GSW exponential weighted adaptive light field regulation and control system and method based on angular spectrum transmission
By employing angular spectral transmission theory and an exponential weighted adaptive mechanism, the applicability and convergence issues of the traditional GS algorithm in lensless imaging and complex optical systems are resolved, achieving efficient and precise light field control.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF LASER MFG HENAN ACAD OF SCI
- Filing Date
- 2025-12-26
- Publication Date
- 2026-04-10
AI Technical Summary
Traditional GS algorithms are limited by the Fourier transform properties of lenses, making them difficult to apply to lensless imaging systems and optical systems between non-conjugate planes. Furthermore, the single iterative update strategy results in slow convergence speed and poor stability, making it difficult to guarantee robustness and accuracy in complex optical environments.
A GSW exponentially weighted adaptive optical field control system and method based on angular spectrum transmission is adopted. An optical field transmission model is constructed through angular spectrum transmission theory, and an exponentially weighted adaptive mechanism is introduced to realize the propagation of light waves between any two planes in free space. The convergence performance is improved by adaptive adjustment of the iterative strategy.
It breaks away from the traditional GS algorithm's dependence on lenses, expands the algorithm's applicable range, significantly improves convergence speed and control accuracy, and is suitable for lensless imaging and complex optical systems, thus improving the robustness and accuracy of light field control.
Smart Images
Figure CN121832104A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of light field regulation, and relates to a GSW exponential type weighted adaptive light field regulation system and method based on angular spectrum transmission. BACKGROUND
[0002] Light field regulation technology is a cornerstone in the field of modern optics. By precisely manipulating the amplitude, phase and other parameters of light waves, a specific light field distribution is constructed on a pre-set target plane. This technology has indispensable value in high-end manufacturing, emerging display, advanced sensing and other fields. Among various light field regulation algorithms, the phase retrieval method based on iterative Fourier transform is the most widely used. The Gerchberg-Saxton (GS) algorithm has become one of the recognized benchmark algorithms in this field due to its intuitive principle, easy implementation, high computational efficiency and other advantages. The core process of the algorithm is to perform cyclic iteration between two constraint planes, and by applying amplitude restriction conditions, the input plane phase information that can achieve the target light field distribution is inversely calculated.
[0003] Defects and deficiencies of the prior art: 1. Limitations of optical transmission model and restrictions of application scenarios: The traditional GS algorithm is essentially based on the Fourier transform property of a lens, and its iterative process is strictly limited to the specific conjugate optical path structure of "object plane-lens-image plane". This strong dependence on ideal optical elements makes it difficult for the algorithm to be directly applied to lens-free imaging systems, free-space transmission between non-conjugate planes, or non-standard optical paths containing other complex optical elements. This greatly restricts the application potential of the algorithm in more extensive and flexible optical system design.
[0004] 2. Singularity of iterative update strategy and insufficient convergence performance: In the iterative update process of the classic GS algorithm, the modification of phase information mainly depends on fixed amplitude constraint replacement, and lacks a mechanism for adaptive feedback adjustment based on the current calculation state. When the target light field and the current reconstructed light field have large differences, this single update strategy can lead to slow convergence speed, poor stability, and even easily fall into local extremum and cannot be further optimized. In the face of complex distribution of target light field or in noisy physical environment, the robustness and convergence accuracy of the algorithm are difficult to guarantee. SUMMARY
[0005] The purpose of the present application is to overcome the above-mentioned defects of the prior art, and to provide a GSW exponential type weighted adaptive light field regulation system and method based on angular spectrum transmission. The system and method have high robustness and convergence accuracy in the update process, and can be applied to any mathematically modelable optical path without relying on specific optical elements.
[0006] To achieve the above object, the application discloses a GSW exponential type weighted adaptive light field regulation system based on angular spectrum transmission, which comprises a laser, a collimating and expanding system, a wedge-shaped mirror, a spatial light modulator, a first plano-convex lens, a second plano-convex lens, a near-infrared focusing objective and a wafer to be processed. The fundamental mode Gaussian beam emitted by the laser is sequentially collimated and expanded by the collimating and expanding system, reflected by the wedge-shaped mirror, modulated by the spatial light modulator, reflected by the wedge-shaped mirror again, and then sequentially focused by the first plano-convex lens, the second plano-convex lens and the near-infrared focusing objective to the surface of the wafer to be processed.
[0007] Further, the positive focal length of the first plano-convex lens is 400 mm, the positive focal length of the second plano-convex lens is 250 mm, and the focal length of the near-infrared focusing objective is 4 mm.
[0008] Further, the wedge-shaped mirror can realize small-angle reflection transmission of the incident light and the outgoing light on the surface of the spatial light modulator, so that the incident angle and the outgoing angle of the light on the surface of the spatial light modulator are both less than 5°.
[0009] Further, the spatial light modulator can perform potential programmable phase modulation on the incident light beam and can freely replace the potential distribution.
[0010] Further, the effective size of the modulation window is 15.9 mm*12.8 mm, the resolution is 1272*1024, and the working wavelength is 355 nm-1100 nm.
[0011] Further, the wavelength of the laser generated by the laser is 1030 nm, the repetition frequency is 1 kHz-500 kHz, the average power is 0 W-40 W, the single pulse energy is 10 muJ-200 muJ, and the pulse width is 100 fs-10 ns.
[0012] The application discloses a GSW exponential type weighted adaptive light field regulation method based on angular spectrum transmission, which comprises the following steps: 1) the input light field of the spatial light modulator plane is E0, wherein the amplitude distribution is A0, the phase distribution is 0, at this time, a random phase distribution phi0 is added; 2) the light field E0 is transmitted in a free space light field angular spectrum transmission distance of 400 mm to obtain a light field E1, a phase difference phi1 caused by a first plano-convex lens is added, then the light field E2 is transmitted in a free space light field angular spectrum transmission distance of 650 mm to obtain a light field E2, a phase difference phi2 caused by a second plano-convex lens is added, then the light field E3 is transmitted in a free space light field angular spectrum transmission distance of 250 mm to obtain a light field E3, a phase difference phi3 caused by a near-infrared focusing objective is added, and then the light field E4 is transmitted in a free space light field angular spectrum transmission distance of 4 mm to obtain a light field E4, the amplitude distribution of the light field E4 is A4, and the phase distribution of the light field E4 is B4. 3) Introducing the amplitude weight factor w = e (Aout – A4) * v Wherein, Aout represents the amplitude of the target light field; v represents an adaptive change factor; by calculating the monitoring parameter q = |Aout - A4| / (Aout + dt), the value of v is adaptively adjusted, wherein dt is a very small fixed value, the value of w is calculated, the amplitude distribution is updated as A4_new = Aout * w, and finally the new light field E4* of the target plane is obtained, the phase distribution of the new light field E4* is B4, and the amplitude distribution is A4_new; 4) The new light field E4* is transmitted in a free space inverse light field angular spectrum transmission distance of 4mm, and after removing the phase difference φ3, the light field E3* is obtained, then the light field E3* is transmitted in a free space inverse light field angular spectrum transmission distance of 250mm, and after removing the phase difference φ2, the light field E2* is obtained, then the light field E2* is transmitted in a free space inverse light field angular spectrum transmission distance of 650mm, and after removing the phase difference φ1, the light field E1* is obtained, and then the light field E1* is transmitted in a free space inverse light field angular spectrum transmission distance of 400mm, and the light field E0* is obtained, the amplitude distribution of the light field E0* is A0*, and the phase distribution of the light field E0* is B0*; 5) The phase B0* of the light field E0* is kept unchanged, and the amplitude distribution A0* is replaced by A0; 6) At this time, a brand new input light field E0` of the spatial light modulator plane is obtained, wherein the amplitude distribution is A0, and the phase distribution is B0*, and steps 2) to 5) are repeated until convergence is obtained, and finally B0* is obtained, and the final B0* is taken as a phase diagram required to be loaded on the spatial light modulator to realize the target light field Aout.
[0013] Further, dt = 1 * 10 -8 ; when q > 0.5, then v = 8; when 0.3 < q ≤ 0.5, then v = 5; when 0.1 < q ≤ 0.3, then v = 3; and when q ≤ 0.1, then v = 1.
[0014] The application discloses a computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the GSW exponential type weighted adaptive light field regulation method based on angular spectrum transmission when executing the computer program.
[0015] The application discloses a computer readable storage medium, which stores a computer program, wherein the computer program implements the steps of the GSW exponential type weighted adaptive light field regulation method based on angular spectrum transmission when executed by a processor.
[0016] The application has the following beneficial effects: The GSW exponential type weighted adaptive light field regulation system and method based on angular spectrum transmission according to the application can directly calculate the propagation of light waves between any two parallel planes in free space without relying on the Fourier transform property of a lens, completely breaking the theoretical barrier of the inherent 'object plane-image plane' conjugate relationship of the traditional GS algorithm, enabling the algorithm to be seamlessly applied to lensless imaging, non-conjugate plane regulation and any complex optical system that can be modeled mathematically, greatly expanding the application range and practicality of the algorithm, and in addition, the introduction of the exponential type weighted adaptive mechanism significantly improves the convergence performance and regulation accuracy of the algorithm. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the description of the embodiments of the present application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0018] Figure 1 The optical system schematic diagram for the application scenario of the present application; Figure 2 The 'light' word phase map obtained by using the present application; Figure 3 The target light spot test map formed by the 'light' word phase map.
[0019] Among them, 1 is a laser; 2 is a collimating and expanding system; 3 is a wedge-shaped mirror; 4 is a spatial light modulator; 5 is a first plano-convex lens; 6 is a second plano-convex lens; 7 is a near-infrared focusing objective lens; 8 is a wafer to be processed. DETAILED DESCRIPTION
[0020] The technical solutions in the embodiments of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.
[0021] In the description of the present application, it should be understood that the terms "include" and "contain" indicate the existence of the described features, whole, steps, operations, elements and / or components, but do not exclude the existence or addition of one or more other features, whole, steps, operations, elements, components and / or sets thereof.
[0022] It should also be understood that the terms used in the specification and the following claims are for the purpose of describing particular embodiments only and are not intended to be limiting, as the use of such terms are intended to be broad and inclusive in a manner generally consistent with the broadest interpretation of the terms under the law. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
[0023] It should also be further understood that the term "and / or" as used in the specification and in the claims, means any one of the items, any combination of the items, and all possible combinations of the items, and includes all possible combinations thereof. For example, a reference to "A and / or B" can mean "A alone, B alone, or A and B together." In addition, the character " / " in the present application generally represents a "or" relationship between the front and rear associated objects.
[0024] It should be understood that, although the terms first, second, third, etc. can be used herein to describe various ranges or elements, these ranges or elements should not be limited by these terms. These terms are only used to distinguish one range or element from another. For example, a first range could be termed a second range without departing from the scope of the embodiments.
[0025] The word "if" as used herein means "when" or "upon" or "in response to a determination" or "in response to a detection," depending on the context. Similarly, the phrase "if it is determined" or "if [a stated condition or event] is detected" can mean "when it is determined" or "in response to a determination" or "when [a stated condition or event] is detected" or "in response to a detection [of a stated condition or event]," depending on the context.
[0026] In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the embodiments in the present application fall within the scope of protection of the present application.
[0027] The accompanying drawings illustrate various structural schematic diagrams according to embodiments disclosed in this invention. These drawings are not to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.
[0028] Example 1 refer to Figure 1 The GSW exponential weighted adaptive optical field control system based on angular spectrum transmission described in this invention includes a laser 1, a collimating and beam expanding system 2, a wedge mirror 3, a spatial light modulator 4, a first plano-convex lens 5, a second plano-convex lens 6, a near-infrared focusing objective lens 7, and a wafer to be processed 8. The fundamental mode Gaussian beam emitted by laser 1 is collimated and expanded by collimation and beam expansion system 2, reflected by wedge mirror 3, modulated by spatial light modulator 4, and reflected by wedge mirror 3 in sequence. Then, it is focused onto the surface of the wafer 8 to be processed after passing through first plano-convex lens 5, second plano-convex lens 6 and near-infrared focusing objective lens 7 in sequence.
[0029] In this embodiment, the laser 1 generates a laser with a wavelength of 1030nm, a repetition frequency of 1kHz-500kHz, an average power of 0W-40W, a single pulse energy of 10μJ-200μJ, and a pulse width of 100fs-10ns. The repetition frequency is continuously adjustable, and the average power, single pulse energy, and pulse width are all adjustable.
[0030] In this embodiment, the collimation and beam expansion system 2 can collimate and expand the incident beam, with a beam magnification of 2X-8X and a transmittance of more than 97%.
[0031] In this embodiment, the wedge-shaped reflector 3 can achieve small-angle reflection and transmission of incident and outgoing light on the surface of the spatial light modulator 4, with an angle of less than 10°, that is, the incident angle and outgoing angle of light on the surface of the spatial light modulator 4 are both less than 5°.
[0032] In this embodiment, the spatial light modulator 4 can perform programmable phase modulation of the incident beam, and the potential distribution can be freely changed to achieve diverse light field modulation. The effective size of the modulation window is 15.9mm × 12.8mm, the resolution is 1272 × 1024, and the operating wavelength is 355nm-1100nm.
[0033] In this embodiment, the first plano-convex lens 5 is made of ultraviolet fused silica glass, with a working wavelength of 700nm-1100nm. The positive focal length of the first plano-convex lens 5 is 400mm, and it is commonly used for imaging or beam collimation applications.
[0034] In this embodiment, the second plano-convex lens 6 is made of ultraviolet fused silica glass, with a working wavelength of 700nm-1100nm. The positive focal length of the second plano-convex lens 6 is 250mm, and it is commonly used in imaging or beam collimation applications.
[0035] In this embodiment, the near-infrared focusing objective 7 is used to precisely focus the processing beam onto the interior or surface of the wafer 8 being processed; the numerical aperture NA=0.65, the magnification f3 is 50X, and the focal length of the near-infrared focusing objective 7 is 4mm.
[0036] In this embodiment, the main materials of the wafer 8 being processed include, but are not limited to, silicon, silicon carbide, sapphire, and glass, which interact with the focused laser to achieve micro-nano processing.
[0037] The working process of this invention is as follows: The laser output from laser 1 is a fundamental Gaussian beam with a wavelength of 1030 nm. After passing through the collimation and beam expansion system 2, the fundamental Gaussian beam becomes a collimated parallel Gaussian beam with a spot diameter of 10 mm. It is then incident on the surface of the spatial light modulator 4 through the wedge mirror 3, and the light field is E0. The laser reflected back from the spatial light modulator 4 is reflected by the wedge mirror 3 and then passes through the first plano-convex lens 5 and the second plano-convex lens 6. Finally, it is focused by the near-infrared focusing objective lens 7 onto the surface of the wafer 8 to be processed for laser micro-nano processing. Let the target light field on the surface of the wafer 8 be Eout, and its amplitude distribution be Aout. Then, the iterative calculation process of the GSW exponential weighted adaptive light field control based on the angular spectrum transmission theory is a reciprocating transmission process from the light field E0 to the target light field Eout. In the calculation process, the phase differences caused by f1, f2 and f3 are obtained as φ1, φ2 and φ3, respectively, by using the calculation formula of the influence of the lens on the wavefront change.
[0038] Example 2 The GSW exponentially weighted adaptive optical field manipulation method based on angular spectrum transmission described in this invention includes the following steps: 1) Let the input light field of the spatial light modulator plane 4 be E0, where the amplitude distribution is A0 and the phase distribution is 0. At this time, a random phase distribution φ0 is added. 2) The stage where the optical field is transmitted from the spatial light modulator 4 to the target plane: The optical field E0 is transmitted over a free-space angular spectrum transmission distance of 400 mm to obtain the optical field E1. The phase difference φ1 caused by the addition of the first plano-convex lens 5 is added. Then, it is transmitted over a free-space angular spectrum transmission distance of 650 mm to obtain the optical field E2. The phase difference φ2 caused by the addition of the second plano-convex lens 6 is added. Then, it is transmitted over a free-space angular spectrum transmission distance of 250 mm to obtain the optical field E3. The phase difference φ3 caused by the addition of the near-infrared focusing objective 7 is added. Then, it is transmitted over a free-space angular spectrum transmission distance of 4 mm to obtain the optical field E4. The amplitude distribution of the optical field E4 is A4, and the phase distribution of the optical field E4 is B4; 3) Keeping the phase B4 of the optical field E4 unchanged, adaptively update the amplitude distribution A4 of the optical field E4: Introduce the amplitude weight factor w = e (Aout – A4) * v , where Aout represents the amplitude of the target optical field; v represents the adaptive change factor; by calculating the monitoring parameter q = |Aout – A4| / (Aout + dt), adaptively adjust the value of v, where dt = 1 * 10 -8 , when q > 0.5, then v = 8; when 0.3 < q ≤ 0.5, then v = 5; when 0.1 < q ≤ 0.3, then v = 3; when q ≤ 0.1, then v = 1. Calculate the value of w, and update the amplitude distribution to A4_new = Aout * w. Finally, obtain the new optical field E4* on the target plane. The phase distribution of the new optical field E4* is B4, and the amplitude distribution is A4_new; 4) The stage where the optical field is transmitted from the target plane to the spatial light modulator 4: The new optical field E4* is transmitted over a reverse free-space angular spectrum transmission distance of 4 mm. After removing the phase difference φ3, the optical field E3* is obtained. Then, it is transmitted over a reverse free-space angular spectrum transmission distance of 250 mm. After removing the phase difference φ2, the optical field E2* is obtained. Then, it is transmitted over a reverse free-space angular spectrum transmission distance of 650 mm. After removing the phase difference φ1, the optical field E1* is obtained. Then, it is transmitted over a reverse free-space angular spectrum transmission distance of 400 mm to obtain the optical field E0*. The amplitude distribution of the optical field E0* is A0*, and the phase distribution of the optical field E0* is B0*; 5) Keeping the phase B0* of the optical field E0* unchanged, replace the amplitude distribution A0* with A0; 6) At this time, obtain the brand-new input optical field E0` on the plane of the spatial light modulator 4, where the amplitude distribution is A0 and the phase distribution is B0*. Then, repeat the transmission operation process of steps (2) to (5) until convergence is achieved, and obtain the final B0*. Use the final B0* as the phase map that needs to be loaded onto the spatial light modulator 4 to achieve the target optical field Aout; When there is a non-convergent situation, consider changing the value of v and increasing the number of iterations to achieve the best optical field control effect.
[0039] It should be noted that this invention, by adopting angular spectral transmission theory as the core physical model, completely breaks the dependence of traditional algorithms on the conjugate relationship between the "object plane and image plane," enabling it to be universally applied to lensless imaging and various complex optical path systems. At the same time, the introduced exponential weighted adaptive mechanism can also effectively solve the problems of slow convergence speed and easy getting trapped in local optima in traditional algorithms by dynamically adjusting the iterative update strategy. Thus, while ensuring physical accuracy, it significantly improves the convergence speed, stability, and final accuracy of light field control.
[0040] This invention introduces an amplitude weighting factor w into the iterative framework of the traditional GS algorithm, and constructs an exponential relationship w=e between w and the target light field amplitude Aout and the real-time calculated light field amplitude A4. (Aout – A4) * v By monitoring the dynamic changes of the parameter q = |Aout–A4| / (Aout+dt), the change factor v is adaptively adjusted from large to small, thus achieving intelligent updating strategy. This nonlinear weighting mechanism can accelerate convergence in the early stage of iteration, stabilize and approach the target in the middle stage of iteration, and finely adjust in the later stage of iteration, effectively avoiding the algorithm from getting trapped in local optima, thereby significantly improving the overall convergence speed, stability and final optical field control accuracy.
[0041] This invention combines rigorous angular spectral transmission theory with a highly efficient iterative optimization algorithm. On the one hand, the accuracy of its physical model ensures the high reliability of the light field manipulation results, providing a solid analytical foundation for applications requiring sub-micron precision, such as laser processing and super-resolution microscopy. On the other hand, the adaptive iterative mechanism endows the algorithm with strong robustness, enabling it to adapt to target light fields with different characteristics and complex real-world environments. This unity of precision and flexibility makes the algorithm of this invention not only a theoretical model but also an advanced engineering technology that can directly support the research and development and application of high-end optical equipment.
[0042] Confirmatory Experiment To verify the efficiency of this invention, it was tested through experiments. The specific process is as follows: Assuming the target light field Aout on the surface of the processed wafer 8 needs to form a "light" shape, to better demonstrate the experimental effect, the material of the processed wafer 8 is replaced with a light spot quality analyzer, and the light spot distribution characteristics are displayed in real time by a computer. After 50 iterations of calculation using the algorithm proposed in this invention, the final phase distribution B0* is as follows: Figure 2 As shown, by adding this phase map to the spatial light modulator 4, the computer observes the spot image on the wafer surface as follows: Figure 3 As shown, by Figure 3It can be seen that after only a small number of algorithm iterations, the spot quality analyzer successfully generated a "light" - shaped light field distribution that is highly consistent with the preset pattern. The light intensity distribution inside the font is uniform, the overall gray - level transition is smooth, the edges of the font strokes are clear and well - defined, and the characteristic details (such as stroke corners, starting and ending points of strokes) are restored with high fidelity. The overall brightness of the font spot is high. However, due to the influence of the zero - order light, there is a certain amount of background stray light. Generally speaking, the background stray light in the non - target area is weak and the signal - to - noise ratio is high. This proves that the light field modulation effect of the present invention is excellent, the iterative calculation efficiency is high, the applicable scenario range is wide, and it provides a new technical idea for the laser advanced manufacturing industry.
[0043] Embodiment Three A computer device includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the steps of the GSW exponential - weighted adaptive light field regulation method based on angular spectrum transmission. For example, it includes the following steps: 1) Set the input light field on the plane of the spatial light modulator 4 as E0, where the amplitude distribution is A0, the phase distribution is 0, and at this time, add a random phase distribution φ0; 2) The light field E0 is transmitted in free - space light field angular spectrum for a distance of 400 mm to obtain the light field E1, add the phase difference φ1 caused by the first plano - convex lens 5, then transmit in free - space light field angular spectrum for a distance of 650 mm to obtain the light field E2, add the phase difference φ2 caused by the second plano - convex lens 6, then transmit in free - space light field angular spectrum for a distance of 250 mm to obtain the light field E3, add the phase difference φ3 caused by the near - infrared focusing objective 7, and then transmit in free - space light field angular spectrum for a distance of 4 mm to obtain the light field E4. The amplitude distribution of the light field E4 is A4, and the phase distribution of the light field E4 is B4; 3) Introduce the amplitude weight factor w = e (Aout – A4) * vWhere Aout represents the amplitude of the target light field; v represents the adaptive change factor; by calculating the monitoring parameter q=|Aout–A4| / (Aout+dt), the v value is adaptively adjusted, where dt is a very small fixed value. The w value is calculated, and the amplitude distribution is updated to A4_new = Aout * w, finally obtaining the new light field E4* on the target plane. The phase distribution of the new light field E4* is B4, and the amplitude distribution is A4_new; 4) The new light field E4* is transmitted in reverse light field angular spectrum for 4mm in free space. After removing the phase difference φ3, the light field E3* is obtained. Then, it is transmitted in reverse light field angular spectrum for 250mm in free space. After removing the phase difference φ2, the light field E2* is obtained. Then, it is transmitted in reverse light field angular spectrum for 650mm in free space. After removing the phase difference φ1, the light field E1* is obtained. Then, it is transmitted in reverse light field angular spectrum for 40mm in free space. 0mm, obtaining the light field E0*, the amplitude distribution of the light field E0* is A0*, and the phase distribution of the light field E0* is B0*; 5) Keeping the phase B0* of the light field E0* unchanged, replace the amplitude distribution A0* with A0; 6) At this time, a new input light field E0` of the spatial light modulator 4 plane is obtained, where the amplitude distribution is A0 and the phase distribution is B0*. Repeat steps 2) to 5) until convergence, and obtain the final B0*. Use the final B0* as the phase map to be loaded onto the spatial light modulator 4 to realize the target light field Aout. The memory may include memory, such as high-speed random access memory, and may also include non-volatile memory, such as at least one disk storage; the processor, network interface, and memory are interconnected through an internal bus, which may be an industry standard architecture bus, a peripheral component interconnection standard bus, an extended industry standard architecture bus, etc. The bus can be divided into address bus, data bus, control bus, etc. The memory is used to store programs. Specifically, the program may include program code, and the program code includes computer operation instructions. Memory can include main memory and non-volatile memory, and provides instructions and data to the processor.
[0044] Example 4 A computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the GSW exponentially weighted adaptive optical field modulation method based on angular spectrum transmission, for example, including the following steps: 1) Let the input optical field of the spatial light modulator 4 plane be E0, where the amplitude distribution is A0 and the phase distribution is 0, and then add a random phase distribution φ0; 2) The optical field E0 is transmitted 400mm in free space to obtain the optical field E1, and a phase difference φ1 caused by the first plano-convex lens 5 is added. Then, the optical field E0 is transmitted 650mm in free space to obtain the optical field E2, and a phase difference φ2 caused by the second plano-convex lens 6 is added. Then, the optical field E3 is transmitted 250mm in free space to obtain the optical field E3, and a phase difference φ3 caused by the near-infrared focusing objective lens 7 is added. Then, the optical field E4 is transmitted 4mm in free space to obtain the optical field E4, where the amplitude distribution of the optical field E4 is A4 and the phase distribution of the optical field E4 is B4; 3) Introduce an amplitude weighting factor w=e (Aout – A4) * v Where Aout represents the amplitude of the target light field; v represents the adaptive change factor; by calculating the monitoring parameter q=|Aout–A4| / (Aout+dt), the v value is adaptively adjusted, where dt is a very small fixed value. The w value is calculated, and the amplitude distribution is updated to A4_new = Aout * w, finally obtaining the new light field E4* on the target plane. The phase distribution of the new light field E4* is B4, and the amplitude distribution is A4_new; 4) The new light field E4* is transmitted in reverse light field angular spectrum for 4mm in free space. After removing the phase difference φ3, the light field E3* is obtained. Then, it is transmitted in reverse light field angular spectrum for 250mm in free space. After removing the phase difference φ2, the light field E2* is obtained. Then, it is transmitted in reverse light field angular spectrum for 650mm in free space. After removing the phase difference φ1, the light field E1* is obtained. Then, it is transmitted in reverse light field angular spectrum for 40mm in free space. 0mm, obtaining the light field E0*, the amplitude distribution of the light field E0* is A0*, and the phase distribution of the light field E0* is B0*; 5) Keeping the phase B0* of the light field E0* unchanged, replace the amplitude distribution A0* with A0; 6) At this time, a new input light field E0` is obtained on the plane of the spatial light modulator 4, wherein the amplitude distribution is A0 and the phase distribution is B0*. Repeat steps 2) to 5) until convergence, and obtain the final B0*. Use the final B0* as the phase map to be loaded onto the spatial light modulator 4 to realize the target light field Aout. Specifically, the computer-readable storage medium includes, but is not limited to, volatile memory and / or non-volatile memory. The volatile memory may include random access memory (RAM) and / or cache memory, etc. The non-volatile memory may include read-only memory (ROM), hard disk, flash memory, optical disk, magnetic disk, etc.
[0045] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.
[0046] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.
[0047] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.
[0048] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.
[0049] Other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and disclosure of the invention. This application is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of the invention are indicated by the following claims.
[0050] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.
[0051] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the present invention. Any simple modifications, alterations, or equivalent structural changes made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.
Claims
1. A GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission, characterized in that, Includes a laser (1), a collimating and beam expanding system (2), a wedge mirror (3), a spatial light modulator (4), a first plano-convex lens (5), a second plano-convex lens (6), a near-infrared focusing objective (7), and a wafer to be processed (8); The fundamental mode Gaussian beam emitted by the laser (1) is collimated and expanded by the collimation and beam expansion system (2), reflected by the wedge mirror (3), modulated by the spatial light modulator (4), and reflected by the wedge mirror (3) in sequence. Then, it is focused onto the surface of the wafer (8) after passing through the first plano-convex lens (5), the second plano-convex lens (6), and the near-infrared focusing objective lens (7).
2. The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission according to claim 1, characterized in that, The first plano-convex lens (5) has a positive focal length of 400 mm; the second plano-convex lens (6) has a positive focal length of 250 mm; and the near-infrared focusing objective (7) has a focal length of 4 mm.
3. The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission according to claim 1, characterized in that, The wedge-shaped reflector (3) can realize the small-angle reflection and transmission of incident and outgoing light on the surface of the spatial light modulator (4), so that the incident angle and outgoing angle of light on the surface of the spatial light modulator (4) are both less than 5°.
4. The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission according to claim 1, characterized in that, The spatial light modulator (4) can perform potential-programmable phase modulation on the incident beam and can freely change the potential distribution.
5. The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission according to claim 4, characterized in that, The effective size of the modulation window is 15.9mm×12.8mm, the resolution is 1272×1024, and the operating wavelength is 355nm-1100nm.
6. The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission according to claim 1, characterized in that, The laser (1) generates a laser with a wavelength of 1030nm, a repetition frequency of 1kHz-500kHz, an average power of 0W-40W, a single pulse energy of 10μJ-200μJ, and a pulse width of 100fs-10ns.
7. A GSW exponentially weighted adaptive optical field modulation method based on angular spectrum transmission, characterized in that, The GSW exponentially weighted adaptive optical field manipulation system based on angular spectrum transmission as described in claim 2 includes the following steps: 1) Let the input light field of the spatial light modulator (4) plane be E0, where the amplitude distribution is A0 and the phase distribution is 0. At this time, a random phase distribution φ0 is added. 2) The light field E0 is transmitted over a distance of 400 mm in free space to obtain the light field E1. The phase difference φ1 caused by the first plano-convex lens (5) is added. The light field E2 is then transmitted over a distance of 650 mm in free space to obtain the light field E2. The phase difference φ2 caused by the second plano-convex lens (6) is added. The light field E3 is then transmitted over a distance of 250 mm in free space to obtain the light field E3. The phase difference φ3 caused by the near-infrared focusing objective lens (7) is added. The light field E4 is then transmitted over a distance of 4 mm in free space to obtain the light field E4. The amplitude distribution of the light field E4 is A4, and the phase distribution of the light field E4 is B4. 3) Introduce an amplitude weighting factor w=e (Aout – A4) * v Where Aout represents the amplitude of the target light field; v represents the adaptive change factor; by calculating the monitoring parameter q=|Aout–A4| / (Aout+dt), the v value is adaptively adjusted, where dt is a very small fixed value. The w value is calculated, and the amplitude distribution is updated to A4_new = Aout * w, finally obtaining the new light field E4* of the target plane. The phase distribution of the new light field E4* is B4, and the amplitude distribution is A4_new. 4) The new light field E4* is transmitted in reverse angular spectrum in free space for a distance of 4 mm. After removing the phase difference φ3, the light field E3* is obtained. Then, it is transmitted in reverse angular spectrum in free space for a distance of 250 mm. After removing the phase difference φ2, the light field E2* is obtained. Then, it is transmitted in reverse angular spectrum in free space for a distance of 650 mm. After removing the phase difference φ1, the light field E1* is obtained. Then, it is transmitted in reverse angular spectrum in free space for a distance of 400 mm, the light field E0* is obtained. The amplitude distribution of the light field E0* is A0*, and the phase distribution of the light field E0* is B0*. 5) Keep the phase B0* of the light field E0* unchanged, and replace the amplitude distribution A0* with A0; 6) At this time, a new input light field E0` is obtained in the plane of the spatial light modulator (4), where the amplitude distribution is A0 and the phase distribution is B0*. Repeat steps 2) to 5) until convergence is obtained, and the final B0* is obtained. The final B0* is used as the phase diagram that needs to be loaded onto the spatial light modulator (4) to realize the target light field Aout.
8. The GSW exponentially weighted adaptive optical field modulation method based on angular spectrum transmission according to claim 7, characterized in that, dt = 1 * 10 -8 ; when q > 0.5, then v = 8; when 0.3 < q ≤ 0.5, then v = 5; when 0.1 < q ≤ 0.3, then v = 3; when q ≤ 0.1, then v = 1.
9. A computer device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the steps of the GSW exponentially weighted adaptive optical field modulation method based on angular spectrum transmission as described in any one of claims 7-8.
10. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the steps of the GSW exponentially weighted adaptive optical field modulation method based on angular spectrum transmission as described in any one of claims 7-8.