Pluggable electron detector and microscope

Abstract

The invention provides a pluggable electron detector and a microscope, and relates to the technical field of electron microscopes. The detector is arranged to be of a split structure and specifically comprises the base, the electric control assembly and the chip assembly, the electric control assembly and the chip assembly are correspondingly and detachably connected with the base, and compared with an existing detector of an integrated structure, the detector has the advantages that convenience in installation or maintenance is effectively improved; furthermore, based on the detachable structure of the electric control assembly and the chip assembly, different electric control assemblies and / or chip assemblies can be correspondingly replaced in different application scenes, and the compatibility is high. In addition, the detector integrates signal lines in the electric control assembly, electromagnetic interference is effectively shielded, and the use effect of the detector is guaranteed.

Description

Technical Field

[0001] This application relates to the field of electron microscopy technology, and in particular to a pluggable electron detector and microscope. Background Technology

[0002] The back-dispersive electron detector (hereinafter referred to as the detector) is a key component in a scanning electron microscope used to receive back-dispersive electron signals to form a compositional contrast image of the sample. The detector is usually installed inside the microscope's sample chamber close to the sample to maximize signal collection.

[0003] Existing detectors are typically assembled as a single unit, secured with multiple screws, and require manual soldering of precision signal lines for signal transmission. This makes installation difficult and hinders later maintenance (for example, the signal interface is easily damaged during installation or maintenance). Furthermore, the multiple independently configured signal and power lines are prone to introducing electromagnetic interference, affecting the signal-to-noise ratio. Moreover, the single-unit detector design suffers from poor compatibility and cannot flexibly adapt to different application scenarios. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a pluggable electronic detector to solve the problems of existing detectors being inconvenient to install and maintain, having a high risk of signal interference, and having poor compatibility.

[0005] In accordance with the above objectives, a first aspect of the present invention provides a pluggable electronic detector, wherein the pluggable electronic detector comprises: The base has a first limiting part and a second limiting part communicating with the first limiting part; An electronic control component is detachably connected to the first limiting portion; when the electronic control component is connected to the first limiting portion, the first contact of the electronic control component extends into the second limiting portion. The chip assembly is detachably connected to the second limiting part; when the chip is connected to the second limiting part, the second contact of the chip assembly is connected to the first contact.

[0006] Preferably, the electronic control assembly includes a spring mechanism and an electronic control board; the spring mechanism includes a base and a plurality of springs, each of the springs having a first contact point and a connection contact point corresponding to and connected to the electronic control board.

[0007] Preferably, along the thickness direction of the base, the base is formed with a support block, a base plate and a limiting plate connected in sequence; The top end face of the support block, the first side face, and the top end face of the substrate constitute the top end face of the base. The top end face of the base is formed with a plurality of grooves. Each groove has a first recess, a second recess, and a third recess connected in sequence. The first recess is located on the top end face of the support block, the second recess is located on the first side face of the support block, and the third recess is located on the top end face of the substrate. When the electronic control component is connected to the first limiting part, the plurality of grooves are arranged at intervals along the width direction of the base.

[0008] Preferably, the spring piece is connected to the groove in a one-to-one correspondence; the spring piece includes a horizontal section, a vertical section and a bent section connected in sequence; The horizontal segment is connected to the first recess, and the end of the horizontal segment away from the vertical segment protrudes from the second side of the support block along the length direction of the base to form the connecting contact point; The vertical segment is connected to the second recessed portion; The bent section is connected to the third recess, and the bent section has a protrusion that protrudes from the top end face of the substrate, and the protrusion forms the first contact point.

[0009] Preferably, the limiting plate has a notch; in the base, the notch and the bottom end face of the substrate constitute a guide portion of the base.

[0010] Preferably, the chip assembly includes a chip and a housing that is adapted to the second limiting portion. The housing has an inner cavity corresponding to the chip. The inner cavity penetrates the top end face of the housing to form a first opening on the top end face of the housing. The inner cavity also penetrates the first side face of the housing to form a second opening on the first side face of the housing. The chip has the second contact point, which is located at the bottom end of the inner cavity; When the chip is connected to the second limiting part, the substrate can extend into the inner cavity through the second opening, so that the first contact and the second contact are connected, and the limiting plate can extend into the first opening. Preferably, the base is formed as a plate-like structure, and along the thickness direction of the base, the bottom end face of the base is formed with a first limiting portion, and the top end face of the base is formed with a second limiting portion; both the first limiting portion and the second limiting portion are formed as groove-like structures. The first limiting part and the second limiting part are arranged sequentially along the length direction of the base, and the first limiting part is located at the first end of the length direction of the base.

[0011] Preferably, the plane where the bottom end face of the first limiting part is located is defined as the first plane, and the plane where the bottom end face of the second limiting part is located is defined as the second plane; The first plane is parallel to the second plane and is located between the second plane and the top end face of the base along the thickness direction of the base.

[0012] Preferably, along the length direction of the base, a hollow portion is formed at the second end of the first limiting portion near the second limiting portion, the hollow portion penetrates the bottom of the first limiting portion along the thickness direction of the base, and the hollow portion penetrates the end face of the first limiting portion along the length direction of the base; When the electronic control component is connected to the first limiting part, the first contact of the electronic control component extends into the second limiting part through the hollow part.

[0013] According to a second aspect of the present invention, a microscope is provided, wherein the microscope includes a pluggable electronic detector as described above, the pluggable electronic detector being correspondingly mounted to the sample chamber of the microscope via the base.

[0014] According to the pluggable electronic detector and microscope of the present invention, the detector is configured as a split structure, specifically including a base and an electronic control component and a chip component that are detachably connected to the base. Compared with the existing integrated detector structure, this effectively improves the convenience of installation or maintenance. Furthermore, based on the detachable structure of the electronic control component and the chip component, different electronic control components and / or chip components can be replaced in different application scenarios, resulting in high compatibility.

[0015] Furthermore, the detector in this invention integrates the signal lines into the electronic control components, effectively shielding electromagnetic interference and ensuring the effectiveness of the detector.

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a pluggable electronic detector according to an embodiment of the present invention; Figure 2 This is another schematic diagram of a pluggable electronic detector according to an embodiment of the present invention; Figure 3 This is a schematic diagram of a base according to an embodiment of the present invention; Figure 4 This is another schematic diagram of the base according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the base according to an embodiment of the present invention; Figure 6 This is another schematic diagram of the base according to an embodiment of the present invention; Figure 7 This is a schematic diagram of a spring sheet according to an embodiment of the present invention; Figure 8 This is a schematic diagram of a spring mechanism according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the assembly of the electronic control components and the base according to an embodiment of the present invention; Figure 10 This is a schematic diagram of the housing according to an embodiment of the present invention.

[0019] Icons: 1-Base; 11-First limiting part; 12-Second limiting part; 13-Hollow part; 21-Base; 211-Support block; 212-Base plate; 213-Limiting plate; 214-Groove; 2141-First recess; 2142-Second recess; 2143-Third recess; 215-Notch; 22-Spring piece; 221-First contact point; 222-Connecting contact point; 23-Electrical control board; 31-Housing shell; 311-Inner cavity; 312-First opening; 313-Second opening. Detailed Implementation The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0020] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0021] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0022] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0023] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0024] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0025] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0026] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0027] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0028] According to a first aspect of the present invention, a pluggable electronic detector is provided, which is formed into a split structure, comprising a base 1 and an electronic control component and a chip component that are detachably connected to the base 1. The specific structure and assembly method of each of the above-mentioned components of the pluggable electronic detector according to the present invention will be described in detail below. Furthermore, to improve the clarity and accuracy of the description, in this embodiment, as shown in the figures, the length direction of the base 1 is defined as the first direction, the width direction of the base 1 as the second direction, and the thickness direction of the base 1 as the third direction.

[0029] In this embodiment, as Figures 1 to 4 As shown, the base 1 is formed as a plate-like structure. Along a third direction, a first limiting part 11 corresponding to and adapted to the electronic control component is formed on the bottom end face of the base 1, and a second limiting part 12 corresponding to and adapted to the chip component is formed on the top end face of the base 1. Both the first limiting part 11 and the second limiting part 12 are formed as groove-like structures, so that the electronic control component can be assembled to the bottom end of the base 1 through the first limiting part 11, and the chip component can be assembled to the top end of the base 1 through the second limiting part 12. This arrangement allows the electronic control component and the chip component to have relatively independent assembly space, thereby effectively avoiding mutual interference between the electronic control component and the chip component, and also reducing the interference of the external environment on the electronic control component and the chip component, thus effectively ensuring the performance of this detector.

[0030] In addition, the first limiting part 11 and the second limiting part 12 are arranged sequentially along the first direction, with the first limiting part 11 located at the first end in the length direction of the base 1 to facilitate the insertion and removal of the chip assembly and the electronic control assembly.

[0031] Furthermore, such as Figures 3 to 4 As shown, the plane containing the bottom end face of the first limiting part 11 is designated as the first plane, and the plane containing the bottom end face of the second limiting part 12 is designated as the second plane. The first plane and the second plane are parallel. Along a third direction, the first plane is located between the second plane and the plane containing the top end face of the base 1, meaning there is a height difference between the first plane and the second plane. Furthermore, along a first direction, a hollow portion 13 corresponding to and adapted to the base 21 is formed at the second end of the first limiting part 11 near the second limiting part 12. The hollow portion 13 penetrates the bottom of the first limiting part 11 along a third direction and also penetrates the end face of the first limiting part 11 along the first direction. Thus, the first limiting part 11 and the second limiting part 12 can be connected through the hollow portion 13. In this way, when the electronic control component is connected to the first limiting part 11, it can extend into the second limiting part 12 through the hollow portion 13 to facilitate the insertion and removal of the chip component. In this embodiment, as Figures 5 to 8 As shown, the electronic control assembly includes a spring contact mechanism 22 and an electronic control board 23. The spring contact mechanism 22 includes a base 21 and multiple spring contacts 22, each of which has a first contact 221 and a connecting contact 222. The electronic control board 23 can be configured as a PCB board. The spring contacts 22 are connected to the electronic control board 23 through the connecting contacts 222, thereby integrating power lines and signal lines, facilitating the maintenance of the electronic control assembly and avoiding the introduction of electromagnetic interference.

[0032] Specifically, such as Figures 5 to 6 As shown, along the thickness direction of the base 21 (which is the aforementioned third direction when the electronic control component is assembled with the base 1), the base 21 has a support block 211, a base plate 212, and a limiting plate 213 connected in sequence. The top end face and first side face of the support block 211 and the top end face of the base plate 212 constitute the top end face of the base 21. In addition, the top end face of the base 21 has a plurality of grooves 214, each groove 214 having a first recess 2141, a second recess 2142, and a third recess 2143 connected in sequence. The first recess 2141 is located on the top end face of the support block 211, the second recess 2142 is located on the first side face of the support block 211, and the third recess 2143 is located on the top end face of the base plate 212. Furthermore, when the electronic control component is connected with the first limiting part 11, the plurality of grooves 214 are arranged at intervals along the second direction.

[0033] In addition, such as Figures 7 to 8As shown, the spring piece 22 is connected to the groove 214 in a one-to-one correspondence. The spring piece 22 includes a horizontal section, a vertical section, and a bent section connected in sequence. The horizontal section is connected to the first recess 2141, and the end of the horizontal section away from the vertical section protrudes from the second side of the support block 211 in a first direction to form a connecting contact point 222. The vertical section is connected to the second recess 2142. The bent section is connected to the third recess 2143, and the end of the bent section away from the horizontal section abuts against the end face of the third recess 2143. Figure 8 (This state is not shown in the image), and the bent section has a protrusion that protrudes from the top end face of the substrate 212, which is the first contact point 221.

[0034] like Figure 6 As shown, the limiting plate 213 has a notch 215, and the two notches 215 are distributed along the second direction; in the base 21, the notch 215 and the bottom end face of the substrate 212 constitute the guide portion of the base 21.

[0035] Thus, in the assembly process of this detector, the spring piece 22 is first assembled and bonded to the base 21 to form the spring piece 22 mechanism (the base 21 can be formed into an integral structure by injection molding). Then, the spring piece 22 mechanism is connected to the electronic control board 23 through the connecting contact point 222, at which point the electronic control component is a complete component. Then, the electronic control component is assembled to the base 1 through the first limiting part 11, as follows... Figure 9 As shown, part of the structure of the base 21 can extend into the second limiting part 12 through the hollow part 13, and the first contact point 221 is located above the bottom end face of the second limiting part 12. Then, the electronic control board 23 is fixed to the base 1 by screws or other connecting parts. At this time, the electronic control component and the base 1 limit each other, and the part of the electronic control component located in the second limiting part 12 can be regarded as a plug corresponding to the chip component.

[0036] In this embodiment, as Figure 10 As shown, the chip assembly includes a chip and a housing 31 that corresponds to and is adapted to the second limiting portion 12. The housing 31 has an inner cavity 311 corresponding to the chip, which penetrates the top end face of the housing 31 to form a first opening 312 on the top end face of the housing 31. Furthermore, the inner cavity 311 penetrates the first side face of the housing 31 to form a second opening 313 on the first side face of the housing 31. Further, the chip has a second contact point, and the second contact point is located at the bottom end of the inner cavity 311. Thus, the chip assembly has a socket corresponding to the aforementioned plug.

[0037] Before the chip assembly is assembled with the base 1, the chip is placed in the inner cavity 311 of the housing 31 to form a single structure. Then, when the chip assembly is connected to the second limiting part 12, the substrate 212 extends into the inner cavity 311 through the second opening 313, allowing the first contact 221 to connect with the second contact. This achieves the electrical connection between the control board 23 and the chip. Furthermore, during the chip assembly process, the limiting plate 213 extends into the first opening 312, meaning the remaining structures on both sides of the first opening 312 can be adapted to the guide part, effectively increasing the efficiency and accuracy of chip assembly insertion.

[0038] After the chip assembly is plugged in, the housing 31 can be fixed to the base 1 with screws.

[0039] According to the pluggable electronic detector of the present invention as described above, the detector is configured as a split structure, specifically including a base 1 and an electronic control component and a chip component that are detachably connected to the base 1. Compared with the existing integrated detector structure, the convenience of installation or maintenance is effectively improved. Furthermore, based on the detachable structure of the electronic control component and the chip component, different electronic control components and / or chip components can be replaced in different application scenarios, resulting in high compatibility.

[0040] Furthermore, the detector in this invention integrates the signal lines into the electronic control components, effectively shielding electromagnetic interference and ensuring the effectiveness of the detector.

[0041] According to a second aspect of the invention, a microscope is provided, the microscope including the pluggable electronic detector as described above, the detector being correspondingly mounted to the sample chamber of the microscope via a base 1.

[0042] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be defined by the protection scope of the claims.

Claims

1. A pluggable electronic detector, characterized in that, The pluggable electronic detector includes: The base has a first limiting part and a second limiting part communicating with the first limiting part; An electronic control component is detachably connected to the first limiting portion; when the electronic control component is connected to the first limiting portion, the first contact of the electronic control component extends into the second limiting portion. The chip assembly is detachably connected to the second limiting part; when the chip is connected to the second limiting part, the second contact of the chip assembly is connected to the first contact.

2. The pluggable electronic detector according to claim 1, characterized in that, The electronic control assembly includes a spring mechanism and an electronic control board; the spring mechanism includes a base and a plurality of springs, each of which has a first contact point and a connection contact point corresponding to and connected to the electronic control board.

3. The pluggable electronic detector according to claim 2, characterized in that, Along the thickness direction of the base, the base is formed with a support block, a base plate and a limiting plate connected in sequence; The top end face of the support block, the first side face, and the top end face of the substrate constitute the top end face of the base. The top end face of the base is formed with a plurality of grooves. Each groove has a first recess, a second recess, and a third recess connected in sequence. The first recess is located on the top end face of the support block, the second recess is located on the first side face of the support block, and the third recess is located on the top end face of the substrate. When the electronic control component is connected to the first limiting part, the plurality of grooves are arranged at intervals along the width direction of the base.

4. The pluggable electronic detector according to claim 3, characterized in that, The spring piece is connected to the groove in a one-to-one correspondence; the spring piece includes a horizontal section, a vertical section and a bent section connected in sequence. The horizontal segment is connected to the first recess, and the end of the horizontal segment away from the vertical segment protrudes from the second side of the support block along the length direction of the base to form the connecting contact point; The vertical segment is connected to the second recessed portion; The bent section is connected to the third recess, and the bent section has a protrusion that protrudes from the top end face of the substrate, and the protrusion forms the first contact point.

5. The pluggable electronic detector according to claim 3, characterized in that, The limiting plate has a notch; in the base, the notch and the bottom end face of the substrate constitute the guide portion of the base.

6. The pluggable electronic detector according to claim 5, characterized in that, The chip assembly includes a chip and a housing that is adapted to the second limiting portion. The housing has an inner cavity corresponding to the chip. The inner cavity penetrates the top end face of the housing to form a first opening on the top end face of the housing. The inner cavity also penetrates the first side face of the housing to form a second opening on the first side face of the housing. The chip has the second contact point, which is located at the bottom end of the inner cavity; When the chip is connected to the second limiting part, the substrate can extend into the inner cavity through the second opening, so that the first contact and the second contact are connected, and the limiting plate can extend into the first opening.

7. The pluggable electronic detector according to claim 1, characterized in that, The base is formed as a plate-like structure. Along the thickness direction of the base, the bottom end face of the base is formed with a first limiting part, and the top end face of the base is formed with a second limiting part; both the first limiting part and the second limiting part are formed as groove-like structures. The first limiting part and the second limiting part are arranged sequentially along the length direction of the base, and the first limiting part is located at the first end of the length direction of the base.

8. The pluggable electronic detector according to claim 7, characterized in that, The plane containing the bottom end face of the first limiting part is defined as the first plane, and the plane containing the bottom end face of the second limiting part is defined as the second plane; The first plane is parallel to the second plane and is located between the second plane and the top end face of the base along the thickness direction of the base.

9. The pluggable electronic detector according to claim 8, characterized in that, Along the length direction of the base, a hollow portion is formed at the second end of the first limiting portion near the second limiting portion. The hollow portion penetrates the bottom of the first limiting portion along the thickness direction of the base, and the hollow portion penetrates the end face of the first limiting portion along the length direction of the base. When the electronic control component is connected to the first limiting part, the first contact of the electronic control component extends into the second limiting part through the hollow part.

10. A microscope, characterized in that, The microscope includes a pluggable electronic detector as described in any one of claims 1 to 9, the pluggable electronic detector being correspondingly mounted to the sample chamber of the microscope via the base.

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