Component vacuum packaging and packaging detection system and method

Abstract

The invention discloses a component vacuum package and a package detection system and method thereof, and the component vacuum package comprises an outer shell which is internally limited to obtain a vacuum cavity, and the vacuum cavity at least has a first vacuum degree limited by a first preset condition and a second vacuum degree limited by a second preset condition; and the getter layer is arranged on the joint interface of the outer shell and in an elastic body for limiting the vacuum cavity, the elastic body generates thermally induced deformation at different interval temperatures, the vacuum cavity has different cavity volumes through deformation of the elastic body, and the getter layer is set to have preset air suction capacity. According to the invention, stable work of the vacuum cavity under different temperature and load conditions is realized, and the packaging quality is tested.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, specifically to vacuum packaging of components and its packaging testing system and method. Background Technology

[0002] Vacuum packaging technology for electronic components has wide applications in precision electronic devices, sensors, and optical components. Vacuum packaging effectively isolates internal components from harmful substances such as moisture and oxygen in the external environment, protecting them from corrosion and oxidation, while maintaining stable performance under specific vacuum conditions. As electronic devices evolve towards higher precision and higher reliability, even higher demands are placed on vacuum packaging technology.

[0003] In traditional vacuum packaging structures, the volume of the internal cavity changes uncontrollably due to differences in the thermal expansion coefficients of materials during temperature variations, leading to unstable vacuum levels. Especially when the operating temperature range of the components is wide, a single-designed getter layer is insufficient to adapt to the dynamic changes in cavity volume, failing to maintain vacuum stability under different operating conditions and affecting the long-term reliability and performance consistency of the components.

[0004] To address the aforementioned issues, this invention proposes a vacuum packaging structure for components that can dynamically adjust the vacuum level according to operating conditions. Through the synergistic design of the elastomer and getter layer, the vacuum chamber can operate stably under different temperature and load conditions. At the same time, it provides corresponding testing systems and methods to ensure a comprehensive evaluation of packaging quality. Summary of the Invention

[0005] To address the above problems, this invention provides a vacuum packaging system and method for electronic components and its packaging testing.

[0006] In a first aspect, the present invention provides a vacuum package for a component, comprising a first electrode portion, a second electrode portion, a housing, and the component. The first electrode and the second electrode are connected to the component. The first electrode, the second electrode, and the outer casing together define a vacuum cavity, and the component is located in the vacuum cavity. The vacuum cavity has at least a first vacuum degree defined by a first preset condition and a second vacuum degree defined by a second preset condition. It also includes a getter layer, which is disposed at the interface between the outer shell and the first electrode and the second electrode, and in an elastic body disposed in the vacuum cavity. The elastic body undergoes thermal deformation at different temperature ranges, and the vacuum cavity is defined by the thermal deformation of the elastic body to obtain different chamber volumes. The getter layer is configured to have a preset getter capacity.

[0007] As a preferred embodiment, the first preset condition is that the operating temperature of the component is within a first temperature range, the thermally induced deformation of the elastomer is limited to a first deformation range, and the chamber volume change rate of the vacuum cavity is within a first volume change range; The second preset condition is that the operating temperature of the component is within a second temperature range, the thermally induced deformation of the elasticity is limited to a second deformation range, and the chamber volume change rate of the vacuum cavity is within a second volume change range.

[0008] A second aspect of the present invention provides a testing system for vacuum packaging of components, comprising: The temperature testing module is configured to set the operating temperature of the vacuum packaging of the component; The current test module is configured to test the electrical performance data of components under different operating temperatures and different operating currents; The image acquisition module is configured to acquire volume image data of the vacuum chamber obtained by image recognition of the component package; A vacuum sensing module is configured to acquire vacuum level data within the vacuum cavity encapsulated by the component; The judgment module is configured to acquire the electrical performance data, the volume image data, and the vacuum degree data, and determine the packaging quality according to a preset parameter mapping table.

[0009] As a preferred embodiment, the system also includes a calibration module that receives data from the judgment module, calibrates the test threshold data of the judgment module during the test process, and the calibration period preset by the calibration module has a linear mapping relationship with the cycle period of the temperature test module performing the temperature cycle.

[0010] A third aspect of the present invention provides a testing method for vacuum packaging of components, comprising the following steps: Perform a temperature cycling test. At multiple operating temperature points within a first temperature range, apply a first operating current to the component and measure the first vacuum level of the vacuum chamber, the first deformation coefficient of the elastomer, and the first electrical performance data of the component. At multiple operating temperature points within the second temperature range, a second operating current is applied to the component, and the second vacuum degree value of the vacuum cavity, the second deformation coefficient value of the elastomer, and the second electrical performance data of the component are measured. The first vacuum degree value, the first deformation coefficient value, and the first electrical performance data are obtained, and according to the preset parameter mapping table, it is determined whether the first deformation coefficient value is within the first deformation range, whether the first vacuum degree value meets the first vacuum degree standard, and whether the first electrical performance data meets the first electrical performance standard. Simultaneously, the second vacuum degree value, the second deformation coefficient value, and the second electrical performance data are acquired, and based on the preset parameter mapping table, it is determined whether the second deformation coefficient value is within the second deformation range, whether the second vacuum degree value meets the second vacuum degree standard, and whether the second electrical performance data meets the second electrical performance standard. When the first deformation coefficient value is not within the first deformation range or the second deformation coefficient value is not within the second deformation range, it is determined that the thermal deformation of the elastomer exceeds the tolerance, resulting in abnormal chamber volume. When the first vacuum value does not meet the first vacuum standard or the second vacuum value does not meet the second vacuum standard, the preset gas absorption capacity of the getter layer is determined to be invalid. Based on the measurement results of the multiple operating temperature points, the variation characteristics of the first and second electrical performance data under different temperature environments are analyzed to determine the influence relationship between packaging quality and electrical performance data, so as to verify the applicability of the first and second preset conditions in temperature cycling.

[0011] In a preferred embodiment, the first operating current and the second operating current are determined based on the first temperature range and the second temperature range, wherein the first operating current corresponds to the operating conditions of the first temperature range and the second operating current corresponds to the operating conditions of the second temperature range.

[0012] As a preferred method, a temperature cycling step is further included before measuring the first and second vacuum values: The package was placed in a temperature cycling environment and a temperature cycling test was performed. During each temperature cycle, the change in the third deformation coefficient of the elastomer and the aging data of the getter layer were monitored. The aging data is obtained to determine the influence of different encapsulation qualities on the aging of the getter layer and the elastomer. When the fluctuation range of the third deformation coefficient value is greater than the third fluctuation threshold, it is determined that the preset getter capacity of the getter layer has not effectively suppressed the chamber volume fluctuation; the influence relationship is used to calibrate the test threshold data in the test method, and the cycle period of the temperature cycle has a linear mapping relationship with the calibration cycle.

[0013] As a preferred embodiment, the measurement of the first electrical performance data and the second electrical performance data includes: When measuring electrical performance data, the thermal effect caused by the operating current is obtained, which leads to additional changes in the chamber volume of the vacuum cavity and additional adsorption of the getter layer. Record the resistance drift value of the components. When the resistance drift value exceeds the first drift threshold or the second drift threshold, it is determined that the additional change in the chamber volume and additional adsorption have caused the electrical performance failure. The secondary effects of the thermal induced effect on the elastomer and getter layer are correlated with the packaging quality. The combined effect of the secondary effect on the chamber volume stability and getter layer adsorption performance is analyzed to determine the overall performance of the vacuum packaging of the components.

[0014] Compared with the prior art, the present invention has the following advantages: The vacuum packaging of components in this invention utilizes an elastomer with thermo-deformable properties within the housing. This allows the vacuum chamber to automatically adjust its volume according to the operating temperature, effectively mitigating structural stress caused by temperature changes and maintaining the integrity of the packaging structure. The synergistic design of the getter layer and the elastomer ensures the stability of the vacuum level under different operating conditions, improving the environmental adaptability of the packaging.

[0015] The testing system of this invention can comprehensively evaluate the performance of vacuum packaging under different operating conditions. Through the cooperation of a temperature control module, a load application module, and a multi-parameter monitoring module, it achieves simultaneous measurement and analysis of vacuum degree, deformation coefficient, and electrical performance parameters. The judgment module dynamically adjusts the judgment threshold according to the thermal expansion characteristics of the elastomer, improving the accuracy and reliability of the test results and providing a scientific basis for packaging quality assessment.

[0016] The testing method of this invention, by simulating temperature changes and load conditions in the actual working environment of components, can accurately identify potential problems such as elastomer deformation exceeding tolerance and getter layer capacity failure, achieving comprehensive testing of vacuum packaging performance. This method is particularly suitable for the packaging testing of high-reliability components that need to operate stably over a wide temperature range, providing an effective means for product quality control.

[0017] This invention, through the innovative design of a vacuum cavity, an elastomer, and a getter layer, enables stable operation of components under different working conditions, improves the reliability and service life of vacuum packaging, and provides technical support for the long-term stable operation of precision electronic components. Attached Figure Description

[0018] The present invention will be further described with reference to the accompanying drawings, but the embodiments in the drawings do not constitute any limitation on the present invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the vacuum packaging structure of components provided in an embodiment of the present invention.

[0020] Figure 2This is a schematic diagram of the system provided in an embodiment of the present invention.

[0021] Among them, 1. First electrode; 2. Second electrode; 3. Outer shell; 4. Components; 5. Vacuum cavity; 6. Elastomer; 7. First getter layer; 8. Second getter layer. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] This embodiment first provides component 4 in vacuum packaging, such as Figure 1 As shown, the device includes a first electrode 1, a second electrode 2, a housing 3, components 4, a vacuum chamber 5, a getter layer, and an elastomer 6. The first electrode 1 and the second electrode 2 are connected to the components 4. The first electrode 1, the second electrode 2, and the housing 3 together define the vacuum chamber 5, and the components 4 are located in the vacuum chamber 5. The vacuum chamber 5 has at least a first vacuum degree defined by a first preset condition and a second vacuum degree defined by a second preset condition. It also includes a getter layer, which is disposed at the interface between the housing 3 and the first electrode 1 and the second electrode 2, and in the elastomer 6 disposed in the vacuum chamber 5. The elastomer 6 undergoes thermal deformation at different temperature ranges, and the vacuum chamber 5 is defined by the thermal deformation of the elastomer 6 to obtain different chamber volumes. The getter layer is configured to have a preset getter capacity.

[0024] As a preferred embodiment, a first getter layer 7 is disposed at the bonding interface, and a second getter layer 8 is disposed on the elastomer 6.

[0025] As a preferred embodiment, the first preset condition is that the operating temperature of the component 4 is within a first temperature range, the thermally induced deformation of the elastomer 6 is limited to a first deformation range, and the chamber volume change rate of the vacuum cavity 5 is within a first volume change range. The second preset condition is that the operating temperature of component 4 is within a second temperature range, the thermally induced deformation of the elasticity is limited to a second deformation range, and the chamber volume change rate of the vacuum cavity 5 is within a second volume change range.

[0026] This embodiment also provides a testing system for vacuum packaging of components, such as... Figure 2 As shown, it includes: The temperature testing module is configured to set the operating temperature of the vacuum-sealed component 4; The current test module is configured to test the electrical performance data of component 4 under different operating temperatures and different operating currents. The image acquisition module is configured to acquire volume image data of the vacuum chamber obtained by image recognition of the component 4 package; The vacuum sensing module is configured to acquire vacuum level data within the vacuum cavity 5 encapsulated by the component 4. The judgment module is configured to acquire the electrical performance data, the volume image data, and the vacuum degree data, and determine the packaging quality according to a preset parameter mapping table.

[0027] In this embodiment, the temperature testing module is configured to precisely set the operating temperature of the vacuum-sealed component 4 and perform temperature cycling tests to cover multiple operating temperature points. Specifically, the temperature testing module monitors the internal temperature distribution of the package in real time using a thermocouple array, dynamically dividing the operating temperature into a first temperature range and a second temperature range. For example, the first temperature range includes a low-temperature operating interval, and the second temperature range includes a high-temperature operating interval. At least three representative operating temperature points are selected within each temperature range, for example, 25°C, 40°C, and 55°C within the first temperature range, and 70°C, 85°C, and 100°C within the second temperature range. The module employs a closed-loop temperature control algorithm to ensure that the slope during temperature switching is controlled within a preset safety threshold, preventing sudden temperature changes from causing unsteady deformation of the elastomer 6. During temperature cycling, the temperature testing module traverses each operating temperature point in a linearly increasing or decreasing manner, maintaining each temperature point stably for 10 minutes to eliminate the influence of thermal inertia. Simultaneously, the module records complete cycle data of the temperature cycle, including the start time, end time, and temperature fluctuation amplitude, providing a cycle reference for subsequent calibration modules.

[0028] The current testing module is configured to apply an operating current to component 4 and simultaneously acquire electrical performance data. In this embodiment, the module dynamically matches the operating current according to a first temperature range and a second temperature range. For example, when the operating temperature is within the first temperature range, the applied first operating current corresponds to the constant current value in the low-power operating state; when the operating temperature is within the second temperature range, the applied second operating current corresponds to the constant current value in the high-load operating state. The module incorporates a high-precision current source and voltage acquisition unit to record real-time electrical performance data of component 4 at different operating temperature points with microsecond-level time resolution, including but not limited to resistance values, leakage current values, and voltage fluctuation curves. In particular, the module simultaneously monitors the thermal effects caused by the operating current during the measurement process. For example, when the leakage current value in the second electrical performance data suddenly increases, the infrared thermal imager detects a local hot spot, and the module automatically triggers an additional thermal management subroutine. This subroutine captures the surface temperature field distribution of the package using the infrared thermal imager, calculates the additional thermal load of the thermal effect on the vacuum cavity 5, and quantifies this additional thermal load into thermal effect parameters, such as thermal load intensity levels.

[0029] The image acquisition module is configured to acquire volumetric image data of the vacuum cavity 5 and analyze the deformation coefficient value of the elastomer 6. In this embodiment, the module uses a high-resolution industrial camera combined with structured light projection technology and X-ray imaging to perform non-contact 3D imaging of the package. After stabilizing at each operating temperature point, the camera captures the surface contour image of the vacuum cavity 5 and generates a 3D point cloud model of the cavity volume through a point cloud reconstruction algorithm. Simultaneously, the module has a built-in deformation analysis subsystem that calculates the deformation coefficient value of the elastomer 6 based on the point cloud model. For example, the deformation coefficient is defined as the rate of change of the ratio of the current cavity volume to the reference volume. In specific implementation, the subsystem divides the deformation coefficient value into a first deformation interval corresponding to the steady-state deformation within a first temperature range and a second deformation interval corresponding to the steady-state deformation within a second temperature range. A dynamic threshold algorithm is used to determine in real time whether the deformation coefficient value is within the specified interval. For example, when the operating temperature is within the first temperature range, if the deformation coefficient value exceeds the first deformation interval and the rate of change is greater than ±5%, it is marked as an abnormality in the thermally induced deformation tolerance of the elastomer 6. In addition, the module continuously monitors the change of the third deformation coefficient value of elastomer 6 during temperature cycling. When the fluctuation range of the third deformation coefficient value exceeds the third fluctuation threshold, the system automatically associates the aging degree data of the getter layer. For example, by analyzing the decay curve of the fluctuation range and the number of temperature cycles, the adsorption performance degradation rate of the getter layer is quantified, and the aging degree data is expressed as a percentage.

[0030] The vacuum sensing module is configured to acquire vacuum level data within the vacuum chamber 5 in real time. In this embodiment, the module integrates a miniature capacitive vacuum gauge and a getter status monitoring unit. The vacuum gauge probe is embedded inside the outer casing 3, directly contacting the vacuum chamber 5, and records the vacuum level value at a millisecond sampling frequency. The monitoring unit analyzes the adsorption state of the getter layer using electrochemical impedance spectroscopy, and identifies a failure of the preset getter capacity as an abnormal jump in the vacuum level value. For example, the vacuum level value deviates from the preset standard by more than ±10% within a specified temperature range. The module performs dual verification during temperature cycling tests. On one hand, it measures the first vacuum level value when the first operating current is applied to determine whether it meets the first vacuum level standard, for example, the vacuum level threshold corresponding to the first temperature range. On the other hand, it measures the second vacuum level value when the second operating current is applied to determine whether it meets the second vacuum level standard, for example, the vacuum level threshold corresponding to the second temperature range. When the vacuum level does not meet the standard, the module further combines the thermal effect parameters for attribution analysis. For example, if abnormal electrical performance data is detected at the same time, such as an excessive resistance drift value, it is determined that the abnormal vacuum level is caused by the combined effect of additional changes in the chamber volume and additional adsorption of the getter layer.

[0031] The judgment module is configured to integrate multi-source data and perform packaging quality judgment. In this embodiment, the core function of the module is to analyze the correlation between electrical performance data, volumetric image data, and vacuum level data based on a preset parameter mapping table. The specific implementation process is as follows: The module receives deformation coefficient values ​​from the image acquisition module, including a first deformation coefficient value, a second deformation coefficient value, and a third deformation coefficient value, and vacuum level values ​​from the vacuum sensing module, including a first vacuum level value and a second vacuum level value; secondly, the module aligns the electrical performance data, such as resistance drift values, with the operating temperature point in time and space to construct a three-dimensional data matrix of temperature-electrical performance-deformation; finally, the module performs layered judgment according to the parameter mapping table, checking whether the first deformation coefficient value is within the first deformation range and whether the second deformation coefficient value is within the second deformation range. If any deformation coefficient value exceeds the range, the module outputs a warning that the thermally induced deformation of the elastomer 6 exceeds the tolerance, and correlates it with the chamber volume change rate data. For example, the first volume change rate or the second volume change rate is analyzed to determine its impact on the electrical performance data; the module also checks whether the first vacuum level value is within the range. The module checks whether the first vacuum level meets the first vacuum level standard and whether the second vacuum level value meets the second vacuum level standard. If the vacuum level value is abnormal, the module further verifies whether it is caused by the failure of the preset getter capacity of the getter layer, and distinguishes between primary and secondary failures by combining the thermal effect parameters. In view of the dynamic change characteristics of electrical performance data, the module extracts the temperature dependence characteristics of the resistance drift value. For example, when the operating temperature is within the first temperature range, if the resistance drift value exceeds the first drift threshold, it is determined that the change in chamber volume causes low-load electrical performance failure. When the operating temperature is within the second temperature range, if the resistance drift value exceeds the second drift threshold, it is determined that the coupling effect of the additional change in chamber volume and the additional adsorption of the getter layer causes high-load electrical performance failure. The difference between the first drift threshold and the second drift threshold is dynamically limited by the adsorption rate of the getter layer. For example, the faster the adsorption rate, the smaller the difference. Crucially, the module establishes a model of the relationship between the characteristics of electrical performance data changes and packaging quality through data clustering analysis at multiple operating temperature points. For example, when the electrical performance data in the first temperature range shows a linear drift trend while the data in the second temperature range shows a non-linear abrupt change, the system determines that there is a temperature-sensitive defect in the packaging quality.

[0032] The calibration module is configured to dynamically optimize test threshold data and establish a mapping relationship with the temperature cycle period. In this embodiment, the core of the module is to use the aging data of the getter layer and elastomer 6 as the calibration basis. Specifically, the module receives the packaging quality judgment result from the judgment module and the aging data from the image acquisition module. For example, the degradation rate of the getter layer adsorption performance and the deformation recovery rate of elastomer 6 are used to establish a mapping model of aging degree, packaging quality, and test threshold through machine learning algorithms. For example, when the aging data indicates that the getter layer degrades faster at high temperatures, the degradation rate in the second temperature range is higher than that in the first temperature range, and the module automatically tightens the threshold range of the second vacuum degree standard; conversely, when the deformation recovery rate of elastomer 6 is high, the module relaxes the tolerance threshold of the deformation range. The calibration cycle of this mapping model is linearly driven by the temperature cycle period. For example, every 5 temperature cycles, the calibration cycle is automatically shortened by 10%, ensuring that the test threshold data is dynamically updated with the actual aging state of the package.

[0033] This embodiment also provides a testing method for vacuum packaging of components, including the following steps: Perform a temperature cycling test. At multiple operating temperature points within the first temperature range, apply a first operating current to the component 4 and measure the first vacuum degree value of the vacuum chamber 5, the first deformation coefficient value of the elastic body 6, and the first electrical performance data of the component 4. At multiple operating temperature points within the second temperature range, a second operating current is applied to the component 4, and the second vacuum degree value of the vacuum cavity 5, the second deformation coefficient value of the elastic body 6, and the second electrical performance data of the component 4 are measured. The first vacuum degree value, the first deformation coefficient value, and the first electrical performance data are obtained, and according to the preset parameter mapping table, it is determined whether the first deformation coefficient value is within the first deformation range, whether the first vacuum degree value meets the first vacuum degree standard, and whether the first electrical performance data meets the first electrical performance standard. Simultaneously, the second vacuum degree value, the second deformation coefficient value, and the second electrical performance data are acquired, and based on the preset parameter mapping table, it is determined whether the second deformation coefficient value is within the second deformation range, whether the second vacuum degree value meets the second vacuum degree standard, and whether the second electrical performance data meets the second electrical performance standard. When the first deformation coefficient value is not within the first deformation range or the second deformation coefficient value is not within the second deformation range, it is determined that the thermal deformation of the elastomer 6 exceeds the tolerance, resulting in abnormal chamber volume. When the first vacuum value does not meet the first vacuum standard or the second vacuum value does not meet the second vacuum standard, the preset gas absorption capacity of the getter layer is determined to be invalid. Based on the measurement results of the multiple operating temperature points, the variation characteristics of the first and second electrical performance data under different temperature environments are analyzed to determine the influence relationship between packaging quality and electrical performance data, so as to verify the applicability of the first and second preset conditions in temperature cycling.

[0034] In a preferred embodiment, the first operating current and the second operating current are determined based on the first temperature range and the second temperature range, wherein the first operating current corresponds to the operating conditions of the first temperature range and the second operating current corresponds to the operating conditions of the second temperature range.

[0035] As a preferred method, a temperature cycling step is further included before measuring the first and second vacuum values: The package was placed in a temperature cycling environment and a temperature cycling test was performed. During each temperature cycle, the change in the third deformation coefficient value of the elastomer 6 and the aging data of the getter layer were monitored. The aging data is obtained to determine the influence of different encapsulation qualities on the aging of the getter layer and elastomer 6. When the fluctuation range of the third deformation coefficient value is greater than the third fluctuation threshold, it is determined that the preset getter capacity of the getter layer has not effectively suppressed the chamber volume fluctuation; the influence relationship is used to calibrate the test threshold data in the test method, and the cycle period of the temperature cycle has a linear mapping relationship with the calibration cycle.

[0036] As a preferred embodiment, the measurement of the first electrical performance data and the second electrical performance data includes: When measuring electrical performance data, the thermal effect caused by the operating current is obtained, which leads to additional changes in the chamber volume of the vacuum cavity 5 and additional adsorption of the getter layer; Record the resistance drift value of component 4. When the resistance drift value exceeds the first drift threshold or the second drift threshold, it is determined that the additional change in the chamber volume and additional adsorption cause electrical performance failure. The secondary effects of the thermal induced effect on the elastomer 6 and the getter layer are correlated with the packaging quality. The combined effect of the secondary effect on the chamber volume stability and the adsorption performance of the getter layer is analyzed to determine the overall performance of the vacuum packaging of component 4.

[0037] Regarding the complete implementation process of the testing method, in this embodiment, after the temperature testing module starts the temperature cycling program, the working temperature is sequentially set to multiple working temperature points within the first temperature range. After each temperature point stabilizes, the current testing module applies a first working current, while the image acquisition module captures volume image data of the vacuum chamber 5 and calculates the first deformation coefficient value. The vacuum sensing module records the first vacuum degree value, and the current testing module simultaneously collects the first electrical performance data. Subsequently, the module switches to multiple working temperature points within the second temperature range and repeats the above process to obtain the second deformation coefficient value, the second vacuum degree value, and the second electrical performance data. During the temperature cycling process, the image acquisition module continuously monitors the change in the third deformation coefficient value of the elastomer 6 and quantifies the aging degree data of the getter layer through the getter state monitoring unit. For example, a degradation curve is shown with the number of cycles as the horizontal axis and the adsorption capacity retention rate as the vertical axis. When the fluctuation of the third deformation coefficient exceeds the third fluctuation threshold, the judgment module immediately correlates the fluctuation with the aging data. For example, if the fluctuation amplitude is positively correlated with the degradation rate of the getter layer, and the fluctuation amplitude increases by 2% for every 5% increase in the degradation rate, it is determined that the preset getter capacity of the getter layer has failed to effectively suppress the chamber volume fluctuation. At the same time, the calibration module updates the test threshold data based on this relationship. For example, the third fluctuation threshold is lowered by 15% to adapt to the accelerated aging of the package.

[0038] During the electrical performance data measurement process, the current testing module identifies the thermally induced effects caused by the operating current in real time. For example, when the leakage current value in the second electrical performance data suddenly increases, the infrared thermal imager detects a local hot spot. The judgment module inputs this thermally induced effect parameter into the coupled analysis model to calculate the additional change in the chamber volume of vacuum cavity 5 caused by the thermally induced effect. For example, thermal expansion causes an instantaneous increase in volume of 0.5%. The model assesses its additional adsorption effect on the getter layer. For example, high temperature accelerates the chemical reaction rate of the getter, causing the preset getter capacity to be consumed by 10% prematurely. The model determines whether the chamber volume stability has failed by comparing the relationship between the additional change and the baseline deformation range. For example, if the additional change exceeds the tolerance after being superimposed on the original deformation, the model outputs the conclusion that the secondary impact of the thermally induced effect on the overall performance exceeds the limit.

[0039] The judgment module aggregates all data and executes judgment logic. If the first deformation coefficient value is not within the first deformation range or the second deformation coefficient value is not within the second deformation range, the thermally induced deformation of elastomer 6 is determined to exceed the tolerance. If the first vacuum degree value does not meet the first vacuum degree standard or the second vacuum degree value does not meet the second vacuum degree standard, the preset getter capacity of the getter layer is determined to be failed. Simultaneously, the module combines the characteristics of electrical performance data changes, illustrating with an example the abrupt change slope of the resistance drift value during temperature rise, to quantify the strength of the influence relationship between packaging quality and electrical performance data. An example shows that an influence relationship strength value between 0.8 and 1.0 indicates a severe correlation. Finally, the system outputs a packaging quality grading report, including three levels of conclusion: qualified, requires calibration, or failed. The category requiring calibration directly triggers the threshold update procedure of the calibration module.

[0040] Regarding the complete implementation process of the testing method, in this embodiment, after the temperature testing module starts the temperature cycling program, the working temperature is sequentially set to multiple working temperature points within the first temperature range. After each temperature point stabilizes, the current testing module applies a first working current, while the image acquisition module captures the volume image data of the vacuum cavity and calculates the first deformation coefficient value. The vacuum sensing module records the first vacuum degree value, and the current testing module simultaneously collects the first electrical performance data. Subsequently, the module switches to multiple working temperature points within the second temperature range and repeats the above process to obtain the second deformation coefficient value, the second vacuum degree value, and the second electrical performance data. During the temperature cycling process, the image acquisition module continuously monitors the change in the third deformation coefficient value of the elastomer and quantifies the aging degree data of the getter layer through the getter state monitoring unit. For example, a degradation curve is shown with the number of cycles as the horizontal axis and the adsorption capacity retention rate as the vertical axis. When the fluctuation of the third deformation coefficient exceeds the third fluctuation threshold, the judgment module immediately correlates the fluctuation with the aging data. For example, if the fluctuation amplitude is positively correlated with the degradation rate of the getter layer, and the fluctuation amplitude increases by 2% for every 5% increase in the degradation rate, it is determined that the preset getter capacity of the getter layer has failed to effectively suppress the chamber volume fluctuation. At the same time, the calibration module updates the test threshold data based on this relationship. For example, the third fluctuation threshold is lowered by 15% to adapt to the accelerated aging of the package.

[0041] During electrical performance data measurement, the current testing module identifies the thermal effects caused by the operating current in real time. For example, when the leakage current value in the second electrical performance data suddenly increases, the infrared thermal imager detects a local hot spot. The judgment module inputs this thermal effect parameter into the coupled analysis model to calculate the additional change in the chamber volume caused by the thermal effect. For example, thermal expansion causes an instantaneous increase in volume of 0.5%. The model assesses its additional adsorption effect on the getter layer. For example, high temperature accelerates the chemical reaction rate of the getter, causing the preset getter capacity to be consumed by 10% prematurely. The model determines whether the chamber volume stability has failed by comparing the relationship between the additional change and the baseline deformation range. For example, if the additional change exceeds the tolerance after being superimposed on the original deformation, the model outputs a conclusion that the secondary impact of the thermal effect on the overall performance exceeds the limit.

[0042] The judgment module aggregates all data and executes judgment logic. If the first deformation coefficient value is not within the first deformation range or the second deformation coefficient value is not within the second deformation range, the elastomer's thermally induced deformation is determined to exceed the tolerance. If the first vacuum degree value does not meet the first vacuum degree standard or the second vacuum degree value does not meet the second vacuum degree standard, the getter layer's preset getter capacity is determined to have failed. Simultaneously, the module combines the characteristics of electrical performance data changes, illustrating with examples the abrupt change slope of resistance drift values ​​during temperature rises, to quantify the strength of the influence relationship between packaging quality and electrical performance data. For example, an influence relationship strength value between 0.8 and 1.0 indicates a severe correlation. Finally, the system outputs a packaging quality grading report, including three levels of conclusion: qualified, requires calibration, or failed. The category requiring calibration directly triggers the threshold update procedure of the calibration module.

[0043] This embodiment avoids the limitations of single-temperature-point testing in its multi-temperature-point verification mechanism, accurately capturing the dynamic applicability of preset conditions during temperature cycling through gridded coverage of operating temperature points. Furthermore, in terms of aging data closure, aging data of the getter layer and elastomer are used as the core source of calibration thresholds, establishing an adaptive link from temperature cycling to aging monitoring to threshold calibration. Simultaneously, in terms of secondary effect coupling analysis, the thermally induced effect caused by the operating current is incorporated into the packaging quality assessment framework, modeling the correlation between additional changes in chamber volume and additional adsorption of the getter layer. The above description and accompanying drawings fully illustrate embodiments of this disclosure to enable those skilled in the art to practice them. Other embodiments may include structural, logical, electrical, procedural, and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operations may vary. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. Moreover, the terminology used in this application is for descriptive purposes only and is not intended to limit the claims. As used in the description of the embodiments and claims, unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “the” are intended to also include the plural forms. Similarly, the term “and / or” as used herein means including one or more of the associated listed any and all possible combinations. Additionally, when used herein, the terms “comprise” and its variations “comprises” and / or “comprising” refer to the presence of stated features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof. Without further limitations, an element defined by the phrase “comprising an…” does not exclude the presence of additional identical elements in the process, method, or apparatus that includes said element. In this document, each embodiment may focus on the differences from other embodiments, and similar or identical parts between embodiments can be referred to mutually. For methods, products, etc., disclosed in the embodiments, if they correspond to the method section disclosed in the embodiments, the relevant parts can be referred to the description of the method section.

[0044] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented using electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods for each specific application to achieve the described functions, but such implementation should not be considered beyond the scope of the embodiments of this disclosure. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the described devices, apparatuses, and units can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0045] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, function, and operation of possible implementations of apparatus, methods, and computer program products according to embodiments of the present disclosure. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. In some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. In the descriptions corresponding to the flowcharts and block diagrams in the accompanying drawings, the operations or steps corresponding to different blocks may also occur in a different order than those disclosed in the description; sometimes there is no specific order between different operations or steps. For example, two consecutive operations or steps may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. Each block in a block diagram and / or flowchart, and combinations of blocks in a block diagram and / or flowchart, can be implemented using a dedicated hardware-based device that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

Claims

1. A vacuum packaging for a component, characterized in that, Includes the first electrode section, the second electrode section, the outer casing, and the components; The first electrode and the second electrode are connected to the component. The first electrode, the second electrode, and the outer casing together define a vacuum cavity, and the component is located in the vacuum cavity. The vacuum cavity has at least a first vacuum degree defined by a first preset condition and a second vacuum degree defined by a second preset condition. It also includes a getter layer, which is disposed at the interface between the outer shell and the first electrode and the second electrode, and in an elastic body disposed in the vacuum cavity. The elastic body undergoes thermal deformation at different temperature ranges, and the vacuum cavity is defined by the thermal deformation of the elastic body to obtain different chamber volumes. The getter layer is configured to have a preset getter capacity.

2. The component vacuum packaging according to claim 1, characterized in that, The first preset condition is that the operating temperature of the component is within a first temperature range, the thermally induced deformation of the elastomer is limited to a first deformation range, and the chamber volume change rate of the vacuum cavity is within a first volume change range; The second preset condition is that the operating temperature of the component is within a second temperature range, the thermally induced deformation of the elasticity is limited to a second deformation range, and the chamber volume change rate of the vacuum cavity is within a second volume change range.

3. A testing system for vacuum packaging of electronic components, used to test the vacuum packaging of electronic components as described in claim 1 or 2, characterized in that, include: The temperature testing module is configured to set the operating temperature of the vacuum packaging of the component; The current test module is configured to test the electrical performance data of components under different operating temperatures and different operating currents; The image acquisition module is configured to acquire volume image data of the vacuum chamber obtained by image recognition of the component package; A vacuum sensing module is configured to acquire vacuum level data within the vacuum cavity encapsulated by the component; The judgment module is configured to acquire the electrical performance data, the volume image data, and the vacuum degree data, and determine the packaging quality according to a preset parameter mapping table.

4. The test system for vacuum packaging of components according to claim 3, characterized in that, It also includes a calibration module, which receives data from the judgment module, calibrates the test threshold data of the judgment module during the test process, and the calibration period preset by the calibration module has a linear mapping relationship with the cycle period of the temperature test module performing the temperature cycle.

5. A testing method for vacuum packaging of electronic components, implemented based on the testing system for vacuum packaging of electronic components as described in claim 4, characterized in that, Includes the following steps: Perform a temperature cycling test. At multiple operating temperature points within a first temperature range, apply a first operating current to the component and measure the first vacuum level of the vacuum chamber, the first deformation coefficient of the elastomer, and the first electrical performance data of the component. At multiple operating temperature points within the second temperature range, a second operating current is applied to the component, and the second vacuum degree value of the vacuum cavity, the second deformation coefficient value of the elastomer, and the second electrical performance data of the component are measured. The first vacuum degree value, the first deformation coefficient value, and the first electrical performance data are obtained, and according to the preset parameter mapping table, it is determined whether the first deformation coefficient value is within the first deformation range, whether the first vacuum degree value meets the first vacuum degree standard, and whether the first electrical performance data meets the first electrical performance standard. Simultaneously, the second vacuum degree value, the second deformation coefficient value, and the second electrical performance data are acquired, and based on the preset parameter mapping table, it is determined whether the second deformation coefficient value is within the second deformation range, whether the second vacuum degree value meets the second vacuum degree standard, and whether the second electrical performance data meets the second electrical performance standard. When the first deformation coefficient value is not within the first deformation range or the second deformation coefficient value is not within the second deformation range, it is determined that the thermal deformation of the elastomer exceeds the tolerance, resulting in abnormal chamber volume. When the first vacuum value does not meet the first vacuum standard or the second vacuum value does not meet the second vacuum standard, the preset gas absorption capacity of the getter layer is determined to be invalid. Based on the measurement results of the multiple operating temperature points, the variation characteristics of the first and second electrical performance data under different temperature environments are analyzed to determine the influence relationship between packaging quality and electrical performance data, so as to verify the applicability of the first and second preset conditions in temperature cycling.

6. The test method for vacuum packaging of components according to claim 5, characterized in that, The first operating current and the second operating current are determined based on the first temperature range and the second temperature range, and the first operating current corresponds to the operating conditions of the first temperature range, and the second operating current corresponds to the operating conditions of the second temperature range.

7. The test method for vacuum packaging of components according to claim 6, characterized in that, Before measuring the first and second vacuum values, a temperature cycling step is also included: The package was placed in a temperature cycling environment and a temperature cycling test was performed. During each temperature cycle, the change in the third deformation coefficient of the elastomer and the aging data of the getter layer were monitored. The aging data is obtained to determine the influence of different encapsulation qualities on the aging of the getter layer and the elastomer. When the fluctuation range of the third deformation coefficient value is greater than the third fluctuation threshold, it is determined that the preset getter capacity of the getter layer has not effectively suppressed the chamber volume fluctuation; the influence relationship is used to calibrate the test threshold data in the test method, and the cycle period of the temperature cycle has a linear mapping relationship with the calibration cycle.

8. The test method for vacuum packaging of components according to claim 7, characterized in that, The measurement of the first electrical performance data and the second electrical performance data includes: When measuring electrical performance data, the thermal effect caused by the operating current is obtained, which leads to additional changes in the chamber volume of the vacuum cavity and additional adsorption of the getter layer. Record the resistance drift value of the components. When the resistance drift value exceeds the first drift threshold or the second drift threshold, it is determined that the additional change in the chamber volume and additional adsorption have caused the electrical performance failure. The secondary effects of the thermal induced effect on the elastomer and getter layer are correlated with the packaging quality. The combined effect of the secondary effect on the chamber volume stability and getter layer adsorption performance is analyzed to determine the overall performance of the vacuum packaging of the components.

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