Environment monitoring device, environment monitoring system and environment monitoring method
By combining radio frequency identification tags and judgment circuits, the air quality inside the wafer transfer box is monitored in real time, solving the problems of gas waste and defect formation in humidity control in existing technologies, and achieving precise humidity management.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- WISTRON NEWEB CORP
- Filing Date
- 2024-10-22
- Publication Date
- 2026-04-24
AI Technical Summary
Existing technologies for controlling relative humidity within wafer transfer boxes may result in gas waste and defect formation, and cannot accurately monitor humidity changes.
Using radio frequency identification tags, radio frequency reading modules, and judgment circuits, the air quality inside the wafer transfer box is monitored in real time, and warning messages are sent to remind managers to control humidity.
It enables real-time monitoring of humidity inside the wafer transfer box, avoiding unnecessary gas waste and defect formation, and improving the accuracy of humidity control.
Smart Images
Figure CN121918633A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a monitoring device and a monitoring method, and more particularly to an environmental monitoring device, an environmental monitoring system, and an environmental monitoring method. Background Technology
[0002] When the relative humidity inside the wafer transfer box is too high, it can cause oxidation, corrosion, short circuits, or leakage current in the semiconductor wafers inside the wafer transfer box, thereby reducing the performance and lifespan of the semiconductor wafers.
[0003] Current methods for controlling relative humidity within wafer transfer boxes involve an air conditioning system periodically injecting gases, such as clean, dry air or nitrogen, into the box to reduce relative humidity. However, a drawback of this method is that even when the relative humidity within the transfer box is normal, the air conditioning system may still inject gases to reduce relative humidity, leading to excessive waste of these gases; or the relative humidity may be too high before the gases are injected, causing defects to form on the semiconductor wafers.
[0004] Therefore, there is a need to provide an environmental monitoring device, an environmental monitoring system, and an environmental monitoring method to solve the above problems. Summary of the Invention
[0005] The technical problem to be solved by the present invention is to provide an environmental monitoring device, an environmental monitoring system, and an environmental monitoring method in light of the prior art.
[0006] To address the aforementioned technical problems, one technical solution adopted by this invention is to provide an environmental monitoring device. The environmental monitoring device includes a radio frequency identification (RFID) tag, an RFID reading module, and a judgment circuit. The RFID tag is configured to transmit air quality information within a target device. The RFID reading module reads the air quality information. The judgment circuit is configured to determine whether the air quality information meets air quality standards. When the air quality information does not meet air quality standards, a warning message is generated.
[0007] To address the aforementioned technical problems, another technical solution adopted by this invention is to provide an environmental monitoring system. The environmental monitoring device includes a target device, a radio frequency identification (RFID) tag, an RFID reading module, and a judgment circuit. The RFID tag is configured to transmit air quality information within the target device. The RFID reading module reads the air quality information. The judgment circuit is configured to determine whether the air quality information meets air quality standards. When the air quality information does not meet the air quality standards, a warning message is generated.
[0008] To address the aforementioned technical problems, another technical solution adopted by the present invention is to provide an environmental monitoring method, comprising: transmitting air quality information within a target device via a radio frequency identification tag; reading the air quality information via a radio frequency reading module; determining whether the air quality information meets air quality standards via a judgment circuit; and generating a warning message when the air quality information does not meet air quality standards.
[0009] One of the beneficial effects of the present invention is that, through the environmental monitoring device, environmental monitoring system and environmental monitoring method provided by the present invention, the relative humidity inside the target equipment can be monitored in real time and the time point when the relative humidity is too high can be accurately determined. At the correct time, gas for reducing relative humidity can be injected into the target equipment, avoiding unnecessary waste of gas for reducing relative humidity and reducing the possibility of defects caused by excessive relative humidity.
[0010] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description
[0011] Figure 1 This is a schematic diagram of the environmental monitoring system according to the first embodiment of the present invention.
[0012] Figure 2 for Figure 1 A flowchart of the environmental monitoring method of the environmental monitoring system.
[0013] Figure 3 This is a schematic diagram of an environmental monitoring system according to a second embodiment of the present invention.
[0014] Figure 4 for Figure 3 A flowchart of the environmental monitoring method of the environmental monitoring system.
[0015] Figure 5 This is a schematic diagram of an environmental monitoring system according to a third embodiment of the present invention.
[0016] Figure 6 for Figure 5 A flowchart of the environmental monitoring method of the environmental monitoring system.
[0017] Explanation of key component symbols:
[0018] 100 Environmental monitoring devices
[0019] 200 target devices
[0020] 2001 Air Intake
[0021] 2002 Air outlet
[0022] 2003 Wafer Groove
[0023] 10 Radio Frequency Identification Tags
[0024] 101 Gas Concentration Sensing Circuit
[0025] 102 Control Circuit
[0026] 103 Radio Frequency Signal Processing Circuit
[0027] 104 Light-emitting elements
[0028] 105 RF antenna
[0029] 106 Relative Humidity Sensing Circuit
[0030] 20 Radio Frequency Reading Module
[0031] 201 RF antenna
[0032] 202 Radio Frequency Readout Circuit
[0033] 30. Judgment Circuit
[0034] 300 Backend Monitoring Center
[0035] Steps S201~S210, S401~S410, S601~S616 Detailed Implementation
[0036] The following specific embodiments illustrate the implementation of the "environmental monitoring device, environmental monitoring system, and environmental monitoring method" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated beforehand. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.
[0037] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the associated listed items.
[0038] Figure 1 This is a schematic diagram of the environmental monitoring system according to the first embodiment of the present invention. See also... Figure 1 The environmental monitoring system includes an environmental monitoring device 100, a target device 200, and a background monitoring center 300. In this embodiment, the target device 200 is a wafer transfer box, but the present invention is not limited thereto. In other embodiments, the target device 200 may be, for example, a server rack or a battery box.
[0039] The wafer transfer box includes an air inlet 2001, an air outlet 2002, and multiple wafer trays 2003 at different heights. The air inlet 2001 is used to supply clean, dry air or nitrogen, while each wafer tray 2003 is configured to hold a wafer.
[0040] The environmental monitoring device 100 includes a radio frequency identification tag 10, a radio frequency reading module 20, and a judgment circuit 30. The radio frequency identification tag 10 is, for example, a passive radio frequency identification tag. The judgment circuit 30 is, for example, one or any combination of an embedded controller, an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a microcontroller unit (MCU), and a system on a chip (SOC).
[0041] The radio frequency identification tag 10 is positioned below the lowest point of the wafer slot 2003. The radio frequency reading module 20 and the judgment circuit 30 are both located outside the target device 200. The radio frequency reading module 20 includes a radio frequency antenna 201 and a radio frequency reading circuit 202, and the radio frequency antenna 201 is electrically connected to the radio frequency reading circuit 202 via a radio frequency cable.
[0042] When the RF antenna 201 receives an external RF signal, it transmits the RF signal to the RF readout circuit 202, which then reads the data from the RF signal. The RF readout circuit 202 can also generate an RF signal embedded with data and transmit it through the RF antenna 201.
[0043] The radio frequency reading circuit 202 is electrically connected to the judgment circuit 30 via an Ethernet cable, and the judgment circuit 30 is connected to the background monitoring center 300 via a network.
[0044] Radio frequency identification tag 10 is configured to detect air quality information inside the wafer transfer box, and judgment circuit 30 determines whether the air quality information meets air quality standards.
[0045] The air quality information includes oxygen concentration. The radio frequency identification tag 10 includes a gas concentration sensing circuit 101, a control circuit 102, a radio frequency signal processing circuit 103, a light-emitting element 104, and a radio frequency antenna 105. The control circuit 102 is electrically connected to the gas concentration sensing circuit 101, the radio frequency signal processing circuit 103, and the light-emitting element 104. The radio frequency signal processing circuit 103 is electrically connected to the radio frequency antenna 105. The control circuit 102 may be, for example, one or any combination of an embedded controller, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a microcontroller unit (MCU), and a system on a chip (SOC).
[0046] In other embodiments, the RFID tag 10 may also be an active RFID tag, which has its own battery.
[0047] The gas concentration sensing circuit 101 is an oxygen concentration sensor, configured to detect the interior of the wafer transfer box and output the oxygen concentration inside the wafer transfer box to the control circuit 102. The control circuit 102 is configured to transmit the oxygen concentration to the radio frequency signal processing circuit 103.
[0048] The radio frequency signal processing circuit 103 is configured to generate a radio frequency signal embedded with oxygen concentration and transmit the radio frequency signal through the radio frequency antenna 105. The radio frequency antenna 201 of the radio frequency readout module 20 is configured to receive the radio frequency signal from the radio frequency identification tag 10 and transmit the radio frequency signal to the radio frequency readout circuit 202.
[0049] The radio frequency reading circuit 202 is configured to read the oxygen concentration in the radio frequency signal and transmit the oxygen concentration to the judgment circuit 30.
[0050] The judgment circuit 30 is configured to calculate the nitrogen concentration inside the wafer transfer box based on the oxygen concentration and to determine whether the nitrogen concentration inside the wafer transfer box is less than a nitrogen concentration threshold (e.g., 94%).
[0051] When the judgment circuit 30 determines that the nitrogen concentration inside the wafer transfer box is less than the nitrogen concentration threshold, the judgment circuit 30 generates an alarm signal and transmits the alarm signal to the background monitoring center 300. At the same time, the judgment circuit 30 drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light. The alarm signal and the light emitted by the light-emitting element 104 are two different warning messages.
[0052] In other embodiments, the light-emitting element 104 of the radio frequency identification tag 10 can be replaced with a buzzer. When the judgment circuit 30 determines that the nitrogen concentration is less than the nitrogen concentration threshold, the judgment circuit 30 drives the buzzer of the radio frequency identification tag 10 to emit a sound, and the sound of the buzzer is a warning message.
[0053] In this way, whether it's the management personnel in the back-end monitoring center or the management personnel in the factory, as long as they see the warning message, they can know that the nitrogen concentration in the wafer transfer box on the production line is too low. Then, the management personnel can check whether there is any leakage in the wafer transfer box.
[0054] Figure 2 for Figure 1 A flowchart of the environmental monitoring methods for an environmental monitoring system. See also: Figure 1 and Figure 2 In step S201, the gas concentration sensing circuit 101 outputs the oxygen concentration in the wafer transfer box to the control circuit 102, wherein the gas concentration sensing circuit 101 is an oxygen concentration sensor.
[0055] In step S202, the control circuit 102 reads the oxygen concentration and transmits the oxygen concentration to the radio frequency signal processing circuit 103.
[0056] In step S203, the radio frequency signal processing circuit 103 transmits a radio frequency signal embedded with oxygen concentration through the radio frequency antenna 105.
[0057] In step S204, the radio frequency reading module 20 reads the oxygen concentration in the radio frequency signal and transmits the oxygen concentration to the judgment circuit 30.
[0058] In step S205, the judgment circuit 30 calculates the nitrogen concentration in the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is less than the nitrogen concentration threshold.
[0059] When the judgment circuit 30 determines that the nitrogen concentration is less than the nitrogen concentration threshold, it proceeds to step S206.
[0060] When the judgment circuit 30 determines that the nitrogen concentration is not less than the nitrogen concentration threshold, it returns to step S201.
[0061] In step S206, the judgment circuit 30 transmits an alarm signal to the background monitoring center 300 and transmits a start command to the radio frequency reading module 20, wherein the alarm signal serves as a warning message.
[0062] In step S207, the radio frequency reading module 20 reads the start command and sends a radio frequency signal embedded with the start command.
[0063] In step S208, the radio frequency antenna 105 of the radio frequency identification tag 10 receives the radio frequency signal from the radio frequency reading module 20 and transmits the radio frequency signal to the radio frequency signal processing circuit 103.
[0064] In step S209, the radio frequency signal processing circuit 103 extracts the start command from the radio frequency signal and transmits the start command to the control circuit 102.
[0065] In step S210, the control circuit 102 drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light according to the start command, wherein the light of the light-emitting element 104 serves as another warning information.
[0066] Specifically, the gas concentration sensing circuit 101 is used to detect the oxygen concentration inside the wafer transfer box, and the judgment circuit 30 calculates the nitrogen concentration inside the wafer transfer box based on the oxygen concentration. When the judgment circuit 30 determines that the nitrogen concentration inside the wafer transfer box is less than 94%, it indicates that there may be a gas leak.
[0067] Figure 3 This is a schematic diagram of an environmental monitoring system according to a second embodiment of the present invention. See also... Figure 3 ,Compare Figure 3 and Figure 1 The difference lies in replacing the gas concentration sensing circuit 101 of the radio frequency identification tag 10 with a relative humidity sensing circuit 106, wherein the relative humidity sensing circuit 106 is electrically connected to the control circuit 102.
[0068] The RFID tag 10 generates relative humidity within the wafer transfer box, and the RFID tag 10's RF signal processing circuit 103 is configured to generate an RF signal embedded with relative humidity and transmit the RF signal through the RF antenna 105.
[0069] The radio frequency reading module 20 is configured to read the relative humidity in the radio frequency signal and transmit the relative humidity to the judgment circuit 30.
[0070] The judgment circuit 30 is configured to determine whether the relative humidity is greater than a relative humidity threshold (e.g., 6%). When the judgment circuit 30 determines that the relative humidity is greater than the relative humidity threshold, the judgment circuit 30 transmits an alarm signal to the background monitoring center 300 and drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light. The alarm signal and the light emitted by the light-emitting element 104 are two different warning messages.
[0071] In this way, whether it's the management personnel in the 300-level back-end monitoring center or the management personnel in the factory, as long as they see the warning message, they can know that the relative humidity inside the wafer transfer box on the production line is too high. Then, the management personnel can inject clean, dry air into the wafer transfer box to reduce the relative humidity and prevent the wafers from oxidizing, corroding, or short-circuiting due to excessive relative humidity.
[0072] Figure 4 for Figure 3 A flowchart of the environmental monitoring method of the environmental monitoring system. Figure 4 The environmental monitoring method includes steps S401 to S410. Figure 4 Compared to Figure 2 The differences are as follows.
[0073] In step S401, the relative humidity sensing circuit 106 outputs the relative humidity inside the wafer transfer box to the control circuit 102.
[0074] In step S402, the control circuit 102 transmits the relative humidity to the radio frequency signal processing circuit 103.
[0075] In step S403, the radio frequency signal processing circuit 103 transmits a radio frequency signal embedded with relative humidity through the radio frequency antenna 105.
[0076] In step S404, the radio frequency reading module 20 reads the relative humidity in the radio frequency signal and transmits the relative humidity to the judgment circuit 30.
[0077] In step S405, the judgment circuit 30 determines whether the relative humidity is greater than the relative humidity threshold.
[0078] When the judgment circuit 30 determines that the relative humidity is greater than the relative humidity threshold, it proceeds to step S406.
[0079] When the judgment circuit 30 determines that the relative humidity is not greater than the relative humidity threshold, it returns to step S401.
[0080] Figure 5 This is a schematic diagram of an environmental monitoring system according to a third embodiment of the present invention. Figure 5 and Figure 1 and Figure 3 The difference is that, Figure 5The radio frequency identification tag 10 includes a gas concentration sensing circuit 101 and a relative humidity sensing circuit 106, wherein the gas concentration sensing circuit 101 and the relative humidity sensing circuit 106 are electrically connected to the control circuit 102.
[0081] The radio frequency signal processing circuit 103 of the radio frequency identification tag 10 is configured to generate radio frequency signals embedded with oxygen concentration and relative humidity and transmit the radio frequency signals through the radio frequency antenna 105.
[0082] The radio frequency reading circuit 202 reads the oxygen concentration and relative humidity in the radio frequency signal.
[0083] The judgment circuit 30 calculates the nitrogen concentration in the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is less than the nitrogen concentration threshold and whether the relative humidity is greater than the relative humidity threshold. When the nitrogen concentration is less than the nitrogen concentration threshold and / or the relative humidity is greater than the relative humidity threshold, the judgment circuit 30 sends an alarm signal to the background monitoring center 300 and drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light.
[0084] Figure 6 for Figure 5 A flowchart of the environmental monitoring method of the environmental monitoring system. Figure 6 The environmental monitoring method includes steps S601 to S616. Figure 6 Compared to Figure 2 and Figure 4 The differences are as follows.
[0085] In step S601, the gas concentration sensing circuit 101 and the relative humidity sensing circuit 106 respectively output the oxygen concentration and relative humidity in the wafer transfer box to the control circuit 102.
[0086] In step S602, the control circuit 102 transmits the oxygen concentration and relative humidity to the radio frequency signal processing circuit 103.
[0087] In step S603, the radio frequency signal processing circuit 103 transmits a radio frequency signal embedded with oxygen concentration and relative humidity through the radio frequency antenna 105.
[0088] In step S604, the radio frequency reading module 20 reads the oxygen concentration and relative humidity in the radio frequency signal and transmits the oxygen concentration and relative humidity to the judgment circuit 30.
[0089] In step S605, the judgment circuit 30 calculates the nitrogen concentration in the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is less than the nitrogen concentration threshold.
[0090] When the judgment circuit 30 determines that the nitrogen concentration is less than the nitrogen concentration threshold, it proceeds to step S606.
[0091] When the judgment circuit 30 determines that the nitrogen concentration is not less than the nitrogen concentration threshold, it proceeds to step S611.
[0092] In step S611, the judgment circuit 30 determines whether the relative humidity is greater than the relative humidity threshold.
[0093] When the judgment circuit 30 determines that the relative humidity is greater than the relative humidity threshold, it proceeds to step S612. When the judgment circuit 30 determines that the relative humidity is not greater than the relative humidity threshold, it returns to step S601.
[0094] In step S612, the judgment circuit 30 transmits an alarm signal to the background monitoring center 300 and transmits a start command to the radio frequency reading module 20.
[0095] In step S613, the radio frequency reading module 20 reads the start command and sends a radio frequency signal embedded with the start command.
[0096] In step S614, the radio frequency antenna 105 of the radio frequency identification tag 10 receives the radio frequency signal from the radio frequency reading module 20 and transmits the radio frequency signal to the radio frequency signal processing circuit 103.
[0097] In step S615, the radio frequency signal processing circuit 103 extracts the start command from the radio frequency signal and transmits the start command to the control circuit 102.
[0098] In step S616, the control circuit 102 drives the light-emitting element 104 of the radio frequency identification tag 10 to emit light according to the start command.
[0099] In other embodiments, the control circuit 102 is omitted, and the judgment circuit 30 is located within the radio frequency identification tag 10. The judgment circuit 30, configured within the target device 200 (e.g., a wafer transfer box), is configured to calculate air quality information (e.g., nitrogen concentration and / or relative humidity) within the target device 200 and determine whether the air quality information meets air quality standards. When the air quality information does not meet the air quality standards, the judgment circuit 30 itself generates a warning message or drives other components to generate a warning message (e.g., sound or light). The judgment circuit 30 transmits the air quality judgment result to the radio frequency reading module 20 outside the target device 200. The radio frequency reading module 20 is configured to read the air quality judgment result and transmit it to the backend monitoring center 300.
[0100] In other embodiments, the control circuit 102 of the RFID tag 10, located within the target device 200, is configured to calculate air quality information within the target device 200. The RFID tag 10 transmits the air quality information to the RF reading module 20 outside the target device 200 via the RF antenna 105. The RF reading module 20 reads the air quality information and transmits it to a judgment circuit 30 outside the target device 200. The judgment circuit 30 is configured to determine whether the air quality information meets air quality standards. When the air quality information does not meet air quality standards, the judgment circuit 30 sends an alarm signal to the background monitoring center 300 or drives other components to generate warning information.
[0101] [Beneficial Effects of the Examples]
[0102] One of the beneficial effects of the present invention is that, through the environmental monitoring device, environmental monitoring system and environmental monitoring method provided by the present invention, the relative humidity inside the target equipment can be monitored in real time and the time point when the relative humidity is too high can be accurately determined. At the correct time, gas for reducing relative humidity can be injected into the target equipment, avoiding unnecessary waste of gas for reducing relative humidity and reducing the possibility of defects caused by excessive relative humidity.
[0103] The above-disclosed content is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of the claims of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the scope of the claims of the present invention.
Claims
1. An environmental monitoring device, the environmental monitoring device comprising: A radio frequency identification tag configured to transmit air quality information within a target device; A radio frequency (RF) reading module, wherein the RF reading module reads the air quality information; as well as A judgment circuit, configured to determine whether the air quality information meets an air quality standard; When the air quality information does not meet the air quality standards, a warning message is generated.
2. The environmental monitoring device as claimed in claim 1, wherein the air quality information includes an oxygen concentration, the radio frequency identification tag includes a gas concentration sensing circuit, the gas concentration sensing circuit is configured to generate the oxygen concentration, the judgment circuit calculates a nitrogen concentration based on the oxygen concentration and determines whether the nitrogen concentration is less than a nitrogen concentration threshold; when the nitrogen concentration is less than the nitrogen concentration threshold, the air quality information does not meet the air quality standard.
3. The environmental monitoring device as claimed in claim 1, wherein the air quality information includes a relative humidity, the radio frequency identification tag includes a relative humidity sensing circuit, the relative humidity sensing circuit is configured to generate the relative humidity, the judgment circuit determines whether the relative humidity is greater than a relative humidity threshold, and when the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard.
4. The environmental monitoring device as claimed in claim 1, wherein the air quality information includes an oxygen concentration and a relative humidity, the radio frequency identification tag includes a gas concentration sensing circuit and a relative humidity sensing circuit, the gas concentration sensing circuit is configured to generate the oxygen concentration, the relative humidity sensing circuit is configured to generate the relative humidity, the judgment circuit calculates a nitrogen concentration based on the oxygen concentration and determines whether the nitrogen concentration is less than a nitrogen concentration threshold and whether the relative humidity is greater than a relative humidity threshold; when the nitrogen concentration is less than the nitrogen concentration threshold or the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard.
5. The environmental monitoring device as described in claim 1, 2, 3 or 4, wherein the radio frequency identification tag further includes a light-emitting element, and the warning information is light emitted by the light-emitting element.
6. The environmental monitoring device as described in claim 1, 2, 3 or 4, wherein the judgment circuit is disposed on the radio frequency identification tag, and the radio frequency reading module is further configured to read a judgment result of the judgment circuit and transmit the judgment result to a background monitoring center.
7. An environmental monitoring system, the environmental monitoring system comprising: One target device; A radio frequency identification tag is disposed within the target device and configured to transmit air quality information within the target device; A radio frequency (RF) reading module, wherein the RF reading module reads the air quality information; as well as A judgment circuit, configured to determine whether the air quality information meets an air quality standard; When the air quality information does not meet the air quality standards, a warning message is generated.
8. The environmental monitoring system of claim 7, wherein the air quality information includes an oxygen concentration, the radio frequency identification tag includes a gas concentration sensing circuit, the gas concentration sensing circuit is configured to generate the oxygen concentration, the judgment circuit calculates a nitrogen concentration based on the oxygen concentration and determines whether the nitrogen concentration is less than a nitrogen concentration threshold; when the nitrogen concentration is less than the nitrogen concentration threshold, the air quality information does not meet the air quality standard.
9. The environmental monitoring system of claim 7, wherein the air quality information includes a relative humidity, the radio frequency identification tag includes a relative humidity sensing circuit, the relative humidity sensing circuit is configured to generate the relative humidity, the judgment circuit determines whether the relative humidity is greater than a relative humidity threshold, and when the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard.
10. The environmental monitoring system of claim 7, wherein the air quality information includes an oxygen concentration and a relative humidity, the radio frequency identification tag includes a gas concentration sensing circuit and a relative humidity sensing circuit, the gas concentration sensing circuit is configured to generate the oxygen concentration, the relative humidity sensing circuit is configured to generate the relative humidity, the judgment circuit calculates a nitrogen concentration based on the oxygen concentration and determines whether the nitrogen concentration is less than a nitrogen concentration threshold and whether the relative humidity is greater than a relative humidity threshold; when the nitrogen concentration is less than the nitrogen concentration threshold or the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard.
11. The environmental monitoring system as described in claim 7, 8, 9 or 10, wherein the radio frequency identification tag further includes a light-emitting element, and the warning information is light emitted by the light-emitting element.
12. The environmental monitoring system of claim 7, wherein the target device is a wafer transfer box.
13. The environmental monitoring system as described in claim 7, 8, 9 or 10, wherein the judgment circuit is disposed on the radio frequency identification tag, and the radio frequency reading module is further configured to read a judgment result of the judgment circuit and transmit the judgment result to a background monitoring center.
14. An environmental monitoring method, the environmental monitoring method comprising: Air quality information from a target device is transmitted via a radio frequency identification tag. The air quality information is read using an RF reading module; A judgment circuit determines whether the air quality information meets an air quality standard; as well as When the air quality information does not meet the air quality standards, a warning message is generated.
15. The environmental monitoring method of claim 14, wherein the air quality information includes an oxygen concentration, and the judgment circuit calculates a nitrogen concentration based on the oxygen concentration; when the judgment circuit determines that the nitrogen concentration is less than a nitrogen concentration threshold, the air quality information does not meet the air quality standard.
16. The environmental monitoring method as described in claim 14, wherein the air quality information includes a relative humidity, and when the judgment circuit determines that the relative humidity is greater than a relative humidity threshold, the air quality information does not meet the air quality standard.
17. The environmental monitoring method of claim 14, wherein the air quality information includes an oxygen concentration and a relative humidity, and the judgment circuit calculates a nitrogen concentration based on the oxygen concentration; when the judgment circuit determines that the nitrogen concentration is less than a nitrogen concentration threshold and / or the relative humidity is greater than a relative humidity threshold, the air quality information does not meet the air quality standard.
18. The environmental monitoring method as described in claim 14, 15, 16 or 17, wherein the radio frequency identification tag further includes a light-emitting element, and the warning information is light emitted by the light-emitting element.