Grating inscribing device and grating inscribing method

Abstract

The invention provides a grating inscribing device and a grating inscribing method. The grating inscribing device comprises a bottom plate; the displacement platform is arranged on the bottom plate; the optical platform is arranged on the bottom plate; the clamping piece is arranged on the side, away from the bottom plate, of the displacement platform, the clamping piece comprises a plurality of through holes used for limiting the optical fibers, and paths formed among the through holes coincide with optical paths of the optical fibers; and the inscribing piece is arranged on the side, away from the bottom plate, of the optical platform, a laser probe of the inscribing piece extends towards one side of the displacement platform, and laser emitted by the laser probe is perpendicular to the optical path of the optical fiber. In the embodiment of the invention, in the process of carrying out grating inscribing on the optical fiber by using the grating inscribing device, the displacement of the optical fiber is controlled through the displacement platform, so that the inscribing stability is improved, and the yield and the yield are further improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a grating writing apparatus and a grating writing method. Background Technology

[0002] A fiber Bragg grating (FBG) is a microstructure with a periodically varying refractive index, formed within the core of an optical fiber using special techniques. FBGs can selectively reflect light of specific wavelengths and play a crucial role in fiber optic communication and sensing.

[0003] Currently, the aforementioned gratings are typically fabricated using the phase mask method. This involves using an ultraviolet laser to pass through a phase mask with a nanoscale periodic structure, forming interference fringes on the fiber core and permanently altering the refractive index. However, the fabrication process requires moving the fiber to create these interference fringes. Existing grating writing devices require manual control of fiber displacement during the writing process, resulting in low writing stability and consequently reduced yield and production output. Summary of the Invention

[0004] This application provides a grating writing device and a grating writing method, aiming to solve the technical problem that existing grating writing devices require manual control of fiber displacement during the writing process, which reduces yield and output.

[0005] In a first aspect, embodiments of this application provide a grating writing apparatus, comprising:

[0006] Base plate;

[0007] The displacement platform is mounted on the base plate;

[0008] An optical platform is mounted on the base plate;

[0009] A clamping member is disposed on the side of the displacement platform away from the base plate. The clamping member includes multiple through holes for limiting the optical fiber, and the path formed between the multiple through holes coincides with the optical path of the optical fiber.

[0010] The writing component is disposed on the side of the optical platform away from the base plate. The laser probe of the writing component extends toward the displacement platform, and the laser emitted by the laser probe is perpendicular to the optical path of the optical fiber.

[0011] Specifically, upon receiving a writing instruction, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber;

[0012] After the target fiber segment is etched, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the etched part.

[0013] Returning to the previous step, the writing device is controlled to perform grating writing on the target fiber segments of the optical fiber until all target fiber segments of the optical fiber have been written.

[0014] Optionally, the displacement platform includes a slider and a transition plate;

[0015] The sliding member is disposed on the base plate;

[0016] The adapter plate is located on the side of the sliding member away from the base plate, and the adapter plate moves along the length direction of the base plate under the action of the sliding member.

[0017] Optionally, the sliding element includes a sliding plate and a limiting block;

[0018] The limiting block is fixedly mounted on the base plate and extends along the length of the base plate;

[0019] The sliding plate is slidably connected to the limiting block and slides along the limiting block.

[0020] Optionally, the clamping member includes a first bracket and a second bracket;

[0021] The first bracket and the second bracket are disposed on the side of the adapter plate near the optical platform. The first bracket and the second bracket are spaced apart, and the distance between the first bracket and the second bracket is greater than the length of the target optical fiber segment.

[0022] Optionally, the clamping member further includes a first clamp, a second clamp, and a third clamp;

[0023] The first clamp, the second clamp, and the third clamp are disposed on the side of the adapter plate away from the base plate. The first clamp and the third clamp are respectively disposed at both ends of the adapter plate. The second clamp is disposed between the first clamp and the third clamp, and the first bracket and the second bracket are disposed between the second clamp and the third clamp.

[0024] Optionally, a first through hole for limiting the optical fiber is formed at one end of the first bracket, and a second through hole for limiting the optical fiber is formed at one end of the second bracket, wherein the path formed between the first through hole and the second through hole coincides with the optical path of the optical fiber.

[0025] Optionally, the first through hole accommodates a first cleaning ring, the first cleaning ring including a first groove, and the second through hole accommodates a second cleaning ring, the second cleaning ring including a second groove;

[0026] The first cleaning ring and the second cleaning ring are used to adsorb the dust generated on the surface of the optical fiber during the photolithography process into the first groove and the second groove.

[0027] Optionally, the writing element includes a connector and a laser probe;

[0028] The connector is located on the side of the optical platform away from the base plate, the laser probe is fixedly connected to the side of the connector facing the displacement platform, and the laser emitted by the laser probe is perpendicular to the optical path of the optical fiber.

[0029] Secondly, embodiments of this application provide a grating writing method, characterized in that the grating writing method is applied to the grating writing apparatus described above, and the grating writing method includes:

[0030] Receive writing instructions;

[0031] In response to the writing command, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber;

[0032] After the target fiber segment is etched, the displacement platform is moved so that the next target fiber segment is within the lithography range of the etched part.

[0033] Returning to the previous step, the writing device is controlled to perform grating writing on the target fiber segments of the optical fiber until all target fiber segments of the optical fiber have been written.

[0034] Optionally, after the target fiber segment is inscribed, controlling the displacement platform to move includes:

[0035] After the target fiber segment is etched, a cleaning device is driven to adsorb the dust generated on the surface of the fiber during the photolithography process into the groove.

[0036] The displacement platform is moved so that the next target fiber segment of the optical fiber is within the lithographic range of the writing device.

[0037] This application provides a grating writing apparatus and a grating writing method. The apparatus includes: a base plate; a displacement platform disposed on the base plate; an optical platform disposed on the base plate; a clamping member disposed on the side of the displacement platform away from the base plate, the clamping member including multiple through holes for limiting optical fibers, the path formed between the multiple through holes coinciding with the optical path of the optical fiber; and a writing member disposed on the side of the optical platform away from the base plate, the laser probe of the writing member extending towards the displacement platform, and the laser emitted by the laser probe being perpendicular to the optical path of the optical fiber. Upon receiving a writing instruction, the writing member is controlled to perform grating writing on a target optical fiber segment; after the target optical fiber segment is written, the displacement platform is controlled to move so that the next target optical fiber segment is within the grating range of the writing member; a return step is performed, controlling the writing member to perform grating writing on the target optical fiber segments until all target optical fiber segments are written. In this embodiment, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber. After each target fiber segment is written, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the writing device, thereby completing the writing of all target fiber segments. During the grating writing process on the optical fiber using the grating writing device, the displacement platform controls the fiber displacement, thereby improving writing stability and thus increasing yield and production volume. Attached Figure Description

[0038] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 This is a schematic diagram of the structure of a grating writing device provided in an embodiment of this application;

[0040] Figure 2 This is a schematic diagram of the support structure of a grating writing device provided in an embodiment of this application;

[0041] Figure 3 This is a flowchart of a grating writing method provided in an embodiment of this application.

[0042] Explanation of reference numerals in the attached figures:

[0043] 10. Base plate; 20. Optical platform; 22. Adapter plate; 211. Sliding plate; 212. Limiting block; 41. First bracket; 42. Second bracket; 43. First clamp; 44. Second clamp; 45. Third clamp; 421. Second cleaning ring; 422. Second groove; 51. Connector; 52. Laser probe. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0045] See Figure 1 , Figure 1 This is a schematic diagram of the structure of a grating writing device provided in an embodiment of this application, as shown below. Figure 1 As shown, an embodiment of this application provides a grating writing apparatus comprising:

[0046] Base plate 10;

[0047] A displacement platform is mounted on the base plate 10;

[0048] The optical platform 20 is mounted on the base plate 10;

[0049] A clamping member is disposed on the side of the displacement platform away from the base plate 10. The clamping member includes multiple through holes for limiting the optical fiber, and the path formed between the multiple through holes coincides with the optical path of the optical fiber.

[0050] The writing component is disposed on the side of the optical platform 20 away from the base plate 10. The laser probe 52 of the writing component extends toward the displacement platform, and the laser emitted by the laser probe 52 is perpendicular to the optical path of the optical fiber.

[0051] It should be understood that the above-mentioned fiber optic stripping of multiple coating segments can optionally involve stripping a 24mm long coating segment every 50mm starting from the 750mm mark, resulting in a total of 10 coating segments being stripped.

[0052] The working principle of the grating writing device provided in this application embodiment is as follows: the clamping member is used to clamp the optical fiber, and the coating layer stripped from the optical fiber is within the irradiation range of the laser emitted by the laser probe 52.

[0053] Upon receiving a writing instruction, the user may optionally perform certain operations on the grating writing device to generate a writing instruction, controlling the writing component to perform grating writing on the target fiber segment of the optical fiber. Specifically, the laser probe 52 emits ultraviolet light to perform grating writing on the section of the optical fiber where the coating layer has been removed, i.e., the target fiber segment. After the target fiber segment is written, the displacement platform is moved so that the next target fiber segment of the optical fiber is within the lithography range of the writing component; the writing component is then controlled to perform grating writing on the target fiber segment of the optical fiber, and the above steps are repeated until all target fiber segments of the optical fiber are written.

[0054] Optionally, after the target fiber segment is written, the displacement platform is moved by 50 mm to expose the next fiber segment with the coating removed to ultraviolet light.

[0055] In this embodiment, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber. After each target fiber segment is written, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the writing device, thereby completing the writing of all target fiber segments. During the grating writing process on the optical fiber using the grating writing device, the displacement platform controls the fiber displacement, thereby improving writing stability and thus increasing yield and production volume.

[0056] Please see Figure 1 Optionally, the displacement platform includes a slider and a transition plate 22;

[0057] The sliding member is disposed on the base plate 10;

[0058] The adapter plate 22 is disposed on the side of the sliding member away from the base plate 10, and the adapter plate 22 moves along the length direction of the base plate 10 under the drive of the sliding member.

[0059] In this embodiment, the displacement platform includes a slider and a transition plate 22, and the transition plate 22 moves along the length direction of the base plate 10 under the action of the slider. Optionally, the transition plate 22 is sized as follows: 22 aluminum alloy adapter plate.

[0060] It should be noted that a Cartesian three-dimensional coordinate system can be established based on the orientation of the base plate 10. Please refer to [link / reference]. Figure 1 , Figure 1 The X-axis of the coordinate system is parallel to the length direction of the base plate 10, the Y-axis is parallel to the width direction of the base plate 10, and the Z-axis is perpendicular to the base plate 10.

[0061] Please see Figure 1 Optionally, the sliding member includes a sliding plate 211 and a limiting block 212;

[0062] The limiting block 212 is fixedly disposed on the base plate 10 and extends along the length direction of the base plate 10;

[0063] The sliding plate 211 is slidably connected to the limiting block 212 and slides along the limiting block 212.

[0064] In this embodiment, the sliding member includes a sliding plate 211 and a limiting block 212, wherein the limiting block 212 extends along the length direction of the base plate 10.

[0065] Optionally, the sliding plate 211 slides on the limiting block 212 for a stroke of 600 mm.

[0066] Please see Figure 1 Optionally, the clamping member includes a first bracket 41 and a second bracket 42;

[0067] The first bracket 41 and the second bracket 42 are disposed on the side of the adapter plate 22 near the optical platform 20. The first bracket 41 and the second bracket 42 are spaced apart, and the distance between the first bracket 41 and the second bracket 42 is greater than the length of the target optical fiber segment.

[0068] Please see Figure 1 Optionally, the clamping member further includes a first clamp 43, a second clamp 44, and a third clamp 45;

[0069] The first clamp 43, the second clamp 44 and the third clamp 45 are disposed on the side of the adapter plate 22 away from the base plate 10. The first clamp 43 and the third clamp 45 are respectively disposed at both ends of the adapter plate 22. The second clamp 44 is disposed between the first clamp 43 and the third clamp 45, and the first bracket 41 and the second bracket 42 are disposed between the second clamp 44 and the third clamp 45.

[0070] Please see Figure 2 Optionally, one end of the first bracket 41 is formed with a first through hole for limiting the optical fiber, and one end of the second bracket 42 is formed with a second through hole for limiting the optical fiber. The path formed between the first through hole and the second through hole coincides with the optical path of the optical fiber.

[0071] In this embodiment, the clamping components include a first bracket 41, a second bracket 42, a first clamp 43, a second clamp 44, and a third clamp 45. One end of the first bracket 41 has a first through-hole for limiting the optical fiber, and one end of the second bracket 42 has a second through-hole for limiting the optical fiber. The optical fiber passes through the first through-hole in the first bracket 41 and the second through-hole in the second bracket 42, and is clamped by the first clamp 43, the second clamp 44, and the third clamp 45. By setting the first bracket 41, the second bracket 42, the first clamp 43, the second clamp 44, and the third clamp 45, the position of the optical fiber remains unchanged, improving the writing stability.

[0072] It should be noted that the path formed between the first and second through holes coincides with the optical path of the optical fiber.

[0073] Please see Figure 2Optionally, the first through hole accommodates a first cleaning ring, the first cleaning ring including a first groove, and the second through hole accommodates a second cleaning ring 421, the second cleaning ring 421 including a second groove 422.

[0074] The first cleaning ring and the second cleaning ring 421 are used to adsorb the dust generated on the surface of the optical fiber during the photolithography process into the first groove and the second groove 422.

[0075] The aforementioned first and second cleaning rings 421 are also referred to as automatic current adsorption cleaning rings. These rings integrate microelectrode arrays. Applying low-voltage alternating current generates a strong electric field within the cleaning rings, which polarizes neutral particles, producing dielectric force. In this embodiment, when the optical fiber moves relative to the ring (i.e., when the displacement platform moves), an automatic cleaning process is triggered. The dielectric force adsorbs fine dust particles on the optical fiber into the grooves of the cleaning rings, thus cleaning the surface of the optical fiber.

[0076] Alternatively, the self-cleaning function can be achieved by pushing out the dust from the grooves from the inner wall of the cleaning ring.

[0077] In this embodiment, a microcurrent is used in the cleaning ring to attract dust from the fiber surface into the groove, and the dust is then pushed out from the inner wall of the cleaning ring to complete self-cleaning, thereby improving the yield of grating writing. Furthermore, by setting the cleaning ring and the groove, the grating writing device has a self-cleaning function, enabling the writing of multiple grating segments in a single clamping operation.

[0078] Please see Figure 1 Optionally, the writing element includes a connector 51 and a laser probe 52;

[0079] The connector 51 is disposed on the side of the optical platform 20 away from the base plate 10. The laser probe 52 is fixedly connected to the connector 51 on the side facing the displacement platform, and the laser emitted by the laser probe 52 is perpendicular to the optical path of the optical fiber.

[0080] The writing component in this embodiment includes a connector 51 and a laser probe 52. The laser probe 52 is used to emit ultraviolet light to perform grating writing on the optical fiber.

[0081] See Figure 3 , Figure 3 This is a flowchart of a grating writing method provided in an embodiment of this application. It should be understood that the grating writing method provided in this embodiment of the application is applied to the grating writing apparatus described above.

[0082] like Figure 3 As shown, the grating writing method provided in this application includes:

[0083] S301 receives the writing command.

[0084] S302, in response to the writing command, control the writing device to perform grating writing on the target fiber segment of the optical fiber.

[0085] S303, after the target fiber segment is etched, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the etched part.

[0086] S304, return to S302, control the writing device to perform grating writing on the target fiber segment of the optical fiber until all target fiber segments of the optical fiber have been written.

[0087] In this embodiment, upon receiving a writing instruction, the user may optionally perform certain operations on the grating writing device to generate a writing instruction, controlling the writing component to perform grating writing on the target fiber segment of the optical fiber. Specifically, the laser probe emits ultraviolet light to perform grating writing on the section of the optical fiber where the coating layer has been removed, i.e., the target fiber segment. After the target fiber segment is written, the displacement platform is moved so that the next target fiber segment of the optical fiber is within the lithography range of the writing component; the writing component is then controlled to perform grating writing on the target fiber segment of the optical fiber, and the above steps are repeated until all target fiber segments of the optical fiber are written.

[0088] In this embodiment, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber. After each target fiber segment is written, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the writing device, thereby completing the writing of all target fiber segments. During the grating writing process on the optical fiber using the grating writing device, the displacement platform controls the fiber displacement, thereby improving writing stability and thus increasing yield and production volume.

[0089] Optionally, after the target fiber segment is inscribed, controlling the displacement platform to move includes:

[0090] After the target fiber segment is etched, a cleaning device is driven to adsorb the dust generated on the surface of the fiber during the photolithography process into the groove.

[0091] The displacement platform is moved so that the next target fiber segment of the optical fiber is within the lithographic range of the writing device.

[0092] It should be noted that the grating writing device includes a first support and a second support. One end of the first support has a first through hole for limiting the optical fiber, and one end of the second support has a second through hole for limiting the optical fiber. The first through hole accommodates a first cleaning ring, which includes a first groove. The second through hole accommodates a second cleaning ring, which includes a second groove.

[0093] The cleaning device described above includes a first cleaning ring, a second cleaning ring, a first groove, and a second groove.

[0094] In this embodiment, after the target fiber segment is written, a microcurrent is used through a cleaning ring to attract dust from the fiber surface into the groove. Optionally, the dust in the groove can also be pushed out from the inner wall of the cleaning ring to complete self-cleaning, thereby cleaning the fiber surface and improving the yield of grating writing.

[0095] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0096] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) and includes several instructions to cause a terminal (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0097] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A grating writing device, characterized in that, include: Base plate; The displacement platform is mounted on the base plate; An optical platform is mounted on the base plate; A clamping member is disposed on the side of the displacement platform away from the base plate. The clamping member includes multiple through holes for limiting the optical fiber, and the path formed between the multiple through holes coincides with the optical path of the optical fiber. The writing component is disposed on the side of the optical platform away from the base plate. The laser probe of the writing component extends toward the displacement platform, and the laser emitted by the laser probe is perpendicular to the optical path of the optical fiber. Specifically, upon receiving a writing instruction, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber; After the target fiber segment is etched, the displacement platform is controlled to move so that the next target fiber segment is within the lithography range of the etched part. Returning to the previous step, the writing device is controlled to perform grating writing on the target fiber segments of the optical fiber until all target fiber segments of the optical fiber have been written.

2. The grating writing apparatus according to claim 1, characterized in that, The displacement platform includes a sliding component and a transition plate; The sliding member is disposed on the base plate; The adapter plate is located on the side of the sliding member away from the base plate, and the adapter plate moves along the length direction of the base plate under the action of the sliding member.

3. The grating writing apparatus according to claim 2, characterized in that, The sliding component includes a sliding plate and a limiting block; The limiting block is fixedly mounted on the base plate and extends along the length of the base plate; The sliding plate is slidably connected to the limiting block and slides along the limiting block.

4. The grating writing apparatus according to claim 2, characterized in that, The clamping element includes a first bracket and a second bracket; The first bracket and the second bracket are disposed on the side of the adapter plate near the optical platform. The first bracket and the second bracket are spaced apart, and the distance between the first bracket and the second bracket is greater than the length of the target optical fiber segment.

5. The grating writing apparatus according to claim 4, characterized in that, The clamping component further includes a first clamp, a second clamp, and a third clamp; The first clamp, the second clamp, and the third clamp are disposed on the side of the adapter plate away from the base plate. The first clamp and the third clamp are respectively disposed at both ends of the adapter plate. The second clamp is disposed between the first clamp and the third clamp, and the first bracket and the second bracket are disposed between the second clamp and the third clamp.

6. The grating writing apparatus according to claim 4, characterized in that, The first support has a first through hole for limiting the optical fiber at one end, and the second support has a second through hole for limiting the optical fiber at one end. The path formed between the first through hole and the second through hole coincides with the optical path of the optical fiber.

7. The grating writing apparatus according to claim 6, characterized in that, The first through hole accommodates a first cleaning ring, the first cleaning ring including a first groove; the second through hole accommodates a second cleaning ring, the second cleaning ring including a second groove. The first cleaning ring and the second cleaning ring are used to adsorb the dust generated on the surface of the optical fiber during the photolithography process into the first groove and the second groove.

8. The grating writing apparatus according to any one of claims 1-7, characterized in that, The writing component includes a connector and a laser probe; The connector is located on the side of the optical platform away from the base plate, the laser probe is fixedly connected to the side of the connector facing the displacement platform, and the laser emitted by the laser probe is perpendicular to the optical path of the optical fiber.

9. A method for writing gratings, characterized in that, The grating writing method is applied to the grating writing apparatus as described in any one of claims 1-8, and the grating writing method includes: Receive writing instructions; In response to the writing command, the writing device is controlled to perform grating writing on the target fiber segment of the optical fiber; After the target fiber segment is etched, the displacement platform is moved so that the next target fiber segment is within the lithography range of the etched part. Returning to the previous step, the writing device is controlled to perform grating writing on the target fiber segments of the optical fiber until all target fiber segments of the optical fiber have been written.

10. The grating writing method according to claim 9, characterized in that, After the target fiber segment is inscribed, controlling the displacement platform to move includes: After the target fiber segment is etched, a cleaning device is driven to adsorb the dust generated on the surface of the fiber during the photolithography process into the groove. The displacement platform is moved so that the next target fiber segment of the optical fiber is within the lithographic range of the writing device.

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