 500 that faces away from the support surface S of the support base 100. That is, the coordinates of the side of the standard height section 700 facing away from the support surface S in the first direction Z can be the same as the coordinates of the side of the force sensor 500 facing away from the support surface S in the first direction Z. In this way, after the transfer device determines the coordinates of the tip of the needle bar 2022 in the ejector pin 202 through the standard height section 700, the distance that the tip of the needle bar 2022 moves during the process of the transfer device controlling the ejector pin 202 to move towards the force sensor 500 until the tip of the needle bar 2022 in the ejector pin 202 contacts the force sensor 500 is the distance that the tip of the needle bar 2022 moves during the process of the ejector pin 202 to move towards the standard height section 700 until the tip of the needle bar 2022 in the ejector pin 202 contacts the standard height section 700.

[0245] Optionally, the side of the standard height portion 700 in the transfer device that faces away from the support surface S of the support base 100 can also be flush with the side of the second substrate 020 that faces away from the second stage 400. In this way, the coordinates of the side of the standard height portion 700 facing away from the support surface S in the first direction Z and the coordinates of the side of the force sensor 500 facing away from the support surface S in the first direction Z are the same as the coordinates of the side of the second substrate 020 facing away from the second stage 400 in the first direction Z. Here, during the dynamic testing of the ejector pin 202 by simulating the transfer of electronic components by the force sensor 500, the fact that the coordinates of the side of the force sensor 500 facing away from the support surface S in the first direction Z are the same as the coordinates of the side of the second substrate 020 facing away from the second stage 400 in the first direction Z provides accuracy for the dynamic testing of the ejector pin 202 by the force sensor 500.

[0246] Optionally, the surface hardness of the standard height section 700 in the transfer device can be greater than the surface hardness of the force sensor 500. This greater surface hardness ensures that the coordinates of the standard height section 700 remain unchanged during use, thereby guaranteeing the accuracy of the coordinates of the tip of the needle bar 2022 in the ejector pin 202 determined by the standard height section 700.

[0247] It should be noted that during the use of the standard height section 700, the tip of the needle bar 2022 in the ejector pin 202 can remain in contact with the same position of the standard height section 700 until visible damage occurs at that position. After that, the tip of the needle bar 2022 in the ejector pin 202 can then remain in contact with another position of the standard height section 700.

[0248] Optionally, electronic component 011 can be a light-emitting diode, such as a Mini-LED or Micro-LED, but is not limited to this.

[0249] This application also provides a method of using a transfer device, which is applied to a transfer device for electronic components; the transfer device includes: a base, a first stage, and a second stage; the base has a first bearing surface; the first stage is movably connected to the base and is used to support a first substrate, the first substrate being a flexible substrate and including multiple electronic components; the second stage is located on the first bearing surface and is used to support a second substrate, the second substrate including multiple connecting portions; the method of use includes:

[0250] Before the first stage carries the first substrate and the second stage carries the second substrate, the first stage drives the first transmission and detection module mounted on the first stage to move relative to the first bearing surface in a direction parallel to the first bearing surface. During the movement of the first stage, the first detection module obtains the first deflection deviation of the second bearing surface of the second stage relative to the first bearing surface, so that the second bearing surface is parallel to the first bearing surface after being corrected according to the first deflection deviation.

[0251] Optionally, the transfer equipment may also include: a loading platform; the method of use may also include:

[0252] After the second bearing surface is parallel to the first bearing surface, the first detection module obtains the second deflection deviation of the third bearing surface of the first stage relative to the second bearing surface, so that the third bearing surface is parallel to the second bearing surface after being corrected according to the second deflection deviation.

[0253] After the third bearing surface is parallel to the second bearing surface, the third deflection deviation of the fourth bearing surface of the loading platform relative to the third bearing surface is obtained through the first detection module, so that the fourth bearing surface is parallel to the third bearing surface after being corrected according to the third deflection deviation.

[0254] After the fourth bearing surface is parallel to the third bearing surface, the fourth deflection deviation of the first mounting surface of the loading platform relative to the first positioning surface of the first platform is obtained by the second detection module installed on the loading platform, so that the first mounting surface is parallel to the first positioning surface after being corrected according to the fourth deflection deviation.

[0255] Optionally, the transfer device further includes: a transfer head and a force sensor. The transfer head includes a drive unit and a pin, and the transfer head is movably connected to the base. The transfer device is also used to test and obtain the pressure curve corresponding to the pin. The pin includes: a needle sleeve and a needle bar. The needle sleeve is fitted onto the needle bar, and the needle sleeve and the needle bar are elastically connected in the axial direction. The tip of the needle bar can extend from the needle sleeve. The force sensor is located on the base. The drive unit is movably connected to the base, and the drive unit is detachably connected to the pin, for driving the pin to move upward in a third direction, which is parallel to the axial direction of the pin.

[0256] The method of use further includes: after the first mounting surface is parallel to the first positioning surface, the ejector pin is driven by a driving component to move toward the force sensor until the tip of the pin bar contacts the force sensor, and then the force sensor acquires the pressure curve corresponding to the ejector pin. Optionally, after the pressure curve corresponding to the ejector pin is acquired, and the first stage carries the first substrate and the second stage carries the second substrate, the movement distance of the ejector pin in a third direction is controlled according to the pressure curve, so that the ejector pin applies a force to the side of the first substrate away from the second substrate, so as to transfer the electronic components onto the connecting part.

[0257] It should be noted that the dimensions of layers and regions may be exaggerated in the accompanying drawings for clarity. Furthermore, it is understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element, or there may be intermediate layers. Additionally, it is understood that when an element or layer is referred to as being "below" another element or layer, it can be directly below the other element, or there may be more than one intermediate layer or element. Furthermore, it is also understood that when a layer or element is referred to as being "between" two layers or two elements, it can be the only layer between the two layers or two elements, or there may be more than one intermediate layer or element. Similar reference numerals throughout indicate similar elements.

[0258] In this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The term "multiple" refers to two or more unless otherwise expressly defined.

[0259] Those skilled in the art will understand that all or part of the steps of the above embodiments can be implemented by hardware or by a program instructing related hardware. The program can be stored in a computer-readable storage medium, such as a read-only memory, a disk, or an optical disk.

[0260] The above description is merely an optional embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An apparatus for transferring electronic components, characterized by comprising: The device comprises: a base (100), a first carrier (300) and a second carrier (400); the base (100) has a first bearing surface (P1); the first carrier (300) is movably connected with the base (100), the first carrier (300) is used for bearing a first substrate (010), and the first substrate (010) comprises a plurality of electronic elements (011); the second carrier (400) is located on the first bearing surface (P1), and the second carrier (400) is used for bearing a second substrate (020), and the second substrate (020) comprises a plurality of connecting parts (021); wherein the transfer device is used for transferring the plurality of electronic elements (011) to the plurality of connecting parts (021); and the transfer device is configured to: before transferring the plurality of electronic elements (011), drive a first detection module (900) mounted on the first carrier (300) to move through the first carrier (300), and in the moving process of the first carrier (300), obtain a first deflection deviation of a second bearing surface (P2) of the second carrier (400) relative to the first bearing surface (P1) through the first detection module (900), so that the second bearing surface (P2) is parallel to the first bearing surface (P1) after correction according to the first deflection deviation.

2. The transfer apparatus of claim 1, wherein, The first carrier (300) is used for driving the first detection module (900) to move along a first direction (X) and a second direction (Y), the first direction (X) and the second direction (Y) are both parallel to the first bearing surface (P1), and the first direction (X) intersects with the second direction (Y); the transfer device is configured to: in the process of driving the first detection module (900) to move relative to the first bearing surface (P1) along the first direction (X) through the first carrier (300), obtain the maximum distance difference between the first detection module (900) and the second bearing surface (P2) through the first detection module (900), so as to obtain a first deflection degree of the second bearing surface (P2) relative to the first bearing surface (P1) around a first axis (L1); in the process of driving the first detection module (900) to move relative to the first bearing surface (P1) along the second direction (Y) through the first carrier (300), obtain the maximum distance difference between the first detection module (900) and the second bearing surface (P2) through the first detection module (900), so as to obtain a second deflection degree of the second bearing surface (P2) relative to the first bearing surface (P1) around a second axis (L2); wherein the first axis (L1) is parallel to the second direction (Y); and the second axis (L2) is parallel to the first direction (X).

3. The transfer apparatus of claim 2, wherein, The second carrier (400) comprises a second carrier body (401) having a second bearing surface (P2) and a first adjusting assembly (402) for connecting the second carrier body (401) with the base (100) and correcting the first deflection deviation.

4. The transfer apparatus of claim 3, wherein, The first adjusting assembly (402) comprises a first adjusting screw (4021), a second adjusting screw (4022) and a third adjusting screw (4023). The first adjusting screw (4021) and the second adjusting screw (4022) are arranged in the second direction (Y) and distributed on both sides of the first axis (L1); the third adjusting screw (4022) is distributed on the first axis (L1) and located on the side of the second axis (L2) away from the first adjusting screw (4021) and the second adjusting screw (4022). The first adjusting screw (4021) and the second adjusting screw (4022) are used for correcting the first deflection degree, and the third adjusting screw (4023) is used for correcting the second deflection degree.

5. The transfer apparatus of claim 4, wherein, The second carrier body (401) comprises a first plate body (4011) and a second plate body (4012) arranged oppositely and in parallel, and a plurality of connecting pieces (4013) between the first plate body (4011) and the second plate body (4012). The side of the first plate body (4011) away from the second plate body (4012) is the second bearing surface (P2). The first adjusting screw (4021), the second adjusting screw (4022) and the third adjusting screw (4023) are all distributed between the first plate body (4011) and the second plate body (4012), and the second plate body (4012) is connected with the base (100) through the first adjusting screw (4021), the second adjusting screw (4022) and the third adjusting screw (4023).

6. Transfer apparatus according to any one of claims 2 to 5, characterised in that, The first detection module (900) comprises a plurality of distance sensors (900a); the first carrier (300) has a third bearing surface (P3), and the plurality of distance sensors (900a) are all located on the third bearing surface (P3). The transfer device is configured to: during the movement of the first carrier (300), acquire the first deflection deviation of the second bearing surface (P2) of the second carrier (400) relative to the first bearing surface (P1) through any one of the distance sensors (900a).

7. The transfer apparatus of claim 6, wherein, The transfer device is further configured to: when the second bearing surface (P2) is parallel to the first bearing surface (P1), and after the first carrier (300) moves to a first designated position, acquire a second deflection deviation of the third bearing surface (P3) relative to the second bearing surface (P2) by the plurality of distance sensors (900a), so that the third bearing surface (P3) is parallel to the second bearing surface (P2) after correction according to the second deflection deviation. Wherein, after the first carrier (300) moves to a first designated position, the orthographic projections of the plurality of distance sensors (900a) on the second bearing surface (P2) are located in the second bearing surface (P2).

8. The transfer apparatus of claim 7, wherein, The plurality of distance sensors (900a) are divided into: at least two first distance sensors (901) arranged along the first direction (X), and at least two second distance sensors (902) arranged along the second direction (Y). The transfer device is configured to: acquire the distance between each of the first distance sensors (901) and the second bearing surface (P2) by the at least two first distance sensors (901), so as to acquire a third deflection degree of the third bearing surface (P3) relative to the second bearing surface (P2) around a third axis (L3); acquire the distance between each of the second distance sensors (902) and the second bearing surface (P2) by the at least two second distance sensors (902), so as to acquire a fourth deflection degree of the third bearing surface (P3) relative to the second bearing surface (P2) around a fourth axis (L4). Wherein, the third axis (L3) is parallel to the second direction (Y); and the fourth axis (L4) is parallel to the first direction (X).

9. The transfer apparatus of claim 8, wherein, The transfer device further comprises: a movable member (1300) movably connected with the base (100), and the movable member (1300) is capable of moving along the first direction (X) and the second direction (Y) relative to the first bearing surface (P1). The first carrier (300) comprises: a first carrier body (301), an adapter frame (302), a second adjusting assembly (303), and a third adjusting assembly (304). The first carrier body (301) has the third bearing surface (P3), and the first carrier body (301) is connected with the adapter frame (302) through the second adjusting assembly (303), and the second adjusting assembly (303) is used for correcting the third deflection degree. The adapter frame (302) is connected with the movable member (1300) through the third adjusting assembly (304), and the third adjusting assembly (304) is used for correcting the fourth deflection degree.

10. The transfer apparatus of claim 9, wherein, The second adjusting assembly (303) comprises: a first connecting shaft (3031) and a fourth adjusting screw (3032). The first connecting shaft (3031) is fixedly connected with the first stage main body (301) and rotatably connected with the adapter frame (302), and the axis of the first connecting shaft (3031) coincides with the third axis (L3); The fourth adjusting screw (3032) is used to fix the first stage main body (301) and the adapter frame (302) after the first stage main body (301) rotates relative to the adapter frame (302) through the first connecting shaft (3031), so as to correct the third deflection degree.

11. The transfer apparatus of claim 10, wherein, The adapter frame (302) comprises a mounting frame body (3021) and a third plate body (3022) connected with each other; The third plate body (3022) is connected with the movable element (1300) through the third adjusting assembly (304); The mounting frame body (3021) has a first opening (K1) and a first adjusting hole (K2); at least part of the first connecting shaft (3031) is located in the first opening (K1); after the first stage main body (301) rotates relative to the adapter frame (302) through the first connecting shaft (3031), the fourth adjusting screw (3032) passes through the first adjusting hole (K2) to be connected with the first stage main body (301).

12. The transfer apparatus of claim 9, wherein, The third adjusting assembly (304) comprises a second connecting shaft (3041) and a plurality of fifth adjusting screws (3042); The second connecting shaft (3041) is fixedly connected with the movable element (1300) and rotatably connected with the adapter frame (302), and the axis of the second connecting shaft (3041) coincides with the fourth axis (L4); Each fifth adjusting screw (3042) is used to fix the adapter frame (302) and the movable element (1300) after the adapter frame (302) rotates relative to the movable element (1300) through the second connecting shaft (3032), so as to correct the fourth deflection degree.

13. The transfer apparatus of claim 12, wherein, The adapter frame (302) comprises a mounting frame body (3021) and a third plate body (3022) connected with each other; The mounting frame body (3021) is connected with the first stage main body (301) through the second adjusting assembly (303); The third plate body (3022) has a second opening (K3) and a plurality of second adjusting holes (K4); at least part of the second connecting shaft (3041) is located in the second opening (K3); the plurality of second adjusting holes (K4) are distributed around the second opening (K3), and the plurality of second adjusting holes (K4) correspond to the plurality of fifth adjusting screws (3042) one by one; after the adapter frame (302) rotates relative to the movable element (1300) through the second connecting shaft (3041), each fifth adjusting screw (3042) passes through the corresponding second adjusting hole (K4) to be connected with the movable element (1300).

14. Transfer apparatus according to any one of claims 7 to 13, characterised in that, The transfer device further comprises a feeding stage (1100), and the feeding stage (1100) has a fourth bearing surface (P4); The transfer device is further configured to: in the case that the third bearing surface (P3) is parallel to the second bearing surface (P2), and after the first carrier (300) moves to a second designated position, acquire, by the plurality of distance sensors (900a), a third deflection deviation of the fourth bearing surface (P4) relative to the third bearing surface (P3), so that the fourth bearing surface (P4) is parallel to the third bearing surface (P3) after correction according to the third deflection deviation. In the case that the first carrier (300) moves to a second designated position, the orthographic projection of the plurality of distance sensors (900a) on the fourth bearing surface (P4) is located in the fourth bearing surface (P4).

15. The transfer apparatus of claim 14, wherein, The plurality of distance sensors (900a) are divided into: at least two first distance sensors (901) arranged along the first direction (X), and at least two second distance sensors (902) arranged along the second direction (Y). The transfer device is configured to: acquire, by the at least two first distance sensors (901), the distance between each first distance sensor (901) and the fourth bearing surface (P4), so as to acquire a fifth deflection degree of the fourth bearing surface (P4) relative to the third bearing surface (P3) around a fifth axis (L5); and acquire, by the at least two second distance sensors (902), the distance between each second distance sensor (902) and the fourth bearing surface (P4), so as to acquire a sixth deflection degree of the fourth bearing surface (P4) relative to the third bearing surface (P3) around a sixth axis (L6). The fifth axis (L5) is parallel to the second direction (Y), and the sixth axis (L6) is parallel to the first direction (X).

16. The transfer apparatus of claim 15, wherein, The upper loading carrier (1100) comprises: an upper loading carrier body (1110) and the fourth adjusting assembly (1120); the upper loading carrier body (1110) has the fourth bearing surface (P4), and the upper loading carrier body (1110) is connected with the base carrier (100) through the fourth adjusting assembly (1120); and the fourth adjusting assembly (1120) is used for correcting the third deflection deviation.

17. The transfer apparatus of claim 16, wherein, The fourth adjusting assembly (1120) comprises: four sixth adjusting screws (1121). The four sixth adjusting screws (1121) are arranged in two rows along the first direction and in two columns along the second direction, two rows of the sixth adjusting screws (1121) are distributed on two sides of the fifth axis (L5), and two columns of the sixth adjusting screws (1121) are distributed on two sides of the sixth axis (L6). At least one row of the sixth adjusting screws (1121) is used for correcting the fifth deflection degree, and at least one column of the sixth adjusting screws (1121) is used for correcting the sixth deflection degree.

18. Transfer apparatus according to any one of claims 15 to 17, characterised in that, The upper loading platform (1100) further has a first mounting surface (P5) intersecting the fourth bearing surface (P4); the first platform (300) further has a first positioning surface (P6) intersecting the third bearing surface (P3); The transfer device is further configured to: when the third bearing surface (P3) is parallel to the fourth bearing surface (P4), and after the first platform (300) moves to the third specified position, acquire, by a second detection module (1200) mounted on the upper loading platform (1100), a fourth deflection deviation of the first mounting surface (P5) relative to the first positioning surface (P6), so that the first positioning surface (P6) is parallel to the first mounting surface (P5) after correction according to the fourth deflection deviation. The first positioning surface (P6) is arranged opposite to the first mounting surface (P5) in the first direction (X) or the second direction (Y) after the first platform (300) moves to the third specified position.

19. The transfer apparatus of claim 18, wherein, The second detection module (1200) comprises a plurality of third distance sensors (1201), and the arrangement direction of the plurality of third distance sensors (1201) is parallel to the first mounting surface (P5). The transfer device is configured to acquire, by the plurality of third distance sensors (1201), the distance between each third distance sensor (1201) and the first positioning surface (P6), so as to acquire a seventh deflection degree of the first mounting surface (P5) relative to the first positioning surface (P6) around a seventh axis (L7). The seventh axis (L7) intersects the first direction (X) and the second direction (Y).

20. The transfer apparatus of claim 19, wherein, The upper loading platform (1100) comprises an upper loading platform body (1110), a fourth adjusting assembly (1120), a fourth plate body (1140), and a fifth adjusting assembly (1130). The upper loading platform body (1110) has the fourth bearing surface (P4), and the upper loading platform body (1110) is connected with the fourth plate body (1140) through the fourth adjusting assembly (1120), the fourth adjusting assembly (1120) being used for correcting the third deflection deviation; the fourth plate body (1140) is connected with the base platform (100) through the fifth adjusting assembly (1130), and the fifth adjusting assembly (1130) is used for correcting the fourth deflection deviation.

21. The transfer apparatus of claim 20, wherein, The fourth plate body (1140) has a plurality of third adjusting holes (K5) distributed around the seventh axis (L7). The fifth adjusting assembly (1130) comprises a plurality of seventh adjusting screws (1131) corresponding to the third adjusting holes (K5); after the fourth plate body (1140) rotates relative to the base platform (100) around the seventh axis (L7), each seventh adjusting screw (1131) is connected with the base platform (1300) through the corresponding third adjusting hole (K5), so as to correct the seventh deflection degree.

22. The transfer apparatus according to any one of claims 1 to 5, 7 to 13, 15 to 17, 19 to 21, characterized in that, The first substrate (010) is a flexible substrate; the transfer device further comprises a driving member (201), a needle (202), and a force sensor (500); the transfer device is further configured to test a pressure curve corresponding to the needle (202); the needle (202) comprises a needle sleeve (2021) and a needle rod (2022), the needle sleeve (2021) is sleeved on the needle rod (2022), and the needle sleeve (2021) and the needle rod (2022) are elastically connected in the axial direction; the tip of the needle rod (2022) can protrude from the needle sleeve (2021); The force sensor (500) is located on the base (100), the driving member (201) is movably connected with the base (100), and the driving member (201) is detachably connected with the needle (202) and used to drive the needle (202) to move in a third direction (Z), which is parallel to the axial direction of the needle (202); The transfer device is further configured to drive the needle (202) to move towards the force sensor (500) by the driving member (201), and obtain the pressure curve corresponding to the needle (202) by the force sensor (500) after the tip of the needle rod (2022) contacts the force sensor (500); The pressure curve is used to reflect the change relationship between the pressing force applied by the tip of the needle rod (2022) and the compression amount of the inward displacement of the needle rod (2022) relative to the needle sleeve (2021).

23. The transfer apparatus of claim 22, wherein, The transfer device is further configured to control the moving distance of the needle (202) in the third direction (Z) according to the pressure curve corresponding to the needle (202) installed on the driving member (201) after the pressure curve is obtained, so that the needle (202) applies an action force to the side of the first substrate (010) away from the second substrate (020), and the electronic element (011) is transferred to the connecting part (021).

24. A method of using a transfer apparatus, characterized by, The use method is applied to a transfer device of an electronic element; The transfer device comprises a base, a first carrier, and a second carrier; the base has a first bearing surface; the first carrier is movably connected with the base, and the first carrier is used to carry a first substrate; the first substrate is a flexible substrate, and the first substrate comprises a plurality of electronic elements; the second carrier is located on the first bearing surface, and the second carrier is used to carry a second substrate; and the second substrate comprises a plurality of connecting parts; the use method comprises: Before the first carrier carries the first substrate and the second carrier carries the second substrate, a first detection module mounted on the first carrier is driven by the first carrier to move relative to the first carrying surface in a direction parallel to the first carrying surface, and during the movement of the first carrier, a first deflection deviation of a second carrying surface of the second carrier relative to the first carrying surface is obtained by the first detection module, so that the second carrying surface is parallel to the first carrying surface after correction according to the first deflection deviation.

25. The method of use of claim 24, wherein, The transfer device further comprises a loading carrier, and the use method further comprises: After the second carrying surface is parallel to the first carrying surface, a second deflection deviation of a third carrying surface of the first carrier relative to the second carrying surface is obtained by the first detection module, so that the third carrying surface is parallel to the second carrying surface after correction according to the second deflection deviation; After the third carrying surface is parallel to the second carrying surface, a third deflection deviation of a fourth carrying surface of the loading carrier relative to the third carrying surface is obtained by the first detection module, so that the fourth carrying surface is parallel to the third carrying surface after correction according to the third deflection deviation; After the fourth carrying surface is parallel to the third carrying surface, a fourth deflection deviation of a first mounting surface of the loading carrier relative to a first positioning surface of the first carrier is obtained by a second detection module mounted on the loading carrier, so that the first mounting surface is parallel to the first positioning surface after correction according to the fourth deflection deviation.

26. The control method according to claim 25, wherein The transfer device further comprises a transfer head and a force sensor, the transfer head comprises a driving member and a needle, the transfer head is movably connected with the base, and the transfer device is further used for testing to obtain a pressure curve corresponding to the needle; the needle comprises a needle sleeve and a needle rod, the needle sleeve is sleeved on the needle rod, the needle sleeve and the needle rod are elastically connected in an axial direction, and a tip end of the needle rod can protrude out of the needle sleeve; the force sensor is located on the base, the driving member is movably connected with the base, and the driving member is detachably connected with the needle and used for driving the needle to move in a third direction, wherein the third direction is parallel to the axial direction of the needle. The use method further comprises: after the first mounting surface is parallel to the first positioning surface, the needle is driven by the driving member to move towards the force sensor, until the tip end of the needle rod contacts the force sensor, and then a pressure curve corresponding to the needle is obtained by the force sensor.

27. The control method according to claim 26, wherein The use method further comprises: after the pressure curve corresponding to the needle is obtained, and the first carrier carries the first substrate and the second carrier carries the second substrate, then a moving distance of the needle in the third direction is controlled according to the pressure curve, so that the needle applies an acting force to a side of the first substrate away from the second substrate, and the electronic component is transferred to the connecting portion.

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