Testing device, testing method and lifting mechanism

Abstract

The invention provides a testing device, a testing method and a lifting mechanism, the testing device comprises a first testing mechanism and a second testing mechanism, the first testing mechanism is used for being connected with a first connecting end and can introduce a testing medium into a magnetic liquid cavity, and the second testing mechanism is used for being connected with a second connecting end; the second testing mechanism is used for being connected with the second connecting end, and a detection space is formed between the second testing mechanism and the second connecting end. The test medium is introduced into the magnetic liquid cavity through the first test mechanism, and the detection space is detected by adopting the second test mechanism, so that the test efficiency of the sealing performance of the magnetofluid assembly is improved.

Description

Technical Field

[0001] This application relates to the field of magnetohydrodynamics, and more specifically, to a testing device, a testing method, and a lifting mechanism. Background Technology

[0002] In the semiconductor manufacturing industry, the electric cylinder assembly can drive the carrier assembly to make full contact with the substrate under the reaction chamber to achieve the effect of mechanical sealing. After a certain period of time, the electric cylinder assembly will drive the carrier assembly to descend a certain distance, and then drive the heating plate assembly to rotate a certain angle through the magnetic fluid assembly. Finally, the electric cylinder assembly will drive the carrier assembly to rise again to make full contact with the substrate under the reaction chamber, completing one work cycle.

[0003] However, since the magnetofluid assembly undergoes tens of thousands of such working cycles, under long-term repeated pressure, the magnetofluid stored inside the assembly may not make sufficient contact with the contacted part, resulting in leakage of the magnetofluid; and the internal structure of the magnetofluid assembly may undergo slight deformation, causing the axis to deviate, which gradually reduces the circular runout performance of the carrier assembly; thus seriously affecting the performance of the magnetofluid assembly.

[0004] Therefore, how to simulate actual working conditions to test magnetofluid components in order to improve their tolerance is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] One objective of this application is to provide a new technical solution for a testing device, a testing method, and a lifting mechanism.

[0006] According to a first aspect of the embodiments of this application, a testing apparatus is provided for testing a magnetofluid assembly (21) of a lifting mechanism (200), the magnetofluid assembly (21) having a magnetofluid cavity (2100) inside, and the magnetofluid assembly (21) having a first connecting end (211) and a second connecting end (212) opposite to each other in a first direction, characterized in that it includes: The first testing mechanism (1) and the second testing mechanism (2) are used to connect to the first connecting end (211) and to introduce a test medium into the magnetic fluid cavity (2100). The second testing mechanism (2) is used to connect to the second connecting end (212) and to form a detection space (3) between the second connecting end (212).

[0007] Optionally, the second connection end (212) has a connection post port (21201) and a mounting surface (21202), characterized in that the second testing mechanism (2) includes a first detection element (201), which is used to connect to the mounting surface (21202). It also includes a sealing element (202) for connecting and sealing the connecting post port (21201) to form the detection space (3) between the first detection element (201), the sealing element (202), and the second connection end (212).

[0008] Optionally, the first detection element (201) has a conical receiving cavity (2010) formed in a first direction.

[0009] Optionally, the sealing element (202) is a blind plate, and the orthographic projection of the blind plate toward the assembly surface (21202) is greater than the orthographic projection of the connecting post port (21201) toward the assembly surface (21202).

[0010] Optionally, the second testing mechanism (2) includes a detector (203), and the first testing component (201) is provided with a testing port (2011), and the detector (203) is detachably connected to the testing port (2011).

[0011] According to a second aspect of the embodiments of this application, a testing apparatus is provided for testing a vehicle assembly (22) of a lifting mechanism (200), characterized in that it comprises: The top plate (5), the bracket (6), and the third testing mechanism (7) are provided. The top plate (5) is movably connected to the bracket (6). The top plate (5) has a process hole (501) that engages with the top of the vehicle assembly (22). The third testing mechanism (7) is used to test the circular runout of the vehicle assembly (22).

[0012] Optionally, it also includes an adjustment mechanism, at least a portion of which is disposed between the top plate (5) and the bracket (6) to adjust the gap height between the top plate (5) and the bracket (6).

[0013] Optionally, the top plate (5) has an adjustment hole (503); The adjustment mechanism is a set screw, which can pass through the adjustment hole (503) to adjust the gap height between the top plate (5) and the bracket (6).

[0014] Optionally, the third testing mechanism (7) includes a driving component and a testing component, wherein the driving component is capable of driving the testing component to abut against the side of the vehicle component (22) to test the circular runout of the vehicle component (22).

[0015] Optionally, the top plate (5) has a first side, a second side, a third side and a fourth side arranged in a cross shape, the first side and the second side being opposite to each other, and the third side and the fourth side being opposite to each other; The bracket (6) includes a first bracket (601), a second bracket (602), a third bracket (603) and a fourth bracket (604). The first bracket (601) is disposed on the first side, the second bracket (602) is disposed on the second side, the third bracket (603) is disposed on the third side, and the fourth bracket (604) is disposed on the fourth side.

[0016] Optionally, the first support (601) and the second support (602) have the same structure, and the third support (603) and the fourth support (604) have the same structure.

[0017] Optionally, the third testing mechanism (7) is disposed on the top plate (5).

[0018] Optionally, the testing device further includes a mounting bracket (11) having a fixed end (111) and an assembly end (112) facing away from each other in a first direction. The fixed end (111) is connected to the bracket (6), and the assembly end (112) is connected to the third testing mechanism (7).

[0019] Optionally, the bracket (6) includes a first protrusion (61) and a second protrusion (62); The mounting bracket (11) includes a first fixing part (1101) and a second fixing part (1102). The first fixing part (1101) is connected to the first protrusion (61), and the second fixing part (1102) is connected to the second protrusion (62).

[0020] According to a third aspect of the embodiments of this application, a testing method is provided for testing a magnetofluid assembly (21) of a lifting mechanism (200), the magnetofluid assembly (21) having a magnetofluid cavity (2100) inside, and the magnetofluid assembly (21) having a first connecting end (211) and a second connecting end (212) opposite to each other in a first direction, characterized in that the testing method includes: Connect the first test unit (1) to the first connection end (211); The second test mechanism (2) is connected to the second connection end (212) to form a test space (3) between the second test mechanism (2) and the second connection end (212); The first testing mechanism (1) is used to introduce a test medium into the magnetic fluid cavity (2100), and the second testing mechanism (2) is used to test the detection space (3).

[0021] Optionally, the lifting mechanism (200) includes a carrier assembly (22), which further includes, before connecting the first test mechanism (1) to the first connection end (211): S1: Connect the top plate (5) to the vehicle assembly (22) via the bracket (6); and use the third testing mechanism (7) to test the circular runout of the vehicle assembly (22) for the first time; S2: Drive the carrier assembly (22) to move so that the carrier assembly (22) is engaged with the process hole (501) of the top plate (5); S3: Drive the vehicle assembly (22) to move so that the vehicle assembly (22) separates from the top plate (5); S4: Drive the vehicle assembly (22) to rotate; S5: The third testing mechanism (7) is used to test the circular runout of the vehicle assembly (22) for the second time, and the result is compared with the result of the second test in step S1.

[0022] Optionally, steps S2 to S4 are repeated.

[0023] According to a fourth aspect of the embodiments of this application, a lifting mechanism is provided, the lifting mechanism including a magnetofluid assembly, the magnetofluid assembly being tested using a testing apparatus as described in any of the first aspects.

[0024] According to a fifth aspect of the embodiments of this application, a lifting mechanism is provided, the lifting mechanism including a carrier assembly, the carrier assembly being tested using a testing apparatus as described in any of the second aspects.

[0025] One technical advantage of this application is: The testing apparatus in this embodiment includes a first testing mechanism and a second testing mechanism. The first testing mechanism is connected to a first connecting end and is capable of introducing a test medium into the magnetic fluid cavity. The second testing mechanism is connected to a second connecting end and forms a detection space between the two ends. By introducing the test medium into the magnetic fluid cavity through the first testing mechanism and using the second testing mechanism to detect the detection space, the testing efficiency of the sealing performance of the magnetic fluid assembly is improved.

[0026] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments of this application with reference to the accompanying drawings. Attached Figure Description

[0027] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present application and, together with their description, serve to explain the principles of the present application.

[0028] Figure 1 This is a schematic diagram of the lifting mechanism in one embodiment of this application. Figure 1 .

[0029] Figure 2 This is a schematic diagram of the lifting mechanism in one embodiment of this application. Figure 2 .

[0030] Figure 3 This is an assembly diagram of the lifting mechanism, the first testing mechanism, and the second testing mechanism in one embodiment of this application.

[0031] Figure 4 This is a schematic diagram of the structure of the first detection element in one embodiment of this application.

[0032] Figure 5 This is a cross-sectional view of the first detection element in one embodiment of this application.

[0033] Figure 6 This is a schematic diagram of the sealing element in one embodiment of this application.

[0034] Figure 7 This is an assembly diagram of the lifting mechanism and the third testing mechanism in one embodiment of this application.

[0035] Figure 8 This is a schematic diagram of the lifting mechanism and the third testing mechanism in one embodiment of this application.

[0036] Figure 9 This is a schematic diagram of the top plate structure in one embodiment of this application.

[0037] Figure 10 This is a schematic diagram of the structure of the first or second bracket in one embodiment of this application.

[0038] Figure 11 This is a schematic diagram of the structure of the third or fourth support in one embodiment of this application.

[0039] Figure 12 This is a schematic diagram of the mounting bracket in one embodiment of this application.

[0040] Explanation of reference numerals in the attached figures: 1. The primary testing organization; 2. Second testing mechanism; 201. First testing component; 2010. Receiving cavity; 2011. Testing port; 2012. Fixing part; 20121. Fixing hole; 202. Sealing component; 2021. Mounting hole; 2022. Positioning hole; 203. Testing instrument; 3. Detection space; 4. Sealing ring; 5. Top plate; 501. Process hole; 502. Assembly hole; 503. Adjustment hole; 6. Bracket; 60. Blind hole; 61. First protrusion; 610. First through hole; 62. Second protrusion; 620. Second through hole; 63. Third through hole; 64. Fourth through hole; 601. First bracket; 602. Second bracket; 603. Third bracket; 604. Fourth bracket; 7. Third-party testing organization; 8. First controller; 9. Second controller; 10. Mounting bracket; 1001. Foot cup; 11. Mounting bracket; 111. Fixing end; 1101. First fixing part; 11011. Sixth through hole; 1102. Second fixing part; 11021. Seventh through hole; 112. Assembly end; 1121. Fifth through hole; 200. Lifting mechanism; 21. Magnetofluid assembly; 211. First connecting end; 21101. Air inlet; 212. Second connecting end; 21201. Connecting post port; 21202. Assembly surface; 2100. Magnetofluid chamber; 2101. Connecting post; 22. Vehicle components; 23. Heating plate assembly; 24. Leveling components; 25. Electric cylinder assembly; 26. First support frame; 27. Second support frame. Detailed Implementation

[0041] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0042] The embodiments of this application will now be described in detail, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0043] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0044] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0045] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0046] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0047] In related technologies, see Figure 1 One working cycle of the lifting mechanism 200 is as follows: the electric cylinder assembly 25 drives the carrier assembly 22 to rise. When the dial indicator on the leveling assembly 24 rotates (the dial indicator is zeroed before operation so that when the dial indicator starts to rotate, it indicates that the carrier assembly 22 has contacted the lower substrate of the reaction chamber), the carrier assembly 22 contacts the lower substrate of the reaction chamber, and the electric cylinder assembly 25 stops. (At this time, to ensure that the carrier assembly 22 is in full contact with the lower substrate of the reaction chamber, the electric cylinder assembly 25 can drive the carrier assembly 22 to rise a few more micrometers to achieve mechanical contact between the carrier assembly 22 and the lower substrate of the reaction chamber.) (Mechanical seal), the carrier assembly 22 starts working; after working for a period of time, the carrier assembly 22 stops working, the electric cylinder assembly 25 drives the carrier assembly 22 to descend (the descent distance can be set according to actual needs, as long as the electric cylinder assembly 25 can drive the heating plate assembly 23 to rotate through the magnetic fluid assembly 21), the magnetic fluid assembly 21 drives the heating plate assembly 23 to rotate, so as to drive the carrier assembly 22 to rotate, and then the electric cylinder assembly 25 drives the carrier assembly 22 to rise again until the carrier assembly 22 is in full contact with the lower substrate of the reaction chamber, and the carrier assembly 22 starts working.

[0048] However, since the lifting mechanism 200 will undergo such working cycles tens of thousands of times, under long-term repeated pressing conditions, the magnetic fluid stored inside the magnetic fluid assembly 21 may not make sufficient contact with the contacted part, which may lead to leakage of the magnetic fluid; and the internal structure of the magnetic fluid assembly 21 may undergo slight deformation, which may cause the axis to deviate, thus gradually reducing the circular runout performance of the carrier assembly 22; which may seriously affect the performance of the magnetic fluid assembly.

[0049] Therefore, the testing device provided in this application embodiment can introduce the test medium into the magnetic fluid cavity 2100 through the first testing mechanism 1 and use the second testing mechanism 2 to test the detection space 3, thereby improving the testing efficiency of the sealing performance of the magnetic fluid assembly 21.

[0050] Reference Figure 3 This application provides a testing device for testing the magnetofluid assembly 21 of a lifting mechanism 200. The magnetofluid assembly 21 has a magnetofluid cavity 2100 inside, and the magnetofluid assembly 21 has a first connecting end 211 and a second connecting end 212 that are opposite to each other in a first direction. The device is characterized by comprising: The first testing mechanism 1 and the second testing mechanism 2 are used to connect to the first connecting end 211 and to introduce the test medium into the magnetic fluid cavity 2100. The second testing mechanism 2 is used to connect to the second connecting end 212 and to form a detection space 3 between the second connecting end 212 and the second connecting end 212.

[0051] In the above embodiments, the first testing mechanism 1 and the second testing mechanism 2 are used to test the sealing performance of the magnetohydrodynamic assembly 21 after the circular runout range of the carrier assembly 22 is tested by the third testing mechanism 7.

[0052] See Figure 2 The heating plate assembly 23 can be connected to the second connection end 212 of the magnetofluid assembly 21 via the connecting post 2101. After testing the circular runout range of the carrier assembly 22, the heating plate assembly 23 can be removed to expose the connecting post 2101, which facilitates the connection of the second testing mechanism 2 to the second connection end 212 and the formation of a testing space 3 between the second connection end 212.

[0053] In the above embodiment, since a magnetic fluid cavity 2100 is formed between the connecting post 2101 and the outer shell of the magnetic fluid assembly 21, and the dynamic seal of the magnetic fluid assembly 21 is achieved by the magnetic field inside it causing the magnetic fluid in the magnetic fluid cavity 2100 to adhere tightly to the outer wall of the connecting post 2101, a dynamic seal that meets the requirements can be formed when the magnetic fluid cavity 2100 is filled with magnetic fluid and the adsorption force of the magnetic fluid is greater than the vacuum force. However, when the magnetic fluid in the magnetic fluid cavity 2100 is not completely filled, i.e., a gap is generated in the magnetic fluid, or the adsorption force of the magnetic fluid is less than the vacuum force, the magnetic fluid and the outer wall (the contacted part) of the connecting post 2101 cannot adhere tightly, causing the magnetic fluid in the magnetic fluid cavity 2100 to leak from the second connecting end 212.

[0054] Therefore, see Figure 3 In this embodiment, the cooperation of the first testing mechanism 1 and the second testing mechanism 2 enables the second testing mechanism 2 to detect the detection space 3 after the first testing mechanism 1 is connected to the first connection end 211 and the test medium is introduced into the magnetic fluid cavity 2100. Thus, when the second testing mechanism 2 detects the presence of the test medium in the detection space 3, the magnetic fluid assembly 21 leaks. Furthermore, by determining the concentration of the test medium per unit time, the leakage rate of the magnetic fluid assembly 21 is detected, effectively improving the testing efficiency of the sealing performance of the magnetic fluid assembly 21.

[0055] In some embodiments, the test medium may be helium, nitrogen or hydrogen, so as to accurately test the sealing performance of the magnetic fluid assembly 21 according to the different usage requirements of the magnetic fluid assembly 21.

[0056] In one embodiment, the second connection end 212 has a connection post port 21201 and a mounting surface 21202. The second testing mechanism 2 includes a first detection element 201 and a sealing element 202. The first detection element 201 is used to connect to the mounting surface 21202, and the sealing element 202 is used to connect to and seal the connection post port 21201, so as to form a detection space 3 between the first detection element 201, the sealing element 202 and the second connection end 212.

[0057] In the above embodiment, in order to form a sealed detection space 3 between the second testing mechanism 2 and the second connecting end 212, facilitating accurate detection of the detection space 3 by the second testing mechanism 2, the second testing mechanism 2 further includes a first detection element 201 and a sealing element 202. Thus, by connecting the first detection element 201 to the assembly surface 21202, the connection between the second testing mechanism 2 and the second connecting end 212 is sealed, preventing leakage of the test medium from between the second testing mechanism 2 and the second connecting end 212; and by connecting the sealing element 202 to the connecting post port 21201 and sealing the connecting post port 21201, the connecting post port 21201 is sealed, preventing leakage of the test medium from the connecting post port 21201; effectively improving testing accuracy.

[0058] In some embodiments, see Figure 4 The first detection component 201 is provided with a plurality of fixing parts 2012, and each fixing part 2012 is provided with a plurality of fixing holes 20121. At least some of the fixing holes 20121 can cooperate with the assembly surface 21202 to realize the connection between the first detection component 201 and the assembly surface 21202, and ensure that the first detection component 201 and the assembly surface 21202 are tightly fitted.

[0059] In some embodiments, in order to ensure the sealing performance of the detection space 3, a sealing ring 4 may be provided between the first detection element 201 and the assembly surface 21202 to further improve the sealing effect between the second testing mechanism 2 and the second connecting end 212.

[0060] In one embodiment, the first detection element 201 has a tapered receiving cavity 2010 formed in a first direction.

[0061] In the above embodiments, the first direction is Figure 5 In the vertical direction, the first detection element 201 forms a conical receiving cavity 2010 in the first direction. On the one hand, it can resist the deformation caused by atmospheric pressure to the greatest extent and improve the testing accuracy and efficiency of the second testing mechanism 2. On the other hand, it can also reduce the size of the first detection element 201, reduce the size of the detection space 3, reduce the overall size of the testing device, and improve the detection accuracy.

[0062] In one embodiment, the sealing member 202 is a blind plate, and the orthographic projection of the blind plate toward the mounting surface 21202 is greater than the orthographic projection of the connecting post port 21201 toward the mounting surface 21202.

[0063] In the above embodiment, by sealing the connecting post port 21201 with a larger-sized sealing member 202, leakage of the test medium from the connecting post port 21201 can be further prevented, thereby improving the test accuracy of the second test mechanism 2.

[0064] In some embodiments, see Figure 6 The blind plate is provided with multiple mounting holes 2021 and positioning holes 2022 at intervals. The multiple mounting holes 2021 and positioning holes 2022 enable the sealing component 202 to be better connected to the connecting post 2101, ensuring the sealing effect of the sealing component 202 on the connecting post port 21201.

[0065] In one embodiment, the second testing mechanism 2 includes a detector 203, and the first testing component 201 is provided with a testing port 2011. The detector 203 is detachably connected to the testing port 2011.

[0066] In some embodiments, see Figure 4 and Figure 5 The detection port 2011 can be a KF (Klein Flange) flange structure, which on the one hand can ensure the sealing performance between the first detection component 201 and the detector 203 and improve the testing accuracy of the detector 203; on the other hand, it can also improve the connection efficiency between the first detection component 201 and the detector 203, significantly shorten the vacuum maintenance time between the first detection component 201 and the detector 203, and improve the testing efficiency of the second testing mechanism 2.

[0067] Of course, in other embodiments, the detection port 2011 can also be selected with other structures that are detachably connected to the detector 203, as long as the reliability of the connection between the first detection element 201 and the detector 203 can be ensured. Those skilled in the art can choose according to actual needs, and this application does not make specific restrictions here.

[0068] See Figure 7 This application provides a testing device for testing the vehicle assembly 22 of a lifting mechanism 200, characterized in that it includes: The top plate 5, the bracket 6, and the third testing mechanism 7 are provided. The top plate 5 is movably connected to the bracket 6 and has a process hole 501 that mates with the top of the carrier assembly 22. The third testing mechanism 7 is used to test the circular runout of the carrier assembly 22.

[0069] In the above embodiment, the top plate 5 is provided with a process hole 501 that cooperates with the top of the carrier assembly 22, so that the top plate 5 can simulate the lower substrate of the reaction chamber. This makes it convenient to simulate the repeated pressure between the carrier assembly 22 and the lower substrate of the reaction chamber by repeatedly pressing the top plate 5 against the carrier assembly 22 when the lifting mechanism 200 is tested. This simulates the actual working conditions. After pressing, the third testing mechanism 7 is used to test the circular runout range of the carrier assembly 22 to check the difference in the circular runout data of the carrier assembly 22 before and after multiple pressings. This provides feedback on the structural stability of the carrier assembly 22 and improves the accuracy of the test results of the third testing mechanism 7.

[0070] In the above embodiments, the third testing mechanism 7 can be used to test the circular runout range of the vehicle assembly 22. Specifically, the third testing mechanism 7 may include a robotic arm and a dial indicator. The robotic arm may be disposed on the top plate surface, and the dial indicator may be disposed on the robotic arm. The robotic arm can drive the dial indicator to move so that the dial indicator head can test the circular runout range of the vehicle assembly 22.

[0071] See Figure 8 After the third testing mechanism 7 is fixed to the top plate surface, the dial indicator head can be aligned with the side surface of the carrier assembly 22 by adjusting the robotic arm of the third testing mechanism 7. Then, when the testing device starts testing, the dial indicator is first zeroed, and then the electric cylinder assembly 25 is started to drive the heating plate assembly 23 to rotate through the magnetohydrodynamic assembly 21, thereby realizing the rotation of the carrier assembly 22. At this time, the circular runout of the carrier assembly 22 will cause the dial indicator head pointer to change, and the range of pointer change is the circular runout range of the carrier assembly 22.

[0072] In the above embodiments, the circular runout range of the vehicle assembly 22, tested by the third testing mechanism 7, can directly reflect the tolerance of the magnetofluid assembly 21 to the lifting mechanism 200 under that operating condition. For example, a smaller circular runout range indicates that the magnetofluid assembly 21 has a better tolerance to that operating condition, that is, the negative impact of that operating condition on the magnetofluid assembly 21 is smaller; conversely, a larger circular runout range indicates that the magnetofluid assembly 21 has a worse tolerance to that operating condition, that is, the negative impact of that operating condition on the magnetofluid assembly 21 is greater.

[0073] In one embodiment, the testing apparatus further includes an adjustment mechanism disposed between the top plate 5 and the support 6 and capable of adjusting the gap between the top plate 5 and the support 6.

[0074] In the above embodiments, the first direction can be Figure 7 In the vertical direction, the bracket 6 can be positioned between the top plate 5 and the first support frame 26 in the first direction. Due to assembly errors and manufacturing tolerances, the levelness of the top plate 5 cannot be guaranteed. Therefore, this embodiment also includes an adjustment mechanism, which can be positioned between the top plate 5 and the bracket 6 in the first direction. This adjustment mechanism allows for changing the gap between the top plate 5 and the bracket 6, thereby achieving precise control of the levelness of the top plate 5 and ensuring better contact between the top plate 5 and the carrier assembly 22. This effectively improves the accuracy of the circular runout test of the carrier assembly 22.

[0075] In some embodiments, the adjustment mechanism can be configured as a set screw to adjust the level of the top plate 5 by pressing the support 6 with the set screw, so that the top plate 5 can better contact the carrier assembly 22. At the same time, the method of adjusting the level of the top plate 5 by pressing the support 6 with the set screw is more in line with the actual working conditions of the lifting mechanism 200, so it can facilitate the third testing mechanism 7 to better test the circular runout range of the carrier assembly 22, and improve the accuracy and efficiency of the test.

[0076] Of course, in other embodiments, the adjustment mechanism can also be selected from other structures, as long as it can adjust the level of the top plate 5. Those skilled in the art can choose according to actual needs, and this application does not impose specific restrictions here.

[0077] In one embodiment, the top plate 5 has a first side, a second side, a third side, and a fourth side arranged in a cross shape, with the first side and the second side facing each other, and the third side and the fourth side facing each other; the bracket 6 includes a first bracket 601, a second bracket 602, a third bracket 603, and a fourth bracket 604, with the first bracket 601 disposed on the first side, the second bracket 602 disposed on the second side, the third bracket 603 disposed on the third side, and the fourth bracket 604 disposed on the fourth side.

[0078] In some embodiments, see Figure 9 The top plate 5 can be square in shape. The square top plate 5 has a first side, a second side, a third side, and a fourth side arranged in a cross shape. The first side and the second side are arranged opposite each other, and the third side and the fourth side are arranged opposite each other. A process hole 501 is formed between the first side, the second side, the third side, and the fourth side. The process hole 501 can be mated with the top of the carrier assembly 22. That is, the top frustum of the carrier assembly 22 passes through the process hole 501 so that the top plate 5 can fully contact the carrier assembly 22. This allows the top plate 5 to better simulate the repeated pressing between the carrier assembly 22 and the substrate of the reaction chamber under actual working conditions, thereby improving the accuracy of the test device.

[0079] In the above embodiment, multiple assembly holes 502 and multiple adjustment holes 503 may be provided on the first side, the second side, the third side and the fourth side. The multiple assembly holes 502 facilitate the connection between the top plate 5 and the bracket 6, and the multiple adjustment holes 503 facilitate the installation of the adjustment mechanism.

[0080] Of course, in other embodiments, the top plate 5 can also be of other shapes, as long as it can fully contact the carrier assembly 22 to achieve repeated pressing between the carrier assembly 22 and the lower substrate of the reaction chamber under simulated actual working conditions. Those skilled in the art can make the selection according to actual needs, and this application does not impose specific limitations here.

[0081] In the above embodiments, see Figure 10 and Figure 11The shapes of the first support 601, the second support 602, the third support 603 and the fourth support 604 can all be rectangular or I-shaped, or the first support 601 and the second support 602 can be rectangular and the third support 603 and the fourth support 604 can be I-shaped, or the first support 601 and the second support 602 can be I-shaped and the third support 603 and the fourth support 604 can be rectangular.

[0082] Of course, in other embodiments, the first support 601, the second support 602, the third support 603 and the fourth support 604 can also be other shapes, as long as they can support and adjust the level of the top plate 5. Those skilled in the art can choose according to actual needs, and this application does not impose specific limitations here.

[0083] In some embodiments, see Figure 7 The first bracket 601, the second bracket 602, the third bracket 603 and the fourth bracket 604 have the same length along the first direction to initially ensure the levelness of the top plate 5, so as to facilitate the subsequent precise adjustment of the levelness of the top plate 5 according to the assembly error.

[0084] In some embodiments, see Figure 10 Multiple blind holes 60 can be provided on the first bracket 601 and the second bracket 602. The multiple blind holes 60 cooperate with multiple assembly holes 502 to connect the first bracket 601 and the second bracket 602 to the top plate 5 using bolts.

[0085] In some embodiments, see Figure 11 The third bracket 603 and the fourth bracket 604 may be provided with multiple third through holes 63 and multiple fourth through holes 64. The multiple third through holes 63 cooperate with multiple assembly holes 502 to connect the third bracket 603 and the fourth bracket 604 to the top plate 5 using bolts. The multiple fourth through holes 64 can cooperate with the connecting through holes on the first support frame 26 to connect the third bracket 603 and the fourth bracket 604 to the first support frame 26 using bolts.

[0086] In one embodiment, the third testing mechanism 7 is disposed on the top plate 5; or, the testing device further includes a mounting bracket 11, which has a fixed end 111 and an assembly end 112 that are opposite to each other in a first direction, the fixed end 111 being connected to the bracket 6 and the assembly end 112 being connected to the third testing mechanism 7.

[0087] In the above embodiments, the third testing mechanism 7 can be directly installed on the top plate 5, or it can also be installed on the mounting bracket 11, so as to adjust the installation position of the third testing mechanism 7 according to different vehicle components 22.

[0088] In one embodiment, the bracket 6 includes a first protrusion 61 and a second protrusion 62; the mounting bracket 11 includes a first fixing part 1101 and a second fixing part 1102, the first fixing part 1101 being connected to the first protrusion 61 and the second fixing part 1102 being connected to the second protrusion 62.

[0089] In some embodiments, see Figure 12 The mounting bracket 11 can be inverted T-shaped. The inverted T-shaped mounting bracket 11 has a fixed end 111 and an assembly end 112 that are opposite to each other in the first direction. The fixed end 111 is the horizontal side of the inverted T-shaped mounting bracket 11, and the assembly end 112 is the vertical side of the inverted T-shaped mounting bracket 11.

[0090] Of course, in other embodiments, the mounting bracket 11 can also be of other shapes, as long as it can enable the installation of the third testing mechanism 7. Those skilled in the art can choose according to actual needs, and this application does not impose specific restrictions here.

[0091] In the above embodiments, the fixed end 111 may be provided with a first fixing part 1101 and a second fixing part 1102, and the bracket 6 may be provided with a first protrusion 61 and a second protrusion 62. The first fixing part 1101 can be connected to the first protrusion 61, and the second fixing part 1102 can be connected to the second protrusion 62, so as to realize the connection between the mounting bracket 11 and the bracket 6.

[0092] In some embodiments, see Figure 9 and Figure 12 The first protrusion 61 is provided with a first through hole 610, the second protrusion 62 is provided with a second through hole 620, the first fixing part 1101 is provided with a sixth through hole 11011, and the second fixing part 1102 is provided with a seventh through hole 11021. The first through hole 610 can be engaged with the sixth through hole 11011, and the second through hole 620 can be engaged with the seventh through hole 11021, so that the connection between the mounting bracket 11 and the bracket 6 can be realized by bolts.

[0093] In one embodiment, the top plate 5 is made of magnetic metal.

[0094] In the above embodiments, since the top plate 5 is used to simulate the repeated pressing between the carrier assembly 22 and the lower substrate of the reaction chamber, the top plate 5 itself needs to have a certain rigidity to ensure the stability and reliability of the top plate 5 during the test. Therefore, the material of the top plate 5 is preferably at least one of iron, nickel and their alloys, so as to further improve the accuracy and quality stability of the test device while ensuring the stability and reliability of the top plate 5 during the test.

[0095] In some embodiments, to further ensure the accuracy of the testing device, the top plate 5 may also be rust-proofed to reduce the impact of impurities in the environment on the top plate 5.

[0096] In one embodiment, the third testing unit 7 is a magnetic dial indicator.

[0097] In the above embodiments, when the material of the top plate 5 is at least one of iron, nickel and their alloys, so that the top plate 5 is magnetic, the third testing mechanism 7 can also be selected as a magnetic dial indicator, so as to adjust the position of the third testing mechanism 7 in a timely manner and improve the testing flexibility of the testing device.

[0098] Of course, in other embodiments, the third testing mechanism 7 can also be a coordinate measuring machine, a circular runout measuring instrument, or a laser interferometer, as long as it can test the circular runout range of the carrier component 22. Those skilled in the art can choose according to actual needs, and this application does not impose specific restrictions here.

[0099] In one embodiment, the testing device further includes a mounting frame 10, which has an installation space for mounting the lifting mechanism 200. The mounting frame 10 is provided with a plurality of leveling cups 1001 for adjusting the levelness of the mounting frame 10, so as to further reduce the influence of assembly errors and manufacturing tolerances on the levelness of the top plate 5.

[0100] In the above embodiments, the mounting frame 10 serves as the basic support structure of the testing device, providing a platform for the installation and fixation of the first support frame 26 of the lifting mechanism 200. This facilitates the installation of the lifting mechanism 200 through the cooperation of the mounting frame 10, the first support frame 26, and the second support frame 27, ensuring that the lifting mechanism 200 maintains a relatively fixed position during the testing process and guaranteeing the stability and reliability of the testing device during the testing process.

[0101] In some embodiments, see Figure 7 The testing device may further include a first controller 8 and a second controller 9, both of which are electrically connected to the electric cylinder assembly 25. The first controller 8 can control the lifting and lowering of the carrier assembly 22, facilitating the simulation of repeated pressure between the carrier assembly 22 and the lower substrate of the reaction chamber through repeated pressure from the top plate 5 and the carrier assembly 22. The second controller 9 can control the rotation of the carrier assembly 22, facilitating the testing of the circular runout range of the carrier assembly 22 using the third testing mechanism 7.

[0102] This application provides a testing method for testing the magnetofluid assembly 21 of a lifting mechanism 200. The magnetofluid assembly 21 has a magnetofluid cavity 2100 inside, and the magnetofluid assembly 21 has a first connecting end 211 and a second connecting end 212 that are opposite to each other in a first direction. The testing method includes: Connect the first test mechanism 1 to the first connection end 211; Connect the second testing mechanism 2 to the second connection end 212 to form a detection space 3 between the second testing mechanism 2 and the second connection end 212; The first testing mechanism 1 introduces the testing medium into the magnetic fluid cavity 2100, and the second testing mechanism 2 performs testing on the detection space 3.

[0103] In one embodiment, the lifting mechanism 200 includes a carrier assembly 22, characterized in that, before connecting the first test mechanism 1 to the first connection end 211, it further includes: S1: Connect the top plate (5) to the vehicle assembly (22) via the bracket (6); and use the third testing mechanism (7) to test the circular runout of the vehicle assembly (22) for the first time; S2: Drive the carrier assembly (22) to move so that the carrier assembly (22) is engaged with the process hole (501) of the top plate (5); S3: Drive the vehicle assembly (22) to move so that the vehicle assembly (22) separates from the top plate (5); S4: Drive the vehicle assembly (22) to rotate; S5: The third testing mechanism (7) is used to test the circular runout of the vehicle assembly (22) for the second time, and the result is compared with the result of the second test in step S1.

[0104] To test the structural stability of the lifting mechanism after multiple processes, steps S2 to S4 can be repeated. For example, repeat 1000-100000 times. Based on the results of testing the circular runout before and after multiple pressing and rotations, the structural stability of the lifting mechanism during lifting and rotation can be assessed.

[0105] This application provides a lifting mechanism 200, which includes a magnetofluid assembly 21, and the magnetofluid assembly 21 is tested using the above-described testing device.

[0106] This application provides a lifting mechanism 200, which includes a carrier assembly 22, and the carrier assembly 22 is tested using the above-described testing device.

[0107] In some embodiments, see Figure 1The lifting mechanism 200 includes a magnetohydrodynamic (MHD) assembly 21, a carrier assembly 22, a heating plate assembly 23, a leveling assembly 24, an electric cylinder assembly 25, a first support frame 26, and a second support frame 27. The first support frame 26 and the second support frame 27 serve as the mounting and support structure for the entire lifting mechanism 200, providing a platform for mounting and fixing the MHD assembly 21, the electric cylinder assembly 25, the leveling assembly 24, the heating plate assembly 23, and the carrier assembly 22. The MHD assembly 21 drives the heating plate assembly 23 to rotate, thereby rotating the carrier assembly 22 placed on the heating plate assembly 23. The leveling assembly 24 is equipped with a dial indicator to determine whether the carrier assembly 22 is in sufficient contact with the lower substrate of the reaction chamber. The electric cylinder assembly 25 can drive the carrier assembly 22 to fully contact the lower substrate of the reaction chamber to achieve a mechanical seal between the carrier assembly 22 and the lower substrate of the reaction chamber; or drive the carrier assembly 22 to separate from the lower substrate of the reaction chamber, facilitating the rotation of the heating plate assembly 23 by the MHD assembly 21 at a certain angle.

[0108] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0109] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of this application. The scope of this application is defined by the appended claims.

Claims

1. A testing apparatus for testing a magnetofluid assembly (21) of a lifting mechanism (200), the magnetofluid assembly (21) having a magnetofluid cavity (2100) inside, and the magnetofluid assembly (21) having a first connecting end (211) and a second connecting end (212) opposite to each other in a first direction, characterized in that, include: The first testing mechanism (1) and the second testing mechanism (2) are used to connect to the first connecting end (211) and to introduce a test medium into the magnetic fluid cavity (2100). The second testing mechanism (2) is used to connect to the second connecting end (212) and to form a detection space (3) between the second connecting end (212).

2. The testing device according to claim 1, wherein the second connecting end (212) has a connecting post port (21201) and a mounting surface (21202), characterized in that, The second testing mechanism (2) includes a first testing element (201) for connecting to the assembly surface (21202). It also includes a sealing element (202) for connecting and sealing the connecting post port (21201) to form the detection space (3) between the first detection element (201), the sealing element (202), and the second connection end (212).

3. The testing apparatus according to claim 2, characterized in that, The first detection element (201) has a conical receiving cavity (2010) formed in a first direction.

4. The testing apparatus according to claim 2, characterized in that, The sealing component (202) is a blind plate, and the orthographic projection of the blind plate toward the assembly surface (21202) is greater than the orthographic projection of the connecting post port (21201) toward the assembly surface (21202).

5. The testing apparatus according to claim 2, characterized in that, The second testing mechanism (2) includes a detector (203), and the first testing component (201) is provided with a testing port (2011). The detector (203) is detachably connected to the testing port (2011).

6. A testing apparatus for testing a vehicle assembly (22) of a lifting mechanism (200), characterized in that, include: The top plate (5), the bracket (6), and the third testing mechanism (7) are provided. The top plate (5) is movably connected to the bracket (6). The top plate (5) has a process hole (501) that engages with the top of the vehicle assembly (22). The third testing mechanism (7) is used to test the circular runout of the vehicle assembly (22).

7. The testing apparatus according to claim 6, characterized in that, It also includes an adjustment mechanism, at least part of which is disposed between the top plate (5) and the bracket (6) to adjust the gap height between the top plate (5) and the bracket (6).

8. The testing apparatus according to claim 7, characterized in that, The top plate (5) has an adjustment hole (503); The adjustment mechanism is a set screw, which can pass through the adjustment hole (503) to adjust the gap height between the top plate (5) and the bracket (6).

9. The testing apparatus according to claim 6, characterized in that, The third testing mechanism (7) includes a driving component and a testing component. The driving component is capable of driving the testing component to abut against the side of the vehicle component (22) to test the circular runout of the vehicle component (22).

10. The testing apparatus according to claim 6, characterized in that, The top plate (5) has a first side, a second side, a third side and a fourth side arranged in a cross shape, the first side and the second side are opposite to each other, and the third side and the fourth side are opposite to each other; The bracket (6) includes a first bracket (601), a second bracket (602), a third bracket (603) and a fourth bracket (604). The first bracket (601) is disposed on the first side, the second bracket (602) is disposed on the second side, the third bracket (603) is disposed on the third side, and the fourth bracket (604) is disposed on the fourth side.

11. The testing apparatus according to claim 10, characterized in that, The first support (601) has the same structure as the second support (602), and the third support (603) has the same structure as the fourth support (604).

12. The testing apparatus according to claim 6, characterized in that, The third testing mechanism (7) is located on the top plate (5).

13. The testing apparatus according to claim 6, characterized in that, The testing device further includes a mounting bracket (11), which has a fixed end (111) and an assembly end (112) facing away from each other in a first direction. The fixed end (111) is connected to the bracket (6), and the assembly end (112) is connected to the third testing mechanism (7).

14. The testing apparatus according to claim 13, characterized in that, The bracket (6) includes a first protrusion (61) and a second protrusion (62); The mounting bracket (11) includes a first fixing part (1101) and a second fixing part (1102). The first fixing part (1101) is connected to the first protrusion (61), and the second fixing part (1102) is connected to the second protrusion (62).

15. A testing method for testing a magnetofluid assembly (21) of a lifting mechanism (200), the magnetofluid assembly (21) having a magnetofluid cavity (2100) inside, and the magnetofluid assembly (21) having a first connecting end (211) and a second connecting end (212) opposite to each other in a first direction, characterized in that, The testing method includes: Connect the first test unit (1) to the first connection end (211); The second test mechanism (2) is connected to the second connection end (212) to form a test space (3) between the second test mechanism (2) and the second connection end (212); The first testing mechanism (1) is used to introduce a test medium into the magnetic fluid cavity (2100), and the second testing mechanism (2) is used to test the detection space (3).

16. The test method according to claim 15, wherein the lifting mechanism (200) includes a vehicle assembly (22), characterized in that, Before connecting the first test unit (1) to the first connection end (211), the following steps are also included: S1: Connect the top plate (5) to the vehicle assembly (22) via the bracket (6); and use the third testing mechanism (7) to test the circular runout of the vehicle assembly (22) for the first time; S2: Drive the carrier assembly (22) to move so that the carrier assembly (22) is engaged with the process hole (501) of the top plate (5); S3: Drive the vehicle assembly (22) to move so that the vehicle assembly (22) separates from the top plate (5); S4: Drive the vehicle assembly (22) to rotate; S5: The third testing mechanism (7) is used to test the circular runout of the vehicle assembly (22) for the second time, and the result is compared with the result of the second test in step S1.

17. The test method according to claim 16, characterized in that, Repeat steps S2 to S4.

18. A lifting mechanism (200), characterized in that, It includes a magnetofluid assembly (21), which is tested using the test apparatus as described in any one of claims 1-5.

19. A lifting mechanism (200), characterized in that, Includes a vehicle assembly (22), which is tested using the test apparatus as described in any one of claims 6-14.

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