Excimer laser annealing system and control method thereof

Abstract

The invention provides an excimer laser annealing system and a control method thereof, and relates to the technical field of laser annealing, the excimer laser annealing system comprises a main control unit, a laser generation unit, an energy detection module, a motion platform, a substrate bearing table and a position detection module, the position detection module is used for collecting position information of the motion platform, and the energy detection module is used for collecting energy data of laser spots; the system further comprises a self-adaptive laser energy closed-loop adjustment module, a dynamic delay laser trigger module and an integrated microfluid thermal management and rapid cooling module. The self-adaptive laser energy closed-loop adjusting module is arranged, online, real-time and pixel-level uniformity compensation of laser spot energy distribution is achieved, a dynamic delay laser triggering method based on real-time position feedback is adopted, and synchronization errors caused by mechanical transmission gaps, speed fluctuation and vibration of a motion platform are effectively compensated.

Description

Technical Field

[0001] This invention relates to the field of laser annealing technology, and in particular to an excimer laser annealing system and its control method. Background Technology

[0002] Existing excimer laser annealing systems mainly consist of a laser generating unit, a motion platform, a substrate support stage, an energy detection component, and a main control unit. Their working principle is as follows: the main control unit controls the laser generating unit to output a laser spot, simultaneously driving the motion platform to move the substrate, allowing the laser spot to scan the substrate along a preset trajectory to complete the annealing process; the energy detection component collects laser spot energy data to assist in judging the annealing effect; some advanced systems use fixed delay or speed prediction methods to synchronize the laser pulse with the substrate position; cooling methods typically employ external air cooling or independent external water cooling devices. These systems are widely used in the crystallization treatment of materials in display panels, semiconductor chips, and other fields. Laser annealing can improve the crystal quality of materials and optimize the electrical performance of devices.

[0003] However, existing excimer laser annealing systems suffer from poor uniformity of laser energy distribution and lack effective real-time closed-loop adjustment mechanisms. They rely solely on the parameter settings of the laser generating unit, failing to compensate for inherent fluctuations in spot energy and energy losses during transmission, resulting in poor consistency of crystal quality in the annealed region. Furthermore, the synchronization accuracy between the laser and the substrate is low, and triggering methods based on fixed delays or speed predictions are ill-suited to handle mechanical transmission gaps, speed fluctuations, and vibrations in the motion platform, easily leading to synchronization errors and consequently, scanning line defects. Simultaneously, thermal management is poor. Existing cooling devices are mostly external, resulting in delays in their connection with the annealing process and low cooling efficiency. This not only easily causes thermal stress cracking of the substrate but may also damage the crystallization structure. Moreover, external cooling methods are prone to contaminating the substrate and cannot adapt to the thermally sensitive characteristics of flexible substrates. These defects severely restrict the accuracy, stability, and applicability of the excimer laser annealing process. Therefore, this invention proposes an excimer laser annealing system and its control method to solve the problems existing in the prior art. Summary of the Invention

[0004] To address the aforementioned problems, this invention proposes an excimer laser annealing system and its control method. By setting an adaptive laser energy closed-loop adjustment module, online, real-time, and pixel-level uniformity compensation of laser spot energy distribution is achieved, thus solving the technical defect of uneven laser energy distribution in existing systems.

[0005] To achieve the objectives of this invention, the following technical solution is provided: an excimer laser annealing system, comprising a main control unit, a laser generating unit, an energy detection module, a motion platform, a substrate support stage, and a position detection module. The motion platform is equipped with a driving component for moving the substrate support stage. The position detection module is used to collect the position information of the motion platform, and the energy detection module is used to collect the energy data of the laser spot. The system also includes an adaptive laser energy closed-loop adjustment module, a dynamic delay laser triggering module, and an integrated microfluidic thermal management and rapid cooling module.

[0006] The adaptive laser energy closed-loop adjustment module receives the spot energy data from the energy detection module, processes the signal, and optimizes the parameters before outputting an adjustment signal to the laser generating unit to adjust the laser energy distribution in a closed loop. The dynamic delay laser triggering module calculates the trigger delay of the laser pulse based on the position information collected by the position detection module and outputs a trigger signal to the laser generating unit. The integrated microfluidic thermal management and rapid cooling module is embedded inside the substrate support platform and includes a microfluidic cooling channel, a temperature sensor, and a heat exchanger. The temperature sensor is connected to the main control unit, and the microfluidic cooling channel is connected to the heat exchanger and the cooling fluid supply component through pipelines to achieve rapid cooling of the substrate support platform.

[0007] The adaptive laser energy closed-loop adjustment module includes an energy signal processing submodule, a parameter optimization submodule, and a driving submodule. The energy signal processing submodule filters and normalizes the spot energy data. The parameter optimization submodule uses a PID algorithm to calculate the adjustment amount. The driving submodule converts the adjustment amount into a driving signal and outputs it to the laser generating unit. The expression for the PID algorithm is:

[0008] ,

[0009] Where u(t) is the laser generator unit drive adjustment amount at time t; K p K is a proportionality constant, ranging from 0.1 to 10. i K is the integral coefficient, ranging from 0.01 to 1. d τ is the differential coefficient, ranging from 0.001 to 0.5; e(t) is the spot energy deviation value at time t, i.e., the difference between the ideal energy value and the actual detected energy value; τ is the integral variable; The integral value of the energy deviation before time t; Let be the rate of change of energy deviation at time t.

[0010] The delay calculation of the dynamic delay laser triggering module adopts a position deviation compensation algorithm, the expression of which is:

[0011] ,

[0012] Where: Δt is the dynamic trigger delay of the laser pulse; Δx is the deviation between the actual position and the ideal position of the motion platform; v is the preset speed of the motion platform; Δv is the deviation between the actual speed and the preset speed of the motion platform.

[0013] The cooling temperature control of the integrated microfluidic thermal management and rapid cooling module adopts a first-order inertial compensation algorithm, the expression of which is:

[0014] ,

[0015] Where: T(t) is the substrate stage temperature at time t; T0 is the target cooling temperature; T1 is the initial temperature of the substrate stage at the end of annealing; τc is the cooling time constant; and t is the cooling time.

[0016] The energy detection module includes a high-speed area array detector and a deformable mirror. The high-speed area array detector is used to collect spot energy data in real time, and the deformable mirror is used to dynamically correct the spot shape according to the output signal of the parameter optimization submodule. The position detection module is a high-precision encoder with a resolution of not less than 0.01μm. The width of the microfluidic cooling channel is 30-100μm, and the response time of the temperature sensor is <10ms.

[0017] A method for controlling an excimer laser annealing system includes the following steps:

[0018] S1: The adaptive laser energy closed-loop adjustment module receives the spot energy data collected by the energy detection module, filters and normalizes the data, calculates the adjustment amount through the parameter optimization algorithm, outputs the drive signal to the laser generating unit, adjusts the laser output energy, and forms energy closed-loop control.

[0019] S2: The position detection module continuously collects the position information of the motion platform. The dynamic delay laser triggering module calculates the deviation between the actual position and the ideal position based on the position information, and calculates the trigger delay of the laser pulse in combination with the speed deviation of the motion platform. It then outputs a trigger signal to the laser generating unit to achieve precise synchronization between the laser pulse and the position of the substrate support platform.

[0020] S3: During the annealing process, the temperature sensor collects the temperature of the substrate carrier in real time and transmits it to the main control unit. After the annealing is completed, the main control unit triggers the cooling fluid supply component to work. The cooling fluid circulates in the microfluidic cooling channel and achieves rapid cooling of the substrate carrier through the heat exchanger, completing the seamless connection between annealing and cooling.

[0021] A further improvement is that in S1, the parameter optimization algorithm is a PID algorithm, which calculates the current or voltage adjustment of the laser generating unit to achieve precise adjustment of laser energy.

[0022] A further improvement is made in S1, where the filtering process is Gaussian filtering, and the normalization expression is:

[0023] E'=(E-Emin) / (Emax-Emin),

[0024] Where E' is the normalized energy value, E is the actual detected energy value, Emin is the minimum detected energy value, and Emax is the maximum detected energy value.

[0025] A further improvement is made in S2, where the trigger delay is calculated using a position deviation compensation algorithm. Specifically, the dynamic delay laser trigger module receives the motion platform position data collected by the high-precision encoder in real time, calculates the micro-deviation Δx and velocity deviation Δv between the actual position and the ideal position, substitutes them into the position deviation compensation algorithm to obtain the dynamic trigger delay Δt, and then adjusts the triggering time of the laser pulse.

[0026] Further improvements are made in S3, where the cooling process is temperature controlled by a first-order inertial compensation algorithm. The main control unit adjusts the flow rate of the cooling fluid in real time based on the temperature data collected by the temperature sensor and the first-order inertial compensation algorithm, controlling the temperature of the substrate support platform to drop to the target temperature according to a preset curve. The cooling fluid is deionized water or a mixture of deionized water and ethylene glycol.

[0027] The beneficial effects of this invention are as follows:

[0028] 1. This invention achieves online, real-time, and pixel-level uniformity compensation for laser spot energy distribution by setting an adaptive laser energy closed-loop adjustment module, solving the technical defect of uneven laser energy distribution in existing systems. This module effectively removes noise interference and precisely adjusts the output energy of the laser generating unit by filtering, normalizing, and optimizing energy data and PID parameters. This not only improves the uniformity of single irradiation but also ensures the stability of energy distribution during long-term processes, significantly improving the crystallization uniformity and process consistency of the annealing region.

[0029] 2. This invention adopts a dynamic delay laser triggering method based on real-time position feedback, which breaks through the limitations of traditional fixed delay or speed prediction triggering methods. It effectively compensates for the synchronization errors caused by mechanical transmission gaps, speed fluctuations and vibrations of the motion platform. By calculating the microscopic deviation between the actual position and the ideal position and dynamically adjusting the trigger delay, it achieves soft-landing precise synchronization between the laser pulse and the substrate position, fundamentally eliminating scanning line defects caused by synchronization errors and improving the accuracy of the annealing process.

[0030] 3. The integrated microfluidic thermal management and rapid cooling module of the present invention achieves seamless connection between annealing and cooling, solving the problems of low efficiency, easy thermal damage and contamination of existing external cooling methods. The embedded design of the microfluidic cooling channel and the linkage with the rapid response temperature sensor enable the temperature of the substrate support stage to drop to a safe range in a short time. This not only reduces the thermal stress cracking rate, but also maintains the integrity of the crystallization structure, while leaving no residual contamination. It is adapted to the thermally sensitive characteristics of flexible substrates and expands the application range of the system. Attached Figure Description

[0031] Figure 1 This is the main view of the system of the present invention;

[0032] Figure 2 This is a flowchart of the method of the present invention. Detailed Implementation

[0033] To enhance understanding of the present invention, the present invention will be further described in detail below with reference to embodiments. These embodiments are only used to explain the present invention and do not constitute a limitation on the scope of protection of the present invention.

[0034] Example 1

[0035] according to Figure 1 , 2 As shown, this embodiment proposes an excimer laser annealing system, including a main control unit, a laser generating unit, an energy detection module, a motion platform, a substrate support stage, and a position detection module. The motion platform is equipped with a driving component for driving the substrate support stage. The position detection module is used to collect the position information of the motion platform, and the energy detection module is used to collect the energy data of the laser spot. The system is characterized by further comprising:

[0036] The adaptive laser energy closed-loop adjustment module is integrated between the main control unit and the laser generating unit. It is used to receive the spot energy data collected by the energy detection module, and after signal processing and parameter optimization, output the adjustment signal to the laser generating unit to realize the closed-loop adjustment of the laser energy distribution.

[0037] The dynamic delay laser triggering module is connected to the main control unit, the position detection module and the laser generating unit. It is used to calculate the trigger delay based on the position information collected by the position detection module and output the trigger signal to the laser generating unit.

[0038] An integrated microfluidic thermal management and rapid cooling module is embedded inside the substrate carrier platform. It includes a microfluidic cooling channel, a temperature sensor, and a heat exchanger. The temperature sensor is connected to the main control unit, and the microfluidic cooling channel is connected to the heat exchanger and cooling fluid supply components through pipelines to achieve rapid cooling of the substrate.

[0039] A method for controlling an excimer laser annealing system includes the following steps:

[0040] S1: Energy closed-loop adjustment step: The adaptive laser energy closed-loop adjustment module processes the spot energy data collected by the energy detection module, calculates the adjustment amount using a parameter optimization algorithm, and drives the laser generating unit to adjust the output energy to form energy closed-loop control;

[0041] S2: Dynamic delay triggering step, the position information of the motion platform is continuously collected by the position detection module, the deviation between the actual position and the ideal position is calculated, and the triggering delay of the laser pulse is dynamically adjusted to achieve precise synchronization between the laser pulse and the substrate position;

[0042] S3: Microfluidic rapid cooling step. During the annealing process, the temperature of the substrate is monitored in real time by a temperature sensor. After the annealing is completed, the main control unit triggers the cooling fluid to circulate in the microfluidic cooling channel, and the substrate is rapidly cooled through the heat exchanger.

[0043] Example 2

[0044] according to Figure 1 , 2 As shown, this embodiment proposes a basic excimer laser annealing system, including a main control unit (using an STM32H743 microcontroller), a laser generation unit (excimer laser source, output wavelength 248nm), an energy detection module (high-speed area array detector, pixel resolution 1024×1024), a motion platform (linear motor drive, positioning accuracy ±0.1μm), a substrate support stage, and a position detection module (high-precision encoder, resolution 0.01μm).

[0045] The adaptive laser energy closed-loop regulation module is integrated between the main control unit and the laser generation unit. It includes an energy signal processing submodule (using FPGA to implement filtering and normalization processing), a parameter optimization submodule (embedded with PID algorithm), and a drive submodule (power amplifier). The dynamic delay laser triggering module is connected to the encoder, main control unit, and laser generation unit, and uses a DSP chip to implement delay calculation. The integrated microfluidic thermal management and rapid cooling module is embedded inside the substrate support platform. The microfluidic cooling channel is 50μm wide. The temperature sensor is a thermocouple with a response time of <10ms. The cooling fluid is deionized water, and the heat exchanger is a plate heat exchanger.

[0046] The control method of this embodiment is as follows: S1: Energy closed-loop regulation. The high-speed area array detector collects the spot energy data, which is then processed by Gaussian filtering and normalization by the FPGA and transmitted to the main control unit. The current regulation amount is calculated by the PID algorithm to drive the laser generating unit to adjust the output energy; S2: Dynamic delay triggering. The encoder continuously collects the position information of the motion platform. The main control unit calculates the deviation between the actual position and the ideal position and dynamically adjusts the laser pulse trigger delay to achieve precise synchronization between the laser and the substrate; S3: Microfluidic rapid cooling. After annealing, when the temperature sensor detects that the substrate temperature is 800°C, the main control unit triggers deionized water circulation to reduce the substrate temperature to below 100°C within 50ms through the heat exchanger.

[0047] The effects of this embodiment are: the uniformity error of the light spot energy distribution is ≤2%, the synchronization error between the motion platform and the laser pulse is ≤0.05μm, the thermal stress cracking rate of the substrate is reduced to 2%, and the full width at half maximum (FWHM) of the XRD diffraction peak is reduced by 15%.

[0048] Example 3

[0049] according to Figure 1 , 2 As shown, this embodiment proposes a basic excimer laser annealing system. Based on the annealing requirements of flexible substrates (PET films), the integrated microfluidic thermal management and rapid cooling module is optimized according to Embodiment 2: the microfluidic cooling channels adopt a serpentine layout to increase the cooling area; a mixed coolant (deionized water + 5% ethylene glycol) is selected as the cooling fluid to lower the freezing point and improve heat exchange efficiency; and an infrared temperature sensor is used to avoid direct contact with the flexible substrate.

[0050] The parameter optimization submodule of the adaptive laser energy closed-loop adjustment module adopts an improved PID algorithm and introduces an integral separation strategy to avoid thermal damage to the flexible substrate caused by energy fluctuations; the dynamic delay laser triggering module adds a vibration compensation unit, which collects platform vibration data through an accelerometer and corrects the delay calculation results.

[0051] Based on Example 2, the control method of this embodiment adds an energy threshold judgment in step S1. When the local energy exceeds the tolerance threshold of the flexible substrate, fine-tuning is triggered immediately. In step S3, the cooling fluid flow rate is dynamically adjusted according to the substrate thickness.

[0052] The effects of this embodiment are: it is suitable for PET flexible substrates with a thickness of 50-200μm, and the substrate is wrinkle-free and undamaged after annealing, with a crystal uniformity error of ≤1.5%, and the cooling efficiency is 10% higher than that of Embodiment 2.

[0053] Example 4

[0054] according to Figure 1 , 2As shown, this embodiment proposes a basic excimer laser annealing system. For example, to meet the needs of mass production, a parallel layout of multiple laser generating units (two excimer laser sources, symmetrically distributed) is adopted. Each laser generating unit corresponds to an independent adaptive laser energy closed-loop adjustment module, which is uniformly coordinated by the main control unit. The motion platform adopts a dual-axis drive structure to improve motion speed and load-bearing capacity.

[0055] The dynamic delay laser triggering module adopts a multi-channel synchronous triggering design to achieve synchronous output of two laser pulses with a deviation of ≤0.1μs; the integrated microfluidic thermal management and rapid cooling module adopts a parallel design of multiple microfluidic cooling channels to increase cooling flow and improve batch cooling efficiency.

[0056] Based on Embodiment 2, the control method of this embodiment adds a laser source collaborative control step. The main control unit dynamically allocates the working areas of the two laser sources according to the substrate scanning trajectory to avoid energy superposition or omission. In step S2, a segmented delay calculation strategy is adopted to improve the synchronization accuracy under high-speed motion.

[0057] The effects of this embodiment are: the number of substrates processed in a single batch is increased to twice that of Embodiment 2, the single annealing time is shortened by 30%, the uniformity error of the light spot energy distribution is ≤2.5%, and the synchronization error is ≤0.08μm, which meets the high efficiency and high precision requirements of mass production.

[0058] Validation data:

[0059] This invention achieves a significant performance improvement compared to existing technologies through the synergistic effect of three core modules. The specific key performance indicators are compared in the table below:

[0060] Performance indicators Existing technology This invention Improvement effect Light spot energy distribution uniformity error ≥8% ≤2.5% Reduced by 68.75% Laser and substrate synchronization error ≥0.5μm ≤0.08μm Reduced by 84% Cooling time after annealing (800℃ → below 100℃) ≥200ms (air-cooled) ≤50ms Cooling efficiency increased by 3 times substrate thermal stress cracking rate 12% 2% Reduced by 83.33% XRD diffraction peak full width at half maximum (FWHM) benchmark value Baseline value × 85% Reduce by 15% Single batch substrate processing efficiency benchmark value Baseline value × 1.3 times Increase by 30%

[0061] As can be seen from the above data, the present invention effectively solves the core problems of uneven energy distribution, low synchronization accuracy and poor cooling effect in the existing excimer laser annealing technology, significantly improves the crystallization uniformity, process consistency and production efficiency of the annealing process, and expands the adaptability to flexible substrates, which has important industrial application value.

[0062] This invention achieves online, real-time, and pixel-level uniformity compensation for laser spot energy distribution by setting an adaptive laser energy closed-loop adjustment module. This solves the technical defect of uneven laser energy distribution in existing systems. The module effectively removes noise interference and precisely adjusts the output energy of the laser generating unit through filtering, normalization, and PID parameter optimization of energy data. This not only improves the uniformity of a single irradiation but also ensures the stability of energy distribution during long-term processes, significantly enhancing the crystallization uniformity and process consistency of the annealing region. Furthermore, this invention employs a dynamic delay laser triggering method based on real-time position feedback, overcoming the limitations of traditional fixed delay or speed prediction triggering methods. It effectively compensates for synchronization errors caused by mechanical transmission gaps, speed fluctuations, and vibrations of the motion platform. By calculating the microscopic deviation between the actual and ideal positions and dynamically adjusting the trigger delay, it achieves soft-landing precise synchronization between the laser pulse and the substrate position, fundamentally eliminating scan line defects caused by synchronization errors and improving the accuracy of the annealing process. In addition, the integrated microfluidic thermal management and rapid cooling module of the present invention achieves seamless connection between annealing and cooling, solving the problems of low efficiency, easy thermal damage and contamination of existing external cooling methods. The embedded design of the microfluidic cooling channel and the linkage with the rapid response temperature sensor enable the temperature of the substrate support stage to drop to a safe range in a short time. This not only reduces the thermal stress cracking rate, but also maintains the integrity of the crystallization structure, while leaving no residual contamination. It is adapted to the thermally sensitive characteristics of flexible substrates and expands the applicability of the system.

[0063] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An excimer laser annealing system, comprising a main control unit, a laser generating unit, an energy detection module, a motion platform, a substrate support stage, and a position detection module, wherein the motion platform is provided with a driving component for driving the substrate support stage, the position detection module is used to collect the position information of the motion platform, and the energy detection module is used to collect the energy data of the laser spot; characterized in that, It also includes an adaptive laser energy closed-loop adjustment module, a dynamic delay laser triggering module, and an integrated microfluidic thermal management and rapid cooling module; The adaptive laser energy closed-loop adjustment module receives the spot energy data from the energy detection module, processes the signal, and optimizes the parameters before outputting an adjustment signal to the laser generating unit to adjust the laser energy distribution in a closed loop. The dynamic delay laser triggering module calculates the trigger delay of the laser pulse based on the position information collected by the position detection module and outputs a trigger signal to the laser generating unit. The integrated microfluidic thermal management and rapid cooling module is embedded inside the substrate support platform and includes a microfluidic cooling channel, a temperature sensor, and a heat exchanger. The temperature sensor is connected to the main control unit, and the microfluidic cooling channel is connected to the heat exchanger and the cooling fluid supply component through pipelines to achieve rapid cooling of the substrate support platform.

2. The excimer laser annealing system according to claim 1, characterized in that: The adaptive laser energy closed-loop adjustment module includes an energy signal processing submodule, a parameter optimization submodule, and a driving submodule. The energy signal processing submodule filters and normalizes the spot energy data. The parameter optimization submodule uses a PID algorithm to calculate the adjustment amount. The driving submodule converts the adjustment amount into a driving signal and outputs it to the laser generating unit. The expression for the PID algorithm is: ， Where u(t) is the laser generator unit drive adjustment amount at time t; K p K is a proportionality constant, ranging from 0.1 to 10. i K is the integral coefficient, ranging from 0.01 to 1. d τ is the differential coefficient, ranging from 0.001 to 0.5; e(t) is the spot energy deviation value at time t, i.e., the difference between the ideal energy value and the actual detected energy value; τ is the integral variable; The integral value of the energy deviation before time t; Let be the rate of change of energy deviation at time t.

3. The excimer laser annealing system according to claim 1, characterized in that: The delay calculation of the dynamic delay laser triggering module adopts a position deviation compensation algorithm, the expression of which is: ， Where: Δt is the dynamic trigger delay of the laser pulse; Δx is the deviation between the actual position and the ideal position of the motion platform; v is the preset speed of the motion platform; Δv is the deviation between the actual speed and the preset speed of the motion platform.

4. The excimer laser annealing system according to claim 1, characterized in that: The cooling temperature control of the integrated microfluidic thermal management and rapid cooling module adopts a first-order inertial compensation algorithm, the expression of which is: ， Where: T(t) is the substrate stage temperature at time t; T0 is the target cooling temperature; T1 is the initial temperature of the substrate stage at the end of annealing; τc is the cooling time constant; and t is the cooling time.

5. The excimer laser annealing system according to claim 1, characterized in that: The energy detection module includes a high-speed area array detector and a deformable mirror. The high-speed area array detector is used to collect spot energy data in real time, and the deformable mirror is used to dynamically correct the spot shape according to the output signal of the parameter optimization submodule. The position detection module is a high-precision encoder with a resolution of not less than 0.01μm. The width of the microfluidic cooling channel is 30-100μm, and the response time of the temperature sensor is <10ms.

6. A control method for an excimer laser annealing system, employing the excimer laser annealing system described in any one of claims 1-5, characterized in that, Includes the following steps: S1: The adaptive laser energy closed-loop adjustment module receives the spot energy data collected by the energy detection module, filters and normalizes the data, calculates the adjustment amount through the parameter optimization algorithm, outputs the drive signal to the laser generating unit, adjusts the laser output energy, and forms energy closed-loop control. S2: The position detection module continuously collects the position information of the motion platform. The dynamic delay laser triggering module calculates the deviation between the actual position and the ideal position based on the position information, and calculates the trigger delay of the laser pulse in combination with the speed deviation of the motion platform. It then outputs a trigger signal to the laser generating unit to achieve precise synchronization between the laser pulse and the position of the substrate support platform. S3: During the annealing process, the temperature sensor collects the temperature of the substrate carrier in real time and transmits it to the main control unit. After the annealing is completed, the main control unit triggers the cooling fluid supply component to work. The cooling fluid circulates in the microfluidic cooling channel and achieves rapid cooling of the substrate carrier through the heat exchanger, completing the seamless connection between annealing and cooling.

7. The control method for an excimer laser annealing system according to claim 6, characterized in that: In S1, the parameter optimization algorithm is a PID algorithm, which calculates the current or voltage adjustment of the laser generating unit to achieve precise adjustment of laser energy.

8. The control method for an excimer laser annealing system according to claim 7, characterized in that: In S1, the filtering process is Gaussian filtering, and the normalization expression is: E'=(E-Emin) / (Emax-Emin), Where E' is the normalized energy value, E is the actual detected energy value, Emin is the minimum detected energy value, and Emax is the maximum detected energy value.

9. The control method for an excimer laser annealing system according to claim 6, characterized in that: In S2, the trigger delay is calculated by the position deviation compensation algorithm. Specifically, the dynamic delay laser trigger module receives the motion platform position data collected by the high-precision encoder in real time, calculates the micro deviation Δx and velocity deviation Δv between the actual position and the ideal position, substitutes them into the position deviation compensation algorithm to obtain the dynamic trigger delay Δt, and then adjusts the triggering time of the laser pulse.

10. The control method for an excimer laser annealing system according to claim 6, characterized in that: In S3, the cooling process is temperature controlled by a first-order inertial compensation algorithm. The main control unit adjusts the flow rate of the cooling fluid in real time based on the temperature data collected by the temperature sensor and the first-order inertial compensation algorithm, and controls the temperature of the substrate carrier to drop to the target temperature according to the preset curve. The cooling fluid is deionized water or a mixture of deionized water and ethylene glycol.

Images