Diaphragm valve, fluid adjusting device and semiconductor equipment

Abstract

The invention provides a diaphragm valve, a fluid adjusting device and semiconductor equipment, and relates to the field of fluid control, and the diaphragm valve comprises a valve cover, a valve body, a valve rod, a supporting piece, a flexible hinge, a piezoelectric actuator and a diaphragm; a mounting cavity is formed in the valve deck, and the supporting piece, the flexible hinge and the piezoelectric actuator are all arranged in the mounting cavity. A flowing cavity is formed in the valve body, and the valve rod is connected with the diaphragm. The flexible hinge comprises a power arm and a resisting arm, the power arm is in transmission connection with the piezoelectric actuator, the resisting arm is fixedly connected with the valve rod, the supporting piece is arranged between the power arm and the resisting arm, and the supporting piece is a swing fulcrum of the flexible hinge; the piezoelectric actuator is used for driving the power arm to move in the first direction, so that the resisting arm and the valve rod are driven to move in the first direction; the first direction is parallel to the axis direction of the valve rod. The piezoelectric actuator realizes millisecond-level (less than or equal to 5ms) quick on-off response based on an inverse piezoelectric effect. The technical problem of how to shorten the response time of the diaphragm valve is solved.

Description

Technical Field

[0001] This application relates to the field of fluid control, and in particular to a diaphragm valve, a fluid regulating device, and a semiconductor device. Background Technology

[0002] In semiconductor manufacturing processes, critical processes such as wet etching, cleaning, and chemical mechanical polishing place extremely stringent requirements on the precision and immediacy of fluid control. Diaphragm valves, due to their packingless seals and the ultra-high cleanliness and corrosion resistance provided by their isolated structure, have become core control components in systems for delivering high-purity chemicals, gases, and polishing slurries.

[0003] However, existing technologies typically employ pneumatically driven diaphragm valves. These valves operate by using compressed air as power to deform the diaphragm, thereby opening or closing the fluid passage within the valve body and achieving complete isolation between the driving components and the process fluid. Because the compressibility of air in the pneumatic circuit and the damping of the pipeline delay the establishment and release of the pressure signal, the response time of pneumatically driven diaphragm valves is excessively long. Summary of the Invention

[0004] This application discloses a diaphragm valve, a fluid regulating device, and a semiconductor device to solve the technical problem of excessively long response time of pneumatically driven diaphragm valves.

[0005] In a first aspect, this application provides a diaphragm valve, including a valve cover, a valve body, a valve stem, a support member, a flexible hinge, a piezoelectric actuator, and a diaphragm; the valve cover has an internal mounting chamber, and the support member, flexible hinge, and piezoelectric actuator are all disposed within the mounting chamber; the valve body has a flow chamber, and the valve stem is connected to the diaphragm, the valve stem being used to drive the diaphragm to move so that the flow chamber is in a closed state or a flowing state; the flexible hinge includes a drive arm and a resistance arm, the drive arm being drivenly connected to the piezoelectric actuator, the resistance arm being fixedly connected to the valve stem, and the support member being disposed between the drive arm and the resistance arm, the support member being the swing fulcrum of the flexible hinge; the piezoelectric actuator is used to drive the drive arm to move in a first direction, thereby driving the resistance arm and the valve stem to move in the first direction; wherein, the first direction is parallel to the axial direction of the valve stem.

[0006] In this embodiment, the diaphragm valve includes a valve cover, valve body, valve stem, support member, flexible hinge, piezoelectric actuator, and diaphragm. The piezoelectric actuator, flexible hinge, and support member integrated in the valve cover mounting chamber form an all-solid rigid transmission chain. The piezoelectric actuator directly drives the flexible hinge power arm, and the displacement is transmitted frictionlessly to the resistance arm through the support member fulcrum, which drives the valve stem and diaphragm to quickly open and close the flow chamber. Because the piezoelectric actuator in the diaphragm valve is based on the inverse piezoelectric effect, it can achieve direct electro-mechanical energy conversion at the microsecond level. At the same time, by using the elastic deformation of the material to replace the mechanical friction pair through the flexible hinge, it can achieve an ultra-fast response at the millisecond level (≤5ms), which can shorten the response time of the diaphragm valve and improve the on / off switching efficiency of the diaphragm valve.

[0007] In one possible implementation, a displacement sensor is also included; the displacement sensor is fixed in the mounting chamber and spaced apart from the valve stem in the first direction, and the displacement sensor is used to detect the displacement of the valve stem in the first direction.

[0008] In this embodiment, since a displacement sensor is installed in the mounting chamber, the displacement of the valve stem can be monitored in real time, thereby monitoring the changes in valve opening displacement and piezoelectric displacement with factors such as temperature, and realizing closed-loop control.

[0009] In one possible implementation, a first elastic element is also included; the first elastic element is located in the mounting cavity and is used to drive the resistance arm to move in a first direction so that the power arm abuts against one end of the piezoelectric actuator in the first direction.

[0010] In this embodiment, a first elastic element is provided in the mounting chamber. The first elastic element provides driving force upon deformation. Since the first elastic element can drive the resistance arm to move in the first direction, and the support member is positioned between the power arm and the resistance arm, the movement of the resistance arm can drive the power arm to move, causing the power arm to abut against one end of the piezoelectric actuator in the first direction. This maintains a gapless physical contact between the power arm and the piezoelectric actuator, eliminating displacement transmission delays or errors caused by mechanical backlash, thereby achieving rapid transmission from the piezoelectric actuator displacement to the valve stem displacement. Simultaneously, the contact between the power arm and the piezoelectric actuator fixes the position of the piezoelectric actuator.

[0011] In one possible implementation, a second elastic element is further included; the second elastic element is sleeved on the valve stem, and a fixing part is provided at the end of the valve stem away from the flexible hinge. The second elastic element is used to connect with the fixing part to drive the valve stem away from the valve cover in a first direction.

[0012] In this embodiment, since the second elastic element is connected to the fixed part to drive the valve stem away from the valve cover in the first direction, when the piezoelectric actuator loses power, the driving force that drives the valve stem to overcome the restoring force of the second elastic element in the first direction disappears. The restoring force of the second elastic element can drive the valve stem away from the valve cover to close the valve, and the valve remains sealed by the restoring force of the second elastic element.

[0013] In one possible implementation, the support member and the valve cover are integrated into one unit; or, the support member is fixedly connected to the bottom wall of the valve cover. Alternatively, the support is fixedly connected to the side wall of the valve cover.

[0014] In this embodiment, when the support and the valve cover are integrated, the assembly steps can be eliminated and the movement or deformation of the support caused by loose connectors or assembly stress can be eliminated.

[0015] When the support is fixedly connected to the bottom wall of the valve cover, the support can be supported by the bottom wall of the valve cover, thus improving the stability of the support. At the same time, if the support is damaged, it is easy to replace it separately, saving costs.

[0016] When the support is fixedly connected to the side wall of the valve cover, the position of the support is stable because the support is fixed to the side wall of the valve cover. It can make full use of the lateral space of the valve cover, reduce the occupation of the bottom space of the valve cover, and make it easy to replace the support separately when it is damaged, thus saving costs.

[0017] In one possible implementation, the support member has a first contact surface for contacting and supporting the flexible hinge, and the flexible hinge has a second contact surface adapted to the first contact surface.

[0018] In this embodiment, because the support member has a first contact surface and the flexible hinge has a second contact surface that is adapted to the first contact surface, the support member and the flexible hinge are closely fitted and have a stable contact area, ensuring that the flexible hinge is accurately positioned relative to the support member, avoiding slippage between the support member and the flexible hinge, and eliminating motion transmission errors that may be caused by unstable contact between the support member and the flexible hinge.

[0019] In one possible implementation, a gasket is also included; the gasket is located between the power arm and the piezoelectric actuator, and the gasket has a third contact surface and a fourth contact surface, the third contact surface contacting the side surface of the power arm facing the piezoelectric actuator, and the fourth contact surface contacting the side surface of the piezoelectric actuator facing the power arm.

[0020] In this embodiment, a shim with a certain thickness is provided between the power arm and the piezoelectric actuator. This shim compensates for the height difference between the two components. Adjusting the shim thickness allows for adjustment of the initial relative position between the power arm and the piezoelectric actuator, ensuring the flexible hinge maintains a horizontal orientation. The third contact surface of the shim contacts one side of the power arm, and the fourth contact surface contacts one side of the piezoelectric actuator. This ensures that the displacement generated by the piezoelectric actuator is directly applied to the power arm through the surface contact of the shim, avoiding slippage problems caused by point or line contact.

[0021] In one possible implementation, a first groove is provided in the mounting chamber, the first groove being located on one side of the power arm in a first direction, and the first groove is used to avoid the power arm driven by the piezoelectric actuator.

[0022] In this embodiment, because a first groove is provided in the mounting cavity, the first groove can expand the movement space of the power arm on one side in the first direction. Therefore, when the piezoelectric actuator drives the power arm to move to that side, at least part of the power arm can be inserted into the first groove, which can avoid interfering with the movement of the power arm and thus ensure the movement stroke of the power arm.

[0023] In one possible implementation, the support member is fixed to the side of the first groove near the valve stem in the second direction, a portion of the support member away from the flexible hinge in the first direction is located inside the first groove, and a portion of the support member near the flexible hinge in the first direction is located outside the first groove, with the second direction perpendicular to the first direction.

[0024] In this embodiment, since the support member is fixed to the side of the first groove near the valve stem in the second direction, the inner wall of the first groove can limit the support member's movement towards the valve stem, thereby strengthening the structural strength of the support member. Because a portion of the support member is located inside the first groove, the space occupied by the support member in the mounting cavity is reduced, thus decreasing the volume of the valve cover. Because a portion of the support member is located outside the first groove, the normal connection between the support member and the flexible hinge is ensured, allowing the support member to function as the swing fulcrum of the flexible hinge.

[0025] In one possible implementation, a second groove is provided in the mounting cavity. The second groove is located on one side of the resistance arm in the first direction and is used to avoid the resistance arm after it has been driven by the first elastic element.

[0026] In this embodiment, because a second groove is provided in the mounting cavity, the second groove can expand the movement space of the resistance arm on one side in the first direction. Therefore, when the first elastic member drives the resistance arm to move to that side, at least part of the resistance arm can extend into the second groove, which can avoid interfering with the movement of the resistance arm and thus ensure the movement stroke of the resistance arm.

[0027] In one possible implementation, the first elastic element and the piezoelectric actuator are located on the same side of the flexible hinge in the first direction, one end of the first elastic element in the first direction is connected to the valve cover, and the other end of the first elastic element in the first direction abuts against the resistance arm. Alternatively, the first elastic element and the piezoelectric actuator are located on different sides of the flexible hinge in the first direction, with one end of the first elastic element connected to the valve cover in the first direction and the other end of the first elastic element connected to the resistance arm in the first direction.

[0028] In this embodiment, when the first elastic element and the piezoelectric actuator are located on the same side of the flexible hinge in the first direction, since one end of the first elastic element is connected to the valve cover and the other end abuts against the resistance arm, the first elastic element can apply a continuous driving force to the resistance arm. The direction of the driving force is consistent with the output thrust direction of the piezoelectric actuator, thereby eliminating the transmission gap between the power arm and the piezoelectric actuator in advance through the contact between the power arm and the piezoelectric actuator.

[0029] When the first elastic element and the piezoelectric actuator are located on different sides of the flexible hinge in the first direction, since one end of the first elastic element is connected to the valve cover and the other end is connected to the resistance arm, the first elastic element can apply a continuous pulling force to the resistance arm. The direction of the pulling force is consistent with the output thrust direction of the piezoelectric actuator, thereby eliminating the transmission gap between the power arm and the piezoelectric actuator in advance through the contact between the power arm and the piezoelectric actuator.

[0030] In one possible implementation, the distance between the piezoelectric actuator and the valve stem in the second direction is [6, 9] times the distance between the piezoelectric actuator and the support in the second direction, and the second direction is perpendicular to the first direction.

[0031] In this embodiment, the sum of the effective length of the resistance arm and the effective length of the power arm is [6, 9] times the effective length of the power arm, so that the displacement of the piezoelectric actuator is stably amplified into a larger linear displacement of the valve stem through the lever action of the flexible hinge. The linear displacement of the valve stem is increased by 5 to 8 times compared with the displacement of the piezoelectric actuator, which can meet the actual needs of the diaphragm valve.

[0032] The displacement amplification factor is determined by the ratio of the distance between the piezoelectric actuator and the support to the distance between the support and the valve stem. This ratio corresponds to an amplification factor of 5-8 times. This range ensures that the small displacement (usually at the micrometer level) of the piezoelectric actuator is sufficiently amplified to meet the valve stem operation requirements, while avoiding excessive amplification factor that could lead to insufficient output force or a decrease in system stiffness. This balances the valve response speed, sealing performance, and space constraints.

[0033] In one possible implementation, the valve cover is further provided with a limiting member, the piezoelectric actuator is in contact with the inner wall of one side of the mounting chamber in the second direction, and the limiting member is located on the other side of the piezoelectric actuator in the second direction to limit the movement of the piezoelectric actuator in the second direction, which is perpendicular to the first direction.

[0034] In this embodiment, because a limiting member is provided on the valve cover, the limiting member and the inner wall of the mounting chamber can constrain both sides of the piezoelectric actuator, thus preventing the piezoelectric actuator from shifting in the second direction, thereby ensuring that the piezoelectric actuator remains aligned with the power arm.

[0035] Secondly, this application provides a fluid regulating device, including a diaphragm valve as described in the above embodiments.

[0036] In this embodiment, the movement of the valve stem is driven by a piezoelectric actuator and a flexible hinge. The piezoelectric actuator in the diaphragm valve, based on the inverse piezoelectric effect, enables direct electro-mechanical energy conversion at the microsecond level. Simultaneously, the flexible hinge replaces mechanical friction pairs with elastic material deformation, and under the swing fulcrum formed by the support member, the linear displacement of the piezoelectric actuator is transmitted to the valve stem without gaps or wear. Therefore, it can drive the valve stem to move rapidly, switching the flow chamber from a closed state to a flowing state. The entire transmission chain is short, highly rigid, and has minimal friction, thus achieving a rapid opening and closing response at the millisecond level (≤5ms). This shortens the response time of the diaphragm valve, improves its on / off switching efficiency, and enables highly dynamic regulation and control of fluid flow in the fluid regulating device.

[0037] Thirdly, this application provides a semiconductor device, including a fluid regulating device and a device body as provided in the above embodiments, wherein the device body is connected to the fluid regulating device.

[0038] In this embodiment, because the diaphragm valve of the fluid regulating device uses a piezoelectric actuator that can achieve a rapid opening and closing response in milliseconds (≤5ms), the process fluid can be rapidly supplied to the fluid inlet of the main body of the equipment along the pipeline, thereby ensuring that semiconductor manufacturing processes such as etching, deposition, and cleaning are carried out in a controlled fluid environment, meeting the requirements of advanced processes and improving production efficiency. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of the semiconductor device provided in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of the fluid regulating device provided in the embodiments of this application; Figure 3 This is a schematic diagram of the diaphragm valve provided in the embodiments of this application; Figure 4 This is a top view of the diaphragm valve provided in an embodiment of this application; Figure 5 for Figure 3 Sectional view along line AA; Figure 6 for Figure 5 A magnified view of a section at point B.

[0041] Explanation of reference numerals in the attached figures: 3-Semiconductor equipment; 31-Fluid supply device; 32-Fluid regulating device; 33-Reaction chamber; 321 - Mass flow controller; 322 - Diaphragm valve; 323 - Pressure controller; 324 - Filter; 3221 - Main diaphragm valve; 3222 - Branch diaphragm valve; 10-Valve cover; 101-Installation chamber; 102-First groove; 103-Limiting component; 104-Third groove; 105-Second groove; 20 - Valve stem; 201 - Fixing part; 202 - Connecting part; 30 - Support component; 301 - First contact surface; 40 - Flexible hinge; 401 - Power arm; 402 - Resistance arm; 403 - Second contact surface; 4021 - Limit Block; 50-Piezoelectric actuator; 60 - Displacement sensor; 70 - First elastic element; 80 - Second elastic element; 90-Gasket; 901 - Third contact surface; 902 - Fourth contact surface; 100 - Valve body; 1001 - Flow chamber; 1002 - Valve seat; 110 - Piping; 120-diaphragm; 130 - Locking nut. Detailed Implementation

[0042] The diaphragm valve and related components of this application are mainly used in the semiconductor manufacturing field, especially in semiconductor manufacturing scenarios where multiple fluids need to be quickly fed into reaction chambers or a type of fluid needs to be divided into multiple streams and quickly fed into multiple reaction chambers, such as in atomic layer deposition equipment and multi-chamber process equipment.

[0043] To address the technical problem of long response time in existing diaphragm valves, this application discloses a diaphragm valve, a fluid regulating device, and a semiconductor device. The diaphragm valve's piezoelectric actuator, based on the inverse piezoelectric effect, enables direct electro-mechanical energy conversion at the microsecond level, avoiding inertial elements such as gas compression, pipeline delays, and solenoid valve switching in traditional pneumatic systems. Simultaneously, the diaphragm valve's flexible hinge replaces mechanical friction pairs with elastic material deformation. Under the swing fulcrum formed by the diaphragm valve's support components, the linear displacement of the piezoelectric actuator is transmitted to the valve stem without gaps or wear. The entire transmission chain is short, highly rigid, and has minimal friction, thus achieving a rapid opening and closing response at the millisecond level (≤5ms).

[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0045] In the description of this invention, it should be understood that the terms "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this invention.

[0046] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” and “the” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise.

[0047] To enable those skilled in the art to better understand the present application, the present application will be described in detail below with reference to the accompanying drawings and specific embodiments, from the whole to the parts.

[0048] This application provides a semiconductor device; please refer to [link / reference]. Figure 1 , Figure 1 This is a schematic diagram of the semiconductor device provided in an embodiment of this application. The semiconductor device 3 includes a fluid supply device 31, a fluid regulating device 32, and a reaction chamber 33. The fluid supply device 31 is connected to the fluid regulating device 32, and the fluid regulating device 32 is connected to the reaction chamber 33. The fluid supply device 31 is used to supply fluid to the reaction chamber 33. The fluid regulating device 32 is used to meter, mix, purify, and time-sequence switch the fluid in the fluid supply device 31, converting the original fluid into a process fluid with strictly defined concentration, proportion, and timing, and ensuring that there is no particulate contamination or cross-contamination during the transportation process. The reaction chamber 33 is used to provide a closed, clean, and highly controllable environment for wafer processing. It integrates a wafer support base, a gas distribution system, a plasma excitation source, and an exhaust structure linked to a vacuum system. Under set temperature, pressure, plasma state, or photoexcitation conditions, the process fluid undergoes reactions such as thin film deposition, etching, or cleaning on the wafer surface. The uniformity of the internal flow field directly determines the success or failure of the final process and the wafer performance.

[0049] Furthermore, this application provides a fluid regulation device applied to the semiconductor device 3 provided in the above embodiments. Please refer to [link to relevant documentation]. Figure 2 , Figure 2 This is a schematic diagram of the structure of the fluid regulating device 32 provided in an embodiment of this application. Figure 2As shown, the fluid regulating device 32 includes a mass flow controller 321, a diaphragm valve 322, a pressure controller 323, and a filter 324. The diaphragm valve 322 includes a main diaphragm valve 3221 and a branch diaphragm valve 3222. The input end of the main diaphragm valve 3221 is connected to the fluid supply device 31 through a pipeline. The output end of the main diaphragm valve 3221 is connected to the input end of the mass flow controller 321 through a pipeline. The output end of the mass flow controller 321 is connected to the input end of the pressure controller 323 through a pipeline. The output end of the pressure controller 323 is connected to the input end of the branch diaphragm valve 3222 through a pipeline. The output end of the branch diaphragm valve 3222 is connected to the input end of the filter 324 through a pipeline. The output end of the filter 324 is connected to the reaction chamber 33 through a pipeline. The fluid from the fluid supply device 31 is first controlled by the main diaphragm valve 3221 to open and close the main pipeline. Then it flows into the mass flow controller 321 for precise flow measurement and regulation. After that, the fluid enters the pressure controller 323, which dynamically adjusts the valve opening to precisely stabilize the downstream pressure at the set point. Finally, it is quickly switched or flow path switched by the branch diaphragm valve 3222 and then purified by the filter 324 before being output to the reaction chamber 33.

[0050] Furthermore, this application provides a diaphragm valve applied to the fluid regulating device 32 provided in the above embodiments. Please refer to [link to relevant documentation]. Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, the diaphragm valve 322 includes a valve cover 10, a valve body 100, a valve stem 20, a support member 30, a flexible hinge 40, a piezoelectric actuator 50, and a diaphragm 120.

[0051] The valve body 100 can be, but is not limited to, a cube, a cuboid, etc. The valve body 100 can be, but is not limited to, 316L stainless steel, and its dimensions are compatible with the valve cover 10. The valve body 100 contains a flow chamber 1001 and a valve seat 1002 located within the flow chamber 1001. A pipeline 110 communicates with the flow chamber 1001. A diaphragm 120 is connected to the side of the valve stem 20 facing the valve seat 1002. The diaphragm 120 can be, but is not limited to, an arc shape, and its material can be, but is not limited to, a cobalt-chromium-nickel-based alloy, possessing high fatigue strength, corrosion resistance, and elasticity. The valve stem 20 is used to move the diaphragm 120 to bring the flow chamber 1001 into a closed or open state.

[0052] The valve cover 10 has an internal mounting chamber 101, which provides a controllable environment for the valve stem 20, flexible hinge 40, and piezoelectric actuator 50. The mounting chamber 101 has an opening to allow one end of the valve stem 20 facing the valve seat 1002 to extend out of the chamber and connect with the diaphragm 120, thus enabling the valve stem 20 to move along its own axis. The valve cover 10 can be a hollow shell structure. The size of the mounting chamber 101 is sufficient to accommodate the support member 30, flexible hinge 40, piezoelectric actuator 50, and at least part of the valve stem 20. The shape of the valve cover 10 can be, but is not limited to, cylindrical, cuboid, or irregular shapes. Irregular shapes refer to unconventional shapes or combinations of various conventional shapes designed according to actual needs. The valve cover 10 is connected to the valve body 100 of the diaphragm valve 322 via a locking nut 130, so that the valve cover 10 and the diaphragm valve 322 together form the outer shell of the diaphragm valve 322. For ease of understanding of the technical solution of this application, the following description assumes that the valve cover 10 is located above the valve body 100. The valve cover 10 serves as the mounting base for components such as the support member 30, the flexible hinge 40, and the piezoelectric actuator 50, and also provides protection for these components, preventing them from being contaminated by the external environment. The material of the valve cover 10 can be, but is not limited to, 316L stainless steel, which has high corrosion resistance.

[0053] The support member 30 is disposed within the mounting chamber 101. The support member 30 can be disposed on the bottom wall or side wall of the mounting chamber 101. When the support member 30 is disposed on the bottom wall of the mounting chamber 101, it is located between the bottom wall of the mounting chamber 101 and the flexible hinge 40. When the support member 30 is disposed on the side wall of the mounting chamber 101, its bottom is suspended relative to the bottom wall of the mounting chamber 101, and it is also located between the mounting chamber 101 and the flexible hinge 40. The support member 30 can have a cylindrical structure, and its axis is perpendicular to the extension direction of the flexible hinge 40, allowing the flexible hinge 40 to swing around the axis of the support member 30. The material of the support member 30 can be, but is not limited to, tungsten carbide, possessing high hardness, wear resistance, and compressive strength.

[0054] The flexible hinge 40 is located within the mounting chamber 101. Acting as a transmission link, the flexible hinge 40 amplifies the linear displacement of the piezoelectric actuator 50 and transmits it to the valve stem 20 without gaps or wear. The flexible hinge 40 is a one-piece structure with elasticity. It can be, but is not limited to, a rectangular sheet or block structure. The flexible hinge is an integrated transmission structure that achieves micro-oscillation based on elastic bending deformation in locally weak areas of the material. Unlike traditional mechanical hinges with pins, it has the advantages of being gapless and wear-free. The material of the flexible hinge 40 can be, but is not limited to, 17-7PH stainless steel. The flexible hinge 40 includes a drive arm 401 and a resistance arm 402. The drive arm 401 is connected to the piezoelectric actuator 50, and the resistance arm 402 is fixedly connected to the valve stem 20. This fixed connection can be, but is not limited to, adhesive bonding, screw connection, etc.

[0055] Support member 30 is disposed between power arm 401 and resistance arm 402. Flexible hinge 40 is divided into power arm 401 and resistance arm 402 along the vertical plane containing the axis of support member 30. The vertical plane containing the axis of support member 30 is adjacent to the attached... Figure 5 The Y-direction is perpendicular to the axis of the piezoelectric actuator 50. The effective length of the power arm 401 is the distance between the vertical plane containing the centerline of the piezoelectric actuator 50 and the vertical plane containing the axis of the support 30. The vertical plane containing the centerline of the piezoelectric actuator 50 is perpendicular to the axis of the support 30. Figure 5 The effective length of the resistance arm 402 is perpendicular to the Y direction, and the distance between the vertical plane containing the axis of the valve stem 20 and the vertical plane containing the axis of the support 30 is perpendicular to the Y direction. Figure 5 The Y-direction is perpendicular to the pivot point of the flexible hinge 40. When the effective length of the power arm 401 is greater than the effective length of the resistance arm 402, the flexible hinge 40 can transfer and reduce the displacement of the piezoelectric actuator 50. When the effective length of the power arm 401 is less than the effective length of the resistance arm 402, the flexible hinge 40 can transfer and amplify the displacement of the piezoelectric actuator 50. Specifically, when the power arm 401 moves upward, the resistance arm 402 moves downward accordingly; when the power arm 401 moves downward, the resistance arm 402 moves upward accordingly.

[0056] The valve stem 20 can be cylindrical, and its material can be, but is not limited to, 17-7PH stainless steel. The valve stem 20 has a connecting portion 202 located at its top, which connects to the resistance arm 402. In one embodiment, the connecting portion 202 has external threads, and the resistance arm 402 has a through hole through which the connecting portion 202 passes. A fastener is connected to the external threads passing through the through hole to fix the resistance arm 402 to the valve stem 20. In another embodiment, the resistance arm 402 has a through hole and a threaded hole communicating with it. The through hole allows the connecting portion 202 to pass through, and a screw is rotatably connected to the threaded hole to tighten the connecting portion 202, thus fixing the resistance arm 402 to the valve stem 20. Furthermore, the connection between the connecting portion 202 and the through hole can be an interference fit to improve the connection effect. The bottom of the valve stem 20 is connected to a diaphragm 120. The valve body 100 is provided with a flow chamber 1001 and a valve seat 1002 located in the flow chamber 1001. The valve stem 20 is used to drive the diaphragm 120 to move so that the flow chamber 1001 is in a closed state or a flow state.

[0057] The piezoelectric actuator 50 is located within the mounting chamber 101. The piezoelectric actuator 50 can rapidly extend upon input voltage and retract upon voltage removal, directly, rapidly, and precisely converting input electrical energy into its own linear displacement. The mounting chamber 101 restricts the displacement of the top of the piezoelectric actuator 50, ensuring that the displacement of the piezoelectric actuator 50 is at the end facing the flexible hinge 40. The piezoelectric actuator 50 is in direct or indirect contact with the top surface of the flexible hinge 40, and the displacement of the piezoelectric actuator 50 forces the flexible hinge 40 to swing around the axis of the support member 30. The piezoelectric actuator 50 can be a stacked piezoelectric ceramic actuator, where multiple thin piezoelectric ceramic sheets are stacked. The displacement of the piezoelectric actuator 50 is achieved through the expansion and contraction of these sheets. In this embodiment, the displacement range of the piezoelectric actuator 50 is set to [0, 100] μm, and the shape of the piezoelectric actuator 50 can be a cuboid. When a voltage signal is applied, the piezoelectric material inside the piezoelectric actuator 50 generates an inverse piezoelectric effect, causing the piezoelectric actuator 50 to stretch and deform in a first direction, driving the power arm 401 to move in the first direction, thereby driving the resistance arm 402 and the valve stem 20 to move in the first direction. The first direction is as shown in the attached diagram. Figure 5 The direction indicated by X in the figure is parallel to the axis of valve stem 20.

[0058] When in operation, a voltage signal is applied, the piezoelectric actuator 50 extends, pushing the power arm 401 downward (positive X direction), and the flexible hinge 40 swings around the axis of the support 30, causing the resistance arm 402 to move upward (negative X direction), thereby driving the valve stem 20 and diaphragm 120 to rise and open the valve; after the voltage is removed, the piezoelectric actuator 50 retracts and resets under the action of spring or fluid pressure, thus closing the valve.

[0059] In this embodiment, the valve cover 10 of the diaphragm valve 322 has an installation chamber 101 inside. The support member 30, the flexible hinge 40, and the piezoelectric actuator 50 are all disposed in the installation chamber 101. The flexible hinge 40 includes a power arm 401 and a resistance arm 402. The power arm 401 is connected to the piezoelectric actuator 50 for transmission, and the resistance arm 402 is fixedly connected to the valve stem 20. The support member 30 is disposed between the power arm 401 and the resistance arm 402 as the swing fulcrum of the flexible hinge 40. The piezoelectric actuator 50 is used to drive the power arm 401 to move in a first direction, so that the resistance arm 402 of the flexible hinge 40 moves in the first direction, thereby driving the valve stem 20 to move in the first direction. The valve cover 10 houses the integrated piezoelectric actuator 50, flexible hinge 40, and support 30, forming a fully solid rigid transmission chain. The piezoelectric actuator 50 directly drives the power arm 401 of the flexible hinge 40, which transmits displacement frictionlessly to the resistance arm 402 via the fulcrum of the support 30. This drives the valve stem 20 and the diaphragm to quickly open and close the flow chamber 1001. Because the piezoelectric actuator 50 in the diaphragm valve 322 is based on the inverse piezoelectric effect, it can achieve direct electro-mechanical energy conversion at the microsecond level. At the same time, by using the elastic deformation of the material to replace the mechanical friction pair through the flexible hinge 40, it can achieve an ultra-fast response at the millisecond level (≤5ms), which can shorten the response time of the diaphragm valve 322 and improve the on / off switching efficiency of the diaphragm valve 322. Meanwhile, by using piezoelectric actuator 50 and flexible hinge 40 together, the piezoelectric actuator 50 can be controlled by the magnitude of the voltage value to generate a corresponding displacement, which in turn drives the valve stem 20 to move through the flexible hinge 40, so that the valve has a corresponding opening degree. The Cv value can be continuously adjusted online by the continuous change of the voltage value, without manual adjustment or additional tooling, which can improve the problem of inconvenient online adjustment of Cv value in the prior art.

[0060] In one possible implementation, the diaphragm valve 322 further includes a displacement sensor 60, which is fixed within the mounting chamber 101. This fixing method can be, but is not limited to, adhesive bonding or screw connection. The displacement sensor 60 is positioned opposite to the valve stem 20 in the first direction, and the two are spaced apart in that direction. The distance between them can be adjusted according to actual needs, ensuring that it does not interfere with the movement of the valve stem 20 in the first direction. The displacement sensor 60 can be a capacitive displacement sensor or a photoelectric sensor. When the valve stem 20 moves in the first direction, the distance between the displacement sensor 60 and the valve stem 20 changes. This change in distance causes a change in the capacitance value of the displacement sensor 60, thereby detecting the displacement of the valve stem 20 in the first direction. If the position change reaches 5%, causing the process flow rate to not meet requirements, an alarm signal can be set. Process personnel can adjust the drive voltage to restore the valve to the same closed and open position, ensuring consistent process flow.

[0061] In this embodiment, since a displacement sensor 60 is installed in the installation chamber 101, the displacement of the valve stem 20 can be monitored in real time by the displacement sensor 60, thereby monitoring the changes in valve opening displacement and piezoelectric displacement with factors such as temperature, and realizing closed-loop control of the valve Cv value during long-term use.

[0062] Please continue reading. Figure 5 and Figure 6 In one possible implementation, a first elastic element 70 is also included. The first elastic element 70 may be, but is not limited to, a spring, and has a helical structure. The first elastic element 70 is located within the mounting chamber 101 and is used to drive the resistance arm 402 to move in a first direction, so that the power arm 401 abuts against one end of the piezoelectric actuator 50 in the first direction. The size of the first elastic element 70 can be adjusted according to actual needs, as long as the above-mentioned purpose is achieved.

[0063] In this embodiment, a first elastic element 70 is provided in the mounting chamber 101. The first elastic element 70, after deformation, provides a driving force. Since the first elastic element 70 can drive the resistance arm 402 to move downwards in the first direction, and the support member 30 is disposed between the power arm 401 and the resistance arm 402, the movement of the resistance arm 402 can drive the power arm 401 to move upwards, causing the power arm 401 to abut against one end of the piezoelectric actuator 50 in the first direction. This maintains a gapless physical contact between the power arm 401 and the piezoelectric actuator 50, eliminating displacement transmission delays or errors caused by mechanical clearances, thereby achieving rapid transmission from the displacement of the piezoelectric actuator 50 to the displacement of the valve stem 20. Simultaneously, the abutment between the power arm 401 and the piezoelectric actuator 50 fixes the position of the piezoelectric actuator 50.

[0064] Please continue reading. Figure 5 and Figure 6 In one possible implementation, a second elastic element 80 is also included. The second elastic element 80 may be, but is not limited to, a spring, and has a helical structure. The diameter of the second elastic element 80 should be larger than the diameter of the valve stem 20, so that the second elastic element 80 can be sleeved on the valve stem 20. The valve stem 20 has a fixing part 201 at the end away from the flexible hinge 40. The upper end of the second elastic element 80 may be configured to abut against the outer shell of the diaphragm valve 322, and the lower end of the second elastic element 80 may be configured to connect to or abut against the fixing part 201. The second elastic element 80 is always in a compressed state, used to drive the valve stem 20 away from the valve cover 10 in a first direction.

[0065] In this embodiment, since the second elastic member 80 abuts against the fixed part 201 to drive the valve stem 20 away from the valve cover 10 in the first direction, when the piezoelectric actuator 50 is de-energized, the driving force that drives the valve stem 20 to overcome the restoring force of the second elastic member 80 in the first direction disappears. The restoring force of the second elastic member 80 can drive the valve stem 20 away from the valve cover 10 to close the valve, and the valve remains sealed by the restoring force of the second elastic member 80.

[0066] Please continue reading. Figure 5 and Figure 6 .

[0067] In one possible implementation, the support member 30 and the valve cover 10 are integrally formed; or the support member 30 is fixedly connected to the bottom wall of the valve cover 10, and this connection method can be, but is not limited to, bonding, welding, screw connection, etc.; or the support member 30 is fixedly connected to the side wall of the valve cover 10, and this connection method can be, but is not limited to, bonding, welding, screw connection, etc. The support member 30 may be provided with protrusions or crossbeams. When the support member 30 is a protrusion, it can increase the contact area with the inner wall of the valve cover 10 and improve the stability of the support member 30. When the support member 30 is a crossbeam, it can provide more space for the rotation of the flexible hinge 40 and increase the range of rotation of the flexible hinge 40.

[0068] In this embodiment, when the support member 30 and the valve cover 10 are integrated, the support member 30 can be integrated with the bottom wall of the mounting chamber 101, thereby improving the structural strength of the support member 30. Since the support member 30 and the valve cover 10 are integrated together, the assembly steps can be eliminated, and the movement or deformation of the support member 30 caused by loose connecting parts or assembly stress can be eliminated.

[0069] When the support member 30 is fixedly connected to the bottom wall of the valve cover 10, the support member 30 can be supported by the bottom wall of the valve cover 10, thus improving the stability of the support member 30. At the same time, the support member 30 can be easily replaced separately when it is damaged, saving costs.

[0070] When the support member 30 is fixedly connected to the side wall of the valve cover 10, the position of the support member 30 can be stabilized because the support member 30 is fixed to the side wall of the valve cover 10. The lateral space of the valve cover 10 can be fully utilized, reducing the occupation of the bottom space of the valve cover 10. At the same time, if the support member 30 is damaged, it is easy to replace the support member 30 separately, saving costs.

[0071] Please continue reading. Figure 5 and Figure 6 In one possible implementation, the support member 30 is provided with a first contact surface 301, which may, but is not limited to, an arc surface. The first contact surface 301 is used to contact and support the flexible hinge 40. The flexible hinge 40 is provided with a second contact surface 403 adapted to the first contact surface 301. The second contact surface 403 may, but is not limited to, an arc surface. The second contact surface 403 can be formed by machining a groove on the flexible hinge 40. The first contact surface 301 and the second contact surface 403 can position the flexible hinge 40 and prevent slippage between the support member 30 and the flexible hinge 40, which facilitates the assembly of the flexible hinge 40 and the support member 30.

[0072] In this embodiment, because the support member 30 is provided with a first contact surface 301 and the flexible hinge 40 is provided with a second contact surface 403 adapted to the first contact surface 301, the support member 30 and the flexible hinge 40 are closely fitted and have a stable contact area, ensuring that the flexible hinge 40 is accurately positioned relative to the support member 30, avoiding slippage between the support member 30 and the flexible hinge 40, and eliminating motion transmission errors that may be caused by unstable contact between the support member 30 and the flexible hinge 40.

[0073] Please continue reading. Figure 5 and Figure 6In one possible implementation, a shim 90 is also included. The shim 90 compensates for the height difference between the power arm 401 and the piezoelectric actuator 50, allowing the flexible hinge 40 to maintain a horizontal posture when no voltage is applied to the piezoelectric actuator 50. The shim 90 can be sheet-like or block-like. The shape of the shim 90 can be, but is not limited to, annular, cuboid, cylindrical, etc. The shim 90 should be made of a rigid material, such as stainless steel, to enable effective force transmission. The shim 90 is located between the power arm 401 and the piezoelectric actuator 50. The shim 90 has a third contact surface 901 and a fourth contact surface 902, which are arranged opposite to each other. The third contact surface 901 contacts the surface of the power arm 401 facing the piezoelectric actuator 50. The third contact surface 901 can be, but is not limited to, a plane or an arc surface, as long as it is adapted to the surface of the power arm 401 facing the piezoelectric actuator 50. The fourth contact surface 902 contacts the side surface of the piezoelectric actuator 50 facing the power arm 401. The fourth contact surface 902 can be, but is not limited to, a plane or an arc surface, as long as it is adapted to the side surface of the piezoelectric actuator 50 facing the power arm 401. In this way, the thrust of the piezoelectric actuator 50 can be distributed more evenly on the surface of the power arm 401, avoiding excessive local stress.

[0074] In this embodiment, a shim 90 with a certain thickness is provided between the power arm 401 and the piezoelectric actuator 50. This shim 90 compensates for the height difference between the power arm 401 and the piezoelectric actuator 50. By adjusting the thickness of the shim 90, the initial relative position between the power arm 401 and the piezoelectric actuator 50 can be adjusted, ensuring the flexible hinge 40 maintains a horizontal posture. The third contact surface 901 of the shim 90 contacts one side surface of the power arm 401, and the fourth contact surface 902 of the shim 90 contacts one side surface of the piezoelectric actuator 50. This allows the displacement generated by the piezoelectric actuator 50 to directly act on the power arm 401 through the surface contact of the shim 90, avoiding slippage problems caused by point or line contact. The number of shims 90 can also be set to multiple shims as needed, and the distance between the power arm 401 and the piezoelectric actuator 50 can be adjusted by stacking multiple shims 90; details will not be elaborated here.

[0075] Please continue reading. Figure 5 and Figure 6In one possible implementation, a first groove 102 is formed within the mounting chamber 101, and the support member 30 is located within the first groove 102. The opening of the first groove 102 faces the top wall of the mounting chamber 101. The first groove 102 is a recess machined into the bottom inner wall of the mounting chamber 101. The first groove 102 is located on one side of the power arm 401 in a first direction, and there is a gap between the bottom of the first groove 102 and the lower surface of the power arm 401. The first groove 102 is used to avoid the power arm 401 after it has been driven by the piezoelectric actuator 50. The size and shape of the first groove 102 can be adjusted according to the movement requirements of the power arm 401.

[0076] In this embodiment, because the installation chamber 101 has a first groove 102, the first groove 102 can expand the movement space of the power arm 401 on one side in the first direction. Therefore, when the piezoelectric actuator 50 drives the power arm 401 to move to that side, at least part of the power arm 401 can extend into the first groove 102, which can avoid interfering with the movement of the power arm 401 and thus ensure the movement stroke of the power arm 401.

[0077] Please continue reading. Figure 5 and Figure 6 In one possible implementation, the support 30 is fixed to the first groove 102 on the side near the valve stem 20 in a second direction, as shown in the attached figure. Figure 5 In the direction indicated by Y, the second direction is the length direction of the flexible hinge 40 when it is horizontal, perpendicular to the axis of the support member 30 and the axis of the valve stem 20. The first groove 102 includes an abutment surface located on the side of the first groove 102 closer to the valve stem 20 in the second direction. The abutment surface can be, but is not limited to, a plane or an arc surface. When the support member 30 is fixed at the abutment surface, the abutment surface can restrict the movement of the support member 30 toward the valve stem 20 in the second direction, increase the effective area of ​​the support member 30 being fixed by the contact between the abutment surface and the support member 30, and position the support member 30 for installation, making it easy for the support member 30 to be accurately installed in the corresponding position and ensuring the stability of the position of the support member 30 after installation. The abutment surface and the support member 30 can be, but are not limited to, bonded or welded, as long as the above objectives are achieved. A portion of the support member 30 away from the flexible hinge 40 in the first direction is located inside the first groove 102, and a portion of the support member 30 closer to the flexible hinge 40 in the first direction is located outside the first groove 102.

[0078] In this embodiment, since the support member 30 is fixed to the side of the first groove 102 near the valve stem 20 in the second direction, the support member 30 can be limited by the inner wall of the first groove 102 to restrict its movement toward the valve stem 20, thereby strengthening the structural strength of the support member 30. Because a portion of the support member 30 is located inside the first groove 102, the space occupied by the support member 30 in the mounting cavity can be reduced, thus reducing the volume of the valve cover 10. Because a portion of the support member 30 is located outside the first groove 102, the normal connection between the support member 30 and the flexible hinge 40 is ensured, so that the support member 30 can function as the swing fulcrum of the flexible hinge 40.

[0079] Please continue reading. Figure 5 and Figure 6 In one possible implementation, a second groove 105 is provided within the mounting chamber 101, with its opening facing the top wall of the mounting chamber 101. The second groove 105 is a recess machined into the bottom inner wall of the mounting chamber 101. The second groove 105 is located on one side of the resistance arm 402 in the first direction, and there is a gap between the bottom of the second groove 105 and the lower surface of the resistance arm 402. The second groove 105 is used to avoid the resistance arm 402 after it has been driven by the first elastic member 70. The size and shape of the second groove 105 can be adjusted according to the movement requirements of the resistance arm 402.

[0080] In this embodiment, because a second groove 105 is provided in the mounting chamber 101, the second groove 105 can expand the movement space of the resistance arm 402 on one side in the first direction. Therefore, when the first elastic member 70 drives the resistance arm 402 to move to that side, at least part of the resistance arm 402 can extend into the second groove 105, which can avoid interfering with the movement of the resistance arm 402 and thus ensure the movement stroke of the resistance arm 402.

[0081] Please continue reading. Figure 5 and Figure 6In one possible implementation, the first elastic element 70 and the piezoelectric actuator 50 are located on the same side of the flexible hinge 40 in the first direction, such as both the first elastic element 70 and the piezoelectric actuator 50 being located above the flexible hinge 40. One end of the first elastic element 70 in the first direction is connected to or abuts against the valve cover 10. When the first elastic element 70 is connected to the valve cover 10, the connection method can be, but is not limited to, bonding, welding, snap-fitting, etc., to prevent the first elastic element 70 from detaching from the inner wall of the valve cover 10. When the first elastic element 70 abuts against the valve cover 10, a third groove 104 can be provided on the valve cover 10. The opening of the third groove 104 faces the bottom wall of the mounting chamber 101. The third groove 104 is used to accommodate part of the first elastic element 70 and limit the shaking of the first elastic element 70. The other end of the first elastic element 70 in the first direction abuts against the upper surface of the resistance arm 402 to drive the resistance arm 402 to move downward in the first direction, thereby driving the power arm 401 to move upward in the first direction. A limiting block 4021 may be provided on the upper surface of the resistance arm 402. The limiting block 4021 may be, but is not limited to, a cuboid or a cylinder. The limiting block 4021 is used to limit the sliding of the first elastic member 70 on the resistance arm 402 to ensure the contact effect between the first elastic member 70 and the resistance arm 402.

[0082] In this embodiment, since one end of the first elastic member 70 is connected to the valve cover 10 and the other end abuts against the resistance arm 402, the first elastic member 70 can apply a continuous driving force to the resistance arm 402. The direction of the driving force is consistent with the output thrust direction of the piezoelectric actuator 50, thereby eliminating the transmission gap between the power arm 401 and the piezoelectric actuator 50 in advance through the contact between the power arm 401 and the piezoelectric actuator 50.

[0083] Please continue reading. Figure 5 and Figure 6 In one possible implementation, the first elastic element 70 and the piezoelectric actuator 50 are located on different sides of the flexible hinge 40 in the first direction, such as the first elastic element 70 being located below the flexible hinge 40 and the piezoelectric actuator 50 being located above the flexible hinge 40. One end of the first elastic element 70 in the first direction is connected to the valve cover 10, and this connection method can be, but is not limited to, bonding, welding, snap-fitting, etc., and the other end of the first elastic element 70 in the first direction is connected to the lower surface of the resistance arm 402, and this connection method can be, but is not limited to, bonding, welding, snap-fitting, etc., for pulling the resistance arm 402 downward in the first direction, thereby driving the power arm 401 upward in the first direction.

[0084] In this embodiment, since one end of the first elastic member 70 is connected to the valve cover 10 and the other end is connected to the resistance arm 402, the first elastic member 70 can apply a continuous pulling force to the resistance arm 402. The direction of the pulling force is consistent with the output thrust direction of the piezoelectric actuator 50, thereby eliminating the transmission gap between the power arm 401 and the piezoelectric actuator 50 in advance through the contact between the power arm 401 and the piezoelectric actuator 50.

[0085] Please continue reading. Figure 5 and Figure 6 In one possible implementation, when a voltage is applied to the piezoelectric actuator 50, a displacement of tens of micrometers can be generated. The distance between the piezoelectric actuator 50 and the valve stem 20 in the second direction is [6, 9] times the distance between the piezoelectric actuator 50 and the support member 30 in the second direction. That is, the sum of the effective length of the resistance arm 402 and the effective length of the power arm 401 is [6, 9] times the effective length of the power arm 401. This allows the displacement of the piezoelectric actuator 50 to be stably amplified into a larger linear displacement of the valve stem 20 through the lever action of the flexible hinge 40. The linear displacement of the valve stem 20 is increased by 5 to 8 times compared to the displacement of the piezoelectric actuator 50.

[0086] In this embodiment, the displacement amplification factor is determined by the ratio of the distance between the piezoelectric actuator 50 and the support 30 to the distance between the support 30 and the valve stem 20. This ratio corresponds to an amplification factor of 5-8 times. This range ensures that the small displacement (usually at the micrometer level) of the piezoelectric actuator 50 is sufficiently amplified to meet the operation requirements of the valve stem 20, while avoiding excessive amplification factor that could lead to insufficient output force or a decrease in system stiffness. This balances the response speed, sealing performance, and space constraints of the diaphragm valve 322.

[0087] Please continue reading. Figure 5 and Figure 6 In one possible implementation, the valve cover 10 is further provided with a limiting member 103, which is located within the mounting chamber 101 and connected to the side wall of the mounting chamber 101. The limiting member 103 can be integrally formed with the valve cover 10, reducing assembly steps. The limiting member 103 can also be separately provided from the valve cover 10, so that it can be replaced individually if damaged. The shape of the limiting member 103 can be, but is not limited to, sheet-like or block-like, and the size of the limiting member 103 can be adjusted according to actual needs. The piezoelectric actuator 50 is fitted against one inner wall of the mounting chamber 101 in the second direction, and the limiting member 103 is located on the other side of the piezoelectric actuator 50 in the second direction to limit the movement of the piezoelectric actuator 50 in the second direction. The material of the limiting member 103 can be a rigid material to improve the constraint effect on the piezoelectric actuator 50.

[0088] In this embodiment, because a limiting member 103 is provided on the valve cover 10, the limiting member 103 and the inner wall of the mounting chamber 101 can constrain both sides of the piezoelectric actuator 50, so that the piezoelectric actuator 50 can be prevented from shifting in the second direction, thereby ensuring that the piezoelectric actuator 50 is aligned with the power arm 401.

[0089] In addition, the limiting member 103 is also provided with a mounting surface, which is located on the side of the limiting member 103 away from the piezoelectric actuator 50 in the second direction. The mounting surface can be, but is not limited to, a plane or an arc surface. The connection between the mounting surface and the displacement sensor 60 can ensure that the position of the displacement sensor 60 is stable.

[0090] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0091] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0092] The foregoing preferred embodiments have further illustrated the objectives, technical solutions, and advantages of the present invention. It should be understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A diaphragm valve, characterized in that, This includes the valve cover, valve body, valve stem, support components, flexible hinge, piezoelectric actuator, and diaphragm. The valve cover has an internal mounting chamber, and the support, the flexible hinge, and the piezoelectric actuator are all disposed in the mounting chamber. The valve body is provided with a flow chamber, and the valve stem is connected to the diaphragm. The valve stem is used to drive the diaphragm to move so that the flow chamber is in a closed state or a flow state. The flexible hinge includes a power arm and a resistance arm. The power arm is connected to the piezoelectric actuator, and the resistance arm is fixedly connected to the valve stem. The support member is disposed between the power arm and the resistance arm and serves as the swing fulcrum of the flexible hinge. The piezoelectric actuator is used to drive the power arm to move in a first direction, thereby driving the resistance arm and the valve stem to move in the first direction; Wherein, the first direction is parallel to the axial direction of the valve stem.

2. The diaphragm valve according to claim 1, characterized in that, It also includes displacement sensors; The displacement sensor is fixed in the mounting chamber and spaced apart from the valve stem in the first direction. The displacement sensor is used to detect the displacement of the valve stem in the first direction.

3. The diaphragm valve according to claim 1 or 2, characterized in that, It also includes the first elastic element; The first elastic element is located in the mounting cavity and is used to drive the resistance arm to move in the first direction so that the power arm abuts against one end of the piezoelectric actuator in the first direction.

4. The diaphragm valve according to any one of claims 1 to 3, characterized in that, It also includes a second elastic element; The second elastic element is sleeved on the valve stem, and the valve stem has a fixing part at the end opposite to the flexible hinge. The second elastic element is used to connect with the fixing part to drive the valve stem away from the valve cover in the first direction.

5. The diaphragm valve according to any one of claims 1 to 4, characterized in that, The support member and the valve cover are integrated into one piece; Alternatively, the support member is fixedly connected to the bottom wall of the valve cover; Alternatively, the support member is fixedly connected to the side wall of the valve cover.

6. The diaphragm valve according to any one of claims 1 to 5, characterized in that, The support member has a first contact surface for contacting and supporting the flexible hinge, and the flexible hinge has a second contact surface adapted to the first contact surface.

7. The diaphragm valve according to any one of claims 1 to 6, characterized in that, It also includes gaskets; The gasket is located between the power arm and the piezoelectric actuator. The gasket has a third contact surface and a fourth contact surface. The third contact surface contacts the side surface of the power arm facing the piezoelectric actuator, and the fourth contact surface contacts the side surface of the piezoelectric actuator facing the power arm.

8. The diaphragm valve according to any one of claims 1 to 7, characterized in that, The installation chamber has a first groove located on one side of the power arm in the first direction. The first groove is used to avoid the power arm after it has been driven by the piezoelectric actuator.

9. The diaphragm valve according to claim 8, characterized in that, The support member is fixed to the side of the first groove near the valve stem in the second direction. A portion of the support member away from the flexible hinge in the first direction is located inside the first groove, and a portion of the support member near the flexible hinge in the first direction is located outside the first groove. The second direction is perpendicular to the first direction.

10. The diaphragm valve according to claim 3, characterized in that, The installation chamber is provided with a second groove, which is located on one side of the resistance arm in the first direction. The second groove is used to avoid the resistance arm after it has been driven by the first elastic element.

11. The diaphragm valve according to claim 3, characterized in that, The first elastic element and the piezoelectric actuator are located on the same side of the flexible hinge in the first direction. One end of the first elastic element in the first direction is connected to the valve cover, and the other end of the first elastic element in the first direction abuts against the resistance arm. Alternatively, the first elastic element and the piezoelectric actuator are located on different sides of the flexible hinge in the first direction, with one end of the first elastic element in the first direction connected to the valve cover and the other end of the first elastic element in the first direction connected to the resistance arm.

12. The diaphragm valve according to any one of claims 1 to 11, characterized in that, The distance between the piezoelectric actuator and the valve stem in the second direction is [6, 9] times the distance between the piezoelectric actuator and the support in the second direction, and the second direction is perpendicular to the first direction.

13. The diaphragm valve according to any one of claims 1 to 12, characterized in that, The valve cover is also provided with a limiting member. The piezoelectric actuator is in contact with the inner wall of one side of the mounting chamber in the second direction. The limiting member is located on the other side of the piezoelectric actuator in the second direction and is used to restrict the movement of the piezoelectric actuator in the second direction. The second direction is perpendicular to the first direction.

14. A fluid regulating device, characterized in that, include: The diaphragm valve as described in any one of claims 1-13.

15. A semiconductor device, characterized in that, include: The fluid regulating device as described in claim 14, The main body of the equipment is connected to the fluid regulating device.

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