The utility model discloses a
wafer thickness detection device, including feeding storage mechanism, feeding
transfer mechanism, detection mechanism, unloading
transfer mechanism and unloading storage mechanism, feeding storage mechanism, detection mechanism and unloading storage mechanism are sequentially arranged along the unloading direction of
wafer thickness detection device, feeding
transfer mechanism is located between feeding storage mechanism and detection mechanism, and unloading transfer mechanism is located between detection mechanism and unloading storage mechanism, and the detection mechanism includes carousel and thickness
detector, carousel rotation is arranged, and the top edge of carousel is circumferentially distributed with multiple detection sites, and the inside of detection site is provided with the hole for avoiding, and the maximum setting has 5, and a thickness
detector is correspondingly set up in the outside of a detection site, and the detection end of thickness
detector is towards the hole for avoiding of corresponding detection site. The
wafer thickness detection device provided in the scheme is favorable to balance equipment cost and improve the measurement efficiency of wafer thickness.