Robot operation path generation method and robot operation path generation device

Abstract

In the operation path generation method of the robot (10), robot CAD data (CD1), arrangement area CAD data (CD2), and workpiece CAD data (CD3), which are used for deriving an operation path (OP) in an arrangement area (20) in which the robot (10) and the workpiece (W) are arranged, are integrated data (ID) obtained by integrating the robot CAD data (CD1), the arrangement area CAD data (CD2), and the workpiece CAD data (CD3), the robot CAD data (CD1), the arrangement area CAD data (CD2), and the workpiece CAD data (CD3). The size of a gap (G) between the arrangement region (20) and the robot (10) and / or the workpiece (W) on the operation path (OP) in the integrated data (ID) is displayed on a display unit (220).

Description

Technical Field

[0001] This disclosure relates to a method for generating motion paths for a robot and a device for generating motion paths for a robot. Background Technology

[0002] Previously, robot trajectory generation methods were known to derive robot motion paths based on specified conditions. For example, Japanese Patent Application Publication No. 2019-193975 discloses a robot trajectory generation method that derives robot motion paths in a manner that prevents interference between the robot arm and other robot arms or obstacles.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2019-193975

[0004] However, in the robot trajectory generation method disclosed in Japanese Patent Application Publication No. 2019-193975, although the robot's motion path is derived in a way that prevents interference between the robot arm and other robot arms or obstacles, the user cannot identify the size of the gap between the robot and the obstacle on the derived robot's motion path. Therefore, the user cannot study the size of the gap on the motion path in the derived robot's configuration area. Therefore, it is desirable to provide a robot motion path generation method and a robot motion path generation apparatus that allows the user to study the size of the gap between at least one of the robot and the workpiece on the motion path in the derived robot's configuration area and the configuration area. Summary of the Invention

[0005] This disclosure was made to solve the problems mentioned above. One object of this disclosure is to provide a robot motion path generation method and a robot motion path generation apparatus that allows users to study the size of the gap between at least one of the robot and the workpiece on the motion path in the exported robot configuration area and the configuration area.

[0006] To achieve the above objectives, the robot motion path generation method of the first aspect of this disclosure comprises the following steps: simulating and deriving the motion path of a robot, including an end effector holding a workpiece and a robot arm with the end effector mounted thereon and connected by multiple links, in a configuration area where the robot and the workpiece are configured, based on predetermined conditions; and displaying a virtual image including the robot, the configuration area, and the workpiece on a display unit based on integrated data, and displaying the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the configuration area on the display unit, wherein the integrated data is obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) used to derive the motion path.

[0007] The robot motion path generation method of the first aspect of this disclosure, as described above, is based on integrated data obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) to derive the robot's motion path in a configuration area containing the robot and the workpiece. The size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the configuration area is displayed on a display unit. Thus, by observing the size of the gap between at least one of the robot and the workpiece on the motion path displayed on the display unit and the configuration area, the user can identify the size of the gap. As a result, the user can study the size of the gap between at least one of the robot and the workpiece on the derived robot's motion path in the configuration area and the configuration area. Furthermore, in the robot motion path generation method of the first aspect, as described above, a virtual image including the robot, the configuration area, and the workpiece is displayed on a display unit based on the integrated data obtained by integrating robot CAD data, configuration area CAD data, and workpiece CAD data. Therefore, by observing the virtual images of the robot, the configuration area, and the workpiece displayed on the display, users can easily study the specified conditions for deriving the robot's motion path in the configuration area.

[0008] Furthermore, to achieve the above objectives, the robot motion path generation apparatus of the second aspect of this disclosure includes: a display unit; and a control unit, which, based on predetermined conditions, simulates and derives the motion path of a robot, including an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, in a configuration area in which the robot and the workpiece are configured. Furthermore, based on integrated data, a virtual image including the robot, the configuration area, and the workpiece is displayed on the display unit, and the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the configuration area is displayed on the display unit. The integrated data is obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) used to derive the motion path.

[0009] The robot motion path generation apparatus of the second aspect of this disclosure, as described above, includes a control unit. This control unit integrates robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) to obtain integrated data. The control unit then displays the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the configuration area on a display unit. Thus, similar to the robot motion path generation method of the first aspect described above, the user can identify the size of the gap by observing the size of the gap between at least one of the robot and the workpiece on the motion path displayed on the display unit and the configuration area. As a result, similar to the robot motion path generation method of the first aspect described above, a robot motion path generation apparatus is provided that allows the user to study the size of the gap between at least one of the robot and the workpiece on the exported robot motion path in the configuration area and the configuration area. Furthermore, in the robot motion path generation apparatus of the second aspect, as described above, the control unit displays a virtual image including the robot, the configuration area, and the workpiece on the display unit based on integrated data obtained by integrating robot CAD data, configuration area CAD data, and workpiece CAD data. Thus, similar to the robot motion path generation method of the first aspect, the user can easily study the prescribed conditions for deriving the robot's motion path in the configuration area by observing the virtual image including the robot, configuration area, and workpiece displayed on the display unit.

[0010] According to this disclosure, as described above, a robot motion path generation method and a robot motion path generation apparatus are provided, which allow a user to study the size of the gap between at least one of the robot and the workpiece on the motion path in the exported robot configuration area and the configuration area. Attached Figure Description

[0011] Figure 1 This is a top view showing a substrate handling system according to one embodiment of the present disclosure.

[0012] Figure 2 This is a block diagram illustrating the configuration of a motion path generation device for a substrate handling robot according to one embodiment of the present disclosure.

[0013] Figure 3 This is a flowchart illustrating the motion path generation of a substrate handling robot according to one embodiment of the present disclosure.

[0014] Figure 4 This diagram illustrates a state in which a virtual image is displayed on a display unit according to one embodiment of the present disclosure.

[0015] Figure 5 This is a diagram showing a configuration in which the size of the gap between the substrate handling robot and the placement area is displayed on a display unit according to an embodiment of this disclosure.

[0016] Figure 6 This is a diagram illustrating the configuration of virtual obstacles based on a minimum threshold of the gap between the substrate handling robot and the configuration area, in one embodiment of this disclosure. Detailed Implementation

[0017] Hereinafter, embodiments embodied in this disclosure will be described based on the accompanying drawings.

[0018] [Motion path generation device for substrate handling robot]

[0019] Reference Figure 1 as well as Figure 2 A motion path generation apparatus 200 for a substrate handling robot 10 according to one embodiment of the present disclosure will be described. The motion path generation apparatus 200 for the substrate handling robot 10 is an apparatus for generating a motion path OP of the substrate handling robot 10 in the substrate handling system 100. In addition, the substrate handling robot 10 is an example of a robot.

[0020] (Substrate handling system)

[0021] like Figure 1 As shown, the substrate handling system 100 includes a substrate handling robot 10 and a configuration area 20. The substrate W is an example of a workpiece.

[0022] The substrate handling robot 10 includes a robotic hand 11 for holding a substrate W, a horizontal multi-joint robotic arm 12 to which the robotic hand 11 is mounted and connected by multiple links 12a, and a base 13 supporting the robotic arm 12. The robotic hand 11 holds the substrate W while it is being handled by the substrate handling robot 10. The robotic hand 11 is mounted at the tip of the robotic arm 12. The substrate W is, for example, a silicon wafer with a disk shape. The substrate W and the robotic hand 11 are examples of a workpiece and an end effector, respectively.

[0023] The configuration area 20 includes a substrate transport chamber 21 and a substrate placement section 22.

[0024] A substrate handling robot 10 is installed in the substrate handling chamber 21. The substrate handling chamber 21 is a space where the substrate W is handled by the substrate handling robot 10. The substrate handling chamber 21 is maintained at atmospheric pressure.

[0025] The substrate placement section 22 is connected to the substrate transport chamber 21. The substrate W is placed on the substrate placement section 22. The substrate placement section 22 includes multiple loading ports 22a, multiple loading locking parts 22b, and an aligner 22c.

[0026] Each of the multiple loading ports 22a includes a container capable of accommodating multiple substrates W, namely FOUP (Front Opening Unify Pod).

[0027] Multiple loading locking parts 22b are connected to the substrate transport chamber 21 at different positions relative to the multiple loading ports 22a. The multiple loading locking parts 22b are connected to the substrate transport chamber VC, which is maintained in a vacuum environment.

[0028] The substrate transport chamber VC is connected to the substrate processing chamber, which performs resist coating, etching, and other treatments on the substrate W, at different locations from the multiple loading locking parts 22b. That is, the substrate transport system 100 is an EFEM (Equipment Front End Module) that transports the substrate W between the FOUP of each of the multiple loading ports 22a and the substrate transport chamber VC connected to the substrate processing chamber.

[0029] Aligner 22c is a device used for aligning the substrate W and correcting eccentricity.

[0030] (Composition of the motion path generation device for the substrate handling robot)

[0031] like Figure 2As shown, the motion path generation device 200 of the substrate handling robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The motion path generation device 200 of the substrate handling robot 10 is, for example, a PC (personal computer) or a tablet computer.

[0032] Input unit 210 accepts input operations from the user. If input unit 210 accepts an input operation from the user, it outputs an input signal corresponding to the input operation to control unit 240. For example, input unit 210 is a keyboard or mouse. Input unit 210 is used to set or change the prescribed conditions when exporting the substrate handling robot 10's motion path OP in the configuration area 20.

[0033] Display unit 220 displays a virtual image VI of a substrate handling robot 10, a configuration area 20, and a substrate W, as well as a derived motion path OP of the substrate handling robot 10 in the configuration area 20. Display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0034] Storage unit 230 is a computer-readable storage medium that stores various programs and data. Storage unit 230 stores a motion path generation program MP for the control unit 240 to execute the motion path generation method of the substrate handling robot 10. Storage unit 230 is formed, for example, a hard disk or other magnetic disk, a CD-ROM or DVD or other optical disk, or a semiconductor memory.

[0035] The control unit 240 simulates and derives the motion path OP of the substrate handling robot 10 in the configuration area 20 based on specified conditions. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit), and semiconductor memory such as RAM (Random Access Memory) and ROM (Read Only Memory).

[0036] The control unit 240 reads in CAD data CD for exporting motion path OP. The CAD data CD includes: robot CAD data CD1, which serves as computer-aided design data for the substrate handling robot 10; configuration area CAD data CD2, which serves as computer-aided design data for the configuration area 20; and substrate CAD data CD3, which serves as computer-aided design data for the substrate W. The user can arbitrarily select the robot CAD data CD1, configuration area CAD data CD2, and substrate CAD data CD3 read in by the control unit 240. Furthermore, robot CAD data CD1 and substrate CAD data CD3 are examples of robot CAD data and workpiece CAD data, respectively.

[0037] The control unit 240 displays a virtual image VI containing the substrate handling robot 10, the configuration area 20, and the substrate W on the display unit 220 based on the integrated data ID obtained by integrating the read-in transport robot CAD data CD1, configuration area CAD data CD2, and substrate CAD data CD3.

[0038] [Method for generating motion paths for substrate handling robots]

[0039] Reference Figures 3 to 5 A method for generating motion paths for a substrate handling robot 10 according to one embodiment of the present disclosure will be described.

[0040] like Figure 3 As shown, in step S1, the control unit 240 reads the CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate for deriving the motion path OP. The CAD data CD2 of the configuration area includes obstacles that become obstacles when the substrate transport robot 10 moves. Figure 4 Obstacle 30 is shown. Figure 4 In the example of obstacle 30, a columnar object disposed in the substrate transport chamber 21 is shown.

[0041] like Figure 3 As shown, in step S2, the control unit 240 displays a virtual image VI containing the substrate handling robot 10, the configuration area CAD data CD2, and the substrate CAD data CD3 on the display unit 220 based on the integrated data ID obtained by integrating the read-in handling robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3. Furthermore, the control unit 240 also displays the virtual image VI on the display unit 220 in steps S3, S4, and S5, which will be described later.

[0042] like Figure 4 As shown, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Figure 4 The diagram shows an example where the control unit 240 displays both a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220. Furthermore, based on user input to the input unit 210, the control unit 240 switches between states where the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side-by-side on the display unit 220, a state where the two-dimensional virtual image VIa is displayed on the display unit 220, and a state where the three-dimensional virtual image VIb is displayed on the display unit 220.

[0043] When the control unit 240 changes one of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID based on the user's operation, it reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb, and displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220. For example, when the control unit 240 changes one of the two-dimensional data IDa and the three-dimensional data IDb based on the user's operation, it reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb, and displays the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220. That is, when the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, if the user performs an input operation on the input unit 210 in step S3 (described later) and changes the two-dimensional data IDa or the three-dimensional data IDb, the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in conjunction.

[0044] like Figure 3As shown, in step S3, the control unit 240 sets the specified conditions for exporting the motion path OP based on the input operation performed by the user on the input unit 210 to set the specified conditions for exporting the motion path OP. The specified conditions include the start and end points of the motion path OP, the upper limits of the speed and acceleration of the robot hand 11, the upper limits of the speed and acceleration of the robot arm 12, whether the robot hand 11 holds the substrate W, the minimum threshold Ga of the gap G (described later), the size of the components of the substrate handling robot 10, the position of the components of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the components of the configuration area 20, and the position of the components of the configuration area 20, etc. That is, based on the user's operation, the control unit 240 changes at least one of the following in the integrated data ID: the size of the components of the substrate handling robot 10, the position of the components of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the components of the configuration area 20, and the position of the components of the configuration area 20. Furthermore, when at least one of the components of the substrate handling robot 10 (two-dimensional data IDa, three-dimensional data IDB) changes based on user operation—namely, the size, position, posture, size, or position of the components of the configuration area 20—the control unit 240 reflects this change in the other of the two-dimensional data IDa and three-dimensional data IDB, and displays at least one of the two-dimensional virtual image VIa and three-dimensional virtual image VIb on the display unit 220. Changes in the size and position of the components of the substrate handling robot 10 integrated with the data ID include changes in the length and position of at least one of the link 12a and robot hand 11, which are components of the substrate handling robot 10, as defined in the integrated data ID. Changes in the size and position of the components of the configuration area 20 integrated with the data ID include changes in the position of the substrate mounting portion 22, which is a component of the configuration area 20, at least one of addition or deletion, and changes in the position and size of at least one of the obstacles 30, which are components of the configuration area 20.

[0045] like Figure 3 As shown, in step S4, the control unit 240 simulates and exports the motion path OP of the substrate handling robot 10 in the configuration area 20 based on predetermined conditions. Figure 5 As shown, the control unit 240 exports multiple motion path operations (OPs). Figure 5 In this example, only two action paths (OPs) are shown for simplification. Additionally, as... Figure 6As shown, the control unit 240 simulates and derives the action path OP in the following state: by configuring virtual obstacles 30a in the virtual image VI displayed on the display unit 220, the outline of the configuration area 20 deviates from the minimum threshold Ga of the gap G (described later) by an amount.

[0046] like Figure 3 As shown, in step S5, the control unit 240 displays the exported motion path OP on the display unit 220. (As...) Figure 5 As shown, the control unit 240 displays the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220 along with the derived motion path OP. Specifically, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP in the integrated data ID on the display unit 220. That is, the size of the smallest gap G on each of the multiple derived motion paths OP is simultaneously displayed on the display unit 220. Furthermore, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. For example, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP on the display unit 220 in a color corresponding to the size of the gap G.

[0047] If, after step S4 or S5, the user performs an input operation on the input unit 210 to change the conditions specified when exporting the motion path OP, the process returns to step S3. If, after step S5, the user does not perform an input operation on the input unit 210 to change the conditions specified when exporting the motion path OP, the motion path generation of the substrate handling robot 10 ends.

[0048] [Effects of the Implementation Method]

[0049] In this embodiment, the following effect can be obtained.

[0050] (Effect of the motion path generation method for substrate handling robot)

[0051] In this embodiment, based on the integrated data ID obtained by integrating the computer-aided design data CD1 of the substrate handling robot 10 (which is used to derive the motion path OP of the substrate handling robot 10 in the configuration area 20), the configuration area CAD data CD2 (which is used to derive the computer-aided design data of the configuration area 20 where the substrate handling robot 10 and the substrate W are configured), and the substrate CAD data CD3 (which is used to derive the computer-aided design data of the substrate W), the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP and the configuration area 20 is displayed on the display unit 220. Therefore, by observing the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP displayed on the display unit 220 and the configuration area 20, the user can identify the size of the gap G. As a result, the user can study the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the derived motion path OP of the substrate handling robot 10 in the configuration area 20 and the configuration area 20. Furthermore, in this embodiment, based on the integrated data ID obtained by integrating the CAD data CD1 of the handling robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate, a virtual image VI including the substrate handling robot 10, the configuration area 20, and the substrate W is displayed on the display unit 220. Therefore, by observing the virtual image VI displayed on the display unit 220, including the substrate handling robot 10, the configuration area 20, and the substrate W, the user can easily study the conditions for deriving the motion path OP of the substrate handling robot 10 in the configuration area 20.

[0052] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the motion path OP in the integrated data ID on the display unit 220. Therefore, by observing the size of the smallest gap G displayed on the motion path OP on the display unit 220, the user can effectively identify the size of the gap G.

[0053] Furthermore, in this embodiment, deriving motion paths OP based on predetermined conditions includes deriving multiple motion paths OP based on predetermined conditions. Moreover, displaying the size of the gap G on the display unit 220 includes displaying the smallest gap G on each of the multiple motion paths OP in the integrated data ID on the display unit 220. Therefore, by observing the smallest gap G on each of the multiple motion paths OP displayed in the virtual image VI on the display unit 220, the user can more effectively identify the size of the gap G.

[0054] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the smallest gap G on each of the multiple motion paths OP in the integrated data ID in a manner corresponding to the size of the gap G on the display unit 220. Therefore, by observing the smallest gap G on each of the multiple motion paths OP in the virtual image VI displayed on the display unit 220 in a manner corresponding to the size of the gap G, the user can easily compare the relative sizes of the smallest gap G on each of the multiple motion paths OP.

[0055] Furthermore, in this embodiment, the configuration area 20 includes an obstacle 30 that obstructs the movement of the substrate handling robot 10. Moreover, displaying the size of the gap G on the display unit 220 includes displaying the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220. Thus, by observing the size of the gap G between at least one of the substrate handling robots 10 and the substrate W on the multiple motion paths OP displayed on the virtual image VI on the display unit 220 and the obstacle 30, which is a component of the configuration area 20, the user can identify the size of the gap G between the substrate handling robot 10 and the substrate W and the obstacle 30, which is a component of the configuration area 20.

[0056] Furthermore, in this embodiment, the motion path generation method of the substrate handling robot 10 includes a step of setting a minimum threshold Ga of the gap G as a predetermined condition. Moreover, deriving the motion path OP based on the predetermined condition includes simulating and deriving the motion path OP while the outline of the placement area 20 deviates from the set minimum threshold Ga of the gap G by an amount through placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. Therefore, the motion path OP can be easily derived by simulating it while taking into account the set minimum threshold Ga of the gap G.

[0057] Furthermore, in this embodiment, the motion path generation method of the substrate handling robot 10 includes a step of setting whether the robot arm 11 holds the substrate W as a predetermined condition. Moreover, deriving the motion path OP based on the predetermined condition includes simulating and deriving the motion path OP based on whether the robot arm 11 holds the substrate W as set. Therefore, it is possible to derive the motion path OP by simulating whether the robot arm 11 holds the substrate W.

[0058] (The effect of the motion path generation device for the substrate handling robot)

[0059] Furthermore, in this embodiment, the motion path generation device 200 for the substrate handling robot 10 includes a control unit 240. This control unit 240 displays the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the configuration area 20 and the configuration area 20, based on an integrated data ID obtained by integrating computer-aided design data CD1 (for generating the motion path OP of the substrate handling robot 10 in the configuration area 20), configuration area CAD data CD2 (for generating the computer-aided design data of the configuration area 20), and substrate CAD data CD3 (for generating the computer-aided design data of the substrate W), on a display unit 220. Thus, similar to the motion path generation method for the substrate handling robot 10 described above, the user can identify the size of the gap G by observing the size of the gap G between the substrate handling robot 10 and the substrate W on the motion path OP displayed on the display unit 220 and the configuration area 20. As a result, similar to the motion path generation method for the substrate handling robot 10 described above, a motion path generation apparatus 200 for a substrate handling robot 10 can be provided, allowing the user to study the size of the gap G between at least one of the substrate handling robot 10 and the substrate W and the configuration area 20 on the derived motion path OP of the substrate handling robot 10 in the configuration area 20. Furthermore, in this embodiment, the control unit 240 displays a virtual image VI including the substrate handling robot 10, the configuration area CAD data CD2, and the substrate CAD data CD3 on the display unit 220 based on the integrated data ID obtained by integrating the handling robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3. Thus, similar to the motion path generation method for the substrate handling robot 10 described above, the user can easily study the prescribed conditions for deriving the motion path OP of the substrate handling robot 10 in the configuration area 20 by observing the virtual image VI including the substrate handling robot 10, the configuration area 20, and the substrate W displayed on the display unit 220.

[0060] [Variation Example]

[0061] It should be considered that all aspects of the embodiments disclosed herein are illustrative rather than limiting. The scope of this disclosure is not shown by the description of the above embodiments, but by the technical solutions, and includes all modifications (variations) that are equivalent in meaning and scope to the technical solutions.

[0062] For example, in the above embodiments, the following example is shown: deriving the motion path OP based on predetermined conditions includes simulating and deriving the motion path OP based on whether the robot hand 11 has a holding plate W, but this disclosure is not limited to this. In this disclosure, deriving the motion path based on predetermined conditions may also not include: simulating and deriving the motion path OP based on whether the robot hand 11 has a holding plate W.

[0063] Furthermore, in the above embodiments, an example is shown where deriving the motion path OP based on predetermined conditions includes simulating and deriving the motion path OP when the outline of the configuration area 20 deviates from the minimum threshold Ga of the set gap G by arranging a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. However, this disclosure is not limited to this. In this disclosure, deriving the motion path OP based on predetermined conditions may also not include simulating and deriving the motion path OP when the outline of the configuration area 20 deviates from the minimum threshold Ga of the set gap G by arranging a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0064] Furthermore, in the above embodiments, an example is shown where displaying the size of the gap G on the display unit 220 includes displaying the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220. However, this disclosure is not limited to this. In this disclosure, displaying the size of the gap G on the display unit 220 may also not include displaying the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220.

[0065] Furthermore, in the above embodiments, an example is shown where displaying the size of the gap G on the display unit 220 includes: displaying the size of the smallest gap G on each of the plurality of motion paths OP in the integrated data ID in a manner corresponding to the size of the gap G on the display unit 220; however, this disclosure is not limited to this. In this disclosure, displaying the size of the gap G on the display unit 220 may also not include: displaying the size of the smallest gap G on each of the plurality of motion paths OP in the integrated data ID in a manner corresponding to the size of the gap G on the display unit 220.

[0066] Furthermore, in the above embodiments, an example is shown where displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the plurality of motion paths OP in the integrated data ID on the display unit 220; however, this disclosure is not limited to this. In this disclosure, displaying the size of the gap G on the display unit 220 may also not include displaying the size of the smallest gap G on each of the plurality of motion paths OP in the integrated data ID on the display unit 220.

[0067] Furthermore, in the above embodiments, an example is shown where displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the motion path OP in the integrated data ID on the display unit 220; however, this disclosure is not limited to this. In this disclosure, displaying the size of the gap G on the display unit 220 may also not include displaying the size of the smallest gap G on the motion path OP in the integrated data ID on the display unit 220.

[0068] Furthermore, in the above embodiments, an example is shown where the workpiece is a substrate W, the end effector is a robot hand 11, and the robot arm 12 is a horizontal multi-joint robot arm; however, this disclosure is not limited to this. In this disclosure, the workpiece may also be an object other than the substrate W, the end effector may also be an object other than the robot hand 11, and the robot arm 12 may also be an object other than a horizontal multi-joint robot arm.

[0069] Furthermore, in the above embodiments, an example is shown where the configuration region 20 includes a substrate transport chamber 21 for transporting the substrate W, and a substrate placement portion 22 adjacent to the substrate transport chamber 21 and for placing the substrate W; however, this disclosure is not limited to this. Alternatively, the configuration region 20 may include the substrate transport chamber 21 for transporting the substrate W, but may not include the substrate placement portion 22 adjacent to the substrate transport chamber 21 and for placing the substrate W.

[0070] The functions of the elements disclosed in this specification can be performed using circuitry or processing circuitry comprising a general-purpose processor, a special-purpose processor, an integrated circuit, an ASIC (Application Specific Integrated Circuit), existing circuitry, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor includes transistors and other circuitry, and is therefore considered a processing circuit or circuit. In this disclosure, a circuit, unit, or mechanism is hardware that performs or is programmed to perform the listed functions. The hardware may also be the hardware disclosed in this specification, or it may be other known hardware programmed or configured to perform the listed functions. Where the hardware is considered a processor that is a circuit, the circuit, mechanism, or unit is a combination of hardware and software used in the configuration of the hardware and / or the processor.

[0071] [Way]

[0072] Those skilled in the art will understand that the above exemplary embodiments are specific examples of the following methods.

[0073] (Method 1)

[0074] A method for generating a robot motion path includes the following steps: simulating and deriving the motion path of a robot comprising an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, in a configuration area where the robot and the workpiece are configured, based on predetermined conditions; and displaying a virtual image including the robot, the configuration area, and the workpiece on a display unit based on integrated data, and displaying the size of the gap between at least one of the robot and the workpiece on the motion path and the configuration area in the integrated data on the display unit, wherein the integrated data is obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) used to derive the motion path.

[0075] (Method 2)

[0076] In the robot motion path generation method described in Method 1, displaying the size of the gap on the display unit includes: displaying the smallest gap size on the motion path in the integrated data on the display unit.

[0077] (Method 3)

[0078] In the robot motion path generation method described in Method 2, deriving the motion path based on the aforementioned conditions includes: deriving multiple motion paths based on the aforementioned conditions, and displaying the size of the gap on the display unit includes: displaying the size of the smallest gap on each of the multiple motion paths in the integrated data on the display unit.

[0079] (Method 4)

[0080] In the robot motion path generation method described in Method 3, displaying the size of the gap on the display unit includes: displaying the smallest gap size on each of the plurality of motion paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

[0081] (Method 5)

[0082] In the robot motion path generation method described in any one of methods 1 to 4, the configuration area includes an obstacle that becomes an obstacle when the robot moves, and displaying the size of the gap on the display unit includes: displaying the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the obstacle that is a component of the configuration area on the display unit.

[0083] (Method 6)

[0084] In any of the methods 1 to 5, the robot motion path generation method includes the following steps: setting a minimum threshold of the gap as a condition specified above, and deriving the motion path based on the specified condition includes: configuring virtual obstacles in the virtual image displayed on the display unit, thereby offsetting the outline of the configured area by the amount of the minimum threshold of the gap set above, and in this state, simulating the motion path and deriving the motion path.

[0085] (Method 7)

[0086] In any of the methods 1 to 6, the robot motion path generation method includes the following steps: setting whether the end effector holds the workpiece as a condition specified above, and deriving the motion path based on the specified conditions, including: simulating the motion path and deriving the motion path based on whether the end effector holds the workpiece as set above.

[0087] (Method 8)

[0088] In any of the robot motion path generation methods described in methods 1 to 7, the workpiece is a substrate, the end effector is a robot hand, the robot arm is a horizontal multi-joint robot, and the configuration area includes: a substrate transport chamber for transporting the substrate; and a substrate mounting section connected to the substrate transport chamber and for mounting the substrate.

[0089] (Method 9)

[0090] A robot motion path generation apparatus includes a display unit and a control unit. Based on predetermined conditions, the apparatus simulates and derives the motion path of a robot, comprising an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, in a configuration area where the robot and the workpiece are arranged. Furthermore, based on integrated data, the apparatus displays a virtual image of the robot, the configuration area, and the workpiece on the display unit, and displays the size of the gap between at least one of the robot and the workpiece on the motion path and the configuration area in the integrated data on the display unit. The integrated data is obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) used to derive the motion path.

Claims

1. A method for generating motion paths for a robot, characterized in that, The following steps are required: Based on the specified conditions, the motion path of a robot, including an end effector holding a workpiece and a robot arm consisting of a robot arm with the end effector mounted on it and multiple links connected to each other, is simulated and the motion path is derived in a configuration area where the robot and the workpiece are configured. as well as Based on the integrated data, a virtual image including the robot, the configuration area, and the workpiece is displayed on the display unit, and the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the configuration area is displayed on the display unit, wherein... The integrated data is obtained by integrating robot CAD data (which serves as computer-aided design data for the robot), configuration area CAD data (which serves as computer-aided design data for the configuration area), and workpiece CAD data (which serves as computer-aided design data for the workpiece) used to export the motion path.

2. The robot motion path generation method according to claim 1, characterized in that, Displaying the size of the gap on the display unit includes: displaying the smallest gap size on the motion path in the integrated data on the display unit.

3. The robot motion path generation method according to claim 2, characterized in that, Deriving the action path based on the specified conditions includes: deriving multiple action paths based on the specified conditions. Displaying the size of the gap on the display unit includes displaying the smallest gap size on each of the plurality of motion paths in the integrated data on the display unit.

4. The robot motion path generation method according to claim 3, characterized in that, Displaying the size of the gap on the display unit includes: displaying the smallest gap size on each of the plurality of motion paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

5. The robot motion path generation method according to claim 1, characterized in that, The configuration area includes obstacles that would hinder the robot's movements. Displaying the size of the gap on the display unit includes displaying the size of the gap between at least one of the robot and the workpiece on the motion path in the integrated data and the obstacle that is part of the configuration area on the display unit.

6. The robot motion path generation method according to claim 1, characterized in that, The procedure includes the following steps: setting a minimum threshold for the gap as a condition specified above. Deriving the motion path based on the specified conditions includes: configuring virtual obstacles in the virtual image displayed on the display unit, thereby offsetting the outline of the configured area by the amount of the minimum threshold of the gap set, and in this state, simulating the motion path and deriving the motion path.

7. The method for generating a robot's motion path according to claim 1, characterized in that, The procedure includes the following steps: setting whether the end effector retains the workpiece under the specified conditions. Deriving the motion path based on the specified conditions includes: simulating and deriving the motion path based on whether the end effector holds the workpiece.

8. The method for generating motion paths for a robot according to claim 1, characterized in that, The workpiece is a substrate. The end effector is a robotic hand. The robotic arm is a horizontal, multi-jointed robot. The configuration area includes: a substrate transport chamber for transporting the substrate; and a substrate placement section connected to the substrate transport chamber and for placing the substrate.

9. A robot motion path generation device, characterized in that, have: Display unit; and The control unit, based on predetermined conditions, simulates and derives the motion path of a robot, including an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, in a configuration area where the robot and the workpiece are configured. Furthermore, based on integrated data, it displays a virtual image of the robot, the configuration area, and the workpiece on a display unit, and displays the size of the gap between at least one of the robot and the workpiece on the motion path and the configuration area in the integrated data on the display unit. The integrated data is obtained by integrating robot CAD data (computer-aided design data for the robot), configuration area CAD data (computer-aided design data for the configuration area), and workpiece CAD data (computer-aided design data for the workpiece) used to derive the motion path.

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