Piezoelectric heat dissipation device

Abstract

The invention provides a piezoelectric heat dissipation device. The piezoelectric heat dissipation device comprises a vibration assembly, a supporting structure and a jet flow plate. The jet plate and the vibration assembly define an energy conversion cavity used for containing and discharging gas. The vibration assembly comprises a vibrating diaphragm and a piezoelectric element; the vibrating diaphragm comprises an abutting part which abuts against and is supported on the supporting structure, a vibrating part which is surrounded by the abutting part, and a cantilever part which is arranged at the periphery of the abutting part, and the cantilever part and the supporting structure are oppositely arranged at an interval in the first direction; a jet hole is formed in the jet plate; the supporting structure is provided with an overflowing channel; the piezoelectric heat dissipation device is provided with a first airflow channel and a second airflow channel; the piezoelectric element drives the vibration part and the cantilever part to vibrate in the first direction, and vibration of the vibration part is used for pushing gas to flow in the first gas flow channel; vibration of the cantilever part is used for pushing gas to flow in the second gas flow channel. Through abutting of the abutting part and the supporting structure, the vibration part is formed on the inner side of the abutting part, the cantilever part is formed on the outer side of the abutting part, the area of the vibrating diaphragm is utilized to the maximum degree, and miniaturization is achieved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of heat dissipation devices, and particularly relates to a piezoelectric heat dissipation device. BACKGROUND

[0002] With the development of consumer electronics and semiconductor technology, electronic products are constantly developing towards miniaturization and high performance, resulting in a large amount of heat generated by electronic products during operation. If heat dissipation is not timely, the temperature will rise rapidly, seriously affecting the performance and reliability of electronic components. Traditional passive heat dissipation solutions have been difficult to meet the heat dissipation requirements, and traditional heat dissipation fans are difficult to realize miniaturization and thinning due to the limitation of their mechanical structure.

[0003] Therefore, it is necessary to provide a new piezoelectric heat dissipation device. SUMMARY

[0004] The purpose of the present application is to provide a piezoelectric heat dissipation device that can balance high back pressure and high flow characteristics, while also realizing miniaturization, thinning and low power consumption.

[0005] The technical solution of the present application is as follows: A piezoelectric heat dissipation device, comprising a vibration assembly vibrating in a first direction, a support structure supporting the vibration assembly in the first direction, the piezoelectric heat dissipation device further comprising a jet plate arranged between the vibration assembly and the support structure and spaced apart from the vibration assembly in the first direction; the jet plate and the vibration assembly enclose an energy conversion cavity for taking in and discharging gas; the vibration assembly includes a diaphragm and a piezoelectric element arranged on the side of the diaphragm away from the support structure in the first direction; the diaphragm includes an abutting portion abutting and supported on the support structure, a vibration portion surrounded by the abutting portion, and a cantilever portion arranged on the periphery of the abutting portion, the cantilever portion being spaced apart from the support structure in the first direction; the jet plate is provided with a plurality of jet holes penetrating the jet plate in the first direction; the support structure is provided with a plurality of flow channels penetrating in the first direction, the flow channels being spaced apart from the cantilever portion in the first direction; the piezoelectric heat dissipation device has a first airflow channel communicating the side of the piezoelectric element away from the diaphragm with the jet hole, and a second airflow channel communicating the side of the piezoelectric element away from the diaphragm with the flow channel; the piezoelectric element drives the vibration of the vibration portion and the cantilever portion in the first direction, the vibration of the vibration portion is used to push the gas to flow in the first airflow channel; the vibration of the cantilever portion is used to push the gas to flow in the second airflow channel.

[0006] Furthermore, in some embodiments, the piezoelectric heat dissipation device further includes a cover disposed along the first direction on the side of the piezoelectric element away from the diaphragm, and a frame connected between the cover and the support structure. The cover and the vibration assembly are spaced apart along the first direction to form a cavity. The piezoelectric element is disposed in the cavity, and the piezoelectric element and the cover are spaced apart and opposite to each other along the first direction. The cover has an air intake channel communicating with the outside and the cavity.

[0007] Furthermore, in some embodiments, the support structure includes a support portion that supports the abutment portion and a connecting portion disposed around the periphery of the support portion and spaced apart from the cantilever portion in the first direction, wherein the flow channel is formed in the connecting portion.

[0008] Furthermore, in some embodiments, the piezoelectric heat dissipation device further includes a support base disposed along the first direction on the side of the support structure opposite to the vibration component; and the support base includes a baffle plate disposed at intervals opposite to the jet plate along the first direction; the baffle plate, the support portion, and the jet plate enclose a jet layer communicating with the jet hole; the baffle plate has a plurality of air outlet holes extending along the first direction, and the air outlet holes communicate with the outside and the jet layer.

[0009] Furthermore, in some embodiments, the surface of the diaphragm facing the piezoelectric element is recessed along the first direction in a direction away from the piezoelectric element to form a first connecting groove, and the first connecting groove extends from the cantilever portion towards the vibrating portion; the piezoelectric heat dissipation device is provided with a second connecting groove at one end of the first connecting groove away from the cantilever portion, extending along the first direction in a direction away from the piezoelectric element; the first connecting groove connects the cavity and the second connecting groove, and the second connecting groove connects the jet layer; the gas in the first airflow channel flows sequentially through the air inlet channel, the cavity, the first connecting groove, the second connecting groove, the jet layer, and the air outlet.

[0010] Furthermore, in some embodiments, the number of air outlets and jet holes is the same, and the orthogonal projections of the centers of the air outlets and jet holes on a plane perpendicular to the first direction overlap.

[0011] Furthermore, in some embodiments, the outer periphery of the cantilever portion and the frame are sandwiched together by a flow space that extends along the first direction; the flow space connects the cavity and the flow channel.

[0012] Furthermore, in some embodiments, the supporting base further includes a support frame disposed around the baffle plate, the support frame and the connecting portion being spaced apart relative to each other along the first direction, and the support frame having a plurality of air outlet channels extending along the first direction, the air outlet channels being connected to the flow channel; the gas in the second airflow channel flows through the air inlet channel, the cavity, the flow space, the flow channel and the air outlet channel.

[0013] Furthermore, in some embodiments, the supporting portion protrudes towards the supporting portion along the first direction relative to the vibrating portion and the cantilever portion, and a groove with an opening facing the jet plate is formed between the supporting portion, the supporting portion and the vibrating portion, and the outer peripheral side of the jet plate is embedded in the groove.

[0014] Furthermore, in some embodiments, the diameter of the jet orifice is 5μm-500μm.

[0015] The beneficial effects of this invention are as follows: Along the first direction, the piezoelectric heat dissipation device sequentially comprises a piezoelectric element, a diaphragm, a jet plate, and a supporting structure. The diaphragm includes a central vibrating section, a peripheral cantilever section, and a supporting section between the vibrating section and the cantilever section. The piezoelectric element drives the diaphragm to vibrate along the first direction. The supporting section and the supporting structure support each other, acting as fulcrums. Taking the piezoelectric element as the upper part and the supporting structure as the lower part as the lower part, when the diaphragm bends and deforms, the vibrating section faces upwards while the cantilever section faces downwards, and vice versa, maximizing the utilization of the diaphragm. Furthermore, when the diaphragm vibrates, it performs work on the gas, driving its directional flow. Gas from the first airflow channel can circulate between the energy conversion chamber and the outside through the jet holes; gas from the second airflow channel can flow to the outside through the flow channel.

[0016] Furthermore, when the piezoelectric element drives the diaphragm to vibrate repeatedly up and down, under the action of the vibrating part, external gas from the first airflow channel and originating above the piezoelectric element can be continuously drawn into the energy conversion cavity. Moreover, the vibrating part can also continuously do work on the gas in the energy conversion cavity, so that the gas in the energy conversion cavity can also be continuously ejected from the jet hole. Thus, a continuous external airflow can be formed outside the piezoelectric heat dissipation device and at the position corresponding to the vibrating part along the first direction. In addition, the suspension part can also continuously do work on the external gas from the second airflow channel and originating above the piezoelectric element, thus forming a continuous external gas outside the piezoelectric heat dissipation device and at the position corresponding to the cantilever part along the first direction.

[0017] In this invention, a diaphragm and a support structure are combined. The diaphragm and the support structure support each other, so that a vibrating part can be formed on the inner side of the supporting part and a cantilever part can be formed on the outer side of the supporting part. This maximizes the use of the diaphragm area, takes into account the characteristics of high back pressure and high flow rate, and can also achieve miniaturization, thinness and lightness and low power consumption. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the piezoelectric heat dissipation device according to the first embodiment of the present invention; Figure 2 for Figure 1 A cross-sectional view along the AA direction; Figure 3 This is a three-dimensional exploded view of the piezoelectric heat dissipation device according to the first embodiment of the present invention; Figure 4 This is a three-dimensional exploded view of a portion of the piezoelectric heat dissipation device according to the first embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the piezoelectric heat dissipation device according to the second embodiment of the present invention; Figure 6 for Figure 5 A cross-sectional view along the AA direction; Figure 7 This is a schematic diagram of the piezoelectric heat dissipation device without its cover according to the second embodiment of the present invention; Figure 8 This is a schematic diagram of the piezoelectric heat dissipation device according to the third embodiment of the present invention; Figure 9 for Figure 8 A cross-sectional view along the AA direction; Figure 10 for Figure 8 A cross-sectional view along the BB direction.

[0019] In the accompanying drawings, the reference numerals denote: 1. Diaphragm; 11. Cantilever; 12. Vibrating part; 121. Main structure; 122. Peripheral sidewall; 123. Annular structure; 13. Supporting part; 2. Piezoelectric element; 3. Support structure; 31. Support part; 32. Connecting part; 4. Jet plate; 5. Cavity; 6. First airflow channel; 61. First connecting groove; 62. Second connecting groove; 63. Jet layer; 64. Jet hole; 65. Energy conversion cavity; 66. Air outlet; 7. Second airflow channel; 71. Flow space; 72. Flow channel; 73. Air outlet channel; 8. Cover; 81. Air inlet channel; 9. Frame; 10. Support base; 101. Baffle plate; 102. Support frame. Detailed Implementation

[0020] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "circumferential," and "radial," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0023] Please see Figures 1 to 10 A piezoelectric heat dissipation device includes a vibrating component that vibrates along a first direction and a supporting structure 3 that supports the vibrating component along the first direction. The piezoelectric heat dissipation device also includes a jet plate 4 disposed between the vibrating component and the supporting structure 3 and spaced apart from the vibrating component along the first direction. The jet plate 4 and the vibrating component form an energy conversion cavity 65 for inhaling and exhaling gas. The vibrating component includes a diaphragm 1 and a piezoelectric element 2 disposed along the first direction on the side of the diaphragm 1 away from the supporting structure 3. The diaphragm 1 includes a supporting portion 13 that abuts against and is supported on the supporting structure 3, a vibrating portion 12 surrounded by the supporting portion 13, and a cantilever portion 11 disposed around the supporting portion 13. The cantilever portion 11 and the supporting structure 3 are spaced apart along the first direction. The components are arranged opposite each other; the jet plate 4 has several jet holes 64 that pass through the jet plate 4 along the first direction; the support structure 3 has several flow channels 72 that pass through the first direction, and the flow channels 72 are spaced apart from the cantilever portion 11 in the first direction; the piezoelectric heat dissipation device has a first airflow channel 6 that connects the side of the piezoelectric element 2 away from the diaphragm 1 to the jet holes 64, and a second airflow channel 7 that connects the side of the piezoelectric element 2 away from the diaphragm 1 to the flow channels 72; the piezoelectric element 2 drives the vibrating part 12 and the cantilever portion 11 to vibrate along the first direction, and the vibration of the vibrating part 12 is used to push the gas to flow in the first airflow channel 6; the vibration of the cantilever portion 11 is used to push the gas to flow in the second airflow channel 7.

[0024] In this embodiment of the invention, along a first direction, the piezoelectric heat dissipation device is sequentially arranged with a piezoelectric element 2, a diaphragm 1, a jet plate 4, and a support structure 3. The diaphragm 1 includes a central vibrating portion 12, a peripheral cantilever portion 11, and a supporting portion 13 located between the vibrating portion 12 and the cantilever portion 11. The piezoelectric element 2 can drive the diaphragm 1 to vibrate along the first direction. The supporting portion 13 and the support structure 3 support each other, thus serving as a fulcrum. Taking the piezoelectric element 2 as the upper part and the support structure 3 as the lower part, when the diaphragm 1 bends and deforms, the vibrating portion 12 faces upwards while the cantilever portion 11 faces downwards, and vice versa, maximizing the utilization of the diaphragm 1. Furthermore, when the diaphragm 1 vibrates, it can perform work on the gas, driving its directional flow. Gas from the first airflow channel 6 can flow between the energy conversion chamber 65 and the outside through the jet hole 64; gas from the second airflow channel 7 can flow to the outside through the flow channel 72.

[0025] For example, the first direction is longitudinal, and the diaphragm 1 vibrates up and down driven by the piezoelectric element 2. Taking the piezoelectric element 2 as the upper part and the support structure 3 as the lower part as an example, when the vibrating part 12 of the diaphragm 1 bends and deforms upward, the volume of the energy conversion cavity 65 increases, the internal pressure of the energy conversion cavity 65 decreases, and the external gas from the first airflow channel 6 can be drawn into the energy conversion cavity 65 through the jet hole 64; at the same time, the cantilever part 11 of the diaphragm 1 bends and deforms downward, so that the cantilever part 11 can push the external gas from the second airflow channel 7 to the flow channel 72, thereby forming an external airflow outside the piezoelectric heat dissipation device and at the position corresponding to the cantilever part 11 along the first direction. When the piezoelectric element 2 drives the vibrating part 12 of the diaphragm 1 to bend downwards, the volume of the energy conversion cavity 65 decreases. The gas inside the energy conversion cavity 65 is compressed and ejected downwards through the jet hole 64 to form a vortex. At the same time, the gas below the jet plate 4 continues to be ejected downwards, thereby forming an external airflow outside the piezoelectric heat dissipation device and at a position corresponding to the vibrating part 12 in the first direction; it also prevents gas backflow. Furthermore, the jet hole 64 accelerates the gas flow.

[0026] Understandably, in the actual process, during the absorption of external gas by the energy conversion cavity 65, due to inertia, the gas that has already been ejected from the jet hole 64 will continue to flow downwards, thereby preventing this part of the gas from being repeatedly absorbed into the energy conversion cavity 65. The external gas absorbed by the aforementioned energy conversion cavity 65 actually comes from the first airflow channel 6, which is connected to the top of the piezoelectric element 2. Therefore, the energy conversion cavity 65 absorbs the gas from the first airflow channel 6 and originates from the top of the piezoelectric element 2. The energy conversion cavity 65 will not absorb the gas ejected from the jet hole 64, thus preventing gas backflow.

[0027] Furthermore, when the piezoelectric element 2 drives the diaphragm 1 to vibrate repeatedly up and down, under the action of the vibration part 12, external gas from the first airflow channel 6 and originating above the piezoelectric element 2 can be continuously drawn into the energy conversion chamber 65. Moreover, the vibration part 12 can also continuously do work on the gas in the energy conversion chamber 65, so that the gas in the energy conversion chamber 65 can also be continuously ejected from the jet hole 64, thereby forming a continuous external airflow outside the piezoelectric heat dissipation device and at the position corresponding to the vibration part 12 in the first direction. In addition, the suspension part can also continuously do work on the external gas from the second airflow channel 7 and originating above the piezoelectric element 2, thereby forming a continuous external gas outside the piezoelectric heat dissipation device and at the position corresponding to the cantilever part 11 in the first direction.

[0028] In other words, in this invention, the diaphragm 1 and the support structure 3 are combined, and the supporting part 13 of the diaphragm 1 and the support structure 3 support each other, so that a vibration part 12 can be formed on the inner side of the supporting part 13 and a cantilever part 11 can be formed on the outer side of the supporting part 13. This maximizes the utilization of the area of ​​the diaphragm 1, can take into account the characteristics of high back pressure and high flow rate, and can also achieve miniaturization, thinness and low power consumption.

[0029] In addition, the first airflow channel 6 and the second airflow channel 7 are two independent airflow channels, which can prevent the airflow at the cantilever 11 from being affected when the energy conversion cavity 65 absorbs gas, and they will not interfere with each other, thereby increasing the net flow rate of the piezoelectric heat dissipation device.

[0030] It should be noted that the first direction being longitudinal, and the piezoelectric element 2 being above and the support structure 3 being below, is merely for ease of explanation and simplification in this embodiment of the invention, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the invention. Furthermore, unless otherwise specified in this invention, the piezoelectric element 2 is assumed to be above and the support structure 3 below.

[0031] For example, the first direction is Figure 2 In the X-axis direction.

[0032] Furthermore, in some embodiments, the jet plate 4 and the diaphragm 1 can resonate, thereby increasing the volume change of the energy conversion cavity 65 and increasing the outflow velocity of the jet hole 64.

[0033] Furthermore, in some embodiments, the piezoelectric heat dissipation device further includes a cover 8 disposed along the first direction on the side of the piezoelectric element 2 away from the diaphragm 1, and a frame 9 connected between the cover 8 and the support structure 3. The cover 8 and the vibration assembly are spaced apart to form a cavity along the first direction. The piezoelectric element 2 is disposed in the cavity 5, and the piezoelectric element 2 and the cover 8 are spaced apart and opposite to each other along the first direction. The orthographic projection of the cover 8 on a plane perpendicular to the first direction covers the orthographic projection of the piezoelectric element 2 on a plane perpendicular to the first direction. The cover 8 has an air intake channel 81 that connects the outside and the cavity 5.

[0034] Specifically, the frame 9 can be ring-shaped, the cover 8 is mounted on one side of the frame 9 along the first direction, and the support structure 3 is located on the other side of the frame 9. The piezoelectric element 2 is disposed inside the cavity 5, but the overall volume of the piezoelectric element 2 is smaller than the volume of the cavity 5. Therefore, external air can enter the cavity 5 through the air inlet channel 81 and flow inside the cavity 5. In addition, the frame 9 and the cover 8 can prevent external dust and other contaminants from entering the cavity 5 and affecting the operation of the piezoelectric element 2.

[0035] Furthermore, in some embodiments, the support structure 3 includes a support portion 31 supporting the abutment portion 13, and a connecting portion 32 disposed around the periphery of the support portion 31 and spaced apart from the cantilever portion 11 in a first direction. A flow channel 72 is formed in the connecting portion 32. Specifically, the support structure 3 includes a support portion 31 located in the middle and a connecting portion 32 located on the periphery. The connecting portion 32 is provided with a flow channel 72. The support portion 31 can support the abutment portion 13. Through the mutual abutment of the support portion 31 and the abutment portion 13, when the diaphragm 1 vibrates, the vibrating portion 12 and the cantilever portion 11 can respectively perform work on the gas, driving the gas to flow in a directional manner.

[0036] Furthermore, in some embodiments, the piezoelectric heat dissipation device further includes a support base 10 disposed along the first direction on the side of the support structure 3 away from the vibration component; and the support base 10 includes a baffle plate 101 disposed at intervals opposite to the jet plate 4 along the first direction; the baffle plate 101, the support portion 31, and the jet plate 4 enclose a jet layer 63 that communicates with the jet holes 64; the baffle plate 101 has a plurality of air outlet holes 66 that extend along the first direction, and the air outlet holes 66 communicate with the outside and the jet layer 63.

[0037] Specifically, the support base 10 provides support. Furthermore, the support base 10, corresponding to the position of the jet plate 4 and the support portion 31, can be a baffle 101. Thus, the baffle 101, the jet plate 4, and the support portion 31 on the side away from the connecting portion 32 can enclose and form a jet layer 63, allowing the gas in the first airflow channel 6 to flow from the jet layer 63 to the jet hole 64 and then to the energy conversion chamber 65. Additionally, the gas flowing out of the jet hole 64 can flow to the jet layer 63 and then out through the outlet hole 66 to the outside, achieving gas exchange.

[0038] Furthermore, in some embodiments, the surface of the diaphragm 1 facing the piezoelectric element 2 is recessed in a direction away from the piezoelectric element to form a first connecting groove 61, and the first connecting groove 61 extends from the cantilever portion 11 toward the vibrating portion 12; the piezoelectric heat dissipation device is provided with a second connecting groove 62 extending in a direction away from the piezoelectric element 2 in the first direction at one end of the first connecting groove 61 away from the cantilever portion 11; the first connecting groove 61 connects the cavity 5 and the second connecting groove 62, and the second connecting groove 62 connects the jet layer 63; the gas in the first airflow channel 6 flows sequentially through the air inlet channel 81, the cavity 5, the first connecting groove 61, the second connecting groove 62, the jet layer 63 and the air outlet 66.

[0039] Specifically, along the first direction, with the piezoelectric element 2 above and the supporting structure 3 below, a wall is provided above the diaphragm 1, and a jet layer 63 is provided below the diaphragm 1. Therefore, the jet layer 63 and the cavity 5 can be connected through the first connecting groove 61 and the second connecting groove 62. In this way, the airflow in the first airflow channel 6 can flow from the air inlet channel 81 to the cavity 5, then to the first connecting groove 61 and the second connecting groove 62, and then to the jet layer 63. In addition, when the vibrating part 12 bends and vibrates upward, the volume of the energy conversion cavity 65 increases and the pressure decreases. The gas flowing from the first airflow channel 6 to the jet layer 63 will flow into the energy conversion cavity 65 through the jet hole 64. When the vibrating part 12 bends and vibrates downward, the volume of the energy conversion cavity 65 decreases. The gas in the energy conversion cavity 65 will be compressed and ejected downward through the jet hole 64 to form a vortex, and flow out from the air outlet 66. At the same time, the gas below the baffle plate 101 continues to be ejected downward, which can form an external airflow and prevent the gas from flowing back.

[0040] Furthermore, in some embodiments, the number of vent holes 66 and jet holes 64 is the same, and the orthogonal projections of the centers of the vent holes 66 and jet holes 64 on a plane perpendicular to the first direction overlap. Since the number of vent holes 66 and jet holes 64 is the same, and the orthogonal projections of their centers on a plane perpendicular to the first direction overlap, the gas flowing out of the jet holes 64 can quickly flow to the outside through the vent holes 66, thereby achieving rapid gas flow and preventing gas backflow.

[0041] Furthermore, in some embodiments, the outer periphery of the cantilever portion 11 and the frame 9 are sandwiched together with a flow space 71 that extends along a first direction, the flow space 71 connecting the cavity 5 and the flow channel 72.

[0042] Specifically, a flow space 71 is provided between the outer periphery of the cantilever 11 and the frame 9, so that the cavity 5 above the cantilever 11 and the flow channel 72 below the cantilever 11 can be connected through the flow space 71.

[0043] Furthermore, in some embodiments, the support base 10 further includes a support frame 102 disposed around the baffle 101. The support frame 102 and the connecting part 32 are arranged at intervals relative to each other along the first direction, and the support frame 102 has a plurality of air outlet channels 73 extending along the first direction. The air outlet channels 73 and the flow channels 72 are connected. The gas in the second airflow channel 7 flows through the air inlet channel 81, the cavity 5, the flow space 71, the flow channel 72 and the air outlet channel 73.

[0044] Specifically, the support base 10 includes a baffle plate 101 located at the center and a support frame 102 located on the periphery. The support frame 102 has a connecting part 32 and a cantilever part 11 on its upper part. An air outlet channel 73 is provided on the support frame 102. Thus, when the cantilever part 11 bends and vibrates downward, the gas in the second airflow channel 7 can flow from the air inlet channel 81 to the cavity 5, then to the flow space 71, and then from the flow channel 72 to the air outlet channel 73, thereby realizing the flow of air.

[0045] Furthermore, in some embodiments, the supporting portion 13 protrudes relative to the vibrating portion 12 and the cantilever portion 11 in the direction of the supporting portion 31 along the first direction, and a groove with an opening facing the jet plate 4 is formed between the supporting portion 13, the supporting portion 31 and the vibrating portion 12, and the outer peripheral side of the jet plate 4 is embedded in the groove.

[0046] Specifically, part of the support 31 is abutted and connected to the abutting part 13, and part of the support 31 has a gap along the first direction with the vibrating part 12, so that the abutting part 13, the support 31 and the vibrating part 12 can be enclosed to form an open groove, and the periphery of the jet plate 4 can be embedded in the groove, thereby realizing the mutual connection between the jet plate 4, the diaphragm 1 and the support structure 3.

[0047] Understandably, the supporting portion 13 and the supporting portion 31 interact and can jointly serve as the fulcrum of vibration. Therefore, in some embodiments, the supporting portion 13 may not protrude relative to the vibrating portion 12 and the cantilever portion 11.

[0048] Furthermore, in some embodiments, the diameter of the jet orifice 41 is 5μm-500μm. Specifically, the diameter of the jet orifice 41 can be 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 200, 300, 400 or 500μm, which can eject gas from the jet orifice 41 to form a vortex in the jet layer and accelerate the gas flow rate.

[0049] Furthermore, both the piezoelectric element 2 and the diaphragm 1 are circular; or, the piezoelectric element 2 is annular and the diaphragm 1 is circular; or, the piezoelectric element 2 is circular and the diaphragm 1 is annular.

[0050] In one embodiment, please refer to Figures 1 to 7The diaphragm 1 is circular, and the piezoelectric element 2 is circular or annular. The vibrating part 12 includes a main body structure 121 attached to the piezoelectric element 2 and a peripheral sidewall 122 located on the periphery of the main body structure 121 and protruding towards the jet plate 4 in a first direction. The main body structure 121, the peripheral sidewall 122 and the jet plate 4 form an energy conversion cavity 65.

[0051] Specifically, the piezoelectric element 2 can be a thin cylinder or annular cylinder orthogonal to the first direction; the vibrating part 12 of the diaphragm 1 can include a main body structure 121 orthogonal to the first direction and cylindrical in shape, and a peripheral sidewall 122 protruding from the main body structure 121 along the first direction toward the jet plate 4. Thus, a groove is formed on the side of the vibrating part 12 facing the jet plate 4, and the jet plate 4 covers the groove, thereby forming an energy conversion cavity 65.

[0052] In another embodiment, please refer to Figures 8 to 10 The main difference from the above embodiment is that the diaphragm 1 can be annular, and the piezoelectric element 2 can be circular. The vibrating part 12 is an annular structure 123 surrounded by the supporting part 13. The orthographic projection of the piezoelectric element 2 on a plane perpendicular to the first direction covers the orthographic projection of the annular structure 123 on a plane perpendicular to the first direction. The piezoelectric element 2, the inner wall of the annular structure 123, and the jet plate 4 form an energy conversion cavity 65.

[0053] Specifically, the annular structure 123 in the middle of the diaphragm 1 is the vibrating part 12, and the center of the annular structure 123 is a hollow structure that runs through the first direction. The piezoelectric element 2 is mounted on one side of the annular structure 123 along the first direction, and the jet plate 4 is set on the other side of the annular structure 123 along the first direction. In this way, an energy conversion cavity 65 can be formed between the piezoelectric element 2, the inner wall of the annular structure 123 and the jet plate 4.

[0054] Understandably, the piezoelectric element 2 and the diaphragm 1 can also be of various shapes. For example, in some embodiments, the piezoelectric element 2 and the diaphragm 1 can also be square. The specific shape can be determined according to actual needs. Regardless of the shape of the diaphragm 1 and the piezoelectric element 2, it will not affect the arrangement of the energy conversion cavity 65, the first airflow channel 6, and the second airflow channel 7, which will not be elaborated upon here.

[0055] The above are merely embodiments of the present invention. It should be noted that those skilled in the art can make improvements without departing from the inventive concept of the present invention, but these improvements all fall within the protection scope of the present invention.

Claims

1. A piezoelectric heat dissipation device, comprising a vibrating component vibrating along a first direction and a supporting structure supporting the vibrating component along the first direction, characterized in that, The piezoelectric heat dissipation device further includes a jet plate disposed between the vibration component and the support structure and spaced apart from the vibration component along the first direction; the jet plate and the vibration component form an energy conversion cavity for breathing in and out gas; The vibration assembly includes a diaphragm and a piezoelectric element disposed on the side of the diaphragm away from the support structure along a first direction; the diaphragm includes a support portion abutting against and supported on the support structure, a vibration portion surrounded by the support portion, and a cantilever portion disposed around the support portion, wherein the cantilever portion and the support structure are spaced apart and opposite to each other in the first direction; The jet plate has a plurality of jet holes that penetrate the jet plate along the first direction; The support structure is provided with a plurality of flow channels that extend along the first direction, and the flow channels are spaced apart from the cantilever portion in the first direction. The piezoelectric heat dissipation device has a first airflow channel connecting the side of the piezoelectric element away from the diaphragm to the jet hole, and a second airflow channel connecting the side of the piezoelectric element away from the diaphragm to the flow channel; The piezoelectric element drives the vibrating part and the cantilever part to vibrate along the first direction. The vibration of the vibrating part is used to propel the gas to flow in the first airflow channel; the vibration of the cantilever part is used to propel the gas to flow in the second airflow channel.

2. The piezoelectric heat dissipation device according to claim 1, characterized in that, The piezoelectric heat dissipation device further includes a cover disposed along the first direction on the side of the piezoelectric element away from the diaphragm, and a frame connected between the cover and the support structure. The cover and the vibration assembly are spaced apart along the first direction to form a cavity. The piezoelectric element is disposed in the cavity, and the piezoelectric element and the cover are spaced apart and opposite to each other along the first direction. The cover has an air intake channel communicating with the outside and the cavity.

3. The piezoelectric heat dissipation device according to claim 2, characterized in that, The support structure includes a support portion that supports the abutment portion and a connecting portion disposed around the support portion and spaced apart from the cantilever portion in the first direction, wherein the flow channel is formed in the connecting portion.

4. The piezoelectric heat dissipation device according to claim 3, characterized in that, The piezoelectric heat dissipation device further includes a support base disposed along the first direction on the side of the support structure opposite to the vibration component; and the support base includes a baffle plate disposed at intervals opposite to the jet plate along the first direction; the baffle plate, the support portion, and the jet plate enclose a jet layer communicating with the jet hole; the baffle plate has a plurality of air outlet holes extending along the first direction, and the air outlet holes communicate with the outside and the jet layer.

5. The piezoelectric heat dissipation device according to claim 4, characterized in that, The diaphragm's surface facing the piezoelectric element is recessed along the first direction in a direction away from the piezoelectric element to form a first connecting groove, and the first connecting groove extends from the cantilever portion towards the vibrating portion; the piezoelectric heat dissipation device has a second connecting groove at the end of the first connecting groove away from the cantilever portion, extending along the first direction in a direction away from the piezoelectric element; the first connecting groove connects the cavity and the second connecting groove, and the second connecting groove connects the jet layer; the gas in the first airflow channel flows sequentially through the air inlet channel, the cavity, the first connecting groove, the second connecting groove, the jet layer, and the air outlet.

6. The piezoelectric heat dissipation device according to claim 5, characterized in that, The number of air outlets and jet holes is the same, and the orthogonal projections of the centers of the air outlets and jet holes on a plane perpendicular to the first direction overlap.

7. The piezoelectric heat dissipation device according to claim 5, characterized in that, The outer periphery of the cantilever portion and the frame are sandwiched together by a flow space that extends along the first direction; the flow space connects the cavity and the flow channel.

8. The piezoelectric heat dissipation device according to claim 7, characterized in that, The supporting base also includes a support frame disposed around the baffle plate. The support frame and the connecting part are arranged at intervals relative to each other along the first direction, and the support frame has a plurality of air outlet channels that pass through along the first direction. The air outlet channels and the flow channel are connected. The gas in the second airflow channel flows through the air inlet channel, the cavity, the flow space, the flow channel and the air outlet channel.

9. The piezoelectric heat dissipation device according to claim 8, characterized in that, The supporting portion protrudes towards the supporting portion in the first direction relative to the vibrating portion and the cantilever portion. The supporting portion, the supporting portion and the vibrating portion form a groove with an opening facing the jet plate. The outer periphery of the jet plate is embedded in the groove.

10. The piezoelectric heat dissipation device according to claim 1, characterized in that, The diameter of the jet orifice is 5μm-500μm.

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