Multi-stage energy-saving regulation and control auto-cascade ultralow-temperature water vapor trapping pump system

Abstract

The invention discloses a multi-stage energy-saving regulation and control auto-cascade ultralow-temperature water vapor trapping pump system, which belongs to the technical field of vacuum obtaining equipment and comprises a compressor, a condenser, a heat regenerator, a throttling assembly, a cold trap and a gas-liquid separator which are connected through a pipeline, the method is characterized in that a basic energy-saving unit with an energy adjusting compressor integrated with a frequency conversion control function as a core is constructed, a system pressure adjusting unit comprising an energy adjusting control valve and an air storage tank and / or an adjustable throttling unit composed of a parallel capillary tube and a throttling control valve can be selectively configured, and the control unit controls the energy adjusting compressor according to system pressure and temperature parameters. The units are subjected to combined and hierarchical intelligent control, through different combination and cooperation of the basic energy-saving unit, the system pressure regulating unit and the adjustable throttling unit, the system can adapt to various working conditions and energy-saving requirements, and the system energy consumption is remarkably reduced while the ultralow-temperature refrigeration performance is ensured.

Description

Technical Field

[0001] This invention relates to the field of vacuum acquisition and cryogenic refrigeration technology, specifically to an ultra-low temperature water vapor capture pump (also known as a cryogenic cold trap) for obtaining and maintaining a high vacuum environment, and more particularly to a multi-stage energy-saving refrigeration system that achieves high-efficiency and low-energy-consumption operation through modular, combinable energy-saving units. Background Technology

[0002] Cryogenic water vapor capture pumps are indispensable key equipment in fields such as semiconductor manufacturing, vacuum coating, and precision analytical instruments. Their core function is to cool the cold trap to -140°C or even lower through a single-stage self-cascading throttling system and a mixed working fluid throttling refrigeration system, thereby condensing and capturing water vapor and other condensable gases in the vacuum chamber to quickly obtain the required high vacuum. These devices usually need to operate continuously for a long time, resulting in extremely high energy consumption. Energy saving and consumption reduction have become the key direction of technological development in the industry.

[0003] Currently, the energy-saving technologies used in the industry mainly include: setting up air tanks and pressure relief valves in the system to stabilize the starting pressure; and using multi-stage fixed capillary tube throttling circulation to improve refrigeration efficiency. However, this usually requires the compressor to run continuously to achieve the purpose of cold storage, and cannot achieve precise control of the required temperature. It often has to run at full power for a long time, and the temperature control and energy-saving effects are limited.

[0004] However, in practical applications, these technologies often exhibit unclear control logic and are not energy-efficient. For example, fixed throttling is difficult to match with changing loads, resulting in energy loss; the gas storage tank is only used for safety depressurization and does not participate in active energy efficiency regulation. In addition, when the system switches between different operating modes (such as start-up, standby, cooling, and defrosting), additional energy consumption and temperature fluctuations often occur due to rigid control. Therefore, there is an urgent need for a solution that can flexibly combine the above technologies and make them work together organically through intelligent control, thereby achieving optimal system-level energy efficiency.

[0005] In current industry applications, most commercially operating cryogenic water vapor capture pumps, due to cost control, system complexity, and reliability considerations, still generally use traditional fixed-frequency and fixed-capacity compressors as the core of their refrigeration systems. This means that the compressors operate at a constant speed and the discharge volume is not adjustable. To match changing loads, the system can only be roughly controlled through a simple "on-off" cycle, or it may operate under inefficient full-load conditions for a long time. This basic architecture leads to inherent energy efficiency defects in the equipment: when the load is low, the compressor still operates at full power, resulting in huge energy waste; during startup and sudden load changes, large current surges and temperature fluctuations are generated, affecting equipment lifespan and process stability.

[0006] As mentioned earlier, advanced technologies such as variable frequency speed control and compressor energy regulation have been proposed in theory or tried in a few high-end models. However, they usually exist as isolated optional functions and have not become standard configurations for mainstream equipment in the industry, let alone formed a system-level integrated solution. Therefore, the industry has long faced the contradiction of "the existence of efficient technologies" and "high energy consumption of commonly used equipment". This invention is aimed at this common industry pain point and aims to provide a practical solution that standardizes and modularizes multiple advanced energy-saving technologies and maximizes their advantages through intelligent control, so as to promote the upgrading of the overall energy efficiency level of the industry. Summary of the Invention

[0007] This invention aims to overcome the shortcomings of existing technologies and provide a modular, flexibly configurable, and multi-level energy-saving self-cascading cryogenic water vapor capture pump system. Its core lies in encapsulating different energy-saving technologies into standardized functional units. Users can select different unit combinations according to actual needs, and the system control unit executes corresponding and optimized hierarchical control strategies for the selected combinations, thereby achieving maximum energy saving while ensuring performance.

[0008] To make the innovative points of this invention clearer, the traditional refrigeration circuit on which the cryogenic water vapor capture pump is based will first be described. This basic circuit is a single-stage self-cascade refrigeration cycle system using a mixed working fluid, and its typical process and the functions of each component are as follows:

[0009] 1. Compressor: As the power source of the system, it is usually a fixed-frequency and fixed-capacity compressor. It draws in low-temperature and low-pressure gaseous refrigerant and compresses it into high-temperature and high-pressure superheated vapor.

[0010] 2. Oil separator: Located at the compressor discharge port, it is used to separate and recover the refrigeration oil carried out by the compressed gas, ensuring that the lubricating oil returns to the compressor crankcase, while clean refrigerant enters the subsequent pipeline.

[0011] 3. Condenser (usually water-cooled): The high-temperature and high-pressure refrigerant gas is cooled by the cooling water here, and condenses into a normal-temperature and high-pressure liquid (or a gas-liquid mixture).

[0012] 4. Dryer filter: Used to adsorb trace amounts of moisture that may be contained in the refrigerant and filter solid impurities to prevent "ice blockage or dirt blockage" in the system.

[0013] 5. Regenerator (or gas-liquid heat exchanger): An internal heat exchange device. The ambient temperature, high-pressure liquid (or gas-liquid mixture) flowing from the condenser exchanges heat counter-currently with the low-temperature, low-pressure gas returning from the downstream evaporator (cold trap). The purpose is to further cool the high-pressure side liquid, increasing subcooling, while simultaneously heating the low-pressure side return gas, increasing the compressor suction superheat, thereby improving system efficiency and operational safety.

[0014] 6. Gas-liquid separator (usually multi-stage): Located between each stage of throttling heat exchange and after the cold trap, its function is to separate gaseous and liquid refrigerant, ensuring that only gaseous or liquid components of a specific type enter the next stage. It is a key component for maintaining stable operation of the self-cascade cycle.

[0015] 7. Throttling Components and Heat Exchanger Assembly: This is the core component for achieving low temperatures, typically consisting of multiple stages (e.g., three or four stages) of fixed throttling capillary tubes connected in series with corresponding heat exchangers. The high-pressure refrigerant first enters the first-stage gas-liquid separator. The separated gas and liquid phases enter parallel flow paths. The liquid phase is throttled by the first-stage capillary tube, expanding into a low-temperature, low-pressure gas-liquid mixture, which then enters the first-stage heat exchanger for evaporation and heat absorption. Meanwhile, the gas phase is condensed and releases heat within the same heat exchanger. This process is repeated stage by stage, with each stage separating components with higher boiling points and throttling them for evaporation, thereby exchanging heat with components with lower boiling points. Ultimately, the component with the lowest boiling point in the working fluid mixture is cooled and liquefied stage by stage.

[0016] 8. Cold Trap (Load): After the final throttling stage, the obtained ultra-low temperature, low-pressure liquid refrigerant (down to -160°C or below) enters the evaporation tube of the cold trap. Here, it absorbs heat from water vapor and other gases in the vacuum chamber, causing them to condense and solidify on the surface of the cold trap, thus achieving the trapping function. The refrigerant itself evaporates into a low-temperature, low-pressure gas.

[0017] After completing the capture process, the low-temperature, low-pressure gaseous refrigerant flows sequentially through the low-pressure side of each stage of heat exchanger and the regenerator, and is finally drawn into the compressor to begin the next cycle.

[0018] I. System Composition The system of this invention introduces a modular energy-saving unit design based on the traditional refrigeration circuit (compressor → oil separator → condenser → dryer filter → regenerator → gas-liquid separator → throttling component → cold trap → return to compressor): (1) Basic energy-saving unit (core essential unit): This unit is the cornerstone of the entire system's energy saving. Its core is an energy regulating compressor. This compressor not only integrates frequency conversion control function (that is, its speed can be steplessly adjusted by changing the input electrical frequency), but also has the ability to switch between multiple fixed exhaust volume levels (e.g., 100%, 70%, 40%) through mechanical means (such as closing some cylinders or controlling the intake and exhaust volume). This unit provides energy-saving solutions of "coarse adjustment of the level" and "fine adjustment of the frequency". Combining the two will improve the overall energy-saving effect.

[0019] (2) First additional energy-saving unit (system pressure regulating unit): This unit is used to realize system-level pressure and energy management. It includes a gas storage tank, a first energy regulating control valve and a second energy regulating control valve. The first energy regulating control valve is connected between the high-pressure side of the system (such as after the condenser) and the inlet of the gas storage tank. It is used to introduce excess gaseous refrigerant into the gas storage tank for storage when needed. The second energy regulating control valve is connected between the outlet of the gas storage tank and the low-pressure side of the system (such as the suction end of the compressor). It is used to replenish the refrigerant in the gas storage tank back to the system when needed. This unit is equivalent to the system's "energy buffer pool".

[0020] (3) Second additional energy-saving unit (adjustable flow unit): This unit is used to realize the fine and programmable adjustment of refrigerant flow. It replaces the fixed throttling capillary tubes at each stage in the traditional circuit with corresponding, independently controllable multi-stage adjustable flow components. Each stage component consists of one or more parallel throttling capillary tubes, and a throttling control valve (usually an on / off type solenoid valve) is connected in series at the front end of each capillary tube. By controlling the opening and closing combination of these valves, the effective flow area of ​​each throttling stage can be dynamically changed, thereby accurately controlling the refrigerant flow and throttling effect at each stage of the system, so as to achieve the purpose of matching load and controlling cooling capacity.

[0021] (4) Control Unit: As the brain of the system, the control unit (e.g., PLC) is connected to all the above units. It integrates a PID control module to receive real-time signals from pressure sensors and temperature sensors (e.g., exhaust temperature, cryogenic temperature, load temperature, reflux temperature) from various parts of the system. Based on these signals and preset control logic, the PID module calculates precise control commands and outputs them to the energy regulating compressor (controlling its capacity level and frequency conversion), energy regulating control valve, and throttling control valve.

[0022] II. Combination Method and Protection Core The innovation and core protection of this invention lie in the specific combination of the energy-saving units and their corresponding control logic. By selectively combining the energy-saving units, various system implementation methods with different energy-saving focuses and technical advantages can be formed, mainly including: (1) In one embodiment, the system includes the basic energy-saving unit and the first additional energy-saving unit (system pressure regulating unit). This embodiment adds the function of regulating and controlling energy cache management on the basis of having system pressure cache. It is particularly suitable for occasions where the load changes significantly or low temperature needs to be maintained for a long time. It can achieve "peak shaving and valley filling" of load through refrigerant storage and access, thereby enhancing operational stability and energy saving depth.

[0023] (2) In another embodiment, the system includes the basic energy-saving unit and the second additional energy-saving unit (adjustable flow unit). This embodiment focuses on achieving precise control of the refrigerant flow at the end in addition to power regulation, and is particularly suitable for applications with extreme requirements for temperature control accuracy and fluctuation range.

[0024] (3) In another embodiment, the system includes the basic energy-saving unit, the first additional energy-saving unit and the second additional energy-saving unit. This embodiment integrates all three-level adjustment means, has the most comprehensive working condition adaptability and the best energy-saving potential, and can intelligently call the most suitable adjustment combination according to complex operating conditions, and combine PID control to realize global optimization of system-level energy efficiency and ultra-precise temperature control.

[0025] (4) The control unit is configured to recognize the hardware configuration of the system and execute the optimal hierarchical control strategy corresponding to the different implementation methods described above.

[0026] III. Control Methods The control unit implements a hierarchical intelligent control method, the key of which lies in "calling up" the adjustment functions of different units "on demand" according to the system configuration and real-time operating conditions. The control unit has pre-stored a variety of control strategies and parameter sets corresponding to different combinations of energy-saving units. Its PID control module can first identify the current hardware configuration of the system, then automatically select and call the corresponding hierarchical control strategy, perform PID calculations based on the strategy, and output control commands. Taking the energy-saving control during the temperature maintenance phase as an example, its typical hierarchical logic is as follows: First layer (power regulation): When the temperature reaches the set point, the control unit selectively adjusts the cooling power by adjusting the capacity setting of the energy regulating compressor and / or its integrated frequency conversion control function, according to the system operating status.

[0027] The second layer (frequency fine-tuning): Under the switched capacity level, PID adjustment is performed through its integrated frequency conversion function to finely match load fluctuations and achieve stable maintenance.

[0028] The third layer (system pressure regulation): If the first additional energy-saving unit is configured, and the cooling capacity is still excessive after the above regulation, the first energy-regulating control valve is opened to store some refrigerant in the gas tank, thereby reducing the system circulation volume and compressor load.

[0029] Fourth layer (flow fine adjustment): If a second additional energy-saving unit is configured, and it is still necessary to further reduce the cooling capacity, gradually close some throttling control valves according to load, temperature, and pressure to increase the system flow resistance and reduce the load from the terminal.

[0030] Furthermore, to achieve a balance between extreme energy saving and rapid response, the control unit can also execute a deep predictive standby energy-saving program. When the system's cold storage reaches a preset cryogenic temperature (e.g., -150°C), if it is determined that a long no-load interval will be entered, the control unit will instruct the energy-regulating compressor to stop running. At the same time, to maintain the system's cooling capacity and prevent ineffective refrigerant circulation, the control unit will close the throttling control valve connected to the liquid outlet of the gas-liquid separator, and simultaneously close the first and second energy-regulating control valves, completely isolating the gas storage tank from the system's main circuit. This effectively seals the liquid refrigerant inside the system, allowing the entire refrigeration circuit to enter a near-static "cold storage and maintenance state." In this state, the compressor operates with zero energy consumption, and because refrigerant evaporation is suppressed, the system's cold loss rate is extremely low; for example, it can naturally rise from -150°C to -100°C for more than one hour.

[0031] When the control unit predicts an upcoming cooling demand based on learned user habits, or receives an immediate cooling command, it will quickly restart the energy regulating compressor and gradually or as needed open the corresponding throttling control valve, the first energy regulating control valve, and the second energy regulating control valve according to preset logic. Since the core system temperature remains at a low level and the refrigerant supply is sufficient, it can rapidly cool down from -100°C to the operating temperature of -150°C in a very short time (e.g., within 1 minute), achieving a seamless and rapid switch from deep energy saving to full-power cooling.

[0032] The control unit can intelligently determine which adjustment layer to enter based on sensor feedback and smoothly switch between layers. In addition, the method also includes strategies such as optimizing high pressure or temperature caused by heavy load, prioritizing frequency reduction rather than pressure relief, rapid cooling based on pressure feedback, and predictive start-stop based on learning user habits.

[0033] Beneficial effects Compared with the prior art, the present invention has the following significant advantages: 1. Modularity and Configurability: By defining a basic energy-saving unit, a first additional energy-saving unit (voltage regulation), and a second additional energy-saving unit (current throttling), the product can be flexibly configured into a system containing the basic energy-saving unit and the first additional energy-saving unit, or the basic energy-saving unit and the second additional energy-saving unit, or all three, depending on specific performance requirements and cost considerations. This modular design concept constructs a clear and hierarchical protection system for the patent claims.

[0034] 2. Significant and intelligent energy efficiency improvement: Through a hierarchical, "on-demand" control strategy, the system can always match the current load in the most economical way. In the implementation with a voltage regulating unit, it can effectively smooth load fluctuations and achieve deep energy saving. In the implementation with an adjustable flow unit, it can achieve extremely high temperature stability and energy efficiency. In the implementation with full unit integration, it can further maximize the global system-level energy efficiency through intelligent optimization. The comprehensive energy saving effect far exceeds that of a single technology application. Without reducing the moisture capture capacity, it achieves the technical challenges of the highest energy efficiency, the best energy saving efficiency, and the best temperature control accuracy.

[0035] 3. Stable and reliable operation: Pressure and temperature protection are deeply integrated into the daily control logic, transforming passive protection into active regulation. In particular, the introduction of the first additional energy-saving unit greatly buffers system pressure fluctuations, improves operational stability, and extends equipment life. In addition to the basic control unit's ability to reduce energy consumption, this combined application can also significantly reduce equipment wear while lowering the rotational speed.

[0036] 4. Fast response and excellent user experience: Optimized startup and mode switching logic reduces waiting time; intelligent learning function enables the device to adapt to user habits and prepare in advance before cooling is needed, achieving a balance between energy saving and convenience.

[0037] 5. The optimized startup and mode switching logic reduces waiting time. In particular, through the deep predictive standby energy-saving program, the system can enter a cold storage state where the compressor is completely shut down and the cold energy is slowly lost when there is no demand, achieving zero energy consumption during standby. At the same time, the intelligent learning function enables the device to accurately predict usage demand and start up within a very short time (such as 1 minute) before cooling is needed. It can quickly recover from a higher storage temperature (such as -100℃) to a deep-cold working temperature (such as -150℃), completely eliminating the drawback of traditional equipment that requires a long cold storage time from room temperature. It perfectly balances "extremely low standby energy consumption" and "instant cooling capability". Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the piping and control system connections for a specific implementation of the system described in this invention under a full-function configuration (i.e., simultaneously including the basic, first, and second additional energy-saving units).

[0039] Figure 2 This is a schematic diagram of an implementation of the system described in this invention, which includes a basic energy-saving unit and a first additional energy-saving unit (system voltage regulating unit).

[0040] Figure 3 This is a schematic diagram of an implementation of the system described in this invention, which includes a basic energy-saving unit and a second additional energy-saving unit (adjustable flow unit).

[0041] The components shown in the diagram and their numbers are as follows: Control unit 1 (including PID module), Energy regulating compressor 2 (integrated frequency conversion function), Oil separator 3, Condenser 4, Dryer filter 5, Cold trap 6 (load), First energy regulating control valve 7, Second energy regulating control valve 8, Gas storage tank 9, Regenerator 10, First-stage gas-liquid separator 11, Second-stage gas-liquid separator 12, Third-stage gas-liquid separator 13, First heat exchanger 14, Second heat exchanger 15, Third heat exchanger 16, Fourth heat exchanger 17. Throttling control valves 1-A18, 1-B19, 2-A20, 2-B21, 3-A22, 3-B23, 4-A24, and 4-B25; capillary tubes 1-A26, 1-B27, 2-A28, 2-B29, 3-A30, 3-B31, 4-A32, and 4-B33. The system includes pressure sensors (P) and temperature sensors (T), whose signals are connected to the PID module of control unit 1. Detailed Implementation

[0042] It should be noted that, in the various embodiments of the present invention, the "throttling control valve" refers to a valve designed to enable the on / off or flow regulation of the capillary flow path. Specific implementation methods include, but are not limited to, on / off type solenoid valves (switching valves), proportional regulating valves, electronic expansion valves, or other throttling valves with similar functions. The throttling control valve is preferably an on / off type solenoid valve. The on / off and flow regulation of the flow path are achieved through the combination of opening and closing multiple solenoid valves. Regardless of the specific valve type used, as long as it can respond to the instructions of the control unit and enable the on / off or continuous regulation of the refrigerant flow in the capillary branch, it should fall within the protection scope of the "throttling control valve" described in the present invention.

[0043] The present invention will now be described in detail with reference to the accompanying drawings and three specific system implementations.

[0044] The first implementation method (corresponding to a combination of a basic energy-saving unit and a system voltage regulation unit) This embodiment corresponds to the system scheme in claim 1 that includes the first additional energy-saving unit (system voltage regulating unit) but does not include the second additional energy-saving unit (adjustable flow unit), such as... Figure 2As shown, the system adds a system pressure regulating unit (i.e., the first additional energy-saving unit) to the basic refrigeration circuit, which includes an energy regulating compressor (2), an oil separator (3), a condenser (4), a dryer filter (5), a regenerator (10), a cold trap (6), a multi-stage gas-liquid separator (11, 12, 13), and a throttling assembly composed of multi-stage fixed capillary tubes. The throttling assembly is a conventional, non-adjustable multi-stage fixed capillary tube assembly.

[0045] Workflow and energy-saving control: (1) Rapid cooling: When the system starts, the control unit 1 instructs the compressor 2 to start at a low frequency (e.g., 35Hz) and a small capacity setting (e.g., 40%) to reduce the impact. After the pressure stabilizes, in order to accelerate cooling, the second energy regulation control valve 8 is opened to replenish the refrigerant in the gas storage tank 9 into the system to maintain low compression ratio operation.

[0046] (2) Cooling maintenance energy saving: When the load temperature of the cold trap 6 reaches the set point (e.g. -120℃), the control unit 1 starts the layered energy saving.

[0047] (3) Second layer intervention: First adjust the capacity of compressor 2 to 70%, and then use frequency conversion PID adjustment, or use only one of the above methods to stabilize the temperature.

[0048] (4) Third layer intervention: If the excess cooling capacity causes the load temperature to continue to drop, the first energy adjustment control valve 7 is opened to store the excess refrigerant in the gas storage tank 9. The system pressure and load temperature drop, and the energy consumption is further reduced. When the load increases, the amount of refrigerant replenished to the system can be adjusted through the second energy adjustment control valve 8.

[0049] (5) Effect: This implementation method adds system-level load regulation capability on the basis of basic frequency conversion energy regulation, resulting in significant energy saving, and is especially suitable for long-term application under stable operating conditions.

[0050] The second implementation method (corresponding to a combination of a basic energy-saving unit and an adjustable flow unit) This embodiment corresponds to the system scheme in claim 1 that includes the second additional energy-saving unit (adjustable flow unit) but does not include the first additional energy-saving unit (system voltage regulating unit), such as... Figure 3As shown, in the basic refrigeration circuit including energy regulating compressor (2), oil separator (3), condenser (4), dryer filter (5), regenerator (10), cold trap (6) and multi-stage gas-liquid separator (11, 12, 13), the conventional fixed throttling component is replaced with an adjustable flow unit (i.e., the second additional energy-saving unit) consisting of multi-stage parallel capillary tubes (26-33) and throttling control valves (18-25) connected in series at their inlet ends. In this embodiment, the gas storage tank (9) and energy regulating control valves (7, 8) are not configured.

[0051] Workflow and energy-saving control: 1. Standby depth maintenance: In standby mode, the cryogenic temperature (such as the outlet of the third heat exchanger 16) reaches -145℃.

[0052] 2. Layered energy saving: (1) First and second layers: Control unit 1 first adjusts compressor 2 to the lowest capacity setting (40%), and then reduces the frequency to near the lower limit (e.g., 30Hz).

[0053] (2) Fourth-level intervention: If the temperature continues to drop slowly, control unit 1 initiates throttling fine adjustment. For example, it closes at least one throttling control valve in a certain adjustable flow assembly according to a preset strategy. Due to the intensified throttling, the evaporation pressure drops, and the compressor load is further reduced significantly. Through PID judgment, each level of valve can be finely adjusted sequentially until the temperature stabilizes within a very small fluctuation range (e.g., ±0.1℃).

[0054] 3. Effects: This implementation method achieves extremely high-precision flow control and excellent temperature stability. By precisely matching the refrigerant flow, it effectively avoids the excessive supply and energy waste caused by traditional fixed throttling under low load. Thus, while ensuring process accuracy, it further improves the overall energy efficiency of the system, making it particularly suitable for applications with stringent requirements for temperature control accuracy.

[0055] The third implementation method (corresponding to a combination that includes all energy-saving units) This embodiment corresponds to the system scheme described in claim 2, which simultaneously includes the first additional energy-saving unit and the second additional energy-saving unit, i.e., a full-function configuration. Figure 1 As shown, the system integrates a system pressure regulating unit consisting of a gas storage tank (9) and an energy regulating control valve (7, 8) on top of the basic refrigeration circuit, as well as an adjustable flow unit consisting of multi-stage parallel capillary tubes (26-33) and a throttling control valve (18-25).

[0056] 1. Workflow and Intelligent Control: (1) Start-up and mode switching: It has the most comprehensive optimization capabilities. During startup, the voltage regulation unit can be used to quickly establish and maintain the optimal compression ratio required for efficient system operation, thereby significantly reducing the energy consumption during startup and achieving rapid and efficient cooling. During standby, frequency conversion regulation, capacity regulation and throttling regulation can be used in combination. Through multi-level coordinated control, the system can maintain a cold storage state or shut down at extremely low power consumption.

[0057] (2) Handling complex working conditions: For example, when the external load is extremely unstable, the temperature can be adjusted and controlled in multiple ways to achieve stable temperature with the lowest energy consumption.

[0058] (3) Optimal energy efficiency search: The control unit 1 can intelligently select the combination path with the highest current energy efficiency from multiple adjustment dimensions (capacity, frequency, energy regulation, and throttling) based on real-time data to achieve global optimization.

[0059] 2. Effect: This implementation method has the strongest adaptability and the highest potential energy efficiency, and is suitable for scenarios with complex working conditions and extremely high requirements for energy consumption and temperature control.

[0060] Example of predictive standby energy saving: When the cold trap temperature reaches -150℃ and the system predicts a no-load period of more than 5 minutes, control unit 1 initiates a deep energy-saving program: compressor 2 is stopped; throttling control valves (18-25) in all adjustable flow components are closed to block the throttling of high-pressure liquid refrigerant; simultaneously, the first energy-regulating control valve 7 and the second energy-regulating control valve 8 are closed, creating a sealed isolation between the gas storage tank 9 and the system main circuit. The system enters a static cold storage state. In this state, the temperature rises from -150℃ to -100℃ in over 60 minutes, during which the compressor consumes zero power. One minute before the predicted cooling demand, control unit 1 restarts compressor 2 and opens the aforementioned valves. The system can then rapidly cool from -100℃ to -150℃ in approximately one minute, achieving an optimal balance between energy saving and response.

[0061] Data comparison test data and energy-saving principle explanation To quantitatively illustrate the energy-saving effect of the third embodiment of the present invention (fully integrated system), it was compared with a conventional device of the same type that operates continuously at full power without fine-tuning function under the following standard test conditions. The key data comparison is shown in the table below: Test conditions: ambient temperature 25℃; cooling water supply temperature 15℃; cold trap load 50% of nominal capture capacity; the system had been running stably before the test, and the data acquisition time was 24 consecutive hours.

[0062] Table 1. Performance Comparison of the Invention (Third Embodiment) with Traditional Equipment

[0063] The working principle of the data in the table above is based on the multi-level control capability of the system of this invention:

[0064] Normal deep energy saving state: When the system activates all energy saving programs (i.e., the basic energy saving unit, the first additional energy saving unit, and the second additional energy saving unit work together), the control unit 1 can instruct the energy regulating compressor 2 to shut down two sets of cylinders (capacity reduced to the lowest level) and control its integrated frequency conversion function to operate at a low frequency of 30Hz; at the same time, the excess refrigerant is stored in the gas tank 9 through the first energy regulating control valve 7, and the system flow is finely adjusted by dynamically closing some throttling control valves. Under these multiple adjustments, the system can reduce the standby real-time power to 5.0kW and the cooling maintenance power to 3.5kW while maintaining the target temperature (e.g., -145℃).

[0065] Predictive shutdown energy-saving state: When the system reaches the set cryogenic temperature (e.g., -150℃) and a long no-load period is predicted, control unit 1 will activate a more extreme energy-saving strategy: stop the operation of energy regulating compressor 2, and simultaneously close all throttling control valves and the first and second energy regulating control valves (7, 8). This operation effectively seals the liquid refrigerant inside the system, allowing the entire refrigeration circuit to enter a "cold storage and holding state" where the refrigerant is stationary. At this time, the standby energy consumption is close to zero. Due to the suppression of evaporation, the loss of cold energy is slow (actual measurement shows that it can take more than 60 minutes to naturally rise from -150℃ to -100℃). When cooling is required, the system can quickly resume operation and use the stored cold energy to achieve rapid cooling.

[0066] Compared with traditional equipment: The compressor of the traditional equipment runs continuously at full power. The throttling component and the system circuit have no control valve. The refrigerant will flow back to the gas storage tank 9. This means that a lot of time is needed to extract the refrigerant from the gas storage tank when starting up. As a result, it is impossible to cool down and store cold, and it is also impossible to achieve active heat preservation and predictive shutdown. This results in high energy consumption and uncontrollable temperature fluctuations.

[0067] The above embodiments fully illustrate the technical implementation and excellent effects of different combination schemes of the present invention. Any equivalent transformation or combination based on the modular design concept and hierarchical control logic of the present invention should fall within the protection scope of the present invention.

Claims

1. A multi-stage energy-saving, self-cascading, cryogenic water vapor capture pump system, comprising an energy-regulating compressor (2), an oil separator (3), a condenser (4), a dryer filter (5), a regenerator (10), a throttling component, a cold trap (6), and a gas-liquid separator connected sequentially via pipelines, characterized in that, It also includes a control unit (1), a basic energy-saving unit, and at least one of the following two additional energy-saving units; The basic energy-saving unit includes the energy regulating compressor (2), which is a compressor with integrated frequency conversion control function to realize speed regulation and has the ability to switch different exhaust volume levels by mechanical means; the control unit (1) is connected to the energy regulating compressor (2) and is used to adjust its frequency conversion and capacity levels according to system parameters; The two additional energy-saving units are: The first additional energy-saving unit is a system pressure regulating unit, including a gas storage tank (9), a first energy regulating control valve (7) and a second energy regulating control valve (8). The first energy regulating control valve (7) is connected between the gas storage tank (9) and the system high-pressure pipeline, and the second energy regulating control valve (8) is connected between the gas storage tank (9) and the system low-pressure circuit. The second additional energy-saving unit is an adjustable flow unit, which includes multiple throttling branches connected in series. Each throttling branch consists of at least one throttling capillary. When there are multiple throttling capillary tubes, they are connected in parallel, and each throttling capillary tube has a throttling control valve connected in series at its inlet end. The control unit (1) is further connected to the first energy-regulating control valve (7), the second energy-regulating control valve (8) and / or the throttling control valve, and is configured to: based on the adjustment by the basic energy-saving unit, perform linkage control on the first additional energy-saving unit and / or the second additional energy-saving unit according to the operating status.

2. The system according to claim 1, characterized in that, The system is equipped with both the first additional energy-saving unit and the second additional energy-saving unit.

3. The system according to claim 1 or 2, characterized in that, When the control unit (1) performs energy-saving control, it is configured to perform a hierarchical adjustment logic including the following adjustment means: adjusting the capacity setting of the energy-regulating compressor (2); adjusting the frequency of the energy-regulating compressor (2); and if the system is provided with the first additional energy-saving unit, controlling the first energy-regulating control valve (7) and the second energy-regulating control valve (8) to perform refrigerant storage and retrieval operations; and / or if the system is provided with the second additional energy-saving unit, controlling the opening and closing combination of the throttling control valve.

4. The system according to claim 3, characterized in that, The control unit (1) integrates a PID control module, which is used to receive signals from the system's pressure sensor (P) and temperature sensor (T), and generate control commands for the energy regulating compressor (2), the first energy regulating control valve (7), the second energy regulating control valve (8) and the throttling control valve according to the PID algorithm.

5. The system according to claim 1 or 2, characterized in that, The adjustable flow unit has 2 to 5 stages of multi-stage throttling branches.

6. The system according to claim 1 or 2, characterized in that, The control unit (1) is also configured to perform predictive control: learn the user's switching habits from standby to cooling, and start the system to store cold in advance before the predicted start time of cooling.

7. The system according to claim 6, characterized in that, When the control unit (1) executes the deep standby energy-saving program, it is configured to: after the system reaches the set deep cooling temperature, control the energy regulating compressor (2) to stop running, and simultaneously control the throttling control valve connected to at least one of the liquid outlets of the gas-liquid separator to close, and control the first energy regulating control valve (7) and the second energy regulating control valve (8) to close, so that a sealed isolation is formed between the system circuit and the gas storage tank (9); thereby enabling the system to enter the refrigerant static cold storage state; when the predicted cooling start time is reached or a cooling command is received, restart the energy regulating compressor (2) and open the corresponding throttling control valve, the first energy regulating control valve (7) and the second energy regulating control valve (8).

8. A multi-level energy-saving control method for the system according to any one of claims 1-7, characterized in that, Performed by the control unit (1), including: Basic adjustment steps: Based on the system temperature and pressure, control the basic cooling power by adjusting the capacity setting of the energy regulating compressor (2) and / or its integrated frequency conversion control function; First additional adjustment step: When the system includes the first additional energy-saving unit and further adjustment is required after basic adjustment, the first energy-regulating control valve (7) and the second energy-regulating control valve (8) are controlled according to the system pressure to adjust the refrigerant quantity and pressure of the system. Second additional adjustment step: When the system includes a second additional energy-saving unit and fine flow adjustment is required, the opening and closing combination of each throttling control valve is controlled according to the cooling demand to change the throttling degree of the system.

9. The method according to claim 8, characterized in that, During the temperature maintenance phase, tiered energy-saving control is performed in the order of priority of the basic adjustment step, the first additional adjustment step, and the second additional adjustment step.

10. The method according to claim 9, characterized in that, It also includes protection and reset steps: When the system pressure exceeds the first threshold, the frequency or capacity is reduced preferentially through the basic adjustment steps described above. When the pressure exceeds a higher second threshold, pressure is released through the first additional adjustment step; When a full-power operation command is received, the energy regulating compressor (2) is restored to full capacity and highest frequency, and all throttling control valves are opened.

Images