Full-automatic microwave plasma cleaning degumming machine and working method thereof

Abstract

The invention discloses a full-automatic microwave plasma cleaning and degumming machine and a working method thereof.The degumming machine comprises a feeding mechanism, a cleaning and degumming mechanism and a discharging mechanism, and the cleaning and degumming mechanism comprises an upper cavity module, a lower cleaning platform module, a vacuum pump module, an assembly line module and a transplanting module; the assembly line module is used for conveying carrying discs between the feeding mechanism and the cleaning and degumming mechanism and between the cleaning and degumming mechanism and the discharging mechanism. The transplanting module is used for conveying the carrying disc between the assembly line module and the lower cleaning platform module; the upper cavity module is used for generating plasma; and the lower cleaning platform module and the upper cavity mold are combined to form a closed vacuum cavity. Through cooperative cooperation of the feeding mechanism, the cleaning and degumming mechanism and the discharging mechanism and precise transfer of the assembly line module and the transplanting module, full-process automatic operation of materials is achieved, manual intervention of intermediate links is not needed, the production efficiency is greatly improved, and the material damage risk caused by manual operation errors is reduced.

Description

Technical Field

[0001] This invention relates to the field of plasma cleaning technology, specifically to a fully automatic microwave plasma cleaning and adhesive removal machine and its working method. Background Technology

[0002] In the manufacturing fields of semiconductors, microelectronics, and precision optics, after processes such as photolithography and bonding, product surfaces often retain photoresist, organic contaminants, and other trace impurities. If these residues are not effectively removed, they will severely affect the precision of subsequent thin-film deposition and metallization processes, ultimately leading to decreased product performance or even failure. Therefore, high-precision and high-efficiency surface cleaning and photoresist removal technologies are crucial.

[0003] Plasma cleaning technology utilizes high-energy plasma to activate and decompose organic matter on the surface of materials. It has outstanding advantages such as thorough cleaning, no chemical residue, minimal damage to the substrate, and environmental friendliness, and has become an indispensable key process equipment in the aforementioned fields.

[0004] However, existing plasma cleaning and degumming equipment still has many limitations in actual industrial production: Low level of automation: The loading, unloading, and transfer of materials rely heavily on manual operation, resulting in low production efficiency and easy material contamination or physical damage due to operational errors. This makes it difficult to meet the high requirements of stability and consistency for modern production lines.

[0005] Limited material handling capacity: The equipment has a small silo capacity, requiring frequent interruptions in the process for manual replenishment and retrieval during batch production, which severely restricts the continuous operation capability and overall production capacity of the equipment.

[0006] Insufficient cleaning uniformity and efficiency: Traditional plasma sources (such as radio frequency plasma sources) have problems with low plasma density and uneven distribution, resulting in poor consistency of cleaning effect for complex structures or large batches of materials, and long process time.

[0007] Poor coordination among functional modules: Units such as feeding, cleaning, and unloading are often controlled independently, lacking integrated intelligent scheduling and precise coordination, making it impossible to achieve true full-process automation and continuous production. Summary of the Invention

[0008] To address the aforementioned shortcomings of existing technologies, this invention provides a fully automatic microwave plasma cleaning and adhesive removal machine and its operating method, thereby solving the problems of low automation and low efficiency in existing plasma cleaning and adhesive removal equipment.

[0009] To solve the above-mentioned technical problems, the present invention adopts the following solution: A fully automatic microwave plasma cleaning and degumming machine includes a feeding mechanism, a cleaning and degumming mechanism, and a discharging mechanism. The cleaning and degumming mechanism includes an upper cavity module, a lower cleaning platform module, a vacuum pump module, a production line module, and a transfer module. The assembly line module is used to convey a tray carrying the material to be cleaned between the feeding mechanism and the cleaning and degumming mechanism, and to convey a tray that has been cleaned between the cleaning and degumming mechanism and the unloading mechanism. The transplanting module is used to transport the carrier tray between the production line module and the lower cleaning platform module; The upper cavity module is used to generate plasma; The lower cleaning platform module can be combined with the upper cavity module to form a sealed vacuum chamber for cleaning and degumming under the action of the vacuum pump module.

[0010] Preferably, the feeding mechanism includes a feeding frame, a first vertical lifting module, and a feeding hopper; The first vertical lifting module is installed on the loading frame and is connected to the loading hopper drive, so as to drive the loading hopper to move vertically through the first vertical lifting module; The feeding hopper has multiple feeding and storage chambers along the longitudinal direction. Each feeding and storage chamber has multiple feeding and storage stations along the vertical direction. The feeding and storage stations are used to hold trays loaded with materials to be cleaned. A feeding detection sensor is installed at both ends of each feeding and storage chamber along the axial direction to detect the storage position of the pallet on the corresponding feeding and storage station.

[0011] Preferably, the upper cavity module includes a vacuum cavity, an array-type microwave plasma excitation device, and multiple sets of process gas control components; The bottom of the vacuum chamber is provided with an opening for combining with the lower cleaning platform module, and together with the vacuum pump module, they form a sealed vacuum chamber for cleaning and removing adhesive. The top of the vacuum chamber is provided with multiple gas distribution holes; The multiple sets of process gas control components are connected to the gas distribution holes and are used to deliver process gas into the sealed vacuum chamber. The array-type microwave plasma excitation device includes multiple microwave excitation units arranged in a predetermined array. Each microwave excitation unit is configured to correspond to the distribution of the gas distribution holes. The array-type microwave plasma excitation device is used to emit microwave energy into the sealed vacuum chamber to generate plasma by exciting the process gas in the sealed vacuum chamber with microwaves.

[0012] Preferably, the lower cleaning platform module includes a heated cleaning platform, a temperature control component, and a vertical lifting component; The vertical lifting assembly is driven by the heating and cleaning platform, so as to drive the heating and cleaning platform to move vertically. The temperature control component is used to control the heating and cleaning platform to heat up or cool down. The heating and cleaning platform is used to place the carrier plate. The bottom of the heating and cleaning platform is provided with a vacuum extraction hole, which is connected to the vacuum pump module. When the heating and cleaning platform moves vertically, its platform periphery can be sealed and pressed with the bottom opening of the vacuum cavity. Under the action of the vacuum pump module, the vacuum extraction hole forms a closed vacuum chamber for cleaning and removing adhesive.

[0013] Preferably, the temperature control component includes a hot and cold circulation machine, a temperature measuring thermocouple, and a heating liquid channel located inside the heating and cleaning platform; The heating liquid channel has a heating medium inlet and a heating medium outlet. The heating medium inlet and the heating medium outlet are respectively connected to the outlet end and the inlet end of the hot and cold circulation machine through pipelines to form a closed heating medium circulation loop. The hot and cold circulation machine is used to heat up or cool down the circulating heating medium. The temperature-measuring thermocouple is installed on the heating and cleaning platform to measure the temperature of the heating and cleaning platform.

[0014] Preferably, the assembly line module includes a loading assembly line, a picking and unloading assembly line, and an unloading assembly line that are sequentially connected along the axial direction; The feeding end of the feeding line is used to obtain the tray output from the feeding mechanism, and the discharging end of the feeding line is connected to the feeding end of the pick-and-place line to transport the tray to the pick-and-place line. The material handling line is equipped with a processing station corresponding to the transplanting module. The material handling line is used to transport the trays from the feeding line to the processing station for the transplanting module to grab, and to receive the cleaned trays placed by the transplanting module at the processing station. The feeding end of the unloading line is connected to the discharging end of the pick-and-place line, and is used to receive the cleaned trays from the pick-and-place line and transport them to the unloading mechanism.

[0015] Preferably, the assembly line module further includes a feeding longitudinal drive component and a discharging longitudinal drive component, the feeding assembly line is provided with a material picking component, and the discharging assembly line is provided with a material pushing component; The longitudinal feeding drive component is connected to the feeding assembly line drive and is used to drive the feeding assembly line to move longitudinally. The longitudinal feeding drive assembly is connected to the feeding production line drive and is used to drive the feeding production line to move longitudinally; The material handling assembly includes a material handling lifting cylinder, a material handling axial motion linear module, and a material handling rod. The material handling rod is driven to the moving end of the material handling axial motion linear module, and the fixed end of the material handling axial motion linear module is driven to the material handling lifting cylinder, so that the material handling rod can move vertically and axially under the drive of the material handling lifting cylinder and the material handling axial motion linear module, respectively. The material handling rod is also provided with a material handling hook, which is used to engage with the mating structure on the carrier plate to extract the carrier plate. The pushing assembly includes a pushing lifting cylinder, a pushing axial motion linear module, and a pushing rod. The pushing rod is driven to the moving end of the pushing axial motion linear module, and the fixed end of the pushing axial motion linear module is driven to the pushing lifting cylinder, so that the pushing rod can move vertically and axially under the drive of the pushing lifting cylinder and the pushing axial motion linear module, respectively. The pushing rod is also provided with a pushing hook, which is used to engage with the mating structure on the carrier to push the carrier.

[0016] Preferably, the transplanting module includes a transplanting longitudinal drive assembly and a gripping robot; The transplanting longitudinal drive assembly is connected to the gripping robot to drive the gripping robot to move along the longitudinal direction between the gripping station corresponding to the material handling line and the placement station corresponding to the heating and cleaning platform. The gripping robot includes a vertical lifting cylinder and a mounting frame. The cylinder body of the vertical lifting cylinder is fixed to the mounting frame, and a carrier plate holder is connected to the piston rod end of the vertical lifting cylinder. The tray holder is provided with at least one pair of opposing axial clamping cylinders in the axial direction. Each axial clamping cylinder has a gripper connected to the piston rod end. Driven by the axial clamping cylinder, the gripper can move towards or away from each other to clamp or release the tray.

[0017] Preferably, the unloading mechanism includes an unloading frame, a second vertical lifting module, and an unloading hopper; The second vertical lifting module is installed on the unloading machine frame and is connected to the unloading hopper drive, so as to drive the unloading hopper to move vertically through the second vertical lifting module; The material feeding hopper has multiple material feeding and storage chambers along the longitudinal direction. Each material feeding and storage chamber has multiple material feeding and storage stations along the vertical direction. The material feeding and storage stations are used to hold trays loaded with cleaned materials. A material feeding detection sensor is installed at both ends of each material feeding and storage chamber along its axial direction to detect the storage position of the tray on the corresponding material feeding and storage station.

[0018] A method for operating a fully automatic microwave plasma cleaning and adhesive removal machine as described above includes the following steps: Step S1) Place multiple trays containing materials to be cleaned into the feeding mechanism and start the degumming machine; In step S2), the assembly line module obtains a carrier tray from the feeding mechanism and transports it to the processing station. Step S3) The transplanting module obtains the carrier tray from the work station to be processed and transports it to the lower cleaning platform module; Step S4) The lower cleaning platform module and the upper cavity module are combined and, under the action of the vacuum pump module, form a sealed vacuum chamber for cleaning and degumming. The upper cavity module generates plasma to clean and degumme the material on the carrier plate. Step S5) After the cleaning and degumming process is completed, the lower cleaning platform module is separated from the upper cavity module, and the transfer module obtains the carrier plate from the lower cleaning platform module and transports it to the production line module. Step S6) The assembly line module conveys the tray carrying the cleaned material to the unloading mechanism; Step S7) Repeat steps S2) to S6) until all the trays in the feeding mechanism have been cleaned.

[0019] Compared with the prior art, the present invention has the following advantages: 1. This invention has a high degree of automation. Through the coordinated operation of the feeding mechanism, the cleaning and degumming mechanism, and the unloading mechanism, combined with the precise transfer of the production line module and the transfer module, this invention realizes the fully automated operation of materials from feeding, cleaning to unloading. There is no need for manual intervention in the intermediate links, which greatly improves production efficiency and reduces the risk of material damage caused by human operation errors.

[0020] 2. The feeding bin of the feeding mechanism and the unloading bin of the unloading mechanism of the present invention both adopt a multi-row, multi-layer structure, which can store more materials at the same height, reduce the frequency of material replenishment and retrieval in the batch production process, further improve the continuous production capacity, and are suitable for large-scale batch production scenarios.

[0021] 3. This invention employs an array-type microwave plasma excitation device, which can precisely control the emission and transmission of microwave energy, enabling the process gas to be fully excited and generate high-density, uniformly distributed plasma. At the same time, the heating and cleaning platform achieves precise temperature control through a hot and cold circulation machine, combined with a sealed vacuum environment, to ensure uniform cleaning and degumming of all parts of the material, thereby improving the cleaning quality.

[0022] 4. The various mechanisms of this invention are centrally controlled by an industrial computer, which realizes precise coordination of processes such as feeding, conveying, cleaning, cooling and unloading. The process is smooth and can realize continuous production, effectively meeting the high-efficiency needs of industrial production.

[0023] 5. This invention is equipped with comprehensive control buttons (including an emergency stop button) and detection sensors, allowing operators to easily control the equipment operation. At the same time, the detection sensors can monitor the material placement status in real time, preventing the equipment from starting when the material is not in place, thus improving the safety and reliability of the equipment operation. Attached Figure Description

[0024] Appendix Figure 1 This is a schematic diagram of the structure of the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 2 This is a schematic diagram of the structure of the fully automatic microwave plasma cleaning and adhesive removal machine of the present invention (with part of the frame removed). Appendix Figure 3 This is a schematic diagram of the feeding mechanism in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 4 This is a rear view of the feeding mechanism in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 5 This is a front view of the upper cavity module in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 6 This is a schematic diagram of the bottom structure of the upper cavity module in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 7 This is a schematic diagram of the lower cleaning platform module in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 8 This is a schematic diagram of the bottom structure of the heating cleaning platform in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 9 This is a cross-sectional view of the heating and cleaning platform in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 10 This is a schematic diagram of the production line module in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 11 This is a schematic diagram of the material handling component in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 12 This is a schematic diagram of the transfer module in the fully automatic microwave plasma cleaning and degumming machine of the present invention; Appendix Figure 13 For the appendix Figure 12 Enlarged diagram of point A in the diagram; Appendix Figure 14 This is a flowchart illustrating the working method of the fully automatic microwave plasma cleaning and degumming machine of the present invention.

[0025] Explanation of reference numerals in the attached drawings: 1. Feeding mechanism; 101. First vertical lifting module; 1011. Motor; 1012. Ball screw; 1013. Guide shaft; 1014. Feeding hopper; 102. Feeding and storage station; 103. Feeding detection sensor; 104. Cleaning and degumming mechanism; 2. Upper cavity module; 201. Vacuum cavity; 2011. Process gas control component; 2012. Mass flow controller; 20121. Control solenoid valve; 20122. Array-type microwave plasma excitation device; 2013. Gas distribution hole; 2014. Lower cleaning platform module; 2021. Heated cleaning platform; 2022. Vertical lifting component; 2023. Temperature measuring thermocouple; 2024. Vacuum pipe; 2025. Heating liquid channel; 2026. Hot and cold circulation machine. Heating medium inlet 20251, heating medium outlet 20252, assembly line module 203, loading assembly line 2031, material handling assembly line 2032, unloading assembly line 2033, loading longitudinal drive assembly 2034, unloading longitudinal drive assembly 2035, material handling assembly 2036, material handling rod 20361, material handling axial motion linear module 20362, material handling lifting cylinder 20363, pushing assembly 2037, transfer module 204, transfer longitudinal drive assembly 2041, gripping robot 2042, vertical lifting cylinder 20421, axial clamping cylinder 20422, gripper 20423, carrier plate holder 20424, vacuum pump module 205, unloading mechanism 3, fan filter module 4. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0028] Furthermore, in describing representative embodiments, the specification may have presented methods and / or processes as a specific sequence of steps. However, the method or process should not be limited to a specific order of steps to the extent that it does not depend on that specific order. As will be understood by those skilled in the art, other orders of steps are also possible. Therefore, the specific order of steps set forth in the specification should not be construed as a limitation on the embodiments. Moreover, the method and / or process should not be limited to the steps performed in the order written; those skilled in the art will readily understand that these orders can be varied and still remain within the spirit and scope of the embodiments of this application.

[0029] First, this specific embodiment provides a fully automatic microwave plasma cleaning and adhesive removal machine, as shown in the attached... Figure 1 To the attached Figure 13 As shown, this includes the direction of material conveying (i.e., attached) Figure 1 The feeding mechanism 1, the cleaning and degumming mechanism 2, and the unloading mechanism 3 are arranged sequentially in the X direction.

[0030] The structure of each mechanism is explained in detail below: In this specific embodiment, as shown in the appendix Figure 3 and attached Figure 4 As shown, the feeding mechanism 1 includes a feeding frame, a first vertical lifting module 101, and a feeding hopper 102.

[0031] Specifically, the fixed end of the first vertical lifting module 101 is mounted on the loading frame, and its moving end is connected to the loading hopper 102 for driving. This allows the first vertical lifting module 101 to drive the loading hopper 102 vertically (i.e., along the attached...) Figure 1The Z-direction movement allows the pallets at different vertical heights within the loading hopper 102 to correspond to the positions of the material handling components 2036 on the loading assembly line 2031. The first vertical lifting module 101 employs a screw lifting mechanism where a motor 1011 drives a ball screw 1012, and guides the vertical movement of the loading hopper 102 via guide shafts 1013 on both sides.

[0032] Specifically, along the longitudinal direction of the feeding hopper 102 (i.e., attached) Figure 1 The feed hopper 102 has multiple feeding and storage chambers (in the Y direction), and in this specific embodiment, there are three feeding and storage chambers. Each feeding and storage chamber has multiple feeding and storage stations 103 arranged in the vertical direction. The feeding and storage stations 103 are used to hold trays loaded with materials to be cleaned. Thus, multiple trays can be placed in each feeding hopper 102, which greatly reduces the frequency of material replenishment during the production process.

[0033] For example, a feeding detection sensor 104 is installed at both ends of the axial direction of each feeding and storage chamber to detect the storage position of the pallet on the corresponding feeding and storage station 103. If the pallet is not completely placed into the storage station, the feeding detection sensor 104 will automatically alarm and prevent the equipment from starting after detecting the situation, thereby avoiding the impact of improper material placement on subsequent processes. In addition, control buttons are also provided on the feeding frame, including an up button, a down button, and an emergency stop button, so that the operator can control the feeding hopper 102 to stay at an appropriate height for feeding operations.

[0034] In summary, the feeding hopper 102 of the feeding mechanism 1 is equipped with multiple feeding storage chambers arranged longitudinally, and multiple feeding storage stations 103 are stacked vertically within each feeding storage chamber, thus forming a compact three-dimensional storage matrix. This structure, within a limited equipment footprint, achieves a significant increase in the number of pallets that can be stored, greatly improving the material carrying capacity and space utilization of a single machine, providing a solid material foundation for continuous and batch production operations. Simultaneously, the first vertical lifting module 101 drives the feeding hopper 102 in precise lifting motion, enabling it to quickly and accurately align any layer of storage stations with the feeding line 2031. Furthermore, feeding detection sensors 104 are installed at both ends of each feeding storage chamber, forming a dual-endpoint monitoring system for the pallet storage status of each storage station. This design effectively detects whether the pallets are fully positioned, whether they are tilted, or whether there are gaps, eliminating mechanical interference, transmission failures, or empty process operations caused by abnormal material positions, thereby ensuring the smoothness, stability, and high reliability of the fully automated feeding process.

[0035] In this specific embodiment, as shown in the appendix Figure 2As shown, the cleaning and degumming mechanism 2 includes an upper cavity module 201, a lower cleaning platform module 202, a vacuum pump module 205, a production line module 203, and a transfer module 204.

[0036] Among them, there are pictures attached. Figure 5 and attached Figure 6 As shown, the upper cavity module 201 is used to generate plasma, including a vacuum cavity 2011, an array-type microwave plasma excitation device 2013, and multiple sets of process gas control components 2012.

[0037] Specifically, the bottom of the vacuum chamber 2011 is provided with an opening for closing with the lower cleaning platform module 202, and together with the vacuum pump module 205, they form a closed vacuum chamber for cleaning and removing adhesive. The top of the vacuum chamber 2011 is provided with multiple gas distribution holes 2014; Multiple process gas control components 2012 are connected to gas distribution orifices 2014 for delivering process gas into the sealed vacuum chamber. Each process gas control component 2012 consists of multiple MFCs (mass flow controllers 20121) and control solenoid valves 20122. The solenoid valves control the on / off state of the process gas, while the MFCs precisely control the flow rate. The flow rate of the process gas is determined by the process of the product to be cleaned and undergoes process verification before formal use to obtain the optimal process parameters. The solenoid valves and MFCs work together to deliver the mixed process gas into the vacuum chamber 2011, where it diffuses within the sealed vacuum chamber through evenly distributed gas distribution orifices at the top of the vacuum chamber 2011.

[0038] The array-type microwave plasma excitation device 2013 includes multiple microwave excitation units arranged in a predetermined array. Each microwave excitation unit is configured corresponding to the distribution of gas distribution holes 2014. The array-type microwave plasma excitation device 2013 is used to emit microwave energy into a sealed vacuum chamber to generate plasma by exciting the process gas in the sealed vacuum chamber, providing an efficient reaction medium for cleaning and desmearing. Specifically, the array-type microwave plasma excitation device 2013 consists of multiple microwave power sources arranged in an M×N matrix and microwave transmitting antennas connected to them, used to excite and form a high-density and uniformly distributed plasma in the vacuum chamber.

[0039] The aforementioned structure of the upper cavity module 201 makes it a compact and functionally defined module integrating vacuum, gas intake, and microwave excitation. This modular design facilitates quick and reliable sealing and separation with the lower cleaning platform module 202, making equipment maintenance and process chamber cleaning more convenient. Furthermore, by adjusting parameters such as microwave power, gas ratio, and flow rate, this module can flexibly adapt to the cleaning process requirements of different materials and contaminant types, demonstrating excellent process adaptability and scalability. Simultaneously, through the synergistic innovative design of array-based excitation, uniform gas distribution, and vacuum sealing, the core challenges of uniformity, efficiency, and controllability in plasma cleaning are solved.

[0040] In this specific embodiment, the lower cleaning platform module 202 can be molded with the upper cavity module 201, and together with the vacuum pump module 205, they form a sealed vacuum chamber for cleaning and removing adhesive.

[0041] Specifically, as shown in the appendix Figure 7 To the attached Figure 9 As shown, the lower cleaning platform module 202 includes a heated cleaning platform 2021, a temperature control component, and a vertical lifting component 2022.

[0042] The vertical lifting component 2022 is connected to the heating and cleaning platform 2021 to drive the heating and cleaning platform 2021 to move vertically. Specifically, the vertical lifting component 2022 adopts a structure in which a motor drives an electric push rod, and the electric push rod pushes the heating and cleaning platform 2021 to rise and fall and close or separate from the upper cavity module 201.

[0043] In this specific embodiment, the temperature control component is used to control the heating and cleaning platform 2021 to heat up or cool down. The temperature control component includes a hot and cold circulation machine 2026, a temperature measuring thermocouple 2023, and a serpentine heating liquid channel 2025 disposed inside the heating and cleaning platform 2021.

[0044] The heating liquid channel 2025 has a heating medium inlet 20251 and a heating medium outlet 20252. The heating medium inlet 20251 and the heating medium outlet 20252 are respectively connected to the outlet end and the inlet end of the hot and cold circulation machine 2026 through pipelines to form a closed heating medium circulation loop. The hot and cold circulation machine 2026 is used to heat up or cool down the circulating heating medium and to make the heating medium circulate inside the hot and cold circulation machine 2026 to achieve heat conduction for heating or cooling, thereby providing a stable reaction environment for cleaning and degumming.

[0045] Thermocouple 2023 is installed on heating and cleaning platform 2021 to measure the temperature of heating and cleaning platform 2021. The hot and cold circulation machine 2026 adjusts the temperature of heating medium by measuring the temperature of heating medium through thermocouple 2023 to ensure accurate and controllable temperature.

[0046] Specifically, the heating and cleaning platform 2021 is used to place the carrier tray. The bottom of the heating and cleaning platform 2021 is provided with a vacuum extraction hole, which is connected to the vacuum pump module 205 through the vacuum pipe 2024. When the heating and cleaning platform 2021 moves vertically, its platform periphery can be sealed and pressed with the bottom opening of the vacuum chamber 2011, and a closed vacuum chamber for cleaning and removing adhesive is formed under the action of the vacuum pump module 205 through the vacuum extraction hole.

[0047] After the transfer module 204 places the tray containing the material to be cleaned onto the platform 2021, the vertical lifting component 2022 is activated, driving the heating cleaning platform 2021 to rise vertically. This ensures that the perimeter of the platform 2021 is precisely aligned with the bottom opening of the vacuum chamber 2011 in the upper cavity module 201, and sufficient pressure is applied to achieve a sealed press, forming an initial sealed chamber. Then, the vacuum pump module 205 immediately evacuates the newly formed sealed chamber through the vacuum extraction port at the bottom of the heating cleaning platform 2021, quickly establishing the sealed vacuum chamber required for the process. Simultaneously, the temperature control component begins operation: the hot and cold circulation machine 2026 heats the heating medium (such as heat transfer oil or water) to the set temperature according to the preset process formula, and circulates it through the heating liquid channel 2025 inside the heating cleaning platform 2021, ensuring that the entire platform is heated evenly and rapidly. Thermocouple 2023 monitors the platform temperature in real time and feeds the data back to the control system, achieving closed-loop precise temperature control. During the cleaning and degumming process, the heated cleaning platform 2021 maintains a stable process temperature, ensuring that the plasma chemical reaction takes place under optimal thermodynamic conditions. Its stable support ensures the material remains stationary in the plasma environment. After the process is completed, the hot and cold circulation machine 2026 switches modes, injecting cooling medium into the heating liquid channel 2025, causing the heated cleaning platform 2021 to cool down rapidly and uniformly according to the program. Once a safe temperature is reached, gas is introduced into the chamber to break the vacuum, and the vertical lifting component 2022 drives the platform to descend, separating it from the upper cavity module 201. The transfer module 204 then removes the processed tray, and the heated cleaning platform 2021 is ready to receive the next material.

[0048] In this specific embodiment, the assembly line module 203 is used to convey a tray carrying the material to be cleaned between the feeding mechanism 1 and the cleaning and degumming mechanism 2, and to convey the cleaned tray between the cleaning and degumming mechanism 2 and the unloading mechanism 3.

[0049] Specifically, as shown in the appendix Figure 10 and attached Figure 11 As shown, the assembly line module 203 includes a loading assembly line 2031, a pick-and-place assembly line 2032, and a unloading assembly line 2033 connected sequentially along the axial direction. The inlet end of the loading assembly line 2031 is used to pick up the tray output from the loading mechanism 1, and the outlet end of the loading assembly line 2031 is connected to the inlet end of the pick-and-place assembly line 2032 to transport the tray to the pick-and-place assembly line 2032. The pick-and-place assembly line 2032 is provided with a connection to the transfer module 204. The corresponding processing station, the pick-and-place line 2032, is used to transport the trays from the loading line 2031 to the processing station for the transfer module 204 to grab, and to receive the cleaned trays placed by the transfer module 204 at the processing station; the feeding end of the unloading line 2033 is connected to the discharging end of the pick-and-place line 2032, and is used to receive the cleaned trays from the pick-and-place line 2032 and transport them to the unloading mechanism 3.

[0050] Specifically, the assembly line module 203 also includes a feeding longitudinal drive component 2034 and a discharging longitudinal drive component 2035. The feeding assembly line 2031 is equipped with a material picking component 2036, and the discharging assembly line 2033 is equipped with a material pushing component 2037. The feeding longitudinal drive component 2034 is driven and connected to the feeding assembly line 2031, and is used to drive the feeding assembly line 2031 to move longitudinally. The feeding longitudinal drive component 2034 is a linear module, used to achieve positional docking between the feeding assembly line 2031 and the feeding mechanism 1. The unloading longitudinal drive component is driven and connected to the unloading assembly line 2033, and is used to drive the unloading assembly line 2033 to move longitudinally. The unloading longitudinal drive component is a linear module, used to achieve positional docking between the unloading assembly line 2033 and the unloading mechanism 3.

[0051] For example, see appendix. Figure 11 As shown, the material handling assembly 2036 includes a material handling lifting cylinder 20363, a material handling axial motion linear module 20362, and a material handling rod 20361. The material handling rod 20361 is driven to the moving end of the material handling axial motion linear module 20362, and the fixed end of the material handling axial motion linear module 20362 is driven to the material handling lifting cylinder 20363, so that the material handling rod 20361 can move vertically and axially respectively under the drive of the material handling lifting cylinder 20363 and the material handling axial motion linear module 20362. The material handling rod 20361 is also provided with a material handling hook, which is used to engage with the mating structure on the carrier to pick up the carrier.

[0052] The pushing assembly 2037 includes a pushing lifting cylinder, a pushing axial motion linear module, and a pushing rod. The pushing rod is driven and connected to the moving end of the pushing axial motion linear module, and the fixed end of the pushing axial motion linear module is driven and connected to the pushing lifting cylinder. This allows the pushing rod to move vertically and axially under the drive of the pushing lifting cylinder and the pushing axial motion linear module, respectively. A pushing hook is also provided on the pushing rod, which engages with a mating structure on the carrier plate to push the carrier plate. The structure of the pushing assembly 2037 is the same as that of the picking assembly 2036, and the two are symmetrically arranged; therefore, no further description is given in this specific embodiment.

[0053] When the assembly line module 203 of this solution is working, the longitudinal drive component 2034 (linear module) is first activated, driving the entire assembly line 2031 to move longitudinally (in the direction of equipment depth), so that the material picking component 2036 at its front end is precisely aligned with the designated material storage station 103 in the material storage chamber of the material feeding mechanism 1. Then, the material picking lifting cylinder 20363 drives the entire material picking axial motion linear module 20362 and the material picking rod 20361 to descend, so that the material picking hook on the material picking rod 20361 reaches a height that matches the mating structure (such as a mouth-shaped structure) on the carrier. At this time, the material picking axial motion linear module 20362 is activated, driving the material picking rod 20361 to extend horizontally, so that the material picking hook inserts into or hooks the mating structure of the carrier. The material picking rod 20361 retracts horizontally, smoothly pulling the carrier out of the material storage station 103 and placing it on the conveyor surface of the assembly line 2031. The lifting cylinder 20363 rises and resets, disengaging the picking assembly 2036 from the carrier tray. The conveying mechanism (such as a conveyor belt) of the loading line 2031 is activated, longitudinally transporting the carrier tray to its end, i.e., the junction with the picking and unloading line 2032. At the end of the loading line 2031, the carrier tray is smoothly transferred to the picking and unloading line 2032 through friction or power exchange. The picking and unloading line 2032 continues to transport the carrier tray to the waiting station, precisely stopping at this location. This station is located directly below the gripping robot 2042 of the transfer module 204. At this time, driven by the longitudinal driving assembly 2034, the loading line 2031 can return to its original position or move to the next loading and storage station 103 to prepare for the next picking cycle. The material handling line 2032 delivers a pallet to the processing station, where it awaits and is picked up by the transfer module 204 and transported to the heating and cleaning platform 2021 for cleaning. After cleaning, the transfer module 204 retrieves the pallet from the heating and cleaning platform 2021 and places it back onto the material handling line 2032 at the processing station. The material handling line 2032 restarts, longitudinally conveying the cleaned pallet from its processing station to the end, i.e., the junction with the unloading line 2033. The pallet is then transferred to the unloading line 2033. The longitudinal unloading drive component drives the unloading line 2033 to move longitudinally, aligning its rear pusher component 2037 with the target unloading storage station in the unloading mechanism 3, and placing the cleaned pallet at the target unloading storage station. Thus, this line module 203 is a highly specialized and automated material handling system. It is not only the artery connecting the three major modules of feeding, cleaning, and unloading, but also an intelligent loading and unloading worker that actively performs precise storage, retrieval, scheduling, and positioning. Its working process perfectly supports the fully automated production cycle of the equipment from batch feeding to single-piece sequential processing and then to batch unloading, and is the key guarantee for the whole machine to achieve high productivity and unmanned operation.

[0054] In this specific embodiment, the transfer module 204 is used to transport the carrier tray between the production line module 203 and the lower cleaning platform module 202.

[0055] Specifically, as shown in the appendix Figure 12 and attached Figure 13 As shown, the transplanting module 204 includes a transplanting longitudinal drive component 2041 and a gripping robot 2042; the transplanting longitudinal drive component 2041 is driven to connect with the gripping robot 2042 so as to drive the gripping robot 2042 to move along the longitudinal direction between the gripping station corresponding to the material handling line 2032 and the placement station corresponding to the heating and cleaning platform 2021; specifically, the transplanting longitudinal drive component 2041 is a linear module.

[0056] The gripping robot 2042 includes a vertical lifting cylinder 20421 and a mounting frame. The cylinder body of the vertical lifting cylinder 20421 is fixed to the mounting frame. The piston rod end of the vertical lifting cylinder 20421 is connected to a tray gripper 20424. The tray gripper 20424 is provided with at least a pair of opposing axial clamping cylinders 20422 in the axial direction. The piston rod end of each axial clamping cylinder 20422 is connected to a gripper 20423. Driven by the axial clamping cylinder 20422, the gripper 20423 can move towards or away from each other to clamp or release the tray.

[0057] When it is necessary to transfer the pallet located at the processing station on the material handling line 2032 to the heating and cleaning platform 2021, the longitudinal transfer drive component 2041 (linear module) is activated first, driving the entire gripping robot 2042 longitudinally (equipment depth is attached). Figure 1The axial clamping cylinder 20422 moves in the Y direction until its tray holder 20424 is precisely positioned directly above the processing station of the material handling line 2032. After positioning, the axial clamping cylinder 20422 drives the two grippers 20423 to move in opposite directions, and then the vertical lifting cylinder 20421 actuates, extending its piston rod to push the entire tray holder 20424 vertically downward. When the grippers 20423 on the tray holder 20424 descend to the height aligned with the special mating structures (such as bayonets) on both sides of the tray, the descent stops. At this time, the axial clamping cylinder 20422 actuates, driving the two grippers 20423 to move in opposite directions along the axial direction, firmly clamping the tray. After the grip is secure, the piston rod of the vertical lifting cylinder 20421 retracts, vertically lifting the tray holder 20424 with the tray clamped to a safe transport height, so that the tray is completely removed from the conveyor surface of the material handling line 2032. Subsequently, the longitudinal drive assembly 2041 is activated again, driving the gripping robot 2042 and its gripped tray to move longitudinally to the placement station above the heating and cleaning platform 2021. Upon reaching the placement station, the vertical lifting cylinder 20421 slowly extends again, driving the tray holder 20424 to descend vertically. Once the tray is stably placed on the platform positioning device of the heating and cleaning platform 2021, the axial clamping cylinder 20422 drives the gripper 20423 to move in the opposite direction, releasing the gripper on the tray. Then, the vertical lifting cylinder 20421 retracts, raising the gripper 20423 and completely detaching it from the tray. At this point, the heating and cleaning platform 2021 rises and closes with the upper cavity module 201, initiating the vacuum plasma cleaning and degumming process. After the cleaning process is completed and the heating platform is lowered and reset, the transfer module 204 moves to the placement station above the heating and cleaning platform 2021, lowers and picks up the cleaned tray, then lifts and transfers the tray back to the waiting station of the material handling line 2032, and then lowers and accurately releases the tray onto the material handling line 2032.

[0058] In this specific embodiment, the unloading mechanism 3 includes an unloading frame, a second vertical lifting module, and an unloading hopper. The second vertical lifting module is mounted on the unloading frame and is driven to connect with the unloading hopper, so as to drive the unloading hopper to move vertically. The second vertical lifting module adopts a screw lifting mechanism in which a motor drives a ball screw, and guides the vertical movement of the unloading hopper through guide shafts on both sides.

[0059] The material hopper has multiple material storage chambers along the longitudinal direction. In this specific embodiment, there are three material storage chambers. Each material storage chamber has multiple material storage stations along the vertical direction. The material storage stations are used to hold trays loaded with cleaned materials.

[0060] A material feeding detection sensor is installed at both ends of the axial direction of each material feeding and storage chamber to detect the storage position of the pallet on the corresponding material feeding and storage station.

[0061] The overall structure of the feeding mechanism 3 is the same as that of the feeding mechanism 1, so the feeding mechanism will not be described in detail in this specific embodiment.

[0062] In this specific embodiment, the vacuum pump module 205 in the glue remover provides a vacuum environment for the equipment, the chiller module is used to cool the equipment, and the hot and cold circulation machine 2026 provides the heating medium required for temperature regulation of the heated cleaning platform 2021. At the same time, an industrial computer and some control buttons are also provided on the outer frame for overall control and operation of the equipment. An FFU (fan filter module 4) is provided on the top of the frame to effectively remove fine particulate matter in the air and ensure that the air quality in the clean room meets the standards.

[0063] In addition, this specific embodiment also provides a working method for the fully automatic microwave plasma cleaning and degumming machine as described above, as shown in the attached figure. Figure 14 As shown, it includes the following steps: Step S1) Place multiple trays containing materials to be cleaned into the feeding mechanism 1 and start the degumming machine. Specifically, the operator places multiple trays containing materials to be cleaned into the feeding storage stations 103 of the feeding storage chamber of the feeding mechanism 1 in sequence, and selects the process formula on the control interface while starting the fully automatic process.

[0064] Step S2) The assembly line module 203 obtains a carrier tray from the loading mechanism 1 and transports it to the processing station. Specifically, the loading assembly line 2031 extracts the carrier tray from the designated loading and storage station 103 through the picking component 2036 and transfers it to the loading assembly line 2031. Then, the loading assembly line 2031 longitudinally transports the carrier tray to the processing station of the picking and unloading assembly line 2032.

[0065] Step S3) The transfer module 204 obtains the carrier tray from the workstation to be processed and transports it to the lower cleaning platform module 202. Specifically, the gripping robot 2042 of the transfer module 204 grabs the carrier tray from the material handling line 2032 and accurately places it on the heated cleaning platform 2021 of the lower cleaning platform module 202.

[0066] In step S4), the lower cleaning platform module 202 and the upper cavity module 201 close together, forming a sealed vacuum chamber for cleaning and degumming under the action of the vacuum pump module 205. The upper cavity module 201 generates plasma to clean and degumme the material on the carrier plate. Specifically, the vertical lifting component 2022 drives the heated cleaning platform 2021 to rise and press it against the upper cavity module 201 to close the mold. The vacuum pump module 205 starts to draw a vacuum to form a sealed vacuum chamber. At the same time, the hot and cold circulation machine 2026 introduces a heating medium into the serpentine heating liquid channel 2025 of the heated cleaning platform 2021, raising the temperature of the heated cleaning platform 2021 to the process set temperature. The process gas is proportionally introduced into the vacuum chamber 2011 and uniformly dispersed under the control of MFC. The array-type microwave plasma excitation device 2013 excites and generates high-density plasma to clean or degumme the material.

[0067] Step S5) After the cleaning and degumming process is completed, the lower cleaning platform module 202 separates from the upper cavity module 201. The transfer module 204 retrieves the carrier tray from the lower cleaning platform module 202 and transports it to the assembly line module 203. Specifically, after the process is completed, the process gas and microwave are stopped, the hot and cold circulation machine 2026 switches to cooling mode to cool the heated cleaning platform 2021. After reaching a safe temperature, gas is injected into the vacuum chamber to break the vacuum, and the vertical lifting component 2022 descends to separate the heated cleaning platform 2021 from the upper cavity module 201. The robotic arm 2042 of the transfer module 204 picks up the processed carrier tray from the heated cleaning platform 2021 and places it back to the material handling assembly line 2032.

[0068] Step S6) The assembly line module 203 transports the tray containing the cleaned material to the unloading mechanism 3. Specifically, the pick-and-place assembly line 2032 transports the tray longitudinally to the unloading assembly line 2033; the unloading assembly line 2033 pushes the tray into the unloading storage station designated by the unloading mechanism 3 through the pusher component 2037.

[0069] Step S7) Repeat steps S2) to S6) until all trays in the feeding mechanism 1 are cleaned, and then the operator removes the processed material from the unloading mechanism 3.

[0070] Compared with existing technologies, this invention has a high degree of automation. Through the coordinated operation of the feeding mechanism, the cleaning and degumming mechanism, and the unloading mechanism, combined with the precise transfer of the production line module and the transfer module, this invention realizes the fully automated operation of materials from feeding, cleaning to unloading. There is no need for manual intervention in intermediate links, which greatly improves production efficiency and reduces the risk of material damage caused by human error.

[0071] The feeding hopper of the feeding mechanism and the unloading hopper of the unloading mechanism of the present invention both adopt a multi-row, multi-layer structure, which can store more materials at the same height, reduce the frequency of material replenishment and retrieval in the batch production process, further improve the continuous production capacity, and are suitable for large-scale batch production scenarios.

[0072] This invention employs an array-type microwave plasma excitation device, which can precisely control the emission and transmission of microwave energy, enabling the process gas to be fully excited and generate high-density, uniformly distributed plasma. Simultaneously, the heating and cleaning platform achieves precise temperature control through a hot and cold circulation machine, combined with a sealed vacuum environment, ensuring uniform cleaning and degumming of all parts of the material, thus improving the cleaning quality.

[0073] The various mechanisms of this invention are centrally controlled by an industrial computer, achieving precise coordination of processes such as feeding, conveying, cleaning, cooling, and unloading. The process is smooth, enabling continuous production and effectively meeting the high-efficiency requirements of industrial production.

[0074] This invention features comprehensive control buttons (including an emergency stop button) and detection sensors, allowing operators to easily control the equipment. Simultaneously, the detection sensors monitor the material placement status in real time, preventing the equipment from starting before the material is properly placed, thus improving the safety and reliability of the equipment operation.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit the technical solutions. Those skilled in the art should understand that any modifications or equivalent substitutions to the technical solutions of the present invention without departing from the spirit and scope of the present invention should be covered within the scope of the claims of the present invention.

Claims

1. A fully automatic microwave plasma cleaning and adhesive removal machine, characterized in that, It includes a feeding mechanism, a cleaning and degumming mechanism, and a discharging mechanism. The cleaning and degumming mechanism includes an upper cavity module, a lower cleaning platform module, a vacuum pump module, a production line module, and a transfer module. The assembly line module is used to convey a tray carrying the material to be cleaned between the feeding mechanism and the cleaning and degumming mechanism, and to convey a tray that has been cleaned between the cleaning and degumming mechanism and the unloading mechanism. The transplanting module is used to transport the carrier tray between the production line module and the lower cleaning platform module; The upper cavity module is used to generate plasma; The lower cleaning platform module can be combined with the upper cavity module to form a sealed vacuum chamber for cleaning and degumming under the action of the vacuum pump module.

2. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The feeding mechanism includes a feeding frame, a first vertical lifting module, and a feeding hopper; The first vertical lifting module is installed on the loading frame and is connected to the loading hopper drive, so as to drive the loading hopper to move vertically through the first vertical lifting module; The feeding hopper has multiple feeding and storage chambers along the longitudinal direction. Each feeding and storage chamber has multiple feeding and storage stations along the vertical direction. The feeding and storage stations are used to hold trays loaded with materials to be cleaned. A feeding detection sensor is installed at both ends of each feeding and storage chamber along the axial direction to detect the storage position of the pallet on the corresponding feeding and storage station.

3. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The upper cavity module includes a vacuum cavity, an array-type microwave plasma excitation device, and multiple sets of process gas control components. The bottom of the vacuum chamber is provided with an opening for combining with the lower cleaning platform module, and together with the vacuum pump module, they form a sealed vacuum chamber for cleaning and removing adhesive. The top of the vacuum chamber is provided with multiple gas distribution holes; The multiple sets of process gas control components are connected to the gas distribution holes and are used to deliver process gas into the sealed vacuum chamber. The array-type microwave plasma excitation device includes multiple microwave excitation units arranged in a predetermined array. Each microwave excitation unit is configured to correspond to the distribution of the gas distribution holes. The array-type microwave plasma excitation device is used to emit microwave energy into the sealed vacuum chamber to generate plasma by exciting the process gas in the sealed vacuum chamber with microwaves.

4. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The lower cleaning platform module includes a heated cleaning platform, a temperature control component, and a vertical lifting component; The vertical lifting assembly is driven by the heating and cleaning platform, so as to drive the heating and cleaning platform to move vertically. The temperature control component is used to control the heating and cleaning platform to heat up or cool down. The heating and cleaning platform is used to place the carrier plate. The bottom of the heating and cleaning platform is provided with a vacuum extraction hole, which is connected to the vacuum pump module. When the heating and cleaning platform moves vertically, its platform periphery can be sealed and pressed with the bottom opening of the vacuum cavity. Under the action of the vacuum pump module, the vacuum extraction hole forms a closed vacuum chamber for cleaning and removing adhesive.

5. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 4, characterized in that, The temperature control component includes a hot and cold circulation machine, a temperature measuring thermocouple, and a heating liquid channel located inside the heating and cleaning platform. The heating liquid channel has a heating medium inlet and a heating medium outlet. The heating medium inlet and the heating medium outlet are respectively connected to the outlet end and the inlet end of the hot and cold circulation machine through pipelines to form a closed heating medium circulation loop. The hot and cold circulation machine is used to heat up or cool down the circulating heating medium. The temperature-measuring thermocouple is installed on the heating and cleaning platform to measure the temperature of the heating and cleaning platform.

6. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The assembly line module includes a feeding assembly line, a material handling assembly line, and a material unloading assembly line that are sequentially connected along the axial direction. The feeding end of the feeding line is used to obtain the tray output from the feeding mechanism, and the discharging end of the feeding line is connected to the feeding end of the pick-and-place line to transport the tray to the pick-and-place line. The material handling line is equipped with a processing station corresponding to the transplanting module. The material handling line is used to transport the trays from the feeding line to the processing station for the transplanting module to grab, and to receive the cleaned trays placed by the transplanting module at the processing station. The feeding end of the unloading line is connected to the discharging end of the pick-and-place line, and is used to receive the cleaned trays from the pick-and-place line and transport them to the unloading mechanism.

7. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 6, characterized in that, The assembly line module also includes a feeding longitudinal drive component and a discharging longitudinal drive component. The feeding assembly line is equipped with a material picking component, and the discharging assembly line is equipped with a material pushing component. The longitudinal feeding drive component is connected to the feeding assembly line drive and is used to drive the feeding assembly line to move longitudinally. The longitudinal feeding drive assembly is connected to the feeding production line drive and is used to drive the feeding production line to move longitudinally; The material handling assembly includes a material handling lifting cylinder, a material handling axial motion linear module, and a material handling rod. The material handling rod is driven to the moving end of the material handling axial motion linear module, and the fixed end of the material handling axial motion linear module is driven to the material handling lifting cylinder, so that the material handling rod can move vertically and axially under the drive of the material handling lifting cylinder and the material handling axial motion linear module, respectively. The material handling rod is also provided with a material handling hook, which is used to engage with the mating structure on the carrier plate to extract the carrier plate. The pushing assembly includes a pushing lifting cylinder, a pushing axial motion linear module, and a pushing rod. The pushing rod is driven to the moving end of the pushing axial motion linear module, and the fixed end of the pushing axial motion linear module is driven to the pushing lifting cylinder, so that the pushing rod can move vertically and axially under the drive of the pushing lifting cylinder and the pushing axial motion linear module, respectively. The pushing rod is also provided with a pushing hook, which is used to engage with the mating structure on the carrier to push the carrier.

8. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The transplanting module includes a transplanting longitudinal drive assembly and a gripping robotic arm; The transplanting longitudinal drive assembly is driven by the gripping robot, so that the gripping robot can be driven to move along the longitudinal direction between the gripping station corresponding to the material handling line and the placement station corresponding to the heating and cleaning platform. The gripping robot includes a vertical lifting cylinder and a mounting frame. The cylinder body of the vertical lifting cylinder is fixed to the mounting frame, and a carrier plate holder is connected to the piston rod end of the vertical lifting cylinder. The tray holder is provided with at least one pair of opposing axial clamping cylinders in the axial direction. Each axial clamping cylinder has a gripper connected to the piston rod end. Driven by the axial clamping cylinder, the gripper can move towards or away from each other to clamp or release the tray.

9. The fully automatic microwave plasma cleaning and adhesive removal machine according to claim 1, characterized in that, The unloading mechanism includes an unloading frame, a second vertical lifting module, and an unloading hopper; The second vertical lifting module is installed on the unloading machine frame and is connected to the unloading hopper drive, so as to drive the unloading hopper to move vertically through the second vertical lifting module; The material feeding hopper has multiple material feeding and storage chambers along the longitudinal direction. Each material feeding and storage chamber has multiple material feeding and storage stations along the vertical direction. The material feeding and storage stations are used to hold trays loaded with cleaned materials. A material feeding detection sensor is installed at both ends of each material feeding and storage chamber along its axial direction to detect the storage position of the tray on the corresponding material feeding and storage station.

10. A method for operating a fully automatic microwave plasma cleaning and degumming machine as described in claim 1, characterized in that, Includes the following steps: Step S1) Place multiple trays containing materials to be cleaned into the feeding mechanism and start the degumming machine; In step S2), the assembly line module obtains a carrier tray from the feeding mechanism and transports it to the processing station. Step S3) The transplanting module obtains the carrier tray from the work station to be processed and transports it to the lower cleaning platform module; Step S4) The lower cleaning platform module and the upper cavity module are combined and, under the action of the vacuum pump module, form a sealed vacuum chamber for cleaning and degumming. The upper cavity module generates plasma to clean and degumme the material on the carrier plate. Step S5) After the cleaning and degumming process is completed, the lower cleaning platform module is separated from the upper cavity module, and the transfer module obtains the carrier plate from the lower cleaning platform module and transports it to the production line module. Step S6) The assembly line module conveys the tray carrying the cleaned material to the unloading mechanism; Step S7) Repeat steps S2) to S6) until all the trays in the feeding mechanism have been cleaned.

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