Carrier plate movement integration structure and system of submerged hanging basket
By integrating a carrier plate movement structure and system using an immersion basket, and utilizing an overhead crane transport device and an immersion vibrating platform, the problem of efficient and low-cost substrate transportation in the multilayer circuit board electroplating process is solved, achieving efficient and smooth electroplating process and cost reduction.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-15
- Publication Date
- 2026-04-17
AI Technical Summary
In the current electroplating process of multilayer circuit boards, there are challenges in efficiently and cost-effectively transporting the substrate to the semiconductor processing and manufacturing equipment.
The integrated structure and system for moving substrates using a submerged basket utilizes an overhead crane (OHT) to hook the lugs of the substrate transfer basket via first and second telescopic hooks. Combined with a submerged vibration frame and limiting components, the substrates are stably placed in the electroplating tank and vibrated to remove air bubbles. The substrates are then moved using a track.
It improves the efficiency of the electroplating process, reduces costs, and makes substrate transfer and electroplating processes smoother.
Smart Images
Figure CN121888481A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a carrier plate moving structure, and more particularly to an integrated structure and system for moving carrier plates in a sunken suspended platform. Background Technology
[0002] With the increasing miniaturization and high-speed performance of electronic products, circuit boards have evolved from single-sided boards to double-sided and multi-layer boards. Among them, double-sided and multi-layer circuit boards are widely used due to their larger wiring area and higher assembly density. See reference: Takahashi, A.; High density multilayer printed circuit board for HITAC M-880; IEEE Trans. on Components, Packaging, and Manufacturing Technology; 1992.
[0003] The fabrication of multilayer circuit boards includes processes such as inner layer circuit fabrication, inner layer inspection, lamination, drilling, electroplating, conductive line fabrication, circuit electroplating, outer layer inspection, solder masking, surface finishing, and cutting. In actual production, to improve production efficiency, automated take-up and take-down devices are usually used to neatly stack the circuit boards completed in the previous process or to transfer the neatly stacked circuit boards to the workbench of the next process for fabrication.
[0004] In the electroplating process, how to use automated guided vehicles (AGVs) or overhead cranes (OHTs) to transport multiple substrates to semiconductor processing and manufacturing equipment more efficiently and at a lower cost is a topic worthy of research. Summary of the Invention
[0005] The purpose of this invention is to provide a carrier plate moving and integrated structure and system for a sunken suspended platform.
[0006] This invention provides an integrated structure for moving a carrier plate in a submerged suspended platform, particularly suitable for movement via an overhead crane (OHT) on a track. The OHT has a first telescopic hook and a second telescopic hook. The integrated structure includes an electroplating tank body, a submerged vibrating platform, a first limiting member, a second limiting member, a substrate transfer basket, a first vibrator, and a second vibrator. The electroplating tank body contains an electroplating solution during processing. The submerged vibrating platform is partially disposed within the electroplating tank body, having a concave shape with both ends extending beyond the exterior of the electroplating tank body, wherein the bottom of the submerged vibrating platform does not contact the bottom of the electroplating tank body. The first limiting member is disposed at the bottom of the submerged vibrating platform. The second limiting member is disposed at the bottom of the submerged vibrating platform. A substrate transfer basket is used to hold at least one substrate. The substrate transfer basket has a first hook and a second hook. When the substrate transfer basket is placed on the submersible vibration frame, the first and second limiting members stabilize the substrate transfer basket. A first vibrator is disposed at one end of the submersible vibration frame. A second vibrator is disposed at the other end of the submersible vibration frame. The first and second vibrators are used to cause the submersible vibration frame to vibrate, thereby causing air bubbles in the liquid to escape.
[0007] In one embodiment of the present invention, the first telescopic hook and the second telescopic hook of the overhead crane transport device (OHT) are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to smoothly move the substrate transfer basket horizontally on the track.
[0008] In one embodiment of the present invention, the first telescopic hook and the second telescopic hook of the overhead crane transport device (OHT) are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to smoothly move the substrate transfer basket up and down to move it out of or into the electroplating tank body.
[0009] In one embodiment of the present invention, when the substrate transfer basket is placed on the sinking vibration frame, the bottom sides of the substrate transfer basket are respectively engaged with the first limiting member and the second limiting member.
[0010] In one embodiment of the present invention, the horizontal distance between the first limiting member and the second limiting member is the length of the bottom of the substrate transfer basket.
[0011] In one embodiment of the present invention, the substrate is a circuit board.
[0012] In one embodiment of the present invention, the submersible vibration frame is supported by an external structure and is suspended in the electroplating tank body in a non-contact manner.
[0013] The present invention also provides a carrier plate moving and integrating system for a submerged suspended basket. This system includes an overhead crane transport device (OHT), an electroplating tank body, a submerged vibrating frame, a first limiting member, a second limiting member, a substrate transfer basket, a first vibrator, and a second vibrator. The overhead crane transport device (OHT) has a first telescopic hook and a second telescopic hook, and moves on a track. The electroplating tank body contains an electroplating solution during processing. The submerged vibrating frame is partially disposed within the electroplating tank body, having a concave shape with both ends extending beyond the exterior of the electroplating tank body, wherein the bottom of the submerged vibrating frame does not contact the bottom of the electroplating tank body. The first limiting member is disposed at the bottom of the submerged vibrating frame. The second limiting member is disposed at the bottom of the submerged vibrating frame. A substrate transfer basket is used to hold at least one substrate. The substrate transfer basket has a first lug and a second lug. When the substrate transfer basket is placed on the submersible vibration frame, the first and second limiting members stabilize the substrate transfer basket. A first vibrator is disposed at one end of the submersible vibration frame. A second vibrator is disposed at the other end of the submersible vibration frame. The first and second vibrators are used to cause the submersible vibration frame to vibrate, thereby causing air bubbles in the liquid to escape. The substrate transfer basket is moved by an overhead crane (OHT) device.
[0014] In summary, the carrier plate movement integration structure and system for the sunken suspended platform provided by this invention can bring the following benefits:
[0015] 1. Improve the efficiency of the processing flow;
[0016] 2. Reduce costs; and
[0017] 3. The substrate transfer and electroplating process is smoother.
[0018] The following detailed description through specific embodiments should make it easier to understand the purpose, technical content, features, and effects achieved by the present invention. Attached Figure Description
[0019] Figure 1 This is an overall schematic diagram of the carrier plate moving and integrating structure of the sunken suspended platform of the present invention.
[0020] Figure 2 This is a first operational schematic diagram of the carrier plate moving and integrating structure and system of the sunken suspended platform of the present invention.
[0021] Figure 3 This is a second operational schematic diagram of the carrier plate movement integration structure and system of the sunken suspended platform of the present invention.
[0022] Figure 4 This is a third operational schematic diagram of the carrier plate movement integration structure and system of the sunken suspended platform of the present invention.
[0023] Explanation of reference numerals: 100 - Carrier plate moving and integrating structure of the submerged basket; 100S - Carrier plate moving and integrating system of the submerged basket; 110 - Electroplating tank body; 112 - Electroplating solution; 120 - Submerged vibrating frame; 130 - First limiting member; 140 - Second limiting member; 150 - Substrate transfer basket; 152 - First hanging ear; 154 - Second hanging ear; 160 - First vibrator; 170 - Second vibrator; 200 - Overhead crane transport device (OHT); 210 - First telescopic hook; 220 - Second telescopic hook; 300 - Track; BD - Substrate; BL - Bubble. Detailed Implementation
[0024] The inventors of this invention have conducted years of research and development to improve upon the shortcomings of existing products. The following sections will detail how this invention achieves the most efficient functional requirements through a carrier plate movement integration structure and system for a sunken suspended platform.
[0025] Please see Figures 1 to 4 , Figure 1 This is an overall schematic diagram of the carrier plate moving and integrating structure of the sunken suspended platform of the present invention. Figure 2 This is a first operational schematic diagram of the carrier plate moving and integrating structure and system of the sunken suspended platform of the present invention. Figure 3 This is a second operational schematic diagram of the carrier plate movement integration structure and system of the sunken suspended platform of the present invention. Figure 4 This is a third operational schematic diagram of the carrier plate moving and integrating structure and system of the sunken suspended platform of the present invention. As shown in the figure, the carrier plate moving and integrating structure of the sunken suspended platform of the present invention is particularly suitable for moving some components of the carrier plate moving and integrating structure 100 of the sunken suspended platform by a crane transport device (OHT) 200 on a track 300. The crane transport device (OHT) 200 has a first telescopic hook 210 and a second telescopic hook 220. That is, the first telescopic hook 210 and the second telescopic hook 220 can be extended or shortened according to control commands, which are issued in a timely manner by a central controller (not shown) according to the overall processing flow.
[0026] The following will describe in detail the carrier plate moving and integrated structure 100 of the sunken scaffold, such as Figure 1As shown, the submersible basket carrier plate moving integration structure 100 includes an electroplating tank body 110, a submersible vibration frame 120, a first limiting member 130, a second limiting member 140, a substrate transfer basket 150, a first vibrator 160, and a second vibrator 170. The electroplating tank body 110 contains an electroplating solution 112 during processing. The submersible vibration frame 120 has a portion of its body disposed within the electroplating tank body 110, and the submersible vibration frame 120 has a concave shape with both ends extending beyond the exterior of the electroplating tank body 110. It should be noted that the bottom of the submersible vibration frame 120 does not contact the bottom of the electroplating tank body 110; the submersible vibration frame 120 of this invention is supported by an external structure and is suspended within the electroplating tank body 110 without contact. Furthermore, the first limiting member 130 is disposed at the bottom of the sinking vibration table 120. The second limiting member 140 is disposed at the bottom of the sinking vibration table 120.
[0027] Furthermore, the substrate transfer basket 150 is used to place at least one substrate BD. The substrate transfer basket 150 has a first hook 152 and a second hook 154, which can be hooked by a first telescopic hook 210 and a second telescopic hook 220, respectively. In this embodiment of the invention, the substrate BD can be a circuit board, but is not limited thereto. When the overhead crane transport device (OHT) 200 located on the track 300 hooks the substrate transfer basket 150's hook 152 and second hook 154 (e.g., using the first telescopic hook 210 and the second telescopic hook 220)... Figure 2 (As shown) When the substrate transfer basket 150 is placed on the submersible vibration table 120, the present invention uses the first limiting member 130 and the second limiting member 140 to stably position the substrate transfer basket 150, as shown. Figure 3 As shown. In addition, when the substrate transfer basket 150 is placed on the sink-type vibration frame 120, the bottom sides of the substrate transfer basket 150 will be respectively engaged with the first limiting member 130 and the second limiting member 140, wherein the horizontal distance between the first limiting member 130 and the second limiting member 140 is the length of the bottom of the substrate transfer basket 150.
[0028] Additionally, the first vibrator 160 is disposed at one end of the submerged vibration frame 120. The second vibrator 170 is disposed at the other end of the submerged vibration frame 120. The first vibrator 160 and the second vibrator 170 are used to cause the submerged vibration frame 120 to vibrate, thereby causing air bubbles BL in the liquid to escape, such as... Figure 4 As shown.
[0029] Furthermore, during the processing stage, the present invention uses the first telescopic hook 210 and the second telescopic hook 220 of the overhead crane transport device (OHT) 200 to hook the first lug 152 and the second lug 154 of the substrate transfer basket 150 respectively, so as to smoothly move the substrate transfer basket 150 horizontally on the track 300. In addition, the first telescopic hook 210 and the second telescopic hook 220 of the overhead crane transport device (OHT) 200 hook the first lug 152 and the second lug 154 of the substrate transfer basket 150 respectively, so as to smoothly move the substrate transfer basket 150 up and down, so as to move the substrate transfer basket 150 out of or into the electroplating tank body 110. The above invention is illustrated by using an electroplating tank body 110, an immersion vibrating frame 120 and a substrate transfer basket 150 as examples. This is the most basic operation of the invention. The invention can be expanded to include multiple electroplating tank bodies 110, multiple immersion vibrating frames 120 and multiple substrate transfer baskets 150 to cooperate with an overhead crane transport device (OHT) running on a track for processing.
[0030] Please refer to this again. Figure 2 It can be regarded as a carrier plate moving and integrating system 100S of the sunken basket. The carrier plate moving and integrating system 100S of the sunken basket includes an overhead crane transport device (OHT) 200, an electroplating tank body 110, a sunken vibrating platform 120, a first limiting member 130, a second limiting member 140, a substrate transfer basket 150, a first vibrator 160 and a second vibrator 170. Its related operation is as described above, and will not be repeated here.
[0031] In summary, the carrier plate movement integration structure and system for the sunken suspended platform provided by this invention can bring the following benefits:
[0032] 1. Improve the efficiency of the processing flow;
[0033] 2. Reduce costs; and
[0034] 3. The substrate transfer and electroplating process is smoother.
[0035] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the invention. Therefore, all equivalent variations or modifications made in accordance with the features and spirit described in the claims of the present invention should be included within the scope of the patent application of the present invention.
Claims
1. A carrier plate moving integrated structure for a submerged suspended platform, particularly suitable for movement via a crane transport device on a track, wherein the crane transport device has a first telescopic hook and a second telescopic hook, characterized in that: The integrated structure for the moving platform of the sunken cradle includes: An electroplating tank body, which contains an electroplating solution during processing; An immersion vibration frame is partially disposed inside the electroplating tank body. The immersion vibration frame has a concave shape and its two ends extend out of the electroplating tank body. The bottom of the immersion vibration frame does not contact the bottom of the electroplating tank body. A first limiting member is provided at the bottom of the sinking vibration frame; A second limiting member is provided at the bottom of the sinking vibration frame; A substrate transfer basket for placing at least one substrate, the substrate transfer basket having a first hanging ear and a second hanging ear, wherein when the substrate transfer basket is placed on the sink-type vibration frame, the first limiting member and the second limiting member are used to stably position the substrate transfer basket. A first vibrator is disposed at one end of the submersible vibrating frame; and A second vibrator is disposed at the other end of the submersible vibration frame, wherein the first vibrator and the second vibrator are used to cause the submersible vibration frame to vibrate, thereby causing bubbles in the liquid to escape.
2. The moving integrated structure of the load plate of the sinkable basket according to claim 1, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane conveying device are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to smoothly move the substrate transfer basket horizontally on the track.
3. The moving integrated structure of the submersible basket's carrier plate according to claim 1, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane conveying device are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to move the substrate transfer basket up and down smoothly to move it out or into the electroplating tank body.
4. The integrated moving structure of the submersible basket's carrier plate according to claim 1, characterized in that: When the substrate transfer basket is placed on the sinking vibration frame, the bottom sides of the substrate transfer basket are respectively engaged with the first limiting member and the second limiting member.
5. The integrated moving structure of the submersible basket's carrier plate according to claim 1, characterized in that: The horizontal distance between the first limiting member and the second limiting member is the length of the bottom of the substrate transfer basket.
6. The integrated moving structure of the submersible basket's carrier plate according to claim 1, characterized in that: The substrate is a circuit board.
7. The integrated moving structure of the submersible basket's carrier plate according to claim 1, characterized in that: The submersible vibration platform is supported by an external structure and is suspended in the electroplating tank body in a non-contact manner.
8. A carrier plate moving and integration system for a submerged suspended platform, characterized in that: include: A crane transport device having a first telescopic hook and a second telescopic hook, wherein the crane transport device moves on a track; An electroplating tank body, which contains an electroplating solution during processing; An immersion vibration frame is partially disposed inside the electroplating tank body. The immersion vibration frame has a concave shape and its two ends extend out of the electroplating tank body. The bottom of the immersion vibration frame does not contact the bottom of the electroplating tank body. A first limiting member is provided at the bottom of the sinking vibration frame; A second limiting member is provided at the bottom of the sinking vibration frame; A substrate transfer basket for placing at least one substrate, the substrate transfer basket having a first hanging ear and a second hanging ear, wherein when the substrate transfer basket is placed on the sink-type vibration frame, the first limiting member and the second limiting member are used to stably position the substrate transfer basket. A first vibrator is disposed at one end of the submersible vibrating frame; and A second vibrator is disposed at the other end of the submerged vibration frame, wherein the first vibrator and the second vibrator are used to cause the submerged vibration frame to vibrate, thereby causing air bubbles in the liquid to escape, wherein the substrate transfer basket is moved by the overhead crane transport device.
9. The carrier plate moving and integrating system for the sunken suspended platform as described in claim 8, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane conveying device are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to smoothly move the substrate transfer basket horizontally on the track.
10. The carrier plate moving and integrating system for the sunken suspended platform as described in claim 8, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane conveying device are used to hook the first lug and the second lug of the substrate transfer basket respectively, so as to smoothly move the substrate transfer basket up and down to move it out or into the electroplating tank body.